TWI240955B - Support structure of micro-sensing plate and its formation method - Google Patents

Abstract

The present invention is related to a micro-sensing plate for micro-liquid droplet evaporation and temperature sensing apparatus. In particular, the present invention is related to the support structure of micro-sensing plate and its formation method capable of increasing structure strength and elongating the application lifetime. Wet etching solution is used to perform anisotropic etching so as to form ""-"" shape or ""+"" shape support structure on the bottom of micro-sensing plate when viewed downwards. Thus, the entire support structure is capable of effectively sustaining the collision of micro-liquid droplet added to the micro-sensing plate. Therefore, the micro-sensing plate is not destroyed due to the collision of micro-odor liquid droplet, and the sensed temperature is not thermally conducted through the support structure so as to assure the sensing accuracy and reach the purpose of increasing structure strength and increasing application lifetime.

Description

1240955 L. Description of the invention (1) [Invention technology] The bottom surface of the present invention's degree sensing device forms a substantial increase, and the sensing is accurate [previous technology, traditional, engine impact technology, related research, this interaction, and bomb And the odor sensation after the rebound, report the fourth announcement, the fourth announcement of the 42nd method "to invent a device specifically for sensing, and the thermal resistance of these coefficients will be heated to a temperature of the heat source environment, and the temperature of the element will change slightly. In the technical field of micro-droplet evaporation and temperature-sensing micro-sensing sheets in the virtual reality, the design of the special supporting structure of the micro-sensing of the present invention allows the intensity of the micro-sensing sheets to be large without transmitting heat away. And increase its service life and ensure reliability. ] Industrial industries such as spray cooling for mechanical processing, spray combustion for spray extinguishing, etc., and high-tech industries, which often use droplets, such as Worthington in 1887, proposed that the research field of droplet impact phases can be divided into single areas. The intersection of particles and droplet groups with the wall surface affects the phenomenon of splashing, spreading, rebounding, and fragmentation that occur after the impact of droplets. It can be used for the current virtual reality-for micro-odor simulation and temperature sensing, > China's Patent No. 9423 "Heat Conduction Sensor" 〃 Invention Patent Case and 0826 "Thermal Resistance Infrared Sensing Element and Manufacturer's Case" all mentioned the above-mentioned microfluid Drop evaporation and temperature temperature sensors use a conductor sensing element, that is, a high-temperature material, such as platinum, and then pass a current through a metal wire to make the required temperature become a hot body. When this micro-sensing element is placed, The micro-sensing element above is subject to the thermal conductivity of the external gas, which causes the change in the thermal resistance value of the component, and then changes the voltage value of the component. From the relationship between the voltage value and the thermal resistance value,

1240955 V. Description of the invention (2) You can find the required but currently existing silicon substrate made of micro and hollowed out into a thin film type micro-sensing sheet 1 0 material 'The structure of the temperature measuring disc is not very good At 10, the situation of collapse due to the impact with limited support is obtained through the above-mentioned suspension structure and top support. When the micro-sensing method is used, the degree and service life of the micro-droplets are loaded. Because of this, the problem of in-depth research and development will eventually lead to the micro-sensing structure of heat conduction, while ensuring benefits. [Summary] To this end, the present body implements the above-mentioned micro-sensing sensing tablet state of the eye temperature value, so as to avoid the sensor being stable. In the case of micro-sensing, it is greatly explained that only a simple device can be used for impact, And the bottom of the measuring element is supported to prevent the micro-sensing effect. When the micro-gas sheet 10 is often affected, it is caused by the use of the operating odor, which is caused by the structure. However, the thickness of the scented droplets is slightly different. It is used in the existing square support droplets to evaporate and collapse. Various requirements ® The support structure 1 shown in the first picture has only the heat transfer of 0 on both sides, which directly accompanies the micro-drops. Extremely thin, its life on the test piece 10. When the two sides of the structure of the micro-sensor are sent, the micro-sense affects the overall measurement; it is shown that from 5 to the bottom of the side fulcrum is the micro-sensor. Only the two sides of the micro-droplet hit the micro-sensor. The fulcrum on the side of the film comes. The structure of the test film is strong due to the lack of structure. The inventor aimed at the support structure of the existing micro-sensing film and actively sought a solution. After long-term efforts, he successfully developed a structure with good structural strength and no test film. The supporting structure to enhance the accuracy of the micro-sensing film to support its sensing accuracy, and to improve its overall economy. The following technical methods are mainly used to further enhance the effectiveness of the micro-sensor: Film and one

Page 7 1240955 V. Description of the invention (3) The structure of the branch building is structured to support the structural strength with the middle end of the side support structure. Do not use this to make the whole impact, so that the accuracy of the micro-temperature measurement is also aimed. Simultaneously enter the side of the micro-edge to form a micro-sensing because the small supporting sensing piece can not be sensed at the same time. The fulcrum of the supporting piece has a unidirectional bottom surface of the film. And support the bottom surface of the side edge of the micro-sensing piece, and then the oblique tapered ribs that converge, the top center of the rib, so that the micro-sensing piece will increase the knot and collapse, and will not lead the heat away ; Effectively withstand the impact of micro droplets to micro odor droplets and collapse, and the supporting structure will conduct heat to ensure that the step of increasing its structural strength and increasing its service life is achieved by using the following molding methods Formed, which includes: A. Plating barrier layer ^ A silicon wafer is used as the base material of the micro-sensing sheet, and B is plated on the front and back of the base material, and the barrier layer is formed before the barrier layer. Test C, Yu followed by heating of the component D, Bell then merged into an opening to allow a barrier layer; Strict-Sensing layer 〃 The surface of the insulating layer is plated with a sensing layer, and the surface of the layer coated with the sensing layer is plated Layer by layer The landing layer can be used as the adhesion between the resist layers; the exposure layer and the development technology are used to etch the sensing pattern on the sensing layer to etch the sensing pattern, and at the same time, the extra adhesive layer for increasing adhesion is etched; the protective layer is plated on the surface of the sensing layer A protective layer, and the protective layer-shaped sensing layer is partially exposed for connection to the conductive layer;

1240955 V. Description of the invention (4) E. Conductive plating. Then, a conductive layer is plated on the top surface of the protective layer, and at the same time, conductive lines are etched, and the bottom surface of the peripheral edge of the conductive layer can be connected to the sensing layer through the opening of the protective layer; F 2. The protective layer is plated, and a protective layer G is further forged on the surface of the conductive layer. The members who followed the invention are the model for implementing hair-based hair care [implementing the test piece of this film 3 supporting structure, forming a supporting structure, using a predefined mask pattern, and then exposing and developing, isotropic The wet etch etches the base material out of the support structure. 2. An opening is formed at the conductive line corresponding to the conductive layer of the protective layer to expose aluminum, so that the conductive line can be used to pass through the electrical signal, and at the same time complete the entire micro-sensing. Mode] The invention is only a better one and its performance is described in more detail. Therefore, any form of modified embodiment, with the help of drawings and numbers, will further explain this-in the hope that it will make your review more widely- Understanding, and enable those skilled in the art to explain the preferred embodiments, rather than to be based on the creative spirit of the present invention, or more modified, still belong to the intent of the present invention to maintain the structure ^ see 0 and a top of a supporting structure 40, and a micro-sensing with good structural strength and not transmitting heat, as shown in the second figure, the micro-sensor has a micro-sensing 4 0, in which the micro-sensing sheet 30 forms For the support structure 40, the side fulcrum

Page 9 1240955 V. Description of the invention (5) 4 1 The bottom surface of the side edge of the top supporting micro-sensing piece 30, and the supporting structure 40 is formed with an obliquely tapered rib 4 5 in the center, and the rib 4 5 The top end is suitable to be against the center of the bottom surface of the micro-sensing sheet 30, so that the structural strength of the micro-sensing sheet 30 can be increased, and it will not collapse due to the impact of micro-droplets, and it will not cause heat conduction; The micro-electro-mechanical system (MEMS) technology is used to make a micro-sensor for micro-droplet evaporation and temperature sensing with a support structure. The micro-sensor includes: A. Plating barrier layer Please refer to the third figure first. For a silicon wafer, the lattice direction (100) is the base material 50 of the micro-sensing sheet 30, and a barrier layer 5 5 is plated on the front and back of the base material 50. The barrier layer 5 5 may be Silicon Nitride, the thickness of the barrier layer 5 5 is '4000 A;' B. Plated sensing layer y Please refer to the fourth figure, and apply a sensing layer on the surface of the barrier layer 5 5 6 0, the sensing layer 60 can be a turned metal (Pt), the thickness is about 1000A, and it is before the sensing layer 60 on the mine Prior to the surface of the barrier layer 5 5, a bonding layer 65 is plated. The bonding layer 65 can be titanium metal (Ti) and has a thickness of about 3 0 A, so that the bonding layer 6 5 can be used as the barrier layer 5 5 and the sense layer. Next, the detection layer 60 is followed; C, the remaining sensing layer is further referred to the fifth figure, and then the exposure pattern and the development technology are used to etch the heating pattern of the sensing element on the sensing layer 60 and etch away at the same time.

Page 10 1240955 V. Description of the invention (6) Adding extra D and ore protection layer for adhesion See also the sixth plating with a protective layer 7 for 2000 A 'and guaranteeing 60 0, with partial exposure (E, conductive plating, then The protective layer is Ming metal (A1), 8 5, (refer to the 60th conduction; F. For the plating protection layer, please refer to the ninth upper layer of the protective layer 9 0 5000A, and in the protective opening, let the conductive wire 8 feel slightly. Test piece 3 0; G. Form a support and finally etch out and assume a “ten” shape (50) after exposure and development of the base material in advance (shown in the figure);

