TW541641B - Method of and system for conveying a cassette - Google Patents

Abstract

A closed cassette 60 containing a plurality of substrates 41 is first placed on a carriage 50, which in turn moves into the interior of a carriage-accommodating cassette table 70. The closed cassette 60 is then transferred onto the carriage-accommodating cassette table 70. Thereafter, the dosed cassette 60 is placed close to a clean room 80 in which a substrate conveying robot 110 is accommodated. The substrate conveying robot 110 moves between the dosed cassette 60 and a substrate processing unit 102 to convey the substrates 41 in the dosed cassette 60 to the substrate processing unit 102 one after another.

Description

DESCRIPTION OF THE INVENTION (1) [Technical Field] The present invention relates to a method and a system suitable for transferring a liquid crystal substrate (hereinafter referred to as a substrate) to a clean room of a factory in a manufacturing step of a liquid crystal panel, for example. [Know-how] For example, in the manufacturing steps of the liquid crystal panel, there is a step of subjecting the substrate to a substrate processing such as a thin film forming process, a cleaning process, and a photoresist coating process. Fig. 2 is a layout diagram of a substrate processing step device as an example of a device for the substrate processing step. For example, in the equipment installation clean room 100, a substrate processing apparatus 102 for processing substrates on a substrate, and a substrate loading / unloading robot 1 for transferring substrates into or out of the substrate processing apparatus 102 are disposed. The open-type robot housing clean room 30 for carrying substrates in and out of the manipulator 丨 and the cassette box stage 20 for holding the open cassettes 40 for storing substrates. Further, in the cassette storage place 10i in the facility installation clean room 100, an open cassette 40 containing a substrate is arranged. The open box 40 is transported from the box storage place 10 to the IS box table 20 or from the box box 20 to the IS container table 20 by the switch-off container-integrated type transport cart 10 in which a passage in the clean room 100 is provided by a mobile device. Other places. FIG. 3 shows an open-type robot housing which is equipped with a conventional open-closed manipulator from a hermetically-contained container-integrated conveyance cart 10 with a conventional technology, and an open box 40 with a box 20 already mounted thereon and a substrate moving in and out by a robot 11 Clean room 30, Figure 4 shows the integrated formation of a closed container 12 with a genus-shaped filter unit; and a closed container 12 of a circuit breaker 15 and a transfer container ι6 of a linking arm 13 and a lifting mechanism 14 541641 A7

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (2) The body transfer trolley 10. The sealed container-integrated transport trolley 10 is integrally formed with a fan-shaped filter unit (hereinafter referred to as the "should" and the circuit breaker 15 of the circuit breaker 15) to maintain the cleanliness of the interior. It is 12 and has a link arm 13 and a lifting mechanism. The transport trolley 1 β of 14 can be constructed, and the shape of the open box 40 is set on the link arm 13 in the closed container 12. The bottom box and the link arm 13 are formed on the open box 40. The concave and convex position determines the position of the big picture. The link box 13 and the lifting mechanism 14 can transfer the open box 40 from the inside of the closed container 12 to another position or from another position to the inside of the closed container 12. [3. Moreover, the link arm 13 and the lifting mechanism 14 are the same mechanism as the substrate moving in and out of the robot 11 which will be described later, and the link arm 3 corresponds to the substrate moving in and out of the substrate shown in FIG. 5 described later. Ho hoisting mechanism 丨 13, hoisting mechanism 14 is equivalent to the hoisting mechanism 112 of the substrate moving in and out of the robot 11 shown in Fig. 5. In addition, when the open box 40 is moved, the circuit breaker provided in the closed container 12 is opened and closed. 15 can transfer the open cassette 40. The cassette table 20 is arranged adjacent to the opening The position where the robot housed the clean room 30 'the substrate carrying in and out robot 110 is a device capable of fixing the open box 40 to a position suitable for carrying the open box 40 in and out. FIG. 3 shows the opening of the open box 40 The device for opening the cassette 40 is fixed on the cassette table 20 by the clamping mechanism 21. The open-type robot storage clean room 30 is disposed adjacent to the substrate processing apparatus 102, and the substrate is moved in and out of the robot 11. It is inside and has FFU31 to maintain the internal cleanliness. Also, it has the size of the paper through substrate processing, which is applicable to China National Standard (CNS) A4 (210 X 297 mm) ^ — «----- pack- ------- Order --------- (Please read the notes on the back before filling this page) 541641 A7

V. Description of the invention (3) The opening 32 for the substrate processing device printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, the open-type robot storage clean room 30 has a mechanism that can move the substrate moving person out of the robot 110 in the Y direction in FIG. 2, and can move the substrate in and out of the robot 1 10 appropriately to transfer the substrate. Position (usually the position of the substrate carrying inlet or outlet of the open cassette 40 or the substrate processing apparatus 102). The open-type robotic storage clean room 30 may have a mechanism for moving the substrate loading / unloading robot 110 in a direction other than the Y direction in FIG. 2. In the conventional technology such as ifcb, once the closed container-integrated transport trolley 10 is moved in the equipment installation clean room 100 and stopped before the cassette table 20, the circuit breaker 15 provided in the closed container 12 is turned on. The open box 40 is transferred from the inside of the closed container to the g box table 20 by the link arm 13 and the lifting mechanism 14. Once the open box 40 is transferred to the box 20, the open box 40 is fixed by the clamping mechanism 21 provided on the box table 20. In this way, once the open cassette 40 is placed on the cassette table 20, the substrate 41 stored in the open cassette 40 can be carried out by the substrate 110 being carried in and out by the robot 110. Also, in the manufacturing steps of the liquid crystal substrate, generally, at the time of the application of the present invention, the cleanliness in the equipment installation clean room 100 (hereinafter referred to as the cleanliness of the entire field) is a predetermined cleanliness within the level 10 ~ 100 Range (hereinafter referred to as cleanliness), and the equipment is used to clean the equipment to set up all areas of clean room equipment (hereinafter referred to as all-area clean equipment). However, 'there is an environment in which the cleanliness of the equipment installed in the clean room 100 may be partially reduced, and in order to avoid being affected by the reduced cleanliness during the transportation of the substrate, the open-type robot stores clean paper standards Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page). Packing 541641 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----- ~- --___ V. Description of the invention (4) The room 30 and the sealed container-integrated transport trolley 10 must also have FFUs to maintain the cleanliness of the settings inside each institution. FIG. 5 is a perspective view of the substrate moving in / out robot 11 and the substrate 41 moving in and out of the open box 40 and the substrate moving in and out of the robot. The substrate is moved in and out of the robot arm 11 〇 For example, as shown in FIG. 5, it has a base mechanism 11 people, an IV mechanism 112 and a group of arm mechanisms 11 3 and a shaft supported by the arm mechanism jig! One end manual member 114. The base mechanism 111 has many motors not shown in the drawings, which can raise and lower the lifting mechanism 12 and can rotate the lifting mechanism 112 around the axis of the z-axis.

The arm mechanism 113 is a mechanism in which the first arm 113a and the second arm 113b, which are pivotally supported by the lifting mechanism, are connected to the manual member 1n, and the manual member 4 moves at least in the X direction. This arm mechanism 113 is driven by a motor provided in the base mechanism lu. In addition, the manual member π 4 can mount and fix the substrate 41 on the upper surface of the manual member 114 by a vacuum suction or the like (not shown). The example shown in FIG. 5 is a substrate moving in / out robot 110 having a group of arm mechanisms 113, but it may be a substrate moving in / out robot 110 having a plurality of arm mechanisms. This specification does not limit the aspect, and a robot that can carry in and out the substrate 41 is referred to as a substrate carrying in and out robot 1 1 0. The open cassette 40 is, for example, as shown in Fig. 5, a cassette having a plurality of fins and a frame 41 in which a large number of substrates 41 are stored. In addition, since the open box 40 is not sealed, the substrate 41 stored in the box gold may come into contact with the ambient gas around the box, and the surrounding cleanliness may be reduced. This paper standard applies the Chinese National Standard (CNS) A4 standard (210 X 297 mm)

^ Install -------- Order --------- (Please read the precautions on the back before filling out this page) 541641 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (5) Impact. The cassette table 20 holds the device opening and closing cassette 40 at a position suitable for loading and unloading the substrate 41 in and out of the cassette 40 as described above. Fig. 5 shows only one open cassette 40 and the cassette table 20 for simplicity of explanation, and omitting the Y-direction moving mechanism for 30 households in the clean room shown in Fig. 2 is omitted. And other schemes. A description will be given of a procedure for carrying out the substrate 41 from the cassette by using such a substrate carrying in and out robot 11. First, the manual member 114 is moved toward the XI direction so that the manual member 114 is disposed below the substrate 41 as a space and inserted into the open box 40. Thereafter, the manual member 114 is raised, and the substrate 41 as a space is placed on the upper surface of the manual member 114 and fixed. As described above, if the manual member 114 is moved in the X2 direction, the substrate 41 can be carried out from the open cassette 40. When the substrate 41 is carried into the open cassette 40, the procedure is reversed. When the substrate 41 is carried into the substrate processing apparatus 102 or the substrate 41 is carried out from the substrate processing apparatus 102, the manual member is similarly moved in the χ direction or z. Just move in the direction. FIG. 6 is an explanatory diagram of the operation sequence of the equipment such as the closed container integrated conveyance cart 10 and the substrate loading and unloading robot 11 according to the conventional technology shown in FIG. 3. Referring to FIGS. 6 and 4, In the aforementioned equipment, the order of transferring the hidden gold 40 from the transfer trolley to the g-box stage 20 until the state where the substrate can be carried out of the substrate and the robot 11 can be carried out. ① As shown in Fig. 6 (a), a closed container containing the open box 40 will be placed; Aw > ^ -------- ^ --------- (Please read first (Notes on the back then fill out this page)

Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 541641 V. Description of the invention (The body-carrying trolley 10 moves towards the E-box 20 as a space. ② As shown in Figure 6 (b), the sealed container-integrated transporting trolley停止 When stopped before Marina Box 2G, the circuit breaker 15 included in the closed container-body transfer trolley 10 will be opened (not shown). ③ As shown in Figure 6 (c), Closed container_The link arm 13 and the lifting mechanism 14 of the body-conveying trolley 10 are movable, and the opening of the closed container 12 of the closed-container integrated-conveying trolley 10 is transferred to the g-box table 20. At this time, borrow The open box 40 is fixed to the box table 20 by the clamping mechanism 21 provided in the box table 2G of the aforementioned FIG. 3. ④ As shown in FIG. 6 (i), the closed container-body transfer trolley 10如 才干 # 13 和 升 (V mechanism! 4 Return to the original position, and close the circuit breaker 15 at the same time. ⑤ As shown in Figure 6 (e), move the closed container integrated transport cart 10 from the box box 20 To other positions. In addition, the sealed container-integrated transport trolley 10 to all The processing of the substrate 41 can be stopped before the box box stage 20, but it is generally moved to another position so as not to hinder the passage of other closed container body transport trolleys 10. Once all the substrate 41 process ends At this time, the open box 40 containing the substrate 41 is transferred from the box box 20 to the closed container-integrated transfer cart 10 and transferred to another position. The operation at this time is the same as the opening of the box 40. Reverse order when transferring from the sealed container-integrated transport trolley 10 to the cassette stage 20. [Problems to be Solved by the Invention] (1) At the time of applying for a patent for the present invention, it is necessary for the manufacturing steps of the liquid crystal substrate Spring cleanliness is a predetermined cleanliness range of grade 10 ~ 100 (the paper size is set to apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ^. *-装 —---- Order-- ------- (Please read the precautions on the back before filling this page) 541641 A7 B7 V. Description of the invention (7) Cleanliness) There are also preset cleanliness levels according to the conditions of the manufacturing steps. 10 cases, and there are also cases that are scheduled at level 100 It is explained here that the equipment installation clean room 100 is connected to the space of the whole field, so the equipment installation clean room 100 is used to move the clean equipment in the entire field in the same manner as the cleanliness. The clean equipment in the whole field is generally It is a method of flowing clean air from the upper part of the equipment installation clean room 100 to the lower part, but regardless of the entire area of the equipment installation clean room 100, the clean equipment of the entire area is used to set the cleanliness. The technology is to transport the open box 40 by a closed container-integrated transfer trolley with FFU11. The reason is because of the structure of the clean room 100 installed in the equipment. Therefore, once the open box 40 is exposed without carrying the open box 40 into the closed container 2, the substrate 41 in the open box 40 at that place may be dusty. The 'open-type robot storage clean room 30' is opened on one side of the box side 20 ... I * 隹 The relationship between the other sides and the upper surface and the substrate processing device is mostly covered by the next wall. When the crop is moving, there is a concern that the open-type robot housing the clean room 30 is lower than the set cleanliness. At this point, FFU11 should also be installed in the open-type robot storage clean room 30 to maintain cleanliness. The conventional technique explained so far is to install a clean room 100 in the facility, and even if it is an integrated valley-truck-type conveyance trolley 10, it is necessary to install F F U11 and maintain the interior at a set cleanliness to carry the open box 40. However, the cleaning equipment in the entire field is not only expensive, but also has an electrical cost of FFU11.-This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)- ------- Order -------- I 'Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Printed 541641 A7 ---------- -B7 V. Description of the Invention (8) Operation costs such as maintenance caused by the large number of filters will also be excessive. /, The construction cost and operating cost of clean equipment in the whole field increase with the requirement of higher cleanliness. To achieve the level of cleanliness necessary for the manufacturing steps of liquid crystal substrates in the range of 10 to 100, it will require a large cost . In addition, the closed-capacity integrated transport trolley i 〇 also needs to be equipped with batteries to drive the FFU11 and FFU, so the equipment cost and operating cost and its weight increase. (2) In recent years, the size of substrates has increased in size and weight in recent years. With this, the open box 40 accommodating the substrate 41 is also required to be large in size, and the weight is continuously increased. As a result, the following problems occurred. In addition, as a reference material, a substrate 41 having a thickness of 700 mm x 900 mm (thickness 1 · It) and 1000 mm < 1200 mm (thickness 1 · It) has been produced in recent years. Here, the specific gravity of Er Ming glass is 2 · 7 8, so the weight of the substrate 41 is: 700 (mm) x900 (mm) xl.l (t) χ2 · 78 / 1000/1000 and 1.9 [kgf] (20 pieces of about 38kgf) 1000 (mm) xl200 (mm) xl.l (t) χ2. 78/1000/1 000 and 3.7 [kgf] (20 pieces of about 73kgf) Therefore, a substrate of this weight is When the box contains 20 pieces, the weight of the box itself will also become quite heavy. In the case of a semiconductor wafer, the specific gravity is 2.33, and the weight of a semiconductor wafer with a diameter of 300 mm is also 124 gf (20 pieces will be 2.5 kgf), so it can be known that the substrate 41 is heavier than the semiconductor wafer. ① As shown in FIG. 4, the conventional technique is to place an open box -11 on the linking chamber 13 ^ The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) " " I J. ---; ----- " ^ 1 Packing -------- Order --------- (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the employee consumer cooperative 541641 A7 ______B7 _ _ V. Description of the invention (9) Box 40, so as the front end of the linking room 13 is sealed by the closed container integrated transport trolley 10, the center of gravity of the trolley is shifted to the open box 40 , Therefore, the trolley may be unstable or overturned. As described above, it is necessary to increase the weight of the main body of the sealed container-integrated transport trolley 10 in accordance with the weight of the open cassette 40 stored therein. However, there is no facility to set up the clean room 100, and the ground load resistance of the equipment structure is not very large. In this case, when the weight of the sealed container-integrated transport trolley 10 becomes heavy, the latitude of the property weight of the floor where the clean room 100 is not provided will be reduced, or it will exceed the weight resistance, so it cannot be used. The sealed container-integrated transport trolley 10 having such a weight. In addition, the increase in the weight of the sealed container-integrated transport trolley 10 is related to the increase in the size of the transport trolley, the expansion of the passage through which the transport trolley passes, and the expansion of the facility installation clean room 100, which increases the equipment investment. . ② To transfer the heavy open box 40, it is necessary to set the link arm i 3 and the lifting mechanism 14 into a large-weight corresponding link arm 3 and the lifting mechanism J 4, which will increase the equipment cost. Further, the use of a motor having a large output energy increases the size of the link arm 13 and the lifting mechanism 14. In addition, the main body of the hermetically-contained container-type transfer cart 10 is also increased in size. In addition, the sealed container-integrated transport trolley 10 has a rechargeable battery inside to move using the charged electric power. Therefore, if a large-output motor is necessary as the substrate 41 becomes large, the necessary electric power is increased. Therefore, the battery built in the sealed container-integrated transport trolley 10 is also large in size and weight. ③ If the size of the hermetically-contained container-integrated transport trolley 10 is increased, the passage I Ji is installed -------- Order --------- (Please read the precautions on the back before filling this page) 12 541641 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 5. The description of the invention (10) will increase 'so that not only the installation area of the clean room 100 cannot be effectively used by the equipment' but also the situation where additional equipment is required to install the clean room 100 . (3) The sealed container-integrated transport trolley 10 is moved by an internal rechargeable battery, and in order to drive the link arm 13 and the lifting mechanism 14, it is necessary to move to a facility installed in a clean room 100. Charge the device and charge it. However, in this method, it is necessary to set the clean room 100 in the equipment in advance to set the transport trolley during charging, so the installation area of the equipment to install the clean room 100 cannot be effectively used. (4) FIG. 7 is a diagram illustrating the closed container-integrated transfer cart 10 which transfers the open box 40 to the box table 20 from the conventional closed container-integrated transfer cart i0, while other passages are integrated and the other closed container is integrated. How to move when the transport trolley 10 moves on the same path. As shown in FIG. 7 (a), when the open box 40 is transferred to the box table 20 from the hermetic container-integrated transfer cart 10a, the hermetic container is moving in the same passage because the passage is blocked. It is necessary to stop the body transfer cart 10b from the closed container-integrated transfer cart 10a to transfer the open box 40 to the box box 20. In addition, in order to improve the transfer efficiency, it is necessary to use a hermetically-contained-container-integrated conveying trolley 10c that moves from the opposite side of the path to ensure a passage width of two units of the hermetic-container-integrated conveying trolley. Further, as shown in Fig. 7 (c), the closed container-integrated transfer cart 10b being moved can continue to move by avoiding the open box 40 from the closed container-integrated transfer cart 10a during transfer. However, in this case, it is necessary to ensure that it is stopped. Γ ---: ----- install ------- ^ order --------- (Please read the note on the back? Matters before filling in This page} 13 541641 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (11) The closed container integrated transport trolley 10a and the two closed container integrated transport trolleys (10b, loc) The width of the passage of the enclosed container-integrated conveying trolley 3 and the carriage 2 is as described above. As described above, the conventional device widens the passage width, so the area of the equipment installation clean room 100 needs to be large. However, the entire field of clean equipment It is very expensive and will increase the equipment cost with the increase of the area of the clean room. Therefore, if it is a conventional technology equipment, there will be an increase in the setting of equipment settings; ^ cleanliness of the entire field of cleanliness to 100 The problems of equipment cost and running cost. The purpose of the present invention is to reduce the cleanliness level of the clean room 100 installed in the equipment and reduce the clean equipment costs and operating costs of the whole field; or ② set the cleanliness level of the clean room 100 to the equipment. Set up like conventional technology, Even if the substrate is large and the weight is large, the weight and size of the transfer trolley can be suppressed, and the equipment cost of the transfer trolley can be reduced. This can prevent the passage width from increasing, and actively reduce the passage width to effectively use the equipment to clean it. The installation area of the room 100; ③ The cleanliness level of the clean room 100 is set in conjunction with the reduction of equipment, and the reduction of the equipment cost and the passage width of the above-mentioned transfer trolley can be achieved. [Methods to Solve the Problem] Application when applying for a patent The invention according to the first item of the patent scope is shown in FIG. 8 (actual example 1) and FIG. 16 (embodiment 2). A cassette conveying method is a method in which a cassette containing a substrate is mounted on a transport trolley and transferred to Adjacent to the robot in which the substrate loading / unloading robot is installed, the cassette holder in the clean room is accommodated. The substrate loading / unloading robot moves the substrate between the cassette and the substrate processing device. ) --Γ ----------------- ιπ · ------- IC, please read the notes on the back before filling out this page) 541641 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by Consumer Cooperative A7 Explanation (12) It is formed by a sealing cover 61 having an opening on the side and a sealing box body 62 having an opening on the side as shown in FIG. 10, and the sealing cover 61 accommodates the substrate 41 in the box body S2. The step of closing the airtight cover 61 freely, and closing the airtight cover 61; the step of loading the closed airtight S box 60 compartment shown in FIG. 8 or 16 on the transport trolley (50, 55); The hermetically sealed box 60 mounted on the transfer trolley (50, 55) is transferred to the cassette box opening (70) with respect to the hermetically sealed cover 82 provided in the shut-off type robot storage clean room 80. , 75); the step of sealing the sealed box 60 in the sealed robot I to the clean room 80: opening the opening and closing plate 91 that has closed the opening 82 for the s box and simultaneously opening the sealing cover 61 Step; the substrate moving in / out robot 110 moves in and out the substrate between the aforementioned closed box 60 and the substrate processing device 102; after closing and closing the substrate 61, the closed cover 61 is closed while the opening and closing plate 91 is closed. Steps; and the aforementioned closed box from the box box table (70, 75) Step 60 is transferred to the conveying truck (5〇, 55). The second invention of the claimed patent scope of the declared patent%, the second invention, such as the patent application scope of the first invention, the first invention, and the eighth invention (Example 丨) of the invention. After the trolley is transported to the robotic table where the robot in which the substrate carrying in / out robot is installed receives the clean room, the substrate carrying in / out robot moves the substrate in and out between the cassette and the substrate processing device. The sealed box body 62 having an opening on one side and the sealed box body 61 of the sealed box body 62 are formed. The aforementioned sealed cover 61 accommodates the substrate 41 in a closed box which can be freely moved with respect to the box body 62. Step of closing the aforementioned sealed cover 61; step of mounting the aforementioned sealed box 60 shown in FIG. 8 on a front-loading type transfer trolley 55; and -15-this paper size applies the Chinese National Standard (CNS) A4 Specifications (210 X 297 mm)

(Please read the notes on the back before filling this page) τ Μ -------- t --------- ^ wi. 541641 A7

