USD664170S1 - Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass - Google Patents

Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass Download PDF

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Publication number
USD664170S1
USD664170S1 US29/386,850 US201129386850F USD664170S US D664170 S1 USD664170 S1 US D664170S1 US 201129386850 F US201129386850 F US 201129386850F US D664170 S USD664170 S US D664170S
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US
United States
Prior art keywords
processing chamber
turbulent flow
cleaning
inducing turbulent
cleaning plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/386,850
Inventor
Hua Chung
Xizi Dong
Kyawwin Jason Maung
Hiroji Hanawa
Sang Won Kang
David H. Quach
Donald J. K. Olgado
David Bour
Wei-Yung Hsu
Alexander Tam
Anzhong Chang
Sumedh Acharya
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Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/386,850 priority Critical patent/USD664170S1/en
Priority to TW100304292F priority patent/TWD147215S/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ACHARYA, SUMEDH, CHUNG, HUA, DONG, XIZI, OLGADO, DONALD J.K., HSU, WEI-YUNG, BOUR, DAVID, HANAWA, HIROJI, QUACH, DAVID H., CHANG, ANZHONG, KANG, SANG WON, MAUNG, KYAWWIN JASON, TAM, ALEXANDER
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Publication of USD664170S1 publication Critical patent/USD664170S1/en
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Description

This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.
FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.
FIG. 2 is a top plan view of the cleaning plate of FIG. 1.
FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.
FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.
FIG. 5 is a side perspective view of the cleaning plate of 1; and,
FIG. 6 is an enlarged partial view of FIG. 3.
The broken lines in the figures form no part of the claimed design.

Claims (1)

  1. The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown.
US29/386,850 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass Active USD664170S1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US29/386,850 USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass
TW100304292F TWD147215S (en) 2011-03-04 2011-08-19 Cleaning plate for inducing turbulent flow of a processing chamber cleaning gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/386,850 USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

Publications (1)

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USD664170S1 true USD664170S1 (en) 2012-07-24

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US29/386,850 Active USD664170S1 (en) 2011-03-04 2011-03-04 Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

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US (1) USD664170S1 (en)
TW (1) TWD147215S (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD817753S1 (en) * 2017-03-09 2018-05-15 Woodward, Inc. Spring array
USD821863S1 (en) * 2017-05-22 2018-07-03 J. Juan, S.A. Washer
USD830161S1 (en) * 2016-11-04 2018-10-09 Russo Trading Company, Inc. Orientation washer
USD834922S1 (en) 2015-05-21 2018-12-04 Russo Trading Company, Inc. Threaded lippage cap
USD835979S1 (en) * 2017-06-09 2018-12-18 Simpson Strong-Tie Company Inc. Decorative washer
USD856111S1 (en) 2015-05-21 2019-08-13 Russo Trading Company, Inc. Tile lippage threaded post
USD862204S1 (en) 2015-05-21 2019-10-08 Russo Trading Company, Inc. Lippage cap
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USRE49567E1 (en) 2015-05-21 2023-07-04 Russo Trading Company, Inc. Tile lippage post
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
International Search Report dated Feb. 9, 2012 for International Application No. PCT/US2011/040197.
International Search Report dated Feb. 9, 2012, Application No. PCT/US2011/040197.
Japanese Office Action issued Feb. 21, 2012 for Japanese Application No. 2011-019695.
Taiwan Office Action dated Feb. 17, 2012 for Taiwan Design Patent Application No. 100304292.

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD834922S1 (en) 2015-05-21 2018-12-04 Russo Trading Company, Inc. Threaded lippage cap
USD856111S1 (en) 2015-05-21 2019-08-13 Russo Trading Company, Inc. Tile lippage threaded post
USD862204S1 (en) 2015-05-21 2019-10-08 Russo Trading Company, Inc. Lippage cap
USRE49567E1 (en) 2015-05-21 2023-07-04 Russo Trading Company, Inc. Tile lippage post
USD830161S1 (en) * 2016-11-04 2018-10-09 Russo Trading Company, Inc. Orientation washer
USD817753S1 (en) * 2017-03-09 2018-05-15 Woodward, Inc. Spring array
USD821863S1 (en) * 2017-05-22 2018-07-03 J. Juan, S.A. Washer
USD835979S1 (en) * 2017-06-09 2018-12-18 Simpson Strong-Tie Company Inc. Decorative washer
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate

Also Published As

Publication number Publication date
TWD147215S (en) 2012-05-21

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