KR20020091774A - Method of and system for conveying cassette - Google Patents

Abstract

PURPOSE: To provide a method and system for transferring a cassette which can effectively utilize an installation area of a clean room 100 constructed in a plant by controlling equipment costs and a running cost of the clean room 100, suppressing an increase of weight and size of a transfer vehicle even though a substrate 41 becomes large-sized and its weight increases, withholding the cost at the transfer vehicle, and making the width of a passage narrow. CONSTITUTION: The method and system for transferring the cassette consist of a process of loading the sealed cassette 60 on the down-loading type transfer vehicle 50, a process of moving the down-loading type carrier truck 50 into a truck-storing type cassette stage 70 and loading the sealed cassette 60 on a vehicle-storing type cassette stage 70, a process of closely locating the sealed cassette 60 in a sealing type robot storing clean room 80, and a process in which a substrate carry in/out robot 110 transfers the substrate between the sealed cassette 60 and a substrate treatment apparatus 102.

Description

Cassette conveying method and cassette conveying system {METHOD OF AND SYSTEM FOR CONVEYING CASSETTE}

The present invention relates, for example, to a method and system suitable for conveying a liquid crystal substrate (hereinafter referred to as a substrate) in a clean room of a factory in the manufacturing process of a liquid crystal panel.

For example, the manufacturing process of a liquid crystal panel has the process of performing substrate processing, such as a thin film formation process, a washing process, and a resist coating, to a board | substrate.

It is a board | substrate processing process arrangement | positioning drawing which shows the example of the installation of a substrate processing process.

For example, in the facility installation clean room 100, the substrate processing apparatus 102 which carries out substrate processing to a board | substrate, and carrying in a board | substrate to the substrate processing apparatus 102, or carrying out a board | substrate from the substrate processing apparatus 102 is carried out. A substrate loading / unloading robot 110, an open robot storage clean room 30 for installing the substrate loading / exporting robot 110, and a cassette stand 20 on which an open cassette 40 containing a substrate is placed. have.

Moreover, the open cassette 40 in which the board | substrate was accommodated is placed in the cassette storage location 101 in the installation installation clean room 100. As shown in FIG.

And the open cassette 40 is conveyed to the cassette stand 20 from the open cassette storage place 101 etc. by the sealed container integrated conveyance trolley 10 which moves the channel | path in the installation clean room 100, or a cassette It is conveyed from the stand 20 to another place.

3 shows an open robot storage clean room 30 according to the prior art in which an open cassette 40 and a substrate loading / unloading robot 110 placed on the cassette rack 20 are mounted from a sealed container integrated transport cart 10 according to the prior art. 4 is a conveyance trolley 16 provided with a sealed container 12 having a fan filter unit (FFU) 11 and a shutter 15, and a link arm 13 and a lifting mechanism 14; It is a figure which shows the sealed container integrated conveyance trolley 10 in which () was integrally formed.

The sealed container integrated conveyance trolley 10 includes a closed container 12 having a fan filter unit (hereinafter referred to as FFU) 11 and a shutter 15 for maintaining the cleanliness of the interior, The conveyance trolley 16 with the link arm 13 and the lifting mechanism 14 is integrally formed so that the open cassette 40 can be placed on the link arm 13 positioned in the sealed container 12. It is.

Moreover, rough positioning is performed by the unevenness | corrugation formed in the bottom face and the link arm 13 of the open cassette 40. FIG.

The open cassette 40 is moved from the interior of the sealed container 12 to another location by the link arm 13 and the lifting mechanism 14, or from the other location to the interior of the sealed container 12. It can be moved. In addition, the link arm 13 and the lifting mechanism 14 are the same mechanism as the board | substrate carrying-out robot 110 mentioned later, and the link arm 13 is the arm of the board | substrate carrying-out robot 110 of FIG. 5 mentioned later. It corresponds to the mechanism 113, and the lifting mechanism 14 corresponds to the lifting mechanism 112 of the substrate loading / unloading robot 110 of FIG. In addition, when the open cassette 40 is moved, the open cassette 40 can be moved by opening and closing the shutter 15 provided in the airtight container 12.

The cassette stand 20 is disposed at a position adjacent to the open robot storage clean room 30 so that the substrate import / export robot 110 can open the cassette at a position suitable for carrying in and out the substrate 41 in the open cassette 40. 40 is a device that can be fixed. In FIG. 3, the open cassette 40 is mounted on the cassette rack 20, and the clamp mechanism 21 is used to fix the open cassette 40. As shown in FIG.

The open robot accommodating clean room 30 is disposed at a position adjacent to the substrate processing apparatus 102 to install the substrate loading / unloading robot 110 therein and further includes an FFU 31 for maintaining the cleanliness therein. Doing. Moreover, the opening 32 for substrate processing apparatuses connected with the substrate processing apparatus 102 is provided.

In addition, the open robot storage clean room 30 is provided with a mechanism for moving the substrate loading / unloading robot 110 in the direction of FIG. 2, so that the substrate loading / unloading robot 110 is suitable for conveyance of the substrate (usually, And the position of the substrate inlet or outlet of the open cassette 40 or the substrate processing apparatus 102 can be appropriately moved. In addition, the open robot storage clean room 30 may be provided with the mechanism which moves the board | substrate carrying-out robot 110 to directions other than the Ｙ direction of FIG.

In this prior art, when the sealed container integrated conveyance truck 10 moves in the installation installation clean room 100 and stops in front of the cassette stand 20, the shutter 15 provided in the closed container 12 is opened, The open cassette 40 is moved from the inside of the sealed container onto the cassette rack 20 by the link arm 13 and the lifting mechanism 14. When the open cassette 40 is moved on the cassette rack 20, the open cassette 40 is fixed by the clamp mechanism 21 provided in the cassette rack 20. In this manner, when the open cassette 40 is placed on the cassette stand 20, the substrate 41 accommodated in the open cassette 40 is able to be taken out by the substrate loading / unloading robot 110.

In the manufacturing process of the liquid crystal substrate, in general, at the time of filing of the present invention, the cleanliness in the facility installation clean room 100 (hereinafter, referred to as full region cleanliness) is a class 10 to class 100. The facility (henceforth a whole area | region cleaning facility) which cleans the whole area | region of installation facility clean room is operation | movement so that it may become the range of predetermined cleanliness degree (henceforth set cleanness degree).

However, since there is an environment in which the set cleanliness in the facility installation clean room 100 may be partially lowered, the open robot storage clean room 30 is further prevented from being affected by the lowered set cleanliness during transportation of the substrate. And the closed container integrated conveyance trolley 10 are also equipped with an FFU, and each inside is maintained at a set cleanness.

5 is a perspective view of the open cassette 40 and the substrate loading and unloading robot 110 when the substrate loading and unloading robot 110 takes the substrate 41 out of the open cassette 40.

For example, as illustrated in FIG. 5, the substrate loading / unloading robot 110 includes a base mechanism 111, a lifting mechanism 112, a pair of arm mechanisms 113, and a tip of an arm mechanism. The hand member 114 supported by the shaft is provided.

The base mechanism 111 is provided with the some motor which is not shown inside, and can raise and lower the lifting mechanism 112, and can make the base mechanism 111 rotate around the Z center axis | shaft.

The arm mechanism 113 is a mechanism in which a first arm 113a, a second arm 113b, and a hand member 114 are supported by an elevating mechanism, and move the hand member 114 in at least the Ⅹ direction. to be. The arm mechanism 113 is also driven by a motor provided in the base mechanism 111.

In addition, the hand member 114 can mount and fix the board | substrate 41 on the upper surface of the hand member 114 by means of vacuum suction etc. which are not shown.

In addition, although the board | substrate carrying-out robot 110 provided with one set of arm mechanism 113 in the example of FIG. 5, the board | substrate carrying-out robot 110 provided with several set of arm mechanisms may be sufficient. In this specification, the robot which can carry in / out the board | substrate 41 is not called a board | substrate carrying in-out robot 110, without restricting a form.

For example, as shown in FIG. 5, the open cassette 40 is a cassette assembled with a frame such that a plurality of slots are provided to accommodate a plurality of substrates 41.

In addition, since the open cassette 40 is not sealed, the substrate 41 accommodated in the cassette is in contact with the atmosphere around the cassette and is affected by the decrease in the cleanliness of the surroundings.

The cassette stand 20 is an apparatus for fixing the open cassette 40 at a position suitable for carrying in and unloading the substrate 41 in the open cassette 40 as described above.

In addition, in FIG. 5, in order to simplify description, only one open cassette 40 and one cassette stand 20 are shown, and the movement mechanism of the X direction etc. which were equipped in the open type robot storage clean room 30 shown in FIG. The illustration is omitted.

The procedure of carrying out the board | substrate 41 from a cassette using this board | substrate carrying-out robot 110 is demonstrated.

First, the hand member 114 is moved in the # 1 direction and inserted into the open cassette 40 so that the hand member 114 is disposed in the downward direction of the target substrate 41. Thereafter, the hand member 114 is raised, and the target substrate 41 is mounted and fixed on the upper surface of the hand member 114. Then, when the hand member 114 is moved in the # 2 direction, the substrate 41 can be taken out from the open cassette 40.

When carrying in the board | substrate 41 into the open cassette 40, it is in the reverse order to the above.

Moreover, when carrying in the board | substrate 41 to the substrate processing apparatus 102, or carrying out the board | substrate 41 from the substrate processing apparatus 102, what is necessary is just to move the hand member 114 to X direction or Z direction similarly. .

FIG. 6 is an explanatory view of the equipment operation procedure of the sealed container integrated transport cart 10 and the substrate loading / unloading robot 110 according to the related art shown in FIG. 3, which is an open cassette as the equipment described above with reference to FIGS. 6 and 4. The procedure until 40 is moved from the conveyance trolley | bogie to the cassette stand 20, and until the board | substrate carrying-out robot 110 is in the state which can carry out a board | substrate is demonstrated.

(1) As shown in Fig. 6 (a), the cassette is moved in the direction of the cassette rack 20 for the purpose of the closed container integrated transport cart 10 on which the open cassette 40 is placed.

(2) When the closed container integrated conveyance truck 10 stops in front of the cassette stand 20, the shutter 15 provided in the closed container integrated conveyance cart 10 is opened (not shown). .

(3) As shown in FIG. 6 (c), the link arm 13 and the lifting mechanism 14 of the sealed container integrated conveyance bogie 10 of FIG. 4 mentioned above are operated, and the sealed container of the sealed container integral conveyance bogie 10 is operated. The open cassette 40 in (12) is transferred to the cassette rack 20. At this time, the open cassette 40 is fixed to the cassette rack 20 by the clamp mechanism 21 provided in the cassette rack 20 of FIG. 3 described above.

(4) As shown in Fig. 6 (d), the link arm 13 and the lift mechanism 14 of the sealed container integrated conveyance trolley 10 are returned to their original positions and the shutter 15 is closed.

(5) As shown in Fig. 6E, the sealed container integrated conveyance trolley 10 is moved from the front of the cassette rack 20 to another position.

In addition, although the sealed container integrated conveyance 10 may be stopped before the cassette stand 20 until the process of all the board | substrates 41 is complete | finished, it obstructs the passage of the other sealed container integrated conveyance trolley 10. It is usually moved to another position so as not to be. And when the process of all the board | substrates 41 is complete | finished, the open cassette 40 which accommodated the board | substrate 41 is moved from the cassette stand 20 into the sealed container integrated conveyance trolley 10, and is conveyed to another location. The operation at this time is performed in the reverse order to when the open cassette 40 is moved from the sealed container integrated conveyance trolley 10 to the cassette stand 20.

(1) At the time of filing the present invention, the cleanliness required for the manufacturing process of the liquid crystal substrate is in the range of the predetermined cleanliness (set cleanliness) of class 10 to class 100, and the set cleanliness is determined according to the condition of the manufacturing process In some cases, it may be in class 100.

Since the facility installation clean room 100 is connected with the space of all area | regions, the whole area | region clean installation is operated so that the whole area | region of the facility installation clean room 100 may be set cleanness. In general, the entire area clean facility adopts a method of flowing air of a set cleanness from the upper part of the facility installation clean room 100 toward the lower part.

However, despite the fact that the entire area clean facility is operated so as to set cleanliness in all areas in the facility installation clean room 100, in the prior art, the open cassette 40 is conveyed integrally with the sealed container provided with the FFU 11. It is conveyed by the trolley | bogie 10.

The reason for this is that due to the structure of the facility installation clean room 100, a part of the facility installation clean room 100 is lowered than the set cleanliness, so that the open cassette 40 is exposed without being placed in the airtight container 12. It is because there exists a possibility that dust may adhere to the board | substrate 41 in the open cassette 40 in the place when it conveys in a state.

In the open robot storage clean room 30, one surface of the cassette stand 20 is opened, but since the other side and the upper surface are often covered by the wall in relation to the substrate processing apparatus, the entire area is used. If only the clean facility is operated, the open robot storage clean room 30 may be lowered than the set cleanliness. For this reason, the FFU 11 is also provided in the open robot storage clean room 30 to maintain the set cleanliness.

As described above, in the prior art, even in the facility installation clean room 100, the FFU 11 is also provided in the sealed container integrated transport cart 10 to maintain the inside at a set cleanness, and to convey the open cassette 40. There is.

However, not only is the entire area clean facility expensive, but also the operating costs such as electric charges and maintenance due to clogging of the filter of the FFU 11 are excessive.

In addition, the construction cost and operation cost of the whole area clean facility increase as the required cleanliness becomes high, and enormous cost is required in order to make it into the range of class 10-class 100 which is the cleanliness required for the manufacturing process of a liquid crystal substrate.

Furthermore, the sealed container integrated conveyance trolley 10 also needs to include the FFU 11 and the storage battery for driving the FFU, thereby increasing the equipment cost and the operating cost.

(2) In recent years, the board | substrate 41 enlarges year by year and the weight also increases. Thereby, the open cassette 40 which accommodated the board | substrate 41 is also enlarged, and the weight continues to increase. As a result, the following problems arise.

In addition, although reference data, in recent years, the board | substrate 41 of 700 mm x 900 mm (thickness 1.1t) and 1000 mm x 1200 mm (thickness 1.1t) is produced.

Here, since the specific gravity of glass is 2.78, the weight of the board | substrate 41 is 700 (mm) x 900 (mm) x 1.1 (t) x 2. 78/1000/1000 ≒ 1.9 [ｋ ｆ ｆ] (20 sheets, about 38 kgf)

1000 (mm) × 1200 (mm) × 1.1 (t) × 2.78 / 1000/1000 ≒ 3.7 [ｋｇｋ] (20 sheets, about 73kgf)

As a result, when such a substrate is accommodated in, for example, 20 cassettes, the weight of the cassette itself becomes quite heavy. Incidentally, in the case of a semiconductor wafer, the specific gravity is 2.33, and even in a semiconductor wafer having a diameter of 300 mm, since the weight thereof is 124 gｆ (about 2.5 gｋ as 20 sheets), the substrate 41 is found to be considerably heavier than the semiconductor wafer. .

In the prior art, as shown in FIG. 4, since the open cassette 40 is placed on the link arm 13, the tip of the link arm 13 is spaced apart from the sealed container integrated transport cart 10. Since the center of the trolley shifts toward the open cassette 40 side, the trolley becomes unstable and there is a fear that it will fall.

Therefore, it was necessary to increase the weight of the main body part of the sealed container integrated conveyance trolley 10 corresponding to the weight of the open cassette 40 which accommodated the board | substrate 41. As shown in FIG. However, in the installation installation clean room 100, the internal weight of the floor is not large enough because of the installation structure.

Therefore, when the weight of the sealed container integrated conveyance trolley becomes heavy, the clearance amount of the bottom weight of the bottom of the installation installation clean room 100 becomes small, or exceeds the inside weight, and the sealed container which increased this weight The integrated conveyance trolley 10 cannot be used.

In addition, increasing the weight of the sealed container integrated conveyance trolley 10 leads to enlargement of the conveyance trolley, enlargement of the passage through which the conveyance trolley passes, and expansion of the facility installation clean room 100, thereby increasing the amount of equipment investment.

(2) In order to carry the heavy open cassette 40, it is necessary to make the link arm 13 and the lifting mechanism 14 into the link arm 13 and the lifting mechanism 14 of the large-weight correspondence, and equipment cost increases. do. In addition, the link arm 13 and the lifting mechanism 14 are enlarged in order to use a large output motor or the like. Moreover, the sealed container integrated conveyance trolley 10 itself also becomes large.

Moreover, the sealed container integrated conveyance trolley 10 is equipped with the rechargeable battery inside, and is moving etc. using the charged electric power. For this reason, a large output motor accompanying the enlargement of the board | substrate 41 is needed, and since the electric power required increases, the battery built in the sealed container integrated conveyance trolley 10 also enlarges and weight increases.

Therefore, the sealed container integrated conveyance trolley 10 becomes large and equipment costs increase.

(3) In addition, when the sealed container integrated conveyance trolley 10 becomes large, the passage width increases, so that the installation area of the facility installation clean room 100 cannot be effectively used, and the facility installation clean room 100 is expanded. This may be necessary.

(3) Since the sealed container integrated conveyance trolley 10 performs the movement, the link arm 13, the lifting mechanism 14, etc. by the electric power of the rechargeable battery provided in the inside, the installation installation clean room 100 is carried out. It was moving to the charging equipment installed in the charging.

However, in this system, since the space for installing the conveyance cart during filling is needed in the installation installation clean room 100, the installation area of the installation installation clean room 100 cannot be used effectively.

(4) FIG. 7 shows another sealed container integrated conveyance while the closed container integral conveyance trolley 10 for moving the open cassette 40 from the conventional sealed container integrated conveyance trolley 10 to the cassette stand 20 is stopped in the passage. It is explanatory drawing of the moving method when the trolley | bogie 10 moves the same path | path.

As shown in Fig. 7 (a), when the open cassette 40 is moved from the sealed container integrated conveyance trolley 10a to the cassette rack 20, the passage is blocked, so that the sealed container integrated type is moving in the same passage. It was necessary to stop the conveyance trolley 10b until the open cassette 40 was moved from the sealed container integrated conveyance trolley 10a to the cassette stand 20, and it was loaded. Moreover, in order to improve conveyance efficiency, it was necessary to ensure the passage width | variety for the width | variety of the sealed container integrated conveyance trolley | bogie width so that it may move from the opposite side of a passage, and the sealed container integrated conveyance trolley 10c may pass.

In addition, as shown in FIG.7 (b), it is also possible for the sealed container integrated conveyance truck 10b during a movement to avoid the sealed container integrated conveyance truck 10a while carrying the open cassette 40, and to continue a movement. However, in this case, it was necessary to ensure the passage width of three closed container integrated conveyance trolleys of the closed container integrated conveyance trolley 10b and 10c which mutually intersect with the closed container integrated conveyance trolley 10a at rest.

As described above, since the passage width is wide in the related art, a large area of the facility installation clean room 100 is required.

However, the whole area clean room facilities are very expensive, and the facility cost increases with the increase of the area of the clean room.

Therefore, if it is a facility similar to the prior art, there existed a problem that the whole area | region clean installation cost and operation cost which make facility installation clean room into a set cleanness increase.

The present invention reduces the class of cleanliness of the facility installation clean room 100 to reduce the entire area clean facility cost and operation cost, or ② the class of the cleanliness of the facility installation clean room 100 as is conventional, Even if the weight increases due to the increase in the size of 41), the increase in the weight and the increase in the size of the conveyance trolleys are suppressed, thereby reducing the cost of the conveyance trolley, preventing the increase of the passage width, or actively reducing the width of the passages, thereby providing a clean installation facility. In order to effectively utilize the installation area of (100), and (3) reduce the equipment cost of the transport cart and reduce the passage width in accordance with the reduction of the class of cleanliness of the facility installation clean room 100. have.

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the characteristic of the invention which concerns on the said application best.

2 is a substrate processing step equipment layout showing an equipment example of the substrate processing step;

Fig. 3 shows an open cassette 40 and a substrate carrying-out robot 110 placed on a cassette stand 20 from a sealed container integrated transfer cart 10 of the prior art. A diagram showing an open robot storage clean room 30 of the prior art.

4 shows a closed container 12 with a fan filter unit (FFU) 11 and a shutter 15, a link arm 13 and a lifting mechanism 14. The figure which shows the sealed container integrated conveyance cart 10 in which the conveyance truck 16 with which it was provided integrally was formed.

Fig. 5 is a perspective view of the open cassette 40 and the substrate loading and unloading robot 110 when the substrate loading and unloading robot 110 carries out the substrate 41 from the open cassette 40. FIG.

FIG. 6 is an explanatory view of the equipment operation procedure of the sealed container integrated conveyance trolley 10 and the board | substrate carrying-out robot 110 of the prior art shown in FIG.

FIG. 7 shows another closed container integrated transport cart 10 while the closed container integrated transport cart 10 for moving the open cassette 40 from the conventional sealed container integrated transport cart 10 to the cassette rack 20 is stopped in the passage. Explanatory drawing of movement method when) moves the same passage.

Fig. 8 is a contact mechanism cassette stand 75 provided with a front transfer-type transport trolley 55 and a slide mechanism on which an airtight cassette 60 according to the present invention is mounted. And a sealed robot storage clean room 80 to be applied to the present invention provided with a substrate import / export robot 110 and the like.

