TWI240130B - Liquid crystal display device - Google Patents
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1240130 玖、發明說明: 【發明所屬之技術領域】 本發明有關一種液晶顯示裝置及一種製造該液晶顯示裝 之方法本务明尤其有關一種於各個圖素中具有透射顯 示區及反射顯示區之液晶顯示裝置,及用以製造該液晶顯 示裝置之方法。 【先前技術】 液晶顯示裝置因為具有薄而耗能量低之特色,故可廣泛 應用,包括辨公室自動化(0A)裝置諸如文字處理機及個人 電腦、攜帶4資料裝置諸如攜帶式電子行程表、及具有液 晶偵測器而收納有照相機之VCR。 與CRT顯示器及電光(EL)顯示器不同地,該液晶顯示裝置 包括本身不會放射光線之液晶顯示面板。因此,所謂之透 射型經常用為液晶顯示裝置,其包括位於其後面或一側面 而稱為後照光之照明器,故來自後照光而穿透液晶面板之 光量係由該液晶面板控制,以得到影像顯示。 然而,於該種透射型液晶顯示裝置中,該後照光消耗液 晶顯示裝置所消耗總能量之50%或更高。因此提供後照光 會增加能量消耗。 為了克服前述問題,於經常於戶外使用或由使用者攜帶 之攜帶式資料裝置中使用反射型液晶顯示裝置。該反射型 液晶顯示裝置於該對基板之一上具有反射器,以取代後照 光,而自該反射自表面反射環境光線。 該種反射型液晶顯示裝置係於使用偏光板之顯示模式下操1240130 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a liquid crystal display device and a method for manufacturing the liquid crystal display device. The present invention relates particularly to a liquid crystal having a transmissive display area and a reflective display area in each pixel. Display device and method for manufacturing the liquid crystal display device. [Prior art] LCD devices are widely used because they are thin and consume low energy. They include office automation (0A) devices such as word processors and personal computers, and carry 4 data devices such as portable electronic schedules, And a VCR with a liquid crystal detector and a camera. Unlike a CRT display and an electro-optic (EL) display, the liquid crystal display device includes a liquid crystal display panel which does not emit light by itself. Therefore, the so-called transmissive type is often used as a liquid crystal display device, which includes an illuminator called back light on the back or one side, so the amount of light from the back light that penetrates the liquid crystal panel is controlled by the liquid crystal panel to obtain Image display. However, in such a transmissive liquid crystal display device, the backlight consumes 50% or more of the total energy consumed by the liquid crystal display device. Providing backlighting therefore increases energy consumption. To overcome the aforementioned problems, reflective liquid crystal display devices are used in portable data devices that are often used outdoors or carried by users. The reflective liquid crystal display device has a reflector on one of the pair of substrates to replace the backlight and reflect ambient light from the reflection from the surface. This reflective liquid crystal display device operates in a display mode using a polarizing plate.
O:\92\92808.DOC 124〇13〇 、" 廣/乏使用於透射型液晶#員示裝置之扭轉向列(tn)模 超扭轉向列(STN)模式。近年來,不使用偏光板而得到較 明免顯示之相變化型賓主模式蓬勃發展。 使用環境光反射之反射型液晶顯示裝置之缺點係為當周 圍環境陰暗時,顯示器之能見度極低。相反地,該透射型 ' '曰曰·、、員示裝置之缺點在於環境明亮時。即,色彩再現性較 低’而因顯示光之明亮度較環境光低,故無法完全辨識該 頌不。為了改善於明亮環境下之顯示品質,後照光之強度 需增加。此情況增加該後照光及所形成之液晶顯示裝置的 里消耗而且’當需於直接曝露於陽光或直接照光之位 置下觀看該液晶顯示裝置時,顯示品質必然因環境光而降 低。例如,當固定於車上之液晶顯示裝置螢幕或用於固定 I置之個人電腦之顯示螢幕直接接受陽光或照光時,難以 觀看其自身顯示。 為了克服前述問題,已於例如日本公開公告第7_333598 號中揭示一種同時具有透射模式顯示及反射模式顯示之液 曰曰節員示裝置。該液晶顯示裝置具有半透射性反射膜,其透 射邵分光線,而反射部分光線。 圖52顯示使用半透射性反射膜之液晶顯示裝置。該液晶 頭示裝置包括偏光板3〇a及30b、相板3 1、透明基板3,2、黑 色掩模33、對電極34、對正膜35、液晶層36、金屬_絕緣體 -金屬(MIM)元件π、圖素電極38、光源39、及反射膜4〇。 圖素電極38係為半透射性反射膜,係由金屬粒子所構成 I極薄層或於各圖素上具有散亂微孔缺陷或凹陷缺陷之料O: \ 92 \ 92808.DOC 124〇13〇, " Wide / lack of twisted nematic (tn) mode for transmissive LCD # display device Super twisted nematic (STN) mode. In recent years, a phase-change guest-host mode that has obtained a clearer display-free display without using a polarizing plate has flourished. The disadvantage of reflective liquid crystal display devices using ambient light reflection is that when the surrounding environment is dark, the visibility of the display is extremely low. On the contrary, the transmissive type "", ", said, the shortcoming of the display device is disadvantageous when the environment is bright. That is, the color reproducibility is low 'and the brightness of the display light is lower than that of the ambient light, so the song cannot be completely recognized. In order to improve the display quality in a bright environment, the intensity of the backlight must be increased. This situation increases the back light and the consumption of the formed liquid crystal display device, and when the liquid crystal display device needs to be viewed in a position directly exposed to sunlight or direct light, the display quality is necessarily lowered due to ambient light. For example, when the screen of a liquid crystal display device fixed to a car or a display screen of a personal computer fixed to a device directly receives sunlight or light, it is difficult to view its own display. In order to overcome the foregoing problems, for example, in Japanese Laid-Open Publication No. 7_333598, a liquid display device having both a transmission mode display and a reflection mode display has been disclosed. This liquid crystal display device has a semi-transmissive reflective film that transmits partial light and reflects part of the light. FIG. 52 shows a liquid crystal display device using a semi-transmissive reflective film. The liquid crystal head display device includes polarizing plates 30a and 30b, a phase plate 31, a transparent substrate 3, 2, a black mask 33, a counter electrode 34, an alignment film 35, a liquid crystal layer 36, and a metal_insulator-metal (MIM). ) Element π, pixel electrode 38, light source 39, and reflective film 40. The pixel electrode 38 is a semi-transmissive reflective film, which is made of metal particles. It is an extremely thin layer or a material with scattered microporous defects or depression defects on each pixel.
O:\92\92808.DOC 1240130 層。具有此種結構之圖素電極使來自光源39之光穿透而使 :卜來光線諸如m線及室内照射光反射,而兼具透射型 顯示功能及反射型顯示功能。 土 圖52所示之習用液晶顯示裝置具有以下問題。首先,當 極薄之沉積金屬粒子層用為各圖素之半透射性反射膜時;^ 因^至屬粒子《吸光係數極高,故入射光之内部吸收極大 ’某些光被吸收而無法用於顯示,因而降低光線之利用效 率〇 田使用具有散亂微孔缺陷或凹陷缺陷之膜作為各圖素之 圖素電極38時,該膜之結構太過複雜而無法控制,需要較 精確之設計條件。因此,難以製造具有均勾特性之薄膜。 換…電或光特性之再現性極差,而極難控制前述液晶 續不裝置中之顯示品質。 例如’若韻料年來廣泛料液晶顯示裝置之切換元 件的薄膜電晶體(TFTs)使用於圖52所示之液晶顯示裝置, =各圖素中用以形成儲存電容器之電極需藉除圖素電極以 電極/連接材料形成。此情況下,與習用裝置相同地, =半透射性反射膜所製得之圖素電極不適於形成館存電容 為。而且’即使經由絕緣層於一部分連接點及元件上形成 作為圖素電極之透射性反射膜’該包括透射分量之圖素電 增加數值孔徑。而且’若光係入射於切換元件諸 …·絕緣體金屬及薄膜電晶體之半導體層上,則產生光 :栗動4。形成作為遮光層之半透射性反射膜不足以保 U切換元件以防止光線。為了確定遮光性,需於該對基O: \ 92 \ 92808.DOC 1240130 layer. The pixel electrode having such a structure allows the light from the light source 39 to pass through and reflects the bla light such as m-rays and indoor irradiation light, and has both a transmissive display function and a reflective display function. The conventional liquid crystal display device shown in Fig. 52 has the following problems. First, when an extremely thin layer of deposited metal particles is used as a semi-transmissive reflective film for each pixel; ^ Because it is a particle, "the absorption coefficient is extremely high, so the internal absorption of incident light is extremely high. Some light is absorbed and cannot be used. For display, thus reducing the utilization efficiency of light. When using a film with scattered microporous defects or recessed defects as the pixel electrode 38 of each pixel, the structure of the film is too complicated to be controlled, and more accurate Design conditions. Therefore, it is difficult to produce a thin film having a uniform hooking property. The reproducibility of the electrical or optical characteristics is extremely poor, and it is extremely difficult to control the display quality in the aforementioned liquid crystal continuous device. For example, 'If thin film transistors (TFTs) of switching elements of liquid crystal display devices have been widely used in liquid crystal display devices shown in FIG. 52 for the past year, the electrodes used to form storage capacitors in each pixel must be borrowed from the pixel electrode. Formed with electrodes / connecting materials. In this case, like conventional devices, a pixel electrode made of a semi-transmissive reflective film is not suitable for forming a library capacitance. Moreover, even if a transmissive reflective film as a pixel electrode is formed on a part of connection points and elements via an insulating layer, the pixel of the transmission component should increase the numerical aperture. Moreover, if the light is incident on the semiconductor layer of the switching element, the insulator metal and the thin film transistor, light will be generated. The formation of a semi-transmissive reflective film as a light-shielding layer is insufficient to protect the U-switching element from light. To determine the light-shielding property,
O:\92\92808.DOC 1240130 板上放置另一層遮光膜。 【發明内容】 本發明液晶顯示裝置包括第一片基板、第二片基板、及 夾置於"亥第片基板與第二片基板之間之液晶層;多個圖 素區,其係由個別對施加電壓於液晶層之電極所界定,而 該多個圖素區中每一個皆包括反射區及透射區。 本务明之一具體實例中,該第一片基板包括對應於反射 區之反射電極區及對應於透射區之透射電極區。 於另一個本發明具體實例中,該反射電極區係高於該透 射電極區,於第一片基板表面上形成階梯,而液晶層於反 射區中之厚度小於液晶層於透射區中之厚度。 本發明另一個具體實例中,反射區之面積於各圖素區中 佔約10至約90%。 或本發明液晶顯示裝置包括第一片基板、第二片基板、 及夾置於該第一片基板與第二片基板之間之液晶層,該第 一片基板包括:多條閘極線;多條源極線,其與該多條閘 極線交叉·’多個切換元件,其係位於該多條閘極線與該多 條源極線交點之附近;及多個圖素電極,其係連接於該多 個切換70件,該第二片基板包括對電極,該多個圖素區係 由該多個圖素電極、對電極、及夾置於該多個圖素電極與 該對電極之間之液晶層所界定,而該多個圖素區中每一個 白包括反射區及透射區。 本發明之一具體實例中,該第一片基板包括對應於反射 區之反射電極區及對應於透射區之透射電極區。O: \ 92 \ 92808.DOC 1240130 Another layer of light-shielding film is placed on the board. [Summary of the Invention] The liquid crystal display device of the present invention includes a first substrate, a second substrate, and a liquid crystal layer sandwiched between the " Heidi substrate and the second substrate; a plurality of pixel regions, which are composed of The electrodes for applying a voltage to the liquid crystal layer are individually defined, and each of the plurality of pixel regions includes a reflection region and a transmission region. In a specific example of the present invention, the first substrate includes a reflective electrode region corresponding to a reflection region and a transmissive electrode region corresponding to a transmission region. In another embodiment of the present invention, the reflective electrode region is higher than the transmissive electrode region, and a step is formed on the surface of the first substrate, and the thickness of the liquid crystal layer in the reflective region is smaller than the thickness of the liquid crystal layer in the transmissive region. In another embodiment of the present invention, the area of the reflection area occupies about 10 to about 90% of each pixel area. Or the liquid crystal display device of the present invention includes a first substrate, a second substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate, and the first substrate includes: a plurality of gate lines; A plurality of source lines that intersect the plurality of gate lines; a plurality of switching elements that are located near the intersection of the plurality of gate lines and the plurality of source lines; and a plurality of pixel electrodes that Is connected to the plurality of switching 70 pieces, the second substrate includes a counter electrode, and the plurality of pixel regions are sandwiched by the plurality of pixel electrodes, the counter electrode, and the plurality of pixel electrodes and the pair A liquid crystal layer is defined between the electrodes, and each of the plurality of pixel regions includes a reflection region and a transmission region. In a specific example of the present invention, the first substrate includes a reflective electrode region corresponding to a reflective region and a transmissive electrode region corresponding to a transmissive region.
O:\92\92808.DOC 1240130 於另一個本發明具體實例中,該反射電極區係高於該透 射電極區,於第一片基板表面上形成階梯,而液晶層於反 射區中之厚度小於液晶層於透射區中之厚度。 於另一個本發明具體實例中,該反射區中之液晶層厚度 約為透射區中液晶層厚度之一半。 另一個本發明具體實例中,每個圖素電極皆包括位於反 射電極區中之反射電極及位於透射電極區中之透射電極。 另一個本發明具體實例中,該反射電極及該透射電極係 彼此電聯。 另一個本發明具體實例中’每個圖素電極皆包括透射電 極而*亥反射區包括透射電極及與該透射電極隔離之反射 層。 另一個本發明具體實例中,該反射電極區至少與該多條 閘極線、該多條源極線、及該多個切換元件中之一部分重 疊。 另一個本發明具體實例中,該反射電極區及該透射電極 區中至少-個具有材料與該多條閘極線或該多條源極線之 材料相同之料層。 另-個本發明具體實例中,每個圖素區中之反射區面積 皆佔約10至約90%。 、 另一個本發明具體實例中,該第一片基板另外包括儲存 電容器電極,用以經由絕緣膜而與該圖素電極形成儲存電 容器,其中該反射電極區與該儲存電容器電極重疊。弘 另-個本發明具體實例中,該液晶顯示裝置另外包括位O: \ 92 \ 92808.DOC 1240130 In another embodiment of the present invention, the reflective electrode region is higher than the transmissive electrode region, and a step is formed on the surface of the first substrate, and the thickness of the liquid crystal layer in the reflective region is less than The thickness of the liquid crystal layer in the transmission region. In another embodiment of the present invention, the thickness of the liquid crystal layer in the reflective region is about one-half the thickness of the liquid crystal layer in the transmissive region. In another embodiment of the present invention, each pixel electrode includes a reflective electrode in a reflective electrode region and a transmissive electrode in a transmissive electrode region. In another embodiment of the present invention, the reflective electrode and the transmissive electrode are electrically connected to each other. In another embodiment of the present invention, each of the pixel electrodes includes a transmissive electrode and the * H-reflection region includes a transmissive electrode and a reflective layer isolated from the transmissive electrode. In another specific embodiment of the present invention, the reflective electrode region overlaps at least a part of the plurality of gate lines, the plurality of source lines, and the plurality of switching elements. In another embodiment of the present invention, at least one of the reflective electrode region and the transmissive electrode region has a material layer that is the same as the material of the plurality of gate lines or the plurality of source lines. In another specific embodiment of the present invention, the area of the reflective region in each pixel region accounts for about 10 to about 90%. In another embodiment of the present invention, the first substrate further includes a storage capacitor electrode for forming a storage capacitor with the pixel electrode through an insulating film, wherein the reflective electrode region overlaps the storage capacitor electrode. In another embodiment of the present invention, the liquid crystal display device further includes
O:\92\92808.DOC -10- 1240130 於該第一片基板上而與該液晶層相對之表面上之微透鏡。 另一個本發明具體實例中,每個反射電極區皆包括金屬 層及位於該金屬層下層之中間層絕緣膜。 另一個本發明具體實例中,該金屬層具有連續波型。 另一個本發明具體實例中,該中間層絕緣層具有凹陷及 隆凸形狀。 另一個本發明具體實例中,該中間層絕緣層係由感光性 聚合物樹脂膜形成。 另一個本發明具體實例中,該中間層絕緣層覆蓋該切換 兀件、該多條閘極線、或該多條源極線之至少一部分。 另一個本發明具體實例中,該反射電極係於與該多條閘 極線或該多條源極線相同之高度下形成。 閘極線相同之高度,而 另一個本發明具體實例中,該反射電極係位於與該多條 圖素電極使用。 該反射電極係電聯於該閘極線,供與該反射電極相鄰之 另一個本發明具體實例中,O: \ 92 \ 92808.DOC -10- 1240130 Microlenses on the surface of the first substrate opposite to the liquid crystal layer. In another embodiment of the present invention, each reflective electrode region includes a metal layer and an intermediate layer insulating film located under the metal layer. In another embodiment of the present invention, the metal layer has a continuous wave type. In another embodiment of the present invention, the interlayer insulating layer has a concave shape and a convex shape. In another embodiment of the present invention, the interlayer insulating layer is formed of a photosensitive polymer resin film. In another embodiment of the present invention, the intermediate insulating layer covers at least a part of the switching element, the gate lines, or the source lines. In another embodiment of the present invention, the reflective electrode is formed at the same height as the plurality of gate lines or the plurality of source lines. The gate lines are the same height, and in another embodiment of the present invention, the reflective electrode is used in conjunction with the pixel electrodes. The reflective electrode is electrically connected to the gate line for another specific embodiment of the present invention adjacent to the reflective electrode.
容器。 中,將與施加於該對電極相同之 :實例中,該反 成,而該反射 電極重疊而形成儲存電container. In the example, the reaction is the same as that applied to the pair of electrodes: in the example, the reflection and the reflection electrode overlap to form a storage battery.
形成。 該反射電極係由鋁或鋁合金 另一個本發明具體實例中, 该透射電極係由氧化銦錫形form. The reflective electrode is made of aluminum or aluminum alloy. In another embodiment of the present invention, the transmissive electrode is made of indium tin oxide.
O:\92\92808.DOC -11 - 1240130 成,而金屬層係夾置於該透射電極與該反射電極之間。 本务明另一方面提供一種製造液晶顯示裝置之方法。該 :晶顯示裝置包括第-片基板、第二片基板、及夾置於該 第-片基板與第二片基板之間之液晶層,該第一片基板包 括·夕备、閘極線’多條源極線,其與該多條閘極線交又;多 、元件/、係位於该多條閘極線與該多條源極線交點 之二近’ a多個圖素電極’其係連接於該多個切換元件, 0亥第一片基板包括對電極,a多個圖素區係、由該多個圖素 迅°對电極及夾置於該多個圖素電極與該對電極之間 之液晶層所界定,而士方夕μ m + μ夕個圖素區中每一個皆包括反射區 =透射區4方法包括步驟··使用具有高透光度之材料於 第-片基板上形成透射電極區;形成感光性聚合物樹脂層 ’及於忒“物树脂層上形成由具有高反射性之材料所構 成之反射層。 本發明之-具體實例中,該感光性聚合物樹脂層 個凹陷部分及隆凸部分。 或提供一種製造液晶顯 ^ ±卜 ”、員不衣置之方法。該液晶顯示裝置 包括弟一片基板、第- ^ 片基板、及夾置於該第一片基板舆 第二片基板之間之液晶層, 、 曰巧弟一片基板包括:多條閘極 線,多條源極線,其血兮客欠 一 ^夕彳木閘極線交叉;多個切換元件 ,其係位於該多條閘極線盥 一夕條源極線交點之附近;及 多個圖素電極,其係連接 安於°亥夕個切換元件,該第二片基 板匕括對電極,該多個圖素 京L係由该多個圖素電極、對電O: \ 92 \ 92808.DOC -11-1240130, and the metal layer is sandwiched between the transmissive electrode and the reflective electrode. Another aspect of the present invention is to provide a method for manufacturing a liquid crystal display device. The crystal display device includes a first substrate, a second substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate. The first substrate includes a device and a gate line. Multiple source lines, which intersect with the multiple gate lines; multiple, components /, are located near two of the intersections of the multiple gate lines and the multiple source lines, 'a multiple pixel electrodes' and Is connected to the plurality of switching elements, the first substrate includes a counter electrode, a plurality of pixel regions, the plurality of pixel electrodes and the plurality of pixel electrodes sandwiched between the pixel electrodes and the The liquid crystal layer between the electrodes is defined, and each of the pixel areas of μm + μx includes a reflective area = a transmissive area. 4 The method includes steps. · Use a material with high light transmittance in the- A transmissive electrode region is formed on the sheet substrate; a photosensitive polymer resin layer is formed; and a reflective layer made of a material having high reflectivity is formed on the resin layer. In a specific example of the present invention, the photopolymerization Recessed part and raised part of the resin layer. Or provide a method for manufacturing a liquid crystal display. The method. The liquid crystal display device includes a first substrate, a first substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate. A single substrate includes a plurality of gate lines, and a plurality of gate lines. Source lines whose blood lines owe a cross to the gate line; multiple switching elements are located near the intersection of the source lines and the multiple lines; and multiple pixels An electrode is connected to a switching element mounted on the sea, the second substrate is a counter electrode, and the plurality of picture elements L are formed by the plurality of picture element electrodes and an opposite electrode.
° “置於该多個圖素電極盥哕tf帝% M ,、4對電極之間之液晶層所° “Placed on the multiple pixel electrodes, tf %% M, liquid crystal layer between 4 pairs of electrodes
O:\92\92808.DOC -12- 1240130 界定,而該多個圖素區中每一 該方法包括步驟“使用二Γ 射區及透射區。 上㈣具“透光度之材料於第-片基板 上形成透射電極區;於該透 該保護膜之-部分上形成極區上形成保護膜;及於 反射電極區。Φ成具“反射性之料層,以形成該 本發明之一具體實例 極線相同之高度上形成。 ’極區係於與該多條間 一因此,轉明可得到以下優點⑴提供兼具有透射模式顯 示及反射模式顯示之液晶$ 、、、、、 奶丄 日颂不i置,其中其境光及來自後 如先之光利用效率較習用相 更 工〜 早白用相问類型之液晶顯示裝置改善, 而侍到優越之顯示品質,及 嬰> + 、 (2)棱供一種製造該液晶顯示裝 置之方法。於本發明液晶顯示 亮環境下所得之顯示品質。 尤其大幅改善於明 熟習此技藝者可於參照附圖詳細閱讀以下詳述後進 明瞭本發明之此等及其他優點。 / 【實施方式】 (實施例1) 本發明實施例1之液晶顯示裝置包括主動㈣基板及透 明對絲(例如玻璃基板),其具有與圖素電極相對之對電柘 、。硬晶層係夾置於該主動陣列基板與該對基板之間。用以 施加電壓於該液晶層之各對圖素電極及對基板界定了多個 圖素區。該圖素區包括-對電極及介於該對電極之間之液 晶層。該種界定亦可應用於簡單矩陣型液晶顯示裝置,龙 具有多個掃描電極及多個信號電極。 /、O: \ 92 \ 92808.DOC -12- 1240130, and each of the plurality of pixel regions, the method includes the step of "using two Γ radiation regions and transmission regions. The material with" transmittance "on the first- A transmissive electrode region is formed on the sheet substrate; a protective film is formed on a polar region formed on a part of the transparent film; and a reflective electrode region. Φ is formed into a "reflective material layer" to form the same height as the polar line of a specific example of the present invention. 'The polar region is connected with the plurality of strips. Therefore, the following advantages can be obtained by turning out, providing both There are liquid crystal display with transmission mode display and reflection mode display. The use of ambient light and light from behind is more efficient than the conventional phase. The liquid crystal display device is improved, and the superior display quality is served, and the baby > +, (2) edge provides a method for manufacturing the liquid crystal display device. The display quality obtained under the bright environment of the liquid crystal display of the present invention is particularly greatly improved in Those skilled in the art can understand these and other advantages of the present invention after reading the following detailed description with reference to the drawings. [Embodiment] (Embodiment 1) The liquid crystal display device according to Embodiment 1 of the present invention includes an active substrate and A transparent pair of wires (such as a glass substrate) has a pair of electrodes opposite to the pixel electrode. A hard crystal layer is sandwiched between the active array substrate and the pair of substrates. It is used to apply a voltage to the liquid crystal. Each pixel electrode of the layer and the substrate define a plurality of pixel regions. The pixel region includes a counter electrode and a liquid crystal layer interposed between the pair of electrodes. The definition can also be applied to a simple matrix liquid crystal display. Device, the dragon has multiple scan electrodes and multiple signal electrodes.
O:\92\92808.DOC -13 - 1240130 本發明液晶顯示裝置之每個圖素中皆具有至少一個透射 區及至少一個反射區。該透射區及反射區包括液晶層及一 對夾置該液晶層之電極。界定該透射區之電極區域係稱為 透射電極區’而界足該反射區之電極區域係稱為透射電梅 圖1係為實施例1液晶顯示裝置之主動陣列基板之一圖素 部分的平面圖。圖2係為沿圖1之a-b線所得之剖面圖。 參照圖1及2,該主動陣列基板包括排列成矩陣之圖素電 極1。用以提供掃描信號之閘極線2及用以提供顯示信號之 源極線3係沿該圖素電極1之周圍配置,以彼此垂直相交。 該閘極線2及該源極線3之對應圖素電極丨的邊緣部分經 由中間層絕緣膜19而重疊。該閘極線2及該源極線3含括金 屬膜。 “ 薄艇電晶體(TFTs)4係於閘極線2及源極線3之各個交點 附近形成。各薄膜電晶體4之閘極12係連接於對應之問極線 2 ’以經由閘極線2將信號輸入閘極12而驅動薄膜電晶體*。 薄膜電晶體4之源極15係連接於對應之源極,以接收來自源 極線3之數據信號。薄膜電晶體4之沒極16係連接於連接電、 極5 ’其依序經由接觸孔6電聯於對應之圖素電極卜 儲Γ::,5經由閉極絕緣膜7而與儲存電容器電極8形成 夫,:…儲存電容器8包括金屬膜,而經由互 =了)連人料位„基板9上之對電㈣。該儲存電容哭。電( 」可於相同步驟中與閉極線2_起形成。 电 皆包括反射電極區22’其包括金屬膜,及O: \ 92 \ 92808.DOC -13-1240130 Each pixel of the liquid crystal display device of the present invention has at least one transmission area and at least one reflection area. The transmission region and the reflection region include a liquid crystal layer and a pair of electrodes sandwiching the liquid crystal layer. The electrode region that defines the transmissive region is called a transmissive electrode region, and the electrode region that bounds the reflective region is called a transmissive electrode. FIG. 1 is a plan view of a pixel portion of an active array substrate of the liquid crystal display device of Example 1. . Fig. 2 is a sectional view taken along line a-b of Fig. 1. Referring to Figs. 1 and 2, the active array substrate includes pixel electrodes 1 arranged in a matrix. The gate line 2 for providing a scanning signal and the source line 3 for providing a display signal are arranged along the periphery of the pixel electrode 1 so as to intersect at right angles to each other. The edge portions of the gate lines 2 and the corresponding pixel electrodes 丨 of the source lines 3 are overlapped via the interlayer insulating film 19. The gate line 2 and the source line 3 include a metal film. "Thin boat transistors (TFTs) 4 are formed near the intersections of gate line 2 and source line 3. The gates 12 of each thin film transistor 4 are connected to the corresponding question line 2 'to pass through the gate line. 2 Input the signal to the gate 12 to drive the thin film transistor *. The source 15 of the thin film transistor 4 is connected to the corresponding source to receive the data signal from the source line 3. The 16 electrode of the thin film transistor 4 Connected to the connection electrode, electrode 5 ', which is electrically connected to the corresponding pixel electrode via the contact hole 6 in sequence Γ ::, 5, and forms a capacitor with the storage capacitor electrode 8 via the closed-electrode insulating film 7 ,: ... the storage capacitor 8 A metal film is included, and the pair of electrodes on the substrate 9 are connected to each other via the electronic film. The storage capacitor is crying. Electricity (”can be formed from the closed electrode line 2_ in the same step. Electricity includes a reflective electrode region 22 ′ which includes a metal film, and
O:\92\92808.DOC -14- 1240130 固透射包極區2〇,其包括氧化錮錫膜。該反射電極 區22係覆蓋該閘極線2、該源極線3、該薄膜電晶體4、及該 儲存兒谷咨電極8,而該透射電極區20由該反射電極區22所 環繞。 根據以下方式製造具有前述結構之實施例1主動陣列基 板。 首先,依序於由玻璃等材料製造之透明絕緣基板丨丨上形 成閘極12、閘極線2、儲存電容器電極8、閘極絕緣膜7、半 導體層13、通道保護層丨4、源極15、及汲極16。 之後’藉著淚射依序沉積透明導電膜丨7及金屬膜丨8,而 製作佈線圖型,以形成源極線3及連接電極5。 因此,該源極線3具有包括由氧化錮錫製造之透明導電膜 17及金屬膜18之雙層結構。使用此種結構,即使金屬膜18 中產生諸如斷線之缺陷,仍可經由透明導電膜丨7保持電聯 。而減低源極線3中產生斷線之可能。 之後,藉旋轉塗佈法於所形成之基板上施加感光性丙缔 酸樹脂,以形成厚度3微米之中間層絕緣膜19。該丙缔酸樹 脂隨之根據所需之佈線圖型曝光,使用鹼溶液顯影。該膜 僅有曝光部分被鹼溶液蝕刻,而形成穿透該中間層絕緣膜 19之接觸孔。採用此種鹼液顯影法,得到具有完美錐型之 接觸孔6。 根據以下因素,使用感光性丙晞酸樹脂作為中間層絕緣 膜19之優點有利於產能。因為旋轉塗佈法可用以形成薄膜 ,故可輕易形成薄至數微米之膜。而且,於該中間層絕緣 O:\92\92808.DOC -15 - 1240130 膜19製作佈線圖型時,不需要光阻施加步驟。 ,此:施例中,該丙缔酸樹脂經著色,而可於製作侔線圖 ^後猎著使整體表面曝光而使其透明。該丙埽酸樹脂亦可 猎化學加工而使其透明。 之後,藉著濺射及製作佈線圖型而形成透明導電膜2 i , 以形成透明導電膜21。該透明導電膜21係由氧化銦錫製造 〇 因此,該透明導電膜21係經由接觸孔6電聯於各連接電極 5。 一 之後,於該透明導電膜21上形成金屬膜23,並製作佈線 圖型,以覆蓋該閘極線2、源極線3、薄膜電晶體4、儲存電 容器電極8,以作為該圖素電極1之反射電極區22。該透明 導電膜21未被金屬膜23覆蓋之部分構成透射電極區2〇。該 透明導電膜21及該金屬膜23係彼此電聯。任何相鄰圖素電 極皆由位於該閘極線2及該源極線3上層之部分分隔,以使 其彼此不會電聯。 金屬膜23係由A1製造。其亦可由具有高反射性之任何導 電性材料諸如Ta所製造。 此貫施例中,如圖2所示,液晶層包括混合於液晶中之二 色型顏料分子24。該二色型顏料之吸光係數視該分子之取 向而定。該二色型顏料分子24之取向於藉著控制介於對電 極1 〇與圖素電極1之間之電場以使液晶分子2 5之取向改變 時改變。該二色型顏料分子24之吸光係數所產生之改變係 用以產生影像顯示。O: \ 92 \ 92808.DOC -14-1240130 The solid transmission encapsulation region 20 includes a hafnium tin oxide film. The reflective electrode region 22 covers the gate line 2, the source line 3, the thin film transistor 4, and the storage electrode 8, and the transmissive electrode region 20 is surrounded by the reflective electrode region 22. The active array substrate of Example 1 having the foregoing structure was manufactured in the following manner. First, a gate 12, a gate line 2, a storage capacitor electrode 8, a gate insulating film 7, a semiconductor layer 13, a channel protection layer, and a source are formed on a transparent insulating substrate made of glass and other materials in order. 15, and the drain 16. After that, a transparent conductive film 7 and a metal film 8 are sequentially deposited by tearing, and a wiring pattern is formed to form the source line 3 and the connection electrode 5. Therefore, the source line 3 has a double-layer structure including a transparent conductive film 17 and a metal film 18 made of rhenium tin oxide. With this structure, even if a defect such as a disconnection occurs in the metal film 18, the electrical connection can be maintained through the transparent conductive film 7. The possibility of disconnection in the source line 3 is reduced. Thereafter, a photosensitive acrylic resin was applied to the formed substrate by a spin coating method to form an interlayer insulating film 19 having a thickness of 3 m. The acrylic resin is then exposed according to the required wiring pattern and developed using an alkaline solution. Only the exposed portion of the film is etched by the alkali solution to form a contact hole penetrating the interlayer insulating film 19. By this alkaline solution developing method, a contact hole 6 having a perfect tapered shape is obtained. The advantages of using a photosensitive propionic acid resin as the interlayer insulating film 19 are favorable for productivity based on the following factors. Because spin coating can be used to form thin films, films as thin as a few microns can be easily formed. Moreover, the photoresist application step is not required when the wiring pattern is produced in the intermediate layer insulation O: \ 92 \ 92808.DOC -15-1240130 film 19. This: In the embodiment, the acrylic resin is colored, and the whole surface can be exposed to make it transparent after making a line drawing. The malonic acid resin can also be chemically processed to make it transparent. Thereafter, a transparent conductive film 2 i is formed by sputtering and making a wiring pattern to form a transparent conductive film 21. The transparent conductive film 21 is made of indium tin oxide. Therefore, the transparent conductive film 21 is electrically connected to the connection electrodes 5 through the contact holes 6. After that, a metal film 23 is formed on the transparent conductive film 21 and a wiring pattern is made to cover the gate line 2, the source line 3, the thin film transistor 4, and the storage capacitor electrode 8 as the pixel electrode. 1 的 Reflective electrode area 22. A portion of the transparent conductive film 21 not covered by the metal film 23 constitutes a transmissive electrode region 20. The transparent conductive film 21 and the metal film 23 are electrically connected to each other. Any adjacent pixel electrodes are separated by a portion above the gate line 2 and the source line 3 so that they are not electrically connected to each other. The metal film 23 is made of A1. It can also be made of any conductive material with high reflectivity such as Ta. In this embodiment, as shown in FIG. 2, the liquid crystal layer includes two-color type pigment molecules 24 mixed in the liquid crystal. The absorption coefficient of the dichroic pigment depends on the orientation of the molecule. The orientation of the dichroic pigment molecules 24 is changed by controlling the electric field between the counter electrode 10 and the pixel electrode 1 to change the orientation of the liquid crystal molecules 25. The change in the absorption coefficient of the dichroic pigment molecule 24 is used to produce an image display.
O:\92\92808.DOC 1240130 使用具有㈤述結構之實施例丄液晶顯示面板,該顯示器可 有效地利用光線,於環境光線低時制穿透該透射電極區 2〇之來自後照光之光,而環境光線高時則利用由反射電極 區22所反射〈光。而且,該透射電極區2G及反射電極區22 兩區自可用於產生顯不。另夕卜,可得到具有明亮顯示之液 晶顯示裝置。 此實施例中,圖素電極丨之反射電極區22之金屬膜^覆嘗 該薄膜電晶體4、閘極線2、及源極線3。不&提供遮光膜: 防止光、、泉進人薄膜電晶體4,及該圖素電極位於該閘極線、 源極線及儲存電容器電極上之遮光部分。該等區域中,易 表特足㉝示區域中產生功能區域、轉化線等形式之漏光。 結果,傳統上因被遮光膜所遮蔽而無法作為顯示區域之區 域可用為顯示區域。此種情況使該顯示區域得到有效之利 用。 當閘極線及源極線係由金屬製造時,其於透射型顯示裝 置中作為遮光區,而無法作為顯示區域。然而,於此實施 例之液晶顯示裝置中,該於習用透射型顯示裝置中作為遮 光區之區域可用於圖素電極之反射電極區。因此,可得到 較明亮之顯示。 此實施例中,該金屬膜23係位於透明導電膜21上。此情 况使該金屬膜23具有與該透明導電膜21之不均勻表面相符 之不均勻表面。孩金屬膜23之不均勻表面優於平面表面, 因為該不均勻表面接收各種入射角度之環境光線。形成之 液晶顯示裝置提供較明亮之顯示。O: \ 92 \ 92808.DOC 1240130 uses the embodiment of the above-mentioned structure of the liquid crystal display panel, the display can effectively use light, when the ambient light is low, the light from the backlight that penetrates the transmissive electrode area 20, When the ambient light is high, the light reflected by the reflective electrode region 22 is used. Moreover, the two regions of the transmissive electrode region 2G and the reflective electrode region 22 can be used to generate a display. In addition, a liquid crystal display device having a bright display can be obtained. In this embodiment, the metal film of the reflective electrode region 22 of the pixel electrode 1 covers the thin film transistor 4, the gate line 2, and the source line 3. Don't provide a light-shielding film: prevent light from entering the thin film transistor 4, and the pixel electrode is located on the gate line, the source line and the light-shielding portion of the storage capacitor electrode. Among these areas, light leakage occurs in the form of functional areas, transformation lines, etc., in the easily indicated areas. As a result, a region that cannot be used as a display region conventionally because it is shielded by a light-shielding film can be used as a display region. In this case, the display area is effectively used. When the gate line and the source line are made of metal, they serve as a light-shielding area in a transmissive display device and cannot be used as a display area. However, in the liquid crystal display device of this embodiment, the area serving as the light shielding area in the conventional transmission type display device can be used as the reflective electrode area of the pixel electrode. Therefore, a brighter display can be obtained. In this embodiment, the metal film 23 is located on the transparent conductive film 21. In this case, the metal film 23 has an uneven surface corresponding to the uneven surface of the transparent conductive film 21. The uneven surface of the metal film 23 is better than a flat surface because the uneven surface receives ambient light at various incident angles. The resulting liquid crystal display device provides a brighter display.
O:\92\92808.DOC -17- 1240130 圖3及4係為本發明實施例 @食仞mi 曰裝置之另一個具 肢貝例的平面圖。於此等代用、 之今f, 眭“貝她例中,各圖素電極1 <邊透射電極區20相對於反舢兩 亍者故行,„ 反射甩極區22的面積比自圖以斤 π者改交。根據此種方式 度之液晶顯示裝置。㈣具有所需之反射性及透光 於圖3及4所示之代用性實施 j+ ^ ^ , 中邊連接電極5係位於反 射电極E22中。此情況抑制 亮度降低。 一透射電極區2〇之光線的 於實施例1中,該圖辛雷打 衫、 極1又反射電極區22之金屬膜23 係位於透明導電膜21上。或如 兮、采B日道中 ^如圖6所不’該金屬膜23可僅與 4月導讀21邵分地重疊,以彼此電聯。 (實施例2) 方=實施例2中,描述-種形成該金屬膜23之不均勾表面之 ==部分說明位於該中間層絕緣㈣(未示)上之金屬 、:圖。圖6係為沿圖5之c_d線所得之剖面圖。 二=邑緣膜19之表面偷刻等方法製 而於该不均勻表面上形成金屬膜23。 因此’藉著於先以旋轉塗佈等方法形成平面之中間声嗜 9上形成金屬膜23,之後如前文所術般地使並表面不 均勾,可得到具有不均勻表面之金屬助。 面不 於反射型液晶顯示裝置中,該金屬膜幻之 於平面表面,因為不与勻表面優 因此,面接收各種角度之環境光。 精f中間層絕緣膜19上形成圖素電⑹之金屬膜O: \ 92 \ 92808.DOC -17- 1240130 Figures 3 and 4 are plan views of another example of a limb with a device according to the embodiment of the present invention @ 食 仞 mi In these alternatives, the current f, 她 "In the case of Beta, each pixel electrode 1 < edge transmission electrode area 20 is relative to the two opposite side, so the area ratio of the reflection pole area 22 from the figure Those who are in charge of π have changed hands. A liquid crystal display device in this manner. ㈣ has the required reflectivity and light transmission. The alternative implementation of j + ^ ^ shown in Figs. This suppresses a decrease in brightness. A light transmitting through the electrode region 20 In the first embodiment, the metal film 23 of the Tucson Thunder shirt, the electrode 1 and the reflective electrode region 22 is located on the transparent conductive film 21. Alternatively, as shown in Figure B, as shown in Figure 6, the metal film 23 may only overlap with the April 21 reading to connect with each other. (Embodiment 2) Fang = In Embodiment 2, a description of a kind of uneven hook surface forming the metal film 23 == partly illustrates the metal located on the interlayer insulating plutonium (not shown). FIG. 6 is a sectional view taken along line c_d of FIG. 5. 2 = The surface of the edge film 19 is formed by a method such as stealth engraving and the metal film 23 is formed on the uneven surface. Therefore, by forming a metal film 23 on the intermediate acoustic horn 9 which is formed by a method such as spin coating, and then making the surface uneven as described above, a metal assist having an uneven surface can be obtained. The surface is not the same as that of a reflective liquid crystal display device. The metal film is flat on a flat surface. Because it is not as good as a uniform surface, the surface receives ambient light at various angles. A metal film with pixel electrodes formed on the fine interlayer insulating film 19
O:\92\92808.DOC -18 - 1240130 23 ’以具有如圖6所示之不均勻表面,形成之反射型液晶顯 示裝置提供較明亮之顯示。 該金屬膜23之不均勻表面不限於圖5所示之形狀,即具有 圓型平面凹陷部分之表面。或該金屬膜23之表面及底層中 間層絕緣膜19之表面可具有平面多邊或橢圓型之凹陷部分 。忒凹fe α卩分之剖面可具有多邊形狀,以取代圖6所示之半 圓型。 (實施例3) _ 於貫施例3中,描述採用賓主型顯示方法之液晶顯示裝置 〇 圖7係為本發明此實施例之液晶顯示裝置的剖面圖。與實 施例1相同之組件使用與圖2相同之編號表示。 採用賓主型顯示方法時,使用賓主型液晶材料之混合物 ,含有黑色顏料及0.5%之旋光性物質之ZLI 2327(Merck & Co”Inc.製造)’ S-8 11 (Merck & Co.,Inc.製造),產生以下問 題。即,使用後照光時,若透射區中自照光透射之光的光 籲 學路徑長度dt與該反射區中自環境光反射之光的光學路徑 長度2dr差距極大,則使用來自後照光之光之情況及使用環 境光之情況之間,即使於液晶層施加相同電壓,形成之顯 示之亮度及對比的差異極大。 是故,液晶層位於透射區之透明導電膜21上之部分的厚 度dt及液晶層位於反射區之金屬賊23上之部分的厚度心應 設定於滿足關係dt = 2dr。因此,於此實施例中,該金屬膜 23之厚度變成滿足此關係。 O:\92\92808.DOC -19- 1240130 因此’藉著使透射區中自照光透射之光的光學路捏長度 dt與該反射區巾自環境光反射之光的光學隸長度恤彼此 平衡’不論使用何種類型之光(來自後照光之光或來自環境 光之光),皆可得到實質相同之亮度及對比,先決條件為於 硬晶層上施加相同電壓。根據此種方式,得到具有較佳顯 不特性之液晶顯示裝置。 藉著使透射區巾自照光透射之光的光學路徑長度以盘該 反射區中自環境光反射之光的光學路徑長度加約略相同· 而非必要平衡·可得到平均至某—程度之亮度及對比。 、不論使用:種類型之光(來自後照光之光或來自環境光 : '亦可藉著改交施加於該液晶層之分配電壓將該對比 凋成均勻’即使是透射區中自照光透射之光的光學路徑長 _與該反射區中自環境光反射之光的光學路徑長度地大 幅相異時亦然。 Q此,於則述實施例丨至3之液晶顯示裝置中,使用單一 基^進行it射模式料及反射模式顯*,傳統上使用黑色 达蔽光、、泉之區域可用為各圖素電極之反射電極區。此 種 +鲁、、Ρ ~τ +、 ^ /ϋϋ有效地利用液晶面板圖素電極的顯示區域,而辦 加液晶顯示裝置之亮度。 而曰 盥夂男她例1至3中,該儲存電容器電極可用以經由絕緣膜 區:素電極形成儲存電容器,而該圖素電極之反射電極 ^ L I邊儲存電容器電極。是故,形成儲存電容器電極之 ^可用於顯示’以作為圖素電極之反射電極區。 |^| 、 '、包2又反射電極區的金屬膜係位於透明導電膜上O: \ 92 \ 92808.DOC -18-1240130 23 ′ The reflective liquid crystal display device having an uneven surface as shown in FIG. 6 provides a brighter display. The uneven surface of the metal film 23 is not limited to the shape shown in Fig. 5, that is, a surface having a concave portion of a circular plane. Or, the surface of the metal film 23 and the surface of the underlying interlayer insulating film 19 may have a planar polygonal or elliptical depression. Instead of the semicircular shape shown in Fig. 6, the cross section of the concave fe? (Embodiment 3) _ In Embodiment 3, a liquid crystal display device using a guest-host display method is described. FIG. 7 is a cross-sectional view of a liquid crystal display device according to this embodiment of the present invention. The same components as those in Embodiment 1 are designated by the same reference numerals as those in Fig. 2. When the guest-host display method is used, a mixture of guest-host liquid crystal materials is used. ZLI 2327 (manufactured by Merck & Co "Inc.) Containing black pigment and 0.5% optically active substance 'S-8 11 (Merck & Co., (Manufactured by Inc.), the following problem arises. When using backlight, the optical path length dt of the light transmitted by the self-illuminated light in the transmission area is greatly different from the optical path length 2dr of the light reflected from the ambient light in the reflection area. , Between the case of using light from the backlight and the case of using ambient light, even if the same voltage is applied to the liquid crystal layer, the difference in display brightness and contrast is extremely large. Therefore, the transparent conductive film in which the liquid crystal layer is located in the transmission region The thickness dt of the part on 21 and the thickness center of the part of the liquid crystal layer on the metal thief 23 in the reflection area should be set to satisfy the relationship dt = 2dr. Therefore, in this embodiment, the thickness of the metal film 23 becomes to satisfy this relationship O: \ 92 \ 92808.DOC -19- 1240130 Therefore, 'the optical path length dt of the light transmitted by the self-illumination light in the transmission area and the optical length of the light reflected from the ambient light by the reflection area towel "Balancing" no matter what type of light is used (light from backlight or light from ambient light), the same brightness and contrast can be obtained. The prerequisite is that the same voltage is applied to the hard crystal layer. According to this method, A liquid crystal display device having better display characteristics is obtained. By making the optical path length of the light transmitted by the self-illumination light in the transmission area to be approximately the same as the optical path length of the light reflected from the ambient light in the reflection area, it is not necessary. Balance · You can get the average brightness and contrast to a certain degree. Regardless of the use: type of light (light from backlight or ambient light: 'It can also be changed by changing the distribution voltage applied to the liquid crystal layer. The contrast is uniform, even when the optical path length of the light transmitted by the self-illuminated light in the transmission area is significantly different from the optical path length of the light reflected from the ambient light in the reflection area. In the liquid crystal display devices of Examples 丨 3, a single substrate is used for it emission mode display and reflection mode display. Traditionally, black areas are used to shield light, and the spring area can be used as the reflection of each pixel electrode. Electrode area. This + Lu ,, P ~ τ +, ^ / ϋϋ effectively use the display area of the pixel electrode of the liquid crystal panel, and increase the brightness of the liquid crystal display device. In the examples 1 to 3, The storage capacitor electrode can be used to form a storage capacitor through the insulating film region: the pixel electrode, and the reflective electrode of the pixel electrode ^ LI side storage capacitor electrode. Therefore, the formation of the storage capacitor electrode can be used for display 'as a pixel electrode The reflective electrode area of | ^ |, ', and the metal film of the reflective electrode area is located on the transparent conductive film.
O:\92\92808.DOC -20- 1240130 。使用具有不均勻表面之透明導電膜, 反射電極區且+ /成又圖素電極之 匕〃、有不均勻《表面,使其可利 角之環境光作為顯示光。 〃有各種入射 圖素电極之反射區之金屬膜可位於具 中間層絕緣膜 、不句勻表面之 “ …圖素電極之反射電極區且有… 表面,使Jt可刹田目士 * 、兩不均勻 光。^ 〃有各種人射角度之環境光以作為顯示 極之反射電極區之金屬膜較料該圖素電拇之 透射區中之透明導電膜厚。使 光、、泉牙過並返回液晶層 位:圖素電極之反射電極區中之部分之光徑長度,與來自 後照光之光線穿過液晶層位於圖素電極之透射電極區中之 部分之光徑長度約略相等,並彼此比較該路徑長度。藉著 暸解該㈣光徑長度’可調勻穿透位於該反射區及透魅 中之液晶層的光特性之變化。 液晶層位於各圖素電極之反射電極區上之部分的厚度係 為液晶層位於其透射電極區上之部分的厚度之一半。此可 使環境光線穿過並返回液晶層位於圖素電極之反射電極區 中之部分之光徑長度,與來自後照光之光線穿過液晶層位 於圖素電極之透射電極區中之部分之光徑長度約略相等, 並彼此比較該路徑長度。藉著明瞭該約略光徑長度,可調 勻穿透位於該反射區及透射區中之液晶層的光特性之變化 (實施例4) 圖8 A係為本發明實施例4液晶顯示裳置之主動陣列基板 O:\92\92808.DOC -21 - 1240130 之一圖素部分的平面圖。圖8B係為沿圖8A之A_A線所得之 剖面圖。 ^ 此男她例之王動陣列基板包括閘極線4丨、數據線〇、驅 動兀件43、;及極44、儲存電容器電極45、閘極絕緣膜私、 絕緣基板47、接觸孔48、中間層絕緣膜的、反射圖素電極 50、及透射圖素電極η。 每個儲存電容器電極45係電聯於對應之汲極44,並經由 閘極絶緣膜46與閘極線41重疊。該接觸孔48係穿透該中間 層絕緣膜49,而與該透射目素《51讀存電容器電極45 連接。 具有則逑結構之主動陣列基板之每個圖素皆包括反射圖 素電極50及透射圖素電極51。因此,如圖8B所示,每個圖 素皆包括反射電極區,包括反射圖素電極50,其反射外來 光線,包括透射圖素電極5 1,其透射來自後照光之光線。O: \ 92 \ 92808.DOC -20-1240130. Use a transparent conductive film with an uneven surface, a reflective electrode area and / or a pixel electrode with an uneven surface, so that the ambient light at a good angle can be used as display light.金属 The metal film with various incident pixel electrode reflection areas can be located in the middle of the insulating film and uneven surface "... the reflection electrode area of the pixel electrode and has a surface ... Two non-uniform light. ^ 〃Ambient light with various angles of people's eyes is used as the reflective electrode area of the display electrode. The metal film is thicker than the transparent conductive film in the transmission area of the picture element. And return to the liquid crystal layer level: the length of the light path of the portion of the reflective electrode region of the pixel electrode is approximately equal to the length of the light path of the portion of the light from the backlight passing through the liquid crystal layer and located in the portion of the transparent electrode of the pixel electrode, and Compare the path lengths with each other. By understanding the 'light path length', the light characteristics of the liquid crystal layer located in the reflective area and the transparent area can be uniformly changed. The liquid crystal layer is located on the reflective electrode area of each pixel electrode. The thickness is a half of the thickness of the portion of the liquid crystal layer located on its transmissive electrode region. This allows ambient light to pass through and return to the length of the optical path of the portion of the liquid crystal layer located in the reflective electrode region of the pixel electrode. The length of the back light rays passing through the portion of the liquid crystal layer located in the transmissive electrode region of the pixel electrode is approximately equal, and the path lengths are compared with each other. By knowing the approximate light path length, it is possible to evenly penetrate the reflection area. And the change in the light characteristics of the liquid crystal layer in the transmission region (Embodiment 4) FIG. 8A is a diagram of an active array substrate O: \ 92 \ 92808.DOC -21-1240130 of the liquid crystal display of Embodiment 4 of the present invention The plan view of the prime part. Figure 8B is a cross-sectional view taken along line A_A in Figure 8A. ^ The king of the array of this example includes a gate line 4, a data line 0, a driving element 43, and a pole 44. , Storage capacitor electrode 45, gate insulating film, insulating substrate 47, contact hole 48, interlayer insulating film, reflective pixel electrode 50, and transmissive pixel electrode η. Each storage capacitor electrode 45 is electrically connected to a corresponding The drain 44 is overlapped with the gate line 41 through the gate insulating film 46. The contact hole 48 penetrates the intermediate layer insulating film 49 and is connected to the transmission element "51 storage capacitor electrode 45. Each pixel of the active matrix substrate of the 逑 structure is Including reflective pixel electrode 50 and transmissive pixel electrode 51. Therefore, as shown in FIG. 8B, each pixel includes a reflective electrode region, including a reflective pixel electrode 50, which reflects external light, including a transmissive pixel electrode 5 1 , Which transmits light from the backlight.
圖9係為此實施例之液晶顯示裝置之剖面圖,包括圖8A 及8B所示之主動陣列基板。該液晶顯示裝置亦包括濾色層 53、對電極54、液晶層55、對正膜56、偏光板57、及後照 光58 〇 孩透射圖素電極51(透射電極區)使來自後照光58之光線 穿透 < 區域在該後照光58斷開時對面板之亮度無貢獻。相 反地’反射圖素電極(反射電極區)反射外來光線之區域不論 薇後照光58係為連通/斷開狀態,皆可增加該面板之亮度。 因此’於每個圖素中,反射電極區之面積大於該透射電極 區之面積。FIG. 9 is a cross-sectional view of the liquid crystal display device of this embodiment, including the active array substrate shown in FIGS. 8A and 8B. The liquid crystal display device also includes a color filter layer 53, a counter electrode 54, a liquid crystal layer 55, a counter film 56, a polarizing plate 57, and a backlight 58. The child transmits the pixel electrode 51 (transmission electrode region) so that The light transmission < region has no contribution to the brightness of the panel when the backlight 58 is turned off. Conversely, the area where the reflective pixel electrode (reflective electrode area) reflects external light can increase the brightness of the panel regardless of whether the backlight 58 is on / off. Therefore, in each pixel, the area of the reflective electrode region is larger than the area of the transmissive electrode region.
O:\92\9280S.DOC -22- 1240130 於此實施例中,該反射圖素電極50係位於對應透射圖素 電極51上,以彼此電聯,以於該反射圖素電極5〇及該透射 圖素電極5 1上施加相同信號。或該反射圖素電極5〇及該透 射圖素電極5 1未彼此電聯,以接收用於不同之顯示之不同 信號。 於圖9所示之液晶顯示裝置中,來自後照光兄而入射於反 射圖素電極50上之邵分光線無法用為顯示光線。為了克服 此種問題,圖10所顯示之經修飾液晶顯示裝置包括用於各 圖素之微型透鏡59及微型透鏡保護層6〇。使用此種結構, 來自後照光58之光經由微型透鏡59聚集於透射電極區未形 成反射圖素電極5〇之部分,增加透過透射區之光量,而改 善顯TF免度。 圖11A係為本發明實施例4之液晶顯示裝置取代性主動陣 列基板之一圖素邵分的平面圖。圖丨丨B係為沿圖丨丨A之 線所得之剖面圖。 於圖11A及11B所示之主動陣列基板中,各圖素之透射圖 素電極5 1區域及反射圖素電極50之區域與圖8A及8B所示 <王動陣列基板相反。反射圖素電極5〇之區域的面積與透 射圖素電極5 1區域之面積之比例可適當地改變。 當圖8八及8B所示之主動陣列基板與圖11A及11B所示者 比車乂時,圖8A及8B所示之主動陣列基板之優點係因為該反 射圖素電極50係位於驅動元件43上而防止外來光線進入該 驅動兀件43 ’而因為該透射圖素電極5丨區域係位於各圖素 之中心而較容易形成用以聚集光線之微型透鏡59。O: \ 92 \ 9280S.DOC -22-1240130 In this embodiment, the reflective pixel electrode 50 is located on the corresponding transparent pixel electrode 51 so as to be electrically connected to each other, so that the reflective pixel electrode 50 and the The same signal is applied to the transmissive pixel electrode 51. Or the reflective pixel electrode 50 and the transparent pixel electrode 51 are not electrically connected to each other to receive different signals for different displays. In the liquid crystal display device shown in Fig. 9, the fractional light from the backlight beam incident on the reflective pixel electrode 50 cannot be used as display light. To overcome such a problem, the modified liquid crystal display device shown in FIG. 10 includes a micro lens 59 and a micro lens protective layer 60 for each pixel. With this structure, the light from the backlight 58 is collected via the micro lens 59 on the portion of the transmissive electrode region where the reflective pixel electrode 50 is not formed, and the amount of light transmitted through the transmissive region is increased to improve the TF immunity. FIG. 11A is a plan view of a pixel sub-pixel of a liquid crystal display device replacement active matrix substrate according to Embodiment 4 of the present invention. Figure 丨 丨 B is a sectional view taken along the line 丨 丨 A. In the active array substrate shown in Figs. 11A and 11B, the areas of the transmissive pixel electrode 51 and the areas of the reflective pixel electrode 50 of each pixel are opposite to those shown in Figs. 8A and 8B. The ratio of the area of the area of the reflective pixel electrode 50 to the area of the area of the transparent pixel electrode 51 can be appropriately changed. When the active array substrate shown in FIGS. 8A and 8B is compared with the one shown in FIGS. 11A and 11B, the advantages of the active array substrate shown in FIGS. 8A and 8B are because the reflective pixel electrode 50 is located at the driving element 43. From above, external light is prevented from entering the driving element 43 ′, and because the region of the transmissive pixel electrode 5 丨 is located at the center of each pixel, it is easier to form a micro lens 59 for collecting light.
