TW575631B - Photosensitive resin composition containing hetero atoms - Google Patents
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- TW575631B TW575631B TW90112360A TW90112360A TW575631B TW 575631 B TW575631 B TW 575631B TW 90112360 A TW90112360 A TW 90112360A TW 90112360 A TW90112360 A TW 90112360A TW 575631 B TW575631 B TW 575631B
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575631 五、發明說明(1) 本發明係有關於 係 ;封 應 組成物係包含不飽和^ 3雜原子之感光樹脂組成物,其 脂、反應性稀釋劑、光$酸基、硫及磷雜原子之感光 按,印㈣電路板=2阻及感光絕緣胃。 、 主要支㈣,是所有;以子零組件在安裝與互連時的 來,由於電子產品朝向輕 # :件,近年 货 '而择I 以及針對電子構裝對高I/O數、如^巧 及小面積專需炎,KM A 細微化 4-4- J--L AA ^ 刷黾路板的技術必須不斷提昇,4 材料的物性要求水相m切一 汁’相關 付攻、么时 水也相對提南,其中應用於印刷電路柘本 又…、、^之綠漆(又稱防焊光阻油墨,Solder Res ist'面 口 :、、、加=與應用條件更加嚴苛,除了原有絕緣性、 錫耐熱性、鬲硬度及耐化學性等物性外,還要有高解析戶 、耐電解電鍍性、耐無電解電鍍性及高Tg等性質。 & 日本特開平1 1 — 2 4 2 3 2 9,其中由於為水性感光性樹脂 組成物’該組成物係由感光預聚物以Epoxy Resin/575631 V. Description of the invention (1) The present invention is related to the system; the sealing composition is a photosensitive resin composition containing unsaturated 3 heteroatoms, its lipid, reactive diluent, photoacid group, sulfur and phosphorus Atomic photosensitive button, printed circuit board = 2 resistance and photosensitive insulating stomach. The main support is all; when the sub-components are installed and interconnected, because the electronic products are lighter, the I is selected, and the high I / O number for electronic components, such as ^ Ingenious and small areas require inflammation, KMA is refined 4-4- J--L AA ^ The technology of brushing road boards must be continuously improved. 4 The physical properties of materials require the water phase to cut one juice. Water is also relatively good. Among them, the green paint (also known as solder resist photoresist, Solder Resist 'surface) used in printed circuit books (also called solder resist photoresist) is more stringent in application conditions, except that In addition to the original physical properties such as insulation, tin heat resistance, hardness, and chemical resistance, it must also have high-resolution properties, electrolytic plating resistance, electroless plating resistance, and high Tg. &Amp; Japanese Unexamined Patent Publication No. 1 1 — 2 4 2 3 2 9 wherein, because it is an aqueous photosensitive resin composition, the composition is composed of a photosensitive prepolymer with Epoxy Resin /
Acrylic Acid/含P、S、N之0 n i u m鹽化化合物合成,其係 屬於鹽化物,而該鹽化物會導致組成物形成之塗膜的絕緣 性不佳’需將鹽化物除去才可克服此問題。 美國專利第4 4 3 8 1 9 0號與日本特開平6 - 1 9 0 6,其係添 加小分子含不飽和鍵之磷酸化合物組成中,雖可促進接著 性’但是在光硬化和熱硬化製成中常未能完全硬化反應, 而容易滲移使物性下降(例如:耐無電解電鍍性),最好 以較大分子化合物添加,即可避開此問題。Acrylic Acid / Synthesis of 0 nium salinated compounds containing P, S, N, which is a salt, and the salt will cause poor insulation of the coating film formed by the composition. The salt must be removed to overcome this. problem. U.S. Patent No. 4 4 8 1 190 and Japanese Patent Application Laid-Open No. 6-190 6 are added to the composition of small molecule phosphate compounds containing unsaturated bonds, which can promote adhesion, but in light and heat hardening The hardening reaction is often not completed in the preparation, and the physical properties are easily reduced (such as resistance to electroless plating). It is best to add larger molecular compounds to avoid this problem.