FIG. 9 is a view showing a front transfer carrier cart 55 according to the present invention shown in FIG. 8 having a link arm 56 and a lifting mechanism 57. FIG.

10 is a perspective view of a sealed cassette 60 according to the present invention.

FIG. 11 is a view showing the key mechanism of the sealed cassette 60 of FIG. 10, and FIG. 11 (a) is a view showing the state of the key mechanism when the sealed lid 61 is attached to the cassette body 62. Fig. 11B shows the state of the key mechanism when the sealing lid 61 is removed from the cassette body.

FIG. 12 is an explanatory view of a sealed lid detachment operation procedure of the sealed cassette 60 placed on the close mechanism cassette stand 75 shown in FIG.

FIG. 13 is an enlarged cross-sectional view of a main part of FIG. 12; FIG.

14 shows an example of attachment of the 0-ring 85.

Fig. 15 is an explanatory diagram of an operation procedure of a facility using the front transfer-type transfer cart 55 and the close mechanism cassette unit 75 of the present invention.

FIG. 16 shows a trolley storage cassette rack 70 in which a space for moving the descending transfer material carrier trolley 50 and the descending transfer material carrier trolley 50 to which the closed cassette 60 according to the present invention is placed is provided. And a sealed robot storage clean room 80 to be applied to the present invention provided with a substrate carrying-out robot 110 and the like.

FIG. 17 is a view showing a falling release type transfer cart 50 according to the present invention shown in FIG. 16 without a link arm and an FFU. FIG.

18 is an explanatory diagram showing a state in which the descending transfer-type transfer carriage 50 on which the sealed cassette 60 is placed is moved in the space formed in the trolley storage cassette base 70.

19 is an explanatory view of the operation procedure of the facility using the descending transfer-type conveyance trolley 50 and the trolley storage-type cassette stand 70 of the present invention.

20 is a cart-receiving cassette stand which has a space for moving the descending transfer-type transfer bogie 50 and the descending transfer-type transfer bogie 50 to which the open cassette 40 according to the present invention is placed. 70 is a view showing an open robot storage clean room 30 to be applied to the present invention provided with a substrate carrying-out robot 110 and the like.

Fig. 21 is an explanatory view of the equipment operation procedure when conveying the open cassette 40 using the descending transfer-type transfer cart 50 and the trolley storage cassette stand 70 of the present invention.

FIG. 22 is a view showing a trolley storage cassette stand 70 provided with a filling mechanism 74 and a descending transfer-type transfer cart 50 that can be charged from the filling mechanism 74.

FIG. 23 shows the movement when another descending transfer-type transfer bogie 50 moves the same passage when the closed cassette 60 is moved from the lower transfer-type transfer bogie 50 of the present invention to the balance storage cassette base 70. Figure of how.

* Explanation of symbols for main parts of the drawings

10: sealed container integrated transport cart

10a: Airtight container integrated conveyance cart while carrying open cassette 40

10b: Integrated container integrated conveyance bogie while moving aisle

10c: Airtight container integrated conveyance trolley which moves from the other side of a passage

11: FFU (fan filter unit) 12: airtight container

13 link arm 14 lifting mechanism

15: shutter 16: conveyance cart

20 cassette vs 21 clamp mechanism

30: open robot storage clean room 31: FFU

32 opening for substrate processing apparatus 40 open cassette

41: substrate 50: descending transfer material transfer bogie

50a: descending transfer-type transfer cart while carrying the sealed cassette 60

50b: descending transfer-type bogie while moving passage

50c: descending transfer-type transfer bogie moving from the opposite side of the passage

51: lift mechanism 52: charging port

55: front transfer carrier cart 56: link arm

57 lifting mechanism 60: sealed cassette

61: airtight lid 62: cassette body

63: keyhole 64: keyhole turntable

65: connecting rod 66: key board

66a: center of rotation 66b: arc portion

66c: flat portion 70: cart storage cassette stand

71: clamp mechanism 72: cassette mounting table

73: slide mechanism 74: filling mechanism

75: close mechanism cassette stand 76: clamp mechanism

77 cassette cassette 78 slide mechanism

80: hermetic robot storage clean room 81: opening for substrate processing apparatus

82: opening for cassette 83: FFU

84: bulkhead 85: O-ring

90: sealing lid detachable device 91: opening and closing plate

92: X-direction slide mechanism 93: Up-down slide mechanism

94 key mechanism 95 adsorption mechanism

100: installation clean room 101: cassette storage location

102 substrate processing apparatus 110 substrate import and export robot

111: base mechanism 112: lifting mechanism

113: arm mechanism 113a: first arm

113b: second arm 114: hand absence

As shown in FIG. 8 (the first embodiment) and FIG. 16 (the second embodiment), the invention of claim 1 at the time of filing is

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to

It is formed by the cassette main body 62 with an opening on one side shown in FIG. 10 and a sealing lid 61 for sealing the opening of the cassette main body 62, so that the sealing lid 61 with respect to the cassette main body 62. As shown in FIG. A process of closing the sealed lid 61 by storing the substrate 41 in a sealed cassette 60 freely detachable;

Mounting the sealed cassette 60 shown in FIG. 8 or FIG.

The cassette racks 70 and 75 are mounted so that the sealed cassette 60 mounted on the transfer carts 50 and 55 faces the cassette opening 82 provided in the sealed robot storage clean room 80. With the process of reloading,

Contacting the sealed cassette 60 to the sealed robot storage clean room 80;

Opening the closing plate 91 which closes the cassette opening 82 and at the same time opening the sealing lid 61;

A process of carrying in and carrying out a substrate between the sealed cassette 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

Closing the closing lid 61 at the same time closing the opening / closing plate 91 after the carrying-out of the substrate is completed;

It is a cassette conveyance method which consists of a process of carrying the said conveyed cassette 60 to the conveyance trolley | bogies 50 and 55 from the cassette racks 70 and 75. As shown in FIG.

In the invention of claim 2 at the time of filing, the invention of claim 1 at the time of filing is the invention of Fig. 8 (first embodiment), in which a robot storing clean room in which a cassette containing a substrate is mounted on a transport cart and a substrate carrying-out robot is installed. In the cassette conveyance method in which the board | substrate import / export robot carries in / out a board | substrate between a cassette and a substrate processing apparatus, after conveying to the cassette stand adjacent to the

It is formed by the cassette main body 62 with an opening on one side shown in FIG. 10 and a sealing lid 61 for sealing the opening of the cassette main body 62, so that the sealing lid 61 with respect to the cassette main body 62. As shown in FIG. A process of closing the sealed lid 61 by storing the substrate 41 in a sealed cassette 60 freely detachable;

Mounting the sealed cassette 60 shown in FIG. 8 on the front transfer-type transport trolley 55,

Adherence mechanism unit cassette stand 75 so that the said sealing cassette 60 mounted in the front transfer type conveyance trolley 55 opposes the cassette opening 82 provided in the hermetic robot storage clean room 80. With the process of reloading,

Contacting the sealed cassette 60 to the sealed robot storage clean room 80;

Opening the closing plate 91 which closes the cassette opening 82 and at the same time opening the sealing lid 61;

A process of carrying in and carrying out a substrate between the sealed cassette 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

Closing the closing lid 61 at the same time closing the opening / closing plate 91 after the carrying-out of the substrate is completed;

It is a cassette conveyance method which consists of a process of moving the said sealed cassette 60 to the front transfer-type conveyance trolley 55 from the close_contact | adherence mechanism part cassette stand 75. As shown in FIG.

In the invention of claim 3 at the time of filing, the invention of claim 1 at the time of filing is the invention of FIG. 16 (second embodiment), wherein the robot storage clean room in which a cassette containing a substrate is mounted on a transport cart and a substrate carrying-out robot is installed. In the cassette conveyance method in which the board | substrate import / export robot carries in / out a board | substrate between a cassette and a substrate processing apparatus, after conveying to the cassette stand adjacent to the

It is formed by the cassette main body 62 with an opening on one side shown in FIG. 10 and a sealing lid 61 for sealing the opening of the cassette main body 62, so that the sealing lid 61 with respect to the cassette main body 62. As shown in FIG. A process of closing the sealed lid 61 by storing the substrate 41 in a sealed cassette 60 freely detachable;

Mounting the sealed cassette 60 shown in FIG. 16 on the descending transfer-type transport cart 50;

The trolley storage cassette stand so that the sealing lid 60 mounted on the descending transfer-type transport trolley 50 faces the cassette opening 82 provided in the hermetic robot storage clean room 80 ( 70),

Contacting the sealed cassette 60 to the sealed robot storage clean room 80;

Opening the closing plate 91 which closes the cassette opening 82 and at the same time opening the sealing lid 61;

A process of carrying in and carrying out a substrate between the sealed cassette 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

Closing the sealing cover 61 and closing the opening and closing plate 91 at the same time after the carrying-in and carrying out of the substrate is completed;

It is a cassette conveyance method which consists of a process of moving the said sealing cassette 60 from the trolley | bogie storage-type cassette stand 70 to the descending transfer type | mold conveyance truck 50.

The invention of claim 4 at the time of filing is as shown in FIG. 16 (second embodiment) and FIG. 20 (third embodiment).

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to

Storing the substrate 41 in the cassettes 40 and 60,

Mounting the cassettes (40, 60) on the descending transfer-type transport cart (50),

A process of moving the descending transfer-type transport cart 50 on which the cassettes 40 and 60 are mounted to the inside of the cart-receiving cassette stand 70;

Transferring the cassettes 40 and 60 mounted on the descending transfer-type transport cart 50 to the cart-receiving cassette rack 70;

A process of loading and unloading a substrate between the cassettes 40 and 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

It is a cassette conveyance method which consists of a process of moving the said cassette 40, 60 from the said trolley | bogie storage-type cassette stand 70 to the descending transfer-type conveyance trolley 50.

The invention of claim 5 at the time of filing is as shown in Fig. 16 (second embodiment),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to

It is formed by the cassette main body 62 with an opening on one side shown in FIG. 10 and a sealing lid 61 for sealing the opening of the cassette main body 62, so that the sealing lid 61 with respect to the cassette main body 62. As shown in FIG. A process of closing the sealed lid 61 by storing the substrate 41 in a sealed cassette 60 freely detachable;

Mounting the sealed cassette (60) on the descending transfer-type transport cart (50),

A process of moving the descending transfer-type transport cart 50 on which the sealed cassette 60 is mounted to the inside of the trolley storage cassette base 70;

The trolley storage cassette stand so that the sealing lid 60 mounted on the descending transfer-type transport trolley 50 faces the cassette opening 82 provided in the hermetic robot storage clean room 80 ( 70),

Contacting the sealed cassette 60 to the sealed robot storage clean room 80;

Opening the closing plate 91 which closes the cassette opening 82 and at the same time opening the sealing lid 61;

A process of carrying in and carrying out a substrate between the sealed cassette 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

Closing the closing lid 61 at the same time closing the opening / closing plate 91 after the carrying-out of the substrate is completed;

It is a cassette conveyance method which consists of a process of moving the said sealed cassette 60 from the cassette stand 70 to the descending transfer-type conveyance trolley 50.

