TWI229892B - Apparatus for removing dusts from substrates - Google Patents

Abstract

An apparatus for removing dusts from substrates is disclosed. The apparatus comprises a machine body having an air-blowing mechanism and a dust-collecting mechanism mounted thereon. The dust-collecting mechanism includes a dust-collecting cover and a trough board assembly with a plurality of cassette splints. The cassette splints are connected at the end of the opening of the dust-collecting cover. The substrate cassettes have two opposed ends of the opening correspondingly toward the air-blowing mechanism and the dust-collecting cover so as to be clipped by the cassette splints. When a pressed air blow the substrate cassettes, the dusts blown from the substrates in the substrate cassettes are absorbed into the dust-collecting cover without random float resulting in contamination.

Description

1229892 Conductor seals semiconductors, etc. For basic packaging, refer to the main machine and physical mechanism cassette board of the substrate between the substrate card and the substrate], so that the cover, when the dust cover is the second technical field of the substrate 】 It is related to a kind of substrate s 杳, which is stronger and stronger. ^ Deer am β is a device, especially related to the dust-to-inside substrate cleaning device. The assembly process is implemented in a clean room. It is usually a wafer carrier board. In various processes, such as sticky crystals and boarding, it is difficult to contaminate the process with dust, welding or sealing waste, so it needs to be fixed. Picture 1 of removing the substrate. Between the process steps, a plurality of substrates 20 boxes 10 ′ are provided for transportation. The substrate cassette i 〇 has an open end 11 for inserting and removing the substrates. The hand-held blower is used to blow off the pollutants on the substrate or semiconductor wafer, which will fly in the clean room and cause secondary pollution. The purpose is to install the system. The purpose is to install on the substrate card. The purpose of blowing and sucking is to provide a substrate cleaning blower and a front end of a slot plate open mouth. Five kinds of substrates, description of the invention (1) [The invention belongs to the invention is applicable to the [non-previously known semi-substrates using substrates as wires or sealants, etc., resulting in post-contamination. Please place it on a wall of two boxes 12 to 20, which is known to grab back and forth but is blown away. [Summary of the Invention The present invention includes a mechanism, the set of a plurality of substrate holding kun structure and the dust box, The suction object avoids a dust extraction hood on the machine according to the present invention. The two opening mechanisms of the box of the dust extraction hood provide pressure for the substrate to disperse Carson pollutants and provide a clean device, which is structured with a collection set and the slot plate. It is used to clamp the pollution that should be blown off by the blower to the substrate card.洁 装置 Its its

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It is installed on a machine with a mechanism dust cover to board a cassette. These bases have a popular mechanism, a collection mechanism, and a mobile machine to movably connect the collection mechanism. The collection mechanism and a plurality of The slot plate group of the cassette board is used to install a board card at the blowing mechanism by using the machine! The point is fixed by the movement of the moving mechanism to avoid the structure. The movement includes a holding of a plurality of base barriers. As a damage-free air blowing mechanism, the purpose of this month is to provide a substrate cleaning device that includes a blower. A gas mechanism and a collection mechanism, the collection mechanism includes a slot plate group having a plurality of cassette plates, and the cassette plates S ′ include a plurality of gas blowing frames connected to these Blowing nozzles to use a lifting nozzle to clean the substrates in the substrate cassettes, a dust extraction hood and a plurality of supporting mechanisms with substrate cards to lift the blowing nozzles and a bracket.

