TWI224891B - Filter device of balanced structure thin-film bulk acoustic resonators (FBAR) and duplexer using this device - Google Patents

Filter device of balanced structure thin-film bulk acoustic resonators (FBAR) and duplexer using this device Download PDF

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TWI224891B
TWI224891B TW92137212A TW92137212A TWI224891B TW I224891 B TWI224891 B TW I224891B TW 92137212 A TW92137212 A TW 92137212A TW 92137212 A TW92137212 A TW 92137212A TW I224891 B TWI224891 B TW I224891B
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Taiwan
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bulk acoustic
film bulk
acoustic wave
filter
thin film
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TW92137212A
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Chinese (zh)
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TW200522514A (en
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Chien-Hsiung Tai
Tai-Kang Shing
Ching-Cheng Tien
Yao-Tung Lee
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Ind Tech Res Inst
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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

A filter device having balance structure thin-film bulk acoustic resonators (FBAR) and a duplexer using this device are provided, which use one thin-film bulk acoustic resonators thickness (same resonant frequency) to simultaneously meet the specifications of filter and duplexer. Therefore, production complexity and process instability resulting from the traditional balanced and unbalanced structures using multiple thickness thin-film bulk acoustic resonators are avoided. Besides, this invention adopts inductors or capacitors to replace a part of the thin-film bulk acoustic resonators so the number of the filter using thin-film bulk acoustic resonators is reduced. At the same time, the additional transmission line of the duplexer application is unnecessary so the area of the duplexer and the parasitic problem can be reduced.

Description

12248911224891

五、發明說明(1) 【發明所屬之技術領域 本發明係關於一種無線.通信裝置中之濾 士 是一種平衡式架構之薄膜體聲波共振子濾波壯^ ’特別 【先前技術】 目箣;慮波( f i 11 e r )在無線通信中被廣、、乏 每年約需上百億個。主要可分為LC濾波器、、1 + 預估 表面聲波濾波器及薄膜體聲波濾波器等數稽— 4里’而薄膜辦声史 波濾波器因具有體積小、易達高頻、及低插入損失^ :耳 性,且具有與I C整合之能力,故最被看好。 、寻斗寸 目前以薄膜體聲波共振子來製作濾波养, ° 3文異^零^ 加 構來區分有平衡式(Balanced type )與非平衡气 木 (unbalanced type)兩種濾波器,平衡式架椹 所示,係由第-薄膜體聲波共振子A與第二;;體=』 振子B組成格型(Lattice Type)架構,非平衡共 『第2圖』所示,係由第一薄膜體聲波共振子A與第^二^^ 脰聋波共振子B組成階梯式(Ladder type)架構。兩者Y 1 要差異為『第1圖』中的電路架構為上下左右均呈對的主 且無須透過外加的非平衡轉平衡架構的轉換電路,如苒 balun等元件,來與其他平衡式架構元件連接,以ϋ 抗匹配與訊號轉換。非平衡式架構的濾波器最大 、阻 要額外的轉換電路,且由於接地的原因,容 、冰,需 訊的干擾。 勿又到外在雜 例如’美國第6 2 7 8 34 2號提出一種平衡式的電路加 來設計濾波器,其透過面積的控制,來調整帶通濾波木哭 1224891 五、發明說明(2) 頻寬轉降(rol 1-of f),然而其架構仍需許多薄膜體聲波 共振子個數與不同厚度,除了造成整個濾波器的面積過大 之外,對於製造上的複雜度及製程的穩定度是一大考驗。 若針對雙工器中的濾波器規格而言,依照不同系統需求, 其所要求傳送信號與接收信號之間的警戒頻帶(guard band)通常小於載波頻率的2%頻寬,且傳送信號與接收信 號的頻寬通常為載波頻率的3 %頻寬,這也就是說傳送端的 濾波器與接收端的濾波器都需要有相當陡峭的頻寬轉降 (rolhof f)。另外,為了確保傳送信號與接收信號不會 相互干擾,則兩個帶通濾波器彼此的斥帶(s t 〇 p b a n d )在另 一帶通濾波器的通帶(passband)的衰減量(attenuation) 需要符合規格。另一方面為了確保自傳送端送出的信號不 會反饋至接收端而能夠直接送至天線端將信號送出,要讓 接收濾波器輸入端的輸入阻抗為高阻抗。 目前薄膜體聲波共振子平衡式濾波器或雙工器中,所 需的薄膜體聲波共振子個數過多使得面積縮小不易外,且 與非平衡式濾波器或雙工器一樣都需要多種不同的薄膜體 聲波共振子厚度,因而造成了製程上的複雜性與不穩定 度。另外,利用薄膜體聲波共振子來設計雙工器中的傳送 端濾波器與接收端濾波器時,當傳送端濾波器及接收端濾 波器的輸入端與天線端連接後,傳送信號與接收信號的區 隔主要是根據信號本身的頻率來決定,因此要確保從傳送 端送出的信號能夠直接送至天線,且要避免由此信號反潰 至接收端,而將接收端的低雜訊放大器(L N A )貫穿而損V. Description of the invention (1) [Technical field to which the invention belongs The present invention relates to a wireless communication device. The filter in the communication device is a thin-film bulk acoustic wave resonator filter with a balanced architecture. ^ 'Special [prior art]. Waves (fi 11 er) are widely used in wireless communications, and there are about 10 billion of them each year. It can be mainly divided into LC filter, 1 + estimated surface acoustic wave filter and thin film bulk acoustic wave filter, etc. — 4 miles', while thin film acoustic wave filters are small, easy to reach high frequency, and low Insertion loss ^: Ear-like, and has the ability to integrate with IC, so it is the most promising. Xundouinch currently uses thin-film bulk acoustic wave resonators to make filter culture. ° 3 different texts ^ zero ^ addition structure to distinguish between balanced (Balanced type) and unbalanced gas (Unbalanced type) filters, balanced As shown in the frame, it is composed of the first-film bulk acoustic wave resonator A and the second; body = "oscillator B constitutes a Lattice Type structure. As shown in" Figure 2 "in an unbalanced system, it is composed of the first film The bulk acoustic wave resonator A and the second ^^^ deaf wave resonator B form a ladder-type architecture. The difference between the two Y 1 is that the circuit architecture in [Figure 1] is the main circuit that is paired up and down, left and right, and does not need to pass through an additional unbalanced to balanced architecture conversion circuit, such as 苒 balun and other components to compare with other balanced architectures. Components are connected for anti-matching and signal conversion. The filter of the unbalanced architecture has the largest resistance, requires additional conversion circuits, and due to grounding, capacitance, ice, and interference required by the information. Do not go to external miscellaneous. For example, the United States No. 6 2 7 8 34 2 proposed a balanced circuit to design a filter, which controls the band-pass filter through the area control. 1248891 V. Description of the invention (2) Bandwidth reduction (rol 1-of f), however, its structure still requires many thin-film bulk acoustic resonators with different numbers and different thicknesses. In addition to causing the area of the entire filter to be too large, it has a manufacturing complexity and process stability. Degree is a big test. For the filter specifications in the duplexer, according to different system requirements, the guard band between the required transmission signal and the received signal is usually less than 2% of the carrier frequency, and the transmitted signal and reception The bandwidth of the signal is usually 3% of the carrier frequency, which means that both the filter at the transmitting end and the filter at the receiving end need to have a fairly steep bandwidth roll-off (rolhof f). In addition, in order to ensure that the transmitted signal and the received signal do not interfere with each other, the attenuation of the repulsion band (st oopband) of the two band-pass filters in the passband of the other band-pass filter must comply with specification. On the other hand, in order to ensure that the signal sent from the transmitting end will not be fed back to the receiving end and can be sent directly to the antenna end to send out the signal, the input impedance of the input end of the receiving filter must be high impedance. In the current thin film bulk acoustic wave resonator balanced filter or duplexer, the number of required thin film bulk acoustic wave resonators is too large, which makes it difficult to reduce the area, and like the unbalanced filter or duplexer, a variety of different The thickness of the thin-film bulk acoustic wave resonator causes complexity and instability in the manufacturing process. In addition, when a thin-film bulk acoustic wave resonator is used to design a transmitting-end filter and a receiving-end filter in a duplexer, when the input ends of the transmitting-end filter and the receiving-end filter are connected to the antenna end, the transmission signal and the reception signal are transmitted. The segmentation is mainly determined by the frequency of the signal itself. Therefore, it is necessary to ensure that the signal sent from the transmitting end can be directly sent to the antenna, and to avoid the signal from collapsing to the receiving end, the low-noise amplifier (LNA) at the receiving end Break through