The invention of claim 6 at the time of filing is as shown in Fig. 20 (third embodiment),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to

Storing the substrate 41 in the open cassette 40,

Mounting the open cassette 40 on the descending transfer-type transport cart 50;

A process of moving the descending transfer-type transport cart 50 mounted with the open cassette 40 to the inside of the trolley storage cassette base 70;

Transferring the open cassette 40 mounted on the descending transfer-type transport cart 50 to the cart-receiving cassette rack 70;

A process of loading and unloading a substrate between the open cassette 40 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

It is a cassette conveyance method which consists of a process of moving the said open cassette 40 from the said trolley | collar storage-type cassette stand 70 to the descending transfer type | mold conveyance trolley 50.

The invention of claim 7 at the time of filing is as shown in FIGS. 12 and 13 and the first and second embodiments, the sealed robot accommodating clean room 80 according to claim 1 or 2 or 3 or 5. The process of opening the opening / closing plate 91 which closes the opening 82 for cassettes provided in FIG. 12 and FIG. 16 and opening the sealing lid 61 of the sealing cassette 60 is carried out to the sealing lid detaching apparatus 90. Is a cassette conveyance method performed simultaneously.

The invention of claim 8 at the time of filing, as shown in FIGS. 12 and 13 and the first and second embodiments, is a closed lid of the sealed cassette 60 according to claim 1 or 2 or 3 or 5. The process of closing the opening / closing plate 91 at the same time as closing the 61 is a cassette conveying method performed simultaneously by the sealed lid detaching apparatus 90.

As shown in FIG. 8 (the first embodiment), the invention of claim 9 at the time of filing is

The process of bringing the sealed cassette 60 into close contact with the sealed robot storage clean room 80 according to claim 1 or 2 is fixed by the clamp mechanism 76 provided on the cassette mechanism unit 75. 78), the cassette conveyance method is a process of pushing the sealed cassette 60 to the sealed robot storage clean room 80.

The invention of claim 10 at the time of filing is as shown in Fig. 16 (second embodiment),

The process of bringing the sealed cassette 60 into close contact with the sealed robot storage clean room 80 according to claim 1 or 3 or 5 is fixed by the clamp mechanism 71 provided on the cart-mounted cassette rack 70. , The cassette conveyance method which is a process of pushing the sealed cassette 60 to the said sealed robot storage clean room 80 with the slide mechanism 73. FIG.

The invention of claim 11 at the time of filing is as shown in Fig. 22 (fourth embodiment),

The descending transfer-type conveyance trolley 50 of Claim 3 or 4 or 5 or 6 moves to the inside of the trolley | bogie storage cassette stand 70, and is provided in the said trolley | bogie storage cassette stand 70 during stopping. It is a cassette conveyance method which charges the falling transfer-type conveyance trolley 50 from the filling mechanism 74. FIG.

The invention of claim 12 at the time of filing is as shown in FIG.

The descending transfer-type conveyance trolley 50 of Claim 3 or 4 or 5 or 6 moves to the inside of the trolley | bogie storage cassette | seat stand 70, and the other lower transfer type conveyance trolley 50 receives the said trolley | bogie during a stop. It is a cassette conveying method passing through a passage adjacent to the mold cassette stand 70.

According to the invention of claim 13 at the time of filing, as shown in Fig. 8 (first embodiment) and Fig. 16 (second embodiment),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance system

It is formed by the cassette main body 62 with an opening on one side shown in FIG. 10 and a sealing lid 61 for sealing the opening of the cassette main body 62, so that the sealing lid 61 with respect to the cassette main body 62. As shown in FIG. Sealing cassette 60 which is detachable freely,

Conveyance trolleys 50 and 55 on which the sealed cassette 60 containing the substrate 41 shown in FIG. 8 or 16 is mounted;

Cassette racks 70 and 75 on which the sealed cassette 60 is placed,

A substrate import / export robot 110 for carrying in / out of the substrate 41;

A sealed lid detachment device 90 for detaching the sealed lid 61 from the cassette body 62;

An opening for a cassette for installing the substrate loading / unloading robot 110 and the airtight lid detaching device 90 therein and carrying the substrate 41 from the cassette by the substrate loading / unloading robot 110 ( An enclosed robot accommodating clean room 80, which is covered with a partition wall having an opening 81 for substrate processing apparatus 81 and a substrate processing apparatus 102, and which has an FFU 83;

It is provided with an opening and closing plate 91 for opening and closing the cassette opening 82,

The airtight lid 61 is placed on the cassette racks 70 and 75 so as to face the cassette opening 82,

The airtight lid detachment device 90 detaches the airtight lid 61 from the cassette body 62 through the cassette opening 82,

The board | substrate carrying-out robot 110 is a cassette conveyance system which carries in and unloads the board | substrate 41 accommodated in the airtight cassette 60 through the said cassette opening 82.

The invention of claim 14 at the time of filing is as shown in Fig. 8 (first embodiment),

The conveyance truck of Claim 13 is a front transfer type | mold conveyance truck 55, and a cassette conveyance system is a cassette conveyance system in which the cassette stand is the cassette mechanism 75 of a close_contact | adherence mechanism.

The invention of claim 15 at the time of filing is as shown in Fig. 16 (second embodiment),

A conveyance truck of Claim 13 is a descending transfer material conveyance truck 50, and a cassette conveyance system is a cassette conveyance system which is a trolley | bogie storage type | mold cassette stand 70.

According to the invention of claim 16 at the time of filing, as shown in FIG. 16 (second embodiment) and FIG. 20 (third embodiment),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance system

Cassettes 40 and 60 for housing the substrate 41;

A descending transfer-type conveyance trolley 50 for mounting the cassettes 40 and 60 containing the substrate 41;

A trolley storage-type cassette rack 70 having a space for moving the descending transfer-type transport trolley 50 to the inside;

A substrate import / export robot 110 for carrying in / out of the substrate 41;

It is a cassette conveyance system which installs the said board | substrate carrying-out robot 110 inside, and provides the robot storage clean rooms 30 and 80 provided with FFUs 31 and 83, and conveys them.

The invention of claim 17 at the time of filing is as shown in Fig. 16 (second embodiment),

The cassette conveyance system of Claim 16 is the sealed cassette 60, The robot storage clean room is the sealed robot storage clean room 80 provided with the board | substrate carrying-out robot 110 inside, and equipped with FFU83.

The invention of claim 18 at the time of filing is as shown in Fig. 20 (third embodiment),

The cassette conveyance system of Claim 16 is an open cassette 40, and a robot storage clean room is an open robot storage clean room 30 provided with the board | substrate carrying-out robot 110 inside, and equipped with FFU31.

According to the invention of claim 19 at the time of filing, as shown in Fig. 8 (first embodiment) and Fig. 16 (second embodiment), the sealed lid detachment device 90 according to claim 13 is a sealed robot storage clean room 80. The cassette conveyance system which supports the opening-closing board 91 which opens and closes the cassette opening 82 of (circle).

The invention of claim 20 at the time of filing is as shown in Fig. 8 (first embodiment) and Fig. 16 (second embodiment).

13 is a cassette conveying system which opens and closes the cassette opening 82 of the hermetic robot storage clean room 80 and detaches and closes the sealing lid 61 from the cassette main body 62. .

The invention of claim 21 at the time of filing is as shown in Fig. 8 (first embodiment) and Fig. 16 (second embodiment).

The cassette conveyance provided with the clamp mechanism 71, 76 which the cassette stand 70, 75 of Claim 13 fixes the sealed cassette 60, and the slide mechanism 73, 78 which slides the said sealed cassette 60. System.

The invention of claim 22 at the time of filing is as shown in Fig. 22 (fourth embodiment),

It is a cassette conveyance system provided with the trolley | bogie storage type | mold cassette stand 70 of Claim 16 provided with the filling mechanism 74 for the descending transfer-type conveyance trolley | bogie 50. As shown in FIG.

EMBODIMENT OF THE INVENTION Hereinafter, the detail of this invention is demonstrated based on drawing.

1 is a view showing the best features of the invention according to the present application.

Since FIG. 1 is the same as FIG. 16 mentioned later, description is mentioned later in FIG.

An embodiment of the method of the present invention corresponds to the invention of the cassette conveyance method of claim 5 at the time of filing, as shown in FIG. 16 (second embodiment),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to

It is formed by the cassette main body 62 which has an opening in one side, and the sealing lid 61 which seals the opening of the cassette main body 62, The said sealing lid 61 is detachable with respect to the cassette main body 62 freely. Storing the substrate 41 in the sealed cassette 60 to close the sealed lid 61;

Mounting the sealed cassette (60) on the descending transfer-type transport cart (50),

A process of moving the descending transfer-type transport cart 50 on which the sealed cassette 60 is mounted to the inside of the trolley storage cassette base 70;

The trolley storage cassette stand so that the sealing lid 60 mounted on the descending transfer-type transport trolley 50 faces the cassette opening 82 provided in the hermetic robot storage clean room 80 ( 70),

Contacting the sealed cassette 60 to the sealed robot storage clean room 80;

Opening the closing plate 91 which closes the cassette opening 82 and at the same time opening the sealing lid 61;

A process of carrying in and carrying out a substrate between the sealed cassette 60 and the substrate processing apparatus 102 by the substrate loading and unloading robot 110;

Closing the airtight lid 61 at the same time as the opening and closing of the cassette and closing the opening 82 for the cassette with the opening and closing plate 91;

It is a cassette conveyance method which consists of a process of moving the said sealing cassette 60 from the trolley | bogie storage-type cassette stand 70 to the descending transfer type | mold conveyance truck 50.

