1259293 九、發明說明· 【發明所屬之技術領域】 斗寸別是指一種可調整 本發明是有關於一種反射鏡片 面形的反射鏡片。 【先前技術】 -般常見的反射鏡片往往f要依照光機模組（。州⑶I m0dule)的使用規格而定，例如，當一光機模組的光學幾何 設計須配合使用-個呈凸面狀的反射鏡片日寺，那麼於前述 的光機模組中，則須搭配使用面形呈凸面狀且曲率可符合 錢模組❹規格的反射鏡片，才可避免於光機組裝㈣ 釭中，因反射鏡片無法配合光機模組的光學幾何設計而造 成逑光（stray light)現象。 參閱圖1，習知一種反射鏡片1，包含：一基板n、一 疊置於該基板11且厚度約為9〇 _並由三氧化二鋁（Ah〇3) 所製成的緩衝膜12、一疊置於該緩衝膜12的金屬反射膜 13及一®置於該金屬反射膜13的增反射膜14。 雖然習知此種反射鏡片1中所使用的三氧化二鋁本身 應力特性疋呈現張應力（tension stress)狀態，且其所構 成的緩衝膜12是呈現凹面狀的面形。但在該反射鏡片i中 、爰衝膜12的厚度尚不足以構成凹面狀的面形，致使最 、’’ς於该增反射膜14所形成的面形是趨近平坦化的平面。因 此’不論是光機模組的光學幾何設計須配合使用呈凸面狀 亦或是呈凹面狀的反射鏡片時，該反射鏡片1之面形的曲 率規袼皆無法符合要求。 1259293 雖」藉ώ ,亥增反射μ i 4戶斤使用的材質可加以調整該反 射鏡片1的㈣’但是該增反射膜14於製作過程中，亦須 考慮不同膜層材料之間其本身的拉張應力與壓縮應力 (:〇nipressiQn stress)之應力匹配度，才可避免鍍膜因累 矛貝過夕應力而產生膜裂的現象，因此，該增反射膜Η最終 對β反射鏡片1的面形（凸面或凹面）貢獻度亦有限，且此 種方法亦須考慮到該增反射膜14是否影響到該反射鏡片（ 的分光特性。1259293 IX. INSTRUCTIONS OF THE INVENTION · TECHNICAL FIELD OF THE INVENTION The invention relates to a reflective lens having a reflective lens surface shape. [Prior Art] - Commonly used reflective lenses are often determined according to the specifications of the optomechanical module (.3), for example, when the optical geometry of a optomechanical module is used together - a convex shape The reflection lens of the Japanese temple, then in the above-mentioned optomechanical module, it must be used in conjunction with the reflective lens with a convex shape and a curvature that can meet the specifications of the money module, in order to avoid the assembly of the optical machine (4) Reflective lenses do not match the optical geometry of the optomechanical module to cause stray light. Referring to FIG. 1, a reflective lens 1 includes a substrate n, a buffer film 12 stacked on the substrate 11 and having a thickness of about 9 Å and made of aluminum oxide (Ah〇3). A metal reflective film 13 placed on the buffer film 12 and a reflection-enhancing film 14 placed on the metal reflective film 13 are stacked. Although the stress characteristics of the aluminum oxide itself used in such a reflecting mirror 1 are in a state of a tensile stress, the buffer film 12 which is formed is a concave surface. However, in the reflecting mirror i, the thickness of the buffer film 12 is not sufficient to constitute a concave surface shape, so that the surface shape formed by the antireflection film 14 is the flat surface that is flattened. Therefore, no matter whether the optical geometric design of the optomechanical module is to be used in the form of a convex or concave reflecting mirror, the curvature of the surface of the reflecting mirror 1 cannot meet the requirements. 1259293 Although "borrowing, the material used in the reflection of μi 4 jin can be adjusted (4) of the reflective lens 1 but the antireflection film 14 must also consider the different materials between the layers during the manufacturing process. The stress matching degree between the tensile stress and the compressive stress (: 〇nipressiQn stress) can avoid the phenomenon that the coating film is cracked due to the stress of the snails. Therefore, the surface of the antireflection film is finally applied to the surface of the beta reflecting lens 1. The contribution of the shape (convex or concave) is also limited, and such a method must also take into account whether the anti-reflection film 14 affects the spectroscopic characteristics of the reflective lens.
