TW509809B - Liquid crystal display device - Google Patents
Liquid crystal display device Download PDFInfo
- Publication number
- TW509809B TW509809B TW087112317A TW87112317A TW509809B TW 509809 B TW509809 B TW 509809B TW 087112317 A TW087112317 A TW 087112317A TW 87112317 A TW87112317 A TW 87112317A TW 509809 B TW509809 B TW 509809B
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid crystal
- electrode
- crystal display
- display device
- layer
- Prior art date
Links
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
509809 A7 B7 五、發明説明(1 ) 發明背景 1、 發明範疇: 本發明有關一種液晶顯示裝置及一種製造該液晶顯示裝 置之方法。本發明尤其有關一種於各個圖素中具有透射顯 示區及反射顯示區之液晶顯示裝置,及用以製造該液晶顯 示裝置之方法。 2、 相關技藝描述: 液晶顯示裝置因為具有薄而耗能量低之特色,故可廣泛 應用,.包括辦公室自動化(OA)裝置諸如文字處理機及個人 電腦、攜帶式資料裝置諸如攜帶式電子行程表、及具有液 晶偵測器而收納有照相機之V C R。 與CRT顯示器及電光(EL)顯示器不同地,該液晶顯示裝 置包括本身不會放射光線之液晶顯示面板。因此,所謂之 透射型經常用為液晶顯示裝置,其包括位於其後面或一侧 面而稱為後照光之照明器,故來自後照光而穿透液晶面板 之光量係由該液晶面板控制,以得到影像顯示。 然而,於該種透射型液晶顯示裝置中,該後照光消耗液 晶顯示裝置所消耗總能量之5 0 %或更高。因此提供後照光 會增加能量消耗。 為了克服前述問題,於經常於戶外使用或由使用者攜帶 之攜帶式資料裝置中使用反射型液晶顯示裝置。該反射型 液晶顯示裝置於該對基板之一上具有反射器,以取代後照 光,而自該反射自表面反射環境光線。 該種反射型液晶顯示裝置係於使用偏光板之顯示模式下 -4- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)509809 A7 B7 V. Description of the invention (1) Background of the invention 1. Field of the invention: The present invention relates to a liquid crystal display device and a method for manufacturing the liquid crystal display device. The present invention particularly relates to a liquid crystal display device having a transmissive display area and a reflective display area in each pixel, and a method for manufacturing the liquid crystal display device. 2. Description of related technologies: Liquid crystal display devices are widely used due to their thinness and low energy consumption. They include office automation (OA) devices such as word processors and personal computers, and portable data devices such as portable electronic schedules. , And a VCR with a liquid crystal detector and a camera. Unlike a CRT display and an electro-optic (EL) display, the liquid crystal display device includes a liquid crystal display panel that does not emit light by itself. Therefore, the so-called transmissive type is often used as a liquid crystal display device, which includes an illuminator called back light on the back or one side, so the amount of light from the back light that penetrates the liquid crystal panel is controlled by the liquid crystal panel to obtain Image display. However, in such a transmissive liquid crystal display device, the backlight consumes 50% or more of the total energy consumed by the liquid crystal display device. Providing backlighting therefore increases energy consumption. In order to overcome the foregoing problems, a reflective liquid crystal display device is used in a portable data device that is often used outdoors or is carried by a user. The reflective liquid crystal display device has a reflector on one of the pair of substrates to replace the backlight and reflect ambient light from the reflection from the surface. This type of reflective liquid crystal display device is in the display mode using a polarizing plate. -4- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm).
發明説明(2 操作,諸如廣泛使用於透射型液晶顯示裝置之扭轉向列 (TN)模式及超扭轉向列(STN)模式。近年來,不使用偏光 板而得到較明亮顯示之相變化型賓主模式蓬勃發展。Description of the Invention (2 operations, such as twisted nematic (TN) mode and super twisted nematic (STN) mode, which are widely used in transmissive liquid crystal display devices. In recent years, a phase-change guest with a brighter display without using a polarizer The model is booming.
裝 使用環境光反射之反射型液晶顯示裝置之缺點係為當周 圍%境陰暗時,顯示器之能見度極低。相反地,該透射型 液晶顯示裝置之缺點在於環境明亮時。即,色彩再現性較 低,而因顯示光之明亮度較環境光低,故無法完全辨識該 顯不。為了改吾於明亮環境下之顯示品質,後照光之強度 而^加。此情況增加該後照光及所形成之液晶顯示裝置的 能量消耗。而且,當需於直接曝露於陽光或直接照光之位 置下觀看該液晶顯示裝置時,顯示品質必然因環境光而降 低例如,當固定於車上之液晶顯示裝置螢幕或用於固定 訂The disadvantage of installing a reflective liquid crystal display device using ambient light reflection is that when the surrounding area is dark, the visibility of the display is extremely low. On the contrary, a disadvantage of this transmissive liquid crystal display device is when the environment is bright. That is, the color reproducibility is low, and since the brightness of the display light is lower than that of the ambient light, the display cannot be completely recognized. In order to improve the display quality in bright environment, the intensity of backlight is increased. This situation increases the energy consumption of the backlight and the formed liquid crystal display device. Moreover, when the liquid crystal display device needs to be viewed in a position directly exposed to sunlight or direct light, the display quality is necessarily lowered due to ambient light.
^置之個人電腦之顯示螢幕直接接受陽光或照光時,難以 觀看其自身顯示。 為了克服前述問題,已於例如日本公開公告第7 _ 3 3 3 5 9 8 號中揭示-種同時具有透射模式顯示及反射模式顯示之液 晶顯示裝置。該液晶顯示裝置具有半透射性反射膜,其透 射部分光線,而反射部分光線。 圖5 2顯不使用半透射性反射膜之液晶顯示裝置。該液晶 顯示裝置包括偏光板3〇a及30b、相板31、透明基板32、 黑色掩模33、對電極34、對正膜35、液晶層%、金屬-絕 緣體-金屬(MIM)元件37、圖素電極μ、光源39、及反射 膜40。 圖素電極38係為丰透射性反射膜,係由金屬粒子所構成When the display screen of a personal computer is directly exposed to sunlight or light, it is difficult to view its own display. In order to overcome the foregoing problems, a liquid crystal display device having both a transmission mode display and a reflection mode display has been disclosed in, for example, Japanese Laid-Open Publication No. 7_3 3 3 5 98. This liquid crystal display device has a semi-transmissive reflective film that transmits part of the light and reflects part of the light. Fig. 52 shows a liquid crystal display device without using a semi-transmissive reflective film. The liquid crystal display device includes polarizing plates 30a and 30b, a phase plate 31, a transparent substrate 32, a black mask 33, a counter electrode 34, a counter film 35, a liquid crystal layer, a metal-insulator-metal (MIM) element 37, The pixel electrode μ, the light source 39, and the reflective film 40. The pixel electrode 38 is a highly transmissive reflective film, which is composed of metal particles.
509809 A7 B7 五、發明説明 (3509809 A7 B7 V. Description of the invention (3
之極薄層或於各圖素上具有散亂微孔缺陷或凹陷缺陷之料 層。具有此種結構之圖素電極使來自光源39之光穿透而使 外來光線諸如天然光線及室内照射光反射,而兼具透射裂 顯示功能及反射型顯示功能。 圖5 2所示之習用液晶顯示裝置具有以下問題。首先,當 極薄之沉積金屬粒子層用為各圖素之半透射性反射膜時, 因為金屬粒子之吸光係數極高,故入射光之内部吸收極大 ,某些光被吸收而無法用於顯示,因而降低光線之利用效 率。 吴使用具有散亂微孔缺陷或凹陷缺陷之膜作為各圖素之 圖素電極38時,該膜之結構太過複雜而無法控制,需要較 精確之設計條件。因此,難以製造具有均勻特性之薄膜。 換σ之’私或光特性之再現性極差,而極難控制前述液晶 顯示裝置中之顯示品質。 例如,若嚐試將近年來廣泛用於液晶顯示裝置之開關元 件的薄膜電晶體(TFTs)使用於圖52所示之液晶顯示裝置, 則各圖素中用以形成儲存電容器之電極需藉除圖素電極以 外I電極/連接材料形成。此情況下,與習用裝置相同地, 由半透射性反射膜所製得之圖素電極不適於形成儲存電容 器。而且,,即使經由絕緣層於一部分連接點及元件上形成 作為圖素電極之透射性反射膜,該包括透射分量之圖素電 極仍難以增加數值孔徑(numeric al aperture)。而且,若 光係入射於開關元件諸如金屬絕緣體金屬及薄膜電晶體之 半導體層上,則產生光學泵動電流。形成作為遮光層之半It is an extremely thin layer or a layer with scattered microporous defects or recessed defects on each pixel. The pixel electrode having such a structure allows light from the light source 39 to penetrate and reflects external light such as natural light and indoor irradiation light, and has both a transmission crack display function and a reflective display function. The conventional liquid crystal display device shown in FIG. 52 has the following problems. First, when an extremely thin layer of deposited metal particles is used as a semi-transmissive reflective film for each pixel, because the absorption coefficient of the metal particles is extremely high, the internal absorption of incident light is extremely large and some light is absorbed and cannot be used for display Therefore, the utilization efficiency of light is reduced. When Wu uses a film with scattered microporous defects or recessed defects as the pixel electrode 38 of each pixel, the structure of the film is too complicated to control and requires more accurate design conditions. Therefore, it is difficult to produce a thin film having uniform characteristics. The reproducibility of the private or optical characteristics of σ is extremely poor, and it is extremely difficult to control the display quality in the aforementioned liquid crystal display device. For example, if an attempt is made to use thin film transistors (TFTs), which have been widely used as switching elements of liquid crystal display devices in recent years, in the liquid crystal display device shown in FIG. The electrodes are formed of I electrodes / connecting materials other than the electrodes. In this case, like a conventional device, a pixel electrode made of a semi-transmissive reflective film is not suitable for forming a storage capacitor. Moreover, even if a transmissive reflective film is formed as a pixel electrode on a part of connection points and elements via an insulating layer, it is difficult for the pixel electrode including a transmission component to increase a numerical al aperture. Further, if light is incident on a semiconductor layer of a switching element such as a metal insulator metal and a thin film transistor, an optical pumping current is generated. Formed as half of light-shielding layer
裝 訂Binding
線 -6-Line -6-
透射性反射膜不足以保護該開關元件以防止光線。為了確 疋遮光性,需於該對基板上放置另一層遮光膜。 發明簡述 本發明液晶顯示裝置包括第一片基板、第二片基板、及 夹置於m第一片基板與第二片基板之間之液晶層;多個圖 素區’其係由個別對施加電壓於液晶層之電極所界定,而 泫多個圖素區中每一個皆包括反射區及透射區。 本發明之一具體實例中,該第一片基板包括對應於反射 區之反射電極區及對應於透射區之透射電極區。 於另一個本發明具體實例中,該反射電極區係高於該透 射電極區,於第一片基板表面上形成階梯,而液晶層於反 射區中之厚度小於液晶層於透射區中之厚度。 本發明另一個具體實例中,反射區之面積於各圖素區中 佔約1 0至約9 0 %。 或本發明液晶顯示裝置包括第一片基板、第二片基板、 及夾置於該第一片基板與第二片基板之間之液晶層,該第 一片基板包括··多條閘極線;多條源極線,其與該多條閘 極線交叉;多個開關元件,其係位於該多條閘極線與該多 條源極線交點之附近;及多個圖素電極,其係連接於該多 個開關元件.,該第二片基板包括對電極,該多個圖素區係 由该多個圖素電極、對電極、及夹置於該多個圖素電極與 該對電極之間之液晶層所界定,而該多個圖素區中每一個 皆包括反射區及透射區。 本發明之一具體實例中,該第一片基板包括對應於反射 -7- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 509809 A7 B7 五、發明説明(5 ) 區之反射電極區及對應於透射區之透射電極區。 於另一個本發明具體實例中,該反射電極區係高於該透 射電極區,於第一片基板表面上形成階梯,而液晶層於反 射區中之厚度小於液晶層於透射區中之厚度。 於另一個本發明具體實例中,該反射區中之液晶層厚度 約為透射區中液晶層厚度之一半。 另一個本發明具體實例中,每個圖素電極皆包括位於反 射電極區中之反射電極及位於透射電極區中之透射電極。 另一個本發明具體實例中,該反射電極及該透射電極係 彼此電性連接。 另一個本發明具體實例中,每個圖素電極皆包括透射電 極,而該反射區包括透射電極及與該透射電極隔離之反射 層。 另一個本發明具體實例中,該反射電極區至少與該多條 閘極線、該多條源極線、及該多個開關元件中之一部分重 疊。 另一個本發明具體實例中,該反射電極區及該透射電極 區中至少一個具有材料與該多條閘極線或該多條源極線之 材料相同之料層。 另一個本發明具體實例中,每個圖素區中之反射區面積 皆佔約1 0至約9 0 %。 另一個本發明具體實例中,該第一片基板另外包括儲存 電容器電極,用以經由絕緣膜而與該圖素電極形成儲存電 容器,其中該反射電極區與該儲存電容器電極重疊。 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 509809 A7 B7五、發明説明(6 ) 另一個本發明具體實例中,該液晶顯示裝置另外包括位 於該第一片基板上而與該液晶層相對之表面上之微透鏡。 另一個本發明具體實例中,每個反射電極區皆包括金屬 層及位於該金屬層下層之中間層絕緣膜。 另一個本發明具體實例中,該金屬層具有連續波型。 另一個本發明具體實例中,該中間層絕緣層具有凹陷及 隆凸形狀。 另一個本發明具體實例中,該中間層絕緣層係由感光性 聚合物樹脂膜形成。 另一個本發明具體實例中,該中間層絕緣層覆蓋該開關 元件、該多條閘極線、或該多條源極線之至少一部分。 另一個本發明具體實例中,該反射電極係於與該多條閘 極線或該多條源極線相同之高度下形成。 另一個本發明具體實例中,該反射電極係位於與該多條 閘極線相同之高度,而 該反射電極係電性連接於該閘極線,供與該反射電極相 鄰之圖素電極使用。 另一個本發明具體實例中,將與施加於該對電極相同之 信號施加於該反射電極。另一個本發明具體實例中,該反 射電極係於與該多條閘極線相同之高度上形成,而該反射 電極藉著使開關元件之汲極或透射電極重疊而形成儲存電 容器。 另一個本發明具體實例中,該反射電極係由鋁或鋁合金 形成。A transmissive reflective film is not sufficient to protect the switching element from light. In order to ensure the light-shielding property, another layer of light-shielding film is placed on the pair of substrates. SUMMARY OF THE INVENTION The liquid crystal display device of the present invention includes a first substrate, a second substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate; An applied voltage is defined by the electrodes of the liquid crystal layer, and each of the plurality of pixel regions includes a reflection region and a transmission region. In a specific example of the present invention, the first substrate includes a reflective electrode region corresponding to a reflective region and a transmissive electrode region corresponding to a transmissive region. In another embodiment of the present invention, the reflective electrode region is higher than the transmissive electrode region, and a step is formed on the surface of the first substrate, and the thickness of the liquid crystal layer in the reflective region is smaller than the thickness of the liquid crystal layer in the transmissive region. In another specific embodiment of the present invention, the area of the reflection area occupies about 10 to about 90% of each pixel area. Or the liquid crystal display device of the present invention includes a first substrate, a second substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate, and the first substrate includes a plurality of gate lines. Multiple source lines that intersect the multiple gate lines; multiple switching elements that are located near the intersection of the multiple gate lines and the multiple source lines; and multiple pixel electrodes that Is connected to the plurality of switching elements, the second substrate includes a counter electrode, and the plurality of pixel regions are composed of the plurality of pixel electrodes, the counter electrode, and the plurality of pixel electrodes and the pair A liquid crystal layer is defined between the electrodes, and each of the plurality of pixel regions includes a reflection region and a transmission region. In a specific example of the present invention, the first substrate includes a reflection corresponding to -7-. This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 509809 A7 B7. V. Description of the invention (5) A reflective electrode region and a transmissive electrode region corresponding to the transmissive region. In another embodiment of the present invention, the reflective electrode region is higher than the transmissive electrode region, and a step is formed on the surface of the first substrate, and the thickness of the liquid crystal layer in the reflective region is smaller than the thickness of the liquid crystal layer in the transmissive region. In another embodiment of the present invention, the thickness of the liquid crystal layer in the reflective region is about one-half the thickness of the liquid crystal layer in the transmissive region. In another embodiment of the present invention, each pixel electrode includes a reflective electrode in a reflective electrode region and a transmissive electrode in a transmissive electrode region. In another embodiment of the present invention, the reflective electrode and the transmissive electrode are electrically connected to each other. In another embodiment of the present invention, each pixel electrode includes a transmissive electrode, and the reflective region includes a transmissive electrode and a reflective layer isolated from the transmissive electrode. In another embodiment of the present invention, the reflective electrode region overlaps at least one of the gate lines, the source lines, and the switching elements. In another embodiment of the present invention, at least one of the reflective electrode region and the transmissive electrode region has a material layer that is the same as a material of the gate lines or the source lines. In another embodiment of the present invention, the area of the reflective region in each pixel region accounts for about 10 to about 90%. In another embodiment of the present invention, the first substrate further includes a storage capacitor electrode for forming a storage capacitor with the pixel electrode through an insulating film, wherein the reflective electrode region overlaps the storage capacitor electrode. This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 509809 A7 B7 V. Description of the invention (6) In another embodiment of the present invention, the liquid crystal display device further includes a liquid crystal display device located on the first substrate. A microlens on a surface opposite to the liquid crystal layer. In another embodiment of the present invention, each reflective electrode region includes a metal layer and an intermediate layer insulating film located below the metal layer. In another embodiment of the present invention, the metal layer has a continuous wave type. In another embodiment of the present invention, the interlayer insulating layer has a concave shape and a convex shape. In another embodiment of the present invention, the interlayer insulating layer is formed of a photosensitive polymer resin film. In another embodiment of the present invention, the intermediate layer insulation layer covers at least a part of the switching element, the plurality of gate lines, or the plurality of source lines. In another embodiment of the present invention, the reflective electrode is formed at the same height as the plurality of gate lines or the plurality of source lines. In another embodiment of the present invention, the reflective electrode system is located at the same height as the gate lines, and the reflective electrode system is electrically connected to the gate line for a pixel electrode adjacent to the reflective electrode. . In another embodiment of the present invention, the same signal as that applied to the pair of electrodes is applied to the reflective electrode. In another embodiment of the present invention, the reflective electrode is formed at the same height as the plurality of gate lines, and the reflective electrode forms a storage capacitor by overlapping a drain electrode or a transmissive electrode of a switching element. In another embodiment of the present invention, the reflective electrode is formed of aluminum or an aluminum alloy.
裝 訂Binding
線 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) A7 B7 五、發明説明(7 ) 另個本發明具體實例中,該透射電極係由氧化銦錫形 成,而金屬層係夾置於該透射電極與該反射電極之間。 本發明另一方面提供一種製造液晶顯示裝置之方法。該 :晶顯示裝置包括第一片基板、第二片基板、及夾置於該 第一片基板與第二片基板之間之液晶層,該第一片基板包 括·多條閘極線;多條源極線,其與該多條閘極線交叉;多 個開關兀件’其係位於該多條閘極線與該多條源極線交點 4附近;及多個圖素電極,其係連接於該多個開關元件, 汶第一片基板包括對電極,該多個圖素區係由該多個圖素 電極、對電極、及夾置於該多個圖素電極與該對電極之間 4液晶層所界定,而該多個圖素區中每一個皆包括反射區 及透射區。該方法包括步驟:使用具有高透光度之材料於 第一片基板上形成透射電極區;形成感光性聚合物樹脂層 ,及於孩聚合物樹脂層上形成由具有高反射性之材料所構 成之反射層。 本發明之一具體實例中,該感光性聚合物樹脂層具有多 個凹陷部分及隆凸部分。 或提供一種製造液晶顯示裝置之方法。該液晶顯示裝置 包括第一片基板、第二片基板、及夹置於該第一片基板與 第一片基板之間之液晶層,該第一片基板包括:多條閘極 、、泉,多條源極線,其與該多條閘極線交叉;多個開關元件 其係位於該多條閘極線與該多條源極線交點之附近;及 多個圖素電極,其係連接於該多個開關元件,該第二片基 板包括對電極,該多個圖素區係由該多個圖素電極、對電 本紙張尺度適用中國國家標準(CNS) A4规格(210 X 297公釐)The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 B7 V. Description of the invention (7) In another embodiment of the present invention, the transmission electrode is formed of indium tin oxide, and the metal layer A tether is interposed between the transmissive electrode and the reflective electrode. Another aspect of the present invention provides a method for manufacturing a liquid crystal display device. The crystal display device includes a first substrate, a second substrate, and a liquid crystal layer interposed between the first substrate and the second substrate. The first substrate includes a plurality of gate lines; Source lines, which intersect the gate lines; multiple switch elements, which are located near the intersection 4 of the gate lines and the source lines; and pixel electrodes, which are Connected to the plurality of switching elements, the first substrate includes a counter electrode, and the plurality of pixel regions are composed of the plurality of pixel electrodes, the counter electrode, and sandwiched between the plurality of pixel electrodes and the pair of electrodes. The four liquid crystal layers are defined, and each of the plurality of pixel regions includes a reflection region and a transmission region. The method includes the steps of: forming a transmissive electrode region on a first substrate using a material having a high light transmittance; forming a photosensitive polymer resin layer; and forming a polymer material having a high reflectivity on the polymer resin layer The reflective layer. In a specific embodiment of the present invention, the photosensitive polymer resin layer has a plurality of depressed portions and raised portions. Or provide a method for manufacturing a liquid crystal display device. The liquid crystal display device includes a first substrate, a second substrate, and a liquid crystal layer interposed between the first substrate and the first substrate. The first substrate includes a plurality of gate electrodes, a spring, Multiple source lines that intersect the multiple gate lines; multiple switching elements that are located near the intersection of the multiple gate lines and the multiple source lines; and multiple pixel electrodes that are connected For the plurality of switching elements, the second substrate includes a counter electrode, and the plurality of pixel regions are composed of the plurality of pixel electrodes, and the size of the paper is adapted to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Centimeter)
極、及夾置於該多個圖素泰 口tI極與孩對電極之間之液晶層所 界足’而違夕個圖夸F 士 _ 素£中母一個皆包括反射區及透射區。 孩万法包括步騾··僅闱目 ,、有咼透光度之材料於第一片基板 上形成透射電極區;於令、釆 二、^ ; Μ延射电極區上形成保護膜;及於 孩保護膜之一部分上彤★ · 1刀上形成具有高反射性之料層,以形成該 反射電極區。 本發月《纟體實例中,該透射電極區係於與該多條閘 極線相同之高度上形成。 -因此’本發明可得m優點⑴提供兼具有透射模式顯 丁及反射模式顯π〈液晶顯示裝置,其中其境光及來自後 照光之光利用效率較習用相同類型之液晶顯示裝置改善, 而得到優越之顯示品質,及⑺提供一種製造該液晶顯示裝 置之方法。於本發明液晶顯示裝置中,尤其大幅改善於明 亮環境下所得之顯示品質。 热習此技藝者可於參照附圖詳細閱讀以下詳述後進一步 明瞭本發明之此等及其他優點。 附圖簡述 固係為本發明實施例1液晶顯示裝置之主動陣列基板的 平面圖; 圖2係為沿gitib線所得之剖面圖; 圖'"係為本發明實施例1主動陣列基板之另一個具體實例 的平面圖; 圖4係為本發明實施例1主動陣列基板之另一個具體實例 的平面圖; -11 - 本紙張尺度制τ _家鮮_) 規格(2lQ χ撕公爱) A7 B7 五、發明説明(9 圖5係為部分說明本發明實施例2液晶顯示裝置之中間層 絕緣膜及金屬膜的平面圖; 圖6係為沿圖5之c_d線所得之剖面圖; 圖7係為本發明實施例3之液晶顯示裝置的剖面圖; 圖8 A係為本發明實施例4之液晶顯示裝置之主動陣列基 板的平面圖’而圖“係為沿圖8A之A-A線所得之剖面圖 圖9係為本發明液晶顯示裝置之剖面圖; 圖1 0係為本發明實施例4之液晶顯示裝置另一個具體實 例的剖面圖,其具有微型透鏡; 八 、 圖1 1 A係為本發明實施例4之液晶顯示裝置之主動陣列基 板之另一個具體實例的平面圖,而圖丨丨B係為沿圖丨1 A之 B - B線所得之剖面圖; 圖1 2 A係為本發明實施例5之液晶顯示裝置之主動陣列基 板的平面圖,而圖12B係為沿圖12A之C-C線所得之剖面 _ , 圖1 3 A係為本發明實施例6之液晶顯示裝置之主動陣列基 板足平面圖,而圖13B係為沿圖13A之D-D線所得之剖面 圖, 圖1 4 A係為本發明實施例7之液晶顯示裝置之主動陣列基 板<平面圖,而圖14B係為沿圖14A之E-E線所得之剖面 固 · 圖, 圖1 3係為說明本發明實施例8之反射/透射型液晶顯示裝 置之剖面圖; -12-The electrode and the liquid crystal layer sandwiched between the plurality of picture element electrodes and the pair of electrodes are sufficient, and each picture element includes a reflection region and a transmission region. The Hawan method includes the following steps: forming a transmissive electrode region on the first substrate with a material having a transmissivity only; forming a protective film on the extended electrode region; and A layer of highly reflective material is formed on one part of the protective film to form the reflective electrode area. In the example of the carcass published this month, the transmissive electrode region is formed at the same height as the gate lines. -Therefore, the present invention can obtain the advantages of providing a liquid crystal display device having both a transmission mode display and a reflection mode display, in which the utilization efficiency of ambient light and light from the backlight is improved compared to conventional liquid crystal display devices. To obtain superior display quality, and to provide a method for manufacturing the liquid crystal display device. In the liquid crystal display device of the present invention, the display quality obtained in a bright environment is particularly greatly improved. Those skilled in the art can further understand these and other advantages of the present invention after reading the following detailed description with reference to the accompanying drawings. Brief description of the drawings is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 1 of the present invention; FIG. 2 is a cross-sectional view taken along the gitib line; FIG. A plan view of a specific example; FIG. 4 is a plan view of another specific example of the active array substrate of Embodiment 1 of the present invention; -11-This paper scale system τ _ home fresh_) Specifications (2lQ χ tear public love) A7 B7 5 5. Description of the invention (9 FIG. 5 is a plan view partially illustrating an interlayer insulating film and a metal film of a liquid crystal display device according to Embodiment 2 of the present invention; FIG. 6 is a cross-sectional view taken along line c_d of FIG. 5; Sectional view of the liquid crystal display device of Embodiment 3 of the invention; FIG. 8A is a plan view of the active array substrate of the liquid crystal display device of Embodiment 4 of the invention ', and the diagram "is a sectional view taken along line AA of Fig. 8A. Fig. 9 Fig. 10 is a cross-sectional view of another specific example of a liquid crystal display device according to Embodiment 4 of the present invention, which has a microlens; Fig. 1 A is an embodiment of the present invention 4 LCD display A plan view of another specific example of an active array substrate is placed, and FIG. 丨 丨 B is a cross-sectional view taken along line B-B of FIG. 1A; FIG. 12A is a liquid crystal display device according to Embodiment 5 of the present invention FIG. 12B is a cross-sectional view taken along line CC of FIG. 12A, and FIG. 13A is a plan view of the active array substrate of the liquid crystal display device according to Embodiment 6 of the present invention, and FIG. 13B is A cross-sectional view taken along the line DD of FIG. 13A is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 7 of the present invention, and FIG. 14B is a cross-sectional view taken along the line EE of FIG. 14A. FIG. 13 is a cross-sectional view illustrating a reflection / transmission type liquid crystal display device according to Embodiment 8 of the present invention; -12-