Moreover, embodiment of the system of this invention corresponds to the invention of the cassette conveyance system of Claim 15 at the time of filing as shown in FIG. 16 (2nd Example),

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance system

It is formed by the cassette main body 62 which has an opening in one side, and the sealing lid 61 which seals the opening of the cassette main body 62, The said sealing lid 61 is detachable with respect to the cassette main body 62 freely. Phosphorus sealed cassette 60,

A descending transfer-type transfer cart 50 on which the sealed cassette 60 containing the substrate 41 is mounted;

A trolley storage cassette stand 70 on which the sealed cassette 60 is placed;

A substrate import / export robot 110 for carrying in / out of the substrate 41;

A sealed lid detachment device 90 for detaching the sealed lid 61 from the cassette body 62;

An opening for a cassette for installing the substrate loading / unloading robot 110 and the airtight lid detaching device 90 therein and carrying the substrate 41 from the cassette by the substrate loading / unloading robot 110 ( An enclosed robot accommodating clean room 80, which is covered with a partition wall having an opening 81 for substrate processing apparatus 81 and a substrate processing apparatus 102, and which has an FFU 83;

An opening and closing plate 91 for opening and closing the cassette opening 82;

The airtight lid 61 is placed on the trolley storage cassette stand 70 so as to face the cassette opening 82 of the hermetic robot storage clean room 80,

The airtight lid detachment apparatus 90 detaches the airtight lid 61 of the airtight cassette 60 from the cassette body 62 through the cassette opening 82,

The board | substrate carrying-out robot 110 is a cassette conveyance system which carries in and unloads the board | substrate 41 accommodated in the airtight cassette 60 through the said cassette opening 82.

(First embodiment)

In the first embodiment described below, the front transfer-type transfer cart 55 shown in Fig. 8 having the sealed cassette 60 shown in Fig. 10 is moved to the close-up mechanism unit cassette stand 75, and the front transfer-type transfer cart ( The hermetic cassette 60 is moved to the contact mechanism cassette stand 75 in front by the link arm 56 and the elevating mechanism 57 of 55, and the hermetic cassette 60 is sealed robot storage clean room 80. And the opening / closing plate 91 which closes the sealing lid 61 of the airtight cassette 60 and the cassette opening 82 of the hermetic robot storage clean room 80, and opens and closes the board | substrate carrying-out robot 110. An embodiment of a cassette conveyance method and a cassette conveyance system for conveying a substrate 41 stored in the hermetic cassette 60 between the hermetic cassette 60 and the substrate processing apparatus 102, and claims 1 and Claims 2 and 7 and 8 and 9 and 13 and 13 and It corresponds to the invention of 14 and Claim 19 and Claim 20 and Claim 21.

Fig. 8 shows a close mechanism transfer carriage 55 having a closed cassette 60 according to the present invention mounted thereon, a cassette mechanism unit 75 with a slide mechanism 78, a substrate carrying-out robot 110, and the like. Fig. 9 is a view showing a hermetic robot storage clean room 80 to be applied to the present invention provided with the present invention, and Fig. 9 is a front transfer mold carrier according to the present invention shown in Fig. 8 having a link arm 56 and a lifting mechanism 57. It is a figure which shows the trolley | bogie 55, and FIG. 10 is a perspective view of the sealed cassette 60 which concerns on this invention.

As shown in Fig. 10, the sealed cassette 60 accommodates the substrate 41 formed by the cassette main body 62 having an opening on one side and the sealing lid 61 sealing the opening of the cassette main body 62. It is a cassette, and the sealing lid 61 is detachable with respect to the cassette main body 62 freely.

The inside of the cassette main body 62 is provided with a plurality of slots similarly to the open cassette 40, and can accommodate a plurality of substrates 41. In addition, the sealed cassette 60 can hold the inside of the sealed cassette 60 in an airtight state with the sealed lid 61 attached.

Therefore, in an environment in which the set cleanliness is maintained, the sealing lid 61 is removed and the substrate 41 is housed in the cassette main body 62, and then the sealing lid 61 is attached. Even if the FFU is not provided as in the container 12, the inside of the sealed cassette 60 can be kept at a set cleanness to accommodate the substrate 41.

The forward transfer-type conveyance trolley 55 shown in FIG. 9 is a conveyance trolley of the structure which removed the airtight container 12 provided with the FFU 11 and the shutter 15 from the closed container integrated conveyance trolley 10 shown in FIG. The sealed cassette 60 is mounted on the link arm 56 so as to be fixed. In addition, the link arm 56 and the lifting mechanism 57 can move the sealed cassette 60 to another location.

In addition, the link arm 56 and the lifting mechanism 57 are the same as the link arm 13 and the lifting mechanism 14 of the sealed container integrated conveyance truck 10. In addition, the front transfer-type conveyance cart 55 can also mount the open cassette 40 in addition to the sealed cassette 60. As shown in FIG.

Moreover, rough positioning is performed by the unevenness | corrugation formed in the bottom face and the link arm 56 of the open cassette 40, respectively.

As shown in Fig. 8, the close mechanism mechanism cassette stand 75 includes a cassette placing table 77 and a cassette placing table on which an airtight cassette 60 or the like is placed on the upper side of the close mechanism cassette stand 75. And a clamp mechanism 76 for fixing an airtight cassette 60 or the like provided at 77) and a slide mechanism 78 for sliding the cassette holder 77.

By the mechanism described above, the sealed cassette 60 is fixed to the cassette holder 77 by fixing the sealed cassette 60 by the clamp mechanism 76, and then the cassette holder 77 by the slide mechanism 78. ), The sealed cassette 60 is brought into close contact with the sealed robot storage clean room 80.

As shown in FIG. 8, the hermetic robot storage clean room 80 is disposed at a position adjacent to the substrate processing apparatus 102 to install the substrate loading / unloading robot 110 and the sealing lid detaching device 90 therein. In addition, an FFU 83 is provided to keep the interior at a set cleanness. Moreover, the moving mechanism (not shown) which moves the board | substrate carrying-in / out robot 110 to FIG. 2, etc. is also provided. In addition, the board | substrate carrying in-out robot 110 is the same as before.

As shown in Fig. 8, the hermetic robot accommodating clean room 80 includes a cassette opening 82 and a substrate for carrying in and unloading the substrate 41 from the hermetic cassette 60 placed on the cassette mechanism unit 75. It is covered by the partition wall 84 provided with the opening 81 for substrate processing apparatuses which communicates with a processing apparatus. In addition, the opening and closing of the cassette opening 82 is performed using the opening and closing plate 91. Specifically, when the opening and closing plate 91 comes into close contact with the cassette opening 82, the cassette opening 82 is closed. Then, when the opening and closing plate 91 moves to another position, the cassette opening 82 is opened.

In addition, since the opening / closing plate 91 is supported by the sealed lid detachment apparatus 90 as will be described later, the opening and closing of the cassette opening 82 can be performed by the operation of the sealed lid detachment apparatus 90. In addition, the opening / closing plate 91 may be operated by another device. In addition, a mechanism for opening and closing the cassette opening 82 may be provided in the hermetic robot storage clean room 80. In this specification, as long as it is a mechanism which opens and closes the opening 82 for cassettes, it is called opening / closing plate 91 without restricting a form.

Thus, since the sealed robot accommodating clean room 80 has the partition 84 and maintains the inside with the set cleanliness by FFU 83, when the cassette opening 82 is closed, the enclosed robot accommodating clean room 80 is closed. Becomes an independent clean room.

Therefore, the inside of the hermetic robot accommodating clean room 80 can be maintained at different set cleanliness regardless of the cleanliness of the outside thereof.

The airtight lid detachment device 90 installed in the hermetic robot storage clean room 80 detaches the airtight lid 61 of the airtight cassette 60 and supports the opening / closing plate 91 to seal the robotic clean room 80. It is a device having a function of opening and closing the opening 82 for a cassette.

As described above, the opening / closing plate 91 may be operated by other devices without supporting the sealed lid detachment device 90.

The description of this airtight lid detachment apparatus 90 will be described later with reference to FIGS. 12 and 13.

FIG. 11 is a view showing the key mechanism of the sealed cassette 60 of FIG. 10, and FIG. 11 (a) is a view showing the state of the key mechanism when the sealed lid 61 is attached to the cassette body 62. FIG. 11 (b) is a diagram illustrating a state of the key mechanism when the sealing lid 61 is removed from the cassette body 62.

In addition, each figure is comprised as the top view which abbreviate | omitted a part (drawing which key hole 63 is shown), the bottom view which abbreviate | omitted a part, and two side views. With reference to FIG. 11, the detachment of the sealing lid 61 of the sealing cassette 60 is demonstrated.

One end side of the connecting rod 65 is connected to the keyhole rotating plate 64 connected to the key hole 63, and the other end side of the connecting rod 65 is connected to the key board 66. have. Therefore, when the key is inserted into the key hole 63 and rotated, the key hole rotating plate 64 is rotated about the rotation center 64a, and the rotation thereof is flattened with the arc portion 66b by the connecting rod 65. It is transmitted to the key board 66 in which the part 66c was provided, and the key board 66 rotates about the rotation center 66a. By this rotation, the position of the arc part 66b and the flat part 66c is displaced.

As shown in Fig. 11A, when the arc portion 66b is located at the end of the sealing lid 61, the arc portion 66b protrudes from the end of the sealing lid 61, and thus the cassette main body. Since the recessed portion (not shown) provided in the 62 is forcibly pressed, the sealing lid 61 can be attached to the cassette main body 62. As shown in Fig. 11 (b), when the flat portion 66c is located at the end of the sealed lid 61, the flat lid 66c does not protrude from the end of the lid, so that the sealed lid 61 is replaced by the cassette body. It can be removed from (62).

Therefore, when removing the sealing lid 61, the key may be inserted into the keyhole 63 and rotated so that the flat portion 66c is positioned at the end of the sealing lid 61. On the contrary, when attaching the sealing lid 61, the key may be inserted into the key hole 63 and rotated so that the arc portion 66b is positioned at the end of the sealing lid 61.

FIG. 12 is an explanatory view of a sealed lid detachment operation procedure of the sealed cassette 60 mounted on the close mechanism cassette stand 75 shown in FIG. 8, and FIG. 13 is an enlarged cross-sectional view of the main part of FIG.

12 and 13, a procedure of removing the sealed lid 61 of the sealed cassette 60 by the sealed lid desorption device 90 will be described.

12 (a) and 13 (a), the close mechanism 61 cassette closes the sealing lid 61 of the sealed cassette 60 to face the cassette opening 82 of the sealed robot storage clean room 80. As shown in FIG. When placed on the base 75, the sealed cassette 60 is fixed by the clamp mechanism 76 (FIG. 8).

12 (b) and 13 (b), the cassette main body 62 of the sealed cassette 60 is moved by the slide mechanism 78 (Fig. 8) provided on the cassette mechanism 75 of the close mechanism part. It slides to the position which closely contacts with the partition 84 (FIG. 8) of the sealed robot storage clean room 80. FIG.

At this time, the airtight lid 61 is adsorbed by the adsorption mechanism 95 of the airtight lid detachment apparatus 90, and is adsorbed to the opening / closing plate 91. In addition, since the key mechanism 94 provided in the sealed lid detachment apparatus 90 is inserted in the keyhole 63 (FIG. 11) of the sealed lid 61, the key mechanism 94 is rotated and sealed. The lid 61 is detachable from the cassette body 62.