575631 五、發明說明(2) 曰本特開平1 - 3 8 4 1 3,其組成物之感光樹脂係包含有 th i ob i spheno 1 epoxy res i n/unsated monobasic acid/ a n h y d r i d e合成而得,其解析度、硬度、絕緣性及耐熱性 佳’但其中成分之thiobisphenol dpoxy resin非一般樹 藤,其择來-源不易'取得。 :;°丨 因此,如何針對上述問題而提出1 一種新穎之雜原子之 感光樹脂組成物,不僅可使感光樹脂之耐熱性提升,又可 促進其與基材之接著性,並增加其感光樹脂之分子量,長 久以來一直是使用者殷切盼望及本發明人念茲在茲者,而 本發明人基於多年從事於感光樹脂元件相關產品之研究、 開發、及銷售實務經驗,乃思及改良之意念,窮其個人之 專業知識,、經多方研究設計、專題探討,終於研究出一種 雜原子之感光樹脂組成物構造改良,可解決上述之問題。 爰是 、本發明之主要目的,在於提供一種雜原子之感光樹脂 組成物,其係導入一 naphthalene之結構,使感光樹脂耐 熱性提升。 、本卷明之久要目的,在於提供一種雜原子之感光樹脂 組成物、,其係導入含3或p等元素以增加感光樹脂分子極性 ’並促進光阻油墨組成物與基材接著性。 、本發明之又一目的,在於提供一種雜原子之感光樹脂 組成物,其增加耐電解電鍍性與無電解電鍍性。 、本發明之又一目的,在於提供^種雜原子之感光樹脂 組成物,以含S或p之多羧酸或磷酸化合物加大感光樹脂分575631 V. Description of the invention (2) Bentokaikai 1-3 8 4 1 3, the composition of the photosensitive resin contains th i ob i spheno 1 epoxy res in / unsated monobasic acid / anhydride Good in degree, hardness, insulation and heat resistance, but the thiobisphenol dpoxy resin in the ingredients is not ordinary tree vines, and its selection-source is not easy to obtain. :; ° 丨 Therefore, how to propose a novel heteroatom photosensitive resin composition for the above problems, which can not only improve the heat resistance of the photosensitive resin, but also promote its adhesion to the substrate and increase its photosensitive resin. The molecular weight has long been the eager hope of users and the inventor of the present invention, and the inventor is based on many years of research, development, and sales practice experience in photosensitive resin element-related products, thinking and improving ideas Based on his personal expertise, through various research and design and special discussions, he finally developed a heteroatomic photosensitive resin composition with improved structure that can solve the above problems. The main purpose of the present invention is to provide a heteroatom photosensitive resin composition, which incorporates a structure of naphthalene to improve the heat resistance of the photosensitive resin. The main purpose of this volume is to provide a heteroatom photosensitive resin composition which introduces elements containing 3 or p to increase the molecular polarity of the photosensitive resin and promote the adhesion of the photoresist ink composition to the substrate. Another object of the present invention is to provide a heteroatom photosensitive resin composition which increases electrolytic plating resistance and electroless plating. 2. Another object of the present invention is to provide a photosensitive resin composition containing ^ heteroatoms, which can increase the content of the photosensitive resin with a polycarboxylic acid or a phosphoric acid compound containing S or p.
