TW583675B - A split-gate flash memory cell array able to program data in bytes and erase - Google Patents

A split-gate flash memory cell array able to program data in bytes and erase Download PDF

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TW583675B
TW583675B TW91116377A TW91116377A TW583675B TW 583675 B TW583675 B TW 583675B TW 91116377 A TW91116377 A TW 91116377A TW 91116377 A TW91116377 A TW 91116377A TW 583675 B TW583675 B TW 583675B
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memory cell
memory cells
byte
array
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TW91116377A
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Yu-De Chr
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Taiwan Semiconductor Mfg
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Abstract

A split-gate flash memory cell array having functions to program data in bytes and to erase is provided. In the first embodiment, every array element consists of a switch and memory cells forming a byte, and a local word line connecting all of the control gates of the memory cells in the byte. The memory cells belonging to the same row commonly share a source line, but the common source lines of the adjacent two rows are separated to avoid the punch-through disturb or reverse tunneling happening in the adjacent byte when one byte is proceeding data refresh. In the second embodiment, read R cell and program P cell is used to replace the single cell in the first embodiment. At this time, 2T memory cells of the adjacent rows commonly use a bit line through the R memory cell, and the P memory cells located in another row do not share the same bit line, and they are arranged alternatively. Or, the P cell in the 2T memory cells is adjusted to high threshold voltage to prevent the punch-through disturb or reverse tunneling problems of the adjacent bytes.

Description

583675 五、發明說明(1) 發明領域: 本發明是關於一種分閘快閃記憶胞陣列,特別是一種 可以位元組為資料存取單位之分閘快閃記憶胞陣列及其周 邊電路。 發明背景: 快閃記憶體係一種低耗電、高存取速度,及防震、耐 移動性、高穩定性等安全資料存取條件方面的全新的儲存 系統,資訊可以較有效率的記憶區段(blocks)方式來記 錄(或消除),而不像按位元組依序紀錄那麼緩慢。此 外,資料一旦存到快閃記憶體之後,就不再需要任何電源 用來保留資料。一般而言,以目前之技術即使電源是在關 掉後仍可保留儲存的資料至少十年以上。這種優勢已使得 其他可攜式儲存系統黯然失色,因此和其它的儲存媒體相 比較,快閃記憶體具有十足的競爭力。十足明日之星的架 勢。不只是數位相機,筆記型電腦,掌上型電子記事薄, 行動電話等電子產品,對快閃記憶體的需求,更是密不可 分0583675 V. Description of the invention (1) Field of the invention: The present invention relates to an open flash memory cell array, in particular to an open flash memory cell array that can use a byte as a data access unit and its peripheral circuits. Background of the invention: The flash memory system is a brand new storage system with low power consumption, high access speed, and shock-resistant, mobile-resistant, high stability and other safe data access conditions. Information can be more efficiently stored ( blocks) to record (or eliminate) them, rather than as slowly as byte-wise sequential recording. In addition, once data is stored in flash memory, no power is needed to retain the data. Generally speaking, with the current technology, the stored data can be retained for at least ten years even after the power is turned off. This advantage has eclipsed other portable storage systems, so flash memory is extremely competitive compared to other storage media. Stance of a full tomorrow star. Not only digital cameras, notebook computers, handheld electronic notebooks, mobile phones and other electronic products, the demand for flash memory is inseparable.

583675 五、發明說明(2) CF(compact memory card)卡、MMC(mu 11 i med i a memory card)卡、MS(memory stick card)卡或 SMC(smart memory c a r d )卡。這些記憶卡經常都會被覆寫,以更新資料。換 言之,快閃記憶胞不只是在資料寫入後,可以提供資料讀 出,且經常需要做資料更新。因此,除了以區塊為單位做 為資料更新的方式,如果能以位元組為資料更新的單位, 是有其必要的。不過時下的分閘記憶胞陣列,由於相鄰兩 列多是源極共用,控制閘極相向,因此,當一位元組更新 時,將會影響相鄰位元組保存之資料内容。 典型之 SST(Silicon Storage Technology Inc,的快 閃記憶體產品)陣列,如圖一所示,係不能以位元組為資 料抹除單位。圖中,包含奇數列與偶數列相鄰之位元組記 憶胞(圖上僅示相鄰的兩個記憶胞,代替完整之一位元組丄 X 8位元(b i t)的陣列,即其他6個記憶胞則未圖示,當然 也可以是lx 1 6、或lx 3 2位元,視每位元組多少個位元而 定。圖一所示代表之四組相鄰位元組(byte)ll、21、12、 2 2。這四組位元組,奇數列與偶數列係共用源極線 (source 1 ine)的,而字線則是同一列的字線相同。當字 線加高電壓,源極線接地時,可以使同一列的資料都被抹 除。 如果要進行以位元組為單位的更新,除了要將字線以 位元組切開外,每一位元組需單獨有各自的開關才行。然583675 V. Description of the invention (2) CF (compact memory card) card, MMC (mu 11 i med i a memory card) card, MS (memory stick card) card or SMC (smart memory c a r d) card. These memory cards are often overwritten to update data. In other words, flash memory cells can not only provide data reading after data writing, but also often need to update data. Therefore, in addition to using blocks as the unit of data update, it is necessary to use bytes as the unit of data update. However, in the current open-memory cell array, since the two adjacent columns are mostly shared by the source and control the gates facing each other, when a byte is updated, it will affect the data content stored by the adjacent byte. A typical SST (Silicon Storage Technology Inc. flash memory product) array, as shown in Figure 1, cannot be erased in bytes. In the figure, it contains the memory cells of the odd and even columns adjacent to each other (only two adjacent memory cells are shown on the picture, instead of a complete one-byte X 8-bit array, that is, other The six memory cells are not shown, but of course they can also be lx 1 6 or lx 3 2 bits, depending on how many bits are in each byte. The four groups of adjacent bytes shown in Figure 1 ( byte) ll, 21, 12, 2 2. For these four groups of bytes, the odd and even columns share the source line (source 1 ine), and the word lines are the same word lines in the same column. When the word line When the voltage is increased and the source line is grounded, the data in the same column can be erased. If you want to update in bytes, in addition to cutting the word line in bytes, each byte Need to have their own separate switches.