The aforementioned sealed box 60 mounted on the front transfer type transport trolley 55 is transferred to the sealed box with the opening mechanism 82 provided in the sealed robot clean room 80 in the sealed cover 61 with respect to the aforementioned sealed cover 61. Steps of stage 75; steps of sealing the first two sealed E-boxes 60 in the closed-type manipulator to store the clean room; opening of the opening and closing plate 91 that has closed the opening 82 for the box, and opening the closed cover 61 at the same time; The board moving in and out robot 11 moves the board in and out between the closed box ⑼ and the substrate processing apparatus 102; after the board is moved in and out, the closed cover 61 is closed and the opening and closing board is closed. Consumption: and the step of transferring the aforementioned hermetically sealed box 60 from the closely-sealed box table 75 to the front: a step of the forward transfer type transporting trolley 55. When applying for a patent, please apply for the 3rd invention in the patent range. If you apply for a patent, apply for the 16th invention in the first scope of the invention (Example 2). The method of transporting the Kun box of the invention is to mount the g box containing the substrate. Transported by the trolley: After the robotic arm adjacent to the substrate loading / unloading robot accommodates the cassette box in the clean room, the substrate loading / unloading robot moves the substrate in and out between the g box and the substrate processing device. As shown in the figure, the sealed box body 62 with an opening on the side and the opening of the sealed box body 62 are formed. The aforementioned sealed cover 61 accommodates the substrate 41 in a freely removable E box 60 with respect to the box body 62. And the step of closing the aforementioned sealed cover 61; the step of mounting the aforementioned sealed 1 $ box 60 shown in _ on the downward transfer type transfer cart 50; and the aforementioned density already mounted on the aforementioned downward transfer type transfer table ㈣, The box is opposite to the step of providing the sealed cover 61 in a closed robot storage clean room _ ϋ the box opening 82 is transferred to the trolley storage bridal box table 70; the closed E box 60 is sealed to the closed type Robot storage clean room 8 Step iu • -install -------- order --------- 0 .____ c Please read the notes on the back before filling this page) This paper size applies to Chinese national standards (CNS ) A4 size (210 X 297 mm) 16 -H-

I Printed by M1641 A7 from the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs " I '' ~ ·-~~ _BZ ____ V. Description of the Invention (M) " '--- Open and close the opening 82 of the aforementioned box opening 82 When the plate 91 is opened at the same time, the steps of the anti-closing cover 61 are described; the substrate moving in and out robot 11 is a step of moving the substrate in and out between the aforementioned closed box 160 and the substrate processing device 102; after the substrate is moved in and out, The steps of closing the closing cover 61 and closing the opening and closing plate 91 at the same time, and the step of transferring the sealed box 60 from the trolley storage type cassette table 70 to the downward transfer type transfer trolley 50. When applying for a patent, the fourth invention in the scope of patent application is a box conveying method as shown in Fig. 16 (Example 2) and Fig. 20 (Example 3). After the cassette is mounted on a transfer trolley and transported to a cassette box stage in the clean room adjacent to the robot arm provided with the substrate loading / unloading robot, the substrate loading / unloading robot loads and unloads the substrate between the cassette and the substrate processing device, and has: 41 Steps for storing in a box (40, 60); Steps for mounting a box (40, 60) on a downward transfer type transport trolley 50; the aforementioned lowering of a box (such as 60) Step of moving the carrying type transporting trolley μ to the trolley storage type cassette box stage π; transferring the aforementioned cassettes (40, 60) mounted on the aforementioned downward transfer type transporting trolley 50 to the trolley storage type cassette box stage 70 Steps; a step of loading and unloading the substrate between the cassettes (40, 60) and the substrate processing device 102 by the substrate moving in and out robot hand 110; and (40, 60) The step of transferring the load to the lower transfer type transfer trolley 50. When applying for a patent, the fifth invention in the scope of the patent application is shown in Figure 16 (Embodiment 2). The method of transferring the E-box is shown in Figure 16 (Example 2). After the robotic hand stores the cassette table in the clean room, the substrate moving in and out robot moves the substrate in and out between the cassette and the substrate processing device. It has: one of the sides shown in Figure 10. 17 This paper size is applicable to the country of China Standard (CNS) A4 specification (210 X 297 mm). # 丄 衣 -------- tr --------- (Please read the precautions on the back before filling this page) 541641 Economy The Intellectual Property Bureau employee consumer cooperative prints A7 '------------- V. Description of the invention (15) Formed with an E-box body 62 with an opening and an airtight lid 61 with an opening of the closed box body 62 The step of closing the sealing cover 61 with respect to the box body: storing the substrate 41 in a sealing g box 60 that can be freely moved on and off, and closing the sealing cover 61; mounting the sealing E box 60 on a downward transfer type transport trolley 5 Steps: The aforementioned drop-and-shift type transport trolley 50 equipped with the aforementioned closed box 60 is moved Steps to the inside of the trolley storage-type cassette box table 70; the closed cassette 60 mounted on the lowered transfer type transport trolley 50 is provided in the closed-type robot storage clean room 80 with respect to the sealed cover 61 Step for transferring the box opening 82 to the trolley storage box box table 70; Close the closed box 60 in the closed robot storage clean room _ step; Open and close the S box opening 82 Step of opening and closing the plate 91 and opening the aforementioned sealed cover 61 simultaneously; step of substrate moving in and out of the robot 11 to move the substrate in and out between the sealed box 60 and the substrate processing apparatus 102; closing and sealing after the substrate is moved in and out A step of closing the opening and closing plate 91 at the same time as the cover 61; and a step of transferring the uranium bifurcated cassette 60 from the cassette port 70 to a descending transfer type transporting trolley.时 The sixth invention of the patent application scope at the time of patent application is a cassette transfer method as shown in Figure 16 (Example 2). The cassette containing the substrate is mounted on a transfer trolley and transferred to the adjacent substrate. After the robot out of the robot stores the E-box table in the clean room, the substrate is moved in and out. The robot moves in and out the substrate between the cassette and the substrate processing device, and has the steps of storing the substrate 41 in the open cassette 40; The step of mounting the cassette 40 on the lowered transfer type trolley 50; the aforementioned step of moving the lower transfer type transported trolley 50 carrying the open cassette 40 to the inside of the trolley storage type cassette stage 70; Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) T ^ -------- ^ -------- -18) 41641

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

The step of loading the aforementioned open E-box on the down-loading-type transfer trolley 50 to the trolley storage dragon box table 70; the substrate is moved in and out of the robot, and between the aforementioned open E-box 40 and the substrate processing unit 102 A step of loading and unloading the substrate; and a step of transferring the aforementioned open-box 40 from the trolley storage type cassette box 70 to the lower transfer type transport trolley 50. When applying for a patent, the seventh invention in the scope of the patent application is shown in Figures 12 and 13 and a g-box transfer method shown in Example 1 and Example 2, in which the special spear J | The opening described in item 3 or 5 closes the opening / closing plate 91 of the opening 82 for the box 82, which is set in the closed-type manipulator storage clean room 80 (Figures 12 and 16). The process of confining Wei was performed simultaneously by hermetically closing and removing the device 90. The eighth invention of the scope of the patent application on behalf of the Japanese patent application is shown in Figures 12 and 13 and a method of transporting boxes in the first and second embodiments. The process of closing the opening and closing plate 91 of the closing lid 61 of the closed box 60 described in 5 items is performed on the same day by closing the opening and closing plate 91 simultaneously. The ninth invention of the patent scope of the patent application is as shown in Figure 8 (Example 1)-a method of transporting the E box, in which the box in the patent scope of item g is sealed and the box is sealed. The step of storing a clean room in a robotic type is to install the clamping mechanism ^ with a sealing mechanism ^ box, and fix it, and then press the closed box 60 with the slide mechanism 78 on the closed machine. Steps for holding the clean room 80 by hand. The tenth invention of the patent scope of the patent application declared by the Japanese patent is a box transfer method as shown in FIG. 16 (Example 2), in which the scope of patent application I-equipment -------- order --- ------ · (Please read the notes on the back before filling this page)

19 This paper size applies to China National Standard (CNS) A4 (210 297 mm 541641

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. The steps described in (17), 3 or 5 of the invention, which are used to seal the closed box 60 in the closed robot storage / clean room 80. A step of holding the closed box 60 by the slide mechanism 73 while the clamping mechanism 71 provided on the trolley storage type box table π is fixed, and the step of storing the clean room 80 by the closed-end manipulator is described. When applying for a patent, the eleventh invention in the scope of patent application is a box conveying method as shown in FIG. 22 (Embodiment 4), in which the aforementioned drop-off transfer type described in item 3, 4, 5 or 6 of the patent scope is applied. The trolley 50 moves to the inside of the trolley storage type S box table 70 and is stopped, and the charging mechanism 74 provided in the trolley storage type box box 70 described above is used to charge the down-load transfer type trolley 50. At the time of patent application, the twelfth invention in the scope of patent application is a box conveying method other than that shown in FIG. 23 (Example 5), in which the aforementioned downward transfer type described in the scope of patent application No. 3, 4, 5, or 6 The transporting trolley 50 moves to the inside of the trolley-receiving-type cassette box 70 and is stopped. The other descending transfer-type transporting trolley 50 passes through a path adjacent to the aforementioned trolley-receiving-type cassette box table 70. At the time of patent application, the invention in the 13th scope of the patent application is shown in Fig. 8 (Example 1) and Fig. 16 (Example 2). A cassette conveying system is used to collect The cassette is mounted on a transfer trolley and is transported to a cassette box stage in a clean room which is adjacent to a robot in which a substrate loading / unloading robot is installed. The substrate loading / unloading robot transfers the substrate between the cassette and the substrate processing device. 10 is formed by a box body 62 having an opening on the side and a closed box 61 of the closed box body 62, and the closed cover 61 is a closed box 6 that can be freely moved to and from the box body 62. ; Transporting table for carrying the aforementioned closed box 60 containing the substrate 41 shown in FIG. 8 or FIG. 16 The paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) (Please read first Note on the back, please fill out this page) t-pack ------- ^ order ---------. 20 541641 A7 ------------ B7_________ V. Invention Explanation (18) car (50, 55); box box table (70, 75) for placing closed box box 60; board for carrying in and out of board 41 Robot 11; the sealing cover removing device 90 for removing and closing the sealing cover 61 from the box body 62; moving the substrate into and out of the robot 110 and the sealing cover removing device 90 provided inside, and carrying in through the substrate The robot 110 is covered with a partition wall having a cassette opening 82 for carrying the substrate 41 in and out from the cassette tray and a substrate processing apparatus opening 81 for the substrate processing apparatus 102, and has F7U83. The closed-type robot holds the clean room 80; the opening and closing plate 91 that opens and closes the opening for the cassette; and the sealing cover 61 faces the opening 82 for the cassette and is placed on the cassette table (70, 75). The hermetically closed cover removing device 90 releases the hermetically closed cover 61 from the cassette main body 62 through the cassette opening 82, and the substrate carrying in / out robot 110 stores the sealed cassette 60 through the cassette opening 82. The substrate 41 is carried in and out. At the time of patent application, the invention of item 14 in the scope of patent application is a cassette conveying system shown in FIG. 8 (Example 1), in which the conveyance trolley of the aforementioned scope of patent application item 13 is a front-loading type conveyance trolley 55, The cassette box table is attached with a close mechanism cassette box table 75. At the time of patent application, the invention with the scope of patent application No. 15 is a box conveying system as shown in FIG. 6 (Example 2). Among them, the above-mentioned patent application scope No. 13 is a drop-down type transfer trolley 5 〇, and the g box platform is a trolley storage type box platform 75. At the time of patent application, the invention in the 16th scope of the patent application is shown in Fig. 16 (Consistent Example 2) and Fig. 20 (Embodiment 3). A cassette conveying system is equipped with a maker box containing a substrate of a holder. When transporting the trolley, it is transported to the adjacency to the setting -21-$ The paper size applies the Chinese National Standard (CNS) A4 specification (21Gx 297 mm) '-(Please read the precautions on the back before filling this page) 7 Pack tr-- ------- · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 541641 A7

Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (19) After the robot in which the substrate is moved in and out of the robot stores the cassette box in the clean room, the substrate is moved in and out of the robot between the cassette and the substrate processing device. The substrate includes: a cassette (40, 60) for storing the substrate 41; a drop-down transfer type trolley 50 carrying an E-box (40, 60) containing the substrate 41; and a drop-type transfer trolley 50 The trolley storage type cassette table 70 moved to the internal space; the substrate 41 for carrying the substrate 41 in and out; and the robot arm 110 for carrying the substrate in and out; and the robot arm storage including 83) Clean room (30, 80). At the time of patent application, the invention of item 17 in the scope of patent application is a box conveying system as shown in FIG. 16 (Example 2), wherein the box in the aforementioned area of patent application 16 is a closed box 60, and the machine is mechanical The hand storage clean room is a closed-type robot storage clean room 80 in which substrates are carried in and out of the robot 110 and provided with FFU83. At the time of patent application, the invention of item 18 in the scope of patent application is a box conveying system as shown in FIG. 20 (Example 3), wherein the box in the aforementioned patent scope 16 is an open box 40, and The robotic arm storage clean room is an open-type robotic arm storage clean room 30 that carries the substrate in and out of the robotic arm 110, and has Fj? U83. At the time of patent application, the invention of item 19 in the scope of patent application is a cassette conveying system shown in FIG. 8 (Example 1) and FIG. 16 (Example 2), wherein the closed lid of the aforementioned patent application No. 13 The holding and releasing device 90 supports an opening and closing plate 91 for opening and closing a closed-type robot to store the clean room 82. At the time of patent application, the 20th invention of the patent application scope is a cassette conveying system as shown in Figure 8 (Example 1) and Figure 16 (Example 2), of which 22 paper standards are applicable to the Chinese National Standard (CNS ) A4 size (210 x 297 mm) (Please read the precautions on the back before filling out this page) Loading -------- Order ---------

541641 V. Description of the invention (⑽) The closed cover release device 90 in the scope of patent application No. 13 is to open and close the closed opening 82 of the clean room 82 of the closed type robot while opening and closing the opening 82 of the clean room 82.封盖 61。 Sealed cover 61. At the time of applying for a patent, the invention of item 21 in the scope of patent application is a box conveying system shown in Figures § (Embodiment 1) and Figure 16 (Embodiment 2). The cassette table (70, 75) has a clamping mechanism (71, 76) for fixing the closed box 60, and a sliding member (73, 78) for sliding the closed box 60. The invention of item 22 in the scope of patent application at the time of patent application is a box conveying system as shown in FIG. 22 (Example 4), in which the trolley storage type box box table 70 in item 16 of the aforementioned patent application has a downward movement. Charging mechanism 74 for carrier-type transport trolley 50. [Embodiment of the Invention] The details of the present invention will be described below with reference to the drawings. Figure 1 shows the inventive features of the application. Since FIG. 1 is the same as FIG. 16 which will be described later, FIG. 16 is used for explanation and explanation later. An embodiment of the method of the present invention is shown in FIG. 16 (Example 2), and it corresponds to the invention of the E-box conveying method in item 5 of the scope of patent application at the time of patent application. An E-box conveying method is a method in which a cassette containing a substrate is mounted on a transfer trolley and transported to a cassette table adjacent to a clean room stored in a robot adjacent to a robot in which a substrate loading / unloading robot is installed. The substrate is moved in and out between the substrate processing devices, and has: a box with 23 openings on one side. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210x 297 mm). (Please read the precautions on the back before filling this page. ) T -------- Order --------- · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

541641 A7 I --- ---------- B7 _ 5. Description of the invention (21) " "-formed by the closed cover 61 of the opening of the box body 62, the aforementioned dense eyes, m box The step of closing the hermetically sealed cover 61 by the main body 62 receiving the substrate 41 in the hermetically sealed box 60 which can be freely moved on and off; and the step of loading the hermetically sealed box t on the lower-loading type transport trolley 5G The step of moving the aforementioned closed £ box 60 of the transfer-type transfer trolley 50 to the trolley storage type E = moves the above-mentioned starting and closing box 60 of the drop-down transfer-type transfer trolley 50 to the aforementioned sealed state. The cover 61 is provided in the step of transferring the clean room box opening 82 to the closed-type robot and transferring it to the trolley storage type 11-box table 70; the step of sealing the closed E box 60 in the closed-type robot storing the clean room 80; The opening and closing plate 91 that has closed the g box opening 82 is opened at the same time as the aforementioned closed cover_step; the substrate moving in / out robot 110 moves the it} substrate between the sealed g box 6G and the substrate processing device ⑽, at $ After closing the board, the closed cover Η is closed and the opening and closing plate 91 is closed before The step 82 of the cassette opening; and the carriage cassette type storage station 70 to the closed transfer cartridge 6〇 step 50 to decrease a transfer-type conveying truck. In addition, the implementation aspect of the method of the present invention is shown in Fig. 16 (Embodiment 2), which corresponds to the invention of the cassette conveying system in the patent application scope item 15 at the time of patent application. This type of E-cover transfer system is a method of loading a substrate-carrying cassette on a transport trolley to a cassette stage adjacent to a robotic storage chamber in which a robot carrying a substrate-in / out robot is installed. The substrate is loaded and unloaded between the substrate and the substrate processing unit, and is formed with a sealed cover 61 having an opening of a centimeter box body 62 and an opening of the closed box body 62 on one side, and the aforementioned sealed 24 paper standards are applicable to the Chinese National Standard (CNS) A4 size (210 x 297 mm)

(Please read the note on the back? Matters before filling out this page) Binding. 541641 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (22) The cover 61 is free to be removed from the box body 62 Closed cassette 60; a drop-type transporting trolley 50 carrying the aforementioned sealed cassette 60 containing the substrate 41; a trolley-receiving cassette box 70 carrying the sealed cassette 60; and a substrate 41 carried in and out The substrate is carried in and out of the manipulator 110; the hermetically closed cover removing device 90 for removing and closing the hermetic cover 61 from the cassette body 62; the substrate is carried in and out of the robotic hand 110 and the hermetically closed cover removing device 90 is provided inside, and the aforementioned The substrate carrying in / out robot 110 is covered with a partition wall having a cassette opening 82 for carrying substrates 41 in and out from a cassette tray table and a substrate processing apparatus opening 81 for the substrate processing apparatus 102, and It has an FFU832 closed-type manipulator storage clean room 80; and an opening and closing plate 91 for opening and closing the box opening 82, and the uranium opening and closing cover 61 faces the opening 82 for the box holding the clean room of the box. Mount In the storage-type cassette box table, the aforementioned closed cover release device 90 lifts and closes the closed box 61 of the closed box 60 and the foot box body 62 through the opening 82 for the box box, and moves the substrate into and out of the robot " ο The substrate 41 stored in the closed cassette 60 is carried in and out through the cassette opening 82. [Example] (Example 1) Example i described below is an example of a cassette conveying method and a Kuang i conveying system, corresponding to patent application scopes 2, 7, 8, 9, and 13, 14, 19, 20, and 21 inventions. The front-loading transfer cart 55 carrying the closed box 60 shown in FIG. 10 is moved to the box-mounting table 75 with a tight mechanism and the front-loading transfer cart 55 The lever arm 56 and the lifting mechanism 57 transfer the closed box 60 to the Η 装 装 装 装 装 装 订----- ---- (((Please read the precautions on the back before filling in this Page) μ's scale $ 用 中 ## quasi (oiuTii · (210 X 297 mm) 25 541641 A7 V. Description of the invention (23 to the box box 75 with a sealing mechanism located at the regular side, the box will be closed) Closely sealed in the closed robot storage clean room, open the closed cover 61 that closes the sealed E box 60 and the closed robot opens and closes the opening 82 for the closed box for the closed box 9 and removes the substrate from the machine. Hand u ◦ The substrate 41 stored in the hermetically sealed box ⑽ is transported between the hermetically sealed box 60 and the substrate processing apparatus 102. The 80th designation is a front-loading type transfer cart in which the hermetically sealed box gold μ is mounted on the upper part. 55 and a sliding mechanism 78 with a close mechanism attached to the box case table ㈣ α and a substrate moving person out of the robot 1 1Q suitable for the closed-type robot storage of the present invention # Room 80. Fig. 9 shows the forward transfer type transport trolley 55 of the present invention shown in Fig. 8 with a link arm 56 and a lifting mechanism 57. Fig. 10 is a perspective view of the closed box 60 of the present invention. As shown in FIG. 10, the evacuation box 60 is an E-box containing a substrate formed by a box body 62 having an opening on one side and a sealing cover 61 that closes the opening of the g box body 62. The sealing cover 61 is opposite to the E box. , The aforementioned closed cover 61 is relatively