第6頁 575631 五、發明說明(3) 子量。 本發明之又一目的,在於提供一種雜原子之感光樹脂 組成物,可改善光阻油墨之指觸乾燥性,又因共價鍵結合 ,不會使絕緣性降低。 : 本發明之組成物係含有雜原子之感光樹脂,其係含有 5〜6 0重量百分比之感光樹脂、5〜5 0重量百分比之具不飽 和鍵之反應性稀釋劑、0 · 1〜1 5重量百分比的光起始劑及 0 · 5〜3 0重s百分比之熱硬化劑性樹脂,由n a p h t h a 1 e n e type epoxy resin,重合不飽和羧酸,將含s或P元素之多 魏酸或鱗酸化合物,進行酸酐反應而得。 又,感光樹脂係可選自不飽和鍵、敌酸基、硫或填之 雜原子naphthalene type環氧樹脂改質物之其中之一者 ,其中該 naphthalene type epoxy resin係可選自 naphthalene結構之環氧樹脂,其中該naphtha 1 ene結構 之環氧樹脂係可選自 2-({[6-(2-oxiranylmethoxy)-l-nap hthyl]oxy}methyl)oxirane、 2-{[(7-(2-oxiranylmethyl )-l-{[2-(2-oxiranylmethoxy)-1-naphthyl]methyl }-2-n aphthyl)oxy]methyl}oxirane、 2-({[l-{[2,7-di(2-〇xir anylmethoxy)-1-naphthyl]-7-(2-〇xiranylmethoxy) -2-n aphthyl]oxy}methyl)oxirane、2-({[2-(5-methyl-2-(2-oxiranylmethoxy)-3-{[1-(2-oxiranylmethoxy)-2-napht hyl]methyl}benzyl)-l-naphthyl]oxy}methyl)oxirane、 2-({ [7 - (3 - {_[1,6-di(2-oxiranylmethoxy)2-naphthyl ]me thyl}benzyl)-1-naphthyl]oxy}methyl)oxirane、2-({[7Page 6 575631 V. Description of the invention (3) Sub-quantity. Another object of the present invention is to provide a heteroatom photosensitive resin composition, which can improve the finger-drying property of the photoresist ink, and does not reduce the insulation due to covalent bonding. : The composition of the present invention is a photosensitive resin containing heteroatoms, which contains 5 to 60% by weight of a photosensitive resin, 5 to 50% by weight of a reactive diluent having an unsaturated bond, and 0 · 1 to 1 5 The weight percentage of the light initiator and the heat curing agent resin of 0.5 to 30 weight percent are composed of naphtha 1 ene type epoxy resin and unsaturated carboxylic acid, which will contain polyweilic acid or scales containing s or P element. An acid compound is obtained by an acid anhydride reaction. In addition, the photosensitive resin may be selected from one of unsaturated bond, diacid group, sulfur or filled heteroatom naphthalene type epoxy resin modification, wherein the naphthalene type epoxy resin is selected from naphthalene structure epoxy Resin, wherein the epoxy resin of the naphtha 1 ene structure may be selected from 2-({[6- (2-oxiranylmethoxy) -l-nap hthyl] oxy} methyl) oxirane, 2-{[((7- (2- oxiranylmethyl) -l-{[2- (2-oxiranylmethoxy) -1-naphthyl] methyl} -2-n aphthyl) oxy] methyl} oxirane, 2-({[l-{[2,7-di (2- 〇xir anylmethoxy) -1-naphthyl] -7- (2-〇xiranylmethoxy) -2-n aphthyl] oxy} methyl) oxirane, 2-({[2- (5-methyl-2- (2-oxiranylmethoxy)- 3-{[1- (2-oxiranylmethoxy) -2-napht hyl] methyl} benzyl) -l-naphthyl] oxy} methyl) oxirane, 2-({[7-(3-{_ [1,6-di (2-oxiranylmethoxy) 2-naphthyl] me thyl} benzyl) -1-naphthyl] oxy} methyl) oxirane, 2-({[7
575631 五、發明說明(4) -(3-{[1,6-di(2-〇xiranylmethoxy)-2-naphthyl]methyl } benzyl )-6-(2-〇xiranylmethoxy)-l-naphthyl]oxy}methy 1 ) o x i r a n e等之其中之一者,其中該不飽和之單魏酸其係可 選自 a c ry1i c a c i d、ra e t h a c ry I i c acid、croton i c acid ei nnam i c ac i d " 2-me thacry 1 oy 1 oxy e thy 1 succinate 、2-acryloyloxyethyl succinate、 2-methacryloylethy 1 hexahydrophalate、 2-acryloyloxyethyl hexahydroph thalate、2-methacryloyloxyethyl phthalater及 2-acry loyloxyethyl phthalate之其中之一者,其中該含硫、含 磷原子之多羧酸及磷酸化合物係可選自5, 5’ -thiodisal ic ylic acid、 2, V -thiodiglucolic acid、 3, 3,-thiodipr op i on i c acid、4,4’ -dicarboxydiphenyl sulfone、mono methacryloyloxypropyl phosphate、 monoacryloyloxypr opy1 phosphate、 monomethacryloyloxyethyl phosohate 及 monoacryloyloxyethyl phosphate之其中之一者,其中 該酸酐係選自 maleic anhrdride、phthalic anhydride、 tetrahydrophthal ic anhydride、hexahydrophthalic an hydride、raethy 1 tetrahydrophthalic anhydride、ethyl tetrahydrophthal ic anhydride、methylhexahydrophtha lie anhydride、ethy lhexahydrophthalic anhydride、 succinic anhydride及 itacinic anhydride之其中之一者 ,其中該感光樹脂之分子量係為4 0 0 0 0〜5 0 0 0 0 0 0、酸價係 為30〜3 0 0mgKOH/g及具有之玻璃轉移溫度係大於150°C。 