發明説明(10 圖1 6係為顯示實施例8之反射/透射型液晶顯示裝置之鏡 孔比與透光度及反光度之關係的圖; 圖1 7係為顯示實施例8之反射/透射型液晶顯示裝置之鏡 孔比與透光效率之關係的圖; 圖18係為本發明實施例8之反射/透射槊液晶顯示裝置之 平面圖; 圖1 9 A至1 9 F係為沿圖丨8之ρ _ F線所得之剖面圖,其係說 明實施例8反射/透射型液晶顯示裝置之製法; 圖2 Ο A至2 0 D係為說明於實施例8反射/透射型液晶顯示 裝置之反射區中形成隆凸部分之步騾的剖面圖; 圖21係為用於圖2〇b所示之步騾中之光掩模之平面圖; 圖2 2係為說明測定實施例8反射/透射型液晶顯示裝置具 有高反射效率之圖素電極的反射特性之方法的剖面圖; 圖2 3係為說明干擾光之產生的概念圖; 圖2 4係為顯不實施例8反射/透射型液晶顯tf裝置之圖素 電極的波長相依性之圖; 圖2 5係為本發明實施例9之透射/反射型液晶顯示裝置之 剖面圖; 圖26係為顯示實施例9中灰階顯示之透光度及反光度之 圖, 圖2 7係為習用透射型液晶顯示裝置之彩度圖; 圖2 8係為圖9之透射/反射型液晶顯示裝置之彩度圖; 圖2 9係為本發明實施例9之透射/反射型液晶顯示裝置的 另一個具體實例之剖面圖; -13- 本紙張尺度適用中國國家標準(CNS) A4规格(210X 297公釐) 五、發明説明~^ --—-:- 圖係為本發明實施例1 〇之液晶顯示裝置的主動陣列基 板之平面圖; 圖31係為沿圖3〇之G_G線所得之剖面圖; 圖32係為本發明實施例11之液晶顯示裝置之主動陣列基 板的平面圖; 圖3 3係為沿圖3 2之H _ H線所得之剖面圖; 圖34係為本發明實施例12之液晶顯示裝置之主動陣列基 板的平面圖; 圖35係為沿圖34之I-Ι線所得之剖面圖; 圖3 6係為本發明實施例12之液晶顯示裝置之主動陣列基 板之另一個具體實例的平面圖; 圖3 7係為本發明實施例13之液晶顯示裝置之主動陣列基 板的平面圖; 圖38A至38D係為沿圖37之線所得之剖面圖,其係說 明實施例13之主動陣列基板之製法; 圖3 9係為本發明實施例丨4之液晶顯示裝置之主動陣列基 板的平面圖; 圖4〇A至40D係為沿圖39之κ_κ線所得之剖面圖,其係 說明實施例1 4之主動陣列基板的製法; 圖4 1係為本發明實施例丨5之液晶顯示裝置之主動陣列基 板的平面圖; 余圖42Α至42C係為沿圖41〜L線所得之剖面圖,說明 實施例1 5之主動陣列基板之製法; 圖4 3係為本發明實施例丨6之液晶顯示裝置之主動陣列基 -14 - ) 五、發明説明(I2 板的平面圖; 奋圖44A至44F係為沿圖43之M_M線所得之剖面圖,說明 實施例1 6之主動陣列基板的製法; 圖4 5係為本發明實施例1 7之液晶顯示裝置之主動陣列基 板的平面圖; 圖46係為沿圖45之N-N線所得之剖面圖; 圖4 7係為本發明實施例! 7之液晶顯示裝置的主動陣列基 板之另一個具體實例之平面圖; 圖4 8 A至4 8 C係為說明實施例〗8之結構的圖,其中本發 明係應用於簡單矩陣液晶顯示裝置;- 圖49A至OC係為說明實施例丨8之結構之圖; 圖5 Ο A至5 0 C係為說明另一個實施例丨8結構之圖; 圖51A&51B係為說明實施例18之另一個結構之圖,·且 圖5 2係為習用液晶顯示裝置之剖面圖。 較佳具體實例描述 (實施例1 ) 本發明實施例!之液晶顯示裝置包括主動陣列基板及透明 對基板(例如玻璃基板),其具有與圖素電極相對之對電極 。液晶層係夹置於該主動陣列基板與該對基板之間。用以 施加電壓於.孩液晶層之各對圖素電極及對基板界定了多個 圖素區。該圖素區包括-對電極及介於該對電極之間之液 晶層。該種界定亦可應用於簡單矩陣型液晶顯示裝置,其 具有多個掃描電極及多個信號電極。 本發明液晶顯7F裝置之每個圖素中皆具有至少一個透射 -15- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明(13 ) 區及至少一個反射區。該透射區及反射區包括液晶層及一 對夾置該液晶層之電極。界定該透射區之電極區域係稱為 透射電極區’而界定該反射區之電極區域係稱為透射電極 區。 圖1係為實施例1液晶顯示裝置之主動陣列基板之一圖素 部分的平面圖。圖2係為沿圖1之a-b線所得之剖面圖。 參照圖1及2,該主動陣列基板包括排列成矩陣之圖素電 極1。用以提供掃描信號之閘極線2及用以提供顯示信號之 源極線3係沿遠圖素電極1之周圍配置,以彼此垂直相交。 該閘極線2及該源極線3之對應圖素電極1的邊緣部分經 由中間層絕緣膜1 9而重疊。該閘極線2及該源極線3含括金 屬膜。 薄膜電晶體(TFT s)4係於閘極線2及源極線3之各個交點 附近形成。各薄膜電晶體4之閘極12係連接於對應之閘極 線2,以經由閘極線2將信號輸入閘極丨2而驅動薄膜電晶體 4。薄膜電晶體4之源極15係連接於對應之源極,以接收來 自源極線3之數據信號。薄膜電晶體4之汲極16係連接於連 接電極5,其依序經由接觸孔6電性連接於對應之圖素電極 1 ° 連接電極5經由閘極絕緣膜7而與儲存電容器電極8形成 儲存電容器。該儲存電容器8包括金屬膜,而經由互連器( 未示)連接於位於對基板9上之對電極1〇。該錯存電容器電 極8可於相同步驟中與閘極線2 _起形成。 母個圖素電極1皆包括反射電極區22,其包括金屬膜, -16 -DESCRIPTION OF THE INVENTION (10 FIG. 16 is a diagram showing the relationship between the lens aperture ratio and the transmittance and reflectance of the reflective / transmissive liquid crystal display device of Embodiment 8; FIG. 17 is a diagram showing the reflection / transmission of Embodiment 8 Fig. 18 is a plan view of the relationship between the mirror-to-hole ratio and the light transmission efficiency of a liquid crystal display device; Fig. 18 is a plan view of a reflection / transmission / liquid crystal display device according to Embodiment 8 of the present invention; Figs. A cross-sectional view taken along line ρ _ F of FIG. 8 illustrates a method for manufacturing a reflective / transmissive liquid crystal display device of Example 8. FIGS. 2A through 20D are examples of the reflective / transmissive liquid crystal display device of Example 8. A cross-sectional view of a step forming a raised portion in a reflection region; FIG. 21 is a plan view of a photomask used in the step shown in FIG. 20b; FIG. 22 is a view illustrating reflection / transmission of Example 8 A cross-sectional view of a method for reflecting characteristics of a pixel electrode having a high reflection efficiency in a liquid crystal display device; FIG. 23 is a conceptual diagram illustrating the generation of interfering light; and FIG. 24 is a reflection / transmission type liquid crystal of Embodiment 8 The wavelength dependence of the pixel electrode of the tf device; A cross-sectional view of a transmissive / reflective liquid crystal display device of Example 9; FIG. 26 is a diagram showing the transmittance and reflectance of a gray-scale display in Example 9, and FIG. 27 is a color chart of a conventional transmissive liquid crystal display device Fig. 28 is a chromaticity diagram of the transmissive / reflective liquid crystal display device of Fig. 9; Fig. 29 is a sectional view of another specific example of the transmissive / reflective liquid crystal display device of Embodiment 9 of the present invention; -13- This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) V. Description of the invention ~ ^ --- ::-The picture shows the active array substrate of the liquid crystal display device in Example 10 of the present invention FIG. 31 is a cross-sectional view taken along line G_G of FIG. 30; FIG. 32 is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 11 of the present invention; _ H sectional view; FIG. 34 is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 12 of the present invention; FIG. 35 is a sectional view taken along line I-I of FIG. 34; Another active matrix substrate of the liquid crystal display device of Embodiment 12 of the present invention A plan view of a specific example; FIG. 37 is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 13 of the present invention; FIGS. 38A to 38D are cross-sectional views taken along the line of FIG. Array substrate manufacturing method; Figures 3 to 9 are plan views of active array substrates for liquid crystal display devices according to Example 4 of the present invention; Figures 40A to 40D are cross-sectional views taken along the line κ_κ of Figure 39, which illustrate the implementation Example 14 The method of manufacturing an active array substrate; Figure 41 is a plan view of an active array substrate of a liquid crystal display device according to Example 5 of the present invention; the remaining figures 42A to 42C are cross-sectional views taken along lines 41 to L, The method of manufacturing the active array substrate of Example 15 is illustrated; FIG. 4 is the active array substrate of the liquid crystal display device of Example 6 of the present invention. 14-) V. Description of the invention (plan view of the I2 board; Figures 44A to 44F FIG. 45 is a cross-sectional view taken along the line M_M of FIG. 43 and illustrates the method of manufacturing the active array substrate of Example 16; FIG. 45 is a plan view of the active array substrate of the liquid crystal display device of Example 17 of the present invention; N- A cross-sectional view taken along line N; Figures 4 and 7 are examples of the present invention! 7 is a plan view of another specific example of an active array substrate of a liquid crystal display device of FIG. 7; FIGS. 4A to 4C are diagrams illustrating the structure of Embodiment 8; the present invention is applied to a simple matrix liquid crystal display device; Figs. 49A to OC are diagrams illustrating the structure of Embodiment 8; Figs. 5A to 50C are diagrams illustrating the structure of another Embodiment 8; Figs. 51A & 51B are another diagrams illustrating Embodiment 18; Structure, and Fig. 52 is a cross-sectional view of a conventional liquid crystal display device. Description of preferred specific examples (Embodiment 1) Embodiments of the present invention! The liquid crystal display device includes an active array substrate and a transparent counter substrate (such as a glass substrate), which has a counter electrode opposite to the pixel electrode. The liquid crystal layer is sandwiched between the active array substrate and the pair of substrates. Each pair of pixel electrodes used to apply a voltage to the liquid crystal layer and the substrate define a plurality of pixel regions. The pixel region includes a counter electrode and a liquid crystal layer interposed between the counter electrode. This kind of definition can also be applied to a simple matrix type liquid crystal display device having a plurality of scanning electrodes and a plurality of signal electrodes. Each pixel of the liquid crystal display 7F device of the present invention has at least one transmission -15- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 B7 V. Description of the invention (13) And at least one reflection area. The transmission region and the reflection region include a liquid crystal layer and a pair of electrodes sandwiching the liquid crystal layer. The electrode region defining the transmissive region is referred to as a transmissive electrode region 'and the electrode region defining the reflective region is referred to as a transmissive electrode region. FIG. 1 is a plan view of a pixel portion of an active array substrate of a liquid crystal display device of Embodiment 1. FIG. Fig. 2 is a sectional view taken along line a-b of Fig. 1. Referring to Figures 1 and 2, the active array substrate includes pixel electrodes 1 arranged in a matrix. The gate lines 2 for providing a scanning signal and the source lines 3 for providing a display signal are arranged along the periphery of the far pixel electrode 1 so as to intersect each other perpendicularly. The edge portions of the gate line 2 and the source line 3 corresponding to the pixel electrode 1 are overlapped via the interlayer insulating film 19. The gate line 2 and the source line 3 include a metal film. A thin film transistor (TFT s) 4 is formed near each intersection of the gate line 2 and the source line 3. The gate electrode 12 of each thin film transistor 4 is connected to the corresponding gate line 2 to input a signal to the gate electrode 2 via the gate line 2 to drive the thin film transistor 4. The source 15 of the thin film transistor 4 is connected to the corresponding source to receive a data signal from the source line 3. The drain electrode 16 of the thin film transistor 4 is connected to the connection electrode 5, and is electrically connected to the corresponding pixel electrode 1 through the contact hole 6 in sequence. The connection electrode 5 forms a storage with the storage capacitor electrode 8 through the gate insulating film 7. Capacitor. The storage capacitor 8 includes a metal film and is connected to the counter electrode 10 on the counter substrate 9 via an interconnector (not shown). The stray capacitor electrode 8 can be formed with the gate line 2 in the same step. The mother pixel electrodes 1 each include a reflective electrode region 22, which includes a metal film, -16-
509809 A7 B7 五I發明説明~) " 及至少一個透射電極區20,其包括氧化銦錫膜。該反射電 極區2 2係覆蓋該閘極線2、該源極線3、該薄膜電晶體4、 及該儲存電容器電極8,而該透射電極區20由該反射電極 區2 2所環繞。 根據以下方式製造具有前述結構之實施例1主動陣列基板 〇 首先,依序於由玻璃等材料製造之透明絕緣基板11上形 成閘極1 2、閘極線2、儲存電容器電極8、閘極絕緣膜7、 半導體層13、通道保護層14、源極15、及汲極16。 之後,藉著濺射依序沉積透明導電膜1 7及金屬膜1 8,而 製作佈線圖型,以形成源極線3及連接電極5。 因此,該源極線3具有包括由氧化銦錫製造之透明導電膜 1 7及金屬膜1 8之雙層結構。使用此種結構,即使金屬膜1 § 中產生諸如斷線之缺陷,仍可經由透明導電膜1 7保持電性 連接。而減低源極線3中產生斷線之可能。 之後,藉旋轉塗佈法於所形成之基板上施加感光性丙烯 酸樹脂,以形成厚度3微米之中間層絕緣膜1 9。該丙缔酸 樹脂隨之根據所需之佈線圖型曝光,使用鹼溶液顯影。該 膜僅有曝光部分被鹼溶液蝕刻,而形成穿透該中間層絕緣 膜1 9之接觸孔。採用此種驗液顯影法,得到具有完美錐受 之接觸孔6 ^ 根據以下因素,使用感光性丙烯酸樹脂作為中間層絕緣 膜19之優點有利於產能。因為旋轉塗佈法可用以形成薄膜 ’故可輕易形成薄至數微米之膜。而且,於該中間層絕緣 •17-509809 A7 B7 Five I Invention Description ~) " and at least one transmissive electrode region 20, which includes an indium tin oxide film. The reflective electrode region 22 covers the gate line 2, the source line 3, the thin film transistor 4, and the storage capacitor electrode 8, and the transmissive electrode region 20 is surrounded by the reflective electrode region 22. The active array substrate of Example 1 having the aforementioned structure is manufactured in the following manner. First, a gate electrode 1 2, a gate wire 2, a storage capacitor electrode 8, and a gate insulation are sequentially formed on a transparent insulating substrate 11 made of a material such as glass. The film 7, the semiconductor layer 13, the channel protection layer 14, the source electrode 15, and the drain electrode 16. After that, a transparent conductive film 17 and a metal film 18 are sequentially deposited by sputtering to form a wiring pattern to form the source line 3 and the connection electrode 5. Therefore, the source line 3 has a double-layered structure including a transparent conductive film 17 and a metal film 18 made of indium tin oxide. With this structure, even if a defect such as a disconnection occurs in the metal film 1 §, the electrical connection can be maintained through the transparent conductive film 17. The possibility of disconnection in the source line 3 is reduced. Thereafter, a photosensitive acrylic resin was applied to the formed substrate by a spin coating method to form an interlayer insulating film 19 having a thickness of 3 m. The acrylic resin is then exposed according to the required wiring pattern and developed using an alkaline solution. Only the exposed portion of the film is etched by the alkali solution to form a contact hole penetrating the interlayer insulating film 19. By adopting such a test solution development method, a contact hole 6 having a perfect cone receiving is obtained. ^ The advantages of using a photosensitive acrylic resin as the interlayer insulating film 19 are beneficial to productivity based on the following factors. Since the spin coating method can be used to form a thin film ', a film as thin as a few microns can be easily formed. Furthermore, it is insulated from this intermediate layer.
509809 A7 B7 五、發明説明(15 ) 膜19製作佈線圖型時,不需要光阻施加步騾。 此實施例中,該丙烯酸樹脂經著色,而可於製作佈線圖 型後藉著使整體表面曝光而使其透明。該丙婦酸樹脂亦可 藉化學加工而使其透明。 之後,藉著濺射及製作佈線圖型而形成透明導電膜2 1, 以形成透明導電膜2 1。該透明導電膜2 1係由氧化銦錫製造。 因此,該透明導電膜2 1係經由接觸孔6電性連接於各連 接電極5。 之後,於該透明導電膜21上形成金屬膜23,並製作佈線 圖型,以覆蓋該閘極線2、源極線3、薄膜電晶體4、儲存 電客為電極8 ’以作為該圖素電極1之反射電極區2 2。該透 明導電膜21未被金屬膜23覆蓋之部分構成透射電極區20。 該透明導電膜2 1及該金屬膜2 3係彼此電性連接。任何相鄰 圖素電極皆由位於該閘極線2及該源極線3上層之部分分隔 ,以使其彼此不會電性連接。 金屬膜23係由A1製造。其亦可由具有高反射性之任何導 電性材料諸如Ta所製造。 此實施例中,如圖2所示,液晶層包括混合於液晶中之二 色型顏料分子24。該二色型顏料之吸光係數視該分子之配 向而定。該二色型顏料分子2 4之配向於藉著控制介於對電 極1 〇與圖素電極1之間之電場以使液晶分子2 5之配向改變 時改變。該二色型顏料分子2 4之吸光係數所產生之改變係 用以產生影像顯示。 使用具有前述結構之實施例1液晶顯示面板,該顯示器可 -18- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)509809 A7 B7 V. Description of the Invention (15) When the film 19 is used to make a wiring pattern, a photoresist application step is not required. In this embodiment, the acrylic resin is colored, and it can be made transparent by exposing the entire surface after making the wiring pattern. The hyaluronic acid resin can also be made transparent by chemical processing. Thereafter, a transparent conductive film 21 is formed by sputtering and a wiring pattern is formed to form a transparent conductive film 21. The transparent conductive film 21 is made of indium tin oxide. Therefore, the transparent conductive film 21 is electrically connected to each connection electrode 5 via the contact hole 6. After that, a metal film 23 is formed on the transparent conductive film 21, and a wiring pattern is made to cover the gate line 2, the source line 3, the thin film transistor 4, and the storage guest as the electrode 8 'as the pixel The reflective electrode region 22 of the electrode 1. A portion of the transparent conductive film 21 not covered by the metal film 23 constitutes a transparent electrode region 20. The transparent conductive film 21 and the metal film 23 are electrically connected to each other. Any adjacent pixel electrodes are separated by a portion above the gate line 2 and the source line 3 so that they are not electrically connected to each other. The metal film 23 is made of A1. It can also be made of any conductive material with high reflectivity such as Ta. In this embodiment, as shown in FIG. 2, the liquid crystal layer includes two-color type pigment molecules 24 mixed in the liquid crystal. The absorption coefficient of the dichroic pigment depends on the orientation of the molecules. The alignment of the dichroic pigment molecules 24 is changed by changing the alignment of the liquid crystal molecules 25 by controlling the electric field between the counter electrode 10 and the pixel electrode 1. The change in the absorption coefficient of the dichroic pigment molecule 24 is used to produce an image display. Using the liquid crystal display panel of Example 1 having the foregoing structure, the display can be used in accordance with China National Standard (CNS) A4 (210 X 297 mm).
裝 訂Binding
A7A7
五、發明説明(16 ) 有效地利用光線,於環境光線低時利用穿透該透射電極區 2〇<來自後照光之光,而環境光線高時則利用由反射電極 區22所反射之光。而且,該透射電極區20及反射電極區22 兩區白可用於產生顯不。另外,可得到具有明亮顯示之液 晶顯示裝置。 此只施例中,圖素電極1之反射電極區22之金屬膜23覆 蓋誤薄膜電晶體4、閘極線2、及源極線3。不必提供遮光 膜以防止光線進入薄膜電晶體4,及該圖素電極位於該閘極 線、源極線及儲存電容器電極上之遮光部分。該等區域中 一易於特足顯示區域中產生功能區域、轉化線等形式之漏 光。結果,傳統上因被遮光膜所遮蔽而無法作為顯示區域 之區域可用為顯示區域。此種情況使該顯示區域得到有效 之利用。 當閘極線及源極線係由金屬製造時,其於透射型顯示裝 置中作為遮光區,而無法作為顯示區域。然而,於此實施 例之液晶顯示裝置中,該於習用透射型顯示裝置中作為遮 光區之區域可用於圖素電極之反射電極區。因此,可得到 較明亮之顯示。 此實施例中,該金屬膜23係位於透明導電膜门上。此情 況使孩金屬膜23具有與該透明導電膜21之不均勻表面相符 、不句勾表面省金屬膜之不均勻表面優於平面表面, 因為該不均勾表面接收各種入射角度之環境光線。形成之 液晶顯示裝置提供較明亮之顯示。 圖3及4係為本發明實施例丨之液晶顯示裝置之另一個具 • 19- 本紙張尺錢财_家料(—)城格⑼㈣的公爱了 509809 A7 B7 五、發明説明(Π 體實例的平面圖。於此等代用性具實施例中,各圖素電極i 之該透射電極區2 0相對於反射電極區2 2的面積比自圖i所 π者改變。根據此種方式,得到具有所需之反射性及透光 度之液晶顯示裝置。 於圖.3及4所示之代用性實施例中,該連接電極5係位於 反射電極區22中。此情況抑制通經該透射電極區2〇之光線 的亮度降低。 於實施例1中,該圖素電極i之反射電極區22之金屬膜23 係位於透明導電膜2 1上。或如圖6所示,該金屬膜2 3可僅 與為透明導電膜2 1部分地重疊,以彼此電性連接。 (實施例2 ) 於實施例2中,描述一種形成該金屬膜23之不均勾表面 之方法。 圖5係為部分說明位於該中間層絕緣膜19(未示)上之金屬 膜2 j之平面圖。圖6係為沿圖5之c _ d線所得之剖面圖。 Μ中間層絕緣膜1 9之表面係藉蝕刻等方法製成不均勻, 而於該不均勻表面上形成金屬膜23。 因此,藉著於先以旋轉塗佈等方法形成平面之中間層絕 緣膜19上形成金屬膜23,之後如前文所術般地使其表面不 均勻,可得到具有不均勾表面之金屬膜23。 於反射型液晶顯示裝置中,該金屬膜23之不均勻表面優 於平面表面,因為該不均勻表面接收各種角度之環境光。 因此,藉著於該中間層絕緣膜19上形成圖素電極丨之金屬 膜23,以具有如圖6所示之不均勾表面,形成之反射型液 -20- A7 ^~~一 B7_ 真、發明説明--—- 晶顯示裝置提供較明亮之顯示。 該金屬膜2 3之不均勺矣;丁时火闽ς % 、 J -J衣面不限於圖5所tr又形狀,即具 有圓型平面凹陷部分之表面。或該金屬膜23之表面及底層 中間層絕緣膜19之表面可具有平面多邊或橢圓型之凹陷部 分。薇凹陷部分之剖面可具有多邊形狀,以取代圖6所示之 半圓型。 (實施例3 ) 於實施例3中,描述採用賓主型顯示方法之液晶顯示裝置。 圖7係為本發明此實施例之液晶顯示裝置的剖面圖。與實 施例1相同之組件使用與圖2相同之編號表示。 採用賓主型顯示方法時,使用賓主型液晶材料之混合物 ,含有黑色顏料及0.5%之旋光性物質之ZLI 23 27(Merck & Co.,Inc·製造),S-811(Merck & Co.,Inc·製造),產 生以下問題。即,使用後照光時,若透射區中自照光透射 之光的光學路徑長度dt與該反射區中自環境光反射之光的 光學路徑長度2 dr差距極大,則使用來自後照光之光之情況 及使用環境光之情況之間,即使於液晶層施加相同電壓, 形成之顯示之亮度及對比的差異極大。 是故,液晶層位於透射區之透明導電膜21上之部分的厚 度dt及液晶.層位於反射區之金屬膜23上之部分的厚度dr應 設定於滿足關係d t = 2 d r。因此,於此實施例中,該金屬 膜2 3之厚度變成滿足此關係。 因此,藉著使透射區中自照光透射之光的光學路徑長度 dt與該反射區中自環境光反射之光的光學路徑長度2dr彼 -21 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 509809 A7 B7 五、發明説明(19 ) 此平衡,不論使用何種類型之光(來自後照光之光或來自環 境光之光),皆可得到實質相同之亮度及對比,先決條件為 於液晶層上施加相同電壓。根據此種方式,得到具有較佳 顯示特性之液晶顯示裝置。 藉著使透射區中自照光透射之光的光學路徑長度dt與該 反射區中自環境光反射之光的光學路徑長度2 dr約略相同-而非必要平衡-可得到平均至某一程度之亮度及對比。 不論使用何種類型之光(來自後照光之光或來自環境光之 光),亦可藉著改變施加於該液晶層之分配電壓將該對比調 成均勻,即使是透射區中自照光透射之光的光學路徑長度 dt與該反射區中自環境光反射之光的光學路徑長度2dr大 幅相異時亦然。 因此,於前述實施例1至3之液晶顯示裝置中,使用單一 基板進行透射模式顯示及反射模式顯示,傳統上使用黑色 掩模遮蔽光線之區域可用為各圖素電極之反射電極區。此 種情況可有效地利用液晶面板圖素電極的顯示區域,而增 加液晶顯示裝置之亮度。 於實施例1至3中,該儲存電容器電極可用以經由絕緣膜 與各圖素電極形成儲存電客為* ^而該圖素電極之反射電極 區覆蓋該儲存電容器電極。是故,形成儲存電容器電極之 區域可用於顯TF ’以作為圖素電極之反射電極區。 各圖素電極之反射電極區的金屬膜係位於透明導電膜上 。使用具有不均勻表面之透明導電膜,形成之圖素電極之 反射電極區具有不均句之表面,使其可利用具有各種入射 -22- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明(Μ ) 角之環境光作為顯示光。 各圖素電極之反射區之金屬膜可位於具有不均勻表面之 中間層絕緣膜。形成之圖素電極之反射電極區具有不均勻 表面,使其可利用具有各種入射角度之環境光以作為顯示 光。 各圖素電極之反射電極區之金屬膜較位於該圖素電極之 透射區中之透明導電膜厚。使環境光線穿過並返回液晶層 位於圖素電極之反射電極區中之部分之光徑長度,與來自 後照光之光線穿過液晶層位於圖素電極之透射電極區中之 部分之光徑長度約略相等,並彼此比較該路徑長度。藉著 瞭解該約略光徑長度,可調勻穿透位於該反射區及透射區 中之液晶層的光特性之變化。 液晶層位於各圖素電極之反射電極區上之部分的厚度係 為液晶層位於其透射電極區上之部分的厚度之一半。此可 使環境光線穿過並返回液晶層位於圖素電極之反射電極區 中之部分之光徑長度,與來自後照光之光線穿過液晶層位 於圖素電極之透射電極區中之部分之光徑長度約略相等, 並彼此比較該路徑長度。藉著明瞭該約略光徑長度,可調 勻穿透位於該反射區及透射區中之液晶層的光特性之變化。 (實施例4). 圖8 Α係為本發明實施例4液晶顯示裝置之主動陣列基板 之一圖素部分的平面圖。圖8 B係為沿圖8 A之A - A線所得 之剖面圖。 此實施例之主動陣列基板包括閘極線4 1、數據線4 2、驅 -23- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)V. Description of the invention (16) Effective use of light, use of light transmitted through the transmissive electrode area 20 when the ambient light is low, and light reflected by the reflective electrode area 22 when the ambient light is high . In addition, the two regions of the transmissive electrode region 20 and the reflective electrode region 22 can be used to generate a display. In addition, a liquid crystal display device having a bright display can be obtained. In this embodiment, the metal film 23 of the reflective electrode region 22 of the pixel electrode 1 covers the thin film transistor 4, the gate line 2, and the source line 3. It is not necessary to provide a light-shielding film to prevent light from entering the thin-film transistor 4, and the pixel electrode is located on the gate line, the source line, and the light-shielding portion of the storage capacitor electrode. One of these areas is apt to produce light leakage in the form of functional areas, conversion lines, etc. in the special display area. As a result, a region that cannot be used as a display region conventionally because it is shielded by a light-shielding film can be used as a display region. In this case, the display area is effectively used. When the gate line and the source line are made of metal, they serve as a light-shielding area in a transmissive display device, but cannot be used as a display area. However, in the liquid crystal display device of this embodiment, the area serving as the light shielding area in the conventional transmission type display device can be used as the reflective electrode area of the pixel electrode. Therefore, a brighter display can be obtained. In this embodiment, the metal film 23 is located on the transparent conductive film door. In this case, the metal film 23 has a non-uniform surface that conforms to the uneven surface of the transparent conductive film 21 and has a non-smooth surface. The non-uniform surface of the metal film is better than a flat surface because the uneven surface receives ambient light at various incident angles. The resulting liquid crystal display device provides a brighter display. Figures 3 and 4 are another example of a liquid crystal display device according to an embodiment of the present invention. 19- The paper rule money_Household (—) City grid's public love 509809 A7 B7 V. Description of the invention (II body A plan view of an example. In these alternative embodiments, the area ratio of the transmissive electrode region 20 to the reflective electrode region 22 of each pixel electrode i is changed from that in FIG. I. According to this method, we obtain A liquid crystal display device having the required reflectivity and transmittance. In the alternative embodiment shown in Figs. 3 and 4, the connection electrode 5 is located in the reflective electrode region 22. This condition inhibits passing through the transmissive electrode. The brightness of the light in the region 20 is reduced. In the embodiment 1, the metal film 23 of the reflective electrode region 22 of the pixel electrode i is located on the transparent conductive film 21. Or, as shown in FIG. 6, the metal film 2 3 It may only partially overlap with the transparent conductive film 21 to be electrically connected to each other. (Embodiment 2) In Embodiment 2, a method for forming an uneven hook surface of the metal film 23 is described. FIG. 5 is a part A plan view of the metal film 2 j on the interlayer insulating film 19 (not shown) will be described. FIG. 6 It is a cross-sectional view taken along line c_d in Fig. 5. The surface of the M interlayer insulating film 19 is made uneven by etching or the like, and a metal film 23 is formed on the uneven surface. Therefore, by Firstly, a metal film 23 is formed on the planar interlayer insulating film 19 by a method such as spin coating, and then the surface is made non-uniform as described above, and a metal film 23 having an uneven hook surface can be obtained. In a display device, the uneven surface of the metal film 23 is better than a flat surface because the uneven surface receives ambient light at various angles. Therefore, the metal film 23 of the pixel electrode is formed on the interlayer insulating film 19 With a non-uniform hook surface as shown in Figure 6, a reflective liquid -20- A7 ^ ~~ -B7_ true, description of the invention --- crystal display device provides a brighter display. The metal film 2 3 The uneven surface; Ding Shihuo Min%, J -J clothing surface is not limited to the shape shown in Figure 5, that is, the surface with a circular flat recessed portion. Or the surface of the metal film 23 and the bottom layer of the insulating film The surface of 19 may have a flat polygon or an oval depression The cross section of the recessed portion of Wei may have a polygonal shape instead of the semi-circular shape shown in FIG. 6. (Embodiment 3) In Embodiment 3, a liquid crystal display device using a guest-host display method is described. FIG. 7 is the present invention A cross-sectional view of the liquid crystal display device of this embodiment. The same components as in embodiment 1 are denoted by the same numbers as in FIG. 2. When the guest-host display method is used, a mixture of guest-host liquid crystal materials is used, which contains a black pigment and 0.5% optical rotation. ZLI 23 27 (manufactured by Merck & Co., Inc.) and S-811 (manufactured by Merck & Co., Inc.) have the following problems. That is, when the backlight is used, if the optical path length dt of the light transmitted by the self-illumination light in the transmission area is greatly different from the optical path length 2 dr of the light reflected from the ambient light in the reflection area, then the light from the backlight And the use of ambient light, even if the same voltage is applied to the liquid crystal layer, the resulting display brightness and contrast are extremely different. Therefore, the thickness dt of the portion of the liquid crystal layer on the transparent conductive film 21 in the transmission region and the thickness of the liquid crystal. The thickness dr of the portion of the layer on the metal film 23 in the reflection region should be set to satisfy the relationship d t = 2 d r. Therefore, in this embodiment, the thickness of the metal film 23 becomes to satisfy this relationship. Therefore, by making the optical path length dt of the light transmitted by the self-illuminated light in the transmission area and the optical path length of the light reflected from the ambient light in the reflection area 2dr-1 21-this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 509809 A7 B7 V. Description of the invention (19) This balance can obtain substantially the same brightness and contrast regardless of the type of light (light from backlight or light from ambient light). The condition is that the same voltage is applied to the liquid crystal layer. According to this method, a liquid crystal display device having better display characteristics is obtained. By making the optical path length dt of the light transmitted by the self-illuminating light in the transmission area and the optical path length 2 dr of the light reflected from the ambient light in the reflection area approximately the same-not necessary to balance-the brightness averaged to a certain degree can be obtained And contrast. No matter what type of light is used (light from backlight or light from ambient light), the contrast can be made uniform by changing the distribution voltage applied to the liquid crystal layer, even if the self-illumination light is transmitted in the transmission area. The same is true when the optical path length dt of the light is significantly different from the optical path length 2dr of the light reflected from the ambient light in the reflection area. Therefore, in the liquid crystal display devices of the foregoing embodiments 1 to 3, a single substrate is used for the transmission mode display and the reflection mode display, and the area traditionally shielded by a black mask can be used as the reflective electrode area of each pixel electrode. In this case, the display area of the pixel electrodes of the liquid crystal panel can be effectively used, and the brightness of the liquid crystal display device can be increased. In Embodiments 1 to 3, the storage capacitor electrode can be used to form a storage electric guest with each pixel electrode through an insulating film, and the reflective electrode region of the pixel electrode covers the storage capacitor electrode. Therefore, the area where the storage capacitor electrode is formed can be used to display TF 'as the reflective electrode area of the pixel electrode. The metal film of the reflective electrode region of each pixel electrode is located on the transparent conductive film. Using a transparent conductive film with an uneven surface, the reflective electrode area of the pixel electrode formed has an uneven surface so that it can be used with a variety of incidences. 