TW559591B - Pressurizing device, control method of pressurizing device and hot plate of pressurizing device - Google Patents

Abstract

The present invention provides a pressurizing device to dispose a hot plate between a pair of plates which are close and separated. It can inhibit the temperature deviation of the hot plate to heat and pressurize the printed circuit board, etc., and prevent the vibration of an electric heater in a hot plate for heating and pressurizing a work piece by a heating medium flowing around the heater, and prevent the damage of a flange or the like for mounting. In addition, even if the resin with high shape-forming temperature is used for forming the worked object, it is not necessary to raise the pressure endurance performance of the distribution pipe too much. Electric heaters 16A to 16F are movably engaged within through holes 14A to 14F in hot plates 10 and 11, and gaps in between are used as passages 28A to 28F for distributing the heating medium. A temperature sensor 34 is installed on the hot plate 10, the actual temperature signal measured is sent to the control unit 8, calculate the difference between the actual temperature and the target temperature, determine the required electrical power by the heater 16A to 16F, the required power output signal is sent to the silicon-controllable device 35 which regulates the magnitude of the electrical power to be supplied to the heater. The temperature deviation of the hot plate is inhibited through the closed-loop feedback control. In addition, the end sides of the heater 16A to 16F are fixed to a hot plate body 13 via flanges with sealing packings 20A to 20F. The other ends are inserted into bottom holes 24A to 24F of support members 23A to 23F press-fitted in the other end sides of the holes 14A to 14F, and set so that the thermal expansion differences in between and gaps of a radial direction of substantially 0.2 to 0.4 mm can be formed. Also, the heating medium oil that circulates in the circulation path of the heating medium oil is silicon-series heating medium oil.

Description

559591 V. Description of the Invention (1) [Technical Field] The present invention relates to a pressing device for heating, pressing, and forming a processed object such as a plastic IC card (integrated circuit card), a printed circuit board (PCB), and the like. . [Background Art] Conventionally, in order to manufacture, for example, an IC card (Integrated Circuit Card) made of plastic, a printed circuit board (PCB), or the like, a pressing device for forming a processed object made of plastic is used. This pressing device has a hot-pressing procedure for pressing a workpiece while heating it by a hot plate. Among the aforementioned pressing apparatuses, there is a pressing apparatus including a pair of upper and lower flat plates on which a heat plate is mounted by a heat insulator, respectively. In this pressing device, heating of the hot plates is performed by heaters mounted on the respective hot plates, and the control thereof is controlled by a controllable Shi Xi (t h y r i s t 〇 r) unit and a controller. In addition, in the press apparatus disclosed in the Japanese Patent Publication No. 6-2 7 3 6 4, a heating flow path is formed between the heater and the hot plate, and the hot plate is heated indirectly by a heat medium oil. The heat medium oil contains The heating medium circulates in the heating medium circulation circuit. The heater is heated by on / off control, that is, the temperature of the hot plate is detected, and when the detected temperature is below the target temperature, power is supplied to the heater; when it is higher than the target temperature, the power supply to the heater is stopped. . However, recently, high-density printed circuit boards with high accuracy are required. When manufacturing these printed circuit boards, the amount of power supplied to the heater is constant in the hot-plate temperature control of the aforementioned on / off control heater. , Has nothing to do with the difference between the actual temperature and the target temperature of the hot plate, so it is not easy to keep the temperature of the hot plate at an appropriate temperature, and the temperature of the hot plate deviates from the target

559591 5. Description of the invention (2) Constant fluctuations in temperature, often resulting in substandard products. In addition, as described in the aforementioned publication, the hot plate of the aforementioned structure requires less heat medium and heating capacity, and the equipment is miniaturized. However, according to the situation of the equipment and the use conditions, the heat plate flows around the heater along the axis of the heater. The heat medium vibrates the heater itself, and cracks may sometimes occur on the flange portion or the heater hook where the heater end is mounted on the hot plate. In order to cope with such a situation, it is necessary to strengthen the strength of the heater and its mounting portion, which leads to an increase in the size of the mounting portion and the like, and high cost due to the use of a highly rigid material. In addition, in recent years, various resins with a molding temperature of 400 ° C have been developed. These resins are used as heat-resistant structural materials. As the press device of the aforementioned publication uses a press device that indirectly heats a hot plate with a heat medium oil to mold the resin, the heat medium oil is heated to the molding temperature, that is, 400 ° C. However, the commonly used organic heat medium oil is When heated to 400 ° C, its vapor pressure is extremely high, reaching more than 1 MPa. Therefore, the financial pressure performance of the piping must be sufficiently ensured, leading to an increase in the size of the device. [Objective of the Invention] The main object of the present invention is to provide a pressing device that can control the temperature with high accuracy, and the temperature of the hot plate does not deviate too much from the target temperature compared with the conventional on / off control. It is a second object of the present invention to provide a hot plate and a pressing device of a pressing device. In this pressing device, even if a heat medium flows along a heater in a heating flow path, it is not necessary to strengthen the strength of the heater mounting portion to prevent the mounting portion. And other damage to improve the durability of the heater. In addition, another object of the present invention is to provide a pressing device.

559591 V. Description of the invention (3) Even when the object to be processed is formed of a resin having a high molding temperature, it is not necessary to improve the compressive performance of the piping. [Technical means]

The pressing device of the present invention includes a pair of flat plates that can be accessed and separated, and can press a workpiece such as a printed circuit board. A hot plate is provided between the flat plates, and the hot plate is mounted on the flat plate or is arranged between the flat plates, and at least one of the plates is to hold the workpiece in linkage with the flat plate. In addition, one or more hot plates may be arranged between the hot plates on the flat plate side to form a multiple structure. A hole is formed inside the hot plate, and the heater is inserted into the hole. A gap having an annular cross section is formed between the inner peripheral wall of the hole and the outer peripheral portion of the heater, and this gap becomes a heating flow path through which a heat medium such as oil flows. On the other hand, a temperature sensor is provided which detects the temperature related to the temperature of the hot plate and outputs a measured temperature signal. The control unit receives the measured temperature signal output from the temperature sensor, and the control unit calculates the difference between the measured temperature and the set target temperature, and determines the amount of power required for the heater to heat and the output required by the difference. Power output signal, execute feedback control. In addition, a thyristor unit is provided. The thyristor unit receives a required power output signal from the control unit, and according to the required power output signal, the thyristor adjusts the power supply and supplies power to the heater.

In the aforementioned pressing device, the temperature related to the hot plate is detected by a temperature sensor, and is output to the control unit as a measured temperature signal. The control unit calculates the difference between the measured temperature signal and the target temperature signal. Then, the amount of power required for the heater to heat is determined based on the difference. Output the required power output signal to the thyristor unit. In the thyristor unit, the aforementioned required power output signal from the control unit is received, and the power is adjusted by the thyristor

Page 7 559591 V. Description of the invention (4) After the signal reaches the size corresponding to this signal, it is supplied to the heater. In this way, the heat medium flowing in the heating flow path is heated by the heated heater, and the heat plate is heated by the heat transfer of the heat medium. Therefore, with the foregoing configuration, the amount of power supplied to the heater can be continuously adjusted according to the temperature condition of the hot plate, and closed-loop feedback control for the heater can be performed, so that it can be reduced compared to the conventional on / off control. Deviation of hot plate temperature from target temperature. The temperature sensor is preferably mounted on one of the pair of flat plates, and the electric power supplied to the electric heaters of the two flat plates is controlled based on the actual temperature signal of the temperature sensors. In this way, a temperature sensor can be used to control the electric heaters of the hot plates on the two plate sides. The heating flow path is preferably connected to a cooler. When the measured temperature or the temperature of the heat medium is higher than a predetermined value, the heat medium flowing out of the heating flow path is directed to the cooler; when the measured temperature or the temperature of the heat medium is low, At the specified value, the heat medium bypasses the cooler. In this way, the thyristor unit controls the temperature of the hot plate and directs the heat medium to the cooler when it is overheated, which can rapidly reduce the temperature of the heat medium. As a result, the heated hot plate can be quickly lowered to the target temperature, which can be higher. Control of accuracy. The predetermined value is preferably set to have a hysteresis between the temperature of the heat medium guide cooler and the temperature of the heat medium bypass cooler. In this way, vibration of the cooler switching can be prevented, and stable operation can be ensured. In the hot plate of the pressing device of the present invention, the hot plate is provided between a pair of flat plates. The hot plate forms an inlet for a heat medium such as oil flowing into the hot plate body and an outlet for discharging the heat medium, and forms a connection inlet,