反應性稀釋劑其係為壓克力單體,體其係為具有兩個575631 V. Description of the invention (4)-(3-{[1,6-di (2-〇xiranylmethoxy) -2-naphthyl] methyl} benzyl) -6- (2-〇xiranylmethoxy) -l-naphthyl] oxy} methy 1) one of oxirane, etc., wherein the unsaturated monoweilic acid can be selected from ac ry1i cacid, ra ethac ry I ic acid, croton ic acid ei nnam ic ac id " 2-me thacry 1 One of oy 1 oxy e thy 1 succinate, 2-acryloyloxyethyl succinate, 2-methacryloylethy 1 hexahydrophalate, 2-acryloyloxyethyl hexahydroph thalate, 2-methacryloyloxyethyl phthalater, and 2-acry loyloxyethyl phthalate, which contain sulfur and phosphorous atoms Polycarboxylic acids and phosphoric acid compounds can be selected from 5, 5 '-thiodisal ic ylic acid, 2, V -thiodiglucolic acid, 3, 3, -thiodipr op i on ic acid, 4, 4' -dicarboxydiphenyl sulfone, mono methacryloyloxypropyl phosphate One of monoacryloyloxypr opy1 phosphate, monomethacryloyloxyethyl phosohate, and monoacryloyloxyethyl phosphate, wherein the anhydride is selected from maleic anhrdride, phthalic anhyd One of ride, tetrahydrophthal ic anhydride, hexahydrophthalic an hydride, raethy 1 tetrahydrophthalic anhydride, ethyl tetrahydrophthal ic anhydride, methylhexahydrophtha lie anhydride, ethy lhexahydrophthalic anhydride, succinic anhydride, and itacinic anhydride, wherein the molecular weight of the photosensitive resin is 4 0 0 0 0 to 5 0 0 0 0 0 0, the acid value is 30 to 300 mgKOH / g and the glass transition temperature is greater than 150 ° C. Reactive diluent is an acrylic monomer, which is
575631 五、發明說明(5) 以上之不飽和雙鍵之壓克力單體係可選自1,4-丁二醇二( 曱基)丙烯酸酯、1,6 -己二醇二(甲基)丙烯酸酯、新戊 基乙二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯 酸酯、新戊基乙二醇二(甲基)丙|烯酸己二酸酯、新戊基 乙:二醇二(甲基)“两。細:酸_基:_特戊酸自旨、二(甲基)丙稀酸 二環戊二烯酯、己内酯改質的二d曱基)丙烯酸二環戊二 烯酯、烯丙基化的二(甲基)丙烯酸環己酯、二(甲基) 丙烯酸異氰尿酸酯、三烴甲基三(甲基)丙烯酸丙酯、二 戊赤蘚醇三(甲基)丙烯酸酯、丙酸改質的二戊赤蘚醇三 (曱基)丙烯酸酯、戊赤蘚醇三(曱基)丙烯酸酯、氧化 丙烯改質的三烴甲基三(甲基)丙烯酸丙酯、三(丙烯氧 乙基)異氰酸尿酯、丙酸改質的二戊赤蘚醇五(曱基)丙 烯酸酯及二戊赤蘚醇六(甲基)丙烯酸酯之其中之一者。 光起始劑,係經由光照射後可產生自由基者,係可選 自安息香群、安息香烷基醚苯乙酮群、硫代兩苯駢哌噚、 蒽醌群、縮酮、二苯曱酮群及兩苯駢群之其中之一者。 熱硬化樹脂為環氧樹脂,其中該環氧樹脂為一分子中 具有兩個以上環氧基之環氧樹脂,其中該環氧樹脂係可選 自雙酚型環氧樹脂、酚醛清漆環氧樹脂、曱酚酚醛環氧樹 脂、多環環氧樹脂、g 1 c i d y 1 e s t e r系樹脂、g 1 y c i d y 1 a m i n e系樹脂、雜環環氧樹脂及鹵化之環氧樹脂之其中之 一者。 本發明係可應用於綠漆、油墨:、塗料、光阻及感光絕 緣層之其中之一者。575631 V. Description of the invention (5) The acrylic single system of unsaturated double bonds above can be selected from 1,4-butanediol di (fluorenyl) acrylate, 1,6-hexanediol di (methyl) ) Acrylate, neopentyl ethylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, neopentyl ethylene glycol di (meth) propionate adipate, Neopentylethyl: diol di (methyl) "two. Fine: acid_group: _valeric acid purpose, di (methyl) acrylic acid dicyclopentadiene ester, caprolactone modified di d fluorenyl) dicyclopentadienyl acrylate, allyl cyclohexyl di (meth) acrylate, di (meth) acrylic isocyanurate, tricarbonate methyl tri (meth) acrylate Ester, dipenterythritol tri (meth) acrylate, propionic acid modified dipenterythritol tri (fluorenyl) acrylate, penterythritol tri (fluorenyl) acrylate, propylene