1235730 玖、發明說明： 【發明所屬之技術領域】 本發明是關於物體漂浮裝置及取貨裝置，詳言之，係 關於使用音波的放射壓而保持物體於漂浮狀態，或在漂浮 狀態下移載物體的物體漂浮裝置及取貨裝置。 【先前技術】 這種物體漂浮裝置例如有揭示於日本專利特開平7 -244 1 5號公報、日本專利特開平9- 1 69427號公報等。在這 些裝置中係使用長的平板狀的振動板，令與應漂浮的物體 之前述振動板的表面面對的面爲平面。而且，藉激勵手段 激勵振動板，藉由由振動板的振動所造成之音波的放射壓 而使物體漂浮。構成激勵手段的喇叭形揚聲器（horn)係結合 於振動板的中央部。而且，也揭示藉由對漂浮的物體噴射 空氣，或以前述振動板使進行波產生而移動漂浮的物體， 以在漂浮狀態下傳送物體。 而且，將物體漂浮裝置裝設於傳送車，在漂浮狀態下 傳送物體到預定位置的情形，或者藉由在漂浮狀態下傳送 物體的物體傳送裝置，傳送物體到預定位置的情形，需在 預定位置中移載物體的作業即取貨作業。以在物體的漂浮 狀態下進行取貨作業的取貨裝置而言，具備且在音叉（fork) 片上裝設複數片振動板之物體漂浮裝置的技術係揭示於曰 本特開200 1 -975 3 1號公報。 【發明內容】 但是，在習知的物體漂浮裝置中，對於激勵振動板， 係經由喇叭形揚聲器而使振子於連結振動板，藉由喇叭形 1235730 揚聲器來放大由振子所產生的振動振幅而使用。因 振子的下端到振動板的頂面的距離大，物體漂浮裝 型化困難。而且，在取貨裝置中，有需要於取貨作 在以其他物體漂浮裝置所保持在漂浮狀態的物體的 配置由振子所激勵的振動板，有需要讓振子的下端 板的頂面的距離爲大的狀態之取貨裝置進入。其結 如需在物體漂浮裝置確保容許取貨裝置進入之大的 而且，取貨裝置自身也有薄型化困難的問題。而且 形揚聲器爲高價，該部分也有製造成本高的問題。 本發明乃鑒於前述問題所進行的創作，其第一 提供一可薄型的構成且保持物體於漂浮狀態及可降 的物體漂浮裝置及取貨裝置，第二目的爲提供一可 構成且能以漂浮狀態移載物體及可降低成本的取貨 爲了達成前述第一目的，申請專利範圍第1項 發明係一種物體漂浮裝置，藉由激勵手段使振動板 藉振動板之音波的放射壓而使物體由振動板的表面 其中不經由喇叭形揚聲器，在前述振動板直接安裝 述激勵手段的振動元件。 在此發明中，振動板被振動元件激勵，物體藉 板的音波的放射壓而由振動板的表面漂浮起。因振 不經由喇叭形揚聲器，直接安裝於振動板，故與喇 聲器存在的構成比較之下，由振動元件的底部到振 表面的距離變小，因而可薄型並且可降低製造成本 申請專利範圍第2項所述之發明係如申請專利 1項所述之發明，其中前述激勵手段係激勵前述振 此，由 置的小 業時， 下方， 到振動 果，例 空間。 ，喇叭 目的爲 低成本 薄型的 裝置。 所述之 激勵， 漂浮， 構成前 由振動 動元件 叭形揚 動板的 〇 範圍第 動板而 1235730 使撓性振動發生。在此發明中，即使振動元件的振幅小振 動板也能以大的振幅振動。 申請專利範圍第3項所述之發明係如申請專利範圍第 1項或第2項所述之發明，其中前述振動板係使用長的振 動板。在此發明中，振動板產生具有更佳效率，使物體漂 浮所需的放射壓的音波。 申請專利範圍第4項以及第5項所述之發明係如申請 專利範圍第2項或第3項所述之發明，其中前述振動板係 被激勵而產生駐波。在此發明中，藉由自振動板產生的音 波的放射壓縮，使物體在漂浮狀態下保持於預定位置。 申請專利範圍第6項所述之發明係如申請專利範圍第 4項或第5項所述之發明，其中前述振動元件係在前述振 動板被激勵的狀態下安裝於成爲振動波節的位置。因此， 在此發明中，振子可有效地激勵振動板。 爲了達成第二目的，申請專利範圍第7項所述之取貨 裝置的發明係具備：使支持部移動的移動手段；相對於前述 支持部，經由振動元件而被支持的振動板；以及使前述振 動元件振動的驅動手段，其中，不經由喇叭形揚聲器直接 把前述振動元件安裝於前述振動板。在此發明中，與在習 知的漂浮狀態下進行取貨的取貨裝置不同，因在振動元件 與振動板之間不存在喇叭形揚聲器，故在取貨時配置振動 板於應取貨的被漂浮物體的下方用的空間小所以較佳，可 使取貨裝置薄型化（小型化）。而且，可降低製造成本。 【實施方式】 (第一實施形態） 1235730 以下，依照第1圖以及第2圖說明具體化本發明爲物 體漂浮裝置的第一實施形態。第1圖（a)是顯示振動板與振 動元件的關係的模式側視圖，第1圖（b)爲第1圖（a)的底視 圖。第2圖是物體漂浮裝置的模式斜視圖。 如第 2圖所示，物體漂浮裝置11具備底板（base Plate)12，在底板12上配設有一對振動板13，在振動板13 上係不經由喇叭形揚聲器，而直接安裝有構成激勵手段的 振動元件1 4。在此實施例中，振動元件1 4係相對於一個振 動板1 3而安裝一個。振動板1 3係使用長的振動板，振動 板1 3係相對於底板1 2而隔著振動元件1 4以懸臂狀態下被 支持。振動板1 3係以導體（例如金屬板）構成，振動元件1 4 藉由導電性的接著劑固著於振動板1 3。 振動板1 3係形成爲比當作物體的板狀構件1 5的寬度 還窄的矩形平板狀，藉由一對振動板1 3而可漂浮保持板狀 構件15。振動元件14使用以锆鈦酸鉛系磁器（PZT)形成預 定形狀（在此實施形態爲長方體狀）的壓電（piezo)元件。振動 元件1 4的一端經由配線1 6a與振盪器1 7連接，振盪器1 7 的接地端子經由配線1 6b連接於振動板1 3。藉由振動元件 1 4以及振盪器1 7而構成使振動板1 3激勵的激勵手段。激 勵手段係激勵振動板1 3而使撓性振動發生。振動板1 3係 藉激勵而使駐波發生。如第2圖所示，振動元件1 4係在振 動板1 3藉激勵產生駐波的狀態下被安裝於成爲振動波W 之波節Wn的位置。 其次，說明如前述構成的裝置的作用。 物體漂浮裝置1 1例如裝設於傳送車上，一邊保持應傳 1235730 送的板狀構件1 5於漂浮狀態，一邊藉由傳送車的移動而傳 送到目的位置。 藉由振盪器1 7的驅動，若振動元件14被預定的共振 頻率（例如2 0kHz前後）激勵時，振動板13進行撓性振動， 產生駐波。藉由振動板1 3的振動，音波由振動板1 3放射。 藉由自振動板1 3放射的音波的放射壓，板狀構件1 5由振 動板13的表面漂浮。漂浮高度爲數10〜數100 // m。 因振動元件1 4不經由喇叭形揚聲器而直接安裝於振動 板1 3，故與存在有喇叭形揚聲器的構成相比較下，由振動 元件14的底部到振動板13的表面的距離小，係可成爲薄 型。 在此實施形態中具有以下的功效。 (1 )、在以激勵手段使振動板1 3激勵，而藉由振動板1 3 之音波的放射壓使物體（板狀構件15)由振動板13的表面 漂浮的物體漂浮裝置1 1中，構成該物體漂浮裝置1 1之振 動板1 3，係不經由喇叭形揚聲器而直接安裝上構成前述激 勵手段的振動元件1 4。因此，與存在有喇叭形揚聲器的構 成比較，由振動元件1 4的底部到振動板1 3的表面的距離 小，係可爲薄型且可降低製造成本。 (2)、激勵手段係激勵振動板1 3而使撓性振動發生。因 此，即使振動元件14的振幅小，振動板1 3也能以大的振 幅振動，可放射必要的音壓。 (3 )、振動板1 3係使用長的振動板。因此，振動板13 可產生具有更佳效率，使板狀構件1 5漂浮所需之放射壓的 音波。 1235730 (4)、振動板1 3係藉激勵而產生駐波。因此’與使進 波產生的構成相比較下，激勵手段係成爲簡單的構成。 (5 )、振動元件1 4係在振動板1 3被激勵的狀態下被 裝於成爲振動波W之波節W η的位置。因此，振動元件 可有效地激勵振動板1 3。 (6) 、由於長的振動板1 3在一端側中被固定於振動元 1 4，故容易使振幅大的駐波產生。 (7) 、因物體漂浮裝置1 1係平行配設有複數個振動 13，故即使應漂浮保持的物體（板狀構件15)的寬度爲寬 的情形，也能在穩定的漂浮狀態下保持。 (第二實施形態） 其次，依照第3圖（a)、（b)說明第二實施形態。此實 形態係在構成爲振動板1 3產生推迫板狀構件1 5於其移 方向的進行波這點上與前述實施形態大不相同。與前述 施形態同一部分係附加同一符號，省略詳細的說明。 在振動板1 3的第一端部側安裝有激勵用的振動元 14，在振動板13的第二端部側安裝有受波用（受振用）的 動元件18。振動元件14與前述實施形態一樣連接於振盪 1 7。另一方面，在安裝於振動板1 3的第二端部側的振動 件1 8連接有由電阻R以及線圈L構成的匹配電路1 9。 配電路1 9係一方的端子連接於振動元件1 8、而他方的端 連接於振動板1 3。而且，如第3圖U)所示，激勵側的振 元件1 4與受振側（受波側）振動元件1 8係安裝成其間隔；! ηλ+3λ/4(λ爲振動波長，η爲自然數）。即因振動元件 的激勵而發生的撓性振動的振動波W之波節Wn位於與 行 安 14 件 板 廣 施 動 實 件 振 器 元 匹 子 動 I 14 振 -10- 1235730 動元件1 4對應的位置時，在對應其振動波W的肚子的位 置存在振動元件1 8。此外，前述間隔爲η λ + λ /4 ( λ爲振動 波長，η爲自然數）也可以。 在此實施形態中，振動板1 3的振動係傳達到連接於匹 配電路1 9的振動元件1 8，藉由用以構成振動元件1 8的壓 電元件，使機械能的振動的能量被轉換成電能。此電能藉 由匹配電路1 9的電阻R被轉換成焦耳熱而發散。因此，成 爲在振動板1 3所產生之振動的波朝一方向進行的進行波 (在此實施形態中，由振動元件1 4側朝振動元件1 8側前進 的進行波），而對板狀構件1 5賦予由振動板1 3的一端側朝 他端側的推力。 因此，在此實施形態中，除了具有與前述實施形態的 (1)〜（3)以及（5)〜（7)同樣的功效外，也具有以下的功效。 (8)、若使用此實施形態的物體漂浮裝置，則不同於產 生駐波而漂浮保持物體之構成的物體漂浮裝置，係可在把 物體漂浮裝置配置於預定位置的狀態下，以漂浮狀態傳送 物體。 本發明之實施形態不限於前述，例如以下構成也可 以。 