22- This paper is compliant with China National Standard (CNS) A4 specifications (210 X 297 mm) 509809 A7 B7 5. The ambient light at the angle of the description of the invention (M) is used as the display light. The metal film of the reflective region of each pixel electrode may be located on the interlayer insulating film having an uneven surface. The reflective electrode area of the formed pixel electrode has a non-uniform surface, so that it can use ambient light with various incident angles as display light. The metal film in the reflective electrode region of each pixel electrode is thicker than the transparent conductive film in the transmissive region of the pixel electrode. Ambient light passes through and returns the length of the light path of the portion of the liquid crystal layer located in the reflective electrode area of the pixel electrode, and the length of the light path of the light from the backlight passing through the liquid crystal layer in the portion of the transparent electrode area of the pixel electrode. Approximately equal, and compare the path length to each other. By knowing the approximate optical path length, it is possible to adjust uniformly the change in the light characteristics of the liquid crystal layer located in the reflection region and the transmission region. The thickness of the portion of the liquid crystal layer located on the reflective electrode region of each pixel electrode is half of the thickness of the portion of the liquid crystal layer located on the transmissive electrode region. This allows ambient light to pass through and return the light path length of the portion of the liquid crystal layer located in the reflective electrode area of the pixel electrode, and light from the backlight passing through the portion of the liquid crystal layer located in the transparent electrode area of the pixel electrode The path lengths are approximately equal and the path lengths are compared to each other. By knowing the approximate optical path length, it is possible to uniformly change the light characteristics of the liquid crystal layer located in the reflection region and the transmission region. (Embodiment 4) FIG. 8A is a plan view of a pixel portion of an active array substrate of a liquid crystal display device according to Embodiment 4 of the present invention. Fig. 8B is a sectional view taken along line A-A in Fig. 8A. The active array substrate of this embodiment includes gate line 4 1, data line 4 2, drive -23- This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm)
動元件4 J汲極4 4、儲存電容器電極4 5、閘極絕緣膜4 6 、’、巴、、彖基板4 7、接觸孔4 8、中間層絕緣膜4 9、反射圖素電 極5 0、及透射圖素電極51 〇 每個儲存電客器電極45係電性連接於對應之汲極44,並 經由閘極絕緣膜46與閘極線41重疊。該接觸孔“係穿透該 中間層絕緣膜49,而與該透射圖素電極51及儲存電容器電 極45連接。 具有前述結構之主動陣列基板之每個圖素皆包括反射圖 素電極50及透射圖素電極51。因此,如圖8B所示,每個 圖素皆包括反射電極區,包括反射圖素電極5〇,其反射外 來光線,包括透射圖素電極51,其透射來自後照光之光線。 圖9係為此實施例之液晶顯示裝置之剖面圖,包括圖8 a 及8 B所tf足王動陣列基板。該液晶顯示裝置亦包括濾色層 53、對電極54、液晶層55、對正膜56、偏光板57、及後 照光5 8。 該透射圖素電極5 1 (透射電極區)使來自後照光5 8之光線 穿透4區域在薇後照光5 8斷開時對面板之亮度無貢獻。相 反地’反射圖素電極(反射電極區)反射外來光線之區域不 論該後照光5 8係為連通/斷開狀態,皆可增加該面板之亮度 。因此’於·每個圖素中,反射電極區之面積大於該透射電 極區之面積。 於此貫施例中,該反射圖素電極5 0係位於對應透射圖素 電極5 1上’以彼此電性連接,以於該反射圖素電極5 〇及該 透射圖素電極51上施加相同信號。或該反射圖素電極5〇及 -24- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公愛)Moving element 4 J drain electrode 4 4. Storage capacitor electrode 4 5. Gate insulation film 4 6 ′, bar, 彖 substrate 4 7. Contact hole 4 8. Interlayer insulation film 4 9. Reflective pixel electrode 5 0 And the transmissive pixel electrode 51. Each of the storage guest electrodes 45 is electrically connected to a corresponding drain electrode 44 and overlaps the gate line 41 through a gate insulating film 46. The contact hole "penetrates through the interlayer insulating film 49 and is connected to the transmission pixel electrode 51 and the storage capacitor electrode 45. Each pixel of the active array substrate having the aforementioned structure includes a reflection pixel electrode 50 and a transmission Pixel electrode 51. Therefore, as shown in FIG. 8B, each pixel includes a reflective electrode region including a reflective pixel electrode 50, which reflects external light, including a transmissive pixel electrode 51, which transmits light from the backlight Fig. 9 is a cross-sectional view of the liquid crystal display device of this embodiment, including the tf foot motion array substrate shown in Figs. 8a and 8B. The liquid crystal display device also includes a color filter layer 53, a counter electrode 54, a liquid crystal layer 55, The alignment film 56, the polarizing plate 57, and the backlight 58. The transmissive pixel electrode 5 1 (transmission electrode region) allows light from the backlight 5 8 to pass through 4 areas, and the panel is faced when the backlight 5 8 is turned off. The brightness of the panel does not contribute. On the contrary, the area where the reflective pixel electrode (reflective electrode area) reflects external light can increase the brightness of the panel regardless of whether the backlight 5 8 is in the on / off state. In the pixel, The area is larger than the area of the transmissive electrode region. In this embodiment, the reflective pixel electrode 50 is located on the corresponding transmissive pixel electrode 51 to be electrically connected to each other so that the reflective pixel electrode 50 and The same signal is applied to the transmissive pixel electrode 51. Or the reflective pixel electrode 50 and -24- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love)
裝 訂Binding
509809 A7 B7 五、發明説明(22509809 A7 B7 V. Description of the invention (22
孩透射圖素電極5 1未彼此電性連接,以接收用於不同之颟 示之不同信號。 ^ 於圖9所示之液晶顯示裝置中,來自後照光“而入射於 反射圖素電極50上之部分光線無法用為顯示光線。為了克 服此種.問題,圖10所顯示之經修飾液晶顯示裝置包括用於 各圖素之微型透鏡59及微型透鏡保護層60。使用此種結構 ,來自後照光5 8之光經由微型透鏡5 9聚集於透射電極區未 形成反射圖素電極50之部分,增加透過透射區之光量,而 改善顯示亮度。 圖1 1 A係為本發明實施例4之液晶顯示裝置取代性主動陣 列基板之一圖素部分的平面圖。圖1 1 B係為沿圖1 1 a之b _ B線所得之剖面圖。 於圖11A及11B所示之主動陣列基板中,各圖素之透射 圖素電極51區域及反射圖素電極5〇之區域與圖8A及8B所 示之主動陣列基板相反。反射圖素電極5 0之區域的面積與 透射圖素電極5 1區域之面積之比例可適當地改變。 當圖8A及8B所示之主動陣列基板與圖1 1A及1 1B所示者 比較時’圖8A及8B所示之主動陣列基板之優點係因為該 反射圖素電極50係位於驅動元件43上而防止外來光線進入 該驅動元件43,而因為該透射圖素電極5 1區域係位於各圖 素之中心而較容易形成用以聚集光線之微型透鏡5 9。 此實施例中,因為反射區及透射區係位於一圖素中,故 該圖素之鏡孔比儘可能地大。為滿足此種需求,此實施例 採用高鏡孔比結構,其中包括有機絕緣膜之中間層絕緣膜 -25- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐)The transmissive pixel electrodes 51 are not electrically connected to each other to receive different signals for different indications. ^ In the liquid crystal display device shown in FIG. 9, part of the light from the backlight “but incident on the reflective pixel electrode 50 cannot be used as display light. In order to overcome this problem, the modified liquid crystal display shown in FIG. 10 The device includes a microlens 59 and a microlens protective layer 60 for each pixel. With this structure, light from the backlight 58 is collected via the microlens 59 on the portion of the transmission electrode region where the reflective pixel electrode 50 is not formed, Increasing the amount of light transmitted through the transmission area to improve display brightness. Figure 1 A is a plan view of a pixel portion of a replacement active array substrate for a liquid crystal display device according to Embodiment 4 of the present invention. Figure 1 1 B is a view along Figure 1 1 The cross-sectional view taken along line b_b of a. In the active array substrate shown in Figs. 11A and 11B, the area of the transmitted pixel electrode 51 and the area of the reflective pixel electrode 50 of each pixel are shown in Figs. 8A and 8B. The active array substrate is opposite. The ratio of the area of the reflective pixel electrode 50 to the area of the transmissive pixel electrode 51 can be appropriately changed. When the active array substrate shown in FIGS. 8A and 8B is the same as that shown in FIGS. 1A and 1 Comparison shown in 1B 'The advantage of the active array substrate shown in FIGS. 8A and 8B is that the reflective pixel electrode 50 is located on the driving element 43 to prevent external light from entering the driving element 43, and because the transmissive pixel electrode 51 area is located in each The center of the pixel makes it easier to form a micro lens 59 for collecting light. In this embodiment, because the reflection area and the transmission area are located in a pixel, the pixel aperture ratio of the pixel is as large as possible. To meet this demand, this embodiment uses a high mirror-to-hole ratio structure, which includes an interlayer insulating film of an organic insulating film-25. This paper size applies to China National Standard (CNS) A4 specifications (210X 297 mm)
裝 訂Binding
線 A7 B7 五、發明説明(23 ) 4 9係夾置於圖素電極與閘極線4丨及源極線4 3之間。亦可採 用其他結構。 (實施例5 ) 圖1 2 A係為本發明實施例5液晶顯示裝置之主動陣列基板 之一圖素部分的平面圖。圖12B係為沿圖12a之C-C線所 得之剖面圖。 於實施例5之主動陣列液晶顯示裝置中,於中間層絕緣膜 4 9之傾斜或凹陷部分及隆凸部分上形成反射圖素電極5〇。 外來光線因而自反射圖素電極5〇反射於寬幅配向範圍内, 故可見角度變寬。 此實施例中,中間層絕緣膜4 9位於閘極線4丨及源極線4 2 上之部分最厚,而位於汲極44上之部分完全蝕刻,形成傾 斜或凹陷部分及隆凸部分。此情況消除形成用以使汲極44 與反射圖素電極5 〇電性連接之接觸孔的必要,而防止因為 接觸孔陡峭階度而使液晶分子配向紊亂。此種情況增加鏡孔 比。 於此實施例中,汲極44係為由氧化銦錫製造之透明電極 ,作為透射圖素電極51。 該傾斜部分之傾斜角或該中間層絕緣膜49之凹陷部分及 隆凸部分應小至可於形成之基板上形成對正膜並摩擦。因 此’最佳條件應根據個別摩擦條件及液晶分子類型決定。 於此實施例中,如同實施例4,可於汲極4 4下層提供微 型透鏡以作為透射圖素電極5 1,而改善連通後照光時之顯 示亮度。 ^ -26· 本紙張尺度適财賴^^(CNS)鐵格“ χ挪公爱) 509809 A7 B7 五、發明説明(24 ) (實施例6 ) 圖Ϊ3Α係為本發明實施例6液晶顯示裝置之主動陣 之圖素部分之平面圖。圖13B係為、 M 你為/口圖1〕A又D-D線所得 之剖面圖。 * 此實施例中,於相同步驟中,於與閉極線41相同之高产 形成反射圖素電極5G。使用此種結構,因為不需要用:ς 成反射圖素電極50之個別步驟,故不需增加步驟數目及製 造成本。 於此實施例中,該反射圖素電極5G不連m構成驅動元 件43之汲極44 ’但僅用於反射外來光線。僅有透射圖素電 極5 1作為用以驅動液晶之電極。換言之,由反射圖素電極 50所反射之光的透光度係藉著使用透射圖素電極51之電壓 控制該液晶層而控制。 若未輸入信號於各反射圖素電極5〇,則反射圖素電極5〇 與對應汲極44或透射圖素電極51間產生浮動電容。為了避 免此種問題,反射圖素電極5〇應具有不會對顯示產生負面 影響之仏號。藉著使各反射圖素電極5 〇與相鄰閘極線4丨連 接,可避免形成浮動電容,而可於反射圖素電極5〇與對應 之汲極44之間形成儲存電容器。 此實施例中,如同實施例4,微型透鏡可使光線會聚於透 射圖素電極上,而改善該後照光連通時之顯示亮度。 此實施例中,因為亦於一圖素形成反射區及透射區,故 該圖素之鏡孔比儘可能地大。為了滿足此項要求,採用高 鏡孔比結構,其中使用有機絕緣膜作為中間層絕緣膜。亦 -27- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 ^----— — 一 B7 五、發明説明(25 ) ~ ^ 可採用其他結構。 (實施例7) 圖1 4 A係為本發明實施例7液晶顯示裝置之主動陣列基板 之一圖素部分的平面圖。圖丨4 B係為沿圖丨4 a之e - F線所 得之剖.面圖。 此實施例中’反射圖素電極5 〇係於與源極線4 2相同之高 度形成。使用此種結構,因為可於形成該源極線4 2時形成 反射圖素電極50,故不增加步驟數目及製造成本。 此實施例中’因為採用穿透該中間層絕緣膜49之高鏡孔 比結構’故反射圖素電極5 〇僅用於反射外來光線。僅有透 射圖素電極51作為用以驅動液晶之電極。 此實施例與實施例6相異處為各圖素中之反射圖素電極 5 0係電性連接於對應之汲極4 4。於另一種情況下,其中汲 極44上未形成中間層絕緣膜49,而汲極44作為透射圖素電 極,該反射圖素電極5 0亦用以驅動液晶分子。 此實施例中,如用實施例4,可提供微型透鏡以將光線會 聚於透射圖素電極5 1上,而於連通後照光時改善顯示亮度。 而且’此實施例中,因為於一圖素中形成反射區及透射 區,故該鏡孔比儘可能地大。為了滿足此種條件,採用以 有機絕緣膜作為中間層絕緣膜之高鏡孔比結構。亦可採用 其他結構。 因此,於本發明實施例4至7中,得到可於反射型及透射 型間切換之主動陣列型液晶顯示裝置。 該液晶顯示裝置可由使用者根據使用條件於透射型及反 -28- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明(26 ) 射型間切換使用模式,而提供與使用條件無關之充分亮度 ,同時降低能量消耗及延長使用時間。 亦得到一種透射型/反射型可切換主動陣列液晶顯示裝置 ,其可於環境明亮下用為反射型液晶顯示裝置,而於環境 黑暗下用為透射型液晶顯示裝置。 因為該反射圖素電極及該透射圖素電極彼此電性連接, 不需個別提供驅動信號之互連。此者簡化該主動陣列基板 之結構。 於該驅動元件上層形成反射圖素電極時,防止外來光線 進入該驅動元件。 透射圖素電極於該後照光斷開時對該面板之亮度無貢獻 ,而該反射圖素電極不論該後照光係為連通/斷開狀態,皆 對面板亮度有所貢獻。是故,藉著增加反射圖素電極之面 積,即使該後照光斷開或放射較少光線,皆可使顯示亮度 安定化。 來自後照光而被反射圖素電極、閘極線等物所阻斷之光 可會聚於該透射圖素電極上。如此一來可於不增加後照光 本身之亮度下增加顯示裝置之亮度。 該反射圖素電極可反射寬幅配向之外來光線。故可得到 較寬之可見角度。 該反射圖素電極可於不添加額外步驟下形成。如此可防 止步驟數目及製造成本增加。 該反射圖素電極可電性連接於閘極線。此防止產生浮動 電容,而可形成具有汲極之儲存電容器。 -29- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 509809 A7 —-_____B7 五、發明説明(27 ) 孩反射圖素電極可具有與對電極相同之信號。此防止浮 動電客產生。而且,該反射圖素電極可用以形成供施加於 圖素電極之電壓所使用之儲存電容器。 (實施例8 ) 實施例8中,描述本發明反射/透射型液晶顯示裝置。 首先,描逑實施例8之液晶顯示裝置中產生干擾色之原理。 圖2 3係為說明產生干擾色之概念圖。光係入射於玻璃基 板上’入射光由反射膜反射,而自該玻璃基板輸出。 於前述情況下,當於入射角入射之光自反射膜之隆凸 部分及凹陷部分反射而於輸出角0〇輸出時,視為產生干擾 色。兩反射光束之光徑差5係以下式(1 )表示: 其中0 i ’係為反射膜之凹陷部分的入射角,0 〇 ·係為反射 膜之凹陷部分,L係為兩光束於玻璃基板上之入射點間的 距離,h係為該反射膜之凹陷部分反射該光束之點相對於該 反射膜之凹陷部分反射另一光束之點的高度,而η係為玻璃 基板之折射率。 因為式(1)僅有於βί: 且6^· = <9〇·時方可計算,故 當6^=(90=0而6^’=0〇’=(9·時,該光徑差5簡化成 下式(2): -30- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 發明説明(28 δ = 1ι { 2n/c 〇 sG,— 2 tane · · sin0 }......(2) 當任意波長λΐ及;12列入考慮時,自該隆凸部分及凹陷 部分所反射之輸出光束於5/λ l==m±l/2(m使為整數)睛 彼此減弱,而於δ / λ 2 = m時彼此增強。因此,得到下式 (3)。 δ = (1/λ1 — 1/λ2)=1/2.......(3) 上式(3)亦表示為下式(4): δ = (λ1 · λ2) /2 · (λ2 —λΐ).......(4) 疋故,根據觔式(2)及(4) ’該向度h可表示為下式(5): 根據前式,發現為了避免產生干擾色,該反射膜之反射 表面應具有連續波型。 於此實施例中,為了形成該反射膜,於基板上形成至少 兩種具有不同高度之隆凸部分,於該基板上形成覆蓋該隆 凸部分之聚合物樹脂膜,而於該聚合物樹脂膜上形成由具 有高反射效專之材料所製造之反射薄膜。 所製造之反射薄膜可用於反射/透射型液晶顯示裝置之反 射部分。因為該反射部分具有連續波型之反射表面,故可 防止自該反射部分反射之光產生干擾。利用光掩模光學形 成隆凸部分時,其可藉著設定相同之照光條件而於良好再 -31 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 509809 A7 —- ______B7 五、發明説明(^ ) ——— '" 現性下形成。 於此實施例之反射/透射型液晶顯示裝置中,由具有高透 射效率之材料所製造之透射部分中不形成隆凸部分,以改 善Μ透射效率。然而,即使於該透射部分中形成隆凸部分 ,仍可利用透射光顯示。 圖1 5係為本發明實施例之反射/透射型液晶顯示裝置之剖 面圖。 參照圖1 5,於玻璃基板6 1上形成閘極絕緣膜6丨α。於該 玻璃基板61位於具有反光功能之反射電極69下層之部分上 任意形成高隆凸部分64a及低隆凸部分64b。該高隆凸部分 64a及低隆凸部分64b覆以聚合物樹脂膜65。 因為該高隆凸部分6 4 a及低隆凸部分6 4 b係經由該閘極絕 緣膜61a而於玻璃基板61上形成,故該聚合物樹脂膜65位 於該高隆凸部分64a及低隆凸部分64b上之部分的上表面具 有連續波型。該聚合物樹脂膜65幾乎位於該玻璃基板61之 所有表面上,而非僅位於該反射電極69之下層區域中。 該反射電極6 9由具有高反射功能之材料製造,係位於聚 合物樹脂膜65具有連續波型而位於該高隆凸部分6“及低 隆凸部分64b上之部分上。 透射電極.6 8亦經由該閘極絕緣膜6 1 a而位於該玻璃基板 61上,與該反射電極69分離。該透射電極68係由具有高透 光功能之材料製造,諸如氧化銦錫(ITO)。 偏光板9 0係於裝置為模組時附加於所製造之主動陣列基 板的背面上。之後將後照光9 1置於該偏光板90上。 -32- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 _______ B7 五、發明説明(30~~) 自該後照光9 1放射而指向該透射電極6 8之部分光線通經 該透射電極6 8及後續之主動陣列基板。然而,有部分照向 反射電極69之光係自反射電極69之背面反射至該後照光91 。因為反射電極6 9之背面具有連續波型,故來自該反射電 極6 9之反射光如圖1 5之箭號所示般地散射。該散射光再自 後照光9 1反射至主動陣列基板。該光線之一部分通經該透 射電極6 8,及後續之主動陣列基板。 因此,於包括具有前述形狀之反射電極69之主動陣列基 板中,來自後照光而由反射電極69反射之光可用於顯示。 與習用透射型液晶顯示裝置不同地,此可較實際鏡孔比所 預測者更有效地利用光線。詳言之,若該反射電極具有平 面形狀’主要產生矩型反射,則其難以再次反射而通經該 透射電極6 8。然而,此實施例中,具有連續波型之反射電 極6 9用以使反射光返回該後照光位於該透射電極6 8下層之 部分,而更有效地利用光線。 圖1 6係為顯示當反射電極6 9及後照光9 1之反射性與標準 白板比較下約9 0 %,而該偏光板9 0之透光度約4 0 %時,該 鏡孔比相對於透光度及反射性之關係的圖。此關係係假設 圖素電極覆蓋整體顯示表面,而不考慮匯流排線及主動元 件之存在性下計算。 如圖1 6所示,用於自外部入射於對基板側面上之光的反 射電極6 9之反射性係藉著該反射電極6 9之反射性乘以該反 射電極6 9面積相對於該整體圖素電極面積之比例而計得。 用於來自後照光9 1之透射電極6 8之透光度並非恰等於該鏡 -33- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 509809 A7 B7 ) 五、發明説明(3l 孔比a (即透射電極6 8面積相對於整體圖素電極面積之比例 ),而為值b ,包括來自後照光而由反射電極$ 9所反射之光 分量’其可用為添加於該鏡孔比a之顯示。 因此,與習用透射型液晶顯示裝置不同地,因為來自後 照光9 1而由該反射電極6 9反射之光亦被利用,故可較實際 鏡孔比所預測者更有效地利用光線。 圖1 7係為顯示鏡孔比與透射效率間之關係(透光度/鏡孔 比)之圖。如圖17所示,根據該計算得知,當該鏡孔比係為 4 0 %時’來自後照光9 1而由反射電極6 9所反射之光之利用 率南達直接自該後照光9 1通過透射電極6 8之光強度的5 0 % 。根據圖1 7所示之計算值,亦發現該反射電極6 9面積相對 於整體圖素電極面積之比例愈大,由該反射電極6 9所反射 之光的利用率愈高。 下文將描述實施例8反射型/透射型液晶顯示裝置之特例。 圖1 8係為本發明實施例8反射型/透射型液晶顯示裝置之 平面圖。圖19A至19F係為沿圖18之F-F線所得之剖面圖 ,說明此實施例液晶顯示裝置之製造方法。 參照圖1 8及1 9 F ’該反射型/透射型液晶顯示裝置之主動 陣列基板包括多條作為掃描線之閘極匯流排線7 2及多條作 為信號線之源極匯流排線7 4,其係彼此交叉。於由相鄰閘 極匯流排線72及相鄰源極匯流排線74所環繞之各個矩型區 域中,放置由具有高透光效率之材料所製造之透射電極68 及由具有高反射性之材料所製造之反射電極69。該透射電 極68及反射電極69構成一個圖素電極。 -34- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐)Line A7 B7 V. Description of the Invention (23) The 4-9 series is sandwiched between the pixel electrode and the gate line 4 丨 and the source line 43. Other structures can also be used. (Embodiment 5) FIG. 12A is a plan view of a pixel portion of an active array substrate of a liquid crystal display device according to Embodiment 5 of the present invention. Fig. 12B is a sectional view taken along the line C-C of Fig. 12a. In the active matrix liquid crystal display device of Embodiment 5, a reflective pixel electrode 50 is formed on the inclined or recessed portion and the raised portion of the interlayer insulating film 49. The external light is thus reflected by the reflective pixel electrode 50 within a wide alignment range, so the visible angle becomes wider. In this embodiment, the portion of the interlayer insulating film 49 located on the gate line 4 丨 and the source line 4 2 is the thickest, and the portion located on the drain 44 is completely etched to form an inclined or recessed portion and a raised portion. This situation eliminates the need to form a contact hole for electrically connecting the drain 44 to the reflective pixel electrode 50, and prevents disordered alignment of liquid crystal molecules due to the steep order of the contact hole. This situation increases the mirror-to-hole ratio. In this embodiment, the drain electrode 44 is a transparent electrode made of indium tin oxide and is used as the transmission pixel electrode 51. The inclination angle of the inclined portion or the depressed portion and the raised portion of the interlayer insulating film 49 should be small enough to form an alignment film on the formed substrate and rub it. Therefore, the optimal conditions should be determined based on the individual friction conditions and the type of liquid crystal molecules. In this embodiment, as in Embodiment 4, a micro-lens can be provided under the drain 44 as the transmission pixel electrode 51 to improve the display brightness when the backlight is connected. ^ -26 · The paper size is suitable for financial reasons ^^ (CNS) iron grid "χ Norwegian public love" 509809 A7 B7 V. Description of the invention (24) (Embodiment 6) Figure Ϊ3A is a liquid crystal display device according to Embodiment 6 of the present invention Figure 13B is a plan view of the pixel portion of the active matrix. Figure 13B is a cross-sectional view taken along the line A and DD. * In this embodiment, in the same step, it is the same as the closed pole line 41. The high-yield formation of the reflective pixel electrode 5G. With this structure, because the individual steps of forming the reflective pixel electrode 50 are not needed, there is no need to increase the number of steps and manufacturing costs. In this embodiment, the reflective pixel The electrode 5G is not connected to the drain 44 ′ of the driving element 43, but only for reflecting external light. Only the transmissive pixel electrode 51 is used as an electrode for driving the liquid crystal. In other words, the light reflected by the reflective pixel electrode 50 is The light transmittance is controlled by controlling the liquid crystal layer using the voltage of the transmissive pixel electrode 51. If no signal is input to each reflective pixel electrode 50, the reflective pixel electrode 50 and the corresponding drain electrode 44 or transmission image Floating capacitance is generated between the element electrodes 51. To avoid this problem The reflective pixel electrode 50 should have a sign that will not have a negative impact on the display. By connecting each reflective pixel electrode 50 to the adjacent gate line 4 丨, the formation of floating capacitance can be avoided, and the reflection A storage capacitor is formed between the pixel electrode 50 and the corresponding drain electrode 44. In this embodiment, as in Embodiment 4, the micro lens can focus light on the transmitted pixel electrode, thereby improving the display brightness when the backlight is connected. In this embodiment, because the reflective area and the transmissive area are also formed on a pixel, the pixel hole ratio of the pixel is as large as possible. In order to meet this requirement, a high mirror hole ratio structure is used, in which an organic insulating film is used As an interlayer insulating film. Also-27- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 ^ ----— — One B7 V. Description of the invention (25) ~ ^ Yes Other structures are used. (Embodiment 7) Fig. 14A is a plan view of a pixel portion of an active array substrate of a liquid crystal display device according to Embodiment 7 of the present invention. Fig. 4B is e-F along Fig. 4a The cross-section and surface view obtained from the line. The electrode 50 is formed at the same height as the source line 42. With this structure, since the reflective pixel electrode 50 can be formed when the source line 42 is formed, the number of steps and manufacturing cost are not increased. This implementation In the example, 'because of the high mirror-hole ratio structure that penetrates the interlayer insulating film 49', the reflective pixel electrode 50 is only used to reflect external light. Only the transmissive pixel electrode 51 is used as an electrode for driving the liquid crystal. The difference between the embodiment and the embodiment 6 is that the reflective pixel electrode 50 in each pixel is electrically connected to the corresponding drain electrode 44. In another case, the intermediate layer insulating film is not formed on the drain electrode 44 49, and the drain 44 is a transmissive pixel electrode, and the reflective pixel electrode 50 is also used to drive liquid crystal molecules. In this embodiment, as in Embodiment 4, a microlens can be provided to focus light on the transmissive pixel electrode 51, and to improve display brightness when the backlight is connected. Moreover, in this embodiment, since the reflection region and the transmission region are formed in one pixel, the mirror hole ratio is as large as possible. In order to satisfy such a condition, a high mirror hole ratio structure using an organic insulating film as an interlayer insulating film is adopted. Other structures can also be used. Therefore, in Embodiments 4 to 7 of the present invention, an active matrix liquid crystal display device capable of switching between a reflective type and a transmissive type is obtained. The liquid crystal display device can be used by the user in transmissive and anti--28 according to the conditions of use. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 B7 V. Description of the invention (26) Switch the use mode, and provide sufficient brightness regardless of the use conditions, while reducing energy consumption and extending the use time. A transmissive / reflective switchable active-array liquid crystal display device is also obtained, which can be used as a reflective liquid crystal display device in a bright environment and as a transmissive liquid crystal display device in a dark environment. Because the reflective pixel electrode and the transmissive pixel electrode are electrically connected to each other, there is no need to provide an interconnection of the driving signal separately. This simplifies the structure of the active array substrate. When a reflective pixel electrode is formed on the upper layer of the driving element, external light is prevented from entering the driving element. The transmissive pixel electrode does not contribute to the brightness of the panel when the backlight is turned off, and the reflective pixel electrode contributes to the brightness of the panel regardless of whether the backlight is on / off. Therefore, by increasing the area of the reflective pixel electrode, even if the backlight is cut off or less light is emitted, the display brightness can be stabilized. The light from the backlight which is blocked by the reflective pixel electrode, the gate line, etc. can be converged on the transmissive pixel electrode. In this way, the brightness of the display device can be increased without increasing the brightness of the backlight. The reflective pixel electrode can reflect external light with a wide orientation. Therefore, a wider viewing angle can be obtained. The reflective pixel electrode can be formed without adding additional steps. This prevents an increase in the number of steps and manufacturing costs. The reflective pixel electrode can be electrically connected to the gate line. This prevents the generation of floating capacitance, and can form a storage capacitor with a drain. -29- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 509809 A7 —-_____ B7 V. Description of the invention (27) The reflective pixel electrode can have the same signal as the counter electrode. This prevents floating electric guests. Moreover, the reflective pixel electrode can be used to form a storage capacitor for use in a voltage applied to the pixel electrode. (Embodiment 8) In Embodiment 8, a reflection / transmission type liquid crystal display device of the present invention is described. First, the principle of generating interference colors in the liquid crystal display device of Example 8 will be described. Figures 2 and 3 are conceptual diagrams illustrating the generation of interference colors. Light is incident on the glass substrate. The incident light is reflected by the reflective film and output from the glass substrate. In the foregoing case, when the light incident at the incident angle is reflected from the convex and concave portions of the reflective film and output at the output angle 0, it is considered to produce an interference color. The light path difference between the two reflected light beams is represented by the following formula (1): where 0 i 'is the incident angle of the concave portion of the reflective film, 0 0 · is the concave portion of the reflective film, and L is the two light beams on the glass substrate. The distance between the incident points above, h is the height of the point where the concave portion of the reflective film reflects the light beam relative to the point where the concave portion of the reflective film reflects another light beam, and η is the refractive index of the glass substrate. Because formula (1) is only βί: and 6 ^ · = < 9〇 · can be calculated, when 6 ^ = (90 = 0 and 6 ^ '= 0〇' = (9 ·, the light The diameter difference 5 is simplified into the following formula (2): -30- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Description of the invention (28 δ = 1ι {2n / c 〇sG, — 2 tane · · Sin0} ...... (2) When arbitrary wavelengths λΐ and; 12 are considered, the output beam reflected from the convex and concave portions is at 5 / λ l == m ± l / 2 (m is made to be an integer) eyes weaken each other, and strengthen each other at δ / λ 2 = m. Therefore, the following formula (3) is obtained. δ = (1 / λ1 — 1 / λ2) = 1/2 .... ... (3) The above formula (3) is also expressed as the following formula (4): δ = (λ1 · λ2) / 2 · (λ2 —λΐ) ....... (4) Equations (2) and (4) 'The direction h can be expressed as the following equation (5): According to the foregoing equation, it is found that in order to avoid interference colors, the reflective surface of the reflective film should have a continuous wave type. In this embodiment, In order to form the reflective film, at least two convex portions having different heights are formed on a substrate, and a polymer resin film covering the convex portions is formed on the substrate. A reflective film made of a material with high reflectivity is formed on the polymer resin film. The manufactured reflective film can be used for the reflective portion of a reflective / transmissive liquid crystal display device because the reflective portion has a continuous wave type reflection Surface, it can prevent the light reflected from the reflection part from interfering. When the convex part is formed optically by using a photomask, it can be good again by setting the same illumination conditions. CNS) A4 specification (210X 297 mm) 509809 A7 —- ______B7 V. Description of the invention (^) ——— '" Formed under current conditions. In the reflection / transmission type liquid crystal display device of this embodiment, The ridges and convexes are not formed in the transmissive portions made of the transmissive material to improve the M transmission efficiency. However, even if the ridges and convexes are formed in the transmissive portion, the transmitted light can still be displayed. A cross-sectional view of an example reflection / transmission type liquid crystal display device. Referring to FIG. 15, a gate insulating film 6 丨 α is formed on a glass substrate 61. The glass substrate 61 is located at Highly convex portions 64a and low convex portions 64b are arbitrarily formed on portions of the lower layer of the reflective electrode 69 having a reflective function. The high convex portions 64a and low convex portions 64b are covered with a polymer resin film 65. Because the high convex portions The portion 6 4 a and the low ridge portion 6 4 b are formed on the glass substrate 61 through the gate insulating film 61 a. Therefore, the polymer resin film 65 is located on the high ridge portion 64 a and the low ridge portion 64 b. The upper surface of the portion has a continuous wave pattern. The polymer resin film 65 is located on almost all surfaces of the glass substrate 61, and not only in the lower layer region of the reflective electrode 69. The reflective electrode 69 is made of a material having a high reflection function, and is located on a portion of the polymer resin film 65 having a continuous wave shape on the high ridge portion 6 "and the low ridge portion 64b. The transmission electrode .6 8 It is also located on the glass substrate 61 via the gate insulating film 6 1 a, and is separated from the reflective electrode 69. The transmissive electrode 68 is made of a material having a high light transmitting function, such as indium tin oxide (ITO). Polarizing plate 9 0 is attached to the back of the manufactured active array substrate when the device is a module. After that, the backlight 9 1 is placed on the polarizing plate 90. -32- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 509809 A7 _______ B7 V. Description of the invention (30 ~~) Part of the light emitted from the backlight 9 1 and directed to the transmission electrode 6 8 passes through the transmission electrode 68 and the subsequent active array substrate However, a part of the light directed toward the reflective electrode 69 is reflected from the back surface of the reflective electrode 69 to the back light 91. Since the back surface of the reflective electrode 69 has a continuous wave shape, the reflected light from the reflective electrode 69 is shown in FIG. The arrows of 5 scatter as shown. The scattered light is then reflected from the backlight 91 to the active array substrate. A part of the light passes through the transmission electrode 68 and the subsequent active array substrate. Therefore, in the active array substrate including the reflective electrode 69 having the aforementioned shape, From the backlight, the light reflected by the reflective electrode 69 can be used for display. Unlike conventional transmissive liquid crystal display devices, this can use light more effectively than the actual mirror hole than predicted. In particular, if the reflective electrode Having a planar shape mainly produces a rectangular reflection, so it is difficult to reflect again and pass through the transmission electrode 68. However, in this embodiment, the reflection electrode 68 having a continuous wave shape is used to return the reflected light to the backlight. The lower part of the transmissive electrode 68 uses light more efficiently. Figure 16 shows the reflectivity of the reflective electrode 6 9 and the backlight 9 1 is about 90% compared with a standard white board, and the polarizing plate 9 When the light transmittance of 0 is about 40%, the relationship between the mirror hole ratio and the light transmittance and reflectivity is plotted. This relationship is based on the assumption that the pixel electrode covers the entire display surface without considering the busbar and Calculate under the existence of the active element. As shown in FIG. 16, the reflectivity of the reflective electrode 69 that is incident on the side of the substrate from the outside is multiplied by the reflectivity of the reflective electrode 69 and the reflection. The ratio of the area of the electrode 6 9 to the area of the entire pixel electrode is calculated. The transmittance of the transmission electrode 6 8 used for the backlight 9 1 is not exactly the same as the mirror -33- This paper size applies to Chinese national standards ( CNS) A4 specification (210X 297 mm) 509809 A7 B7) 5. Description of the invention (3l hole ratio a (ie, the ratio of the area of the transmissive electrode 6 to the area of the whole pixel electrode), and the value b, including from the backlight The light component 'reflected by the reflective electrode $ 9' can be used as a display added to the mirror aperture ratio a. Therefore, unlike the conventional transmission type liquid crystal display device, since the light from the backlight 91 is reflected by the reflective electrode 69, the light can be used more efficiently than the actual mirror hole than predicted. Figure 17 is a graph showing the relationship (transmittance / mirror ratio) between the mirror aperture ratio and the transmission efficiency. As shown in FIG. 17, according to the calculation, it is learned that when the mirror-to-hole ratio is 40%, the utilization ratio of light from the backlight 9 1 and reflected by the reflective electrode 6 9 is directly from the backlight 9. 1 50% of the light intensity through the transmitting electrode 68. According to the calculated values shown in FIG. 17, it is also found that the larger the ratio of the area of the reflective electrode 69 to the area of the entire pixel electrode, the higher the utilization rate of the light reflected by the reflective electrode 69. A specific example of the reflective / transmissive liquid crystal display device of Embodiment 8 will be described below. FIG. 18 is a plan view of a reflective / transmissive liquid crystal display device according to Embodiment 8 of the present invention. 19A to 19F are cross-sectional views taken along the line F-F of FIG. 18 and illustrate a method of manufacturing the liquid crystal display device of this embodiment. Referring to FIGS. 18 and 19 F 'The active / active array substrate of the reflective / transmissive liquid crystal display device includes a plurality of gate bus lines 7 as scanning lines and a plurality of source bus lines 7 4 as signal lines , Their lines cross each other. In each rectangular area surrounded by the adjacent gate bus line 72 and the adjacent source bus line 74, a transmissive electrode 68 made of a material having high light transmission efficiency and a reflective electrode 68 made of a material having high reflectivity are placed. Material made of reflective electrode 69. The transmissive electrode 68 and the reflective electrode 69 constitute a pixel electrode. -34- This paper size applies to China National Standard (CNS) A4 (210X 297mm)
裝 訂Binding
509809 A7 _— ___B7 五、發明説明(32 ) 閘極私極7 j自遠閘極匯流排線7 2向位於各個形成圖素電 k之區域的角落部分之圖素電極延伸。薄膜電晶體(Τρτ) 71係於該閘極電極73之終端充作開關元件。閘極電極73本 身即構成該薄膜電晶體71之一部分。 薄膜電晶體7 1係位於位在玻璃基板6丨上之閘極電極7 3上 ,如圖19F所示。該閘極電極73覆以閘極絕緣膜61&,於 該閘極絕緣膜6 la上形成半導體層77,以經由該閘極絕緣 膜6 1 a覆盍該閘極電極7 3。於該半導體層7 7之側面部分上 形成一對接觸層78。 源極電極7 5係位於一接觸層上,而電性連接於對應之源 極匯流排線7 4上。該源極電極7 5之側面部分根據絕緣方式 與孩閘極電極73重疊,構成一部分薄膜電晶體71。於另一 接觸層78上形成亦構成一部分薄膜電晶體71之汲極電極% ,使其遠離源極電極75並根據絕緣方式與該閘極電極73重 疊。該汲極電極7 6係經由底層電極8 1 a電性連接於該圖素 電極。 儲存電容器係藉著形成該低層電極8 1 a而形成,經由問極 絕緣膜6 1 a與用於後續圖素列之相鄰圖素電極之閘極匯流 排線72重疊。該底層電極sia可位於實質整體區域上,其 如下文所述·般地形成隆凸部分,以使形成該層之影響一致化 〇 於各個反射電極69下形成高隆凸部分64a及低隆凸部分 64b及頂層聚合物樹脂膜65。 該聚合物樹脂膜65之上表面具有反射該隆凸部分64a及 -35- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) ____B7 五、發明説明(33 ) 6 4 b之存在性之連續波型。該聚合物樹脂膜6 5係於實質上 整體玻璃基板61表面上形成,而非僅位於反射電極69下之 區域中。於此實施例中,使用例如由Tokyo 〇hka Co .,509809 A7 __ _B7 V. Description of the invention (32) The gate private pole 7j extends from the far gate bus bar 72 to the pixel electrodes located at the corners of each area where pixel electricity k is formed. A thin film transistor (Tρτ) 71 is connected to a terminal of the gate electrode 73 as a switching element. The gate electrode 73 itself constitutes a part of the thin film transistor 71. The thin film transistor 7 1 is located on the gate electrode 7 3 located on the glass substrate 6 丨, as shown in FIG. 19F. The gate electrode 73 is covered with a gate insulating film 61 & and a semiconductor layer 77 is formed on the gate insulating film 61a to cover the gate electrode 73 through the gate insulating film 61a. A pair of contact layers 78 are formed on side portions of the semiconductor layer 77. The source electrode 75 is located on a contact layer, and is electrically connected to the corresponding source bus bar 74. The side surface portion of the source electrode 75 is overlapped with the gate electrode 73 according to the insulation method to constitute a part of the thin film transistor 71. A drain electrode%, which also constitutes a part of the thin film transistor 71, is formed on another contact layer 78, away from the source electrode 75 and overlapping with the gate electrode 73 according to the insulation method. The drain electrode 76 is electrically connected to the pixel electrode via the bottom electrode 8 1 a. The storage capacitor is formed by forming the low-layer electrode 8 1 a, and it overlaps with the gate bus line 72 of the adjacent pixel electrode for the subsequent pixel row through the interlayer insulating film 6 1 a. The bottom electrode sia may be located on a substantially entire area, and as described below, a raised portion is formed so as to uniformly influence the formation of the layer. A high raised portion 64a and a low raised portion are formed under each reflective electrode 69 Portion 64b and top polymer resin film 65. The upper surface of the polymer resin film 65 has the convex portions 64a and -35- This paper size is applicable to Chinese National Standard (CNS) A4 specifications (210X 297 mm) ____B7 V. Description of the invention (33) 6 4 b The continuous wave of existence. The polymer resin film 65 is formed on the surface of the substantially monolithic glass substrate 61, instead of being located only in a region under the reflective electrode 69. In this embodiment, for example, Tokyo Ohka Co.,
Ltd.所製造之〇FPR-8〇〇作為聚合物樹脂膜65。 該反射電極6 9係位於該聚合物樹脂膜6 5具有連績波型之 部分上,其係位於該高隆凸部分64a及低隆凸部分64b上。 該反射電極6 9係由具有高反射效率之材料製造,諸如A1。 孩反射電極6 9係經由接觸孔7 9電性連接於對應之汲極電極 76 ° 於此實施例反射型/透射型液晶顯示裝置中,該透射電極 6 8係與該反射電極6 9分離。透射電極6 8係由具有高透射效 率之材料諸如氧化銦錫製造。 現在參照圖1 9 Α至1 9 F描述用以形成反射電極6 9及透射 弘極6 8之方法,其係為該反射型/透射型主動陣列基板7 〇 之主要部分。 首先,如圖19A所示,於玻璃基板61上形成多條由 Cr,Ta等材料所製造之閘極匯流排線72(參照圖18),自閘 極匯流排線7 2延伸。 於該玻璃基板61之整體表面上形成由SiNx,Si〇x等材 料所製造之閘極絕緣膜6 1 a,以覆蓋閘極匯流排線7 2及閘 極電極7 3。於該閘極絕緣膜6丨a位於閘極電極7 3上之部分 上形成由非晶矽(a-Si)、多晶矽、CdSe等材料所製造之半 導體層77。於各半導體層77之兩側面部分上形成—對由a_ Si等材料製造之接觸層78。 -36- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明(34 ) 於該接觸層78之一上形成由Ti,Mo,A1等材料製造之 源極電極7 5 ’而於另*一接觸層78上形成由由Ti,jyj〇,A1 等材料製造之汲極電極76。 此實施例中,使用Corning Inc·所製造厚度1 . 1毫米之 編號705 9產物作為玻璃基板61之材料。 如圖1 9 B所示,藉藏射形成構成該源極匯流排線7 4之一 部分的金屬層81。該金屬層8 1亦可用於形成底層電極81&。 之後,如圖1 9 C所示,藉濺射及製作佈線圖型形成亦構 成一部分源極匯流排線7 4之氧化銦錫層8 0。 因此,於此實施例中,該源極匯流排線7 4係具有由金屬 層8 1及氧化銦錫層8 0所構成之雙層結構。該雙層結構之優 點係為即使構成該源極匯流排線7 4之金屬膜8 1部分有缺陷 ’遠源極匯、/无排線7 4之電性連接仍可由氧化鋼錫層$ 〇保持 。此降低源極匯流排線7 4發生斷線之可能。 氧化銦錫層80亦用以形成透射電極68。使其可於形成源 極匯流排線7 4之同時形成透射電極6 8,而防止層數增加。 之後,如圖19D所示,於欲形成反射電極69之區域上使 用感光性樹脂抗蝕劑膜形成具有實質圓型剖面之圓型隆凸 部分64a及64b。該隆凸部分64a及64b以不位於透射電梅 6 8上以於該液晶層上有效地施加電壓為佳。然而,於該透 射電極68上形成該隆凸部分64a及64b時,於光學上亦無 極大影響。 下文將參知、圖2 0 A至2 0 D簡述於該反射電極區中形成兮 隆凸部分64 a及64b之方法。 -37- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 509809 A7 ___ B7 五、發明説明(35 ) 首先,如圖20A所述,藉旋轉塗佈法於玻璃基板61 (實際 上其上層具有金屬層81及位於該金屬層81上之底層電極 81 a)上形成由感光性樹脂製造之抗蝕劑膜62。該抗蝕劑膜 係使用與下文將描述之聚合物樹脂膜65相同之感光性樹 脂形成,即〇FPR-800,使用旋轉塗佈法,轉速以約5〇〇 至約3〇〇〇轉每分鐘範圍内為佳,此實施例係為15〇〇轉每 分鐘’歷經3〇秒,而得到2 5微米之厚度。 之後’上層具有抗蝕劑膜62之玻璃基板6丨於⑽^下預先 洪烤例如3 〇分鐘。 <後,如圖2 0 B所示,於該抗蝕劑膜6 2上放置光掩模6 3 邊光掩模具有圖2 1所示之形狀,例如包括兩種貫穿板 63 c之圓型孔63a及63b。該光掩模63接著如箭號所示地由 上照光。 此實施例之光掩模具有直徑5微米之圓型孔6 3 a及直徑3 微米之圓型孔,其係任意排列。任何相鄰圖型孔之間隙應 至少約2微米。然而,若該間隙太大,則稍後欲於彼上層形 成之聚合物樹脂膜6 5將難以得到連續波型。 形成之基板使用濃度2.38%之顯影劑顯影,例如Tokyo 〇hka Co·,Ltd.製造之NMD-3。結果,如圖20C所示, 於玻璃基板61之反射電極區中形成具有不同高度之數種微 型隆凸部分64a·及64b’。該隆凸部分64a’及64b,之頂緣係 為方型。個別自直徑5微米之圖型孔63a及直徑3微米之圖 型孔63b形成高度2.48微米之隆凸部分64a,及高度1.64微 米之隆凸部分64b*。 I - 38- 本紙張尺度適^用中國國家標準(CNS) A4規格(2K) X 297公^ ~ ----- A7 B7 五、發明説明(36 薇隆凸部分64a,及64b·之高度可藉著改變圖型孔及 63b/曝光時間及顯影時間而改變。圖型孔63a及63b之大 小不限於前述者。 之後,如圖20D所示,上層具有隆凸部分64a,及64b,之 玻璃基板61於約20(TC下加熱一小時。此使該隆凸部分 64a及64b之方型頂緣軟化,而形成具有實質圓型剖面之 隆凸部分64a及64b。 如圖19E所示,藉旋轉塗佈法於形成之玻璃基板61上施 加聚合物樹脂,製作佈線圖型以形成聚合物樹脂膜65。使 用前述材料〇FPR-800作為聚合物樹脂,於較佳約1〇〇〇至 約3 000轉每分鐘範圍内之轉速下旋轉塗佈。於此實施例中 ,該旋轉塗佈係於2 〇〇〇轉每分鐘轉速下進行。 根據此種方式,於玻璃基板61上得到具有連績形狀上表 面之聚合物樹脂膜65 ,其係不具有隆凸部分之平面。 如圖1 9F所示,由A1所製造之反射電極69係藉例如濺射 法於聚合物樹脂膜65之預定部分上形成。適用於反射電極 69之材料除八丨及八丨合金外另外包括具有高反射效率之 ,Ni,Cr及Ag。該反射電極69之厚度以介於約〇〇1至约 1 · 0微米範圍内為佳。 偏光板(未示)係附加於此實施例所製造之主動陣列基板 之背面上。後照光則放置於該偏光板之外表面上。 若該A1膜係於移除該聚合物樹脂膜65位於透射電極68上 之部分之後形成,則產生電蝕。因此,該聚合物樹脂膜65 位於透射電極6 8上之部分應於形成該反射電極6 9之後形成 -39- 本纸張尺度適用中國國家標準(CNS) A4規格(210X297公董) 509809 A7 ^___________B7 __ 五、發明説明(37 ) 。此移除:可藉著灰化進行,同時移除該聚合物樹脂膜6 5位 於用以連接位在該主動陣列基板7 〇邊緣之驅動器的電極上 之部分。此改善程序效率,而可有效地施加電壓於該液晶 層。 若用以形成該隆凸部分之方法中未使用聚合物樹脂膜6 5 ,則可於由氧化銦錫所製造之透射電極6 8與由A1所製造之 反射電極69之間形成Mo等層,以防止產生電蝕。 所形成之反射電極69,由具有高反射效率之材料製造, 具有連續波型之上表面,因為底層聚合物樹脂膜65如前文 所述般地具有‘連續波型。 此實施例中,於形成源極匯流排線74之間時形成透射電 極6 8。當該源極匯流排線7 4係為包括金屬層8 1之單層結構 而非前述包括金屬層81及氧化銦錫層8〇之雙層結構時,該 透射電極6 8可與該源極匯流排線7 4個別形成。 自具有連績波型而由高反射效率材料製造之反射電極69 所反射之光的波長相依性係根據圖2 2所示之方式測量。用 以測量之結構係藉著模擬與實際液晶顯示裝置相等之反射 電極6 9於實際使用期間之條件而形成。詳言之,折射率 1 . 5之模擬玻璃6 6 -實質等於實際液晶層之折射率_附加於 主動陣列基板7 0上,使用折射率1 5之紫外光固化性黏著 劑6 7於彼上層形成反射電極6 9及透射電極6 7。 就測量系統而言,光源L 1放置於使入射光l 1,相對於模 擬玻璃6 6法線m 1於入射角0 i入射,而光電倍增計L 2係放 置以捕集相對於法線m 2於輸出角0 〇反射之固定角光束。 -40- --- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明O8 ) 使用前述結構,該光電倍增器L 2捕集散射光束L 2 ·以作 為入射光東L1’,其係於入射角01入射於模擬玻璃66上之 散射光中於輸出角θο下反射者。 前述測定係於1 = 3 0 °而0 〇 = 2 0 °之條件下進行,以 避免該光電倍增計L 2捕集自該光源L 1放射而自該模擬破璃 66表面反射之正常反射光束。 圖2 4係為顯示此實施例中反射光之波長相依性的圖。 如圖2 4所示,該反射之波長相依性於此實施例中難以辨 認,而證明得到良好之白色顯示。 此實施例中,該光掩模63之圖型孔63 a及63 b之形狀係為 圓型。亦可使用其他形狀諸如矩型、橢圓型、及條型。 此實施例中,形成具有不同高度之隆凸部分64a及64b。 或亦可形成具有单一南度之隆凸部分或具有三或多種不同 高度者,以得到具有良好反射特性之反射電極。 然而,發現當形成具有兩種或多種不同高度之隆凸部分 而非具有單一種高度之隆凸部分時,可得到反射特性之波 長相依性較佳之反射電極。 若確定僅使用隆凸部分64a及64b可得到具有連續波型之 上表w ’則不需要形成聚合物樹脂膜65。僅形成樹脂膜 6 2 (參照圖2 0 B及2 0 C )以得到具有連續波型之上表面,而 於彼上層形成反射電極6 9。此情況下,可省略形成聚合物 樹脂膜6 5之步驟。 此實施例中,使用Tokyo 〇hka Co.,Ltd·所製造之 OF PR-8 00作為感光性樹脂材料。亦可使用可藉曝光方法 -41 - 本紙張尺度適财酬家標準(CNS) A4規格(no X 2的公 509809 A7 ^_______ B7 五、發明説明(列 ) 衣作佈線,圖型之任何其他正型或負型感光性樹脂材料。該 感光性樹脂材料之實例包括·· T〇ky〇 Qhka C〇,Ud所 製造之 Ο M R - 8 3、Ο M R · 8 5、Ο N N R- 2 0、o F P 2、 OFPR- 8 3 0 及 OFPR-5 00 ; Shipley Co.所製造之 14〇〇-27;Toray Industnes,lnc.所製造之 ph〇t〇neath ;Ltd. made FPR-8800 as the polymer resin film 65. The reflective electrode 69 is located on a portion of the polymer resin film 65 having a continuous wave shape, and is located on the high ridge portion 64a and the low ridge portion 64b. The reflective electrode 69 is made of a material having high reflection efficiency, such as A1. The reflective electrode 69 is electrically connected to the corresponding drain electrode 76 through the contact hole 79. In the reflective / transmissive liquid crystal display device of this embodiment, the transparent electrode 68 is separated from the reflective electrode 69. The transmissive electrode 68 is made of a material having a high transmissivity such as indium tin oxide. A method for forming the reflective electrode 69 and the transmissive Hongji 68, which is a main part of the reflective / transmissive active array substrate 70, will now be described with reference to FIGS. 19A to 19F. First, as shown in FIG. 19A, a plurality of gate bus bars 72 (see FIG. 18) made of a material such as Cr and Ta are formed on a glass substrate 61, and extend from the gate bus bars 72. A gate insulating film 6 1 a made of a material such as SiNx, SiOx, or the like is formed on the entire surface of the glass substrate 61 to cover the gate bus bar 72 and the gate electrode 73. A semiconductor layer 77 made of a material such as amorphous silicon (a-Si), polycrystalline silicon, or CdSe is formed on a portion of the gate insulating film 6a located on the gate electrode 73. Formed on both side portions of each semiconductor layer 77-a contact layer 78 made of a material such as a_Si. -36- This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 B7 V. Description of the invention (34) Formed on one of the contact layers 78 and made of Ti, Mo, A1 and other materials The source electrode 7 5 ′ is formed on the other contact layer 78 with a drain electrode 76 made of Ti, jyj0, A1, or other materials. In this embodiment, a product of No. 705 9 having a thickness of 1.1 mm manufactured by Corning Inc. is used as the material of the glass substrate 61. As shown in FIG. 19B, a metal layer 81 constituting a part of the source bus bar 74 is formed by the hidden shot. This metal layer 81 can also be used to form the bottom electrode 81 &. After that, as shown in FIG. 19C, an indium tin oxide layer 80, which also forms a part of the source bus bar 74, is formed by sputtering and wiring pattern formation. Therefore, in this embodiment, the source bus bar 74 has a double-layer structure composed of a metal layer 81 and an indium tin oxide layer 80. The advantage of this double-layer structure is that even if the metal film 8 1 constituting the source bus bar 74 is partially defective, the electrical connection of the remote source bus / non-bus bar 74 can still be made of a steel oxide tin layer. maintain. This reduces the possibility of disconnection of the source bus bar 74. The indium tin oxide layer 80 is also used to form the transmissive electrode 68. This makes it possible to form the transmissive electrodes 68 at the same time as the source bus bars 74 are formed, thereby preventing the number of layers from increasing. Thereafter, as shown in Fig. 19D, circular convex portions 64a and 64b having a substantially circular cross section are formed using a photosensitive resin resist film on the region where the reflective electrode 69 is to be formed. It is preferable that the ridges 64a and 64b are not located on the transmission electrode 6 8 so that a voltage is effectively applied to the liquid crystal layer. However, when the convex and convex portions 64a and 64b are formed on the transmissive electrode 68, there is no great optical influence. The method of forming the raised and raised portions 64a and 64b in the reflective electrode region is briefly described below with reference to FIGS. 20A to 20D. -37- This paper size applies Chinese National Standard (CNS) A4 specification (210X297mm) 509809 A7 ___ B7 V. Description of the invention (35) First, as described in Figure 20A, the glass substrate 61 (actually The upper layer has a metal layer 81 and a bottom electrode 81 a) on the metal layer 81. A resist film 62 made of a photosensitive resin is formed thereon. This resist film is formed using the same photosensitive resin as the polymer resin film 65 described later, namely OFPR-800, using a spin coating method at a rotation speed of about 5,000 to about 3,000 revolutions per revolution. It is preferably in the range of minutes. In this embodiment, the thickness is 25 micrometers at 1500 rpm 'over 30 seconds. After that, the glass substrate 6 with the resist film 62 on the upper layer is pre-baked for 30 minutes under the following conditions. < As shown in FIG. 20B, a photomask 6 3 is placed on the resist film 62. The edge photomask has the shape shown in FIG. 21, for example, it includes two circles that penetrate the plate 63c. Holes 63a and 63b. The photomask 63 is then illuminated from above as shown by an arrow. The photomask of this embodiment has a circular hole 6 3 a with a diameter of 5 μm and a circular hole with a diameter of 3 μm, which are arbitrarily arranged. The gap between any adjacent patterned holes should be at least about 2 microns. However, if the gap is too large, it will be difficult to obtain a continuous wave pattern for the polymer resin film 65 to be formed on the upper layer later. The formed substrate is developed using a developer having a concentration of 2.38%, such as NMD-3 manufactured by Tokyo Ohka Co., Ltd. As a result, as shown in FIG. 20C, in the reflective electrode region of the glass substrate 61, several types of micro-protrusion portions 64a · and 64b 'having different heights are formed. The raised edges 64a 'and 64b have a top edge having a square shape. The pattern holes 63a having a diameter of 5 micrometers and the pattern holes 63b having a diameter of 3 micrometers each form a raised portion 64a having a height of 2.48 micrometers, and a raised portion 64b having a height of 1.64 micrometers *. I-38- This paper is suitable for China National Standard (CNS) A4 size (2K) X 297mm ^ ~ ----- A7 B7 V. Description of the invention (36 Weilong convex part 64a, 64b, height It can be changed by changing the pattern holes and 63b / exposure time and development time. The size of the pattern holes 63a and 63b is not limited to the foregoing. Thereafter, as shown in FIG. The glass substrate 61 is heated at about 20 ° C. for one hour. This softens the square top edges of the raised portions 64 a and 64 b to form raised portions 64 a and 64 b having a substantially circular cross section. As shown in FIG. 19E, A polymer resin is applied to the formed glass substrate 61 by a spin coating method, and a wiring pattern is formed to form a polymer resin film 65. The aforementioned material OFPR-800 is used as the polymer resin, preferably about 1,000 to Spin coating is performed at a rotation speed in a range of about 3,000 revolutions per minute. In this embodiment, the spin coating is performed at a rotation speed of 2000 revolutions per minute. According to this method, a glass substrate 61 having The polymer resin film 65 on the upper surface of the continuous shape is a flat surface without raised portions. As shown in FIG. 19F, the reflective electrode 69 manufactured by A1 is formed on a predetermined portion of the polymer resin film 65 by, for example, sputtering. The materials suitable for the reflective electrode 69 are in addition to eight- and eight-alloys. Also included are Ni, Cr, and Ag with high reflection efficiency. The thickness of the reflective electrode 69 is preferably in the range of about 0.001 to about 1.0 micron. A polarizing plate (not shown) is added to this embodiment. On the back surface of the manufactured active array substrate. The backlight is placed on the outer surface of the polarizing plate. If the A1 film is formed after removing the portion of the polymer resin film 65 on the transmissive electrode 68, electricity is generated. Therefore, the part of the polymer resin film 65 on the transmissive electrode 68 should be formed after the reflective electrode 6 9 is formed. -39- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297). 