oxide modified Trihydrocarbon methyltri (meth) acrylate, tris (propyleneoxyethyl) isocyanurate, propionic acid modified dipenterythritol penta (fluorenyl) acrylate and dipenterythritol hexa (Meth) c One of the acid esters. A photoinitiator is one that can generate free radicals upon irradiation with light, and can be selected from the group consisting of benzoin group, benzoin alkyl ether acetophenone group, thiodiphenyl piperazine, anthraquinone One of a group, a ketal group, a benzophenone group, and a two benzophenone group. The thermosetting resin is an epoxy resin, wherein the epoxy resin is an epoxy resin having more than two epoxy groups in one molecule, The epoxy resin can be selected from bisphenol epoxy resin, novolac epoxy resin, phenol novolac epoxy resin, polycyclic epoxy resin, g 1 cidy 1 ester resin, g 1 ycidy 1 amine resin. One of heterocyclic epoxy resin and halogenated epoxy resin. The present invention is applicable to one of green paint, ink :, paint, photoresist and photosensitive insulation layer.
575631 五、發明說明(6) 茲為使 貴審查委員對本發明之結構特徵及所達成之 功效有更進一步之瞭解與認識,謹佐以較佳之實施例圖及 配合詳細之說明,、說明’如後: :首先:請參閱:第1圖,其—係為本發丨明之一較佳實施例之 流程圖;如圖所:示,將反應物A 1 之napthalene type epoxy resin 4 8 · 3 g,該環氧當量爲ι β 1,與反應物B 20 之 diethyllene glycol monoethyl ether acetate 75g, 置於反應器中,並以加熱至6 0°C進行溶解3 〇,再加入反應 物 C 40之 aery 1 ic acid 10. 8g(〇· 15當量)及反應物 D 50 之 monoacryloyloxyethyl phosphate 29. 4g,加熱至 90°C 進行反應6 0至酸價趨近於0,最後加入反應物e 7 0之 tetrahydrophthalic anhydride 34.2g,於 1 1 0〜1 2 0°C T 反應8 0,反應時間為3小時,即可得感光樹脂a 1。 感光樹脂A2 ·將反應物A取代為naphthalene type epoxy resin 66g’ 反應物 D取代為 monomethacryloyloxy propyl 31. 5g 〇 感光樹脂A3 :將反應物D取代為3, 3, —Thiodipropio nic acid 13.4go 感光树月曰A4 ·將反應物A取代為naphthalene type epoxy resin ESN = 365 49.8g’ 反應物 D取代為 2,2’-thiodiglycolic acid 22.5g° 感光树月曰A5 ·將反應物D取代為acryiic acid 10· 8g 〇 感光樹脂 A6·將 cresol norolac type epoxy resin575631 V. Description of the invention (6) In order to make your reviewing members have a better understanding and understanding of the structural features and achieved effects of the present invention, I would like to accompany the detailed embodiment diagrams and detailed descriptions, such as After:: First: See: Figure 1, which is a flowchart of one of the preferred embodiments of the present invention; as shown in the figure, the reactant A 1 is napthalene type epoxy resin 4 8 · 3 g The epoxy equivalent was ιβ1, and 75g of diethyllene glycol monoethyl ether acetate of reactant B 20 was placed in a reactor and dissolved by heating to 60 ° C for 3 °, and then aery of reactant C 40 was added. 1 ic acid 10. 8 g (0.15 equivalents) and monoacryloyloxyethyl phosphate 29. 4 g of reactant D 50, heated to 90 ° C. and reacted 6 0 until the acid value approaches 0, and finally add tetrahydrophthalic reactant e 7 0 Anhydride 34.2 g was reacted at 80 at 1 0 to 120 ° CT, and the reaction time was 3 hours to obtain a photosensitive resin a 1. Photosensitive resin A2 · Reactant A was replaced by naphthalene type epoxy resin 66g'Reactant D was replaced by monomethacryloyloxy propyl 31.5 g 〇Photosensitive resin A3: Reactant D was replaced by 3, 3, —Thiodipropio nic acid 13.4go A4 · Reactant A is replaced by naphthalene type epoxy resin ESN = 365 49.8g'Reactant D is replaced by 2,2'-thiodiglycolic acid 22.5g ° Photoreceptor A5 · Reactant D is replaced by acrylic acid 10 · 8g 〇Resin A6 · cresol norolac type epoxy resin
