TW593088B - Arrangement for manufacturing line of machine back-up - Google Patents

Abstract

Disclosed is an arrangement for a production line of machine back-up, comprising a plurality of main machines sequentially arranged in accordance with a manufacturing process; a main conveyor, which is mechanically coupled to the main machines for conveying cassettes; at least one back-up machine having with the same functions as one of the main machine; a conveyor for timely moving the cassettes between the main machine and the back-up machine. The arrangement of manufacturing line in accordance with the present invention allows for mutual back-up between the machines in order to reduce manufacturing time and lower manufacturing costs.

Description

593088 5. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a back-up production line layout 'and particularly to a type of machine that can be supported between machines in a manufacturing plant. Production line layout. [Previous technology] Thin-film transistor liquid crystal displays (hereinafter referred to as TFT-LCD or liquid crystal display screens), mainly use thin-film transistors arranged in a matrix, with appropriate capacitors, adapter pads and other electronic components to drive liquid crystal pixels, Produce rich and beautiful graphics. TFT-LCD is widely used in portable information products such as notebooks and personal digital assistants (PDAs) due to its thin and light appearance, low power consumption, and no radiation pollution. The trend to replace traditional desktop computer CRT monitors. According to the size of the manufactured product, LCD manufacturing factories can produce small LCD screens such as mobile phones and PDAs, and large LCD screens such as notebook computers, digital TVs, and monitors. However, if we observe the evolution of the size of the liquid crystal glass substrate, each generation is increasing the size of the glass substrate, from the size of the first-generation glass substrate to 320 × 400 mm 'to the size of the fifth-generation glass substrate, which is 200mm, the area of the glass substrate. It has increased about 9 times. Therefore, the fifth-generation LCD screen manufacturing plant's handling system, the Job Shop method, is no longer applicable to the sixth-generation LCD screen manufacturing plants. Please refer to FIG. 1, which shows a schematic top view of the layout of a conventional J 〇 b S h ο p production line. In Figure 1, it is assumed that from the beginning to the end of production,

TW1064F (Chimei) .ptd Page 5 593088 V. Description of the invention (2) After cleaning, film formation, photolithography, etch, stripper and inspection (Inspection) and other processes. The traditional job-shop method is to concentrate machines with the same function in the same area. If one machine is down, the other machines can support each other. As shown in FIG. 1, the cleaning section 101 includes six cleaning machines (cieaners) with the same function, and there is a channel (Bay) between the cleaning machines, and the AGV or RGV (automatic handling system) ) (Not shown) for transport between washing machines in the aisle. Similarly, the film formation area (fi lm format ion sec ti on) 102 includes six sputters or chemical vapor deposition (CVD) with the same function; a photoresist coating area (l). 〇3 includes six coaters with the same function; exposure section 104 includes six coaters with the same function (e xposu re mach i ne, such as Mas k Aligner); developing area ( In the developing section 105, there are six developers with the same function (developer), and in the etch section 1 06, there are six et chers with the same function; in the stripping section 107 It includes six strippers with the same function; the inspection section 108 includes six inspection devices with the same function. In addition to AGV or RGV in a small area to carry glass substrates in the aisle, in a large area it is provided by OHS (over-head shuttle) and / or lifter or crane (not shown). Transport. For example, the glass cleaned in a certain washing machine in the washing area 101 is placed in a cassette (cassette 'box containing a certain number of glass substrates), and it is first moved to the storage

TW1064F (Chimei) .ptd Page 6 593088 V. Description of the invention (3) Put the area (stocker in the first picture), then the crane will move the cassette to 0HS above, and then the card will be moved along track 110 by 0hs g is transported to the next workstation, such as film formation area 102, for film formation. The traditional Job-shop method brings together machines with the same functions. Although it has the advantage of supporting each other, the larger and larger glass substrates pose a major problem in transportation. For example, the sixth generation glass substrate is Η. . Above x160mm, the weight of the cassette is as high as 200kg / 2〇 #, and the AGV weight of this card will be more than 1250kg, and the AGV size is 19 ^ (,) X 2.3m (length) x 1.96 111 (high). Such a heavy person (^ inter-bay) is very difficult to move and requires more space. In addition, the glass substrate with an increased size will also have a larger amount of bending. If the conventional AGV is used for horizontal transportation There is a risk of damage. ^ In addition, during the entire production process of semiconductors or liquid crystals, some processes need to be performed back and forth, such as filming, lithography, etc. after etching. Cards must be sent back to the filming area from the 1G6 area. Zone 102, and then go through a series of ==: Therefore, a large part of the production time required by the Job-Shop method is a round trip between 3, and it is transported from 0HS to-in the process area, especially for large glass substrates. It is not easy to transport, this is a plus. For large-size glass substrates, the traditional F 1 ow-Shoop production method adopted by the traditional product industry is to sequentially process all the production processes required for production. Production method: Process is followed by who is a process .: On the production line, a manufacturing plant should die ... And, for the technology industry (such as semi-conductive baskets ✓ $ 夜 日 日 工厂 factory) and ancient, waste ° Knowing that the traditional Flow-Shop method is not used

593088 V. Description of the invention (4) '' Mutual support with the plastic machine. If the machine in one of the processes is down or damaged, the entire production line will not work. [Summary of the Invention] In view of this, the object of the present invention is to provide a back-up production line layout so that the production machines can support each other, thereby greatly reducing production costs. According to the purpose of the present invention, a layout of a machine support (back_up) 2 production line is provided, including: a plurality of main machines, which are arranged in order according to the process required for production; '地 S 输 = ^ 卡 = C_eyer)' is related to the main The machine is also mechanically connected to transport ^ + I £ (cassette); at least one backup machine, the main cover energy; and-one of the main machine ports-with the same power handling device, should be used in the main sin For instant delivery of eight u. If the machine in the main conveyor is damaged, transport the nightmare into a storage space, and use the storage space in it. Carry the card to any position-the backup machine can be installed with the main machine with the same function as the backup machine and the main machine. It can be transported at this time. The backup machine can also be directly connected to the second machine. At this time, the production line of the advance production line is set at the backup machine and i ::: after the installation, to support the production line. One side of the egg machine σ, to advance TW1064F (Chimei). Ptd Page 8593088 5. Description of the invention (5) Although 'the number of backup machines is not particularly limited, it can completely correspond to the number, function and position of the main machine σ, at this time the backup machines can also be considered as part of the production line. The above-mentioned objects, features, and advantages of the present invention can be made more obvious and easy. 'The preferred embodiments are described below in conjunction with the attached drawings, and will be described in detail as follows: [Embodiment] The combination of the Job-Shoop method and Flow-Shop method of Yushenghara 4 to Where the machine supports (a), not only will the glass substrate be sent to the production line in the production line to save the transportation cost and time. The effective use of the plant space can also greatly improve the present invention. Inventive intentions, broad examples, detailed descriptions. However, this embodiment is only limited to the scope of the present invention. In the implementation of this article, the layout of a production line under the spirit of the present invention is firstly limited. . Please refer to Figure 2 for its V: 'do-detailed description. The back-up production line layout is indicated by an arrow with machine support. In Figure 2, there is a schematic diagram. The process is shown in Figure The center (left side) 20 and the standby production line (the layout of the right production line includes a space between the main production line production line 30, #, 〇 the main production line 20 and the space for standby production. The wide production of this space is the handling device ( Not shown) action of the erection and easy handling device. The main ^ to J is equal to the width of a cassette, and the * production line 20 includes the first main process area (such as

593088 5. Description of the invention (6) Cleaning glass) 201, the second main process area (such as film formation) 202, the third main process area (such as photoresist coating) 203, the fourth main process area (such as glass cleaning ) 2 04, ···, etc. A series of process areas are arranged in order according to the process required for production. The standby production line 30 is exactly the same as the production layout of the main production line, including the first standby process area (such as glass cleaning) 301, the second standby process area (such as film formation) 302, and the third standby process area (such as optical Resistance coating) 303, the fourth standby process area (such as cleaning glass) 304, ..., etc. The standby production line 30 can produce products simultaneously with the main production line 20, but 30 and 20 may be upstream and downstream in the product process. When any machine fails, the handling device can quickly move the cassette to another machine with the same function. The bottom layer of each process area in Figure 2 is the place where the machine (2011, 2021, 2031, 2031, 3011, 302 1, 3 03 1, 3 041) is placed for processing. Conveyors 205 and 305 are connected to the machine to continuously transport the cassettes. Above the conveyors 205 and 305, there is a storage space called a buffer storage area (2012, 2022, 2032, 2042, 3012, 3022, 3032, 3042) to temporarily place a glass substrate. Card case. As for the handling device (not shown in Figure 2), such as a crane, it is set on one side of the main production line 20 (as shown in Figure 2 is located between the main production line 20 and the standby production line 3 〇 Time) to move cartridges in real time. Regardless of whether the main machine is down or the process speed is slightly behind and the cassette is "trafficed", the handling device can immediately transfer the card E to a backup machine for processing, or to any buffer storage area temporarily Storage.