第7頁 1224891 五、發明說明(3) 害。 一般為了解決此問題,是在接收端濾波器與天線之間 加一段四分之一波長傳輸線作為相位偏移形成高阻抗以反 射傳送端的信號。此種方式最大的缺點在於此傳輸線會增 加整個雙工器的面積,而且會產生不必要的寄生效應。 平技 薄之 衡 種知 之術 平 一習 構技 之 供決 架知 露 提解 式習 揭 於以 衡決 所 在藉 平解 明 的, 用以 發 目置 使藉 本 要裝。種, ’ 主波點一器 的 的滤缺供工 目 明子及提雙。要 發振題於之點主 本共問在置缺的 ,波的的裝及明 題聲在目波題發 問體存一濾問本 的膜所另子的據 1上薄置的振在根 容以之裝明共存, 内於構波發波所此 明鑒架濾本聲器因 發 式之 體工 t 衡術 膜雙 第.....體元·,調 一有間間膜抗量以 有括之之薄電減, 具包端端且一衰間 一置二四,第的之 有裝第第同一帶端 括該與與相;斥三 包,端端度率整第 ,端一三厚頻調與 置四第第之振以端 裝第於於子共,二 波一接接振同間第 濾與耦耦共相之於 子端,,波之端接 振三子子聲上四耦 共第振振體以第, 波一共共膜個與件 聲、波波薄一端元 體端聲聲二有一抗 膜二體體第具第電 薄第膜膜、子於二 之一薄薄一振接第 構、一二第共搞一 架端第第中波,及 式一 一一其聲件以Page 7 1224891 V. Description of Invention (3) Harm. In general, to solve this problem, a quarter-wavelength transmission line is added between the filter at the receiving end and the antenna as a phase shift to form a high impedance to reflect the signal at the transmitting end. The biggest disadvantage of this method is that this transmission line will increase the area of the entire duplexer and will produce unnecessary parasitic effects. Ping Ji Bo Zhi Heng Zhi Zhi Ju Ping Yi Xi Constructing Skills Determining the Structure of Demonstration Explaining the Explaining Types of Exercises Explained by the use of balance to explain the solution, used to develop the purpose of the loan to be installed. Species, ’the main wave point of a filter for the job of Mingzi and mention double. If you want to ask the question, the master and the master are asking the question, and the sound of the wave and the sound of the question are on the question of the eye and the question body has a filter. Let ’s pretend to coexist, and the built-in filter of the built-in vocal filter is based on the body structure of the wave-shaped body. The balance of the membrane is equal to the volume of the body ..... A thin electric reduction with brackets is included, with a terminal end and a decay between one and two. The first one includes the first and the same end including the AND and the phase; One to three thick tones and a fourth-order oscillator are connected to the sub-terminal by the end, two waves and one connected to the same filter and coupling are connected to the sub-terminal, and the end of the wave is connected to the three-terminal. Acoustic four-coupling vibrating body is composed of two parts, one is wave, one is wave, one end is body, one is acoustic, one is anti-body, one is second, and one is thin. One thin and one vibrating the first structure, one or two, and a second middle wave, and the one by one sound

