TWI234223B - Dispenser device for fabricating semiconductor chips - Google Patents

Abstract

Disclosed is a dispenser device for fabricating semiconductor chips, which readily accomplishes micro-dispensing and high-speed dotting processes and precisely discharges a solution. The dispenser device comprises a main body assembled with a moving unit including a robot unit, and a housing communicating with a syringe vessel containing a viscous solution through a connection pipe and detachably assembled with the main body. A connection shaft is integrated with a lower screw received in the housing, and a screw rod has a collar formed at a lower part of the connection shaft. A balance controller is axially assembled with an upper part of the connection shaft to control horizontal and vertical movement of the screw rod, and a needle member is detachably assembled with a lower part of the housing. Further, a servo motor is installed on the main body and has a driving shaft connected to the connection shaft of the screw rod by a coupling member to control rotation of the screw rod.

Description

1234223 (1) Description of the invention [Technical field to which the invention belongs] The present invention relates to a 'particularly' used to manufacture semiconductor wafers, and relates to a 'used to manufacture semiconductor wafers' which can easily achieve micro-distribution and high-speed dots Process and semen. [Prior art] For those skilled in the art, the dispenser device is used in the process of dispensing viscous solutions such as epoxy resin. It is used for mounting or integrated circuit (IC) electronic components on printed circuit boards (or applications). Underfilling process to flip chip, in which flip chip is packaged to protect it from external environment. At present, a high-speed wafer mounter that assembles 6500 or more per unit hour has been developed and commercial It is necessary to develop a good distribution device that can be applied to high-speed wafers. In particular, it is necessary to use a distributor as a semiconductor device device to dispense precisely and quickly with a desired amount so as to manufacture semiconductors. Wafer, reduce the proportion of defects. Then want a dispenser that quickly ejects the solution at a predetermined position within a tolerable error range, even when it is reused for a long time. 'Vacuum pressure or injection pressure through a pump has recently been proposed to Increase the discharge speed of the solution. Dispenser device Dispenser device is exactly discharged on the application system (such as wafer PCB), the sheet is coated and Multiple wafers are loaded into a modified surface mount epoxy solution for a surface mount assembler, which is considered by consumers and fixedly spaced. The process of power, -6-1234223 (2) With reference to the figure, it is explained that one of the main bodies 20 of a conventional dispenser device includes a motor and a chestnut 25, and a motor shaft 22 of a Lauda 2 1 drives the Screw 2 4. At this time, the epoxy resin is self-injected by pneumatic pressure, is fed to the pump 25 through the feeding line 26, and is discharged onto the substrate via the pump 27. The structure of the conventional dispenser device is such that the solution (E · P) fed between the screw pitches is discharged into the base by the needle 27 according to the rotation of the screw 24. Therefore, the screw 24 should be accurate. For example, due to the reaction of the solution pressure And the water of the screw is precisely controlled to feed the solution to it at a high speed; however, the disadvantage of the conventional dispenser device is that the unit of the screw 24 is precisely controlled, thus reducing the reliability. Many efforts have been made to avoid disadvantages. For example, the inventor's patent, Korean Patent Nos. 9 8-5 8 3 16 and 9 9-disclose a device for injecting silicone, and this device is configured for a resin coating machine. According to these patents, the solution is discharged onto the substrate using a rotating rod to control the discharge amount of the solution. However, the disadvantage of these conventional patents is that it is difficult to dispense quickly because the device operates with a large-scale and complicated driving mode. There is also the problem of accurate liquid dispensing because the solution discharge capability of the device does not cause problems with disassembly / assembly and cleaning of the device. A brief cross-sectional view, [25] is provided with the bolt of the end pin 24 of the horse container (S · L) 25, which is lowered by ground control to prevent the flat and vertical axis from being on the