TWD193238S - Heater block - Google Patents
Heater blockInfo
- Publication number
- TWD193238S TWD193238S TW106307266D02F TW106307266D02F TWD193238S TW D193238 S TWD193238 S TW D193238S TW 106307266D02 F TW106307266D02 F TW 106307266D02F TW 106307266D02 F TW106307266D02 F TW 106307266D02F TW D193238 S TWD193238 S TW D193238S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- left view
- heater block
- view
- refreshing
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract description 2
Abstract
【物品用途】;本設計係關於一種加熱器組件,其係一基板支撐裝置。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。[Use of article]; This design relates to a heater assembly, which is a substrate support device. ;[Design Description];The dotted line portion disclosed in the drawing is the part of this case that does not require design. The left view is the same as the right view, so the left view is omitted. This design is about a novel and creative design that not only achieves the required functions, but also provides a unique appearance that has not been seen in the previous technology and is refreshing to the observer.
Description
本設計係關於一種加熱器組件,其係一基板支撐裝置。This design relates to a heater assembly that is a substrate support device.
圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。The dotted line section disclosed in the figure is not part of the design of this case. The left side view is the same as the right side view, so the left side view is omitted. This design is about a novel and creative design that not only achieves the desired functionality, but also provides a unique look that has not been seen in the prior art and that is refreshing to the viewer.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/607,328 | 2017-06-12 | ||
US29/607,328 USD859484S1 (en) | 2017-06-12 | 2017-06-12 | Heater block |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD193238S true TWD193238S (en) | 2018-10-01 |
Family
ID=67810246
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266F TWD193236S (en) | 2017-06-12 | 2017-12-12 | Heater block |
TW106307266D02F TWD193238S (en) | 2017-06-12 | 2017-12-12 | Heater block |
TW106307266D03F TWD193609S (en) | 2017-06-12 | 2017-12-12 | Heater block |
TW106307266D01F TWD193237S (en) | 2017-06-12 | 2017-12-12 | Heater block |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266F TWD193236S (en) | 2017-06-12 | 2017-12-12 | Heater block |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266D03F TWD193609S (en) | 2017-06-12 | 2017-12-12 | Heater block |
TW106307266D01F TWD193237S (en) | 2017-06-12 | 2017-12-12 | Heater block |
Country Status (2)
Country | Link |
---|---|
US (1) | USD859484S1 (en) |
TW (4) | TWD193236S (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD214069S (en) | 2019-10-30 | 2021-09-21 | 美商應用材料股份有限公司 | Heater pedestal |
TWD224468S (en) | 2021-02-12 | 2023-04-01 | 美商應用材料股份有限公司 | Portion of heater pedestal |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD873782S1 (en) * | 2016-05-17 | 2020-01-28 | Electro Scientific Industries, Inc | Component carrier plate |
USD927575S1 (en) * | 2019-01-18 | 2021-08-10 | Shinkawa Ltd. | Heater block for bonding apparatus |
USD1009816S1 (en) * | 2021-08-29 | 2024-01-02 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN302743219S (en) | 2014-02-19 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3116412B2 (en) * | 1991-05-16 | 2000-12-11 | セイコーエプソン株式会社 | Method for forming bump electrode of semiconductor device, display device and electronic printing device |
US5531835A (en) | 1994-05-18 | 1996-07-02 | Applied Materials, Inc. | Patterned susceptor to reduce electrostatic force in a CVD chamber |
US5810933A (en) | 1996-02-16 | 1998-09-22 | Novellus Systems, Inc. | Wafer cooling device |
JPH10284360A (en) * | 1997-04-02 | 1998-10-23 | Hitachi Ltd | Substrate temperature control equipment and method |
JP2002134484A (en) | 2000-10-19 | 2002-05-10 | Asm Japan Kk | Semiconductor substrate holding device |
US6634882B2 (en) * | 2000-12-22 | 2003-10-21 | Asm America, Inc. | Susceptor pocket profile to improve process performance |
US6709267B1 (en) * | 2002-12-27 | 2004-03-23 | Asm America, Inc. | Substrate holder with deep annular groove to prevent edge heat loss |
US7378616B2 (en) * | 2004-06-10 | 2008-05-27 | Asm Technology Singapore Pte. Ltd. | Heating apparatus and method for semiconductor devices |
KR100614648B1 (en) * | 2004-07-15 | 2006-08-23 | 삼성전자주식회사 | Apparatus for treating substrates used in manufacturing semiconductor devices |
USD529057S1 (en) * | 2004-08-16 | 2006-09-26 | Williams Advanced Materials, Inc. | Sputtering target |
US7993462B2 (en) * | 2008-03-19 | 2011-08-09 | Asm Japan K.K. | Substrate-supporting device having continuous concavity |
USD643055S1 (en) * | 2008-09-11 | 2011-08-09 | Asm Japan K.K. | Heater block for use in a semiconductor processing tool |
USD724196S1 (en) * | 2013-12-17 | 2015-03-10 | Stingray Group, Llc | Heater block for pressure digestion vessels |
USD726884S1 (en) * | 2014-02-04 | 2015-04-14 | Asm Ip Holding B.V. | Heater block |
USD725168S1 (en) * | 2014-02-04 | 2015-03-24 | Asm Ip Holding B.V. | Heater block |
US9469912B2 (en) | 2014-04-21 | 2016-10-18 | Lam Research Corporation | Pretreatment method for photoresist wafer processing |
USD807921S1 (en) * | 2015-03-05 | 2018-01-16 | Jaroslaw Grzesiak | Fuel heater block |
US10087525B2 (en) * | 2015-08-04 | 2018-10-02 | Asm Ip Holding B.V. | Variable gap hard stop design |
USD799646S1 (en) * | 2016-08-30 | 2017-10-10 | Asm Ip Holding B.V. | Heater block |
USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
-
2017
- 2017-06-12 US US29/607,328 patent/USD859484S1/en active Active
- 2017-12-12 TW TW106307266F patent/TWD193236S/en unknown
- 2017-12-12 TW TW106307266D02F patent/TWD193238S/en unknown
- 2017-12-12 TW TW106307266D03F patent/TWD193609S/en unknown
- 2017-12-12 TW TW106307266D01F patent/TWD193237S/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN302743219S (en) | 2014-02-19 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD214069S (en) | 2019-10-30 | 2021-09-21 | 美商應用材料股份有限公司 | Heater pedestal |
TWD224468S (en) | 2021-02-12 | 2023-04-01 | 美商應用材料股份有限公司 | Portion of heater pedestal |
Also Published As
Publication number | Publication date |
---|---|
TWD193236S (en) | 2018-10-01 |
TWD193237S (en) | 2018-10-01 |
USD859484S1 (en) | 2019-09-10 |
TWD193609S (en) | 2018-10-21 |
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