O:\92\92808.DOC -23- 1240130 此貫施例中’因為反射區及透射區係位於一圖素中,故 该圖素之鏡孔比儘可能地大。為滿足此種需求,此實施例 採用南鏡孔比結構,其中包括有機絕緣膜之中間層絕緣膜 49係夾置於圖素電極與閘極線4丨及源極線43之間。亦可採 用其他結構。 (實施例5) 圖12A係為本發明實施例5液晶顯示裝置之主動陣列基板 i 一圖素邵分的平面圖。圖12B係為沿圖12A之c_c線所得 之剖面圖。 於實施例5之主動陣列液晶顯示裝置中,於中間層絕緣膜 494傾斜或凹陷部分及隆凸部分上形成反射圖素電極%。 外來光線因而自反射圖素電極50反射於寬幅取向範圍内, 故可見角度變寬。 此男施例中,中間層絕緣膜49位於閘極線4丨及源極線Μ 上义邵分最厚,而位於汲極44上之部分完全蝕刻,形成傾 斜或凹陷部分及隆凸部分。此情況消除形成用以使汲極44 與反射圖素電極5G電聯之接觸孔的必要,而防止因為接觸 孔陡峭階度而使液晶分子取向紊亂。此種情況增加鏡孔比 〇 ' /、施例中:及極44係為由氧化銦錫製造之透明電極 ’作為透射圖素電極。 該傾斜部分之傾斜角或該中間層絕緣膜49之凹陷部分及 隆凸,分應小至可於形成之基板上形成對正膜並摩擦。因 此,最佳條件應根據個別摩擦條件及液晶分子類型決定。O: \ 92 \ 92808.DOC -23- 1240130 In this embodiment, because the reflection area and the transmission area are located in a pixel, the pixel aperture ratio of the pixel is as large as possible. In order to meet such a requirement, this embodiment adopts a south mirror hole ratio structure, in which an interlayer insulating film 49 including an organic insulating film is interposed between the pixel electrode and the gate line 4 and the source line 43. Other structures can also be used. (Embodiment 5) FIG. 12A is a plan view of one pixel of an active array substrate i of a liquid crystal display device according to Embodiment 5 of the present invention. Fig. 12B is a sectional view taken along the line c_c of Fig. 12A. In the active-array liquid crystal display device of Embodiment 5, a reflective pixel electrode% is formed on the inclined or recessed portion and the raised portion of the interlayer insulating film 494. The external light is thus reflected from the reflective pixel electrode 50 in a wide orientation range, so the visible angle becomes wider. In this male embodiment, the intermediate layer insulating film 49 is located at the gate line 4 丨 and the source line M. The upper part is thickest, and the portion located at the drain 44 is completely etched to form a slanted or recessed portion and a raised portion. This situation eliminates the need to form a contact hole for electrically connecting the drain 44 to the reflective pixel electrode 5G, and prevents the orientation of the liquid crystal molecules from being disordered due to the steep order of the contact hole. In this case, the mirror hole ratio is increased. In the embodiment, the electrode 44 is a transparent electrode made of indium tin oxide, and is used as a transmission pixel electrode. The inclination angle of the inclined portion, or the concave portion and the hump of the interlayer insulating film 49 should be small enough to form an alignment film on the formed substrate and rub it. Therefore, the optimal conditions should be determined based on the individual friction conditions and the type of liquid crystal molecules.
O:\92\92808.DOC -24- 1240130 於此實施例中,如同實施例4,可於汲極44下層提供微型 透鏡以作為透射圖素電極51,而改善連通後照光時之顯示 亮度。 (實施例6) 圖13A係為本發明實施例6液晶顯示裝置之主動陣列基板 之圖素邵分之平面圖。圖13B係為沿圖13A之D-D線所得之 剖面圖。 此實施例中,於相同步騾中,於與閘極線41相同之高度 形成反射圖素電極50。使用此種結構,因為不需要用以形 成反射圖素電極50之個別步驟,故不需增加步騾數目及製 造成本。 於此實施例中,該反射圖素電極50不連接於構成驅動元 件43之沒極44,但僅用於反射外來光線有透射圖素電 極51作為用以驅動液晶之電極。換言之,由反射圖素電極 50所反射之光的透光度係藉著使用透射圖素電極51之電壓 控制該液晶層而控制。 若未輸人信號於各反射圖素電㈣,則反射圖素電極5〇 與對應沒極44或透射圖素電極51間產生浮動電容。為了避 免此種問題,反射圖素電極5〇應具有不會對顯示產生畜面 影響之信號。藉著使各反射圖素電極5〇與相鄰閘極線㈣ 接’可避免形成浮動雷交, 而了万;反射圖素電極50與對應 之汲極44之間形成儲存電容器。 此實施例中,如同實施例4,微型透鏡可使光線會聚於透 射圖素電極上’而改善該後照光連通時之顯示亮度。O: \ 92 \ 92808.DOC -24-1240130 In this embodiment, as in Embodiment 4, a micro lens can be provided under the drain 44 as the transmissive pixel electrode 51 to improve the display brightness when the backlight is connected. (Embodiment 6) FIG. 13A is a plan view of a pixel array of an active array substrate of a liquid crystal display device according to Embodiment 6 of the present invention. Fig. 13B is a sectional view taken along line D-D of Fig. 13A. In this embodiment, a reflective pixel electrode 50 is formed at the same height as the gate line 41 in the phase synchronization frame. With this structure, since the individual steps for forming the reflective pixel electrode 50 are not required, it is not necessary to increase the number of steps and the manufacturing cost. In this embodiment, the reflective pixel electrode 50 is not connected to the pole 44 constituting the driving element 43, but is only used to reflect external light. The transmissive pixel electrode 51 is used as an electrode for driving the liquid crystal. In other words, the light transmittance of the light reflected by the reflective pixel electrode 50 is controlled by controlling the liquid crystal layer using the voltage of the transparent pixel electrode 51. If no human signal is input to each of the reflection pixel electrodes, a floating capacitance is generated between the reflection pixel electrode 50 and the corresponding electrode 44 or the transmission pixel electrode 51. To avoid this problem, the reflective pixel electrode 50 should have a signal that does not affect the display. By connecting each reflective pixel electrode 50 to an adjacent gate line, it is possible to avoid the formation of a floating lightning cross, and the storage capacitor is formed between the reflective pixel electrode 50 and the corresponding drain electrode 44. In this embodiment, as in Embodiment 4, the micro-lens can focus light on the transparent pixel electrode 'to improve the display brightness when the backlight is communicated.
O:\92\92808.DOC 1240130 此見犯例中,因為亦於一 、因素形成反射區及透射區,故 d圖素 < 知孔比儘可能地大。 鏡孔比結構,其中使用有機^ mm要求’採用高 可採用其他結構用有機絶緣膜作為中間層絕緣膜。亦 (實施例7 ) 、圖14A係為本發明實施例7液晶顯示裝置之主動陣列基板 《一圖素科的平面圖。圖⑽係為沿圖UA之E_F、線所得 之剖面圖。 、此男她f列中,反射圖素電極5〇係於與源極線^相同之高 度形成。使用此種結構,因為可於形成該源極㈣時形成 反射圖素電極5G’故不增加步驟數目及製造成本。 此只她例中’ gj為採用穿透該中間層絕緣膜49之高鏡孔 比結構’故反射圖素電極5〇僅用於反射外來光線。僅有透 射圖素電極51作為用以驅動液晶之電極。 此實施例與實施例6相異處為各圖料之反射圖素電極 50係電聯於對應之波極44。於另一種情況下,其中沒極44 上未形成中間層絕緣膜49,而沒極44作為透射圖素電極, 該反射圖素電極50亦用以驅動液晶分子。 此貫她例中,如用實施例4,可提供微型透鏡以將光線會 聚於透射圖素電極51上,而於連通後照光時改善顯示亮度 而且,此實施例中,因為於一圖素中形成反射區及透射 區故為婉孔比彳m可说地大。為了滿足此種條件,採用以 有機絕緣膜作為中間層絕緣膜之高鏡孔比結構。亦可採用O: \ 92 \ 92808.DOC 1240130 In this case, because the reflection area and the transmission area are also formed in the same factor, the d pixel < the aperture ratio is as large as possible. Mirror-to-hole ratio structure, in which the use of organic ^ mm requirements' is high. Organic insulation films for other structures can be used as the interlayer insulation film. (Embodiment 7) FIG. 14A is a plan view of an active matrix substrate of a liquid crystal display device according to Embodiment 7 of the present invention. Figure IX is a sectional view taken along line E_F and UA of Figure UA. In the column f, the reflective pixel electrode 50 is formed at the same height as the source line ^. With this structure, since the reflective pixel electrode 5G 'can be formed when the source electrode 形成 is formed, the number of steps and the manufacturing cost are not increased. In this example, 'gj is a high mirror hole ratio structure which penetrates the interlayer insulating film 49', so the reflective pixel electrode 50 is only used to reflect external light. Only the transmissive pixel electrode 51 is used as an electrode for driving the liquid crystal. The difference between this embodiment and Embodiment 6 is that the reflective pixel electrode 50 of each drawing is electrically connected to the corresponding wave electrode 44. In another case, the intermediate electrode 49 is not formed on the electrode 44 and the electrode 44 is used as a transmissive pixel electrode. The reflective pixel electrode 50 is also used to drive liquid crystal molecules. In this example, as in Example 4, a micro lens can be provided to focus the light on the transmissive pixel electrode 51 and improve the display brightness when the backlight is connected. Also, in this embodiment, because in a pixel The formation of the reflection area and the transmission area is arguably larger than 彳 m. In order to satisfy such a condition, a high mirror hole ratio structure using an organic insulating film as an interlayer insulating film is adopted. Can also be used
O:\92\92808.DOC -26- 1240130 其他結構。 因此,於本發明實施例4至7中,得到可於反射型及透射 型間切換之主動陣列型液晶顯示裝置。 該液晶顯示裝置可由使用者根據使用條件於透射型及反 射型間切換使用模式,而提供與使用條件無關之充分亮度 ’同時降低能量消耗及延長使用時間。 亦侍到一種透射型/反射型可切換主動陣列液晶顯示裝 置,其可於環境明亮下用為反射型液晶顯示裝置,而於環 境黑暗下用為透射型液晶顯示裝置。 因為該反射圖素電極及該透射圖素電極彼此電聯,不需 個別提供驅動信號之互連。此者簡化該主動陣列基板之結 構。 於該驅動元件上層形成反射圖素電極日寺,防纟外來光線 進入該驅動元件。 透射圖素電極^該後照光斷開時對該面板之亮度無貢獻 ,而該反射圖素電極不論該後照光係為連通/斷開狀態,皆 對面板亮度有所貢獻。是故’藉著增加反射圖素電極之面 積,即使該後照光斷開或放射較少光線,皆可使顯示亮度 安定化。 來自後照光而被反射圖素電極、閘極線等物所阻斷之光 可會料該透射圖素電極上。如此—來可於不增加後照光 本身之亮度下增加顯示裝置之亮度。 該反射圖素電極可反射寬幅取向之外來光線。故可得到 較寬之可見角度。 O:\92\92808.DOC -27- 1240130 該反射圖素電極可於不添加额外步驟下形成。如此可防 止步騾數目及製造成本增加。 該反射圖素電極可電聯於閉椏線。此防止產生浮動電容 ,而可形成具有沒極之儲存電容器。 該反射圖素電極可具有與對電極相同之信號。此防止浮 動電谷產生。而且,該反射圖素電極可用以形成供施加於 圖素電極之電壓所使用之儲存電容器。 (實施例8) 貫施例8中’描述本發明反射/透射型液晶顯示裝置。 首先,描述實施例8之液晶顯示裝置中產生干擾色之原理 〇 圖23係為說明產生干擾色之概念圖。光係入射於玻璃基 板上’入射光由反射膜反射,而自該玻璃基板輸出。 於前述情況下,當於入射角Θ i入射之光自反射膜之隆凸 邵分及凹陷部分反射而於輸出角0 〇輸出時,視為產生干擾 色。兩反射光束之光徑差5係以下式(1)表示: δ = Lsinei + h(l/cosei, + .1/coseo,)·η — \ . {Lsineo -r h(t:a^6i7 十 taneo1 )sir.6o·} =I^Csinei - sineo) h{(l/c〇s9lf ^ l/〇〇s3o\)*n 一 (tanei 1 + )sin6o} .....(工) 、 其中Θ i,係為反射膜之凹陷部分的入射角,β O’係為反射 膜之凹陷部分,L係為雨光束於玻璃基板上之入射點間的距 離’ h係為該反射膜之凹陷部分反射該光束之點相對於該反O: \ 92 \ 92808.DOC -26- 1240130 Other structures. Therefore, in Embodiments 4 to 7 of the present invention, an active matrix liquid crystal display device capable of switching between a reflective type and a transmissive type is obtained. The liquid crystal display device can be switched between a transmissive type and a reflective type by a user according to a use condition, and provides sufficient brightness irrespective of the use condition 'while reducing energy consumption and extending use time. Also available is a transmissive / reflective switchable active-array liquid crystal display device that can be used as a reflective liquid crystal display device in bright environments and a transmissive liquid crystal display device in dark environments. Because the reflective pixel electrode and the transmissive pixel electrode are electrically connected to each other, it is not necessary to provide an interconnection for driving signals separately. This simplifies the structure of the active array substrate. A reflective pixel electrode is formed on the upper layer of the driving element to prevent external light from entering the driving element. The transmissive pixel electrode has no contribution to the brightness of the panel when the backlight is turned off, and the reflective pixel electrode contributes to the brightness of the panel regardless of whether the backlight is on / off. Therefore, by increasing the area of the reflective pixel electrode, even if the backlight is cut off or less light is emitted, the display brightness can be stabilized. Light from the back light that is blocked by the reflective pixel electrode, gate line, etc. can be expected on the transmitted pixel electrode. In this way, the brightness of the display device can be increased without increasing the brightness of the backlight. The reflective pixel electrode can reflect foreign light in a wide orientation. Therefore, a wider viewing angle can be obtained. O: \ 92 \ 92808.DOC -27- 1240130 The reflective pixel electrode can be formed without adding additional steps. This prevents the number of steps and manufacturing costs from increasing. The reflective pixel electrode can be electrically connected to the closed loop line. This prevents the floating capacitor from being generated, and can form a storage capacitor having an electrode. The reflective pixel electrode may have the same signal as the counter electrode. This prevents the occurrence of floating valleys. Moreover, the reflective pixel electrode can be used to form a storage capacitor for use in a voltage applied to the pixel electrode. (Embodiment 8) In Embodiment 8, the reflection / transmission type liquid crystal display device of the present invention is described. First, the principle of generating interference colors in the liquid crystal display device of Embodiment 8 will be described. FIG. 23 is a conceptual diagram illustrating the generation of interference colors. Light is incident on the glass substrate. The incident light is reflected by the reflection film and output from the glass substrate. In the foregoing case, when the light incident at the incident angle θ i is reflected from the convex and concave portions of the reflective film and output at the output angle 0 °, it is considered that an interference color is generated. The light path difference between the two reflected beams 5 is expressed by the following formula (1): δ = Lsinei + h (l / cosei, + .1 / coseo,) · η — \. {Lsineo -rh (t: a ^ 6i7 十 taneo1 ) sir.6o ·} = I ^ Csinei-sineo) h {(l / c〇s9lf ^ l / 〇〇s3o \) * n (tanei 1 +) sin6o} ..... (工), where Θ i is the incident angle of the concave portion of the reflective film, β O ′ is the concave portion of the reflective film, L is the distance between the incident points of the rain beam on the glass substrate, and h is the reflection of the concave portion of the reflective film The point of the beam is relative to the reflection
O:\92\92808.DOC 1240130 射膜之凹陷邵分反射另一光束之點的高度,而n係為玻璃基 板之折射率。 因為式(1)僅有於0 0 〇且5» 0 〇’時方可計算,故各 0而0i’ = 0〇’二時,該光徑差占簡化成下式 (2): 6=h{2n/cos0f-2tan0? · sinG}......(2) 备任意波長λ 1及λ 2列入考慮時,自該隆凸部分及凹陷 沣刀所反射I輸出光束於1 = 111±1/2(111使為整數)時彼 此減弱,而於5 / λ 2 = m時彼此增強。因此,得到下式(3) 〇 δ=(1/λ1 - 1/λ2)=1/2.......(3) 上式(3)亦表示為下式(4): δ==(λ1 · λ2) /2 · (λ2- λΐ).......(4) 是故,根據前式(2)及(4),該高度h可表示為下式(5) ·· h " 1/2·{(λΐ·λ2) / (λ2 - λΐ)} ; (cose^ / (2π ^ 23^6» - sine)} ----.(5) 根據岫 發現為了避免產生干擾色,該反射膜之反射 表面應具有連續波型。 方、此K施例中,為了形成該反射膜,於基板上形成至少 兩種具有不同高度之隆凸部分,於該基板上形成覆蓋該隆 凸。卩刀之水合物樹脂膜,而於該聚合物樹脂膜上形成由具O: \ 92 \ 92808.DOC 1240130 The height of the point where the concave portion of the reflective film reflects another beam, and n is the refractive index of the glass substrate. Because formula (1) can be calculated only when 0 0 〇 and 5 »0 ′, so when each 0 and 0i ′ = 0〇′2, the optical path difference simplifies to the following formula (2): 6 = h {2n / cos0f-2tan0? · sinG} ...... (2) When any wavelengths λ 1 and λ 2 are considered, the I output beam reflected from the convex part and concave trowel is 1 = When 111 ± 1/2 (111 is an integer), they weaken each other, and strengthen each other at 5 / λ 2 = m. Therefore, the following formula (3) is obtained: δ = (1 / λ1-1 / λ2) = 1/2. (3) The above formula (3) is also expressed as the following formula (4): δ = = (λ1 · λ2) / 2 · (λ2- λΐ) ....... (4) is the reason. According to the foregoing formulas (2) and (4), the height h can be expressed as the following formula (5) · H " 1/2 · {(λΐ · λ2) / (λ2-λΐ)}; (cose ^ / (2π ^ 23 ^ 6 »-sine)) ----. (5) According to 岫 to avoid If the interference color is generated, the reflective surface of the reflective film should have a continuous wave shape. In this K embodiment, in order to form the reflective film, at least two convex portions having different heights are formed on the substrate and formed on the substrate. Cover the ridges. The hydrated resin film of the trowel is formed on the polymer resin film.
O:\92\92808.DOC -29- 1240130 有高反射效率之材料所製造之反射薄膜。 所製造之反射薄膜可用於反射/透射型液晶顯示裝置之 反射部分。因為該反射部分具有連續波型之反射表面,故 可防止自該反射部分反射之光產生干擾。利用光掩模光學 形成隆凸部分時,其可藉著設定相同之照光條件而於良好 再現性下形成。 於此實施例之反射/透射型液晶顯示裝置中,由具有高透 射效率之材料所製造之透射部分中不形成隆凸部分,以改 善該透射效率。然而,即使於該透射部分中形成隆凸部分 ,仍可利用透射光顯示。 圖15係為本發明實施例之反射/透射型液晶顯示裝置之 剖面圖。 參知、圖15 ’於玻璃基板61上形成間極絕緣膜61 a。於該玻 璃基板61位於具有反光功能之反射電極69下層之部分上任 意形成高隆凸部分64a及低隆凸部分64b。該高隆凸部分64a 及低隆凸部分64b覆以聚合物樹脂膜65。 因為該高隆凸部分64a及低隆凸部分64b係經由該閘極絕 緣膜61 a而於玻璃基板61上形成,故該聚合物樹脂膜6 5位於 該高隆凸部分64a及低隆凸部分64b上之部分的上表面具有 連續波型。該聚合物樹脂膜65幾乎位於該玻璃基板61之所 有表面上,而非僅位於該反射電極69之下層區域中。 該反射電極69由具有高反射功能之材料製造,係位於聚 合物樹脂膜65具有連續波型而位於該高隆凸部分64a及低 隆凸部分64b上之部分上。 O:\92\92808.DOC -30- 1240130 透射黾極6 8亦經由該閘極絕緣膜61 a而位於該玻璃基板 6!上,與該反射電極69分離。該透射電極68係由具有高透 光功能之材料製造,諸如氧化銦錫(IT〇)。 偏光板90係於裝置為模組時附加於所製造之主動陣列基 板的背面上。之後將後照光91置於該偏光板9〇上。 自该後照光91放射而指向該透射電極68之部分光線通經 孩透射電極68及後續之主動陣列基板。然而,有部分照向 反射電極69之光係自反射電極69之背面反射至該後照光… 。因為反射電極69之背面具有連續波型,故來自該反射電 極69之反射光如圖15之箭號所示般地散射。該散射光再自 後知光91反射至主動陣列基板。該光線之一部分通經該透 射電極68,及後續之主動陣列基板。 因此’於包括具有前述形狀之反射電極69之主動陣列基 板中’來自後照光而由反射電極69反射之光可用於顯示。 與習用透射型液晶顯示裝置不同地,此可較實際鏡孔比所 預測者更有效地利用光線。詳言之,若該反射電極具有平 面形狀,主要產生矩型反射,則其難以再次反射而通經該 透射電極68。然而,此實施例中,具有連續波型之反射電 極69用以使反射光返回該後照光位於該透射電極68下層之 邵分,而更有效地利用光線。 圖16係為顯示當反射電極69及後照光91之反射性與標準 白板比較下約90%,而該偏光板90之透光度約40%時,該鏡 孔比相對於透光度及反射性之關係的圖。此關係係假設圖 素電極覆蓋整體顯示表面,而不考慮匯流排線及主動元件 O:\92\92808.DOC -31 - 1240130 之存在性下計算。 如圖16所示,用於自外部人射於對基㈣面上之光的反 射電極69之反射性係藉著該反射電極69之反射性乘以該反 射電極69面積相對於該整體圖素電極面積之比例而計得。 用於來自後照光91之透射電極68之透光度並非恰等於該鏡 孔比a(即透射電極68面積相對於整體圖素電極面積之比例) ,而為值b,包括來自後照光而由反射電極69所反射之光分 量,其可用為添加於該鏡孔比a之顯示。 因此’與習用透射型液晶顯示裝置不同地,因為來自後 照光91而由該反射電極69反射之光亦被利用,故可較實際 鏡孔比所預測者更有效地利用光線。 圖17係為顯示鏡孔比與透射效率間之關係(透光度/鏡孔 比)之圖。如圖17所示,根據該計算得知,當該鏡孔比係為 40%時,來自後照光91而由反射電極69所反射之光之利用 率高達直接自該後照光91通過透射電極68之光強度的50〇/〇 。根據圖17所示之計算值,亦發現該反射電極69面積相對 於整體圖素電極面積之比例愈大,由該反射電極69所反射 之光的利用率愈高。 下文將描述實施例8反射型/透射型液晶顯示裝置之特例。 圖1 8係為本發明實施例8反射型/透射型液晶顯示裝置之 平面圖。圖19A至19F係為沿圖I8之F-F線所得之剖面圖,說 明此實施例液晶顯示裝置之製造方法。 參照圖18及19F,該反射型/透射型液晶顯示裝置之主動 陣列基板包括多條作為掃描線之閘極匯流排線72及多條作 O:\92\92808.DOC -32- 1240130 為信號線之源極匯流排線74,其係彼此交叉。於由相鄰閉 極匯流排線72及相鄰源極匯流排線74所環繞之各個矩型^ 域中,放置由具有高透光效率之材料所製造之透射電極Μ 及由具有高反射性之材料所製造之反射電極的。該透射電 極6 8及反射電極6 9構成一個圖素電極。 閑極電極73自該閘極g流排線72向位於各個形成圖素電 極 < 區域的角落邵分之圖素電極延伸。薄膜電晶體(TFT)乃 係於該閘極電極73之終端充作切換元件。間極電極73本身 即構成該薄膜電晶體71之一部分。 薄膜電晶體7i係位於位在玻璃基板61上之閘極電極乃上 ,如圖19F所示。該閘極電極73覆以閘極絕緣膜6;u,於該 開極絕緣膜6U上形成半導體層77,以經由該閘極絕緣: 61a覆蓋該閘極電極73。於該半導體層77之側面部分上形 一對接觸層78。 源極電極75係位於-接觸層上,而電料對應之源極匯 流排線74上。該源極電極75之侧面部分根據絕緣方式與該 閘極電極73重疊,構成一部分薄膜電晶體71。於另一接觸 層78上形成亦構成一部分薄膜電晶體71之汲極電極%,使 其遠離源極電極75並根據絕緣方式與該閘極電極乃重疊。 該汲極電極76係經由底層電極81a電聯於該圖素電極。 儲存電容器係藉著形成該低層電極81a而形成,經由閘極 絕緣膜61a與用於後續圖素列之相鄰圖素電極之閘極匯流 排線72重®。該底層電極8丨a可位於實質整體區域上,其如 下文所述般地形成隆凸部分,以使形成該層之影響一致化O: \ 92 \ 92808.DOC -29- 1240130 Reflective film made of materials with high reflection efficiency. The manufactured reflective film can be used for a reflective portion of a reflective / transmissive liquid crystal display device. Since the reflecting portion has a reflecting surface of a continuous wave type, interference with light reflected from the reflecting portion can be prevented. When the bumps are formed optically using a photomask, they can be formed with good reproducibility by setting the same illumination conditions. In the reflection / transmission type liquid crystal display device of this embodiment, no bumps are formed in the transmission portion made of a material having high transmission efficiency to improve the transmission efficiency. However, even if a raised portion is formed in the transmitting portion, it is possible to display with transmitted light. Fig. 15 is a sectional view of a reflection / transmission type liquid crystal display device according to an embodiment of the present invention. Referring to FIG. 15 ', an interlayer insulating film 61a is formed on a glass substrate 61. Highly convex portions 64a and low convex portions 64b are arbitrarily formed on the portion of the glass substrate 61 located under the reflective electrode 69 having a reflecting function. The high ridge portion 64 a and the low ridge portion 64 b are covered with a polymer resin film 65. Since the high ridge portion 64a and the low ridge portion 64b are formed on the glass substrate 61 through the gate insulating film 61a, the polymer resin film 65 is located in the high ridge portion 64a and the low ridge portion The upper surface of the portion on 64b has a continuous waveform. The polymer resin film 65 is located on almost all surfaces of the glass substrate 61, and not only in the lower region of the reflective electrode 69. The reflective electrode 69 is made of a material having a high reflection function, and is located on a portion where the polymer resin film 65 has a continuous wave shape and is located on the high ridge portion 64a and the low ridge portion 64b. O: \ 92 \ 92808.DOC -30- 1240130 The transmissive pole 6 8 is also located on the glass substrate 6! Through the gate insulating film 61 a and is separated from the reflective electrode 69. The transmission electrode 68 is made of a material having a high light transmission function, such as indium tin oxide (IT0). The polarizing plate 90 is attached to the back of the manufactured active array substrate when the device is a module. Thereafter, the backlight 91 is placed on the polarizing plate 90. Part of the light emitted from the backlight 91 and directed toward the transmission electrode 68 passes through the child transmission electrode 68 and the subsequent active array substrate. However, a part of the light directed to the reflective electrode 69 is reflected from the back surface of the reflective electrode 69 to the backlight ... Since the back surface of the reflective electrode 69 has a continuous wave type, the reflected light from the reflective electrode 69 is scattered as shown by the arrow in FIG. 15. This scattered light is reflected from the known light 91 to the active array substrate. A part of the light passes through the transmissive electrode 68 and the subsequent active array substrate. Therefore, 'in an active array substrate including the reflective electrode 69 having the aforementioned shape', the light from the backlight and reflected by the reflective electrode 69 can be used for display. Unlike conventional transmissive liquid crystal display devices, this allows more efficient use of light than actual mirror holes than predicted. In detail, if the reflective electrode has a flat shape and mainly produces a rectangular reflection, it is difficult to reflect again and pass through the transmissive electrode 68. However, in this embodiment, a reflective electrode 69 having a continuous wave type is used to return the reflected light to the sub-layer of the backlight which is located under the transmissive electrode 68, and to use the light more effectively. FIG. 16 shows that when the reflectivity of the reflective electrode 69 and the backlight 91 is about 90% compared with a standard white board, and the transmittance of the polarizing plate 90 is about 40%, the mirror-to-hole ratio relative to the transmittance and reflection Sexual relationship diagram. This relationship is calculated assuming that the pixel electrode covers the entire display surface, irrespective of the existence of the busbars and active components O: \ 92 \ 92808.DOC -31-1240130. As shown in FIG. 16, the reflectivity of the reflective electrode 69 used for radiating light on the base surface from an outside person is obtained by multiplying the reflectivity of the reflective electrode 69 by the area of the reflective electrode 69 with respect to the entire pixel. Calculated as the ratio of electrode area. The transmittance used for the transmission electrode 68 from the backlight 91 is not exactly equal to the mirror hole ratio a (ie, the ratio of the area of the transmission electrode 68 to the overall pixel electrode area), but is the value b, including from the backlight. The light component reflected by the reflective electrode 69 can be used as a display added to the mirror hole ratio a. Therefore, unlike conventional transmission type liquid crystal display devices, since the light from the backlight 91 and reflected by the reflective electrode 69 is also used, light can be used more efficiently than the actual mirror hole than predicted. Fig. 17 is a graph showing the relationship between the aperture ratio and the transmission efficiency (transmittance / mirror ratio). As shown in FIG. 17, according to the calculation, when the mirror-to-hole ratio is 40%, the utilization rate of the light from the backlight 91 reflected by the reflection electrode 69 is as high as directly passing from the backlight 91 through the transmission electrode 68. The light intensity is 50/0. According to the calculated value shown in FIG. 17, it is also found that the larger the ratio of the area of the reflective electrode 69 to the area of the entire pixel electrode, the higher the utilization rate of the light reflected by the reflective electrode 69. A specific example of the reflective / transmissive liquid crystal display device of Embodiment 8 will be described below. FIG. 18 is a plan view of a reflective / transmissive liquid crystal display device according to Embodiment 8 of the present invention. 19A to 19F are cross-sectional views taken along the line F-F of Fig. I8, illustrating a method of manufacturing the liquid crystal display device of this embodiment. 18 and 19F, an active array substrate of the reflective / transmissive liquid crystal display device includes a plurality of gate bus lines 72 as scanning lines and a plurality of O: \ 92 \ 92808.DOC -32- 1240130 as signals The source busbars 74 of the lines cross each other. In each rectangular region surrounded by the adjacent closed-pole busbar 72 and the adjacent source-busbar 74, a transmissive electrode M made of a material with high light transmission efficiency and a highly reflective material are placed. Materials made of reflective electrodes. The transmissive electrode 68 and the reflective electrode 69 constitute a pixel electrode. The idler electrode 73 extends from the gate g current drain line 72 to a pixel electrode located at a corner of each of the pixel electrode forming regions. A thin film transistor (TFT) is connected to the terminal of the gate electrode 73 as a switching element. The inter electrode 73 itself constitutes a part of the thin film transistor 71. The thin film transistor 7i is located on the gate electrode on the glass substrate 61, as shown in FIG. 19F. The gate electrode 73 is covered with a gate insulating film 6; u, a semiconductor layer 77 is formed on the open electrode insulating film 6U to cover the gate electrode 73 through the gate insulation: 61a. A pair of contact layers 78 are formed on a side portion of the semiconductor layer 77. The source electrode 75 is located on the -contact layer, and the source busbar 74 corresponding to the electrical material is on the source bus bar 74. A side portion of the source electrode 75 overlaps with the gate electrode 73 according to an insulation method to form a part of the thin film transistor 71. A drain electrode%, which also constitutes a part of the thin film transistor 71, is formed on another contact layer 78, away from the source electrode 75 and overlapping with the gate electrode according to the insulation method. The drain electrode 76 is electrically connected to the pixel electrode via the bottom electrode 81a. The storage capacitor is formed by forming the lower layer electrode 81a, and a gate bus line 72 through a gate insulating film 61a and a neighboring pixel electrode for a subsequent pixel row. The bottom electrode 8a can be located on a substantially entire area, which forms a raised portion as described below, so as to make the influence of forming the layer uniform.