bottom. It is not sufficient to provide a device for the device. Please refer to this case No. 16687. The screw device with a through hole for manufacturing semiconductors has many inches and is based on a small amount of resin. In addition, -7-1234223 (3) this Other disadvantages of these conventional patents are that the discharge error rate of the device is localized 'because it is difficult to control the screw desirably, which reduces the reliability of the device' and 'the interchangeability of the device with its eight types of distributor devices The system is not good because it is difficult to accurately distribute the resin solution and desirably control the discharge amount of the resin solution depending on the viscosity of the resin solution. What's more, the disadvantage of these conventional patents is that it is difficult to quickly distribute resin solution to the substrate due to its complicated distribution and control process, where the liquid resin solution (epoxy resin) is controlled in parallel; in other words, the resin The flow channel of the solution is blocked by a rotating opening and closing rod or automatically inverted to dispense a predetermined amount of resin solution, and the blocked flow channel is reopened by separating the opening and closing rod from the flow channel to Move the resin solution. Therefore, the present inventor has proposed a dispenser device for manufacturing semiconductor wafers disclosed in Korean Patent No. 2002-49007 to overcome the above disadvantages, in which the dispenser device has a rather simplified structure and determines an accurate The resin solution is discharged, and the dispenser device is easy to clean due to the convenience of disassembly and assembly, and the interchangeability of this dispenser device with its eight types of dispenser devices is excellent. However, although it has been improved compared to conventional patents (Korean Patent Nos. 9 8-5 8 3 1 6 and 99-16687), the dispenser device of Korean Patent No. 2002-49007 still has a huge and complicated structure, Complex resin solution feeding and control processes, complex operating methods, and difficult disadvantages of accurately controlling this screw. (4) 1234223 [Summary of the Invention] Therefore, the present invention is made in view of the above disadvantages occurring in the conventional technology, and an object of the present invention is to provide a dispenser device for manufacturing a semiconductor wafer, which accurately discharges a The solution is controlled in small amounts during its discharge to maximize its reliability. Another object of the present invention is to provide a dispenser device for manufacturing a semiconductor wafer, which implements a high-speed dotization process, and adjusts to minimize the error of the solution discharge amount, thereby maximizing its reliability. Another object of the present invention is to provide a dispenser device for manufacturing a semiconductor wafer, which uses a servo motor directly connected to a screw to implement a high-speed dotization process and an end control process using a recoil control to control the solution axially. Flow to maximize its reliability. Another object of the present invention is to provide a dispenser device for manufacturing a semiconductor wafer, which, due to its precise structure, prevents a huge load applied to the dispenser device during operation to minimize errors in its operation. Another object is to provide a distributor device for manufacturing a semiconductor wafer, which is easily disassembled and reassembled to facilitate cleaning and replacement of the screw that is convenient for its purpose, thereby maximizing the connection with other types of distributor devices. Interchangeability. Based on the present invention, these objects can be achieved by configuring a dispenser device for manufacturing a semiconductor wafer, the dispenser device including a main body; a shell portion connected to the injection container and detachably assembled with the main body; a screw, In the housing portion, a servo motor that is axially connected to itself is used to discharge a predetermined amount of the solution fed from the injection container via a -9- (5) 1234223 needle portion; and, a balance controller, and the axial direction of the screw Ground assembly to control the horizontal and vertical movement of the screw. [Embodiment] Referring now to the drawings, the same reference numerals are used in all different drawings to indicate the same or similar components. Fig. 2 is a perspective view of a dispenser device according to the present invention, Fig. 3 is an exploded perspective view of