TW200512391A - Supporting unit for positioning stage and mounting structure therefor - Google Patents

Supporting unit for positioning stage and mounting structure therefor

Info

Publication number
TW200512391A
TW200512391A TW093127252A TW93127252A TW200512391A TW 200512391 A TW200512391 A TW 200512391A TW 093127252 A TW093127252 A TW 093127252A TW 93127252 A TW93127252 A TW 93127252A TW 200512391 A TW200512391 A TW 200512391A
Authority
TW
Taiwan
Prior art keywords
plate
retainer
positioning stage
supporting unit
mounting structure
Prior art date
Application number
TW093127252A
Other languages
Chinese (zh)
Other versions
TWI240044B (en
Inventor
Kaoru Iguchi
Original Assignee
Iguchi Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iguchi Kiko Co Ltd filed Critical Iguchi Kiko Co Ltd
Publication of TW200512391A publication Critical patent/TW200512391A/en
Application granted granted Critical
Publication of TWI240044B publication Critical patent/TWI240044B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Rolling Contact Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Machine Tool Units (AREA)

Abstract

A supporting unit, for a positioning stage, includes a retainer (8) having ball accommodating holes (8a) which are intermittently disposed .in a circumferential direction of the retainer (8), each of the ball accommodating holes (8a) vertically extending through the retainer (8); balls (7) respectively accommodated in the ball accommodating holes (8a); a lower plate (6) and an upper plate (11) respectively disposed under and over the retainer (8) so as to contact the balls (7); a roof plate (12), integrated with the upper plate (11), for supporting a load; a spring (10) for restoring the roof plate (12) to a center position under no-load conditions; a base plate (2) for supporting the lower plate (6); and a casing (5) fixed on the base plate (2) and surrounding elements other than the roof plate (12).
TW093127252A 2003-09-12 2004-09-09 Supporting unit for positioning stage and mounting structure therefor TWI240044B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003321032 2003-09-12
JP2004227682A JP4443343B2 (en) 2003-09-12 2004-08-04 Positioning stage support unit and its mounting structure

Publications (2)

Publication Number Publication Date
TW200512391A true TW200512391A (en) 2005-04-01
TWI240044B TWI240044B (en) 2005-09-21

Family

ID=34554371

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093127252A TWI240044B (en) 2003-09-12 2004-09-09 Supporting unit for positioning stage and mounting structure therefor

Country Status (4)

Country Link
JP (1) JP4443343B2 (en)
KR (1) KR100598923B1 (en)
CN (1) CN1329767C (en)
TW (1) TWI240044B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007069303A1 (en) * 2005-12-13 2007-06-21 Takachiho Takeda Device for positioning object to be conveyed
KR200446436Y1 (en) * 2007-01-15 2009-10-28 이권우 Positioning stage
KR100884026B1 (en) * 2007-03-15 2009-02-17 다카치호 다케다 Device for product positioning
KR100823235B1 (en) * 2007-08-30 2008-04-18 브이앤씨테크 주식회사 Positioning stage system and supporting unit for the positioning stage system
JP4885177B2 (en) * 2008-08-11 2012-02-29 トヨタ自動車株式会社 Support structure for rotating body and V block
JP6245423B2 (en) * 2013-07-31 2017-12-13 Smc株式会社 Work positioning device
CN104555367B (en) 2013-10-16 2018-08-03 Smc株式会社 Working piece positioning device
JP6304536B2 (en) * 2013-10-16 2018-04-04 Smc株式会社 Work positioning device
JP7486093B2 (en) 2019-11-12 2024-05-17 パナソニックＩｐマネジメント株式会社 Positioning device
CN118486641A (en) * 2024-07-09 2024-08-13 迈为技术(珠海)有限公司 Wafer carrying platform and wafer processing equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100235610B1 (en) * 1997-06-30 1999-12-15 Daewoo Electronics Co Ltd Panel positioning device
CN2566418Y (en) * 2002-08-08 2003-08-13 邱柏森 Connecting rod type lift device

Also Published As

Publication number Publication date
CN1595239A (en) 2005-03-16
KR20050027019A (en) 2005-03-17
CN1329767C (en) 2007-08-01
JP2005109443A (en) 2005-04-21
TWI240044B (en) 2005-09-21
JP4443343B2 (en) 2010-03-31
KR100598923B1 (en) 2006-07-10

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees