TW590808B - Method of forming coating - Google Patents

Abstract

This objective of this invention is to provide a method of forming coating by applying paint on the surface of a substrate by using a die coater to ensure an even coating with very little unevenness of strips. To achieve this objective, this invention provides a method of forming coating by applying paint on the surface of a substrate by using a slit die coater ferrule having a paint ejecting slit formed therein, characterized in that the coating is formed to have a capillary number (Ca), which is obtained by expression (1): Ca=muV/delta where mu is dynamic viscosity of the paint, V is the relative velocity between the substrate and the slit and delta is dynamic surface tension of the paint, and a dimensionless film pressure (X) obtained by (T/t) where a coating gap between a lower end of the slit and a surface of the substrate is (T) and a wet film thickness during the application of the coating is (t) set so as to satisfy either of expression (2): Ca <= 0.0651X<-0.6669> and expression (3): Ca <= -0.0005Ln (X)+0.0108.

Description

590808 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a method for manufacturing a coating film. This method is used in precision coating such as the colored layer of a color light sheet or the resist coating in the field of semiconductor manufacturing. A coating film manufacturing method in which a die (coater) is applied to a surface of a substrate, and a liquid coating is applied to form a coating film. [Prior Art] Conventionally, as a method for forming a coating film on a substrate, a spin coating method, a coating method, and a roll coating method are widely used. Among them, the method using spin coating is a method widely used for resist coating of semiconductor wafers, and a coating film can be formed by dripping paint on the center of the surface of a material to be coated that is rotated. In addition, by setting the type of paint to be suitable for the method, the obtained coating film is spread over the entire range of the material to be coated, and the coating film is extremely accurate and uniform. However, in order to obtain a coating film of a predetermined film thickness, a large amount of material is used, which is not economical. In addition, this method has the problems that the paint adheres to the edge or the back of the coating material, or the paint gels and solidifies when scattered in the device, and lacks the stability and cleanliness of the steps, which causes the quality of the coating to be low. The method using roller coating is a method in which a coating material is transferred to a material to be coated by a roller, and can be used for coating a long material to be coated and being rolled into a roll. However, since the coating is supplied to the application roller and coated in order from the plate, not only the coating is exposed to the air for a long time, but also the deterioration caused by the moisture absorption and oxidation of the coating is easy to occur, and the foreign matter is easily mixed. As a result, the quality of the coated product is lowered. 312 / Invention Manual (Supplements) / 92-10 / 92120376 This fine-coated quilt or cloth material is knotted under the light of a cloth rod 5 590808 In addition, the method of using a rod coating is to use a coated material with a thin wire wound on a rod Method for applying coating. In this method, since it is wound around a thin wire and comes into contact with the material to be coated, it has a tendency to cause streaks on the coating film. In view of such disadvantages, a die coating method has been proposed in recent years. Therefore, patent document 1, patent document 2, and patent document 3 have been proposed to apply die coating to a color filter. Die coating is widely used in conventional thick film coating or continuous coating of high materials. The use of die coating to form the material to be coated is known as patent document 4, patent document 5, and patent document 6 curtainf 1 0w) method, extrusion method, liquid bead method and other coating methods. Among them, the above-mentioned liquid bead method discharges coating material from a slit provided in the die mouth, and between the discharge outlet and the material to be coated that moves at a certain interval, a state of aggregated paint called a coating liquid bead is accompanied. The coating material is moved and the paint is drawn out and formed. In addition, if the liquid bead method is used to supply the same amount of paint from the slit as the coating film is formed, and the coating film is continuously formed, the formed coating can be achieved to a high degree. Uniformity of film thickness. In addition, this method almost paints, and the liquid feeding path of the paint until it is discharged from the slit is closed, which can prevent the deterioration of the paint and the mixing of foreign matter, and can maintain the quality of the obtained paint. However, for example, in the manufacture of color filters for liquid crystal displays, most of the cloth film is a film with a film thickness of 10 μl or less when dry. In the case of coating a thin coating film, the volume of the coating liquid beads becomes smaller, and the material liquid There is a high possibility that bead stability is impaired. As a result, the disadvantages of the rod-to-rod in the coating film table 312 / Invention specification (Supplement) / 92-10 / 92120376. The die is made, and the viscosity is increased as shown in the coating film. The (Bead) cloth is spit out and moved relative to the coating film. The precision of the consumption phase is not wasted. Therefore, the two products are coated with this kind of coating. Therefore, the coating surface is relatively perpendicular to the direction of travel of the discharge port, and the possibility of so-called stripe unevenness becomes higher. -This kind of coating film with streaky unevenness on the surface cannot be used for high-precision fragmentation such as the coloring layer of color filters. Therefore, a method for manufacturing such a coating film with less streaky unevenness is expected. (Patent Document 1) Japanese Patent Laid-Open No. 5-1 1 1 105 (Patent Document 2) Japanese Patent Laid-Open No. 5-1 4 2 4 0 7 (Patent Document 3) Japanese Patent Laid-Open No. 6- 3 3 9 6 5 (Patent Document 4) U.S. Patent No. 4, 2 3 0, 7 9 3 (Patent Document 5) U.S. Patent No. 4, 6 9 6, 8 8 5 (Patent Document 6) United States Patent No. 2, 7 6 1, 7 9 1 [Summary] (Problems to be Solved by the Invention) The present invention has been made in view of the above-mentioned problems. The main purpose of the present invention is to provide a method for manufacturing a coating film. It is a coating film manufacturing method in which a coating film manufacturing method for forming a coating film by coating with a die on the surface of a substrate has extremely few occurrences of stripe unevenness, and can obtain a uniform coating film surface. (Means for Solving the Problem) In order to achieve the above-mentioned object, the present invention provides a method for producing a coating film as described in item 1 of the scope of patent application, which is characterized by using a slit die provided with a slit for paint discharge. In the manufacturing method of a coating film that applies a coating on the surface of a substrate to form a coating film, the coating discharge port is set as follows: let the dynamic viscosity of the coating material be μ, the relative speed of the substrate and the discharge port be V, and When the dynamic surface tension is σ, the number of capillaries (C a) i Ca = μ · y / σ (1) obtained by the following 7 312 / Invention Specification (Supplement) / 92-10 / 92120376 590808 Equation (1) and When the coating gap between the substrate surface and the bottom surface of the lower end of the discharge port is T and the wet film thickness at the time of coating film coating is t, the dimensionless film thickness (X) obtained at T / 1 satisfies the following formula ( 2)

