1242736 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種六自由度微/奈米定位平台，尤指一 種以低成本發展出之可六自由度同動、控制容易、定位精度 高、定位速度快等特點的微/奈米定位平台。 【先前技術】 現今較為常見之精密定位平台相關技術可分下列兩大項 加以扼要說明： 1. 致動器部分： 壓電致動器：價格昂貴、行程短。 步進馬達：線性運動需搭配滾珠導螺桿裝置，定位精度低 (2〜20μ/?7 ) 〇 伺服馬達：線性運動需搭配滾珠導螺桿裝置，定位精度低 (0· 1 〜2μ^ ) 〇 音圈馬達：價格昂貴，但較壓電致動器低。 線性馬達：價格昂貴，但較壓電致動器低。 2. 構型： 並聯式：運動控制較複雜、行程小。 串聯式：有誤差累積問題、平台高度高。 中華民國專利公告第564791號專利案之並聯式六自由 度奈米定位平台，其係利用固定底座、移動平台、六組撓性 鉸鍊及致動器所組合之機構，該致動器配合該撓性鉸鍊所產 生的合成位移，造成該移動平台相對於該固定底座有六自由 度之運動，分別為三直線X、Υ與Ζ方向移動及三旋轉0 χ、 6^與 0Ζ方向運動，但其在定位上仍得藉材料彈性變形的原理，配 合該撓性鉸鍊的設計，才能達到定位平台在空間上的姿態改 1242736 變。然而，該專利案之系統設計複雜、裝配整合不易，且累 積誤差大。 另外，美國專利第6,477,912號之並聯式六自由度微米定 位平台，其主要目的係透過三外部聯結桿結合底座與移動平 台，三内部聯結桿結合底座與多軸球接頭，且加上一連接桿 連接移動平台與多軸球接頭之中心，以達到六自由度之運 動，但該裝置在定位精度上仍有一定之誤差產生，而有待改 善。 【發明内容】 本發明之目的在提供一種六自由度徵/奈米定位平台以 線性馬達結合楔形機構定位一水平運動平台（XZ軸平面）， 該水平運動平台上加一精密旋轉伺服平台以控制垂直旋轉軸 (0y)，該精密旋轉伺服平台上安裝一三自由度並聯式機構 (0X、和Y軸），俾使該六自由度徵/奈米定位平台具有六 個運動自由度，因其使用楔型機構，故可以成本較低之低定 位精度的致動器俾使本發明平台可達奈米級之定位精度；使 用水平運動平台、旋轉伺服平台及並聯式機構之串聯式結構 可使本發明平台具有足夠之運動範圍；使用高速精密致動器 可使本發明平台具有高速的定位速度；採用並聯式機構之致 動器為水平方向運動，所以無配重問題，可降低成本及機構 的複雜度。 達到上述目的之六自由度微/奈米定位平台，包含：一基 座，在兩側設有線性導執；一 X軸鞍座，係滑動於該基座之 線性導執上，且該X軸鞍座在兩側設有線性導軌；一 Y軸鞍 座，滑動於該X轴鞍座之線性導執上；一第一驅動裝置，係 與該基座之線性導軌垂直安裝而位於該基座之一側；一 X軸 彈簧回復裝置，安裝於該基座與該X軸鞍座之間而位於該基 1242736 座之另一側；一第一楔形滑塊機構，安裝於該第一驅動裝置 與該X軸鞍座之間，而該第一驅動裝置、該第一楔形滑塊機 構與該X軸彈簧回復裝置一起運作以驅動該X軸鞍座在X軸 位移；一第二驅動裝置，係與該X軸鞍座之線性導軌垂直安 裝而位於該X軸鞍座之一側；一 Z軸彈簧回復裝置，安裝於 該X軸鞍座與該Y軸鞍座之間而位於該X軸鞍座之另一側； 一第二楔形滑塊機構，安裝於該第二驅動裝置與該Y軸鞍座 之間，而該第二驅動裝置、該第二楔形滑塊機構與該Z軸彈 簧回復裝置一起運作以驅動該Y軸鞍座在Z軸位移；一第三 驅動裝置，係安裝於該Y軸鞍座上，以驅動一並聯式機構鞍 座在Y軸旋轉；一並聯式機構鞍座，係設置於該第三驅動裝 置上；以及一並聯式機構，係設置於該並聯式機構鞍座上， 該並聯式機構包含：一第四驅動裝置；一第五驅動裝置；一 第六驅動裝置；三組線性導軌，係分別安裝在相對應之第四、 五、六驅動裝置的一側；三個楔形斜面溝槽，係分別安裝於 相對應之第四、五、六驅動裝置上；一載具平台，該載具平 台具有三個半球形導柱，該三個半球形導柱用以頂接相對應 之三個楔形斜面溝槽；以及三個Y軸彈簧回復裝置，係連結 於該並聯式機構鞍座與該載具平台。 【實施方式】 雖然本發明將參閱含有本發明較佳實施例之所附圖式予 以充份描述，但在此描述之前應瞭解熟悉本行之人士可修改在 本文中所描述之發明，同時獲致本發明之功效。因此，須瞭解 以下之描述對熟悉本行技藝之人士而言為一廣泛之揭示，且其 内容不在於限制本發明。 請參閱第一 A圖、第一 B圖及第二圖，分別顯示本發明 六自由度微/奈米定位平台之俯視圖、前視圖及立體圖。本發 1242736 明六自由度徵/奈米定位平台丨包含··一基座2,開設有複數個 孔（圖未不），可固鎖於一工作台，且該基座2在兩側設有線性 導執9 ; 一 X軸鞍座3，滑動於該基座2之線性導軌9上，且 该X軸鞍座3在兩側設有線性導執1〇(圖未示一 γ軸鞍座4, 滑動於該X軸鞍座3之線性導軌1〇上；一 ζ軸線性馬達u 與該基座2之線性導軌9垂直安裝而位於該基座2之一側；一 X軸彈簧回復裝置19，安裝於該基座2與該χ軸鞍座3之間 而位於該基座2之另一側；一 ζ軸楔形滑塊機構15，安裝於 該ζ軸線性馬達η與該χ軸鞍座3之間；一2軸線性導執14, 安裝於該Ζ軸線性馬達u之一側。 一 X軸線性馬達21，係與該χ軸鞍座3之線性導軌1〇 垂直女裝而位於該X軸鞍座3之一側；一 ζ軸彈簧回復裝置 29，安裝於該χ軸鞍座3與該γ軸鞍座4之間而位於該χ軸 鞍座3之另一側；一 χ軸楔形滑塊機構25，安裝於該χ轴線 性馬達21與該γ轴鞍座4之間；一 χ軸線性導軌24，安裝於 該X軸線性馬達21之一側。 、、 Υ軸旋轉馬達31，係安裝於該γ軸鞍座 式機構鞍座5，係設置於該Υ軸旋轉馬達31上；以及一並聯 式機構6,係安裝於該並聯式機構鞍座5±，該並聯式機構: 包含.第四線性馬達41、第五線性馬達51與第六線性馬達… 係分別㈣12G度之角度方式排列；第四線性導軌44、第五 線性導軌54、第六線性導軌64，係分別安裝於相對應之第四 五、六線性馬達4卜51、61之一側；第一楔形斜面溝槽47、 第二楔形斜面溝槽57、第三楔形斜面溝槽67 ’係分 相對應之第四、五、六線性馬達4卜5卜61 ± ; 一載具^二 70’具有第-半球形導柱48、第二半球形導柱％、第^ : 形導柱68 ’而該第-、二、三半球形導柱48、58、用以 1242736 頂接相對應之第一、二、三楔形斜面溝槽47、57、67 ;以及 · 第一 Y軸彈簧回復裝置49、第二γ軸彈簧回復裝置59、第三 Υ軸彈簧回復裝置69以間隔120度之角度方式排列而連結於 該並聯式機構鞍座6與該載具平台70之間。 請繼續參閱第一 Α圖、第一 Β圖及第二圖，該ζ軸線性 馬達11在電氣連接後，該Ζ軸線性馬達u之可動部13、固 疋部12可產生相對滑移運動，該z軸楔形機構15之主導塊 16固接於該可動部13上，可藉由該可動部13作z方向之移 動，與该主導塊16配合有相對運動之引導塊17則是固接於該 X軸鞍座3。 修 该ζ軸線性馬達u驅動該主導塊16與該引導塊17產生 相對運動，即當該主導塊16相對於該引導塊17往正z方向移 動時，俾使該X軸鞍座3藉由該線性導執9辅助往正χ方向 =動並且造成该X軸彈簧回復裝置19的壓縮，而該X軸彈 簧回復裝置19之壓縮位能則是提供了該χ軸鞍座3往負χ方 向移動的動力。 ' 該X軸線性馬達21在電氣連接後，該χ軸線性馬達21 之可動部23、固定部22可產生相對滑移運動，該χ軸楔形冑 構25之主導塊26固接於該可動部23上，可藉由該可動部υ 作χ方向之移動，與該主導塊26配合有相對運動之引導塊27 則是固接於該Y軸鞍座4。 該X軸線性馬達21驅動該主導塊％與該引導塊27產生 相對運動’即當該主導塊26相對於該引導塊27往正X方向 移動時’俾使該Y軸鞍座4藉由該線性導執1〇輔助往負2方 動’亚且造成該ζ軸彈簧回復裝置29的壓縮，而該2軸 彈簧回復I置29之壓縮位能則是提供了該γ軸鞍座4往正χ 方向移動的動力。 10 1242736 該γ軸旋轉馬達31在電氣連接後，該γ軸旋轉馬達3i 便可驅動該亚聯式機構鞍座5在丫軸作旋轉運動。 位於並聯式機構較座5上的第四線性馬達41在電氣連接 後’該第四線性馬達41之可動部43、固定部^可產生 滑移運動，俾使連接於該可動部43的第_楔_“@ 隨著該可動部43移動。相同地，該第五線性馬達5i在電氣連 接後’該第五線性馬達51之可動部53、固定部Μ可產生相 對滑移運動，俾使連接於該可動部53上的第二換形斜面溝槽 57可隨著該可動部53移動。第六線性馬達61在電氣連接後， =六m達61之可動部63、固定部62可產生相對滑移 1 動’俾使連接於該可㈣63上的第三_斜面㈣67可隨 者該可動部63移動。 該載具平^ 70之第-、二、三半球形導柱48 58 68頂 於相對應之第-、二、三楔形斜面溝槽47、Η、π，而該 載具平台7G與該並聯式機構鞍座5之間以第―、三、 Π、％、69連結。當該可動部43帶動該第-楔 == 動時’該第—半球形導柱48沿該第-楔 ^斜面溝槽7之溝槽而有高度差變化。在該第一半球形導柱 面溝槽47下_，位在該第四線性馬達W 2的第軸彈醫回復裝置49、59會呈壓縮狀態，而 Γ〇呈ΐ見復裝置69則呈拉伸狀態，俾使該載具平台 m 而該第—半球形導柱48沿該第—楔形斜 *二：—升時，位在該第四線性馬達41兩側的第-、二Y 二，簧回復！、置49、59會呈拉伸狀態’而該第三γ軸彈菩回 设農置㈣呈壓縮狀態’俾使該載具平台7G呈現—傾斜角度。 可生ΐϋΓ兄明本發明的較佳實施例之後，熟悉該項技術人士 月邊的瞭解’在不脫離下述申請專利範圍與精神下可進行各 1242736 種變化與改變，而本發明亦不受限於說明書之實施例的實施方 式01242736 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a six-degree-of-freedom micro / nano positioning platform, especially a six-degree-of-freedom simultaneous movement developed at low cost, easy control, and positioning accuracy. Micro / nano positioning platform with high speed and fast positioning. [Previous technology] The related technologies of precision positioning platforms that are more common today can be divided into the following two major items and briefly explained: 1. Actuator part: Piezoelectric actuator: expensive and short stroke. Stepping motor: Linear motion needs to be equipped with a ball guide screw device with low positioning accuracy (2 ~ 20μ /? 7) 〇 Servo motor: Linear motion needs to be equipped with a ball guide screw device, with low positioning accuracy (0.1 · 2 to 2μ ^) 〇 Coil motors: expensive, but lower than piezoelectric actuators. Linear motors: expensive, but lower than piezoelectric actuators. 2. Configuration: Parallel type: The motion control is more complicated and the stroke is smaller. Tandem type: There are problems of error accumulation and high platform height. Republic of China Patent Publication No. 564791, a parallel six-degree-of-freedom nano positioning platform, which is a combination of a fixed base, a mobile platform, six sets of flexible hinges, and an actuator that cooperates with the flexible The resulting displacement caused by the flexible hinge causes the mobile platform to move with six degrees of freedom relative to the fixed base, which are three linear movements in the X, Υ, and Z directions and three rotations in the 0 χ, 6 ^, and 0Z directions. In terms of positioning, the principle of elastic deformation of the material still needs to be combined with the design of the flexible hinge to achieve a 1242736 change in the attitude of the positioning platform in space. However, the system design in this patent case is complicated, assembly and integration are not easy, and the cumulative error is large. In addition, U.S. Patent No. 6,477,912 for a parallel six-degree-of-freedom micron positioning platform, the main purpose of which is to combine the base with a mobile platform through three external connecting rods, and combine the base with a multi-axis ball joint with three internal connecting rods, and add a connecting rod. The mobile platform is connected to the center of the multi-axis ball joint to achieve a six-degree-of-freedom motion, but the device still has a certain error in positioning accuracy, which needs to be improved. [Abstract] The purpose of the present invention is to provide a six-degree-of-freedom sign / nano positioning platform that uses a linear motor and a wedge mechanism to position a horizontal motion platform (XZ axis plane), and a precision rotary servo platform is added to the horizontal motion platform to control Vertical rotation axis (0y), a three-degree-of-freedom parallel mechanism (0x, and y-axis) is installed on the precision rotary servo platform, so that the six-degree-of-freedom sign / nano positioning platform has six degrees of freedom because of its The wedge-type mechanism is used, so the actuator with low positioning accuracy and low cost can make the platform of the present invention reach nanometer-level positioning accuracy; using the series structure of the horizontal motion platform, rotary servo platform and parallel mechanism can make The platform of the present invention has a sufficient range of motion; the use of high-speed precision actuators enables the platform of the present invention to have high-speed positioning speed; the actuators of the parallel mechanism move in the horizontal direction, so there is no problem of counterweights, and the cost and mechanism of the mechanism can be reduced. the complexity. The six-degree-of-freedom micro / nano positioning platform that achieves the above purpose includes: a base with linear guides on both sides; an X-axis saddle that slides on the linear guide of the base, and the X The shaft saddle is provided with linear guides on both sides; a Y-axis saddle is slid on the linear guide of the X-axis saddle; a first driving device is vertically installed on the linear guide of the base and is located on the base One side of the seat; an X-axis spring return device installed between the base and the X-axis saddle on the other side of the base 1242736 seat; a first wedge-shaped slider mechanism installed on the first drive Between the device and the X-axis saddle, and the first driving device, the first wedge slider mechanism and the X-axis spring return device work together to drive the X-axis saddle to be displaced in the X-axis; a second driving device Is mounted vertically to the linear guide of the X-axis saddle and is located on one side of the X-axis saddle; a Z-axis spring return device is installed between the X-axis saddle and the Y-axis saddle and is located on the X The other side of the shaft saddle; a second wedge-shaped slider mechanism installed on the second driving device and the Y-axis saddle Between the second driving device, the second wedge-shaped slider mechanism and the Z-axis spring return device to drive the Y-axis saddle to be displaced in the Z-axis; a third driving device is mounted on the Y-axis A saddle to drive a parallel mechanism saddle to rotate on the Y axis; a parallel mechanism saddle to be provided on the third driving device; and a parallel mechanism to be provided to the parallel mechanism saddle The parallel mechanism includes: a fourth driving device; a fifth driving device; a sixth driving device; three sets of linear guides, which are respectively installed on one side of the corresponding fourth, fifth, and sixth driving devices; three Wedge-shaped inclined grooves are respectively installed on the corresponding fourth, fifth, and sixth driving devices; a carrier platform, the carrier platform has three hemispherical guide posts, and the three hemispherical guide posts are used for top Three corresponding wedge-shaped beveled grooves are connected next to each other; and three Y-axis spring return devices are connected to the parallel mechanism saddle and the carrier platform. [Embodiment] Although the present invention will be fully described with reference to the accompanying drawings containing preferred embodiments of the present invention, it should be understood before this description that persons familiar with the bank may modify the invention described herein and obtain The effect of the present invention. Therefore, it should be understood that the following description is a broad disclosure for those familiar with the art of the Bank, and its content is not intended to limit the invention. Please refer to the first diagram A, the first diagram B, and the second diagram, which respectively show a top view, a front view, and a perspective view of the six-degree-of-freedom micro / nano positioning platform of the present invention. The hair 1242736 Ming 6 degree of freedom sign / nano positioning platform 丨 contains a base 2 with a plurality of holes (not shown in the figure), which can be fixed to a workbench, and the base 2 is provided on both sides There is a linear guide 9; an X-axis saddle 3 is slid on the linear guide 9 of the base 2, and the X-axis saddle 3 is provided with a linear guide 10 on both sides (a gamma-axis saddle is not shown in the figure) The seat 4 slides on the linear guide rail 10 of the X-axis saddle 3; a z-axis linear motor u is installed perpendicular to the linear guide rail 9 of the base 2 and is located on one side of the base 2; an X-axis spring returns A device 19 is installed between the base 2 and the χ-axis saddle 3 and is located on the other side of the base 2; a ζ-axis wedge slider mechanism 15 is installed between the ζ-axis linear motor η and the χ-axis Between the saddles 3; a 2-axis linear guide 14, mounted on one side of the Z-axis linear motor u. An X-axis linear motor 21 is perpendicular to the linear guide 10 of the χ-axis saddle 3 Located on one side of the X-axis saddle 3; a z-axis spring restoring device 29 installed between the χ-axis saddle 3 and the γ-axis saddle 4 and located on the other side of the χ-axis saddle 3; χ-axis wedge slider mechanism 25, It is installed between the χ-axis linear motor 21 and the γ-axis saddle 4; a χ-axis linear guide 24 is installed on one side of the X-axis linear motor 21. The y-axis rotary motor 31 is installed on the γ A shaft saddle mechanism saddle 5 is provided on the stern shaft rotation motor 31; and a parallel mechanism 6 is installed on the parallel mechanism saddle 5 ±, the parallel mechanism: includes a fourth linear motor 41. The fifth linear motor 51 and the sixth linear motor are arranged at an angle of 12G degrees; the fourth linear guide 44, the fifth linear guide 54, and the sixth linear guide 64 are respectively installed on the corresponding fourth to fifth. And one of the six linear motors 4 and 51 and 61; the first wedge-shaped bevel groove 47, the second wedge-shaped bevel groove 57, and the third wedge-shaped bevel groove 67 'are respectively corresponding to the fourth, fifth, and sixth linear motors. 4bu 5bu 61 ±; a carrier ^ two 70 'has a-hemispherical guide post 48, a second hemispherical guide post%, a ^: shaped guide post 68', and the first, second, and third hemispherical guide post Columns 48, 58 are used to abut the corresponding first, second, and third wedge-shaped inclined grooves 47, 57, 67; and The shaft spring restoring device 49, the second gamma shaft spring restoring device 59, and the third stern shaft spring restoring device 69 are arranged at an angle of 120 degrees and are connected between the parallel mechanism saddle 6 and the carrier platform 70. Please refer to FIGS. 1A, 1B, and 2 again. After the z-axis linear motor 11 is electrically connected, the movable portion 13 and the fixed portion 12 of the z-axis linear motor u can generate relative sliding movements. The main block 16 of the z-axis wedge mechanism 15 is fixed to the movable portion 13 and can be moved in the z direction by the movable portion 13. The guide block 17 that is in relative movement with the main block 16 is fixed to the movable portion 13. The X-axis saddle 3. The z-axis linear motor u drives the main block 16 and the guide block 17 to move relative to each other. That is, when the main block 16 moves in the positive z direction with respect to the guide block 17, the X-axis saddle 3 is moved by The linear guide 9 assists the movement in the positive χ direction and causes compression of the X-axis spring return device 19, and the compression potential of the X-axis spring return device 19 provides the χ-axis saddle 3 in the negative χ direction. Power of movement. 'After the X-axis linear motor 21 is electrically connected, the movable portion 23 and the fixed portion 22 of the χ-axis linear motor 21 can generate relative sliding movements. The main block 26 of the χ-axis wedge-shaped structure 25 is fixed to the movable portion. On 23, the movable portion υ can be used to move in the χ direction, and the guide block 27 that is in relative movement with the main guide block 26 is fixed to the Y-axis saddle 4. The X-axis linear motor 21 drives the leading block% and the guide block 27 to generate relative motion ', that is, when the leading block 26 moves in the positive X direction relative to the guide block 27,' the Y-axis saddle 4 passes through the The linear guide 10 assists the negative 2-way movement and causes the compression of the z-axis spring return device 29, and the compression energy of the two-axis spring return I set 29 provides the γ-axis saddle 4 to the positive Power to move in the χ direction. 10 1242736 After the γ-axis rotation motor 31 is electrically connected, the γ-axis rotation motor 3i can drive the Asian Union mechanism saddle 5 to perform a rotation motion on the y-axis. The fourth linear motor 41 located on the comparative seat 5 of the parallel-type mechanism is electrically connected. 'The movable part 43 and the fixed part ^ of the fourth linear motor 41 may generate a sliding motion, so that the first linear motor 41 connected to the movable part 43 may move. Wedge _ "@ Follows with the movable part 43. Similarly, the fifth linear motor 5i is electrically connected, and the movable part 53 and the fixed part M of the fifth linear motor 51 can generate relative sliding movements to make the connection The second deformed inclined groove 57 on the movable portion 53 can move with the movable portion 53. After the sixth linear motor 61 is electrically connected, the movable portion 63 and the fixed portion 62 of six meters up to 61 can be opposite to each other. Sliding 1 movement 'causes the third _slope ㈣ 67 connected to the movable 63 to move with the movable portion 63. The carrier flat 70, the first, second, and third hemispherical guide pillars 48 58 68 top on Corresponding to the first, second, and third wedge-shaped inclined grooves 47, Η, and π, and the vehicle platform 7G and the parallel mechanism saddle 5 are connected with the first, third, Π,%, and 69. When the The movable part 43 drives the first wedge == when moving, the first hemispherical guide post 48 has a height difference along the groove of the first wedge ^ inclined groove 7 Under the first hemispherical guide cylinder groove 47_, the first-axis elastic recovery device 49, 59 of the fourth linear motor W 2 will be in a compressed state, and Γ〇 is a recovery device 69. It is in a stretched state, so that the vehicle platform m and the first semi-spherical guide post 48 are inclined along the first wedge. * 2: When rising, the first and second positions on both sides of the fourth linear motor 41 are raised. Y Second, the spring returns! Sets 49, 59 will be in a stretched state, and the third γ-axis spring is set in a compressed state, which causes the vehicle platform 7G to appear-an inclination angle. After clarifying the preferred embodiment of the present invention, a person familiar with the technology will understand that, without departing from the scope and spirit of the patent application described below, 1242736 variations and changes can be made, and the present invention is not limited to the description. Example Implementation Mode 0
12 1242736 【圖式簡單說明】 ，一 A圖係顯示本發明六自由度微/奈米定位平台之俯視 圖’第—B圖係顯示本發明六自由度微/奈米定 第二圖係顯示本發明六自由度微夺 σ月·J見圖 【主要元件符號說明】 攻不未疋位平台之立體圖。 1-—六自由度微/奈米定位平台 2…基座 3—X轴鞍座 4…Y軸鞍座 5- --並聯式機構鞍座 6- —並聯式機構 9、10…線性導執 11-—Z軸線性馬達 12、 22、42、52、62…固定部 13、 23、43、53、63…可動部 14…Z軸線性導軌 15—-Z轴楔形滑塊機構 16、 26…主導塊 17、 27 —引導塊 19…X軸彈簧回復裝置 21…X轴線性馬達 24…X軸線性導轨 25…X轴楔形滑塊機構 29…Z轴彈簧回復裝置 31-—γ轴旋轉馬達 41—-第四線性馬達 44-—第四線性導轨 1242736 47- —第一楔形斜面溝槽 48- —第一半球形導柱 49- —第一 Y軸彈簧回復裝置 51-—第五線性馬達 54-—第五線性導執 57---第二楔形斜面溝槽 58 —第二半球形導柱 59---第二Y軸彈簧回復裝置 61 —第六線性馬達 64-—第六線性導執 67— -第三楔形斜面溝槽 68— --第三半球形導柱 69— -第三Y軸彈簧回復裴置 70…載具平台12 1242736 [Brief description of the drawings], A diagram is a plan view showing a six-degree-of-freedom micro / nano positioning platform according to the present invention, and FIG. B is a diagram showing a sixth-degree-of-freedom micro / namidic positioning diagram of the present invention. Invented six degrees of freedom to win σ month · J See Figure [Explanation of Symbols of Major Components] A perspective view of a platform that cannot be attacked. 1-—six degrees of freedom micro / nano positioning platform 2… base 3—X-axis saddle 4… Y-axis saddle 5--parallel mechanism saddle 6-—parallel mechanism 9, 10… linear guide 11 --- Z-axis linear motors 12, 22, 42, 52, 62 ... Fixed parts 13, 23, 43, 53, 63 ... Movable part 14 ... Z-axis linear guide 15--Z-axis wedge slider mechanism 16, 26 ... Leading block 17, 27—Guide block 19 ... X-axis spring return device 21 ... X-axis linear motor 24 ... X-axis linear guide 25 ... X-axis wedge slider mechanism 29 ... Z-axis spring return device 31 --- γ axis rotary motor 41—Fourth linear motor 44—Fourth linear guide 1242736 47——First wedge-shaped inclined groove 48——First hemispherical guide post 49——First Y-axis spring return device 51——Fifth linear Motor 54—the fifth linear guide 57—the second wedge-shaped inclined groove 58—the second hemispherical guide 59—the second Y-axis spring return device 61—the sixth linear motor 64—the sixth linear Guide 67—-The third wedge-shaped bevel groove 68——The third hemispherical guide post 69—-The third Y-axis spring return Pei 70… carrier platform
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