1240044 九、發明說明： 【發明所屬之技術領域】 本發明有關為使載置物可在水平面内高精度地定位， 而使載置物在水平面内以圓滑且無面搖動地移動之狀態予 以支持之定位台所使用之定位台用支持單元。 本申請案内容，係對於2003年9月12日所提出申請 之：本國專利申請案第2003-321032號及2004年8月4 : 所提出中睛之日本國專利申請案細4_227682號主 權’並於此援用其内容。 【先前技術】 例如，液晶顯示器製程中，於全體製程中在各步驟中 之處理裝置，要將複數張液晶用玻璃上下隔著間隔而放置 之液晶用玻璃放置架予以定位安裝時，或欲將各處理完了 手：起以:!液晶用玻璃放置架移動到下-步驟用 九^::、、、使機益手易於撈起，需將液晶用玻璃放置架 =1位^目對於機器人之駭位置。因此，為使液晶用 一方置木（以下或僅稱放置架）可精度良好地確實定位， 乃知用有可將放置架在水平面内圓滑且不致有面搖動而 移動地予以支持之定位台。 +用以支持放置架之以往的定位台，大多係採用收容於 成内而路出上部之大滾珠以配列於其下面侧之複數個小滾 朱可王方向旋轉自如予以支持之構造之滾珠轴承，並使此 ，朱轴承兵具有特定硬度及平面度之鋼板作點接觸，以彈 *拉住單侧，於無負荷時（未設置放置架而無負荷作用時） 316293 5 1240044 可回歸中心位置（center position)之構成之機構。 液晶顯示器製程全體之各步驟中，雖在玻璃表面施行 種種處理，但隨之，多有將玻璃收放於放置架並搬往下一 步驟之動作。隨著母玻璃（mother giass)之大型化，各處理. 裝置本身愈有處理效率或小型化之需求，並且用以定位之. 定位台之設置空間，也愈來愈難確保如以往之空間。而且， 由於進行處理之玻璃趨向大型化，有能耐大負荷，且定位 台本身亦有超過現今之高精度之需求。但是，此定位台係 為製造具有強烈要求廉價之製品之步驟中所使用之裝=「舞 並且需求數量亦多’所以不但需要確保一定之性能且 價供應之必要。 ’歇 Γ 全體之精度係複數個部 位之精度之累積’要製作高精度之 :導致成本變高。定位台至少需要配置3個以上門：= 二高精度之滾珠軸承則無法平整，將導致移 ： 成為放置架發生搖動之原因。 木蚪 =則規格尺寸變大，因此未必能做到充分之精度負 〜人 而求而需要保持其潔淨，但，以盆少 疋位台，則因將部分置 在之 所以穿詈太h 之7頁域用遮蓋予以覆蓋之構造， 所以衣置本身亦不得不變得大型、 知之滾珠軸承方式定位時， 將放置木以習 型化之放置芊尺·p 板之動作並不靈活，對於大 直木尺寸而呂即成為問題。 【發明内容】 為解決上述課題，本發 知明釦供一種定位台用支持單 316293 6 1240044 $ ’係具備：具有在圓周方向隔著間隔設置之 複數個滾珠收容孔之定位哭 、牙之 滾珠收谷孔之滾珠；配置於上述 合 下接觸於上述複數個滾珠之 ^之^而7刀別由上 體設置以支持載置物之天板了 與上述上板成- 回歸中心位置之彈簧；用以支 ^^天板於無負荷時 定於J：卜a祐μ > 寺上述下板之台板，·以及固 此口板上，以包圍天板以外之部分之殼。 上述定位台用支持星分由 — 圓板狀之定位器設有用以收容上::::::狀方而在此 之彈簧收容溝為佳。 平尹、之在+1方向延伸 =述定位台用支持單元中，在殼之上板與天 皿板邛分，設有用以將上. 體之天板之_動4 推壓以拘束與上板為一 天板之私動的天板固定機構為佳。 上述定位台用支持單亓Φ， 板之下部面形成周溝，w成由=板固定機構為在蓋 導入通路，並在上述周溝可通往此周溝之空氣 構成為佳。 ㈣了上下，月動自如地收容可動環之 开这疋位台用支持單元中’亦可形成在定位器外周面 形成開Π之部分缺損圓形狀之滾珠收容缺口； 收容孔來作為定位ϋ之滾珠收容部分。 戈滾珠 2定位台用支持單元中，以台板兼為下板為佳。 本Μ亦提供-制上述定位台用支持單元安裝於A 口之疋住台用支持單元之安裝構造。 ；疋 此安裝構造中’係在開設於定位台之台座之殼嵌合 316293 7 1240044 孔，將定位台用支持單元之殼，以台座上面與 同一平面之狀態予以嵌合， I介 /成 错π 以螺才王貝牙開设在台座之附有 鎢孔之安裝孔至開設在台板之安裝孔，以將台座 體固定’藉此將定位台用支持單元安裝於定位〜。 根據本發明之定位台用支持單元，相較於以往 轴承方式，構造簡單且構件少，干預全體精度之部位較二， 因此可容易實現高精度。因*，於配置複數個支持單元 構成定位台時，可容易實現定位台之高精度。 再者，因構造簡單，所以，可容易製作能耐高負荷者 且可廉價製作。 、布， 再者，因支持單元本身内藏回歸中心位置用之彈菩， 所以可節省定位台之空間。 $ ’ 同樣地，因支持單元本身内藏回歸中心位置用之彈 簧:所以可容易以單元為單位做成遮蓋，有利於個別之潔 〉寺對應。 再者，上板之動作亦非常順暢，相較於習知方式，水 平面内之移動時之平面度可實現約1〇倍左右之高精度。 再者，因將定位器做成圓板狀，且在此圓板狀之定位 器設置彈簧收容溝，所以，可適當實現具有上述效果之定 位台用支持單元之機構。 若設置用以拘束天板之移動之天板固定機構，則有助 於需將天板拘束於一定之位置以避免其隨便移動之情形 以外’如上所述之天板固定機構，以利用氣壓將上板 316293 8 1240044 往下：推壓以拘束天板之移動之機構為適當。 定位器之滾珠收容部分， 位哭之尺i 以缺口替代孔，則無須將定 =尺寸加大’即可將滾珠之位置配置歧位 向外方，並可提昇相對於負荷之天板之安定性。 方 持單構造，安裝於定位台之定位台用支 僅有支持載置物之天板突出於台·，而殼則未由 口庄犬出’所以，可構成無多餘突出部分之良好的定位台。 而且’可容易將天板之高度設定於較低位置。 【實施方式】 之定位台用支持單元 以下，參照圖式說明實施本發明 及其安裝構造。 (實施例1) 、弟―1圖為本發明一實施例之定位台用支持單元i之斜 ，圖，弟2A圖為詳細顯示定位台用支持單元丨之俯視圖， 第2B口圖為第2A圖之剖視圖。第3圖係用以說明定位台用 支持單元1之内部機構之圖，係將台板拆下之狀態之後視 元件符唬2為定位台用支持單元（以下稱為支持單元）工 之台板。台板2呈方形狀，其四個角落開設有安裝孔2a。 支持單兀1係以螺栓9穿過上述安裝孔2a而固定於後述之 定位台之台座（stage base)16。例如四個部位以螺栓4將構 成用以圍住内部機構之殼5之侧壁部之大致為圓筒狀之侧 壁框3固定於該台板2。在侧壁框3内，配置有高精度製 成之圓板狀鋼板製之下板6，且在此下板6上配置有用以 316293 9 1240044 保持滾珠7之定位器8。 有圓至第5圖所示’定位器8係形成在中央形成 有W同中空部8c之戶硌+陪， 力乂 著間隔上下貫穿之二 圓板狀’在圓周方向具有隔 容溝，。上述6個滾珠收容孔、8a各:二 而3们彈育收容溝扑收容有如詳細後述之彈筈1 〇。 疋位器8之上部’配置有與上述下板 精 =板：鋼板製之上板u，且下板6與上板n係由二 /、收今在疋位器8之各滾珠收容孔8a内之各滾珠7 接觸。 上述上板11之上面之中心部，配置有形成圓板狀且下 面側具有軸部12a之天板12，並且在上板n之下面之中 邛配置有與軸部13a及圓板部13b為一體之彈簧扣飽 13之同日守，上述天板12與彈簧扣鈎丨3，以栓入天板I〕 之軸12a 0之螺栓孔之螺栓j 9，固定於上板11之上下。 上述天板12支持液晶用玻璃用放置架。彈簧10之一端鈎 在上述彈簧扣釣13之圓板部13b，而彈簧1()之另一端則 鈎在設於侧壁框3之内面側之彈簧扣鈎3a。 開汉有供上述天板12之軸12a通過之中心孔15a之蓋 板15，以壓入法固定在側壁框3之上面部。