the dispenser device according to the present invention, and Fig. 4 is a sectional side view of the dispenser device according to the present invention. According to the present invention, there is provided a dispenser device that accurately discharges a viscous solution, such as epoxy resin, to meet the need for improved performance, including high-speed and precise operation of equipment for manufacturing semiconductor wafers, such as wafer mounting. In detail, the present invention provides a dispenser device for manufacturing a semiconductor wafer, which includes a main body 10 assembled with a mobile unit (not shown) including a robot arm unit, and a connecting pipe (S-1) and A viscous and easy-to-fill injection container (s · L) is provided, and the shell portion 20 is detachably assembled with the main body 10. The connecting shaft 3 3 is integrated with the lower bolt 3 1 accommodated in the housing portion 20, and the screw 30 has a collar 32 formed at a lower portion of the connecting shaft 33. The balance controller 40 is assembled axially with the upper part of the connecting shaft 33 to control the horizontal and vertical movement of the screw 30, and the needle member 60 is removably assembled with the lower part of the housing part 20. Furthermore, the servo motor 200 is mounted on the main body 10, and has a drive shaft 2 1 0 having a connecting shaft 3 3 connected to the screw 30 through a coupling member 丨 〇〇 to control the screw 30 Rotation. 1234223 (6) Referring to Figs. 2 and 4, the main body 10 is provided with an upper support portion n on an upper portion thereof, and a lower support portion 13 on a lower portion thereof. The lower support portion 13 is axially opposed and the upper support portion] 1, and the assembling grooves 14 are formed on the upper support portion n so that the upper support portion Π is formed in a shape. The servo motor 200 is inserted into the motor assembly inner diameter 12 formed in the upper support portion Π of the main body 10 to be firmly assembled with the main body 10 using a screw (B), and the housing portion 2o is formed by The positioning bolts 16 are fastened into either of the positioning bolt holes 15 formed on both lateral sides of the lower support portion 13 and inserted into an assembly groove 14 removably assembled with the lower support portion 13. At this time, the positioning grooves 25 are formed on both sides of the housing portion 20, so when the positioning bolt holes 15 are fastened, the positioning bolts 16 are inserted into the positioning grooves 25 through the positioning bolt holes 15, Thereby, the case portion 20 and the lower support portion 13 of the main body 10 are firmly assembled. Referring to FIGS. 8 and 9, a solution channel 2 1 having upper and lower enlarged stepped inner diameters 2 2, 2 3 is vertically formed in the shell portion 20, and the solution channel 2] and The solution outlet on the inner wall 2 3 a $ $ The ends of the connecting tube (S-1) of the gastric device (S · L) communicate vertically. At this time, the carbide tube 27 is inserted into the solution channel 21 to minimize the frictional sound due to the flow of the solution and the rotation of the lower bolt 31. The lower enlarged stepped inner diameter 2 3 is defined by the lower portion 24 of the external thread of the shell portion, and the head portion 6 3 of the needle 6 1 is received therein, and the needle 6 1 is secured by the external thread of the shell portion The needle cover 62 on the lower portion 24 is attached to the lower and enlarged stepped inner diameter as shown in FIG. 9. The collar 32 of the screw 30 is inserted into the enlarged enlarged inner diameter 22, and the upper and lower oil-free rings 3 5, 3 and 6 are mounted on the connecting shaft 3 3 on the collar 3 2-11-1234223 ( 7) The square and the lower position, and the ◦ ring 3 7 is installed so as to be in contact with the lower side of the lower oil-free ring 36, so that the solution outlet 2 3 a accommodates the lower bolt 31 in an airtight manner. Furthermore, the connection shaft 3 3 is connected to the drive shaft 2 1 0 and the joint structure 1 0 0 of the servo motor 2 Q 0 to be driven by the servo motor 2 0 0. The lower bolt 3 1 of the screw 30 includes a spiral pattern and a spiral groove 3 1 a. The spiral groove 3 1 a is rounded to move the solution smoothly, and the end of the bolt 3 1 forms a tapered and rounded tip such that The end of the bolt 31 is in contact with the V-shaped valve seat 64 formed on the head 63 of the needle 61 to block the needle 6 in a watertight manner.] Now returning to Figures 1 and 11, the bolt 31 can be determined by the bolt. The pitch size of 