TW593974B - Micro-mirror inspecting method and its inspecting apparatus - Google Patents

Abstract

A kind of micro-mirror inspecting method includes the following steps. Micro-mirror devices are first disposed on the micro-mirror supporting face of the support stand. Then, a light source is used to emit light beam toward the micro-mirror devices. Light beam is reflected from the micro-mirror to the target face, so as to project a second light spot on the target face. The distance X of the second light spot relative to the reference point is measured so as to calculate the inclined degree of the micro-mirror device on the support stand.

Description

593974 V. Description of the invention (1) ------- I. Technical field to which the invention belongs: ^ The present invention relates to a micromirror detection method and a detection device thereof, particularly to a detection micromirror element in Micromirror detection method and detection device for inclination after assembly. 2. Prior technology: "Micro-electro-mechanical technology has been developed for a long time, and it is gradually applied to general daily necessities or electronic products. The digital micromirror device (DMD) developed by Texas Instruments Corporation is a kind of application Yu Caiyou has a reflective element. The projection unit designed by digital micromirror element technology is called a digital light projector (DLP, Digital Light ·

Processing), using a digital micromirror element as an imaging instrument, and reflecting light to project an image onto the screen. The key component of the digital micromirror element is a semiconductor element developed by Texas Instruments. Each digital micromirror element wafer contains thousands of tiny square reflective lenses, also called micromirrors. These micromirrors are closely arranged in rows and columns, each micromirror represents a picture element, and can be controlled to switch and rotate by the corresponding memory body in two states of on or off, thereby controlling light reflection. There are many optical components of digital optical transmission projectors. Since the resolution and imaging power required by digital optical transmission projectors are extremely strict, it is difficult to grasp the accuracy and tolerances during manufacturing. In particular, the inclination of the micro-mirror element relative to the optical axis of the lens when it is mounted on the lens holder directly affects the quality of the imaging. However, since the micromirror element is made of micrometers, it is difficult to measure its inclination by a common measurement method. Therefore, the characteristics and quality of the finished lens often require

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Can only be detected after international imaging. If there is a defect at the complete level, it needs to be disassembled and reassembled. After the assembly is completed, it is known that the lens has this. It needs to be able to pick up a huge amount of time and labor in the assembly process. The testing method and the testing device ensure the quality of the micro-scopy / brothers-in-law for measuring the assembly condition. III. Summary of the Invention: The present invention is a micromirror detection method for real-time detection. The micromirror detection method includes the following group f conditions, and provides you with a micromirror abutment surface of the seat. Reuse the light ^ first the micromirror element

^ 束 奕 ^ Mirrors reflect the silk surface and project this on the dry surface; 5 Measure the distance X of the second light point from the reference point, and calculate the inclination of the micromirror element on the holder. Jing J invention also provides a micromirror detection device for the above-mentioned detection, including a target surface and a light source. The light source emits a light toward the micromirror element, and the light beam is reflected from the micromirror element to the target surface. An application of the micromirror detection method of the present invention can quickly and effectively measure the inclination of the micromirror relative to the optical axis of the lens when it is mounted on the lens holder. Therefore, the assembly condition of the micromirror element can be directly detected during the lens assembly process, thereby correcting the tilting condition of the micromirror element and improving the product yield. .

Fourth, the embodiment: First, the structure of the holder is described with reference to FIG. 1a. The holder 丨 0 0 includes a lens bearing surface 11 0 and a lens bearing point 丨 丨 i. Referring to Figure 丨 b, it shows a side view of the bearing 100 in the direction of A. The bearing 100 also includes a micromirror bearing surface.

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593974

1 2 0, the micromirror bearing surface 1 2 0 has a micromirror bearing point 丨 2 i and an opening 丨 2 2. The micro-mirror element is set on the micro-mirror bearing surface 1 2 1 on the micro-mirror bearing surface 1 2 0. The “mirror element” to be detected in the present invention is that when the micro-mirror element is installed on the micro-mirror support and 1 20 Whether there is excessive tilt. The structure of the micromirror detection device of the present invention will be described first, and then the micromirror detection method using the micromirror detection device will be described. Referring to FIG. 2a, the micromirror detection device of the present invention includes a dry surface 150 and a light source 140. The light source emits a light beam 160 toward the micromirror element 315, and the light beam 160 reflects from the micromirror element 130 to the handle surface 501. Referring to FIG. 2b, the scale 150 and a reference point 1 $ ^ on the surface 150 are reflected from the micromirror element 130 to the second light spot 152 of the dry surface 150 by the light beam 160 with respect to the reference point 151 Position, we can know the tilt of the micromirror element. The above light source 140 can be a laser. The above-mentioned light source 140 may be disposed on the target surface 150. The target surface 150 can be made of paper. Referring to FIG. 3a, the above-mentioned micromirror detection device may further include a first jig 185 'for holding the holder. And a second fixture 180 for holding the light source. The first jig 185 and the second jig 180 can be disposed on the base 170. Referring to FIG. 3b, the first jig 185 and the second jig 180 may have a jig body 181, a baffle plate 182, a modulation mechanism 183, and a fixing member 184. The baffle plate 1 8 2 is disposed in the clamp body 1 8 1. The modulation mechanism 183 passes through the jig body 181 and contacts the baffle plate 182.