侧壁框3與蓋 板15構成殼5。蓋板15之中心孔15a係限定天板12之可 移動範圍。 說明各部分之材質之一例，則有例如滾珠7、上板u 及下板6為SUS440C，天板12為SUS304。台板2為經氧 316293 10 1240044 化鋁處理（Alumite treatment)之鋁板。側壁框3為例如 P〇M(p〇lyacetai，聚縮醛）。上板u及下板6需具剛性及耐 磨性且需經高精度之面加工，所以以SUS440C較為適當。 另外’將台板2本身做為下板利用亦可。但，台板2 無需具有如上板或下板之剛性或耐磨性或高精度加工，所 以由成本或加工精度之觀點而言，如實施例所示，做成鋁 板等之另一構件較為適當。但並非受限於此等材質，係可 另行適當選擇者。 如弟7圖所示 .......'一心人w干；1 ^:直於台座1 上’構成可將液晶用玻璃放置架17在水平面内圓滑移動知 予以支持之定位台18。圖式例之中，將支持單元1之△相 2,如上述以穿通安裝孔2a之螺栓9固定於台座μ之上口面> 鄰接於此定位台18之機器人將液晶 置架Π’或從放置架17中播取出液晶用玻璃。其中，、# :雖省略了圖式’但’用以將放置架17移動到對應於機 ^之預定位置之包括氣Mair cylinder)等驅動機器 驅動機構，設置於鄰接該定位台1 8之處。 (實施例2) ::圖表示本發明之另一實施例。本實施 =::21係設有欲將天板12予以拘束不動時，用 二板25:下天板固定_ 23者。此天板固定機構： 係在皿板25之下面形成周溝25&， 苒 …下滑動地予以收容，並設置通於將可動; 入通路挪之構成。在分別形成於上述可動環 316293 11 1240044 Π周面面之周溝收容0型環27、28。此外，在可動環26 26虹將其外周側部分做低以形成圓周方向之凹處 動^ 氣導至此凹處加，以使氣壓向下作用於可 與第S二板夕❹以軸環29固定於上板11。圖中， θ /、、之邛为標注相同圖號，並省略其說明。 。士放置& 17定位於預定位置而欲使拘束於該位置 動。^則將载置放置架Π之天板12予以拘束，使其不 卞，由連接於空氣導入通路25b之未圖示之空氣喷 嘴將壓縮空氣經六泰墓入、$妨 义工虱貝 > 工’、、、路26送進周溝25a，此時則壓 ^乳進入可動環26之上面之周方向之凹處施，將可動 :之卢二下方而將上板11往下方推壓，並以其推壓所產 將上板η及與其為—體之天板12予以固定。 第8圖至第10圖顯不將定位台用支持單元1安裝於 疋立台^之台座（stage base) i 6之安裝構造之另—實施例。 K施例中’在台座16開設殼喪合孔16a，在此殼嵌 ::之周圍的四個部位，對應於台板2之四個部位之 2孔^參照第1圖），開設付有鑽孔⑽之安裝孔16c。 二持早兀1之殼5嵌合於台座16之殼嵌合孔…，由台 坐16之安裝孔16c插入螺检32，通過轴環η並貫穿於台 !:之安裝孔2a’以將螺帽33栓緊。軸環31之高度尺寸 在可使台116之上面與殼5之上面(蓋板15之上面) ‘、、、同一平面之高度。因而，以螺栓32將支持單元】 316293 12 1240044 於台座16時，僅右± 4士处 # 支持载置物之天板12由台座16突出， ^貝 由台座16突出。如上所述，可構成未有多餘突 出部之良好的定位a = 再成未有夕餘大 突出太高。 〇而且，可使天板12不會由台座16 (實施例4) :UA圖、第11Β圖顯示定位台用支持單元中之定位 :::-實施例。本實施例之定位器8，之用以收容滾珠7 缺H ^ 於定㈣外周面開口之部分缺損圓形狀之 珠收容缺ΤΓΠ8’抑#代孔（滾珠收容孔叫者。此滾 今、口 3之剖面形狀，係至少較半圓形為大之1分 缺損圓形狀’以避免滾珠7脫離滾珠收容缺口 ：大… ^據本實施例之定位器8，，無須放Μ位器之尺寸， Ρ可將滾珠7之位置配置於定位哭 用以* # & # 心1的牛仫方向外方。因此， 支持負何之滾珠7之位置將會遠離天板12之中心 以支持負荷之天板12變得不穩定之_。 之定位台用支持單元之精簡尺寸，即可提昇 於負何之天板12之穩定性。 了 (實施例5) 上述各實施例中，構成殼5之側壁框3與蓋板 同構件，但，將侧壁框3與蓋板15做成—體亦可。另1不 :則壁框3與台板2做成一體亦可。在此情太 另一構件。 I板為 力上述之各實施例’說明了適用於將液晶用破 木予以定位之液晶用玻璃用放置牟宗 * 放置 直木疋位衮置之定位台之情 316293 13 1240044 形’但，載置物係可為任意者。 ㈣了本發明之較佳實施例，但，本發明非受限 於此寻貫施例。只要不逸脫本發明之意旨之範圍 之附加、省略、置換、及其他之變更為可行。本發明非： =於以上所述之說明，僅受限於本說明書中之申請專利^ 【圖式簡單說明】 第1圖為本發明之一實施例 視圖。 口用支持早7C之斜 第2Α圖為顯示第J圖之定位台 視圖；第⑼圖為第2Α圖之剖視圖。細俯 第3圖為用以說明上述定位台用 之圖1拆下台板之狀態之後視圖。 Μ枝構 第4Α圖為顯示上述定位台用支持單元 仰視® ;第4Ast 足位益之 — w T心A-A剖視圖。 弟5圖為第4圖中之定位器之斜視圖。 _第第6=為顯示定位台用支持單元之另-實施例之俯 視圖/ 6B圖為第6Affim 】之俯 第7圖為用以說明採用上述定 抑 之定位台之斜視圖。 口用支持早元所構成 第8圖為將本發明之一 安裝於台座之狀態之俯視圖。& '之疋位台用支持單元 f9圖為第8圖之部分缺口前視圖。 弟1〇圖為由第8圖箭 方向所觀看到的部分缺 316293 14 1240044 口圖0 第11A圖為顯示有關定位器之另一實施例之仰視圖 第11Β圖為第11Α圖中之Β-Β剖視圖。 【主要元件符號說明】 1、21 定位台用支持單元 2 台板 2a、16c 安裝孔> 3 侧壁框 3a 彈簧扣钩 4、9、 19、32 螺栓 5 殼 6 下板 7 滾珠 8 > 8， 定位器 8a 滾珠收容孔 8，a 滾珠收容缺口 8b 彈簧收容溝 10 彈簧 11 上板 12 天板 12a 轴 13 彈簧扣钩 13b 圓板部 15、25 蓋板 15a 中心孔 16 台座（定位台之台座） 16a 殼嵌合孔 16b 鑽孔 17 放置架 18 定位台 23 天板固定機構 25a 周溝 25b 空氣導入通路 26 可動環 26a 凹處 27 ^ 28 0型環 29、31 軸環 33 螺帽1240044 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to positioning for supporting the placement of objects on the horizontal plane with high accuracy, and supporting the state of the objects moving smoothly and without surface shake in the horizontal plane. Support unit for positioning table used by the station. The contents of this application are for the applications filed on September 12, 2003: National Patent Application Nos. 2003-321032 and August 4, 2004: The Central Japan Patent Application No. 4_227682 Sovereignty 'and Its content is referenced