O:\92\92808.DOC -33- 1240130 於各個反射電極69下形成高隆凸部分64a及低隆凸部分 64b及頂層聚合物樹脂膜65。 該聚合物樹脂膜65之上表面具有反射該隆凸部分64a及 64b之存在性之連續波型。該聚合物樹脂膜65係於實質上整 體玻璃基板61表面上形成,而非僅位於反射電極69下之區 域中。於此實施例中,使用例如由Tokyo Ohka Co.,Ltd.所 製造之OFPR-800作為聚合物樹脂膜65。 該反射電極69係位於該聚合物樹脂膜65具有連續波型之 部分上,其係位於該高隆凸部分64a及低隆凸部分64b上。 該反射電極69係由具有高反射效率之材料製造,諸如A卜 該反射電極69係經由接觸孔79電聯於對應之汲極電極76。 於此實施例反射型/透射型液晶顯示裝置中,該透射電極 6 8係與該反射電極6 9分離。透射電極6 8係由具有高透射效 率之材料諸如氧化錮錫製造。 現在參照圖19A至19F描述用以形成反射電極69及透射電 極68之方法,其係為該反射型/透射型主動陣列基板70之主 要部分。 首先,如圖19A所示,於玻璃基板61上形成多條由Cr,Ta 等材料所製造之閘極匯流排線72(參照圖1 8),自閘極匯流排 線72延伸。 於該玻璃基板61之整體表面上形成由SiNx,SiOx等材料 所製造之閘極絕緣膜61 a,以覆蓋閘極匯流排線72及閘極電 極73。於該閘極絕緣膜61 a位於閘極電極73上之部分上形成 O:\92\92808.DOC -34- 1240130 由非晶矽(a-Si)、多晶矽、Cd〜笔从』丨O: \ 92 \ 92808.DOC -33-1240130 Under each reflection electrode 69, a high ridge portion 64a and a low ridge portion 64b and a top polymer resin film 65 are formed. The upper surface of the polymer resin film 65 has a continuous wave pattern that reflects the existence of the ridges 64a and 64b. The polymer resin film 65 is formed on the surface of the substantially entire glass substrate 61, and is not located only in the area under the reflective electrode 69. In this embodiment, as the polymer resin film 65, OFPR-800 manufactured by Tokyo Ohka Co., Ltd. is used, for example. The reflective electrode 69 is located on a portion of the polymer resin film 65 having a continuous wave shape, and is located on the high ridge portion 64a and the low ridge portion 64b. The reflective electrode 69 is made of a material having high reflection efficiency, such as A. The reflective electrode 69 is electrically connected to the corresponding drain electrode 76 through a contact hole 79. In the reflective / transmissive liquid crystal display device of this embodiment, the transmissive electrode 68 is separated from the reflective electrode 69. The transmissive electrode 68 is made of a material having a high transmissivity such as rhenium tin oxide. A method for forming the reflective electrode 69 and the transmissive electrode 68 will now be described with reference to Figs. 19A to 19F, which are main parts of the reflective / transmissive active array substrate 70. Figs. First, as shown in FIG. 19A, a plurality of gate bus bars 72 (see FIG. 18) made of a material such as Cr, Ta are formed on the glass substrate 61, and extend from the gate bus bars 72. A gate insulating film 61a made of a material such as SiNx, SiOx, etc. is formed on the entire surface of the glass substrate 61 to cover the gate busbar 72 and the gate electrode 73. O: \ 92 \ 92808.DOC -34-1240130 is formed on the gate insulating film 61 a on the gate electrode 73. Amorphous silicon (a-Si), polycrystalline silicon, Cd ~
CdSe寺材料所製造之半導體層77 。於各半導體層77之兩侧 I刀上形成一對由a-Si等材料塑 造之接觸層7 8。 A1等材料製造之源 由Ti,Mo,A1等材 於該接觸層78之一上形成由耵’ M〇, 極電極75,而於另一接觸層78上形成由 料製造之汲極電極76。 此實施例中,使用C0rningInc.所製造厚度hi毫米之編號 7059產物作為玻璃基板61之材料。 如圖19 B所示,藉濺射形成構成該源極匯流排線7 4之一部 分的金屬層81。該金屬層81亦可用於形成底層電極化。 之後,如圖19C所示,藉賤射及製作饰線圖型形成亦構成 一部分源極匯泥排線74之氧化銦錫層8〇。 因此’於此實施例中,該源極區流排線74係具有由金屬 層81及氧化銦錫層_構成之雙層結構。該雙層結構之優 點係為即使構成該源極匯流排線74之金屬賴部分有缺陷 ’該源極匯流排線74之電聯仍可由氧化銦錫層80保持。此 降低源極匯流排線74發生斷線之可能。 氧化銦錫層80亦用以形成透射電極68。使其可於形成源 極匯流排線74之同時形成透射電極68,而防止層數增加。 之後,如圖19D所示,於欲形成反射電極69之區域上使用 感光性樹脂抗餘劑膜形成具有f胃圓型剖㊆之圓型隆凸部 刀64a及64b d p圣凸邵分64a及6仆以不位於透射電極⑽上 以於孫液晶層上有效地施加電壓為佳。然而,於該透射電 極68上形成該隆凸部分64&及64]3時,於光學上亦無極大影 O:\92\92808.DOC -35- 1240130 下文將參照圖20A至20D簡述於 藉旋轉塗佈法於玻璃基板61 (實際Semiconductor layer 77 made of CdSe temple material. A pair of contact layers 78 made of a-Si and the like are formed on the two sides of each semiconductor layer 77. Sources made of materials such as A1 are made of Ti, Mo, A1 and other materials on one of the contact layers 78 to form an electrode 75, and a drain electrode 76 made of materials is formed on the other contact layer 78. . In this embodiment, a product of No. 7059 with a thickness of hi mm manufactured by Corning Inc. is used as the material of the glass substrate 61. As shown in Fig. 19B, a metal layer 81 constituting a part of the source bus line 74 is formed by sputtering. The metal layer 81 can also be used to form a bottom electrode. Thereafter, as shown in FIG. 19C, the indium tin oxide layer 80, which also forms a part of the source sink line 74, is formed by forming a pattern and forming a decoration pattern. Therefore, in this embodiment, the source region drain line 74 has a two-layer structure composed of a metal layer 81 and an indium tin oxide layer. The advantage of the double-layer structure is that even if the metal part of the source busbar 74 is defective, the electrical connection of the source busbar 74 can be maintained by the indium tin oxide layer 80. This reduces the possibility of disconnection of the source bus bar 74. The indium tin oxide layer 80 is also used to form the transmissive electrode 68. This makes it possible to form the transmissive electrode 68 at the same time as the source bus line 74 is formed, thereby preventing the number of layers from increasing. After that, as shown in FIG. 19D, the photosensitive resin anti-residue film is used to form the circular raised projections 64a and 64b with f stomach round sections on the area where the reflective electrode 69 is to be formed. It is preferable that the voltage is not effectively located on the transmissive electrode 以 in order to effectively apply a voltage to the liquid crystal layer. However, when the ridges 64 & and 64] 3 were formed on the transmissive electrode 68, there was also no significant effect on the optical O: \ 92 \ 92808.DOC -35-1240130 which will be briefly described below with reference to FIGS. By spin coating on glass substrate 61 (actual
約3 0 0 0轉每分鐘範圍内為佳,此福 隆凸邵分64a及64b之方法。 首先,如圖20A所述,夢 該反射電極區中形成該 :轉塗佈法,轉速以約5〇〇至 此貫施例係為1 5 0 0轉每分鐘 ’歷經3 0秒’而得到2 · 5微米之厚度。 之後,上層具有抗蝕劑膜62之玻璃基板61於9〇它下預先 洪烤例如3 0分鐘。 之後,如圖20B所示,於該抗蝕劑膜62上放置光掩模63 。該光掩模具有圖21所示之形狀,例如包括兩種貫穿板6虹 之圓型孔63 a及63b。該光掩模63接著如箭號所示地由上照 光。 此實施例之光掩模具有直徑5微米之圓型孔63a及直徑3 微米之圓型孔’其係任意排列。任何相鄰圖型孔之間隙應 至少約2微米。然而,若該間隙太大,則稍後欲於彼上層形 成之聚合物樹脂膜65將難以得到連續波型。 形成之基板使用濃度2.38%之顯影劑顯影,例如Tokyo Ohka Co·,Ltd.製造之NMD-3。結果,如圖20C所示,於玻 璃基板61之反射電極區中形成具有不同高度之數種微型隆 凸部分64a’及64b’。該隆凸部分64a1及64b’之頂緣係為方型 O:\92\92808.DOC -36- 1240130 /固N自直徑5微米之圖型孔63a及直徑3微米之圖型孔63b 广成问度2.48微米之隆凸部分,及高度164微米之隆凸 邵分64b,。 6 /卩生凸#分64a’及64b’之高度可藉著改變圖型孔63a及 63b/曝光時間及顯影時間而改變。圖型孔63a及63b之大小 不限於前述者。 之後,如圖20D所示,上層具有隆凸部分64a,及64b,之玻 璃基板6丨於約200。〇下加熱一小時。此使該隆凸部分6如,及 b之方型頂緣軟化,而形成具有實質圓型剖面之隆凸部分 64a及64b。 如圖19E所不,藉旋轉塗佈法於形成之玻璃基板6丨上施加 =合物樹脂,製作佈線圖型以形成聚合物樹脂膜65。使用 1 ϋ材料OFPR-800作為聚合物樹脂,於較佳約ι〇〇〇至約 3000轉每分鐘範圍内之轉速下旋轉塗佈。於此實施例中, 該旋轉塗佈係於2000轉每分鐘轉速下進行。 根據此種方式,於玻璃基板6丨上得到具有連續形狀上表 面之聚合物樹脂膜65,其係不具有隆凸部分之平面。 如圖19F所示,由Α1所製造之反射電極的係藉例如濺射法 於聚合物樹脂膜65之預定部分上形成。適用於反射電極仍 之材料除Α1及Α1合金外另外包括具有高反射效率之Ta,犯 ,Cr及Ag。該反射電極69之厚度以介於約〇 〇1至約1〇微米 範圍内為佳。 偏光板(未示)係附加於此實施例所製造之主動陣列基板 之背面上。後照光則放置於該偏光板之外表面上。 O:\92\92808.DOC -37- 1240130 若該A1膜係於移除該聚合物樹脂膜65位於透射電極68上 之部分4後形成,則產生電蝕。因此,該聚合物樹脂膜65 位於透射電極68上之部分應於形成該反射電極69之後形成 。此移除可藉著灰化進行,同時移除該聚合物樹脂膜65位 於用以連接位在該主動陣列基板7〇邊緣之驅動器的電極上 之部分。此改吾程序效率,而可有效地施加電壓於該液晶 層。 若用以形成該隆凸部分之方法中未使用聚合物樹脂膜65 ,則可於由氧化銦錫所製造之透射電極68與由刈所製造之 反射電極69之間形成Mo等層,以防止產生電蝕。 所形成之反射電極69,由具有高反射效率之材料製造, 具有連續波型之上表面,因為底層聚合物樹脂膜65如前文 所述般地具有連續波型。 此實施例中,於形成源極匯流排線74之間時形成透射電 極6 8。當该源極匯流排線7 4係為包括金屬層$ 1之單層結構 而非前述包括金屬層8 1及氧化銦錫層80之雙層結構時,該 透射電極68可與該源極匯流排線74個別形成。 自具有連續波型而由高反射效率材料製造之反射電極69 所反射之光的波長相依性係根據圖22所示之方式測量。用 以測量之結構係藉著模擬與實際液晶顯示裝置相等之反射 電極69於實際使用期間之條件而形成。詳言之,折射率工$ 之模擬玻璃66-實質等於實際液晶層之折射率-附加於主動 陣列基板70上,使用折射率丨.5之紫外光固化性黏著劑67於 彼上層形成反射電極69及透射電極67。 O:\92\92808.DOC -38- 1240130 就"、>1量系統而言’光源L1放置於使入射光L1 ’相對於模擬 玻璃66法線㈤丨於入射角0 i入射,而光電倍增計。係放置以 捕集相對於法線m2於輸出角0〇反射之固定角光束。 使用前述結構,該光電倍增器以捕集散射光束L2,以作為 入射光束L1’,其係於入射角0 {入射於模擬玻璃66上之散射 光中於輸出角0 〇下反射者。 觔述測足係於0 i = 3〇。而0 0 = 20。之條件下進行,以避 免該光電倍增計L2捕集自該光源L1放射而自該模擬玻璃% 表面反射之正常反射光束。 圖24係為顯示此實施例中反射光之波長相依性的圖。 如圖24所示,該反射之波長相依性於此實施例中難以辨 認,而證明得到良好之白色顯示。 此實施例中,該光掩模63之圖型孔63a及63b之形狀係為 圓型。亦可使用其他形狀諸如矩型、橢圓型、及條型。 此實施例中,形成具有不同高度之隆凸部分6乜及6仆。 或亦可形成具有單一高度之隆凸部分或具有三或多種不同 高度者’以得到具有良好反射特性之反射電極。 然而’發現當形成具有兩種或多種不同高度之隆凸部分 而非具有單一種高度之隆凸部分時,可得到反射特性之波 長相依性較佳之反射電極。 若確定僅使用隆凸部分64a及64b可得到具有連續波型之 上表面’則不需要形成聚合物樹脂膜65。僅形成樹脂膜62( 參照圖20B及20C)以得到具有連續波型之上表面,而於彼上 層形成反射電極69。此情況下,可省略形成聚合物樹脂膜 O:\92\92808.DOC -39- 1240130 6 5之步驟。 此實施例中,使用Tokyo Ohka Co.,Ltd.所製造之 OFPR-800作為感光性樹脂材料。亦可使用可藉曝光方法製 作佈線圖型之任何其他正型或負型感光性樹脂材料。該感 光性樹脂材料之實例包括:Tokyo Ohka Co.,Ltd.所製造之 OMR-83、OMR-85、ONNR-20、OFPR-2、OFPR-830 及 OFPR-500; Shipley Co·所製造之 1400-27;Toray Industries, Inc.戶斤製造之 Photoneath ; Sekisui Fine Chemical Co·,Ltd. 所製造之RW-101 ;及Nippon Kayaku K.K.所製造之R101及 R633 ° 此實施例中,使用薄膜電晶體71作為切換元件。本發明 亦可應用於使用其他切換元件諸如金屬絕緣體金屬(MIM) 、二極體及變阻器之主動陣列基板。 因此,如前文所述,於實施例8之液晶顯示裝置及製造液 晶顯示裝置之方法中,形成由具有高反射效率之材料所製 造之反射電極以具有連續波型。此降低反射性之波長相依 性,以於不產生干擾色之下藉著反射得到良好白色顯示。 因為使用光掩模藉光學技術於基板上形成該隆凸部分, 故可確認良好再現性。亦可於良好再現性下得到反射電極 所形成之波浪型上表面。 於形成源極匯流排線之同時形成由具有高透光度材料所 製造之透射電極。可於步驟數目不比習用液晶顯示裝置增 加之情況下形成反射型/透射型液晶顯示裝置之透射電極。 藉著形成供反射電極使用之連續波型,可於較實際鏡孔 O:\92\92808.DOC -40- 1240130 比所預期者更有效地利用光線。 丄根據此實施例之液晶顯示裝置,於一顯示圖素中形成由 回反射放率材料所製造之反射部分及由高透光效率材料所 製造&透射部分。使用此種結構,當環境黑暗時,該裝置 作為透射型液晶顯示裝置,利用來自後照光而穿透該透射 區《光以顯示影像。當環境相對黑暗時,該裝置作為反射 型/透射型液晶顯示裝置,其同時利用來自後照光而穿透該 透射區之光及自包括具有相當高反射性之膜之反射區所反 射之光以_不影像。當環境明亮時,該裝置作為反射型液 晶顯示裝置,利用來自包括相當高反射性之膜之反射區所 反射之光以顯示影像。 換茗之’根據此實施例,各圖素之圖素電極包括由高反 射放率之材料所製造之反射區及由高透光效率材料所製造 之透射區°因得到於任何前述情況下皆具有良好之光 利用效率及優越之產能之液晶顯示裝置。 艮好《光 此實施例中’由反射性材料所製造之反射區之上表面具 有連續波型。防止於不提供於該反射區係為平面時所必要 之散光裝置下產生鏡面現象,而得到紙白色顯示。 万、此只她例中,具有多個隆凸部分之感光性聚合物樹脂 膜係位於由反射性材料所製造之反射區之下層。使用此種 結構’即使該連續平滑凹陷部分及隆凸部分中有變化,仍 不影響顯示。因此,可於良好產能下製造該液晶顯示裝置 〇 由高透光效率材料製造之透射區係於形成該源極區流排It is better to be in the range of about 3,000 revolutions per minute. This method of bulging is divided into 64a and 64b. First, as shown in FIG. 20A, the formation of the reflective electrode area is described as follows: the transfer coating method, and the rotation speed is about 5,000 to this embodiment. The embodiment is 1 500 revolutions per minute 'after 30 seconds' to obtain 2 · 5 micron thickness. After that, the upper glass substrate 61 having the resist film 62 is pre-baked under 90 °, for example, 30 minutes. Thereafter, as shown in FIG. 20B, a photomask 63 is placed on the resist film 62. The photomask has a shape as shown in FIG. 21 and includes, for example, two circular holes 63 a and 63 b penetrating through the plate 6 and rainbow. The photomask 63 is then illuminated from above as shown by an arrow. The photomask of this embodiment has a circular hole 63a having a diameter of 5 m and a circular hole 'having a diameter of 3 m, which are arbitrarily arranged. The gap between any adjacent patterned holes should be at least about 2 microns. However, if the gap is too large, it will be difficult to obtain a continuous wave pattern for the polymer resin film 65 to be formed on the upper layer later. The formed substrate is developed using a developer having a concentration of 2.38%, such as NMD-3 manufactured by Tokyo Ohka Co., Ltd. As a result, as shown in FIG. 20C, several types of micro-protrusions 64a 'and 64b' having different heights are formed in the reflective electrode region of the glass substrate 61. The top edges of the raised portions 64a1 and 64b 'are square O: \ 92 \ 92808.DOC -36-1240130 / solid N from pattern holes 63a with a diameter of 5 microns and pattern holes 63b with a diameter of 3 microns. Guangcheng The ridges and convex parts with a height of 2.48 microns and the ridges with a height of 164 microns are divided into 64b. The height of 6 / 卩 生 卩 # 分 64a 'and 64b' can be changed by changing the pattern holes 63a and 63b / exposure time and development time. The sizes of the pattern holes 63a and 63b are not limited to those described above. Thereafter, as shown in FIG. 20D, the upper layer has the bulged portions 64a and 64b, and the glass substrate 6 is about 200. 0 ° C for one hour. This softens the square-shaped top edges of the raised portions 6 and b, and forms raised portions 64a and 64b having a substantially circular cross-section. As shown in FIG. 19E, a polymer resin is applied to the formed glass substrate 6 by a spin coating method to prepare a wiring pattern to form a polymer resin film 65. The spin-coated OFPR-800 material is used as the polymer resin at a rotation speed in the range of preferably about 2,000 to about 3000 revolutions per minute. In this embodiment, the spin coating is performed at a speed of 2000 rpm. According to this method, a polymer resin film 65 having a continuous upper surface on the glass substrate 6 is obtained, which is a flat surface having no raised portions. As shown in Fig. 19F, the reflective electrode manufactured by A1 is formed on a predetermined portion of the polymer resin film 65 by, for example, a sputtering method. Suitable materials for reflective electrodes include Ta, Al, Cr, and Ag with high reflection efficiency in addition to A1 and A1 alloys. The thickness of the reflective electrode 69 is preferably in the range of about 0.01 to about 10 microns. A polarizing plate (not shown) is attached to the back of the active array substrate manufactured in this embodiment. The backlight is placed on the outer surface of the polarizer. O: \ 92 \ 92808.DOC -37- 1240130 If the A1 film is formed after removing part 4 of the polymer resin film 65 located on the transmissive electrode 68, electric corrosion will occur. Therefore, a portion of the polymer resin film 65 on the transmissive electrode 68 should be formed after the reflective electrode 69 is formed. This removal can be performed by ashing, and at the same time, the portion of the polymer resin film 65 located on the electrode for connecting the driver located on the edge of the active array substrate 70 is removed. This improves the efficiency of the process, and can effectively apply a voltage to the liquid crystal layer. If a polymer resin film 65 is not used in the method for forming the raised portion, a layer such as Mo may be formed between the transmissive electrode 68 made of indium tin oxide and the reflective electrode 69 made of rhenium to prevent Generates electrical corrosion. The formed reflective electrode 69 is made of a material having a high reflection efficiency and has a continuous wave upper surface because the bottom polymer resin film 65 has a continuous wave shape as described above. In this embodiment, a transmission electrode 68 is formed when the source busbar 74 is formed. When the source bus bar 74 is a single-layer structure including the metal layer $ 1 instead of the aforementioned double-layer structure including the metal layer 81 and the indium tin oxide layer 80, the transmissive electrode 68 may converge with the source. The wiring lines 74 are formed individually. The wavelength dependence of the light reflected from the reflection electrode 69 having a continuous wave type and made of a material with high reflection efficiency is measured in the manner shown in FIG. 22. The structure for measuring is formed by simulating the conditions of a reflective electrode 69 equivalent to an actual liquid crystal display device during actual use. In detail, the simulated glass 66 with refractive index is substantially equal to the refractive index of the actual liquid crystal layer. It is attached to the active array substrate 70, and a UV-curable adhesive 67 with a refractive index of .5 is used to form a reflective electrode on the upper layer. 69 和 Transmission electrode 67. O: \ 92 \ 92808.DOC -38- 1240130 In terms of the "quote," > 1-quantity system, 'the light source L1 is placed so that the incident light L1' is relative to the simulated glass 66 normal line, and is incident at an incident angle 0 i, Photomultiplier. It is arranged to capture a fixed-angle light beam reflected at an output angle of 0 with respect to the normal m2. With the foregoing structure, the photomultiplier captures the scattered light beam L2 as the incident light beam L1 ', which is reflected at an incident angle 0 {scattered light incident on the simulated glass 66 at an output angle 0 °. Tendons are measured at 0 i = 30. And 0 0 = 20. It is performed under the conditions to prevent the photomultiplier L2 from capturing the normal reflected light beam emitted from the light source L1 and reflected from the% surface of the simulated glass. FIG. 24 is a graph showing the wavelength dependence of the reflected light in this embodiment. As shown in Fig. 24, the reflected wavelength dependency is difficult to recognize in this embodiment, and it turns out that a good white display is obtained. In this embodiment, the shapes of the patterned holes 63a and 63b of the photomask 63 are circular. Other shapes such as rectangular, oval, and bar shapes can also be used. In this embodiment, ridges 6 乜 and 6 仆 having different heights are formed. Alternatively, a raised portion having a single height or one having three or more different heights may be formed to obtain a reflective electrode having good reflection characteristics. However, 'it was found that when bumps having two or more different heights are formed instead of bumps having a single height, a reflective electrode having better wavelength dependence of reflection characteristics can be obtained. If it is determined that only the convex portions 64a and 64b can be used to obtain the upper surface 'having a continuous wave pattern, the polymer resin film 65 need not be formed. Only the resin film 62 (see FIGS. 20B and 20C) is formed to obtain an upper surface having a continuous wave pattern, and a reflective electrode 69 is formed on the upper layer. In this case, the step of forming a polymer resin film O: \ 92 \ 92808.DOC -39-1240130 6 5 can be omitted. In this embodiment, OFPR-800 manufactured by Tokyo Ohka Co., Ltd. is used as the photosensitive resin material. Any other positive or negative photosensitive resin material that can be used to make a wiring pattern by an exposure method can also be used. Examples of the photosensitive resin material include: OMR-83, OMR-85, ONNR-20, OFPR-2, OFPR-830, and OFPR-500 manufactured by Tokyo Ohka Co., Ltd .; 1400 manufactured by Shipley Co. -27; Photoneath manufactured by Toray Industries, Inc .; RW-101 manufactured by Sekisui Fine Chemical Co., Ltd .; and R101 and R633 manufactured by Nippon Kayaku KK ° In this embodiment, a thin film transistor 71 is used As a switching element. The invention can also be applied to active array substrates using other switching elements such as metal insulator metal (MIM), diodes, and varistor. Therefore, as described above, in the liquid crystal display device and the method of manufacturing a liquid crystal display device of Embodiment 8, a reflective electrode made of a material having a high reflection efficiency is formed to have a continuous wave type. This reduces the wavelength dependency of the reflectivity, so that a good white display is obtained by reflection without causing interference colors. Since the ridges and convexes are formed on the substrate by an optical technique using a photomask, good reproducibility can be confirmed. The wavy upper surface formed by the reflective electrode can also be obtained with good reproducibility. A transmission electrode made of a material having a high light transmittance is formed at the same time as the source bus line is formed. A transmissive electrode of a reflective / transmissive liquid crystal display device can be formed without increasing the number of steps compared to a conventional liquid crystal display device. By forming a continuous wave pattern for the reflective electrode, it is possible to use light more efficiently than the actual mirror hole O: \ 92 \ 92808.DOC -40-1240130 than expected.丄 According to the liquid crystal display device of this embodiment, a reflective portion made of a retroreflective material and a transmissive portion made of a material with high light transmission efficiency are formed in a display pixel. With this structure, when the environment is dark, the device is used as a transmissive liquid crystal display device, which uses the light from the backlight to penetrate the transmissive area "light to display an image." When the environment is relatively dark, the device is used as a reflective / transmissive liquid crystal display device, which simultaneously uses the light from the backlight to penetrate the transmissive area and the light reflected from the reflective area including a film with a relatively high reflectivity _No video. When the environment is bright, the device functions as a reflective liquid crystal display device that uses light reflected from a reflective area including a film having a relatively high reflectivity to display an image. In other words, according to this embodiment, the pixel electrode of each pixel includes a reflection region made of a material with high reflectivity and a transmission region made of a material with high light transmission efficiency. Liquid crystal display device with good light utilization efficiency and superior productivity. That is, in this embodiment, the upper surface of the reflective region made of a reflective material has a continuous wave pattern. It prevents the specular phenomenon from occurring under the astigmatism device which is not provided when the reflection area is flat, and the paper white display is obtained. In this example, a photosensitive polymer resin film having a plurality of raised and convex portions is located under a reflective region made of a reflective material. The use of this structure 'does not affect the display even if there is a change in the continuous smooth concave portion and the convex portion. Therefore, the liquid crystal display device can be manufactured with good productivity. The transmission region made of a material with high light transmission efficiency depends on forming the drain region of the source region.