構 第8頁 1224891 五、發明說明(4) 端 一第三端與一第四端,該裝置包括有 第一薄膜體 聲波共振子,耦接於第一端與第四端之間;一第二薄膜體 聲波共振子,耦接於第二端與第三端之間,其中第一、第 薄膜體聲波共振子之厚度相同,且薄膜體聲波共振子具 有一個以上之相同共振頻率;一第一電抗元件,||接於第 一端與第二端之間,以調整斥帶的衰減量;以及一第二電 抗元件,耦接於第三端與第四端之間,以調整斥帶的衰減 量。 根據本發明的另一目的,本發明所揭露之使用平衡式 架構之薄膜體聲波共振子濾波裝置之雙工器,具有一第一 埠、一第二埠以及一第三埠,包括有:一傳送濾波器,耦 接於第 膜體聲 耦接於 薄膜體 構之薄 波共振 構之薄 的中之 根 波裝置 即共振 組成的 穩定度 一埠與 波共振 第一埠 聲波共 膜體聲 子具有 膜體聲 濾波裝 據本發 及使用 頻率都 平衡式 ,另一 第二埠之間,係由一個以上平衡式架構之薄 子串聯組成濾波裝置;以及一接收濾波器, 與第三埠之間,係由一個以上平衡式架構之 振子串聯組成濾波裝置;其中該等平衡式架 波共振子濾波裝置之厚度相同,且薄膜體聲 一個以上之相同共振頻率。該等等平衡式架 波共振子濾波裝置係為根據本發明之主要目 置。 明所揭露平衡式架構之薄膜體聲波共振子濾 該裝置之雙工器,本發明利用單一厚度(亦 一樣)的薄膜體聲波共振子搭配電感或電容 電路架構,一方面降低製程上的複雜性與不 方面則減少濾波器所需的薄膜體聲波共振子建 第 8 页 1224891 V. Description of the invention (4) The terminal is a third terminal and a fourth terminal, and the device includes a first thin film bulk acoustic wave resonator coupled between the first terminal and the fourth terminal; a first Two thin-film bulk acoustic wave resonators are coupled between the second end and the third end, wherein the first and second thin-film bulk acoustic wave resonators have the same thickness, and the thin-film bulk acoustic wave resonators have more than one of the same resonance frequency; A reactance element is connected between the first end and the second end to adjust the attenuation of the repulsion band; and a second reactance element is coupled between the third end and the fourth end to adjust the repulsion band. The amount of attenuation. According to another object of the present invention, the duplexer of the thin film bulk acoustic wave filter device using the balanced structure disclosed in the present invention has a first port, a second port, and a third port, including: A transmission filter, which is coupled to the first bulk acoustically coupled to the thin-wave resonance structure of the thin-film structure. The thin-medium root-wave device is the stability of the resonance composition. The membrane bulk acoustic filtering device is balanced according to the origin and the use frequency. The other second port is composed of more than one thin frame of a balanced structure in series to form a filtering device; and a receiving filter is connected to the third port. The filter device is composed of more than one vibrator of a balanced structure in series; wherein the thickness of the balanced frame wave resonator filter devices is the same, and the film bulk sound has more than one of the same resonance frequency. Such balanced frame-wave resonator filter devices are the main object according to the present invention. The thin-film bulk acoustic wave resonator of the balanced structure disclosed by the Ming Dynasty is a duplexer of the device. The present invention uses a single-thickness (also the same) thin-film bulk acoustic wave resonator with an inductor or capacitor circuit structure, on the one hand, reducing the complexity of the process Reducing the need for thin-film bulk acoustic resonators for filters

第9頁 1224891 五、發明說明(5) 個數來達到縮小面積的需求。另外透過外加電感或電容與 薄膜體聲波共振子不同串並聯的架構,使得雙工器中的兩 個帶通濾波器其通帶頻寬符合規格、斥帶頻帶的衰減量達 定值,且控制從天線端往接收端濾波器看進去的輸入阻 抗,確保其維持高阻抗。 根據本發明所揭露平衡式架構之薄膜體聲波共振子濾 波裝置及使用該裝置之雙工器,使得自傳送端送出的信號 直接透過天線傳送出去而不會傳入接收端,免除多加一傳 輸線的需要,因而減小雙工器的面積與避免不必要的寄生 效應。同時在輸出端亦免去了外加的轉換電路或元件,與 雜訊干擾的問題。 有關本發明的特徵與實作,茲配合圖示作最佳實施例 詳細說明如下。 【實施方式】 首先,請參考『第3圖』,為本發明所揭露之薄膜體 聲波共振子濾波裝置之電路拓樸之第一實施例,係以單一 厚度(亦即共振頻率都相同)之薄膜體聲波共振子搭配電抗 元件(電容或電感)交叉連接構成平衡式架構濾波器的拓 lik 樸。 如『第3圖』所示,包括有一第一薄膜體聲波共振子A 耦接於第一端1與第二端2之間,第二薄膜體聲波共振子B 耦接於第3端與第4端之間,第一電抗元件Cp 1耦接於第一 端1與第四端4,第二電抗元件Cp2耦接於第二端2與第3端3 之間。在此實施例中,第一電抗元件係為第一電容,第二Page 9 1224891 V. Description of the invention (5) The number is required to reduce the area. In addition, through the structure of different series and parallel connection of the thin film bulk acoustic wave resonator with an additional inductor or capacitor, the two band-pass filters in the duplexer have a passband bandwidth that meets the specifications, and the attenuation of the repulsion band reaches a fixed value, and controls Look at the input impedance of the filter from the antenna to the receiver to ensure that it maintains high impedance. The thin-film bulk acoustic wave filter device of the balanced structure and the duplexer using the device according to the present invention allow signals sent from the transmitting end to be transmitted directly through the antenna without being transmitted to the receiving end, eliminating the need for an additional transmission line. Is needed, thus reducing the area of the duplexer and avoiding unnecessary parasitic effects. At the same time, the external converter circuit or components are eliminated, and the problem of interference with noise is eliminated. Regarding the features and implementation of the present invention, the preferred embodiment will be described in detail with reference to the drawings. [Embodiment] First, please refer to "Figure 3", which is the first embodiment of the circuit topology of the thin-film bulk acoustic wave filter device disclosed in the present invention, which has a single thickness (that is, the resonance frequency is the same). A thin-film bulk acoustic resonator and a reactive element (capacitive or inductive) are cross-connected to form a balanced topology filter. As shown in "Figure 3", it includes a first thin-film bulk acoustic wave resonator A coupled between the first end 1 and the second end 2, and a second thin-film bulk acoustic wave resonator B coupled between the third end and the third end. Between the four terminals, the first reactance element Cp1 is coupled between the first terminal 1 and the fourth terminal 4, and the second reactance element Cp2 is coupled between the second terminal 2 and the third terminal 3. In this embodiment, the first reactance element is a first capacitor, and the second

第10頁 1224891 五、發明說明(6) 電抗元件係為第二電容。 關於本發明的第二實施例請參考『第4圖』,係以電 感作為電抗元件。如『第4圖』所示,包括有一第一薄膜 體聲波共振子A編接於第一端1與第二端2之間,第二薄膜 體聲波共振子B搞接於第三端3與第四端4之間,第一電抗 元件Lpl耦接於第一端1與第四端4之間,第二電抗元件Lp2 耦接於第二端2與第3端3之間。在此實施例中,第一電抗 元件Lpl係為第一電感,第二電抗元件Lp2係為第二電感。 關於本發明的第三實施例請參考『第5圖』,如圖所示, 包括有一第一薄膜體聲波共振子馬接於第一端1與第四端 4之間,第二薄膜體聲波共振子B輕接於第二端2與第三端3 之間,第一電抗元件Csl耦接於第一端1與第二端2,第二 電抗元件C s 2耦接於第三端3與第四端4之間。在此實施例 中,第一電抗元件Csl係為第一電容,第二電抗元件Cs2係 為第二電容。 關於本發明的第四實施例請參考『第6圖』,係將第 三實施例中的電容以電感取代,如圖所示,第一薄膜體聲 波共振子A耦接於第一端1與第四端4之間,第二薄膜體聲 波共振子B躺接於第二端2與第三端3之間,第一電抗元件 Lsi耦接於第一端1與第二端2,第二電抗元件Ls2耦接於第 三端3與第四端4之間。在此實施例中,第一電抗元件L s 1 係為第一電感’第二電抗元件L s 2係為第二電感。 在上述第一至第四實施例中之濾波裝置,第一薄膜體 聲波共振子A與第二薄膜體聲波共振子B與第一電抗元件與Page 10 1224891 V. Description of the invention (6) The reactance element is a second capacitor. Regarding the second embodiment of the present invention, please refer to "Fig. 4", which uses an inductor as a reactance element. As shown in "Figure 4", it includes a first thin-film bulk acoustic wave resonator A connected between the first end 1 and the second end 2, and a second thin-film bulk acoustic wave resonator B connected between the third end 3 and Between the fourth terminal 4, the first reactance element Lpl is coupled between the first terminal 1 and the fourth terminal 4, and the second reactance element Lp2 is coupled between the second terminal 2 and the third terminal 3. In this embodiment, the first reactance element Lpl is a first inductance, and the second reactance element Lp2 is a second inductance. Please refer to "Figure 5" for the third embodiment of the present invention. As shown in the figure, it includes a first thin-film bulk acoustic resonator horse connected between the first end 1 and the fourth end 4, and a second thin-film bulk acoustic wave. The resonator B is lightly connected between the second end 2 and the third end 3, the first reactance element Csl is coupled to the first end 1 and the second end 2, and the second reactance element C s 2 is coupled to the third end 3 And fourth end 4. In this embodiment, the first reactance element Csl is a first capacitor, and the second reactance element Cs2 is a second capacitor. Please refer to "Figure 6" for the fourth embodiment of the present invention. The capacitor in the third embodiment is replaced by an inductor. As shown in the figure, the first thin-film bulk acoustic wave resonator A is coupled to the first terminal 1 and Between the fourth end 4, the second thin-film bulk acoustic wave resonator B lies between the second end 2 and the third end 3, and the first reactance element Lsi is coupled between the first end 1 and the second end 2, and the second The reactance element Ls2 is coupled between the third terminal 3 and the fourth terminal 4. In this embodiment, the first reactance element L s 1 is a first inductance 'and the second reactance element L s 2 is a second inductance. In the filtering device in the above first to fourth embodiments, the first thin film bulk acoustic wave resonator A and the second thin film bulk acoustic wave resonator B and the first reactance element and

第11頁 1224891 五、發明說明(7) 第二電抗元件組成平衡式架構,其中所有的薄膜體聲波共 !振子的共振頻率都一樣(單一厚度),並且薄膜體聲波共 i振子至少具有一種或兩種以上的共振頻率。而電抗元件係 用來調整斥帶的衰減量。 由於薄膜體聲波共振子本身的特性,使得濾波器的頻 率響應在通帶的高頻側或低頻側會有很深的彎曲點 notch),也造成很陡a肖的頻寬轉降(roll-off)。透過 第一至第四實施例中的電抗元件(電感或電容),可以控 |制這些彎曲點的位置,如『第7圖』與『第8圖』所示,彎 曲點的位置隨著不同的電容而改變。 關於本發明所揭露的第五實施例,其電路架構圖請參 |考『第9圖』,係將第一實施例中的薄膜體聲波共振子分 I別並聯一第三電感Lp3以及第四電感Lp4,或如『第1 0圖』 所示之第六實施例,將第一實施例中的薄膜體聲波共振子 分別串聯一第三電感L s 3以及第四電感L s 4。 第五與第六實施例的結構係利用外加的調整元件(如 電感或電容)與薄膜體聲波共振子串聯或並聯以使得濾波 器的頻寬更能符合所要求的規格。這是因為受限於薄膜體 聲波共振子本身的△ f (並聯共振頻率f a與串聯共振頻率f r的 差,由材料決定)限制,整個濾波器的頻寬可能不合要 求,因此第五與第六實施例的結構可克服上述的問題而增 |加其等效△ f。 經由串聯或並聯外加電感於薄膜體聲波共振子的方式 (如『第8圖』),可以增加其等效A f。而當薄膜體聲波共振Page 111224891 V. Description of the invention (7) The second reactance element constitutes a balanced structure, in which all the thin-film bulk acoustic wave resonators have the same resonance frequency (single thickness), and the thin-film bulk acoustic wave resonator i has at least one or More than two resonance frequencies. The reactance element is used to adjust the attenuation of the repulsion band. Due to the characteristics of the thin-film bulk acoustic wave resonator, the frequency response of the filter will have a deep bending point (notch) at the high-frequency side or the low-frequency side of the passband, and it will also cause a sharp roll-off of the bandwidth (roll- off). Through the reactance elements (inductance or capacitance) in the first to fourth embodiments, the positions of these bending points can be controlled. As shown in "Figure 7" and "Figure 8", the positions of the bending points vary with The capacitance changes. Regarding the fifth embodiment disclosed in the present invention, the circuit architecture diagram is shown in the reference | "Figure 9", the thin film bulk acoustic resonator in the first embodiment is connected in parallel with a third inductor Lp3 and a fourth inductor The inductor Lp4, or the sixth embodiment shown in FIG. 10, connects the thin film bulk acoustic resonator in the first embodiment with a third inductor L s 3 and a fourth inductor L s 4 in series, respectively. The structures of the fifth and sixth embodiments are that an external adjustment element (such as an inductor or a capacitor) is used in series or in parallel with the thin film bulk acoustic resonator to make the bandwidth of the filter better meet the required specifications. This is because it is limited by the △ f (the difference between the parallel resonance frequency fa and the series resonance frequency fr, determined by the material) of the thin-film bulk acoustic wave resonator itself. The bandwidth of the entire filter may be unsatisfactory, so the fifth and sixth The structure of the embodiment can overcome the above problems and increase its equivalent Δf. The equivalent A f can be increased by adding inductors in series or parallel to the thin-film bulk acoustic resonator (such as "Figure 8"). When the film bulk acoustic resonance

第12頁 1224891 五、發明說明(8) 子與電容串聯或並聯,則會減少等效A f,也因此會縮小濾 波器通帶的頻寬。 第七貫施例為透過此並聯電感的方式所設計之滤波 架構,請參考『第11圖』,為一種帶通濾波器,其頻率響 應圖請蒼考『第12圖』。 應用上述所揭露的實施例,可製作雙工器,包括有一 接收濾波器與傳送濾波器。在設計雙工器中的接收濾波器 Rx尚須注意到由傳送端所送出的信號是否會反潰回接收 端,而將低雜訊放大器給貫穿。要確保接收濾波器從傳送 端看進去的阻抗於傳送濾波器的通帶頻帶内為高阻抗。至 於在設計傳送濾波器時,只需考慮頻寬與衰減量的問題。 根據以上的觀察,將兩個帶通濾波器連接成薄膜體聲波共 振子雙工器,如『第1 3圖』所示,係由一接收渡波器Rx與 傳送濾波器Tx組成,在此實施例中,接收濾波器Rx與傳送 濾波器Tx均由兩個本發明所揭露之第一實施例之薄膜體聲 波共振子濾波器組成,其中,傳送濾波器係耦接於第一埠 1 〇與第二埠2 0之間,接收濾波器係耦接於第一埠1 0與第三 埠3 0之間。 另一雙工器實施例請參考『第1 4圖』,其中傳送端濾 波器係由兩個第七實施例之薄膜體聲波共振子濾波器組 成。其插入損耗與反射損耗便有如『第1 5圖』所示的特 性。 本發明利用電感或電容與薄膜體聲波共振子組成平衡 式的濾波器及雙工器電路架構,不但僅使用單一厚度的薄Page 12 1224891 V. Description of the invention (8) If the series capacitor or capacitor is connected in series or in parallel, the equivalent A f will be reduced, and therefore the bandwidth of the filter's passband will be reduced. The seventh embodiment is a filtering structure designed by this parallel inductor. Please refer to "Figure 11" for a band-pass filter. Please refer to "Figure 12" for the frequency response diagram. By applying the above-disclosed embodiment, a duplexer can be fabricated, including a receiving filter and a transmitting filter. When designing the receiving filter Rx in the duplexer, it is necessary to pay attention to whether the signal sent by the transmitting end will reverse back to the receiving end, and pass the low noise amplifier through. Make sure that the impedance seen by the receiving filter from the transmitting end is high impedance in the passband band of the transmitting filter. As for the design of the transmission filter, only the issues of bandwidth and attenuation need to be considered. Based on the above observations, the two band-pass filters are connected to form a thin-film bulk acoustic wave duplexer. As shown in "Figure 13", it consists of a receiver wave Rx and a transmission filter Tx, which is implemented here. In the example, the receiving filter Rx and the transmitting filter Tx are each composed of two thin film bulk acoustic wave resonator filters according to the first embodiment disclosed in the present invention, wherein the transmitting filter is coupled to the first port 10 and Between the second port 20, the receiving filter is coupled between the first port 10 and the third port 30. For another embodiment of the duplexer, please refer to "Figure 14", in which the transmitting-end filter is composed of two thin-film bulk acoustic wave resonator filters of the seventh embodiment. Its insertion loss and reflection loss have characteristics as shown in "Figure 15". The invention utilizes an inductor or a capacitor and a thin-film bulk acoustic wave resonator to form a balanced filter and a duplexer circuit structure, which not only uses a single thin

第13頁 1224891 五、發明說明(9) 膜體聲波共振子以降低製程上的複雜性與不穩定度,同時 搭配電感或電容以減少所需的薄膜體聲波共振子個數來達 到縮小面積的需求。透過這些電感或電容除了可以控制濾 波器在斥帶的衰減量,並在接收濾波器輸入端,讓天線端 往接收端濾波器看進去為高阻抗,使得自傳送端送出的信 號不會反潰至接收端,而能夠直接送至天線端將信號送 出。如此就不需在天線端與接收端之間增加額外的傳輸 線,可縮小雙工器的面積與避免因外加傳輸線所產生的寄 生效應。 雖然本發明以前述之較佳實施例揭露如上,然其並非 用以限定本發明,任何熟習相像技藝者,在不脫離本發明 之精神和範圍内,當可作些許之更動與潤飾,因此本發明 之專利保護範圍須視本說明書所附之申請專利範圍所界定 者為準。Page 131224891 V. Description of the invention (9) The film bulk acoustic wave resonator reduces the complexity and instability in the process, and at the same time, the inductor or capacitor is used to reduce the number of thin film bulk acoustic wave resonators required to reduce the area demand. In addition to these inductors or capacitors, you can control the attenuation of the filter in the repulsion band, and at the input end of the receiving filter, let the antenna end look into the receiving end filter as a high impedance, so that the signal sent from the transmitting end will not reverse. To the receiving end, and can be directly sent to the antenna end to send out the signal. In this way, there is no need to add an additional transmission line between the antenna end and the receiving end, which can reduce the area of the duplexer and avoid parasitic effects caused by the additional transmission line. Although the present invention is disclosed in the foregoing preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art of similarity can make some modifications and retouching without departing from the spirit and scope of the present invention. The patent protection scope of the invention shall be determined by the scope of the patent application scope attached to this specification.

第14頁 1224891 圖式簡單說明 第1圖係為先前技術所揭露之平衡式架構之薄膜體聲波共 振子濾波器; 第2圖係為先前技術所揭露之非平衡式架構之薄膜體聲波 共振子濾波器; 第3圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第一實施例; ~ 第4圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第二實施例; ~ 第5圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第三實施例; · 第6圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第四實施例; 第7圖係為濾波器的頻率響應; 第8圖係為濾波器的頻率響應; 第9圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第五實施例; 第1 0圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第六實施例; 第1 1圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之第七實施例; ¥ 第1 2圖係為本發明所揭露之平衡式架構之薄膜體聲波共振 子濾波器之頻率響應圖; 第1 3圖係為本發明所揭露之使用平衡式架構之薄膜體聲波 共振子濾波器之雙工器;Page 141224891 Brief description of the diagram. Figure 1 is a thin-film bulk acoustic wave resonator with a balanced structure disclosed in the prior art. Figure 2 is a thin-film bulk acoustic wave resonator with an unbalanced structure disclosed in the prior art. Filter; Figure 3 is the first embodiment of the thin-film bulk acoustic wave filter of the balanced structure disclosed in the present invention; ~ Figure 4 is the thin-film bulk acoustic wave resonator of the balanced structure disclosed in the present invention; The second embodiment of the filter; ~ FIG. 5 is the third embodiment of the thin-film bulk acoustic wave filter of the balanced structure disclosed in the present invention; and FIG. 6 is the balanced structure of the present disclosure. The fourth embodiment of the thin film bulk acoustic wave filter; FIG. 7 is the frequency response of the filter; FIG. 8 is the frequency response of the filter; and FIG. 9 is the balanced structure disclosed in the present invention. Fifth embodiment of a thin-film bulk acoustic wave filter; FIG. 10 is a sixth embodiment of the thin-film bulk acoustic wave filter of the balanced structure disclosed in the present invention; FIG. 11 is a drawing of the present invention Expose The seventh embodiment of the thin-film bulk acoustic wave resonator filter with balanced structure; ¥ FIG. 12 is a frequency response diagram of the thin-film bulk acoustic wave filter with balanced structure disclosed in the present invention; FIG. A duplexer of a thin film bulk acoustic wave filter using a balanced structure disclosed in the present invention;

第15頁 1224891 圖式簡單說明 第1 4圖係為本發明所揭露之使用平衡式架構之薄膜體聲波 共振子濾波器之雙工器;以及 第1 5圖係為第1 4圖之雙工器之插入損耗與反射損耗。 【圖式符號說明】 A 第一薄膜體聲波共振子 B 第二薄膜體聲波共振子Page 151224891 Brief Description of Drawings Figures 14 and 4 are the duplexers of the thin film bulk acoustic wave filter using the balanced structure disclosed in the present invention; and Figure 15 is the duplex of Figures 14 and 14 Device's insertion loss and reflection loss. [Illustration of Symbols] A The first film bulk acoustic wave resonator B The second film bulk acoustic wave resonator

Cpl 第一電抗元件Cpl first reactance element

Cp2 第二電抗元件Cp2 second reactance element

Csl 第一電抗元件Csl first reactance element

Cs2 第二電抗元件 L p 1 第一電抗元件Cs2 Second reactance element L p 1 First reactance element

Lp2 第二電抗元件 LSI 第一電抗元件Lp2 second reactance element LSI first reactance element

Ls2 第二電抗元件Ls2 second reactance element

Lp3 第三電感 L p 4 弟四電感Lp3 The third inductance L p 4 The fourth inductance

Ls3 第三電感Ls3 third inductor

Ls4 第四電感Ls4 fourth inductor

Tx 傳送濾波器Tx transmit filter

Rx 接收濾波器 1 第一端 2 第二端 3 第三端 4 第四端Rx receive filter 1 first end 2 second end 3 third end 4 fourth end

第16頁 1224891 圖式簡單說明 10 第一埠 2 0 第二埠 30 第三埠Page 16 1224891 Simple illustration of the diagram 10 First port 2 0 Second port 30 Third port

Claims (1)