here. [Prior art] For example, in the process of liquid crystal display manufacturing, the processing device in each step of the whole system process is to position and install a plurality of liquid crystal glass placing racks placed at intervals above and below the glass processing rack, or to place After finishing each hand: Start with :! Move the glass holder for liquid crystal to the next step-use nine ^ :: ,,,, to make it easier for Jiyi to pick up the glass holder for liquid crystal = 1 position. Location. Therefore, in order for the liquid crystal for one side of the wood (hereinafter referred to simply as a shelf) to be accurately positioned, it is known that there is a positioning table that can support the shelf smoothly in the horizontal plane without moving the surface. + Most of the conventional positioning tables used to support the placement of racks are mostly ball bearings with a structure that is accommodated in the inside and exits the upper ball, and is arranged on the lower side of the ball. And make this, Zhu bearing soldiers have a specific hardness and flatness of the steel plate to make point contact, and pull one side with a spring *, when there is no load (without a shelf and no load effect) 316293 5 1240044 can return to the center position (Center position). Although various processes are performed on the glass surface in each step of the entire liquid crystal display manufacturing process, many operations are followed by placing the glass on a shelf and moving it to the next step. With the enlargement of mother glass, the more processing efficiency and miniaturization of the equipment itself is required, and it is used for positioning. The space of the positioning table is also more and more difficult to ensure the space as in the past. In addition, since the glass to be processed tends to be large, it can withstand large loads, and the positioning table itself also needs more precision than today. However, this positioning table is a piece of equipment used in the process of manufacturing a product with a strong demand for cheapness = "Dance and demand quantity is large ', so it is necessary not only to ensure a certain performance and price supply. Accumulation of the accuracy of multiple parts' To produce high precision: It will lead to higher costs. The positioning table needs to be equipped with at least three doors: = Two high-precision ball bearings cannot be leveled, which will cause movement: It will become a place where the placement rack shakes. The reason is that the wooden 蚪 = the size becomes larger, so it may not be able to achieve sufficient accuracy. People need to keep it clean. However, if the basin is small, the part will be worn too. The structure of the 7-page field is covered with a cover, so the clothing itself has to become large, and when it is known that the ball bearing is positioned, it is not flexible to place the wood in the shape of a ruler and p-board. For the size of large straight wood, Lv becomes a problem. [Summary of the Invention] In order to solve the above problems, the present invention knows that a support sheet for a positioning platform is deducted 316293 6 1240044 $ Balls with a plurality of