TWI220013B - Conveying apparatus - Google Patents

Abstract

A conveying apparatus for conveying a substrate along a conveying route. The conveying apparatus comprises a plurality of first axles, a plurality of first rollers, a plurality of second axles and a plurality of second rollers. The first rollers are respectively disposed on the first rollers along the conveying route. The first roller has a roller surface and the roller surface contact with the bottom of the substrate. The second rollers are respectively disposed on the second rollers along the conveying route. Each of the second rollers locates between two first rollers. The second roller has a roller surface and the roller surface contact with the side of the substrate for conveying a substrate along the conveying route.

Description

1220013 V. Description of the invention (l) [Technical field to which the invention belongs] The present invention relates to a transfer mechanism, and more particularly, to a transfer mechanism suitable for transferring a rectangular substrate along a transfer path, and can effectively avoid the transfer and transfer process. A transfer mechanism that causes the edges of rectangular substrates to be damaged. [Previous Technology] In response to the rapid progress of the multimedia society, most of them benefit from the leaps and bounds of semiconductor components or human-machine display devices. As far as displays are concerned, cathode ray tubes (CRT) have always dominated the display market in recent years because of their excellent display quality and economy. However, for the environment where individuals operate most terminals / display devices on the table, or from the perspective of environmental protection, if the trend of energy saving is predicted, there are still many problems in cathode ray tubes due to space utilization and energy consumption. The need for _ light, thin, short, small, and low power consumption does not effectively provide a solution. Therefore, liquid crystal displays (LCD) with superior characteristics such as high picture quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of the market. The liquid crystal display is mainly composed of two glass substrates and a liquid crystal layer. The glass substrate usually needs to be sent to a wet processing equipment for a wet processing process, such as spraying a reaction liquid on the glass substrate ( (Such as etching solution or stripping solution to remove photoresist) to make patterned circuits on the glass substrate, and then go through a cleaning solution (such as deionized water or organic solution) before performing subsequent processes. It is worth noting that, during the above-mentioned wet processing of the glass substrate, the purpose of transferring the gastric glass substrate is achieved by a transfer mechanism.

11086rwf.ptd Page 8 1220013 V. Description of the invention (2) Figure 1 A is a schematic side view of a conventional transmission mechanism, and Figure 1 B is a schematic front view of a conventional transmission mechanism. Please refer to FIG. 1A and FIG. 1B at the same time. The conventional transmission mechanism 1 0 0 is mainly composed of a plurality of first rotating shafts 1 1 0, a plurality of first rollers 1 2 0, and a plurality of second rotating shafts 1 3 0 and a plurality of second rollers 1 40. The first roller 1 2 0 is disposed at both ends of the first rotating shaft 1 1 0, and the first roller 1 2 0 has a roller portion 1 2 2 and a guide portion 1 2 4, and the roller portion 1 2 2 has a roller The surface 1 2 2 a is used to bear the bottom edge of a rectangular substrate 10 (for example, a rectangular glass substrate), and the guide portion 1 2 4 has a guide inclined surface 1 inclined toward the roller surface 1 2 2 a. 2 4 a. It is worth noting that the first roller 1 2 0 is usually an active roller, and the first roller 1 is driven by the gravity of the rectangular substrate 10 and the frictional force generated between the first roller 12 and the rectangular substrate 10 when rotating. 1 2 0 can push the rectangular substrate 10 to a transport path. Stomach In addition, the second roller 1 40 is disposed on the second rotating shaft 130, and the second roller 1 40 corresponds to the top of the first roller 120. The second roller 1 40 has a roller surface 14 0 a, and the roller surface 1 4 0 a is used to press the top edge of the rectangular substrate 10. In other words, the first substrate 120 and the second roller 140 hold the rectangular substrate 10 and further push the rectangular substrate 10 to make the rectangular substrate 10 more stable as it moves along the conveying path.

2P FIG. 2A and FIG. 2B are schematic plan views illustrating the offset transfer of a rectangular substrate caused by a conventional transfer mechanism. Here, in order to clearly show the deviation of the rectangular substrate 10, the second rotating shaft 130 and the second roller 140 disclosed above are omitted. Please refer to FIG. 2A and FIG. 2B at the same time. It is not completely fixed on the first rotating shaft 110, so when the first roller 120 is conveying the shaped substrate 10, it will turn inward (as shown in FIG. 2A) or outward (as shown in FIG. 2B).

11086r.wf.ptd Page 9 1220013 V. Description of the invention (3)) The phenomenon of shifting of the rectangular substrate 10 will cause the rectangular substrate 10 to shift due to squeezing or poor contact. In other words, when the rectangular substrate 10 is shifted, the rectangular substrate 1 will be rolled along with the first roller 1 2 0. It will slide along the guide slope 1 2 4 a, resulting in a rectangular substrate 1 0 conveying path. Fully deviate to one side and cannot move along the originally set transmission path. Fig. 3 is a schematic view showing a rectangular substrate broken by a conventional transfer mechanism. Please refer to FIG. 3, if the rectangular substrate 10 is squeezed or has poor contact, it will slide along the guide slope 1 2 4 a. However, when a large offset occurs, the rectangular substrate 10 is susceptible to The moment effect (ie, the holding force) produced by the one roller 12 and the second roller 140 is directly damaging the edge of the rectangular substrate 10, causing different degrees of fragmentation, which seriously affects the quality and safety of the product. [Summary of the Invention] Therefore, an object of the present invention is to provide a conveying mechanism by arranging a roller having a guiding function on a side wall corresponding to a rectangular substrate, so as to effectively maintain the rectangular substrate on a conveying path and avoid The edges of the rectangular substrate were damaged during the transfer. Another object of the present invention is to provide a wet processing equipment, which is provided with the above-mentioned transfer mechanism in the wet processing equipment for transferring a rectangular substrate to facilitate a wet processing process. Based on the above objectives, the present invention provides a transfer mechanism adapted to transfer at least one rectangular substrate along a transfer path. The transfer mechanism is mainly composed of a plurality of first rotating shafts, a plurality of first rollers, a plurality of second rotating shafts, and A plurality of second rollers. The first roller is disposed on the first rotating shaft, and

I1086twt \ ptd Page 10 1220013 V. Description of the invention (4) The feed path is arranged. The first roller has a roller surface that is in contact with the bottom edge of the rectangular substrate. The second rollers are arranged on the second rotating shaft, are arranged in a line along the transmission path, and are located between any two adjacent first rollers. The second roller has a roller surface contacting the side wall of the ejected rectangular substrate so that the rectangular substrate can keep moving along the conveying path. Based on the above purpose, the present invention further provides a wet processing equipment, which is suitable for performing a wet processing process on at least one rectangular substrate. The wet processing equipment is mainly composed of a processing chamber, the aforementioned transfer mechanism, and a reaction. A liquid supply device and a cleaning liquid supply device. The processing chamber has at least one input end and at least one output end, and the transmission mechanism is disposed in the processing chamber. The reaction liquid supply device is arranged adjacent to the input end and above the rectangular substrate. This reaction liquid supply device is adapted to spray a reaction liquid on the top surface of the rectangular substrate. The cleaning liquid supply device is arranged between the reaction liquid supply device and the output end, and is located above the rectangular substrate. This cleaning liquid supply device is suitable for spraying a cleaning liquid on the top surface of the rectangular substrate to transfer the reaction liquid on the rectangular substrate. Wash off. In a preferred embodiment of the invention, a first annular elastic member may be further disposed on the roller surface of the first roller to prevent the bottom edge of the rectangular substrate from directly contacting the roller surface and scratching the rectangular substrate. In addition, the above-mentioned second rollers are, for example, located between every two adjacent first rollers, and are staggered with the first rollers. In addition, the first rollers are, for example, all active rollers, or some are active rollers, the other are passive rollers, and the second rollers are all active or passive rollers, or some are active rollers, and the other are passive rollers.