第5頁 583675 五、發明說明(3) 而即便如此,陣列中同一行的所有記憶胞是共用位元線 的,除此之外,相鄰兩列記憶胞也是共用源極線。因此, 簡單的只將字線以位元組切開是不夠的。否則在對記憶胞 進行程式化,或資料抹除,或讀取時,由於上述動作所設 定條件不盡相同,因此將有不同程度的程式化干擾問題 (program disturb)存在。 例如,以1 1和2 1兩位元組為例,這位元組1 1的第1位 元記為1 1 - 1和位元組2 1的第1位元記為2 1 - 1共用位元線 BL卜共他的7個位元也是。例如1 1 - 2對應2卜2,其他1 1 - 3 至1 1 - 8及2 1 - 3至2卜8 (未圖示)其次,位元組1 1的8個位元 和位元組2 1的8個位元都是共用源極線。只有字線不共用 而已。因此,在對位元組1 1進行程式化時,區域字線施以 1. 8伏的電壓,而1 1 -1及1 1 - 2之位元線係BL1、BL2施以0. 6 伏的電壓,共用源極線S L則是施以例如1 0伏的電壓。此 時,不可避免的,位元組21會有所謂的透穿干擾(punch through d i s t urb ))的情況產生。亦即位元組1 1程式化 時,位元組2 1也同時被程式化,只不過由於位元組2 1之字 線為0伏,因此位元組2 1的各位元被呈較弱方式的程式 化。而使原來應保持在抹除態轉成浮置閘極含有電子的狀 態。 另一個離位元組1 1較遠的位元組2 2也會有所謂的逆向 穿隧(r e v e r s e t u η n e 1 i n g )的問題。即例如位元組2 2不被Page 5 583675 V. Description of the invention (3) Even so, all memory cells in the same row in the array share the bit line. In addition, the adjacent two columns of memory cells also share the source line. Therefore, simply cutting the word line in bytes is not enough. Otherwise, when the memory cells are programmed, or data is erased, or read, the conditions set by the above actions are not the same, so there will be different degrees of program disturb. For example, taking the two-byte tuples 1 1 and 2 1 as an example, the first digit of this tuple 1 1 is recorded as 1 1-1 and the first digit of byte 2 1 is recorded as 2 1-1 The bit line BL is a total of his 7 bits. For example, 1 1-2 corresponds to 2 and 2 and other 1 1-3 to 1 1-8 and 2 1-3 to 2 and 8 (not shown). Second, 8 bits and bytes of byte 1 1 The 8 bits of 21 are all common source lines. Only word lines are not shared. Therefore, when the byte 11 is programmed, the regional word line applies a voltage of 1.8 volts, and the bit lines 1 1 -1 and 1 1-2 apply BL 0.6 and 0.6 The voltage of the common source line SL is, for example, 10 volts. At this time, it is inevitable that the byte 21 will have a so-called punch through interference (punch through d i s t urb)). That is, when byte 1 1 is stylized, byte 2 1 is also stylized at the same time, but because the word line of byte 2 1 is 0 volts, each bit of byte 2 1 is weaker. Stylized. Instead, it should be kept in the erased state and turned into a state where the floating gate contains electrons. Another byte 2 2 farther away from the byte 1 1 also has the problem of so-called reverse tunneling (r e v e r s e t u η n e 1 i n g). I.e. bytes 2 2 are not

第6頁 583675 五、發明說明(4) 程式化,位元線被施加VCC的電壓。此外字線是0伏,共用 源極線S L = 1 0伏。此時,位元線2 2的記憶胞之浮置閘極將 被麵合一 1 0伏的大電壓。因此,電子由控制閘極進入浮置 閘極,同樣地,也使位元組2 2被程式化。 而位元組1 1和位元組1 2,則是源極線SL共用與字線WL 共用。在此情況下,所干擾的狀況,一般稱之為程式化為 l(program FF)的干擾。主要是字線WL共用也有1. 8伏,源 極為1 0V,但位元線則是VCC,因此記憶胞下的通道有可能 亦被微微開啟,類似於上述的透穿干擾。 因此,以上的干擾或由於共用位元線(bit line)或共 用字線(word line)或共用源極線(source line)等狀況各 不相同。這將違背一位元組進行程式化時,其他的相鄰不 進行程式化的位元組不能因此受到干擾的基本前題。 若要解決上述的干擾問題,除非相鄰兩列的源極線也 分開,同一列位元組和位元組之間的共用源極線關係也斷 開。但如此將會因斷開及設立各自控制的開關而佔用晶片 的大量面積。因此,SST的做法是,請參考圖二,相鄰兩 列之所有記憶胞仍共用源極線,而相鄰兩行的記憶胞位元 線是互相錯開的,位元組1 1使用BL1至BL8位元線(標號28 為汲極接觸窗)。而位元組21則是使用BL1’至BL8’位元線 (標號2 8 ’為汲極接觸窗)。即同一列記憶胞的最近鄰居是Page 6 583675 V. Description of the invention (4) The VCC voltage is applied to the bit line. In addition, the word line is 0 volts, and the common source line S L = 10 volts. At this time, the floating gate of the memory cell of the bit line 22 will be combined with a large voltage of 10 volts. Therefore, the electrons enter the floating gate from the control gate, and similarly, the byte 22 is programmed. The bytes 11 and 12 are shared by the source line SL and the word line WL. In this case, the situation of interference is generally referred to as the interference programmed as l (program FF). The word line WL also has 1.8 volts in common, and the source is 10 V, but the bit line is VCC, so the channel under the memory cell may be slightly opened, similar to the penetrating interference described above. Therefore, the above interference may be different due to conditions such as a common bit line, a common word line, or a common source line. This would run counter to the basic premise that one byte cannot be disturbed when other bytes are not programmed. To solve the above interference problem, unless the source lines of two adjacent columns are also separated, the common source line relationship between the bytes and the bytes in the same column is also broken. However, this will occupy a large area of the chip by opening and setting up the respective controlled switches. Therefore, the method of SST is to refer to Figure 2. All the memory cells in two adjacent columns still share the source line, and the bit lines of the memory cells in two adjacent rows are staggered from each other. Bytes 1 1 use BL1 to BL8 bit line (28 is drain contact window). The byte 21 uses the BL1 'to BL8' bit lines (reference numeral 2 8 'is a drain contact window). That is, the nearest neighbor of the same memory cell is