31 is used selectively, and when the viscosity of the solution or the use of the dispenser device is changed, a different screw 30 is used. Thereby, interchangeability with other types of dispenser devices is achieved. In other words, in the case of using a bolt with a narrow pitch, the amount of solution discharged from the needle is small, but the solution is accurately discharged from the needle. On the other hand, in the case of using a bolt with a wide pitch, the solution was discharged in a large amount, however, the solution was discharged from the needle inaccurately. Furthermore, the balance controller 40 functions to control the horizontal and vertical movement of the screw 30 to accurately discharge the solution. 3 to 5, the balance controller 40 is assembled axially with the upper part of the connecting shaft 33 of the screw 30, and includes a bearing housing part 4 assembled with the housing part 20 using the first screw (b). The bearing housing portion 41 is positioned between the upper and lower support portions 1 1 and 1 3 of the housing portion 20. In addition, a plurality of bearings 4 2, 4 and 3 are located in the bearing housing portion 41, and the outer joint preload cover 4 4 series-12-1234223 (8) is connected to the bearing housing portion 4 by the second screw (B). The upper side of 1 is assembled to press the outer engagement of the bearings 42, 43 downward. In addition, the inner joint preload nut 46 is fastened to the external thread portion 4 9 a of the adjusting bolt 4 5 which is fitted into the bearing 4 2, 4 3. Therefore, the inner joints of the bearings 4 2, 4 3 are firmly coupled to each other. . Furthermore, the height adjusting nut 47 is fastened to the external thread portion 49a of the adjustment bolt 45 so that the external thread portion 4 9a of the adjustment bolt 45 is fastened, and the collar 3 located on the screw 30 is pressed vertically. The upper side of 2 has no oil ring 35, and the spring adjusting bolt 48 is screwed into the internal thread portion 49b of the adjusting bolt 45. The spring 50 is located between the lower side of the spring adjusting bolt 48 and the upper side of the upper oil-free ring 35, so as to elastically press the upper adjustment lever by adjusting the spring adjusting bolt 48 that is engaged with the internal thread portion 49b of the adjusting bolt 45. Oil ring 3 5. Furthermore, preferably, each of the bearings 4 2, 4 3 includes an angular spherical bearing having an inner joint and an outer joint. 6a and 6b, the positioning bolt 47b is fastened to the internal diameter of the internal thread 4 7 a formed on the circumference of the height adjustment nut 4 7, and is fastened to the internal diameter of the internal thread 4 7 a without oil. The ring 35 is in contact with the lower side of the height adjustment nut 47. Therefore, the spring adjusting bolt 48 alternately compresses or relaxes the spring 50 to adjust the contact degree between the collar 32 of the screw 30 and the upper and lower oil-free rings 35, 36, as shown in FIG. The reference number 1 2 0 represents a connection bolt cap that connects the connection pipe (S-1) of the injection container to the solution outlet 2 3 a of the housing portion 20. In other words, the injection container (S · L) communicates with the solution channel 21 through the connection pipe (S4) and the solution outlet 2a of the shell 20, and the screw -13-1234223 (9) 3〇 is by servo The motor 2 0 is driven to rotate the bolt 3 1 in the solution passage 21, whereby the solution is dispensed from the solution passage 2 1 to a target such as a semiconductor wafer (not shown) via the needle 6 1 of the needle member 60. The discharge of the solution through the bolt 3 1 of the screw 30 is due to the shear force of the solution, so the area where the flow path of the solution is often required to be maintained under a fixed pressure (the pressure of the solution fed from the soil inlet device: about 0.5 bar to precisely distribute the solution. For this reason, in terms of pressure, it is necessary to precisely control the balance of the screw 30 that affects the surrounding solution. The present invention provides a balance controller 40 that precisely controls the balance of the screw 30. The balance of the screw 30 should be controlled. In order to prevent the recoil of the screw 30, it is not critical. When the viscosity of the solution is low and the load of the solution applied to the bolt 31 during the discharge of the solution is low. Therefore, the balance controller 40 of the present invention is applied to an example using a high viscosity solution, which increases the load on the bolt 31 during the discharge of the solution. The balance controller 40 of the present invention acts as a precise movement of the screw 30, the smallest change in the load applied to the bolt 31, and the dispenser device is easily disassembled and reassembled. In detail, the solution is tied to the screw 30 during the rotation period along the screw. 