★此外，於製作過程中，雖然亦可藉由減少因該增反射 膜14之高、低折射材料兩者之間的應力差所構成的應力累 %里以(V低膜衣的現象，然而’由於高、低折射材料兩者 之間的應力已相互抵消’因此，該增反射膜14最終對該反 射鏡片1的面形貢獻度也顯著不足。 另’㈣81 2 ’在形成該緩衝膜12之前，亦可先對該 基板11料研磨加工以在該基板11上提供-呈凹面狀或 一呈凸面狀的上表面1U(圖2中是以凹面狀表示之），致使 :後所完成的增反射膜14呈一凹面狀或一凸面狀。然而， 丽述經研磨加1的方法雖可對最終的增反㈣^提供呈凸 面狀或凹面狀的上表面lu’但最終所取得的面形亦明顯不 足’因此’亦無法符合錢模組的幾何設計之使用需求。 由前所述，在不影響反射鏡片最終的分光特性之下， 亦：使得所製得的反射鏡片之面形得以符合光機模組於幾 何設計上的要求，則是#前開發反射鏡片相關 有待解決的問題之一。 、At 6 1259293 【發明内容】 口此，本發明之目的，即在提供一種可調整面形的反 射鏡片’特別是指一種不影響反射鏡片最終的分光特性， 亦可使得所製得的反射鏡片之面形得以符合光機模組於幾 何設計上的要求之可調整面形的反射鏡片。 於是，本發明可調整面形的反射鏡片，包含：一基板 、一疊置於該基板的應力調整膜，及一疊置於該應力調整 膜的反射膜。該應力調整膜具有一呈凸面狀及呈凹面狀其 中者的面形，其中，藉該應力調整膜以調整該反射膜的 面形。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之三個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内谷中，類似的元件是以相同的編號來表示。 實施例，包含：一基板2、 3、一疊置於該應力調整膜 反射膜4的增反射膜5。該 呈凹面狀其中一者的面形， 參閱圖3,本發明可調整面形的反射鏡片之一第一較佳 一疊置於該基板2的應力調整膜★ In addition, during the manufacturing process, it is also possible to reduce the stress caused by the stress difference between the high and low refractive materials of the antireflection film 14 (V low film coating phenomenon, however 'Because the stress between the high and low refractive materials has canceled each other', the contribution of the antireflection film 14 to the surface shape of the reflective lens 1 is also significantly insufficient. Another '(4) 81 2 ' is formed in the buffer film 12 Previously, the substrate 11 may be first ground to provide a concave surface or a convex upper surface 1U on the substrate 11 (shown in a concave shape in FIG. 2), so that: The reflection-enhancing film 14 has a concave shape or a convex shape. However, the method of grinding and adding 1 can provide a convex or concave upper surface lu' to the final anti-reflection (4). The shape is also obviously insufficient, so it can not meet the needs of the geometric design of the money module. As mentioned above, without affecting the final spectral characteristics of the reflective lens, the surface shape of the prepared reflective lens can also be obtained. Comply with the geometric design of the optomechanical module Therefore, it is one of the problems to be solved before the development of the reflective lens. At 6 1259293 [Invention] The object of the present invention is to provide an adjustable surface-shaped reflective lens, especially one that does not Affecting the final spectral characteristics of the reflective lens, the shape of the prepared reflective lens can be adjusted to conform to the geometric design of the optical module to adjust the shape of the reflective lens. Thus, the present invention can adjust the surface shape The reflective lens comprises: a substrate, a stack of stress adjusting films disposed on the substrate, and a reflective film disposed on the stress adjusting film. The stress adjusting film has a convex shape and a concave shape. The stress adjustment film is used to adjust the surface shape of the reflective film. [Embodiment] The foregoing and other technical contents, features and effects of the present invention are described in detail below with reference to three preferred embodiments of the reference drawings. In the description, it will be clearly presented. Before the present invention is described in detail, it is noted that in the following description, similar elements are numbered the same. The embodiment includes: a substrate 2, 3, a stack of antireflection films 5 placed on the stress-adjusting film reflection film 4. The surface shape of one of the concave shapes, see FIG. 3, the adjustable surface of the present invention One of the first reflecting mirrors is preferably placed on the stress adjusting film of the substrate 2
