TWI246024B - Imaging method for scanning inspection device - Google Patents
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1246024 案號 91116787 曰 修正 五、發明說明(1) 【發明領域】 行進間取像, 接曝光,以快 景】 晶顯不板製造 下兩片玻璃板 檢測工作上必 達到檢驗標準 檢測的工作, 一種液晶顯不 ,其主要目的 動化升級。此 人電腦組成一 的自動計算系 了統計數量之 些工廠裡通常 剛開始生產的 視檢測,以調 上液晶顯不 製程上是一項 墊片計數系統 本發明係為一種掃瞄檢測裝置之取像方法,特別是指 種利用行進間取像,針對具週期性特徵待檢測物進行連 續性的間 :發明背 在液 晶,在上 空間,在 量,使其 視來從事 要。 更有 統的揭露 器工廠自 系統及個 表面微粒 方式,除 的情形。 在有 人員會對 片實施目 業。事實 晶顯不 因此微細 速判定待檢測物良莠之取像方法。 工廠中,為了在顯示板中灌入液 中必須填入微粒(p a r t i c 1 e )來預留 須計數固定區域中所包含的微粒數 。現行之方法是利用顯微鏡人工目 費時而不確實,實在有改進的必 器(LCD)板料上之微細墊片計數系 在於以機械視覺技術促進液晶顯示 系統係利用CCD攝影機、影像擷取 機械視覺自動化檢測設備,而檢測 統可用以改善目前人工計算的檢驗 外,並能偵測出微粒有無分佈不均 只有剛開始噴灑微細墊片時,工作 前面三片或四片的液晶顯示器玻璃 整喷嘴的喷出量,進而開始大量作 板料上之微細塾片之分佈情形在液 攸關液晶顯示器良率的重要步驟, 在液晶顯示器製程品管方面有舉足1246024 Case No. 91116787 Amendment V. Description of the Invention (1) [Field of the Invention] Taking images during travel, then taking exposure, and taking a quick view] The work of detecting the next two glass plates manufactured by Crystal Display does not meet the inspection standards. A liquid crystal display, whose main purpose is to upgrade dynamically. This person's computer constitutes an automatic calculation system that counts the visual inspection that is usually just started in some factories. To adjust the LCD display process is a gasket counting system. The present invention is a scanning detection device. The imaging method, in particular, refers to the use of progressive imaging to perform continuous time for the object to be detected with periodic characteristics: the invention is backed by liquid crystal, in the upper space, and in the amount, which makes it important. More systematic disclosure of the factory's own system and the way of surface particles, except the situation. There are people who will implement the purpose of the film. In fact, Jingxian is not a fine and fast method to determine the image quality of the object to be detected. In the factory, in order to fill the liquid in the display panel, particles must be filled (p a r t i c 1 e) to reserve. The number of particles contained in the fixed area must be counted. The current method is to use a microscope to manually and time-consuming and is not sure. There is an improvement in the number of fine pads on the LCD panel. It is to promote the liquid crystal display system by using mechanical vision technology. CCD cameras, image capture and mechanical vision are used. Automatic detection equipment, and the detection system can be used to improve the current manual calculation of the inspection, and can detect the uneven distribution of particles. Only when the micro-gasket is just sprayed, three or four pieces of liquid crystal display glass nozzles in front of the work. The amount of ejection, and then began to make a large number of fine cymbals on the sheet. The distribution of liquid crystal is an important step for the yield of the liquid crystal display, and it has a role in the quality control of the liquid crystal display.