0535-9869TWF (Nl); A03066; HEARTA.ptd Page 7 593974 V. Description of the invention (4) The modulation mechanism 183 can adjust the position of the baffle 182 and clamp the workpiece between the baffle 1 8 2 and the Between the clamp body 1 8 1. The fixing member 1 84 is disposed under the clamp body 181, and the clamp body 181 is fixed on the base 1 70 by the fixing member 184. Referring to FIG. 2a again, the micromirror detection method of the present invention includes the following steps: First, the position of the light source 140 is first defined. First, a standard mirror 135 is set on the micromirror bearing surface 120 of the base 100. The standard mirror 135 is a mirror surface that is horizontally aligned with a predetermined level. When the standard mirror 135 is installed on the micromirror bearing surface 120, it is a preset untilted condition. Then, the light source 140 is used to emit the light beam 160 toward the standard mirror 135, and the light beam 160 is reflected from the standard mirror 135 to the dry surface 150, and a first light spot 1 is projected on the target surface 150. 5 5 Refer to Figure 2b. At this time, the position of the light source 丨 40 is adjusted so that the first light point 丨 is projected to the reference point 151. Through the above steps, the standard position of the light source 4 can be defined. Next, to perform the step of measuring the inclination of the micromirror element, referring to FIG. 2a, the micromirror element 1330 is first set on the micromirror bearing surface 120 of the base 100. The light source 14 is used to emit a light beam 6 toward the micromirror element 3 0. The light beam 160 is reflected from the micromirror element 130 to the target surface 150, and a second light spot 152 is projected on the target surface 150, referring to FIG. 2b. Measure the distance X of the second light point 15 2 from the reference point 1 51, and calculate the inclination of the micromirror element 丨 30 on the support 丨 〇 〇 $. The way to calculate the inclination, referring to Fig. 4, uses the distance γ between the light source 丨 4 0 and the micromirror element 130, and the second light point 5 2 relative to the reference point.

593974

The distance x of 151 is 4 / (7) using a trigonometric formula, and the inclination angle Θ of the micromirror element 130 can be obtained. Using the inclination angle 0 and the length of the micromirror element 130 itself, it is possible to know the thickness T to be compensated. Therefore, it is possible to insert a gasket with a thickness of 50 ° in the tilted orientation of the micromirror element = 130 #, or to compensate in other ways to correct the tilt of the micromirror element. Returning to Fig. 2a, the detection method of the present invention can also be used to detect the parallelism of the pedestal 100, which includes the following steps: First, a standard mirror 135 is set on the micromirror abutment surface 12 of the pedestal 100. Then, the light source 140 is used to emit a light beam 160 toward the standard mirror 135, and the light beam 160 is reflected from the standard mirror 135 to the target surface 150, and a first light spot 155 is projected on the target surface 150 (see FIG. 3D). Then, the position of the light f 140 is adjusted so that the first light spot 155 is projected to the reference point 151. The quasi-mirror 135 is then set on the lens bearing surface of the pedestal 100 (refer to Figure 2 & Figure), the light beam 160 is reflected from the standard mirror 135 to the target surface 150, and at the target 1-5, A second light spot 152 is projected on the surface (see FIG. 2b). Finally, the position of the first light spot 152 relative to the reference point 51 is measured; and the parallelism of the micromirror bearing surface 1 2 0 and the lens bearing surface 丨 丨 0 is calculated. The method for calculating the parallelism of the pedestal 100 can be obtained by the trigonometric function in the same manner as the above-mentioned method for calculating the inclination of the micromirror element. Since the tilt of the lens bearing surface 11 〇 is directly related to the angle of the optical axis 镜头 of the lens, the dimensional error of each component can be compensated according to the above-mentioned detection results of the parallelism of the bearing. An application of the micromirror detection method of the present invention can quickly and effectively measure the inclination of the micromirror relative to the optical axis of the lens when it is mounted on the lens holder. because

593974 V. Description of the invention (6) Therefore, during the lens assembly process, the assembly status of the micromirror element can be directly detected, thereby correcting the tilting condition of the micromirror element and improving the product yield. Although the present invention has been disclosed as above in the preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can still make a few changes and decorations without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.

05 35-9869TWF (N1); A03066; HEARTA.ptd Page 10593974 Brief description of the diagram Figure 1a shows the three-dimensional view of the conventional bearing; Figure 1b shows the side view of the conventional bearing; Figure 2a is a schematic diagram of the micromirror detection device of the present invention; Figure 2b is a schematic diagram of the dry surface of the micromirror detection device of the present invention; Figure 3a is a schematic diagram of the micromirror detection device of the present invention; Figure 3b Figure 4 is a schematic diagram showing the fixture of the micromirror detection device of the present invention; Figure 4 is an auxiliary explanatory diagram showing the tilt calculation method of the present invention. Explanation of Symbols: I 0 0 ~ Block II 0 ~ Lens bearing surface 11 1 ~ Lens bearing point 1 2 0 ~ Micro mirror bearing surface 1 2 1 ~ Micro mirror bearing point 1 2 2 ~ Opening 1 3 0 ~ Micromirror element 1 3 5 to standard mirror 4 1 4 0 to light source 150 to target surface 1 5 1 to reference point 1 5 2 to second light point

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Claims (1)

593974 Six 'patent application scope 1 · A micromirror detection device for detecting the inclination of a micromirror element on a holder, including: a surface; and a light source, which emits a light beam toward the micromirror element , The light beam is reflected from the micromirror element to the target surface. 2. The micromirror detection device according to item 1 of the scope of the patent application, wherein the micromirror detection device further includes a first jig for holding the holder. 3. The micromirror detection device according to item 1 of the scope of the patent application, wherein the micromirror detection device further includes a second jig, and the second jig is used to ‘miss the light source. 4. The micromirror detection device according to item 1 of the scope of patent application, wherein the light source is a laser. 5. The micromirror detection device according to item 1 of the scope of patent application, wherein the material of the target surface is paper. 6. The micromirror detection device according to item 1 of the scope of patent application, wherein the light source is disposed on the target surface. 7. A method for detecting the parallelism of a pedestal, comprising the following steps: setting a standard mirror on a micromirror abutment surface of the pedestal; using a light source to emit a light beam toward the standard mirror, the light beam from the target 4 The collimator reflects to a target surface and projects a first light spot on the target surface; adjusts the position of the light source so that the first light spot projects to a reference point; sets the standard mirror on the base A lens bearing surface, the light beam is reflected from the standard mirror to the target surface, and a second light spot is projected on the target surface; 0535-9869TWF (Nl); A03066; HEARTA.ptd page 13 593974 6. Apply for a patent to measure the position of the second light point relative to the reference point; and calculate the micromirror bearing surface and the lens bearing surface Parallelism. 8. The method for detecting the parallelism of a seat as described in item 7 of the scope of patent application, wherein the light source is a laser. 9. The method for detecting the parallelism of a seat as described in item 7 of the scope of patent application, wherein the material of the handle is paper. 10. The method for detecting the parallelism of a socket according to item 7 of the scope of patent application, wherein the socket is held by a first jig. 1 1. The method for detecting the parallelism of a bearing as described in item 7 of the scope of patent application, wherein the light source is disposed on the target surface.丨 1 2. The method for detecting the parallelism of a bearing according to item 7 of the scope of patent application, wherein the light source is held by a second fixture. 1 3. The method for detecting the parallelism of a seat according to item 12 of the scope of patent application, wherein the step of adjusting the position of the light source so that the first light spot is projected to the reference point is by adjusting the second The position of the light source is adjusted by a jig. 1 4. A method for detecting a micromirror, comprising the following steps: setting a micromirror element on a micromirror abutting surface of a holder; using a light source to emit a light beam toward the micromirror element, and the light beam from the micromirror The element reflects to a target surface, and a second light __ point is projected on the target surface; the distance X of the second light point from a reference point is measured; and the micromirror element is calculated on the holder The inclination. 1 5. The micromirror detection method described in item 14 of the scope of patent application, which 0535-9869TWF (Nl); A03066; HEARTA.ptd Page 14 593974 6. In the scope of patent application, before the step of setting the micromirror element on the micromirror abutment surface of the base, the following steps are further included. : Setting a standard mirror on the bearing surface of the micromirror; using the light source to emit the light beam toward the standard mirror, the light beam is reflected from the standard mirror to the target surface, and a target is projected on the target surface A first light point; adjusting the position of the light source so that the first light point is projected to the reference point. 16. The method for detecting a micromirror according to item 14 of the scope of patent application, further comprising a step of measuring a distance Y between the light source and the micromirror element. 1 7. The micromirror detection method according to item 16 of the scope of the patent application, wherein the step of calculating the inclination of the micromirror element on the holder uses the distance Y between the light source and the micromirror element. And the distance X of the second light point from a reference point is calculated by a trigonometric function. 1 8. The micromirror detection method according to item 17 in the scope of the patent application, wherein 2 ^ = tan'V—) ^ V, 0 is the inclination angle of the micromirror element on the base. 19. The micromirror detection method according to item 14 of the scope of patent application, wherein the light source is a laser. 20. The micromirror detection method according to item 14 of the scope of the patent application, wherein the target surface is made of paper and a scale is drawn on it. 2 1. The micromirror detection method according to item 14 of the scope of patent application, wherein the holder is held by a first jig. 2 2. The micromirror detection method described in item 14 of the scope of patent application, which 053 5-9869TWF (N1); A03066; HEARTA.p t d page 15 593974 6. In the scope of patent application, the light source is set on the target surface. 2 3. The micromirror detection method according to item 14 of the scope of patent application, wherein the light source is held by a second jig. 2 4. The micromirror detection method according to item 15 of the scope of patent application, wherein the step of adjusting the position of the light source so that the first light spot is projected to the reference point is by adjusting the second fixture Adjust the position of the light source. 0535-9869TWF (N1); A03066; HEARTA.p t d p.16