ball accommodating holes arranged at intervals in the circumferential direction, balls with tooth-receiving holes in the teeth; arranged in the above-mentioned contact with the plurality of balls ^ 7, and 7 knives are set by the upper body The top plate supporting the placed objects is a spring that returns to the center position of the upper plate; it is used to support the ^^ top plate when no load is set at J: bu ayou μ > And fix the mouth plate to surround the shell other than the top plate. The above-mentioned positioning table supports star points—the circular plate-shaped positioner is provided to accommodate the :::::: shaped square and the spring here Containment ditch is better. Ping Yin, Zhi extended in the +1 direction = the positioning unit support unit, the upper plate of the shell is separated from the plate of the dish, which is provided to move the upper plate of the body. It is better to press the restraint and the upper plate as the private board's top plate fixing mechanism. The above-mentioned positioning table supports 台 Φ, the lower surface of the plate forms a perimeter groove, and w == the plate fixing mechanism is the channel for introducing the cover. And in the above ditch, the air that can lead to this ditch is better. The support unit for the positioning table of the movable ring can also be formed with a ball-receiving gap in the shape of a circle formed on the outer peripheral surface of the positioner. The receiving hole is used as the ball-receiving portion of the positioning table. Ge Ball 2 positioning table Among the supporting units, it is better to use both the platen and the lower plate. This M also provides the manufacturing structure of the above-mentioned positioning unit supporting unit for mounting on the A-portion supporting unit for mounting table. 疋 In this mounting structure, The shell of the base of the positioning table is fitted with a 316293 7 1240044 hole, and the shell of the support unit for the positioning table is fitted with the top surface of the base and the same plane. The mounting hole with a tungsten hole is attached to the mounting hole provided on the platen to fix the pedestal body ', thereby mounting the positioning unit support unit to the positioning ~. According to the support unit for a positioning table of the present invention, compared with the conventional bearing method, the structure is simple, the number of components is small, and the position that interferes with the overall accuracy is two, so that high accuracy can be easily achieved. Because of the high accuracy of the positioning table when multiple positioning units are used to form the positioning table. Moreover, since the structure is simple, it can be easily manufactured and can be manufactured at low cost. , Cloth, and furthermore, because the support unit itself has a built-in bouncing belt for returning to the center position, the space of the positioning table can be saved. $ ′ Similarly, because the support unit itself contains a spring for returning to the center position: it can be easily covered in units, which is conducive to individual cleanliness. In addition, the movement of the upper plate is also very smooth. Compared