583675 五、發明說明(5) 假記憶胞(dummy ce 1 1 )(沒有做汲極的接觸),以減少干 擾。如圖二的示意圖所示。 有鑑於此,本發明將提供一種新的快閃記憶胞陣列架 構以提供解決上述待克服之問題。 發明概述: 本發明之主要目的,係提供一種可以以位元組資料做 為基本資料更新單位之分閘快閃記憶胞陣列。 本發明之另一目的,除提供以位元組資料做為基本資料更 新單位之分閘快閃記憶胞陣列外,更提供一使相鄰近之位 元組免於受更新之位元組之干擾。 本發明揭露一種可位元組資料程式化與抹除之分閘快 閃記憶胞陣列,在第一實施例中每一陣列元素包含構成一 位元組之記憶胞數及一開關,且具有一區域字線連接該位 元組所有記憶胞的控制閘極,其中,陣列元素同一列之所 有記憶胞共用一源極線,但相鄰兩列之共用源極線則是獨 立的,以防止當一位元組進行資料更新時,相鄰之位元組 產生透穿干擾或逆向穿隧干擾的問題,此外為防止另一種 相同源極線之位元組受到相鄰位元組資料更新之影響,而 採取將欲更新之位元組及不更新之位元組,先寫入於記憶 胞緩衝頁中,再自記憶胞緩衝頁將欲更新之位元組資料寫583675 V. Description of the invention (5) Dummy memory cell (dummy ce 1 1) (without making contact with the drain electrode) to reduce interference. As shown in the schematic diagram of Figure two. In view of this, the present invention will provide a new flash memory cell array architecture to solve the above-mentioned problems to be overcome. Summary of the Invention: The main object of the present invention is to provide a flash memory cell array that can use byte data as a basic data update unit. Another object of the present invention is to provide a flash memory cell array that uses byte data as a basic data update unit, and to provide a neighboring byte to be protected from the interference of the updated byte. . The present invention discloses a split flash memory cell array that can program and erase byte data. In the first embodiment, each array element includes the number of memory cells and a switch that form a byte, and has a switch. The area word line connects the control gates of all memory cells of the byte group. Among them, all memory cells in the same row of the array element share a source line, but the common source lines of two adjacent columns are independent to prevent When a byte is updated with data, the adjacent bytes generate the problem of penetration interference or reverse tunneling interference. In addition, in order to prevent another byte of the same source line from being affected by the update of the adjacent byte data , And the byte to be updated and the byte not to be updated are first written into the memory cell buffer page, and then the byte data to be updated is written from the memory cell buffer page.

583675 五、發明說明(6) 入記憶胞内,最後,再進行記憶胞内之所有資料與記憶胞 緩衝頁驗證比對。若發現先前未更新的資料已被干擾了就 再自記憶胞緩衝頁重新寫入。 本發明之第二實施中則是奇偶相鄰兩列之共源極線不 獨言,但單一記憶胞以2 T記憶胞取代。所謂2 T記憶胞係指 浮置閘極相連接之兩個記憶胞,一為提供讀取功能的R記 憶胞及提供程式化之P記憶胞。但為了使相鄰兩列之P記憶 胞不共用位元線,以避開透穿干擾或逆向穿隧干擾的問 題。相鄰兩列之對應關係為奇數列以P記憶胞、R記憶胞、 D記憶胞,順序排列。而偶數列則是D記憶胞、R記憶胞、P 記憶胞,順序排列,其中D記憶胞係假記憶胞(汲極不連接 至位元線之記憶胞)。 本發明之第三實施相似於本發明之第二實施,係把D 記憶胞的改成R記憶胞,而使得R記憶胞所佔單位倍增,不 浪費矽基板的面積。 本發明之第四實施相似於本發明之第二實施也是使用 2 T記憶胞取代第一實施例之1 T記憶胞,不過P記憶胞和R記 憶胞不錯開,但將P記憶胞調成高啟始電壓以防止相鄰之 位元組產生透穿干擾或逆向穿隧干擾的問題。由於讀取是 在R記憶胞,因此P記憶胞之高啟始電壓是不會影響R記憶 胞的讀取資料的。583675 V. Description of the invention (6) Into the memory cell, finally, all the data in the memory cell and the memory cell buffer page are verified and compared. If it is found that the previously unupdated data has been disturbed, it is rewritten from the memory cell buffer page. In the second implementation of the present invention, the common source lines of the two adjacent columns of parity are not monologous, but a single memory cell is replaced with a 2 T memory cell. The so-called 2 T memory cell refers to two memory cells connected by a floating gate, an R memory cell that provides a reading function and a stylized P memory cell. However, in order to prevent P memory cells in two adjacent columns from sharing bit lines, the problem of penetration interference or reverse tunneling interference is avoided. The corresponding relationship between the two adjacent columns is that the odd columns are arranged in order with P memory cells, R memory cells, and D memory cells. The even-numbered columns are D memory cells, R memory cells, and P memory cells, which are arranged in order. D memory cells are pseudo memory cells (memory cells whose drain is not connected to the bit line). The third embodiment of the present invention is similar to the second embodiment of the present invention. The D memory cell is changed to an R memory cell, so that the unit occupied by the R memory cell is doubled, and the area of the silicon substrate is not wasted. The fourth implementation of the present invention is similar to the second implementation of the present invention and also uses 2 T memory cells instead of 1 T memory cells of the first embodiment, but the P memory cells and the R memory cells are well opened, but the P memory cells are adjusted to high The initial voltage is used to prevent the problem of penetrating interference or reverse tunneling interference between adjacent bytes. Since the reading is in the R memory cell, the high starting voltage of the P memory cell will not affect the reading data of the R memory cell.

第9頁 583675 五、發明說明(7) 上述的第二、第三實施例及第四實施例中,如同第一 實施例,都會將欲更新之位元組及不更新之位元組寫入於 記憶胞緩衝頁中,再自記憶胞緩衝頁將欲更新之位元組資 料寫入記憶胞内,最後,再進行記憶胞内之所有資料與記 憶胞緩衝頁驗證比對。若發現先前未更新的資料已被干擾 了就再自記憶胞緩衝頁重新寫入。以確保所有的資料的正 確性。 詳細說明: 有鑒於典型之分閘快閃記憶胞陣列是不能以位元組為 存取單位,然而具備這個功能又是節省資料更新時間所必 要的功能。但又一如發明背景所述,一位元組進行程式化 時,其他的相鄰不進行程式化的位元組或共用位元線(b i t 1 i ne )或共用字線(word 1 i ne )或共用源極線(source 1 i ne )等狀況各不相同,因此,在對記憶胞進行程式化, 或資料抹除,或讀取時,由於上述動作所設定條件不盡相 同,因此將有不同程度的干擾問題存在。這些干擾包含透 穿干擾或逆向穿隧干與程式FF干擾等 因此,為了達到單一位元組的程式化或資料抹除,而不影 響其他位元組已存在之資料内容襪更動之目的。傳統之 SST記憶胞陣列必須加以修改。 依據本發明之方法,請參考圖三,首先是位元組和位Page 583675 5. Description of the invention (7) In the second, third and fourth embodiments described above, as in the first embodiment, the bytes to be updated and the bytes not to be updated are written. In the memory cell buffer page, the byte data to be updated is written into the memory cell from the memory cell buffer page, and finally, all the data in the memory cell and the memory cell buffer page are verified and compared. If it is found that the previously unupdated data has been disturbed, it will be rewritten from the memory cell buffer page. To ensure that all information is correct. Details: In view of the fact that the typical open flash memory array cannot use bytes as the access unit, however, having this function is a necessary function to save data update time. However, as described in the background of the invention, when a byte is programmed, other adjacent bytes or a shared bit line (bit 1 i ne) or a shared word line (word 1 i ne) that are not programmed are adjacent. ) Or shared source line (source 1 i ne) and other conditions are different. Therefore, when the memory cell is programmed, or data is erased, or read, the conditions set by the above actions are different, so the There are different levels of interference problems. These interferences include penetrating interference or reverse tunneling and program FF interference. Therefore, in order to achieve the programming or data erasure of a single byte without affecting the purpose of changing the data content of other bytes. Traditional SST memory cell arrays must be modified. According to the method of the present invention, please refer to FIG. 3. First, the bytes and bits

