TWD241088S - 基板處理裝置用溫度測定具之部分 - Google Patents

基板處理裝置用溫度測定具之部分

Info

Publication number
TWD241088S
TWD241088S TW112304678F TW112304678F TWD241088S TW D241088 S TWD241088 S TW D241088S TW 112304678 F TW112304678 F TW 112304678F TW 112304678 F TW112304678 F TW 112304678F TW D241088 S TWD241088 S TW D241088S
Authority
TW
Taiwan
Prior art keywords
substrate processing
temperature measuring
design
processing equipment
measuring tool
Prior art date
Application number
TW112304678F
Other languages
English (en)
Chinese (zh)
Inventor
谷口大騎
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD241088S publication Critical patent/TWD241088S/zh

Links

TW112304678F 2023-03-13 2023-09-11 基板處理裝置用溫度測定具之部分 TWD241088S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023004909F JP1755435S (enExample) 2023-03-13 2023-03-13
JP2023-004909 2023-03-13

Publications (1)

Publication Number Publication Date
TWD241088S true TWD241088S (zh) 2025-10-21

Family

ID=88328217

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112304678F TWD241088S (zh) 2023-03-13 2023-09-11 基板處理裝置用溫度測定具之部分

Country Status (2)

Country Link
JP (1) JP1755435S (enExample)
TW (1) TWD241088S (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215215S (zh) 2020-07-27 2021-11-11 日商國際電氣股份有限公司 基板處理裝置用氣體供給噴嘴

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215215S (zh) 2020-07-27 2021-11-11 日商國際電氣股份有限公司 基板處理裝置用氣體供給噴嘴

Also Published As

Publication number Publication date
JP1755435S (enExample) 2023-10-17

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