593088 V. Description of the invention (7) Figure 3 shows a simple schematic diagram of a crane according to a preferred embodiment of the present invention. The crane 310 can be mainly divided into three parts: a lower mechanism 312, an upper rotating body 314, and a telescopic mechanical arm 316. The lower mechanism 312 carries the upper frame. The lower machine is connected to a straight track (not shown) erected between the main production line 20 and the standby 30, so that the crane 3m can move horizontally forward or backward. In addition, the lower mechanism 312 is also connected with an abutment device (not shown) so that the crane can be vertically displaced upward or downward. As for the telescopic manipulator 316, it is connected to the upper rotating body 3 14 and can be a multi-stage telescopic structure to take out the cassettes on the production line. The crane 31 is generally in a stationary state (Udje), and when it is necessary to carry the card, it is moved up and down and moved forward and backward. Assume that the cassette needs to be taken out of the main machine 2031 and moved to the standby machine 3 0 31. Then the lower mechanism 3 1 2 advances along the guide rail to about the top of the main machine 2 03 and extends the machine. The arm 3 1 6 takes out the cassette, then retracts the robot arm 316, and rotates the upper rotating body 314 to make the robot arm 316 turn to the side of the standby production line 30. Then the robot arm 316 is extended to place the cassette on the standby machine 3031. Lifting j can also be hung with accessories such as booms, hooks, support ropes, hydraulic cylinders and other safety devices. Of course, there are many types of cranes, and the present invention is not limited to the above-mentioned carrying device. For example, the rotating body 314 may be located below the mechanism 2, and the mechanism 31 2 may be connected to the guide rail in a suspended manner. As long as it is possible, take out the cassettes on the production line and transfer them to the backup machine or buffer zone f 'to achieve the purpose of back-up of the machines on the production line. In addition, the handling device is also managed by Automatic Material Handling System (AMHS), and uses computer control and management technology, called computer integrated manufacturing (CIM,

593088 V. Description of Invention (8)

Computer Integrated Manufacturing), which integrates all production control from design to finished product shipment. This computer system provides functions such as design, material control, manufacturing, testing, assembly, and inspection, and can record each cassette in detail. Processed position. In addition, the conveying device can be moved and moved quickly, so the present invention can still produce good quality products in the shortest time. The conveyor device (Conveyer) of the present invention is used to transport a card loaded with a glass substrate. Compared with the single glass substrate, the transport cassette has the advantages of avoiding direct contact between the glass substrate and the conveying surface of the conveying device (such as rollers or belts) and causing particie contamination, or carelessness during conveying. Causes scratches. In addition, it is not necessary to pay special attention to the problems such as particle contamination or scratching because the cassette is directly transported without the single glass substrate. The cost of the entire conveyor can be greatly reduced, thereby reducing the cost of the production line. In addition, in practical applications, a sequential cassette, or line cassette H (wire cassette, line cassette) can be used. The glass substrate in a sequential cassette is supported by steel wires, so the distance between the glass substrates It can be very close (about 6.7 mm), and many pieces of glass substrate can be placed in the cassette. As for the conveying device, it can be designed according to the cooperation between the cassette and the conveying device. For example, the conveying device is composed of a plurality of metal or Teflon rollers, and the rollers can also be lined with a belt with holes. In some specific positions of the conveying device, such as near the entrance of each production machine, more pins are formed between the rollers. When the crane 31 G needs to carry the card s _, the nails can be used to Jack up,