Ca ^ 0. 0 6 5 1 X- 0 · 6 6 6 9 (2) and the following formula (3)

Ca ^-0. 0 0 0 5 Ln (X) + 0.0108 (3) to form a coating film. In the present invention, since the coating film is formed by coating with a die under the above-mentioned conditions, the paint liquid beads are formed stably. As a result, the horizontal stripe unevenness caused by the chaos of the paint liquid beads can be suppressed. It is possible to suppress the occurrence of streak unevenness in a right-angle direction with respect to the advancing direction of the die coating, thereby making it possible to produce a coating film having an extremely smooth surface with excellent yield. On the other hand, the present invention also discloses a method for manufacturing a color filter, which is described in item 2 of the patent application, which is a method for manufacturing a color filter formed by forming at least a colored layer and a light-shielding layer on a transparent substrate. It is characterized in that at least one of the colored layer and the light-shielding layer is formed by using the coating film t described in item 1 of the aforementioned patent application scope. Since the manufacturing method of the color filter of the present invention is a manufacturing method using the coating film described above, for example, when the colored layer is manufactured using the coating film manufacturing method described above, the stripe-like unevenness on the surface of the colored layer is small and can be good. A high-quality colored layer having an extremely uniform surface state is produced at a yield. (Effects of the Invention) According to the present invention, the coating film is formed by coating using a die under the above-mentioned conditions. 8 312 / Instruction of the Invention (Supplement) / 92-10 / 92120376 590808 forms a coating film, which can stably form a coating liquid bead. As a result, the horizontal stripe unevenness caused by the chaos of the coating liquid beads can be suppressed, and the occurrence of the stripe unevenness in the right-angle direction with respect to the traveling direction of the die coating can be suppressed. Therefore, the present invention is effective in forming a coating film with a smooth surface and excellent quality at a good yield. [Embodiment] Hereinafter, the manufacturing method of the coating film of this invention and the manufacturing method of the color filter using it are demonstrated separately. A. Manufacturing method of coating film The inventors of this case have focused on stabilizing the coating liquid beads formed on the lower end surface of the coating outlet of the die and the surface of the substrate, so that the horizontal stripe unevenness that occurs on the coating film surface can be greatly increased. From the viewpoint of reduction, various conditions for stabilizing the coating liquid beads were discussed. As a result, it was found that the number of capillaries determined by the dynamic viscosity of the coating, the dynamic surface tension of the coating, and the relative speed between the substrate and the die coating, and The dimensionless film thickness determined by the thickness of the coating seam and the wet film thickness of the distance between the lower end surface of the die coating and the substrate is set within a predetermined range, and the k-stripe can reduce the horizontal stripe unevenness, so it is completed. this invention. Hereinafter, the manufacturing method of the coating film of this invention is demonstrated in detail using drawing. FIG. 1 shows an example of a state in which a coating film is manufactured by the coating film manufacturing method of the present invention, and shows that a discharge die 2 is coated with a slit die provided with a coating discharge slit 1 to form a coating on a substrate 3. The state of film 4. As shown in this example, when the coating film is formed, a coating liquid bead 6 composed of the coating material supplied by the slit 1 is formed between the end surface 5 below the discharge port 2 and the surface of the base material 3. 9 312 / Invention Specification (Supplement) / 92-10 / 92120376 590808 In this state, the coating film 4 is formed on the surface of the substrate 3 by moving the discharge port 2 and the substrate 3 relatively, but if When the coating film 4 is formed, the shape of the coating liquid beads 6 is unstable, and the shape of the coating film 4 formed is unstable, resulting in uneven thickness of the coating film 4. As a result, the horizontal stripe unevenness as described above occurs on the surface of the coating film. Therefore, it is necessary to stabilize the shape of the coating liquid beads 6 described above. In the present invention, as a parameter for stabilizing such coating liquid beads, the number of capillaries (C a) is first considered. The number of capillaries (C a) is represented by the following formula (1).

