TWD203974S - 基板保持環 - Google Patents

基板保持環 Download PDF

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Publication number
TWD203974S
TWD203974S TW108301318F TW108301318F TWD203974S TW D203974 S TWD203974 S TW D203974S TW 108301318 F TW108301318 F TW 108301318F TW 108301318 F TW108301318 F TW 108301318F TW D203974 S TWD203974 S TW D203974S
Authority
TW
Taiwan
Prior art keywords
retaining ring
substrate retaining
design
case
item
Prior art date
Application number
TW108301318F
Other languages
English (en)
Chinese (zh)
Inventor
広田幸史
鈴木基文
永嶌匠
Original Assignee
日商富士紡控股股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商富士紡控股股份有限公司 filed Critical 日商富士紡控股股份有限公司
Publication of TWD203974S publication Critical patent/TWD203974S/zh

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TW108301318F 2018-09-26 2019-03-08 基板保持環 TWD203974S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-020935 2018-09-26
JP2018020935F JP1643626S (ja) 2018-09-26 2018-09-26 基板保持リング

Publications (1)

Publication Number Publication Date
TWD203974S true TWD203974S (zh) 2020-04-11

Family

ID=83460098

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108301318F TWD203974S (zh) 2018-09-26 2019-03-08 基板保持環

Country Status (2)

Country Link
JP (1) JP1643626S (ja)
TW (1) TWD203974S (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114216072A (zh) * 2022-01-07 2022-03-22 珠海美光原科技股份有限公司 一种可保护光源且强散热的植物补光灯

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114216072A (zh) * 2022-01-07 2022-03-22 珠海美光原科技股份有限公司 一种可保护光源且强散热的植物补光灯

Also Published As

Publication number Publication date
JP1643626S (ja) 2019-10-21

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