〇在長的振動板1 3使駐波產生的構成中，配設振動 元件1 4於複數個位置也可以。例如第4圖所示，配設三個 振動元件1 4於駐波之波節的位置。各振動元件1 4係使振 動板1 3會共振般地激勵。此情形，產生振幅大的振動波係 變容易。 〇振動元件1 4、1 8係不限於以一個塊狀的壓電元件 1235730 所構成者。例如使用如郎格文（L a n g e v i η，音譯）形振子’在 一對環狀的壓電元件之間配置有環狀的電極板’藉由未圖 示的螺栓（b ο 11)把抵接於與兩壓電元件的電極板抵接的側 相反側的面的兩個金屬塊夾緊固定而構成的振子也可以。 〇 振動元件不使用壓電元件而使用磁致伸縮 (magnetostriction)元件也可以。如第5圖（a)、（b)所7^，石妓 致伸縮元件 20被捲繞有線圈 20a，其一端固定於振動板 13，他端固定於未圖示的底板12。線圈20a連接於振盪器 2 1，使供給線圈2 0 a的電流量成爲預定的値般地驅動振盪 器21。而且，振動板1 3係藉由被振盪器2 1激勵的磁致伸 縮元件20激勵。此情形，可藉電流値來調整振動數。因此， 共振頻率的調整容易。 〇在具備有如下述構成之物體傳送裝置的物體漂浮 裝置，使用前述各實施形態的構成者也可以即，於板狀構 件的傳送方向的左右兩端部支持板狀構件而傳送的傳送手 段以及與對以傳送手段支持的板狀構件賦予漂浮力而抑制 其撓性的物體漂浮裝置。以傳送手段而言，例如日本專利 特開平9- 1 69427號公報所揭示，係使用捲掛於驅動滾輪與 從動滾輪之間的皮帶。而且，使用被旋轉驅動的複數個滾 輪也可以。在此情形，未存在有喇叭形揚聲器，使物體漂 浮裝置的構成變簡單，物體傳送裝置其構成也簡單。 〇把物體漂浮裝置1 1適用於取貨裝置也可以。例如 第6圖所示，取貨裝置22具備有可往復直線移動的支持部 23，與使支持部23往復直線移動的移動手段24。在支持部 23，作爲一對音叉的臂（arm)23a、23b係平行延伸而一體形 -12- 1235730 成，臂2 3 a、2 3 b的前端成爲支持部2 3的前端。在支持部 23，長的振動板13係沿著臂23a、23b延伸而隔著振動元 件1 4被固定。振動元件1 4與物體漂浮裝置1 1的振動元件 1 4 一樣地構成，連接於當作驅動手段的振盪器2 5。移動手 段24具備有具有連桿24a的無向量（seala〇式之公知的機械 手臂（r 〇 b 〇 t a r m)，而藉由未圖示的驅動機構使支持部2 3往 復直線移動，並且可升降地構成。在此情形，係與在漂浮 狀態下進行取貨的習知的取貨裝置不同，因在振動元件1 4 與振動板1 3之間不存在喇叭形揚聲器，故在取貨時，配置 振動板1 3於應取貨的被漂浮物體的下方用的空間小較 佳，可使取貨裝置薄型化（小型化）。而且，可降低製造成 本。 〇有關用以構成使支持部23移動的移動手段24的機 械手臂而言，也可以連桿在垂直面內回轉的構成來取代連 桿24a在水平面內回轉的構成。例如連桿的回轉軸被水平 配置，而連桿在垂直面內回轉，並且支持部相對於連桿的 H[J端係以在垂直面內可回轉地被支持，並且在振動板1 3配 置於水平狀態後，在保持水平狀態下可直線移動地構成也 可以。 〇也可以把物體漂浮裝置1 1使用在具備如下構成之 板狀構件傳送裝置的物體漂浮裝置，即，具備可移動地支 承板狀構件的下端的支承部，與對前述板狀構件賦予振動 板之音波的放射壓，以使在非接觸狀態下可保持該板狀構 件於鉛直或傾斜的狀態的物體漂浮裝置，以及移動前述板 狀構件的移動手段。此情形係可減小配設物體漂浮裝置所 -13- 1235730 需的空間，進而可小型化物體傳送裝置。 〇也可以把物體漂浮裝置1 1適用於用以保管顯示裝 置的玻璃基板或半導體晶圓等的板狀構件之板狀構件保管 裝置。例如第7圖所示，於未圖示的外殼內，以預定間隔 在上下方向疊層配置有複數個以預定間隔配設有一對振動 板1 3的物體漂浮裝置1 1。各底板1 2被支持於外殼，振動 板1 3隔著振動元件1 4固定於底板1 2。而且，藉由未圖示 的振盪器驅動振動元件1 4，藉由振動板1 3被激勵而產生駐 波，使板狀構件保持於漂浮狀態。保管中未必需要使振動 板1 3振動，而在非接觸狀態下保持板狀構件，以在與振動 板1 3接觸的狀態下保管板狀構件也可以。因喇叭形揚聲器 不存在，故可縮小上下的物體漂浮裝置1 1間的間隔，以提 高板狀構件的收納效率。 〇朝底板12以及振動板13的振動元件14、18的安 裝係不局限於利用具導電性的接著劑的固著，也可以使用 螺栓或螺絲，把固定振動元件1 4夾緊於底板1 2以及振動 板1 3之間。例如在振動元件14的兩側中，藉由貫通底板 1 2以及振動板1 3的螺栓與螺合於螺栓的螺帽而將振動元 件1 4夾緊固定於底板1 2與振動板1 3之間。而且，在振動 元件1 4形成插通孔，使用貫通插通孔的螺栓在底板1 2與 振動板1 3之間夾緊固定振動元件1 4也可以。 〇振動板也未必爲長的，使用複數個短的矩形狀的振 動板，成爲撓性振動般地激勵也可以。 〇對振動元件1 4的振動板1 3的安裝位置也可以不是 駐波產生時之波節的位置。 -14· 1235730 關於由前述實施形態所把握的發明（技術的思想）， 載如下。 (1 )、在申請專利範圍第3項所述之發明中，前述 板係藉激勵而產生進行波，前述振動板的激勵側的振 件與受振側的振動兀件係其間隔成爲η λ + λ / 4或η λ + 3 λ 爲振動波長，η爲自然數）而安裝。 (2) 、一種物體傳送裝置，係具備有於物體的傳送 的左右兩端部支持物體而傳送的傳送手段，與對以前 送手段支持的物體賦予漂浮力而抑制其撓性的物體漂 置，其中該物體漂浮裝置係配設申請專利範圍第1項至 項中任一項所述之物體漂浮裝置。 (3) 、一種板狀構件保管裝置，以預定間隔在上下 疊層配置複數個以預定間隔配設有一對申請專利範圍 項以及第5項所述之振動板之物體漂浮裝置。 (4) 、使用申請專利範圍第1項至第6項以及前述 的思想（1)中的任一項所述之物體漂浮裝置的板狀構 送裝置，係具備有可移動地支承板狀構件的下端的 部’與對前述板狀構件賦予振動板的音波的放射壓， 接觸狀態下可保持該板狀構件於鉛直或傾斜的狀態的 漂浮裝置，與移動前述板狀構件的移動手段的板狀構 送裝置的物體漂浮裝置。 (5) 、在申請專利範圍第1項至第7項以及前述技 思想（1)〜（4)中的任一項所述之發明中，前述振動元件 磁致伸縮元件。 【發明的功效】 係記 振動 動元 /4( λ 方向 述傳 浮裝 :第6 方向 第4 技術 件傳 支承 在非 物體 件傳 術的 使用 1235730 如以上詳述，如依申請專利範圍第1項至弟6項中任 一項所述之發明，則薄型的構成可保持物體於漂浮狀態以 及成本之降低係成爲可能。如依照申請專利範圍第7項所 述之發明，則薄型的構成可在漂浮狀態下移載物體以及成 本之降低上係成爲可能。 【圖式簡單說明】 第1圖（a)是顯不第一實施形態的振動兀件與振動板的 關係的模式側視圖，（b)爲其底視圖。1235730 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to an object floating device and a pick-up device. In particular, it relates to the use of sound pressure to maintain the object in a floating state or to transfer the object in a floating state Object floating device and pickup device. [Prior Art] Such an object floating device is disclosed in, for example, Japanese Patent Laid-Open No. 7-244 1 5 and Japanese Patent Laid-Open No. 9-69 69427. In these devices, a long flat plate-shaped vibration plate is used so that the surface facing the surface of the vibration plate of the object to be floated is flat. In addition, the vibration plate is excited by an excitation means, and the object is floated by the radiation pressure of the sound wave caused by the vibration of the vibration plate. A horn speaker constituting the excitation means is coupled to the central portion of the vibration plate. Furthermore, it is also disclosed that the floating object is moved by spraying air on the floating object or generating a wave by the aforementioned vibration plate to transfer the object in a floating state. Moreover, when the object floating device is installed on a transfer vehicle and the object is transferred to a predetermined position in a floating