Ca = β · V / σ (1) where μ is the dynamic viscosity of the coating, V is the relative speed of the substrate and the outlet, and σ is the dynamic surface tension of the coating. In general, from the viewpoint of stabilizing the paint bead, it is preferable that the paint's dynamic viscosity μ is low and the paint dynamic surface tension σ is high to maintain the shape of the paint bead. In terms of the shape stability of the coating, it is preferable that the relative speed V of the substrate and the outlet is low. Therefore, generally speaking, from the viewpoint of the stability of the coating liquid beads, the lower the capillary number (C a) is, the better. As another parameter, the dimensionless film thickness (X) is focused. The dimensionless film thickness (X) is represented by the following formula (4). X = T / t (4) Among them, T is the coating gap between the end surface of the coating die of the slit die and the outlet of the substrate and the surface of the substrate, and t is the wet film thickness of the coating film. As shown in FIG. 1, when T &gt; t and the difference between the two are small, there are fewer problems such as interruption of the liquid r, and the shape of the liquid bead can be maintained, which is preferable. 10 312 / Invention Specification (Supplement) / 92-10 / 92120376 590808 Therefore, in general, the value of dimensionless film thickness (x) is also lower / Next, the number of capillaries (C a) is taken as the vertical axis As the horizontal axis is the next month, a coating film is formed and evaluated by changing various parameters, which will be shown in FIG. 2. In addition, in FIG. 2, 0 indicates that no horizontal streak occurs, Δ indicates that a small amount of horizontal streak unevenness occurs, X indicates that the stripe unevenness occurs, and 氺 indicates that liquid interruption occurs. The presence or absence of horizontal stripes is caused by irradiating a Na lamp on the surface of the coating film, and judging it visually. As mentioned above, in the lower left, that is, no matter the number of capillary tubes or the thickness, the lower the effect is, the better the effect is. The two lower areas are better areas. If it is expressed in the formula, the formulas (2) and (3) can greatly reduce the horizontal stripe unevenness by setting the capillary number and dimensionless film thickness to either of the two formulas.

Ca ^ 0. 0 6 5 1 X- 0 · 6 6 6 9 (2)

Ca ^-0. 0 0 0 5 Ln (X) +0.0108 (3) Moreover, FIG. 3 shows a better area, which can be said to be a better area than the area on the lower left side of the line shown in FIG. 3. If it is expressed in the following formulae (5) and (6), and the number of capillaries and dimensionless film are sufficient for either of these two formulas, the horizontal stripe shape can be greatly reduced.

Ca ^ 0. 0 4 0 3 X- 0 · 6 3 0 1 (5) and the following formula (3)