509809 A7 ^ ___________ B7 __ V. Description of the invention (37). This removal: it can be performed by ashing while removing the polymer resin film 65. The electrodes located on the edge of the active array substrate 70 are connected to the driver The above part. This improvement process Efficiency, and a voltage can be effectively applied to the liquid crystal layer. If the polymer resin film 6 5 is not used in the method for forming the raised portion, the transmissive electrode 68 made of indium tin oxide and the transmissive electrode 6 made of A1 can be used. A layer such as Mo is formed between the produced reflective electrodes 69 to prevent electric corrosion. The formed reflective electrode 69 is made of a material with high reflection efficiency and has a continuous wave upper surface because the bottom polymer resin film 65 As described above, it has a 'continuous wave type.' In this embodiment, the transmission electrodes 68 are formed when the source bus bars 74 are formed. When the source bus bar 74 is a single-layer structure including the metal layer 81 instead of the aforementioned double-layer structure including the metal layer 81 and the indium tin oxide layer 80, the transmissive electrode 68 can communicate with the source electrode. The bus bars 7 4 are formed individually. The wavelength dependence of light reflected from a reflective electrode 69 having a continuous wave pattern and made of a material with high reflection efficiency is measured in the manner shown in FIG. 22. The structure for measuring is formed by simulating the conditions of a reflective electrode 69 which is equivalent to an actual liquid crystal display device during actual use. In detail, the simulated glass 6 6 having a refractive index of 1.5 is substantially equal to the refractive index of the actual liquid crystal layer. It is attached to the active array substrate 70, and a UV curable adhesive 6 with a refractive index of 15 is used on the upper layer. A reflective electrode 69 and a transmissive electrode 67 are formed. As far as the measurement system is concerned, the light source L 1 is placed so that the incident light l 1 is incident at an incident angle 0 i with respect to the simulated glass 6 6 normal line 1 and the photomultiplier L 2 is placed so as to capture relative to the normal line m 2 Fixed angle light beams reflected at output angle 0 °. -40- --- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 B7 V. Description of the invention O8) Using the aforementioned structure, the photomultiplier L 2 captures the scattered light beam L 2 As the incident light east L1 ′, it is a person reflected at the output angle θ among the scattered light incident on the simulated glass 66 at the incident angle 01. The aforementioned measurement was performed under the conditions of 1 = 30 ° and 0 ° = 20 ° to prevent the photomultiplier L 2 from capturing the normal reflected beam emitted from the light source L 1 and reflected from the surface of the simulated broken glass 66. . FIG. 24 is a diagram showing the wavelength dependence of the reflected light in this embodiment. As shown in FIG. 24, the reflected wavelength dependency is difficult to recognize in this embodiment, and it is proved that a good white display is obtained. In this embodiment, the shape of the patterned holes 63a and 63b of the photomask 63 is circular. Other shapes such as rectangular, oval, and bar shapes can also be used. In this embodiment, raised portions 64a and 64b having different heights are formed. Or it is also possible to form a convex portion having a single south degree or having three or more different heights to obtain a reflective electrode having good reflection characteristics. However, it was found that when bumps having two or more different heights are formed instead of bumps having a single height, a reflective electrode having better wavelength dependence of reflection characteristics can be obtained. If it is determined that only the raised portions 64a and 64b can be used to obtain the above table w 'having a continuous wave pattern, the polymer resin film 65 need not be formed. Only the resin film 6 2 (see FIGS. 20B and 20C) is formed to obtain an upper surface having a continuous wave shape, and a reflective electrode 69 is formed on the upper layer. In this case, the step of forming the polymer resin film 65 can be omitted. In this example, OF PR-8 00 manufactured by Tokyo Ohka Co., Ltd. was used as the photosensitive resin material. You can also use the exposure method -41-This paper size is suitable for financial standards (CNS) A4 specifications (no X 2 of the public 509809 A7 ^ _______ B7 V. Description of the invention (column) Clothing for wiring, any other pattern Positive or negative photosensitive resin material. Examples of the photosensitive resin material include: 〇 MR-8 3, 〇 MR · 8 5, 〇 NN R- 2 0 manufactured by Ud , O FP 2, OFPR-8 3 0 and OFPR-5 00; 14000-27 manufactured by Shipley Co .; ph04neath manufactured by Toray Industnes, lnc .;
Seklsui Flne Chenncal Co·,Ltd·所製造之 rw-101 ; &Nlppon Kayaku K.K.所製造之 r101&R6 3 3。 此實施例中,使用薄膜電晶體7丨作為開關元件。本發明 亦可應用於使用其他開關元件諸如金屬絕緣體金屬(Μ丨M) 、二極體及變.阻器之主動陣列基板。 因此,如前文所述,於實施例8之液晶顯示裝置及製造液 晶顯TF裝置之方法中,形成由具有高反射效率之材料所製 造心反射電極以具有連績波型。此降低反射性之波長相依— ^^於不產生干擾色之下藉著反射得到良好白色顯示。 因為使用光掩模藉光學技術於基板上形成該隆凸部分, 故可確認良好再現性。亦可於良好再現性下得到反射電極 所形成之波浪型上表面。 於形成源極匯流排線之同時形成由具有高透光度材料所 製造之透射電極。可於步驟數目不比習用液晶顯示裝置增 加之情況下形成反射型/透射型液晶顯示裝置之透射電極。 藉著形成供反射電極使用之連續波型,可於較實際鏡孔 比所預期者更有效地利用光線。 根據此實施例之液晶顯示裝置,於一顯示圖素中形成由 高反射效率材料所製造之反射部分及由高透光效率材料所 1紙張尺度適用中國國家標準(CNS) A4規格(2U) x 29?^^ -42- 509809 A7 B7 五、發明説明(40 ) 製造之透射部分。使用此種結構,當環境黑暗時,該裝置 作為透射型液晶顯示裝置,利用來自後照光而穿透該透射 區之光以顯示影像。當環境相對黑暗時,該裝置作為反射 型/透射型液晶顯示裝置,其同時利用來自後照光而穿透該 透射區之光及自包括具有相當高反射性之膜之反射區所反 射之光以顯示影像。當環境明亮時,該裝置作為反射型液 晶顯示裝置,利用來自包括相當高反射性之膜之反射區所 反射之光以顯示影像。 換言之,根據此實施例,各圖素之圖素電極包括由高反 射效率之材料所製造之反射區及由高透光效率材料所製造 之透射區。因此,得到於任何前述情況下皆具有良好之光 利用效率及優越之產能之液晶顯示裝置。 此實施例中,由反射性材料所製造之反射區之上表面具 -有連續波型。防止於不提供於該反射區係為平面時所必要 之散光裝置下產生鏡面現象,而得到紙白色顯示。 於此實施例中,具有多個隆凸部分之感光性聚合物樹脂 膜係位於由反射性材料所製造之反射區之下層。使用此種 結構,即使該連續平滑凹陷部分及隆凸部分中有變化,仍 不影響顯示。因此,可於良好產能下製造該液晶顯示裝置。 由高透先效率材料製造之透射區係於形成該源極匯流排 線時同時形成。此大幅縮短液晶顯示裝置之製造過程。 於透射區及反射區之間形成保護膜。此防止透射區及反 射區之間產生電触。 保留於該透射區及終端電極上之反射性材料係於該反射 -43- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 ____B7 五、發明説明(41 ) ' ~^ 區製作佈線圖型時同時移除。此大幅縮短該液晶顯示裝置 之製造過程。 此實施例中,自該後照光故射之光通經該透射區而離開 孩基板,而自該反射區之背面反射回到該後照光,而再反 射至孩基板。一部分再反射光通經該透射區而離開基板。 因為一般反射主要係於反射區係為平面時發生,故傳統 上遠再反射光難以有效地通過該透射區。然而,此實施例 中’因為反射區具有連續波型,故自該後照光放射之光被 散射’使該反射光有效地回到該後照光位於該透射區下方 之邵分。因此,與習用透射型液晶顯示裝置不同地,可較 實際鏡孔比所預測者更有效地利用光線。 (實施例9 ) 圖2 5係為本發明實施例9之透射型/反射型液晶顯示裝置 — 1 0 0之部分剖面圖。 參照圖2 5,液晶顯示裝置丨〇 〇包括圖1 8所示之主動陣列 基板70(對應於F,-F,剖面)、對基板(濾色器基板)160、及 夹置其間之液晶層1 4 0。該透射型/反射型主動陣列基板7 〇 包括多條閘極匯流排線7 2以作為掃描線、及多條源極匯流 排線7 4以作為信號線,其係位於絕緣玻璃基板6 1上而彼此 相又。於各個由相鄰閘極匯流排線72及相鄰源極匯流排線 7 4所環繞之矩型區域中,放置由高透光效率材料所製造之 透射電極68及由高反射效率材料所製造之反射電極69。該 透射電極6 8及該反射電極6 9構成一個圖素電極。該對基板 (遽色器基板)1 6 0包括依序於絕緣玻璃基板1 6 2上形成之濾 -44- 本紙張尺度適用中國國家標準(CNS) A4規格(21〇χ297公釐) ' " 509809 A7 ____ B7 五、發明説明(42 ) 色器層丨6、4及由氧化銦錫等;^料所製造之透明電極丨66。 於基板70及60面對液晶層14〇之表面上形成垂直對正膜( 未示)。為了界定由電場定向之液晶分子之配向,該垂直對 正膜係於一方向上摩擦,以於液晶分子上提供預仰角。液 晶層1 40使用具有負介電各向異性之向列液晶材料(例如Rw-101 manufactured by Seklsui Flne Chenncal Co., Ltd. & r101 & R6 3 3 manufactured by & Nlppon Kayaku K.K. In this embodiment, a thin film transistor 7 is used as the switching element. The invention can also be applied to active array substrates using other switching elements such as metal insulator metal (M 丨 M), diodes, and varistor. Therefore, as described above, in the liquid crystal display device and the method for manufacturing a liquid crystal display TF device of Example 8, a heart-shaped reflective electrode made of a material having high reflection efficiency is formed so as to have a continuous wave pattern. The wavelength dependence of the reduced reflectivity is ^^, and a good white display is obtained by reflection without causing interference colors. Since the ridges and convexes are formed on the substrate by an optical technique using a photomask, good reproducibility can be confirmed. The wavy upper surface formed by the reflective electrode can also be obtained with good reproducibility. A transmission electrode made of a material having a high light transmittance is formed at the same time as the source bus line is formed. A transmissive electrode of a reflective / transmissive liquid crystal display device can be formed without increasing the number of steps compared to a conventional liquid crystal display device. By forming a continuous wave pattern for the reflective electrode, light can be used more efficiently than expected in actual mirror holes. According to the liquid crystal display device of this embodiment, a reflective portion made of a high reflection efficiency material and a high light transmission efficiency material are formed in a display pixel. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (2U) x 29? ^^ -42- 509809 A7 B7 V. Description of the invention (40) Transmission part manufactured. With this structure, when the environment is dark, the device functions as a transmissive liquid crystal display device, and uses light from the backlight to penetrate the transmissive area to display an image. When the environment is relatively dark, the device is used as a reflective / transmissive liquid crystal display device, which simultaneously uses the light from the backlight to penetrate the transmissive area and the light reflected from the reflective area including a film with a relatively high reflectivity. Display the image. When the environment is bright, the device functions as a reflective liquid crystal display device that uses light reflected from a reflective area including a film having a relatively high reflectivity to display an image. In other words, according to this embodiment, the pixel electrode of each pixel includes a reflection region made of a material with high reflection efficiency and a transmission region made of a material with high light transmission efficiency. Therefore, a liquid crystal display device having good light utilization efficiency and superior productivity in any of the foregoing cases is obtained. In this embodiment, the upper surface of the reflective region made of a reflective material has a continuous wave pattern. It prevents the specular phenomenon from being generated under the astigmatism device which is not necessary when the reflection area is flat, and the paper white display is obtained. In this embodiment, a photosensitive polymer resin film having a plurality of raised and convex portions is located under a reflective region made of a reflective material. With this structure, even if there is a change in the continuous smooth concave portion and the convex portion, the display is not affected. Therefore, the liquid crystal display device can be manufactured with good productivity. The transmissive region made of a high-transmission, high-efficiency material is formed at the same time as the source bus line is formed. This greatly shortens the manufacturing process of the liquid crystal display device. A protective film is formed between the transmission region and the reflection region. This prevents electrical contact between the transmissive and reflective areas. The reflective material remaining on the transmissive area and the terminal electrode is the reflection -43- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 509809 A7 ____B7 V. Description of the invention (41) The ~ ^ area is also removed when making a wiring pattern. This greatly shortens the manufacturing process of the liquid crystal display device. In this embodiment, the light emitted from the back light passes through the transmission area and leaves the child substrate, and is reflected back to the back light from the back surface of the reflection area, and then reflected to the child substrate. A portion of the re-reflected light passes through the transmission area and leaves the substrate. Because reflection generally occurs when the reflection area is flat, it has traditionally been difficult for far-re-reflected light to effectively pass through the transmission area. However, in this embodiment, 'because the reflection region has a continuous wave type, the light emitted from the backlight is scattered', so that the reflected light is effectively returned to the fraction of the backlight which is located below the transmission region. Therefore, unlike conventional transmissive liquid crystal display devices, light can be used more efficiently than an actual mirror hole than expected. (Embodiment 9) Fig. 25 is a partial cross-sectional view of a transmissive / reflective liquid crystal display device-100 according to Embodiment 9 of the present invention. 25, the liquid crystal display device includes an active array substrate 70 (corresponding to F, -F, cross-section), a counter substrate (color filter substrate) 160, and a liquid crystal layer interposed therebetween as shown in FIG. 18. 1 4 0. The transmissive / reflective active array substrate 70 includes a plurality of gate bus lines 72 as scan lines and a plurality of source bus lines 74 as signal lines, which are located on an insulating glass substrate 61. And each other. In each rectangular area surrounded by the adjacent gate bus lines 72 and the adjacent source bus lines 74, a transmissive electrode 68 made of a material with high light transmission efficiency and a material made of a material with high reflection efficiency are placed.之 Reflective electrode 69. The transmissive electrode 68 and the reflective electrode 69 constitute a pixel electrode. The pair of substrates (color filter substrates) 160 includes a filter formed on the insulating glass substrate 16 2 in order. -44- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) '& quot 509809 A7 ____ B7 V. Description of the invention (42) Color device layers 丨 6, 4 and transparent electrodes 66 made of indium tin oxide, etc .; A vertical alignment film (not shown) is formed on the surfaces of the substrates 70 and 60 facing the liquid crystal layer 14. In order to define the alignment of the liquid crystal molecules oriented by the electric field, the vertical alignment film is rubbed in one direction to provide a pre-elevation angle on the liquid crystal molecules. The liquid crystal layer 1 40 uses a nematic liquid crystal material having a negative dielectric anisotropy (for example,
Merck & Co·,Inc.所製造之]viJ)。 液晶顯示裝置1 00之最小顯示單元之各圖素皆包括由反 射電極69所界定之反射區120R及由透射電極68所界定之 透射區1 20T。液晶層140厚度於反射區1 20R中係為dr, 而於透射區120T中係為dt(dt = 2d〇,使用於顯示之光束 之光徑(於反射區中之反射光束及於透射區中之透射光束) 實為上彼此相等。雖d r == 2 d t係較佳情泥,但d t及d r可根 據顯示特性適當地決定,先決條件為dt > dr。dr —般係為 約4至約6微米,而dr係為約2至約3微米。換言之,於主動 陣列基板7 0之各圖素區中形成約2至約3微米之階梯。當該 反射電極69具有如圖25所示之凹陷及隆凸形狀表面時,厚 度平均值應為dr。此情況下,該透射/反射型液晶顯示裝置 100包括兩種區域(反射區及透射區),其中液晶層14〇厚度 彼此相異。此實施例中,該主動陣列基板70包括反射區 1 2 0 R及透射區1 2 0 T,其與該液晶層1 4 0面對之侧面之高 度相異。 實際製造具有圖2 5所示之結構之液晶顯示裝置(對角線: 8.4英吋),進行6 4灰階顯示以評估該裝置之顯示特性(透 光度及反射性)。評估結果表示於圖2 6中。該液晶顯示裝置 -45 - 本紙張尺度適用中國國冬標準(CNS) A4規格(210 X 297公爱) 509809 A7 B7 五、發明説明 於以下條,件下製造。於一圖素中透射區120T面積相對於反 射£ 1 2 R之比例係為4 · 6。該透射電極6 8係由氧化鋼錫製 造,而该反射電極係由A 1製造。該透射區1 2 0 T中之液晶層 1 40之厚度dt係設定於約5 . 5微米,而該反射區120R中液 晶層1 4 0厚度係設定於約3微米。 液晶顯示裝置於透射模式下使用來自後照光之光線之透 光度係使用T 〇 p c 〇 n C 〇 .所製造之Μ B - 5測量,而液晶顯示 裝置於反射模式下使用環境光之反射性係使用〇tsuka Electronics Co.,Ltd.所製造之LCD-5 000利用積分球 測量。 如圖2 6所示,於6 4灰階顯示中之反射性及透光度之變化 (個別為圖2 6中之實線及虛線)實質上彼此相符。是故,即 使用同時進行使用來自後照光之光線的透射模式顯示及使 -用環境光之反射模式顯示,仍可得到具有充分顯示品質之 灰階顯示。該透射模式及反射模式中之對比個別約2 0 0及 約25。 下文將描述顏色再現性之評估結果。圖2 7及2 8個別係為 習用透射型液晶顯示裝置及此實施例透射型/反射型液晶顯 示裝置於不同亮度之環境光下之彩度圖。此等液晶顯示裝 置皆使用相同之後照光。 如圖2 7所示,當環境光對顯示螢幕之照度自〇 1 X增至 8,000 lx及至17,000 lx時,習用液晶顯示裝置之色彩再 現性範圍(於圖27中之三角型面積)大幅降低。觀察者可發 現色彩模糊。然而,於透射型/反射型液晶顯示裝置中,如 -46- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) A7 _______B7 五、發明説明(44 ) 圖28所tf’,照度8,0〇〇 1义之色彩再現性實質上與照度為 0.1 lx者相同。而且,當照度為丨7, _ ΐχ時,色彩再現 性僅稍有降低。因此幾乎不會有色彩模糊之現象。 於習用透射型液晶顯示裝置中,因為來自顯示面板表面 之環境光的反射,且因為來自用以遮光之黑色掩模、接點 等物I反射光,使對比降低。相反地,於此實施例之透射 型/反射型液晶顯不裝置中,除透射模式顯示外提供使用環 境光(反射模式顯示’故可藉著反射模式顯示抑制於透射 模式顯示中因為環境光反射所致之對比降低。因此,不論 %境光變得多明:¾ ’此實施例之液晶顯示裝置所得之對比 不低於僅使用反射模式顯示器所得之對比。結果,於此實 施例之透射型/反射型液晶顯示裝置中,即使於明亮之環境 光下仍不致於降低色彩再現性,因此可於任何條件下得到 高可見度之顯示器。 圖2 9顯π此實施例結構之另一個具體實例,其中反射電 極區160R包括反射層(反射板)169及一部分透射電極168 。與圖25所示之結構不同地,其反射電極區i2〇R包括具 有反射特性之反射電極6 9。該主動陣列基板之反射電極區 160R之高度可藉著調整位於反射層169上之反射層169及/ 或絕緣層1 7 0之厚度而控制。 (實施例1 0 ) 圖3 0係為本發明實施例1 〇液晶顯示裝置之主動陣列基板 之平面圖。圖3 1係為沿圖30之G-G線所得之剖面圖。 參照圖3 0及3 1,於由玻璃或塑料製造之透明絕緣基板 -47- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 509809 A7 B7 五、發明説明(45 ) ' -- 2 〇 1上形成多條閘極線2 0 2及多條源極線2 0 3,使之彼此交 叉。由相鄰閘極線2 〇 2及相鄰源極線2 〇 3所環繞之各區域界 足一圖素。薄膜電晶體204係位於閘極線202及源極線2 03 义各叉點附近。各薄膜電晶體2 0 4之汲極電極2 0 5係連接於 對應圖素電極206上。各圖素用以形成圖素電極206之部分 由頂部觀看包括兩區域,即具有高透射效率之區域τ及具 有同反射效率之區域。此實施例中,氧化銦錫層2 〇 7構成 區域T之頂層以作為高透射效率之層,而A〗層2〇8(或μ合 金層)構成區域R之頂層以作為高反射效率之層。該層207 及20 8構成各圖素之圖素電極2〇6。圖素電極206經由閘極 絕緣膜2 0 9與位於後續圖素列中之相鄰圖素的閘極線2 〇 2 & 重®。於驅動期間,於該重疊部分形成用以驅動液晶之儲 存電容器。 薄膜電晶體2 0 4依序包括作為源極/汲極而自對應之閘極 線2 0 2 (此情況係為2 〇 2 a )分枝之閘極2 1 0、閘極絕緣膜2 0 9 、半導體層212、通道保護層213、及n + -Si層211。 雖未明示,但形成之主動陣列基板具有對正膜,其連接 具有透明電極且上層具有對正膜之對基板。液晶注入介於 兩片密封基板間之空隙中,後照光放置於形成之結構之後 側面上,而完成此實施例之液晶顯示裝置。 使用含有黑色顏料及0.5 %之旋光性物質S - 8 1 1 ( M e r c k & Co.,Inc.製造)之賓主型液晶材料zLI23 27(Merck & C ο .,I n c .製造)之混合物作為液晶。亦可使用電控型雙折 射(E C B )模式作為液晶模式,將偏光板放置於液晶層之頂 -48- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 ____B7 五、發明説明(46 ) 面及底面:上。需要彩色顯示時,於液晶層頂部放置包括紅 色、綠色及藍色彩色層之濾色器(稱為CF層)。 下文將描述此實施例製造該主動陣列基板之方法。 首先,於、纟巴緣基板2 0 1上形成由τ a所製造之閘極線2 〇 2 及閘極210,而於整體形成之基板上形成閘極絕緣膜2〇9。 之後,於各個閘極210上形成半導體層212及通道保護層 213,之後形成作為源極211及作為汲極2〇5(或211)之 η + - S i 層。 藉 >賤射及製作佈線圖型依序形成氧化銦錫層2 〇 3 a (底層) 及金屬層2 0 3 b (頂層)以形成源極線2 〇 3。此實施例中,使 用Ti作為金屬層203b。 源極線2 0 3之雙層結構之優點係為即使構成各源極線2 〇 3 之至屬層203b部分有缺陷’氣化姻錫層2 〇 3 a仍可保持該 -源極線2 0 3之電性連接,而減少該源極線2 〇 3斷線之可能。 該T區域具有高透光效率之氧化铜鍚層2 〇 7係於與形成源 極線203之氧化銦錫層203a相同之步騾中由相同材料形成 。具有高反射效率之R區域係依序賤射並製作佈線圖型而 藉著形成Mo層214及A1層208而形成。該A1層208可於其 厚度約1 5 0毫微米或更厚時提供充分安定之反射效率(約 9 0 %)。於此實施例中,該a 1層2 0 8之厚度係為1 5 0毫微米 ’以使環境光線有效地反射。A g,T a,W等亦可用以取代 A1及A1合金以用於高反射性之層(A1層208)。 此實施例中,氧化銦錫層207及A1層208用於各圖素中作 為圖素電極206。或可形成具有不同厚度之A1或A1合金層 -49- 本紙張尺度適用中國國家標準(CNS) A4規格(21〇χ297&|) 509809 A7 ____B7 五、發明説明(47 ) ,以個別:界定高透光效率之區域及高反射效率之區域以作 為區域T及R。此使該製造方法較使用不同材料之方法簡易 。而且,R區之高反射效率層(此實施例中為A丨層)可使用 與用於源極線203之金屬層203b相同之材料製造。而容許 使用製造習用透射型液晶顯示裝置之方法製造此實施例之 液晶顯示裝置。 如前文所述,各圖素電極206包括高透射效率區域τ及高 透光效率區域R。此結構可得到一種液晶顯示裝置,其與 使用半透射型反射膜之習用液晶顯示裝置比較下,更有效 地利用環境光及照射光進行透射/反射模式顯示。 於各圖素之整體區域上及位於後續圖素列之相鄰圖素閘 極線2 0 2 a上,經由夹置於其間之閘極絕緣膜2 〇 9形成作為 圖素電極206之氧化銦錫層207。經由夾置於其間之M〇層 -214於違氧化姻錫層207上形成A1層208,以於島狀圖素之 中心部分中構成區域R。根據此種方式,因為該氧化銦錫 層2 0 7及該A1層2 0 8彼此電性連接,故區域τ及r將接收自 相同薄膜電晶體204之相同電壓施加於液晶上。因此,防 止因單一圖素中之液晶分子配向於電壓施加期間改變而產生 轉化線。 於氧化銦錫層207及A1層208間夹置Mo層214可防止該 氧化銦錫層2 0 7與該A 1層間經由製造過程中之電解溶液接 觸,而產生電姓。 此貝施例中’藉著將T區面積相對於R區面積之比例設定 於6 0 · 4 0而彳于到良好顯示特性。該面積比不限於此值,但 -50 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 _____B7 五、發明説明(48 ) 可根據T及R區之透射/反射效率及該裝置之用途而適當地 改變。 此實施例中’ R區之面積以約有效圖素面積之約1 〇至約 9 0 %為佳(即T區面積及R區面積之總和)。若該百分比低於 約1 0 %,即咼透射效率之區域佔該圖素之極大部分,則產 生習用透射型液晶顯示裝置之間題,即,當環境變得太亮 時,该顯示模糊之問題。相反地,若r區之百分比超過約 9 0 % ’則產生當其境光線太暗而無法僅使用環境光線觀看 該顯示器之問題。即,即使於該情沉下連通後照光,T區 之佔有率仍低至為法辨識所形成之顯示。 尤其,當遠液晶顯示裝置施加於主要用於戶外之裝置上 時,電池使用時間係為重要因素,而該裝置應設計成充分 利用環境光線以降低能量消耗。是故,高反射效率之R區 — 的面積以該有效圖素面積之約4 〇至約9 〇 %為佳。當R區之 面積佔有率約40%時,僅使用反射模式顯示即足以顯示之 環境受限,而需要來自後照光之光線的時間變長。此情況 縮短電池使用時間。 另一方面,當該液晶顯示裝置應用於主要於戶外使用之 裝置時,該裝置應設計成有效利用來自後照光之光線。是 故,R區面積以為有效圖素面積之約丨〇側約6 〇 %為佳。當 R區之面積佔有率超過6 〇 %時,用使來自後照光之光線穿 透之T區變得太小。為了補償此種現象,後照光之亮度需 實質較例如透射型液晶顯示裝置增加。此增加能量消耗而 降低該裝置之後照光利用效率。 -51 - 本紙張尺度適用中國國家標準(CNS) A4規格(21〇 X 297公爱) 509809 A7 ---- B7 五、發明説明(49 ) 此見她例之液晶顯示裝置實際上裝置於電池驅動之攝影 機中。結果’藉著調整後照光之亮度,不論於環境光之亮 度如何’顯示皆保持明亮而可辨認。尤其,當該裝置於好 天氣下用於戶外時,不需開啟後照光,故降低能量消耗。 因此’與僅使用透射型液晶顯示裝置之裝置比較之下,電 池使用時間大幅增加。 (實施例1 1 ) 圖3 2係為本發明實施例1 1之液晶顯示裝置的主動陣列基 板S部分平面圖。圖33係為沿圖32iH-H線所得之剖面圖。 此實施例中’各圖素欲形成圖素電極之部分自上方觀看 時於其中心分成兩部分,即高透射效率之τ區及高反射效 率之R區。 相同組件以與實施例1 〇之圖3 0及3 1所用者相同之參考編 — 號表示。圖素、薄膜電晶體結構、及該裝置之製造方法實 質上與實施例1 〇所述者相同。 參照圖3 2及3 3,於各圖素自中心部分至對應閘極線2 〇 2 (附近之範圍區域内形成氧化銦錫層2〇7,並部分連接於 薄膜電晶體204之汲極2 0 5。高反射效率之A1層208經由位 於圖素中心部分之Mo層214而與氧化銦錫層207重疊。該 A 1層2 0 8於圖素與氧化銦錫層2 〇 7區域相反之側面上延伸 ’經由閘極絕緣膜2 〇 9與位於後續圖素列而供相鄰圖素使 用之閘極線2 0 2 a重疊。 因為該氧化銦錫層2 0 7及A 1層係經由Μ 〇層2 1 4電性連接 ’故抑制因氧化銦錫層2 0 7與A 1層2 0 8接觸所致之電蝕。 -52- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 一 "" 一 509809 A7 _ B7 五、發明説明(50 ) A1層20 8即R區及閘極線202a與相鄰圖素間之重#係經由 絕緣膜2 0 9達成。此重疊於驅動液晶期間形成儲存電容哭 ’而R區之重疊部分亦用於顯示。此使圖素之有效面積較 習用結構大幅增加。 為了進一步增加圖素之鏡孔比’可經由絕緣膜而於薄膜 電晶體2 0 4或源極線2 0 3上形成高反射效率膜諸如a 1層2 〇 8 ’以作為圖素電極2 0 6之一部分(其係電性連接於該沒極 2 〇 5 )。然而,此情況下,該絕緣膜之厚度 '材料、及圖型 設計應適當地決定,使影像品質因圖素電極2 〇 6與源極線 2 〇 3間所產生之寄生電容而降低之情況減至最小。 (實施例1 2 ) 圖〇 4係為本發明實施例1 2之液晶顯tf裝置之主動陣列基 板的部分平面圖。圖35係為沿圖34之I-Ι線所得之剖面圖。 此實施例與實施例1 1相異之處在於經由閘極絕緣膜2 〇 9 於高反射效率之區域R下形成共用線215。 實施例1 0及1 1之圖3 0至3 3中,相同組件以相同參考編號 表示。該圖素、薄膜電晶體結構、及裝置之製造方法實質 上與實施例1 0及1 1所描述者相同。 參照圖3 4及3 5,氧化銦錫層2 0 7係於各圖素位於對應閘 極線2 0 2中心部分至邊緣部分上形成,而連接於薄膜電晶 體204之汲極205。高反射效率之A1層208經由位於圖素中 心部分之—Μ 〇層而與氧化銦錫層207重疊。該A1層208於圖 素與氧化銦錫層2 0 7區域相反之側面上延伸,經由閘極絕 緣膜2 0 9與位於後續圖素列而供相鄰圖素使用之共用線2 1 5重 -53- 本紙張尺度適用中國國家標準(CNS) A4規格(21〇 χ 297公釐) 51 五、發明説明( 璺。 : 因為m氧化銦錫層2 〇 7及A 1層係經由Μ 〇層2 1 4電性連接 ’故抑制因氧化銦錫層2 〇 7與Α丨層2 〇 8接觸所致之電蝕。 A 1層2 0 8即R區及共用線2丨5經由絕緣膜2 〇 9重疊,而於驅 動液晶期間形成儲存電容器,而改善顯示。此種儲存電容 益之形成不降低鏡孔比。 為了進一步增加圖素之鏡孔比,可經由絕緣膜而於薄膜 電晶體204或源極線203上形成高反射效率膜諸如八丨層二⑽ 以作為圖素電極2 〇 6之一部分(其係電性連接於該汲極 2〇5)。然而,此情況下,該絕緣膜之厚度及材料應適當地 失足使&像貝因圖素電極2 0 6與薄膜電晶體2 〇 4或源極 線2〇3間不產生寄生電容。例如形成氧化銦錫層之後,於 形成I基板的整體表面上形成介電常數約3 6之有機絕緣膜 ’厚度高達約3微米。之後,可於各圖素中形成^層,使 之與薄膜電晶體204或源極線2〇3重疊,並電性連接於汲極 2 〇 5、此種%性連接可藉著於汲極2 〇 5或氧化鋼錫層⑼7上 形成接觸孔而經由接觸孔達成。 此實施例中’各圖素欲形成圖素電極2〇6之部分分成兩 區,即南透光效率之區域(丁區)及高反射效率之區域(R區) 。或孩部分可分成三個或多個區域。例如,如圖%所示, 圖素電極206可分成三個區域’即高透射效率之Τ區、高反 射效率之為、及具有與其他兩區不同之透射或反射效率 之C區。 (實施例1 3 ) •54- _—_____ B7 _ 五、發明説明(52 ) 圖j 7係為本發明實施例1 3之液晶顯示裝置的主動陣列基 板之部分平面圖。圖3 8 A至3 8 D係為沿圖3 7之J - J線所得之 剖面圖,說明此實施例液晶顯示裝置之製造方法。 此實施例中,高反射效率之r區係由與源極線相同之材料 製造。於實施例1 〇至1 2中之圖3 0至3 6中,相同組件以相 同編號表示。該圖素、薄膜電晶體結構、及該裝置之製造 方法實質上與實施例1 0至1 2所述般者相同,除非另有陳述。 此實施例中,各圖素包括位於其中心部分之高透射效率丁 區及環繞該T區之R區。該R區之外圍輪廓係為依隨兩閘極 線及兩源極線之方型。R區包括高反射效率之層,由與源 極線相同之材料製造,得到高反射效率。 參照圖3 8 A至3 8 D描述製造該液晶顯示裝置之方法。 參照圖3 8 A,藉濺射依序於絕緣基板2 〇丨上沉積閘極線 2 0 2 (參照圖3 7 )及閘極2 1 〇、閘極絕緣膜2 〇 9、半導體層 212、通道保護層213、及欲充作源極211及汲極205(或 211)之n + -Si層211。之後,藉濺射於形成之基板上沉積 供源極線2 0 3 (參照圖3 7 )使用之導電膜2 4 1。 參照圖3 8 B,該導電膜2 4 1製作佈線圖型以形成高反射效 率之層242、汲極-圖素連接層243、及源極線203。該層 2 4 2之高反射效率區域係對應於R區。 參照圖3 8 C,於形成之基板上形成中間層絕緣膜2 4 4,之 後形成貫穿該中間層絕緣膜2 4.4之接觸孔2 4 5。 參照圖3 8 D,於各圖素之整體區域上形成由氧化銦錫所 製造之高透射效率層246。該高透射效率層246可由任何其 -55- 本紙張尺度適用中國國家標準(CNS) A4規格(21〇X 297公黄) A7 B7 五、發明説明(53 他高透射:效率材料製造。該高透射效率層2 4 6係經由貫穿 中間層絕緣膜2 4 4之接觸孔2 4 5連接於連接層2 4 3,而電性 連接於對應之汲極205。高透射效率層246亦充作提供電壓 於液晶層之圖素電極,使該電壓係經由高透射效率層2 4 6 提供於液晶層對應於T及R區之部分。因此,此實施例中, 各圖素電極係僅包括高透射效率層2 4 6,而不包括高透射 效率之T區及高反射效率之r區。此種結構優於透射型液晶 顯不裝置之處係為可於不增加程序步驟數目而圖素電極形 成失敗之情況減至最小之情況下,形成高反射效率區域。 (實施例1 4 ) 圖3 9係為本發明實施例丨4液晶顯示裝置之主動陣列基板 的部分平面圖。圖40A至40D係為沿圖39之κ-κ線所得之 剖面圖,說明製造此實施例液晶顯示裝置之方法。 於此實施例中,高反射效率之R區(圖3 9之陰影部分)係 由與閘極線所用者相同之材料製造。實施例丨〇至丨3中之圖 J 0至3 8中,相同組件以相同編號表示。除非另有陳述,否 則圖素、薄膜電晶體結構、及裝置之製造方法實質上與實 施例1 0至1 3所描述者相同。 2實施例中,自頂部觀看,各圖素包括位於其中心而具 有高透射效率之T區,及環繞該了區而實質包括兩連接條紋 〈r區m之外部輪廓係為依附兩閘極線及兩源極線之 万型° n區包括語與閘㈣相同之材料製造之高反射效率 層’得到高反射效率。 現在參照圖40A至_描述該液晶顯示裝置之製造方法。 * 56 -Made by Merck & Co., Inc.] viJ). Each pixel of the smallest display unit of the liquid crystal display device 100 includes a reflective region 120R defined by a reflective electrode 69 and a transmissive region 120T defined by a transmissive electrode 68. The thickness of the liquid crystal layer 140 is dr in the reflection area 120R and dt in the transmission area 120T (dt = 2d0), which is used for the light path of the display beam (the reflected light beam in the reflection area and in the transmission area) The transmitted light beams) are actually equal to each other. Although dr == 2 dt is better, but dt and dr can be appropriately determined according to the display characteristics. The prerequisite is dt > dr. Dr-generally about 4 to About 6 micrometers, and dr is about 2 to about 3 micrometers. In other words, a step of about 2 to about 3 micrometers is formed in each pixel region of the active array substrate 70. When the reflective electrode 69 has the structure shown in FIG. 25 In the case of concave and convex surfaces, the average thickness should be dr. In this case, the transmissive / reflective liquid crystal display device 100 includes two types of regions (reflective region and transmissive region), where the thickness of the liquid crystal layer 14 is different from each other In this embodiment, the active array substrate 70 includes a reflective region 12 R and a transmissive region 12 T, which are different in height from the side facing the liquid crystal layer 140. The actual manufacturing has the structure shown in FIG. 25. The structure of the liquid crystal display device (diagonal line: 8.4 inches), 6 4 gray scale display Evaluate the display characteristics (transmittance and reflectivity) of the device. The evaluation results are shown in Figure 26. The liquid crystal display device -45-This paper size is applicable to China National Winter Standard (CNS) A4 (210 X 297) ) 509809 A7 B7 5. The invention is described in the following clauses. It is manufactured under the following conditions. The ratio of the 120T area of the transmission area to the reflection £ 1 2 R in a pixel is 4 · 6. The transmission electrode 6 8 is made of steel tin oxide. The reflective electrode is made of A1. The thickness dt of the liquid crystal layer 1 40 in the transmissive region 12 0 T is set to about 5.5 micrometers, and the thickness of the liquid crystal layer 1 40 in the reflective region 120R is The setting is about 3 microns. The transmittance of the liquid crystal display device in the transmission mode using light from the back light is measured using MB-5 manufactured by T 〇pc 〇n C 〇., And the liquid crystal display device is in the reflection mode The reflectivity using ambient light is measured using an integrating sphere using LCD-5 000 manufactured by Otsuka Electronics Co., Ltd. As shown in Fig. 26, the reflectance and transmittance in a gray scale display of 64 The changes (individual solid and dashed lines in Figures 2 and 6) substantially coincide with each other Therefore, even if the transmission mode display using the light from the backlight and the reflection mode display using the ambient light are used at the same time, a gray scale display with sufficient display quality can still be obtained. The contrast between the transmission mode and the reflection mode Individuals are about 200 and about 25. The evaluation results of color reproducibility will be described below. Figures 2 7 and 28 are conventional transmission type liquid crystal display devices and the transmissive / reflective type liquid crystal display devices of this embodiment at different brightness. Chromaticity map under ambient light. These liquid crystal display devices all use the same backlight. As shown in Fig. 27, when the illuminance of the ambient light on the display screen increases from 0 1 X to 8,000 lx and to 17,000 lx, the color reproducibility range of the conventional liquid crystal display device (the triangular area in Fig. 27) is greatly reduced. Observers can notice blurred colors. However, in transmissive / reflective liquid crystal display devices, such as -46- This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) A7 _______B7 V. Description of the invention (44) tf 'in Figure 28, The color reproducibility of illuminance of 8,000,000 is substantially the same as that of illuminance of 0.1 lx. Moreover, when the illuminance is 丨 7, _ ΐχ, the color reproducibility is only slightly reduced. Therefore, there is almost no color blur. In conventional transmissive liquid crystal display devices, the contrast is reduced because of the reflection of ambient light from the surface of the display panel and the reflection of light from the black mask, contacts, etc. I used to block light. In contrast, in the transmissive / reflective liquid crystal display device of this embodiment, ambient light is provided in addition to the transmission mode display (reflection mode display, so the reflection mode display can be suppressed in the transmission mode display because the ambient light is reflected. The resulting contrast is reduced. Therefore, no matter how bright the ambient light becomes: ¾ 'The contrast obtained by the liquid crystal display device of this embodiment is not lower than that obtained by using only a reflection mode display. As a result, the transmissive type in this embodiment In the reflection type liquid crystal display device, the color reproducibility is not reduced even under bright ambient light, so a display with high visibility can be obtained under any conditions. Fig. 2 shows another specific example of the structure of this embodiment. The reflective electrode region 160R includes a reflective layer (reflective plate) 169 and a part of the transmissive electrode 168. Unlike the structure shown in FIG. 25, the reflective electrode region i20R includes a reflective electrode 69 having reflective characteristics. The active array substrate The height of the reflective electrode region 160R can be controlled by adjusting the thickness of the reflective layer 169 and / or the insulating layer 170 on the reflective layer 169. Embodiment 10) FIG. 30 is a plan view of an active array substrate of a liquid crystal display device according to Embodiment 10 of the present invention. FIG. 31 is a cross-sectional view taken along line GG of FIG. 30. Referring to FIGS. 30 and 31, On the transparent insulating substrate made of glass or plastic-47- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 509809 A7 B7 V. Description of the invention (45) '-2 〇1 The gate line 202 and a plurality of source lines 203 cross each other. Each area surrounded by the adjacent gate line 200 and the adjacent source line 203 is a pixel. The thin film transistor 204 is located near the cross points of the gate line 202 and the source line 2 03. The drain electrode 2 0 5 of each thin film transistor 204 is connected to the corresponding pixel electrode 206. For each pixel The portion forming the pixel electrode 206 includes two regions viewed from the top, that is, a region τ having a high transmission efficiency and a region having the same reflection efficiency. In this embodiment, the indium tin oxide layer 207 forms the top layer of the region T as a top layer. A layer with high transmission efficiency, and the layer A8 (or μ alloy layer) constitutes the top layer of the region R for high reflection The layer 207 and 208 constitute the pixel electrode 206 of each pixel. The pixel electrode 206 passes through the gate insulating film 209 and the gate line of the adjacent pixel in the subsequent pixel row. 2 〇2 & Heavy. During the driving period, a storage capacitor for driving the liquid crystal is formed on the overlapped portion. The thin film transistor 2 0 4 sequentially includes a gate line corresponding to the source / drain 2 0 2 (In this case, it is 002a.) The branched gate 2 10, the gate insulating film 209, the semiconductor layer 212, the channel protection layer 213, and the n + -Si layer 211 are branched. Although not explicitly stated, the formed active array substrate has an alignment film which is connected to a counter substrate having a transparent electrode and an upper layer having an alignment film. The liquid crystal is injected into the space between the two sealed substrates, and the back light is placed on the side of the formed structure to complete the liquid crystal display device of this embodiment. A mixture of a guest-host liquid crystal material zLI23 27 (Merck & C.o., Inc.) manufactured by Merck & Co., Inc. containing a black pigment and 0.5% optically active substance S-8 1 1 (manufactured by Merck & Co., Inc.) is used. As a liquid crystal. You can also use the electronically controlled birefringence (ECB) mode as the liquid crystal mode, and place the polarizer on top of the liquid crystal layer. -48- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 509809 A7 ____B7 5. Description of the invention (46) Front and bottom: top. When color display is required, a color filter (called a CF layer) including red, green and blue color layers is placed on top of the liquid crystal layer. The method of manufacturing the active array substrate in this embodiment will be described below. First, a gate line 2 02 and a gate 210 made of τ a are formed on the base substrate 201, and a gate insulating film 209 is formed on the integrally formed substrate. Thereafter, a semiconductor layer 212 and a channel protection layer 213 are formed on each of the gate electrodes 210, and then an η + -S i layer is formed as a source electrode 211 and a drain electrode 205 (or 211). By > injecting and making a wiring pattern, an indium tin oxide layer 203a (bottom layer) and a metal layer 203b (top layer) are sequentially formed to form a source line 203. In this embodiment, Ti is used as the metal layer 203b. The advantage of the double-layered structure of the source line 2 0 3 is that even if the source layer 2 0 3 to the metal layer 203 b is partially defective, the gasified marriage tin layer 2 0 3 a can maintain the-source line 2 0 3 electrical connection, and reduce the possibility of the source line 203 disconnection. The copper oxide layer 207 having a high light transmission efficiency in the T region is formed of the same material in the same step as the indium tin oxide layer 203a forming the source line 203. The R region with high reflection efficiency is sequentially formed by forming a wiring pattern and forming a Mo layer 214 and an A1 layer 208. The A1 layer 208 can provide a sufficiently stable reflection efficiency (about 90%) at a thickness of about 150 nm or more. In this embodiment, the thickness of the a 1 layer 208 is 150 nm ′ to effectively reflect ambient light. A g, T a, W, etc. can also be used instead of A1 and A1 alloys for highly reflective layers (A1 layer 208). In this embodiment, the indium tin oxide layer 207 and the A1 layer 208 are used as the pixel electrode 206 in each pixel. Or can form A1 or A1 alloy layer with different thickness-49- This paper size is applicable to Chinese National Standard (CNS) A4 specification (21〇297 & |) 509809 A7 ____B7 V. Description of the invention (47) to individually define the height Regions of light transmission efficiency and regions of high reflection efficiency are used as the regions T and R. This makes the manufacturing method simpler than the method using different materials. Moreover, the high reflection efficiency layer (the A 丨 layer in this embodiment) of the R region can be made of the same material as the metal layer 203b used for the source line 203. The method of manufacturing a conventional transmission-type liquid crystal display device is allowed to be used to manufacture the liquid crystal display device of this embodiment. As described above, each pixel electrode 206 includes a high transmission efficiency region τ and a high transmission efficiency region R. With this structure, it is possible to obtain a liquid crystal display device which, in comparison with a conventional liquid crystal display device using a transflective reflective film, can more effectively use ambient light and irradiated light for transmission / reflection mode display. On the entire area of each pixel and adjacent pixel gate lines 2 0 2 a located in the subsequent pixel rows, indium oxide is formed as the pixel electrode 206 through the gate insulating film 2 09 sandwiched therebetween.锡 层 207。 Tin layer 207. An A1 layer 208 is formed on the oxidized tin layer 207 via the Mo layer -214 sandwiched therebetween to form a region R in the central portion of the island-like pixel. According to this method, since the indium tin oxide layer 207 and the A1 layer 208 are electrically connected to each other, the regions τ and r apply the same voltage received from the same thin film transistor 204 to the liquid crystal. Therefore, a conversion line is prevented from being generated due to a change in alignment of liquid crystal molecules in a single pixel during a voltage application. The interposition of the Mo layer 214 between the indium tin oxide layer 207 and the A1 layer 208 can prevent the indium tin oxide layer 207 and the A 1 layer from contacting with each other through the electrolytic solution during the manufacturing process, thereby generating an electrical name. In this example, a good display characteristic is achieved by setting the ratio of the area of the T area to the area of the R area to 60.40. The area ratio is not limited to this value, but -50-This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 _____B7 V. Description of the invention (48) According to the transmission of the T and R areas / The reflection efficiency and the use of the device are appropriately changed. In this embodiment, the area of the R region is preferably about 10 to about 90% of the effective pixel area (that is, the sum of the area of the T region and the area of the R region). If the percentage is less than about 10%, that is, the area where the transmission efficiency accounts for a large portion of the pixel, a problem arises in the conventional transmission type liquid crystal display device, that is, when the environment becomes too bright, the display is blurred. . Conversely, if the percentage of the r-region exceeds about 90% ', a problem arises when the ambient light is too low to view the display using only ambient light. That is, even if the backlight is connected after the situation sinks, the occupancy rate of the T area is still low as a display formed by the method of identification. In particular, when a remote liquid crystal display device is applied to a device mainly used outdoors, battery life is an important factor, and the device should be designed to make full use of ambient light to reduce energy consumption. Therefore, the area of the R region with high reflection efficiency is preferably about 40 to about 90% of the effective pixel area. When the area occupancy of the R area is about 40%, the environment which is sufficient for display only using the reflection mode display is limited, and the time required for the light from the backlight becomes longer. This reduces the battery life. On the other hand, when the liquid crystal display device is applied to a device mainly used outdoors, the device should be designed to effectively utilize light from the backlight. Therefore, the area of the R region is preferably about 60% of the effective pixel area on the side. When the area occupancy of the R region exceeds 60%, the T region used to penetrate the light from the backlight becomes too small. In order to compensate for this phenomenon, the brightness of the backlight must be substantially increased compared to, for example, a transmissive liquid crystal display device. This increases energy consumption and reduces the efficiency of subsequent light utilization by the device. -51-This paper size is in accordance with China National Standard (CNS) A4 specification (21〇X 297 public love) 509809 A7 ---- B7 V. Description of the invention (49) The liquid crystal display device in this case is actually installed in the battery Driven camera. As a result, by adjusting the brightness of the backlight, the display remains bright and recognizable regardless of the brightness of the ambient light. In particular, when the device is used outdoors in good weather, there is no need to turn on the backlight, so energy consumption is reduced. Therefore, compared with a device using only a transmissive liquid crystal display device, the battery usage time is significantly increased. (Embodiment 11) Fig. 32 is a plan view of part S of an active matrix substrate of a liquid crystal display device according to Embodiment 11 of the present invention. Fig. 33 is a cross-sectional view taken along the line H-H of Fig. 32. In this embodiment, the portion of each pixel that is to be formed into a pixel electrode is divided into two portions at its center when viewed from above, namely, a τ region with high transmission efficiency and an R region with high reflection efficiency. Identical components are indicated by the same reference numerals as those used in Figures 30 and 31 of Embodiment 10. The pixel, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Embodiment 10. Referring to FIGS. 3 2 and 3 3, an indium tin oxide layer 207 is formed in the area of each pixel from the center portion to the corresponding gate line 2 0 2 (and is connected to the drain electrode 2 of the thin film transistor 204 in part). 0 5. The high reflection efficiency A1 layer 208 overlaps the indium tin oxide layer 207 via the Mo layer 214 located at the center of the pixel. The A 1 layer 2 0 8 is opposite to the area between the pixel and the indium tin oxide layer 207. The extension “on the side surface” overlaps with a gate line 2 0 2 a located in a subsequent pixel row for adjacent pixels via a gate insulating film 209. Because the indium tin oxide layer 207 and the A 1 layer pass through The Μ layer 2 1 4 is electrically connected, so it suppresses the electric corrosion caused by the contact between the indium tin oxide layer 207 and the A 1 layer 208. -52- This paper standard applies to China National Standard (CNS) A4 specifications ( 210X 297 mm) A "509809 A7 _ B7 V. Description of the invention (50) A1 layer 20 8 That is the weight between the R region and the gate line 202a and the adjacent pixel # is through the insulating film 2 0 9 Achieved. This overlap forms the storage capacitor cry during the driving of the liquid crystal, and the overlapping portion of the R region is also used for display. This makes the effective area of the pixels significantly larger than the conventional structure. In order to further increase the pixel aperture ratio of the pixel, a high reflection efficiency film such as a 1 layer 2 0 8 'can be formed on the thin film transistor 204 or the source line 2 0 3 through the insulating film as the pixel electrode 2 0 Part of 6 (which is electrically connected to the electrode 205). However, in this case, the thickness of the insulating film, the material, and the pattern design should be appropriately determined so that the image quality depends on the pixel electrode 2 〇 The reduction in the parasitic capacitance generated between 6 and the source line 2 03 is minimized. (Embodiment 12) Fig. 04 is a part of an active array substrate of a liquid crystal display tf device according to Embodiment 12 of the present invention. A plan view. Fig. 35 is a cross-sectional view taken along line I-I in Fig. 34. This embodiment is different from Embodiment 11 in that a common is formed under a region R with a high reflection efficiency through a gate insulating film 2 09. Line 215. In FIGS. 30 to 33 of Embodiments 10 and 11, the same components are denoted by the same reference numerals. The manufacturing method of the pixel, the thin film transistor structure, and the device is substantially the same as that of Embodiments 10 and 1. The description is the same as 1. With reference to Figs. 3 4 and 35, the indium tin oxide layer 207 is at each pixel position. Corresponding to the gate line 202, it is formed from the center part to the edge part, and is connected to the drain electrode 205 of the thin film transistor 204. The high reflection efficiency A1 layer 208 and the indium tin oxide pass through the -M 0 layer located at the center of the pixel The layer 207 overlaps. The A1 layer 208 extends on the side of the pixel opposite to the area of the indium tin oxide layer 207, and passes through the gate insulating film 209 and the common line located in the subsequent pixel row for adjacent pixels. 2 1 5x-53- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21〇χ 297 mm) 51 5. Description of the invention (璺). : Since the m indium tin oxide layer 207 and the A 1 layer are electrically connected via the mol layer 2 1 4 ′, the electric corrosion caused by the contact between the indium tin oxide layer 207 and the A 丨 layer 208 is suppressed. The A 1 layer 208, that is, the R region and the common line 2 and 5 are overlapped via the insulating film 209, and a storage capacitor is formed during the driving of the liquid crystal, thereby improving the display. Such storage capacitors are formed without reducing the mirror-to-hole ratio. In order to further increase the pixel-to-hole ratio of the pixel, a high reflection efficiency film such as eight layers of two layers can be formed on the thin film transistor 204 or the source line 203 via an insulating film as a part of the pixel electrode 206 (the system Electrically connected to the drain (205). However, in this case, the thickness and material of the insulating film should be appropriately deducted so that no parasitic capacitance is generated between the < > Bein pixel electrode 206 and the thin film transistor 204 or the source line 203. For example, after the indium tin oxide layer is formed, an organic insulating film with a dielectric constant of about 36 is formed on the entire surface of the I substrate to a thickness of about 3 microns. After that, a layer can be formed in each pixel to overlap the thin film transistor 204 or the source line 203, and electrically connected to the drain electrode 205. Such a% connection can be made by the drain electrode A contact hole is formed in the 0.05 or steel oxide tin layer ⑼7 and is achieved through the contact hole. In this embodiment, the portion of each pixel that is to form the pixel electrode 206 is divided into two regions, namely, a region with a high light transmission efficiency (D region) and a region with a high reflection efficiency (R region). The child part can be divided into three or more areas. For example, as shown in Fig.%, The pixel electrode 206 can be divided into three regions', namely, a T region with high transmission efficiency, a C region with high reflection efficiency, and a C region with different transmission or reflection efficiency from the other two regions. (Embodiment 1 3) • 54- ________ B7 _ V. Description of the Invention (52) FIG. 7 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 13 of the present invention. FIGS. 38A to 38D are cross-sectional views taken along line J-J of FIG. 37, and illustrate a method for manufacturing the liquid crystal display device of this embodiment. In this embodiment, the r region with high reflection efficiency is made of the same material as the source line. In FIGS. 30 to 36 in Examples 10 to 12, the same components are denoted by the same numbers. The pixel, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Embodiments 10 to 12, unless otherwise stated. In this embodiment, each pixel includes a high transmission efficiency D region located at a center portion thereof and an R region surrounding the T region. The outer contour of the R region is a square shape following the two gate lines and the two source lines. The R region includes a layer with high reflection efficiency, and is made of the same material as the source line to obtain high reflection efficiency. A method of manufacturing the liquid crystal display device will be described with reference to FIGS. 38A to 38D. Referring to FIG. 38A, gate lines 2 02 (refer to FIG. 37), gate 2 1 0, gate insulating film 2 09, semiconductor layer 212, and the like are sequentially deposited on the insulating substrate 2 0 1 by sputtering. The channel protection layer 213 and the n + -Si layer 211 to be used as the source 211 and the drain 205 (or 211). After that, a conductive film 2 41 for the source line 2 03 (see FIG. 37) is deposited on the formed substrate by sputtering. Referring to FIG. 3B, the conductive film 241 is patterned to form a layer 242, a drain-pixel connection layer 243, and a source line 203 with high reflection efficiency. The high reflection efficiency region of this layer 2 4 2 corresponds to the R region. Referring to FIG. 3C, an interlayer insulating film 2 4 4 is formed on the formed substrate, and then a contact hole 2 4 5 is formed through the interlayer insulating film 2 4.4. 3D, a high transmission efficiency layer 246 made of indium tin oxide is formed on the entire area of each pixel. The high transmission efficiency layer 246 can be made of any of its -55- this paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 male yellow) A7 B7 V. Description of the invention (53 Other high transmission: efficient materials. The high The transmission efficiency layer 2 4 6 is connected to the connection layer 2 4 3 through the contact hole 2 4 5 penetrating the interlayer insulating film 2 4 4 and is electrically connected to the corresponding drain electrode 205. The high transmission efficiency layer 246 is also provided as The voltage is applied to the pixel electrode of the liquid crystal layer, so that the voltage is provided to the portions of the liquid crystal layer corresponding to the T and R regions through the high transmission efficiency layer 2 4 6. Therefore, in this embodiment, each pixel electrode system includes only high transmission The efficiency layer 2 4 6 does not include the T region with high transmission efficiency and the r region with high reflection efficiency. The advantage of this structure over the transmissive liquid crystal display device is that the pixel electrode can be formed without increasing the number of program steps. When the failure is minimized, a high reflection efficiency region is formed. (Embodiment 1 4) Fig. 39 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 4 of the present invention. Figs. 40A to 40D are A cross-sectional view taken along the κ-κ line in FIG. 39, The method for manufacturing the liquid crystal display device of this embodiment will be described. In this embodiment, the R region with high reflection efficiency (the shaded portion in FIG. 39) is made of the same material as that used for the gate line. Examples 丨 0 to 丨In the drawings J 0 to 3 in 3, the same components are denoted by the same numbers. Unless otherwise stated, the manufacturing method of the pixels, the thin film transistor structure, and the device is substantially the same as that described in Embodiments 10 to 13 In the second embodiment, when viewed from the top, each pixel includes a T region located at its center and having high transmission efficiency, and an outer contour surrounding the region which substantially includes two connecting stripes <r region m is attached to two gates The epipolar line and the two source lines of the multi-degree ° n region include a high reflection efficiency layer made of the same material as the gate 得到 to obtain high reflection efficiency. Now, a method of manufacturing the liquid crystal display device will be described with reference to FIGS. 40A to _. -