第10頁 575631 五、發明說明(7) CNE-200 60g與 diethylene glycol monoethyl ether acetate 7 5g置於反應器,以60°C進行溶解,並加入 acrylic acid 21. 7g、 hydroquinone 0. 9g及 triphenylph osphine 0· 3g,於9 0°C下反應至酸價趨过於0,最後加入 te trashydrophthal ic anhydr i de 4 0g9 1 1 0〜1 2 OC 下反 應3小時,即可得之。 : 感光樹脂 A-7:將 ere sol norolac type epoxy resin CNE-200 l〇〇g與 meth〇xypropano 160g置於反應器,以 60 C 進行溶解’加入 acryiic acid 36g及 hydroquinone 〇 . 〇 2 g ’在7 〇。〇下反應1 〇小時,即可得之。 將上述感光樹脂取少取烘乾製成試片,以熱動能機 械分析儀DM Α測得玻璃轉化溫度Tg 18 8°C,實驗結果請見附 件一 ’而一般之感光樹脂其玻璃轉化溫度係為1 3 4〇c,所 以本發明之玻璃轉化溫度高於一般感光樹脂,亦即本發明 之光阻油墨組成物耐熱性更為優良。 4貫施例1〜4,如附件二所示之化學品及配置量,混合 及攪=之’在常溫下以三滾筒研磨機研磨,使光阻油墨組 j物刀散均勻;比較例!〜3,依下表所示之化學品及配置 量,,並依實施例之步驟配置比較例之光阻油墨組成物,其 I =較例1的感光樹脂a 5未經由本發明之合成方法加大 二子=,故分子量僅2 3 0 0,比較例2則在配方中添加含磷 I =壓克力單體,感光樹脂A 6為一般常用感光樹脂,而比 車父列3則使用含〇nium鹽化物之感光樹脂。 將光阻油墨組成物塗佈在鋼箔基板上,操作溫度為8 〇Page 10 575631 V. Description of the invention (7) CNE-200 60g and diethylene glycol monoethyl ether acetate 7 5g are placed in a reactor, dissolved at 60 ° C, and acrylic acid 21. 7g, hydroquinone 0.9g and triphenylph osphine are added. 0 · 3g, the reaction at 90 ° C until the acid value tends to over 0, and finally add te trashydrophthal ic anhydr i de 4 0g9 1 1 0 ~ 1 2 OC and react for 3 hours to obtain it. : Photosensitive resin A-7: Put ere sol norolac type epoxy resin CNE-200 lOO〇g and meth〇xypropano 160 g in a reactor, and dissolve at 60 C. 'Add acrylic acid 36 g and hydroquinone 〇. 〇2 g' 在7 〇. It can be obtained by reacting at 0 ° C for 10 hours. Take the above photosensitive resin and dry it to make a test piece. The glass transition temperature Tg 18 8 ° C was measured with the thermal kinetic mechanical analyzer DM Α. The experimental results are shown in Appendix I. And the general glass transition temperature of the photosensitive resin is It is 134 ° C, so the glass transition temperature of the present invention is higher than that of general photosensitive resin, that is, the photoresist ink composition of the present invention has better heat resistance. 4 Examples 1 to 4 are used, as shown in Annex II, the chemicals and the configuration amount, mixed and stirred = ’Grinded at room temperature with a three-roller grinder to make the photoresist ink group j evenly spread; comparative example! ~ 3, the photoresist ink composition of the comparative example is configured according to the chemical and configuration amounts shown in the table below, and the steps of the example, where I = the photosensitive resin a of the comparative example 1 without the synthesis method of the present invention Increase the second child =, so the molecular weight is only 2 3 0 0. In Comparative Example 2, phosphorus-containing I = acrylic monomer is added to the formula. Photosensitive resin A 6 is a commonly used photosensitive resin, while the carousel 3 is used. 〇nium salt of photosensitive resin. The photoresist ink composition was coated on a steel foil substrate at an operating temperature of 8 °.