Ca ^-0. 0 0 0 6 Ln (X) + 0.0 0 8 (6) 1. Various parameters Next, various parameters for calculating the number of capillaries (Ca) and none (X) will be described. (Number of Capillary Tubes) 312 / Invention Specification (Supplement) / 92-10 / 9212〇376 &amp; [Thickness (X) results in uneven striations and lateral L-rays. The dimensionless film straight line left is as follows. To satisfy the two straight lines, the thickness is set to full uniform. Due to secondary film thickness 11 590808 First, in order to obtain the number of capillaries, it is necessary to define the dynamic viscosity μ of the coating, the dynamic surface tension σ of the coating, and the relative speed between the substrate and the outlet. These are described below. a. Dynamic viscosity of paint μ In the present invention, the dynamic viscosity of the paint is a double-cylinder rheometer (manufactured by Ray Europe and the United States-based company-Sikenfick Co., Ltd., trade name: ARES), at a shear rate of 1 0 0 S _1, 2 3 ° C, liquid value measured under the conditions of 10 cc. The schematic diagram of the dual-cylinder rheometer is shown in Figure 4. The coating material capable of using the coating film manufacturing method of the present invention has a dynamic viscosity upper limit value of 20 mPa · s or less, preferably 10 mPa · s or less; a lower limit value of 1 mPa · s or more, and 1.5 or more as good. The reason why the above-mentioned paint is used in the present invention is that when a paint having a kinematic viscosity within the above range is used, it is possible to effectively suppress the unevenness of the horizontal stripes. b. Dynamic surface tension of the coating σ In the present invention, the dynamic surface tension of the coating is a value measured using a bubble pressure dynamic surface tensiometer (trade name: PB-2, manufactured by KRUSS). The measurement conditions are shown below. Capillary diameter: φ 0. 2 2 8 mm Measuring temperature: 2 3 ° C Liquid volume: 60 cc Surface life: 10ms Capillary immersion depth: 10 mm. Setting density: 1.0 g / cm3 Bubble pressure dynamic A schematic diagram of the surface tensiometer is shown in FIG. 5. 12 312 / Invention Specification (Supplement) / 92-10 / 921203 76 590808

The paint which can use the coating film manufacturing method of the present invention has a dynamic surface tension upper limit value of 7 2 m N / m or less, preferably 50 m N / m or less; and a lower limit value of 27 mN / m or more, It is preferably 30 mN / m or more. The reason why the above-mentioned paint is used in the present invention is that when a paint having a dynamic surface tension within the above range is used, it is possible to effectively suppress the unevenness of the horizontal stripes. c. Coating speed V The coating speed of the present invention refers to the relative speed of the slit die coating outlet and the substrate. The coating speed applicable to the coating film manufacturing method of the present invention is in a range of 0.01 m / sec to 0.50 m / sec, and particularly preferably in a range of 0.05 m / sec to 0.20 m / s e c. If the coating speed is lower than the above range, problems may occur in terms of production efficiency, which is not good, and if the coating speed is higher than the above range, the production apparatus cannot be realized. (Dimensional film thickness)