559591 V. Description of invention (5) Holes between outlets. A heater is inserted into the hole, and a gap is formed between the outer periphery of the heater and the inner wall of the hole. A heating flow path is formed by the gap, and a heat medium flows through the inlet, the heating flow path, and the outlet. One end of the heater is fixed on one side of the hot plate body, and the other end of the heater is inserted into a bottom hole (blind 孑 L) provided on the other side of the hot plate body. The size and shaft length are related. After insertion, during normal operation where the thermal expansion of the heater is stable, there is a radial and axial gap between the bottom hole and the end of the electric heater inserted into the bottom hole. The gap in the radial direction is set to suppress the vibration of the heater when the heat medium flows through the heating flow path. The radial clearance is preferably smaller in cross-sectional area than the cross-sectional area of the heating flow path. When heating and pressurizing the workpiece, a heat medium is caused to flow from the inlet of the hot plate to a heating flow path formed by a gap between the inner wall of the hole and the outer periphery of the heater. In the heating flow path, the heat medium is heated by the heater, and the heat is transferred to the hot plate body to heat the hot plate. Due to the aforementioned heating effect, the outer diameter of the heater and the inner diameter of the bottom hole also expand. Even during stable normal operation, their expansion causes a radial and axial gap between the bottom hole and the heater. Therefore, when the heat medium flows through the heating flow path, although the heat medium vibrates the heater, there is a gap between the heater and the bottom hole, so the vibration of the heater will not cause adverse effects, and the two ends of the heater will not be affected. Compared with fixing, the heater mounting part is less likely to be damaged, and durability is improved. The heater is preferably an electric heater, and the electric heater is supplied with electric power.

559591 5. Description of the invention (6) The wiring is led out from the fixed side of one end of the heater. In this way, the heating temperature can be adjusted by controlling the electric power supplied to the heater, and since it is performed on the flange portion side where the electric heater wiring is fixed, the wiring of the heater can be led out from one side collectively. The heater is preferably fixed to a side surface of the hot plate body by a flange portion, and the flange portion is provided at an end portion of the heater protruding from a hole of the hot plate body. When fixing as described above, place the gasket between the flange and the side of the hot plate body. In this way, the leakage of the heat medium can be prevented, and one end of the heater can be fixed.

The cross-sectional area of the heating flow path is preferably substantially equal to the cross-sectional areas of the inlet and outlet. In this way, the flow rate of the heat medium in the hot plate is constant, and the surface heat transfer rate is also constant, so that the hot plate can be maintained at a stable temperature distribution. It is preferable that the heating flow path is configured by arranging adjacent heating flow paths side by side so that the heat medium upstream of the flow is split, and the heating flow paths arranged side by side flow in the same direction and then merge at the downstream side. At this time, it is preferable that the total cross-sectional area of the heating flow paths arranged side by side is approximately equal to the cross-sectional areas of the inlet and outlet.

In this way, when the heating area of the hot plate is large, although a plurality of heating flow paths are required, the upstream heating medium is branched, and adjacent heating flow paths are arranged side by side so that they flow in the same direction and merge downstream. Compared with the conventional arrangement in which the heating flow paths are arranged in parallel, the flow resistance can be reduced. In addition, the flow rate of the heat medium in the hot plate is constant, and the surface heat transfer rate is also constant. The hot plate can be maintained at a stable temperature distribution. The heating flow path is configured such that a heat medium flows from one end portion to the other end portion.

Page 10 559591 V. Description of the invention (7) The heating flow path of high quality and the heating flow path through which a heat medium flows from the other end to the one end are alternately arranged in a meandering manner. In this way, it is possible to prevent the heating medium from heating the different parts of the hot plate at different temperatures. In the pressing apparatus of the present invention, it is preferable that the hot plate having the above-mentioned configuration is disposed between a pair of pressurized flat plates. In this way, the hot plate may be directly mounted on the pressure plate, or may not be directly mounted on the pressure plate, and may be disposed between the pressure plates and moved by the pressure plate. In this way, heating and pressing can be performed between the hot plates having the aforementioned characteristics.

In addition, the pressing device of the present invention may be formed in a multiple arrangement by arranging at least one or more hot plates between the hot plates provided on the pressurized plate in the pressing device of any of the foregoing forms. In this way, in a state where the workpieces are arranged in multiple layers, a plurality of workpieces can be heated and pressurized at one time. In the pressing device of the present invention, the heat medium oil is a silicon-based heat medium oil. Compared with the organic heat medium oil, even if the temperature of the silicon-based heat medium oil reaches 400 ° C, its vapor pressure is relatively low, 1 ~ 1.5 kPa. When a resin having a molding temperature of 400 ° C is molded as a workpiece, it is not necessary to improve the pressure resistance of the piping. The main component of the heat medium oil is preferably dimethyl polysiloxane.

The pressing device preferably has a pressure adjustment mechanism that maintains the pressure of the heat medium oil within a predetermined range above the vapor pressure of the heat medium oil. By adjusting the pressure of the heat medium oil to be higher than the vapor pressure of the heat medium oil, the heat medium oil is not vaporized. Therefore, in a pump that circulates the heat medium oil, cavitation is not generated. The aforementioned pressure adjustment mechanism, It is best to pressurize the heat medium with an inert gas

Page 11 559591 V. Description of the invention (8) Oil. Silicon based heat medium oil will deteriorate when it comes into contact with active gas such as oxygen at high temperature. Therefore, pressurizing the heat medium oil with an inert gas can prevent the heat medium oil from deteriorating. The aforementioned inert gas is preferably nitrogen.

The inert gas is preferably stored in an expansion tank connected to the heat medium circulation circuit through a pipe branched from the heat medium circulation circuit. In the expansion tank, the inert gas pressurizes the heat medium oil. The aforementioned pressure adjustment mechanism controls the pressure of the inert gas in the expansion tank within a predetermined range. The pressure adjustment mechanism preferably has an inert gas control mechanism. When the pressure of the inert gas in the expansion tank is lower than the first pressure, the inert gas is injected into the expansion tank, and when the inert gas in the expansion tank is inert, When the pressure of the gas is higher than the second pressure, an inert gas is released from the expansion tank. The aforementioned first pressure is 2 kPa, and the aforementioned second pressure is 5 kPa.

Further, it is preferable that the pressing device has a gas discharge valve for discharging gas generated in the heat medium circulation circuit. After the silicon-based heat medium oil is heated for a long time, a part of it is thermally decomposed to generate gas. Therefore, the gas is discharged from the heat medium circulation circuit with a gas exhaust valve to prevent pump cavitation. The gas exhaust valve is preferably installed on a gas recovery tank which is provided in a heat medium circulation circuit for recovering the gas generated in the heat medium circulation circuit. When the gas pressure of the gas recovery tank exceeds the third pressure, the gas discharge valve is opened to release gas from the gas recovery tank. After the gas discharge valve is opened, when the gas pressure of the gas recovery tank is lower than the fourth pressure, the foregoing The gas exhaust valve is closed. The aforementioned third pressure is 4 kPa, and the aforementioned fourth pressure is 2 kPa. The heating medium oil cooling mechanism is provided.

Page 12 559591 V. Description of the invention (9) When the pressing device heat-presses the workpiece and cools it, the temperature of the heat medium oil is adjusted so that the aforementioned hot plate is cooled at a cooling rate within a specified range. During hot pressing, 'the temperature of the hot plate is sometimes south of 4 0 C.' If the hot plate is rapidly cooled in this state, temperature unevenness will occur in the hydraulic circuit, especially in the piping method. The increase in the thermal gradient of the blue portion causes a problem that the heat medium oil leaks from the gasket. In addition, the resin also generates thermal stress due to temperature unevenness, which deforms the resin and reduces the dimensional accuracy of the molded product. Therefore, it is necessary to adjust the temperature of the heat medium oil so that the hot plate is cooled at a cooling rate in a predetermined range, thereby avoiding the problem of steam.

The heat medium oil cooling mechanism is preferably provided with a bypass line, a cooler and a diaphragm valve. The bypass line branches from the heat medium oil circulation circuit and returns to the heat medium oil circulation circuit. The cooler is provided in the bypass pipe. On the way, the heat medium oil passing through the bypass pipe is cooled; the diaphragm valve is installed on the upstream side of the cooler of the bypass pipe, and the flow rate of the heat medium oil flowing to the cooler can be adjusted. ] 1… pressing device 2… frame 3… fixed plate 4… movable plate

5… Hydraulic cylinder 6… Hydraulic piping 7… Hydraulic source 8… Control unit

Page 13 559591 V. Description of the Invention (9)… heat insulator 10… upper heat plate 11… heat insulator 12… lower heat plate 13… hot plate body 1 4A ~ 1 4F… through holes 1 5A, 1 5B … Through hole 1 6 A ～ 1 6 F… power port heater 17… switch valve 1 8A ～ 1 8F… flange 2 1 A ～ 2 1 D… screw inspection 2 2 A ～ 2 2 F… ~ 23F ... Support element 24A ~ 24F ... Bottom 孑 L 25A ~ 25G ... Blocking element 2 6… Inlet 27… Outlet 2 8 A ～ 2 8 F… Power port heat flow path 29… Heat medium circulation pipe 30… Pump 34… Detector 3 5… Controllable crushing unit [Embodiment] Next, an embodiment of the present invention will be described with reference to FIG. Figure 1 shows suppression

Page 14 559591 V. Description of the invention (11) The whole of device 1. As shown in the figure, in the pressing device 1, a fixed platen 3 is fixed to an upper portion of the frame 2, and a movable platen 4 is provided below the fixed platen 3. As shown in FIG. This movable plate 4 is driven up and down by a hydraulic cylinder 5. The hydraulic cylinder 5 is connected to a hydraulic pressure source 7 such as a hydraulic pump through a hydraulic piping 6, and a switching valve 17 provided in the middle of the hydraulic piping 6 supplies and discharges oil. The operation of the switching valve 17 and the hydraulic pressure source 7 is controlled by the control unit 8. In Fig. 1, these control wirings and the like are omitted. In the pressing device 1 described above, an upper heat plate 10 is mounted on the lower surface of the fixed plate 3 via a heat insulator 9; and a lower heat plate 12 is mounted on the movable plate 4 via a heat insulator 1 1. Fig. 2 shows a cross section of the upper heat plate 10 on the fixed plate 3 side, the heat medium circulation circuit and the heater control circuit of the heat plate. Fig. 3 is a side view of the aforementioned hot plate. In this hot plate, although the pressing direction of the upper hot plate and the lower hot plate are different, the structures of the two are basically the same. In this hot plate, although the pressing direction of the upper hot plate 10 and the lower hot plate 12 are different, the structure of the two is practical except that the lower hot plate 12 does not have a temperature sensor described below. On the same. As shown in FIG. 2, in the rectangular parallelepiped-shaped hot plate body 13, six parallel through-holes 1 4 A to 1 4 F are formed at a predetermined interval on one side, and the two ends of the through-holes 14A to 14F are respectively formed. The through-holes 15A and 15B which are orthogonal to and communicate with the through-holes 14A to 14F. Therefore, the respective through-holes 14A to 14F communicate with each other through the through-holes 15A and 15B at both ends. Smaller diameter electric heaters 16 A to 16 F are inserted into the through-holes 1 4 A to 1 4 F, respectively, between the inner wall of the through-holes and the outer periphery of the heater.

P.15 559591 V. Description of the invention (12) Heating flow path 2 8A ~ 2 8F where the gap forms a ring-shaped cross section, and the heating medium oil L flows through the section area of the inlet 26, outlet 27, and communication through holes 15A and 15B. Are the same. The cross-sectional areas of the heating flow paths 28A to 28F are also approximately equal to the cross-sectional areas of the inlet 26, the outlet 27, and the through-holes 15A and 15B. FIG. 4 and FIG. 5 show a configuration in which the aforementioned electric heater is mounted on a hot plate. In Figs. 4 and 5, the mounting structures of the electric heaters are substantially the same. Therefore, only the mounting structure of the electric heater 16C is shown.

In this figure, a square-shaped flange portion 18 () is provided at one end of the electric heater 16C. The flange portion 18 (: is mounted on the hot plate body 13 with four bolts 21 to 210. The side of one end part is thus fixed to the electric heater 16 C on the hot plate body 13. When the flange part 18 C is fixed, as shown in FIG. 4, a gasket 2 0C is inserted and formed in the flange part. In the annular groove 19C on the mounting surface of 18C, the gasket is clamped between the hot plate main body 3 and the flange portion 18 C to prevent oil leakage from the through hole 1 4 C. In the hot plate body 13 The other end portions of the through holes 14A to 14F are hermetically welded and fixed with cylindrical support elements 23A to 23F, and the cylindrical support elements 23A to 23F are formed with bottom holes 24A to 24F.

One end is fitted into these bottom holes 24A to 24F with a gap in the radial direction and the axial direction. The cross-sectional area of the gap between the electric heater 16 A to 16 F and the bottom hole 2 4 A to 2 4 F is smaller than the cross-sectional area of the aforementioned heating flow path 2 8 A to 2 8 F. That is, the commonly used electric heater has a size of 16 to 16 ?, its outer diameter is 15111111, its length is 90〇111111, or

Page 16 559591 V. Description of the invention (13) The diameter is 17.5mm and the length is 9 0 ~ 1 3 0 0 mm. When the inner diameter of the bottom holes 24A to 24F is set to D and the outer diameter of the electric heaters 16A to 16F is set to d, during normal operation, the thermal expansion of the electric heaters 16A to 16F is stable (at this time, the bottom hole Also thermal expansion), the radial difference (D-d) between the outer peripheral portion of the electric heaters 16A to 16F and the bottom holes 24A to 24F is set to 0.2 mm to 0.4 mm. In other words, the setting of the aforementioned gap indicates that the magnitude of the aforementioned radial difference (D-d) is the difference between the inner diameter of the bottom holes 24A ~ 24F and the electric power when the electric heater 16A ~ 16F and other non-operations are performed at low temperature. 4mm 的 值。 The outer diameter of the heater 16A ~ 16F to the thermal expansion difference in the radial direction plus the aforementioned set difference of 0. 2mm ~ 0. 4mm value. In the foregoing, in order to reduce the variation in the temperature of the hot plate by reducing the time during which the heat medium oil L passes through the hot plate, the flow rate of the heat medium in the heating flow path is set to 3 m / sec, for example. In order to make it easier to see in the figure, the size of the gap (in Fig. 4, the solid state of the electric heater at 16 C during thermal expansion, and the double-dot chain line for the state of # during expansion) are enlarged. In addition to the clearance in the radial direction, between the bottom of the bottom holes 24A to 24F and the front end of the other end of the electric heater 16A to 16F, even in the normal state of thermal expansion during normal operation, it is often more than the aforementioned. Axial clearance with large radial clearance. As described above, the electric heaters 16A to 16F are inserted into the through holes 14A to 14F, and the heating plate body 13 forms a heating flow path 28A to 28F, which is located on one end side (lower side in FIG. 2). Both ends of the through hole 5 A are open. In the second figure, the opening at the right end is the inlet 26 of the heat medium oil L, and the opening at the left end is the outlet 27 of the heat medium oil L.

Page 17 559591 V. Description of the invention (14) The connecting portion connecting the through-holes 15 and 12 B between adjacent through-holes 14A to 14F is at one end side (lower side in FIG. 2) and the other On the j ^ side (upper side in Fig. 2), cylindrical blocking elements 2 5 A to 2 5 G are welded every two through holes to block the communication through holes 1 5 A and 1 5 B. As a result, the through-holes 1 4 A to 1 4 F are arranged in this order, and the adjacent through-holes HA to 14F, that is, the heating flow paths 28A to 28F, are communicated through the through-holes 1 5 A on one end side and the other through-holes. The communication through holes 5 b are alternately connected. / Therefore, the heat medium oil L supplied from the inlet 26 flows from the heating flow path 28A (from one end to the other end), the communication through hole at the other end, 5 B, and the adjacent heating flow path 2 8B (from another One end to one end), one end communication through hole 15A, adjacent heating flow path 28C (from the other end to one end), one end communication through hole 15B, heating flow path 28D (from one end to The other end), the communication through-holes 15A at the other end, the adjacent heating flow path 2 8E (from one end to the other end), the communication through-holes 15b at the other end, the adjacent heating flow path 2 8F (from one end to the other end) bends in sequence, and finally exits from the outlet 2 7. One end of each heater 16A to 16F protrudes outward from the flange portions 18A to 18F 'lead the wiring 2 2 A to 2iF from one end of each of the heaters 16 A to 16 F' to the thyristor unit 3 5 上 'thus can supply power. The controllable Shi Xi unit 35 is controlled by the control unit 8 as described later. A temperature sensor 34 is installed at the center of the other end of the upper hot plate 丨 0, for detecting the temperature of the hot plate 丨 0, and outputting the measured temperature signal to the control unit 8. The control unit 8 is constituted by, for example, a microcomputer, etc., and receives the actual temperature signal of the hot plate from the temperature sensor 34 mounted on the hot plate body 1 3,

559591 V. Description of the invention (15) The temperature signal is compared with a predetermined target temperature of the hot plate temperature, and the difference is calculated. Then, based on the difference, the amount of power required by the electric heaters 16 A to 16 F is determined and output as a required power output signal to the controllable Shixi unit 35. The thyristor unit 35 has a thyristor and receives a required power output signal from the control unit 8 to control the output of the thyristor. In other words, the required power output signal is output from the thyristor to the electric heater 16 A to 16 F with a magnitude corresponding to the difference between the measured temperature and the target temperature. At this time, the thyristor unit 35 supplies the aforementioned power to the electric heater of the upper hot plate 10 and the electric heater of the lower hot plate 12. In this way, with the temperature sensor 3 4, the control unit 8, the controllable crushing unit 3 5, and the electric heater 16 A to 16 F, the closed-loop reverse reading control of the temperature of the hot plate can be performed. In this feedback control, PID (proportional, integral, derivative) control is used. As shown in FIG. 1, an inlet 2 6 of the hot plate body 13 is connected to a discharge port of a pump 30 (the pump 30 is driven by an electric motor 38 through a heat medium circulation pipe 29); at an outlet 27, through The heat medium circulation pipe 29 is connected to the suction port of the pump 30, so that the heat medium oil L can be supplied and circulated. In this embodiment, the heat medium oil L is a silicon-based heat medium oil containing dimethylpolysiloxane as a main component. The heat medium oil has a relatively low vapor pressure even at 40 ° C, which is only 1.4 kPa. Therefore, the financial pressure performance of the heating flow path 2 8 A to 2 8 F and the heat medium circulation pipe 2 9 Can be as low as a few k P a. In addition, in order to prevent the steam from being generated by the vaporization of the heat medium oil L, the heat medium oil L is pressurized to 2 kPa. The heat medium circulation pipe 2 9 is formed upstream of the suction port of the pump 30 and faces the expansion tank.

559591 V. Description of the invention (16) 4 0 Branch pipe 4 4 In order to prevent the high-temperature heating medium oil from reacting with active gases such as oxygen, the expansion tank 40 is filled with an inert gas, namely nitrogen N. In addition, the expansion tank 40 includes a nitrogen supply pipe 40 a, and a high-pressure nitrogen gas is sucked in through the nitrogen supply pipe 40 a to pressurize the heat medium oil L. The internal pressure of the expansion tank 40 is monitored by the pressure sensor PG1. The nitrogen supply pipe 40a includes a suction valve 40b. When the internal pressure of the expansion tank 40 is 2 kPa or less, the suction valve 40b is opened to suck nitrogen N into the expansion tank 40. In addition, the expansion tank 40 is provided with a nitrogen exhaust pipe 40c connecting the expansion tank 40 and a backup tank 42 (described later). The nitrogen exhaust pipe 4 0 c has an exhaust valve 40 d. When the internal pressure of the expansion tank 40 is 5 kPa or more, the exhaust valve 40 d is opened to exhaust nitrogen N to the reserve tank 4 2 to make the expansion tank The internal pressure of 40 decreases. In this way, the intake valve 4 0 b and the exhaust valve 4 0 d are controlled, the internal pressure of the expansion tank 40 is maintained within a predetermined range, and the pressure of the heat medium oil L is controlled to 2 k P a to 5 k P a . A gas recovery tank 39 is connected upstream of the suction port of the pump 30. As described above, the heat medium oil L is pressurized by the nitrogen N in the expansion tank 40 to a pressure higher than the vapor pressure. Therefore, no gas is generated due to the vaporization of the heat medium oil L. However, the high heat state continues for a long time. At this time, a part of the heat medium oil L is thermally changed to generate a gas G. The gas recovery tank 39 is used to recover the gas G. In addition, with the gas recovery tank 39, the volume expansion caused by the temperature expansion of the heat medium oil L in the heat medium circulation circuit can be adjusted. A heat medium suction pipe 43 is connected to the lower end of the gas recovery tank 39 and connects the gas recovery tank 39 and the reserve tank 42. The heat medium oil L is stored in the reserve oil tank 42, and the heat medium oil L is supplied to the heat medium circulation pipe 29 and the heating flow path through the gas recovery tank 39 by means of a pump mechanism (not shown).

