TW539817B - Sealing device, processing apparatus employing the sealing device, and low flow rate control device - Google Patents

Abstract

This invention provides a sealing device that prevents liquid from leaking out of a wall side when the axle that is disposed to extend through the wall by the liquid. The sealing device comprises: a housing (29) having one end face connected in an air tight manner to the external face of the wall and formed with a through hole, the through hole extending through an end of a transfer roller (5) that is inserted through a through hole (8) formed in the wall of the housing; a gas supplying passage (42) for supplying gas to a first space (51) between the external surface of the axle at an end face side of the housing and the internal surface of the through hole; a liquid supply passage (43) for supplying liquid to the space between the external surface of the axle at the other end face side of the housing and the internal surface of the through hole; and first to third sealing members (38) to (40) arranged in the first and second spaces, and sealing a portion located inside the spaces of the axle, as well as enabling the gas supplied from the gas supply means flowing toward and out of an end face of the housing by virtue of the liquid supplied from the liquid supplying means.

Description

539817 A7 V. Description of the invention [Detailed description of the invention] [Technical scope] The present invention relates to a sealing device for sealing a shaft body inserted in a through hole of a wall body, for conveying a substrate and processing it with a processing liquid. The processing device used for the aforementioned sealing device, and the micro flow control device for controlling the liquid flow. [Conventional Technology] In manufacturing steps such as a liquid crystal display device or a semiconductor device, there are a step of subjecting a glass substrate or a semiconductor wafer for liquid crystal as a substrate to an etching treatment 'and a peeling treatment of an insulator layer. This substrate processing step is a single sheet method in which substrates are transported and processed one by one. When a substrate is processed by a single sheet, a processing apparatus that sprays a processing liquid from a shower nozzle while processing the substrate while conveying the substrate is known. The processing apparatus has a processing tank in which a plurality of transfer rollers that are freely rotating and serving as a shaft are provided at predetermined intervals along the transport direction of the substrate, and the transfer rollers are driven to rotate to transport the substrate. Both ends of the delivery report are protruded to the outside by through-holes formed on both side walls of the processing tank, and each of the protrusions is supported by a bearing body and is rotatable. A transmission gear is provided at one end of the conveying roller, and the transmission gear is meshed with a driving gear which is driven by the driving source for rotation. Thereby, the substrate supplied into the processing tank is conveyed in a predetermined direction by the aforementioned conveyance. After the processing liquid is sprayed on the substrate transferred by the aforementioned transfer roller, the processing liquid is filled in a processing tank like a king, and a chemical solution such as an etching liquid or a peeling liquid is used as the processing liquid. Therefore, for example, when using corrosive liquid, the paper size will be in accordance with Chinese National Standard (CNS) A4 specification (210X297 public love) 4 (Please read the precautions on the back before filling this page) 1 Pack | •, \ t ^ —

Corrosion of metals and deterioration of the working environment must be prevented from flowing out of the treatment tank. The place where the treatment liquid may flow out of the treatment tank is used for carrying in and carrying out, the moving of the soil plate, the carrying out 'and the holes that pass through the two ends of the carrying roller. The aforementioned loading and unloading openings are controlled by a shutter switch to prevent the processing fluid from coming out and the through-hole just mentioned is provided with a sealing device for sealing at the aforementioned transporting roller 'to prevent the processing fluid from flowing out. As a sealing device for sealing a shaft body driven by a square rotary drive, a mechanical seal is known. However, mechanical seals are complicated in construction and expensive, so when most of the handling tanks for lesbian handling clothes are transported to Xingkun, the cost of the entire equipment will increase significantly. Therefore, a liquid-type sealing device has been conventionally used, that is, a liquid portion is provided between the inner surface of the 'Lish 谕 through-shaped inner peripheral surface and the outer peripheral shaft of the shaft body to provide liquid to seal the shaft. The rotating part of the body. [Problems to be Solved by the Invention] According to the sealing device used to seal the shaft body with a liquid, the aforementioned shaft body can be surely sealed with a relatively simple and inexpensive structure. However, the liquid supplied to the space between the inner peripheral surface of the insertion hole of the outer casing and the outer peripheral surface of the shaft body flows out of the outer casing, flows along the axial direction of the shaft body, and flows into the processing tank. When the processing liquid used in the processing tank is an expensive product such as a corrosive liquid or a stripping liquid, the processing liquid is recovered and reused. At this time, the processing liquid recovered from the processing tank is mixed with the liquid that has flowed into the processing tank from the sealing device, and the use of the processing liquid is limited. This paper size applies Chinese National Standard (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

V. Description of the invention '^ This Maoming system provides a tiny flow control ^ When sealing the shaft, you can produce the device, and the straw liquid is dense .... "-----: ------- _Equipment-(Please read the precautions on the back before filling this page) In order to make sure the seal is not sealed, the seal must be used, and the seal is used; Device and the processing device using the device, and the sealing device, and the sealing device can be improved [method for solving the problem] wall body = continuous sealing device 'system_ seal is formed by the shaft body with a large, large, It is characterized in that the cymbal device includes a housing, the end surface of which is in sealing engagement with the outer surface of the wall body, and has a through hole formed thereon, that is, a person who inserts the shaft body penetrating through the through hole; The supply mechanism m supplies gas to the space between the outer peripheral surface of the shaft body on the end surface side of the casing and the inner peripheral surface of the insertion hole; the liquid supply mechanism is used to supply liquid to the other end surface of the casing. The side describes the space between the outer peripheral surface of the shaft body and the inner peripheral surface of the aforementioned insertion hole; The mechanism is provided in a space portion between the inner peripheral surface of the insertion hole and the outer peripheral surface of the shaft body, and a portion located in the space portion of the shaft body is sealed by the liquid supplied by the liquid supply mechanism, And the gas supplied by the gas supply mechanism is caused to flow out toward one of the end faces of the casing. The invention of claim 2 is a sealing device such as the item 1 of the scope of patent application, wherein the gas supply mechanism is provided relative to the gas supply mechanism of the casing. The paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 539817 A7 " '-------- B7__ V. Description of the invention (' 4 1 ~ ~ If it is useful, it is not due to the foregoing The liquid discharge flow 2 of the liquid supplied by the liquid supply mechanism. The liquid discharge path is provided with a nozzle member that retains the liquid in the discharge μ path by the viscosity of the liquid, and has a pore that discharges the liquid by a capillary phenomenon. The invention of claim 3 is the sealing device according to item 丨 of the scope of patent application, wherein the aforementioned sealing mechanism is formed by the ring-shaped first to third sealing members and the first to third bees are first to third. The sealing member may partition a space portion between the inner peripheral surface of the insertion hole and the outer peripheral surface of the milk body into a first space portion supplied with gas by the gas supply mechanism, and a second space portion supplied with liquid by the liquid supply mechanism. The space device. The invention of claim 4 is the sealing device of claim 3, wherein the first sealing member is located on the end face side of the casing, and the third sealing member is located on the other side of the casing. The second sealing member is located between the first sealing member and the third sealing member on the end surface side, and the second sealing member and the outer peripheral surface of the shaft body are provided between the second sealing member and the outer peripheral surface of the shaft body. The liquid flows into the narrow space of the aforementioned first space portion. The invention of claim 5 is the sealing device of the scope of patent application, wherein the portion corresponding to the aforementioned first space portion of the housing is formed to discharge the second space. A liquid discharge flow path for the liquid in the i-th space part is flowed in, and a nozzle member is formed in the liquid discharge flow path to form a fine hole for restricting liquid discharge. The invention of 凊 Pregnancy 6 is a processing device that transports substrates to a predetermined direction for processing, and is characterized in that the processing device includes the paper size applicable to the Chinese National Standard (CNS) A4 specification (2) 0 × 297 mm) ( (Please read the notes on the back before filling out this page)