with the conventional method, the flatness when moving in the horizontal plane can achieve a high accuracy of about 10 times. Furthermore, since the positioner is formed in a disc shape, and a spring receiving groove is provided in the disc-shaped positioner, a mechanism for a support unit for a positioning table having the above-mentioned effects can be appropriately realized. If a top plate fixing mechanism for restricting the movement of the top plate is provided, it will help to restrict the top plate to a certain position to prevent it from moving casually. Upper plate 316293 8 1240044 Down: It is appropriate to push the mechanism that restricts the movement of the top plate. The ball receiving part of the locator, the crowing rule i replaces the hole with a notch, then the position of the ball can be dislocated outward without increasing the setting size, and the stability of the top plate relative to the load can be improved. Sex. It has a single structure. The support for the positioning table installed on the positioning table only supports the top plate protruding from the table, and the shell is not out of the mouth. So it can form a good positioning table without extra protrusions. . Moreover, it is easy to set the height of the top plate to a lower position. [Embodiment] Supporting unit for positioning table Hereinafter, the present invention and its mounting structure will be described with reference to the drawings. (Embodiment 1) Figure 1-1 is an oblique view of a support unit i for a positioning platform according to an embodiment of the present invention. Figure 2A is a top view showing the support unit 丨 for a positioning platform in detail. Port 2B is 2A. Sectional view of the figure. FIG. 3 is a diagram for explaining the internal mechanism of the support unit 1 for the positioning table, which is a component plate of the support unit for the positioning table (hereinafter referred to as the support unit) when the component is viewed after the platen is removed. . The platen 2 has a square shape, and mounting holes 2a are formed in four corners thereof. The support unit 1 is fixed to a stage base 16 of a positioning table described later by bolts 9 passing through the mounting holes 2a. For example, four portions of the side wall portion 3 constituting the side wall portion of the casing 5 of the internal mechanism are fixed to the platen 2 with bolts 4 at four locations. In the side wall frame 3, a lower plate 6 made of a disc-shaped steel plate made of high precision is arranged, and a positioner 8 for holding the balls 7 by 316293 9 1240044 is arranged on the lower plate 6. As shown in Fig. 5, the "locator 8" is formed in the center, and W is connected with the hollow portion 8c. It has a space between the discs and has a groove in the circumferential direction. Each of the six ball-receiving holes, 8a: two, and three. The three containment grooves contain bombs 10 as described in detail later. The upper part of the positioner 8 is arranged with the above lower plate precision = plate: the upper plate u made of steel plate, and the lower plate 6 and the upper plate n are formed by two / three ball receiving holes 8a in the positioner 8 The inner balls 7 are in contact. A top plate 12 having a circular plate shape and a shaft portion 12a on the lower surface side is disposed at the center portion of the upper surface of the upper plate 11, and a shaft portion 13a and a circular plate portion 13b are disposed in the lower surface of the upper plate n. The integral spring buckle 13 keeps the same date, and the above-mentioned top plate 12 and the spring hook 丨 3 are fixed to the upper plate 11 with bolts j 9 bolted into the bolt holes of the shaft 12 a 0 of the top plate I]. The top plate 12 supports a glass stand for liquid crystal. One end of the spring 10 is hooked to the circular plate portion 13b of the spring catch 13 described above, and the other end of the spring 1 () is hooked to a spring hook 3a provided on the inner side of the side wall frame 3. Kaihan has a cover plate 15 with a central hole 15a through which the shaft 12a of the top plate 12 passes, and is fixed to the upper surface of the side wall frame 3 by press-fitting. The side wall frame 3 and the cover plate 15 constitute a case 5. The center hole 15a of the cover plate 15 defines the movable range of the top plate 12. An example of the material of each part is described. For example, the ball 7, the upper plate u, and the lower plate 6 are SUS440C, and the top plate 12 is SUS304. Platen 2 is an aluminum plate treated with oxygen 316293 10 1240044 Alumite treatment. The side wall frame 3 is, for example, POM (polyacetai, polyacetal). The upper plate u and the lower plate 6 need to have rigidity and abrasion resistance and need to be processed with high precision, so SUS440C is more suitable. Alternatively, the platen 2 itself may be used as a lower plate. However, the platen 2 does not need to have rigidity or abrasion resistance or high-precision processing such as an upper plate or a lower plate, so from the viewpoint of cost or processing accuracy, as shown in the embodiment, it is more appropriate to make another member such as an aluminum plate. . However, it is not limited to these materials, and can be selected appropriately. As shown in the figure 7 of the younger brother... 'One-hearted man w dry; 1 ^: Straight on the pedestal 1' constitutes a positioning table 18 that can support the liquid crystal glass placing frame 17 in a horizontal plane to move smoothly. In the example of the figure, the Δ phase 2 of the support unit 1 is fixed to the upper surface of the pedestal μ with the bolt 9 penetrating the mounting hole 2a as described above. The robot adjacent to the positioning table 18 mounts the liquid crystal Π ′ or The glass for liquid crystal is taken out from the stand 17. Among them, #: Although the drawing 'but' is omitted, the drive mechanism for driving the machine, such as a pneumatic cylinder, is used to move the placing stand 17 to a predetermined position corresponding to the machine ^, and is arranged adjacent to the positioning table 18 . (Embodiment 2) :: The figure shows another embodiment of the present invention. This implementation = :: 21 is provided when the top plate 12 is to be restrained, the second plate 25: the lower top plate is fixed to 23 persons. This top plate fixing mechanism: is formed under the dish