O:\92\92808.DOC -41- 1240130 線時同時形成。此大幅縮短液晶顯示裝置之製造過程。 於透射區及反射區之間形成保護膜。此防止透射區及反 射E之間產生電钱。 保留於該透射區及終端電極上之反射性材料係於該反射 區製作佈線圖型時同時移除。此大幅縮短該液晶顯示裝置 之製造過程。 此實施例中,自該後照光放射之光通經該透射區而離開 該基板,而自該反射區之背面反射回到該後照光,而再反 射至该基板。一部分再反射光通經該透射區而離開基板。 因為一般反射主要係於反射區係為平面時發生,故傳統 上該再反射光難以有效地通過該透射區。然而,此實施例 中,因為反射區具有連續波型,故自該後照光放射之光被 散射,使該反射光有效地回到該後照光位於該透射區下方 之邓分。因此,與習用透射型液晶顯示裝置不同地,可較 貫際鏡孔比所預測者更有效地利用光線。 (實施例9) 圖25係為本發明貫施例9之透射型/反射型液晶顯示裝置 100之部分剖面圖。 參知、圖25 ’液晶顯示裝置100包括圖18所示之主動陣列基 板7〇(對應於F’_F’剖面)、對基板(濾色器基板)16〇、及夾置 其間 < 液晶層140。該透射型/反射型主動陣列基板7〇包括 多條間極匯流排線72以作為掃描線、及多條源極匯流排線 74以作為信號線,其係位於絕緣玻璃基板61上而彼此相交 。於各個由相鄰閘極匯流排線72及相鄰源極匯流排線74所O: \ 92 \ 92808.DOC -41- 1240130 formed at the same time. This greatly shortens the manufacturing process of the liquid crystal display device. A protective film is formed between the transmission region and the reflection region. This prevents electricity from being generated between the transmission area and the reflection E. The reflective material remaining on the transmissive area and the terminal electrode is removed at the same time as the wiring pattern is made in the reflective area. This greatly shortens the manufacturing process of the liquid crystal display device. In this embodiment, the light radiated from the back light passes through the transmission area and leaves the substrate, and is reflected back to the back light from the back surface of the reflection area, and then reflected to the substrate. A portion of the re-reflected light passes through the transmission area and leaves the substrate. Because general reflection occurs mainly when the reflection area is a flat surface, it is traditionally difficult for the re-reflected light to effectively pass through the transmission area. However, in this embodiment, because the reflection region has a continuous wave type, the light radiated from the backlight is scattered, so that the reflected light is effectively returned to the Deng points where the backlight is located below the transmission region. Therefore, unlike conventional transmissive liquid crystal display devices, light can be used more efficiently than conventional mirror holes than predicted. (Embodiment 9) FIG. 25 is a partial cross-sectional view of a transmissive / reflective liquid crystal display device 100 according to Embodiment 9 of the present invention. Referring to FIG. 25, the liquid crystal display device 100 of FIG. 25 includes the active array substrate 70 (corresponding to the F'_F 'cross section) shown in FIG. 18, a counter substrate (color filter substrate) 160, and a liquid crystal layer interposed therebetween 140. The transmissive / reflective active array substrate 70 includes a plurality of inter-electrode bus lines 72 as scanning lines and a plurality of source bus lines 74 as signal lines, which are located on an insulating glass substrate 61 and intersect each other. . In each of the adjacent gate busbars 72 and the adjacent source busbars 74
O:\92\92808.DOC -42- 1240130 衰、、之矩土區域中’放置由高透光效率材料所製造之透射 兒極68及由兩反射效率材料所製造之反射電極69。該透射 私杞68及4反射包核69構成一個圖素電極。該對基板(濾色 器基板)160包括依序於絕緣玻璃基板162上形成之濾色器 層164及由氧化銦錫等材料所製造之透明電極166。 於基板7 〇及6 0面對液晶層14 0之表面上形成垂直對正膜( 未示)。為了界定由電場定向之液晶分子之取向,該垂直對 正膜係於一方向上摩擦,以於液晶分子上提供預仰角。液 晶層140使用具有負介電各向異性之向列液晶材料(例如 Merck & Co.,Inc.所製造之 MJ)。 液晶顯示裝置100之最小顯示單元之各圖素皆包括由反 射電極69所界足之反射區120R及由透射電極68所界定之透 射區120T。液晶層140厚度於反射區12〇R中係為dr,而於透 射區120T中係為dt(dt= 2dr),使用於顯示之光束之光徑(於 反射區中之反射光束及於透射區中之透射光束)實質上彼 此相等。雖dr=2dt係較佳情況,但以及心可根據顯示特性 適當地決定’先決條件為dt> dr。dr—般係為約4至約6微米 ,而dr係為約2至約3微米。換言之,於主動陣列基板7〇之 各圖素區中形成約2至約3微米之階梯。當該反射電極69具 有如圖25所示之凹陷及隆凸形狀表面時,厚度平均值應為 dr。此情況下,該透射/反射型液晶顯示裝置1 〇〇包括兩種區 域(反射區及透射區),其中液晶層140厚度彼此相異。此實 施例中,該主動陣列基板70包括反射區i2〇r及透射區12〇1 ,其與該液晶層14 0面對之側面之高度相異。O: \ 92 \ 92808.DOC -42- 1240130 In the region of the earth, the transmission electrode 68 made of a material with high light transmission efficiency and the reflective electrode 69 made of two materials with high reflection efficiency are placed. The transmissive layer 68 and the 4-reflection envelope 69 form a pixel electrode. The pair of substrates (color filter substrates) 160 includes a color filter layer 164 sequentially formed on an insulating glass substrate 162 and a transparent electrode 166 made of a material such as indium tin oxide. A vertical alignment film (not shown) is formed on the surfaces of the substrates 70 and 60 facing the liquid crystal layer 140. In order to define the orientation of the liquid crystal molecules oriented by the electric field, the vertical alignment film is rubbed in one direction to provide a pre-elevation angle on the liquid crystal molecules. The liquid crystal layer 140 uses a nematic liquid crystal material having negative dielectric anisotropy (for example, MJ manufactured by Merck & Co., Inc.). Each pixel of the smallest display unit of the liquid crystal display device 100 includes a reflective region 120R bounded by a reflective electrode 69 and a transmissive region 120T defined by a transmissive electrode 68. The thickness of the liquid crystal layer 140 is dr in the reflection region 120R and dt (dt = 2dr) in the transmission region 120T. It is used for the light path of the display beam (the reflected beam in the reflection region and the transmission region The transmitted light beams are substantially equal to each other. Although dr = 2dt is a preferable case, it can be appropriately determined according to the display characteristics. The prerequisite is dt > dr. dr is generally about 4 to about 6 microns, and dr is about 2 to about 3 microns. In other words, steps of about 2 to about 3 microns are formed in each pixel region of the active array substrate 70. When the reflective electrode 69 has a concave and convex shape surface as shown in Fig. 25, the average thickness should be dr. In this case, the transmission / reflection type liquid crystal display device 100 includes two types of regions (a reflection region and a transmission region), in which the thickness of the liquid crystal layer 140 is different from each other. In this embodiment, the active array substrate 70 includes a reflective region i20r and a transmissive region 1201, which are different in height from the side facing the liquid crystal layer 140.
O:\92\92808.DOC - 43- 1240130 實際製造具有圖25所示之結構之液晶顯示裝置(對角線 • 8.4英吋)’進行64灰階顯示以評估該裝置之顯示特性(透 光度及反射性)。評估結果表示於圖26中。該液晶顯示裝置 於以下條件下製造。於一圖素中透射區12〇τ面積相對於反 射區12R之比例係為4 : 6。該透射電極68係由氧化銦錫製造 ,而该反射電極係由Α1製造。該透射區12〇τ中之液晶層14〇 之厚度dt係設定於約5·5微米,而該反射區12〇尺中液晶層14〇 厚度係設定於約3微米。 液曰曰頭示裝置於透射模式下使用來自後照光之光線之透 光度係使用Topcon Co•所製造之ΜΒ-5測量,而液晶顯示裝 置於反射模式下使用環境光之反射性係使用〇tsukaO: \ 92 \ 92808.DOC-43- 1240130 Actually manufacture a liquid crystal display device (diagonal • 8.4 inches) with the structure shown in Figure 25 to perform 64 grayscale display to evaluate the display characteristics of the device (light transmission Degree and reflectivity). The evaluation results are shown in FIG. 26. This liquid crystal display device was manufactured under the following conditions. In a pixel, the ratio of the area of the transmission area 120τ to the reflection area 12R is 4: 6. The transmissive electrode 68 is made of indium tin oxide and the reflective electrode is made of A1. The thickness dt of the liquid crystal layer 14o in the transmissive region 12〇τ is set to about 5.5 micrometers, and the thickness of the liquid crystal layer 14o in the 120 ft. Reflective region is set to about 3 micrometers. The transmittance of the liquid crystal display device in the transmission mode using the light from the backlight is measured using the MB-5 manufactured by Topcon Co., while the liquid crystal display device is used in the reflection mode to reflect the ambient light. tsuka
Electronics Co·,Ltd.所製造之LCD-5000利用積分球測量。 如圖26所示’於64灰階顯示中之反射性及透光度之變化( 個別為圖26中之實線及虛線)實質上彼此相符。是故,即使 用同時進行使用來自後照光之光線的透射模式顯示及使用 環境光之反射模式顯示,仍可得到具有充分顯示品質之灰 階顯示。該透射模式及反射模式中之對比個別約2〇〇及約25 〇 下文將描述顏色再現性之評估結果。圖27及28個別係為 習用透射型液晶顯示裝置及此實施例透射型/反射型液晶 _示裝置於不同党度之環境光下之彩度圖。此等液晶顯示 裝置皆使用相同之後照光。 如圖2 7所示,當環境光對顯示螢幕之照度自〇 1X增至 8,000 lx及至17,000 lx時,習用液晶顯示裝置之色彩再現性 O:\92\92808.DOC -44- 1240130 範圍(於圖27中之三角型面積)大幅降低。觀察者可發現色彩 模糊。然而,於透射型/反射型液晶顯示裝置中,如圖28所 示,照度8,000 lx之色彩再現性實質上與照度為〇1 1χ者相 同。而且,當照度為17,000 lx時,色彩再現性僅稍有降低 。因此幾乎不會有色彩模糊之現象。 於習用透射型液晶顯示裝置中,因為來自顯示面板表面 之環境光的反射,且因為來自用以遮光之黑色掩模、接點 等物之反射光,使對比降低。相反地,於此實施例之透射 型/反射型液晶顯示裝置中,除透射模式顯示外提供使用環 境光之反射模式顯示’故可藉著反射模式顯示抑制於透射 模式顯示中因為環境光反射所致之對比降低。因此,不論 環境光變得多明亮,此實施例之液晶顯示裝置所得之對比 不低於僅使用反射模式顯示器所得之對比。結果,於此實 施例之透射型/反射型液晶顯示裝置中,即使於明亮之環境 光下仍不致於降低色彩再現性,因此可於任何條件下得到 高可見度之顯示器。 圖29顯示此實施例結構之另一個具體實例,其中反射電 極區16 0R包括反射層(反射板)169及一部分透射電極168。 與圖25所示之結構不同地,其反射電極區120R包括具有反 射特性之反射電極69。該主動陣列基板之反射電極區160R 之高度可藉著調整位於反射層169上之反射層169及/或絕 緣層17 0之厚度而控制。 (實施例10) 圖30係為本發明實施例10液晶顯示裝置之主動陣列基板 O:\92\92808.DOC -45- 1240130 、、面圖圖31係為沿圖30之g-g線所得之剖面圖。 參照圖3G及3卜於由玻璃或塑料製造之透明絕緣基板2〇1 上形成多條間極線2〇2及多條源極線2G3,使之彼此交叉。 由相鄰閘極線2〇2及相鄰源極線2G3所環繞之各區域界定一 圖素。薄膜電晶體204係位於閘極線2〇2及源極線2〇3之各交 >、’、占附近。各薄膜電晶體204之汲極電極205係連接於對應圖 素電極206上。各圖素用以形成圖素電極2〇6之部分由頂部 觀看包括兩區域,即具有高透射效率之區域T及具有高反射 效率之區域。此實施例中,氧化銦錫層2〇7構成區域丁之頂 層以作為高透射效率之層,而A1>f (或A1合金層)構成區 域R4頂層以作為高反射效率之層。該層2〇7及2〇8構成各圖 素I圖素電極206。圖素電極2〇6經由閘極絕緣膜2〇9與位於 後續圖素列中之相鄰圖素的閘極線鳩重疊。於驅動期間 ,於Μ重疊邵分形成用以驅動液晶之儲存電容器。 薄膜電晶體204依序包括作為源極/汲極而自對應之閘極 線202(此情況係為202a)分枝之閑極21〇、閘極絕緣膜2〇9、 半導體層212、通道保護層213、&n+_s^2u。 雖未明π,但形成之主動陣列基板具有對正膜,其連接 具有透明電極且上層具有對正膜之對基板。液晶注入介於 兩片密封基板間之空隙中,後照光放置於形成之結構之後 側面上’而元成此貫施例之液晶顯示裝置。 使用含有黑色顏料及0.5%之旋光性物質S-8u(Merck & Co.,Inc·製造)之肩王型液晶材料ZLI2327(Me^k & c〇·,LCD-5000 manufactured by Electronics Co., Ltd. is measured using an integrating sphere. As shown in FIG. 26, the changes in reflectivity and light transmittance (individually, solid lines and dotted lines in FIG. 26) in the 64 gray scale display substantially coincide with each other. Therefore, even if the transmission mode display using the light from the backlight and the reflection mode display using the ambient light are performed at the same time, a gray scale display with sufficient display quality can be obtained. The comparison between the transmission mode and the reflection mode is about 200 and about 25 respectively. The evaluation results of color reproducibility will be described below. Figures 27 and 28 are the chromaticity diagrams of the conventional transmissive liquid crystal display device and the transmissive / reflective liquid crystal display device of this embodiment under different ambient light conditions. These liquid crystal display devices all use the same backlight. As shown in Figure 27, when the ambient light's illuminance on the display screen increases from 0x to 8,000 lx and to 17,000 lx, the color reproducibility of conventional LCD devices is O: \ 92 \ 92808.DOC -44-1240130 range (in The triangular area in Figure 27) is greatly reduced. Observers can find the colors blurred. However, in a transmissive / reflective liquid crystal display device, as shown in Fig. 28, the color reproducibility of an illumination of 8,000 lx is substantially the same as that of an illumination of 01 1x. Moreover, when the illumination is 17,000 lx, the color reproducibility is only slightly reduced. Therefore, there is almost no color blur. In conventional transmissive liquid crystal display devices, the contrast is reduced because of the reflection of ambient light from the surface of the display panel and the reflection of light from black masks, contacts, etc. used to block light. In contrast, in the transmissive / reflective liquid crystal display device of this embodiment, in addition to the transmissive mode display, a reflective mode display using ambient light is provided, so that the reflective mode display can be suppressed in the transmissive mode display due to ambient light reflection The resulting contrast is reduced. Therefore, no matter how bright the ambient light becomes, the contrast obtained by the liquid crystal display device of this embodiment is not lower than that obtained by using only the reflection mode display. As a result, in the transmissive / reflective liquid crystal display device of this embodiment, the color reproducibility does not decrease even under bright ambient light, so a display with high visibility can be obtained under any conditions. FIG. 29 shows another specific example of the structure of this embodiment, in which the reflective electrode region 160R includes a reflective layer (reflective plate) 169 and a part of the transmissive electrode 168. Unlike the structure shown in Fig. 25, the reflective electrode region 120R includes a reflective electrode 69 having a reflective characteristic. The height of the reflective electrode region 160R of the active array substrate can be controlled by adjusting the thickness of the reflective layer 169 and / or the insulating layer 170 on the reflective layer 169. (Embodiment 10) FIG. 30 is an active array substrate O: \ 92 \ 92808.DOC -45-1240130 of the liquid crystal display device according to Embodiment 10 of the present invention, and a plan view FIG. 31 is a cross-section taken along the line gg of FIG. 30 Illustration. Referring to FIGS. 3G and 3B, a plurality of interpolar lines 200 and a plurality of source lines 2G3 are formed on a transparent insulating substrate 205 made of glass or plastic so as to cross each other. A pixel is defined by each area surrounded by the adjacent gate line 202 and the adjacent source line 2G3. The thin film transistor 204 is located near the intersections >, ', of the gate line 202 and the source line 203. The drain electrode 205 of each thin film transistor 204 is connected to the corresponding pixel electrode 206. The portion of each pixel used to form the pixel electrode 206 when viewed from the top includes two regions, namely, a region T having a high transmission efficiency and a region having a high reflection efficiency. In this embodiment, the indium tin oxide layer 207 constitutes the top layer of the region D as a layer with high transmission efficiency, and A1> f (or A1 alloy layer) forms the top layer of the region R4 as a layer with high reflection efficiency. These layers 207 and 208 constitute each pixel I pixel electrode 206. The pixel electrode 206 overlaps with a gate line dove of an adjacent pixel in a subsequent pixel column through a gate insulating film 209. During the driving period, a storage capacitor is formed on the M to form a storage capacitor for driving the liquid crystal. The thin-film transistor 204 includes, in order, a gate electrode 202 (a 202a in this case) as a source / drain, and a branch electrode 21, a gate insulating film 209, a semiconductor layer 212, and a channel protection. Layer 213, & n + _s ^ 2u. Although π is unknown, the formed active array substrate has an alignment film which is connected to a counter substrate having a transparent electrode and an upper layer having an alignment film. The liquid crystal is injected into the space between the two sealed substrates, and the back light is placed on the side of the formed structure after the formation of the liquid crystal display device according to this embodiment. Shoulder King type liquid crystal material ZLI2327 (Me ^ k & c〇 ·,) containing black pigment and 0.5% optically active substance S-8u (manufactured by Merck & Co., Inc.),
Inc·製造)之混合物作為液晶。亦可使用電控型雙折射(ecb) O:\92\92808.DOC -46- 1240130 模式作為液曰曰模式,將偏光板放置於液晶層之頂面及底面 上:需要彩色顯示時,於液晶層頂部放置包括紅色、綠色 及監色彩色層之濾色器(稱為CF層)。 下文將描述此實施例製造該主動陣列基板之方法。 首先,於絕緣基板201上形成由仏所製造之閘極線2〇2及 閘t 10而糸鉴骨豆开> 成之基板上形成閘極絕緣膜209。之 後,於各個閘極210上形成半導體層212及通道保護層213, 4後形成作為源極211及作為汲極2〇5(或2u)tn+_si層。 藉濺射及製作佈線圖型依序形成氧化銦錫層2〇3a(底層) 及金屬層2〇3b(頂層)以形成源極線2〇3。此實施例中,使用 Ti作為金屬層2〇3b。 源極線203之雙層結構之優點係為即使構成各源極線2〇3 之金屬層203b部分有缺陷,氧化銦錫層2〇3a仍可保持該源 極線203之電聯,而減少該源極線2〇3斷線之可能。 孩丁區域具有高透光效率之氧化銦錫層2〇7係於與形成源 極線203之氧化錮錫層2〇3以目同之步騾中由相同材料形成 。具有高反射效率之R區域係依序濺射並製作佈線圖型而藉 著形成Mo層214及A1層208而形成。該A1層208可於其厚度 約150毫微米或更厚時提供充分安定之反射效率(約9〇%)。 於此實施例中,該A1層208之厚度係為15〇毫微米,以使環 境光線有效地反射。Ag,Ta,W等亦可用以取代八丨及…合 金以用於高反射性之層(A1層208)。 此實施例中,氧化銦錫層207及A1層208用於各圖素中作 為圖素電極206。或可形成具有不同厚度之八丨或八丨合金層, O:\92\92808.DOC -47- 1240130 以個別界定高透光效率之區域及高反射效率之區域以作為 區域T及R。此使該製造方法較使用不同材料之方法簡易。 而且,R區之高反射效率層(此實施例中為刈層)可使用與用 於源極線203之金屬層203b相同之材料製造。而容許使用製 造習用透射型液晶顯示裝置之方法製造此實施例之液晶顯 示裝置。 如前文所述,各圖素電極2〇6包括高透射效率區域τ及高 透光效率區域R。此結構可得到一種液晶顯示裝置,其與使 用半透射型反射膜之習用液晶顯示裝置比較下,更有效地 利用環境光及照射光進行透射/反射模式顯示。 於各圖素之整體區域上及位於後續圖素列之相鄰圖素閘 極線202a上,經由夾置於其間之閘極絕緣膜2〇9形成作為圖 素電極206之氧化銦錫層2〇7。經由夾置於其間iM〇層214 於該氧化銦錫層207上形成八1層2〇8,以於島狀圖素之中心 部分中構成區域R。根據此種方式,因為該氧化銦錫層2〇7 及該A1層208彼此電聯,故區域丁及尺將接收自相同薄膜電晶 體204之相同電壓施加於液晶上。因此,防止因單一圖素中 之液晶分子取向於電壓施加期間改變而產生轉化線。 於氧化銦錫層207及A1層208間夹置Mo層214可防止該氧 化銦錫層207與該A1層間經由製造過程中之電解溶液接觸 ,而產生電蝕。 此貝施例中,藉著將T區面積相對於R區面積之比例設定 糸60 40而彳于到良好頭示特性。該面積比不限於此值,但 可根據T及R區之透射/反射效率及該裝置之用途而適當地Inc.) as a liquid crystal. You can also use the electronically controlled birefringence (ecb) O: \ 92 \ 92808.DOC -46- 1240130 mode as the liquid mode. Place the polarizer on the top and bottom surfaces of the liquid crystal layer: When color display is required, A color filter (called a CF layer) including red, green, and monitor color layers is placed on top of the liquid crystal layer. The method of manufacturing the active array substrate in this embodiment will be described below. Firstly, a gate insulating film 209 is formed on an insulating substrate 201 by forming a gate line 2002 and a gate t10 made by 仏, and then forming a gate insulating film gt. Thereafter, a semiconductor layer 212 and a channel protection layer 213 are formed on each of the gate electrodes 210, and then a 205 (or 2u) tn + _si layer is formed as a source 211 and a drain. By sputtering and making a wiring pattern, an indium tin oxide layer 203a (bottom layer) and a metal layer 203b (top layer) are sequentially formed to form a source line 203. In this embodiment, Ti is used as the metal layer 203b. The advantage of the double-layer structure of the source line 203 is that even if the metal layer 203b constituting each source line 203 is defective, the indium tin oxide layer 203a can maintain the electrical connection of the source line 203, and reduce The source line 203 may be disconnected. The indium tin oxide layer 207 having a high light transmission efficiency in the kid area is formed of the same material as the tin oxide layer 203 forming the source line 203 in the same steps. The R region having a high reflection efficiency is sequentially formed by forming a wiring pattern by forming a Mo layer 214 and an A1 layer 208. The A1 layer 208 can provide a sufficiently stable reflection efficiency (about 90%) at a thickness of about 150 nm or more. In this embodiment, the thickness of the A1 layer 208 is 150 nanometers to effectively reflect ambient light. Ag, Ta, W, etc. can also be used in place of VIII and ... alloys for highly reflective layers (A1 layer 208). In this embodiment, an indium tin oxide layer 207 and an A1 layer 208 are used as the pixel electrodes 206 in each pixel. Or, eight or eight alloy layers with different thicknesses may be formed. O: \ 92 \ 92808.DOC -47-1240130 The areas with high light transmission efficiency and the areas with high reflection efficiency are individually defined as the areas T and R. This makes the manufacturing method simpler than the method using different materials. Moreover, the high reflection efficiency layer (the rhenium layer in this embodiment) of the R region can be made of the same material as the metal layer 203b used for the source line 203. The method for manufacturing a conventional transmission type liquid crystal display device is allowed to be used to manufacture the liquid crystal display device of this embodiment. As described above, each pixel electrode 206 includes a high transmission efficiency region τ and a high transmission efficiency region R. With this structure, it is possible to obtain a liquid crystal display device which, in comparison with a conventional liquid crystal display device using a transflective reflective film, more effectively uses ambient light and irradiated light for transmission / reflection mode display. An indium tin oxide layer 2 as a pixel electrode 206 is formed on the entire area of each pixel and on the adjacent pixel gate line 202a located in the subsequent pixel row through a gate insulating film 209 interposed therebetween. 〇7. An iM0 layer 214 is sandwiched between the indium tin oxide layer 207 and an eighty layer 208 to form a region R in the central portion of the island-like pixel. According to this method, since the indium tin oxide layer 207 and the A1 layer 208 are electrically connected to each other, the same voltage applied to the liquid crystal from the same thin film transistor 204 is applied to the region D and the ruler. Therefore, conversion lines are prevented from being generated due to changes in the orientation of liquid crystal molecules in a single pixel during a voltage application. The interposition of the Mo layer 214 between the indium tin oxide layer 207 and the A1 layer 208 can prevent the indium tin oxide layer 207 and the A1 layer from contacting with each other through the electrolytic solution during the manufacturing process, thereby causing electrical corrosion. In this example, the ratio of the area of the T area to the area of the R area is set to 糸 60 40 to achieve good display characteristics. The area ratio is not limited to this value, but may be appropriately determined according to the transmission / reflection efficiency of the T and R regions and the use of the device.
