TWI256720B - Semiconductor wafer identification - Google Patents

Semiconductor wafer identification

Info

Publication number
TWI256720B
TWI256720B TW091122347A TW91122347A TWI256720B TW I256720 B TWI256720 B TW I256720B TW 091122347 A TW091122347 A TW 091122347A TW 91122347 A TW91122347 A TW 91122347A TW I256720 B TWI256720 B TW I256720B
Authority
TW
Taiwan
Prior art keywords
semiconductor wafer
wafer identification
information
reading
identification
Prior art date
Application number
TW091122347A
Other languages
English (en)
Inventor
Karl Mautz
Jason Zeakes
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Application granted granted Critical
Publication of TWI256720B publication Critical patent/TWI256720B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/06187—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with magnetically detectable marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW091122347A 2001-09-28 2002-09-27 Semiconductor wafer identification TWI256720B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/966,046 US6759248B2 (en) 2001-09-28 2001-09-28 Semiconductor wafer identification

Publications (1)

Publication Number Publication Date
TWI256720B true TWI256720B (en) 2006-06-11

Family

ID=25510852

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091122347A TWI256720B (en) 2001-09-28 2002-09-27 Semiconductor wafer identification

Country Status (7)

Country Link
US (1) US6759248B2 (zh)
EP (1) EP1449162A2 (zh)
JP (1) JP4421294B2 (zh)
KR (1) KR20040050068A (zh)
AU (1) AU2002333613A1 (zh)
TW (1) TWI256720B (zh)
WO (1) WO2003030081A2 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3809353B2 (ja) * 2001-08-02 2006-08-16 キヤノン株式会社 Ｉｄ付き加工物の製造方法
US20040064801A1 (en) * 2002-09-30 2004-04-01 Texas Instruments Incorporated Design techniques enabling storing of bit values which can change when the design changes
DE10325541A1 (de) * 2003-06-04 2005-01-13 Infineon Technologies Ag Elektronisches Bauteil, sowie Halbleiterwafer und Bauteilträger zur Herstellung des Bauteils
US7531907B2 (en) * 2005-04-29 2009-05-12 Hitachi Global Storage Technologies Netherlands B.V. System and method for forming serial numbers on HDD wafers
CN102769068B (zh) * 2012-05-09 2015-12-16 镇江环太硅科技有限公司 太阳能电池用多晶硅片的编码方法
US10079206B2 (en) 2016-10-27 2018-09-18 Mapper Lithography Ip B.V. Fabricating unique chips using a charged particle multi-beamlet lithography system
US10714427B2 (en) 2016-09-08 2020-07-14 Asml Netherlands B.V. Secure chips with serial numbers

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1534248A (en) * 1976-03-31 1978-11-29 Tokyo Shibaura Electric Co Apparatus for manufacturing semiconductor devices
GB1584343A (en) * 1977-06-07 1981-02-11 Tokyo Shibaura Electric Co Apparatus for marking identification symbols on wafer
CA2011296A1 (en) * 1989-05-15 1990-11-15 Douglas C. Bossen Presence/absence bar code
US6307241B1 (en) * 1995-06-07 2001-10-23 The Regents Of The Unversity Of California Integrable ferromagnets for high density storage
TW392218B (en) * 1996-12-06 2000-06-01 Toshiba Mechatronics Kk Apparatus and method for marking of identifier onto semiconductor wafer
JPH10256105A (ja) * 1997-03-11 1998-09-25 Super Silicon Kenkyusho:Kk レーザマークを付けたウェーハ
DE19733410A1 (de) * 1997-08-01 1999-02-18 Siemens Ag Wafermarkierung
JP3090113B2 (ja) * 1998-02-13 2000-09-18 日本電気株式会社 半導体装置の製造方法
US6268641B1 (en) * 1998-03-30 2001-07-31 Kabushiki Kaisha Toshiba Semiconductor wafer having identification indication and method of manufacturing the same
US6063685A (en) * 1998-08-07 2000-05-16 Advanced Micro Devices, Inc. Device level identification methodology
JP2000077312A (ja) * 1998-09-02 2000-03-14 Mitsubishi Electric Corp 半導体装置
US6197481B1 (en) * 1998-09-17 2001-03-06 Taiwan Semiconductor Manufacturing Company Wafer alignment marks protected by photoresist
WO2000024057A1 (en) * 1998-10-20 2000-04-27 Koninklijke Philips Electronics N.V. Method of manufacturing a semiconductor device in a silicon body, a surface of said silicon body being provided with a grating and an at least partially recessed oxide pattern
US6312876B1 (en) * 1999-07-08 2001-11-06 Taiwan Semiconductor Manufacturing Company Method for placing identifying mark on semiconductor wafer
US6383888B1 (en) * 2001-04-18 2002-05-07 Advanced Micro Devices, Inc. Method and apparatus for selecting wafer alignment marks based on film thickness variation

Also Published As

Publication number Publication date
AU2002333613A1 (en) 2003-04-14
WO2003030081A3 (en) 2003-08-21
WO2003030081A2 (en) 2003-04-10
US20030064531A1 (en) 2003-04-03
JP2005507158A (ja) 2005-03-10
EP1449162A2 (en) 2004-08-25
US6759248B2 (en) 2004-07-06
KR20040050068A (ko) 2004-06-14
JP4421294B2 (ja) 2010-02-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees