TWD193238S - Heater block - Google Patents

Heater block

Info

Publication number
TWD193238S
TWD193238S TW106307266D02F TW106307266D02F TWD193238S TW D193238 S TWD193238 S TW D193238S TW 106307266D02 F TW106307266D02 F TW 106307266D02F TW 106307266D02 F TW106307266D02 F TW 106307266D02F TW D193238 S TWD193238 S TW D193238S
Authority
TW
Taiwan
Prior art keywords
design
left view
heater block
view
refreshing
Prior art date
Application number
TW106307266D02F
Other languages
Chinese (zh)
Inventor
近藤裕志
Original Assignee
荷蘭商Asm Ip控股公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荷蘭商Asm Ip控股公司 filed Critical 荷蘭商Asm Ip控股公司
Publication of TWD193238S publication Critical patent/TWD193238S/en

Links

Abstract

【物品用途】;本設計係關於一種加熱器組件,其係一基板支撐裝置。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。[Use of article]; This design relates to a heater assembly, which is a substrate support device. ;[Design Description];The dotted line portion disclosed in the drawing is the part of this case that does not require design. The left view is the same as the right view, so the left view is omitted. This design is about a novel and creative design that not only achieves the required functions, but also provides a unique appearance that has not been seen in the previous technology and is refreshing to the observer.

Description

加熱器組件Heater assembly

本設計係關於一種加熱器組件,其係一基板支撐裝置。This design relates to a heater assembly that is a substrate support device.

圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。The dotted line section disclosed in the figure is not part of the design of this case. The left side view is the same as the right side view, so the left side view is omitted. This design is about a novel and creative design that not only achieves the desired functionality, but also provides a unique look that has not been seen in the prior art and that is refreshing to the viewer.

TW106307266D02F 2017-06-12 2017-12-12 Heater block TWD193238S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/607,328 2017-06-12
US29/607,328 USD859484S1 (en) 2017-06-12 2017-06-12 Heater block

Publications (1)

Publication Number Publication Date
TWD193238S true TWD193238S (en) 2018-10-01

Family

ID=67810246

Family Applications (4)

Application Number Title Priority Date Filing Date
TW106307266F TWD193236S (en) 2017-06-12 2017-12-12 Heater block
TW106307266D02F TWD193238S (en) 2017-06-12 2017-12-12 Heater block
TW106307266D03F TWD193609S (en) 2017-06-12 2017-12-12 Heater block
TW106307266D01F TWD193237S (en) 2017-06-12 2017-12-12 Heater block

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW106307266F TWD193236S (en) 2017-06-12 2017-12-12 Heater block

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW106307266D03F TWD193609S (en) 2017-06-12 2017-12-12 Heater block
TW106307266D01F TWD193237S (en) 2017-06-12 2017-12-12 Heater block

Country Status (2)

Country Link
US (1) USD859484S1 (en)
TW (4) TWD193236S (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214069S (en) 2019-10-30 2021-09-21 美商應用材料股份有限公司 Heater pedestal
TWD224468S (en) 2021-02-12 2023-04-01 美商應用材料股份有限公司 Portion of heater pedestal

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD927575S1 (en) * 2019-01-18 2021-08-10 Shinkawa Ltd. Heater block for bonding apparatus
USD1009816S1 (en) * 2021-08-29 2024-01-02 Applied Materials, Inc. Collimator for a physical vapor deposition chamber

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN302743219S (en) 2014-02-19

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JP3116412B2 (en) * 1991-05-16 2000-12-11 セイコーエプソン株式会社 Method for forming bump electrode of semiconductor device, display device and electronic printing device
US5531835A (en) 1994-05-18 1996-07-02 Applied Materials, Inc. Patterned susceptor to reduce electrostatic force in a CVD chamber
US5810933A (en) 1996-02-16 1998-09-22 Novellus Systems, Inc. Wafer cooling device
JPH10284360A (en) * 1997-04-02 1998-10-23 Hitachi Ltd Substrate temperature control equipment and method
JP2002134484A (en) 2000-10-19 2002-05-10 Asm Japan Kk Semiconductor substrate holding device
US6634882B2 (en) * 2000-12-22 2003-10-21 Asm America, Inc. Susceptor pocket profile to improve process performance
US6709267B1 (en) * 2002-12-27 2004-03-23 Asm America, Inc. Substrate holder with deep annular groove to prevent edge heat loss
US7378616B2 (en) * 2004-06-10 2008-05-27 Asm Technology Singapore Pte. Ltd. Heating apparatus and method for semiconductor devices
KR100614648B1 (en) * 2004-07-15 2006-08-23 삼성전자주식회사 Apparatus for treating substrates used in manufacturing semiconductor devices
USD529057S1 (en) * 2004-08-16 2006-09-26 Williams Advanced Materials, Inc. Sputtering target
US7993462B2 (en) * 2008-03-19 2011-08-09 Asm Japan K.K. Substrate-supporting device having continuous concavity
USD643055S1 (en) * 2008-09-11 2011-08-09 Asm Japan K.K. Heater block for use in a semiconductor processing tool
USD724196S1 (en) * 2013-12-17 2015-03-10 Stingray Group, Llc Heater block for pressure digestion vessels
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
USD725168S1 (en) * 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
US9469912B2 (en) 2014-04-21 2016-10-18 Lam Research Corporation Pretreatment method for photoresist wafer processing
USD807921S1 (en) * 2015-03-05 2018-01-16 Jaroslaw Grzesiak Fuel heater block
US10087525B2 (en) * 2015-08-04 2018-10-02 Asm Ip Holding B.V. Variable gap hard stop design
USD799646S1 (en) * 2016-08-30 2017-10-10 Asm Ip Holding B.V. Heater block
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN302743219S (en) 2014-02-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214069S (en) 2019-10-30 2021-09-21 美商應用材料股份有限公司 Heater pedestal
TWD224468S (en) 2021-02-12 2023-04-01 美商應用材料股份有限公司 Portion of heater pedestal

Also Published As

Publication number Publication date
TWD193236S (en) 2018-10-01
TWD193237S (en) 2018-10-01
USD859484S1 (en) 2019-09-10
TWD193609S (en) 2018-10-21

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