plate 25 to form a perimeter groove 25 & The O-rings 27 and 28 are accommodated in peripheral grooves formed on the peripheral surface of the movable ring 316293 11 1240044 Π, respectively. In addition, the movable ring 26 26 is lowered on its outer peripheral side to form a recess in the circumferential direction. ^ The air guide is added to this recess, so that the air pressure is downwardly applied to the second ring. Fixed to the upper plate 11. In the figure, θ /, and 邛 are denoted by the same figure numbers, and descriptions thereof are omitted. . The taxi place & 17 is positioned at a predetermined position and wants to be restrained at that position. ^ The top plate 12 on which the mounting rack Π is placed is restrained so that it is not stingy. Compressed air is passed through the tomb of Liutai by an air nozzle (not shown) connected to the air introduction path 25b. The work 26, 26, and 26 are fed into the perimeter groove 25a. At this time, the milk is pressed into the recess in the circumferential direction above the movable ring 26, and the movable plate 26 is moved below, and the upper plate 11 is pushed downward. The upper plate η and the top plate 12 as a body are fixed by its pushing. 8 to 10 show another embodiment of a mounting structure in which the support unit 1 for a positioning table is not mounted on a stage base i 6 of a stand ^. In the K example, 'the shell hole 16a is opened in the pedestal 16, and the four parts around the shell are embedded in the four parts corresponding to the two holes of the four parts of the platen 2 (refer to FIG. 1). Drill mounting holes 16c. The shell 5 of the two holding early wood 1 is fitted into the shell fitting hole of the base 16 ..., the screw inspection 32 is inserted through the mounting hole 16c of the base 16 and passes through the collar η and penetrates the base !: the mounting hole 2a ' The nut 33 is tightened. The height dimension of the collar 31 is such that the upper surface of the table 116 and the upper surface of the casing 5 (the upper surface of the cover plate 15) are at the same plane. Therefore, the support unit with bolts 32] 316293 12 1240044 at the base 16 is only ± 4 ± 4 to the right # The top plate 12 for supporting the objects protrudes from the base 16 and ^ is projected from the base 16. As described above, a good positioning without excessive protrusions can be formed. 〇 In addition, the top plate 12 can be prevented from being positioned by the pedestal 16 (Embodiment 4): UA diagram, FIG. 11B shows the positioning in the positioning unit support unit :::-embodiment. The locator 8 of this embodiment is used to receive the ball 7. The part of the round shape that is open on the outer surface of the fixing ring is not round. The ball receiving hole ΤΓΠ8 '抑 # is called (the ball receiving hole is called. This roll today, the mouth The cross-sectional shape of 3 is at least 1 minute of the defect circular shape than the semi-circular shape to prevent the ball 7 from leaving the ball receiving gap: large ... ^ According to the positioner 8 of this embodiment, there is no need to put the size of the M positioner, The position of the ball 7 can be located outside the burdock direction of