,; The substrate has a carrying inlet at one end in the carrying direction, and a carrying outlet, and the corresponding through-holes are formed at predetermined intervals on the opposite wall body in the direction intersecting the carrying direction; The conveying direction of the substrate is arranged in the 々θ at predetermined intervals, and both ends of the substrate protrude outward from the through-holes formed in the -s wall body; and the bearing body is supported by the through of the processing tank. The two ends of the shaft body protruding from the hole can be rotated separately; and the device system is also the outer surface of the wall body and is used to seal the end portion of the shaft body protruding from the through hole, 1 The sealing device is constituted as item i in the scope of patent application. The invention of item 7 of the month is the processing device of item 6 in the scope of patent application, wherein the end of the shaft is provided with a transmission gear, and the transmission gear is engaged with the driving gear that is driven by the driving source to rotate ... the aforementioned liquid The supply mechanism is provided with a liquid supply tank; the liquid supply pipe is used to supply the liquid in the liquid supply tank to the "portion" between the insertion hole of the housing and the outer peripheral surface of the shaft body; an overflow pipe 'It is used to maintain the liquid level of the aforementioned liquid supply tank' and the tank, which is provided to the sloping part of the transmission gear and the drive gear, and stores the liquid discharged from the overflow pipe to > The slippery part refers to the engaging part of each gear. For the invention of item 8 of the month, such as the processing device of the scope of patent application item 7, the aforementioned liquid supply pipe in the basin is provided on the outer peripheral surface ««, and can be lowered; Those who adjust the flow of liquid in the liquid supply tank to adjust the flow rate of the liquid to the space. V. Description of the Invention The second method is a small flow control device, which is set on the liquid body and the body. Flow adjustment construct The flow adjustment states that the spiral surface is formed on the surface of the handle, and that the outer peripheral surface contacts and is pressed into the inner peripheral surface of the front a & body, and the clothes are moved ^ ^ 使 / ;, L According to the present invention, the liquid in the pipe body flows along the aforementioned spiral groove. According to the present invention, the liquid is supplied to the space portion between the inner peripheral surface of the insertion hole of the housing and the outer peripheral surface of the shaft body, and is more than the liquid in the space portion. The gas is supplied to the space near the wall, so the gas can be used to restrict the flow of the liquid. [Embodiments of the invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The plan view of the schematic structure of the processing device of the present invention, FIG. 2 is a longitudinal sectional view. The aforementioned processing device has a processing tanker. 工 The processing tank 1 is box-shaped, and a port 2 is formed on one end surface. The other end surface is formed with a carrying-out port 3. The substrate taken in from the carrying-in port 2 is transferred to the carrying-out port 3 by a carrying device described later, with a shower not shown in the figure above or below the substrate W. Nozzle sprays corrosive or stripping fluid In addition, the carrying inlet 2 and carrying outlet 3 are opened and closed by shower nozzles (not shown), and are closed except for carrying in and carrying out the substrate W. This prevents the air in the processing tank 1 from being carried in by the foregoing. The port 2 or the conveying port 3 leaks to the outside. The conveying device includes a plurality of conveying rollers 5 arranged in parallel at predetermined intervals along the conveying direction of the substrate W as a shaft body. Both ends of the conveying roller 5 are formed in a penetrating manner. One of the aforementioned treatment tanks 1 is opposite to the through hole 8 of the side wall 7 and the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love)