第5頁 1246024 案號 91116787 曰 修止 五、發明說明(2) 輕重的重要性。 然而,針對外來異物的檢測一般利用影像擷取系統擷 取LCD片之微粒影像,通常是採用靜態取像或行進間取 像’再經由曝光後取得清晰影像以進行檢測,但是,行進 間取像由於曝光不足’檢測時間無法提升、以及LCD自發 光之曝光強度不足,造成行進間取像之限制,檢測的工作 便會變得沒有效率,或者必須提供高解析度的影像擷取系 統,再配合軟體的高速計算方能達到檢測的效果,因此, 如果能提出一種快速判定待檢測物良筹之取像方 目田檢測裝置而言,便成為—被關注的議題。 【發明之概述及目的】 本發明之主要目的是揭露一種掃瞒檢測 f,主要是針對-具規律性的待檢測物,透=—之取像方 像,如 progressive scan、Une 行進間取 間接曝光,藉由其拖曳(重疊)的影像擷 '行連續性的 (2z/zy)的影像,以取其重疊影像中的相對差產生其模糊 判疋待檢測物良莠之依據,打破、異作為快速 以短快門控制以避免重疊曝光之迷甲、。丁 s取像掃瞄必需 本發明之次要目的是善用重^光之 有關本發明之詳細内交芬 r菸日日十w 谷及技術’兹就配合圖々〜 【發明之詳細說明】 _式說 進距離等於待測物特徵週期之整數件,進:象,使曝光行 突顯出來。 七進而使異常之特徵 明如下 所謂行進間取傻,# η ^ ^ 适』取像,就疋非交錯掃瞄(N〇nPage 5 1246024 Case No. 91116787 Said Xiuzhi 5. Description of the invention (2) The importance of the importance. However, for the detection of foreign objects, an image capture system is usually used to capture the particle images of the LCD film. Usually, static imaging or progressive imaging is used to obtain a clear image for detection after exposure. However, progressive imaging Due to the lack of exposure, the detection time cannot be improved, and the exposure intensity of the LCD's self-lighting is insufficient, which results in the restriction of image acquisition during travel. The detection will become inefficient, or a high-resolution image capture system must be provided. The high-speed calculation of the software can achieve the detection effect. Therefore, if an image-side detection device that can quickly determine the goodness of the object to be detected is proposed, it will become an issue of concern. [Summary and purpose of the invention] The main purpose of the present invention is to disclose a concealment detection f, which is mainly aimed at the objects to be detected with regularity, transparent =-to take the image of the image, such as progressive scan, unnecessary indirect Exposure, using its drag (overlapping) image to capture 'continuous (2z / zy)' images, to take the relative difference in its overlapping image to generate its fuzzy basis for judging the goodness of the test object, breaking As a quick shot with short shutter control to avoid overlapping exposures. The image acquisition and scanning is necessary. The secondary purpose of the present invention is to make good use of the detailed introductory information of the present invention. The detailed information and technology of the present invention will be used in conjunction with the drawings. [Detailed description of the invention] The _ formula says that the advance distance is equal to an integer of the characteristic period of the object to be measured, advance: image, so that the exposure line is highlighted. Seventh, the characteristics of the anomaly are described as follows: The so-called take silly during the travel, # η ^ ^ is appropriate to take the image, then non-interlaced scanning (N〇n
第6頁 1246024 修止 在 案號 9111R7»7 、發明說明(3) nterlace), 也獾糸他产上夺 僻馬循序掃瞄(直接掃瞄),它的特性主要 於一次就把一替彳jil争^ & 5面如瞄完,畫面的視訊線條係以連 式寫到螢幕上,m lL w . ^ ^ . , ^ _ 續的方式寫到榮幕:二掃猫完,畫面的視訊線!係以連 7 . 奉上 因此是以垂直範圍的電子束寫成整 個晝面。而不像傳轉沾 式掃…又稱電視或掃瞒檢測都是採用交錯 畫面的方式處㉟,:t:;亦即以兩圖場交錯蟹合成-個 六 *以早數卜3、5、7、9· ··,雙數2、4、 、酋從+··又錯式掃目苗’再由2個圖框組合成1個畫面,常會 導致畫面閃爍。 曰 打破ί發日!:!提出之掃瞄檢測裝置之取像方法,主要在於 订 0取像作為檢測時,如progressive scan、 以1man>等,必須要求所擁取之影像必須清晰的迷思, β +光時間避免重疊曝光造成之拖曳現象。 接彳妓^ I圖為本發明之掃瞄檢測裝置之取像流程圖,首先 ,接著影像擷取裝置以進行行進間取像(步驟ι〇0) 、車綠 、待測物進行重疊的影像擷取(步驟1 10 ),並以 12〇\ ^ ^接曝光並產生模糊(fUZZy)之重疊影像(步驟 測物良影像中的相對差異作為快速判定待檢 影像係打破僂3〇)。其中上述模糊(fUZZy)之重疊 免重疊曝井”夕/丁進間取像掃瞄必需以短快門控制以"避 重疊曝i,口产運思用,/因在於,行進間取像都必須面對 制,更進-=ίI法可以免去清晰影像之條件限 乂利用曝光距離的控制突顯異常。 