O:\92\92808.DOC -48- 1240130 改變。 此實施例中,R區之面積以約有效圖素面積之約10至約 90%為佳(即T區面積及R區面積之總和)。若該百分比低於約 10%,即高透射效率之區域佔該圖素之極大部分,則產生 習用透射型液晶顯示裝置之間題,即,當環境變得太亮時 ’該顯示模糊之問題。相反地,若R區之百分比超過約9〇〇/〇 ,則產生當其境光線太暗而無法僅使用環境光線觀看該顯 示器之問題。即,即使於該情況下連通後照光,T區之佔有 率仍低至為法辨識所形成之顯示。 尤其’當該液晶顯示裝置施加於主要用於戶外之裝置上 時,電池使用時間係為重要因素,而該裝置應設計成充分 利用環境光線以降低能量消耗。是故,高反射效率之&區的 面積以該有效圖素面積之約4〇至約9〇%為佳。當尺區之面積 佔有率約40%時,僅使用反射模式顯示即足以顯示之環境 又限,而需要來自後照光之光線的時間變長。此情況縮短 電池使用時間。 另一方面,當該液 晶顯示裝置應用於主要於戶外使用之O: \ 92 \ 92808.DOC -48- 1240130 changed. In this embodiment, the area of the R area is preferably about 10 to about 90% of the effective pixel area (that is, the sum of the area of the T area and the area of the R area). If the percentage is less than about 10%, that is, a region with high transmission efficiency accounts for a large portion of the pixel, a problem between conventional transmission-type liquid crystal display devices arises, that is, when the environment becomes too bright, the display should be blurred. Conversely, if the percentage of the R area exceeds about 900/0, a problem arises when the ambient light is too dark to view the display using only ambient light. That is, even if the backlight is connected in this case, the occupancy rate of the T region is still low as a display formed by the method of identification. In particular, when the liquid crystal display device is applied to a device mainly used outdoors, battery life is an important factor, and the device should be designed to make full use of ambient light to reduce energy consumption. Therefore, the area of the & region with high reflection efficiency is preferably about 40 to about 90% of the effective pixel area. When the area occupancy of the ruler area is about 40%, only the reflection mode display is sufficient to display the limited environment, and the time required for the light from the backlight becomes longer. This condition shortens the battery life. On the other hand, when the liquid crystal display device is applied to a device mainly used outdoors
實施例之液晶顯示裝置實 O:\92\92808.DOC 置寺為裝置應設計成有效利用來自後照光之光線。是 =、’尺區面積以為有效圖素面積之約10侧約60%為佳。當R 區〈面%佔有率超過6G%時,用使來自後照光之光線穿透 為了補償此種現象,後照光之亮度需實質 高顯示裝置增加。此增加能量消耗而降低 際上裝置於電池驅動之攝影 -49- 1240130 機中。結果,藉著I周整後照光之亮度,不論於環境光之亮 度如何,頭皆保持明亮而可辨認。尤其,當該裝置於好 天氣下用於戶外時,不需開啟後照光,故降低能量消耗。 因此’與僅使用透射型液晶顯示裝置之裝置比較之下,電 池使用時間大幅增加。 (實施例11) 圖32係為本發明實施例11之液晶顯示裝置的主動陣列基 板之部分平面圖。圖33係為沿圖32iH_H線所得之剖面圖。 此實施例中’各圖素欲形成圖素電極之部分自上方觀看 時於其中心分成兩部分,即高透射效率之T區及高反射效率 之R區。 相同組件以與實施例1〇之圖3〇及31所用者相同之參考編 號表示。圖素、薄膜電晶體結構、及該裝置之製造方法實 質上與實施例1 〇所述者相同。 參照圖32及33,於各圖素自中心部分至對應閘極線2〇2 之附近之範圍區域内形成氧化銦錫層207,並部分連接於薄 膜電晶體204之汲極205。高反射效率之A1層208經由位於圖 素中心部分之Mo層214而與氧化錮錫層207重疊。該A1層 208於圖素與氧化銦錫層2〇7區域相反之侧面上延伸,經由 閘極絕緣膜209與位於後續圖素列而供相鄰圖素使用之閘 極線202a重疊。 因為該氧化銦錫層207及A1層係經由Mo層214電聯,故抑 制因氧化銦錫層207與A1層208接觸所致之電蝕。A1層208即 R區及閘極線202a與相鄰圖素間之重疊係經由絕緣膜209達 O:\92\92808.DOC -50- 1240130 成。此重#於驅動液晶期間形成儲存t容器,而r區之重疊 部分亦用㈣示。此使圖素之有效面積較習用結構大幅增 加0 為了進#增加目素《鏡孔比,τ經由絕緣膜而於薄膜 電晶體204或源極線203上形成高反射效率膜諸如…層2〇8 ,以作為圖素電極寫之-部分(其係電聯於該汲極岡。然 而’此情況下,該絕緣膜之厚度、材料、及圖型設計應適 *地決疋,使影像品質因圖素電極2〇6與源極線2们間所產 生之寄生電容而降低之情況減至最小。 (實施例I2) 圖34係為本發明實施例12之液晶顯示裝置之主動陣列基 板的部分平面圖。圖35係為沿圖“之“線所得之剖面圖。 此實施例與實施例丨丨相異之處在於經由閘極絕緣膜2〇9 於南反射效率之區域r下形成共用線2丨5。 實施例1G及U之圖3〇至33中,相同組件以相同參考編號 表示。該圖素、薄膜電晶體結構、及裝置之製造方法實質 上與貫施例10及11所描述者相同。 、 參照圖34及35,氧化銦錫層2〇7係於各圖素位於對岸閑杨 線202中心部分至邊緣部分爾,而連接於薄膜電晶體 204之汲極205。高反射效率之八丨層2〇8經由位於圖素中心部 分之Mo層而與氧化銦錫層2〇7重疊。該八丨層】^於圖素與氧 化銦錫層207區域相反之側面上延伸,經由閑極絕緣膜· 與位於後績圖素列而供相鄰圖素使用之共用線21 $重最。 因為蔹氧化銦錫層2〇7及Α1層係經由Mo層214電聯,故抑The liquid crystal display device of the embodiment is O: \ 92 \ 92808.DOC The device should be designed to effectively use the light from the backlight. If yes, the area of the ruler area is preferably about 60% of about 10 sides of the effective pixel area. When the R area <area% occupancy rate exceeds 6G%, the light from the backlight is used to penetrate. In order to compensate for this phenomenon, the brightness of the backlight needs to be substantially higher. The display device is increased. This increases energy consumption and reduces the device installed on the battery-powered camera-49-1240130. As a result, the head remains bright and recognizable regardless of the brightness of ambient light by the brightness of the backlight after one week. In particular, when the device is used outdoors in good weather, there is no need to turn on the backlight, so energy consumption is reduced. Therefore, compared with a device using only a transmissive liquid crystal display device, the battery life is significantly increased. (Embodiment 11) FIG. 32 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 11 of the present invention. FIG. 33 is a cross-sectional view taken along line iH_H in FIG. 32. In this embodiment, the portion of each pixel to be formed into a pixel electrode is divided into two portions at its center when viewed from above, namely, a T region with high transmission efficiency and an R region with high reflection efficiency. The same components are denoted by the same reference numbers as those used in Figs. 30 and 31 of Embodiment 10. The pixel, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Embodiment 10. Referring to FIGS. 32 and 33, an indium tin oxide layer 207 is formed in a range from the central portion of each pixel to the vicinity of the corresponding gate line 202, and is partially connected to the drain electrode 205 of the thin film transistor 204. The high reflection efficiency A1 layer 208 overlaps the hafnium tin oxide layer 207 via the Mo layer 214 located at the center of the pixel. The A1 layer 208 extends on the side of the pixel opposite to the area of the indium tin oxide layer 207, and overlaps with a gate line 202a located in a subsequent pixel row for adjacent pixels via a gate insulating film 209. Since the indium tin oxide layer 207 and the A1 layer are electrically connected via the Mo layer 214, the electrical corrosion caused by the contact between the indium tin oxide layer 207 and the A1 layer 208 is suppressed. The A1 layer 208, that is, the overlap between the R region and the gate line 202a and the adjacent pixels is formed by the insulating film 209 to O: \ 92 \ 92808.DOC -50-1240130. The heavy container is formed during the driving of the liquid crystal, and the overlapped portion of the r region is also shown in FIG. This greatly increases the effective area of the pixel compared to the conventional structure. In order to increase the number of pixels, the mirror-to-hole ratio, τ is formed on the thin-film transistor 204 or the source line 203 via an insulating film with a high reflection efficiency film such as layer 2. 8, as a part of the pixel electrode (which is electrically connected to the drain electrode. However, in this case, the thickness, material, and pattern design of the insulating film should be determined appropriately to make the image quality The decrease due to the parasitic capacitance generated between the pixel electrode 206 and the source line 2 is minimized. (Embodiment I2) FIG. 34 shows an active array substrate of a liquid crystal display device according to Embodiment 12 of the present invention. Partial plan view. Fig. 35 is a cross-sectional view taken along the line "" of this drawing. This embodiment differs from the embodiment 丨 in that a common line is formed under the region r of south reflection efficiency through the gate insulating film 209. 2 丨 5. In FIGS. 30 to 33 of Embodiments 1G and U, the same components are denoted by the same reference numerals. The manufacturing method of the pixel, the thin film transistor structure, and the device is substantially the same as that described in Embodiments 10 and 11. This is the same. Referring to FIGS. 34 and 35, the indium tin oxide layer 207 is The pixel is located on the opposite side of the free line 202 from the center to the edge, and is connected to the drain electrode 205 of the thin-film transistor 204. The eighth layer 208 with high reflection efficiency is connected to the indium oxide via the Mo layer located at the center of the pixel. The tin layer 207 is overlapped. The eight layers] ^ extend on the side of the pixel opposite to the area of the indium tin oxide layer 207, and pass through the idler insulating film and are located in the subsequent pixel row for adjacent pixels. The common line 21 is the heaviest. Because the yttrium indium tin oxide layer 207 and the A1 layer are electrically connected via the Mo layer 214,
O:\92\92808.DOC -51 - 1240130 制因氧化錮錫層207與A1層208接觸所致之電蝕。A1層208即 R區及共用線215經由絕緣膜209重疊,而於驅動液晶期間形 成儲存電容器,而改善顯示。此種儲存電容器之形成不降 低鏡孔比。 為了進一步增加圖素之鏡孔比,可經由絕緣膜而於薄膜 電晶體204或源極線203上形成高反射效率膜諸如A1層208 ,以作為圖素電極206之一部分(其係電聯於該汲極205)。然 而,此情況下,該絕緣膜之厚度及材料應適當地決定,使 影像品質因圖素電極206與薄膜電晶體204或源極線203間 不產生寄生電容。例如形成氧化錮錫層之後,於形成之基 板的整體表面上形成介電常數約3.6之有機絕緣膜,厚度高 達約3微米。之後,可於各圖素中形成A1層,使之與薄膜電 晶體204或源極線203重疊,並電聯於汲極205。此種電聯可 藉著於汲極205或氧化錮錫層207上形成接觸孔而經由接觸 孔達成。 此實施例中,各圖素欲形成圖素電極206之部分分成兩區 ,即高透光效率之區域(T區)及高反射效率之區域(R區)。或 該部分可分成三個或多個區域。例如,如圖36所示,圖素 電極206可分成三個區域,即高透射效率之T區、高反射效 率之R區、及具有與其他兩區不同之透射或反射效率之C區 〇 (實施例13) 圖37係為本發明實施例13之液晶顯示裝置的主動陣列基 板之部分平面圖。圖38 A至3 8D係為沿圖37之J-J線所得之剖 O:\92\92808.DOC -52- 1240130 面圖’說明此實施例液晶顯示裝置之製造方法。 此實施例中,高反射效率之R區係由與源極線相同之材料 製造。於實施例10至12中之圖30至36中,相同組件以相同 編號表示。該圖素、薄膜電晶體結構、及該裝置之製造方 法實質上與實施例10至12所述般者相同,除非另有陳述。 此只私例中,各圖素包括位於其中心部分之高透射效率丁 區及環繞該T區之R區。該R區之外圍輪廓係為依隨兩閘極 線及兩源極線之方型。R區包括高反射效率之層,由與源極 線相同之材料製造,得到高反射效率。 參照圖38A至38D描述製造該液晶顯示裝置之方法。 參照圖38A,藉濺射依序於絕緣基板2〇1上沉積閘極線 202(參照圖37)及閘極210、閘極絕緣膜209、半導體層212 、通這保護層213、及欲充作源極211及汲極2〇5(或211)之 n+ Si層211。之後,藉濺射於形成之基板上沉積供源極線 2〇3(參照圖37)使用之導電膜241。 參照圖38B,該導電膜241製作佈線圖型以形成高反射效 率之層242、汲極-圖素連接層243、及源極線2〇3。該層 之焉反射效率區域係對應於R區。 參照圖38C,於形成之基板上形成中間層絕緣膜244,之 後形成貫穿該中間層絕緣膜244之接觸孔245。 參照圖38D’於各圖素之整體區域上形成由氧化銦錫所製 造之高透射效率層246。該高透射效率層246可由任何其他 高透射效率材料製造。該高透射效率層246係經由貫穿/中間 層絕緣膜244之接觸孔245連接於連接層243,而電聯於對應O: \ 92 \ 92808.DOC -51-1240130 Causes the electric corrosion caused by the contact between the hafnium oxide layer 207 and the A1 layer 208. The A1 layer 208, that is, the R region and the common line 215 overlap through the insulating film 209, and a storage capacitor is formed during the driving of the liquid crystal, thereby improving the display. The formation of such a storage capacitor does not reduce the mirror-to-hole ratio. In order to further increase the pixel aperture ratio of the pixel, a high reflection efficiency film such as an A1 layer 208 may be formed on the thin film transistor 204 or the source line 203 via an insulating film as a part of the pixel electrode 206 (which is electrically connected to The drain 205). However, in this case, the thickness and material of the insulating film should be appropriately determined so that the image quality does not cause parasitic capacitance between the pixel electrode 206 and the thin film transistor 204 or the source line 203. For example, after the hafnium tin oxide layer is formed, an organic insulating film having a dielectric constant of about 3.6 is formed on the entire surface of the formed substrate with a thickness of about 3 microns. After that, an A1 layer may be formed in each pixel so as to overlap the thin film transistor 204 or the source line 203, and is electrically connected to the drain electrode 205. Such electrical connection can be achieved by forming a contact hole in the drain electrode 205 or the hafnium oxide layer 207 through the contact hole. In this embodiment, a portion of each pixel to form the pixel electrode 206 is divided into two regions, namely, a region with high light transmission efficiency (T region) and a region with high reflection efficiency (R region). Or The section can be divided into three or more areas. For example, as shown in FIG. 36, the pixel electrode 206 can be divided into three regions, namely, a T region with high transmission efficiency, an R region with high reflection efficiency, and a C region with different transmission or reflection efficiency from the other two regions. Embodiment 13) FIG. 37 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 13 of the present invention. Figs. 38A to 38D are cross-sections taken along line J-J of Fig. 37. O: \ 92 \ 92808.DOC -52-1240130 is a plan view 'illustrating a method of manufacturing the liquid crystal display device of this embodiment. In this embodiment, the R region with high reflection efficiency is made of the same material as the source line. In Figs. 30 to 36 in Examples 10 to 12, the same components are denoted by the same reference numerals. The pixel, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Examples 10 to 12, unless otherwise stated. In this private example, each pixel includes a high transmission efficiency D region located in the center portion thereof and an R region surrounding the T region. The outer contour of the R region is a square shape following two gate lines and two source lines. The R region includes a layer with high reflection efficiency, and is made of the same material as the source line to obtain high reflection efficiency. A method of manufacturing the liquid crystal display device will be described with reference to FIGS. 38A to 38D. Referring to FIG. 38A, a gate line 202 (refer to FIG. 37) and a gate 210, a gate insulating film 209, a semiconductor layer 212, a protective layer 213, and a charging layer are sequentially deposited on the insulating substrate 201 by sputtering. The n + Si layer 211 serving as the source 211 and the drain 205 (or 211). After that, a conductive film 241 for source line 203 (see FIG. 37) is deposited on the formed substrate by sputtering. Referring to FIG. 38B, the conductive film 241 is patterned to form a layer 242 with high reflection efficiency, a drain-to-pixel connection layer 243, and a source line 203. The 焉 reflection efficiency region of this layer corresponds to the R region. Referring to Fig. 38C, an interlayer insulating film 244 is formed on the formed substrate, and then a contact hole 245 penetrating the interlayer insulating film 244 is formed. Referring to Fig. 38D ', a high transmission efficiency layer 246 made of indium tin oxide is formed on the entire area of each pixel. The high transmission efficiency layer 246 may be made of any other high transmission efficiency material. The high transmission efficiency layer 246 is connected to the connection layer 243 through the contact hole 245 of the through / interlayer insulating film 244, and is electrically connected to the corresponding layer.
O:\92\92808.DOC -53 - !24〇13〇 义汲極205。鬲透射效率層246亦充作提供電壓於液晶層之 圖素電極’使該電壓係經由高透射效率層246提供於液晶層 對應万;T及R區之部分。因此,此實施例中,各圖素電極係 括鬲透射政率層246,而不包括高透射效率之τ區及高 反射效率之尺區。此種結構優於透射型液晶顯示裝置之處係 為可於不增加程序步驟數目而圖素電極形成失敗之情況減 至最小之情況下,形成高反射效率區域。 (貫施例14) 圖39係為本發明實施例14液晶顯示裝置之主動陣列基板 的邯分平面圖。圖4〇A至40D係為沿圖39之Κ·Κ線所得之剖 面圖’說明製造此實施例液晶顯示裝置之方法。 於此實施例中,高反射效率之以區(圖39之陰影部分)係由 與閘極線所用者相同之材料製造。實施例10至13中之圖30 土 38中’相同組件以相同編號表示。除非另有陳述,否則 圖素、薄Μ電晶體結構、及裝置之製造方法實質上與實施 例10至13所描述者相同。 一 =實施例中’自頂部觀看,各圖素包括位於其中心而具 有高透射效率之Τ區’及環繞該Τ區而實質包括兩連接條紋 之R區。該R區之外部輪廓係為依附兩閘極線及兩源極線之 万型°R1I包括語與閘極線相同之材料製造之高反射效率層 ’得到高反射效率。 曰 現在參照圖40A至40D描述該液晶顯示裝置之製造方法。 /參照圖40A,於絕緣基板2()1上形成導電膜。該導電膜隨 後製作佈線圖型以形成閘極21〇、閘極線2q2(參照_)、及 0:\92\92_.D〇c -54- 1240130 高反射效率層242。高反射效率層242係對應於r區。 參照圖40B,藉濺射依序於形成之基板上沉積閘極絕緣膜 209、半導體層2 12、通道保護層2 13、及欲作為源極2 11及 及極205 (或211)之n+-Si層211。之後,於相同步驟中形成作 為一邵分源極層203之金屬層203b及汲極-圖素電極連接層 243。該連接層243與薄膜電晶體204之汲極205部分重疊。 參照圖40C,藉濺射於形成之基板上沉積氧化銦錫,製作 佈線圖型以形成高透射效率層246,及作為源極線203之一 部分之氧化錮錫層203a。於各圖素之整體面積上形成高透 射效率之層246,而於金屬層203b上形成氧化錮錫層2〇3a, 以具有與金屬層203b相同之圖型。高透射效率層246與欲電 聯於各薄膜電晶體204之連接層243部分重疊。 參照圖40D,形成|屯化膜247並製作佈線圖型。 因此,此實施例之液晶顯示裝置之各個圖素皆包括位於 其中心部分而具有高透射效率之T區,及環繞τ區而為依附 相鄰源極線之兩連接條紋之高反射效率r區。此情況下,因 為源極線2 0 3之氧化姻錫層2 0 3 a及具有高反射效率之料芦 242係位於不同高度,故各圖素之氧化銦錫層203a及高反射 效率料層242需防止漏光之間隙可縮小,而使圖素之鏡孔比 較於相反情況下形成T區及R區時(即高反射效率層係位於 該圖素之中心部分)增高。 此實施例中,如同實施例13,各圖素電極皆僅包括一類 電極(即高透射效率層246)。此結構優於其中圖素電極包括 兩類電極之結構之處係為缺陷之發生率降低,而可有效地 O:\92\92808.DOC -55- 1240130 製造該裝置。 此實施例中,各源極線2〇3皆具有包括金屬層2〇3b及氧化 鋼錫層203a之雙層結構。即使金屬層部分有缺陷,源極線 2〇3仍藉氧化錮錫層2〇3a保持電聯。而降低源極線2〇3斷線 之可能。 (實施例15) 圖41係為本發明實施例15之液晶顯示裝置的主動陣列基 板之邵分平面圖。圖42A至42C係沿圖41之L-L線所得之剖 面圖’ 4明製造此實施例液晶顯示裝置之方法。 於此實施例中,圖素電極經由絕緣膜延伸於閘極線及/或 源極線上,以增加有效圖素面積(實質上作為圖素之面積) 〇 實施例10至14中相同組件使用相同編號。除非另有陳述 ,否則圖素、薄膜電晶體結構、及該裝置之製造方法實質 上與貫施例10至14所描述者相同。 如圖41所示,於此實施例中,自上方觀看,各圖素皆包 括位於其中心部分之高透射效率τ區及環繞了區而由狹條所 形成之方型R區(圖41中之斜線區)。包括高透射效率層之圖 素電極經由中間層絕緣膜與相鄰閘極線2〇2及源極線2〇3重 疊,而可於液晶層位於閘極線202及源極線2〇3上之部分上 施加電壓。此可確認有效圖素面積較實施例1〇至14大。此 貝施例中,閘極線2 0 2及源極線2 〇 3係於R區中作為高反射乂、文 率層。 參照圖42Α至42C描述該液晶顯示裝置之製造方法。 O:\92\92808.DOC -56- 1240130 參圖42A,藉濺射依序形成閘極2丨〇、閘極線2〇2(參照 圖41)、閘極絕緣膜209、半導體層212、通道保護層213、 及欲作為源極211及汲極205(或211)之n+-Si層211。閘極線 202及源極線203中至少任一條_欲於後續步騾中與作為圖 素電極之透射層重疊-以由高反射效率材料製造為佳。 參照圖42B,於形成之基板上形成中間層絕緣膜244,而 形成貫穿該中間層絕緣膜244之接觸孔245。 參照圖4 2 C,藉濺射於形成之基板上沉積高透射效率材料 諸如氧化錮錫’並製作佈線圖型以形成高透射效率層246。 該高透射效率層246係經由接觸孔245連接於連接層243,其 依序連接於薄膜電晶體204之汲極205。此情況下,該高透 射效率層246經製作佈線圖型,而與至少閘極線2〇2及源極 線203中之任一者重疊。使用此結構,經由中間層絕緣膜244 而與南透射效率層246重疊之閘極線202及/或源極線203可 用為高反射效率層。 具有别述結構之顯示裝置應設計成不致因為高透射效率 層246與閘極線202或源極線203間產生電容,致而產生諸如 串話現象,而導致影像品質降低。 因此,於此實施例中,各圖素皆包括位於其中心而具有 高透射效率之T區及位於對應於相鄰閘極線及/或源極線之 位置上而具有高反射效率之R區。此消除了形成其他高反射 效率層之必要,而縮短該過程。 (實施例16) 圖4 3係為本發明實施例16液晶顯示裝置之主動陣列基板 O:\92\92808.DOC -57- 1240130 的部分平面圖。圖44A至44F係為沿圖43之M-M線所得之剖 面圖,說明此實施例液晶顯示裝置之製造方法。 如圖43所示’此實施例液晶顯示裝置之各個圖素皆包括 叙於其中心之高透射效率T區,及位於τ區之側邊而包括依 附相鄰源極線203之兩條紋之高反射效率r區(圖43之斜線 部分)。 如圖44F所示,R區包括任意位於絕緣基板2〇1上之高隆凸 邰分253a及低隆凸部分253b、位於此等隆凸部分253a及 253b上之聚合物樹脂層254、及位於該聚合物樹脂層254上 之高反射效率層242。形成之層242構成R區之表層,具有連 續波型表面,經由接觸孔245及底層電極(未示)電聯於沒極 205。 參照圖44A至44F描述製造該液晶顯示裝置之方法。 參照圖44A,於絕緣基板2〇1上形成多條閘極線2〇2(參照 圖43)及自該閘極線202分枝而由Cr,Ta等材料製造之問極 210 〇 於該絕緣基板201上形成由SiNx,SiOx等材料所製造之閑 極絕緣膜209,以覆蓋該閘極線202及該閘極210。於問極絕 緣膜209上位於該閘極210上之部分上形成由非晶石夕(a_si) 、多晶矽、CdSe等材料所製造之半導體層212。於各半導體 層212上形成通道保護層213。於該通道保護層之兩侧邊上 形成一對由a-Si所製造之接觸層248,延伸至該半導體層2丄2 之侧邊。 於一接觸層248上形成由Tl,Mo, A1等材料製造之源極249 O:\92\92808.DOC -58- 1240130 ,而於另一接觸層248上形成由Ti,Mo,A1等材料製造之沒 極 205。 此實施例中,使用Corning Inc.所製造之產品編號7059厚 度1.1毫米之玻璃板作為絕緣基板201之材料。 參照圖44B,藉濺射於形成之基板上形成導電膜,製作佈 線圖型以形成金屬層203b,同時作為源極線203及底層電極 250之一部分。每個底層250皆可經由閘極絕緣膜209而部分 覆蓋供後續圖素列中之相鄰圖素所使用之閘極202,而於其 間形成儲存電容器。 每個用以形成儲存電容器之閘極線202皆可與高反射效 率層重疊,或閘極線202本身之反射效率可高至作為圖素區 (R區)之一部分,而進一步增加鏡孔比。 參照圖44C,氧化錮錫藉濺射沉積於形成之基板上,製作 佈線圖型以形成氧化錮錫層203a,其與金屬層203b—起構 成源極線203。 此實施例中,各源極線203係具有包括金屬層203b及氧化 銦錫層203a之雙層結構。該雙層結構之優點係為即使金屬 層203b部分缺陷,仍可藉氧化錮錫層203a保持源極線203之 電聯。此降低源極線203斷線之可能。 與形成氧化錮錫層203a同時地,亦藉製作佈線圖型得到 具有高透射效率而構成圖素電極之層246。此時,可與源極 線203同時地形成作為圖素電極而具有高透射效率之層246 〇 參照圖44D,形成由感光性樹脂製造之抗蝕劑膜252,並 O:\92\92808.DOC -59- 1240130 製作佈線圖型,隨之熱處理以使之鈍化,而於形成之基板 對應於R區之部分上形成具有實質圓型剖面之高隆凸部分 253a及低隆凸部分253b。該隆凸部分253a及253b未位於高 透射效率層246層上為佳,使電壓可有效地施加於液晶層上 。然而,即使該隆凸部分253a及253b位於層246上,只要該 隆凸部分透明,仍不致有明顯之光學影響。 參照圖44E,於隆凸部分2533及25313上形成聚合物膜254 。使用此膜,R區之凹陷及隆凸型表面可藉著減少平面部分 之數目而變得較連續。可藉著改變製造條件而省略此步騾 〇 參照圖44F,於聚合物膜254上藉著例如濺射而於預定部 分上形成鬲反射效率而由入丨製造之層242以作為圖素電極 。適於鬲反射效率層242之材料除A1及A1合金外,包括高反 射放率之Ta Ni ’ Cr及Ag。面反射效率層242之厚度以介於 約0.01至約1·〇微米範圍内為佳。 因此,此實施例之液晶顯示裝置之各圖素包括位於其中 心邵分之高透射效率丁區,及依附相鄰源極線之高反射效率 尺區。使用此種結構,因為源極線203之氧化銦錫層2〇3a及 同反射效率層242係位於不同高度,與T及R區形成位置相反 之h況(即回反射效率層位於圖素之中心部分)比較,氧化銦 錫層203a與高反射效率層242間需防止漏光之間隙可較縮 小’而增加圖素之鏡孔比。 此實施例中,該高反射效率層242具有光滑之凹陷及隆凸 形狀表面,以使反射光散射於寬幅取向。同時使用散射板O: \ 92 \ 92808.DOC -53-! 24〇13〇 sense drain 205. (2) The transmission efficiency layer 246 also functions as a pixel electrode that provides a voltage to the liquid crystal layer, so that the voltage is provided to the liquid crystal layer through the high transmission efficiency layer 246, corresponding to 10,000; portions of the T and R regions. Therefore, in this embodiment, each pixel electrode includes a 鬲 transmissivity layer 246, but does not include a τ region with high transmission efficiency and a ruled region with high reflection efficiency. The advantage of this structure over the transmissive liquid crystal display device is that a high reflection efficiency area can be formed without increasing the number of program steps and minimizing the number of pixel electrode formation failures. (Example 14) FIG. 39 is a plan view of an active array substrate of a liquid crystal display device according to Example 14 of the present invention. 40A to 40D are cross-sectional views taken along line KK of Fig. 39 'to illustrate a method of manufacturing the liquid crystal display device of this embodiment. In this embodiment, the high reflection efficiency area (hatched portion in Fig. 39) is made of the same material as that used for the gate line. The same components in Figs. 30 to 38 in Examples 10 to 13 are denoted by the same reference numerals. Unless otherwise stated, the manufacturing method of the pixels, the thin M transistor structure, and the device are substantially the same as those described in Examples 10 to 13. 