1299722 - 九、發明說明： 【發明所屬之技術領域】 本發明係有關於利用音波之放射壓令物體維持在漂浮 狀態，或是在漂浮狀態下進行搬運之音波漂浮裝置。 【先前技術】 爲了防止對玻璃面板（玻璃基板）、半導體晶圓等薄且容 易損傷之片狀元件造成污染或是損傷，利用在漂浮狀態下進 行搬運之方式受到考慮。作爲令物體漂浮在空中之物體漂浮 ® 裝置（音波漂浮裝置），提出有利用音波之放射壓之裝置。 又，在令物犛於漂浮在空中之狀態下進行搬運之際，爲了防 止漂浮之物體由搬運之路線脫離，亦提出有利用由振動片所 . 放射之音波之反射之裝置（例如，可參照專利文獻1)。 在日本專利特開平7 - 1 37 822號公報所提出之裝置中， '如第8圖所示般，藉由經角狀元件5 1激振之振動片5 2所放 射出之音波之放射壓，令物體5 3在由振動片5 2漂浮起之狀 態下沿著振動片5 2向與紙面垂直之方向搬運。又，沿著物 m 體53之搬運路線兩側設置有片狀之音波反射元件54 ^音波 反射元件54具備：在振動片52下方，於振動片52之寬度 方向傾斜地延伸之部分5 4 a;以及在振動片5 2之寬度方向外 側成彎曲且較振動板5 2更向上延伸之部分5 4 b。然後，由振 動片5 2放射到音波反射元件5 4之音波的一部分係藉由音波 , 反射元件5 4的兩部分5 4 a、5 4 b反射，在振動片5 2之兩側 形成朝向振動片52之上方之狀態。利用此音波防止物體53 由搬運路線脫離。 1299722 [專利文獻1]日本專利特開平7- 1 37 8 22號公報，說明書 之段落[0013]〜[0017]，[0030]，第 2、3 圖） 【發明內容】 在習知之音波漂浮裝置中，藉由從振動片之與應漂浮物 體相對向側之面所放射之音波之放射壓令物件漂浮，而從振 動片之與物體相對向側之相反側之面所放射之音波，並未利 用於物體之漂浮。因此，爲了使物體漂浮而令振動片產生激 振之能量，有一半並未利用於音波漂浮。 # 在日本專利特開平7- 1 37822號公報中所記載之音波漂 浮裝置中，雖然有利用振動片5 2之與物體5 3相對向側之相 反側之面所放射之音波，該項利用乃是爲了防止物體53由 _ 搬運路線脫離而加以利用，並非是利用於令物體5 3漂浮者。 β 又，在日本專利特開平7- 1 37 822號公報中所記載之音波漂 < 浮裝置中，音波反射元件54之上端必須延伸到較振動片52 之上面更爲上方。因此，物體之寬度無法比一對音波反射元 件5 4之上端之間隔更爲寬廣。 ^ 近幾年來，液晶或是PDP(電漿顯示器）等之玻璃基板趨 向大型化，亦有1 500x 1 800mm以上之基板大小之物件。在 前述大型基板之場合時，必需要增大（提高）令其漂浮之音波 之放射壓，因此，該部份令振動片產生振動之能量增大。其 結果，從振動片放射到與物體相反側之音波所產生的能量損 失亦增大。 本發明係有鑑於前述問題所而加以提出，其目的係提供 能夠將振動片之放射到與物體相反側之音波，有效地利用於 1299722 物體之漂浮，且能夠降低激振振動板以獲得同樣的漂浮力之 能量之音波漂浮裝置。 (解決問題之方法） 爲了達成前述目的，如申請專利範圍第1項之發明，乃 :是利用激振機構使振動片激振，藉由振動片所產生之音波之 放射壓令物體漂浮之音波漂浮裝置。又，具備有令由該振動 片放射到與前述物體相反側之音波反射之反射面之音波反 射元件，乃是設置在位於前述振動片之與前述物體相對側之 ® 相反側，助長前述振動片之振動。 在此發明中，藉由振動片之振動而從振動片放射出之音 波中，由振動片之與物體相對向側之面所放射之音波，係與 „ 習知之裝置同樣地令物體漂浮，又，由振動片之與物體相對 向側之相反側之面放射之音波，會由音波反射元件之反射面 ~ 加以反射。然後，藉由受到反射之音波，助長振動片之振動。 因此，由振動片之與物體相反側之面所放射出而以往並未有 助於振動片之激振之音波，能夠有效地使用於振動片之產生 ® 激振。其結果，能夠有效地將振動片放射到與物體相反側之 音波利用於物體之漂浮，可減少激振振動板以獲得相同之漂 浮力之能量。 申請專利範圍第2項所述之發明，係於申請專利範圍第 1項所記載之發明中，前述音波反射元件係該反射面具有較 前述振動片之端部更向外側突出之部分。在此所謂的「較前 述振動片之端部更向外側突出之部分」乃是指在振動片投影 於反射面之際，較該投影面更爲外側之部分。例如，若是在 1299722 寬度方向的話其寬度較振動片之寬度更爲寬，若是在長度方 向的話’其長度較振動片更爲長。 在此發明中，振動片放射到與物體相反側之音波，例如 會在振動片之寬度方向上所有區域中由音波反射元件反射 而反射到振動片端。因此，在與具有較振動片之寬度更爲狹 窄之寬度之場合比較之下，更能夠將振動片放射到與物體相 反側之音波有效地利用於物體之漂浮。 申請專利範圍第3項所述之發明，係於申請專利範圍第 ^ 1項或第2項所記載之發明中，前述音波反射元件係該射面 中至少相對向於前述振動片之面爲平面，與該振動片之與該 反射面相對之面之距離L係設定爲由前述振動片所產生之 • 音波波長λ之N/2倍（N爲自然數），並且前述兩面係互相平 _ 行。在此發明中，藉由以反射面所反射之音波，振動片容易 > 產生共振，反射波的能量能夠效率良好地使用於令振動片產 生振動上。 申請專利範圍第4項所述之發明，係於申請專利範圍第 ^ 1項或第2項所記載之發明中，前述音波反射元件係該反射 面中至少相對於前述振動片之面爲平面，與該振動片之與該 反射面相對之面之距離設爲L，且由前述振動片所產生之音 波波長設爲λ時，成立L << λ之關係，並且前述兩面係互 相平行。在此，所謂的「成立L << λ之關係」，乃是意味 例如在距離L爲波長λ之1 /1 〇程度，振動片之振動數爲 2 0kHz之場合時，爲1mm以下。本發明中，與距離L較波 長λ之1 / 2爲大之場合比較之下，由反射面加以反射之音波 1299722 作用於振動片時之能量會增大。 申sra專利範圍第5項所述之發明，係於申請專利範圍第 1項至第4項所載之任何一項發明中，前述音波反射元件 係前述反射面與_述振動片平行地設置。本發明中，與反射 面對於振動片以傾斜狀態加以設置之場合比較之下，能夠有 效地助長振動片之振動。 申請專利範圍第6項所述之發明，係於申請專利範圍第 1項至第4項所記載之任何一項發明中，前述音波反射元件 ^ 係該反射面中至少對應於前述振動片端部之部分，與前述振 動片之距離形成愈靠近外側愈大。在本發明中，由振動片朝 向反射面所放射之音波，會朝向較振動片之端部更爲外側之 . 位置前進般效率良好地反射。其結果，使端部比振動部片突 出之物體漂浮之際，即使物體彎曲亦能夠防止物體接觸振動 、 片。 申請專利範圍第7項所述之發明，係利用激振機構使振 動片振動，藉由振動片所產生之音波之放射壓令從該振動片 m — 突出的物體漂浮之音波漂浮裝置，在前述物體之突出在該振 動片之至少外側之部分，將具備有令前述音波反射之反射面 之音波反射元件，設成位於前述振動片之與前述物體相對向 ) 側之相反側，助長前述物體之漂浮。藉由振動片所放射之音 波令物體漂浮之場合時，當物體具有較振動片更爲突出之大 小時（例如寬度較寬之場合時）’存在有物體彎曲時其突出部 分附近會接觸到振動片之顧慮。但是在本發明中’對於漂浮 之物體之突出於振動片外側之部分’以反射面所反射之音波 -10- 1299722 4 之力量有效地產生作用，能防止物體接觸到振動片。 (發明之效果） 由本發明來看，能夠將放射到振動片之與物體相反側之 音波有效地利用於物體之漂浮，而能夠減少激振振動板以獲 得相同之漂浮力之能量。 【實施方法】 (第1實施形態） 以下，將根據第1圖及第2圖說明將本發明於音波漂浮 ® 搬運裝置具體化之第1實施形態。第1(a)圖係物體漂浮搬運 裝置之模型斜視圖，第1(b)圖係物體漂浮搬運裝置之模型側 視圖，第2圖係說明作用之模型圖。 • 如第1(a)、1(b)圖所示般，作爲音波漂浮裝置之物體漂 ^ 浮搬運裝置η，係具備有振動片1 2。振動片1 2形成爲矩形 κ 平板狀’同時其寬度乃是較應搬運之物體1 3更爲寬地形成。 振動片12對支撐片14(僅顯示於第1(b)圖）係由一組角狀元 件15以及振動元件16支撐。又，支撐片14係由未圖示之 鲁支柱加以支撐。 角狀元件1 5係在連結振動片1 2之面的相反側之面，固 定於振動元件16。角狀元件15之前端面乃是形成在與振動 元件1 6之軸方向垂直相交之平面，角狀元件1 5以及振動元 件1 6之中心軸係以向垂直方向延伸之狀態設置。角狀元件 1 5在其前端藉由未圖示之螺絲而與振動片1 2之雨端相連 結。各角狀元件15係形成爲扁平之大致長方體狀，對於振 動片1 2在其長度方向之雨端部，以與長度方向垂直相交之 -11- 1299722 狀態安裝。又’在第1 (b)圖中，由於將角狀元件1 5加以簡 略化以便圖示，所以由振動片丨2之寬度方向（與紙面垂直之 方向）所觀察到之形狀係成爲長方形。 振動兀件1 6係用所謂的郎之萬（L a n g e v i η )振動元件，具 備有一對環狀之壓電（p i e ζ 〇 )元件1 7 a、1 7 b。在兩壓電元件 1 7 a、1 7 b間配置有環狀之電極片i 8，將抵接在與壓電元件 17a、17b之電極片18抵接側之相反側之面之金屬區塊19a、 1 9b ’係藉由未圖示之螺栓加以旋緊固定而構成振動元件 ® 1 6。螺栓係通過形成在金屬區塊1 9 a之未圖式之螺絲孔，由 金屬區塊1 9 b端加以旋合。兩金屬區塊1 9 a、1 9 b係經由螺 栓而形成互相導電之狀態。 ^ 如第1(b)圖所示般，金屬區塊19a之上端形成有凸緣 瓤 20(僅標示於第1(b)圖），金屬區塊19a係以嵌合於形成在支 、> 撐片14之孔位之狀態下藉由螺栓（未圖示）固定於支撐片14。 振動元件1 6係連接於振盪器2 1。電極片1 8係經由配線 22a連接於振盪器21，振盪器21之接地端子係經由配線22b ^ 連接於金屬區塊1 9b。由角狀元件1 5、振動元件1 6、振盪器 2 1構成令振動片1 2激振之激振機構。 物體漂浮搬運裝置Η係由振動片12產生駐波般地加以 構成，具備有給予漂浮狀態下之物體13推進力之推進力給 予機構。在本實施形態中作爲推進力給予機構，乃是設置對 於物體1 3由壓縮空氣之行進方向後方吹入之噴嘴23。噴嘴 23係設置有複數個，圖中僅標示一個。 在支撐片1 4上’音波反射元件24係位於振動片1 2之 -12- 1299722 與物體1 3相對向側相反側，經由托架2 5加以固定。音波反 射元件24係具備有反射面24a，振動片12產生激振時令由 振動片1 2放射到與物體丨3相反側之音波反射，助長振動片 1 2之振動。音波反射元件24具有振動片1 2之寬度以上之寬 f 度’在寬度方向將振動片1 2配置在位於音波反射元件24之 寬度內。 第2圖係由振動片12之長度方向所觀察之場合之振動 片1 2、物體1 3及音波反射元件24之位置關係之模型圖。音 ® 波反射元件24係反射面24a爲平面，反射面24a與振動片 12之相對向於該反射面24a之面12a之距離L，會被設定爲 由振動片12所產生之音波之波長λ之N/2倍（N爲自然數）。 、 音波反射元件24係反射面24a與振動片12平行地設置。也 就是說，音波反射元件24對於振動片1 2並未突出於物體13 ‘側（在本實施形態中係較振動片1 2更爲上側）。 接著，說明由前述般所構成之物體漂浮搬運裝置1 1之 作用。 ^ 藉由從未圖示之控制裝置所發出之命令信號驅動振盪 器2 1，振動元件1 6會以既定之共振頻率（例如2〇kHz前後） 激振。振動元件1 6激振時角狀元件1 5會垂直振動’經由角 狀元件1 5振動片1 2會激振而進行彎曲振動，產生駐波。藉 由從振動片1 2所放射之音波之放射壓，物體1 3會維持在由 振動片12之表面漂浮起之狀態。在該狀態下壓縮空氣由噴 嘴23噴射而賦予物體1 3推進力，物體1 3會在漂浮狀態下 由振動片1 2之一端搬運到另一端。藉由噴嘴2 3停止壓縮空 1299722 氣之噴射而停止搬運物體1 3 ’物體1 3在漂浮狀態下維持在 一定位置上。當振盪器2 1之驅動停止時，振動片1 2之振動 亦停止，物體1 3則是以承載於振動片1 2上之狀態停止下來。 藉由振動片1 2之振動而由振動片12所放射之音波中， 從振動片1 2之與物體1 3相對向側之面所放射之音波，乃是 與習知裝置同樣地令物體1 3漂浮。又，從振動片1 2之與物 體1 3相對向側之相反側之面1 2a所放射之音波，則是由音 波反射元件24之反射面24a加以反射。然後，藉由受到反 ® 射之音波，振動片1 2之振動受到助長。因此，由振動片i 2 之與物體1 3相反側之面所放射，以往未助長於振動片1 2之 激振之音波，能夠使用於振動片1 2之激振。 將反射面24a與振動片12之與該反射面24a相對向之 面1 2 a之距離L，設定爲由振動片1 2所產生之音波波長λ ' 之1 /2，進行實驗。其結果，物體1 3由振動片1 2之漂浮高 度，會是在未設有音波反射元件24之場合的大約1.2〜1.3 倍。此乃是物體漂浮搬運裝置1 1之漂浮效率，與音響功率 ^ 大約提升了 40〜70%之現象相同。 在本實施形態中具有以下之效果。 (1 )在藉由從以激振機構加以激振之振動片1 2所產生 之音波的放射壓而令物體13漂浮之物體漂浮搬運裝置11， 具備有令由振動片1 2放射到與物體1 3相反側之音波反射而 助長振動片12之振動的反射面24a之音波反射元件24，係 位於振動片1 2其與物體1 3相對向側之相反側地加以設置。 因此，放射到與物體1 3相反側，以往未助長於振動片1 2之 1299722 夠 物 浮 漂 寬 之 加 片 與 ：〇 面 離 (N 振 利 地 置 利 激振之音波，能夠利用於振動片1 2之激振，其結果，能 將振動片1 2.放射到與物體1 3相反側之音波有效地利用於 體1 3之漂浮，亦能夠減少激振振動板1 2以獲得相同之漂 力之能量。又，在附加有相同激振能量之場合時能夠增大 浮距離。 (2) 音波反射元件24具有振動片12之寬度以上之 度，在寬度方向將振動片1 2配置在位於音波反射元件24 寬度內。因此，振動片1 2放射到與物體1 3相反側之音波 9 係於振動片1 2之寬度方向之全部區域以音波反射元件24 以反射而反射到振動片1 2側。其結果，在與具有較振動 1 2之寬度更窄之寬度之場合比較之下，振動片12放射到 物體1 3相反側之音波，能夠有效地利用於物體1 3之漂浮 (3) 音波反射元件24中，反射面24a爲平面，反射 • 24a與振動片12之相對向於該反射面24a之面12a之距 L，被設定爲由振動片12所產生之音波之波長λ之N/2倍 爲自然數）。因此，藉由利用反射面24a所反射之音波， ® 動片1 2會變得容易共振，反射波之能量能夠效率良好地 用在令振動片12之振動。 (4) 音波反射元件24係反射面24a與振動片12平行 設置。因此，與反射面24a對於振動片1 2以傾斜狀態配 之場合比較之下，能夠有效地助長振動片1 2之振動。 (5) 振動片1 2係藉由複數個振動元件1 6激振’與僅 用一個振動元件1 6激振之場合比較之下，其產生振動之效 果可增高。 1299722 (6)由於音波反射元件24係幾乎遍佈振動片12之全長 地設置，振動片1 2對於物體1 3之搬運造成障礙程度之彎 曲，能夠利用反射面24 a所反射之音波的作用加以抑制。 (第2實施形態） 接著，根據第3圖說明第2實施形態。在本實施形態中， 音波反射元件24的構成與前述第1實施形態不同之外，其 他基本構成相同。關於與前述實施形態相同之部分附加上相 同符號省略其詳細說明，僅針對不同之部分加以說明。第3 ® 圖係說明振動片1 2、物體1 3以及音波反射元件24之關係之 模型圖。 本實施形態之物體漂浮搬運裝置1 1乃是適於搬運寬度 較振動片1 2之寬度更寬的物體1 3之裝置。如第3圖所示般， 、 音波反射元件24乃是在寬度方向之中央處形成折曲形狀， '寬度方向之中央係以與振動片1 2之寬度方向之中央相對向 之狀態配置於振動片1 2之下方。音波反射元件24係對稱地 形成同時具備有對於振動片1 2之與物體1 3相對向側之相反 β 側之面1 2 a之傾斜方向成爲相反之兩個反射面2 4 b、2 4 c。各 反射面24b、2 4c在寬度方向與振動片12之距離，係形成愈 靠近寬度方向之外側愈大。 在本實施形態之物體漂浮搬運裝置1 1中，由振動片1 2 放射到垂直下方之音波，並非朝向振動片1 2於垂直方向前 進般地以反射面24b、24c反射在振動片12之寬度方向朝向 直方向前進般並非是，而是在振動片1 2之寬度方向朝向外 側前進般地反射。因此’由靠近振動片1 2之寬度方向之端 1299722 部部分朝向音波反射元件2 4放射之音波，在由反射面2 4 b、 2 4 c反射之後’如第3圖所示般，通過比振動片1 2之端部更 爲外側部分令物體1 3漂浮般地反射。 