物,施例係以lcd面板檢測作為標的測試 1246024 _案號91116787_年月曰 修正_ 五、發明說明(4) 待測物之原始影像圖,如圖所示,該原始影像之第7列為 一正常列,第9列出現一異常特徵影像點;第2A圖為第一 待測物之原始影像正常列之亮度統計圖,此圖表示原始影 像之第7列為一正常列;第2 B圖為第一待測物之原始影像 異常列之亮度統計圖,此圖表示原始影像之第9列為一異 常列。 第3圖為第一待測物之掃瞄影像之條紋影像圖,同樣 如圖所示,該掃瞄影像之第7列為一正常列,第9列出現一 異常特徵影像點;第3 A圖為第一待測物之掃瞄影像正常列 之亮度統計圖,此圖表示掃瞄影像之第7列為一正常列, 運用本發明所提之方法,進行重疊曝光後原始影像RGB週 期特徵之振幅互相抵消而明顯減弱;第3 B圖為第一待測物 之掃瞄影像異常列之亮度統計圖,此圖表示原始影像之第 9列為一異常列,運用本發明所提之方法,異常之特徵強 度並無互相抵消,僅有均攤而稍微減弱的現象,較佳者, 若異常尺寸較曝光行進距離為大時,則僅在異常兩端減 弱,中心部分強度不變。 本發明之第二實施例亦以LCD面板檢測作為標的測試 物,說明運用本發明之取像方法的可行性,不同於第一實 施例,第二影像之重疊曝光距離較接近影像RGB之週期, 亮度較均勻,縱向條紋較不明顯,第4圖為第二待測物之 原始影像圖,如圖所示,該原始影像之第1 1列為一正常 列,第1 3列出現一異常特徵影像點;第4A圖為第二待測物 之原始影像正常列之亮度統計圖,此圖表示原始影像之第Page 6 1246024 Resolved in Case No. 9111R7 »7, Invention Description (3) nterlace), and also produced sequential scanning (direct scanning) of the secluded horse. Its characteristics are mainly to replace one at a time. jil 争 ^ & If 5 faces are finished, the video lines of the screen are written on the screen in a continuous manner, m lL w. ^ ^., ^ _ continued to the screen of honor: the second sweep of the cat is completed, the video of the screen line! The connection is 7. It is therefore written as a whole daytime surface with a vertical range of electron beams. It ’s not like spreading sweeps ... Also known as TV or concealment detection, they are processed by interlaced pictures: t :; that is, synthesized by two-field staggered crabs-a six * as early as 3, 5 , 7, 9, ···, even numbers 2, 4, and 酋 · + ··· wrong type scans seedlings' and then combine 2 frames to form a picture, which often causes the picture to flicker. "Breaking the day!": The proposed acquisition method of the scanning detection device is mainly to order 0 acquisitions for detection, such as progressive scan, 1man >, etc., must require the captured image must be clear myth , Β + light time to avoid the drag caused by overlapping exposure. The following figure shows the image capture flowchart of the scanning detection device of the present invention. First, the image capture device is used to capture images during traveling (step ι0), the vehicle green, and the image to be superimposed are superimposed. Capture (step 1 10), and use 12 ^^^^ exposure to produce a fuzzy (fUZZy) overlay image (the relative difference in the good image measured in step is used to quickly determine that the image to be inspected is broken 偻 30). The above-mentioned fuzzy (fUZZy) overlapping and overlap-free exposure wells must be controlled with a short shutter to prevent overlap exposure. It is used for production and operation, because the images must be acquired during the travel. Facing the system, more advanced-= I method can avoid the conditions of clear images and use the control of exposure distance to highlight abnormalities. Objects, examples are LCD panel detection as the target test 1246024 _Case No. 91116787_year month revision_ V. Description of the invention (4) The original image of the object to be tested. As shown in the figure, column 7 of the original image is a normal column, and an abnormal feature image point appears in column 9; Figure 2A is the first test object. The brightness statistics of the normal row of the original image of the object, this figure shows that the seventh row of the original image is a normal row; Figure 2B is the brightness statistics of the abnormal row of the original image of the first test object, this figure represents the original image The ninth column is an anomalous column. The third image is a fringe image of the scan image of the first object to be measured. As shown in the figure, the seventh column of the scan image is a normal column, and the ninth column appears An anomalous image point; Figure 3A is the scan image of the first object to be measured Like the brightness statistics chart of the normal row, this figure shows that the seventh row of the scanned image is a normal row. Using the method proposed by the present invention, the amplitudes of the RGB periodic features of the original image are mutually canceled and significantly weakened after the overlapping exposure is performed. Figure B is the brightness statistics chart of the anomalous row of the scanned image of the first test object. This figure shows that the ninth row of the original image is an anomaly row. Using the method proposed by the present invention, the feature strengths of the anomalies do not cancel each other out. There is only a phenomenon of amortization and a slight weakening. Preferably, if the abnormal size is larger than the exposure travel distance, it will only weaken at the two ends of the abnormality, and the strength of the central part will not change. The second embodiment of the present invention also uses an LCD panel to detect As the target test object, the feasibility of using the image acquisition method of the present invention is illustrated. Unlike the first embodiment, the overlapping exposure distance of the second image is closer to the period of the RGB image, the brightness is more uniform, and the vertical stripes are less obvious. The picture shows the original image of the second test object. As shown in the figure, the 11th column of the original image is a normal column, and the 13th column has an abnormal feature image point; the 4A is the second image. The brightness statistics of the normal row of the original image of the test object.
1246024 _案號91116787_年月曰 修正_ 五、發明說明(5) 1 1列為一正常列;第4B圖為第二待測物之原始影像異常列 之亮度統計圖,此圖表示原始影像之第1 3列為一異常列。 第5圖為第二待測物之掃瞄影像之條紋影像圖,同樣 如圖所示,該掃瞄影像之第1 1列為一正常列,第1 3列出現 一異常特徵影像點;第5A圖為第二待測物之掃瞄影像正常 列之亮度統計圖,運用本發明所提之方法,,進行重疊曝 光後原始影像RGB週期特徵之振幅互相抵消而明顯減弱; 第5 B圖為第二待測物之掃瞄影像異常列之亮度統計圖,此 圖表示原始影像之第1 3列為一異常列,運用本發明所提之 方法,異常之特徵強度並無互相抵消,僅有均攤而稍微減 弱的現象。 行進間取像時,CCD—邊曝光一邊前進,因此在每一 次的曝光中所感光的影像是由一串連續的視場(Field Of View; F0V)所重疊出來。如第6A圖所示,該F0V為開始曝 光的位置。在曝光尚未結束之前,如第6B圖之其它不同的 F 0 V亦都在移動的同時進行曝光。如第6 C圖,曝光的進行 是由開始曝光位置之F0V連續進行至最後結束曝光位置之 F0V為止。 利用行進間取像之曝光重疊特性,也就是『重疊的影 像擷取』,可使週期性特徵因為亮度的互相抵消而淡化。 而這些重疊的曝光之行為是在特定描瞄速度下,以曝光時 間為控制參數,在此曝光時間内,CCD進行一串連續的F0V 曝光,此為『連續性的間接曝光』 。 經由描瞄速度及曝光時間的控制可以控制週期性特徵 重疊後之特性,較佳的曝光結果是重疊曝光時的F0V變動1246024 _Case No. 91116787_ Year and month revision_ V. Description of the invention (5) The 11 column is a normal column; Figure 4B is the brightness statistics chart of the abnormal image row of the original image of the second object to be measured. This figure represents the original image The 13th column is an abnormal column. Figure 5 is a fringe image of the scan image of the second object to be tested. As shown in the figure, the 11th row of the scan image is a normal row, and the 13th row has an abnormal feature image point; Figure 5A is the brightness statistics of the normal row of the scanned image of the second DUT. Using the method of the present invention, the amplitudes of the RGB periodic features of the original image are mutually canceled and significantly weakened after overlapping