state, or when the object transfer device is used to transfer an object to a predetermined position in a floating state, the object needs to be at a predetermined position. The operation of transferring objects is the pickup operation. For a pick-up device that performs pick-up operations in the floating state of an object, the technology of an object-floating device equipped with a plurality of vibration plates on a tuning fork (fork) is disclosed in Japanese Patent Application Laid-Open No. 200 1 -975 3 Bulletin No. 1. [Summary of the Invention] However, in a conventional object floating device, a vibrating plate is connected to a vibrating plate through a horn speaker, and a 1235730 speaker is used to amplify the vibration amplitude generated by the vibrator. . Because the distance from the lower end of the vibrator to the top surface of the vibration plate is large, it is difficult to shape the object in a floating manner. Furthermore, in the pick-up device, there is a need to pick up a vibrating plate that is excited by a vibrator to arrange an object that is held in a floating state by another object floating device, and it is necessary to make the distance of the top surface of the lower end plate of the vibrator be The pickup device of the big state enters. As a result, it is necessary to ensure that the pick-up device is large in the object floating device, and the pick-up device itself has a problem of being thin. Moreover, the shape speaker is expensive, and this part also has a problem of high manufacturing cost. The present invention is made in view of the foregoing problems. The first object of the present invention is to provide a thin-type structure and an object floating device and a pick-up device that can keep objects in a floating state and can be lowered. The second object is to provide a structure that can be configured and capable of floating. State transfer of objects and pick-up with reduced costs In order to achieve the aforementioned first purpose, the first invention of the scope of patent application is an object floating device, which uses an excitation method to make the vibration plate use the radiation pressure of the sound wave of the vibration plate to make the object A vibration element of the excitation means is directly mounted on the surface of the vibration plate without a horn speaker. In this invention, the vibration plate is excited by the vibration element, and the object floats from the surface of the vibration plate by the radiation pressure of the sound wave of the plate. Since the vibration is directly installed on the vibration plate without passing through the horn speaker, compared with the structure of a loudspeaker, the distance from the bottom of the vibration element to the vibration surface is reduced, so it can be thin and can reduce manufacturing costs. The invention described in the second item is the invention described in the first patent application, wherein the above-mentioned incentive means is to stimulate the above-mentioned vibrating, from the small business, to the vibrating fruit, for example. , The purpose of the speaker is a low-cost and thin device. The aforementioned excitation, floatation, and formation of the 0th range moving plate by the vibrating moving element bulging plate and 1235730 cause flexible vibration to occur. In this invention, even if the vibration plate has a small amplitude, the vibration plate can vibrate with a large amplitude. The invention described in item 3 of the patent application scope is the invention described in item 1 or 2 of the patent application scope, wherein the aforementioned vibration plate uses a long vibration plate. In this invention, the vibration plate generates a sound wave having a radiation pressure required for better efficiency to float an object. The invention described in item 4 and item 5 of the patent application is the invention described in item 2 or item 3 of the patent application, wherein the aforementioned vibration plate is excited to generate a standing wave. In this invention, the object is held in a predetermined position in a floating state by the radiation compression of the sound wave generated from the vibration plate. The