在應搬運之物體1 3之寬度變寬之場合時，配合其寬度 而將振動片1 2之寬度加寬時，令振動片丨2激振之所須能量 會變大。振動片1 2之寬度變窄時，由振動片i 2朝向物體i 3 放射之音波不會平均地作用於物體1 3全體，在物體1 3之端 部不會產生作用。其結果，如第3圖之鍊線所示般，存在有 物體13其寬度方向之兩端位於較振動片12更爲下方般形成 彎曲狀態之場合。在本實施形態中，即使物體1 3在寬度方 向形成彎曲，仍於與振動片1 2之寬度方向之靠近端部部分 相對應之外，藉由反射面24b、24c反射之音波的作用，防 止物體1 3與振動片1 2接觸。 在本實施形態中，可獲得與前述第1實施形態之（1 )、 (2 )、（ 5 )、（ 6 )相同效果之外，亦可獲得以下之效果。 (7)音波反射元件24之反射面24b、24c與振動片12 之距離’係形成愈靠近寬度方向之外側會變得愈大。因此， 由振動片12朝向反射面24b、24c放射之音波之一部分，會 朝向比振動片1 2之寬度方向之端部更爲外側之位置前進般 效率良好地加以反射。其結果，在令較振動片1 2寬度更寬 之物體1 3漂浮之際，即使物體丨3彎曲亦能夠防止物體i 3 接觸振動片1 2其寬度方向之端部。 (8 )振動片1 2係在寬度方向之中央折曲形成對稱。因 此’在由反射面2#、24c反射之音波中，朝向振動片]2其 1299722 寬度方向之外側前進之音波其令物體1 3漂浮之力亦 稱，能夠令物體1 3安定漂浮。 (第3實施形態） 接著，將根據第4圖說明第3實施形態。本實施 主要是以音波反射元件24之反射面所反射之音波主 接作用於物體1 3而助長物體1 3之漂浮，並不怎麼有 動片12之激振，在該點上，與前述第1及第2實施 不相同。然後，音波反射元件24之構成係與前述兩 • 態不同，其他之基本構成則是相同。與前述實施形態 分附加上相同符號省略其詳細說明，僅針對不同之部 說明。第4圖係說明振動片1 2、物體1 3以及音波反 24之關係之模型圖。 . 如第4圖所示般，獨立之音波反射元件24，分別 與振動片1 2其寬度方向之端部相對應之位置上。兩 射元件24其反射面24b、24c對於振動片12之與物| 對向側之相反側之面1 2 a之傾斜方向係成爲相反，並 ^ 通過振動片12之中心與寬度方向垂直相交之平面對 置。 在本實施形態之物體漂浮搬運裝置11中，由於 射元件24僅設置於與振動片1 2其寬度方向之兩端部 位置，所以由振動片12之靠近寬度方向中央附近之 放射之音波不會助長於振動片1 2之振動。由振動片 垂直下方所放射之音波之一部分，在由反射面24b、 以反射之後，如第4圖所示般，會通過比振動片i 2 成爲對 形態， 要爲直 助於振 形態大 實施形 相同部 分加以 射元件 設置於 音波反 I 1 3相 且對於 稱地配 音波反 對應之 部分所 1 2朝向 24c加 之端部 18- 1299722 • 更爲外側而令物體1 3漂浮般地反射。然後，與前述第2實 施形態同樣地，物體1 3即使在寬度方向彎曲，對應於振動 片12之靠近寬度方向端部之部分之處會因反射面24b、24c 所反射之音波的作用，防止物體1 3與振動片1 2之接觸。在 本實施形態中，可獲得前述第1實施形態之（5)與第2實施 形態之（7 )相同效果。 (第4實施形態） 接著，根據第5圖說明第4實施形態。在本實施形態中， φ 物體漂浮搬運裝置1 1係由滾輪輸送裝置26以及音波漂浮單 元27所構成，雖然物體13係藉由音波漂浮單元27所產生 之音波之作用而漂浮，但是令物體13移動（搬運）之力量（推 進力）是由滾輪輸送裝置26所供給之點上與前述實施形態大 ^ 不相同。與前述實施形態相同部分附加上相同符號省略其說 - 明，僅針對不同之部分加以說明。 / 由支柱28所支撐之支撐片14具備有一對之側壁14a。 兩側壁1 4a之間複數根迴轉軸29以既定間隔互相平行地支 ® 撐。旋轉軸29之兩端、側壁14a之內側處，一體旋轉地固 定有滾輪30，藉由音波漂浮單元27之作用以漂浮狀態與中 央之彎曲受到抑制之狀態下之物體1 3之兩端部相嵌合，令 物體13移動。滾輪30係具有段差部30a，利用段差部30a 與物體1 3之端部相接觸形成限制物體1 3其對寬度方向之移 動。 旋轉軸2 9之一端固定有能夠一體旋轉之輪3 1。各旋轉 軸29乃是經由套於各滑輪3 1以及由馬達32加以驅動之驅 -19- 1299722 動滑輪3 3之間之傳動帶34藉由馬達3 2向一定方向驅動。 支撐片1 4之寬度方向中央處，在旋轉軸2 9之上方朝向 與旋轉軸29垂直相交之方向延伸般設置有振動片12。振動 片1 2係形成較物體1 3之寬度更爲窄之矩行平板狀，物體1 3 能夠維持漂浮於其中央部。振動片1 2之下方處，與第1實 施形態同樣地，設置有音波反射元件24。 在本實施形態中，藉由從振動片1 2所放射之音波之放 射壓，物體1 3之中央部會從振動片1 2之表面漂浮起，但是， ^ 物體13之兩端部仍是維持與滾輪30之段差部30a相接觸之 狀態。然後，藉由滾輪30之旋轉施予物體1 3推力，物體1 3 會沿著側壁14a受到搬運。 又，作爲物體1 3，例如在適用於薄玻璃片（厚度1 mm以 _ 下）之搬運之場合時，由於物體13之端部係在隨時與滾輪30 相接觸之狀態下，雖然存在有污染或是損傷之可能性，但玻 璃板之端部在最後會成爲產品所不要之部分所以不會產生 阻礙。 β 在本實施形感中’能夠獲得第1實施形態之（1)〜（6 )同 樣之效果之外’亦可獲得以下之效果。 (9)物體漂浮搬運裝置11具備有將物體13支撐其寬度 方向之兩端部而搬運之滾輪輸送裝置26(搬運機構），以及對 以搬運機構加以支撐之物體1 3施予漂浮力之音波漂浮裝置 27。因此，物體1 3在其寬度方向兩端隨時與滾輪30接觸之 狀態下，所以，即使物體1 3在寬度較寬之場合時，亦能夠 在安定之狀態下進行搬運。 -20 - 1299722 本發明之實施形態並未限定於前述各項，例如亦可是以 之構成。 〇如第6圖所示般，當音波反射元件2 4之反射面2 4 a 與振動片12之與該反射面24a相對向之面12a之距離爲L， 由振動片1 2所發出之音波之波長爲λ時，成立l << λ之 關係般設置音波反射元件24。在此，所謂的「成立L << λ 之關係」乃是意謂著，例如，距離L未達波長λ之1 /1 〇， 振動片12之振動頻率爲20kHz之場合爲lmm以下。在此場 合中，與距離L較波長λ之1/2爲大之場合比較之下，以 反射面2 4 a所反射之音波其作用於振動片1 2時之能量會變 大。 〇物體漂浮搬運裝置11亦可設置複數振動片1 2。例 如’如第7圖所示般，平行地設置兩個振動片1 2，各振動片 1 2之下方處設置有音波反射元件2 4。音波反射元件2 4係具 備有與振動片之面1 2 a平行之反射面2 4 a，以及對於振動片 12之面12a爲傾斜之反射面24b、24c。反射面24a與面12a 之距離L，係設定爲由振動片12所產生之音波之波長λ之 Ν/2倍（Ν爲自然數）。在此場合中，藉由從反射面24a所反射 之音波，能夠有效地助長振動片1 2之振動。又，由反射面 2 4b、24c所反射之音波會直接助長於物體丨3之漂浮，能夠 防止物體1 3接觸到振動片1 2。 〇音波反射元件24之形狀與配置位置並未限制於前述 各實施形態’只要是具備有令由振動片1 2放射到與物體13 相反側之音波’可助長振動片1 2之振動般受到反射之反射 -21- 1299722 面24a、24b、24c即可。例如，即使在振動片1 2之與物體 1 3相反側之面1 2 a和反射面2 4 a互相平行之場合中，雨面間 之距離L，並不限制於由振動片1 2所產生之音波之波長；I 之N/2倍（N爲自然數）。前述距離L只要是由反射面24a所 ;:反射之音波，以及朝向反射面24a之音波會互相干涉抵銷般 之距離以外即可。又，反射面2 4 a、2 4 b、2 4 c並未限制於平 面亦可以是曲面。 〇振動片1 2之形狀並不限制於長方形。可以是正方形 • 亦可以是圓形或是多角形。在此場合中，以將音波反射元件 之形狀與振動片之形狀作互相配合爲佳。 〇音波反射元件24之反射面具有較振動片12之端部更 爲突出到外側之部分之形狀，並未限定於較寬度方向之端部 ^ 更爲突出到外側之形狀，亦可以是具有較振動片1 2之長度 方向之端部更爲突出到外側之部分之形狀。 Ο音波反射元件24並不一定要是板狀，亦可以是區塊 狀。 ® 〇亦可以利用擔任其他功能用之元件之一部分作爲反 射面而作爲音波反射元件，取代專用之音波反射元件24。例 如，將支撐片1 4之上面作爲反射面使用之構成亦可。又， 並非是將角狀元件1 5以及振動元件1 6支撐在支撐片丨4上 之構成，而支撐於托架之構成時，亦可使用設置於振動片1 2 之下方之盲板（b H nd pi ate)或是組裝物體漂浮搬運裝置11之 際防止螺絲等落下用之板材作爲音波反射元件。 〇即使是助長振動片1 2之振動之音波反射元件24，其 -22 - 1299722 寬度沒有必要將從振動片1 2之與物體1 3相對向側之相反側 之面1 2a所放射出之音波完全反射到振動片1 2。例如，設置 較振動片1 2寬度更爲窄之物件作爲音波反射元件24，或是 將複數個音波反射元件24以隔有間隙之狀態設置亦可。又， 亦可以與振動片1 2長度方向互相交叉般設置複數個音波反 射元件24。 〇在第1與第4實施形態中，亦可將音波反射元件2 4 可作高度調整般地加以設置。在此場合中，較容易將反射面 ^ 24a’以及振動片12之與該反射面24a相對向之面12a之距 離L，設定成由振動片1 2所產生之音波之波長λ之N/2倍 (Ν爲自然數）。 〇在由振動片1 2產生駐波之構成中，亦可以僅有一方 . 之角狀元件1 5與振動元件1 6連結，另一方之角狀元件1 5 不受到振動元件1 6激振之構成，或是將振動片1 2之中央連 接於角狀元件1 5而利用振動元件1 6激振之構成亦可。 〇亦可以應用於將由振動片1 2產生駐波之構成之音波 ® 漂浮裝置（音波漂浮單元27)裝載於臺車，利用由振動片12 放射的駐波令物體1 3維持在漂浮狀態的同時，藉由台車之 移動搬運到目的地之搬運裝置。 〇亦可以令振動片12產生行進波使物體13在漂浮狀態 下進行搬運之構成。例如，取代將一方振動元件1 6與振盪 器21相連接，而連接在負荷電路。在此構成中’藉由構成 連接於負荷電路之振動元件16之壓電元件17a、17b將身爲 機械能量之振動能量轉換爲電氣能量，藉由該電氣能量會因 -23 - 1299722 負載電路之電阻而變成焦耳熱散放出去之方式’振動片1 2 所產生之振動之波會變成向單一方向前進之行進波。 〇亦可以是可切換成令振動片1 2產生行進波之狀態’ 和產生駐波之狀態之構成。 〇角狀元件1 5之形狀並不限定於扁平之長方體，亦可 以是圓柱狀或是梯形圓錐等之前端變細之形狀。 Ο維持漂浮之物體1 3之形狀並未限定於四角形，亦可 以是三角形、其他多角形或是圓形等任意之形狀。 • 〇振動片1 2對於角狀元件1 5之固定並未限定於利用螺 絲進行連結，亦可以使用黏合劑、以硬銲或是熔接加以固定。 〇振動元件1 6並不限定於郎之萬型振動元件，亦可使 用其他振動元件。 」 〇音波漂浮裝置並未限制於將物體1 3以水平狀態維持 • 漂浮之構成，亦可以是在將片狀之物體13之下端以滾輪等 之支撐元件加以支撐之狀態傾斜地加以維持之構成。在此場 合中，由於下端受到支撐元件加以支撐，雖然不是相當嚴密 ® 之漂浮狀態，但物體對於振動片而言仍是維持在漂浮狀態 下。 以下之技術性思考（發明）能夠從前述實施形態加以掌 握。 (1 )申請專利範圍第1項到第7項中任何一項所記載之 發明中，該振動片係產生行進波般地激振。 (2)申請專利範圍第1項到第7項中任何一項所記載之 發明中’音波漂浮裝置係由該振動片產生駐波般地構成，具 -24- 1299722 備有施予漂浮狀態下之物體推力之推力施予機構。 (3) 申請專利範圍第1項到第7項以及前述技術性思考 (1)、（2)之任何一項所記載之發明中，該振動片係以複數個 平行地設置，該音波反射元件則是設置於每一振動片處。 (4) 作爲前述之音波漂浮裝置，乃是具備將物體以支撐 其左右兩端部朝向其搬運方向進行搬運之搬運機構，以及對 受到該搬運機構支撐之物體施予漂浮力抑制其彎曲之音波 漂浮裝置，即是爲具備有申請專利範圍第1項到第7項中任 • 何一項所記載之發明之音波漂浮裝置之物體搬運裝置。 【圖式簡單說明】 第1 (a)圖係第1實施形態之物體漂浮搬運裝置之模型斜 視圖。 、 第1 (b)圖係第1實施形態之物體漂浮搬運裝置之模型側 視圖。 第2圖係說明作用之模型圖。 第3圖係說明第2實施形態之物體、振動片、音波反射 ^ 元件之關係之模型圖。 第4圖係說明第3實施形態之物體、振動片、音波反射 元件之關係之模型圖。 第5圖係第4實施形態之物體漂浮搬運裝置之模型斜視 圖。 第6圖係另一實施形態之物體、振動片、音波反射元件 之關係之模型圖。 第7圖係另一實施形態之物體、振動片、音波反射元件 -25 - 1299722 之關係之模型圖。 第8圖係習知技術之模型圖。 【元件符號說明】 L…距離 1 1 ...作爲音波漂浮裝置之物體漂浮搬運裝置 1 2…振動片 1 2a…面 1 3…物體 • 1 5 ...構成振動機構之角狀元件 16...構成振動機構之振動元件 2 1...構成振動機構之振盪器 2 4 ...音波反射元件 , 24a、24b、24c…反射面BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sound wave floating device that uses an acoustic wave to maintain an object in a floating state or to carry it in a floating state. [Prior Art] In order to prevent contamination or damage to a thin and easily damaged sheet member such as a glass panel (glass substrate) or a semiconductor wafer, a method of carrying it in a floating state is considered. As an object floating device (sound wave floating device) that floats an object in the air, a device that uses the radiation pressure of the sound wave is proposed. In addition, when the object is transported in a state of being floated in the air, in order to prevent the floating object from being detached from the transport path, a device that uses the reflection of the sound wave radiated by the vibrating piece is also proposed (for example, reference is made. Patent Document 1). In the apparatus proposed in Japanese Laid-Open Patent Publication No. Hei 7-37 822, the radiation pressure of the sound wave radiated by the vibrating piece 52 excited by the horn element 51 is as shown in Fig. 8. The object 5 3 is transported along the vibrating piece 52 in a direction perpendicular to the paper surface in a state where the vibrating piece 52 is floated. Further, a sheet-shaped sound wave reflection element 54 is provided along both sides of the conveyance path of the object m body 53. The sound wave reflection element 54 includes a portion 5 4 a extending obliquely in the