3 1 helical groove 3] a is fed from the injection container (S · L) to the needle 61. At this time, 'bolt 3] is rotated in the center of the solution channel 21 of the shell portion 20 and the load is applied to the bolt 3] The direction is relative to the discharge direction of the solution -14-1234223 (10). However, when the solution approaches the needle 6 1 of the needle member 60, the load on the bolt 3 1 increases undesirably because the narrowness of the needle 6 Diameter. Therefore, 'the adjustment bolt 4 5 needs to be tightened or loosened so that the height adjustment nut 4 7 of the adjustment bolt 4 5 contacts the upper surface of the oil-free ring 3 5 above the collar 3 2 of the screw 30, As a result, the screw 30 is not moved axially due to the load applied to the bolt 31, as shown in Figs. 6a and 6b. At this time, it is preferable that the height adjustment nut 4 7 is appropriately connected with the upper oil-free ring. 3 5 contact, which will not hinder the smooth rotation of the screw 30. In addition, several angular spherical bearings 4 2, 4 3 are located in the bearing housing portion 41 assembled with the main body 10, and the preload cover 44 is externally engaged. Is assembled with the bearing housing portion 41 by a screw (b), and the internally engaging preload nut 46 is tied to the external thread portion 49a of the adjustment bolt 45, Therefore, the axial movement of the screw 30 is precisely controlled. At this time, the height adjustment nut 47 acts to evenly distribute the force applied to the movement of the screw 30, and the spring 50 helps prevent the screw 30 The phenomenon of recoil. In other words, when the screw 30 is driven by the servo motor 2000, the upper and lower oil-free rings 3, 5, 6, and 5 are in contact with the upper and lower sides of the collar 32. The inner joints of the adjusting bolt 4 5, the spring adjusting bolt 4 8 and the angular spherical bearing 4 2, 4 3 rotate in association with the connecting shaft 3 3 to control the horizontal and vertical movement of the screw 30. In particular, the balance controller 40 of the present invention reduces the load on the bolt 31 due to the force between the screw 30 and the solution so that the screw 30 rotates smoothly because it is connected to the angular spherical bearings 4 2, 4 3 The height adjustment nut 4 7 rotates 1234223 (11) while supporting the screw 3 0's dependent load. Furthermore, the spring adjusting bolt 4 8 screwed into the internal thread portion 4 9 b of the adjusting bolt 4 5 is raised or lowered by tightening or loosening itself. Therefore, the spring 5 0 is pushed or released to control the upper and lower parts. The degree of contact between the oil-free rings 3 5, 3 6 and the collar 32 of the screw 30, to avoid disadvantages due to the load of the solution applied to the bolt 31, as shown in FIG. Hereinafter, the process capability index of the dispenser device according to the present invention will be described in more detail. A primary purpose in the statistical quality control of a process is to manage the process stably. Furthermore, it is important to control the process desirably so that the products of the process meet the prerequisites of a predetermined standard. Therefore, it is necessary to evaluate the quality change of the product in the product development and manufacturing steps, and implement a process capability analysis. The difference between the measurement and setting of the product is checked using various statistical methods to reduce Product quality changes. This process capability, which includes the idea of natural tolerance (6 σ), means the ability to measure a process of a product of desired quality when the process is in a steady state under certain conditions. At this time, the process capability index is used to quantitatively represent the process capability. This process capability index is defined as the ratio of the allowable process range to the natural tolerance (6 σ), which means an index that evaluates whether the capability of measuring a product of desired quality through a certain process is sufficient, and is classified into a number type The process capability index, such as C p, C pk, and C pm, is based on the relationship with the specification limit, partial 1234223 (12) difference, and set 値. C p represents the distribution of a process