1259293 整膜3以調整該反射膜4的面形。 該基板2具有一與該應力調整膜3之面形相對應且呈 凸面狀及呈凹面狀其中一者的曲面21，另，每一增反射膜 5具有相互堆疊的一高折射層51及一低折射層52。 更佳地，適合於本發明該應力調整膜3的平均厚度是 至少大於180 nm，藉該應力調整膜3本身的應力特性，致 使本發明之應力調整膜3於最終所累積的平均厚度可具備 有恰當的曲率之面形並符合光機模組於幾何設計上的使用 規格。 適用於本發明該第一較佳實施例之應力調整膜3是一 選自於下列所構成之群組··二氧化矽（以⑴）及硫化鋅（ZnS) ;而適用於本發明該反射膜4是一選自於下列所構成之群 組··銀（Ag)及鋁（A1);另，適用於本發明之高折射層51是 一選自於下列所構成之群組：二氧化鈦（Ti〇2)、硫化辞 (ZnS)及五氧化二鈕（Ta2〇s)，且適用於本發明之低折射層μ 疋一遥自於下列所構成之群組··二氧化矽（si〇〇及氟化鎂 (MgF〗）。 在該第一較佳實施例中，該應力調整膜3具有一呈凸 面狀的面形且平均厚度為190 rnn的二氧化矽；該基板2的 曲面21 &主與該應力調整膜3之面形相對應的凸面狀；該 反射膜4是厚度為i860 rnn的銀，該等高折射層51及低折 射層52分別是二氧化鈦（Ti〇2)及二氧化矽（si〇2),其中， 該等高折射層51及低折射層52的平均總累積厚度為35〇 nm ° 8 1259293 / 附件，由本發明該第—較佳實例之三維表面形 貌圖顯^，該第—較佳實施例可調整面㈣反射鏡片之最 終㈣是呈現出明顯的凸面狀。再者，參閱圖4，由本發明 垓第車“土只施例之高度曲線圖顯示，該第一較佳實施例 :最高點：最低點分別為+0.25 μη及―。.25 _，因此，該 第、車乂 <土只％例的峰谷值（Peak—t〇-valley ’簡稱PV值） 約為 0. 5 μπ]。 另，本發明可調整面形的反射鏡片之一第二較佳實施 例，大致上是與該第一較佳實施例相同，其不同處僅在於 將圖3之應力调整膜3的平均厚度改為糊·。 芩閱附件二，由本發明該第二較佳實例之三維表面形 貌圖顯示，該第-土麻^ , 乂弟一車乂佺貫施例可調整面形的反射鏡片之最 終面形是呈現出明顯的凸面狀。另，參閱圖5,由本發明該 弟-較佳實施例之高度曲線圖顯示，該第二較佳實施例的 取南點及最低點分別為+〇.35() _及邊仍卿，因此，該 =二較佳實施例的PV值（約為〇·825 是大於該第一較佳 貫施例。 — >閱目6 ’本發明可調整面形的反射鏡片之一第三較佳 貝施例，大致上是與該第二較佳實施例相同。其不同處僅 在於4應力㈣膜3具有_呈凹面狀的面形；該基板2 的曲面21疋主與該應力調整膜3之面形相對應的凹面狀。 適用於本赉明该第二較佳實施例的應力一 選自於下列所構成之群組·· 1化心⑷ ^ 3疋 _ 一虱化鈦（Τι〇2)、五氧化三鈦 ()&化鎂(MgF2)、=氧化二鋁(αι2〇3)、氧化鎂(Mg0) 9 ^259293 氧化一钽（Ta2〇5)及二氧化錯（ζΓ〇2)。在該第三較佳實施 例中’該應力調整膜3是二氧化鈦。 《1附件一，由本發明該第三較佳實例之三維表面形 =*圖顯不，該第三較佳實施例可調整面形的反射鏡片之最 終面形是呈現出明顯的凹面狀。3，配合參閱®] 7，由本發 明5亥=二較佳實施例之高度曲線圖顯示，該第三較佳實施 」的最回點及最低點分別為+〇· 25〇 _及-〇· _，推算 得該第三較佳實施例的PV值約為0.525 本务明之各較佳實施例的膜層結構及ρν值，簡單地整 理於下列表1 ·中。 _Si〇2/19見 ~~~18Ϊ01259293 The film 3 is formed to adjust the surface shape of the reflection film 4. The substrate 2 has a curved surface 21 corresponding to the surface shape of the stress adjustment film 3 and having a convex shape and a concave shape. Further, each of the anti-reflection films 5 has a high refractive layer 51 and a low layer stacked on each other. Refraction layer 52. More preferably, the average thickness of the stress-adjusting film 3 suitable for the present invention is at least greater than 180 nm, by which the stress characteristics of the film 3 itself are adjusted, so that the stress-adjusting film 3 of the present invention can have an average thickness accumulated at the end. It has the correct curvature and conforms to the specifications of the optomechanical module. The stress-adjusting film 3 suitable for use in the first preferred embodiment of the present invention is selected from the group consisting of cerium oxide (as (1)) and zinc sulfide (ZnS); and is suitable for use in the present invention. The film 4 is a group selected from the group consisting of silver (Ag) and aluminum (A1); and the high refractive layer 51 suitable for use in the present invention is a group selected from the group consisting of titanium dioxide ( Ti〇2), sulfided (ZnS) and pentoxide (Ta2〇s), and is suitable for the low-refractive layer of the present