width direction of the vibration piece 52 under the vibration piece 52; And a portion 5 4 b which is curved outward in the width direction of the vibrating piece 52 and extends upward from the vibrating plate 52. Then, a part of the sound wave radiated from the vibrating piece 52 to the acoustic wave reflecting element 54 is reflected by the sound waves, the two portions 5 4 a, 5 4 b of the reflecting element 5 4 , and the vibration is formed on both sides of the vibrating piece 52 The state above the sheet 52. With this sound wave, the object 53 is prevented from being detached from the conveyance path. [Patent Document 1] Japanese Patent Laid-Open No. Hei 7- 1 37 8 22, the paragraphs of the specification [0013] to [0017], [0030], 2, 3, and FIG. 3] [Summary of the Invention] In the case where the object is floated by the radiation of the sound wave radiated from the surface of the vibrating piece opposite to the object to be floated, the sound wave radiated from the opposite side of the vibrating piece opposite to the object is not Used for floating objects. Therefore, half of the energy that causes the vibrating piece to oscillate in order to float the object is not utilized for the sound wave to float. In the acoustic wave flotation device described in Japanese Laid-Open Patent Publication No. Hei 7-37782, the sound wave radiated from the surface opposite to the side opposite to the object 53 by the vibrating piece 5 2 is used. This is to prevent the object 53 from being detached from the transport path, and is not used to make the object 533 float. The sound wave drift described in Japanese Patent Laid-Open Publication No. Hei 7-37778 < In the float device, the upper end of the acoustic wave reflecting element 54 must extend above the upper surface of the vibrating piece 52. Therefore, the width of the object cannot be wider than the interval between the upper ends of the pair of acoustic reflection elements 54. ^ In recent years, glass substrates such as liquid crystals or PDPs (plasma displays) have become larger, and there are also substrate sizes of 1,500 x 1 800 mm or more. In the case of the above-mentioned large-sized substrate, it is necessary to increase (enhance) the radiation pressure of the sound wave which floats, and therefore, this portion increases the energy of vibration of the vibrating piece. As a result, the energy loss caused by the sound wave radiated from the vibrating piece to the side opposite to the object also increases. The present invention has been made in view of the above problems, and an object thereof is to provide an acoustic wave capable of radiating a vibrating piece to the opposite side of an object, effectively utilizing the floating of the 1299722 object, and reducing the excitation vibration plate to obtain the same Sound wave floating device for the energy of floating force. (Means for Solving the Problem) In order to achieve the above object, the invention according to the first aspect of the patent application is that the vibration plate is excited by the excitation mechanism, and the sound wave floating by the sound wave generated by the vibration piece causes the object to float. Floating device. Further, the sound wave reflection element having the reflection surface for radiating the sound wave reflected from the vibration piece to the opposite side of the object is provided on the side opposite to the side of the vibration piece opposite to the object, and the vibration piece is encouraged. Vibration. In the present invention, the sound waves radiated from the vibrating piece by the vibration of the vibrating piece are radiated by the surface of the vibrating piece opposite to the object, and the object floats in the same manner as the conventional device. The sound wave radiated by the surface of the vibrating piece opposite to the opposite side of the object is reflected by the reflecting surface of the acoustic wave reflecting element. Then, by the reflected sound wave, the vibration of the vibrating piece is promoted. The sound wave radiated from the surface opposite to the object and which does not contribute to the vibration of the vibrating piece can be effectively used for the generation of the vibrating piece. As a result, the vibrating piece can be efficiently radiated to the surface. The sound wave on the opposite side of the object is used for the floating of the object, and the excitation vibration plate can be reduced to obtain the same floating force energy. The invention described in claim 2 is the invention described in the first item of the patent application. In the above-described acoustic wave reflecting element, the reflecting surface has a portion that protrudes outward from the end portion of the vibrating piece. The so-called "more protruding outward than the end portion of the vibrating piece" The portion "refers to the vibrating plate but projected on the occasion of the reflection surface, the projection portion is more than the outside. For example, if it is in the width direction of 1299722, its width is wider than the width of the vibrating piece, and if it is in the length direction, its length is longer than that of the vibrating piece. In the invention, the vibrating piece is radiated to the side opposite to the object, for example, reflected by the acoustic wave reflecting element and reflected to the end of the vibrating piece in all areas in the width direction of the vibrating piece. Therefore, in comparison with the case where the width is narrower than the width of the vibrating piece, the sound wave radiated to the opposite side of the object can be effectively utilized for the floating of the object. The invention according to claim 3, wherein the sound wave reflection element is at least a plane facing the vibrating piece in the plane of the incident surface. The distance L from the surface of the vibrating piece facing the reflecting surface is set to N/2 times (N is a natural number) of the acoustic wave wavelength λ generated by the vibrating piece, and the two sides are flattened with each other. . In the present invention, the vibrating piece is easily resonated by the sound wave reflected by the reflecting surface, and the energy of the reflected wave can be efficiently used to cause the vibrating piece to generate vibration. The invention according to claim 4, wherein the acoustic reflection element is at least planar with respect to a surface of the vibrating piece. When the distance from the surface of the vibrating piece facing the reflecting surface is L, and the wavelength of the acoustic wave generated by the vibrating piece is λ, L is established. << λ relationship, and the foregoing two faces are parallel to each other. Here, the so-called "establishment L <<The relationship of λ means that, for example, when the distance L is 1 / 1 of the wavelength λ and the vibration number of the vibrating piece is 20 kHz, it is 1 mm or less. In the present invention, when the distance L is larger than 1 / 2 of the wavelength λ, the energy of the sound wave 1299722 reflected by the reflecting surface acts on the vibrating piece. The