Cp is defined as the quantitative ratio of the allowable process range (partial tolerance) to the actual process range (natural tolerance), as in Equation 1:

c _ Permissible process range p—intermediate process range USL-LSL ~ ~~~ 6 USL-LSL ~ Wr where USL = upper specification limit LSL = lower specification limit NT = natural tolerance The process capability index c P changes according to the upper and lower specification boundaries. In detail, when C p = 1 · 〇, the allowable process range is the same as the actual process range in a process, and the quality distribution of products manufactured since this process shows a stable normal distribution. At this point, 'theoretically, the part deviating from the self-defined limit is 0.23%. However, in fact, 'it is difficult to ensure a product of desired quality often due to wear and tear of the device'. Therefore, preferably, C p is 1.3 or more. At this time, the deviation from the specification limit is 0.007%.

Cpk represents a process average and another type of process capability index. Cpk is proposed to give the answer to the process 1234223 (13) The average deviation from the average of a specification limit, and if the average of the upper and lower specification limits is given by m Specify that m is defined as Equation 2 Equation 2 m 2 (USL + LSL) / 2 Furthermore, the deviation degree (k) representing the deviation of the process average from the specification limit average is defined as Equation 3: k = (ni- //) / (USL-LSL / 2) where 'V is a preset 値 of the discharged solution. Therefore, Cpk is the same as (1-k) Cp, that is, Cpk = (1-k) Cp. In the case where only the upper specification limit is used, the process capability index Cpk is two (USL-μ / 3/3). On the other hand, in the example using only the lower specification limit, the process capability index C p k = (//-L S L) / 3. A better understanding of the present invention can be obtained based on the following examples of explanations; however, the present invention is not limited by the explanation. Using the above formula regarding the process capability index, the process capability index of the dispenser device according to the present invention is evaluated as will be described in an example. Example In the unfilled process used to manufacture semiconductor wafers, a solution (epoxy solution) with a viscosity of 3,000 Cps was discharged to an object, such as a substrate, 50 times in an amount of 10_, and the basis for its use The dispenser head of the present invention is used to evaluate the process capability index Cpk of the dispenser device. The results are as follows. -18-(14)! 234223 10mg Cpk test 10.50

From the results of the above graph, Wei can see that the maximum discharge is 〖〇. 丨 3., the minimum discharge is 9.9 6, the range of the discharge is 0.27, and the average discharge is 1 〇03. And 'The calculated average distribution (standard) of the discharge volume is 0.05. 0 more.' The interim process range (Cpk USL) is 0.03, the allowable process range (Cpk LSL) is 3.45, and the process capability index Cpk. Department 3.03. It is considered excellent if the process capability index C p k of the dispenser device is 1.3 or more based on the discharge amount of 10 mg. Therefore, the dispenser device of the present invention has a process capability index which is 23 to 3 times higher than that of the conventional dispenser device, and is therefore considered to be excellent. As described above, the dispenser device for manufacturing a semiconductor wafer according to the present invention is advantageous in that a high-viscosity solution is accurately discharged, and a desired solution amount is used during a high-speed dotization process using an equilibrium controller. Exhaust accurately, thereby extending the useful life of the dispenser device and expanding the use of the dispenser device. Another advantage of the distributor device is that the huge load applied to the distributor device effectively prevents the operation errors of the distributor device to be minimized. The distributor device has a precise structure, which is convenient to disassemble and reassemble and 淸 -19 -1234223 (15) Clean the dispenser device, and the screw constituting this dispenser device can be easily replaced according to its purpose, thereby ensuring the interchangeability with other types of dispenser devices. The invention has been described by way of illustration, and it will be understood that the terminology used is intended to be illustrative rather than restrictive. Many modifications and variations of the present invention are possible, based on the above teachings. Therefore, it will be understood that, within the scope of the additional claims, the present invention may be implemented in different ways except for the specific description. [Brief description of the drawings] The above and other objects, features, and advantages of the present invention will be more clearly understood from the following detailed description and accompanying drawings, in which: FIG. 1 is a schematic cross-sectional view of a conventional distribution pump; 2 is a perspective view of the dispenser device according to the present invention; FIG. 3 is an exploded perspective view of the dispenser device according to the present invention; FIG. 4 is a cross-sectional side view of the dispenser device according to the present invention; An exploded perspective view of the balance controller of the actuator device; Figs. 6a and 6b are partial enlarged sectional views of the balance controller according to the present invention, wherein Fig. 6a illustrates the balance controller before axially adjusting the height of a screw And Figure 6b illustrates the balance controller after adjusting the height of the screw in the axial direction; Figure 7 is a partial enlarged sectional view of the balance controller of the present invention, in which a spring is loose;-20-1234223 (16) Fig. 8 is an enlarged view of a needle member assembled with a shell part, which constitutes a dispenser device according to the present invention; Fig. 9 is an enlarged view of part F of Fig. 8; Figs. 0 and] 1 are explained separately Have different The pitch of the present inventions inch screw. Comparison table of main components S · L Injection container B Screw S- 1 Connection tube 10 Main body 11 Upper support 12 Motor assembly inner diameter 13 Lower support 14 Assembly groove 15 Positioning bolt hole 16 Positioning bolt 20 Shell 2 1 Solution channel 22 Enlarged stepped inner diameter 23 Under enlarged stepped 丨 eight "diameter 23 a solution outlet □ 24 external thread lower 25 positioning groove