invention described in item 6 of the scope of patent application is the invention described in item 4 or 5 of scope of patent application, wherein the vibration element is installed at a position to become a vibration node in a state where the vibration plate is excited. Therefore, in this invention, the vibrator can effectively excite the vibration plate. In order to achieve the second object, the invention of the pickup device described in item 7 of the scope of patent application includes: a moving means for moving the support part; a vibration plate supported by the support part via a vibration element; and the aforementioned In the driving means for vibrating the vibration element, the vibration element is directly mounted on the vibration plate without a horn speaker. In this invention, unlike the conventional pick-up device that picks up goods in a floating state, since there is no horn speaker between the vibration element and the vibration plate, a vibration plate is arranged at the time of pick-up. The space below the object to be floated is small, so it is preferable, and the pickup device can be made thin (miniaturized). Moreover, manufacturing costs can be reduced. [Embodiment] (First embodiment) 1235730 Hereinafter, a first embodiment of the present invention as a body floating device will be described with reference to Figs. 1 and 2. Fig. 1 (a) is a schematic side view showing the relationship between the vibration plate and the vibrating element, and Fig. 1 (b) is a bottom view of Fig. 1 (a). Fig. 2 is a schematic perspective view of the object floating device. As shown in FIG. 2, the object floating device 11 includes a base plate 12. A pair of vibrating plates 13 is disposed on the base plate 12. The vibrating plate 13 is directly mounted with an excitation means without passing through a horn speaker. Vibrating element 1 4. In this embodiment, one vibration element 14 is mounted with respect to one vibration plate 13. The vibration plate 1 3 uses a long vibration plate, and the vibration plate 1 3 is supported in a cantilever state with respect to the bottom plate 12 through the vibration element 14. The vibration plate 1 3 is composed of a conductor (for example, a metal plate), and the vibration element 1 4 is fixed to the vibration plate 13 with a conductive adhesive. The vibrating plate 13 is formed in a rectangular flat plate shape which is narrower than the width of the plate-like member 15 as an object, and the pair of vibrating plates 13 can float and hold the plate-like member 15. As the vibrating element 14, a piezoelectric (piezo) element having a predetermined shape (cuboid shape in this embodiment) is used as a lead zirconate titanate-based magnet (PZT). One end of the vibration element 14 is connected to the oscillator 17 via the wiring 16a, and the ground terminal of the oscillator 17 is connected to the vibration plate 13 via the wiring 16b. The vibration element 14 and the oscillator 17 constitute an excitation means for exciting the vibration plate 13. The excitation means is to excite the vibration plate 13 to generate flexible vibration. The vibration plate 1 3 generates a standing wave by excitation. As shown in Fig. 2, the vibrating element 14 is mounted at a position to be a node Wn of the vibrating wave W in a state where the vibrating plate 13 generates a standing wave by excitation. Next, the operation of the device configured as described above will be described. The object floating device 11 is installed on a transfer vehicle, for example, and keeps the plate-like member 15 to be transferred 1235730 in a floating state, and transfers it to the destination by moving the transfer vehicle. When the vibrating element 14 is excited by a predetermined resonance frequency (for example, around 20 kHz) by the drive of the oscillator 17, the vibrating plate 13 is flexibly vibrated to generate a standing wave. With the vibration of the vibration plate 13, a sound wave is emitted from the vibration plate 13. Due to the radiation pressure of the sound waves radiated from the vibration plate 13, the plate-like member 15 floats on the surface of the vibration plate 13. Floating height is from several 10 to 100 // m. Since the