invention of claim 5, wherein the acoustic reflection element is disposed in parallel with the vibrating piece as described above in any one of the inventions of claim 1 to 4. In the present invention, the vibration of the vibrating piece can be effectively promoted in comparison with the case where the reflecting surface is provided in an inclined state with respect to the vibrating piece. The invention of any one of claims 1 to 4, wherein the acoustic reflection element is at least corresponding to the end of the vibrating piece. In part, the distance from the aforementioned vibrating piece is formed closer to the outside. In the present invention, the sound wave radiated from the vibrating piece toward the reflecting surface is more outwardly directed toward the end portion of the vibrating piece. The position is reflected as efficiently as the position advances. As a result, when the end portion floats than the object protruding from the vibrating portion piece, the object can be prevented from coming into contact with the vibration or the sheet even if the object is bent. According to the invention of claim 7, the vibrating piece is vibrated by the excitation mechanism, and the sound wave floating device that floats from the vibrating piece m by the radiated sound of the sound wave generated by the vibrating piece is in the foregoing a portion of the vibrating piece protruding from at least the outer side of the vibrating piece, and a sound wave reflecting element having a reflecting surface for reflecting the sound wave, located on a side opposite to the side of the vibrating piece facing the object, and promoting the object float. When the object is floated by the sound wave radiated by the vibrating piece, when the object has a larger protruding size than the vibrating piece (for example, when the width is wide), there is a vibration near the protruding portion when the object is bent. The worry of the film. However, in the present invention, the portion of the floating object that protrudes outside the vibrating piece is effectively acted upon by the force of the sound wave -10- 1299722 4 reflected by the reflecting surface, and the object can be prevented from coming into contact with the vibrating piece. (Effect of the Invention) According to the present invention, the sound waves radiated to the opposite side of the vibrating piece from the object can be effectively utilized for the floating of the object, and the energy for exciting the vibrating plate to obtain the same buoyant force can be reduced. [Embodiment] (First embodiment) Hereinafter, a first embodiment in which the present invention is embodied in a sound wave floating ® transport device will be described based on Fig. 1 and Fig. 2 . Fig. 1(a) is a perspective view of the model of the object floating transport device, Fig. 1(b) is a model side view of the object floating transport device, and Fig. 2 is a model diagram illustrating the action. • As shown in Figures 1(a) and 1(b), the object floating transport device η as a sound wave floating device is provided with a vibrating piece 12 . The vibrating piece 1 2 is formed in a rectangular κ flat plate shape ′ while its width is formed wider than the object 13 to be transported. The pair of supporting pieces 14 (shown only in Fig. 1(b)) of the vibrating piece 12 are supported by a pair of angular members 15 and a vibrating member 16. Further, the support piece 14 is supported by a struts not shown. The horn element 15 is fixed to the vibrating element 16 on the surface opposite to the surface on which the vibrating piece 1 2 is connected. The front end surface of the horn element 15 is formed on a plane perpendicular to the axial direction of the vibrating element 16, and the central axis of the horn element 15 and the vibrating element 16 is provided in a state of extending in the vertical direction. The horn element 15 is connected to the rain end of the vibrating piece 12 at its front end by a screw (not shown). Each of the horn elements 15 is formed in a flat substantially rectangular parallelepiped shape, and is attached to the rain end portion of the vibrating piece 12 in the longitudinal direction thereof in a state of -11 to 1299722 which is perpendicularly intersected with the longitudinal direction. Further, in the first (b) diagram, since the horn element 15 is simplified for illustration, the shape observed by the vibrating piece 丨2 in the width direction (the direction perpendicular to the paper surface) is a rectangle. The vibrating element 16 is a so-called Langevin (L a n g e v i η ) vibrating element, and has a pair of annular piezoelectric (p i e ζ 〇 ) elements 17a, 17b. Between the two piezoelectric elements 1 7 a and 1 7 b, a ring-shaped electrode sheet i 8 is placed in contact with a metal block on the opposite side of the side opposite to the electrode sheet 18 of the piezoelectric elements 17a and 17b. 19a and 1 9b ' are screwed and fixed by bolts (not shown) to constitute the vibrating element ® 16 . The bolts are screwed by the metal block 1 9 b end through a screw hole formed in the metal block 19 a. The two metal blocks 1 9 a, 1 9 b are in a mutually conductive state via the bolts. ^ As shown in Fig. 1(b), the upper end of the metal block 19a is formed with a flange 20 (only shown in Fig. 1(b)), and the metal block 19a is fitted to be formed in the branch, > The support piece 14 is fixed by a bolt (not shown) in the state of the hole of the stay 14. The vibrating element 16 is connected to the oscillator 21. The electrode sheet 18 is connected to the oscillator 21 via the wiring 22a, and the ground terminal of the oscillator 21 is connected to the metal block 19b via the wiring 22b. The horn element 15 , the vibrating element 16 , and the oscillator 2 1 constitute an excitation mechanism that excites the vibrating piece 12 . The object floating transport device is configured to generate a standing wave by the vibrating piece 12, and is provided with a propulsive force imparting mechanism for imparting a propulsive force to the object 13 in a floating state. In the present embodiment, as the thrust applying means, the nozzle 23 for blowing the object 13 backward from the traveling direction of the compressed air is provided. The nozzles 23 are provided in plural, and only one is shown in the figure. On the support piece 14, the acoustic wave reflection element 24 is located on the opposite side of the opposite side of the object 133 from the -12 to 1299722 of the vibrating piece 12, and is fixed via the bracket 25. The acoustic wave reflecting element 24 is provided with a reflecting surface 24a. When the vibrating piece 12 is excited, the vibrating piece 12 is radiated to the opposite side of the object 丨3, and the vibration of the vibrating piece 12 is promoted. The acoustic wave reflection element 24 has a width f or more than the width of the vibrating piece 12, and the vibrating piece 12 is disposed in the width direction within the width of the acoustic wave reflection element 24. Fig. 2 is a model diagram showing the positional relationship between the vibration piece 1 2, the object 