TWI243397B - Process for improving electrode surface reliability - Google Patents

Process for improving electrode surface reliability

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Publication number
TWI243397B
TWI243397B TW93109105A TW93109105A TWI243397B TW I243397 B TWI243397 B TW I243397B TW 93109105 A TW93109105 A TW 93109105A TW 93109105 A TW93109105 A TW 93109105A TW I243397 B TWI243397 B TW I243397B
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Taiwan
Prior art keywords
electrode
insulated
reliability
laminated
layer
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TW93109105A
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Chinese (zh)
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TW200534326A (en
Inventor
Hsin-Chi Chung
Wei-Cheng Lien
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Sfi Electronics Technology Inc
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Priority to TW93109105A priority Critical patent/TWI243397B/en
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Publication of TWI243397B publication Critical patent/TWI243397B/en

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Abstract

This invention provides a process for improving electrode surface reliability of stack-typed electronic device. It includes the steps of: making a base body; making an insulated coating layer on the base body; making electrodes of two sides; and making the plating and soldering interface. By using nanoscale insulated sealing material to coat the six faces of the device body at a time to form an insulated coating layer, the insulated impedance of stack-typed electronic device can be increased. Furthermore, it can promote the reliability of the electrode surface. It can uniformly adhere to the device body surface by coating six faces of the base body and using high temperature sintering. It can solve the material limitation problem of device body as well as simplify the traditional machining process of device surface, thus saving the cost of special materials used for the electrode faces. The special device material body can promote the surface insulated impedance characteristics by using nanoscale insulated refined sealing material with high insulated impedance characteristics. It can also carry out electroplating process to increase the reliability and the applications of the electrode faces. Therefore, the cost of machining equipment and the consumption for special electrode materials can be reduced.

Description

1243397 五 發明說明(1) 【發之技術領域』 其係指-種積層式雷:積:式電子元件製作方法之發明,尤 者。 式電子兀件之改善電極端面可靠度製法相f 【先前技術 以目前3 Q t 應所有電子、電。見蓬勃發展的趨勢與運用而言,為了因 斤有電子元件也朝向多 努而求’無疑 干U為#又沒有空間與範圍的考量,所以 二:、、先電 庫市::二則較為龐大與佔據空間。而積層式電子:::電 口 =求而發展的主要電子元件產“”::件=因 前ί產:感、氧化金屬變阻器、熱敏變阻器·..等等,在 广產品内皆可輕易發現,也 ./4在目 提昇與創新下,諸如士相从帝2 口備產W功能不斷的 品中大量出現。 1的電子兀件勢必會在電子設備、產 金屬ίΐ:統例如:接腳式的電容、電阻、氧化 以導键a L負(正)溫度係數熱敏電阻...等等,皆需要 繁雜外ί二了此類產品除了製程較為 = 的積層式電子元件也應運而生,此類 盔7^牛功忐相近外,生產量能與成本也相對 y必 成為下游電子市場的主力f子元件之—。 低*勢必 屬材Ξ此類積層式元件本體材料不外乎為陶瓷材質、氧化金 等等,以下就習見積層式電子元件製作方式說明1243397 V. Description of the invention (1) [Technical Field of Development] It refers to the invention of a multi-layer type lightning: product: manufacturing method of electronic components, especially. Method for improving the reliability of the electrode end face of the conventional electronic element f [prior art] At present 3 Q t should be used for all electronics and electricity. Seeing the booming trend and application, in order to have electronic components and to move towards Donu, there is no doubt that there is no consideration of space and scope, so two: ,, Xiandiankushi :: Two are more Huge and occupying space. And laminated electronics ::: electrical port = the main electronic components produced by the development of ":": == because of the former production: sensor, oxidized metal rheostat, thermistor · .., etc., can be used in a wide range of products It is easy to find that also ./4 Under the promotion and innovation of the eyes, such as the appearance of Shi Xiang from the Emperor 2 to produce a large number of products with continuous W functions. The electronic components of 1 are bound to be used in electronic equipment and metal production. For example, pin-type capacitors, resistors, oxidation leads, a negative (positive) temperature coefficient thermistors, etc., all need to be complicated. In addition, in addition to the production of laminated electronic components with relatively high manufacturing processes, such helmets are similar. In addition to similar helmets, the production volume and cost can also be relatively important. They will become the main force of the downstream electronics market. Of-. Low * is bound to be a material. The body material of such laminated components is nothing more than ceramic materials, gold oxide, etc. See the description of the manufacturing method of laminated electronic components below.