第10頁 583675 五、發明說明(8) 兀組之間的子線必須要切斷。因此,如圖示每一位元組有 個別^ Γ開關HV連接區域字線LWL( local word 1 ine),以 3 Ϊ 二l位广組之資料抹除。所有之開關再連接-廣域 字線 GWL(gl〇bal worfi 〗;^ 、 mη 一— 一 1 1 ne ),以便亦可以一整列抹除。 =’(二“le二;:,組開關HV係由同一信號控制EN/ENB致 tmm drbie)°各區域字線^有每-個位 線是切開或隔離的),如圖所示可^數列和偶數列的共用源極 種透穿干擾及第二種的逆向穿巧/及儿2。如此’第-為當奇數列的位元組u程式化u4就可以迎刀而解。因 GWL2和源極線SL2都是〇伏,自铁^ 2數列的位疋線字線 擾。 …、不會有第-種和第二種干 不過’由於位元組1 1和1 2仍舊是此田 三種程式化為丨的干擾仍就會存在、用源極線SL1’因此第 組的共用源極線SL1切開,分別加上二;;把每一列各位元 費有限的空間。幸好’發明人研究上蘇開關,#則一又太過於浪 況是上述三種干擾中較為不嚴重的’第二種干擾的情 不再把每-列之各位元組的共二;。目此’本發明將 方法補救。例如,當程式化後,進次:=蛾而另以其他 的資料進行資料驗證外,不更新的資二:、隹二除了更新 若未發現第三種干擾情況存在就社;科亦進行資料驗證’ 次。當資料更新後,進行資料驗:;束::貝:;再程式化-況存在,就再次資料更新一次。 右杂現苐三種干擾情Page 10 583675 V. Description of the invention (8) The sub-lines between the groups must be cut. Therefore, as shown in the figure, each byte has an individual ^ Γ switch HV connected to the local word line LWL (local word 1 ine), and is erased with the data of the 3 组 2 l wide group. All switches are connected again-wide area word line GWL (glObal worfi; ^, mη a-1 1 ne), so that it can also be erased in a whole row. = '(Two "le two;:, the group switch HV is controlled by the same signal EN / ENB to tmm drbie) ° the word line of each area ^ there are-every bit line is cut or isolated), as shown in the figure ^ The common source of the series and even series is the penetrating interference of the second type and the reverse type of the second type is perfect. So the 'number-u' for the odd-numbered byte u stylized u4 can be solved. Because GWL2 Both the source line SL2 and the source line SL2 are 0 volts from the bit line of the iron ^ 2 series.…, There will be no first and second types, but because the bytes 1 1 and 12 are still this The three kinds of field-programmed interferences will still exist, so use the source line SL1 ', so cut the common source line SL1 of the second group, add two respectively; The space for each column is limited. Fortunately, the inventor Researching on the Su switch, #there is too much and the wave condition is the less serious of the above three kinds of interference. The second kind of interference will no longer divide the tuples of each column into two; for now, the present invention will Method for remedy. For example, when stylized, the times: = moth and other data are used to verify the data. The third kind of interference was not found in the society; Ke also performed data verification 'times. After the data was updated, the data was checked :; beam :: shell :; and then re-programmed-the condition exists, the data is updated again. Right miscellaneous Three types of interference

583675 五、發明說明(9) 設若一記憶胞頁有6 4個位元組,有3 0個位元組需要資 料更新,另外3 4個位元組資料不需要更新,此時,這6 4個 位元組,除了將欲更新的資料先寫入同樣也是6 4個位元組 的頁緩衝區(p a g e b u f f e r )内。不更新的3 4個位元組資料 也同樣被寫入於頁緩衝區内。然後再自頁緩衝區中寫入待 更新之該記憶胞頁中的3 0個位元組。不更新的3 4個位元組 資料留在頁緩衝區,而不寫入記憶胞中。因此,當該記憶 胞頁3 0個位元組資料更新後,隨即進行資料驗證,記憶胞 頁内已更新的3 0個位元組和不更新的3 4個位元組資料都和 頁緩衝區内的資料進行資料比對。若相同則表示未受干 擾,於是結束。若已更新的資料經驗證後結果是錯誤的, 當然必須重新進行程式化。另一種情況是記憶胞頁内已更 新的資料3 0個位元組經驗證後,結果是正確的,但記憶胞 頁未更新的資料,結果是錯誤的,則表示記憶胞頁這3 4個 位元組已受干擾,於是再把頁緩衝區内這3 4個位元組的資 料寫入記憶胞頁内。已更新的資料不再寫入。 一般就一個品管合格的記憶胞頁而言,剛更新的資料 是不會受到鄰近記憶胞寫入的干擾的,因此,是不會有交 互影響的問題。最後,再次進行記憶胞頁資料驗證如上 述。請參考圖四的圖表。圖表為0. 3 5/z m的記憶胞以 1 0 2 4 ( 1 k )位元的程式化時干擾程度的驗證。圖中的曲線係 以每次程式化進行時間1 0秒時程式化次數和記憶胞電流的 比較。除了顯示第二型的干擾(逆向穿隧;如曲線1 6 0 )的583675 V. Description of the invention (9) Suppose that a memory cell page has 64 bytes, 30 bytes need to be updated, and the other 34 bytes do not need to be updated. At this time, these 6 4 For each byte, the data to be updated is first written into a page buffer (pagebuffer) which is also 64 bytes. The unupdated 3 or 4 byte data is also written in the page buffer. Then write 30 bytes of the memory cell page to be updated from the page buffer. The 3 or 4 bytes that are not updated are left in the page buffer and are not written to the memory cell. Therefore, after the 30-byte data of the memory cell page is updated, the data verification is performed immediately. The updated 30-byte data in the memory cell page and the 34-byte data that is not updated are all page buffered. Compare the data in the area. If they are the same, it means that there is no interference, and the process ends. If the updated data is incorrect after verification, it must be reprogrammed. Another situation is that after the 30 bytes of updated data in the memory cell page are verified, the result is correct, but if the data in the memory cell page is not updated and the result is incorrect, it means that the memory cell page has 3 4 The bytes have been disturbed, so the data of the 34 bytes in the page buffer is written into the memory cell page. The updated information is no longer written. Generally, for a qualified memory cell page, the newly updated data will not be disturbed by the writing of neighboring memory cells, so there will be no problem of interaction. Finally, verify the memory cell page data again as described above. Please refer to the chart in Figure 4. The graph shows the interference level when the memory cells of 0.3 5 / z m are programmed with 10 2 (1 k) bits. The curve in the figure is the comparison between the number of programmed times and the memory cell current when the programming time is 10 seconds. In addition to showing the second type of interference (reverse tunneling; as shown in curve 1 6 0)