exposure; Figure 5B is The brightness statistics chart of the anomalous row of the scanned image of the second object to be tested. This graph shows that the 13th row of the original image is an anomaly row. Using the method proposed by the present invention, the feature strengths of the anomalies do not cancel each other, only It is evenly weakened. When taking images during travel, the CCD—advances while exposing, so the images that are photosensitive during each exposure are superimposed by a series of continuous fields of view (FOV). As shown in Fig. 6A, this F0V is the position where the exposure starts. Before the exposure is not over, other different F 0 V as shown in FIG. 6B are also exposed while moving. As shown in Fig. 6C, the exposure progresses continuously from F0V at the start exposure position to F0V at the last end exposure position. Utilizing the exposure overlap feature of the image during traveling, that is, "overlapping image capture", the periodic characteristics can be faded because the brightness cancels each other out. And the behavior of these overlapping exposures is to use a specific exposure speed as the control parameter. During this exposure time, the CCD performs a series of continuous F0V exposures, which is "continuous indirect exposure". Through the control of the scanning speed and exposure time, the periodic characteristics can be controlled. The superimposed characteristics are better. The better exposure result is the F0V variation during the superposed exposure.
^46024 案號 91116787 五、發明說明(6) 距離剛好是待測物之週期長度的整數 期性特徵將因重複曝光之平均效果 ★彳、測物之週 I常特徵之存在。 力失也就可突顯異 f而重疊曝光時的FOV變動距離若是大於待挪 &將因重複曝光之平均效果而減弱,里功性特徵 I存在。 大顯異常特徵之 本發明所提出之實施例係以LCD面板檢測作 在ΐ方法的實現上,就影像操取的階段沒有V?1 ;光源,不可有外部光源的打光,然此:本U =供身 Ϊ =定本發明之應用範圍,如-般行進間取, 園匕3保全監測、醫療監測、半導體生產設傷^應用 積、PCB檢測、LCD面板檢測、LED亮度及 ^象檢 卜…!定待檢測物V之取二 丨1本發明之優點】 免去清晰影像之條件限制;及 第10頁 1246024 _案號91116787_年月曰 修正_ 五、發明說明(7) 2 .進一步利用曝光距離的控制突顯異常。 雖然本發明以前述之較佳實施例揭露如上,然其並非 用以限定本發明,任何熟習此技藝者,在不脫離本發明之 精神和範圍内,當可作些許之更動與潤飾,因此本發明之 保護範圍當視後附之申請專利範圍所界定者為準。^ 46024 Case No. 91116787 V. Description of the invention (6) The distance is exactly an integer of the period length of the object under test. Periodic features will be the average effect of repeated exposure. Force loss can also highlight the difference f, and if the FOV fluctuation distance during the overlap exposure is greater than the distance to be moved & will be weakened by the average effect of repeated exposure, and the feature I exists. The embodiment of the present invention with large anomalous characteristics is based on the implementation of the LCD panel detection method. There is no V? 1 in the stage of image manipulation; the light source cannot be illuminated by an external light source, but this: U = donor body = set the scope of application of the present invention, such as-take time to travel, garden 3 security monitoring, medical monitoring, semiconductor production equipment ^ application product, PCB testing, LCD panel testing, LED brightness and image inspection …! The second choice of the test object V 丨 1 Advantages of the present invention] Eliminates the conditional limitation of clear images; and page 1246024 _ Case No. 91116787 _ year and month amendment _ V. Description of the invention (7) 2. Further Use the control of exposure distance to highlight anomalies. Although the present invention is disclosed above with the foregoing preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.