Then the layer 6 5; as shown in the figure, and then on the surface 0 of the sensing layer 0, the protective layer 70 can be silicon nitride, the thickness of the protective layer 70 is about 7 5 to form an opening 7 5, so that the sensing layer is like the seventh (Shown in the figure) to connect the conductive layer; the top surface of the 70 is plated with a conductive layer, the conductive layer can have a thickness of about 50000 A, and the conductive line is etched at the same time (shown in Figure 8), and the conductive line 8 5 and the display of the sensing layer, and further bond to the surface of the conductive layer-'the protective layer 9 0 can be nitrided' and the thickness is about layer 9 0 corresponding to the conductive exposed layer of the conductive layer 8 5 can be formed at 5 For access to telecommunications signals, the photomask pattern of the entire structure is completed at the same time, as shown in Figures 10 and 12, and then anisotropic wet etching is performed. (Shown in Figure 11) as shown in Figure 13) supporting structure 40 (such as the opening of the conductive line of the second corresponding conductive layer to expose aluminum)

Page 11 1240955 V. Description of the invention (7.) Lead wire, let the test piece guide. As a result, the support of the micro-sensing film is extended. As for the micro-sensor for the micro-smell source, the supporting structure is also increased due to the life. 4 The supporting structure performance and practical invention of induction are indeed the same or near requirements. The electric wire can be used as an access signal, and at the same time, the entire micro-sensing can be used with good strength. At the same time, the support can be avoided to effectively ensure that the problem of the hair and the effective and excellent hair products are publicly used. Application, the impact of the impact of droplets on the structure of the olfactory sensing sheet 0. It is determined that the existing micro has the above-mentioned economic benefits, and the technical field has been in line with the issuance of the invention patent. The micro-sensing film can improve the structural strength of the micro-sensing film, and its service life can be guaranteed. 〇The structurer invented that the South strong growth was steamed by 30 droplets, the same as 0. It can be said that the value is facing. A creative production is added according to the law, which is enough to virtualize the structure 4 to remove the slight temperature sense. It can be improved and clear, and it is useful. Therefore, I hope that you can use the effective solution to withstand the effects of 0 and 3 in the micro-environment. Odors are transmitted to the sensor using a large number of odors.

Page 12 1240955 Brief description of the drawings (I) Illustration of the drawings The first picture: is a schematic cross-sectional view of an existing micro-sensing piece, which is used to explain the structure and relative relationship of the supporting structure of the existing micro-sensing piece. The second figure is a schematic cross-sectional view of the micro-sensing sheet of the present invention, so as to explain the structure and corresponding relationship of the present invention. The third figure is a schematic view of forming a barrier layer on a base material according to the present invention. FIG. 4 is a schematic diagram of a sensing layer plated according to the present invention. Fifth figure: It is a schematic diagram of the present invention performing a money engraving on the sensing layer. FIG. 6 is a schematic diagram of a coating protective layer of the present invention. Fig. 7 is a schematic view showing that the sensing layer of the present invention is opened to reserve contacts with aluminum wires. FIG. 8 is a schematic diagram of forming a conductive line by plating an aluminum layer in the present invention and making it conductive with the sensing-layer. β r-Ninth diagram: It is a schematic diagram of the present invention to form a nitride-guaranteed protective layer on an aluminum layer. The tenth figure is a schematic diagram of the first photomask pattern of the present invention. Fig. 11 is a schematic plan view of the first photomask-forming supporting structure of the present invention. FIG. 12 is a schematic diagram of a second photomask pattern of the present invention. Thirteenth figure: The support structure of the second photomask forming type of the present invention is not intended to be viewed from the top. Fig. 14 is a schematic view of an area where the wire contacts are opened in the present invention, so that the aluminum wire is exposed as an electrical signal.

Page 13 1240955

Page 14

Claims (1)

1240955 Patent application scope of the test piece and end, and the bottom surface, the strip, the micro-sensing causes the support A of the thermally borrowed micro-sensing support structure 2 to be front and back B and before the insulation layer and the D of the C-connecting component inoculate a support The knot that supports the knot and the top sheet of the rib guides away; therefore, the messenger of the piece. , A structure, plated-silicon-plated one, plated to resist the barrier layer sensing layer, engraved on the heating map, plated and kept, and as described in the forming the insulation circle is layer resistance The sensing layer between the surface of the stratified layer, the support layer senses the supporting structure of the micro-sensing sheet, and the micro-sensor has a micro-sensing structure, in which the micro-sensing sheet is formed on the top structure of the supporting structure to the side. The side fulcrum of the side-supporting micro-sensing sheet of the side supporting point is formed with an oblique cone-shaped rib end which closes upwards to fit against the center of the bottom surface of the micro-sensing sheet. This can increase the structural strength and prevent micro droplets from colliding. Collapse without forming / constructing a micro-sensing sheet that can enhance the structural strength of the micro-sensing sheet, and can extend its life and ensure its sensing accuracy The sheet method includes: a base material of the micro-sensing sheet, and / or the base material and an insulation layer; a sensing layer on the surface key, and a bonding layer on the sensing layer on the clock, so that Layers can be used as barriers; Exposure on layers A developing technology, ϋ carve sensed simultaneously etched off excess increase the adhesion with the adhesive layer; a protective coating layer on the surface of the key, and the protective layer is formed Page 15