The IC case main body 62 is a freely attachable and detachable closed case. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The inside of the box body 62 is provided with a plurality of fins in the same manner as the open box 40 to form a base plate 41 that can accommodate a large number of fins. In addition, the hermetically sealed box 60 can hold the inside of the hermetically sealed box 60 in an airtight state with the lid 61 closed. Therefore, in an environment where the cleanliness is maintained, the sealing cover 61 is removed and the substrate 41 is stored in the box main body 62. After that, the sealing cover is installed as if it is the closed container 12 shown in Fig. 4 Without ffu, the closed box 60 can be maintained at a set cleanliness and the substrate 4 i can be stored. The front-loading type transfer trolley 55 shown in FIG. 9 is from the paper size shown in FIG. 4 and is applicable to China. Standard (CNS) A4 specification (210 X 297 mm) 26 541641 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (M) Sealed container integrated transport trolley 10 Remove the sealed container with surface and circuit breaker The transport trolley with the structure of 12 can form the closed E box 60 and place it on the link arm 56. * The link box 56 and the lifting mechanism ㈣ form a state where the closed box is moved to another position. The link arm 56 and the lifting mechanism 57 are the same as the link arm 13 and the lifting mechanism 14 of the hermetically-contained-container-type conveyance trolley 10. The front transfer type conveyance trolley 55 is capable of placing a closed box 60. , Or you can place an open box, by It is formed on the bottom surface of the open box 40 and the unevenness of the link arm 56 to determine its position. As shown in FIG. 8, the rear box box table 75 is provided with a closed box 60 and the like. A cassette mounting table 7 on a cassette mounting table 75 with an adhesion mechanism, a clamping mechanism 76 for fixing a closed cassette 60 installed on the cassette mounting table and an open cassette, and a cassette mounting table The E box table of the slide mechanism 78 for opening the box slide is opened. The closed box 60 is placed on the box mounting table to open the E box by the aforementioned mechanism, and the closed box 60 is fixed by the clamping mechanism 76. The slide mechanism 78 slides the E-box mounting table open cassette and closes the closed cassette 60 to the closed-type robot storage clean room 80. The closed-type robot storage clean room 80 is arranged on the adjacent substrate as shown in FIG. The position of the processing device 102 allows the substrate to be moved in and out of the robot 丨 10 and the sealed cover removal device 90 is provided in the interior, and FFU83 ° is provided to maintain the interior at a set cleanliness. It also has a robot to move the substrate in and out 110 Moving mechanism moving in the direction of γ in Fig. 2 (not shown) .Also, substrate moving in and out machine 27 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) ^ -------- ^ --------- ^ _ wi. 541641 A7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (25) The hand 110 is the same as the person who knows it. As shown in FIG. 8, a partition wall 84 having a cassette opening 82 and a substrate processing device opening through which a substrate 41 is carried in and out of a closed cassette 60 with a cassette mechanism 75 attached thereto is provided. To cover. The opening 82 of the cassette is opened and closed using an opening and closing plate 91. Specifically, when the opening and closing plate 91 closes and closes the cassette opening 82, the cassette opening 82 is closed. When the opening and closing plate 91 is moved to another position, the cassette opening 82 is opened. Since the opening-closing plate 91 is supported by the hermetically closing and releasing device 90 as described later, the cassette opening 82 can be opened and closed by switching off and closing the lid-releasing device 90. The opening / closing plate 91 may be operated by other devices. A mechanism for opening and closing the cassette opening 82 may be provided in the closed-type robot storage clean room 80. In the present specification, if the mechanism for opening and closing the cassette opening 82 is used, it is referred to as an opening / closing plate 91 without limitation. Such a closed-type robot storage clean room 80 has a partition wall and maintains the internal cleanliness by the FFU 83. Therefore, once the cassette opening is closed, the closed-type robot storage clean room 80 forms an independent clean room. Therefore, the inside of the closed-type robotic storage clean room 80 can maintain the set cleanliness regardless of the cleanliness of the outside. The hermetically closed cover removing device 90 provided in the hermetically sealed robot storage clean room 80 is provided with an opening and closing plate 91 to open and close the hermetically sealed robotic clean room 80 while supporting the hermetically sealed cover 61 of the hermetically sealed box 60. A device with an opening function for a cassette. In addition, as mentioned above, the aforementioned opening and closing plate 91 may not be supported on the closed paper. The standard of China National Standards (CNS) A4 (210 X 297 mm) is applicable. ------ · (Please read the precautions on the back before filling in this page) 28 541641 A7 V. Description of the invention (26) It is operated by other devices when it is set to 1 0. The description of the airtight cover release device 90 can be described later with reference to FIGS. 12 and 13. FIG. 11 shows the lock mechanism of the closed box 60 of FIG. 10, and FIG. 丨 丨 ^) shows the state of the lock mechanism when the seal cover 61 is mounted on the box body 62, and FIG. The state of the key mechanism when the box main body 62 has the closed lid 61 removed. In addition, each of the above drawings is a plan view with a part omitted (the keyhole 63 is not shown in the drawing), and a part of the bottom view and two side views are omitted. With reference to this Fig. 11, description will be given of the separation between the closed box 60 and the closed cover 61. One end of the connecting rod 65 is connected to the keyhole rotating plate 64 connected to the lock hole 63, and the other end of the connecting rod 65 is connected to the lock plate 66. Therefore, when the key is inserted into the keyhole 63 and sub-rotated, the keyhole rotating plate 64 rotates around the rotation center 64a, and its rotation is transmitted to the lock plate 66 provided with the arc portion 66b and the flat portion 66c through the connecting rod 65. The lock plate 66 rotates around the rotation center 66a. As a result, the positions of the arc portion 66b and the flat portion 66c are changed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, as shown in Figure 11 (a), the arc portion 66b is placed at the end of the closed cover 61, and the arc portion 66b protrudes from the end of the closed cover 61 and is inserted in The recessed part of β2 图 1 (not shown), so that the sealing cover 61 can be attached to the box body 62. As shown in FIG. 11 (b), when the flat portion 66c is placed on the end portion of the hermetic cover 61, the flat portion 66c does not protrude from the end portion of the cover, so the hermetic cover 61 can be removed from the cassette body μ. That is, when the sealing cover 61 is removed, the flat portion 66c is placed on the end of the sealing cover 61, and the key can be inserted into the lock hole 63 and rotated. Conversely, when installing 29 paper size national standard (CNS) A4 specifications (210 X 297 gf) 541641 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (27) Sealed cover 61 The temple may place the arc portion 66b at the end of the sealed cover 61, insert the remaining spoon into the keyhole 63, and rotate it. FIG. 12 is an explanatory diagram of a sequence of closing and unsealing operations of the closed cassette 60 with the close mechanism box cassette 75 shown in FIG. 8, and FIG. 13 is an important section P of FIG. 12. Illustration. The procedure of removing the sealing cover 61 of the sealing E box 60 by sealing the removal device 90 with sealing is described with reference to FIGS. 12 and 13 of the it knife. ①As shown in FIG. 12 (a) and FIG. 13 (a), the sealing cover 61 of the sealed box 60 faces the opening 82 for the box of the closed type robot housing the clean room 80, and is placed on the attachment When there is an adhesive mechanism cassette table 75, the closed cassette 60 can be fixed by the clamping mechanism 76 (FIG. 8). 0 As shown in Figs. 12 (b) and 13 (b), the closed box 60 can be closed by a sliding mechanism 78 (Fig. 8) provided with a sealing mechanism 75 The box main body 62 slides to a position where the partition wall 84 (FIG. 8) of the clean room 80 can be sealedly sealed. At this time, the closing mechanism 61 and the opening / closing plate 91 are sucked by the suction mechanism 95 which seals the release device 90. In addition, the lock hole 63 (FIG. 11) of the seal cover 61 is in a state where the lock mechanism 94 of the seal cover release device 90 is inserted, so the lock mechanism 94 can be rotated to remove the seal cover 61 from the cassette body 62. . ③ As shown in FIG. 12 (c) and FIG. 13 (c), the X-direction sliding mechanism 92 of the release cover 90 is sealed to move the seal cover 61 in the X direction in the state of the opening-closing plate 91. The sealing cover 61 is removed from the cassette body 62. In addition, since the size of the sealing lid 61 is smaller than the size of the cassette opening 82, the sealing lid 61 can pass through the cassette opening 82. -30-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) II ^ I Packing -------- Order --------- ^ wi (Please read first Note on the back, please fill out this page again) 541641 Printed by A7, Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, 5. A description of the invention (28) At this time, the closed opening 82 of the box for the closed-type robot to store the clean room 80 is closed due to the sealing 90 is detached from the cassette opening 82 so that the cassette opening 82 is not occluded. However, since the cassette body 62 is in a tight state, the closed robotic storage clean room 80 can be maintained at a set cleanliness. In other words, since the inside of the closed-type robot housing the clean room 80 and the closed box 60 can be maintained at the set cleanliness as described above, the substrate 41 is not affected by the external ambient gas. ④ As shown in Figures 12 (d) and 13 (d), when the opening / closing plate 91 which is closed and covered with the release device 90 is moved downward by the vertical sliding mechanism 93, the robot 11 is moved in and out by the substrate. 〇 and a state in which the substrate 41 can be carried in and out is formed. FIG. 14 shows an example of mounting the O-ring 85. As shown in the figure, if a bifurcated sealing member such as an O-ring is installed on the partition wall 84, the gap generated between the partition wall 84 and the opening and closing plate 91 and the gap generated between the partition wall 84 and the cassette body 62 can be further increased. Intake density. In addition, sealing members such as O-rings may be mounted on the opening and closing plate 91 and the box body 62, and may also be mounted on both the partition wall 84 and the opening and closing plate 91 and the box body 62. FIG. 15 is an explanatory diagram of the operation sequence of the equipment of the forward transfer type transporting trolley 55 and the cassette mechanism 75 with a close mechanism. Referring to this paragraph, in the aforementioned equipment, the transfer type transporting trolley 55 is sealed from the Kefang After the cassette 60 is transferred to the E-box table 75 with the adhesion mechanism, the substrate is moved out of the robot ⑴ to form a sequence in which the substrate can be removed. ①As shown in Fig. 15 (a), direct the front-loading type transfer trolley 55 on which the closed box 60 is placed to face 75 sets of Kun box stand with a close mechanism as a gap. This paper is in accordance with the Chinese National Standard (CNS) ) A4 ^ (210 x 297 ^ *)

7 ^ -------- ^ --------- (Please read the notes on the back before filling out this page) 31 541641 V. Description of the invention (the direction of 29 is shifted to 5 ;. Arm: === ': The transfer type transfer station is repeatedly called Brother 9)), and the former transfers the Myra Box 6G to the box with the compact machine charm 75 = two mouths = at the time "machine charm What is the clamping mechanism of the cassette base 75? 6 (figure 8) and Ri will fix the closed box benefit 60 to the box table π with a close mechanism. As shown in the arm 56 = 5Γ), the link arm 56 and the lifting mechanism 57 (FIG. 9) of the forward transfer type transfer cart 55 are returned to their original positions. ⑤As shown in FIG. 15W, once the compact light box 60 is placed on the compact box box 75, the slide box 78 (FIG. 8) is used to make the E box body 62 of the box 60 as described above. Slide to a position where it is in close contact with the wall of the sealed clean room 80. Respectively, in the order shown in FIG. 12 and FIG. 13, the sealing cover 61 of the ㈣g box 取 is removed, and the substrate loading / unloading robot 110 is set in a removable state. Furthermore, the ¥ square transfer type transport trolley 55 is moved from the front of the cassette table 75 with the adhesion mechanism to another position. Also, the square transfer type transfer trolley 55 can be processed to all the substrates 41 and stopped before the E box stage 75 with a close mechanism is attached. However, because it will prevent the passage of other forward transfer type transfer trolleys 55,- Generally move to other positions. After the processing of all the substrates is completed, the closed cassette 60 containing the substrate 41 is transferred from the cassette stand 75 with the adhesion mechanism to the forward transfer type transfer cart 55 and transferred to another position. At this time, the operation is the same as the transfer type from the front ^ · -loading -------- Order --------- HPL C Please read the precautions on the back before filling this page) Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperative Cooperative Paper Standards Applicable to Zhongguanjia Standard (CNS) A4 Specification X X 297 Public Copy 32 541641 A7 V. Description of the Invention (30) The car 55 transfers the closed E warehouse 60 to the attached seal mechanism The E box stage is the opposite of 75 o'clock. (Jin 2) The following. The contained shell target example 2 is an embodiment of a box-carrying method and a box-and-carrying system, corresponding to the scope of patent application when the patent is being requested. 3, 4, 5, 7, 8, 10, 13, 15, 16, 17, 19, 20, and 21 inventions. It is the lowered transfer type transporting trolley 50 shown in the second figure of the enclosed centrifugal box shown in FIG. 10 and moved to the trolley storage type g box stage 7 times inside. The lifting mechanism of 50 will transfer the sealed E box 60 to the trolley storage dragon box table 70, seal the sealed box 60 in a sealed robot storage clean room 80, and then open the closed sealed box. At the beginning of 60, the closed cover 61 and the closed-type robot store the cassette opening 82 in the clean room 80, and the substrate is moved in and out of the robot 11. The substrate stored in the closed box is processed in the closed box 60 and the substrate. Transported between the devices 102. I 印 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 16 shows a 5G drop-down transfer type cart suitable for mounting the closed box 60 on the upper part, forming a drop-down transfer type 50 The inner space is a closed-type robot storage clean room 80, such as a trolley storage type g box table 70, and a substrate moving in and out of the robot Π0. FIG. 18 shows a state in which the drop-down transfer type carrier 50 with the closed cassette 60 mounted thereon is moved in a space formed in the tray-receiving type cassette box 70 of the present invention. The downward transfer type transfer trolley 50 has a lifting mechanism 51 ′ as shown in FIGS. 16 and π, so that the closed box 60 can be placed on the lifting mechanism 51 33 541641