539817 A7 ------—__ ^ ________ V. Description of Invention (7) Out of the outside world. Each of the machine rooms 9 is partitioned on the outer side of the side wall 7, and both ends of the conveying roller 5 in the machine room 9 are supported and rotatable by a bearing body. The portion penetrating the through hole 8 of the side wall 7 of the transfer roller 5 is sealed by a sealing device 13 as described later. The support rings 14 formed by the above-mentioned conveying roller 5 by salting ethylene are arranged at predetermined intervals in the axial direction. As shown in Figs. 11A to 11C on the support ring 14, a part of the cutting portion 15 in the circumferential direction is formed at an angle θ 'of about 45 degrees in this embodiment. Therefore, even if the support ring hopper is made of salted ethylene, it can easily adhere to the outer peripheral surface of the conveying roller 5 after the diameter expansion. A resin-made transmission gear 17 is embedded in one end portion of each of the transfer rollers 5. Each transmission gear 17 meshes with a driving gear 18 also made of resin. The driving gear 18 is located below the transmission gear 17 in the radial direction. Most of the driving gears 18 make the aforementioned transport roller 5 perpendicular to the axis, and are fitted with a driving shaft 19 which is rotatably provided. The drive shaft 19 is provided with a transmission pulley 21, and the machine room 9 is provided with a drive motor 22 as a drive source. The rotation axis of the driving motor 22 is coupled to the driving / moon wheel 23. A belt 24 is wound around the driving pulley 23 and the driving pulley 21 described above. Therefore, the drive motor 22 is operated and the transmission gear 17 is rotated via the drive gear 18, so that the transfer roller 5 provided with the transmission gear 17 is also rotated accordingly. Thereby, the substrate w carried in from the carrying inlet 2 of the processing tank 丨 is carried to the carrying outlet 3. A lubricating groove 25 is provided below the driving gear 18, and a part of the driving gear 18 is immersed in pure water supplied from a lubricating groove described later. Therefore, the engaging part of the driving gear 18 and the transmission gear 17 is moistened with pure water. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). 10 (Please read the notes on the back ^ before filling this page) _ , ^ Τ— € 丨 539817

The sealing device 13 is provided with a housing 29 as shown in FIG. 3, that is, an insertion hole for inserting an end portion of the conveying roller 5. The outer portion is such that the insertion hole 28 faces the through hole 8 penetrated by the side wall 7, and the thin sealing ring 31 has one end surface fixed to the outer surface of the side wall 7. The end of the conveyance report 5 protruding from the aforementioned through hole 8 is inserted into the aforementioned insertion rail 28 having a larger diameter than the conveyance. The front end of the front shell 29 is provided with an inner diameter smaller than the insertion hole 28 across the entire perimeter and a protrusion 32 'larger than the shape of the moving seam 5. The other end face is installed and fixed. Dimensional ring-shaped cymbal member 33. A step portion 34 is formed on the inner peripheral portion of the inner surface of the cymbal member 33. A first flange 36 and a second flange 37 are provided in a portion between the protrusion 32 and the cymbal member% of the insertion hole 28. Peripheral grooves 36a, 37a are formed on the outer peripheral surface of each flange 36, 37. As shown in FIG. 4, the first flange 36 is formed with four through holes 36b at equal intervals in the circumferential direction, and the second flange 36 As shown in Fig. 5, there are eight through holes 37b formed at equal intervals in the circumferential direction. An annular j-th seal member 38 is provided between the protruding end 32 and one end face of the first flange 36, and between the other end face of the first flange 36 and one end face of the second flange 37 An annular second sealing member 39 is provided. Further, an annular third sealing member 40 is provided on the other end surface of the second flange 37 at the section portion 34 located in the cymbal member%. The inner peripheral surface of the first sealing member 38 is in close contact with the outer peripheral surface of the conveying roller 5. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 11 ------- • installation ... .......... (Please read the precautions on the back before filling this page) Order — 539817 V. Description of the invention (9 2 The outer peripheral surface forms a small diameter smaller than the insertion hole 28 of the housing 29, which is easy to expand toward The pinching direction moxibustion opening and sealing member 39 is set to have an inner diameter dimension with a small gap between the inner peripheral surface and the outer peripheral surface of the transporting parent 5. The outer casing 29 is in the same manner as the outer groove 36a of the p flange 36. A gas supply flow path 42 is formed at a corresponding position, and a liquid supply flow path 43 is formed at a position corresponding to the peripheral groove 37a of the second flange 37. As shown in FIG. 6, the gas supply flow path 42 and the gas supply The other end of the tube 44 is connected. The other end of the gas