12 (c) and 13 (c), the sealing lid 61 is adsorbed to the opening / closing plate 91 by the Ⅹ direction slide mechanism 92 of the sealing lid desorption apparatus 90. , The sealing lid 61 is removed from the cassette body 62 by moving in the direction of Ⅹ.

In addition, since the size of the sealed lid 61 is smaller than that of the cassette opening 82, the sealed lid 61 can pass through the cassette opening 82.

At this time, the cassette opening 82 of the hermetic robot accommodating clean room 80 is detached from the cassette opening 82 so that the cassette opening 82 is not closed. However, since the cassette main body 62 is in close contact, the inside of the hermetic robot accommodating clean room 80 is maintained at a set cleanliness.

That is, since the inside of the sealed robot accommodating clean room 80 and the inside of the sealed cassette 60 are maintained at the set cleanliness as mentioned above, the board | substrate 41 is not influenced by an external atmosphere.

(4) When the opening / closing plate 91 of the sealed lid detachment device 90 moves downward by the up-down slide mechanism 93, as shown in Figs. The substrate 41 is in a state capable of carrying in and out of the substrate 41.

14 is a diagram illustrating an example of attachment of the 0-ring 85. As shown in the figure, a sealing member such as a 0-ring 85 is attached to the partition wall 84 to form a gap between the partition wall 84 and the opening / closing plate 91 and the partition wall 84. By closing the gap between the cassette body 62 and the cassette main body 62, the airtightness is further increased. In addition, a sealing member such as the 0-ring 85 may be attached to the opening and closing plate 91 and the cassette main body 62, and both the partition wall 84, the opening and closing plate 91, and the cassette main body 62 are attached to each other. You may attach it.

Fig. 15 is an explanatory view of the equipment operation procedure using the front transfer-type transfer cart 55 and the close mechanism cassette unit 75 of the present invention, and the front transfer-type transfer of the sealed cassette 60 in the facility described above with reference to Fig. 15. After moving from the trolley | bogie 55 to the close_contact | adherence mechanism part cassette stand 75, the procedure until the board | substrate carrying-out robot 110 becomes a state which can carry out a board | substrate is demonstrated.

(1) As shown in Fig. 15 (a), the cassette is moved in the direction of the close mechanism mechanism cassette stand 75 for the purpose of the front transfer-type transport cart 55 on which the sealed cassette 60 is placed.

(2) As shown in FIG. 15 (b), the front transfer-type conveyance trolley 55 moves to the front of the contact mechanism portion cassette stand 75.

(3), the link arm 56 and the elevating mechanism 57 (FIG. 9) of the front transfer carrier cart 55 are operated to move the sealed cassette 60 to the front transfer carrier cart 55. As shown in FIG. ) To the close mechanism cassette base 75. At this time, the closed cassette 60 is fixed to the close mechanism cassette stand 75 by the clamp mechanism 76 (FIG. 8) provided in the close mechanism cassette stand 75.

(4) As shown in Fig. 15 (d), the link arm 56 and the lifting mechanism 57 (Fig. 9) of the front transfer carrier cart 55 are returned to their original positions.

As shown in Fig. 15E, when the sealed cassette 60 is placed on the close mechanism cassette stand 75, the slide cassette 78 (Fig. 8) of the closed cassette 60 is used as described above. The cassette body 62 is slid to a position in close contact with the wall of the sealed robot storage clean room 80.

Then, in the order shown in FIG. 12 and FIG. 13, the sealing lid 61 of the sealing cassette 60 is removed, and the board | substrate carrying in / out robot 110 is made to be able to carry out a board | substrate.

In addition, the front transfer-type conveyance trolley 55 is moved to the other position from the front of the close mechanism cassette base 75. FIG.

In addition, although the front transfer type conveyance trolley 55 may be stopped in front of the contact mechanism part cassette stand 75 until the process of all the board | substrates 41 is complete | finished, the interruption of the traffic of another front transfer form conveyance trolley 55 is prevented. Therefore, it is usually moved to another position. And after the process of all the board | substrates 41 is complete | finished, the sealed cassette 60 which accommodated the board | substrate 41 is moved from the close_contact | adherence mechanism cassette stand 75 to the front transfer type conveyance trolley 55, and is conveyed to another location. do. The operation at this time is performed in the reverse order to when the sealed cassette 60 is transferred from the front transfer-type conveyance cart 55 to the close mechanism cassette base 75.

Second Embodiment

The second embodiment described below moves the lower transfer-type transfer carriage 50 shown in FIG. 16, which is equipped with the sealed cassette 60 shown in FIG. 10, to the inside of the trolley storage cassette base 70, and the lower release type After moving the sealed cassette 60 to the trolley | bogie type | mold cassette stand 70 by the lifting mechanism 51 of the conveyance trolley | bogie 50, and making the sealed cassette 60 closely adhere to the hermetic robot storage clean room 80, The substrate 41 in which the sealing lid 61 of the hermetic cassette 60 and the cassette opening 82 of the hermetic robot accommodating clean room 80 are opened, and the substrate loading / unloading robot 110 is housed in the hermetic cassette 60. Is an embodiment of a cassette conveying method and a cassette conveying system for conveying between the hermetic cassette 60 and the substrate processing apparatus 102, and claims 1 and 3 and 4 and 5 and 7 and 7 at the time of filing. 8 and 10 and 13 and 15 and 16 It corresponds to the invention of claim 17 and claim 19 and claim 20 and claim 21.

FIG. 16 shows a trolley storage cassette rack 70 in which a space for moving the descending transfer material carrier trolley 50 and the descending transfer material carrier trolley 50 to which the closed cassette 60 according to the present invention is placed is provided. ) Is a view showing a sealed robot storage clean room 80 to be applied to the present invention with a substrate carrying-out robot 110 and the like, and FIG. 17 relates to the present invention shown in FIG. 16 without a link arm and an FFU. FIG. 18 is a view illustrating a state in which the descending transfer type carrier trolley 50 on which the closed cassette 60 is placed is moved into a space formed in the trolley storage cassette base 70. It is also.

As shown in FIG. 16 and FIG. 17, the descending transfer type conveyance trolley 50 is equipped with the elevating mechanism 51, and the conveyance trolley which can put the sealed cassette 60 on the upper part of the elevating mechanism 51 is shown. The sealed cassette 60 can be moved up and down by the elevating mechanism 51.

Moreover, rough positioning is performed by the unevenness | corrugation formed in the bottom face of the airtight cassette 60, and the upper part of the lifting mechanism 51, respectively.

In addition, in addition to the closed cassette 60, the descending transfer material conveyance trolley 50 may also be placed on the open cassette 40. Moreover, it does not have a link arm like the sealed container integrated conveyance trolley 10 of the prior art.

The trolley | bogie storage type | mold cassette stand 70 is a cassette stand which provided the space which can move the falling transfer material conveyance truck 50 equipped with the sealed cassette 60 to the inside, as shown in FIG. 16 and FIG. Clamp mechanism 71 and cassette mounting for fixing the cassette holder 72 which mounts the sealed cassette 60 etc. on the upper part of the type | mold cassette stand 70, and the sealed cassette 60 etc. which were installed in the cassette holder 72. The slide mechanism 73 which slides the base 72 is provided.

Therefore, after placing the sealed cassette 60 or the like on the cassette holder 72 to fix the sealed cassette 60 or the like by the clamp mechanism 71, the cassette holder 72 is slid by the slide mechanism 73. In this manner, the sealed cassette 60 is brought into close contact with the sealed robot storage clean room 80.

Moreover, as shown in FIG. 18, since the width | variety of the lifting mechanism 51 is narrower than the width | variety of the sealed cassette 60, the trolley | bogie storage is carried out without interfering with the cassette mounting base 72 of the trolley | bogie type cassette base 70. It can move into the space formed in the mold cassette stand 70. Therefore, when the lifting mechanism of the trolley | bogie type cassette stand 70 is lowered, the sealed cassette 60 can be moved and loaded on the cassette mounting base 72 of the trolley | bogie type cassette stand 70.

Since the sealed robot storage clean room 80, the sealed lid detaching apparatus 90, etc. of FIG. 16 are the same as that of 1st Example, description is abbreviate | omitted.

In addition, since the sealing lid detachment operation | movement of the airtight cassette 60 put on the trolley | bogie type cassette stand 70 is also the same as that of 1st Embodiment, description is abbreviate | omitted.

19 is an explanatory view of the equipment operation procedure using the lower transfer-type transfer bogie 50 and the trolley storage cassette base 70 of the present invention. In the installation described above with reference to FIG. 19, the lower cassette 60 is lowered. After transferring from the conveyance trolley 50 to the trolley | bogie storage type | mold cassette stand 70, the procedure until the board | substrate carrying-out robot 110 becomes a state which can carry out a board | substrate is demonstrated.

(1) As shown in Fig. 19 (a), it moves in the direction of the trolley storage cassette base 70 for the purpose of the descending transfer-type transfer trolley 50 on which the sealed cassette 60 is placed.

(2) As shown in Fig. 19 (b), the descending transfer-type conveyance trolley 50 moves to the front of the trolley storage cassette rack 70.

(3) As shown in Fig. 19 (c), the descending transfer-type transport cart 50 is moved into the space formed in the storage cassette rack 70 with the sealed cassette 60 mounted thereon. At this time, the sealed lid 61 of the sealed cassette 60 is positioned in the direction of the sealed robot storage clean room 80.

Subsequently, the elevating mechanism 51 (FIG. 17) of the descending transfer-type conveyance trolley 50 is lowered, the sealed cassette 60 is placed on the trolley storage cassette stand 70, and the clamp mechanism 71 (FIG. 16). ), The sealed cassette 60 is fixed.

(4) As shown in Fig. 19 (d), the descending transfer-type transfer carriage 50 is moved from the trolley storage cassette stand 70 to another position.

In addition, although the lower transfer material conveyance trolley 50 may be stopped in the space formed in the trolley | bogie storage cassette stand 70 until the process of all the board | substrates 41 accommodated in the sealed cassette 60 is complete | finished, it is normally Moves to another position to convey another sealed cassette 60.

As shown in Fig. 19E, when the sealed cassette 60 is placed on the trolley-type cassette rack 70, the sealed cassette 60 is moved by the slide mechanism 73 (Fig. 16) as described above. The cassette main body 62 is slid to a position in close contact with the wall of the sealed robot storage clean room 80.

Then, in the order shown in FIG. 12 and FIG. 13, the sealing lid 61 of the sealing cassette 60 is removed, and the board | substrate carrying in / out robot 110 is made to be able to carry out a board | substrate.