The position of the open box 40 and the link arm 56 are determined by the formation of the knife. In addition to the closed box 60, the lower & transfer type trolley 50 can also be placed open 40. X does not have a link arm as in the hermetically-contained container-integrated transfer cart 10 of the conventional technology. As shown in FIG. 16 and FIG. 18, the mouthpiece storage type 1 box table 70 is a box box table that can be moved down and transported to the inner workshop by carrying down the transport box 5Q carrying the box and closed E box 60. A g-box mounting table 72 capable of placing the closed box 60 and the like on an upper portion of the trolley storage type E-box table 70, a clamping mechanism 71 capable of fixing the closed box 60 provided on the box mounting table 72, and a A slide mechanism 73 that slides the cassette mounting table 72. Therefore, after the closed cassette 60 is placed on the cassette mounting table 72 and the closed cassette 60 is fixed by the clamping mechanism 72, the cassette mounting table 72 is slid by the slide mechanism 73, so that the closed cassette 60 can be sealed. Focusing on the closed-type robot to store the clean room at 80 °. As shown in Figure 18, the width of the lifting mechanism 51 is narrower than the width of the closed box 60, so it does not affect the box of the tray-type storage box 70. The mounting table 72 is movable in a space formed in the trolley storage type cassette table 70. Therefore, once the lifting mechanism of the trolley storage type cassette box table 70 is lowered, the closed cassette 60 can be transferred to the cassette mounting table 72 of the trolley storage type cassette box 70. As the closed-type manipulator in Figure 16 stores the clean room 8 0, and it is hermetically closed -34-This paper size applies to the national standard (CNS) A4 (210 x 297 public love) of towels "

• ϋ H ϋ ------_-Install (Please read the notes on the back before filling this page) ---- Order --------- IP- Consumer Cooperatives of Intellectual Property Bureau, Ministry of Economic Affairs Printed 541641

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

The removal device 90 is the same as that in the embodiment i, and therefore description thereof is omitted. The operation of closing and closing the closed box 60 of the closed box box 70 mounted on the trolley storage type box table 70 is also the same as that of the first embodiment, and therefore description thereof is omitted. FIG. 19 is an explanatory diagram of the operation sequence of the equipment using the downward transfer type transfer trolley 50 and the trolley storage type cassette table 70. With reference to this FIG. 19, in the foregoing preparation, the lower transfer type transfer trolley 50 will After the closed cassette 60 is transferred to the trolley storage type E-box table 70, the substrate carrying-in / out robot 11 is in the order in which the substrate can be carried out. ① As shown in Fig. 19 (a), move the drop-down transfer type carrying port cart 50 on which the closed box 60 is placed in the direction of the tray-carrying type box-box Tawagawa trolley. ② As shown in Fig. 19 (b), the downward transfer type transporting trolley 50 is moved to the front of the trolley storage-type cassette box table 70. Mouth ③ As shown in Fig. 19 (c), with the closed box 60 mounted, the downward transfer type transfer cart 50 is moved to the space formed in the cart storage type £ box 70. At this time, the airtight container of the airtight box 60 was placed in the airtight robot storage room 8 direction. Thereafter, the lowering mechanism 51 (FIG. Π) of the descending transfer type transporting trolley M is lowered, and the hermetically sealed box is loaded on the trolley storing type E box table 70 'and the clamping mechanism 71 (FIG. 16) Instead, the closed box 60 is fixed. ④ As shown in Fig. 19 (i), the drop-down type transporting trolley 50 is moved from the trolley storage type E box stage 70 to another position. In addition, the descending transfer type transport trolley 50 may be stopped at the end of the processing of all the substrates 41 in the closed box 60, and may be formed in the trolley storage box. The paper size is applicable to Chinese standards. ------ Order --------- ml --- (Please read the notes on the back before filling in this page) 35 541641 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 V. Invention Description (In the space of 33 mouth 70 ', the other closed box 60 is generally moved to another location. ⑤ As shown in FIG. 15 (e), once the closed box 60 is placed on the trolley storage type box table At 70 o'clock, the box body 62 of the closed E bin 60 is slid to the position close to the wall of the closed robot storage clean room 80 by the sliding mechanism 73 ("picture") as described above. 12 and 13 in the order shown in FIG. 13 and FIG. 13 in which the closed cover 61 is removed and the substrate 61 is moved into and out of the robot 丨 丨 is set to a state in which it can be carried out. (Example 3) Examples described below 2 As shown in FIG. 20 to be described later, there is an embodiment of a cassette transport method and a cassette transport system, It is the invention corresponding to item 4, 6, 16, and 18 of the patent application scope at the time of patent application. The system (non-closed box 60) will move the drop-down transfer type trolley 50 with the open box 40 to the trolley storage. Inside the g-box table 70, the open cassette 40 is transferred to the trolley-receiving cassette box table 70 by the lifting mechanism 51 of the aforementioned down-shifting-type transfer trolley 50, and is installed in the open-type robot storage clean room The substrate of 30 is moved in and out of the robot 11 and can be transported between the open box 4o and the substrate processing device 2 and the substrate 4 that has been stored in the open box 4 4 is shown in FIG. 20. 〇 The lower transfer type transport trolley 50 mounted on the upper part is formed so that the lower transfer type transport trolley 50 can be moved to the space inside the trolley storage cassette box stage 70, and the substrate loading / unloading robot 110 and other components are formed. Open-type robotic storage clean room 3 0. Open-type robotic storage clean room 30, downward transfer type transporting trolley 50 is the same as in Examples 1 and 2. IJ-M ------ equipment --- ----- Order --------- (Please read the notes on the back before filling this page) 36 5 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

541641, invention description (meaning) In addition, the first embodiment of the female mouth does not need to open the box 40 in close contact with the open-type robot to store the clean room 30. Therefore, the trolley storage type box box table 70 may not have the open box box 407.骨 动 滑 机构 73。 Bone movement sliding mechanism 73. However, when the position of the open cassette 40 is made to slide more or less, the slide plate mechanism 73 may be provided when the substrate moving in and out robot 11 is easy to move in and out of the substrate 41. θ In this way, the open cassette 40 can also be transported using the downward transfer type transport trolley 50. In this case, it is possible to maintain the entire area of the equipment installation clean room 100 at a set cleanliness level, and the S box is transferred to the £ box table from the transfer trolley by the lifting mechanism 51 without using a link wall. 41 will increase in size and the weight of the substrate 41 will increase, and it will not cause the center of gravity of the transfer trolley to shift as in the conventional technique, which will cause the transfer trolley to be unstable. Fig. 21 is an explanatory diagram of the operation sequence of the equipment for transporting an open £ 40 using the downward transfer type transporting trolley 50 and the trolley storage type cassette box 70 of the present invention. 'Using this figure 21 in the aforementioned equipment, After the open box 40 is transferred from the drop-down transfer type transport cart 50 to the trolley-receiving type g-box table 70, the substrate transfer-in / out robot 110 forms a sequence in which the substrate can be transferred out. '① As shown in Fig. 21 (a), the 3L transport sigma cart 50 with the open and more box mounted thereon is moved toward the trolley storage type box box as a compartment. ② The trolley is moved. As shown in Fig. ，, the drop-down transfer type transfer cart 5 ◦ moves to the front of the cart storage type cassette table 70. Mouth ③ As shown in FIG. 21 (cO ', the paper size of the drop-down transfer type transfer cart is thin t ( CNS) A4 iF (7lOX 297)

37 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

541641 A7 [---------- B7__ 5. Description of the invention (35) The state of the cassette box 40 is moved to the space formed in the trolley storage type cassette box table 70. After that, the lifting mechanism 51 (figure ^) of the descending transfer type conveyance trolley 50 was placed under the rain, and the open cassette 40 was placed on the trolley storage type cassette stage 70, and the clamping mechanism 71 (figure 20) ) And fix the open box 40. (4) As shown in FIG. 21 (d), the drop-down type transporting trolley 50 is moved from the trolley storage type cassette table 70 to another position. In addition, the descending transfer type transport cart 50 may be stopped in the space formed in the cart storage type cassette table 70 until the completion of the processing of all the substrates 41 containing the open cassettes 40, but it is generally moved to another position. The other open cassette 40 is carried. (Embodiment 4) Embodiment 4 described below with reference to Fig. 22 corresponds to the invention in the scope of patent application and items at the time of patent application. FIG. 22 is a diagram showing a trolley storage type cassette box 70 having a charging mechanism 74 and a downward transfer type transporting trolley 50 that can be charged from the charging mechanism 74. As shown in FIG. 22, the trolley storage type cassette table 70 has a charging mechanism 74, and the drop-down transfer type trolley 50 has a charging port 52 at a position corresponding to the charging mechanism 74. In this case, for example, if a plug is provided in the charging mechanism 74 and a socket is provided in the charging port 52, the plug can be inserted into the socket and charged. Therefore, the downward transfer type transfer trolley 50 can transfer the open box 40 or the closed box and 60 to the trolley storage box box 70, and can be moved to the space formed in the trolley storage box box 70. On the occasion of charging. In addition, even if the open box 40 or the closed box 60 is not transported, as long as it is moved to the space formed by the trolley storage type box box table 70, the paper size can be filled with the Chinese national standard (CNS) A4 specification (210 297). Mm)

---- 7 ----- φ, Μ ------ C Please read the note on the back first? Please fill in this page again) Order Awl · 38 541641 A7 V. Description of the invention (36) The positions of the charging mechanism 74 and the charging port 52 are not limited to the positions shown in Fig. 22, but may not be in other positions. Also, The form of the rechargeable battery is also not determined. (Embodiment 5) Embodiment 5 described below with reference to Fig. 23 corresponds to the invention in item 12 of the scope of patent application at the time of patent application. Fig. 23 shows from When the descending transfer type transport trolley 50 of the present invention transfers an open S gold 40 or a closed g box 60 to a trolley storage type Kuang box stage 70, the other descending transfer type transport trolleys 50 move in the same passage As shown in Fig. 23 (a), "When the open E box 40 or closed box 60 is transferred to the trolley storage dark box table 70 from the downward transfer type transfer trolley, it is transferred due to the downward transfer." The 5Qa-type transfer trolley is stored in the space formed in the trolley storage box box 70, so that the path is not blocked by the downward transfer-type transfer trolley 50a during the transfer. Trolley _ also formed by the trolley storage type E box table 70 The space is to be avoided (waiting for avoidance), so as shown in Fig. ⑻, the descending transfer type transporting trolley 50c which can move from the opposite side of the passageway can move on the passageway. Therefore, even the descending transfer type transporting trolley 50c can The passable degree is also the same as that of the down-transfer type transfer trolley that can move most of the same-paths. As shown in FIG. 23 (a), two sets of down-transfer type transfer trolleys can also be set to read the path width. In this case, not only will I not be shifted due to the downward movement during transfer ^ -1 -1 ---- 1T --------- (Please read the precautions on the back before filling this page) Paper size applies to China National Standard (CNS) A4 (210 X 297 public love) 39 541641 A7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, transporting the trolley 50a and blocking the passageway, and the downward transfer type transfer trolley 50b during the movement of the passageway and the downward transfer type transfer trolley 5GC moving from the opposite side of the passageway At the same time moving on the path, the transfer rate can be improved. [Effects of the invention] If the Wonson substrate is stored in a closed £ 60 box, the cleanliness of the clean room 100 can be set in the equipment, and it can be received and closed in the closed box 60 by the transport trolley without FFU. The substrate 41 is transferred to the equipment installation clean room. In addition, since the closed-type robot storage clean room 80 has a partition wall and an FFU for maintaining the inside thereof at a set cleanliness, an independent clean room is maintained to maintain the set cleanliness. If the closed box 60 is tightly sealed in the closed type robot to store the clean room 80, the drinking cap 61 is removed, and the closed box opening 82 for the closed box to store the clean room is opened, regardless of the installation of the clean room 100. Regardless of the degree of cleanliness, the substrate stored in the closed box 60 can be carried into the closed-type robot storage clean room 80. In this way, the cleanliness of the entire area in which the equipment is installed in the clean room 100 can be reduced, so the equipment cost of the equipment in the clean room 100 can be reduced. It also reduces operating costs. And because it is not necessary to have FFU for the transporting trolley, its efficiency can reduce equipment costs and operating costs. That is, the conventional technology requires the cleanliness equipment in the whole field to be moved so that the cleanliness of the entire field reaches a predetermined set cleanliness of level 10 to 100. However, the present invention can reduce the cleanliness level of the entire field from 10 to 100, or from the level. 100 reduced to 1000. 40 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 丨 ^ ^ · -Packing -------- Order --------- AWI C Please read the back Note: Note: Please fill in this page again.) 541641 A7 B7 V. Description of the invention (38 △ Also, this effect can be achieved by using the front-loading type transfer port car 55 shown in Example 1 and the attachment inspection box. It can also be obtained by using π, which can also be obtained by using the drop-down transfer type transport trolley 50 and the trolley storage type E box a, which is not shown in Example 2. Dishkou (2) —a cassette transfer system, if it transports the trolley The 50 series of drop-down transfer type transport carts 5G with cassettes mounted on the dead parts, and the E-box type 7G system Y can store the drop-load transfer type transfer carts 50 loaded with the above-mentioned g gold in the hidden box set. If the trolley storage type box box 70 is used in the interior space, the lower transfer type transporting trolley 50 is moved to the inside of the trolley storage type g box stage 70, and the lifting mechanism for transporting the trolley can be used without a link arm. It is possible to transfer the E-boxes placed on the 5G of the drop-down type transfer trolley to the trolley-receiving type E-box stage 70. ^ This makes it unnecessary to know the technically necessary transfer stage Link arm of the car: The structure of the transporting trolley is simple without the need for a related motor. Therefore, the weight can be reduced and the size can be reduced. At the same time, its efficiency can reduce the equipment cost of the transporting trolley. The cassette can be transferred from the transfer 1 to the E-box table, so even if the substrate is enlarged and the substrate is enlarged, the center of gravity of the transfer cart will not be shifted when the box is transferred as usual, so that the transfer will be carried. The trolley becomes unstable. Also, since the weight of the substrate 41 is increased even if the substrate is enlarged, the center of gravity of the transport trolley may not be shifted when the g box is transferred, so that it is not necessary to achieve stabilization. Increase the weight of the transport trolley 50. Therefore, even if the floor has a low weight resistance equipment, the clean trolley 100 can be used with the transport trolley 50. This paper size applies the Chinese National Standard (CNS) A4 specification (21〇χ 297). Mm 541641