509809 A7 B7 五、發明説明(54 參照圖4 〇 A,於絕緣基板2 0 1上形成導電膜。該導電膜隨 後製作佈線圖型以形成閘極2 1 〇、閘極線2 0 2 (參照圖3 9 ) 、及高反射效率層2 4 2。高反射效率層2 4 2係對應於R區。 參照圖4 0 B,藉濺射依序於形成之基板上沉積閘極絕緣 膜209、半導體層212、通道保護層213、及欲作為源極 211及汲極205(或211)之n + -Si層211。之後,於相同步 驟中形成作為一部分源極層203之金屬層203b及汲極-圖素 電極連接層243。該連接層243與薄膜電晶體204之汲極 205部分重疊。 參照圖4 0 C,,藉濺射於形成之基板上沉積氧化銦錫,製 作佈線圖型以形成高透射效率層246,及作為源極線203之 一部分之氧化銦錫層2〇3a。於各圖素之整體面積上形成高 透射效率之層246,而於金屬層203b上形成氧化銦錫層 203a,以具有與金屬層203b相同之圖型。高透射效率層 246與欲電性連接於各薄膜電晶體2〇4之連接層243部分重 疊。 參照圖40D,形成鈍化膜247並製作佈線圖型。 因此’此實施例之液晶顯示裝置之各個圖素皆包括位於 其中心部分而具有高透射效率之T區,及環繞T區而為依附 相鄰源極線之兩連接條紋之高反射效率r區。此情況下, 因為源極線203之氧化銦錫層203a及具有高反射效率之料 層242係位於不同高度,故各圖素之氧化銦錫層2〇3a及高 反射效率料層242需防止漏光之間隙可縮小,而使圖素之 鏡孔比較於相反情況下形成T區及R區時(即高反射效率層 -57- 本紙張尺度適用中國國家標準(CNS) A4規格(21〇 X 297公¢)509809 A7 B7 V. Description of the invention (54 refer to FIG. 4 OA, a conductive film is formed on the insulating substrate 201. The conductive film is then patterned to form a gate electrode 2 1 0, a gate line 2 0 2 (see (Figure 3 9), and the high reflection efficiency layer 2 4 2. The high reflection efficiency layer 2 4 2 corresponds to the R region. Referring to FIG. 4 B, a gate insulating film 209 is sequentially deposited on the formed substrate by sputtering. The semiconductor layer 212, the channel protection layer 213, and the n + -Si layer 211 which is to be the source electrode 211 and the drain electrode 205 (or 211). Thereafter, the metal layer 203b and the drain layer 203 which are part of the source layer 203 are formed in the same step. Electrode-pixel electrode connection layer 243. The connection layer 243 partially overlaps with the drain electrode 205 of the thin film transistor 204. Referring to FIG. 40C, indium tin oxide is deposited on the formed substrate by sputtering to produce a wiring pattern to A high transmission efficiency layer 246 and an indium tin oxide layer 203a as a part of the source line 203 are formed. A high transmission efficiency layer 246 is formed on the entire area of each pixel, and an indium tin oxide is formed on the metal layer 203b. The layer 203a has the same pattern as the metal layer 203b. The high transmission efficiency layer 246 and The connection layer 243 connected to each thin film transistor 204 is partially overlapped. Referring to FIG. 40D, a passivation film 247 is formed and a wiring pattern is formed. Therefore, 'each pixel of the liquid crystal display device of this embodiment includes a central portion and The T region with high transmission efficiency and the r region with high reflection efficiency surrounding the two connecting stripes of adjacent source lines are surrounding the T region. In this case, the indium tin oxide layer 203a of the source line 203 and the high reflection efficiency The efficiency material layer 242 is located at different heights, so the indium tin oxide layer 203a and the high reflection efficiency material layer 242 of each pixel need to prevent light leakage gaps to be reduced, so that the mirror hole of the pixel is formed in the opposite case. For T and R zones (ie, high reflection efficiency layer -57-) This paper size applies to China National Standard (CNS) A4 (21〇X 297cm ¢)
装 訂 t 509809 A7Binding t 509809 A7
係位於該圖素之中心部分)增高。 此實施例中,如同實施例13,各圖素電極皆僅包梧一, 電極(即高透射效率層246)。此結構優於其中圖素電極1 括兩類電極之結構之處係為缺陷之發生率降低,而〇:已 地製造該裝置。 ‘ 可有效 此實施例中,各源極線2 0 3皆具有包括金屬層2 〇 3 b及氧 化銦錫層2 0 3 a之雙層結構。即使金屬層部分有缺陷,源極 線2 0 3仍藉氧化銦錫層203 a保持電性連接。而降低源極線 203斷線之可能。 (實施例1 5 ) 圖4 1係為本發明實施例丨5之液晶顯示裝置的主動陣列基 板之部分平面圖。圖4 2 A至4 2 C係沿圖4 1之L - L線所得之 剖面圖,說明製造此實施例液晶顯示裝置之方法。 於此實施例中,圖素電極經由絕緣膜延伸於閘極線及/或 源極線上,以增加有效圖素面積(實質上作為圖素之面積)。 實施例1 0至1 4中相同組件使用相同編號。除非另有陳述 ,否則圖素、薄膜電晶體結構、及該裝置之製造方法實質 上與實施例1 0至1 4所描述者相同。 如圖4 1所示,於此實施例中,自上方觀看,各圖素皆包 括位於其中心部分之高透射效率T區及環繞T區而由狹條所 形成之方型R區(圖41中之斜線區)。包括高透射效率層之 圖素電極經由中間層絕緣膜與相鄰閘極線2 0 2及源極線2 0 3 重疊,而可於液晶層位於閘極線2 0 2及源極線2 0 3上之部分 上施加電壓。此可確認有效圖素面積較實施例1 〇至1 4大。 -58- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 ------ B7 五、發明説明(56 ) 此貫施例:中,閘極線2 〇 2及源極線2 〇 3係於R區中作為高反 射效率層。 參照圖4 2 A至4 2 C描述該液晶顯示裝置之製造方法。 參照圖4 2 A ,藉濺射依序形成閘極2丨〇、閘極線2 〇 2 (參 照圖4 1 )、閘極絕緣膜2 〇 9、半導體層2丨2、通道保護層 213、及欲作為源極21丨及汲極2〇5(或211)之^ — 。閘極線202及源極線2 03中至少任一條-欲於後續步驟中 與作為圖素電極之透射層重疊-以由高反射效率材料製造為 佳。 參照圖42B,於形成之基板上形成中間層絕緣膜244,而 形成貫穿該中間層絕緣膜2 4 4之接觸孔2 4 5。 參照圖4 2 C,藉賤射於形成之基板上沉積高透射效率材 料諸如氧化銦錫,並製作佈線圖型以形成高透射效率層 2 4 6。遠咼透射效率層2 4 6係經由接觸孔2 4 5連接於連接層 243 ’其依序連接於薄膜電晶體204之沒極205。此情況下 ,該高透射效率層246經製作佈線圖型,而與至少閘極線 2 0 2及源極線2 0 3中之任一者重登。使用此結構,經由中間 層絕緣膜2 4 4而與高透射效率層2 4 6重疊之閘極線2 〇 2及/ 或源極線2 0 3可用為高反射效率層。 具有前述結構之顯示裝置應設計成不致因為高透射效率 層2 4 6與閘極線2 0 2或源極線2 0 3間產生電容,致而產生諸 如亭話現象,而導致影像品質降低。 因此,於此實施例中,各圖素皆包括位於其中心而具有 高透射效率之τ區及位於對應於相鄰閘極線及/或源極線之 -59- 本紙張尺度適用中國國家標準(CNS) Α4規格(210 X 297公釐)(Located in the center of the pixel). In this embodiment, as in Embodiment 13, each pixel electrode includes only one electrode (ie, the high transmission efficiency layer 246). The advantage of this structure over the structure in which the pixel electrode 1 includes both types of electrodes is that the incidence of defects is reduced, and 0: the device has been manufactured. ‘Effective In this embodiment, each source line 203 has a double-layer structure including a metal layer 203 b and an indium tin oxide layer 203 a. Even if the metal layer is partially defective, the source line 2 0 3 is still electrically connected by the indium tin oxide layer 203a. The possibility of disconnection of the source line 203 is reduced. (Embodiment 15) Fig. 41 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 5 of the present invention. 4 2 A to 4 2 C are cross-sectional views taken along line L-L of FIG. 41 and illustrate a method of manufacturing the liquid crystal display device of this embodiment. In this embodiment, the pixel electrode is extended on the gate line and / or the source line via an insulating film to increase the effective pixel area (substantially the area of the pixel). The same components in Examples 10 to 14 are given the same reference numerals. Unless otherwise stated, the pixel, the thin film transistor structure, and the manufacturing method of the device are substantially the same as those described in Embodiments 10 to 14. As shown in FIG. 41, in this embodiment, when viewed from above, each pixel includes a high transmission efficiency T region located at the center portion thereof and a square R region formed by a strip surrounding the T region (FIG. 41 Middle slash area). The pixel electrode including the high transmission efficiency layer overlaps the adjacent gate line 202 and the source line 2 03 through the interlayer insulating film, and may be located on the gate line 202 and the source line 20 in the liquid crystal layer. A voltage is applied to the upper part. This confirms that the effective pixel area is larger than that of Examples 10 to 14. -58- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 509809 A7 ------ B7 V. Description of the invention (56) This embodiment: Chinese, gate line 2 〇 2 and source line 203 are in the R region as a high reflection efficiency layer. A method for manufacturing the liquid crystal display device will be described with reference to FIGS. 4A to 4C. Referring to FIG. 4A, gates 2 and 0, gate lines 2 and 2 (see FIG. 41), gate insulating film 2 and semiconductor layer 2 and channel protection layer 213 are sequentially formed by sputtering. And want to be the source 21 丨 and drain 205 (or 211) ^ —. At least any one of the gate line 202 and the source line 203-to be overlapped with the transmissive layer as a pixel electrode in the subsequent steps-is preferably made of a material with high reflection efficiency. Referring to FIG. 42B, an interlayer insulating film 244 is formed on the formed substrate, and contact holes 2 4 5 are formed to penetrate through the interlayer insulating film 2 4 4. Referring to FIG. 4C, a high transmission efficiency material such as indium tin oxide is deposited on the formed substrate by low-level irradiation, and a wiring pattern is formed to form a high transmission efficiency layer 2 4 6. The remote transmission efficiency layer 2 4 6 is connected to the connection layer 243 ′ through the contact holes 2 4 5 and is sequentially connected to the electrode 205 of the thin film transistor 204. In this case, the high transmission efficiency layer 246 is re-registered with at least any one of the gate line 202 and the source line 203 after a wiring pattern is made. With this structure, the gate line 2 02 and / or the source line 2 03 which overlaps the high transmission efficiency layer 2 4 6 through the interlayer insulating film 2 4 4 can be used as a high reflection efficiency layer. The display device having the foregoing structure should be designed so as not to cause capacitance due to the high transmission efficiency layer 2 4 6 and the gate line 202 or the source line 203, which may cause a phenomenon such as a pavilion, thereby reducing the image quality. Therefore, in this embodiment, each pixel includes a τ region with high transmission efficiency at its center and -59- corresponding to adjacent gate and / or source lines. (CNS) Α4 size (210 X 297 mm)
發明説明 位置上而:具有高反射效率之R區。此消除了形成其他高反 射效率層之必要,而縮短該過程。 (貫施例1 6 ) 圖4 3係為本發明實施例1 6液晶顯示裝置之主動陣列基板 的部分平面圖。圖44A至44F係為沿圖43之Μ·Μ線所得之 剖面圖,說明此實施例液晶顯示裝置之製造方法。 如圖4 3所示’此實施例液晶顯示裝置之各個圖素皆包括 位於其中心之高透射效率Τ區,及位於τ區之側邊而包括依 附相鄰源極線2 0 3之兩條紋之高反射效率R區(圖4 3之斜線 部分)。 如圖44F所示,R區包括任意位於絕緣基板2〇1上之高隆 凸部分253a及低隆凸部分253b、位於此等隆凸部分253a 及253b上之聚合物樹脂層254、及位於該聚合物樹脂層 ~ 254上之高反射效率層242。形成之層242構成R區之表層 ,具有連續波型表面,經由接觸孔245及底層電極(未示) 電性連接於汲極205。 參照圖4 4 A至4 4 F描述製造該液晶顯示裝置之方法。 參照圖4 4 A,於絕緣基板2 0 1上形成多條閘極線2 0 2 (參 照圖4 3 )及自該閘極線2 0 2分枝而由C r,T a等材料製造之 閘極2 1 0。 於該絕緣基板201上形成由SiNx,SiOx等材料所製造之 閘極絕緣膜2 0 9,以覆蓋該閘極線2 0 2及該閘極2 1 0。於閘 極絕緣膜2 0 9上位於該閘極2 1 0上之部分上形成由非晶矽 (a-Si)、多晶矽、CdSe等材料所製造之半導體層212。於 -60- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 509809 A7 _ B7 五、發明説明(58 ) 各半導體層212上形成通道保護層213。於該通道保護層之 兩側邊上形成一對由a - S 1所製造之接觸層2 4 8,延伸至該 半導體層2 1 2之側邊。 於一接觸層248上形成由Ti ’ Mo,A1等材料製造之源極 249,而於另一接觸層248上形成由Ti,Mo,A1等材料製 造之汲極205。 此實施例中,使用Corning Inc.所製造之產品編號7059 尽度1 ♦ 1毫米之玻璃板作為絕緣基板2 0 1之材料。 參照圖4 4 B,藉濺射於形成之基板上形成導電膜,製作 佈線圖型以形成金屬層20 3b,同時作為源極線203及底層 電極2 5 0之一部分。每個底層2 5 0皆可經由閘極絕緣膜2 0 9 而部分覆蓋供後續圖素列中之相鄰圖素所使用之閘極2 〇 2 ,而於其間形成儲存電容器。 每個用以形成儲存電容器之閘極線2 〇 2皆可與高反射效 率層重疊,或閘極線202本身之反射效率可高至作為圖素 區(R區)之一部分,而進一步增加鏡孔比。 參照圖4 4 C,氧化銦錫藉濺射沉積於形成之基板上,製 作佈線圖型以形成氧化銦錫層203a,其與金屬層203b — 起構成源極線2 0 3。 此實施例中,各源極線2 0 3係具有包括金屬層2 03 b及氧 化銦錫層2 0 3 a之雙層結構。該雙層結構之優點係為即使金 屬層203b部分缺陷,仍可藉氧化銦錫層2〇3a保持源極線 2 0 3之電性連接。此降低源極線2 〇 3斷線之可能。 與形成氧化銦錫層2 0 3 a同時地,亦藉製作佈線圖型得到 -61 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公I)-·--~ B7 五、發明説明(59 ) 具有高透:射效率而構成圖素電極之層246。此時,可與源 極、、泉2 0 j同時地形成作為圖素電極而具有高透射效率之層 2 46 ° 參照圖44D,形成由感光性樹脂製造之抗蝕劑膜25 2,並 製作佈線圖型,隨之熱處理以使之鈍化,而於形成之基板 對應於R區之部分上形成具有實質圓型剖面之高隆凸部分 25ja及低隆凸部分253b。該隆凸部分253a及253b未位於 南透射效率層2 4 6層上為佳,使電壓可有效地施加於液晶 層上。然而’即使該隆凸部分253a及253b位於層246上, 只要該隆凸部分透明,仍不致有明顯之光學影響。 參照圖44E,於隆凸部分25 3 a& 25 3 b上形成聚合物膜 254。使用此膜,R區之凹陷及隆凸型表面可藉著減少平面 部分之數目而變得較連續。可藉著改變製造條件而省略此 步驟。 參照圖4 4 F,於聚合物膜2 5 4上藉著例如濺射而於預定部 分上形成高反射效率而由入丨製造之層242以作為圖素電極 。適於高反射效率層242之材料除A1及A1合金外,包括高 反射效率之Ta,Ni,Cr及Ag。高反射效率層242之厚度 以介於約0.0 1至約1 . 〇微米範圍内為佳。 因此,此實施例之液晶顯示裝置之各圖素包括位於其中 心部分之高透射效率T區,及依附相鄭源極線之高反射效 率R區。-使用此種結構,因為源極線2 〇 3之氧化銦錫層 203a及高反射效率層242係位於不同高度,與T及R區形成 位置相反之情況(即鬲反射效率層位於圖素之中心部分)比 -62- 適用中國國家標準(CNS) A4規格(210 X 297公资) A7 — __________B7 五、發明説明(6〇) 較’氧化銦錫層2 Ο 3 a與高反射效率層2 4 2間需防止漏光之 間隙可較縮小,而增加圖素之鏡孔比。 此實施例中’該高反射效率層2 4 2具有光滑之凹陷及隆 凸形狀表面,以使反射光散射於寬幅配向。同時使用散射 板時’不需使用抗蝕劑膜2 5 2形成隆凸部分,而高反射效 率層242之表面可碉成平面。於任一種情況下,該高反射 效率層2 4 2及該高透射效率層2 4 6皆為其間夹置有第三種物 質(例如樹脂及金屬諸如Μ 〇 )之個別層。使用此種結構,於 其中高透射效率層係由氧化銦錫製造而高反射效率層係由 Α1或Α1合金製造之特定情況下,可減少μ佈線圖型因於 Α1蝕刻步驟中易產生之電蝕而損壞。 (實施例1 7 ) 圖4 5係為本發明實施例1 7液晶顯示裝置之主動陣列基板 — 的部分平面圖。圖4 6係為沿圖4 5之Ν - Ν線所得之剖面圖。 參照圖4 5及4 6,該主動陣列基板包括具有矩陣型式之圖 素電極2 0 6及用以提供掃描信號之閘極線2 〇 2及用以提供顯 不信號之源極線2 0 3,其係環繞圖素電極2 〇 6之邊緣而彼此 交叉。 圖素電極2 0 6與閘極線2 0 2及源極線2 0 3於該邊緣經由中 間層絕緣膜244重疊。 薄膜電晶體2 0 4係位於該閘極線2 〇 2與該源極線2 0 3之各 交點上,—以作為於對應圖素電極2 〇 6上提供顯示信號縱開 關元件。薄膜電晶體204之閘極210係連接於對應閘極線 2 0 2 ’以使用輸入於閘極2 1 〇之信號驅動該薄膜電晶體2 〇 4 -63- 本紙張尺度適用中國國家標準(CNS) Α4規格(210 X 297公釐) 509809Description of the invention In position: R region with high reflection efficiency. This eliminates the need to form other high reflection efficiency layers and shortens the process. (Performance Example 16) FIG. 4 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 16 of the present invention. Figs. 44A to 44F are cross-sectional views taken along the line MM in Fig. 43 and illustrate a method of manufacturing the liquid crystal display device of this embodiment. As shown in FIG. 43, each pixel of the liquid crystal display device of this embodiment includes a high transmission efficiency T region located at the center thereof, and two stripes located on the side of the τ region and including adjacent source lines 2 0 3 The high reflection efficiency R region (the oblique part of Fig. 4 3). As shown in FIG. 44F, the R region includes any of high convex portions 253a and low convex portions 253b located on the insulating substrate 201, a polymer resin layer 254 located on these convex portions 253a and 253b, and High reflective efficiency layer 242 on the polymer resin layer ~ 254. The formed layer 242 constitutes the surface layer of the R region, and has a continuous wave surface, and is electrically connected to the drain electrode 205 through the contact hole 245 and a bottom electrode (not shown). A method of manufacturing the liquid crystal display device will be described with reference to FIGS. 4A to 4F. Referring to FIG. 4A, a plurality of gate lines 2 02 (refer to FIG. 4 3) are formed on the insulating substrate 2 01 and branched from the gate line 2 02 and manufactured from materials such as Cr, Ta, etc. Gate 2 1 0. A gate insulating film 209 made of a material such as SiNx, SiOx, etc. is formed on the insulating substrate 201 to cover the gate line 202 and the gate 2 10. A semiconductor layer 212 made of materials such as amorphous silicon (a-Si), polycrystalline silicon, and CdSe is formed on a portion of the gate insulating film 209 located on the gate 2 10. At -60- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 509809 A7 _ B7 V. Description of the invention (58) A channel protection layer 213 is formed on each semiconductor layer 212. A pair of contact layers 2 4 8 made of a-S 1 are formed on both sides of the channel protection layer and extend to the sides of the semiconductor layer 2 1 2. A source electrode 249 made of Ti 'Mo, A1 and other materials is formed on one contact layer 248, and a drain electrode 205 made of Ti, Mo, A1 and other materials is formed on the other contact layer 248. In this embodiment, a glass plate manufactured by Corning Inc. with the product number 7059 to the extent of 1 mm is used as the material of the insulating substrate 201. Referring to FIG. 4B, a conductive film is formed on the formed substrate by sputtering, and a wiring pattern is formed to form a metal layer 20 3b, which is also a part of the source line 203 and the bottom electrode 250. Each of the bottom layers 250 can partially cover a gate electrode 202 for use by an adjacent pixel in a subsequent pixel row through a gate insulating film 209 to form a storage capacitor therebetween. Each gate line 200 used to form a storage capacitor can overlap with a high reflection efficiency layer, or the reflection efficiency of the gate line 202 itself can be as high as a part of the pixel area (R area), and further increase the mirror Hole ratio. Referring to FIG. 4C, indium tin oxide is deposited on the formed substrate by sputtering, and a wiring pattern is formed to form an indium tin oxide layer 203a, which together with the metal layer 203b constitutes a source line 203. In this embodiment, each source line 2 03 has a double-layer structure including a metal layer 2 03 b and an indium tin oxide layer 2 3 a. The advantage of this two-layer structure is that even if the metal layer 203b is partially defective, the electrical connection of the source line 203 can be maintained by the indium tin oxide layer 203a. This reduces the possibility of the source line 203 being disconnected. Simultaneously with the formation of the indium tin oxide layer 2 0 3 a, it was also obtained by making a wiring pattern -61-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 male I) ------- B7 V. Description of the invention (59) The pixel electrode layer 246 has a high transmittance and radiation efficiency. At this time, a layer 2 having a high transmission efficiency as a pixel electrode can be formed simultaneously with the source electrode and the spring 2 0 j. 46 ° Referring to FIG. 44D, a resist film 25 2 made of a photosensitive resin can be formed and produced. The wiring pattern is then heat-treated to passivate it, and a high bulge portion 25ja and a low bulge portion 253b having a substantially circular cross section are formed on a portion of the formed substrate corresponding to the R region. It is preferable that the ridges 253a and 253b are not located on the south transmission efficiency layer 246, so that a voltage can be effectively applied to the liquid crystal layer. However, even if the convex and convex portions 253a and 253b are located on the layer 246, as long as the convex and convex portions are transparent, there is no significant optical influence. Referring to FIG. 44E, a polymer film 254 is formed on the raised portions 25 3 a & 25 3 b. With this film, the concave and convex surfaces of the R region can be made more continuous by reducing the number of planar portions. This step can be omitted by changing the manufacturing conditions. Referring to FIG. 4F, a layer 242 fabricated by forming a high reflection efficiency on a predetermined portion of the polymer film 2 54 by, for example, sputtering is formed as a pixel electrode. In addition to A1 and A1 alloys, materials suitable for the high reflection efficiency layer 242 include Ta, Ni, Cr, and Ag with high reflection efficiency. The thickness of the high reflection efficiency layer 242 is preferably in the range of about 0.01 to about 1.0 microns. Therefore, each pixel of the liquid crystal display device of this embodiment includes a high transmission efficiency T region located at the center portion, and a high reflection efficiency R region dependent on the Zheng source line. -This structure is used because the indium tin oxide layer 203a and the high reflection efficiency layer 242 of the source line 203 are located at different heights and are opposite to the formation position of the T and R regions (that is, the 鬲 reflection efficiency layer is located in the pixel Central part) ratio -62- Applicable to China National Standard (CNS) A4 specifications (210 X 297 public funds) A7 — __________B7 V. Description of the invention (60) Compared with 'Indium tin oxide layer 2 0 3 a and high reflection efficiency layer 2 The gap between 2 and 2 which needs to prevent light leakage can be narrowed, and the pixel aperture ratio of pixels is increased. In this embodiment, the high reflection efficiency layer 2 4 2 has a smooth concave and convex surface, so that the reflected light is scattered in a wide alignment. When a scattering plate is used at the same time, it is not necessary to use the resist film 2 5 2 to form the raised portions, and the surface of the high reflection efficiency layer 242 can be flattened. In either case, the high reflection efficiency layer 2 4 2 and the high transmission efficiency layer 2 4 6 are individual layers with a third substance interposed therebetween (for example, resin and metal such as MO). With this structure, in the specific case where the high transmission efficiency layer is made of indium tin oxide and the high reflection efficiency layer is made of A1 or A1 alloy, the electric wiring that is likely to be generated in the A1 etching step by the μ wiring pattern can be reduced. Eroded and damaged. (Embodiment 17) FIG. 45 is a partial plan view of an active array substrate of a liquid crystal display device according to Embodiment 17 of the present invention. Fig. 46 is a sectional view taken along the line N-N in Fig. 45. Referring to FIGS. 4 5 and 46, the active array substrate includes pixel electrodes 2 06 having a matrix type, gate lines 2 0 2 for providing a scanning signal, and source lines 2 3 for providing a display signal. It crosses each other around the edge of the pixel electrode 206. The pixel electrode 206, the gate line 202, and the source line 203 overlap at this edge via an interlayer insulating film 244. The thin film transistor 204 is located at each intersection of the gate line 202 and the source line 203, as a vertical switch element for providing a display signal on the corresponding pixel electrode 2006. The gate 210 of the thin film transistor 204 is connected to the corresponding gate line 2 0 2 ′ to drive the thin film transistor 2 with a signal input to the gate 2 1 〇 4 -63- This paper standard applies to the Chinese national standard (CNS ) Α4 size (210 X 297 mm) 509809
。薄膜電晶體2 0 4之源極2 4 9係連接於對應源極線2 〇 3,以 接收數據信號。薄膜電晶體204之汲極2 05係電性連接於連 接電極255,而經由接觸孔245連接於圖素電極2〇6。 遠連接電極2 5 5經由閘極絕緣膜2 〇 9與共用線2 1 5形成儲 存電容器。 共用線215包括金屬膜,經由互連器(未示)連接於位於對 基板256上之對電極。共用線215可於與形成閘極202之相 同步驟中形成共用線2 1 5,以縮短製程。 每個圖素電極206皆包括由Α1或Α1合金所製造之高反射 效率層242,及由氧化銦錫製造之高透射效率層246。由上 方觀看時,圖素電極206分成三區,即兩個高透射效率之τ 區及一個高反射效率之尺區(對應於圖45之斜線部分)。高 反射效率層2 4 2亦可如前述實施例般地包括高反射效率導 電性金屬層諸如T a。 各個R區係設計以覆蓋一部分遮光電極及互連線諸如閘極 線202、源極線203、薄膜電晶體204、及共用線2 15,其 不使來自後照光之光線透射。使用此種結構,各圖素中無 法用為T區之部分可用為高反射效率R區。增加圖素部分之 鏡孔比。而各圖素部分之τ區係被R區所環繞。 描述製造具有前述結構之主動陣列的方法。 首先’於由玻璃等材料製造之透明絕緣基板2〇1上依序 形成閘極—2 10、閘極線202、共用線2 15、閘極絕緣膜209 、半導體層212、通道保護層213、源極249、及沒極205。 之後,藉濺射於形成之基板上沉積透明導電膜及欲構成 -64- 本紙張尺度適用中國國家標準(CNs) A4規格(210 X 297公釐) 509809 A7 ___ _ B7 五、發明説明(62 ) 源極線2 0:3及連接電極2 5 5之金屬膜,並製作佈線圖塑而成 為預定形狀。 因此’母條源極線2 0 3皆具有包括氧化銦錫層2 0 3 a及金 屬層2 0 3 b之雙層結構。該雙層結構之優點係為即使金屬層 部分缺陷,氧化銦錫層2 0 3 a仍可保持該源極線2 0 3之電性 連接。而減少源極線2 0 3斷線之可能。 之後,藉旋轉塗佈法於形成之基板上施加感光性丙烯酸 樹脂,以形成厚度約3微米之中間層絕緣膜2 4 4。該丙烯酸 樹脂隨後根據所需之圖型曝光,使用鹼溶液顯影。該膜僅 有曝光部分被鹼溶液蝕刻,而形成貫穿中間層絕緣膜2 4 4 义接觸孔。利用鹼顯影,得到完美錐型之接觸孔2 4 5。 根據以下因素,該中間層絕緣膜2 4 4使用感光性丙烯酸 樹脂有利於產能。因為可採用旋轉塗佈法以形成薄膜,故 -可輕易形成薄達數微米之膜。而且,該中間層絕緣膜2 4 4 製作佈線圖型時不需要光阻施加步騾。 此實施例中,該丙烯酸樹脂原始即具顏色,可於製作佈 線圖型後藉著使整體表面曝光而成為透明。該丙烯酸樹脂 亦可藉化學加工法而成為透明。 之後,藉濺射及製作佈線圖型形成氧化銦錫膜,用為圖 素電極206之高透射效率層246。因此,構成該圖素電極 2 〇 6之鬲透射效率層2 4 6係經由接觸孔2 4 5電性連接於對應 之連接電極255。 由A1或A1合金所製造之高透射效率層242係於料層246 對應於R區之高透射效率部分上形成,以覆蓋閘極線2 〇 2、 -65- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) " : " 509809. The source 2 4 9 of the thin film transistor 2 0 is connected to the corresponding source line 2 03 to receive a data signal. The drain 205 of the thin film transistor 204 is electrically connected to the connection electrode 255, and is connected to the pixel electrode 206 through a contact hole 245. The remote connection electrode 2 5 5 forms a storage capacitor through the gate insulating film 209 and the common line 2 1 5. The common line 215 includes a metal film and is connected to a counter electrode on the counter substrate 256 via an interconnector (not shown). The common line 215 can be formed in the same step as the gate electrode 202 to shorten the manufacturing process. Each pixel electrode 206 includes a high reflection efficiency layer 242 made of A1 or A1 alloy, and a high transmission efficiency layer 246 made of indium tin oxide. When viewed from above, the pixel electrode 206 is divided into three regions, that is, two regions with high transmission efficiency and one region with high reflection efficiency (corresponding to the oblique line portion in FIG. 45). The high reflection efficiency layer 2 4 2 may also include a high reflection efficiency conductive metal layer such as Ta as in the foregoing embodiment. Each R region is designed to cover a part of the light-shielding electrode and interconnection lines such as the gate line 202, the source line 203, the thin film transistor 204, and the common line 215, which does not allow the light from the backlight to transmit. With this structure, a portion of each pixel that cannot be used as the T region can be used as the high reflection efficiency R region. Increase the mirror hole ratio of the pixel portion. The τ region of each pixel portion is surrounded by the R region. A method of manufacturing an active array having the aforementioned structure is described. First, a gate electrode 2-10, a gate line 202, a common line 2 15, a gate insulating film 209, a semiconductor layer 212, a channel protection layer 213, and the like are sequentially formed on a transparent insulating substrate 201 made of a material such as glass. Source 249, and pole 205. After that, a transparent conductive film is deposited on the formed substrate by sputtering and the structure is to be formed. -64- This paper size applies Chinese National Standards (CNs) A4 specifications (210 X 297 mm) 509809 A7 ___ _ B7 V. Description of the invention (62 ) Metal films of the source lines 2 0: 3 and the connecting electrodes 2 5 5, and a wiring pattern is made into a predetermined shape. Therefore, the 'mother bar source lines 2 0 3 have a double-layered structure including an indium tin oxide layer 2 3 a and a metal layer 2 0 3 b. The advantage of the double-layer structure is that even if the metal layer is partially defective, the indium tin oxide layer 2 03 a can maintain the electrical connection of the source line 2 03. And reduce the possibility of disconnection of the source line 203. Thereafter, a photosensitive acrylic resin was applied to the formed substrate by a spin coating method to form an intermediate layer insulating film 2 4 4 having a thickness of about 3 m. The acrylic resin is then exposed according to the desired pattern and developed using an alkaline solution. Only the exposed portion of this film is etched by the alkali solution to form a contact hole that penetrates the interlayer insulating film 2 4 4. Using alkali development, perfect contact holes 2 4 5 were obtained. The use of a photosensitive acrylic resin for this interlayer insulating film 2 4 4 is advantageous in terms of the following factors. Because spin coating can be used to form a thin film, a film as thin as a few microns can be easily formed. In addition, the intermediate layer insulating film 2 4 4 does not require a photoresist application step when making a wiring pattern. In this embodiment, the acrylic resin is originally colored, and can be made transparent by exposing the entire surface after making a wiring pattern. This acrylic resin can also be made transparent by chemical processing. Thereafter, an indium tin oxide film is formed by sputtering and forming a wiring pattern, and is used as the high transmission efficiency layer 246 of the pixel electrode 206. Therefore, the transmission efficiency layer 2 4 6 constituting the pixel electrode 2 06 is electrically connected to the corresponding connection electrode 255 through the contact hole 2 4 5. The high transmission efficiency layer 242 made of A1 or A1 alloy is formed on the material layer 246 corresponding to the high transmission efficiency portion of the R region to cover the gate line 2 02 -65-This paper size applies Chinese national standards CNS) A4 size (210 X 297 mm) ": " 509809
源極線203、薄膜電晶體2〇4、及共用線2i5。兩料層μ〕 及246彼此電性連接而形成圖素電極2〇6。任何相鄰圖素電 極2 0 6皆個別位於閘極線2 〇 2及源極線上方之部分上,而彼 此不電性連接。 如圖46所示,所製造之主動陣列基板及對基板黏合在一 起,液晶注射於基板間之空隙,以完成此實施例之液晶顯 示裝置。 如則又所述,此實施例之液晶顯示裝置包括高反射效率 層242,其係位於薄膜電晶體204、閘極線202、及源極線 2 0 j上,以構成圖素電極2 〇 6之R區。此消除提供遮光膜以 防止光線進入薄膜電晶體2〇4,並遮蔽一部分圖素電極2〇6 位於閘極線202、源極線203、及共用線215上之部分的必 要。此等部分中易於顯示區域中產生功能區域、轉化線形 式之漏光。結果,傳統上因為被遮光膜遮蔽而無法作為顯 示區域之區域可再用為顯示區域。此可有效地利用顯示區 域。 當該閘極線及源極線包括金屬膜時,其遮蔽習用透射型 液晶顯不裝置中來自後照光之光線,故無法用為顯示區域 。然而’此實施例中,高透射效率之T區係於各圖素之中 心形成(此實施例係兩個分離之部分)。高反射效率之r區係 以環繞該T區之條紋形狀形成。即,高反射效率之r區覆蓋 閘極線、源極線、共用線、及開關元件,而用為各圖素電 極之反射電極區域。此種結構使圖素電極之鏡孔比較相反 圖型情’兄(即’其中T區壤繞R區之圖型)增加。 -66 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐)The source line 203, the thin film transistor 204, and the common line 2i5. The two material layers μ] and 246 are electrically connected to each other to form a pixel electrode 206. Any adjacent pixel electrodes 206 are individually located above the gate line 202 and the source line, and are not electrically connected to each other. As shown in FIG. 46, the manufactured active array substrate is bonded to the substrate, and liquid crystal is injected into the space between the substrates to complete the liquid crystal display device of this embodiment. As described again, the liquid crystal display device of this embodiment includes a high reflection efficiency layer 242, which is located on the thin film transistor 204, the gate line 202, and the source line 20j to form a pixel electrode 206. The R area. This eliminates the necessity of providing a light-shielding film to prevent light from entering the thin film transistor 204, and to shield a portion of the pixel electrode 202 from the gate line 202, the source line 203, and the common line 215. In these sections, light leakage occurs in functional areas and in the form of transition lines in the easy-to-display areas. As a result, a region that cannot be used as a display region traditionally because it is shielded by a light-shielding film can be reused as a display region. This makes efficient use of the display area. When the gate line and the source line include a metal film, they shield the light from the backlight in a conventional transmissive liquid crystal display device, so they cannot be used as a display area. However, in this embodiment, the T region with high transmission efficiency is formed in the center of each pixel (this embodiment is two separate parts). The r region with high reflection efficiency is formed in a stripe shape surrounding the T region. That is, the r region with high reflection efficiency covers the gate line, the source line, the common line, and the switching element, and is used as a reflective electrode region of each pixel electrode. This structure makes the mirror holes of the pixel electrodes relatively opposite. The pattern pattern (that is, the pattern in which the T region soil surrounds the R region) is increased. -66-This paper size applies to China National Standard (CNS) A4 (210X297 mm)
裝 訂Binding
A7 _ B7 五、發明説明(64 ~ ' —---- 或各圖素之R區可如圖4 7般地形成(斜線部分),包括連 接電極2 5 5。此抑制穿透該T區之光的亮度。 (實施例1 8 ) 於前述實施例中,本發明係應用於主動陣列型液晶顯示 裝置。本發明亦可應用於簡單矩陣型液晶顯示裝置。 下文將描述一對彼此面對之行電極(信號電極)及列電極( 掃描電極)之基本結構。於簡單矩陣型液晶顯示裝置中,該 對行電極及列電極彼此交叉之區域定義為圖素。 圖4 8 A至4 8 C顯示該圖素區域之實施例。參照圖4 8 A, 於一圖素區中之行電極中心部分中形成透射電極區,而於 其餘邊緣部分中形成反射電極區。該行電極之結構可與圖 48B或48C相同。該反射電極區之高度可藉著於反射電極 與透射電極之間形成中間層絕緣膜而調整,如圖4 8 C所示。 或如圖49A所示,反射電極區可於一圖素區域中之行電 極中心部分中形成,而透射電極區係於其餘邊緣部分中形 成。該行電極之結構如圖4 9 B或4 9 C所示。該反射電極區 之高度可藉著於反射板及透射電極之間形成中間層絕緣膜 而調整,如圖4 9 C所示。 或如圖50A、50B及50C所示,該行電極可具有條狀反 射電極區。該條狀反射電極區可沿行電極之一側邊形成, 如圖5 Ο A至5 0 C所示,或沿其中心形成,如圖5 1 A及5 1 B 所示。 _ 下文將描述本發明液晶顯示裝置異於習用反射型或透射 型液晶顯示裝置之特色。 -67- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 509809 A7 B7 五、發明説明(65 ) 於習用反射型液晶顯示裝置中,顯示係利用環境光進行 ,以使能量消耗降低。是故,當該環境光低於特定限定值 時,即使該裝置用於可提供充分能量之環境下,仍無法辨 認該顯示。此即該反射型液晶顯示裝置之最大缺點。 若該反射電極之反射特性於製造時改變,則該反射電極 之環境光利用效率亦改變。此根據面板改變顯示變成不可 辨認之環境光強度之臨界值。因此,於製造時,該反射特 性之改變需較習用透射型液晶顯示裝置控制鏡孔比改變時 更謹慎地控制。否則無法得到具有安定之顯示特性之液晶 顯示裝置。 相反地,於本發明液晶顯示裝置中,於與習用透射型液 晶顯示裝置般可提供充分電能之環境下,利用來自後照光 之光。是故,不環境光線如何皆可辨認該顯示。因此,因 -反射特性變化所致之環境光利用效率變化不需如反射型液 晶顯示裝置般地嚴格控制。 另一方面,於習用透射型液晶顯示裝置中,當環境光變 亮時,光線之表面反射分量增加,而難以辨認該顯示。於 本發明液晶顯示裝置中,該反射區係與該透射區一起使用 。此增加面板亮度,而改善可見度。 因此,本發明液晶顯示裝置同時可克服習用透射型液晶 顯示裝置於高(即明亮)環境光下因表面反射導致可見度降 低之問題-,及於習用反射型液晶顯示裝置中於低(即黑暗) 環境光下因面板亮度降低導致顯示辨認困難之問題。除前 述者外,可同時得到此等裝置之特色。 -68- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) A7 B7 五、發明説明(66 ) 如前文所述’根據本發明,與使料透射型反射膜情況 比較下’纟圖素皆包括具有較高透射效率之區域及具有較 高反射效率之區域。於各區域中,使用高透射效率層或高 反射效率層作為圖素電極M吏用此種結構,與使用半透射 型反射膜之習用液晶顯示裝置不同地,防止因例如散光現 象使環境g照射光之利用效率降低。藉著使用反射模式 顯不、透射模式顯示、或同時使用反射模式顯示及透射模 式顯示’不論環境光亮度如何’皆可顯示良好影像。因為 來自後照光及裱境光之兩種光線可同時有效地用於顯示, 故能量消耗遠低於始終使用來自後照光之光線的透射型液 晶顯示裝置。 換㊂之’本發明可藉著增加光利用效率而同時克服習用 反射型液晶顯示裝置於低環境光下可見度大幅降低及習用 透射型液晶顯示裝置於咼環境光下難以辨認顯示之缺點。 因為南反射效率之區域部分覆蓋閘極線' 源極線、及/或 開關元件’故入射於此等部分上之光線可用於顯示。因此 ,大幅增加圖素之有效面積。此不僅克服使用半透射型反 射膜之習用裝置的問題,亦增加各圖素之鏡孔比,即使與 一般透射型液晶顯示裝置比較亦然。 若僅具有用以構成圖素電極之高透射效率層,則與高透 射效率層與其中高反射效率層彼此電性連接而形成一圖素 之圖素電極的情沉及其中高透射效率層與高反射效率層彼 此部分重疊而形成一圖素之圖素電極的情沉比較之下,可 降低因圖素電極導致缺陷之可能。 -69 - 本紙張尺度適用中國國家標準(CNS) Α4規格(210Χ 297公黄) 509809A7 _ B7 V. Description of the invention (64 ~ '—---- or the R region of each pixel can be formed as shown in Fig. 4 (slanted portion), including the connection electrode 2 5 5. This inhibits penetration of the T region Brightness of light. (Embodiment 18) In the foregoing embodiment, the present invention is applied to an active matrix type liquid crystal display device. The present invention can also be applied to a simple matrix type liquid crystal display device. A pair of faces facing each other will be described below The basic structure of the row electrode (signal electrode) and column electrode (scan electrode). In a simple matrix liquid crystal display device, the area where the pair of row electrode and column electrode cross each other is defined as a pixel. Figure 4 8 A to 4 8 C shows an example of the pixel region. Referring to FIG. 4A, a transmissive electrode region is formed in the central portion of the row electrode in a pixel region, and a reflective electrode region is formed in the remaining edge portion. The structure of the row electrode may be Same as Fig. 48B or 48C. The height of the reflective electrode area can be adjusted by forming an interlayer insulating film between the reflective electrode and the transmissive electrode, as shown in Fig. 4 8 C. Or as shown in Fig. 49A, the reflective electrode area Row electrode in a pixel area It is formed in the central part, and the transmissive electrode area is formed in the remaining edge parts. The structure of the row of electrodes is shown in Figure 4 9B or 4 9 C. The height of the reflective electrode area can be achieved by the reflective plate and the transmissive electrode. An intermediate layer insulating film is formed and adjusted as shown in Fig. 4 9 C. Or as shown in Figs. 50A, 50B, and 50C, the row electrode may have a strip-shaped reflective electrode region. The strip-shaped reflective electrode region may be arranged along the row electrode. Formed on one side, as shown in Figs. 5A to 50C, or along its center, as shown in Figs. 5A and 5B. _ The liquid crystal display device of the present invention is different from the conventional reflective type or Characteristics of transmissive liquid crystal display device. -67- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) 509809 A7 B7 V. Description of the invention (65) In the conventional reflective liquid crystal display device, the display It uses ambient light to reduce energy consumption. Therefore, when the ambient light is below a certain limit value, the display cannot be recognized even if the device is used in an environment that can provide sufficient energy. This is the reflective type The biggest disadvantage of liquid crystal display devices. If the reflection characteristics of the reflective electrode are changed at the time of manufacture, the utilization efficiency of the ambient light of the reflective electrode is also changed. This changes the display to a critical value of the unrecognizable ambient light intensity according to the panel change. Therefore, at the time of manufacture, The change needs to be controlled more carefully than the conventional transmissive liquid crystal display device controlling the mirror aperture ratio. Otherwise, a liquid crystal display device with stable display characteristics cannot be obtained. Conversely, in the liquid crystal display device of the present invention, the conventional transmissive liquid crystal The display device can provide sufficient electric power to use the light from the backlight. Therefore, the display can be recognized regardless of the ambient light. Therefore, the change in the utilization efficiency of the ambient light due to the change in the -reflection characteristics does not need to be reflected. Type liquid crystal display device is strictly controlled. On the other hand, in a conventional transmissive liquid crystal display device, when ambient light becomes bright, the surface reflection component of light increases, making it difficult to recognize the display. In the liquid crystal display device of the present invention, the reflection region is used together with the transmission region. This increases panel brightness and improves visibility. Therefore, the liquid crystal display device of the present invention can simultaneously overcome the problem of reduced visibility due to surface reflection in conventional (transparent) liquid crystal display devices under high (ie, bright) ambient light, and low (ie, dark) in conventional reflective liquid crystal display devices. The problem of difficult to recognize the display due to the decrease of the panel brightness under ambient light. In addition to the foregoing, the characteristics of these devices can be obtained at the same time. -68- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) A7 B7 V. Description of the invention (66) As described above, according to the present invention, in comparison with the case of a transmissive reflective film '纟 Pixels all include regions with higher transmission efficiency and regions with higher reflection efficiency. In each region, a high transmission efficiency layer or a high reflection efficiency layer is used as the pixel electrode. This structure is different from the conventional liquid crystal display device using a semi-transmissive reflective film, and prevents the environment g from being irradiated due to, for example, the astigmatism phenomenon. The utilization efficiency of light is reduced. A good image can be displayed by using the reflection mode display, the transmission mode display, or both the reflection mode display and the transmission mode display 'regardless of the ambient light'. Because two kinds of light from backlight and ambient light can be effectively used for display at the same time, the energy consumption is much lower than a transmissive liquid crystal display device that always uses light from backlight. In other words, the present invention can overcome the shortcomings of the conventional reflective liquid crystal display device that greatly reduces the visibility under low ambient light and the conventional transmissive liquid crystal display device that is difficult to recognize the display under high ambient light by increasing light utilization efficiency. Since the area of the south reflection efficiency partially covers the gate line, the source line, and / or the switching element, the light incident on these portions can be used for display. Therefore, the effective area of pixels is greatly increased. This not only overcomes the problem of conventional devices using a semi-transmissive reflective film, but also increases the mirror-to-hole ratio of each pixel, even when compared with a general transmissive liquid crystal display device. If there is only a high-transmission-efficiency layer for forming a pixel electrode, then the high-transmission-efficiency layer and the high-reflection-efficiency layer therein are electrically connected to each other to form a pixel electrode of a pixel, and the middle-high-transmission-efficiency layer and Compared with the pixel electrode with high reflection efficiency layers partially overlapping each other to form a pixel, the possibility of defects caused by the pixel electrode can be reduced. -69-This paper size applies to Chinese National Standard (CNS) A4 specification (210 × 297 male yellow) 509809
AT ____ _B7 五、發明説明(67 ) 南透射效率層或高反射效率層可由與源極線或閘極線相 同之材料製造。此簡化液晶顯示裝置之製造程序。 有效圖素區中高反射效率區面積設定於佔約1 〇至約9 〇 〇/。 。此種設定同時克服習用透射型液晶顯示裝置於環境光太 亮時顯示變得較不易辨識及習用反射型液晶顯示裝置於環 境光強度太低時顯示變得完全無法辨認之問題。因此,不 論環境光量如何,皆可使用反射模式顯示、透射模式顯示 、或同時使用反射模式顯示及透射模式顯示得到最佳顯示 。本發明反射型/透射型液晶顯示裝置在應用於其中顯示螢 幕無法擺動或無法移動至較方便操作者使用之較佳環境下 之裝置時特別有效。 本發明液晶顯示裝置實際上於電池驅動之數位型照相機 或攝影機中使用為檢像鏡(偵測器螢幕)。結果,發現不論 — 環境亮度如何,皆可藉著調整後照光之亮度以保持適於觀 看之亮度,而保持低能量消耗。 备舀用透射型液晶顯示裝置使用於明亮陽光下之戶外時 ,即使後照光亮度增加,亦變成較不易辨認。此情況下, 本發明液晶顯示裝置可藉著斷開後照光而用為反射型液晶 顯示裝置,或其可藉著降低後照光亮度而用為透射/反射型 裝置。結果,可得到良好顯示品質並降低能量消耗。 當本發明液晶顯示裝置使用於有明亮陽光射入之戶内時 ,該反射模式顯示及透射模式顯示可根據目標物件之方位 而切換或兩者同時使用,而得到更易辨識之顯示。當债測 自接收直接陽光時,可採用有明亮陽光照射之戶外情況。 -70- 本紙張尺度適财® a家標準(CNS) A4規格(21〇 X 297公愛)—-------- ______ B7 五、發明説明(68 ) 當孩目標物件係於室内之陰暗角落中成像時,則開啟後照 光以使用該裝置作為反射/透射模式顯示。 當本發明液晶顯示裝置於車上裝置諸如車上導航器中作 為偵測螢幕時,不論環境光線亮度如何,亦得到確實可辨 識之顯示。 於使用習用液晶顯示裝置之車上導航器中,使用亮度高 於個人電腦等物所用之後照光,而可使用於良好天氣及接 收直接陽光之環境。然而,儘管具有該高亮度,該顯示於 前述環境下仍較不易辨識。另一方面,具有該高亮度之後 照光太亮而使使用者目眩,故具有負面影響。於使用本發 明液晶顯示裝置之車上導航器中,反射模式顯示始終與透 射模式顯示一起使用。此可於不增加後照光亮度下而於明 亮環境下得到良好顯示。相反地,於極暗環境下,可藉著 僅有低亮度(約50至1 〇〇c d/m2)之後照光而得到可辨識之 顯示。 熟習此技藝者可於不偏離本發明範圍及精神下明瞭各種 其他改良。是故,申請專利範圍不限於前文描述,而係為 廣義申請專利範圍。 -71 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)AT ____ _B7 V. Description of the invention (67) The south transmission efficiency layer or high reflection efficiency layer may be made of the same material as the source line or gate line. This simplifies the manufacturing process of the liquid crystal display device. The area of the high reflection efficiency region in the effective pixel region is set to occupy about 10 to about 900 /. . This setting also overcomes the problems that the conventional transmissive liquid crystal display device becomes less readable when the ambient light is too bright and the conventional reflective liquid crystal display device becomes completely unrecognizable when the ambient light intensity is too low. Therefore, regardless of the amount of ambient light, you can use the reflection mode display, transmission mode display, or both reflection mode display and transmission mode display to get the best display. The reflective / transmissive liquid crystal display device of the present invention is particularly effective when it is applied to a device in which the display screen cannot swing or move to a better environment where it is more convenient for an operator to use. The liquid crystal display device of the present invention is actually used as a camera (detector screen) in a battery-driven digital camera or video camera. As a result, it was found that regardless of the ambient brightness, the brightness of the backlight can be adjusted to maintain the brightness suitable for viewing, while maintaining low energy consumption. When the transmission-type liquid crystal display device for outdoor use is used outdoors in bright sunlight, even if the brightness of the backlight is increased, it becomes less readable. In this case, the liquid crystal display device of the present invention can be used as a reflection type liquid crystal display device by turning off the backlight, or it can be used as a transmission / reflection type device by reducing the brightness of the backlight. As a result, it is possible to obtain good display quality and reduce energy consumption. When the liquid crystal display device of the present invention is used indoors where bright sunlight enters, the reflection mode display and transmission mode display can be switched according to the orientation of the target object or both can be used at the same time to obtain a more easily identifiable display. When the debt is measured by receiving direct sunlight, outdoor conditions with bright sunlight can be used. -70- This paper is suitable for standard paper ® a family standard (CNS) A4 specification (21〇X 297 public love) ---------- ______ B7 V. Description of the invention (68) When the child's target object is indoors When imaging in the dark corners of the camera, the backlight is turned on to use the device as a reflection / transmission mode display. When the liquid crystal display device of the present invention is used as a detection screen in an on-vehicle device such as an on-vehicle navigator, the display can be reliably recognized regardless of the brightness of the ambient light. In a car navigator using a conventional liquid crystal display device, use a light source that is brighter than that used by a personal computer or the like, and can be used in an environment with good weather and direct sunlight. However, despite this high brightness, the display is still less readable in the aforementioned environment. On the other hand, with this high brightness, the illumination is too bright to dazzle the user, and therefore has a negative effect. In the car navigator using the liquid crystal display device of the present invention, the reflection mode display is always used together with the transmission mode display. This can be well displayed in a bright environment without increasing the brightness of the backlight. Conversely, in extremely dark environments, it is possible to obtain an identifiable display by illuminating it with only low brightness (approximately 50 to 100 c d / m2). Those skilled in the art will recognize various other modifications without departing from the scope and spirit of the invention. Therefore, the scope of patent application is not limited to the foregoing description, but is a broad scope of patent application. -71-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)
Claims (1)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20117697 | 1997-07-28 | ||
JP27432797A JP3281849B2 (en) | 1997-10-07 | 1997-10-07 | Active matrix type liquid crystal display |
JP1629998 | 1998-01-29 | ||
JP1878198 | 1998-01-30 | ||
JP07531798A JP3284187B2 (en) | 1998-01-29 | 1998-03-24 | Liquid crystal display device and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
TW509809B true TW509809B (en) | 2002-11-11 |
Family
ID=27671138
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90118174A TWI240098B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
TW087112317A TW509809B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
TW93111338A TWI240130B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90118174A TWI240098B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93111338A TWI240130B (en) | 1997-07-28 | 1998-07-28 | Liquid crystal display device |
Country Status (1)
Country | Link |
---|---|
TW (3) | TWI240098B (en) |
-
1998
- 1998-07-28 TW TW90118174A patent/TWI240098B/en not_active IP Right Cessation
- 1998-07-28 TW TW087112317A patent/TW509809B/en not_active IP Right Cessation
- 1998-07-28 TW TW93111338A patent/TWI240130B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI240130B (en) | 2005-09-21 |
TW200424720A (en) | 2004-11-16 |
TWI240098B (en) | 2005-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102091109B1 (en) | Liquid crystal display device | |
US6452654B2 (en) | Liquid crystal display in which at least one pixel includes both a transmissive region and a reflective region | |
US6330047B1 (en) | Liquid crystal display device and method for fabricating the same | |
JP4167335B2 (en) | Liquid crystal display | |
TWI255379B (en) | Liquid crystal display device and fabrication method therefor | |
US7417700B2 (en) | Optical sheet assembly and liquid crystal display apparatus having the same | |
KR100641628B1 (en) | Reflective and Transflective Liquid Crystal Display Device of using a Black Resin | |
JP3284187B2 (en) | Liquid crystal display device and manufacturing method thereof | |
JP2007017798A (en) | Liquid crystal display device | |
TWI240825B (en) | Liquid crystal display | |
JP2005031662A (en) | Array substrate, method for manufacturing the same, and liquid crystal display device having the same | |
TW509809B (en) | Liquid crystal display device | |
KR20120015187A (en) | Reflection-type liquid crystal display device | |
KR20090041043A (en) | Transflective mode liquid crystal display device | |
JP2004053935A (en) | Liquid crystal display | |
TW482917B (en) | Liquid crystal display device | |
JP2015206917A (en) | Liquid crystal display | |
JP2006119673A (en) | Liquid crystal display | |
JP2006276858A (en) | Liquid crystal display device | |
JP2006146271A (en) | Liquid crystal display device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MK4A | Expiration of patent term of an invention patent |