13 and the acoustic wave reflection element 24 as viewed from the longitudinal direction of the vibrating piece 12. The sound reflection layer 24 is a flat surface, and the distance L between the reflection surface 24a and the surface 12a of the vibrating piece 12 facing the reflection surface 24a is set to the wavelength λ of the sound wave generated by the vibrating piece 12. N/2 times (N is a natural number). The acoustic wave reflection element 24 is provided in parallel with the vibrating piece 12 by the reflection surface 24a. That is to say, the acoustic wave reflecting element 24 does not protrude from the side of the object 13 to the vibrating piece 12 (in the present embodiment, it is higher than the vibrating piece 12). Next, the action of the object floating conveyance device 1 1 configured as described above will be described. ^ The oscillator 2 is driven by a command signal from a control device not shown, and the vibrating element 16 is excited at a predetermined resonance frequency (for example, before and after 2 kHz). When the vibrating element 16 is excited, the angular element 15 vibrates vertically. Via the angular element 15. The vibrating piece 1 2 excites and vibrates to generate a standing wave. The object 13 is maintained in a state of floating from the surface of the vibrating piece 12 by the radiation pressure of the sound wave radiated from the vibrating piece 12. In this state, the compressed air is ejected by the nozzle 23 to give the object 13 a propulsive force, and the object 13 is transported from one end of the vibrating piece 12 to the other end in a floating state. By stopping the injection of the compressed air 1299722 by the nozzle 23, the object 1 3 is stopped. The object 1 3 is maintained at a certain position in a floating state. When the driving of the oscillator 21 is stopped, the vibration of the vibrating piece 12 is also stopped, and the object 13 is stopped in a state of being carried on the vibrating piece 12. Among the sound waves radiated by the vibrating piece 12 by the vibration of the vibrating piece 12, the sound waves radiated from the surface of the vibrating piece 12 opposite to the object 13 are the same as the conventional device. 3 floating. Further, the sound wave radiated from the surface 1 2a of the vibrating piece 1 2 opposite to the object 1 3 on the opposite side is reflected by the reflecting surface 24a of the acoustic wave reflecting element 24. Then, the vibration of the vibrating piece 12 is stimulated by the sound waves of the anti-injection. Therefore, the sound wave radiated from the surface of the vibrating piece i 2 on the opposite side to the object 13 can be used for the excitation of the vibrating piece 12 by the sound wave which has not been excited by the vibrating piece 12 in the past. The distance L between the reflecting surface 24a and the surface of the vibrating piece 12 facing the reflecting surface 24a was set to 1 / 2 of the acoustic wave wavelength λ' generated by the vibrating piece 12, and an experiment was conducted. As a result, the floating height of the object 13 from the vibrating piece 12 will be about 1.2 to 1.3 times that of the case where the acoustic wave reflecting element 24 is not provided. This is the floating efficiency of the object floating handling device 1 1 , which is the same as the acoustic power ^ which is increased by about 40 to 70%. This embodiment has the following effects. (1) The object floating transport device 11 that floats the object 13 by the radiation pressure of the sound wave generated by the vibrating piece 1 2 excited by the excitation mechanism is provided to be radiated to the object by the vibrating piece 12 The acoustic wave reflecting element 24 of the reflecting surface 24a which is reflected by the sound wave on the opposite side and which accelerates the vibration of the vibrating piece 12 is disposed on the opposite side of the vibrating piece 12 which is opposite to the object 13 side. Therefore, it is radiated to the opposite side of the object 13 and has not been promoted to the 1299722 of the vibrating piece 12, and the padding and the surface of the floating piece are wide: (N-vibratingly, the sound wave can be used for the vibrating piece) As a result, the excitation of the vibrating piece 1 2. to the side opposite to the object 13 can be effectively utilized for the floating of the body 1 3, and the excitation vibration plate 1 2 can be reduced to obtain the same drift. In addition, when the same excitation energy is added, the floating distance can be increased. (2) The acoustic wave reflection element 24 has a width equal to or greater than the width of the vibrating piece 12, and the vibrating piece 12 is disposed in the width direction. The acoustic wave reflection element 24 is in the width. Therefore, the vibration piece 9 is radiated to the opposite side of the object 13 from the sound wave 9 in the entire width direction of the vibrating piece 12, and is reflected by the acoustic wave reflection element 24 to be reflected to the vibration piece 1 2 . As a result, in comparison with the case where the width is narrower than the width of the vibration 12, the sound wave radiated from the vibrating piece 12 to the opposite side of the object 13 can be effectively utilized for the floating of the object 13 (3) In the acoustic reflection element 24, the reflection The surface 24a is a flat surface, and the distance L between the reflection 24a and the surface 12a of the vibrating piece 12 facing the reflecting surface 24a is set to be N/2 times the wavelength λ of the acoustic wave generated by the vibrating piece 12 as a natural number. . Therefore, by using the sound wave reflected by the reflecting surface 24a, the movable piece 12 becomes easy to resonate, and the energy of the reflected wave can be efficiently used to vibrate the vibrating piece 12. (4) The acoustic wave reflection element 24 is provided with a reflection surface 24a parallel to the vibrating piece 12. Therefore, compared with the case where the reflecting surface 24a is disposed in an inclined state with respect to the vibrating piece 12, the vibration of the vibrating piece 12 can be effectively promoted. (5) The vibrating piece 1 2 is vibrated by a plurality of vibrating elements 16 and the effect of vibration is increased as compared with the case where only one vibrating element 16 is excited. 