559619 B7 五、發明說明（I ) [技術領域] 本發明，係關於玻璃切斷方法及裝置’特別是關於利 用雷射與冷卻劑進行玻璃之切斷時’藉變化雷射光束之移 動速度及能量，變更雷射光束之形狀’而能提昇玻璃切斷 速度及所切斷之玻璃品質的切斷方法及裝置。 [習知技術] 用以切斷玻璃之代表性的裝置中’有利用雷射之玻璃 切斷裝置，該雷射玻璃切斷裝置，係照射橢圓、U字形或 V字形之雷射光束將玻璃表面予以加熱後，立即噴射冷卻 劑以切斷玻璃。 根據圖la之溫度梯度的習知玻璃切斷方法，係利用雷射 1將玻璃2加熱至熔融溫度以下後，噴射冷卻劑3來切斷玻璃 之方法，以此玻璃切斷方法切斷之玻璃2’，顯示於圖lb。 圖2a之習知玻璃切斷方法，係於玻璃管21)上畫一條 線，利用雷射lb以橢圓形之雷射光束加熱玻璃管後，以浸 水之棉布3b加以冷卻來切斷前述玻璃管2b之方法，以此 玻璃切斷方法切斷之玻璃2b，，顯示於圖2b。 又，圖3之習知玻璃切斷方法，係利用照射橢圓形雷 射光束之雷射lc來加熱玻璃2後，以流體冷媒3e冷卻所 加熱之部位來切斷前述玻璃2c之方法。 圖4之習知玻璃切斷方法，係使用照射u字形或v字 形雷射光束之雷射Id與冷卻劑3d ,將玻璃2d切斷成曲線 形態之方法。 私紙張尺度適用中國國家標準（CNS)A4規格（210 ><^97^17- (請先閱讀背£之注意事項再填寫本頁) _看 ^OJ· n n ϋ ϋ ϋ I n I I ·1 n n n n el n n n n I ϋ n ϋ n i I n · 559619 A7 ___B7_ 五、發明說明（> ) 該等習知之雷射玻璃切斷裝置’係將橢圓、U字形或 V字形的雷射光束照射於玻璃將玻璃表面加熱後’在所加 熱之部位噴射液體或氣體，藉冷卻該部位來切斷玻璃。 另一方面，在切斷玻璃2前，如圖5所示’係使用金 鋼砂輪4在欲切斷之玻璃2的開始部、結束部畫出刻線。 之後，在形成有刻線之玻璃2上，以一定速度使雷射_ 1 一邊前進一邊照射雷射光束予以加熱，並以一定速度使 冷卻劑噴射器一邊前進一邊在所加熱之部位噴射冷卻劑3 ，來切斷玻璃2。 亦即，習知之雷射玻璃切斷裝置，係沿玻璃之刻線以一 定速度移動雷射、一邊照射一定能量之雷射光束進行加熱後 ，對前述加熱之玻璃部位噴射冷卻劑使玻璃冷卻，據以切斷 玻璃。然而，縱使欲切斷之玻璃的前端區間、中央區間及末 端區間之加熱的熱應力分佈相異，但由於自玻璃的前端區間 至末端區間係以一定速度移動並照射一定能量之雷射光束來 進行加熱，因此有玻璃切斷面不齊的問題，特別是在玻璃的 前端區間及末端區間，有不易切斷玻璃的問題。 又，在前端區間與末端區間照射於玻璃之雷射光束能 量密度過高時，玻璃面將因急遽加熱所產生之熱衝擊使其 切斷面受到損傷，反之，雷射光束之能量密度過小時，會 有玻璃之切斷需時過長的問題。 [發明欲解決之課題] 本發明，爲解決前述習知技術的問題點，其目的在提 _j___ 木紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) _· ----- n n 1— 一 .OJI n ϋ l§ ·ϋ n n n i 線----------------------- 559619 A7 ___B7__ 五、發明說明（9 ) 供一種玻璃切斷方法及裝置，係將照射於玻璃之雷射光束 的移動速度及能量，於欲切斷之玻璃的各區間加以變化， 而能迅速且高精度的切斷玻璃。 本發明之另一目的，係提供一種玻璃切斷方法及裝置 ，係對玻璃照射雷射光束時使玻璃面所產生之熱衝擊均~ 化，而能獲得良好的切斷面。 [用以解決課題之手段] 爲解決前述課題，本發明之玻璃切斷方法及裝置，其 包含沿待切斷之玻璃的假想切斷線一邊移動雷射光束一邊 照射以加熱前述玻璃的第1階段，及對加熱部位噴射冷卻 劑以切斷玻璃的第2階段，其特徵在於： 前述玻璃，係沿假想切斷線區劃爲前端區間、中間區 間及末端區間，前述雷射光束之移動速度及能量係由玻璃 之前述前端區間至中間區間逐漸增加，自玻璃之前述中間 區間至末端區間逐漸減少。 又，前述前端區間、中間區間及末端區間，係分別被 再區分爲複數個小區間，各小區間內之雷射光束之移動速 度及能量係保持一定。 又，前述雷射光束之移動速度，係與雷射光束之能量 成正比變化。 又，本發明之玻璃切斷方法及裝置，其照射於欲切斷 之玻璃面的雷射光束之寬度，其後端部較前端部窄，雷射 光束之能量密度，係後端部大前端部。 _5 _ 拿、紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） (請先閱讀背面之注意事項再填寫本頁) ΙΨ559619 B7 V. Description of the Invention (I) [Technical Field] The present invention relates to a glass cutting method and device 'especially when cutting glass with laser and coolant' by changing the moving speed of the laser beam and The cutting method and device that can change the shape of the laser beam to increase the cutting speed of the glass and the quality of the cut glass. [Known Technology] A representative device for cutting glass is a glass cutting device using laser. The laser glass cutting device irradiates an elliptical, U-shaped, or V-shaped laser beam to the glass. After the surface is heated, a coolant is sprayed to cut the glass. The conventional glass cutting method according to the temperature gradient in FIG. 1A is a method in which the glass 2 is heated below the melting temperature by using a laser 1 and the coolant 3 is sprayed to cut the glass. The glass cut by this glass cutting method 2 ', shown in Figure lb. The conventional glass cutting method of FIG. 2a is based on drawing a line on the glass tube 21). After heating the glass tube with an elliptical laser beam using a laser lb, it is cooled by immersion in cotton cloth 3b to cut the glass tube. The method 2b, the glass 2b cut by this glass cutting method, is shown in FIG. 2b. The conventional glass cutting method of Fig. 3 is a method of cutting the glass 2c by heating the glass 2 with a laser lc that irradiates an elliptical laser beam, and then cooling the heated portion with a fluid refrigerant 3e. The conventional glass cutting method in Fig. 4 is a method of cutting glass 2d into a curved shape by using a laser Id and a coolant 3d for irradiating a u-shaped or v-shaped laser beam. The private paper size applies the Chinese National Standard (CNS) A4 specification (210 > < ^ 97 ^ 17- (Please read the precautions before backing and then fill out this page) _See ^ OJ · nn ϋ ϋ ϋ I n II · 1 nnnn el nnnn I ϋ n ϋ ni I n · 559619 A7 ___B7_ 5. Description of the invention (&) These conventional laser glass cutting devices' are used to illuminate an oval, U-shaped or V-shaped laser beam onto the glass After heating the glass surface, 'the liquid or gas is sprayed on the heated part, and the glass is cut by cooling the part. On the other hand, before cutting the glass 2, as shown in FIG. A scribe line is drawn at the beginning and end of the cut glass 2. After that, on the glass 2 with the scribe line formed, the laser _ 1 is heated at a constant speed while being irradiated with the laser beam, and heated at a constant speed. The coolant injector is advanced while spraying the coolant 3 on the heated portion to cut the glass 2. That is, the conventional laser glass cutting device moves the laser at a certain speed along the engraved line of the glass while cutting the glass. After heating the laser beam with a certain energy, The heated glass part sprays coolant to cool the glass and cut the glass accordingly. However, even though the heat distribution of the front end, center and end sections of the glass to be cut is different, the heat stress distribution from the front end of the glass is different. The section to the end section is heated at a certain speed and irradiates a laser beam of a certain energy for heating. Therefore, there is a problem that the glass cut surface is not uniform, especially in the front end section and the end section of the glass, it is difficult to cut the glass. In addition, when the energy density of the laser beam irradiated to the glass at the front end region and the end region is too high, the glass surface will be damaged by the thermal shock generated by the rapid heating, otherwise the energy density of the laser beam will be too high. If the glass is small, it may take too long to cut the glass. [Problems to be solved by the invention] In order to solve the problems of the conventional technology mentioned above, the purpose of the present invention is to improve the size of wood and paper to Chinese National Standards (CNS). ) A4 size (210 X 297 mm) (Please read the notes on the back before filling this page) _ · ----- nn 1— 一 .OJI n ϋ l§ · ϋ nnni ----------------------- 559619 A7 ___B7__ 5. Description of the invention (9) Provide a glass cutting method and device, which is a laser that will irradiate the glass The moving speed and energy of the light beam are changed in various sections of the glass to be cut, so that the glass can be cut quickly and with high accuracy. Another object of the present invention is to provide a method and device for cutting glass, [Means for solving problems] In order to solve the foregoing