(Third Embodiment)

In the third embodiment described below, as shown in FIG. 20 to be described later, the descending transfer-type transport cart 50 equipped with the open cassette 40 (rather than the airtight cassette 60) is loaded with the cart-type cassette rack 70. ), The open cassette 40 is moved to the trolley storage cassette rack 70 by the lifting mechanism 51 of the lower transfer-type transport trolley 50, and the open robot storage clean room 30 is moved. Embodiment of a cassette conveying method and cassette conveying system in which the installed substrate loading and unloading robot 110 conveys the substrate 41 stored in the open cassette 40 between the open cassette 40 and the substrate processing apparatus 102. It corresponds to the invention of Claim 4, 6, 16, and 18 at the time of filing.

20 is a cart-receiving cassette stand 70 which forms a space for moving the descending transfer type carrier trolley 50 and the descending transfer type carrier trolley 50 to which the open cassette 40 according to the present invention is placed. ) Is a view showing an open robot storage clean room 30 to be applied to the present invention provided with a substrate loading and unloading robot 110 and the like.

The open robot storage clean room 30, the descending transfer-type conveyance trolley 50, etc. are the same as that of 1st Example and 2nd Example.

Further, as in the first embodiment, since the open cassette 40 does not need to be in close contact with the open robot storage clean room 30, the trolley cassette cassette 70 has a slide mechanism for sliding the open cassette 40 ( 73 may not be provided.

However, in the case where the position of the open cassette 40 is slightly slid, the slide mechanism 73 may be provided when the substrate loading and unloading robot 110 tends to carry the substrate 41 in and out.

In this way, the open cassette 40 can also be conveyed using the lower transfer-type conveyance trolley 50.

In this case, when the entire area of the facility installation clean room 100 can be maintained at the set cleanness, the cassette is moved from the transport cart to the cassette rack by the lifting mechanism 51 without using the link arm. Even if the size of 41 increases and the weight of the board | substrate 41 increases, the center of a conveyance trolley shifts | deviates and the conveyance trolley does not become unstable like conventionally.

Fig. 21 is an explanatory view of the equipment operation procedure when conveying the open cassette 40 using the descending transfer-type transfer cart 50 and the trolley storage-type cassette stand 70 of the present invention, which has been described above with reference to Fig. 21. In the facility, after the open cassette 40 is moved from the lower transfer-type transfer cart 50 to the trolley storage-type cassette stand 70 and loaded, the substrate loading and unloading robot 110 until the substrate can be brought out of the state. Explain the order.

(1) As shown in Fig. 21 (a), the moving cassette 40 is moved in the direction of the trolley storage-type cassette rack 70 for the purpose of the descending transfer-type transport trolley 50 on which the open cassette 40 is placed.

(2) As shown in Fig. 21 (b), the descending transfer material conveyance trolley 50 moves to the front of the trolley storage cassette rack 70.

(3) As shown in Fig. 21C, the descending transfer-type transport cart 50 moves into the space formed in the cart-receiving cassette rack 70 with the open cassette 40 mounted thereon. Thereafter, the elevating mechanism 51 (FIG. 20) of the descending transfer-type transport cart 50 is lowered, and the open cassette 40 is transferred to the cart-receiving cassette stand 70, and the clamp mechanism 71 (FIG. 20). ), The open cassette 40 is fixed.

(4) As shown in Fig. 21 (d), the descending transfer-type transfer carriage 50 is moved from the trolley storage cassette stand 70 to another position.

In addition, although the lower transfer material conveyance trolley 50 may be stopped in the space formed in the trolley | bogie storage cassette stand 70 until the process of all the board | substrates 41 accommodated in the open cassette 40 is complete | finished, it is normally Moves to another position to convey another open cassette 40.

(Example 4)

The fourth embodiment described below with reference to Fig. 22 corresponds to the inventions of claims 11 and 22 at the time of filing.

FIG. 22: is a figure which shows the trolley | bogie type | mold cassette stand 70 provided with the filling mechanism 74, and the falling transfer material conveyance cart 50 which can be charged from the filling mechanism 74. As shown in FIG.

As shown in FIG. 22, the trolley | bogie type | mold cassette stand 70 is provided with the filling mechanism 74, and the lower transfer material type | mold conveyance trolley 50 is the filling opening 52 in the position corresponding to the filling mechanism 74. As shown in FIG. Equipped with. At this time, for example, if a plug is provided in the charging mechanism 74 and a socket is provided in the charging port 52, the plug can be inserted into the socket for charging.

Therefore, when the descending transfer-type conveyance trolley 50 moves into the space formed in the trolley | bogie storage cassette stand 70, in order to carry the open cassette 40 or the sealed cassette 60 to the trolley | bogie storage cassette stand 70, I can charge it.

Moreover, even if it does not convey the open cassette 40 or the sealed cassette 60, when it moves in the space provided in the trolley | bogie storage cassette base 70, it can charge.

In addition, the position of the filling mechanism 74 and the filling port 52 is not limited to the position shown in FIG. 22, You may provide in another position. In addition, the type of the rechargeable battery is not limited.

(Example 5)

The fifth embodiment described below with reference to Fig. 23 corresponds to the invention of claim 12 at the time of filing.

FIG. 23 shows another falling transfer member 50 when the open cassette 40 or the sealed cassette 60 is moved from the lower transfer member carriage 50 of the present invention to the trolley storage cassette stand 70. It is explanatory drawing of the movement method at the time of moving a passage.

As shown in Fig. 23 (a), when the open cassette 40 or the sealed cassette 60 is moved from the descending transfer-type transport cart 50a to the trolley storage cassette base 70, the lower transfer-type transport cart 50a is loaded. Is stored in the space formed in the trolley | bogie storage type | mold cassette stand 70, and a passage is not obstructed by the falling transfer material conveyance trolley 50a during carrying.

In addition, since the lower transfer-type transfer cart 50b during the movement can also be evacuated in the space formed in the trolley storage cassette base 70, as shown in Fig. 23B, the lower transfer-type transfer carriage moving from the opposite side of the passage. The bogie 50c can move the passageway.

Therefore, even in the width | variety of the passage | pass where only one descending transfer type | mold conveyance truck 50 can pass, the movement of a plurality of descending transfer type conveyance trolleys 50 becomes possible in the same passage.

In addition, as shown in FIG.23 (c), you may make it the passage width | variety for two falling transfer-type conveyance trolleys. Also in this case, not only the passage is blocked by the falling transfer material conveyance trolley 50a during carrying, but also the descending transfer material conveyance trolley which moves a passage from the opposite side of the falling transfer material conveyance trolley 50b and a passage | path in movement. Since 50c can move a channel | path simultaneously, conveyance efficiency can be improved.

(1) When the board | substrate 41 is accommodated in the sealed cassette 60, the board | substrate accommodated in the sealed cassette 60 by the conveyance trolley which does not have FFU regardless of the cleanliness of the installation clean room 100 ( 41 can be conveyed in the installation installation clean room 100.

Moreover, since the sealed robot accommodating clean room 80 is provided with a partition and FFU for maintaining the inside thereof at a set cleanliness, it becomes an independent clean room which maintains a set cleanliness.

Thus, after the sealed cassette 60 is brought into close contact with the sealed robot storage clean room 80, the sealed lid 61 is removed, and the cassette opening 82 of the sealed robot storage clean room 80 is opened. The board | substrate accommodated in the airtight cassette 60 can be carried in the sealed robot storage cleanroom 80 irrespective of the cleanliness of the installation installation cleanroom 100.

Therefore, since the cleanliness of the whole area of the installation clean room 100 can be reduced, the installation cost of the installation clean room 100 can be reduced. In addition, the running cost can also be reduced.

Moreover, since it is not necessary to provide an FFU in a conveyance trolley | bogie, the installation cost and operation cost by that much can be reduced.

That is, in the prior art, the full-range clean facility is operated so that the full-range cleanliness is a predetermined set cleanness of class 10 to class 100, but in the present invention, the full-range cleanliness is reduced to, for example, class 10 to class 100, It is also possible to lower class 100 to class 1000.

Further, this effect is also achieved in the case of the equipment including the front transfer carrier cart 55 and the close mechanism cassette cassette 75 as shown in the first embodiment, and the descending transfer carrier carrier 50 as shown in the second embodiment and It can also be obtained even in a facility employing the trolley storage-type cassette rack 70.

(2) The conveyance trolley | bogie 50 is the descending transfer material | carrying carriage 50 which mounts a cassette in the upper part, Furthermore, the cassette stand 70 accommodates the descending transfer material conveyance trolley 50 which mounts the said cassette in the inside of a cassette stand. If the cassette conveyance system which is the trolley | bogie type | mold cassette stand 70 which formed the space which can be made,

After the descending transfer-type conveyance trolley 50 moves to the inside of the trolley | bogie storage-type cassette stand 70, the cassette placed on the descending transfer-type conveyance trolley 50 is carried out by the lifting mechanism of the conveyance trolley which does not use a link arm. It can be carried on the retractable cassette rack 70.

Therefore, the link arm of the conveyance trolley which was conventionally required becomes unnecessary, the related motor, etc. become unnecessary, and the structure of the conveyance trolley becomes simple, the weight becomes light and can be miniaturized, and the installation cost of the conveyance trolley is reduced by that much. do.

Moreover, since only the lifting mechanism which does not use a link arm transfers a cassette from a conveyance trolley to a cassette stand, even if the board | substrate 41 becomes large and the weight of the board | substrate 41 increases, a cassette is carried out like conventionally. The center of gravity of the conveyance trolleys is shifted at the time of carrying, and the conveyance trolley is not unstable.

In addition, even when the substrate 41 is enlarged and the weight of the substrate 41 is increased, the center of the conveyance trolley is not shifted when the cassette is moved as in the prior art, so that the weight of the conveyance trolley 50 for stabilization. Since it is not necessary to increase this, the conveyance trolley | bogie 50 can also be used also in the installation installation clean room 100 with low internal weight of the floor.

Moreover, since the falling transfer material conveyance trolley 50 which concerns on this invention can be miniaturized, it can be reduced than the width | variety of the conventional conveyance trolley passageway, and the installation area of the installation installation clean room 100 can be utilized effectively. Therefore, even when the board | substrate 41 becomes large, the falling transfer material conveyance trolley 50 which concerns on this invention can pass through the width | variety of a conventional path | pass as mentioned later by (5).

(3) After the cassette 60 is brought into close contact with the hermetic robot storage clean room 80, the hermetic lid 61 is removed, and the cassette opening 82 of the hermetic robot storage clean room 80 is opened. Inside the equipment for carrying in and out of the board | substrate 41 accommodated in the airtight cassette 60, (2) the descending transfer material carrier trolley | bogie 50 which mounts a cassette in the upper part, and (3) the descending transfer material carrier trolley 50 which mounts the said cassette inside. When the trolley | bogie storage type | mold cassette stand 70 which provided the space to which it moves to is combined, in accordance with the fall of the cleanness of the whole area of the installation installation clean room 100, as mentioned later in (5), (a) conventional In the board | substrate of a size, the installation cost of a conveyance trolley can be reduced and a passage width can be reduced, and even if the board | substrate 41 becomes large, it can pass through the conventional passage width as it is, installation facility clean room We do not need expansion of (100).

(4) When the trolley | bogie storage cassette stand 70 is equipped with the filling mechanism 74 for the descending transfer material conveyance trolley | bogie 50, the descending transfer material conveyance trolley 50 is the inside of the trolley | bogie storage cassette stand 70 Since it is possible to charge the descending transfer-type conveyance trolley 50 when it moves to, it is not necessary to provide a space for installing the conveyance trolley during charging in the installation installation clean room 100. As a result, the installation area of the installation installation clean room 100 can be utilized effectively.

In addition, even when the substrate 41 is enlarged, since the space in which the conveyance cart during the conventional charging is provided can be used as the space to increase for the enlargement of the substrate 41, the expansion of the facility installation clean room 100 can be performed. I don't need it.

(5) Since the descending transfer-type transport trolley 50 moves to the inside of the trolley storage cassette base 70 and can be evacuated during the stop or to the inside to evacuate, the other descending transfer-type transport trolley 50 can pass through the passage. By the falling transfer-type conveyance trolley 50 which stops or evacuates, a passage | pass does not block, a conveyance efficiency can be improved and a passage width can be reduced compared with the past.

In addition, since the passage width of the conventional three shown in FIG. 7 (b) becomes the passage width of the two used using the present invention shown in FIG. 23 (c), even when the substrate 41 is enlarged, Since the passage width can be passed as it is, the installation of the facility installation clean room 100 is not required.

Claims (22)

After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to A process of closing the sealed lid by storing a substrate in a sealed cassette formed by a cassette body having an opening on one side and a sealed lid sealing the opening of the cassette body, wherein the sealed lid is freely detachable from the cassette body. and, Mounting the sealed cassette on a transport cart; Transferring the sealed cassette mounted on the transfer cart to a cassette stand so that the sealed lid faces the cassette opening provided in the sealed robot storage clean room; Contacting the sealed cassette to the sealed robot storage clean room; Opening the closing lid while closing the cassette opening; A process of carrying in and carrying out a substrate between a sealed cassette and a substrate processing apparatus by a substrate loading and unloading robot; Closing the closing plate at the same time as closing the sealing lid after the carrying-out of the substrate is completed; And conveying the sealed cassette from the cassette rack to the transport cart. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to A process of closing the sealed lid by storing a substrate in a sealed cassette formed by a cassette body having an opening on one side and a sealed lid sealing the opening of the cassette body, wherein the sealed lid is freely detachable from the cassette body. and, Mounting the sealed cassette on a front transfer carrier cart; Transferring the sealed cassette mounted on the front transfer carrier cart to a close-up mechanism cassette cassette such that the sealed lid faces the cassette opening provided in the sealed robot storage clean room; Contacting the sealed cassette to the sealed robot storage clean room; Opening the closing lid while closing the cassette opening; A process of carrying in and carrying out a substrate between a sealed cassette and a substrate processing apparatus by a substrate loading and unloading robot; Closing the closing plate at the same time as closing the sealing lid after the carrying-out of the substrate is completed; And a step of transferring the sealed cassette from the close mechanism cassette stand to the front transfer carrier cart. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to A process of closing the sealed lid by storing a substrate in a sealed cassette formed by a cassette body having an opening on one side and a sealed lid sealing the opening of the cassette body, wherein the sealed lid is freely detachable from the cassette body. and, Mounting the sealed cassette on a descending transfer-type transport cart; Transferring the sealed cassette mounted on the descending transfer-type transport cart to the trolley storage cassette stand so that the sealed lid faces the cassette opening installed in the sealed robot storage clean room; Contacting the sealed cassette to the sealed robot storage clean room; Opening the closing lid while closing the cassette opening; A process of carrying in and carrying out a substrate between a sealed cassette and a substrate processing apparatus by a substrate loading and unloading robot; Closing the closing plate at the same time as closing the sealing lid after the carrying-out of the substrate is completed; And conveying the sealed cassette from the cart-receiving cassette rack to the descending transfer-type transport cart. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to Storing the substrate in the cassette; Mounting the cassette on the descending transfer-type transport trolley, Moving the descending transfer-type transport cart on which the cassette is mounted to the inside of the trolley storage cassette base; Transferring the cassette mounted on the descending transfer-type transport trolley to a trolley storage cassette base; A process of carrying in and taking out a substrate between the cassette and the substrate processing apparatus by a substrate loading / exporting robot; And transferring said cassette from said cart-receiving cassette rack to a descending transfer-type transport cart. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to A process of closing the sealed lid by storing a substrate in a sealed cassette formed by a cassette body having an opening on one side and a sealed lid sealing the opening of the cassette body, wherein the sealed lid is freely detachable from the cassette body. and, Mounting the sealed cassette on a descending transfer-type transport cart; A process of moving the descending transfer-type conveyance truck equipped with the sealed cassette to the inside of the trolley storage cassette base; Transferring the sealed cassette mounted on the descending transfer-type transport cart to the trolley storage cassette stand so that the sealed lid faces the cassette opening installed in the sealed robot storage clean room; Contacting the sealed cassette to the sealed robot storage clean room; Opening the closing lid while closing the cassette opening; A process of carrying in and carrying out a substrate between a sealed cassette and a substrate processing apparatus by a substrate loading and unloading robot; Closing the closing plate at the same time as closing the sealing lid after the carrying-out of the substrate is completed; And conveying the sealed cassette from the cassette rack to the lower transfer carrier cart. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance method to Storing the substrate in an open cassette; Mounting the open cassette on a descending transfer-type transport cart; Moving the descending transfer-type transport cart equipped with the open cassette to the inside of the trolley storage cassette base; Transferring the open cassette mounted on the descending transfer-type transport trolley to a trolley storage cassette rack; A process of loading and unloading a substrate between the open cassette and the substrate processing apparatus by a substrate loading / exporting robot; And transferring said open cassette from said cart-receiving cassette rack to a descending transfer-type transport cart. The process of opening the sealing lid of a sealing cassette at the same time as opening the opening / closing board which closes the opening for a cassette installed in the sealed robot storage clean room of Claim 1, 2, 3, or 5, The sealing lid detachment apparatus The cassette conveyance method performed simultaneously by the. A cassette conveyance method in which a process of closing the closing lid and closing the closing plate of the sealing cassette according to claim 1 or 2 or 3 or 5 is performed simultaneously by the sealing lid desorption apparatus. The process of bringing the sealed cassette into close contact with the sealed robot storage clean room according to claim 1 or 2 is fixed by a clamp mechanism provided on the cassette rack of the close mechanism portion, and the sealed cassette is held by the slide mechanism. The cassette conveyance method which is a process of pushing in. The process of bringing the sealed cassette into close contact with the sealed robot storage cleanroom according to claim 1 or 3 or 5 is fixed by a clamp mechanism provided on the trolley storage cassette rack, and the slide cassette is held by the slide mechanism. Cassette conveying method which is a process of pushing in the sealed robot storage clean room. The descending transfer-type conveyance cart of Claim 3 or 4 or 5 or 6 moves to the inside of a trolley | bogie storage-type cassette stand, and is moved down from the filling mechanism provided in the said trolley | bogie-type cassette stand | seat while stopping. The cassette conveyance method which charges a trolley | bogie. A passage in which the descending transfer-type conveying bogie described in claim 3 or 4 or 5 or 6 moves to the inside of the trolley storage cassette stand and stops while another lowering transfer-type conveying bogie is adjacent to the trolley storage cassette stand. Cassette conveying method passing through. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance system A sealed cassette formed by a cassette body having an opening on one side and a sealed lid for sealing an opening of the cassette body, wherein the sealed lid is freely detachable from the cassette body; A conveyance trolley which mounts the said airtight cassette which accommodated the board | substrate, A cassette stand on which a sealed cassette is placed, A substrate import and export robot for carrying in and out of a substrate; A sealed lid detachment device for detaching the sealed lid from the cassette body; The board carrying in / out robot and the said airtight lid detaching apparatus are installed inside, and the board carrying in / out robot has a cassette opening for carrying in and out of a board | substrate from a cassette, and the opening for a substrate processing apparatus through a substrate processing apparatus. A sealed robot storage clean room covered with a partition and provided with a fan filter unit (FFF); An opening and closing plate for opening and closing the opening for the cassette, The airtight lid is placed on the cassette stand so as to face the opening for the cassette, The sealing lid detaching device detaches the sealing lid from the cassette body through the cassette opening; A cassette conveyance system, in which the substrate carrying-out robot carries in and takes out a substrate accommodated in a sealed cassette through the cassette opening. The cassette conveyance system of Claim 13 whose conveyance trolley | bogie is a forward transfer type | mold conveyance trolley, and a cassette stand is a cassette stand of a close_contact | adherence mechanism part. A cassette conveyance system according to claim 13, wherein the conveyance cart is a descending transfer-type conveyance cart, and the cassette bill is a cart-receiving cassette bill. After carrying the cassette which stored the board | substrate in the conveyance trolley and conveying it to the cassette stand adjacent to the robot storage clean room in which the board | subject carrying-out robot was installed, the board | substrate carrying-out robot takes in and takes out a board | substrate between a cassette and a substrate processing apparatus. In the cassette conveyance system A cassette for storing the substrate, A descending transfer material type carriage for mounting the cassette containing the substrate; A trolley storage-type cassette rack having a space for moving the descending transfer-type transport trolley to the inside; A substrate import and export robot for carrying in and out of a substrate; The cassette conveyance system which installs the said board | substrate carrying in-out robot inside, and provides the robot storage clean room provided with a fan filter unit (FFF), and conveys it. A cassette conveyance system according to claim 16, wherein the cassette is a hermetic cassette, and the robot storage clean room is a hermetic robot storage clean room having a fan filter unit (FFF) provided therein with a substrate carrying-in / out robot. A cassette conveyance system according to claim 16, wherein the cassette is an open cassette, and the robot storage clean room is an open robot storage clean room in which a robot for carrying in and out of a substrate is provided therein and equipped with a fan filter unit (FFF). The cassette conveyance system which supports the opening-and-closing board which opens and closes the cassette opening of the sealed robot storage clean room by the sealed lid removal apparatus of Claim 13. A cassette conveyance system in which the sealed lid detachment apparatus according to claim 13 opens and closes the cassette opening of the sealed robot storage clean room and detaches the sealed lid from the cassette body. The cassette conveyance system provided with the clamp mechanism which fixes the sealed cassette of the cassette stand of Claim 13, and the slide mechanism which slides the said sealed cassette. The cassette conveyance system provided with the trolley | bogie storage type | mold cassette stand of Claim 16 provided with the filling mechanism for descending transfer type | mold conveyance trolley | bogies.