The dimensionless film thickness (X) used in the present invention is a parameter calculated from the coating slit T and the wet film thickness t as described above. a. Coating seam T The coating seam T used in the present invention refers to the distance from the lower end surface of the coating outlet of the slit die to the surface of the substrate. In the present invention, from the viewpoint of the stability of the coating liquid beads, the T value of the coating seam must be greater than the wet film thickness t described later. The specific range of the coating seam T of the present invention is 50 to 300 μm, particularly preferably 70 to 200 μm. If it exceeds the above range, it is generally difficult to stabilize the shape of the coating liquid bead. If it is lower than the above range, it is difficult to use it in practice due to the precision of the machine. 13 312 / Invention Specification (Supplement) / 92-10 / 921203 76 590808 b. Wet film thickness t The wet film thickness t used in the present invention is the shape of the amount of coating / coated area applied to the substrate The expression refers to the distance between the solid-liquid interface and the gas-liquid interface when the coating solvent is present before the coating solvent is volatilized. The specific range of the wet film thickness t of the present invention is in the range of 5 μm to 50 μm, and particularly in the range of 6 μm to 30 μm. If it is lower than the above range, it is difficult to form the surface into a uniform state, and if it is higher than the above range, it is impossible to find a suitable application (other parameters) for such a high-precision surface uniformity. In the present invention, as described above, The coating material is selected in such a way that the number of capillaries has a predetermined relationship with the dimensionless film, and the parameters of the device can be adjusted to obtain a coating film that suppresses the occurrence of lateral stripe unevenness. In addition to the consideration of dimensionless film thickness, when the values of other parameters are significantly different, it may affect the occurrence of striped unevenness. This type of participation is explained below. a. Discharge amount Since the discharge amount of the paint discharged from the discharge outlet is one of the results that affects the above wet film, when the discharge amount is also within a predetermined range, horizontal stripe unevenness is suppressed. Specifically, the discharge amount per unit length, that is, the discharge amount per length in the length direction of the outlet, is in the range of 0.1cc / min ~ 10cc / min, especially in the range of 0.1cc / min ~ 10cc / min. The coating film manufacturing of the invention 312 / Invention specification (Supplement) / 92-10 / 92120376 The material thickness is within the range, and the thickness is 0. The factor is also a few. Thickness t can be lcm. It works well in method 14 590808, and can produce a coating film that can suppress the occurrence of horizontal stripe unevenness. In addition, the above values are applicable when the slit width (slit of the slit) is within the range of 30 to 150 μm, and the dimensional error of the slit of the slit is within 10%. b. Dry film thickness of coating film This is also a parameter that affects the above-mentioned wet film thickness t, which is a parameter determined by the relationship between the solid content concentration and the wet film thickness t. Specifically, the term is in the range of 0.5 μm to 5 μm, in particular, in the range of 1 μm to 3 μm, and the film thickness difference between the central part of the substrate and the area inside 50 mm from the edge of the coating film is within ± 5%. Better. When the coating film in the above range is produced, the horizontal streak unevenness suppressing effect of the present invention can be effectively obtained. 2. Manufacturing method of coating film The present invention is to adjust the above parameters to satisfy a predetermined relationship, so as to produce a coating film with little unevenness in the horizontal stripes, but specifically, the manufacturing method of the coating film uses a mold A person who finishes the coating by coating the discharge port using a slit-type die provided with a slit for coating discharge, applies the coating on the surface of the substrate, and forms a coating film. a. Slot die coating and discharge port The slit die coating and discharge port used in the present invention is not particularly limited in shape or material. As long as the discharge port can control the discharge amount with high precision, Any kind or shape can be used. Specifically, for example, as shown in FIG. 1, a front periphery 7 and a rear periphery 8 are formed, and a slit 1 is formed therebetween. In this case, the paint is supplied to the manifold 9 by a pump (not shown), and is discharged from the surface of the substrate 3 through the slit 1. 15 312 / Invention Specification (Supplement) / 92-10 / 92120376 590808 In addition, this type of pump for supplying coating to the slit die coating outlet is used for general die coating method, such as double diaphragm pump or tube film There are no particular restrictions on the tablet pump, etc. b. Substrate As the substrate on which the coating film is formed according to the present invention, it is only necessary to use a sheet and the surface has a certain degree of smoothness. There is no particular limitation on the use of a substrate such as a glass substrate or a transparent resin substrate. c. Coating The coating used in the present invention is not particularly limited as long as it can satisfy the above-mentioned coatings. In general, those formed by dissolving in a solvent are used, but are not limited to this type. Coatings also have many components and are polymerized and hardened after coating. Specific examples include coloring paints for color filters and paints for various kinds of resists as described later. d. Other In the coating film manufacturing method of the present invention, in order to make the edge of the coating film flat, after the coating by the die coating method is completed, a rotation of 500 r p m or less is applied. Also, in order to smoothen the edge of the coating film, suck-back can also be performed. B. Color filter manufacturing method The color filter manufacturing method of the present invention is based on the color formation of a transparent substrate The manufacturing method of a color filter made of a layer and a light-shielding layer is formed by a coating film manufacturing method of at least one of the above-mentioned coating layer and the above-mentioned light-shielding layer. 312 / Invention Manual (Supplement) / 92-10 / 92120376 Pump, which can be supplied by pump and injection type; According to the parameter relationship, solid solution can be used for slippage of monomer layer formation, and it can be optimized for low-speed rotation. At least the shape method, which specifically uses the above 16 590808. Generally speaking, a color filter on a transparent substrate has: a light-shielding layer called a black matrix; the openings of the light-shielding layer are made into colored pixels, and red (R) , Green (G), blue (B) colored pixels of the three primary colors _______ „layer; and a protective layer provided as needed. When forming the colored layer and the shielding layer, use the above coating film manufacturing method, In this way, a color filter having a coloring layer with excellent surface smoothness can be formed in good yield. In addition, in the present invention, it is preferable to form the above-mentioned protective layer provided by the above-mentioned coating film manufacturing method, and obtain A protective layer with a uniform surface state. In addition, the color filter obtained by the color filter manufacturing method of the present invention has a coating layer, a light-shielding layer, or a protective layer prepared by the coating film manufacturing method described above. Eliminate the waste of the material side and obtain high-quality products that greatly suppress the occurrence of streaky unevenness. The transparent substrate used in the color filter manufacturing method of the present invention should only be used by ordinary color filters That is, there is no particular limitation. When the colored layer or the light-shielding layer is formed by the coating film manufacturing method described above, only the composition of the coating material is within the range of the above-mentioned various parameters, and all materials generally used can be used. There are no particular restrictions on transparent electrical or other components used in color filters, as long as they are generally used to form color filters, and various components can be used depending on the application. In addition, the content of the present invention is not limited to the above. The above-mentioned embodiment is merely an example, and anyone who has the same or substantially the same technical idea as that described in the scope of patent application of the present invention, or who has the same effect as the invention, is included in the technology of the present invention. Within range (Example) 312 / Invention Specification (Supplement) / 92-10 / 92120376 The color is colored, and the color can be extremely different. The following 17 590808 exemplifies the following examples to further illustrate the present invention. A non-inspection glass (NEC Glass 0A-1 0) with a substrate size of 550minx650mmx0.7mm is used, and a double diaphragm pump is used as a fixed-quantity pump. Also, the slit front The width of the ejection outlet in the covering direction is set to 540 mm. The central portion of the front end of the ejection outlet is stopped at a distance of 10 mm from the edge of the glass substrate, the gap is set to 40 μπι, and 0 · 0 1 to 0. 0 3 L / mi η discharge rate of the paint from 0.3 to 1.0 sec to form paint droplets. In addition, the composition of the paint is as follows. Second, the substrate transfer speed and the discharge rate are arbitrarily set at 15min / Between sec to 180mm / sec and 0.01 to 0.03L / min, the paint discharge device is raised in the Z-axis direction, and stopped at the point between 40 μm and 200 μm of the coating seam. This is a fixed coating state. Then, the coating material is stopped from being discharged at a position of 10 mm from the edge of the substrate on the coating-completed side, and at the same time, the coating which raises the coating material discharge device in the Z-axis direction is completed. The obtained coated substrate was decompressed by a chemical dry pump and temporarily dried until the internal pressure of the cavity was 9 3 P a. Thereafter, it was aged on a hot plate at 80 ° C for 30 minutes to obtain Coating film. Here, the parameters on the paint side and the parameters on the device side are changed as shown in Fig. 2 to obtain data corresponding to various capillary numbers and dimensionless film thickness values. Specifically, the solid content concentration of the coating is set to 16.4% by mass, 18.8% by mass, 19.9% by mass, 24% by mass, 24.8% by mass, and 29.6% by mass. And 6 grades such as 34% by mass, thereby changing the dynamic viscosity and dynamic surface tension by 6 grades. Regarding the parameters on the device side, coating 18 312 / Invention Manual (Supplement) / 92-10 / 92120376 590808 The cloth speed was changed within the range of 15mm / sec ~ 180inm / sec, and the wet film thickness was 5.06μιη ~ 28.58μπι It varies within the range, and the coating seam varies from 40 μm to 200 μm (5 levels such as 40 μm, 80 μm, 100 μm, 150 μm, and 200 μm). The composition of the coating is as follows. &lt; Paint composition 1: solid content concentration 2 4. 8% by mass &gt; • propylene glycol monofluorenyl ether acetate: 3 5. 6 2 parts by weight • 3-methoxybutyl acetate: 39.39 parts by weight • pigment: 6.2 parts by weight (Pigment Red 2 5 4, Pigment Ye 1 1 ow 1 3 8) • Alkali-soluble acrylic polymer: 7.8 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 6 0 ) • Photopolymerizable monomers: 5.2 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiators: 2.5 parts by weight (2-fluorenyl-1- [4- (methylsulfide) Alcohol) Phenol] -2 -morpholinylacetone-1) + (diethylaminobenzophenone) • Pigment dispersant: 3.1 parts by weight (by Percometer (Disperbykl61)) &lt; Paint Composition 2: Solid content concentration 19.9% by mass &gt; • Propylene glycol monomethyl ether acetate: 3 8. 0 4 parts by weight • 3-ethoxybutyl acetate: 42.06 parts by weight • Pigment: 5.0 Weight part (Pigment Red 2 5 4, Pigment Ye 1 1 ow 1 3 8) 19 312 / Invention Specification (Supplement) / 92-10 / 92120376 590808 • Alkali soluble acrylic polymer: 6.3 weight part (average molecular weight) : 1 0 0 0 0, acid value: 6 0) Photopolymerizable monomer: 4.2 parts by weight (diisopentaerythritol pentaacrylate). • Photopolymerization initiator: 2.0 parts by weight. (2-fluorenyl-1- [4- (fluorenylsulfur) Alcohol) Phenol]-2 -morpholinylacetone-1) + (diethylamino benzophenone) • Pigment dispersant: 2.5 parts by weight (made by Bioco Meter (stock), Disperbykl61) &lt; Coating composition 3: Solid content concentration 16.4% by mass &gt; • Propylene glycol monomethyl ether acetate: 3 9. 7 0 parts by weight • 3-methoxybutyl acetate: 4 3. 9 0 parts by weight • Pigment: 4.1 parts by weight (Pigment Red254, Pigment Y e1 1w 1 3 8) • Alkali-soluble acrylic polymer: 5.2 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 6 0) · • Photopolymerizable monomer: 3.4 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 1.7 parts by weight (2-methyl-1_ [4- (fluorenylthiol) Benzene S]-2-Moryl propyl S with -1) + (Diethylamino benzophenone) • Pigment dispersant: 2.1 parts by weight (By Pico Co., Ltd., Disperbykl61) &lt; Coating composition 4: Solid content concentration 24% by mass &gt; 20 312 / Invention specification (Supplement) / 92-10 / 92 1203 76 5ίΚ) 808 • Propylene glycol monomethyl ether acetate: 3 6. 〇 9 parts by weight • 3-methoxybutyl acetate: 3 9. 9 1 parts by weight • Pigment: 6.0 parts by weight (Pigment Red 2 5 4, Pigment Y e11o w 1 3 8) • Alkali soluble acrylic polymer: 7.5 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 60) • Photopolymerizable monomer: 5. 0 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 2.4 parts by weight (2-methyl-1- [4- (methylthiol) phenol] -2 -morpholinyl Acetone-1) + (diethylaminobenzophenone) • Pigment dispersant: 3.0 parts by weight (Disperbykl61, manufactured by Bioscomi), &lt; paint composition 5: solid content concentration 3 4 mass! &gt; • Propylene glycol monofluorenyl ether acetate: 3 1. 3 4 parts by weight • 3-methoxybutyl acetate: 34.66 parts by weight • Pigments: 8.5 parts by weight (Pigment R ed 2 5 4 j Pigment Y e1 1 ow13 8) • Alkali-soluble acrylic polymer: 10.7 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 60) • Photopolymerizable monomer: 7.1 parts by weight (two different) Pentaerythritol pentaacrylate) • Photopolymerization initiator: 3.4 parts by weight (2-methyl-1- [4- (methylthiol) phenol] -2 -morpholinylacetone-1) + 21