第11頁 1246024 _案號91116787_年月曰 修正_ 圖式簡單說明 第1圖為本發明之掃瞄檢測裝置之取像流程圖; 第2圖為第一待測物之原始影像圖; 第2 A圖為第一待測物之原始影像正常列之亮度統計圖; 第2 B圖為第一待測物之原始影像異常列之亮度統計圖; 第3圖為第一待測物之掃瞄影像之條紋影像圖; 第3 A圖為第一待測物之掃瞄影像正常列之亮度統計圖; 第3 B圖為第一待測物之掃瞄影像異常列之亮度統計圖; 第4圖為第二待測物之原始影像圖; 第4A圖為第二待測物之原始影像正常列之亮度統計圖;Page 11 1246024 _Case No. 91116787_ Year Month Revision _ Brief Description of the Drawings Figure 1 is a flowchart of the scanning detection device of the present invention; Figure 2 is the original image of the first test object; Figure 2 A is the brightness statistics of the normal row of the original image of the first test object; Figure 2 B is the brightness statistics of the abnormal row of the original image of the first test object; Figure 3 is the scan of the first test object The fringe image of the scanned image; Figure 3A is the brightness statistics of the normal row of the scanned image of the first test object; Figure 3B is the brightness statistics of the abnormal row of the scanned image of the first test object; Figure 4 is the original image of the second test object; Figure 4A is the brightness statistics of the normal row of the original image of the second test object;
第4B圖為第二待測物之原始影像異常列之亮度統計圖; 第5圖為第二待測物之掃瞄影像之條紋影像圖; 第5A圖為第二待測物之掃瞄影像正常列之亮度統計圖; 第5B圖為第二待測物之掃瞄影像異常列之亮度統計圖;及 第6 A〜6C圖為本發明所提之重疊的影像擷取及連續性的間 接曝光之不意圖。 【符號說明】 步驟1 0 0 提供至少一個影像擷取裝置以進行行進間取 像 步驟1 10 針對待測物進行重疊的影像擷取Figure 4B is the brightness statistics of the abnormal row of the original image of the second DUT; Figure 5 is the fringe image of the scanned image of the second DUT; Figure 5A is the scanned image of the second DUT The brightness statistics chart of the normal row; Figure 5B is the brightness statistics chart of the abnormal row of the scanned image of the second object to be measured; and Figures 6A to 6C are the overlapping image acquisition and continuous indirectness mentioned in the present invention Unintended exposure. [Symbol description] Step 1 0 0 Provide at least one image capture device for capturing during travel. Step 1 10 Overlay image capture for the object to be measured.
步驟1 2 0 以連續性的間接曝光並產生模糊(f u z z y )之重 疊影像 步驟1 3 0 取其重疊影像中的相對差異作為快速判定待 檢測物良莠之依據Step 1 2 0 Use continuous indirect exposure to produce overlapping (f u z z y) overlapping images. Step 1 3 0 Use the relative differences in the overlapping images as a basis for quickly determining the goodness of the test object.
第12頁Page 12
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