1299722 (6) Since the acoustic wave reflection element 24 is provided over almost the entire length of the vibrating piece 12, the vibrating piece 12 is bent to the extent that the object 13 is conveyed, and can be suppressed by the action of the sound wave reflected by the reflection surface 24a. . (Second Embodiment) Next, a second embodiment will be described based on Fig. 3 . In the present embodiment, the configuration of the acoustic wave reflection element 24 is basically the same as that of the first embodiment. The same portions as those of the above-described embodiments are denoted by the same reference numerals, and the detailed description thereof will be omitted, and only the different portions will be described. The 3rd figure shows a model diagram of the relationship between the vibrating piece 1 2, the object 1 3, and the acoustic wave reflecting element 24. The object floating conveyance device 1 1 of the present embodiment is a device suitable for conveying an object 13 having a width wider than that of the vibrating piece 12. As shown in Fig. 3, the acoustic wave reflection element 24 is formed in a bent shape at the center in the width direction, and the center of the width direction is disposed in the state of being opposed to the center of the width direction of the vibrating piece 12 in the vibration direction. Below the film 1 2 . The acoustic wave reflection element 24 is formed symmetrically and has two reflection surfaces 2 4 b, 2 4 c which are opposite to each other with respect to the surface 1 2 a of the opposite side of the opposite side of the object 13 from the vibrating piece 1 2 . The distance between the respective reflecting surfaces 24b and 24c in the width direction and the vibrating piece 12 is larger toward the outer side in the width direction. In the object floating conveyance device 1 of the present embodiment, the sound waves radiated to the vertical direction by the vibrating piece 12 are not reflected by the reflection faces 24b and 24c toward the width of the vibrating piece 12 as the vibrating piece 12 moves in the vertical direction. It is not the case that the direction is moving in the straight direction, but is reflected in the width direction of the vibrating piece 12 toward the outside. Therefore, the sound wave radiated toward the sound wave reflection element 24 from the end portion 1299722 portion near the width direction of the vibrating piece 12 is reflected by the reflection surfaces 2 4 b, 2 4 c as shown in Fig. 3 The outer portion of the end portion of the vibrating piece 12 causes the object 13 to float like a float. When the width of the object to be transported 13 is widened, the width of the vibrating piece 12 is widened in accordance with the width thereof, and the energy required to excite the vibrating piece 丨2 becomes large. When the width of the vibrating piece 12 is narrowed, the sound wave radiated from the vibrating piece i 2 toward the object i 3 does not act uniformly on the entire object 13 and does not act at the end of the object 13. As a result, as shown by the chain line in Fig. 3, there are cases where the both ends of the object 13 are formed in a curved state as compared with the lower end of the vibrating piece 12. In the present embodiment, even if the object 13 is curved in the width direction, it is prevented from the end portion in the width direction of the vibrating piece 12, and is prevented by the action of the sound waves reflected by the reflecting surfaces 24b and 24c. The object 13 is in contact with the vibrating piece 1 2 . In the present embodiment, the following effects can be obtained in addition to the effects (1), (2), (5), and (6) of the first embodiment. (7) The distance between the reflecting surfaces 24b, 24c of the acoustic wave reflecting member 24 and the vibrating piece 12 becomes larger toward the outer side in the width direction. Therefore, a part of the sound wave radiated from the vibrating piece 12 toward the reflecting surfaces 24b and 24c is efficiently reflected toward the outer side of the end portion in the width direction of the vibrating piece 12. As a result, when the object 13 having a wider width than the vibrating piece 12 is floated, even if the object 丨3 is bent, the object i 3 can be prevented from contacting the end portion of the vibrating piece 12 in the width direction. (8) The vibrating piece 12 is bent at the center in the width direction to form a symmetry. Therefore, in the sound waves reflected by the reflecting surfaces 2# and 24c, the sound waves which move toward the outer side in the width direction of the vibrating piece 2 and its 1299722 width direction are also said to cause the object 13 to float, and the object 13 can be made to float. (Third Embodiment) Next, a third embodiment will be described based on Fig. 4 . In this embodiment, the sound wave reflected by the reflecting surface of the acoustic wave reflecting element 24 is mainly connected to the object 13 to promote the floating of the object 13 , and the excitation of the moving piece 12 is not so much. At this point, the foregoing 1 and the second implementation are different. Then, the configuration of the acoustic wave reflection element 24 is different from the above two states, and the other basic configurations are the same. The same reference numerals are given to the above-mentioned embodiments, and the detailed description thereof will be omitted, and only the different parts will be described. Fig. 4 is a model diagram showing the relationship between the vibrating piece 1 2, the object 1 3, and the acoustic wave inverse 24 . As shown in Fig. 4, the independent acoustic wave reflection elements 24 are respectively located at positions corresponding to the end portions of the vibrating piece 12 in the width direction. The reflecting surfaces 24b, 24c of the two-shot element 24 are opposite to the direction of the surface 1 2 a of the opposite side of the opposite side of the vibrating piece 12, and are perpendicularly intersected by the center of the vibrating piece 12 in the width direction. Plane is opposite. In the object floating conveyance device 11 of the present embodiment, since the radiation element 24 is provided only at the both end portions in the width direction of the vibrating piece 12, the sound waves radiated from the vicinity of the center of the vibrating piece 12 in the width direction are not Promotes the vibration of the vibrating piece 12. A part of the sound wave radiated from the vertical direction of the vibrating piece is reflected by the reflecting surface 24b, and as shown in Fig. 4, it passes through the vibrating piece i 2 and is in a form of direct vibration. The same-shaped portion of the projecting element is disposed in the acoustic anti-I 3 3 phase and is opposite to the portion of the surface of the so-called dubbing wave 12 2 toward the end of 24 c plus the end portion 18 - 1299722 • more outwardly to cause the object 13 to float like a float. In the same manner as in the second embodiment, the object 13 is curved in the width direction, and the portion corresponding to the end portion in the width direction of the vibrating piece 12 is prevented by the action of the sound waves reflected by the reflecting surfaces 24b and 24c. The object 13 is in contact with the vibrating piece 12. In the present embodiment, the same effects as (7) of the first embodiment and (7) of the second embodiment can be obtained. (Fourth Embodiment) Next, a fourth embodiment will be described based on Fig. 5 . In the present embodiment, the φ object floating transport device 1 is composed of the roller transport device 26 and the sound wave floating unit 27, and the object 13 floats by the action of the sound wave generated by the sound wave floating unit 27, but the object 13 is caused. The force (propulsion) for moving (handling) is different from that of the above embodiment by the point that the roller conveyor 26 is supplied. The same portions as those of the above-described embodiments are denoted by the same reference numerals, and the description thereof will be omitted. / The support piece 14 supported by the support column 28 is provided with a pair of side walls 14a. A plurality of rotary shafts 29 between the side walls 14a are supported in parallel with each other at a predetermined interval. At both ends of the rotating shaft 29 and at the inner side of the side wall 14a, a roller 30 is integrally rotatably fixed, and the both ends of the object 13 in a state where the floating state and the bending of the center are suppressed by the action of the acoustic wave floating unit 27 are The fitting causes the object 13 to move. The roller 30 has a step portion 30a which is formed in contact with the end portion of the object 13 by the step portion 30a to restrict the movement of the object 13 in the width direction. One end of the rotating shaft 2 9 is fixed with a wheel 3 1 capable of integrally rotating. Each of the rotary shafts 29 is driven by a motor 32 in a certain direction via a drive belt 34 which is disposed between each of the pulleys 3 1 and the drive 195-129922 of the movable pulleys 3 3 driven by the motor 32. The vibrating piece 12 is provided at a center in the width direction of the support piece 14 so as to extend in a direction perpendicular to the rotation axis 29 above the rotation axis 2 9 . The vibrating piece 1 2 is formed in a rectangular plate shape which is narrower than the width of the object 13 , and the object 13 can be maintained floating in the central portion thereof. Below the vibrating piece 12, a sound wave reflection element 24 is provided in the same manner as in the first embodiment. In the present embodiment, the central portion of the object 13 floats from the surface of the vibrating piece 12 by the radiation pressure of the acoustic wave radiated from the vibrating piece 12, but the ends of the object 13 are maintained. The state in contact with the step portion 30a of the roller 30. Then, the object 13 thrust is applied by the rotation of the roller 30, and the object 13 is carried along the side wall 14a. Further, as the object 13, for example, when it is applied to a thin glass sheet (thickness of 1 mm or less), since the end portion of the object 13 is in contact with the roller 30 at any time, there is contamination. Or the possibility of damage, but the end of the glass plate will eventually become a part of the product, so there is no obstacle. In the present embodiment, the following effects can be obtained by obtaining the same effects as (1) to (6) of the first embodiment. (9) The object floating transport device 11 includes a roller transport device 26 (transport mechanism) that transports the both ends of the object 13 in the width direction thereof, and a sound wave that imparts a buoyancy force to the object 13 supported by the transport mechanism Floating device 27. Therefore, the object 13 is in contact with the roller 30 at both ends in the width direction. Therefore, even when the object 13 has a wide width, it can be transported in a stable state. -20 - 1299722 The embodiment of the present invention is not limited to the above, and may be constituted by, for example. As shown in Fig. 6, when the distance between the reflecting surface 24a of the acoustic wave reflecting element 24 and the surface 12a of the vibrating piece 12 opposite to the reflecting surface 24a is L, the sound wave emitted by the vibrating piece 12 When the wavelength is λ, it is established. << The acoustic reflection element 24 is provided in the relationship of λ. Here, the so-called "establishment L <<The relationship of λ means that, for example, the distance L does not reach 1/3 of the wavelength λ, and when the vibration frequency of the vibrating piece 12 is 20 kHz, it is 1 mm or less. In this case, in comparison with the case where the distance L is larger than 1/2 of the wavelength λ, the energy of the sound wave reflected by the reflecting surface 24 a acts on the vibrating piece 12 becomes large. The 〇 object floating transport device 11 may also be provided with a plurality of vibrating pieces 12 . For example, as shown in Fig. 7, two vibrating pieces 12 are disposed in parallel, and a sound wave reflecting element 24 is disposed below each vibrating piece 12. The acoustic wave reflection element 24 has a reflection surface 24 n which is parallel to the surface 1 2 a of the vibrating piece, and reflection surfaces 24b and 24c which are inclined with respect to the surface 12a of the vibrating piece 12. The distance L between the reflecting surface 24a and the surface 12a is set to Ν/2 times the wavelength λ of the sound wave generated by the vibrating piece 12 (Ν is a natural number). In this case, the vibration of the vibrating piece 12 can be effectively promoted by the sound wave reflected from the reflecting surface 24a. Further, the sound waves reflected by the reflecting surfaces 24b, 24c directly contribute to the floating of the object 丨3, and the object 13 can be prevented from coming into contact with the vibrating piece 12. The shape and arrangement position of the acoustic wave reflection element 24 are not limited to the above-described respective embodiments. As long as the sound wave emitted from the vibration piece 12 to the side opposite to the object 13 is provided, the vibration of the vibration piece 12 can be reflected. The reflection -21 - 1299722 faces 24a, 24b, 24c. For example, even in the case where the face 1 2 a of the vibrating piece 12 opposite to the object 13 and the reflecting surface 24 a are parallel to each other, the distance L between the rain faces is not limited to the one generated by the vibrating piece 12 The wavelength of the sound wave; N/2 times I (N is a natural number). The distance L may be any distance from the reflection surface 24a; the reflected sound wave, and the sound wave directed toward the reflection surface 24a may interfere with each other by a distance. Further, the reflecting surfaces 2 4 a, 2 4 b, and 2 4 c are not limited to the flat surface or the curved surface. The shape of the vibrating piece 12 is not limited to a rectangle. It can be square • It can also be round or polygonal. In this case, it is preferred that the shape of the acoustic wave reflecting element and the shape of the vibrating piece are matched with each other. The reflecting surface of the acoustic wave reflecting element 24 has a shape that protrudes to the outer side from the end portion of the vibrating piece 12, and is not limited to the shape in which the end portion in the width direction protrudes to the outer side, or may have a shape The end portion of the vibrating piece 12 in the longitudinal direction protrudes to the shape of the outer portion. The acoustic wave reflecting element 24 does not have to be in the form of a plate, and may be in the form of a block. ® 〇 can also be used as a reflection-reflecting element by using a part of the components used for other functions as a reflection surface instead of the dedicated acoustic reflection element 24. For example, the upper surface of the support piece 14 may be used as a reflecting surface. Further, the angular element 15 and the vibrating element 16 are not supported on the support piece 4, and when supported by the bracket, a blind plate (b) disposed under the vibrating piece 1 2 may be used. H nd pi ate) or a plate for preventing the screw or the like from falling as a sound wave reflection element when the object floating transport device 11 is assembled. 