problems, the glass cutting method and device of the present invention are: The second stage includes the first stage of heating the glass while moving the laser beam along an imaginary cut line of the glass to be cut, and the second stage of spraying a coolant on the heating portion to cut the glass, which is characterized in that: Is divided along the imaginary cutting line into the front section, middle section and end section. The moving speed and energy of the laser beam are gradually increased from the front section to the middle section of the glass, and gradually from the middle section to the end section of the glass. Less. In addition, the foregoing front section, middle section, and end section are each further divided into a plurality of small sections, and the moving speed and energy of the laser beam in each small section are kept constant. The moving speed of the laser beam changes in proportion to the energy of the laser beam. In the glass cutting method and device of the present invention, the width of the laser beam irradiated on the glass surface to be cut is narrower at the rear end than the front end, and the energy density of the laser beam is the large front of the rear end. unit. _5 _ Pick and paper dimensions are applicable to China National Standard (CNS) A4 (210x 297 mm) (Please read the precautions on the back before filling this page) ΙΨ
.* I n^*OJ· n ·1 I H ϋ n I I I n n I ·ϋ n n I n ϋ ϋ ϋ ϋ I n ϋ ϋ I I 559619 A7 _B7_ 五、發明說明（今） 又，前述雷射光束係以鎖孔形狀形成。 [圖示之簡單說明] 圖la及圖lb，係顯示習知玻璃切斷裝置之第1例及 其切斷例的立體圖。 圖2a及圖2b，係顯示習知玻璃切斷裝置之第2例及 其切斷例的立體圖。 圖3，係顯示習知玻璃切斷裝置之第3例的立體圖。 圖4，係顯示習知玻璃切斷裝置之第4例的立體圖。 圖5,係顯示習知玻璃切斷裝置之金鋼砂輪的立體圖 〇 圖6,係顯示本發明之玻璃切斷裝置之刻線光束產生 部的立體圖。 圖7,係顯示本發明之玻璃切斷裝置之刻線光束產生 部的立體圖。 圖8，係顯示本發明之玻璃切斷裝置的立體圖。 圖9,係顯示本發明之玻璃切斷裝置在玻璃上形成之 像的俯視圖。 圖10,係放大顯示自本發明之玻璃切斷裝置之光束產 生部照射於玻璃之雷射光束之像的俯視圖。 圖11，係顯示本發明另一實施例之玻璃切斷裝置的立 體圖。 圖12,係顯示本發明再一實施例之玻璃切斷裝置的立 體圖。 _6_ 衣紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) -· ϋ ϋ ϋ n ·11111 線丨 559619 A7 ___B7 _ 五、發明說明（< ) (請先閱讀背面之注意事項再填寫本頁) 圖13,係顯示本發明之玻璃切斷方法中玻璃各區間之 雷射光束移動速度與能量變化的圖。 [符號說明] 1，Id 雷射 2, 2c，2d，11 玻璃 2b 玻璃管 2，，2b， 切斷後之玻璃 3, 3d 冷卻劑 3b 浸水棉布 3c 流體冷媒 4 金鋼砂輪 12 刻線光束產生部 13 第1切斷光束產生部 14 冷卻劑噴射機構 15 第2切斷光束產生部 16 脈衝產生器 17 流量調節器 18 驅動部 19 控制部 [實施形態] 以下’參照所附圖式，詳細說明本發明之較佳實施例 〇 —__ —_7___ 衣紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 559619 A7 ___B7____ — 五、發明說明（b ) 本發明之玻璃切斷裝置，如圖6〜圖9所示’係由用 以在欲切斷之玻璃Η上形成刻線、照射短波長雷射光束之 刻線光束產生部12,用以加熱形成了前述刻線之玻璃11 而照射1次雷射光束的第1切斷光束產生部13 ’用以切斷 前述加熱之玻璃11而對前述玻璃11噴射冷卻劑之冷卻劑 噴射器14，用以完全切斷前述冷卻之玻璃的第2切斷光束 產生部15所構成。 自前述刻線光束產生部12射出之雷射光束12a、自第 1切斷光束產生部13射出之雷射光束13a、以冷卻劑噴射 器14噴射之冷卻劑14a、以及自第2切斷光束產生部15 射出之雷射光束15a，分別在玻璃11上形成之像的形狀顯 示於圖9。 前述刻線光束產生部12,係利用短波長雷射光束12a 以非接觸式蝕刻加工，在前述欲加工之玻璃11上形成刻線 。前述第1切斷光束產生部13、冷卻劑噴射器14、第2切 斷光束產生部15，係以公知的手段沿前述形成了刻線之玻 璃11之假想切斷線一體移動。 此處’自前述第1切斷光束產生部13照射至玻璃11 之雷射光束13a，如圖10所示，係藉由雷射用透鏡之組合 而形成爲鎖孔(key hole)形狀來加熱前述玻璃11。 又’前述鎖孔形狀之雷射光束13a，沿玻璃切斷進行 方向區分爲前端部131與後端部132，前述前端部131係 形成爲圓形，前述後端部132則係形成爲長方形。前述前 端部131之長度(φ)對前述後端部132之長度(a)的比(φ/a) _____8______ 拿、紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) . - * · H ϋ ϋ n n n n 一5, f n ·ϋ n n n n ! I ϋ ϋ ϋ ϋ n ϋ ·ϋ H ϋ ϋ ί ϋ n -ϋ n ϋ ^1 ϋ ^1 ϋ ϋ _ 559619 A7 _ B7___ 五、發明說明（y ) ，以0.2〜0.5較佳，前述前端部131之寬度(φ)對前述後端 部132之寬度(a)的比(φ/b)，以2〜5較佳。又，前端部 131之雷射光束能量密度爲後端部之雷射光束能量密度之 40%〜80%較佳。是以，當雷射光束13a照射於玻璃時，由 於前端部131能量密度小於後端部132之能量密度，因此 ，玻璃被雷射光束13a之前端部131預熱後，藉後端部 132以高溫予以加熱，據以增加玻璃表面之拉伸張力，提 昇切斷速度。 另一方面，自前述冷卻劑噴射器14噴射向前述玻璃 11之冷卻劑14a，爲增加玻璃11之冷卻效果，係在前述鎖 孔形狀之雷射光束13a通過後0.1〜0.5秒後，以長孔形狀 噴射前述玻璃11。之後，於前述玻璃11中，噴射了冷卻 劑14a之中心部即形成過冷區域，而其周邊則形成冷卻區 域。 前述第2切斷光束產生部15，對噴射了冷卻劑14a被 1次切斷之玻璃11照射雷射光束15a予以加熱，以完全切 斷前述玻璃11。 前述玻璃11之刻線，如圖6所示，係自刻線光束產生 部12對玻璃11照射易於被吸收之多波長雷射光束，以形 成前述玻璃Π切斷部位之開始部及結束部。特別是，由於 本發明係使用不接觸玻璃之非接觸式玻璃切斷裝置，因此 ，即使長時間使用亦不需擔心刻線形成時之真直度，亦能 適用於切斷線交叉的部分，尤其是對交叉部的切斷非常有 利。 ___9__ 木紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) --------訂---------線I赢 559619 B7 五、發明說明（3 ) 又，前述短波長雷射光束，係具有l〇〇nm〜600nm波長 的雷射光束，波長越短越容易被前述玻璃11吸收，效果越高 。若波長係600nm以上較長時，則如圖7所示，於前述玻璃 11表面塗以染料來使前述短波長雷射光束易於被吸收。 又，前述玻璃11被加熱後，爲了進行1次切斷而使用 冷卻劑，作爲該冷卻劑係使用汽化性強的物質。據此，與 使用既有之氣體冷卻劑相較，更能提昇冷卻效果，且冷卻 後冷卻劑之殘留物質會立即汽化至空氣中，而不致殘留在 玻璃表面。 作爲前述汽化性強的固體冷卻劑，係使用將液體碳酸 噴至空氣中時所產生之固體碳酸粒子（乾冰)般，將液體物 質噴至空氣中時變化成固體狀態之物質。 假設前述冷卻劑不是立即汽化之液體冷卻劑時，可在 冷卻劑噴射器14後設置冷卻除去機構14’，以將玻璃表面 殘留之液體冷卻劑予以加熱，來使前述玻璃11之1次切斷 後殘留之液體冷卻劑蒸發。 前述冷卻劑除去機構14’中，可使用追加的光束產生 部、熱風機(Air heater)及強力吸入機具等。 本玻璃切斷裝置，爲提昇玻璃之切斷品質，視需要將 前述玻璃11切斷部位之各前端區間、中央區間、末端區間 再次分割爲複數個小區間後，控制照射於各個小區間之雷 射光束的能量、噴射之冷卻劑量、雷射光束之移動速度及 聚焦距離(Focus Length)來切斷前述玻璃11，即能提昇前述 玻璃11之開始部與結束部之品質、且迅速的切斷玻璃Η。 _____10 _ 拿、紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁). * I n ^ * OJ · n · 1 IH ϋ n III nn I · ϋ nn I n ϋ ϋ ϋ ϋ I n ϋ ϋ II 559619 A7 _B7_ 5. Description of the invention (present) Moreover, the aforementioned laser beam is locked The hole shape is formed. [Brief description of the drawings] Figs. 1a and 1b are perspective views showing a first example of a conventional glass cutting device and a cutting example thereof. 2a and 2b are perspective views showing a second example of a conventional glass cutting device and a cutting example thereof. Fig. 3 is a perspective view showing a third example of a conventional glass cutting device. Fig. 4 is a perspective view showing a fourth example of a conventional glass cutting device. Fig. 5 is a perspective view showing a gold-steel grinding wheel of a conventional glass cutting device. Fig. 6 is a perspective view showing a reticle beam generating portion of the glass cutting device of the present invention. Fig. 7 is a perspective view showing a reticle beam generating portion of a glass cutting device of the present invention. Fig. 8 is a perspective view showing a glass cutting device of the present invention. Fig. 9 is a plan view showing an image formed on glass by the glass cutting device of the present invention. Fig. 10 is an enlarged plan view showing an image of a laser beam irradiated onto the glass from a beam generating portion of the glass cutting device of the present invention. Fig. 11 is a perspective view showing a glass cutting device according to another embodiment of the present invention. Fig. 12 is a perspective view showing a glass cutting device according to still another embodiment of the present invention. _6_ Applicable to China National Standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page)-· ϋ ϋ · n · 11111 line 丨 559619 A7 ___B7 _ V. Invention Explanation (Please read the precautions on the back before filling out this page) Figure 13 is a graph showing the movement speed and energy change of the laser beam in each section of the glass in the glass cutting method of the present invention. [Symbol description] 1, Id laser 2, 2c, 2d, 11 glass 2b glass tube 2, 2b, cut glass 3, 3d coolant 3b water-soaked cotton 3c fluid refrigerant 4 gold steel wheel 12 engraved beam generating unit 13 The first cut-off beam generating unit 14 The coolant injection mechanism 15 The second cut-off beam generating unit 16 The pulse generator 17 The flow regulator 18 The driving unit 19 The control unit [Embodiment] Hereinafter, the present invention will be described in detail with reference to the drawings. The preferred embodiment of the invention 0 —__ —_7 ___ The size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 559619 A7 ___B7____ — V. Description of the invention (b) The glass cutting device of the present invention, such as As shown in FIGS. 6 to 9, the reticle beam generating section 12 is used to form a reticle on the glass to be cut and irradiate a short-wavelength laser beam, and is used to heat the glass 11 on which the reticle is formed. The first cutting beam generating portion 13 ′ that irradiates the laser beam once is a coolant injector 14 for cutting the heated glass 11 and spraying a coolant on the glass 11 to completely cut off the cooled glass. 2nd cut-off light Generating unit 15 configured. The laser beam 12a emitted from the reticle beam generating section 12, the laser beam 13a emitted from the first cutting beam generating section 13, the coolant 14a sprayed by the coolant injector 14, and the second cutting beam The shapes of the laser beams 15a emitted from the generating unit 15 on the glass 11 are shown in FIG. 9. The reticle beam generating portion 12 is a non-contact etching process using a short-wavelength laser beam 12a to form a reticle on the glass 11 to be processed. The first cutting-beam generating section 13, the coolant ejector 14, and the second cutting-beam generating section 15 are moved along the imaginary cutting line of the glass 11 on which the score line has been formed by known means. Here, as shown in FIG. 10, the laser beam 13a irradiated to the glass 11 from the first cut-off beam generating section 13 is heated by forming a key hole shape by a combination of laser lenses. The aforementioned glass 11. The laser beam 13a in the shape of the keyhole is divided into a front end portion 131 and a rear end portion 132 along the glass cutting direction. The front end portion 131 is formed in a circular shape, and the rear end portion 132 is formed in a rectangular shape. The ratio (φ / a) of the length (φ) of the aforementioned front end portion 131 to the length (a) of the aforementioned rear end portion 132 _____8______ Take the paper size to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please Read the notes on the back before filling this page.)-* · H ϋ ϋ nnnn -1, fn · ϋ nnnn! I ϋ ϋ ϋ ϋ n ϋ · ϋ H ϋ ϋ ί ϋ n -ϋ n ϋ ^ 1 ϋ ^ 1 ϋ ϋ _ 559619 A7 _ B7___ V. Description of the invention (y), preferably 0.2 to 0.5, the ratio (φ / b) of the width (φ) of the front end portion 131 to the width (a) of the rear end portion 132 It is preferably 2 to 5. The energy density of the laser beam at the front end portion 131 is preferably 40% to 80% of the energy density of the laser beam at the rear end portion. Therefore, when the laser beam 13a is irradiated to the glass, the energy density of the front end portion 131 is smaller than the energy density of the rear end portion 132. Therefore, after the glass is preheated by the front end portion 131 of the laser beam 13a, It is heated at high temperature to increase the tensile tension on the glass surface and increase the cutting speed. On the other hand, in order to increase the cooling effect of the glass 11, the coolant 14 a sprayed from the coolant sprayer 14 to the glass 11 is 0.1 to 0.5 seconds after the laser beam 13 a having the keyhole shape passes through. The hole shape sprays the aforementioned glass 11. Thereafter, in the aforementioned glass 11, the central portion where the coolant 14a is sprayed forms a supercooled region, and the periphery thereof forms a cooled region. The second cut-beam generating section 15 irradiates the laser beam 15a to the glass 11 sprayed with the coolant 14a and cut once, and heats the glass 11 to cut the glass 11 completely. As shown in FIG. 6, the engraved line of the glass 11 is a multi-wavelength laser beam that is easily absorbed by the engraved beam generating section 12 to form the beginning and end of the cut portion of the glass II. In particular, since the present invention uses a non-contact glass cutting device that does not contact glass, it can be applied to the portion where the cutting line crosses, without worrying about the straightness of the score line even if it is used for a long time, especially It is very advantageous for cutting the intersection. ___9__ Wood paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -------- Order -------- -Line I win 559619 B7 V. Description of the invention (3) In addition, the aforementioned short-wavelength laser beam is a laser beam having a wavelength of 100 nm to 600 nm. The shorter the wavelength, the easier it is absorbed by the aforementioned glass 11 and the higher the effect. . When the wavelength is longer than 600 nm, as shown in FIG. 7, the surface of the glass 11 is coated with a dye to make the short-wavelength laser beam easily absorbed. In addition, after the glass 11 is heated, a coolant is used in order to cut it once, and a substance having a strong vaporization property is used as the coolant. According to this, compared with the use of the existing gas coolant, the cooling effect can be improved, and the residual substance of the coolant will be vaporized into the air immediately after cooling, and will not remain on the glass surface. As the aforementioned solidifying agent with strong vaporization, a solid carbonic acid particle (dry ice) generated when liquid carbonic acid is sprayed into the air is used, and a liquid substance is changed to a solid state when sprayed into the air. Assuming that the coolant is not a liquid coolant that vaporizes immediately, a cooling removal mechanism 14 ′ can be provided behind the coolant ejector 14 to heat the liquid coolant remaining on the glass surface to cut the glass 11 once. The residual liquid coolant evaporates. In the coolant removing mechanism 14 ', an additional beam generating section, an air heater, a powerful suction tool, or the like can be used. In order to improve the cutting quality of the glass, the glass cutting device divides each of the front end section, the central section and the end section of the aforementioned glass 11 cutting section into a plurality of small sections as needed, and then controls the lightning irradiated to each small section. The energy of the beam, the cooling amount of the spray, the moving speed of the laser beam, and the Focus Length are used to cut the glass 11 to improve the quality of the beginning and end portions of the glass 11 and cut off quickly. Glass goblet. _____10 _ Handling and paper size are applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)
'· ϋ ϋ ϋ n n n n^eJ« ϋ ·1· 1 ϋ n ϋ I n n ϋ I I I n n n ϋ ϋ n II ϋ ϋ ϋ ·ϋ n n ϋ #ϋ I 559619 A7 _JB7____ 五、發明說明（f ) 爲了如上述般控制各個區間之雷射光束之能量及移動 速度、冷卻劑之噴射量，本發明之玻璃切斷裝置，如圖12 所示，具備：使雷射光束之能量變化的脈衝產生16，用以 調節前述冷卻劑噴射機構14所噴射之冷卻劑之流量的流量 調節器17，用以調節前述雷射光束之移動速度、及光束產 生部13與玻璃11間之距離的驅動部18，爲變化前述脈衝 產生器16、流量調節器17及驅動部18輸出値，而進行信 號之交換以控制前述各裝置16、17、18的控制部19。 如前所述，本發明中，爲變化各區間之雷射光束移動 速度及能量，係將欲切斷之玻璃沿其長邊方向區分爲前端 區間、中央區間、末端區間，再將前述前端區間區分爲2 〜4個小區間、將前述中央區間分爲1〜2個小區間、將前 述末端區間區分爲1〜3個小區間。又，前述前端區間之長 度爲10〜80mm ’末端區間爲20〜60mm，中央區間則係設 定爲包含前述前端區間及末端區間以外的所有區間。 前述各區間之雷射光束的控制，係從前端區間往中間 區間逐漸加大雷射光束之移動速度及能量密度，從中間區 間往末端區間則逐漸減小雷射光束之移動速度及能量密度。 另一方面，於各個小區間內之雷射光束之移動速度及 能量密度係固定，各區間之雷射光束之能量密度係與雷射 光束之移動速度比例變化。 亦即，根據加熱時熱應力分佈的不同，對不易加熱及 切斷之玻璃前端區間及末端區間係照射小能量之雷射光束 同時慢慢移動，隨著往中間區間之移動增加雷射光束之能 ______ 拿、紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐) — (請先閱讀背面之注意事項再填寫本頁) • - ----- n I n 一5J· n I ϋ ϋ n n n I n 1« I ϋ n I— I n I ϋ n n n ϋ n n n ϋ n n n ϋ 559619 B7 五、發明說明（\。） 量與移動速度，據以提昇玻璃的切斷品質，且迅速的進行 玻璃之切斷。 雷射光束之能量，根據區間位置在10W〜150W之範 圍內進行調整，移動速度則在Imm/S〜200mm/s之範圍內 進行調整。 本發明一實施例之各區間雷射光束之速度變化顯示於 圖13。 圖13所示之本發明之實施例，欲切斷之玻璃全長爲 300mm，該玻璃被區分爲前端區間A、中間區間B及末端 區間C，前述前端區間A再區分爲20mm之長度的4個小 區間、中間區間B再區分爲長120mm與60mm的2個小區 間、末端區間C再區分爲長20mm的2個小區間。 雷射光束之移動速度及能量，如圖13所示，係控制成 從區間Ai朝區間I逐漸變大後，從區間I到區間C2逐 漸變小。 [發明效果] 本發明之玻璃切斷方法及裝置，由於照射至待加工之 玻璃的雷射光束具有低能量密度之前端部、與高能量密度 之後端部，因此能使雷射光束之照射時於玻璃所產生之熱 衝擊極大化，並區分前述玻璃之區間，對各區間之熱應力 分佈適當地控制雷射光束之移動速度及能量，因此能提昇 玻璃切斷面之品質，迅速進行玻璃之切斷。 ___12_ ιΜ氏張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐) (請先閱讀背面之注意事項再填寫本頁) -ί ϋ n tm§ n · n n_i l ·_1 I I n I 1_1 ϋ n n n n ϋ ϋ ϋ— ·ϋ ϋ ϋ n ϋ βϋ ϋ n ^1 n ί ^1'· Ϋ ϋ ϋ nnnn ^ eJ «ϋ · 1 · 1 ϋ n ϋ I nn ϋ III nnn ϋ ϋ n II ϋ ϋ ϋ · ϋ nn ϋ # ϋ I 559619 A7 _JB7____ 5. Description of the invention (f) In order to as above The energy and moving speed of the laser beam and the injection amount of the coolant are controlled in each section. As shown in FIG. 12, the glass cutting device of the present invention includes: a pulse for changing the energy of the laser beam is generated 16 for adjustment The flow regulator 17 for the flow rate of the coolant sprayed by the coolant injection mechanism 14 is a driving unit 18 for adjusting the moving speed of the laser beam and the distance between the beam generating unit 13 and the glass 11 to change the pulse. The generator 16, the flow regulator 17, and the driving unit 18 output 値, and exchange signals to control the control unit 19 of each of the aforementioned devices 16, 17, and 18. As mentioned above, in the present invention, in order to change the moving speed and energy of the laser beam in each section, the glass to be cut is divided into a front section, a central section, and an end section along its long side direction, and the foregoing front section is further divided. It is divided into 2 to 4 small sections, the central section is divided into 1 to 2 small sections, and the