TWI246024B - Imaging method for scanning inspection device - Google Patents

Abstract

The present invention provides an imaging method for scanning inspection device, which includes providing provides at least an image capturing device for performing a progressive imaging, and for performing an overlapped image capturing on the inspected object with periodical features; employing continuous indirect exposure to generate the overlapped images as fuzzy image; and finally, employing the relative difference between overlapped images as the basis for rapidly determining the quality of inspected object.

Description

1246024 Case No. 91116787 Amendment V. Description of the Invention (1) [Field of the Invention] Taking images during travel, then taking exposure, and taking a quick view] The work of detecting the next two glass plates manufactured by Crystal Display does not meet the inspection standards. A liquid crystal display, whose main purpose is to upgrade dynamically. This person's computer constitutes an automatic calculation system that counts the visual inspection that is usually just started in some factories. To adjust the LCD display process is a gasket counting system. The present invention is a scanning detection device. The imaging method, in particular, refers to the use of progressive imaging to perform continuous time for the object to be detected with periodic characteristics: the invention is backed by liquid crystal, in the upper space, and in the amount, which makes it important. More systematic disclosure of the factory's own system and the way of surface particles, except the situation. There are people who will implement the purpose of the film. In fact, Jingxian is not a fine and fast method to determine the image quality of the object to be detected. In the factory, in order to fill the liquid in the display panel, particles must be filled (p a r t i c 1 e) to reserve. The number of particles contained in the fixed area must be counted. The current method is to use a microscope to manually and time-consuming and is not sure. There is an improvement in the number of fine pads on the LCD panel. It is to promote the liquid crystal display system by using mechanical vision technology. CCD cameras, image capture and mechanical vision are used. Automatic detection equipment, and the detection system can be used to improve the current manual calculation of the inspection, and can detect the uneven distribution of particles. Only when the micro-gasket is just sprayed, three or four pieces of liquid crystal display glass nozzles in front of the work. The amount of ejection, and then began to make a large number of fine cymbals on the sheet. The distribution of liquid crystal is an important step for the yield of the liquid crystal display, and it has a role in the quality control of the liquid crystal display.

Page 5 1246024 Case No. 91116787 Said Xiuzhi 5. Description of the invention (2) The importance of the importance. However, for the detection of foreign objects, an image capture system is usually used to capture the particle images of the LCD film. Usually, static imaging or progressive imaging is used to obtain a clear image for detection after exposure. However, progressive imaging Due to the lack of exposure, the detection time cannot be improved, and the exposure intensity of the LCD's self-lighting is insufficient, which results in the restriction of image acquisition during travel. The detection will become inefficient, or a high-resolution image capture system must be provided. The high-speed calculation of the software can achieve the detection effect. Therefore, if an image-side detection device that can quickly determine the goodness of the object to be detected is proposed, it will become an issue of concern. [Summary and purpose of the invention] The main purpose of the present invention is to disclose a concealment detection f, which is mainly aimed at the objects to be detected with regularity, transparent =-to take the image of the image, such as progressive scan, unnecessary indirect Exposure, using its drag (overlapping) image to capture 'continuous (2z / zy)' images, to take the relative difference in its overlapping image to generate its fuzzy basis for judging the goodness of the test object, breaking As a quick shot with short shutter control to avoid overlapping exposures. The image acquisition and scanning is necessary. The secondary purpose of the present invention is to make good use of the detailed introductory information of the present invention. The detailed information and technology of the present invention will be used in conjunction with the drawings. [Detailed description of the invention] The _ formula says that the advance distance is equal to an integer of the characteristic period of the object to be measured, advance: image, so that the exposure line is highlighted. Seventh, the characteristics of the anomaly are described as follows: The so-called take silly during the travel, # η ^ ^ is appropriate to take the image, then non-interlaced scanning (N〇n

Page 6 1246024 Resolved in Case No. 9111R7 »7, Invention Description (3) nterlace), and also produced sequential scanning (direct scanning) of the secluded horse. Its characteristics are mainly to replace one at a time. jil 争 ^ & If 5 faces are finished, the video lines of the screen are written on the screen in a continuous manner, m lL w. ^ ^., ^ _ continued to the screen of honor: the second sweep of the cat is completed, the video of the screen line! The connection is 7. It is therefore written as a whole daytime surface with a vertical range of electron beams. It ’s not like spreading sweeps ... Also known as TV or concealment detection, they are processed by interlaced pictures: t :; that is, synthesized by two-field staggered crabs-a six * as early as 3, 5 , 7, 9, ···, even numbers 2, 4, and 酋 · + ··· wrong type scans seedlings' and then combine 2 frames to form a picture, which often causes the picture to flicker. "Breaking the day!": The proposed acquisition method of the scanning detection device is mainly to order 0 acquisitions for detection, such as progressive scan, 1man >, etc., must require the captured image must be clear myth , Β + light time to avoid the drag caused by overlapping exposure. The following figure shows the image capture flowchart of the scanning detection device of the present invention. First, the image capture device is used to capture images during traveling (step ι0), the vehicle green, and the image to be superimposed are superimposed. Capture (step 1 10), and use 12 ^^^^ exposure to produce a fuzzy (fUZZy) overlay image (the relative difference in the good image measured in step is used to quickly determine that the image to be inspected is broken 偻 30). The above-mentioned fuzzy (fUZZy) overlapping and overlap-free exposure wells must be controlled with a short shutter to prevent overlap exposure. It is used for production and operation, because the images must be acquired during the travel. Facing the system, more advanced-= I method can avoid the conditions of clear images and use the control of exposure distance to highlight abnormalities. Objects, examples are LCD panel detection as the target test 1246024 _Case No. 91116787_year month revision_ V. Description of the invention (4) The original image of the object to be tested. As shown in the figure, column 7 of the original image is a normal column, and an abnormal feature image point appears in column 9; Figure 2A is the first test object. The brightness statistics of the normal row of the original image of the object, this figure shows that the seventh row of the original image is a normal row; Figure 2B is the brightness statistics of the abnormal row of the original image of the first test object, this figure represents the original image The ninth column is an anomalous column. The third image is a fringe image of the scan image of the first object to be measured. As shown in the figure, the seventh column of the scan image is a normal column, and the ninth column appears An anomalous image point; Figure 3A is the scan image of the first object to be measured Like the brightness statistics chart of the normal row, this figure shows that the seventh row of the scanned image is a normal row. Using the method proposed by the present invention, the amplitudes of the RGB periodic features of the original image are mutually canceled and significantly weakened after the overlapping exposure is performed. Figure B is the brightness statistics chart of the anomalous row of the scanned image of the first test object. This figure shows that the ninth row of the original image is an anomaly row. Using the method proposed by the present invention, the feature strengths of the anomalies do not cancel each other out. There is only a phenomenon of amortization and a slight weakening. Preferably, if the abnormal size is larger than the exposure travel distance, it will only weaken at the two ends of the abnormality, and the strength of the central part will not change. The second embodiment of the present invention also uses an LCD panel to detect As the target test object, the feasibility of using the image acquisition method of the present invention is illustrated. Unlike the first embodiment, the overlapping exposure distance of the second image is closer to the period of the RGB image, the brightness is more uniform, and the vertical stripes are less obvious. The picture shows the original image of the second test object. As shown in the figure, the 11th column of the original image is a normal column, and the 13th column has an abnormal feature image point; the 4A is the second image. The brightness statistics of the normal row of the original image of the test object.

1246024 _Case No. 91116787_ Year and month revision_ V. Description of the invention (5) The 11 column is a normal column; Figure 4B is the brightness statistics chart of the abnormal image row of the original image of the second object to be measured. This figure represents the original image The 13th column is an abnormal column. Figure 5 is a fringe image of the scan image of the second object to be tested. As shown in the figure, the 11th row of the scan image is a normal row, and the 13th row has an abnormal feature image point; Figure 5A is the brightness statistics of the normal row of the scanned image of the second DUT. Using the method of the present invention, the amplitudes of the RGB periodic features of the original image are mutually canceled and significantly weakened after overlapping exposure; Figure 5B is The brightness statistics chart of the anomalous row of the scanned image of the second object to be tested. This graph shows that the 13th row of the original image is an anomaly row. Using the method proposed by the present invention, the feature strengths of the anomalies do not cancel each other, only It is evenly weakened. When taking images during travel, the CCD—advances while exposing, so the images that are photosensitive during each exposure are superimposed by a series of continuous fields of view (FOV). As shown in Fig. 6A, this F0V is the position where the exposure starts. Before the exposure is not over, other different F 0 V as shown in FIG. 6B are also exposed while moving. As shown in Fig. 6C, the exposure progresses continuously from F0V at the start exposure position to F0V at the last end exposure position. Utilizing the exposure overlap feature of the image during traveling, that is, "overlapping image capture", the periodic characteristics can be faded because the brightness cancels each other out. And the behavior of these overlapping exposures is to use a specific exposure speed as the control parameter. During this exposure time, the CCD performs a series of continuous F0V exposures, which is "continuous indirect exposure". Through the control of the scanning speed and exposure time, the periodic characteristics can be controlled. The superimposed characteristics are better. The better exposure result is the F0V variation during the superposed exposure.