559591 V. Description of the invention (17) During maintenance of the installation, the heat medium circulation pipe 29 and the heat medium oil L in the heating flow path are introduced into the reserve oil tank 4 2. A maintenance valve 43a is installed in the middle of the heat medium suction pipe 43, and the maintenance valve 4 3a is opened only when the heat medium oil L is supplied from the reserve tank 42 or when the heat medium oil L is recovered from the reserve tank 42. A gas recovery pipe 41 is connected to the upper end of the gas recovery tank 39, and connects the gas recovery tank 39 and the reserve tank 42. The gas recovery pipe 41 is provided with an automatic valve 4 1 a for gas discharge that opens and closes according to the pressure of the gas recovery tank 39. That is, when the gas pressure exceeds 4 kPa, the automatic gas discharge valve 41a is automatically opened, and the gas G in the gas recovery tank 39 is discharged to the reserve tank 42. After the gas G is discharged, when the gas pressure reaches 2 kPa, the automatic valve 4 1 a for gas discharge is automatically closed. In this way, by discharging the gas G, the gas G can be prevented from entering the heat medium circulation pipe 29, and the oil pressure of the heat medium oil L can be maintained within a certain range. Further, a three-way mixing valve 31 is installed in the middle of the heat medium circulation pipe 29 connecting the outlet 27 of the hot plate main body and the gas recovery tank 39. The three-way mixing valve 3 1 branches the heat medium oil L discharged from the outlet 2 7 of the hot plate body into a flow to the branch pipe 32 and a flow to the gas recovery tank 39, and the flow ratio can be set to any value. The heat medium oil L sent to the branch pipe 3 2 passes through the oil cooler 3 3 in the branch pipe 32 and merges with the gas recovery tank 3 9 upstream of the heat medium circulation pipe 29. 3 3 a is an inlet of the heat medium oil L of the oil cooler 3 3, and 3 3 b is an outlet of the heat medium oil L. 3 3 c is the cooling water outlet, and 3 3 d is the cooling water inlet. When heating / heating control / cooling control of the hot plate 10 (cooling speed 1 to 5 ° C / min), the mixing valve 31 is switched and the entire heat medium oil L is sent to the gas recovery tank 39. When forcibly cooling one hot plate 10, the control unit 8 sets

559591 V. Description of the invention (18) The flow ratio of the two-way mixing valve 3 1 sends all the heat medium oil L to the oil cooler 3 3. In addition, when cooling control is performed at a speed of 5 ° C / min or more, the control unit 8 sets the flow rate ratio of the three-way mixing valve 31 to a value capable of obtaining a desired cooling speed. The heat medium circulation pipe 29 on the downstream side of the pump 30 is branched to form a cooling control pipe 4 5 to the oil inlet 3 3 a to the oil cooler 3 3. A cooling control valve 4 5 a is attached to the cooling control pipe 4 5. The cooling control valve 45a is a diaphragm valve whose opening degree can be adjusted, and the flow rate of the heat medium oil L which flows out of the heat medium oil L discharged from the pump 30 to the heat plate 10 and directly to the cooler 33 can be set. The cooling control unit 45a can send the micro-flow heat medium oil L that cannot be controlled by the three-way mixing valve 31 to the oil cooler 3 3, and the control unit 8 controls the cooling control valve 4 5 a to send a part of the heat medium oil L to the oil. The cooler 33 gradually reduces the temperature of the heat medium to perform cooling control. These heat medium circulation circuits and control circuits are applicable to both the upper and lower hot plates 12 and 12, and can detect the temperature of the upper and lower hot plates 12 but can also detect the temperature of the lower hot plate 12. Alternatively, a separate thermal cycle circuit and a control circuit may be provided to detect the temperature of each hot plate.毛 q η ^ ΐ Ϊ The operation of the aforementioned pressing device is explained. After the pressing device 1 is started, the heating medium oil 1 is started to be supplied to the hot plates 10 and 12. At the same time, because the actual measured temperature produced by, and w is lower than the target temperature, the difference between the α and the control temperature and the target temperature is large, and the power output signal is sent to the required power. SCR unit 3 5. ～ 16F result one ’/ Λ 石 夕 Unit 35 The electric heater is rapidly heated while supplying large electric power to the electric heater“ A. With the electric heater 16A ～

Page 22 559591 V. Description of the invention (19) 1 6 F heating, 敎 介 tent, 敎 τ, the temperature of the hot plate ϊ〇, 12 is also significantly higher than the temperature ^ ^ hot plate 10, 12; :; Lf connects to the suction port of j30 and feeds it again. In this way, the hot oil L promotes the temperature of the hot plate. When the standard is set, the control unit 8 reduces the required electrical output signal to the controllable ί tm 范 ®, and increases the required power transmission. The ~ 1M f thyristor unit 35 reduces the power supplied from 16A to 16F, but does not excessively exceed the target temperature. That is, the control of keeping the hot plates 10 and 12 at the target temperature alone. Rain power ^ I Based on actual measurement The difference between the temperature and the target temperature is determined as the required power output signal to be input to the controllable Shi Xidan. The silicon controlled unit 35 supplies the power supply according to the aforementioned required power output signal: The power of the temperature 'or stop supplying power, and continue to feedback none, = As mentioned above, the temperature control of the hot plate 10 and 12 is based on the closed-loop feedback control based on the difference between the temperature of the hot plate and the target temperature. The controllable Shi Xidanwu 35 adjusts the power supplied to the electric heaters 16 A to 16 F to the most appropriate, so 'the temperature of the hot plates 丨 〇, 12 can be suppressed from deviating from the target temperature. With the hot plate 10 , 12 and electric heaters 16A to 16F due to the aforementioned heating, the temperature rises 24A~24F bottomed hole 10, 12 and the electric heater 16A~16F ^ heat expansion, the axial dimension thereof and an outer diameter size increases, but when the temperature was stabilized at normal operation, it expands to become a stable fixed state.

Page 23 559591 V. Description of the invention (20) At this time, the front end of the other end of the electric heater 1 6 A to 1 6 F and the bottom of the branch element 23A to 23F L24Aa to 24Fa are set by the direction gap to the page first It is larger than the thermal expansion amount of the electric heaters 16 A to 16 F in the axial direction when the thermal expansion is stable. Therefore, there is no contact between them and damage. In addition, 'the radial clearance between the inner diameter of the bottom holes 23A to 23F and the outer diameter of the other end of the electric heater ha to 16F ensures a small gap when the aforementioned thermal expansion is stable' even if the heat medium oil L is in the heating flow path 2 8 The flow in A to 2 8 F can suppress the vibration of the electric heaters 16A to 16F compared to when the two ends of the electric heaters 16 A to 16 F are fixed. According to the inventor's test, the electric heaters 丨 6 A to 丨 6 f are generally used with an outer diameter of 15111111 and a length of 90〇111111, or an outer diameter of 17.5111111 and a length of 90〇111111 ~ 1 3 0 0 mm. When the flow velocity of the medium is 3 m / sec, the gap difference (D — d) between the inner diameter D of the bottom hole and the outer diameter d of the heater is 0.2 mm to 0.4 mm, and the durability is the best. a On the other hand, since the cross-sectional area of the heating flow paths 2 8A to 2 8F is set to be equal to the cross-sectional areas of the inlet and outlet, when the hot plate is heated, the flow velocity in the hot plate is a certain speed, and the surface heat transfer It is also necessary to keep the hot plate at a stable temperature distribution. ^ After the resin is heat-set in a predetermined time, the hot plate is cooled. This example = in the example, 'The temperature of the hot plates 丨 〇, 丨 2 during hot pressing is high, which is 4,000 ° C .:' If the hot plate is rapidly cooled, temperature unevenness occurs in the heat medium circulation circuit. In particular, when the thermal gradient of the flange portion of the pipe is large, the heat medium oil L easily flows out of the seal. In addition, thermal stress is generated on the resin due to uneven temperature. This thermal stress deforms the resin molded product and reduces the size of the molded product.

Page 24 559591 V. Description of the invention (21) Inch accuracy. Therefore, the hot plates 10 and 12 should be gradually cooled at a cooling rate of 1 to 5 ° C / min. The control unit 8 outputs a required power output signal to the thyristor unit 35 so that the thyristor unit 35 does not supply power to the electric heaters 16 A to 16 F. In addition, the control unit 8 sets the opening degree of the cooling control valve 45a so that the cooling rates of the hot plates 10 and 12 are within a predetermined range, and the temperature of the heat medium oil L is reduced. After the temperature of the hot plate reaches 250 ° C, the three-way mixing valve 31 is used for cooling control at a speed of 5 ° C / min or more. Fig. 6 shows another embodiment of the hot plate, showing a situation in which the heating and pressing area of the hot plate is further increased, and the number of electric heaters is increased. In the embodiment of FIG. 2, each heating flow path is simply arranged one by one, which has a large flow resistance. In this embodiment, adjacent heating flow paths are arranged side by side, and these are arranged side by side. The heating flow path is arranged in a line. That is, in the figure, bottom holes 1 4 a and 1 4 j with closed ends are formed at both ends of the hot plate body 13, and eight through holes 1 4 b to 1 4 i are provided between them. Each of these bottom holes and through-holes 14b to 14i is provided with a through-hole 15A, 15B which intersects them at right angles and communicates with one end portion (lower side in Fig. 6) and the other end portion (upper side in Fig. 6). The communication through-holes 15A at one end are provided with blocking elements 2 5 a and 2 5 i at the openings at both ends of the communication through-holes 15A, and between the through-holes 1 4 a to 1 4 b and through-holes 1 4 e Cylindrical occlusive elements 2 5 c, 2 5 e, and 2 5 g are provided in the portions between 1 to 4 f and between the through holes 1 4 i to 1 4 j, and they are hermetically fixed by welding.

P.25 559591 V. Description of the invention (22) Similarly, the communication through hole 15b at the other end portion is provided with blocking elements 25b and 25h at the openings at both ends of the communication through hole 15B, and through holes 14c to 1 4 d Cylindrical occlusive elements 2 5 d and 2 5 f ′ are provided between the through-holes and the through-holes 1 4 g to 14 h. They are hermetically fixed by welding. Bottom holes 丨 4 & 4] · The openings at one end are open and serve as the inlet 2 6 and the outlet 2 7 respectively. An electric heater 16A to 16H is inserted into each of the eight through holes 14b to 14i. The gap between the inner wall of the through hole and the outer periphery of the electric heater forms a heating flow path 2 8a through which a heating medium flows. ~ 2 8h. The cross-sectional areas of the inlet 26, the outlet 27, the bottom holes 14a, 14j, and the communication through holes 15A, mb 'are set to approximately twice the heating flow paths 28a to 28h. '' The electric heaters 1 6 A to 1 6 H are fixed to the side of one end of the hot plate 丨 3 by the method of fixing the f part 1 8 A to 1 8 at the end of one end, and the other One end portion is inserted into the bottom holes 24A to 24H of the supporting elements 23A to 23Η (the support ^ 2 3 A 23H is welded to the other end portions of the through holes 14b to 14i in a closed manner). The other ends 4 of the electric heaters 16A to 16H have a gap in the radial direction and the axial direction between the bottom holes 2 4 A to 2 4 Η. These gaps have a radial difference of about 0.2 mm to 0.4 mm during normal operation when thermal expansion is stable, as in the embodiment shown in Figs. 2 and 4, and there is a larger gap in the axial direction. Therefore, in the heat medium circulation circuit of the heat plate configured as described above, the heat medium oil L flowing in from the opening at the bottom flows to the other end portion and enters the other one =. The connecting through-holes 1 of β are flowing through two heating circuits arranged side by side in a zigzag manner. After passing through the connecting through-hole 15A at one end, the connecting through-holes at the other end are connected.

Page 26 559591 V. Description of the invention (23) The through-hole 15 B reaches the bottom hole 1 4 j and flows out from the outlet 2 7. That is, the heat medium oil 1 flowing from the inlet 26 and the large-diameter bottom hole 14 a is branched through the communication through hole 15B at the other end and flows to the other ends of the two heating flow paths 28a and 28b. On the one hand, it is heated by electric heaters ΐ6A and ΐββ. On the other hand, it flows to one end of the heating flow paths 28a and 28b. After joining at the through-holes 1 5A at one end, it is diverted again and flows into the two heating flow paths 28. 〇 and 28 (1) are heated by electric heaters 16 (:, 160 on the one hand, and flow from one end of the heating flow paths 28c, 28d to the other end. Similarly, the heat medium oil L that has reached the other end portion, After the communication through-holes 1 5 B merge, they are shunted again to flow to the two heating flow paths 2 8 e, 2 8 f. On the one hand, they flow from the other known part to one part, on the other hand, they are heated. The connected through-holes 1 5 A merge and then split, and flow from one end of the two heating flow paths 2 8 g and 2 8 h to the other end and are heated on the other hand. The heat medium oil L is on the heating flow path 2 8 g, 2 8 h at the other end, through the through hole 1 5 B to reach the bottom hole 1 4 j ', and then from the hot plate The outlets of 1 3 and 2 7 are discharged. In this embodiment, the number of electric heaters is increased corresponding to the large hot plate area. However, since the heating flow path (the sectional area of the heating flow path is increased) It is only about one half of the communication through-holes 15A, 15B, the inlet 26, and the outlet 27.) The two are arranged side by side so that the heat medium oil L flows between the communication through-holes 14A, 1B. Compared with the case where the heating flow paths are arranged one by one, the flow path resistance can be reduced. In addition, since the total cross-sectional area of the heating flow paths arranged side by side is set to be approximately equal to the cross-sectional areas of the inlet and the outlet, During the heating of the hot plate, the flow velocity in the hot plate is a certain speed, and the surface heat transfer is also constant. You can keep the hot plate more stable.

Page 27 559591 V. Description of the invention (24) Stable temperature distribution. Moreover, since the cross-sectional area of one heating flow path is set to approximately one-half of the inlet 26, the outlet 27, the bottom holes 14a, 14j, and the communication through-holes 15A and 15B, the heat flowing through each heating flow path Compared with the case where the cross-sectional area of the heating flow path is equal to the inlet 26 and outlet 27, the amount of the heat medium in the hot plate can be a small amount, which can reduce the operating cost during heating. In the embodiment of the present invention, the temperature sensor 34 is provided on the upper hot plate 10, but it may be provided on the lower hot plate 12. In addition, temperature sensors may be provided on the upper and lower hot plates to independently control the electric heaters of the upper and lower hot plates. At this time, although the cost is higher than when a temperature sensor is installed, different states of each hot plate can be controlled with high accuracy.

Page 28 559591 Brief description of the drawings Fig. 1 is a diagram showing the entire pressing apparatus of the present invention. FIG. 2 is a diagram showing a cross section of the hot plate and its control circuit in FIG. 1. FIG. Fig. 3 is a partial cross-sectional side view of the hot plate viewed from the direction of in-plate in Fig. 2. Fig. 4 is an enlarged > view of the electric heater and its mounting portion in Fig. 2. * Figure 5 is a side view of the flange portion mounting portion of the electric heater in Figure 4. Fig. 6 is a front sectional view of a hot plate according to another embodiment.

Page 29

Claims (1)

559591 6. Scope of patent application1. A pressing device is provided with a hot plate between a pair of flat plates that can be accessed and separated, a heater is inserted into a hole formed inside the hot plate, and a peripheral portion of the heater and the aforementioned hole A gap in the radial direction is formed between the inner peripheral walls, and the gap forms a ring-shaped cross-section heating flow path through which a heating medium flows. The heating medium in the heating flow path is heated by the aforementioned heating, and the heating plate is heated. A temperature sensor, a control unit, and a thyristor unit, wherein the temperature sensor detects a temperature related to the temperature of the hot plate and outputs a measured temperature signal; the control unit receives the measured temperature signal and calculates a difference between the measured temperature and the target temperature Value, the amount of power required for heating the heater is determined based on the difference, the required power output signal is output, and feedback control is performed; and the thyristor unit has a thyristor, and the required power output by the control unit On the one hand, the output signal is adjusted by the thyristor to supply power to the heater. 2. The pressing device according to item 1 of the scope of patent application, wherein the temperature sensor is mounted on one of the pair of flat plates, and the supply of the temperature to the pair of flat plates is controlled based on the measured temperature signal of the temperature sensor. Electric heater power. 3. The pressing device according to item 1 or 2 of the scope of patent application, wherein the heating flow path is connected to a cooler, and when the measured temperature or the temperature of the heat medium is higher than a specified value, the slave heating flow path The outgoing heat medium is directed to the cooler. When the measured temperature or the temperature of the heat medium is lower than Page 30 559591 VI. Patent Application Range When the preset value is set, the heat medium is bypassed by the cooler. 4 · The pressing device according to item 3 of the scope of patent application, wherein the predetermined value is set? : There is a hysteresis between the switching temperature at which the heat medium is directed toward the cooler and the switching temperature at which the heat medium is wound around the cooler. 5-A control method of a pressing device, the pressing device controlled by the control method is: setting a hot plate between a pair of plates that can be accessed and separated, inserting a heater into a hole formed inside the hot plate, and heating the plate A radial gap is formed between the outer peripheral portion of the device and the inner peripheral wall of the hole, and the gap forms a ring-shaped cross-section heating flow path through which a heating medium flows. The heater heats the heat medium in the heating flow path, and heats the heat. Plate heating is characterized by the following steps: detecting the temperature related to the temperature of the hot plate and outputting the measured temperature signal; accepting the aforementioned measured temperature signal, calculating the difference between the measured temperature and the target temperature, and determining the heating of the heater according to the difference The amount of power required is to output the required power output signal and implement feedback control; and according to the required power output signal output from the control unit, on the one hand adjust the thyristor to adjust the amount of power supplied, and on the other hand, heat the power supply Device. 6. The control method of the pressing device according to item 5 of the scope of patent application, characterized in that the temperature related to the temperature of the hot plate is detected by a temperature sensor installed on one side of the aforementioned pair of flat plates. 7 · The control method of the pressing device according to item 5 or 6 of the scope of patent application, characterized in that the aforementioned heating flow path is connected with the cooler, and when the aforementioned actual measurement Page 31 559591 VI. When the temperature of the patent application or the temperature of the heat medium is higher than the specified value, the heat medium flowing out of the heating flow path is directed to the cooler. When the measured temperature or the temperature of the heat medium is lower than a predetermined value, Pass the heat medium around the cooler. 8 · The control method of the pressing device as described in item 7 of the scope of patent application, which is characterized by: the aforementioned predetermined value setting? : There is a hysteresis between the introduction switching temperature of the heat medium toward the cooler and the bypass switching temperature of the aforementioned cooler. 9 · A hot plate of a pressing device, by inserting a heater into a hole provided inside the body of the hot plate, a radial gap is formed between an outer peripheral portion of the heater and an inner wall of the hole, and an annular cross section is formed by the gap. The heating flow path allows the heat medium flowing in from the inlet of the hot plate body to be discharged from the outlet through the heating flow path. It is characterized in that one end of the heater is fixed to one side of the hot plate body and the other end of the heater is fixed. Inserting a gap in the radial direction and the axial direction into a bottom hole provided on the other side of the hot plate body, to suppress the vibration of the heater caused by the heat medium flowing through the heating flow path along the heater axis direction. 1 0. The hot plate of the pressing device according to item 9 of the scope of the patent application, wherein the cross-sectional area of the gap in the radial direction is smaller than the cross-sectional area of the heating flow path. 1 1 · The hot plate of the pressing device according to item 9 or 10 of the scope of patent application, wherein the hot plate is arranged between a pair of pressurized flat plates of the pressing device. 1 2 · The hot plate of the pressing device according to item 9 of the scope of patent application, wherein the heater is an electric heater, and the electric heater is supplied with electricity. Page 32 559591 VI. Scope of patent application Force wiring is led out from the fixed side of one end of the heater. 1 3 The hot plate of the pressing device according to item 9 of the scope of the patent application, characterized in that one end of the heater is fixed to the side of the hot plate body by a flange portion in a state of holding a seal. The blue portion is provided at an end portion protruding from a hole of the hot plate body. 1 4 · The hot plate of the pressing device according to item 9 of the scope of the patent application, wherein the sectional area of the heating flow path is smaller than the sectional area of the inlet and outlet. 1 5 · The hot plate of the pressing device according to item 14 of the scope of patent application, characterized in that the sectional area of the heating flow path is substantially equal to the sectional area of the inlet and outlet. 1 6 · The hot plate of the pressing device according to item 9 of the scope of the patent application, wherein the heating flow path is configured as follows: adjacent heating flow paths are arranged side by side, and the upstream heat medium is shunted so that Each of the heating flow paths arranged side by side flows in the same direction, and then merges downstream of the heating flow paths. 1 7 · The hot plate of the pressing device according to item 16 of the scope of patent application, characterized in that the total cross-sectional area of the heating flow paths arranged side by side is substantially equal to the cross-sectional area of the inlet and outlet mentioned above. 1 8 · The hot plate of the pressing device according to item 9 in the scope of the patent application, wherein the heating flow path is configured as: a heating flow path through which a heat medium flows from one end to the other end, and from the other end The heating flow paths that flow the heat medium to one end portion are alternately arranged. 1 9 · A pressing device, the hot plate is arranged on a pair of upper and lower flat plates, which is characterized by the structure of the aforementioned hot plate? : By inserting the heater into the hot plate Page 33 559591 VI. In the hole inside the body of the patent application, a radial gap is formed between the outer peripheral portion of the heater and the inner peripheral wall of the hole, and the gap forms a heating flow path with a circular cross-section to make the heat from The heat medium flowing in from the inlet of the plate body is discharged from the outlet through the heating flow path; and one end of the heater is fixed to one side of the hot plate body, and the other end of the heater is left in the radial direction and the axial direction. The gap is inserted into a bottom hole provided on the other side of the hot plate body with a gap to suppress the vibration of the heater caused by the heat medium flowing in the heating flow path along the heater axis direction. 2 0 · A pressing device in which a hot plate is provided on a pair of upper and lower flat plates, and at least one or more hot plates are arranged between the hot plates provided on the flat plate, which is characterized by the structure of the aforementioned hot plate? : By inserting the heater into a hole provided inside the hot plate body, a radial gap is formed between the outer peripheral portion of the heater and the inner peripheral wall of the hole, and a gap-shaped heating flow path is formed by the gap, so that The heat medium flowing in from the inlet of the hot plate body is discharged from the outlet through the heating flow path, and one end of the heater is fixed to one side of the hot plate body, and the other end of the heater is in a radial direction and an axial direction. It is inserted into a bottom hole provided on the other side of the hot plate body with a gap to suppress the vibration of the heater caused by the heat medium flowing in the heating flow path along the heater axis direction. 2 1 · — A pressing device is provided with a hot plate between a pair of plates that can be accessed and separated, and a heating flow path is formed inside the heater and the hot plate installed on the hot plate. The heat medium oil circulating in the oil circulation circuit heats the hot plate, wherein the heat medium oil is a silicon-based heat medium oil. Page 34 559591 VI. Scope of patent application 2 2 · The pressing device according to item 21 of the scope of patent application, characterized in that the main component of the aforementioned heat medium oil is dimethyl polysiloxane. 2 3 · The pressing device according to item 21 or 22 of the scope of patent application, characterized in that the pressing device can heat the hot plate to 3 50 ~ 4 50 ° C. 24. The pressing device according to item 21 of the scope of patent application, wherein the pressing device has a pressure adjusting mechanism for maintaining the pressure of the heat medium oil within a predetermined range above the vapor pressure of the heat medium oil. 25. The pressing device according to item 24 of the scope of patent application, wherein the pressure regulating mechanism pressurizes the heat medium oil with an inert gas. 26. The pressing device according to item 25 of the scope of patent application, characterized in that the aforementioned inert gas is nitrogen. 27. The pressing device according to claim 25 or 26, wherein the inert gas is stored in an expansion tank connected to the heat medium circulation circuit through a pipe branched from the heat medium circulation circuit, and is expanded in the expansion. The inert gas in the tank pressurizes the heat medium oil. 2 8 · The pressing device according to item 27 of the scope of patent application, characterized in that the aforementioned pressure adjustment mechanism controls the pressure of the inert gas in the expansion tank within a specified range. 2 9 · The pressing device according to item 28 of the scope of patent application, characterized in that the aforementioned pressure adjustment mechanism has an inert gas control mechanism, and when the pressure of the inert gas in the expansion tank is lower than the first When under pressure, the inert gas is injected into the expansion tank, and when the pressure of the inert gas in the expansion tank is higher than the second pressure, the inert gas is released from the expansion tank. Page 35 559591 VI. Patent Application Range 30 · The pressing device as described in item 29 of the patent application range is characterized in that the aforementioned first pressure is 2 kPa and the aforementioned second pressure is 5 kPa. 3 1 · The pressing device according to item 21 of the scope of patent application, characterized in that the pressing device has a heat medium circulation circuit? The gas is released from the gas exhaust valve. 3 2 · The pressing device according to item 31 of the scope of patent application, characterized in that the aforementioned gas exhaust valve is installed on a gas recovery tank, and the gas recovery tank is set in a heat medium circulation circuit for recovering the heat medium circulation Gas generated in the circuit. 3 3 The pressing device according to item 32 of the scope of patent application, characterized in that when the gas pressure of the gas recovery tank exceeds a third pressure, the gas exhaust valve is opened to release gas from the gas recovery tank, After the gas exhaust valve is opened, when the gas pressure of the gas recovery tank is lower than the fourth pressure, the gas exhaust valve is closed. 34. The pressing device according to item 33 of the scope of patent application, wherein the third pressure is 4 kPa and the fourth pressure is 2 kPa. 3 5 · — A pressing device is provided with a hot plate between a pair of plates that can be accessed and separated, and a heating flow path is formed between the heater mounted on the hot plate and the inside of the hot plate. The heat medium oil circulating in the medium oil circulation circuit heats the aforementioned hot plate, and is characterized by having a heat medium oil cooling mechanism. The heat medium oil cooling mechanism is used when the workpiece is hot-pressed and solidified by the pressing device and then cooled. In order to adjust the temperature of the heat medium oil, the hot plate is cooled at a cooling rate within a predetermined range. 3 6 · The pressing device according to item 35 of the scope of patent application, characterized in that P.36 559591 6. The scope of the application for patent is that the aforementioned heat medium oil cooling mechanism has a bypass line, a cooler and a diaphragm valve. The bypass line branches from the heat medium oil circulation circuit and returns to the heat medium oil circulation circuit. The cooler is provided on the way of the bypass line to cool the heat medium oil passing through the bypass line; and the diaphragm valve is installed on the upstream side of the cooler of the bypass line to adjust the flow to the cooler Flow of heat medium oil. 37. A control method for a pressing device. The pressing device controlled by the control method is: a hot plate is provided between a pair of plates that can be accessed and separated, and a heating flow is formed in the heater installed on the hot plate and inside the hot plate. The heat plate is heated by a heat medium oil circulating in a heat medium oil circulation circuit including the heating flow path, wherein the heat medium oil is a silicon-based heat medium oil. 38. The method for controlling a pressing device as described in item 37 of the scope of patent application, characterized in that the main component of the aforementioned heat medium oil is difluorinated polysiloxane. 3 9 · According to the control method of the pressing device described in item 37 or 38 of the scope of patent application, characterized in that: when the pressing device is used to heat-fix the workpiece, the aforementioned hot plate can be heated to 3 5 0 ~ 4 5 0 ° C. 40. The method for controlling a pressing device as described in item 37 of the scope of the patent application, characterized in that in the aforementioned control method, the pressure of the heat medium oil is maintained within a predetermined range above the vapor pressure of the heat medium oil. 4 1 · The control method of the pressing device as described in item 40 of the scope of patent application, which Page 37 559591 6. Scope of patent application Characteristic: In the aforementioned control method, the heat medium oil is pressurized by inert gas. 4 2 · The control method of the pressing device according to item 40 of the scope of patent application, characterized in that the aforementioned inert gas is nitrogen. 43. The control method of the pressing device according to item 41 or 42 of the scope of patent application, wherein the inert gas is accumulated in an expansion tank connected to the heat medium circulation circuit through a pipe branched from the heat medium circulation circuit. In the foregoing control method, the heat medium oil is pressurized by an inert gas in the expansion tank. 44. The control method of the pressing device according to item 43 of the scope of patent application, wherein the control method is to control the pressure of the inert gas in the expansion tank within a predetermined range. 4 5 · The control method of the pressing device according to item 44 of the scope of patent application, characterized in that: in the aforementioned control method, when the pressure of the inert gas in the expansion tank is lower than the first pressure, inert gas is injected into the expansion tank. When the pressure of the inert gas in the expansion tank is higher than the second pressure, the inert gas is released from the expansion tank. 4 6 · The control method of the pressing device as described in item 45 of the scope of patent application, characterized in that the aforementioned first pressure is 2 kPa and the aforementioned second pressure is 5 kPa ° 4 7 · as described in item 37 of the scope of patent application The control method of the pressing device is characterized in that the aforementioned control method is to control the gas exhaust valve to exhaust the inside of the thermal cycle circuit? Gas. 48. The control method of the pressing device as described in item 47 of the scope of patent application, which Page 38 559591 VI. Application for patent Features: The aforementioned gas purge valve is installed on a gas recovery tank. The gas recovery tank is located in the heat medium circulation circuit and is used to recover the heat medium circulation circuit. Gas. 4 9 · The control method of the pressing device according to item 48 of the scope of patent application, characterized in that: in the aforementioned control method, when the gas pressure of the gas recovery tank exceeds the third pressure, the aforementioned gas exhaust valve is opened to remove the gas from the gas recovery tank. When the gas exhaust valve is opened and the gas pressure of the gas recovery tank is lower than the fourth pressure, the gas exhaust valve is closed. 5 0 · The control method of the pressing device as described in item 49 of the scope of the patent application, characterized in that the aforementioned third pressure is 4 kP a and the aforementioned fourth pressure is 2 kPa ° 5 1 ·-a control method of the pressing device , Which is characterized in that the pressing device controlled by the control method is to set a hot plate between a pair of plates that can be accessed and separated, and form a heating flow path between the heater installed on the hot plate and the inside of the hot plate. The heat medium oil circulating in the heat medium oil circulation circuit of the heating flow path heats the hot plate. When the pressing device heat-fixes the workpiece and then cools, the temperature of the heat medium oil is adjusted so that the hot plate is at a predetermined temperature. Cooling range cooling. 5 2 · The method for controlling a pressing device as described in item 51 of the scope of patent application, characterized in that the temperature of the heat medium oil is adjusted by controlling a cooler and a diaphragm valve, and the cooler is provided in a heat medium circulation circuit. On the way to the bypass line of the heat medium circulation circuit after branching, the heat medium oil passing through the bypass line is cooled; the diaphragm valve is installed on the upstream side of the cooler of the bypass line, and the aforementioned heat medium flowing to the cooler can be adjusted Oil flow. Page 39