The drop-down transfer type transport trolley 50 that does not collect the moon is miniaturized, so it is possible to reduce the width of the passage of the transport trolley, which is known to be small, and it is effective to prepare the installation area of the clean room 100. In this way, even when the substrate 41 is enlarged, the descending color-carrying type conveyance trolley 50 of the present invention can pass through a conventional path width as described in the following paragraph. , ⑶ 魟 ① Close the sealed E box 60 to the closed robot and close it. After cleaning the chamber 80, remove the lid 61 and open the closed robot. The substrate ^ stored in the ㈣g box 6 () is moved into A, ② a drop-down transfer truck with the H-box mounted on the upper part, and ③ a drop-down transfer-type transfer truck with the aforementioned g-box can be moved inside If the trolley storage type cassette box table 70 is installed in the space, the equipment can be installed in combination with the reduction of the cleanliness of the entire area of the clean room, and (5) will be described later. (A) The size of the substrate can be learned. In order to reduce the equipment cost for transporting trolleys, (b) In the case where the substrate 41 is large, it can be passed with a known path width. Therefore, it is not necessary to install additional equipment to set up a clean room. 100 Intellectual Property Bureau employees Printed by a consumer cooperative (" Read the precautions on the back before filling in this page) (4) If the trolley storage box 70 has a charging mechanism 74 for the transfer and transfer type trolley 50, the transfer and transfer type 50 Transfer the trolley 50 to the trolley storage box When the inner table 70 can be decreased transfer type charge transport carriage 50, it is unnecessary to set the equipment to the clean room is provided in advance a space 1〇〇 conveying carriage during charging. As a result, the installation area of the clean room 100 can be effectively used. In addition, even if the substrate 41 is enlarged, the space required by the conventionally-received transport vehicle in advance δ can be used to increase the size of the substrate 41. -42-This paper standard applies the Chinese National Standard (CNS) A4 size (210 X 297 mm) ------ 541641

The space printed by employees ’cooperatives in the Intellectual Property Bureau of the Ministry of Economic Affairs does not require additional equipment for the clean room 100. (5) The drop-down transfer type transportation trolley 50 moves to the inside of the trolley storage type box table 70 and stops or moves to the inside to be avoided. Other drop-down transfer-type transportation trolleys 50 can pass through the passage, so they will not pass. The path is blocked due to the stop or waiting avoidance of the down-loading type transfer trolley 50, which can improve the efficiency of transportation. At the same time, it can reduce the path width compared to conventional techniques. In addition, the path width of the conventional three units shown in FIG. 7 (b) can be changed to the path width of the two units using the present invention shown in FIG. 23 (c). Therefore, even if the substrate 41 is enlarged, The clean room 100 can be passed with a known passage width without the need for additional equipment. [Brief description of the drawings] FIG. 1 is a drawing showing the invention of the application best. Fig. 2 is a layout diagram of a substrate processing step device as an example of a device for the substrate processing step. FIG. 3 shows an open-type robot storage clean room 3 of the conventional technology, which is provided with a closed container-integrated transfer cart 10 of a conventional technology, and an open-type magazine 40 having a cassette 20 and a substrate moved in and out of the robot 11. 〇. Fig. 4 shows a hermetically-contained container-integrated conveying trolley 10 integrally formed with a hermetically-sealed container 12 having a fan-shaped filter unit (ffu) 11 and a circuit breaker 15 and a conveying trolley 16 having a link arm 13 and a lifting mechanism 14. FIG. 5 is a perspective view of the open box 40 and the board in / out robot ι10 when the substrate 41 is moved in and out from the open box 40 and the substrate 41 is moved in and out by the robot ho. (6) Figures (a) to (e) are the sealed container-integrated integrated transport trolleys 10 and substrate moving in and out robots 11 of the conventional technology shown in Figure 3. The paper dimensions are applicable to Chinese national standards ( CNS) A4 specifications (210 X 297 mm) il ---- Γ ----- · -installation -------- order · C Please read the phonetic on the back first? Please fill out this page again for matters} 541641 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention () A sequence diagram. Figures 7 (a) to (b) show that the closed container-integrated conveyance trolley 10 transferring the open box 40 to the box stand 2o from the conventional closed container-integrated conveyance cart 10 is stopped while the passage is stopped. An explanatory diagram of a moving method when the other closed container-integrated conveyance cart 10 moves on the same path. FIG. 8 shows a front transfer type transport trolley 55 with a closed cassette 60 mounted on the upper part, a cassette mechanism with a close mechanism with a sliding mechanism and a slide mechanism, and a substrate loading / unloading robot 110. The closed robot of the invention houses the clean room 80. Fig. 9 shows a forward transfer type transfer cart 55 according to the present invention shown in Fig. 8 including a link arm 56 and a lifting mechanism 57. Fig. 10 is a perspective view of the closed box 60 of the present invention. FIG. 11 shows the lock mechanism of the closed cassette 60 in FIG. 10, FIG. 11 (a) shows the state of the lock mechanism when the sealing cover 61 is attached to the box body 62, and FIG. 11 (b) shows The state of the key mechanism when the sealed cover 61 is removed from the E box body 62. FIGS. 12 (a) to (d) are explanatory diagrams of the sequence of the closing and unsealing operations of the closed cassette 60 with the adhesion mechanism cassette base 75 shown in FIG. 13 (a) to (d) are cross-sectional views of important parts of FIG. 12. FIG. 14 shows an example of mounting the O-ring 85. Figs. 15 (a) to (e) are explanatory diagrams of the operation sequence of the equipment of the front transfer type transporting trolley 55 and the closet mechanism cassette table 75. Figs. FIG. 16 shows a downward transfer type transport trolley 50 which is suitable for mounting the closed box 60 on the upper part and forms a transfer type transfer trolley which can be lowered. The paper dimensions are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 丨 ^ Ml— IIII. (Please read the notes on the back before filling out this page.)-44 541641 A7

! I I I

Hold

541641 A7 B7 V. Description of the invention (43 [Comparison of component numbers] 10 Closed container integrated transport trolley 10a will be opened. £ 40 The closed container integrated transport trolley 10b is being moved in the closed container integrated transport in the passage. Closed container two-body transporting trolley that moves from the opposite side of the trolley path 12 Closed container 13 Link arm 14 Lifting mechanism 15 Circuit breaker 16 Transporting trolley 20 Box box 21 Clamping mechanism

30 Open-type robot storage clean room 31 FFU 32 Opening for substrate processing device 4 0 Open centimeter box 41 Substrate 50 Drop-down transfer type transport trolley 50a Move the closed box 60 down during transfer 50b to the path order 7 drop-down transfer type trolleys moving from the opposite side of the 7-down transfer type transfer trolley 52 charging port 55 forward transfer type transfer cart 5 6 link arm 57 lifting mechanism 6 ○ closed box 61 closed cover paper rule i.G Clear Group (GNS) A4 ^ 2_m) _ 46 Order 541641 A7 B7 V. Description of the invention (44) 62 Box body 63 Keyhole (Please read the precautions on the back before filling this page) 64 Keyhole rotation Plate 6 5 Connecting rod 66 Lock plate 6 6 a Rotation center 66b Arc portion 66c Flat portion 70 Trolley-type cassette box table 71 Clamping mechanism 72 E-box mounting table 73 Slide mechanism 74 Charging mechanism 75 Casing box with close mechanism Table 76 Clamping mechanism 77 E-box mounting table 78 Slide mechanism 80 Closed robot storage clean room 81 Opening for substrate processing device 82 Opening for cassette

83 FFU 84 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 85 0-ring 90 Closed cover and release device 91 Opening and closing plate 92 X-direction sliding mechanism 93 Up-down sliding mechanism 94 Locking mechanism 95 Suction mechanism -47-Paper size Applicable to China National Standard (CNS) A4 specification (210 x 297 mm) 541641 A7 _B7 V. Description of the invention (45) 100 Equipment set clean room 101 £ box storage place 102 substrate processing device 110 substrate moving in and out of robot 111 base mechanism 112 Lifting mechanism 113 Arm mechanism 113a 1st arm 113b 2nd arm 114 Manual components (please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 48 This paper size applies to Chinese national standards (CNS ) A4 size (210 x 297 mm)

Claims (1)