I I086t.wf.ptd Page 11 1220013 V. Description of the Invention (5) In another preferred embodiment of the invention, the first roller further includes a roller portion and a guide portion. The roller portion has the above-mentioned roller surface, and the guide portion is connected to the roller portion, and the guide portion has a guide inclined surface inclined toward the roller portion to guide a slightly offset rectangular substrate, thereby guiding the inclined surface. Slide back on the roller surface. In another preferred embodiment of the invention A, the transmission mechanism further includes a plurality of third rotation shafts and a plurality of third rollers. The third rollers are arranged on the third rotation shaft and arranged along the transmission path, and are located on the first rollers. Above, the third roller has a roller surface that is in contact with the top edge of the rectangular substrate. In addition, a second ring-shaped elastic member may be further disposed on the roller surface of the third roller to prevent the top edge of the rectangular substrate from directly contacting this roller surface and scratching the rectangular substrate. In addition, the third roller is, for example, all of an active roller or a passive roller, or a part of φ is an active roller and the other is a passive roller. In another preferred embodiment of the invention, the wet processing equipment further includes a gas supply device, wherein the gas supply device is disposed between the reaction liquid supply device and the cleaning liquid supply device and is located above the rectangular substrate. The supply device is adapted to spray a gas on the top surface of the rectangular substrate to blow out the reaction liquid on the rectangular substrate. In addition, the processing room of the wet processing equipment is, for example, a U-shaped processing room to save the overall use space. Because the conveying mechanism of the present invention is provided with a roller having a guiding function at a side wall corresponding to the rectangular substrate, if the rectangular substrate is displaced during the conveying process, the side wall of the rectangular substrate can be pushed up by a roller having a guiding function. In order to effectively keep the rectangular substrate on the predetermined conveying path, and avoid the situation that the edge of the rectangular substrate is damaged during the feeding process. In addition,

11086twf.ptd Page 12 1220013 V. Description of the invention (6) This transfer mechanism is used in a wet processing equipment to transfer rectangular substrates, which can facilitate a wet processing process. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below and described in detail with reference to the accompanying drawings. [Embodiment] Fig. 4 is a schematic diagram showing the configuration of a wet processing equipment according to a preferred embodiment of the present invention. Referring to FIG. 4, the wet processing equipment 2 0 0 is suitable for performing a wet processing process on at least one rectangular substrate 20 (for example, a rectangular glass substrate). The wet processing equipment 2 0 0 is mainly composed of A processing chamber 2 1 0, a reaction liquid supply device 2 2 0, a cleaning liquid supply device 2 3 0, and a transmission 4 mechanism (not shown in the figure) are constituted. The processing chamber 2 10 has at least one ® input terminal 2 12 and at least one output terminal 2 1 4, and the processing chamber 2 10 is, for example, a U-shaped processing chamber to save the overall use space. The reaction liquid supply device 2 2 0 is arranged adjacent to the input terminal 2 1 2 and is located above the rectangular substrate 20. The reaction liquid supply device 2 2 0 is suitable for spraying an acid solution (such as an etching solution or removing photoresist). Stripping solution) on the top surface of the rectangular substrate 20 to make a patterned circuit on the rectangular substrate 2 ◦. The cleaning liquid supply device 2 30 is disposed between the reaction liquid supply device 2 2 0 and the output terminal 2 1 4 and is located above the rectangular substrate 20. The cleaning liquid supply device 2 3 0 is suitable for spraying a cleaning liquid ( Such as deionized water or organic solution) on the top surface of the rectangular substrate 20 to wash away the reaction liquid on the rectangular substrate 20. In addition, the wet processing equipment 2000 also includes a gas supply device 2 40, which is arranged in the reaction liquid supply device 2 2 0 and the cleaning liquid supply device 2 3 0

11086twf · ptd Page 13 1220013 V. Description of the invention (7) and located above the rectangular substrate 20, this gas supply device 2 4 0 is suitable for injecting a gas on the top surface of the rectangular substrate 20 to convert the rectangle Part of the reaction liquid on the substrate 20 is blown out, which makes subsequent cleaning operations easier. _ The conveying mechanism is arranged in this processing chamber 210, and its main function is to horizontally convey the rectangular substrate 20 to perform the above-mentioned wet processing process. The structure of the conveying mechanism will be explained in detail below. Fig. 5A is a schematic side view showing a conveying mechanism according to a preferred embodiment of the present invention, and Fig. 5B is a schematic top view showing a conveying mechanism according to a preferred embodiment of the present invention. See Figures 5 A and 5 B. The transfer mechanism 3 0 0 is adapted to transfer at least one rectangular substrate 20 along a transfer path A. The transfer mechanism 3 0 0 is mainly composed of a plurality of first rotating shafts 3 1 0, a plurality of first rollers 3 2 0, a plurality of A plurality of second rotating shafts 3 3 0 and a plurality of second rollers 3 4 0 are formed. Among them, the first roller 3 2 0 is arranged on the first rotating shaft 3 1 0 and is aligned along the conveying path A. The second roller 3 4 0 is disposed on the second rotating shaft 3 3 0 and is arranged along the conveying path A and is located between any two adjacent first rollers 3 2 0. Taking Figure 5A and Figure 5B as an example, the second roller 3 4 0 is, for example, located between every two adjacent first rollers 3 2 0 and is staggered with the first roller 3 2 0. In addition, the second roller 3 4 0 has a roller surface 3 4 0 a, and the roller surface 3 4 0 a is in contact with the side wall of the rectangular base plate 20. In addition, the first roller 3 2 0 is, for example, all active rollers, or a part is an active roller, the other part is a passive roller, and the second roller 3 4 0, for example, is all active rollers or a passive roller, or a part is an active roller, and the other part It is a passive scroll wheel. _ Figure 6 A is a schematic front view of a conveying mechanism according to a preferred embodiment of the present invention. The first roller 3 2 0 is a roller with the same outer diameter.

11086t \ vf. Ptd Page 14 1220013 V. Description of the invention (8) A roller surface 3 2 0 a, the roller surface 3 2 0 is in contact with the bottom edge of the rectangular substrate 20, and the roller surface 3 2 0 a A first ring-shaped elastic member 3 2 0 b can be further sleeved to prevent the bottom edge of the rectangular substrate 20 from directly contacting the roller surface 3 2 0 a and scratching the rectangular substrate 20. In addition, the transmission mechanism 3 0 of the present invention may be further provided with a plurality of third rotating shafts 3 50 and a plurality of third rollers 3 6 0. The third roller 3 6 0 is disposed on the third rotating shaft 3 5 0 and It is arranged along the conveying path A and is located above the first roller 3 2 0. The third roller 3 6 0 has a roller surface 3 6 0 a, which is in contact with the top edge of the rectangular substrate 20. The first roller 3 2 0 and the third roller 3 6 0 hold the rectangular substrate 20 and push the rectangle. The substrate 20 makes the rectangular substrate 2 Q more stable during transportation. In addition, a second annular elastic member 3 6 0 b can be further set on the roller surface 3 6 0 a of the third roller 3 6 0 to avoid the top edge of the rectangular substrate 20 from directly contacting the roller surface 3 6 0 a The rectangular substrate 20 was scratched. Of course, this embodiment does not limit the configuration of the third rotating shaft 3 50 and the third roller 3 6 0 described above, because the weight of the rectangular substrate 20 itself and the weight of the liquid sprayed during wet processing are such that There is sufficient friction between the rectangular substrate 20 and the first annular elastic member 3 2 0 b on the roller surface 3 2 0 a, which is enough to drive the rectangular substrate 20. It is worth noting that, because the second roller 3 4 0 with the guiding function is arranged on the side wall corresponding to the rectangular substrate 20, when the rectangular substrate 20 slightly shifts during the transportation process, the first The roller surface 3 4 a of the two rollers 3 4 0 a pushes the side wall of the rectangular substrate 20 to effectively maintain the rectangular substrate 20 on the predetermined conveying path A. In addition, the first roller 3 1 0 for conveying the rectangular substrate 20 is designed as a roller with the same outer diameter. When the first roller 3 1 0 and the third roller 3 6 0 jointly hold the rectangular substrate 20, it is possible to avoid habituation. It is known that the edge of the rectangular substrate 20 was damaged during the transfer process.

11086twf.pt.cl Page 15 1220013 V. Description of the Invention (9) Figure 6B is a schematic front view of a transmission mechanism according to another preferred embodiment of the present invention. The main structure of the conveying mechanism disclosed in this figure is substantially the same as the previous embodiment, and the same points are not repeated, and the differences are the same as above. The first roller 3 2 0 follows the conventional roller, and the first roller 3 2 0 has A roller portion 3 2 2 and a guide portion 3 2 4, wherein the roller portion 3 2 2 is connected to the guide portion 3 2 4. The roller portion 3 2 2 has a roller surface 3 2 2 a, which is in contact with the bottom edge of the rectangular base plate 20, and the guide portion 3 2 4 has a guide inclined surface 3 2 4a inclined toward the surface, for guiding slightly. The offset rectangular substrate 20 slides down from the guide inclined surface 3 2 4 a onto the roller surface 3 2 2 a. It is worth noting that from the perspective of stress, when the rectangular substrate 20 slightly shifts and slides on the guide inclined surface 3 2 4 a, if the rectangular substrate 20 has a lateral stress on the first roller 3 2 0 Fgt is greater than the lateral pressing force Fr of the rectangular substrate 20, and the rectangular substrate 20 can automatically slide from the guide slope _ 3 2 4 a to the roller surface 3 2 2 a by its own gravity Fg, otherwise, if the rectangular substrate 20 pairs The lateral stress Fgt generated by the first roller 3 2 0 is smaller than the lateral pressing force F r of the rectangular substrate 20, and the rectangular substrate 20 will be pushed by the lateral stress F gt to continue to shift toward the guide inclined surface 3 2 4a. When the lateral stress Fgt exceeds the critical point B of the gravity Fg of the rectangular substrate 20, the rectangular substrate 20 can no longer slide back onto the roller surface 3 2 2 a, and is easily affected by the first roller 3 2 0 and the third roller 3 6 0 The generated moment effect (ie, the holding force) directly damages the edge of the rectangular substrate 20, so it can be known from the above that the guide slope 324a is one of the main factors that cause the rectangular substrate 20 to break in the conventional technology. In addition, if the second roller 3 4 0 of the present invention is also disposed at the position between any two adjacent first rollers 3 2 0, when both sides of the rectangular substrate 20 have not exceeded the above-mentioned critical point B At the moment, it is subject to the second roller 3 4 0

i1086twf.ptd Page 16 1220013 V. Description of the invention (ίο) The surface 3 4 0 a is pushed back and slides back to the roller surface 3 2 2 a, so the rectangular substrate 20 can be effectively maintained on the predetermined transmission path A. It can also avoid the situation that the edge of the rectangular substrate 20 is damaged during the transportation. In this embodiment, the third-roller 36 can also be omitted, and the rectangular substrate 20 and the roller surface 3 2 can be made by the weight of the rectangular substrate 20 itself and the weight of the liquid sprayed during wet processing. There is sufficient friction between 2a and the rectangular substrate 20 is driven. In addition, in order to prevent the surface of the rectangular substrate 20 from being scratched during the transfer, the same can be applied to the first roller 3 2 0 on the roller surface 3 2 2 a and the third roller 3 6 0 as in the aforementioned preferred embodiment. A first ring-shaped elastic member (not shown) and a second ring-shaped elastic member (not shown) are correspondingly arranged on the roller surface 3 6 0 a. In summary, the conveying mechanism of the present invention is provided with a roller having a guiding function at the side wall corresponding to the rectangular substrate, so that if the rectangular substrate is shifted during the conveying process ®, the The roller pushes the side wall of the rectangular substrate to effectively keep the rectangular substrate on a predetermined conveying path, so that the edge of the rectangular substrate can be prevented from being damaged during the conveying process. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.

H086twf.ptd Page 17 1220013 Brief Description of Drawings Figure 1 A is a schematic side view of a conventional transmission mechanism; Figure 1 B is a schematic front view of a conventional transmission mechanism; Figures 2 A and 2 B It is a schematic plan view showing a rectangular substrate deviating and shifting caused by a conventional conveying mechanism. FIG. 3 is a schematic diagram showing a rectangular substrate fragment caused by a conventional conveying mechanism. FIG. 4 is a diagram showing the wetness of a preferred embodiment of the present invention. 5A is a schematic side view of a conveying mechanism according to a preferred embodiment of the present invention;

FIG. 5B is a plan view illustrating a transmission mechanism according to a preferred embodiment of the present invention, FIG. 6A is a schematic front view illustrating the transmission mechanism according to a preferred embodiment of the present invention; and FIG. Figure B is a schematic front view of a transfer mechanism according to another preferred embodiment of the present invention. [Illustration of diagrammatic labeling] 1 0: rectangular substrate 1 0 0: conveying mechanism 1 1 0: first rotating shaft 1 2 0: first roller 1 2 2: roller portion g 1 2 2 a: roller face stomach 124: guide unit

1 1086t.wf. Ptd Page 18 1220013 Brief description of the diagram 124a: Guide slope 130: Second rotating shaft 140 • Second roller 140a: Roller surface 20 0 Wet processing equipment 21 0 Processing chamber 2 12 Input 21 4 Output End 220 Reactive liquid supply device 23 0 Cleaning liquid supply device 240 Gas supply device 2 0: Rectangular substrate 300 Conveying mechanism 31 0 First rotating shaft 320 First roller 320 Roller portion 3 2 0 b: First elastic rib 3 2 2: : Roller part 3 2 2 a • Roller surface 3 2 2b: First elastic rib 3 2 4:: Guide part 3 2 4a • Guide bevel 3 3 0: = Second rotating shaft 3 4 0:: Second roller _

11086twf.ptd Page 19 1220013

11086twf.ptd Page 20

Claims (1)