-21-1234223 (17) 2 7 Carbide tube 3 0 Screw 3 1 Lower bolt 3 1a Spiral groove 3 2 Shaft ο η JJ connecting shaft 3 5 Upper sister ϊ Oil ring 3 6 No oil ring 3 7 〇 Ring 40 Balance controller 4 1 Bearing shell 4'2, 4 3 Bearing 44 Outer joint preload Yun. Rm. 45 Mita whole bolt 46 Inner joint preload nut 47b Locating bolt 47 Local adjustment nut 4 7a Internal thread Inner diameter 48 Spring adjusting bolt 49a Externally threaded portion 49b Internally threaded portion 50 Spring 60 Needle member 6] Needle

-22-(18) 1234223 62-pin yun.ΠΤ63 head 64 V-shaped valve seat 1 00 connection structure 120 connection screw cap 200 servo motor 2 10 drive shaft

-twenty three-

Claims (1)

(2) 1234223-Spring adjusting bolt, fasten the adjusting screw to a spring 'located between the lower part of the spring adjusting bolt' so that it can be easily pressed by the white thread with the internal thread of the adjusting bolt ~], Shang Wu Oil ring. 2. If the sub-bearing of item 1 in the scope of the patent application includes angular spheres with inner and outer joints 3. If the sub-item of the scope of patent application in item 1 has upper and lower magnification stepped inner diameters in the solution channel system portion, and Via the connecting tube of the device formed on the inner wall of the shell, it communicates vertically. The lower part of the stepped external thread is enlarged and the head of the needle is accommodated therein. The needle cover of the lower part of the external thread of the shell is installed to the lower part. The split tube of item 3 of the patent application is inserted into the solution channel. 5 · If the collar of the third item of the scope of the patent application is inserted into the enlarged stepped inner diameter, and the upper and lower positions are mounted on the connecting shaft, the lower side of the oil-free ring contacts, so that the solution channel gas The connecting shaft is connected to the servo 6 by a joint structure. For example, the lower bolt of the patent application scope includes a spiral pattern and a spiral groove, and the spiral groove moves a solution, and the end of the lower bolt forms a bolt to guard the lower bolt. The end of the contact with the needle member is formed to block the needle member in a watertight manner. The internal thread of the bolt; and the spring adjustment bolts on the side and on the upper side without the oil ring, the adapter device, each bearing. Dispenser device, one of which is formed perpendicularly to the entire solution outlet of the shell and the inner diameter of the injection volume is defined in the shell part, and the needle is expanded by stepped inner diameter by tethering. Distributor device, one of which is a carbon distributor device, in which the screw and the lower sleeveless ring are attached to the collar o-ring system to tightly accommodate the lower bolt and the drive shaft of the motor. Device, in which the screw is rounded to smoothly move the tapered and rounded tip, the V-shaped valve seat of the head is connected