invention, which is a group of the following: 〇 and magnesium fluoride (MgF). In the first preferred embodiment, the stress-adjusting film 3 has a convex surface shape and an average thickness of 190 rnn of cerium; the curved surface 21 of the substrate 2 & main convex shape corresponding to the surface shape of the stress adjustment film 3; the reflective film 4 is silver having a thickness of i860 rnn, and the high refractive layer 51 and the low refractive layer 52 are titanium dioxide (Ti〇2) and Cerium oxide (si〇2), wherein the average total cumulative thickness of the high refractive layer 51 and the low refractive layer 52 is 35〇nm ° 8 1259293 / accessory, The three-dimensional surface topography of the first preferred embodiment of the invention is shown in the fourth embodiment. The final (four) of the adjustable surface (four) reflective lens exhibits a distinct convex shape. Further, referring to Fig. 4, by the present invention The height curve of the first vehicle embodiment shows that the first preferred embodiment: the highest point: the lowest point is +0.25 μη and ―.25 _, therefore, the first, the rut < soil only% The peak-to-valley value of the example (Peak-t〇-valley 'PV value) is about 0.5 μπ]. In addition, the second preferred embodiment of the reflective lens of the present invention can be adjusted, which is substantially the same as The first preferred embodiment is the same except that the average thickness of the stress adjustment film 3 of FIG. 3 is changed to paste. Referring to the second embodiment, the three-dimensional surface topography of the second preferred embodiment of the present invention is shown. The final surface shape of the reflective lens of the adjustable surface shape of the first-soil-dye, the scorpion, is a convex shape. Referring to Figure 5, the preferred embodiment of the present invention The height curve shows that the south point and the lowest point of the second preferred embodiment are respectively +〇.35() _ The edge value is still clear, therefore, the PV value of the second preferred embodiment (about 〇·825 is greater than the first preferred embodiment.) - > reading 6 'The reflective lens of the adjustable face shape of the present invention A third preferred embodiment is substantially the same as the second preferred embodiment. The difference is only that the four stress (four) film 3 has a concave shape; the curved surface of the substrate 2 is The surface of the stress-adjusting film 3 has a concave shape. The stress applied to the second preferred embodiment of the present invention is selected from the group consisting of the following: (1) (3) ^ 3疋Titanium (Τι〇2), trititanium pentoxide () & magnesium (MgF2), = aluminum oxide (αι2〇3), magnesium oxide (Mg0) 9 ^ 259293 oxidation of tantalum (Ta2〇5) and dioxide Wrong (ζΓ〇2). In the third preferred embodiment, the stress-adjusting film 3 is titanium dioxide. In the first aspect of the present invention, the three-dimensional surface shape of the third preferred embodiment of the present invention is not shown. The final surface shape of the reshaping lens of the third preferred embodiment exhibits a substantially concave shape. 3, with reference to ®] 7, from the height chart of the fifth embodiment of the present invention, the last and lowest points of the third preferred embodiment are respectively +〇·25〇_ and -〇· The film structure and the ρν value of the preferred embodiment of the present invention are estimated to be approximately 0.525. _Si〇2/19 see ~~~18Ϊ0
