TWD215360S - 前驅物容器 - Google Patents

前驅物容器 Download PDF

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Publication number
TWD215360S
TWD215360S TW110302670F TW110302670F TWD215360S TW D215360 S TWD215360 S TW D215360S TW 110302670 F TW110302670 F TW 110302670F TW 110302670 F TW110302670 F TW 110302670F TW D215360 S TWD215360 S TW D215360S
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TW
Taiwan
Prior art keywords
precursor
precursor vessel
vessel
article
chemical precursors
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TW110302670F
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English (en)
Inventor
黃劍秋
趙格劍
Original Assignee
荷蘭商Ａｓｍ Ｉｐ私人控股有限公司
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Application filed by 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 filed Critical 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司
Publication of TWD215360S publication Critical patent/TWD215360S/zh

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Abstract

【物品用途】;本設計物品關於用於儲存化學前驅物的一種前驅物容器(Precursor vessel)，化學前驅物從此前驅物容器輸送到反應器以供化學處理。;【設計說明】;省略之。

Description

前驅物容器
本設計物品關於用於儲存化學前驅物的一種前驅物容器(Precursor vessel)，化學前驅物從此前驅物容器輸送到反應器以供化學處理。
省略之。
TW110302670F 2020-01-09 2020-06-29 前驅物容器 TWD215360S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/720,086 2020-01-09
US202029720086 2020-01-09

Publications (1)

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TWD215360S true TWD215360S (zh) 2021-11-11

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TW109303437F TWD214338S (zh) 2020-01-09 2020-06-29 前驅物容器
TW110302670F TWD215360S (zh) 2020-01-09 2020-06-29 前驅物容器

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TW109303437F TWD214338S (zh) 2020-01-09 2020-06-29 前驅物容器

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TW (2) TWD214338S (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1728146S (ja) 2022-02-18 2022-10-25 半導体製造装置用トラップの部品

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802546S1 (en) 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802546S1 (en) 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
TWD214338S (zh) 2021-10-01

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