第12頁 583675 五、發明說明(ίο) 比第三型的干擾(程式成F F ;如曲線1 5 0 )嚴重外,尚顯示 一個事實,即新寫入的資料大約要經過(50/2 ms/次)即 2 5 0 0 0 = 2 5 k次後記憶胞電流才會有明顯的下降。 上述奇數列和偶數列的共用源極線切開或隔離可以免 除了第一型和第二型的干擾,請參考如圖五的示意圖。圖 五中係採取奇數列二個記憶胞5 1 1 R (此記憶胞提供讀取)、 5 1 1 P (此記憶胞提供程式化)浮置閘極5 1 1 F連接在一起視為 一個記憶胞5 1 1,偶數列二個記憶胞5 2 1 P、5 2 1 R浮置閘極 5 2 1 F連接在一起為一個記憶胞的2 T記憶胞5 2 1。記憶胞 5 1 1 P和記憶胞5 2 1 P係錯開的,以使得程式化時,兩列記憶 胞所程式化的位元線則不在同一條位元線上,讀取時則係 同一條位元線。2 T記憶胞的優點是可以增加記憶胞的循環 使用次數耐受度,請參見申請人之另一台灣申請案,申請 案號0 9 1 1 1 0 4 4 6號,發明名稱為「提升循環使用壽命之分 閘快閃記憶胞結構及其程式化方法」併呈以供參考。這樣 將也可避免了第一種透穿干擾的問題發生。 依據圖五之2 T記憶胞的佈局圖。顯示2 T記憶胞5 1 1及 5 2 1各有一個沒有作用的記憶胞5 1 1 D及5 1 2 D。為充分利用 石夕晶圖上允許佈局的任何一塊區域。圖五的佈局圖也可以 如圖六所式,製作一個較大的記憶胞和一個較小的記憶 胞,再將一大一小記憶胞的浮置閘極合併在一起,即有如 3 T的記憶胞,大記憶胞是小記憶胞的兩倍大。如圖六所示Page 12 583675 V. Explanation of the invention (ίο) It is more serious than the third type of interference (programmed as FF; such as curve 1 50). It also shows the fact that the newly written data will pass through (50/2 ms / Time), that is, the memory cell current will decrease significantly after 2 5 0 0 0 = 2 5 k times. The common source lines of the odd and even columns can be cut or isolated to avoid the interference of the first and second types. Please refer to the diagram in Figure 5. In Figure 5, two memory cells 5 1 1 R (the memory cell is provided for reading) and 5 1 1 P (the memory cell is provided for stylization) are connected together as a single floating gate 5 1 1 F. Memory cell 5 1 1, two even cells 5 2 1 P, 5 2 1 R floating gate 5 2 1 F are connected together as a memory cell 2 T memory cell 5 2 1. The memory cell 5 1 1 P and the memory cell 5 2 1 P are staggered so that when programmed, the bit lines programmed by the two rows of memory cells are not on the same bit line, and when read, they are the same bit. Yuan line. 2 The advantage of T memory cells is that they can increase the tolerance of the number of cycles of memory cells. Please refer to another Taiwan application filed by the applicant, with application number 0 9 1 1 1 0 4 4 6 and the invention name is "lifting cycle" The structure of flash memory cell and its programming method of the service life "are presented for reference. This will also avoid the problem of the first type of penetrating interference. According to Figure 5-2, the layout of the T memory cell. It is shown that 2 T memory cells 5 1 1 and 5 2 1 each have an inactive memory cell 5 1 1 D and 5 1 2 D. In order to make full use of any area allowed on the layout of Shi Xijing. The layout of Figure 5 can also be made as shown in Figure 6. Create a larger memory cell and a smaller memory cell, and then combine the floating gates of the large and small memory cells together, such as 3 T Memory cells, large memory cells are twice as large as small memory cells. As shown in Figure 6

第13頁 583675 五、發明說明(11) 奇數行記憶胞和偶數行記憶胞仍然共用源極線,但如同圖 五所示,較小記憶胞5 1 1 P擔任主要程式化的功能,而較大 的記憶胞則5 1 2 R是負責提供資料讀取的功能。Page 13 583675 V. Description of the invention (11) The odd-numbered rows of memory cells and the even-numbered rows of memory cells still share the source line, but as shown in Figure 5, the smaller memory cell 5 1 1 P serves as the main stylized function. The large memory cell 5 1 2 R is responsible for providing data reading functions.

依據本發明方法所設計之防止第一種透穿干擾的另一 實施例是如果七所示,2 T記憶胞,不需要如圖五或圖六錯 開記憶胞的位置而佔用三個記憶胞的面積,本實施例的方 法是將將相鄰兩列2 T記憶胞之專門提供程式化的記憶胞採 取通道之抗透穿離子佈植技術以提高啟始電壓,因此,相 鄰兩列記憶胞將不會有透穿干擾的問題。由於讀取記憶胞 資料時,係由2 T記憶胞中另一負責讀的記憶胞提供的,因 此,不會有電流變小的問題。 上述2 T記憶胞雖然會使得橫向(如圖所示的2 X,長度 變大,即2倍記憶胞長度或如圖所示的3 X ,即3倍記憶胞 長度,但縱向長度不變(即圖示的1 Y ),與相鄰兩列記憶胞 不共用源極的情況比較,縱向長度需要加大,因此,依據 本發明的2T記憶胞設計(圖五至圖七)並不會增加額外的佈 局面積。Another embodiment designed to prevent the first type of penetrating interference according to the method of the present invention is that if the 2 T memory cells shown in FIG. 7 are used, three memory cells need not be staggered as shown in FIG. 5 or FIG. Area, the method of this embodiment is to use the channel-specific anti-penetration ion implantation technology to adopt two channels of adjacent 2 T memory cells to provide stylized memory cells to increase the starting voltage. There will be no problems with penetrating interference. Since the reading of the data of the memory cell is provided by another memory cell in the 2 T memory cell which is responsible for reading, there is no problem of reducing the current. Although the above 2 T memory cells will make the horizontal direction (2 X as shown in the figure, the length becomes larger, that is, 2 times the length of the memory cells or 3 X as shown in the figure, that is, 3 times the length of the memory cells, but the vertical length is unchanged ( That is, as shown in the figure, compared with the case where two adjacent rows of memory cells do not share the source, the vertical length needs to be increased. Therefore, the 2T memory cell design according to the present invention (Figures 5 to 7) will not increase. Extra layout area.