And the pollutants blown off by the substrates are collected by the dust hood. The substrate cleaning device according to the present invention mainly comprises a machine, an air blowing mechanism and a collecting mechanism, wherein the blowing mechanism and the collecting mechanism are arranged on an operating platform of the machine, and the blowing mechanism The air mechanism includes a plurality of air blowing nozzles for providing a pressure air flow. The material collecting mechanism includes a dust suction cover and a slot plate group with a plurality of cassette plates, wherein the card g plates are installed in the The front edge of the opening of the dust extraction hood is used to hold the substrate cassette. Preferably, the slot plate group is an adjustable slot plate group, which connects adjacent S-boards with an elastic element to Clamping substrate cassettes of different widths, the collecting mechanism can be connected to a moving mechanism to move the dust extraction hood horizontally on the operation platform, so as to facilitate the dust extraction hood to collect the pollutants blown off by the substrates. ,

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[Embodiment] With reference to the drawings, the present invention will be described by the following embodiments. According to a specific embodiment of the present invention, please refer to FIGS. 2, 3 and 4. A substrate cleaning device i 00 mainly includes a machine 110, an air blowing mechanism 120 and a collection mechanism! 30. The machine 11 has a working platform m and appropriate control switches and driving mechanisms. The control switches and driving mechanisms are such as the pressure adjustment of a pneumatic valve, 4 and a counter, 5 and so on. One side of the working platform 111 is provided for the blowing mechanism 丨 20, and the other side of the working platform 丨 丨 i is provided for the collection mechanism 1 30. In this embodiment, the collection mechanism 13 A moving mechanism 4o can be installed, and a slide rail 112 and a stopper 113 are provided on the operating platform 111 of the machine 11o. The air blowing mechanism 120 includes a plurality of air blowing nozzles 121. The air blowing nozzles 121 are arranged on a support 122, and the support 122 is connected to a lifting mechanism 123, which can be a pneumatic cylinder. , The air blowing nozzles 1 2 1 are moved up and down, and the air blowing nozzles 丨 2 1 are capable of blowing down the pollutants on the substrate 20 in the substrate cassette 10 as shown in FIG. 1. In the machine 1 1 0, the counter 1 1 5 can set the number of times that the blowing nozzles 121 move up and down in each substrate cleaning step, and adjust the pressure 114 with the pneumatic valve pressure of the machine 11 The blowing pressure of the blowing nozzles 121 is adjusted. The collecting mechanism 1 3 0 includes a vacuum hood 1 31 and a slot plate group 1 3 2. The slot plate group 1 3 2 has a plurality of cassette plates 1 3 3. The convergence opening of the dust cover 1 31 The dust collecting tube 1 35 is connected to the front edge of the open mouth of the suction cover 1 31. The cassette plates 1 3 3 are used to clamp a plurality of substrate cassettes i 〇 [as shown in FIG. 5. ], Preferably, connected between the adjacent cassette plates 1 3 3

Page 161229892 V. Description of the invention (4) An elastic element 1 3 4 is connected to elastically clamp the substrate cassettes 丨 〇, until the distance between the cassette plates 133 is adjusted (as in the third circle) In the present embodiment, the moving mechanism 1 4 0 is connected to the dust collecting cover 1 31 of the collecting mechanism 1 30, and the moving mechanism 1 4 0. It can be a pneumatic cylinder, and the collecting mechanism 130 further includes sliders 1 3 6 at the two ends of the slot plate group 132. The sliders 1 3 6 extend the slide rails of the machine 110.丨 丨 2 slide-. Movement, so that the collecting mechanism 1 30 horizontally moves along the slide rail 1 12 between the operating platform ill of the machine 110, in order to facilitate the collection of the dust collecting cover 131 of the collecting mechanism 13 The substrates 20 are blown down by contaminants. Please refer to FIGS. 4 and 5, a plurality of substrate cassettes 10 containing a substrate 20 are clamped between corresponding cassette plates 1 3 3, and the cassette plates 1 3 3 are used to clamp each substrate. The cassette wall 12 of the cassette 10, and the two open ends of the substrate cassettes 10 correspond to the air blowing nozzle 121 corresponding to the dust extraction cover 131 and the air blowing mechanism 120, respectively. Please refer to FIGS. 5 and 6 again, The moving mechanism 140 pushes the collection mechanism 130 forward, that is, the moving mechanism 140 pushes the dust cover 1 31 and the cassette plates 133 and is held by the cassette plates 133. The substrate cassette 10 is moved forward, and the collecting mechanism 1 30 is linearly moved along the linear slide rail 112 of the machine 110 until the substrate cassettes 10 stop at the stop 113 of the machine 110. After that, please refer to FIG. 7, the air blowing nozzles 1 21 provide a pressure air flow to one of the open ends 11 of the substrate cassettes 10, and use the lifting mechanism 123 to vertically lift the bracket 1 2 2 At the same time, the air blowing nozzles 21 are raised and lowered at the same time, so that the pressure air flow provided by the air blowing nozzles 1 2 1 can uniformly blow off the pollutants on the substrate 20 in the substrate cassettes ′ 0. When providing a negative pressure by the suction of the dust cover 131, so that the pollutants can be collected to be blown to the dust cover 31 Shu, in order to avoid

Page 17 1229892 V. Description of the invention (5) Preventing the pollutants blown off by these substrates 20 from flying around in the clean room and causing secondary pollution, which has industrial applicability. The scope of protection of the present invention shall be subject to the appended < application. Any changes and modifications made by those skilled in the art, within the boundaries of the T and W glazed solid boundaries, shall not depart from the spirit and scope of the present invention. All belong to the protection domain of the present invention.

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[Brief description of the drawings] Figure 1: A perspective view of a conventional substrate cassette; Figure 2: A perspective view of a substrate cleaning device according to the present invention; * Figure 3 ·· A substrate cleaning device according to the present invention Partial three-dimensional schematic diagram of the cassette plate connected to the elastic element; Figure 4 ... Side view of the substrate cleaning device according to the present invention; Figure 5 ... According to the present invention, the substrate cleaning device is in a state where the substrate cassette is moved 3D schematic diagram; FIG. 6 · According to the present invention, the substrate cleaning device is not intended to be moved on the side of the substrate cassette, and FIG. 7 is a schematic side view of the substrate cleaning device in the state of blowing pollutants according to the present invention. Simple explanation of the component symbols End 12 Box wall slide rail 113 Seed bar 115 Counter air blowing nozzle 122 Holder dust cover 132 Slot plate group elastic element moving mechanism 135 Dust collecting tube

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Claims (1)

1229892 VI. Scope of patent application [Scope of patent application] 1. A substrate cleaning device, including: a machine; an air blowing mechanism, which is provided on the machine; the air blowing mechanism includes a plurality of air blowing nozzles; And a collecting mechanism, which is arranged on the machine, the collecting mechanism includes a dust collecting cover and a trough plate group, wherein the trough plate group has a plurality of card® plates, which is arranged in front of the dust collecting cover Edge for holding a plurality of substrate cassettes. 2. The substrate cleaning device as described in item 1 of the scope of the patent application, further comprising a moving mechanism connected to the collecting mechanism to move the collecting mechanism to facilitate the collection of the dust collecting cover of the collecting mechanism. The substrates are blown away by contaminants. 3. The substrate cleaning device according to item 2 of the scope of patent application, wherein the moving mechanism is a pneumatic cylinder. 4. The substrate cleaning device as described in item 1 or 2 of the scope of patent application, wherein the machine is provided with a stopper at the blowing mechanism. 5. The substrate cleaning device according to item 1 or 2 of the scope of patent application, wherein the slot plate group is an adjustable pitch and is provided with a plurality of elastic elements for the cassette plates to elastically clamp the substrate cards. cassette. 6. The substrate cleaning device described in item 1 or 2 of the scope of patent application, wherein the machine is provided with a slide rail for horizontal movement of the collecting mechanism. 7. According to the substrate cleaning exhibition described in item 1 or 2 of the scope of patent application, the air blowing mechanism in ° includes a bracket which is connected to the air blowing nozzles. 1229892 6. The scope of patent application mouth. 8. The substrate cleaning device according to item 7 of the scope of the patent application, wherein the bracket is connected with a lifting mechanism for lifting the blowing nozzles. 9. The substrate cleaning device according to item 8 of the scope of patent application, wherein the lifting mechanism is a pneumatic cylinder. Page 21