〇 Even if it is the acoustic wave reflection element 24 that encourages the vibration of the vibrating piece 12, the width of the -22 - 1299722 width does not need to be radiated from the surface 1 2a of the opposite side of the vibrating piece 1 2 opposite to the object 13 It is completely reflected to the vibrating piece 12 . For example, an object having a narrower width than the vibrating piece 12 may be provided as the acoustic wave reflection element 24, or a plurality of the acoustic wave reflection elements 24 may be provided with a gap therebetween. Further, a plurality of acoustic wave reflecting elements 24 may be provided so as to intersect the longitudinal direction of the vibrating piece 12. In the first and fourth embodiments, the acoustic wave reflection element 24 can be provided in a height adjustment manner. In this case, it is easier to set the distance L between the reflecting surface 24a' and the surface 12a of the vibrating piece 12 opposed to the reflecting surface 24a to N/2 of the wavelength λ of the acoustic wave generated by the vibrating piece 12. Times (Ν is a natural number). In the configuration in which the standing wave is generated by the vibrating piece 12, only one of the angular elements 15 may be connected to the vibrating element 16 and the other angular element 15 may not be excited by the vibrating element 16. The configuration may be such that the center of the vibrating piece 1 2 is connected to the angular element 15 and excited by the vibrating element 16 . The 音 〇 can also be applied to a sonic wave floating device (sonic wave floating unit 27) that generates a standing wave by the vibrating piece 12, and the standing wave emitted from the vibrating piece 12 keeps the object 13 in a floating state. The handling device that is transported to the destination by the movement of the trolley. The crucible 12 can also be configured such that the vibrating piece 12 generates a traveling wave to carry the object 13 in a floating state. For example, instead of connecting one of the vibrating elements 16 to the oscillating unit 21, it is connected to the load circuit. In this configuration, the vibration energy of the mechanical energy is converted into electrical energy by the piezoelectric elements 17a, 17b constituting the vibrating element 16 connected to the load circuit, and the electrical energy is caused by the -23-1299722 load circuit. The electric resistance becomes a way in which the Joule heat is dissipated. The vibration wave generated by the vibrating piece 1 2 becomes a traveling wave that advances in a single direction. The 〇 may be configured to be switchable to a state in which the vibrating piece 12 generates a traveling wave and a state in which a standing wave is generated. The shape of the horn-shaped member 15 is not limited to a flat rectangular parallelepiped, and may be a shape in which a front end such as a cylindrical shape or a trapezoidal cone is tapered. The shape of the object 13 to be kept floating is not limited to a square shape, and may be any shape such as a triangle, another polygon, or a circle. • The ytterbium diaphragm 1 2 is not limited to the fixing by the screw, but may be fixed by brazing or welding. The 〇 vibration element 16 is not limited to the Langevin type vibration element, and other vibration elements may be used. The snoring wave floating device is not limited to the configuration in which the object 13 is maintained in a horizontal state or floated, and may be configured to be inclined while maintaining the lower end of the sheet-like object 13 in a state of being supported by a supporting member such as a roller. In this case, since the lower end is supported by the supporting member, although it is not quite sturdy, the object remains in a floating state for the vibrating piece. The following technical considerations (inventions) can be grasped from the foregoing embodiments. (1) In the invention according to any one of the items 1 to 7, the vibrating piece is excited by a traveling wave. (2) The invention described in any one of the first to seventh aspects of the invention, wherein the sound wave floating device is constituted by a standing wave generated by the vibrating piece, and has a floating state of -24-1299722 The thrust application mechanism of the object thrust. (3) In the invention described in any one of the above-mentioned items (1) and (2), the vibrating piece is provided in plural in parallel, the acoustic wave reflecting element It is placed at each diaphragm. (4) The above-described sound wave flotation device includes a transport mechanism that transports the object to support the left and right end portions thereof in the transport direction, and a floating wave that suppresses the bending of the object supported by the transport mechanism The floating device is an object transporting device having the sonic flotation device of the invention described in any one of the first to seventh aspects of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a perspective view of a model of the object floating transport device according to the first embodiment. Fig. 1(b) is a side view of the model of the object floating transport device of the first embodiment. Figure 2 is a model diagram illustrating the role. Fig. 3 is a model diagram showing the relationship between the object, the vibrating piece, and the sound wave reflection element in the second embodiment. Fig. 4 is a model diagram showing the relationship between the object, the vibrating piece, and the acoustic wave reflecting element of the third embodiment. Fig. 5 is a perspective view showing a model of the object floating conveyance device of the fourth embodiment. Fig. 6 is a model diagram showing the relationship between an object, a vibrating piece, and a sound wave reflecting element of another embodiment. Fig. 7 is a model diagram showing the relationship between an object, a vibrating piece, and a sound wave reflecting element -25 - 1299722 of another embodiment. Figure 8 is a model diagram of a prior art technique. [Description of component symbols] L...distance 1 1 ...object floating handling device as a sound wave floating device 1 2...vibrating piece 1 2a...face 1 3...object • 1 5 ... an angular element constituting a vibrating mechanism 16. The vibrating element constituting the vibrating mechanism 2 1 ...the vibrating mechanism constituting the vibrating mechanism 2 4 ...the acoustic reflecting element, 24a, 24b, 24c...reflecting surface
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