1 = In the embodiment, 'viewed from the top, each pixel includes a T region located at its center with high transmission efficiency' and an R region surrounding the T region, which essentially includes two connecting stripes. The outer contour of the R region is a high-reflection efficiency layer made of the same material as the gate line that depends on the two gate lines and the two source lines. R1I includes high reflection efficiency. A method of manufacturing the liquid crystal display device will now be described with reference to FIGS. 40A to 40D. / Referring to FIG. 40A, a conductive film is formed on the insulating substrate 2 () 1. The conductive film is then patterned to form a gate electrode 21o, a gate line 2q2 (see _), and a 0: \ 92 \ 92_.Doc-54-1240130 high reflection efficiency layer 242. The high reflection efficiency layer 242 corresponds to the r region. Referring to FIG. 40B, a gate insulating film 209, a semiconductor layer 2 12 and a channel protective layer 2 13 are sequentially deposited on the formed substrate by sputtering, and n +-to be used as the source 2 11 and the electrode 205 (or 211). Si layer 211. After that, a metal layer 203b and a drain-to-pixel electrode connection layer 243 are formed in the same step as a sub-source layer 203. The connection layer 243 partially overlaps the drain electrode 205 of the thin film transistor 204. Referring to Fig. 40C, indium tin oxide is deposited on the formed substrate by sputtering, a wiring pattern is formed to form a high transmission efficiency layer 246, and a hafnium tin oxide layer 203a as a part of the source line 203. A layer 246 having a high transmission efficiency is formed on the entire area of each pixel, and a hafnium tin oxide layer 203a is formed on the metal layer 203b to have the same pattern as that of the metal layer 203b. The high transmission efficiency layer 246 partially overlaps the connection layer 243 to be electrically connected to each thin film transistor 204. Referring to FIG. 40D, a | tuning film 247 is formed and a wiring pattern is produced. Therefore, each pixel of the liquid crystal display device of this embodiment includes a T region having a high transmission efficiency at a central portion thereof, and a high reflection efficiency r region which surrounds a τ region and is connected with two connection stripes of adjacent source lines. . In this case, because the oxide tin layer 2 0 3 a of the source line 2 03 and the material 242 with high reflection efficiency are located at different heights, the indium tin oxide layer 203a and the high reflection efficiency material layer of each pixel 242 It is necessary to prevent the gap of light leakage from being reduced, so that the mirror hole of the pixel is increased when the T and R regions are formed in the opposite case (that is, the high reflection efficiency layer is located at the center of the pixel). In this embodiment, as in Embodiment 13, each pixel electrode includes only one type of electrode (that is, the high transmission efficiency layer 246). The advantage of this structure over the structure in which the pixel electrode includes two types of electrodes is that the incidence of defects is reduced, and the device can be efficiently manufactured by O: \ 92 \ 92808.DOC -55-1240130. In this embodiment, each of the source lines 203 has a double-layered structure including a metal layer 203b and a steel tin oxide layer 203a. Even if the metal layer is partially defective, the source line 203 is still electrically connected by the hafnium tin oxide layer 203a. And reduce the possibility of source line 203 disconnection. (Embodiment 15) Figure 41 is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 15 of the present invention. 42A to 42C are cross-sectional views taken along line L-L of Fig. 41, and illustrate a method of manufacturing the liquid crystal display device of this embodiment. In this embodiment, the pixel electrode is extended on the gate line and / or the source line through an insulating film to increase the effective pixel area (substantially the area of the pixel). The same components in Embodiments 10 to 14 use the same Numbering. Unless otherwise stated, the pixels, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Examples 10 to 14. As shown in FIG. 41, in this embodiment, when viewed from above, each pixel includes a high transmission efficiency τ region in the center portion thereof and a square R region formed by a strip surrounding the region (in FIG. 41). The slash area). The pixel electrode including the high transmission efficiency layer overlaps the adjacent gate line 202 and the source line 203 through the interlayer insulating film, and can be located on the gate line 202 and the source line 203 in the liquid crystal layer. A voltage is applied to the part. This confirms that the effective pixel area is larger than that of Examples 10 to 14. In this example, the gate line 202 and the source line 02 are located in the R region as a high-reflective chirped and textural layer. A method of manufacturing the liquid crystal display device will be described with reference to FIGS. 42A to 42C. O: \ 92 \ 92808.DOC -56-1240130 Referring to FIG. 42A, gates 2 and 0, gate lines 202 (see FIG. 41), gate insulating film 209, semiconductor layer 212, The channel protection layer 213 and the n + -Si layer 211 to be the source electrode 211 and the drain electrode 205 (or 211). At least one of the gate line 202 and the source line 203 is intended to be overlapped with a transmissive layer as a pixel electrode in a subsequent step-preferably made of a material with high reflection efficiency. Referring to FIG. 42B, an interlayer insulating film 244 is formed on the formed substrate, and a contact hole 245 penetrating the interlayer insulating film 244 is formed. Referring to FIG. 4C, a high transmission efficiency material such as hafnium tin oxide 'is deposited on the formed substrate by sputtering and a wiring pattern is formed to form a high transmission efficiency layer 246. The high transmission efficiency layer 246 is connected to the connection layer 243 through the contact hole 245, and is sequentially connected to the drain electrode 205 of the thin film transistor 204. In this case, the high-transmission-efficiency layer 246 is patterned to overlap with at least one of the gate line 202 and the source line 203. With this structure, the gate line 202 and / or the source line 203 that overlap the south transmission efficiency layer 246 via the interlayer insulating film 244 can be used as a high reflection efficiency layer. A display device having a different structure should be designed so as not to cause a capacitance between the high transmission efficiency layer 246 and the gate line 202 or the source line 203 to cause a phenomenon such as crosstalk, which leads to a reduction in image quality. Therefore, in this embodiment, each pixel includes a T region having a high transmission efficiency at the center thereof and an R region having a high reflection efficiency at a position corresponding to an adjacent gate line and / or source line. . This eliminates the need to form other high reflection efficiency layers and shortens the process. (Embodiment 16) FIG. 4 is a partial plan view of an active array substrate O: \ 92 \ 92808.DOC -57-1240130 of a liquid crystal display device according to Embodiment 16 of the present invention. Figs. 44A to 44F are sectional views taken along the line M-M in Fig. 43, and illustrate a method of manufacturing the liquid crystal display device of this embodiment. As shown in FIG. 43, each pixel of the liquid crystal display device of this embodiment includes a high transmission efficiency T region described at its center, and a height of two stripes located on the side of the τ region and including two adjacent source line 203. The reflection efficiency r region (the oblique portion in FIG. 43). As shown in FIG. 44F, the R region includes any of the high ridge portions 253a and the low ridge portions 253b located on the insulating substrate 201, the polymer resin layer 254 located on these ridge portions 253a and 253b, and the A high reflection efficiency layer 242 on the polymer resin layer 254. The formed layer 242 constitutes the surface layer of the R region, and has a continuous wave-type surface, and is electrically connected to the electrode 205 through the contact hole 245 and the bottom electrode (not shown). A method of manufacturing the liquid crystal display device will be described with reference to FIGS. 44A to 44F. Referring to FIG. 44A, a plurality of gate lines 200 (refer to FIG. 43) and an interrogation electrode 210 made of a material such as Cr, Ta, etc. branched from the gate line 202 are formed on the insulating substrate 201. A free-pole insulating film 209 made of a material such as SiNx, SiOx is formed on the substrate 201 to cover the gate line 202 and the gate 210. A semiconductor layer 212 made of amorphous silicon (a_si), polycrystalline silicon, CdSe, or the like is formed on a portion of the interlayer insulating film 209 located on the gate 210. A channel protection layer 213 is formed on each semiconductor layer 212. A pair of contact layers 248 made of a-Si are formed on both sides of the channel protection layer and extend to the sides of the semiconductor layer 2 丄 2. A source electrode 249 O: \ 92 \ 92808.DOC -58-1240130 made of Tl, Mo, A1 and other materials is formed on one contact layer 248, and a material such as Ti, Mo, A1 is formed on the other contact layer 248 Manufacturing of no pole 205. In this embodiment, a glass plate manufactured by Corning Inc. with a product number of 7059 and a thickness of 1.1 mm is used as the material of the insulating substrate 201. Referring to FIG. 44B, a conductive film is formed on the formed substrate by sputtering, and a wiring pattern is formed to form a metal layer 203b, which is also a part of the source line 203 and the bottom electrode 250. Each of the bottom layers 250 may partially cover the gate electrode 202 for use by an adjacent pixel in a subsequent pixel row through the gate insulating film 209, thereby forming a storage capacitor therebetween. Each gate line 202 used to form a storage capacitor can overlap with a high reflection efficiency layer, or the reflection efficiency of the gate line 202 itself can be as high as a part of the pixel area (R area), thereby further increasing the mirror hole ratio . Referring to FIG. 44C, hafnium tin oxide is deposited on the formed substrate by sputtering, and a wiring pattern is formed to form a hafnium tin oxide layer 203a, which forms a source line 203 together with the metal layer 203b. In this embodiment, each source line 203 has a double-layered structure including a metal layer 203b and an indium tin oxide layer 203a. The advantage of this double-layer structure is that the electrical connection of the source line 203 can be maintained by the hafnium tin oxide layer 203a even if the metal layer 203b is partially defective. This reduces the possibility of the source line 203 being disconnected. Simultaneously with the formation of the hafnium tin oxide layer 203a, a layer 246 having a high transmission efficiency and constituting a pixel electrode is obtained by making a wiring pattern. At this time, a layer 246 having a high transmission efficiency as a pixel electrode can be formed simultaneously with the source line 203. Referring to FIG. 44D, a resist film 252 made of a photosensitive resin is formed, and O: \ 92 \ 92808. DOC -59- 1240130 A wiring pattern is produced, followed by heat treatment to passivate it, and high convex portions 253a and low convex portions 253b having a substantially circular cross section are formed on a portion of the formed substrate corresponding to the R region. It is preferable that the raised portions 253a and 253b are not on the high transmission efficiency layer 246 layer, so that a voltage can be effectively applied to the liquid crystal layer. However, even if the raised portions 253a and 253b are located on the layer 246, as long as the raised portions are transparent, there is still no significant optical influence. Referring to FIG. 44E, a polymer film 254 is formed on the raised portions 2533 and 25313. With this film, the concave and convex surfaces of the R region can be made more continuous by reducing the number of planar portions. This step can be omitted by changing the manufacturing conditions. Referring to FIG. 44F, a layer 242 fabricated by forming a reflection efficiency on a predetermined portion of the polymer film 254 by, for example, sputtering is used as a pixel electrode. Suitable materials for the rubidium reflection efficiency layer 242 include, in addition to A1 and A1 alloys, Ta Ni 'Cr and Ag with high reflectance. The thickness of the surface reflection efficiency layer 242 is preferably in the range of about 0.01 to about 1.0 micron. Therefore, each pixel of the liquid crystal display device of this embodiment includes a high transmission efficiency D region located at the center thereof, and a high reflection efficiency rule region attached to an adjacent source line. This structure is used because the indium tin oxide layer 203a of the source line 203 and the reflection efficiency layer 242 are located at different heights and are opposite to the position where the T and R regions are formed (that is, the reflection efficiency layer is located in the pixel). In the center), the gap between the indium tin oxide layer 203a and the high reflection efficiency layer 242 to prevent light leakage can be reduced, and the mirror aperture ratio of the pixel is increased. In this embodiment, the high reflection efficiency layer 242 has a smooth concave and convex surface, so that the reflected light is scattered in a wide orientation. Using a diffuser
O:\92\92808.DOC -60- 1240130 時’不需使用抗飿劑膜252形成隆凸部分,而高反射效率層 242之表面可調成平面。於任一種情況下,該高反射效率層 242及該高透射效率層246皆為其間夾置有第三種物質(例 如樹脂及金屬諸如Mo)之個別層。使用此種結構,於其中高 透射效率層係由氧化銦錫製造而高反射效率層係由八丨或A1 合金製造之特定情況下,可減少A1佈線圖型因於A1蝕刻步 騾中易產生之電蝕而損壞。 (實施例17) 圖45係為本發明實施例17液晶顯示裝置之主動陣列基板 的部分平面圖。圖46係為沿圖45之N-N線所得之剖面圖。 參照圖45及46,該主動陣列基板包括具有矩陣型式之圖 素電極206及用以提供掃描信號之閘極線202及用以提供顯 示信號之源極線203,其係環繞圖素電極2〇6之邊緣而彼此 交叉。 圖素電極206與閘極線202及源極線203於該邊緣經由中 間層絕緣膜244重疊。 薄膜電晶體204係位於該閘極線2〇2與該源極線203之各 父點上,以作為於對應圖素電極2〇6上提供顯示信號縱切換 元件。薄膜電晶體204之閘極210係連接於對應閘極線202, 以使用輸入於閘極210之信號驅動該薄膜電晶體2〇4。薄膜 電晶體204之源極249係連接於對應源極線2〇3,以接收數據 信號。薄膜電晶體204之汲極205係電聯於連接電極255,而 經由接觸孔245連接於圖素電極206。 该連接電極255經由閘極絕緣膜2〇9與共用線2丨5形成儲 O:\92\92808.DOC -61 - 1240130 存電容器。 共用線215包括金屬膜,經由互連器(未示)連接於位於對 基板256上之對電極。共用線215可於與形成閑極2〇2之相同 步驟中形成共用線21 5,以縮短製程。 每個圖素電極2〇6皆包括由A1或A1合金所製造之高反射 政率層242,及由氧化銦錫製造之高透射效率層246。由上 方觀看時,圖素電極206分成三區,即兩個高透射效率之丁 區及一個高反射效率之尺區(對應於圖45之斜線部分)。高反 射放率層242亦可如前述貫施例般地包括高反射效率導電 性金屬層諸如Ta。 各個R區係設計以覆蓋一部分遮光電極及互連線諸如閘 極線202、源極線2〇3、薄膜電晶體2〇4、及共用線215,其 不使來自後照光之光線透射。使用此種結構,各圖素中無 法用為T區之部分可用為高反射效率R區。增加圖素部分之 鏡孔比。而各圖素部分之T區係被R區所環繞。 私述製造具有前述結構之主動陣列的方法。 、首先,於由玻璃等材料製造之透明絕緣基板2〇1上依序形 成碉;b 21 〇閘極線202、共用線215、閘極絕緣膜209、半 導體層212、通道保護層213、源極249、及汲極2〇5。 之後藉我射於形成之基板上沉積透明導電膜及欲構成 源極線2G3及連接電極255之金屬膜,並製作佈線圖型而成 為預定形狀。 因此,、每條源極線203皆具有包括氧化銦錫層203a及金屬 曰b之又層結構。該雙層結構之優點係為即使金屬層部O: \ 92 \ 92808.DOC -60- 1240130 ′ It is not necessary to use the anti-dust film 252 to form the raised portions, and the surface of the high reflection efficiency layer 242 can be adjusted to a flat surface. In either case, the high reflection efficiency layer 242 and the high transmission efficiency layer 246 are individual layers with a third substance (for example, resin and metal such as Mo) interposed therebetween. With this structure, in the specific case where the high transmission efficiency layer is made of indium tin oxide and the high reflection efficiency layer is made of VIII or A1 alloy, the A1 wiring pattern can be reduced due to the A1 etching step. It is damaged by electric corrosion. (Embodiment 17) FIG. 45 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 17 of the present invention. Fig. 46 is a sectional view taken along the line N-N in Fig. 45; 45 and 46, the active array substrate includes a pixel electrode 206 having a matrix type, a gate line 202 for providing a scanning signal, and a source line 203 for providing a display signal, which surrounds the pixel electrode 20. The edges of 6 cross each other. The pixel electrode 206 overlaps the gate line 202 and the source line 203 at this edge via an interlayer insulating film 244. The thin film transistor 204 is located at each parent point of the gate line 202 and the source line 203 to serve as a vertical switching element for providing a display signal on the corresponding pixel electrode 206. The gate 210 of the thin film transistor 204 is connected to the corresponding gate line 202 to drive the thin film transistor 204 using a signal input to the gate 210. The source 249 of the thin film transistor 204 is connected to the corresponding source line 203 to receive a data signal. The drain electrode 205 of the thin film transistor 204 is electrically connected to the connection electrode 255, and is connected to the pixel electrode 206 through a contact hole 245. The connection electrode 255 forms a storage capacitor O: \ 92 \ 92808.DOC -61-1240130 through a gate insulating film 209 and a common line 2 丨 5. The common line 215 includes a metal film and is connected to a counter electrode on the counter substrate 256 via an interconnector (not shown). The common line 215 can be formed in the same steps as the formation of the idle electrode 202 to shorten the manufacturing process. Each pixel electrode 206 includes a high-reflectivity layer 242 made of A1 or A1 alloy, and a high-transmission efficiency layer 246 made of indium tin oxide. When viewed from above, the pixel electrode 206 is divided into three regions, that is, two regions of high transmission efficiency and one region of high reflection efficiency (corresponding to the oblique line portion of FIG. 45). The high reflectivity layer 242 may also include a high reflection efficiency conductive metal layer such as Ta as in the foregoing embodiments. Each R region is designed to cover a part of the light shielding electrode and interconnection lines such as the gate line 202, the source line 203, the thin film transistor 204, and the common line 215, which does not allow the light from the backlight to transmit. With this structure, the portion of each pixel that cannot be used as the T region can be used as the high reflection efficiency R region. Increase the mirror hole ratio of the pixel portion. The T region of each pixel portion is surrounded by the R region. A method of manufacturing an active array having the foregoing structure is described in private. First, 碉 is sequentially formed on a transparent insulating substrate 205 made of glass and other materials; b 21 〇 gate line 202, common line 215, gate insulation film 209, semiconductor layer 212, channel protection layer 213, source Pole 249 and drain 205. After that, a transparent conductive film and a metal film to form the source line 2G3 and the connection electrode 255 are deposited on the formed substrate, and a wiring pattern is formed into a predetermined shape. Therefore, each of the source lines 203 has another layer structure including an indium tin oxide layer 203a and a metal b. The advantage of this double-layer structure is that even the metal layer part
O:\92\92808.DOC -62- 1240130 分缺陷,氧化錮錫層203a仍可保持該源極線2〇3之電聯。而 減少源極線203斷線之可能。 足後,藉旋轉塗佈法於形成之基板上施加感光性丙烯酸 树知,以形成厚度約3微米之中間層絕緣膜244。該丙缔酸 树月曰Ik後根據所需之圖型曝光,使用驗溶液顯影。該膜僅 有曝光部分被鹼溶液蝕刻,而形成貫穿中間層絕緣膜244之 接觸孔。利用鹼顯影,得到完美錐型之接觸孔245。 根據以下因素,該中間層絕緣膜244使用感光性丙烯酸樹 脂有利於產能。因為可採用旋轉塗佈法以形成薄膜,故可 幸二易形成薄達數微米之膜。而且,該中間層絕緣膜244製作 佈線圖型時不需要光阻施加步驟。 此只施例中’該丙晞酸樹脂原始即具顏色,可於製作佈 、、泉圖型後藉著使整體表面曝光而成為透明。該丙烯酸樹脂 亦可藉化學加工法而成為透明。 之後,藉濺射及製作佈線圖型形成氧化錮錫膜,用為圖 素電極206之高透射效率層246。因此,構成該圖素電極2〇6 之n透射效率層246係經由接觸孔245電聯於對應之連接電 極 255。 由A1或A1合金所製造之高透射效率層242係於料層246對 應於R區之高透射效率部分上形成,以覆蓋閘極線2〇2、源 極、、泉203、薄膜電晶體2〇4、及共用線215。兩料層242及246 彼此電聯而形成圖素電極2〇6。任何相鄰圖素電極2〇6皆個 别位杰閘極線202及源極線上方之部分上,而彼此不電聯。 如圖46所示,所製造之主動陣列基板及對基板黏合在一O: \ 92 \ 92808.DOC -62- 1240130 points, the hafnium tin oxide layer 203a can still maintain the electrical connection of the source line 203. The possibility of disconnection of the source line 203 is reduced. After that, a photosensitive acrylic resin was applied to the formed substrate by a spin coating method to form an interlayer insulating film 244 having a thickness of about 3 m. The acrylic acid was exposed to Ik after a month and developed according to a desired pattern using a test solution. Only the exposed portion of the film is etched by the alkali solution to form a contact hole penetrating through the interlayer insulating film 244. Using alkali development, a perfect tapered contact hole 245 is obtained. The use of a photosensitive acrylic resin for the interlayer insulating film 244 is advantageous in terms of productivity based on the following factors. Since spin coating can be used to form a thin film, it is fortunate to form a film as thin as a few microns. In addition, the intermediate layer insulating film 244 does not require a photoresist applying step when producing a wiring pattern. In this example, the 'propionic acid resin is originally colored, and can be made transparent by exposing the entire surface after fabric, spring pattern is made. This acrylic resin can also be made transparent by chemical processing. Thereafter, a hafnium tin oxide film is formed by sputtering and wiring pattern formation, and is used as the high transmission efficiency layer 246 of the pixel electrode 206. Therefore, the n transmission efficiency layer 246 constituting the pixel electrode 206 is electrically connected to the corresponding connection electrode 255 through the contact hole 245. The high transmission efficiency layer 242 made of A1 or A1 alloy is formed on the high transmission efficiency portion of the material layer 246 corresponding to the R region to cover the gate line 202, the source electrode, the spring 203, and the thin film transistor 2 〇4, and common line 215. The two material layers 242 and 246 are electrically connected to each other to form a pixel electrode 206. Any adjacent pixel electrode 206 is on the part above the gate line 202 and the source line, and is not electrically connected to each other. As shown in FIG. 46, the manufactured active array substrate and the substrate are bonded to one another.
O:\92\92808.DOC -63- 1240130 起,液晶 >王射於基板間之空隙,以完成此實施例之液晶顯 示裝置。 如别文所述’此實施例之液晶顯示裝置包括高反射效率 層242,其係位於薄膜電晶體204、閘極線202、及源極線203 上,以構成圖素電極206iR區。此消除提供遮光膜以防止 光、、桌進入薄膜電晶體204,並遮蔽一部分圖素電極206位於 閘極線202、源極線203、及共用線215上之部分的必要。此 等4为中易於顯示區域中產生功能區域、轉化線形式之漏 光。結果,傳統上因為被遮光膜遮蔽而無法作為顯示區域 芡區域可再用為顯示區域。此可有效地利用顯示區域。 當該閘極線及源極線包括金屬膜時,其遮蔽習用透射型 液晶顯示裝置中來自後照光之光線,故無法用為顯示區域 。然而,此實施例中,高透射效率之τ區係於各圖素之中心 形成(此實施例係兩個分離之部分)。高反射效率之R區係以 環繞该T區之條紋形狀形成。即,高反射效率之尺區覆蓋閘 極線、源極線、共用線、及切換元件,而用為'各圖素電極 之反射電極區域。此種結構使圖素電極之鏡孔比較相反圖 型情況(即,其中T區環繞R區之圖型)增加。 或各圖素之R區可如圖47般地形成(斜線部分),包括連接 電極255。此抑制穿透該τ區之光的亮度。 (實施例18) 於前述實施例中,本發明係應用於主動陣列型液晶顯示 裝置。本發明亦可應用於簡單矩陣型液晶顯示裝置。 下文將描述一對彼此面對之行電極(信號電極)及列電極( O:\92\92808.DOC -64- 1240130 掃描電極)之基本結構。於簡單矩陣型液晶顯示裝置中,該 對行電極及列電極彼此交叉之區域定義為圖素。 圖48 A至48C顯示該圖素區域之實施例。參照圖48A,於 一圖素區中之行電極中心部分中形成透射電極區,而於其 餘邊緣部分中形成反射電極區。該行電極之結構可與圖48B 或48C相同。該反射電極區之高度可藉著於反射電極與透射 電極之間形成中間層絕緣膜而調整,如圖48C所示。 或如圖49A所示,反射電極區可於一圖素區域中之行電極 中心部分中形成,而透射電極區係於其餘邊緣部分中形成 。該行電極之結構如圖49B或49C所示。該反射電極區之高 度可藉著於反射板及透射電極之間形成中間層絕緣膜而調 整,如圖49C所示。 或如圖50A、50B及50C所示,該行電極可具有條狀反射 電極區。該條狀反射電極區可沿行電極之一側邊形成,如 圖50A至50C所示,或沿其中心形成,如圖51A及51B所示。 下文將描述本發明液晶顯示裝置異於習用反射型或透射 型液晶顯示裝置之特色。 於習用反射型液晶顯示裝置中,顯示係利用環境光進行 ,以使能量消耗降低。是故,當該環境光低於特定限定值 時,即使該裝置用於可提供充分能量之環境下,仍無法辨 認該顯示。此即該反射型液晶顯示裝置之最大缺點。 若該反射電極之反射特性於製造時改變,則該反射電極 之環境光利用效率亦改變。此根據面板改變顯示變成不可 辨認之環境光強度之臨界值。因此,於製造時,該反射特 O:\92\92808.DOC -65- 1240130 性《改k需車艾習用《射型液晶顯示裝置控制鏡孔比改變時 更謹慎地控制。否則無法得到具有安定之顯示特性之液晶 顯示裝置。 相反地糸本發明液晶顯示裝置中,於與習用透射型液 晶顯示裝置般可提供充分電能之環境下,利用來自後照光 之光。疋故,不環境光線如何皆可辨認該顯示。因此,因 反射特性變化所致之環境光制效率變化不需如反射型液 晶顯示裝置般地嚴格控制。 另方面糸㊂用透射型液晶顯示裝置中,當環境光變 亮時,光線之表面反射分量增加,而難以辨認該顯示。於 本發明液晶顯示裝置中,該反射區係與該透射區一起使用 。此增加面板亮度,而改善可見度。 因此,本發明液晶顯示裝置同時可克服習用透射型液晶 顯示裝置於高(即明亮)環境光下因表面反射導致可見度降 仑門〜及木㊂用反射型液晶顯示裝置中於低(即黑暗) 裒兄光下因面板壳度降低導致顯示辨認困難之問題。除前 述者外,可同時得到此等裝置之特色。 如蚰文所逑,根據本發明,與使用半透射型反射膜情況 比較下,各圖素皆包括具有較高透射效率之區域及具有較 同反射效率之區域。於各區域中,使用高透射效率層或高 反射效率層作為圖素電極。使用此種結構,與使用半透射 •^反射膜之4用液晶頭示裝置不同地,防止因例如散光現 象使% ^光及照射光之利用效率降低。藉著使用反射模式 .、、、員7F透射模式顯T、或同時使用反射模式顯示及透射模O: \ 92 \ 92808.DOC -63- 1240130 and later, the liquid crystal > Wang shot in the space between the substrates to complete the liquid crystal display device of this embodiment. As described in another article ', the liquid crystal display device of this embodiment includes a high reflection efficiency layer 242 which is located on the thin film transistor 204, the gate line 202, and the source line 203 to form a pixel electrode 206iR region. This eliminates the need to provide a light-shielding film to prevent light from entering the thin-film transistor 204, and to shield a portion of the pixel electrode 206 on the gate line 202, the source line 203, and the common line 215. These 4 are light leakages in the form of functional areas and conversion lines in the easy-to-display area. As a result, conventionally, it cannot be used as a display area because it is shielded by a light-shielding film. The area can be reused as a display area. This makes efficient use of the display area. When the gate line and the source line include a metal film, they shield light from the backlight in a conventional transmissive liquid crystal display device, so they cannot be used as a display area. However, in this embodiment, the τ region with high transmission efficiency is formed at the center of each pixel (this embodiment is two separate parts). The R region with high reflection efficiency is formed in a stripe shape surrounding the T region. That is, the ruled region with high reflection efficiency covers the gate line, the source line, the common line, and the switching element, and is used as a reflective electrode region of each pixel electrode. This structure increases the mirror hole of the pixel electrode in the opposite pattern (that is, the pattern in which the T region surrounds the R region). Alternatively, the R region of each pixel may be formed as shown in FIG. 47 (the oblique line portion), including the connection electrode 255. This suppresses the brightness of light passing through the τ region. (Embodiment 18) In the foregoing embodiment, the present invention is applied to an active matrix type liquid crystal display device. The invention can also be applied to a simple matrix type liquid crystal display device. The basic structure of a pair of row electrodes (signal electrodes) and column electrodes (O: \ 92 \ 92808.DOC -64-1240130 scan electrodes) facing each other will be described below. In a simple matrix type liquid crystal display device, a region where the pair of row electrodes and column electrodes cross each other is defined as a pixel. 48A to 48C show examples of the pixel region. Referring to FIG. 48A, a transmissive electrode region is formed in a row electrode center portion in a pixel region, and a reflective electrode region is formed in the remaining edge portion. The structure of the row electrodes may be the same as that of FIG. 48B or 48C. The height of the reflective electrode region can be adjusted by forming an interlayer insulating film between the reflective electrode and the transmissive electrode, as shown in Fig. 48C. Alternatively, as shown in FIG. 49A, a reflective electrode region may be formed in a central portion of a row electrode in a pixel region, and a transmissive electrode region may be formed in the remaining edge portions. The structure of the row electrodes is shown in Fig. 49B or 49C. The height of the reflective electrode region can be adjusted by forming an interlayer insulating film between the reflective plate and the transmissive electrode, as shown in Fig. 49C. Alternatively, as shown in Figs. 50A, 50B, and 50C, the row electrodes may have strip-shaped reflective electrode regions. The strip-shaped reflective electrode region may be formed along one side of the row electrode, as shown in Figs. 50A to 50C, or formed along its center, as shown in Figs. 51A and 51B. The features of the liquid crystal display device according to the present invention which are different from conventional reflective or transmissive liquid crystal display devices will be described below. In a conventional reflective liquid crystal display device, the display is performed using ambient light to reduce energy consumption. Therefore, when the ambient light is lower than a specific limit value, the display cannot be recognized even if the device is used in an environment that can provide sufficient energy. This is the biggest disadvantage of the reflective liquid crystal display device. If the reflection characteristics of the reflective electrode are changed during manufacture, the ambient light utilization efficiency of the reflective electrode is also changed. This changes the threshold value of the unrecognizable ambient light intensity according to the panel change display. Therefore, at the time of manufacture, the reflection characteristics of O: \ 92 \ 92808.DOC -65-1240130 "requiring car needs to be used" radio-type LCD display device to control the mirror hole more carefully than when changing. Otherwise, a liquid crystal display device having stable display characteristics cannot be obtained. On the contrary, in the liquid crystal display device of the present invention, the light from the backlight is used in an environment that can provide sufficient electric power like a conventional transmissive liquid crystal display device. For this reason, the display is recognizable regardless of the ambient light. Therefore, changes in ambient light efficiency due to changes in reflection characteristics do not need to be strictly controlled as in reflective liquid crystal display devices. On the other hand, in a transmissive liquid crystal display device, when ambient light becomes bright, the surface reflection component of light increases, making it difficult to recognize the display. In the liquid crystal display device of the present invention, the reflection region is used together with the transmission region. This increases panel brightness and improves visibility. Therefore, the liquid crystal display device of the present invention can overcome the decrease in visibility of the conventional transmissive liquid crystal display device under high (ie, bright) ambient light due to surface reflection ~ and the low (ie, darkness) of the reflective liquid crystal display device for clog The problem that the display is difficult to recognize due to the decrease of the panel shell under the light of the brother. In addition to the foregoing, the characteristics of these devices can be obtained at the same time. As described in the text, according to the present invention, compared with the case of using a transflective reflective film, each pixel includes a region having a higher transmission efficiency and a region having a same reflection efficiency. In each region, a high transmission efficiency layer or a high reflection efficiency layer is used as the pixel electrode. With this structure, unlike the liquid crystal head display device for 4 using a semi-transmissive reflective film, it is possible to prevent the utilization efficiency of light and irradiation light from being reduced due to, for example, astigmatism. By using reflection mode., 7F, 7F transmission mode display T, or both reflection mode display and transmission mode
O:\92\92808.DOC -66- 1240130 式_示,不論環i兄光党度如何,皆可顯示良好影像。因為 來自後照光及環境光之兩種光線可同時有效地用於顯示, 故能量消耗遠低於始終使用來自後照光之光線的透射型液 晶顯示裝置。 換S之’本發明可藉著增加光利用效率而同時克服習用 反射型液晶顯示裝置於低環境光下可見度大幅降低及習用 透射型液晶頜示裝置於高環境光下難以辨認顯示之缺點。 口為南反射效率之區域邵分覆蓋閘極線、源極線、及/或 切換元件,故入射於此等部分上之光線可用於顯示。因此 ,大幅增加圖素之有效面積。此不僅克服使用半透射型反 射膜之習用裝置的問題,亦增加各圖素之鏡孔比,即使與 一般透射型液晶顯示裝置比較亦然。 右僅具有用以構成圖素電極之高透射效率層,則與高透 射效率層與其中高反射效率層彼此電聯而形成一圖素之圖 素電極的情況及其中高透射效率層與高反射效率層彼此部 分重$而形成一圖素之圖素電極的情況比較之下,可降低 因圖素電極導致缺陷之可能。 南透射效率層或高反射效率層可由與源極線或閘極線相 同之材料製造。此簡化液晶顯示裝置之製造程序。 有效圖素區中高反射效率區面積設定於佔約1〇至約9〇% 。此種設定同時克服習用透射型液晶顯示裝置於環境光太 売時顯示變得較不易辨識及習用反射型液晶顯示裝置於環 境光度太低時顯示變得完全無法辨認之問題。因此,不 論環境光量如何,皆可使用反射模式顯示、透射模式顯示O: \ 92 \ 92808.DOC -66- 1240130 _ display, regardless of the degree of party members, can display good images. Because two kinds of light from the backlight and ambient light can be effectively used for display at the same time, the energy consumption is much lower than a transmissive liquid crystal display device that always uses light from the backlight. In other words, the present invention can overcome the shortcomings of the conventional reflective liquid crystal display device that greatly reduces the visibility under low ambient light and the conventional transmissive liquid crystal display device under high ambient light by increasing light utilization efficiency. The area where the mouth is south reflection efficiency covers the gate line, source line, and / or switching element, so the light incident on these parts can be used for display. Therefore, the effective area of pixels is greatly increased. This not only overcomes the problem of conventional devices using a semi-transmissive reflective film, but also increases the mirror-to-hole ratio of each pixel, even when compared with a general transmissive liquid crystal display device. The right side only has a high transmission efficiency layer for forming a pixel electrode, and the case where the high transmission efficiency layer and the high reflection efficiency layer are electrically connected to each other to form a pixel pixel electrode, and the middle high transmission efficiency layer and the high reflection Comparing the case where the efficiency layers are partially weighted to form a pixel electrode of a pixel, the possibility of defects caused by the pixel electrode can be reduced. The south transmission efficiency layer or the high reflection efficiency layer may be made of the same material as the source line or the gate line. This simplifies the manufacturing process of the liquid crystal display device. The area of the high reflection efficiency region in the effective pixel region is set to occupy about 10 to about 90%. This setting also overcomes the problems that the conventional transmissive liquid crystal display device becomes less readable when the ambient light is too high, and the conventional reflective liquid crystal display device becomes completely unrecognizable when the ambient light level is too low. Therefore, regardless of the amount of ambient light, you can use the reflection mode display and transmission mode display
O:\92\92808.DOC -67- 1240130 、或同時使用反射模式顯示及透射模式顯示得到最佳顯示 。本發明反射型/透射型液晶顯示裝置在應用於其中顯示勞 幕無法擺動或無法移動至較方便操作者使用之較佳環境下 之裝置時特別有效。 本發明液晶顯示裝置實際上於電池驅動之數位型照相機 或攝影機中使用為檢像鏡(偵測器螢幕)。結果,發現不論環 境亮度如何,皆可藉著調整後照光之亮度以保持適於觀看 之亮度,而保持低能量消耗。 當習用透射型液晶顯示裝置使用於明亮陽光下之戶外時 ,即使後照光亮度增加,亦變成較不易辨認。此情況下, 本發明液晶顯示裝置可藉著斷開後照光而用為反射型液晶 顯示裝置,或其可藉著降低㈣光亮度而料透射/反射型 裝置。結果,可得到良好顯示品質並降低能量消耗。 一當本發:液晶顯示裝置使用於有明亮陽光射入之戶内時 ’錢射棱式顯示及透射模式顯示可根據目標物件之方位 而切換或兩者同時使用,而得到更易辨識之顯示。當偵測 自接收直接陽光時’可採用有明亮陽光照射之戶外情況。 當琢目標物件係於室内之降睥 π ^角洛中成像時,則開啟後照 用孩裝置作為反射/透射模式顯示。 當本發明液晶顯示裝置於車 Α伯、目,丨敫一 + 平上裝置诸如車上導航器中作 為U邊幕時,不論環境光線矣 識之顯示。 ^如冑’亦得到確實可辨 於使用習用洁㈢龜一姑班、 曰片」及日口 _不裝置之車卜遒 _ .._ 干上等航咨中,#用;戶 於個人電腦墓仏& m T 汉用儿^ 包細寺物所用之後照光, 而可使用於良好天氣石O: \ 92 \ 92808.DOC -67- 1240130, or use reflection mode display and transmission mode display at the same time to get the best display. The reflective / transmissive liquid crystal display device of the present invention is particularly effective when it is applied to a device in which the display screen cannot swing or move to a better environment that is more convenient for an operator to use. The liquid crystal display device of the present invention is actually used as a camera (detector screen) in a battery-driven digital camera or video camera. As a result, it was found that regardless of the ambient brightness, the brightness of the backlight can be adjusted to maintain the brightness suitable for viewing, while keeping the energy consumption low. When the conventional transmissive liquid crystal display device is used outdoors in bright sunlight, even if the brightness of the backlight is increased, it becomes less readable. In this case, the liquid crystal display device of the present invention can be used as a reflective liquid crystal display device by turning off the backlight, or it can be a transmissive / reflective device by reducing the luminance of the chirped light. As a result, it is possible to obtain good display quality and reduce energy consumption. Once the hair: when the liquid crystal display device is used indoors where there is bright sunlight, the prismatic display and transmission mode display can be switched according to the orientation of the target object or both can be used at the same time, so that the display can be more easily recognized. When detecting direct sunlight, it can use outdoor conditions with bright sunlight. When the target object is imaged in the indoor corner π ^ angle corner, the backlight is turned on and the child device is used as the reflection / transmission mode display. When the liquid crystal display device of the present invention is used as a U-curtain in a car, a flat screen and a flat top device such as a car navigator, it is displayed regardless of ambient light. ^ Ru 胄 'also got really distinguishable in the use of the traditional clean ㈢ turtle turtle class, movie ”and Rikou _ 装置 不 装置 的 车 卜 遒 _ .._ Qianshang and other aviation consultation, # 用; the user in the personal computer Tomb 仏 & m T Hanyong ^ Bao Xisi is illuminated after use, so it can be used for good weather stone
O:\92\92808.DOC -68- 1240130 收直接陽光之環境。然而,儘管具有該高亮度,該顯示於 蚰述環i兄下仍較不易辨識。另一方面,具有該高亮度之後 照光太亮而使使用者目眩,故具有負面影響。於使用本發 液曰曰,、、員示裝置之車上導航器中,反射模式顯示始終與透 射板式頭不一起使用。此可於不增加後照光亮度下而於明 冗% i兄下得到良好顯示。相反地,於極暗環境下,可藉著 僅有低党度(約50至1 〇〇cd/m2)之後照光而得到可辨識之顯 7J> ° 热白此技蟄者可於不偏離本發明範圍及精神下明瞭各種 其他改良。是故,申請專利範圍不限於前文描述,而係為 廣義申請專利範圍。 【圖式簡單說明】 圖1係為本發明實施例i液晶顯示裝置之主動陣列基板的 平面圖; 圖2係為沿圖i之a_b線所得之剖面圖; 固3係為本务明實施例1主動陣列基板之另一個具體實例 的平面圖; ' 圖4係為本發明實施例1主動陣列基板之另一個具體實例 的平面圖; 圖5係為邵分說明本發明實施例2液晶顯示裝置之中間層 絶緣膜及金屬膜的平面圖; 圖6係為沿圖5之c_d線所得之剖面圖; 固7係為本發明貫施例3之液晶顯示裝置的剖面圖; 圖8A係為本發明實施例4之液晶顯示裝置之主動陣列基O: \ 92 \ 92808.DOC -68- 1240130 The environment receiving direct sunlight. However, despite this high brightness, the display is still harder to recognize under the description ring i. On the other hand, after having such high brightness, the illumination is too bright to dazzle the user, and therefore has a negative effect. In the car navigator using this hair fluid, the reflection mode display is always used with the transmissive panel head. This can be displayed well without increasing the brightness of the backlight and under bright and dark. Conversely, in extremely dark environments, it is possible to obtain a discernible display by illuminating the light after only a low degree of partyness (about 50 to 1000 cd / m2). 7J &W; Various other improvements are apparent from the scope and spirit of the invention. Therefore, the scope of patent application is not limited to the foregoing description, but is a broad scope of patent application. [Brief description of the drawings] FIG. 1 is a plan view of an active array substrate of a liquid crystal display device according to Example i of the present invention; FIG. 2 is a cross-sectional view taken along line a_b of FIG. I; A plan view of another specific example of an active array substrate; FIG. 4 is a plan view of another specific example of an active array substrate of Embodiment 1 of the present invention; FIG. 5 is a middle layer illustrating a liquid crystal display device according to Embodiment 2 of the present invention Plan view of an insulating film and a metal film; FIG. 6 is a cross-sectional view taken along line c_d of FIG. 5; solid 7 is a cross-sectional view of a liquid crystal display device according to Embodiment 3 of the present invention; and FIG. 8A is Embodiment 4 of the present invention. Active array base
O:\92\92808.DOC -69- 124〇13〇 板的平面圖,而圖8B係為沿圖8A^_a線所得之剖面圖; 圖9係為本發明液晶顯示裝置之剖面圖; 圖10係為本發明實施例4之液晶顯示裝置另一個具體實 例的剖面圖,其具有微型透鏡; 圖11A係為本發明實施例4之液晶顯示裝置之主動陣列基 板之另一個具體實例的平面圖,而圖11B係為沿圖iia之 β-B線所得之剖面圖; 圖12Α係為本發明實施例5之液晶顯示裝置之主動陣列基 板的平面圖,而圖12Β係為沿圖12Α之c-c線所得之剖面圖 圖13 A係為本發明實施例6之液晶顯示裝置之主動陣列基 板之平面圖,而圖13B係為沿圖13A之D-D線所得之剖面圖 圖14 A係為本發明實施例7之液晶顯示裝置之主動陣列基 板之平面圖,而圖14B係為沿圖14A之E-E線所得之剖面圖 , 圖15係為說明本發明實施例8之反射/透射型液晶顯示裝 置之剖面圖; 圖16係為顯示實施例8之反射/透射型液晶顯示裝置之鏡 孔比與透光度及反光度之關係的圖; 圖17係為顯示實施例8之反射/透射型液晶顯示裝置之鏡 孔比與透光效率之關係的圖; 圖18係為本發明實施例8之反射/透射型液晶顯示裝置之 平面圖; O:\92\92808.DOC -70- 124013ο 圖19A至19F係為沿圖18<f_f 、 實施例8反射/透射型液晶顯示裝置之其係說明 圖撒至伽係為說明於實施例8反射;透射❹_示裝 置《反射區切成隆凸部分之步驟的剖面圖; 圖21係為用於圖20B所示之步驟中之光掩模之平面圖; 圖22係為a明測疋貫施例8反射/透射型液晶顯示裝置具 有高反射效率之圖素電極的反射特性之方法的剖面圖; 圖23係為說明干擾光之產生的概念圖;O: \ 92 \ 92808.DOC -69- 124〇13〇 plan view, and FIG. 8B is a sectional view taken along line 8A ^ _a; FIG. 9 is a sectional view of the liquid crystal display device of the present invention; FIG. 10 FIG. 11A is a plan view of another specific example of an active array substrate for a liquid crystal display device according to Embodiment 4 of the present invention, and FIG. 11A is a plan view of another specific example of the liquid crystal display device according to Embodiment 4 of the present invention, and FIG. 11B is a cross-sectional view taken along line β-B in FIG. Iia; FIG. 12A is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 5 of the present invention; and FIG. 12B is a plan view taken along line cc in FIG. 12A 13A is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 6 of the present invention, and FIG. 13B is a cross-sectional view taken along line DD of FIG. 13A. FIG. 14A is a liquid crystal of Embodiment 7 of the present invention 14B is a cross-sectional view taken along the line EE of FIG. 14A, and FIG. 15 is a cross-sectional view of a reflective / transmissive liquid crystal display device according to Embodiment 8 of the present invention; To show the reflection / transmission of Example 8 Fig. 17 is a graph showing the relationship between the mirror hole ratio and the light transmission efficiency of the reflection / transmission type liquid crystal display device of Example 8; 18 is a plan view of a reflection / transmission type liquid crystal display device according to Embodiment 8 of the present invention; O: \ 92 \ 92808.DOC -70- 124013ο Figures 19A to 19F are reflection / transmission types along FIG. 18 < f_f, Embodiment 8 The description of the liquid crystal display device is shown in Fig. 8. The transmission line is a cross-sectional view showing the steps of cutting the reflection region into a convex portion in the transmission system in Fig. 8; A plan view of a photomask in the step; FIG. 22 is a cross-sectional view of a method for measuring the reflection characteristics of a pixel electrode having a high reflection efficiency in a reflective / transmissive liquid crystal display device of Example 8; Conceptual diagram of interference light generation;
干圖24係為顯示實施例8反射/透射型液晶顯示裝置之圖素 電極的波長相依性之圖; 、圖25係為本發明實施例9之透射/反射型液晶顯示裝置之 刮面圖; 圖26係為顯示實施例9中灰階顯示之透光度及反光度之 圖; 圖27係為習用透射型液晶顯示裝置之彩度圖;24 is a diagram showing the wavelength dependence of the pixel electrodes of the reflective / transmissive liquid crystal display device of Example 8; and FIG. 25 is a scratched view of the transmissive / reflective liquid crystal display device of Example 9 of the present invention; FIG. 26 is a diagram showing the transmittance and reflectance of a gray-scale display in Example 9; FIG. 27 is a chromaticity diagram of a conventional transmission-type liquid crystal display device;
圖28係為圖9之透射/反射型液晶顯示裝置之彩度圖; 圖29係為本發明實施例9之透射/反射型液晶顯示裝置的 另一個具體實例之剖面圖; 圖30係為本發明實施例10之液晶顯示裝置的主動陣列基 板之平面圖; 圖31係為沿圖3〇之G-G線所得之剖面圖; 圖3 2係為本發明實施例11之液晶顯示裝置之主動陣列基 板的平面圖; 圖33係為沿圖32之H-H線所得之剖面圖;FIG. 28 is a chromaticity diagram of the transmissive / reflective liquid crystal display device of FIG. 9; FIG. 29 is a cross-sectional view of another specific example of the transmissive / reflective liquid crystal display device of Embodiment 9 of the present invention; Plan view of an active array substrate of a liquid crystal display device according to Embodiment 10 of the invention; FIG. 31 is a cross-sectional view taken along line GG of FIG. 30; FIG. 32 is a view of an active array substrate of the liquid crystal display device of Embodiment 11 of the present invention Plan view; Figure 33 is a sectional view taken along line HH of Figure 32;
O:\92\92808.DOC -71 - 124013ο 圖34係為本發明實施例12之液晶顯示裝置之主動陣列基 板的平面圖; 圖35係為沿圖34之I-Ι線所得之剖面圖; 圖36係為本發明實施例12之液晶顯示裝置之主動陣列基 板之另一個具體實例的平面圖; 圖37係為本發明實施例13之液晶顯示裝置之主動陣列基 板的平面圖; 圖38A至38D係為沿圖37之j_j線所得之剖面圖,其係說明 實施例13之主動陣列基板之製法; 圖3 9係為本發明實施例14之液晶顯示裝置之主動陣列基 板的平面圖; 圖40A至40D係為沿圖39之κ-Κ線所得之剖面圖,其係說 明實施例I4之主動陣列基板的製法; 圖41係為本發明貫施例1 $之液晶顯示裝置之主動陣列基 板的平面圖; 圖42A至42C係為沿圖41之L-L線所得之剖面圖,說明實 施例15之主動陣列基板之製法; 圖43係為本發明實施例16之液晶顯示裝置之主動陣列基 板的平面圖; 圖4 4 A 土 4 4 F係為沿圖4 3之Μ - Μ線所得之剖面圖,說明實 施例16之主動陣列基板的製法; 圖45係為本發明實施例17之液晶顯示裝置之主動陣列基 板的平面圖; 圖46係為沿圖45之Ν-Ν線所得之剖面圖; O:\92\92808.DOC -72- 1240130 圖47係為本發明實施例17之液晶顯示裝置的主動陣列基 板之另一個具體實例之平面圖; 圖48 A至48C係為說明實施例18之結構的圖,其中本發明 係應用於簡單矩陣液晶顯示裝置; 圖4 9 A至4 9 C係為說明貫施例1 8之結構之圖; 圖5〇A至5〇C係為說明另一個實施例18結構之圖; 圖51A及51B係為說明實施例is之另一個結構之圖;且 圖5 2係為習用液晶顯示裝置之剖面圖。 【圖式代表符號說明】 1 圖素電極 2 閘極線 3 源極線 4 薄膜電晶體(TFTs) 5 連接電極 6 接觸孔 7 閘極絕緣膜 8 儲存電容器電極 9 對基板 10 對電極 11 透明絕緣基板 12 閘極 13 半導體層 14 通道保護層 15 源極O: \ 92 \ 92808.DOC -71-124013ο FIG. 34 is a plan view of an active array substrate of a liquid crystal display device according to Example 12 of the present invention; FIG. 35 is a cross-sectional view taken along line I-I of FIG. 34; 36 is a plan view of another specific example of the active array substrate of the liquid crystal display device of Embodiment 12 of the present invention; FIG. 37 is a plan view of the active array substrate of the liquid crystal display device of Embodiment 13 of the present invention; FIGS. 38A to 38D are A cross-sectional view taken along line j_j in FIG. 37 illustrates the method of manufacturing the active array substrate of Example 13; FIG. 39 is a plan view of the active array substrate of the liquid crystal display device according to Example 14 of the present invention; FIGS. 40A to 40D are FIG. 39 is a cross-sectional view taken along the line κ-K in FIG. 39, which illustrates the manufacturing method of the active array substrate of Example I4; FIG. 41 is a plan view of the active array substrate of the liquid crystal display device according to Example 1 of the present invention; 42A to 42C are cross-sectional views taken along the line LL of FIG. 41 and illustrate the method of manufacturing the active array substrate of Embodiment 15. FIG. 43 is a plan view of the active array substrate of the liquid crystal display device of Embodiment 16 of the present invention; A soil 4 4F is a cross-sectional view taken along the line M-M of FIG. 43 and illustrates the method of manufacturing the active array substrate of Example 16. FIG. 45 is a plan view of the active array substrate of the liquid crystal display device of Example 17 of the present invention; 46 is a cross-sectional view taken along the line N-N in FIG. 45; O: \ 92 \ 92808.DOC -72- 1240130 FIG. 47 is another specific example of the active array substrate of the liquid crystal display device according to Embodiment 17 of the present invention 48A to 48C are diagrams illustrating the structure of Embodiment 18, in which the present invention is applied to a simple matrix liquid crystal display device; FIGS. 4A to 4C are diagrams illustrating the structure of Embodiment 18 Figures 50A to 50C are diagrams illustrating the structure of another embodiment 18; Figures 51A and 51B are diagrams illustrating another structure of the embodiment is; and Figure 52 is a conventional liquid crystal display device Sectional view. [Illustration of Symbols in Drawings] 1 Pixel electrode 2 Gate line 3 Source line 4 Thin film transistors (TFTs) 5 Connection electrode 6 Contact hole 7 Gate insulation film 8 Storage capacitor electrode 9 Pair substrate 10 Pair electrode 11 Transparent insulation Substrate 12 Gate 13 Semiconductor layer 14 Channel protection layer 15 Source
O:\92\92808.DOC -73- 汲極 透明導電膜 金屬膜 中間層絕緣膜 透射電極區 透明導電膜 反射電極區 金屬膜 二色型顏料分子 液晶分子 偏光板 偏光板 相板 透明基板 黑色掩模 對電極 對正膜 液晶層 金屬-絕緣體-金屬(MIM)元件 圖素電極 光源 反射膜 閘極線 數據線 -74- 驅動元件 汲極 儲存電容器電極 閘極絕緣膜 絕緣基板 接觸孔 中間層絕緣膜 反射圖素電極 透射圖素電極 濾色層 對電極 液晶層 對正膜 偏光板 後照光 微型透鏡 微型透鏡保護層 玻璃基板 閘極絕緣膜 抗蝕劑膜 光掩模O: \ 92 \ 92808.DOC -73- Drain transparent conductive film metal film interlayer insulating film transparent electrode region transparent conductive film reflective electrode region metal film two-color pigment molecules liquid crystal molecules polarizer polarizer phase plate transparent substrate black mask Mold-to-electrode alignment film Liquid crystal layer metal-insulator-metal (MIM) element pixel electrode light source reflective film gate line data line -74- driving element drain storage capacitor electrode gate insulating film insulating substrate contact hole interlayer insulating film Reflective Pixel Electrode Transmissive Pixel Electrode Color Filter Layer Electrode Liquid Crystal Layer Alignment Film Polarizer Backlight Micro Lens Micro Lens Protective Layer Glass Substrate Gate Insulation Film Resist Film Photomask
圓型孑LRound 孑 L
圓型孑L 板 -75- 1240130 64a 高隆凸部分 64b 低隆凸部分 64a, 隆凸部分 64b, 隆凸部分 65 聚合物樹脂膜 66 模擬玻璃 67 紫外光固化性黏著劑 68 透射電極 69 反射電極 70 主動陣列基板 71 薄膜電晶體(TFT) 72 閘極匯流排線 73 閘極電極 74 源極匯流排線 75 源極電極 76 汲極電極 77 半導體層 78 對接觸層 79 接觸孔 80 ITO層 81 金屬層 81a 底層電極 90 偏光板 91 後照光 O:\92\92808.DOC -76- 1240130 100 透射型/反射型液晶顯示裝置 120T 透射區 120R 反射區 140 液晶層 160 對基板(濾色器基板) 1 60T 透射電極區 1 6 0 R 反射電極區 162 絕緣玻璃基板 164 濾色器層 166 透明電極 168 透射電極 169 反射層 170 絕緣層 201 透明絕緣基板 202 閘極線 202a 閘極線 203 源極線 203a ITO 層 203b 金屬層 204 薄膜電晶體 205 汲極電極 206 圖素電極 207 ITO層 208 A1層 O:\92\92808.DOC -77- 1240130 209 閘極絕緣膜 210 間極 211 n+-Si 層 212 半導體層 213 通道保護層 214 Mo層 215 共用線 241 導電膜 242 層 243 汲極-圖素電極連接層 244 中間層絕緣膜 245 接觸孔 246 層 247 鈍化膜 248 接觸層 249 源極 250 底層電極 252 抗蝕劑膜 253a 隆凸部分 253b 隆凸部分 254 聚合物膜 255 連接電極 256 對基板 LI 光源 L2 光電倍增器 O:\92\92808.DOC -78-Round 孑 L plate -75- 1240130 64a High convex portion 64b Low convex portion 64a, convex portion 64b, convex portion 65 Polymer resin film 66 Analog glass 67 UV-curable adhesive 68 Transmissive electrode 69 Reflective electrode 70 Active array substrate 71 Thin film transistor (TFT) 72 Gate busbar 73 Gate electrode 74 Source busbar 75 Source electrode 76 Drain electrode 77 Semiconductor layer 78 Contact layer 79 Contact hole 80 ITO layer 81 Metal Layer 81a Bottom electrode 90 Polarizing plate 91 Backlight O: \ 92 \ 92808.DOC -76- 1240130 100 Transmissive / reflective liquid crystal display device 120T Transmissive area 120R Reflective area 140 Liquid crystal layer 160 Substrate (color filter substrate) 1 60T Transmissive electrode area 1 6 0 R Reflective electrode area 162 Insulating glass substrate 164 Color filter layer 166 Transparent electrode 168 Transmissive electrode 169 Reflective layer 170 Insulating layer 201 Transparent insulating substrate 202 Gate line 202a Gate line 203 Source line 203a ITO Layer 203b metal layer 204 thin film transistor 205 drain electrode 206 pixel electrode 207 ITO layer 208 A1 layer O: \ 92 \ 92808.DOC -77- 1240130 209 gate insulation film 210 electrodes 211 n + -Si layer 212 semiconductor layer 213 channel protection layer 214 Mo layer 215 common line 241 conductive film 242 layer 243 drain-pixel electrode connection layer 244 intermediate layer insulating film 245 contact hole 246 layer 247 passivation film 248 contact Layer 249 source 250 bottom electrode 252 resist film 253a bump portion 253b bump portion 254 polymer film 255 connection electrode 256 pair substrate LI light source L2 photomultiplier O: \ 92 \ 92808.DOC -78-
Claims (1)
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JP20117697 | 1997-07-28 | ||
JP27432797A JP3281849B2 (en) | 1997-10-07 | 1997-10-07 | Active matrix type liquid crystal display |
JP1629998 | 1998-01-29 | ||
JP1878198 | 1998-01-30 | ||
JP07531798A JP3284187B2 (en) | 1998-01-29 | 1998-03-24 | Liquid crystal display device and manufacturing method thereof |
JP11795498 | 1998-04-28 |
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TW200424720A TW200424720A (en) | 2004-11-16 |
TWI240130B true TWI240130B (en) | 2005-09-21 |
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TW087112317A TW509809B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
TW93111338A TWI240130B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
TW90118174A TWI240098B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
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TW200424720A (en) | 2004-11-16 |
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