1220013 VI. Scope of patent application 1 · A transfer mechanism adapted to transfer at least one rectangular substrate along a feed path, the transfer mechanism includes: a plurality of first rotary shafts;-a plurality of first rollers, the first rollers Respectively arranged on the first rotating shafts and arranged along the conveying path, each of the first rollers has a roller surface contacting the bottom edge of the rectangular substrate; a plurality of second rotating shafts; and a plurality of second Rollers, the second rollers are respectively arranged on the second rotating shafts, are arranged along the conveying path, and are located between any two adjacent first rollers, wherein each of the second rollers has a The roller surface is in contact with the side wall of the rectangular substrate so that the rectangular substrate can keep moving along the conveying path. I 2. The transmission mechanism according to item 1 of the scope of patent application, wherein the second rollers are located between every two adjacent first rollers. 3. The transmission mechanism according to item 1 of the scope of patent application, further comprising a first annular elastic member, wherein the first annular elastic member is disposed on the roller surface of each of the first rollers. 4. The transmission mechanism according to item 1 of the scope of patent application, wherein the first rollers are active rollers. 5. The transmission mechanism according to item 1 of the scope of patent application, wherein the first rollers include a plurality of active rollers and a plurality of passive rollers. 6. The transmission mechanism according to item 1 of the scope of patent application, wherein the two rollers are active rollers. 7. The transmission mechanism as described in item 1 of the scope of patent application, wherein these l1086twf, ptd Page 21 1220013 6. Scope of patent application The second roller includes a plurality of active rollers and a plurality of passive rollers. 8. The transmission mechanism according to item 1 of the scope of patent application, wherein the second rollers are passive rollers. 9 · The transmission mechanism according to item 1 of the scope of patent application, wherein the first roller further comprises: a roller portion having the roller surface; and a guide portion connected to the roller portion, wherein the guide portion There is a guide slope inclined toward the surface of the roller. 1 0 · The transmission mechanism described in item 1 of the scope of patent application, further comprising: a plurality of third rotating shafts; and a plurality of third rollers, the third rollers are respectively disposed on the third rotating shafts, and It is arranged along the conveying path and is located above β of the first rollers. Each of the third rollers has a roller surface that is in contact with the top edge of the rectangular substrate. 11. The transmission mechanism according to item 10 of the scope of patent application, wherein the third rollers are active rollers. 12. The transmission mechanism according to item 10 of the scope of patent application, wherein the third rollers include a plurality of active rollers and a plurality of passive rollers. 13. The transmission mechanism according to item 10 of the scope of patent application, wherein the third rollers are passive rollers. 14. The transmission mechanism as described in item 10 of the scope of patent application, further comprising a second annular elastic member, wherein the second annular elastic member is disposed on the roller surface of each of the third rollers. on. 1 5. — A wet processing equipment, suitable for at least one rectangular substrate I1086twf.ptd Page 22 1220013 VI. Patent application scope A wet processing process, the wet processing equipment includes: a processing chamber with at least one input end and at least one output end; a transfer mechanism adapted to transfer at least one rectangle The substrate moves along a conveying path. The conveying mechanism includes: a plurality of first rotating shafts; a plurality of first rollers, the first rollers are respectively disposed on the first rotating shafts, and are queued along the conveying path, each Some of the first rollers have a roller surface in contact with the bottom edge of the rectangular substrate; a plurality of second rotary shafts; and a plurality of second rollers. The second rollers are respectively disposed on the second rotary shafts and along the Are arranged along the conveying path and are located between any two adjacent first rollers, each of which has a roller surface, and the roller surface is in contact with the side wall of the rectangular substrate so that the The rectangular substrate can keep moving along the conveying path; a reaction liquid supply device is arranged adjacent to the input end and located above the rectangular substrate, and the reaction liquid supply The feeding device is suitable for spraying a reaction liquid on the top surface of the rectangular substrate; and a cleaning liquid supply device is disposed between the acid liquid supply device and the output end, and is located above the rectangular substrate. The feeding device is adapted to spray a cleaning liquid on the top surface of the rectangular substrate to wash the reaction liquid on the rectangular substrate. 16. The wet processing equipment as described in item 15 of the scope of patent application, wherein the second rollers are located between every two adjacent first rollers. 17. Wet processing equipment as described in item 15 of the scope of patent application, and 11086twf.ptd Page 23 1220013 6. The scope of patent application includes a first annular elastic member, wherein the first annular elastic member is arranged on the roller surface of each of the first rollers. 1 8 · The wet processing equipment described in item 15 of the scope of patent application, wherein the first rollers are active rollers. 19 · The wet processing equipment according to item 15 of the scope of patent application, wherein the first rollers include a plurality of active rollers and a plurality of passive rollers. 2 〇 The wet processing equipment described in item 15 of the scope of patent application, wherein the second rollers are active rollers. 2 1 · The wet processing equipment according to item 15 of the scope of patent application, wherein the second rollers include a plurality of active rollers and a plurality of passive rollers. 2 2 · The wet processing equipment according to item 15 of the scope of patent application, wherein the second rollers are passive rollers. < 2 3. The wet processing equipment according to item 15 of the scope of patent application, wherein the first roller further comprises: a roller portion having the roller surface; and a guide portion connected to the roller portion Wherein, the guide portion has a guide inclined surface inclined toward the roller surface. 24. The wet processing equipment as described in item 15 of the scope of patent application, further comprising: a plurality of third rotating shafts; and a plurality of third rollers, the third rollers are respectively disposed on the third rotating shafts, And arranged along the conveying path and located above the first rollers y, wherein each of the third rollers has a roller surface that is in contact with the top edge of the rectangular substrate. 1I086twf.ptd Page 24 1220013 6. Scope of Patent Application 2 5 • The wet processing equipment described in item 24 of the scope of patent application, in which the third rollers are active rollers. 26. The wet processing equipment as described in item 24 of the scope of patent application, wherein the third rollers include a plurality of active rollers and a plurality of passive rollers. 27. The wet processing equipment according to item 24 of the scope of patent application, wherein the third rollers are passive rollers. 28. The wet processing equipment according to item 15 of the scope of patent application, further comprising a second annular elastic member, wherein the second annular elastic member is disposed on the roller of each of the third rollers. Surface. 29. The wet processing equipment described in item 15 of the scope of patent application, further comprising a gas supply device, wherein the gas supply device is disposed between the reaction liquid supply device and the cleaning liquid supply device, and Located above the rectangular # plate, the gas supply device is adapted to inject a gas onto the top surface of the rectangular substrate to blow out the reaction liquid on the rectangular substrate. 30. The wet processing equipment according to item 15 of the scope of patent application, wherein the processing chamber is a U-shaped processing chamber. Xin 11086twf.ptd Page 25