the heart 1. Therefore, the position of the ball 7 that supports the negative will be far away from the center of the top plate 12 to support the load day. The plate 12 becomes unstable. The simplified size of the support unit for the positioning table can improve the stability of the negative plate 12. (Embodiment 5) In the above embodiments, the side walls constituting the casing 5 The frame 3 is the same component as the cover plate, but it is also possible to make the side wall frame 3 and the cover plate 15 as a single body. The other is not: the wall frame 3 and the platen 2 may be integrated into one body. The I-plate is a force for each of the above-mentioned embodiments. Zhi Muzong * Placement of the positioning table of the straight wood slab 316293 13 1240044 'However, the placement system can be any one. The preferred embodiment of the present invention has been described, but the present invention is not limited to this. Implementation examples. As long as the addition, omission, replacement, and other changes are possible without departing from the scope of the present invention, the present invention is not: = In the above description, it is limited only by the patent application in this specification ^ [Brief description of the drawings] Figure 1 is a view of an embodiment of the present invention. The oral support supports a 7C oblique view. Figure 2A is a view of a positioning table showing Figure J; Figure VII is a sectional view of Figure 2A. Fig. 3 is a view for explaining the state of the above-mentioned positioning table after removing the platen. Fig. 4A shows the support unit for the above-mentioned positioning table Looking Up®; 4Ast Foot Position Benefit-w T 心AA cross-sectional view. Figure 5 is a perspective view of the positioner in Figure 4. _ 第 6 = is a plan view showing another support unit for the positioning platform-Figure 6B is the 6Affim of the embodiment] Figure 7 is the top view Used to illustrate the oblique view of the positioning table using the above-mentioned fixed control. Supporting the early element Figure 8 is a plan view of a state where one of the present invention is mounted on a pedestal. &Amp; 'The support unit for position table f9 is a partially cutaway front view of Figure 8. Brother 10 The part viewed in the direction of the arrow in Fig. 8 is missing 316293 14 1240044. Fig. 11A is a bottom view showing another embodiment of the positioner. Fig. 11B is a cross-sectional view taken along the line B-B in Fig. 11A. Explanation of symbols] 1, 21 Support unit for positioning table 2 Platens 2a, 16c Mounting holes > 3 Side frame 3a Spring hook 4, 9, 19, 32 Bolt 5 Shell 6 Lower plate 7 Ball 8 > 8, Positioning Device 8a Ball receiving hole 8, a Ball receiving notch 8b Spring receiving groove 10 Spring 11 Upper plate 12 Top plate 12a Shaft 13 Spring hook 13b Round plate portion 15, 25 Cover plate 15a Center hole 16 pedestal (positioning table base) 16a Shell fitting hole 16b Drilling hole 17 Placement stand 18 Positioning table 23 Top plate fixing mechanism 25a Peripheral groove 25b Air introduction path 26 Movable ring 26a Recess 27 ^ 28 0-ring 29, 31 Shaft ring 33 Nut
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