請注意上述的2 T記憶胞中,仍會如同第一實施例,將 欲更新之位元組及不更新之位元組寫入於記憶胞緩衝頁 中,再自記憶胞緩衝頁將欲更新之位元組資料寫入記憶胞 内,最後,再進行記憶胞内之所有資料與記憶胞緩衝頁驗Please note that in the above 2 T memory cell, as in the first embodiment, the bytes to be updated and the bytes not to be updated are written into the memory cell buffer page, and the self-memory buffer page will be updated. The byte data is written into the memory cell, and finally, all the data in the memory cell and the memory cell buffer page check are performed.

第14頁 583675 五、發明說明(12) 證比對。若發現先前未更新的資料已被干擾了就再自記憶 胞緩衝頁重新寫入。以確保所有的資料的正確性。 由以上所述可知,本發明之分閘記憶胞單元具有如下 之優點: 1.每一位元組都加入一字線的開關,同時源極線也增 加開關。除此之外,偶數列和奇數列是分開的,因此,只 要各電極適當給定電壓即可對選定之位元組進行資料讀 出、程式化及資料抹除。Page 14 583675 V. Description of the invention (12) Certificate comparison. If it is found that the previously unupdated data has been disturbed, it will be rewritten from the memory buffer page. To ensure the accuracy of all information. From the above, it can be known that the switching memory cell of the present invention has the following advantages: 1. Each byte is added with a word line switch, and the source line is also added with a switch. In addition, even and odd columns are separated. Therefore, as long as each electrode is properly given a voltage, data can be read, programmed, and erased from the selected byte.

2 ·在對任一位元組操作時,相鄰位元組不會資料可以 防止互相干擾, 以上所述係利用較佳實施例詳細說明本發明,而非限 制本發明之範圍,而且熟知此類技藝人士皆能明瞭,適當 而作些微的改變及調整,仍將不失本發明之要義所在,亦 不脫離本發明之精神和範圍。2 · When operating on any byte, adjacent bytes will not have data to prevent mutual interference. The above description uses the preferred embodiment to describe the present invention in detail, rather than limiting the scope of the invention, and it is well known Those skilled in the art can understand that making appropriate changes and adjustments will still not lose the essence of the present invention, nor depart from the spirit and scope of the present invention.

第15頁 583675 圖式簡單說明 圖一為傳統快閃記憶胞陣列示意圖。 圖二為傳統快閃記憶胞為防止逆向穿隧干擾及透穿干 擾而由SST所提出之記憶胞陣列示意圖。 圖三為依據本發明的方法設計之快閃記憶胞,相鄰兩 列源極各自獨立,每一位元組字線分別由開關控制的記憶 胞陣列示意圖。 圖四為比較圖三之記憶胞陣列在資料更新時間累積和 記憶胞電流因干擾而改變之示意圖。 圖五為依據本發明的方法設計之快閃記憶胞,相鄰兩 列源極仍共用,但每一位元記憶胞係2 T記憶胞,且包含一 假記憶胞,以使相鄰列P記憶胞錯開,以解決相鄰兩列透 穿干擾問題,此外,每一位元組字線分別由開關控制的記 憶胞陣列示意圖。 圖六為依據本發明的方法設計之快閃記憶胞,相鄰兩 列源極仍共用,但每一位元記憶胞使用2 T記憶胞,且R記 憶胞較大,P記憶胞較小,以解決相鄰兩列透穿干擾問 題,每一位元組字線分別由開關控制的記憶胞陣列示意 圖。 圖七為依據本發明的方法設計之快閃記憶胞,相鄰兩 列源極仍共用,但每一位元記憶胞使用2 T記憶胞,其中P 記憶胞啟始電壓提高以解決相鄰兩列透穿干擾問題,且每 一位元組字線分別由開關控制的記憶胞陣列示意圖。 圖號說明:Page 15 583675 Schematic description Figure 1 is a schematic diagram of a traditional flash memory cell array. Figure 2 is a schematic diagram of a memory cell array proposed by SST in order to prevent reverse tunneling interference and penetration interference of traditional flash memory cells. Figure 3 is a schematic diagram of a flash memory cell designed according to the method of the present invention. The two adjacent columns have independent sources, and each byte word line is controlled by a switch. Figure 4 is a schematic diagram comparing the accumulation of the memory cell array in Figure 3 at the time of data update and the change in the memory cell current due to interference. FIG. 5 is a flash memory cell designed according to the method of the present invention. The two adjacent columns of the source are still shared, but each bit memory cell is a 2 T memory cell and contains a dummy memory cell so that the adjacent column P The memory cells are staggered to solve the problem of penetrating interference between two adjacent columns. In addition, each byte word line is a schematic diagram of a memory cell array controlled by a switch. Figure 6 is a flash memory cell designed according to the method of the present invention. The two adjacent columns of the source are still shared, but each bit memory cell uses 2 T memory cells, and the R memory cell is larger and the P memory cell is smaller. In order to solve the problem of penetrating interference between two adjacent columns, each byte word line is a schematic diagram of a memory cell array controlled by a switch. Figure 7 is a flash memory cell designed according to the method of the present invention. The two adjacent columns of the source are still shared, but each bit memory cell uses a 2 T memory cell. The starting voltage of the P memory cell is increased to solve the adjacent two cells. Schematic diagram of memory cell array with column penetration problem and each byte word line controlled by a switch. Figure number description:

第16頁 583675 圖式簡單說明 位元組記憶胞1 1 512P、 512R、 512D 源極線 位元線 廣域字線 區域字線 奇數列位元線 偶數列位元線 HV開關控制信號 汲極接觸Page 16 583675 Schematic description of byte memory cell 1 1 512P, 512R, 512D source line bit line wide area word line area word line odd column bit line even column bit line HV switch control signal drain contact