第11頁 575631 五 、發明說明(8) 覆 預烘3 0分鐘,待基板冷卻後,觀察其指觸乾燥性,試片 蓋含灰階與解析度圖形之底片,並以紫外線曝光機進行 光,再以1% Na 水溶液進行顯影,再以清水進行洗3 試片’在觀察其灰階與解析度等感充性質,最後,在操作 溫度;15:0°〇烘乾6〇分鐘,使其硬化冰測試其絕緣性、耐電 解電鑛性及耐無電解電鑛性,請參閱附件三之實驗結果', 其實驗結果為指觸乾燥性為以手輕觸試片並不黏手,觀客 灰階圖形以記錄塗膜完全被洗去的最小階數其值為9,觀"、 察其解析度圖形並記錄圖紋清楚的最小線寬/線距复值 2mi Is,將表面電阻測試儀置於試片上,試片置於/叱厂 90% RH恒溫恆濕機中,操作時間為96〇時,豆 ,以電解電鍍鍍金製程處理試片後丄 測試,該測驗值為1 0 0 / 1 0 0,其表示為接著優良,而以叙 電解鍛金製程處理試片後’加以百格接著性測試,測、、 值為1 0 0 / 1 0 0,其表示為接著優_,Λα 》a /則驗 J饮有1炎艮,由物性測試結果 ,本發明之光阻油墨組成物具有良 知 顯影性、解析度、絕緣性、繼性耐熱性 鍍性。 耐電解電鍍性和耐無電解電 綜上所述,本發明係有關协一 、 成物,其係組成物係包含不飽和〔原子之感光樹脂組 子之感光樹脂、反應性稀釋劑、ϋ參^羧酸基、硫及磷雜原 脂,其係應用於綠漆、油墨、冷&始劑及熱硬化劑性樹 故本發明實為一具有新穎性、、隹:光阻及感光絕緣體; 應符合我國專利法所規定之專%二生及可供產業利用者, 之專利申請要件無疑,爰依法提Page 11 575631 V. Description of the invention (8) Pre-bake for 30 minutes. After the substrate is cooled, observe the dryness of the finger touch. Cover the negative with gray scale and resolution graphics on the test piece, and light with an ultraviolet exposure machine. Then, develop with 1% Na aqueous solution, and then wash with water. 3 The test piece was observed for its gray scale and resolution, and finally, at the operating temperature; 15: 0 ° 〇, dried for 60 minutes, so that The hardened ice tests its insulation, electrolytic and mineral resistance, and non-electrolytic and mineral resistance. Please refer to the experimental results in Appendix III. The experimental results refer to the dryness of the touch. The objective gray scale pattern is to record the minimum number of steps when the coating film is completely washed off. The value is 9, and the resolution is checked and the minimum line width / space distance complex value 2mi Is is recorded. The surface resistance is The tester is placed on the test piece, and the test piece is placed in a 90% RH constant temperature and humidity machine in the factory. The operating time is 96 hours. After the beans are processed by the electrolytic plating process, the test value is 1 0. 0/1 0 0, which means that it is then excellent, and the test piece is processed by the electrolytic electrolytic forging process. 'Adding a 100 grid adhesion test, the test value is 100 0/1 0 0, which is expressed as the next good _, Λα "a / the test J drink has 1 Yan Gen, from the physical property test results, the light of the present invention The ink-resisting composition has conscience developability, resolution, insulation, and heat-resistant plating property. Electrolytic plating resistance and non-electrolytic resistance. In summary, the present invention is related to a product, the composition is a photosensitive resin containing unsaturated [atomic photosensitive resin group, reactive diluent, pompano ^ Carboxylic acid, sulphur and phospholipids, which are used in green paints, inks, cold & initiators and heat hardeners. Therefore, the present invention is a novel, novel, photoresist and photosensitive insulator. The patent application requirements that should meet the requirements of the "secondary and secondary industry" and "industrial use" stipulated by the Chinese Patent Law are undoubtedly
575631 五、發明說明(9) 出發明專利申請,祈 鈞局早日賜准專利,至感為禱。 惟以上所述者,僅為本發明之一較佳實施例而已,並 非用來限定本發明實施之範圍,舉凡依本發明申請專利範 圍所述之形狀、構造、特徵及精神所為4均等變化與修飾 ,均應包括於本發明之申請專利範圍内。i 圖號簡單說明: 5 10 反應物A 20 反應物B 30 溶解575631 V. Description of the invention (9) An invention patent application is filed. I pray that the Bureau will grant the patent as soon as possible. However, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of implementation of the present invention. For example, the shapes, structures, features, and spirits described in the scope of the patent application for the present invention are 4 equal changes and Modifications should be included in the scope of patent application of the present invention. i Brief description of drawing number: 5 10 Reactant A 20 Reactant B 30 is dissolved
4 0 反應物C4 0 reactant C
5 0 反應物D 6 0 反應5 0 reactant D 6 0 reaction
7 0 反應物E 8 0 反應7 0 reactant E 8 0 reaction
第13頁 575631Page 13 575631
第14頁 575631 【附件一】 丨1 感先樹脂 :A 1 A2 ί A3 A4 A5 A6 Tg(°C) 188 176 160 172 200 134 575631 【附件二】 光阻㈡墨 ,:組成物, ^ 實施例 b較例 1 ;2, 3 4 1 2 3 i 感 光 樹 脂 Αί 6 0 ; Α2 6 0 A3 60 Α4 60 Α5 60 Α6 60 Α7 60 反應 性稀 釋劑 Β1 20 10 5 20 15 20 Β2 10 15 20 Β3 5 光起 始劑 Cl 1 0.8 1 0.8 1 C2 2 1.5 環氧 樹脂 D1 22 21 22 22 D2 20 22 20 其他 B a S 〇4 7 8 7 SiO, 4 4 4 Talc 8 花青綠 0.4 0.6 0.5 0.4 0.4 0.4 0.5 B1 :dipentaerythritol pentaacrylate B2:pentaerythritol triacrylate B3:monoacryloyloxyethyl phosphate Clilrgacure 907 C2:isopropyl thioxanthone D1 :CNE-200 D2:EXA-4700 575631 【附件三】 光阻油墨組成物 Γ f i ί 實施例 比較例 1 ; 2 3 4 1 2 3 丨指觸 乾燥性 〇 〇 〇 〇 X 〇 〇 灰階 (2 1 階) 9 10 10 9 9 10 10 解析度 2 2 2 2 2 3 3 絕緣性 起始質 (1013) 1 1 1 1 1 1 0.2 6 0〇C、 960hr (ίο11) 20 40 50 30 9 2 3 对電解 電鍍性 100/ 100 100/ 100 100/ 100 100/ 100 98/ 100 100/ 100 100/ 100 耐無電解電鍍性 100/ 100 100/ 100 100/ 100 100/ 100 95/ 100 90/ 100 90/ 100Page 14 575631 [Annex 1] 丨 1 Presense resin: A 1 A2 ί A3 A4 A5 A6 Tg (° C) 188 176 160 172 200 134 575631 [Annex 2] Photoresist ink, composition, composition, ^ Example b Comparative Example 1; 2, 3 4 1 2 3 i Photosensitive resin Αί 6 0; Α2 6 0 A3 60 Α4 60 Α5 60 Α6 60 Α7 60 reactive diluent B1 20 10 5 20 15 20 Β2 10 15 20 Β3 5 light Starter Cl 1 0.8 1 0.8 1 C2 2 1.5 Epoxy resin D1 22 21 22 22 D2 20 22 20 Other B a S 〇 4 7 8 7 SiO, 4 4 4 Talc 8 cyan green 0.4 0.6 0.5 0.4 0.4 0.4 0.5 B1 : dipentaerythritol pentaacrylate B2: pentaerythritol triacrylate B3: monoacryloyloxyethyl phosphate Clilrgacure 907 C2: isopropyl thioxanthone D1: CNE-200 D2: EXA-4700 575631 [Annex 3] Photoresist ink composition Γ fi ί Example Comparative Example 1; 2 3 4 1 2 3 丨 Finger touch dryness 〇〇〇〇〇〇〇〇 Gray scale (2 1 grade) 9 10 10 9 9 10 10 Resolution 2 2 2 2 2 3 3 Insulating starting material (1013) 1 1 1 1 11 0.2 6 0 ° C, 960hr (ίο11) 20 40 50 30 9 2 3 Electrolytic plating resistance 100/100 100/100 100/100 100/100 98/100 100/100 100/100 Electroless plating resistance 100 / 100 100/100 100/100 100/100 95/100 90/100 90/100
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US11542366B2 (en) | 2016-03-09 | 2023-01-03 | Nissan Chemical Industries, Ltd. | Composition for forming resist underlayer film and method for forming resist pattern using same |
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