312 / Invention Manual (Supplement) / 92-10 / 92120376 590808 (Diethylaminobenzophenone) • Pigment dispersant: 4.2 parts by weight (by Percometer (Disperbykl61)) &lt; Paint Composition 6: Solid content concentration 18.8% by mass &gt; • Propylene glycol monofluorenyl ether acetate: 38.14 parts by weight • 3-Methoxybutyl acetate: 43.06 parts by weight • Pigment: 4.7 parts by weight (Pigment Red 2 5 4, Pigment Y e 1 1 ο w13 8) • Soluble hydrazine polymer: 6.3 parts by weight (average molecular weight: 1 0 0 0 0, acid value: 6 0) • Photopolymerization Monomer: 3.9 parts by weight (diisopentaerythritol pentaacrylate) • Photopolymerization initiator: 1.6 parts by weight (2-methyl-1- [4- (methyl mercaptan) benzene ]-2-morpholinylpropanone-1) + (diethylaminobenzophenone) • Pigment dispersant: 2.4 parts by weight (Disperbykl61, manufactured by Piccolo) The state of the horizontal stripe-type unevenness of the coating film surface with various capillary numbers and dimensionless film thickness values is evaluated by the above-mentioned evaluation method, that is, visually. Those without horizontal stripe-shaped unevenness are evaluated as 0, resulting in less Lateral striped unevenness △ sentences are to evaluate, transverse striped nonuniformity were evaluated by X, an interrupt is generated by the liquid by a * evaluation. The results are shown in Table 1, Table 2 and Fig. 2. 22 312 / Invention Specification (Supplement) / 92-10 / 92120376 〇 〇

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Lo base 舲% 8 Formula 1 Real sword% 6.6L ^^ zlt sword 0 / 0K9I Order IS colt 9 卜 0-36 / (# = ^) _ ^^^ 林 / 31 £ 590808 i Sv, 〇〇〇〇〇〇〇〇〇〇〇〇〇〇〇XX 〇〇〇〇〇〇〇〇〇〇〇 〇 〇 〇 〇 〇 〇 〇 〇 5 5 wf, ◎ ◎ ◎ ◎ &lt; 1 ◎ ◎ ◎ ◎ XX ◎ ◎ &lt; &lt; &lt; &lt; &lt;] &lt; X ◎ X ◎ ◎ ◎ &lt;] &lt; &lt; X base θ 0.00813 0.00578 0.01135 0.00963 0.00813 0.01477 0.01242 0.01049 0.00749 0.00749 0.00963 | 0.01259 1 0.00963 0.01284 0.01284 0.01606 0.01391 0.01927 0.01927 0.01927 0.01927 I 0.01927 0.01573 0.01573 0.01798 0.02022 0.00899 0.00899 0.01348 0.01155 0.01541 0.02311 0.02311 Ridge I back (NI 05 S CO i—l CD but c ^ j inch '03 L〇CO CD oo CO LO CO T—H 05 c &lt; i Cunbu CO rH LO co S CO co LO § Yeah S Yeh inch & CO CO ο evi S 23 · θά CO J3! CO ·· · CD cd CD | l CD 2 § 〇§ § § CD 〇 g rH CZ5 § t—HS § § § § g rH § g τ— &lt; g 1— ^ § § § s S 1—H (III 77) 雠 r— ^ CO 〇 · (Nl s 8S oo CO s rH 〇〇 * CM CO TH LO cn &gt; cd &lt; NI oo &lt; NJ co 00 CO ο o 卜 'S · §§ evi si co CO r r-i CO 00 CO s CO: · co CD * τ—Η OJ 1-H BU · S CO S CO E 〇 2 § c =? 丨 coating contact (ian / sec) 00 co &amp; 3 CO LO? 8 s oo LO 05 LO s Fen § S LO s § ss 8 LO inch § § Η § § (ui / p) 1 tfm ^ w 〇3 〇〇 CO oi CO c5 oi CO CN1 CO oi CO oi CO oi CO (Nl CO c5 (NI CO c5 correct ci csi CO eg &lt; Nl CO &amp; 3 nu &amp; 3 oi CO & 3 nu & 3 c5 cvi co od co &lt; Ni CO English · Finn · Finn · Finn · its · § § σί (SI s oi (NI s viscosity (mPa · s) I CD cd cn * CD cn &gt; CD 05 cd CT &gt; C £ 5 CT &gt; to CD CO 05 cd 05 cd CD CD CD cd cn cd 05 cd 05 cd 05 CD σ &gt; cd 05 C £ &gt; Oi cd ΟΪ cd 05 cd CD CD in inch in in LO L £ 2 inch 1 £ 2 LO 〇CO oo co oo co oo CO 5 (NI 4 4s CO ah &lt; 4, LO ice, CD 4 oo 4 05 4 ◦ rH 4 4 5 Csj end! Co base 4n di Ln 赍 CO 5 i oo 5 2 5 s 4 4, 4 4 τ— ^ 4 (NI 4 4 CO u inch 4 LTD CD Bu U OJ sister co 4, $ 0 I system 1 I § $ 0 9 stupid $ 0 9 stupid% 8odl 9Lsl ^ 6 / ip} ffi) _ra ^ s® / ZIe 590808 In addition, the evaluation of the reflection of the N a lamp and the evaluation of the white transmission in the table are based on the following standards get on.

* · I (Na lamp reflection) ◎: Good 〇: Some unevenness △: There is unevenness X: Poor coating occurs (white transmission) ○: Good △: There is some unevenness X: Poor coating occurs' [The diagram is simple Description] Fig. 1 is a schematic cross-sectional view showing an example of a method for manufacturing a coating film of the present invention. Fig. 2 is a graph showing the relationship between parameters and surface conditions of the coating film manufacturing method of the present invention. Fig. 3 is a graph showing the relationship between the parameters and the surface state of the coating film manufacturing method of the present invention. Fig. 4 is a schematic perspective view showing a device for measuring dynamic viscosity. Fig. 5 is a schematic front view showing a device for measuring dynamic surface tension. (Explanation of component symbols) 1 Slit 2 Slot die coating discharge port,-3 Base material 25 312 / Invention Manual (Supplement) / 92-10 / 92120376 590808 4 Coating film 5 Lower end face of the discharge port 6 Coating liquid beads 7 front perimeter 8 rear perimeter 9 manifold

312 / Invention Specification (Supplement) / 92-10 / 92120376 26

Claims (1)

590808 Patent application scope: 1. A method for manufacturing a coating film, which uses a slit die provided with a coating discharge slit to coat the surface of a substrate and applies a coating to form a coating film. The method is characterized in that: : Let the kinematic viscosity of the coating material be μ, the pairing speed of the substrate and the discharge port be V, and the dynamic surface tension of the coating material be σ, the capillary number (Ca) obtained by the following formula (1); Ca = # · V / ¢ 7 (1) When the coating gap between the lower end surface of the discharge port and the surface of the substrate is T, and the wet film thickness at the time of coating film coating is t, T / 1 is dimensionless. The film thickness (X) satisfies the following formula (2) V '&quot; · Ca ^ 0. 0 6 5 1 X &quot; 0 · 6 6 6 9 (2) and the following formula (3) Ca ^-0. 0 0 0 5 Ln (X) + 0.011 08 (3) to form a coating film. 2. A method for manufacturing a color filter, which is a method for manufacturing a color filter formed on a transparent substrate to form a colored layer and a light-shielding layer, characterized in that at least one of the coloring layer and the light-shielding layer is It is formed by using the manufacturing method of the coating film described in the above patent scope item 1. 312 / Invention Manual (Supplements) / 92-10 / 92120376 Narrow coated papers are few of them 27