12、 2卜 22、 511P、 511R、 511D 521R SL2 521P SU、 BL GWL LWL BL1,BL2 BL1’,BL2, EN/ENB 2812, 2b 22, 511P, 511R, 511D 521R SL2 521P SU, BL GWL LWL BL1, BL2 BL1 ’, BL2, EN / ENB 28

521D521D

第17頁Page 17

Claims (1)

583675 六、申請專利範圍 1 · 一種可位元組資料程式化與抹除之分閘快閃記憶胞陣 列,至少包含: 複數個陣列元素,每一元素包含構成一位元組之記憶 胞數及一開關,且具有一區域字線連接該位元組所有記憶 胞的控制閘極,其中,陣列元素同一列之所有記憶胞共用 一源極線;及583675 VI. Scope of patent application 1 · A flash memory cell array that can program and erase byte data, including at least: multiple array elements, each element including the number of memory cells and A switch with a regional word line connecting the control gates of all memory cells of the byte group, wherein all memory cells in the same row of array elements share a source line; and 該每一開關之輸出端連接至每一區域字線,同一列所 有元素的開關之輸入端連接於一廣域字線(g 1 〇 b a 1 w 〇 r d 1 i ne )信號輸入端,同一行所有元素的開關之控制端則連 接於同一控制信號端。 2. 如申請專利範圍第1項所述之分閘快閃記憶胞陣列,其 中上述之陣列元素中奇數列與偶數列不共用源極線係用以 防止相鄰兩列記憶胞共用源極線與位元線將導致透穿干擾 的問題。 3. 如申請專利範圍第1項所述之分閘快閃記憶胞陣列,其 中上述之每一元素具有lx 8、lx 16、或lx 3 2其中一種之 記憶胞數。The output terminal of each switch is connected to each regional word line, and the input terminals of switches of all elements in the same column are connected to a wide-area word line (g 1 〇ba 1 w 〇rd 1 i ne) signal input terminal in the same row. The control terminals of the switches of all elements are connected to the same control signal terminal. 2. The split flash memory cell array as described in item 1 of the scope of the patent application, wherein the odd and even columns in the above-mentioned array elements do not share source lines to prevent two adjacent rows of memory cells from sharing source lines. And bit line will cause the problem of penetration interference. 3. The open flash memory cell array as described in item 1 of the scope of patent application, wherein each of the above elements has a memory cell number of one of lx 8, lx 16, or lx 3 2. 4. 如申請專利範圍第1項所述之分閘快閃記憶胞陣列,其 中上述之開關係用以達到每一位元組可以獨立控制操作電 壓。4. The open flash memory cell array described in item 1 of the scope of patent application, wherein the above open relationship is used to achieve that each byte can independently control the operating voltage. 第18頁 583675 六、申請專利範圍 5 ·如申請專利範圍第1項所述之分閘快閃記憶胞陣列,其 中上述之陣列元素進行資料更新時,係先將欲更新之位元 組資料及不更新的位元組資料同時寫入一記憶胞緩衝頁 内,再將欲更新之位元組資料寫入該陣列元素中欲更新之 位元組記憶胞。 胞 憶 記I5 後 閃新 更 『料 分、 ,資 ^素 項B 5 部 第在 圍素 範元 ruj rnj ί 歹 專陣 請之 申述 如上 CD 列 其 緩 胞 意 己 等 再 確 以 證 驗 料 資 行 進。 面擾 全干 素受 元未 列料 陣資 該組 與元 料位 資之 組新 元更 位行 内進 頁未 衝認 t已 其f U資V 胞元 It位 己之 V Γ ^ 閘行 7進V 述f 所發 項若 b果 第結 圍證 範驗 利料 專資 請之 申述 如上 7·中 資 組 元 位 。 新中 更素 未元 之之 内新 頁更 衝行 緩進 胞未 憶原 記中 於素 份元 備列 原陣 將該 入 ,寫 擾新 干重 受料 胞 憶 己 古口 閃 快 閘 分 之 除 抹 與 化 式 程 料 資 組: 元含 位包 可少 種至 一, 8 列 意意 己己 古口=口 之有 組所 元組 位元 一 位 成該 構接 含連 包線 素字 元域 一區 每一 ,有 素具 元且 列, 陣關 個開 數一 複及 數 胞 記源 T 2 一 之用 接共 連胞 相憶 極記 閘有 置所 浮之 係列 胞兩 憶鄰 記相 該列 ,數 中偶 其與 ,列 極數 閘奇 制且 控, 的胞 胞憶 所 列 一 同 線 字 域 區 1 每 至 接 -\HC 端 出 輸 45— 之 關 開 1 及每 ;該 線 極Page 583675 Page 6 6. Patent application scope 5 · The split flash memory cell array described in item 1 of the patent application scope, where the above-mentioned array elements are updated with the data of the bytes to be updated first and The unupdated byte data is written into a memory cell buffer page at the same time, and then the byte data to be updated is written into the byte memory cell to be updated in the array element. After the reminiscence of I5, the new and updated "materials, materials, element B, element 5 of the fifth element in the rufanfanyuan ruj rnj ί", the application for the special group as stated above on the CD, and their reassurance, etc. March. The surface interference is completely unreliable. The group is not listed. The group of funds and the group of resources are not in the line. The page is not recognized. It has been identified as f U. V. Cell It. V Γ ^ Gate Bank 7 If the item issued by f is described in f, if the result of b is the conclusion of the certificate, the result of the test will be as follows: 7. The unit of the Chinese fund. The new page is more advanced within the new year, and the new page is more aggressive. The cell is not recalled. The original record is written in the original element. The original array will be entered, and it will disturb the Xingan weight. Erasing and chemical engineering materials group: Yuan-containing bit packs can be reduced to one, 8 columns meaning Yijigukou = mouth of the group, each bit of the byte group into the structure containing the connected envelope prime character field Each area in a region is well-equipped, and the arrays are opened and counted, and the number of cell sources T 2 is used in conjunction with the common cell phase. In this column, the numbers in the column are even, and the number of column poles is unique and controlled. The cells in the column are listed in the same line of the word field area 1 per connection-\ HC terminal output 45— of the open 1 and each; the line pole 第19頁 583675 六、申請專利範圍 有元素的開關之輸入端連接於一廣域字線(global word 1 i ne )信號輸入端,同一行所有元素的開關之控制端則連 接於同一控制信號端。 9.如申請專利範圍第8項所述之分閘快閃記憶胞陣列,其 中上述浮置閘極相連接之2 T記憶胞,係包含一專責程式化 功能之P記憶胞與一用於提供讀取資料之R記憶胞。 1 0 .如申請專利範圍第9項所述之分閘快閃記憶胞陣列,其 中上述相鄰兩列且相同行之2 T記憶胞中P記憶胞共用一位 元線,但R記憶胞則分別有各自的位元線,用以達到允許 相鄰列記憶胞共用源極線但可防止透穿干擾的問題。 1 1.如申請專利範圍第9項所述之分閘快閃記憶胞陣列,其 中上述相鄰兩列且相同行之2 T記憶胞中係使奇數列之2 T記 憶胞以D記憶胞、R記憶胞、P記憶胞排列,而偶數列以P記 憶胞、R記憶胞、D記憶胞與其對應,其中D記憶胞係假記 憶胞(dummy cell)0 1 2 .如申請專利範圍第8項所述之分閘快閃記憶胞陣列,其 中上述浮置閘極相連接之2 T記憶胞,係包含——個單位大 小的且專責程式化功能之p記憶胞與一二個單位大小提供 讀取資料之R記憶胞。Page 19 583675 6. The input terminal of the switch with elements in the scope of patent application is connected to a global word 1 i ne signal input terminal, and the control terminals of the switches of all elements in the same row are connected to the same control signal terminal. . 9. The gated flash memory cell array as described in item 8 of the scope of the patent application, wherein the 2 T memory cell connected to the floating gate includes a P memory cell dedicated for programming and a P memory cell for providing R memory cell for reading data. 10. The split flash memory cell array described in item 9 of the scope of the patent application, wherein the P memory cells in the 2 T memory cells in the two adjacent columns and the same row share a bit line, but the R memory cell is Each has its own bit line to achieve the problem of allowing adjacent column memory cells to share the source line but preventing penetration interference. 1 1. The split flash memory cell array as described in item 9 of the scope of the patent application, wherein the 2 T memory cells in the two adjacent rows and the same row are such that the 2 T memory cells in the odd row are D memory cells, The R memory cell and the P memory cell are arranged, and the even numbered column corresponds to the P memory cell, the R memory cell, and the D memory cell, of which the D memory cell is a dummy cell 0 1 2. The split flash memory cell array, wherein the 2 T memory cells connected to the floating gates described above include-a unit-sized p-memory cell and one or two unit-sized read-only cells for reading. Get the R memory cell of the data. 第20頁 583675 六、申請專利範圍 1 3.如申請專利範圍第1 1項所述之分閘快閃記憶胞陣列, 其中上述浮置閘極相連接之2T記憶胞中係使奇數列之2T記 憶胞以P記憶胞、R記憶胞排列而偶數列之2 T記憶胞以R記 憶胞、P記憶胞對應而使P記憶胞的位置錯開而不共用位元 線,而R記憶胞各一單位相鄰而可以共用一位元線。 1 4.如申請專利範圍第9項所述之分閘快閃記憶胞陣列,其 中上述浮置閘極相連接之2 T記憶胞中,P記憶胞之通道的 啟始電壓比R記憶胞之通道的啟始電壓高,以用以達到允 許相鄰列記憶胞共用源極線但可防止透穿干擾的問題。 1 5 .如申請專利範圍第1 4項所述之分閘快閃記憶胞陣列, 其中上述P記憶胞之通道的啟始電壓比R記憶胞之通道的啟 始電壓高係在P記憶胞之通道位置以抗透穿離子佈植術, 植入雜質離子,以使啟始電壓上升。 1 6 .如申請專利範圍第8項所述之分閘快閃記憶胞陣列,其 中上述之每一元素具有lx 8之記憶胞數。 1 7.如申請專利範圍第8項所述之分閘快閃記憶胞陣列,其 中上述之開關係用以達到每一位元組可以獨立控制操作電 壓。 1 8 .如申請專利範圍第8項所述之分閘快閃記憶胞陣列,其Page 583675 6. Application for patent scope 1 3. The split flash memory cell array as described in item 11 of the patent application scope, wherein the 2T memory cell connected to the floating gate is an odd 2T The memory cells are arranged in P memory cells and R memory cells and the even number of 2 T memory cells correspond to R memory cells and P memory cells so that the positions of P memory cells are staggered without sharing bit lines, and R memory cells each have a unit Adjacent but can share a bit line. 1 4. The split flash memory cell array according to item 9 of the scope of the patent application, wherein in the 2 T memory cell connected to the floating gate, the starting voltage of the channel of the P memory cell is lower than that of the R memory cell. The starting voltage of the channel is high to achieve the problem of allowing the adjacent column memory cells to share the source line but preventing penetration interference. 15. The split flash memory cell array as described in item 14 of the scope of the patent application, wherein the starting voltage of the channel of the P memory cell is higher than the starting voltage of the channel of the R memory cell in the P memory cell. The channel position is implanted with anti-penetration ion implantation, and impurity ions are implanted to increase the initial voltage. 16. The gated flash memory cell array as described in item 8 of the scope of the patent application, wherein each of the above elements has a memory cell number of 1 × 8. 1 7. The open flash memory cell array as described in item 8 of the scope of patent application, wherein the above open relationship is used to achieve that each byte can independently control the operating voltage. 18. The switched flash memory cell array as described in item 8 of the scope of patent application, which 第21頁 583675 六、申請專利範圍 中上述之陣列元素進行資料更新時,係先將欲更新之位元 組資料及不更新的位元組資料同時寫入一記憶胞緩衝頁 内,再將欲更新之位元組資料寫入該陣列元素中欲更新之 位元組記憶胞。 1 9 .如申請專利範圍第1 8項所述之分閘快閃記憶胞陣列, 其中上述之陣列元素在部分元素資料更新後,再將記憶胞 緩衝頁内位元組資料與該陣列元素全面進行資料驗證,以 確認未進行更新之位元組資料未受干擾。Page 21 583675 6. When updating the above-mentioned array elements in the scope of patent application, the byte data to be updated and the byte data not to be updated are written into a memory buffer page at the same time. The updated byte data is written into the byte memory cell to be updated in the array element. 19. The split flash memory cell array as described in item 18 of the scope of the patent application, wherein after the above-mentioned array elements are updated with some element data, the byte data in the memory cell buffer page is comprehensive with the array elements. Perform data verification to confirm that the byte data that has not been updated has not been disturbed. 2 0 .如申請專利範圍第1 9項所述之分閘快閃記憶胞陣列, 其中上述之資料驗證結果若發現未進行更新之位元組資料 已受干擾,則將原備份於記憶胞緩衝頁内之未更新位元組 資料重新寫入該陣列元素中原未進行更新之元素中。20. The flash memory cell array as described in item 19 of the scope of patent application, wherein if the above data verification result finds that the byte data that has not been updated has been disturbed, the original data is backed up in the memory cell buffer. The unupdated byte data in the page is rewritten into the elements of the array element that were not updated. 第22頁Page 22
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