93〇329.PTD 第5頁 1243397 五、發明說明(2) 如下: 子亓竟本體材料製成之積層式電子元件,此積層式電 如電容ULCC)、電阻、電感...等等,如第—圖至 雷所不,該積層式電子元件是由本體1〇、内電極Η、端 盥木鮮1 η Γ,鲜接介面1 3所構成,其製作方式係以内電極11 ^ 成里後,再經高溫燒結完成,直接沾附端電極介面 再經快速高溫燒結後,以形成端電極丨2,復以端電極 成陶焊接介面工程,以形成電鑛銲接介面13,如此完 成陶竞本體材料製成之積層式電子元件元件成品者 ★ φ2·以氧化金屬本體材料製成之積層式電子元件,此積層 '子元件如.氧化金屬變阻器(Varist〇rs)、負(正) ,度係數熱敏電阻(NTC、PTC)·..等等,如第四圖及第五 圖所:’,層式電子元件是由本體2〇、内電_、端電極 1 "鍍銲接介面Μ、絕緣披覆層24所構成,其製作方式係 1電極21與本體20成型後,直接進行端電極22製程,然後 本體20之四周面製作絕緣披覆層24 (需一顆一顆元件進行 絕緣披覆層製程),最後以端電極22再進行電鍍銲接介面23 ^工轾,完成以氧化金屬本體材料製成之積層式電子元件成 品。然此積層式電子元件加工模式,必須將元件以一顆一顆 加工方式進行絕緣彼覆層25製#,因此速度慢且產能低,若 要因應需求,則需投入相當多的設備才可以符合量能,故此 等製造成本則極為昂貴,不符合產量大與價格低廉的市場需 求。 3·以氧化金屬本體材料製成另一種型態之積層式電子元93〇329.PTD Page 5 1243397 V. Description of the invention (2) is as follows: The laminated electronic components made of the material of the main body, such laminated electric components (such as capacitor ULCC), resistance, inductance, etc., such as The first figure to Lei Suo, the laminated electronic component is composed of the body 10, the internal electrode Η, the end of the fresh wood 1 η Γ, and the fresh interface 13, and the manufacturing method is based on the internal electrode 11 ^ , And then completed by high temperature sintering, directly attached to the terminal electrode interface and then fast high temperature sintering to form the terminal electrode 丨 2, and then use the terminal electrode to form a ceramic welding interface project to form a power mineral welding interface 13 to complete the Tao Jing body Laminated electronic component components made of materials ★ φ2 · Laminated electronic components made of oxidized metal body material, this laminated 'sub-components such as varistors, negative (positive), degree coefficient Thermistors (NTC, PTC), etc., as shown in the fourth and fifth figures: ', the layered electronic components are composed of the main body 20, internal electricity, terminal electrodes 1 " plated soldering interface M, The insulating coating layer 24 is composed of 1 electrode 21 and After the body 20 is formed, the terminal electrode 22 process is directly performed, and then an insulation coating layer 24 is formed on the surrounding surface of the body 20 (one component is required for the insulation coating process), and the terminal electrode 22 is then subjected to the electroplating welding interface 23 ^ Industrial, complete the finished multilayer electronic components made of oxidized metal body material. However, in this multi-layer electronic component processing mode, components must be insulated one by one in a 25-layer coating method, so the speed is slow and the production capacity is low. If you need to respond to demand, you need to invest a lot of equipment to meet The amount of energy can be very high, so these manufacturing costs are extremely expensive, which does not meet the market demand of large output and low price. 3 · Another type of laminated electronic element made of oxidized metal bulk material

1243397 五、發明說明(3) 件’此積層式電子元件如:氧化金屬變阻器(Varist〇rs )、負(正)溫度係數熱敏電阻(NTC、pTC ) · · ·等等,如 第六圖至第十一圖所示,該積層式電子元件是由本體30、内 電極31制端電極32、電鍍銲接介面33、絕緣披覆層34所構 成、,其製作方式係以内電極31與本體3〇成型後,於本體3〇 ,進行、、、邑緣披覆層3 4製程(可整批元件一起進行絕緣披覆$ 製程),完成後,再將本體30兩侧面之絕緣披覆層34予以 磨加工,成為兩待端電極面3 5 (如第八圖所示),最後沾附| 端電極3 2之介面材料,再緣体技古 在 竹竹丹岌陕速回溫燒結後,以形成端電極 32,復再以端電極32進行電鍍銲接介面33之工程, 化金屬本體材料製成另—插剞能夕接思4 …接m: t 積層式電子元件成品。然 此積層式電子兀件加工方式,雖然改善舊有一顆一 覆層之加工製程,但在後製程仍妙恭 ' 拄她雷托品,H 傻表枉仍然而要一顆一顆機械研磨兩 待:電極面’仍屬於速度慢且產能低之製造方式 需求’仍需投入研磨設備才可進行加I,亦屬於 ’: 貴及效率低之製程方式。 、4成本 上述製出積層式電子元件方式係為 致採用的製造方式,且因不同元件材料=里產所 製造方式仍有所差異,如上述說明可知,陶5所形成之 體優勢則較為明顯,例如:產品本體 負的產品本 有高電阻率、可直接進行後製程緻^性高、本體具 氧化金屬材質的產品則優勢較弱,例料專,相對的 低、結構緻密性較差、在電極端面完成本體電阻率 增進銲接面之可靠度,以致於先前材料特性二電鍍方式 /套提供高表面1243397 V. Description of the invention (3) Pieces of this laminated electronic component such as: Varistor (varistors), negative (positive) temperature coefficient thermistor (NTC, pTC), etc., as shown in Figure 6 As shown in FIG. 11, the laminated electronic component is composed of a main body 30, an end electrode 32 made of an internal electrode 31, a plating and soldering interface 33, and an insulating coating layer 34. The manufacturing method is based on the internal electrode 31 and the main body 3. 〇After molding, perform the 3, 4 and 3 coating process on the body 30 (the insulation coating process can be performed on the entire batch of components together). After completion, the insulation coating 34 on both sides of the body 30 is completed. After grinding, it becomes the two end electrode surfaces 3 5 (as shown in the eighth figure), and finally the interface material of the | end electrode 32 is adhered to it. In order to form the terminal electrode 32, and then use the terminal electrode 32 to perform the plating and welding interface 33 process, the metal body material is made into another-plug-in energy connector 4 ... then the m: t laminated electronic component product is finished. However, this laminated electronic component processing method, although improving the old one-layer coating process, but the later process is still very respectful 拄 拄 her retort, H stupid watch 枉 still want to mechanically grind two Waiting: The electrode surface 'still belongs to the manufacturing method of slow speed and low production capacity'. It still needs to invest in grinding equipment to add I, which also belongs to the ': expensive and low-efficiency manufacturing method. The above-mentioned method of manufacturing multilayer electronic components is the manufacturing method adopted, and there are still differences in the manufacturing methods of different component materials = Lisang. As can be seen from the above description, the physical advantages formed by Tao 5 are more obvious. For example, the negative product of the product itself has a high resistivity, can be directly processed after the process is high, and the product with an oxidized metal body has a weak advantage, such as special materials, relatively low, poor structural compactness, The electrode end surface completes the body resistivity and improves the reliability of the welding surface, so that the previous material characteristics.

930329.PTD 第7頁 1243397 五、發明說明(4) 電阻率與進行端電極銲接面電鍵工程。 就以氧化金屬變阻器為例,若 極端面可靠度之提昇與改進,需投入,絕緣阻抗性 力,才可達成量產的需求,故此類製的:備與製 空間。 衣作方式仍有極大的 【發明内容】 "生=基:Ϊ進積層式電子元件材料表面之電阻率 ;、隹性之奈米材料提昇氧化金屬之本體電 辜’進而使此材料可經由電鍍達成 善計割,此籀s *电數運成為電極銲接面可靠度930329.PTD Page 7 1243397 V. Description of the invention (4) Resistivity and electrical keying of terminal electrode welding surface. Taking the metal oxide varistor as an example, if the reliability and improvement of the extreme surface need to be invested, the insulation resistance can be used to achieve the mass production requirements, so this type of system: preparation and system space. The method of dressing is still very great [Content of the invention] " Generation = based: resistivity of the surface of laminated electronic component materials; the nature of nano-materials to enhance the electrical conductivity of the oxidized metal body, so that this material can pass Electroplating achieves good cuts, this 籀 s * electricity becomes the reliability of electrode welding surface

^〗此種方式是以奈米材料解決此 可靠度與適用性的問題。 積層式電子7L 本發明所採用之技術手段, 細微特性,以 7〜用将殊絕緣奈米材 / =性u —次六面包覆元件本體方式,經士 二=▲液相熔解攤平之高絕緣 :: 緣材料產生析端電極處產生’因此外端電極與奈 力,而相對L昇更增加内電極與外電極之抓 於極薄且緻密的奈米級的絕緣封孔性材料 端電極鮮接介亦可以進行電鍍製程,提 極氧化程度。了罪度與產品適用範圍,並可大幅減 可簡ϊ:統i::月方法除了解決元件本體材料極限問題 料之占太,、械加工兀件表面製程與節省端電極使用特 以増進積層式電子元件絕緣阻抗性之提昇, 與 程人 改進 與緻 阻 之改 件之 料之 後 件本 米絕 附 件本 ,對 昇兩 緩電 ,更 殊材 進而^〗 This method uses nano materials to solve this problem of reliability and applicability. Laminated electronic 7L The technical means adopted by the present invention, with its subtle characteristics, uses 7 to 5 nanometers to cover the body of the element with a special insulating nanomaterial / = u u, the second method = ▲ liquid phase melting flattening High Insulation :: The edge material is generated at the end of the electrode, so the outer electrode and Nai force are increased, and the relative L is increased. The inner electrode and the outer electrode are grasped at the end of the extremely thin and dense nano-scale insulating plugging material. Electrodes can also be electroplated to improve the degree of oxidation. In addition to the degree of crime and the scope of application of the product, it can be greatly reduced. In addition to solving the problem of the limit of the material of the component body, the method can be simplified. The surface processing of the mechanical parts and the use of end electrodes can be saved. The insulation resistance of the electronic components is improved, and it is necessary to improve the resistance and resistance of the Cheng Ren.

1243397 五、發明說明(5〕 絕緣材料=^ ’且# ·元件材料本體 緣阻抗特性,更;特性’達成提昇元件表面絶 度及適用層面,更可節“2, 土成增進電極端面之可靠 材料之耗用成本,b * σ工没備之成本與特殊端電極 【實施方式】此乃本發明研發之主要目的者。1 請參閱第十二圖後*丄々 端面可流程示層 < 電子元件之改善電 步驟1 -本體製作,二浐、’ /、實施步驟如下: | 内電極41間隔絕—氧化金二:刷出多層内電極41,且各層 層元件型態之本體4〇 (如^電=料層所交錯堆疊製成一積 步驟2-本體製出絕綾姑薄:圖及第十四圖所示)。 經500〜1 〇〇〇它高溫燒結 曰,係以奈米絕緣封孔性材料| 面之絕緣披覆層42 (如第+7 ^相^熔解而披覆於本體40六 緣披覆層42得與内電極41及::=:六圖所示),且該— 十七圖所示圖例中絕緣披覆層42鱼^析出共融現象(如第| 緣披覆層42與内電極41、卜^ ^ 電極的共融接點A,絕 絕緣之阻抗特性。其中兮:卜:::共融接和,以產生高 u,一米等性, 石英...等等封孔性材料者。皿頬、乳化矽、玻璃粉、 步驟3-兩端電極製作,係以 | 電性介面材料,再經快速高溫燒結後,:::直接沾附南導 兩側供與絕緣披覆層42之奈米絕緣】料,成披覆於本體4〇f 端電極43 (如第十八圖及第十九 生析出共融現象的 圓所示V,此製出之端電極 930329. 第9頁 1243397 ------- 五、發明說明(6) 43更可增加内電極41及外電極之抓附力 :端電極43之附著力。其中導電性介面材 、 金· ·.等等。 :驟4—電鍍銲接介面製作,係以採以鎳或錫電鍍於端電| 和3表面上,以形成電鍍銲接介面以(如第二十圖及第二 一圖所示、)/、進而順利完成積層式電子元件成品者。 , 托山由上述說明可知,本發明所提供積層式電子元件改進電 ,舄面可靠度製法,藉由奈米絕 = 技術徹底改善習見積層雷早分处私士 河了十足、、、巴緣披覆層1243397 V. Description of the invention (5) Insulation material = ^ '及 # · The material material body edge resistance characteristics, and more; characteristics' to achieve the improvement of the component surface insulation and the applicable level, can also save "2, soil to improve the reliability of the electrode end face Consumption cost of materials, b * σ cost of labor and special terminal electrode [Embodiment] This is the main purpose of the research and development of the present invention. 1 Please refer to the twelfth figure. Electrical steps for improving electronic components 1-The body is manufactured. The two steps are as follows: | Insulation between internal electrodes 41-Gold oxide 2: Brush out multiple layers of internal electrodes 41, and the body of each layer of the component type 4〇 ( Such as ^ electric = material layer staggered stacking to make a product step 2-this system is extremely thin (as shown in the figure and the fourteenth figure). After 500 ~ 10000 sintering at high temperature, it is based on nanometers Insulating sealing material | Insulating coating layer 42 (such as +7 ^ phase ^ melted and coated on the six edges of the body 40, the coating layer 42 and the internal electrode 41 and :: =: shown in the six pictures), Moreover, in the legend shown in the figure 17, the insulation coating 42 is precipitating and fused (such as the first | rim coating 4 2 Inner contact 41 with the internal electrode 41, the electrode ^^, the impedance characteristic of the insulation. Among them: bu ::: fused connection to produce high u, one meter isometry, quartz ... etc. Those who are sealing materials, such as dishware, emulsified silicon, glass powder, step 3-make the two ends of the electrode, using the | electrical interface material, and then fast sintering at high temperature: directly attached to the two sides of the south lead Nano-insulation material with insulation coating layer 42 is coated on the body 40f terminal electrode 43 (as shown by the circle in Figure 18 and the nineteenth generation of the inclusive phenomenon of V, this produced end Electrode 930329. Page 9 1243397 ------- 5. Explanation of the invention (6) 43 can increase the grip of the inner electrode 41 and the outer electrode: the adhesion of the terminal electrode 43. Among them, the conductive interface material, gold · ·. Etc.: Step 4—Plating and welding interface is made by nickel or tin electroplating on the terminals and 3 surfaces to form a plated welding interface (as shown in Figure 20 and Figure 21). (), /, And then successfully complete the multilayer electronic component finished product., Tuoshan can know from the above description, the multilayer electronic component provided by the present invention improves electricity, 舄Surface reliability manufacturing method, with nanometer = technology to completely improve the habitual accumulation layer Lei Zao, a privateer, the river has full ,,, and marginal coatings

列特點:&見檟層電子兀件所有現象與問題,其具有下IFeatures: & See all phenomena and problems of the layered electronic components, which have the following I

賴(1)可簡化積層式電子元件加工製程,不需要實施 顆一顆披覆絕緣披覆層之加工製 Y -顆機械研磨兩待端電極面之 :疋要-顆 設備進行加工,操作人員也 .而杈入加工Lai (1) can simplify the manufacturing process of laminated electronic components, and it is not necessary to implement a processing process of covering an insulating coating layer. Y-mechanical polishing of the two electrode surfaces at the end of the electrode: Also. And into the processing

產能低之製造方式。 了鈿減,進而大幅改善速度慢且I 料經高溫液相燒結^本體在表本面低電阻率’奈米絕緣封孔性材| 產生表面高阻抗之特性 炫解攤平,得以 緣封孔性被覆層,進而提昇元體t面產生極薄之絕丨 件本溫^相熔解之奈米絕緣封孔性材料,可辦進元 件ί體表面緻欲性與填孔性,降低元件本體之耗電^曰值凡 端二)Λ?:材==Manufacturing method with low capacity. It is reduced, and the speed is greatly improved. The I material is sintered in high temperature liquid phase. ^ The body has a low resistivity 'nano insulation sealing material on the surface of the surface. Layer, which can enhance the t-side of the element body to produce extremely thin parts. The nano-insulating sealing material of the temperature ^ phase melting can be applied to the surface of the component and the hole filling property, reducing the power consumption of the component body. ^ Said value Fan Duan 2) Λ ?: wood ==

930329.PTD 第10頁 1243397 五、發明說明(7) 内電極與外電極之抓附力,並更增加元件本體與兩端電極之 附著力。 (5 )因元件本體表面附著一層極薄且緻密的奈米級絕 緣材料,對於特殊之電子元件(例如:氧化金屬變阻器..· 等),端電極處亦可以直接進行電鍍製程,提昇兩端電極銲 接介面之可靠度與適用範圍,並可大幅減緩電極氧化程度。 綜上所述,本發明所提供積層式電子元件改進電極端面 可靠度製法,確實能達到預期之目的及效益,為一具產業利 用性之發明者。930329.PTD Page 10 1243397 V. Description of the invention (7) The holding force of the inner electrode and the outer electrode, and the adhesion between the element body and the electrodes at both ends is further increased. (5) Because the surface of the element body is attached with a very thin and dense nano-level insulating material, for special electronic components (such as: oxidized metal varistors .., etc.), the electrode can also be directly plated at the terminal electrode to improve both ends. The reliability and application range of the electrode welding interface can greatly reduce the degree of electrode oxidation. In summary, the method for improving the reliability of the end surface reliability of the laminated electronic component provided by the present invention can indeed achieve the intended purpose and benefit, and is an inventor with industrial applicability.

930329.PTD 第11頁 1243397930329.PTD Page 11 1243397

式電子元件之外觀 圖式簡單說明 第一圖所示為習知陶瓷本體材料製成積層 示意圖。 第二圖所示為第一圖之縱向剖面示意圖。 苐二圖所示為第一圖之橫向剖面示意圖。 第四圖所示為習知氧化金屬本體材料製成積層式電子元件成 品之縱向剖面示意圖。 第五圖所示為習知氧化金屬本體材料製成積層式電子元件之 橫向剖面示意圖。 第六圖所示為習知氧化金屬本體材料製成另一種型態積層式 電子元件所製出絕緣披覆層後之縱向剖面示意圖。 第七圖所示為習知氧化金屬本體材料製成另一種型態積層式 電子元件所製出絕緣披覆層後之橫向剖面示意圖。 第八圖所示為習知氧化金屬本體材料製成另一種型態積層式 電子元件所實施研磨待端電極面後之縱向剖面示意圖。 第九圖所示為習知氧化金屬本體材料製成另一種型態積層式 電子元件所實施研磨待端電極面後之側面示意圖。 第十圖所示為習知氧化金屬本體材料製成另一種型態積層式 電子元件所製出端電極面後之縱向剖面示意圖。 第十一圖所示為習知氧化金屬本體材料製成另一種型態積層 式電子元件所製出端電極面後之縱向剖面示意圖。 第十二圖所示本發明積層式電子元件之改善電極端面可靠度 製法流程示意圖。 第十三圖所示為本發明積層元件型態本體製出後之縱向剖面 示意圖。The appearance of the electronic component is simply explained. The first figure is a schematic diagram of a laminated body made of a conventional ceramic body material. The second figure shows a schematic longitudinal section of the first figure. Figure 22 shows a schematic cross-sectional view of the first figure. The fourth figure is a schematic longitudinal sectional view of a multilayer electronic component product made of a conventional metal oxide bulk material. The fifth figure is a schematic cross-sectional view of a multilayer electronic component made of a conventional metal oxide body material. Fig. 6 is a schematic longitudinal cross-sectional view of an insulating coating layer made of another type of laminated electronic component made of a conventional oxidized metal body material. The seventh figure shows a schematic cross-sectional view of an insulating coating layer made of another type of laminated electronic component made of a conventional metal oxide body material. FIG. 8 is a schematic longitudinal cross-sectional view of another type of laminated electronic component made of a conventional oxidized metal body material after lapping the electrode surface at the end. The ninth figure is a schematic side view of a conventional laminated metal component made of an oxidized metal body after lapping the electrode surface at the end. The tenth figure is a schematic longitudinal sectional view of a terminal electrode surface made of another type of laminated electronic component made of a conventional metal oxide body material. Fig. 11 is a schematic longitudinal sectional view of a terminal electrode surface made of another type of laminated electronic component made of a conventional oxide metal bulk material. FIG. 12 is a schematic flow chart of a method for improving the reliability of an electrode end surface of a laminated electronic component according to the present invention. The thirteenth figure is a schematic diagram of the longitudinal section of the multilayer component type of the present invention after the system was developed.

第12頁 1243397 圖式簡單說明 第十四圖 示意圖。 第十五圖 意圖。 第十六圖 意圖。 第十七圖 第十八圖 第十九圖 第二十圖 圖0 所示為本發明積層元件型態本體製出後之橫向剖面 所示為本發明本體製出絕緣彼覆層後之縱向剖面示 所示為本發明本體製出絕緣坡覆層後之橫向剖面示 所示為第十五圖中圓圈處之放大示意圖。 所示為本發明製出兩端電極後之縱向剖面示意圖 所示為本發明製出兩端電極後之橫向剖面示意圖 所示為本發明製出電鍍銲接介面後之縱向剖面示意 第二十一圖所示為本發明製出電鍍銲接介面後之橫向剖面示 意圖。 符號說明 本體____ 内電極.. 端電極.. 電鍍銲接 絕緣彼覆 待端電極 共融接點 介面 層·· 面· ·Page 12 1243397 Schematic description of the fourteenth figure Schematic diagram. Figure 15 Intent. Sixteenth figure Intention. 17th figure 18th figure 19th figure 20th figure Figure 0 shows the cross-section of the multilayer component of the present invention after the system is shown, and it shows the vertical cross-section of the insulating layer after the system of the present invention. The horizontal cross section after the insulation slope coating of the system of the present invention is shown in the enlarged schematic diagram at the circle in the fifteenth figure. Shown is a schematic diagram of the longitudinal section after the two-end electrode is manufactured according to the present invention. Shows a schematic diagram of the transverse section after the two-end electrode is manufactured according to the present invention. Shown is a schematic cross-sectional view of an electroplated welding interface prepared by the present invention. Symbol description Body ____ Internal electrode: Terminal electrode: Electroplated welding Insulation layer Overlying electrode End electrode Common contact interface layer ·· Surface · ·

10 > 1卜 12 ^ 13〜 24 > 35 A ^ B 20 21 22 23 34 30 ^ 40 31 ^ 41 32 33 42 43 4410 > 1 b 12 ^ 13 ~ 24 > 35 A ^ B 20 21 22 23 34 30 ^ 40 31 ^ 41 32 33 42 43 44

930329.PTD 第13頁930329.PTD Page 13

Claims (1)

1243397 々'申請專利範圍 " " -- 1 種積層式電子元件之改善電極端面可靠度萝法, 其實施步驟包含有: 本體衣作’係採以印刷出多層内電極,且各層内電極間 隔絕一氧化金屬介電材料層所交錯堆疊製成一積層元件型離 之本體; T i ^ 本體f出絕緣彼覆層,係以奈米絕緣封孔性材料經5〇() 1 = = C向溫燒結後形成液相熔解而披覆於本體六面之絕緣 現^ Y ,且該絕緣披覆層得與内電極及外電極產生析出共融 材料兩ϊ ί ί製作,係以本體兩側面直接沾附高導電性介面 緣彼南溫燒結後,以形成披覆於本體兩侧供與絕 ‘二:i絕緣材料產生析出共融現象的端電極; 。以形成電鑛鲜接介面,進而順利完成積層 雷^、利範圍第1項所述之積層式電子元件之改盖 電極鈿面可罪度製法,#中該奈米絕緣封孔性材料為 割 米等級粒徑之石夕酸鹽類、 : 石英...等等封孔性材料者。 y玻塙叔、1243397 々'Scope of patent application '-1 type of laminated electronic components to improve the reliability of the electrode end surface reliability method, its implementation steps include: The body clothing is used to print out multiple layers of internal electrodes, and each layer of internal electrodes The interlayers of isolated metal oxide dielectric material layers are stacked alternately to form a laminated element-type body; T i ^ the body f is an insulating layer, which is made of nano-insulating sealing material through 50 () 1 = = C is sintered to form a liquid-phase melted insulation layer covering the six sides of the body, and the insulation coating layer and the internal and external electrodes can be used to produce precipitated eutectic materials. The high-conductivity interface is directly affixed to the side surface after sintering to form a terminal electrode covering the two sides of the body for the phenomenon of precipitation and incorporation of the insulating material; i. In order to form a fresh electrical interface, and then successfully complete the lamination of the laminated electronic components described in item 1 of the laminated layer ^, the scope of the method for changing the electrode surface of the laminated electronic component, #The nano insulation sealing material in # Meter grade particle sizes of oxalates, quartz, etc. Uncle Glassy, 930329.PTD 第14頁930329.PTD Page 14
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