_Si〇2/330 Ti〇2/33Q 本發明並非利用調整增反射膜5的厚度，而是賴 7调整膜3本身的應力特性並配合光機模組於幾何設詞 上的要求’規劃出各較伟每 貝如例之應力調整膜3的平均肩 =主使本&明之各較佳貫施例之應力調整膜3於最終戶/ 均厚度可具備有恰當曲率之面形及PV值，進而名 :取終的分光特性下亦可符合光機模 的曲率規格。 反射=?，本發明可調整面形的反射鏡片不但不景" 面开二先特性’亦可使得所製得的反射鏡片之 付5光機模Μ於幾何設計上的要求，確實達到, 10 1259293 發明之目的。 • 惟以上所述者，僅為本發明之較佳實施例而已，當不 - 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一剖視示意圖，說明習知一種反射鏡片； _ 圖2是一剖視示意圖，說明習知另一種反射鏡片； 圖3是一剖視示意圖，說明本發明可調整面形的反射 鏡片之一第一較佳實施例； 圖4是該第一較佳實施例之高度曲線圖； 圖5是本發明一第二較佳實施例之高度曲線圖； 圖6疋一剖視示意圖，說明本發明可調整面形的反射 鏡片之一第三較佳實施例；及 圖7是該第三較佺實施例之高度曲線圖。_Si〇2/330 Ti〇2/33Q The present invention does not utilize the thickness of the antireflection film 5, but adjusts the stress characteristics of the film 3 itself and meets the requirements of the optical module in geometric design. The average shoulder of the stress-adjusting film 3, such as the above, is the same as that of the preferred embodiment. The stress-adjusting film 3 of the preferred embodiment can have a face shape with a proper curvature and a PV value. Further name: the final spectroscopic characteristics can also meet the curvature specifications of the optical model. Reflex=?, the reflective lens of the adjustable face shape of the invention not only has a "beauty", but also makes the requirements of the geometrical design of the manufactured reflective lens of the reflective lens indeed achieved. 10 1259293 Purpose of the invention. The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the practice of the present invention, that is, the simple equivalent change of the scope of the invention and the description of the invention. And modifications are still within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a conventional reflective lens; FIG. 2 is a schematic cross-sectional view showing another reflective lens; FIG. 3 is a cross-sectional view showing the present invention. Figure 1 is a height diagram of the first preferred embodiment; Figure 5 is a height diagram of a second preferred embodiment of the present invention; Figure 6 is a height diagram of a second preferred embodiment of the present invention; A cross-sectional view showing a third preferred embodiment of the adjustable face mirror of the present invention; and FIG. 7 is a height diagram of the third comparative embodiment.
I 附件一：本發明該第一較佳實例之三維表面形貌圖。 附件二：本發明言亥第二較佳實例之三維表面形貌圖。 附件三：本發明該第三較佳實例之三維表面形貌圖。 11 1259293 【主要元件符號說明】 2… ……基板 5"♦… …··增反射膜 2 1 … *曲面 51 ·… ……南折射層 3…… ……應力調整膜 52 ‘… ……低折射層 ……反射膜I Annex I: Three-dimensional surface topography of the first preferred embodiment of the present invention. Annex 2: Three-dimensional surface topography of the second preferred embodiment of the invention. Annex 3: A three-dimensional surface topography of the third preferred embodiment of the present invention. 11 1259293 [Description of main component symbols] 2... ......substrate 5"♦...···reflective film 2 1 ... *surface 51 ·... ...... south refraction layer 3... stress adjustment film 52 '... ...... low Refractive layer
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