vibration element 14 is directly mounted on the vibration plate 13 without passing through the horn speaker, compared with a structure in which a horn speaker is present, the distance from the bottom of the vibration element 14 to the surface of the vibration plate 13 is small, and the Become thin. This embodiment has the following effects. (1) In the object floating device 11 that excites the vibration plate 13 by means of excitation, and makes the object (plate-like member 15) float from the surface of the vibration plate 13 by the radiation pressure of the sound wave of the vibration plate 13, The vibration plate 13 constituting the object floating device 11 is directly mounted with a vibration element 14 constituting the aforementioned excitation means without a horn speaker. Therefore, compared with a configuration in which a horn-shaped speaker is present, the distance from the bottom of the vibration element 14 to the surface of the vibration plate 13 is small, and the thickness can be reduced and the manufacturing cost can be reduced. (2) The excitation means is to excite the vibration plate 13 to generate flexible vibration. Therefore, even if the amplitude of the vibration element 14 is small, the vibration plate 13 can vibrate with a large amplitude, and can emit a necessary sound pressure. (3) The vibration plate 1 3 uses a long vibration plate. Therefore, the vibration plate 13 can generate sound waves having a radiation pressure required for better efficiency to float the plate-like member 15. 1235730 (4), the vibration plate 1 3 generates standing waves by excitation. Therefore, compared with the structure that generates the wave, the incentive means is a simple structure. (5) The vibrating element 14 is mounted at a position to be a node W η of the vibration wave W in a state where the vibration plate 13 is excited. Therefore, the vibration element can effectively excite the vibration plate 13. (6) Since the long vibration plate 13 is fixed to the vibration element 14 at one end side, a standing wave having a large amplitude is easily generated. (7) Since the object floating device 11 is equipped with a plurality of vibrations 13 in parallel, even if the width of the object (plate-like member 15) to be floated is wide, it can be held in a stable floating state. (Second Embodiment) Next, a second embodiment will be described with reference to Figs. 3 (a) and (b). This embodiment is very different from the previous embodiment in that the vibration plate 13 is configured to generate a progressing wave that urges the plate-like member 15 in its moving direction. The same reference numerals are assigned to the same parts as those in the aforementioned embodiment, and detailed descriptions are omitted. A vibration element 14 for excitation is mounted on the first end portion side of the vibration plate 13, and a moving element 18 for wave receiving (vibration) is mounted on the second end portion side of the vibration plate 13. The vibration element 14 is connected to the oscillation 17 in the same manner as in the previous embodiment. On the other hand, a matching circuit 19 composed of a resistor R and a coil L is connected to the vibrator 18 mounted on the second end portion side of the vibrating plate 13. One terminal of the distribution circuit 19 is connected to the vibration element 18, and the other terminal is connected to the vibration plate 13. Moreover, as shown in FIG. 3 U), the vibration element 14 on the excitation side and the vibration element 18 on the receiving side (receiving side) are installed at a distance;! Ηλ + 3λ / 4 (λ is the vibration wavelength and η is Natural number). That is, the node Wn of the vibration wave W of the flexible vibration generated by the excitation of the vibrating element is located corresponding to the 14-piece board wide-actuated real-life vibrator element I 14 vibrating -10- 1235730 moving element 1 4 In the case of the position, there is a vibration element 18 at a position corresponding to the belly of the vibration wave W thereof. The interval may be η λ + λ / 4 (λ is a vibration wavelength and η is a natural number). In this embodiment, the vibration system of the vibration plate 13 is transmitted to the vibration element 18 connected to the matching circuit 19, and the energy of the vibration of the mechanical energy is converted by the piezoelectric element constituting the vibration element 18成 electricity. This electric energy is converted into Joule heat by the resistance R of the matching circuit 19 and is dissipated. Therefore, the wave generated by the vibration plate 13 progresses in one direction (in this embodiment, the wave progresses from the vibration element 14 side to the vibration element 18 side), and the plate-like member 15. A thrust force is applied from one end side of the vibration plate 13 to the other end side. Therefore, in this embodiment, in addition to the same effects as (1) to (3) and (5) to (7) of the aforementioned embodiment, it also has the following effects. (8) If the object floating device of this embodiment is used, it is different from the object floating device that generates standing waves and floats and holds the object. It can be transferred in a floating state when the object floating device is arranged at a predetermined position. object. The embodiment of the present invention is not limited to the foregoing, and for example, the following configuration may be adopted. 〇 In a configuration in which a standing wave 13 generates a standing wave, the vibration element 14 may be provided at a plurality of positions. For example, as shown in Fig. 4, three vibration elements 14 are arranged at the positions of the nodes of the standing wave. Each of the vibrating elements 14 and 4 excites the vibrating plate 13 in resonance. In this case, it becomes easy to generate a vibration wave system having a large amplitude. 〇 The vibrating element 14 and 18 are not limited to a single piezoelectric element 1235730. For example, a Langevin (Langevi η) translator is used to arrange a ring-shaped electrode plate between a pair of ring-shaped piezoelectric elements with a bolt (b ο 11) not shown. The vibrator configured by clamping and fixing two metal blocks on a surface opposite to the side in contact with the electrode plates of the two piezoelectric elements may be used. 〇 Instead of a piezoelectric element, a magnetostriction element may be used for the vibration element. As shown in Figs. 5 (a) and (b), a coil 20a is wound around the stone telescopic element 20, one end of which is fixed to a vibration plate 13, and the other end of which is fixed to a bottom plate 12 (not shown). The coil 20a is connected to the oscillator 21, and drives the oscillator 21 with a predetermined amount of current supplied to the coil 20a. Further, the vibration plate 13 is excited by the magnetostrictive element 20 excited by the oscillator 21. In this case, the number of vibrations can be adjusted by the current 値. Therefore, adjustment of the resonance frequency is easy. 〇 In the object floating device provided with the object transfer device configured as described below, the constituents of the foregoing embodiments may use the transfer means that supports the plate-shaped member at the left and right ends in the direction of transfer of the plate-shaped member, and A floating device that imparts a floating force to a plate-like member supported by a conveying means and suppresses its flexibility. As for the conveying means, for example, it is disclosed in Japanese Patent Laid-Open No. 9-1 69427 that a belt wound between a driving roller and a driven roller is used. It is also possible to use a plurality of rollers which are rotationally driven. In this case, there is no horn speaker, and the configuration of the object floating device is simplified, and the configuration of the object transfer device is also simple. 〇 The object floating device 11 may be applied to a pickup device. For example, as shown in Fig. 6, the pickup device 22 is provided with a support portion 23 capable of reciprocating linearly and a moving means 24 for reciprocating linearly. In the support portion 23, arms 23a and 23b, which are a pair of tuning forks, extend in parallel and are integrally formed. The front ends of the arms 2 3a, 2 3b become the front ends of the support portions 23. In the support portion 23, a long vibration plate 13 extends along the arms 23a, 23b and is fixed via the vibration element 14. The vibration element 14 is configured in the same manner as the vibration element 14 of the object floating device 11 and is connected to an oscillator 25 as a driving means. The moving means 24 is equipped with a vectorless (seala〇-type known robot arm (r 〇b 〇tarm)) having a link 24a, and the support portion 23 is linearly reciprocated by a driving mechanism (not shown), and can be moved up and down. In this case, it is different from the conventional picking device that picks up goods in a floating state. Because there is no horn speaker between the vibration element 1 4 and the vibration plate 13, when picking up the goods, It is better to dispose the vibration plate 13 below the floating object to be picked up, and it is possible to reduce the thickness (miniaturization) of the picking device. Furthermore, it can reduce the manufacturing cost. 〇About the support structure 23 The mechanical arm of the moving means 24 can also be configured such that the link rotates in the vertical plane instead of the structure in which the link 24a rotates in the horizontal plane. For example, the rotation axis of the link is horizontally arranged and the link is on the vertical plane It turns inward, and the support part is supported rotatably in the vertical plane with respect to the H [J end of the link, and after the vibration plate 13 is arranged in a horizontal state, it can be moved linearly while maintaining the horizontal state can 〇 The object floating device 11 can also be used in an object floating device provided with a plate-shaped member transfer device configured to support the lower end of the plate-shaped member movably and provide vibration to the plate-shaped member. A device for radiating pressure of a board sound wave so as to keep the plate-shaped member in a vertical or inclined state in a non-contact state, and a floating device for moving the plate-shaped member. In this case, the arrangement object can be reduced. The space required by the floating device -13- 1235730 can further reduce the size of the object transfer device. 〇 The object floating device 11 can also be applied to the plate-like shape of a plate-like member such as a glass substrate or a semiconductor wafer for storing a display device. Component storage device. For example, as shown in FIG. 7, a plurality of object floating devices 11 in which a pair of vibration plates 13 are arranged at predetermined intervals are stacked in a vertical direction in a casing (not shown) at a predetermined interval. The bottom plate 12 is supported by the case, and the vibration plate 13 is fixed to the bottom plate 12 via the vibration element 14. The vibration element 14 is driven by an oscillator (not shown), and The vibrating plate 13 is excited to generate a standing wave to keep the plate-like member in a floating state. It is not necessary to vibrate the vibrating plate 13 during storage, but to keep the plate-like member in a non-contact state so as to contact the vibrating plate 13 It is also possible to store the plate-like member in the state of being. Since the horn speaker does not exist, the space between the upper and lower object floating devices 11 can be reduced to improve the storage efficiency of the plate-like member. The mounting system of the elements 14 and 18 is not limited to the use of a conductive adhesive, and the fixed vibration element 14 may be clamped between the base plate 12 and the vibration plate 13 using bolts or screws. For example, in On both sides of the vibration element 14, the vibration element 14 is clamped and fixed between the bottom plate 12 and the vibration plate 13 by bolts penetrating through the bottom plate 12 and the vibration plate 13 and a nut screwed to the bolt. Further, an insertion hole may be formed in the vibration element 14 and the vibration element 14 may be clamped and fixed between the bottom plate 12 and the vibration plate 13 using a bolt penetrating the insertion hole. 〇 The vibration plate is not necessarily long, and a plurality of short rectangular vibration plates may be used for excitation such as flexible vibration. The mounting position of the vibration plate 13 of the vibration element 14 may not be the position of the node when the standing wave is generated. -14 · 1235730 The invention (technical idea) grasped by the aforementioned embodiment is as follows. (1) In the invention described in item 3 of the scope of patent application, the plate is generated by excitation, and the vibration element on the excitation side and the vibration element on the vibration side of the vibration plate have an interval of η λ + λ / 4 or η λ + 3 λ is the vibration wavelength and η is a natural number). (2) An object conveying device, which includes conveying means for supporting and conveying objects at the left and right ends of the conveyance of the object, and an object that is supported by the previous conveying means with a buoyant force to suppress its flexibility from drifting, Wherein, the object floating device is provided with the object floating device described in any one of items 1 to 1. (3) A plate-like member storage device. A plurality of object floating devices arranged at a predetermined interval with a pair of vibrating plates described in the scope of the patent application and item 5 are stacked at a predetermined interval. (4) A plate-like structure delivery device using the object floating device described in any one of the claims 1 to 6 and the above-mentioned idea (1), which is provided with a movable support plate-like member The lower part of the plate and the radiating pressure of the sound wave that imparts a vibration plate to the plate-shaped member, a floating device that can maintain the plate-shaped member in a vertical or inclined state in a contact state, and a plate for moving the plate-shaped member. Object-floating device for a structure-like delivery device. (5) In the invention described in claims 1 to 7 of the patent application scope and any one of the aforementioned technical ideas (1) to (4), the aforementioned vibration element is a magnetostrictive element. [Effects of the invention] The vibration actuator / 4 (λ direction is described as floating installation: the 6th direction, the 4th technical piece is supported on the non-object piece, and the use is 1235730, as detailed above. According to the invention described in any one of items 6 to 6, it is possible to keep a thin structure in a floating state and reduce the cost. According to the invention described in item 7 of the scope of patent application, the thin structure may be It is possible to transfer an object in a floating state and reduce the cost. [Brief description of the figure] Figure 1 (a) is a schematic side view showing the relationship between the vibration element and the vibration plate of the first embodiment, ( b) for its bottom view.
第2圖是相同地物體漂浮裝置的模式斜視圖。 第3圖（a)是顯示第二實施形態的振動元件與振動板的 關係的模式側視圖，（b)爲其底視圖。 第4圖是顯示其他實施形態的振動元件與振動板的關 係的模式側視圖。. 第5圖（a)是其他實施形態的物體漂浮裝置的部分模式 側視圖，（b)爲振動元件的模式斜視圖。 第6圖是其他實施形態的取貨裝置的模式側視圖。Fig. 2 is a schematic perspective view of the same object floating device. Fig. 3 (a) is a schematic side view showing the relationship between the vibration element and the vibration plate of the second embodiment, and (b) is a bottom view thereof. Fig. 4 is a schematic side view showing the relationship between a vibration element and a vibration plate in another embodiment. Fig. 5 (a) is a partial model side view of an object floating device according to another embodiment, and (b) is a schematic perspective view of a vibration element. Fig. 6 is a schematic side view of a pickup device according to another embodiment.
第7圖是顯示其他實施形態的板狀構件保管裝置的部 分模式斜視圖。 【符號說明】 W:振動波 Wn:波節 11：物體漂浮裝置 1 2 :底板 1 3 :振動板 1 4、1 8 :振動元件 -16 - 1235730 1 5 :板狀構件 1 6 a、1 6 b :配線 17' 21:振 Μ 器 1 9 :匹配電路 20:磁致伸縮元件 2 0 a :線圏 22:取貨裝置 2 3 :支持部 23a 、 23b:臂 24:移動手段 25:振盪器 -17Fig. 7 is a partial perspective view showing a plate-like member storage device according to another embodiment. [Description of symbols] W: Vibration wave Wn: Node 11: Object floating device 1 2: Base plate 1 3: Vibration plate 1 4, 1 8: Vibration element -16-1235730 1 5: Plate-like member 1 6 a, 1 6 b: Wiring 17 '21: Vibrator 19: Matching circuit 20: Magnetostrictive element 2 0a: Wire coil 22: Pick-up device 2 3: Supporting section 23a, 23b: Arm 24: Moving means 25: Oscillator -17