541641 A8 B8 C8 D8 6. Scope of patent application (please read the precautions on the back before filling in this page) 1. A method for transporting cassettes, which is to place the cassette containing the substrate on a transport trolley and transport it to the adjacent substrate. After the robot carrying in and out of the robot stores the cassette case in the clean room, the substrate carrying in and out robot moves in and out the substrate between the cassette and the substrate processing device, and has: a cassette body with an opening on one side and a closed cassette body A step of closing the hermetically closed lid by storing the substrate in a hermetically openable and closable hermetically closed lid relative to the cassette body; a step of mounting the hermetically sealed cassette on a transport trolley; The step of transferring the hermetically sealed box mounted on the transfer trolley to the cassette table with respect to the hermetically sealed opening of the cassette for storing the clean room in the hermetic-type robot; A step for the robot to store the clean room; a step for opening the closed cover while opening the opening and closing plate for closing the opening for the cassette; a substrate The step of loading and unloading the substrate between the sealed box and the substrate processing device by the input / output robot; closing the opening and closing plate while closing the sealing cover after the loading and unloading of the substrate is completed; and transferring the sealed box from the cassette table Steps to transfer the trolley. 2. — A cassette transfer method is to mount the cassette containing the substrate on a transfer trolley and transfer it to the cassette stage adjacent to the robot in the clean room after the robot in which the substrate loading / unloading robot is installed. The substrate is carried in and out between the cassette and the substrate processing device. It has: -49- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 541641 A8 B8 C8 D8 VI. Patent application scope (please read the back first Please fill in this page again.) It is formed by a sealed box body with an opening on one side and an opening of the sealed box body. The aforementioned sealed cover stores the substrate in a sealed box which can be opened and closed with respect to the box body. The step of closing the hermetic cover; the step of mounting the hermetic box on the front transfer type transport cart; and placing the hermetic box on the forward transfer type transport cart on the hermetic manipulator opposite to the hermetic cover. The step of storing the cassette in the clean room with an opening and transferring it to the cassette table with a close mechanism; the closed cassette is tightly closed in the closed manipulator A step of receiving a clean room; a step of opening the closed cover while opening the opening and closing plate for closing the opening for the box; a step of moving a substrate in and out of the substrate between the closed box and the substrate processing device; and A step of closing the opening and closing plate while closing the hermetically closed cover after the loading and unloading of the substrate; and a step of transferring the hermetically sealed box from a cassette box table with an adhesion mechanism to a front-loading type transfer trolley. 3. — A cassette transfer method is to mount a cassette containing a substrate on a transfer trolley and transport it to a cassette adjacent to a robot in a clean room where a robot in which a substrate loading / unloading robot is installed is placed. The substrate is carried in and out between the box and the substrate processing device, and is formed by a hermetically sealed cover having an opening on one side and an opening of the hermetically sealed box body. The hermetically sealed cover accommodates the substrate freely with respect to the cassette body. Steps to take off the closed box and close the aforementioned closed cover; -50- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 541641 As Β8 C8 D8 6. The scope of patent application will be equipped with the aforementioned closed box Steps on the drop-down transfer type trolley; (Please read the precautions on the back before filling this page) Set the closed box on the drop-down type transfer trolley to the closed-type machine relative to the closed cover. Steps for accommodating the cassettes in the clean room by hand and transferring the cassettes to the trolley-receiving cassette cassette table; the aforementioned sealed cassettes are closely adhered to the aforementioned sealed machinery A step of storing a clean room; a step of opening the closed cover while opening the opening and closing plate for closing the opening for the cassette; a step of transferring substrates in and out of the substrate between the sealed cassette and the substrate processing device; and Steps of closing the opening and closing plate while closing the hermetically closed cover after the loading and unloading of the substrate; and steps of transferring the hermetically sealed cassette from the trolley storage type cassette box table to the downward transfer type transfer trolley. 4. A cassette transfer method is to mount a cassette containing a substrate on a transfer trolley and transfer it to a cassette adjacent to a robot in a clean room after a robot in which a substrate loading / unloading robot is installed. The substrate is carried in and out between the box and the substrate processing apparatus, and includes the steps of storing the substrate in the cassette; the step of mounting the cassette on a downward transfer type transport trolley; and the aforementioned lower transfer type transport trolley equipped with the cassette is moved to Steps of the trolley storage type cassette table; Steps of transferring the aforementioned cassettes mounted on the aforementioned down-loading type transfer trolley to the trolley storage type cassette platform; -51-This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm) 541641 A8 B8 C8 D8 6. The patent application process of the turtle enclosure substrate moving in and out robot to move the substrate in and out between the aforementioned E box and the substrate processing device; and (Please read the precautions on the back before filling in (This page) Steps for transferring the above-mentioned cassettes from the trolley storage type cassette box table to the downward transfer type transfer trolley. 5. — A cassette transfer method is to mount the cassette containing the substrate on a transfer trolley and transfer it to the E-box stage in the clean room adjacent to the robot arm that is equipped with the substrate loading and unloading robot. The substrate is carried in and out between the cassette and the substrate processing device, and is formed by a hermetically sealed cover having an opening on one side and an opening of the hermetically sealed cassette body, and the aforementioned sealed cover can freely store the substrate with respect to the cassette body. Steps of closing the hermetic cover with the hermetically closed cassette removed; steps of mounting the hermetically sealed cassette on a downward transfer type transporting trolley; moving the aforementioned downwardly transferring type transporting trolley equipped with the hermetically sealed cassette to a trolley underpayment type Steps inside the cassette table; Transfer the hermetically-sealed cassettes mounted on the drop-down transfer type trolley to the cassette-type openings of the cassettes provided in the closed-type robot storage clean room with respect to the hermetically closed lids and transferred to the trolley-receiving type Steps of the cassette table; Steps of sealing the sealed box in the sealed robot clean room; Opening and closing the opening for the cassette The steps of opening and closing the cover at the same time while opening and closing the board; the step of moving the substrate in and out of the substrate moving in and out robot between the closed box and the substrate processing device; closing the closing cover and closing the front cover at the same time after the substrate is moved in and out -This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 541641 A8 B8 C8 D8 6. The scope of the patent application describes the steps of opening and closing the plate; (Please read the precautions on the back before filling this page). 6.-A cassette transfer method is to mount a cassette containing a substrate on a transfer trolley and transfer it to an E-box stage in a clean room adjacent to a robot that is provided with a substrate loading / unloading robot. The substrate is carried in and out between the cassette and the substrate processing device, and includes: a step of storing the substrate in the open cassette; a step of mounting the open cassette on a downward transfer type transfer trolley; and a lowering movement of the aforementioned open cassette Steps for moving the carrier-type transport trolley to the inside of the undercarriage-type cassette box of the trolley 4; Steps for transferring the aforementioned open cassettes mounted on the aforementioned down-shifting-type transport trolley to the trolley-receiving cassette box stage; substrate moving in and out of the robot arm A step of loading and unloading a substrate between the open box and the substrate processing device; and a step of transferring the open box from a trolley storage type cassette box to a downward transfer type transfer trolley. 7. If the box transfer method of item 1, 2, 3 or 5 of the scope of patent application is applied, in which the closed box is opened at the same time as the opening and closing plate which closes the opening provided for the box in the closed type robot to store the clean room The process of closing the lid is performed simultaneously by closing the lid and removing the device. 8. If the method of box transfer of item 1, 2, 3, or 5 of the scope of patent application, wherein the closing cover of the closed box is closed, the process of closing the opening and closing plate is performed simultaneously by closing the cover and the release device. . -53- This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 541641 A8 B8 C8 D8 6. Scope of patent application (please read the precautions on the back before filling this page) 9. The method for conveying a cassette according to item 1 or 2, wherein the step of sealing the sealed cassette in a sealed-type robot to store the clean room is performed by a clamping mechanism provided with a cassette with a sealing mechanism while fixing, and sliding The mechanism presses the closed box to the step of storing the clean room by the closed manipulator. 10. For the method of transporting the boxes in the scope of patent application No. 1, 3 or 5, the step of sealing the closed box in a closed robot to store the clean room is set on a trolley: The clamping mechanism is used for fixing, and the sliding box is used to press the closed box to the closed robot to store the clean room. 11. For the method of transporting boxes and cases in the scope of patent application No. 3, 4, 5, or 6, wherein the aforementioned downshifting type transfer trolley is moved to the inside of the trolley-receiving type E-box and is stopped, from the aforementioned trolley-receiving-type cassette The charging mechanism provided on the platform charges the down-loading type transfer trolley. 12. For the method of box transfer of item 3, 4, 5, or 6 of the scope of application for patent, wherein the aforementioned downshifting type transfer trolley is moved to the inside of the trolley storage type cassette box and is stopped, and other downshifting type transfer trolleys are stopped. Passes the passage adjacent to the above-mentioned trolley storage type IS box platform. 13. —The cassette conveying system is a system in which a cassette containing a substrate is mounted on a transfer trolley and transported to a cassette adjacent to a robot in a clean room after a robot in which a substrate loading / unloading robot is installed. The substrate is carried in and out between the cassette and the substrate processing device, and is formed by a hermetically sealed cover having an opening on one side and an opening of the hermetically sealed cassette body, and the aforementioned sealed cover is freely removable with respect to the cassette body- 54- This paper size applies to the Chinese National Standard (CNS) A4 (210X297 mm) 541641 A8 B8 C8 D8 VI. Closed box for patent application; (Please read the precautions on the back before filling this page) It will be necessary: A transport trolley carrying the aforementioned hermetically-sealed box holding the substrate; a cassette table on which the hermetically-sealed box is placed; a substrate carrying the substrate into and out of the robot; and a hermetically sealed cover of the hermetically-sealed cover from the cassette body The substrate carrying in and out robot manipulator and the hermetically closed cover release device are provided inside, and the substrate carrying in and out robot manipulator is used to pass A box box box table for carrying a substrate into and out of the box, and a substrate processing device for the substrate processing device is covered with a partition wall of the opening, and a closed-type manipulator storage clean room with FFU; and a box for opening and closing the box box opening An opening / closing plate; and the sealing cover is placed on the cassette table facing the opening for the cassette, the sealing cover release device removes the sealing cover from the cassette body through the opening for the cassette, and carries the substrate in The ejection robot carries in and out the substrate that has been stored in the closed cassette through the cassette opening. 14. For the box and box conveying system of the scope of application for item 13, the conveying trolley is a front-loading type conveying trolley, and the E box stage is provided with a close mechanism £ box. 15. For the box and box conveying system of the scope of application for patent item 13, the conveying trolley is a descending transfer type conveying trolley, and the box and trolley case is a trolley containing type cassette and stage. 16. —The cassette conveying system is a system in which a cassette containing a substrate is mounted on a transfer trolley and is transported to a cassette adjacent to a robot in a clean room after a robot in which a substrate loading / unloading robot is installed. The substrate is carried in and out between the cassette and the substrate processing device, with: -55- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 8 8 8 8 AB c D 541641 Substrate box; A drop-down transfer type cart equipped with a box containing a substrate; (Please read the precautions on the back before filling out this page) Form a cart that moves the drop-down type transfer cart to the inner space Closing the internal cassette box platform; substrates into which the substrates are carried in and out of the robot; and the aforementioned substrates in and out of the robot are set inside and has a clean room inside the robot's retracting system. 17. For the cassette transfer system of item 16 in the scope of patent application, where the cassette is a closed cassette, the robot 5 is a clean room for storing robots, and the substrate is moved into and out of the robot, and the closed robot is equipped with a FFU. . 18. If the box transfer system of item 16 of the patent scope is applied, where the box is an open box, and the robotic storage clean room is to move the substrate in and out of the robot and set it inside 'JtE Open type robot with FFU storage clean room. 19. For the box transfer system of item 13 in the scope of patent application, the closed cover and take off device is used to support the opening and closing plate for opening and closing the closed type robot to store the clean room. 20. For the cassette conveying system according to item 13 of the patent application, in which the closed cover release device is used to open and close the opening of the closed type robot to store the openings in the clean room, and remove the closed cover from the box body. 21. The cassette conveying system according to item 13 of the patent application, wherein the cassette table has a clamping mechanism for fixing the closed cassette and a sliding member for sliding the aforementioned closed cassette. 22. For the cassette transfer system of item 16 in the scope of the patent application, the cassette storage platform on the trolley storage type has a charging mechanism for a downward transfer type transport trolley. -56- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm)