TWD147215S - 用來使一製程腔室的清洗氣體產生紊流的清洗盤 - Google Patents

用來使一製程腔室的清洗氣體產生紊流的清洗盤

Info

Publication number
TWD147215S
TWD147215S TW100304292F TW100304292F TWD147215S TW D147215 S TWD147215 S TW D147215S TW 100304292 F TW100304292 F TW 100304292F TW 100304292 F TW100304292 F TW 100304292F TW D147215 S TWD147215 S TW D147215S
Authority
TW
Taiwan
Prior art keywords
cleaning plate
cleaning
processing chamber
turbulent flow
viewed
Prior art date
Application number
TW100304292F
Other languages
English (en)
Inventor
Hua Chung
Xizi Dong
Kyawwin Jason Maung
Hiroji Hanawa
Sang Won Kang
David H Quach
Ｋ Olgado Donald J K Ｊ
David Bour
Wei-Yung Hsu
Alexander Tam
Anzhong Chang
Sumedh Acharya
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TWD147215S publication Critical patent/TWD147215S/zh

Links

Abstract

【物品用途】;本創作係一種用來使一製程腔室的清洗氣體產生紊流的清洗盤。;【創作特點】;參照立體圖、俯視圖、及仰視圖，本創作之清洗盤，由上面俯視係呈圓形，其被分為四個區域，且在各區域分隔線接近圓周處形成兩個略呈三角形的凹洞。;另參照另一立體圖、及局部放大圖，本創作之清洗盤，由底面仰視係各區域中間延伸桿體分別具有一略呈長條形的凸部。;整體而言，本創作的外型獨特美觀，實為一外型新穎之新式樣設計。
TW100304292F 2011-03-04 2011-08-19 用來使一製程腔室的清洗氣體產生紊流的清洗盤 TWD147215S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/386,850 USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

Publications (1)

Publication Number Publication Date
TWD147215S true TWD147215S (zh) 2012-05-21

Family

ID=46513463

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100304292F TWD147215S (zh) 2011-03-04 2011-08-19 用來使一製程腔室的清洗氣體產生紊流的清洗盤

Country Status (2)

Country Link
US (1) USD664170S1 (zh)
TW (1) TWD147215S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE49567E1 (en) 2015-05-21 2023-07-04 Russo Trading Company, Inc. Tile lippage post
USD862204S1 (en) 2015-05-21 2019-10-08 Russo Trading Company, Inc. Lippage cap
USD834922S1 (en) 2015-05-21 2018-12-04 Russo Trading Company, Inc. Threaded lippage cap
USD856111S1 (en) 2015-05-21 2019-08-13 Russo Trading Company, Inc. Tile lippage threaded post
USD830161S1 (en) * 2016-11-04 2018-10-09 Russo Trading Company, Inc. Orientation washer
USD817753S1 (en) * 2017-03-09 2018-05-15 Woodward, Inc. Spring array
USD821863S1 (en) * 2017-05-22 2018-07-03 J. Juan, S.A. Washer
USD835979S1 (en) * 2017-06-09 2018-12-18 Simpson Strong-Tie Company Inc. Decorative washer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid

Also Published As

Publication number Publication date
USD664170S1 (en) 2012-07-24

Similar Documents

Publication Publication Date Title
TWD147215S (zh) 用來使一製程腔室的清洗氣體產生紊流的清洗盤
TWD153356S (zh) 沉積室覆蓋環
TWD153743S (zh) 沉積室襯墊
TWD157554S (zh) 座墊形寶石
TWD155022S (zh) 沐浴乳瓶
TWD170225S (zh) 可調整式頭帶
TWD156666S (zh) 具有表面鉤狀結構的卷材
TWD159544S (zh) 香氣瓶
TWD153321S (zh) 上部襯墊
TWD149689S (zh) 三氣孔哨子
TWD147504S (zh) 包裝用容器
TWD173437S (zh) 握把之部分
TWD185371S (zh) 醒酒器
TWD180494S (zh) 輪胎
TWD174175S (zh) 空氣淨化機
TWD155887S (zh) 吊扇（三）
TWD165520S (zh) 輪框
TWD155888S (zh) 吊扇（四）
TWD161722S (zh) 肥皂盤
TWD163463S (zh) 寶石
TWD161726S (zh) 空氣清淨機
TWD159195S (zh) 換氣扇
TWD159188S (zh) 飲水機龍頭
TWD159187S (zh) 飲水機龍頭（一）
TWD154467S (zh) 吊扇（一）