1224891 六、申請專利範圍 1. 一種平衡式架構之薄膜體聲波共振子濾波裝置,具有一 第一端、一第二端、一第三端與一第四端,該裝置包括 有·· 一第一薄膜體聲波共振子,耦接於該第一端與該第 二端之間; 一第二薄膜體聲波共振子,耦接於該第三端與該第 四端之間,其中該第一、第二薄膜體聲波共振子之厚度 相同,該等薄膜體聲波共振子具有一個以上之相同共振 頻率; 一第一電抗元件,耦接於該第一端與該第四端之 間,以調整斥帶的衰減量;以及 / 一第二電抗元件,耦接於該第二端與該第三端之 間,以調整斥帶的衰減量。 2 .如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一電抗元件與該第二電抗元 件係為一電容。 3 .如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一電抗元件與該第二電抗元 件係為一電感。 4.如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振子 更分別地並聯有一電感,以調整濾波器通帶的頻寬。 5 .如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振子1224891 VI. Application patent scope 1. A thin film bulk acoustic wave filter device with a balanced structure, which has a first end, a second end, a third end, and a fourth end. The device includes ... A thin film bulk acoustic wave resonator is coupled between the first end and the second end; a second thin film bulk acoustic wave resonator is coupled between the third end and the fourth end, wherein the first The thicknesses of the second thin-film bulk acoustic wave resonators are the same, and the thin-film bulk acoustic wave resonators have more than one of the same resonance frequency; a first reactance element is coupled between the first end and the fourth end to adjust An attenuation amount of the repulsion band; and / or a second reactance element coupled between the second end and the third end to adjust the attenuation amount of the repulsion band. 2. The thin film bulk acoustic wave resonator device of the balanced structure according to item 1 of the scope of patent application, wherein the first reactance element and the second reactance element are a capacitor. 3. The thin film bulk acoustic wave resonator device of the balanced structure according to item 1 of the scope of patent application, wherein the first reactance element and the second reactance element are an inductor. 4. The thin film bulk acoustic wave resonator filter device of the balanced structure according to item 1 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have an inductor connected in parallel to adjust the passband of the filter. bandwidth. 5. The thin film bulk acoustic wave resonator device of the balanced structure according to item 1 of the scope of patent application, wherein the first and second thin film bulk acoustic wave resonators 第18頁 1224891 六、申請專利範圍 更分別地並聯有一電容,以調整濾波器通帶的頻寬。 6 .如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振子 更分別地串聯有一電感,以調整濾波器通帶的頻寬。 7 .如申請專利範圍第1項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振子 更分別地串聯有一電容,以調整濾波器通帶的頻寬。 8. —種濾波裝置,係由一個以上如申請專利範圍第1項所 述之平衡式架構之薄膜體聲波共振子串聯組成濾波裝 置。 9. 一種平衡式架構之薄膜體聲波共振子濾波裝置,具有一 第一端、一第二端、一第三端與一第四端,該裝置包括 有·· 一第一薄膜體聲波共振子,耦接於該第一端與該第 四端之間; 一第二薄膜體聲波共振子,耦接於該第二端與該第 三端之間,其中該第一、第二薄膜體聲波共振子之厚度 相同,該等薄膜體聲波共振子具有一個以上之相同共振 頻率; 一第一電抗元件,耦接於該第一端與該第二端之 間,以調整斥帶的衰減量;以及 一第二電抗元件,耦接於該第三端與該第四端之 間,以調整斥帶的衰減量。 1 0 .如申請專利範圍第9項所述之平衡式架構之薄膜體聲波Page 18 1224891 6. Scope of patent application A capacitor is connected in parallel to adjust the bandwidth of the passband of the filter. 6. The thin film bulk acoustic wave filter device of the balanced structure according to item 1 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have an inductor connected in series to adjust the passband of the filter. bandwidth. 7. The thin film bulk acoustic wave resonator filter device of the balanced structure according to item 1 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have a capacitor connected in series to adjust the passband of the filter. bandwidth. 8. A filtering device is a filtering device composed of more than one thin film bulk acoustic wave resonator with a balanced structure as described in item 1 of the scope of patent application. 9. A thin-film bulk acoustic wave filter device with a balanced structure having a first end, a second end, a third end, and a fourth end, the device includes a first thin-film bulk acoustic wave resonator Is coupled between the first end and the fourth end; a second thin-film bulk acoustic wave resonator is coupled between the second and third ends, wherein the first and second thin-film bulk acoustic waves The thicknesses of the resonators are the same, and the thin-film bulk acoustic resonators have more than one resonance frequency; a first reactance element is coupled between the first end and the second end to adjust the attenuation of the repulsion band; A second reactance element is coupled between the third terminal and the fourth terminal to adjust the attenuation of the repulsion band. 10. Thin film bulk acoustic wave with balanced structure as described in item 9 of the scope of patent application 第19頁 1224891 六、申請專利範圍 共振子濾波裝置,其中該第一電抗元件與該第二電抗 元件係為一電容。 11.如申請專利範圍第9項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一電抗元件與該第二電抗 元件係為一電感。 1 2 .如申請專利範圍第9項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振 子更分別地並聯有一電感,以調整濾波器通帶的頻 寬。 1 3 .如申請專利範圍第9項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振 子更分別地並聯有一電容,以調整濾波器通帶的頻 寬。 1 4 .如申請專利範圍第9項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一.、第二薄膜體聲波共振 子更分別地串聯有一電感,以調整濾波器通帶的頻 寬。 1 5 .如申請專利範圍第9項所述之平衡式架構之薄膜體聲波 共振子濾波裝置,其中該第一、第二薄膜體聲波共振 子更分別地串聯有一電容,以調整濾波器通帶的頻 寬。 1 6 . —種濾波裝置,係由一個以上如申請專利範圍第9項所 述之平衡式架構之薄膜體聲波共振子串聯組成濾波裝 置。Page 19 1224891 VI. Scope of patent application The resonator filter device, wherein the first reactance element and the second reactance element are a capacitor. 11. The thin film bulk acoustic wave resonator device of the balanced structure according to item 9 of the scope of the patent application, wherein the first reactance element and the second reactance element are an inductor. 1 2. The thin film bulk acoustic wave filter device of the balanced structure according to item 9 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have an inductor connected in parallel to adjust the filter passband. Bandwidth. 13. The thin film bulk acoustic wave filter device of the balanced structure according to item 9 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have a capacitor connected in parallel to adjust the filter passband. Bandwidth. 14. The thin film bulk acoustic wave resonator device with a balanced structure as described in item 9 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have an inductor connected in series to adjust the filter pass. Bandwidth of the band. 15. The thin film bulk acoustic wave filter device of the balanced structure according to item 9 of the scope of the patent application, wherein the first and second thin film bulk acoustic wave resonators have a capacitor connected in series to adjust the filter passband. Bandwidth. 16. A filter device is a filter device composed of more than one thin film bulk acoustic wave resonator with a balanced structure as described in item 9 of the scope of patent application. 第20頁 1224891 六、申請專利範圍 1 7. —種雙工器,係使用平衡式架構之薄膜體聲波共振子 濾、波裝置組成,具有一第一璋、一第二埠以及一第三 埠,包括有: 一傳送濾波器,耦接於該第一埠與該第二埠之 間,係由一個以上平衡式架構之薄膜體聲波共振子串 聯組成濾波裝置;以及 一接收濾波器,耦接於該第一埠與該第三埠之 間,係由一個以上平衡式架構之薄膜體聲波共振子串 聯組成濾、波裝置, 其中該等平衡式架構之薄膜體聲波共振子濾波裝 置之厚度相同,該等薄膜體聲波共振子具有一個以上 之相同共振頻率。 1 8 .如申請專利範圍第1 7項所述之雙工器,其中每一該等 平衡式架構之薄膜體聲波共振子濾波裝置具有一第一 端、一第二端、一第三端與一第四端,並包括有: 一第一薄膜體聲波共振子,耦接於該第一端與該 第二端之間; 一第二薄膜體聲波共振子,耦接於該第三端與該 第四端之間,其中該第一、第二薄膜體聲波共振子之 厚度相同,該等薄膜體聲波共振子具有一個以上之相 同共振頻率; 一第一電抗元件,耦接於該第一端與該第四端之 間,以調整斥帶的衰減量;以及 一第二電抗元件,耦接於該第二端與該第三端之Page 201224891 VI. Scope of patent application 1 7. — A duplexer consisting of a thin-film bulk acoustic wave filter and a wave device using a balanced structure, which has a first port, a second port, and a third port Including: a transmission filter coupled between the first port and the second port, which is a filter device composed of more than one film bulk acoustic wave resonator in a balanced structure in series; and a reception filter coupled Between the first port and the third port, more than one thin film bulk acoustic wave resonator in a balanced structure is connected in series to form a filtering and wave device, wherein the thin film bulk acoustic wave filter devices in the balanced structure have the same thickness These thin film bulk acoustic resonators have more than one of the same resonance frequency. 18. The duplexer as described in item 17 of the scope of patent application, wherein each of these thin film bulk acoustic wave filter devices with a balanced structure has a first end, a second end, a third end and A fourth end includes: a first thin film bulk acoustic wave resonator coupled between the first end and the second end; a second thin film bulk acoustic wave resonator coupled between the third end and Between the fourth end, where the thicknesses of the first and second thin-film bulk acoustic wave resonators are the same, the thin-film bulk acoustic wave resonators have more than one resonance frequency of the same; a first reactance element is coupled to the first Between the second terminal and the fourth terminal to adjust the attenuation of the repulsion band; and a second reactance element coupled between the second terminal and the third terminal 第21頁 1224891 六、申請專利範圍 間,以調整斥 1 9 .如申請專利範 抗元件與該第 2 0 .如申請專利範 抗元件與該第 2 1.如申請專利範 第二薄膜體聲 整濾波器通帶 2 2 .如申請專利範 第二薄膜體聲 整濾波器通帶 2 3 .如申請專利範 第二薄膜體聲 整濾波器通帶 2 4 .如申請專利範 第二薄膜體聲 整濾波器通帶 2 5 .如申請專利範 平衡式架構之 帶的衰減 圍第18項 二電抗元 圍第18項 二電抗元 圍第18項 波共振子 的頻寬。 圍第18項 波共振子 的頻寬。 圍第18項 波共振子 的頻寬。 圍第18項 波共振子 的頻寬。 圍第17項 薄膜體聲 量 。 所述之雙工器,其中該第一電 件係為一電容。 所述之雙工器,其中該第一電 件係為 所述之 更分別 電感 雙工器 地並聯 所述之 更分別 所述之 更分別 所述之 更分別 雙工器 地並聯 雙工器 地串聯 雙工器 地串聯 ,其中該第 有一電感,以調 —— 、 ,其中該第一、 有一電容,以調 ,其中該第 有一電感,以調 ,其中該第一、 有一電容,以調 ——* 、 端 、 一丨一 第二端 ,其中每一該等 裝置具有一第一 ,並包括有: 一第一薄膜體聲波共振子 所述之雙工器 波共振子濾波 第三端與一第四端 耦接於該第一端與該 第四端之間; 一第二薄 第三端之間, 膜體聲波共振子,耦接 其中該第一、第二薄膜 於該第二端與該 體聲波共振子之Page 21 1224891 Sixth, the scope of the patent application, to adjust the rejection 19. For example, the patented patented reactance element and the 20th. For example, the patented patented reactance element and the second 1. For the patented second film bulk sound The entire filter passband 2 2. As the patent application of the second film bulk acoustic filter pass band 2 3. As the patent application of the second film bulk acoustic filter pass band 2 4. As the patent application of the second membrane body acoustic filter Acoustic shaping filter passband 25. For example, the band width of the wave-resonator of the band 18 of the second-reactance element of the second-reactive element of the band of the attenuation range of the patent-pending balanced structure. Bandwidth around the 18th wave resonator. Bandwidth around the 18th wave resonator. Bandwidth around the 18th wave resonator. The 17th volume of the film volume. In the duplexer, the first electrical component is a capacitor. In the duplexer, the first electrical component is parallel to the more separate inductive duplexer, the more separate said duplexer, and the more separate duplexer parallel to the duplexer ground. The ground of the series duplexer is connected in series, where the first has an inductor to adjust,-, where the first, has a capacitor to adjust, where the first has an inductor to adjust, where the first, has a capacitor to adjust- — *, Terminal, a 丨 a second terminal, each of these devices has a first, and includes: a first thin film bulk acoustic wave resonator described by the duplexer wave resonator filter third end and a The fourth end is coupled between the first end and the fourth end; between a second thin third end, a membrane bulk acoustic resonator is coupled between the first and second films at the second end and Of the bulk acoustic wave resonator 第22頁 1224891 六、申請專利範圍 厚度相同,且具有一個一上之相同共振頻率; 一第一電抗元件,耦接於該第一端與該第二端之 間,以調整斥帶的衰減量;以及 一第二電抗元件,耦接於該第三端與該第四端之 間,以調整斥帶的衰減量。 2 6 .如申請專利範圍第2 5項所述之雙工器,其中該第一電 抗元件與該第二電抗元件係為一電容。 2 7 .如申請專利範圍第2 5項所述之雙工器,其中該第一電 抗元件與該第二電抗元件係為一電感。 2 8 .如申請專利範圍第2 5項所述之雙工器,其中該第一、 第二薄膜體聲波共振子更分別地並聯有一電感,以調 整濾波器通帶的頻寬。 2 9 .如申請專利範圍第2 5項所述之雙工器,其中該第一、 第二薄膜體聲波共振子更分別地並聯有一電容,以調 整濾波器通帶的頻寬。 3 0 .如申請專利範圍第2 5項所述之雙工器,其中該第一、 第二薄膜體聲波共振子更分別地串聯有一電感,以調 整濾波器通帶的頻寬。 3 1.如申請專利範圍第2 5項所述之雙工器,其中該第一、 第二薄膜體聲波共振子更分別地串聯有一電容,以調 整濾波器通帶的頻寬。Page 22 1224891 6. The scope of the patent application is the same, and has the same resonance frequency as the first one; a first reactance element is coupled between the first end and the second end to adjust the attenuation of the repulsion band. And a second reactance element coupled between the third end and the fourth end to adjust the attenuation of the repulsion band. 26. The duplexer according to item 25 of the scope of patent application, wherein the first reactance element and the second reactance element are a capacitor. 27. The duplexer according to item 25 of the scope of patent application, wherein the first reactance element and the second reactance element are an inductor. 28. The duplexer according to item 25 of the scope of patent application, wherein the first and second thin film bulk acoustic resonators have an inductor connected in parallel to adjust the bandwidth of the passband of the filter. 29. The duplexer according to item 25 of the scope of patent application, wherein the first and second thin film bulk acoustic resonators have a capacitor connected in parallel to adjust the bandwidth of the passband of the filter. 30. The duplexer according to item 25 of the scope of the patent application, wherein the first and second thin-film bulk acoustic wave resonators have an inductor connected in series to adjust the bandwidth of the passband of the filter. 3 1. The duplexer according to item 25 of the scope of patent application, wherein the first and second thin-film bulk acoustic wave resonators have a capacitor connected in series to adjust the bandwidth of the filter passband. 第23頁Page 23
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