end section is divided into 1 to 3 small sections. The length of the front end section is 10 to 80 mm. The end section is 20 to 60 mm, and the center section is set to include all sections except the front end section and the end section. The control of the laser beam in each of the foregoing sections is to gradually increase the moving speed and energy density of the laser beam from the front section to the middle section, and gradually reduce the moving speed and energy density of the laser beam from the middle section to the end section. On the other hand, the moving speed and energy density of the laser beam in each small section are fixed, and the energy density of the laser beam in each section is proportional to the moving speed of the laser beam. That is, according to the difference in the thermal stress distribution during heating, the front and end sections of the glass that are difficult to heat and cut are irradiated with a laser beam of small energy at the same time, and the laser beam is gradually increased with the movement to the middle section. Can ______ Take and use the paper size of China National Standard (CNS) A4 (210 x 297 mm) — (Please read the precautions on the back before filling this page) •------ n I n 5J · n I ϋ ϋ nnn I n 1 «I ϋ n I— I n I ϋ nnn ϋ nnn ϋ nnn ϋ 559619 B7 V. Description of the invention (\.) The quantity and movement speed are used to improve the cutting quality of the glass and quickly The glass is cut. The energy of the laser beam is adjusted in the range of 10W ~ 150W according to the position of the section, and the moving speed is adjusted in the range of Imm / S ~ 200mm / s. The speed change of the laser beam in each section of an embodiment of the present invention is shown in FIG. According to the embodiment of the present invention shown in FIG. 13, the total length of the glass to be cut is 300 mm, and the glass is divided into a front section A, a middle section B, and a terminal section C. The foregoing front section A is further divided into 4 having a length of 20 mm. The small section and the middle section B are further divided into two small sections with a length of 120 mm and 60 mm, and the terminal section C is further divided into two small sections with a length of 20 mm. As shown in FIG. 13, the moving speed and energy of the laser beam are controlled to gradually increase from the interval Ai to the interval I, and then gradually decrease from the interval I to the interval C2. [Inventive effect] The glass cutting method and device of the present invention can irradiate the laser beam when the laser beam irradiated to the glass to be processed has a front end portion with a low energy density and a rear end portion with a high energy density. The thermal shock generated by the glass is maximized, and the foregoing glass sections are distinguished. The thermal stress distribution of each section appropriately controls the moving speed and energy of the laser beam, so the quality of the glass cut surface can be improved and the glass can be quickly processed. Cut off. ___12_ ιM scale is applicable to China National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before filling this page) -ί ϋ n tm§ n · n n_i l · _1 II n I 1_1 ϋ nnnn ϋ ϋ ϋ— · ϋ ϋ ϋ n ϋ βϋ ϋ n ^ 1 n ί ^ 1