^ 46024 Case No. 91116787 V. Description of the invention (6) The distance is exactly an integer of the period length of the object under test. Periodic features will be the average effect of repeated exposure. Force loss can also highlight the difference f, and if the FOV fluctuation distance during the overlap exposure is greater than the distance to be moved & will be weakened by the average effect of repeated exposure, and the feature I exists. The embodiment of the present invention with large anomalous characteristics is based on the implementation of the LCD panel detection method. There is no V? 1 in the stage of image manipulation; the light source cannot be illuminated by an external light source, but this: U = donor body = set the scope of application of the present invention, such as-take time to travel, garden 3 security monitoring, medical monitoring, semiconductor production equipment ^ application product, PCB testing, LCD panel testing, LED brightness and image inspection …! The second choice of the test object V 丨 1 Advantages of the present invention] Eliminates the conditional limitation of clear images; and page 1246024 _ Case No. 91116787 _ year and month amendment _ V. Description of the invention (7) 2. Further Use the control of exposure distance to highlight anomalies. Although the present invention is disclosed above with the foregoing preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.

Page 11 1246024 _Case No. 91116787_ Year Month Revision _ Brief Description of the Drawings Figure 1 is a flowchart of the scanning detection device of the present invention; Figure 2 is the original image of the first test object; Figure 2 A is the brightness statistics of the normal row of the original image of the first test object; Figure 2 B is the brightness statistics of the abnormal row of the original image of the first test object; Figure 3 is the scan of the first test object The fringe image of the scanned image; Figure 3A is the brightness statistics of the normal row of the scanned image of the first test object; Figure 3B is the brightness statistics of the abnormal row of the scanned image of the first test object; Figure 4 is the original image of the second test object; Figure 4A is the brightness statistics of the normal row of the original image of the second test object;

Figure 4B is the brightness statistics of the abnormal row of the original image of the second DUT; Figure 5 is the fringe image of the scanned image of the second DUT; Figure 5A is the scanned image of the second DUT The brightness statistics chart of the normal row; Figure 5B is the brightness statistics chart of the abnormal row of the scanned image of the second object to be measured; and Figures 6A to 6C are the overlapping image acquisition and continuous indirectness mentioned in the present invention Unintended exposure. [Symbol description] Step 1 0 0 Provide at least one image capture device for capturing during travel. Step 1 10 Overlay image capture for the object to be measured.

Step 1 2 0 Use continuous indirect exposure to produce overlapping (f u z z y) overlapping images. Step 1 3 0 Use the relative differences in the overlapping images as a basis for quickly determining the goodness of the test object.

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Claims (1)

1246024 Modified MM 91 η 6787, patent application scope and 3 Γ: = The measurement method of the measuring device is to use the imaging during the travel, for: Periodic: take the object to be detected, including the following steps: 4+ m ^ image capture devices to take the image during the travel; overlapped image capture for the f test object; image indirect exposure with 2 linearity and a fuzzy overlapping image ΐ :: ί 像Relative differences in the rapid determination of the object to be detected " σ It lit IVv ^ " J ^ ^ ^ ^ ^ Equipment image detection, PC / Wi, medical monitoring, semiconductor production color detection, large area printed board detection, led brightness and color Species. 〖Mouth flaws> Defects 4 Any one of the combinations of 3, etc. 3 · As the method of claiming the scope of patents is cleared, in which the combination of Hne scan, etc. of the self-test device is selected, what is the best choice? _Self-seeking SiWn and i. The method for capturing the cat detection device as described in the first item of ΠΐΓί Wai, where the relative lamb is here, and the heart; 1 Tsukasa 5.-Second detection device 2 : 2 characteristics ^ present characteristics. The device is provided for taking fools during travel, 1 to provide at least one image capture, to perform continuous indirect warming I 1 2 to overlap the images of the object to be detected with periodic characteristics, and to hold Sts f, based on the object to be tested. Use the difference as a good way to quickly determine the object to be detected Page 13 1246024 _Case No. 91116787 _ Amended Month_ Sixth, the scope of patent application 6. The imaging method of the scanning detection device as described in the fifth scope of the patent application can be applied to security monitoring, medical monitoring , Semiconductor production equipment image inspection, PCB inspection, LCD panel inspection, LED brightness and color inspection, large-area printed matter defect detection, any combination. 7. The imaging method of the scanning detection device according to item 5 of the scope of the patent application, wherein the in-travel imaging can be selected from any combination of pr o g r e s s i v e s c a η and 1 i n e s c a n. 8. The image acquisition method of the scanning detection device as described in item 5 of the scope of the patent application, wherein the relative difference refers to a non-periodic feature. Page 14