TW1064F (Chimei) .ptd Page 12 593088 5. Description of the invention (9) The robot arm 316 can be placed in the bottom of the card to remove the card. The object, crane and positioning sensor are coordinated with each other. For another example, the bottom plate of the card is slightly raised. When the card has holes in the conveying device, the bottom plate is at a distance from the belt, so that the robotic arm 316 can be transported to the bottom of the conveyer, and the nail on the conveying device can be reduced. Number of objects, up to + nails. In addition, according to the above, the technical features of the present invention are: using the conveyer of the second connection machine (conveyer) to cooperate with the conveying device, the cassettes on the production line are instantly transferred to the backup machine as needed for continuous production. Office. Therefore, the buffer storage area of the present invention does not need to be limited as shown in FIG. 2, and another area may be planned outside the process area. As for the machine included in the standby production line 30, it may be exactly the same as the machine included in the main production line 20, or only one of the processes is selected, depending on the difficulty of production or the stability of the process machine. For example, the etching process and the photoresist removal process play an important role in the production process of this product, and then the etching machine and the photoresist removal machine can be selected as the spare machines in the spare line 30. As another example, if the film forming machine is relatively unstable, the film forming machine may be selected as a standby machine. 'As for the position of the standby production line 30, in addition to the main production line 20: surface (as shown in Figure 2), it can also be placed in the rear of the main production line 20 according to actual needs, such as the shape and size of the plant land. set. $ In practical application, the method of the present invention can also be applied to a production line originally similar to :: 士. As long as the production process is properly configured, the same tool can become a backup machine for another machine. Please refer to No. 593088 V. Description of the Invention (4) ------Fig. 4 is a diagram showing a multi-path configuration of an embodiment of the present invention. Assume that the manufacturing of this component requires 5 residences. The process conditions for the 3 layers of the component's production flow are similar, and the 2nd and 4th layers are the same, and the 1st and 4th lines are shown in the production line configuration shown in Figure 4.丨 涔, the process conditions are similar to the above, then the above-mentioned conveying device and the production equipment of the wheel ^ floor production machine can be mutually supported. Similarly, 'the above-mentioned conveying device and the layer and the fourth layer and the fourth layer and the fourth layer of the production machine are provided and connected between the first and third machines to support each other. If one is set, then the second production line of this station will be transported to the conveyor, which also eases the transfer between the machine and the machine. It is also an invention of a conveyor that is not an invention of the invention. The cassettes are immediately flushed to the storage area. Support small 'and further large, although it is used to limit the spirit and scope of the protection scope, the conveyor and the production machine are transported to the backup machine C ... and the production of :::: machine continues the process or moves , Storage. Compared with the conventional technology, the present invention binds the advantages of the Flow-Shop production line layout, and the manufacturing process is greatly shortened, and the space required for production reduces the production cost. However, the present invention has been disclosed in the preferred embodiment above. Without the invention, anyone who is familiar with this skill will be able to make various modifications and retouches without departing from: Therefore, the scope of the attached patent scope shall prevail. .

TW1064F (Chi Mei) .ptd

Page 14 593088 Brief description of the drawings [Simplified description of the drawings] Figure 1 shows a schematic top view of a traditional Job Shop production line layout; Figure 2 shows a back-up of the present invention with machine support (back-up) A simple schematic diagram of a production line layout; FIG. 3 illustrates a simple schematic diagram of a crane according to a preferred embodiment of the present invention; and FIG. 4 illustrates a production process configuration diagram of multiple interconnected components according to an embodiment of the present invention. Description of the drawing numbers 101 •• cleaning area 102: film formation area 103: photoresist coating area 104 •• exposure area 105 •• developing area 106 ·· 刻 engraved area 107: photoresist removal area 108: inspection area 20: Main production line 3 0 ·· Standby production line 20 1: Main process area 202 •• Main process area 203 •• Third main process area

TW1064F (Chimei) .ptd Page 15 593088 Simple illustration of the diagram 20 4: The fourth main process area 20 5, 30 5: Conveying device 30 1 ·· First standby process area 30 2 ·· Second standby process area 30 3 : The third standby process area 30 4: The fourth standby process area 2011 > 2021 > 2031 '2041 > 3011 > 3021' 3031, 304 1: Machine place 2012 > 2022 > 2032 '2042, 3012 '3022 ^ 3032' 3042: buffer storage area 310: crane 31 2: lower mechanism 3 1 4: upper rotating body 3 1 6: telescopic robotic arm

TW1064F (Chi Mei) .ptd Page 16

Claims (1)

^ 3088. Scope of patent application 1. A layout includes: a back-up production line layout, the production line has several main machines, which are arranged in order according to the process required for production; A, the main conveying device ( main conveyer), which is mechanically connected to the main machines to transport at least one cassette; at least one backup machine having the same function as one of the main machines; and a conveying device for In order to carry the cartridge in real time between the main machines and the backup machine. Card 2 • The production line arrangement as described in item 1 of the scope of patent application, where this is a sequential cassette. 3. The production line arrangement as described in item 2 of the scope of patent application, wherein the & 承载 & carries multiple glass substrates, and the glass substrates are separated by steel wires. 4. The production line arrangement according to item 1 of the scope of patent application, wherein the handling device is a crane, which can move horizontally back and forth and vertically up and down. 5. The production line arrangement according to item 4 of the scope of patent application, wherein the crane includes a bearing mechanism, a rotating body and a telescopic robotic arm, and the bearing mechanism is used to carry the rotating body, the telescopic mechanical arm and the rotating body even TW1064F (Chimei) .ptd "-Fifteenth page 593088 VI. Scope of patent application. 6. The production line arrangement as described in item 1 of the scope of patent application, wherein there is a storage space above the main conveying device, and when any machine fails, the conveying device can immediately transfer the cassette to any storage space. 7. The production line arrangement as described in item 1 of the scope of patent application, wherein the backup machine is disposed opposite to the main machine with the same function, and the handling device is disposed between the backup machine and the main machines For production line support. 8. The production line arrangement as described in item 7 of the scope of patent application, in which the number, function and location of the backup machines and the main machines correspond to each other, and are arranged in order according to the manufacturing process required for production. 9. The production line arrangement as described in item 8 of the scope of patent application, wherein the backup machines are mechanically connected to a spare conveyer to transport the cassette. 10. The production line arrangement as described in item 1 of the scope of the patent application, wherein the backup machine is provided behind the production process of the main machines, and the handling device is provided on one side of the machines for the production line Support. TW1064F (Chimei) .ptd Page 18 593088 VI. Patent Application Scope 11. A back-up production line layout. The production line layout includes: a plurality of machines, which are arranged in sequence according to the manufacturing process required; At least one conveyer, which is mechanically connected to each machine to transport-a cassette; and at least one conveying device; wherein at least two of the machines have the same function to enable the conveying The device can instantly transfer the cassette from one of the two machines to the other of the two machines. The production line arrangement as described in item 11 of the patent application scope, wherein the handling device is a crane The town moves horizontally back and forth and vertically up and down. 13. The production line arrangement as described in item 12 of the scope of the patent application, wherein the crane includes a load bearing mechanism, a swivel pinch and a telescopic robotic arm, and the load bearing mechanism is used to carry the rotating body, the slender robotic arm and The rotating bodies are connected. 14. As described in Item 11 of the scope of application for patent, the production line is arranged, and there is a storage space above the conveying device. When any of the machines fails, the conveying device can immediately move the card to any storage space. 11064? (Chimei) Heart (1 Page 19 593088 6. Application for patent scope 15. The production line arrangement as described in item 11 of the scope of patent application, where the same models of machines are arranged opposite each other, and the handling device is set at Support the production line between the machines of the same paragraph. 16. The production line arrangement as described in item 11 of the scope of patent application, where the machines are arranged according to the order of the process required for production, and the other The same models of machines are arranged behind the production processes of the production process machines, and the handling device is arranged on one side of the machines to support the production line. 17. If the scope of patent application is 11th The production line arrangement described in item 1, wherein the cassette is a sequential cassette. 18. The production line arrangement described in item 17 of the scope of patent application, wherein the sequential cassette carries a plurality of glass substrates And the glass substrates are separated by steel wires. 19. A back-up system for a production line, the production line includes a plurality of main machines, the support system includes: at least one Copying machine, the backup machine has substantially the same function as one of the machines on the production line; a conveyor is mechanically connected to the main machines to continuously Transport at least--cassettes; and at least one handling device that can remove the cassettes from the production line TW1064F (Chimei) .ptd Page 20 593088 6. One of the machines in the scope of patent application is moved to the backup machine. 20. The support system according to item 19 of the scope of patent application, wherein a storage space is provided above the conveying device, and the conveying device can carry the cassette to the storage space. 21. The support system according to item 19 of the scope of patent application, wherein the handling device is a crane, which can move horizontally back and forth and vertically up and down. The crane includes a bearing mechanism and a rotating body. And a telescopic mechanical arm, the carrying mechanism is used for carrying the rotating body, and the telescopic mechanical arm is connected with the rotating body. 2 2. The support system as described in item 19 of the scope of patent application, wherein the backup machine is arranged opposite to the main machine with the same function, and the handling device is arranged on the backup machine and the main machines Between Taiwan and Taiwan for production line support. 2 3. The support system described in item 22 of the scope of patent application, wherein the number of backup machines and the number of major machines, functions and locations are completely corresponding. 24. The support system according to item 23 of the scope of patent application, wherein the conveying device is connected to the backup machines. TW1064F (Chimei) .ptd Page 21 593088 6. Application for patent scope 2 5. The support system as described in item 23 of the patent application scope, wherein the backup machines are connected with a spare conveyer machinery Connection to transport the cassette. _ TW1064F (Chi Mei) .ptd Page 22