supply tube 44 is connected to one of the plurality of supply holes 46 formed in the manifold 45. The other supply holes 仏 are connected to the gas supply tubes of the other sealing devices 13. Continuation of phase 44. The air gas from the gas supply source (not shown) in the current collecting cavity 45 passes power generation. The regulator 47 is supplied at a predetermined pressure, such as the center of the earth. Therefore, air is supplied to the gas supply flow path 42 of the sealing device 13 from each supply hole 牝 of the manifold 45, and the gas supply flow path 42 passes through the first ^ The through hole 36b of the flange 36 flows into the space portion partitioned by the first and second seal members 38 and 39 between the outer peripheral surface of the borrow roller 5 and the insertion hole 28. This space portion is used as the first space Section 51. As described above, the liquid supply flow path 43 is connected to one end of the liquid supply pipe 52. The other end of the liquid supply pipe 52 is connected to one of the plurality of supply holes 54 provided in the liquid supply tank 53. Others The supply hole 54 is connected to the liquid supply pipe 52 of the other sealing device 13. The liquid supply tank 53 is connected to a main water supply pipe 55 for communicating with a pure water source (not shown) via a valve 55a. In the liquid supply tank As shown in Figures 8 and 9 within 53, place the overflow pipe 56 with its one end face at a predetermined height. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love) (Please read the precautions on the back first) (Fill in this page again.)-· 装-C ------- 539817 A7 _____ ___ B7 5. It is provided according to the description of the invention (10). The other end surface of the overflow pipe 56 is connected to one end of the i-th water guide pipe 71. Pure water supplied from the main water supply pipe 55 to the liquid supply tank 53 The liquid is supplied to the liquid supply flow path 43 of the sealing device 13 through the liquid supply pipe 52. The pure water supplied to the liquid supply flow path 43 flows into the outer peripheral surface of the borrow roller 5 through the through hole 37b of the second flange 37 and In the space portion partitioned by the second and third sealing members 39 and 40 between the insertion holes 28. This space portion is referred to as the second space portion 61 ° As shown in FIG. 7, the liquid level of the liquid supply tank 53 is maintained at a predetermined height by the overflow pipe 56. Therefore, the pressure of the pure water supplied from the liquid level supply tank 53 to the second space portion 61 through the liquid supply pipe 52 does not exceed the water head shown by Η in the same figure. Further, the liquid supply pipe 52 is provided with a flow rate adjusting member 62, that is, a device for adjusting the flow of pure water flowing through the liquid supply pipe 52 under the pressure of a water head. This flow rate adjusting member 62 is a cylindrical member having a spiral groove 63 formed on the outer peripheral surface thereof as shown in Fig. 10 and pressed into the middle portion of the liquid supply pipe 52 described above. Therefore, the liquid flowing from the liquid supply tank 53 to the liquid supply pipe 52 flows in the spiral of the outer peripheral surface of the flow rate adjusting member 62 whose cross-sectional area is very narrow compared with the supply pipe 52 and the flow path length is relatively long. In the groove 63, a small amount of pure water is dropped into the second space portion 61 at a fixed amount through the liquid supply flow path 43 of the sealing device 13. In addition, the flow rate adjusting member 62 is made of a flexible synthetic resin having a liquid supply pipe 52, so that it can be easily pressed into the liquid supply pipe 52. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). ) 13 (Please read the notes on the back before filling this page)

539817 A7 s ----: ---_ B7 _ V. Description of the invention (U) '"-= Bu Liquid supply pipe 52 is not made of synthetic resin, but is a metal W product such as sintered copper, so it can also be pressed in The aforementioned flow adjustment member ⑽. The pure water dripped from Yudi 2 space portion 61 is retained in the first space portion 6b and flows into the β interval portion 5b through the inner peripheral surface and the outer peripheral surface of the second sealing member 39. Further, the second sealing member 39 The two sides and the first! The contact portions of the end faces of the second flange% and 37 are also immersed in water. Then, the casing 29 of the sealing device 13 is formed at a portion 'corresponding to the i-th space portion 51' with its-end communicating with the aforementioned insertion hole 28, and the other end being opened below the outer member 29 to drain the liquid flow path. 65. This liquid discharge flow path is screwed with the nozzle member 67 through which the fine hole 66 is passed. The pure water that has flowed into the first space portion 51 drips the drain flow path 65 from the space portion 51. The pores of the nozzle member 67 provided in the liquid discharge flow path 65 are those having a small inner diameter size that prevents pure water from flowing out immediately due to the viscosity of the pure water. Therefore, pure water stays in the aforementioned fine holes 66 and the upper surface of the nozzle member 67, and flows out of the aforementioned fine holes 66 as if they are oozing out by the capillary phenomenon. That is, the pores 66 of the nozzle member 67 are closed by pure water, so that the gas supplied to the i-th space portion 51 does not flow out through the pores 66 described above. Thereby, the first space portion 51 and the second space portion 61 are hermetically separated from each other by the flow of pure water. Therefore, the gas supplied from the gas supply pipe 44 to the first space portion 51 through the gas supply flow path 42 hardly flows to the second space portion 61 and passes through the inner peripheral surface of the first sealing member 38 and the conveyance roller 5. The gap between the outer peripheral surfaces flows into the processing tank from the through hole 8 formed in the side wall 7 of the processing tank. Therefore, by the flow of the gas, the air in the processing tank 丨 is prevented from leaking out of the outside through the through hole 8. This paper size applies to China National Standard (CNS) A4 (2K) × 297 mm

^^ 装 ----- (Please read the precautions on the back before filling this page)

• ， 可 I 539817 A7 B7 V. Description of the invention (_ 12) — ^ Moreover, because the gas flows in the first space portion 51, the pressure in the space portion 51 rises to the same level as the supply pressure of the gas. On the one hand, the pure water supplied to the second space portion 61 is a small amount. Therefore, even if pure water penetrates the first space portion 51 from the second space portion 61, the pure water does not pass through the gap between the first sealing member 38 and the transfer roller 5 by the pressure of the gas supplied to the first space portion 51. While leaking to the outside of the processing tank 1. On the other hand, the pure water flowing in the overflow pipe 56 provided in the liquid supply tank 53 passes through the water guide pipe 71 as shown in FIG. 6 and flows into the drive gear 18 for driving the conveying roller 5 to rotate. Inside the lubricating groove 25 provided below. The lubricating tank 25 also supplies pure water through a second water pipe 72 connected to one of the supply holes 54 of the liquid supply tank. A flow rate adjusting member 62 for reducing the liquid flow rate is provided in the middle of the second water guide pipe 72 in the same manner as the liquid supply pipe%. With the processing device thus constructed, both ends of the protruding through-hole 8 formed by the side wall 7 of the processing tank 丨 of the transfer roller 5 are sealed by the sealing device 13. The i-th space portion 51 and the second space portion 61 are formed inside the housing 29 of the sealing device 13 by partitioning from the third through the third sealing members 38 to 40. Gas is supplied to the first space port P 5 1, and pure water is supplied to the second space portion 6 丨. The first space portion $ 1 is located closer to the side wall 7 of the processing tank 丨 than the second space portion 61. The pure water system uses the flow adjustment member 62 provided in the liquid supply pipe 52 to make the flow rate small, and the reduced body pressure is much higher than the pure water pressure. In this embodiment, the force is about 2 kg / cm2. This is because the pure water supplied by the second space portion 61 flows into the gap between the inner peripheral surface inside the second and third sealing members 39 and 40 and the outer peripheral surface of the conveying roller 5, so that this paper size applies the Chinese national standard (OJS ) Α4 specifications (2) 0χ297 public Chu) ^^ equipment ----- (Please read the precautions on the back before filling out this page)-,? Τ--line-15 539817 A7 _____B7 V. Description of the invention (· 13 ) The outer peripheral surface of the transfer roller 5 is sealed. Then, the gas supplied from the i-th space portion 51 passes through the gap between the inner peripheral surface of the first sealing member 38 and the outer peripheral surface of the conveying member 5, and flows into the processing tank 丨 through the through hole 8 of the side wall 7 of the processing tank 1. Therefore, in such cases, it is possible to prevent the air containing the corrosive liquid in the form of smoke from leaking out of the processing tank 丨 through the through hole 8 in the processing tank 丨 At the same time, the pure water supplied by the second space portion 61 is a small amount Moreover, since the i-th space portion 51 provided on the wall side 7 supplies more gas than the second space portion 61, the pure water can be prevented from being transferred from the first space portion 51 to the outer peripheral surface of the conveying roller 5 and flowing into the processing tank 1 within. Therefore, when the treatment liquid used in the treatment tank 1 is recovered for reuse, it is possible to prevent the recovered treatment liquid from being deteriorated by containing pure water, so that the treatment liquid can be reused for a long period of time. The pure water dropped in the second space portion 61 penetrates the first space portion 51 through the gap between the second sealing member 39 and the conveying roller 5, flows in the drain flow path 65 formed by the space portion 51, and stays there. Here again, the capillary phenomenon penetrates through the pores 66 of the nozzle member 67 and is discharged. Therefore, the pure water used to seal the conveying roller 5 will be excessively retained in the first space portion 51 and will not pass through the first! The sealing member 38 flows to the processing tank 1 side. The inner diameter of the pores 66 described above is very narrow. The pores 66 are blocked by the viscosity of pure water. Therefore, the gas supplied from the first space portion 51 is prevented from flowing out through the pores 66. By this, the aforementioned gas is removed by the first! The sealing member 38 flows out into the processing tank 1 and prevents the air in the processing tank 1 from flowing into the sealing device 13 side. Further, supply some pure water with a pressure of approximately 0 to the second space unit 61. This paper size is in accordance with China National Standard (CNS) A4 specifications (210X297 public love) 16 (Please read the precautions on the back before filling this page ）. · 装 | Order-C ------- 539817 A7 B7 V. Description of the invention (M uses pure water for liquid sealing, so it can be formed by using not only a very small amount of pure water, but also because of pure water The use amount is small, so that the pure water is transmitted to the conveying roller 5 and difficult to flow into the processing tank 1. In addition, most of the pure water supplied by the sealing device 13 keeps the head of the liquid supply tank 53 constant, and passes the same flow adjustment member 62 is supplied, so that the same amount of pure water can be supplied to each sealing device 13. Because the head of the liquid supply tank 53 for supplying pure water to the sealing device 13 is kept constant, an overflow pipe 56 is provided in the liquid supply tank 53 The overflowing pure water flows from the overflow pipe 56 to the lubrication groove 25, so that the driving gear 17 and the driving gear 18 of the driving conveying roller 5 act due to the lubrication of the water. Therefore, 'not supplied to lubricate the driving gear 丨 7 It can be completed with special pure water of driving gear 丨 8 It can reduce the amount of pure water used. [Effect of the invention] According to the invention as described above, the liquid used to seal the shaft can be prevented from flowing out from one end face side of the external device, and the gas flowing out from one end face side of the casing. 'It can prevent the air inside the wall body from leaking out through the through hole of the wall body penetrated by the shaft body. And because it is a sealed structure using liquid and gas, it is possible to reduce the cost of the structure early. [Figure Brief description of the formula] Fig. 1 is a plan view showing a partial cross-section of a processing device according to an embodiment of the present invention. Fig. 2 is a longitudinal cross-sectional view of a processing device. Fig. 3 is a cross-sectional view of a sealing device. It is a cross-sectional view according to line 4-4 in Figure 3. This paper size applies the Chinese National Standard (CNS) A4 specification (2〗 0 × 297 mm) 17 (Please read the precautions on the back before filling this page) Order · C -539817 A7 B7 V. Description of the Invention (15) · Figure 5 is a cross-sectional view taken along line 5-5 of Figure 3. Figure 6 is a piping system diagram of gas and pure water. Figure 7 shows a liquid supply tank and seal An illustration of the height difference of the device. FIG. 9 is a plan view of a liquid supply tank. FIG. 9 is a cross-sectional view of an overflow pipe installation portion of the liquid supply tank. FIG. 10 is a cross-sectional view showing a flow rate adjusting member provided in the liquid supply pipe. Plan view of the support ring of the roller. Figure 11 is a front view of the support ring provided on the transfer roller. Figure 11C is a longitudinal sectional view of the support ring provided on the transfer roller. (Please read the precautions on the back before filling in this Page) ^^ Binding | Order — -line | This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 18 539817 A7 B7 V. Description of the invention (l6 Component label comparison 1 ... Processing tank 2. & quot Carrying in. 3. Carrying out 5 ... Carrying roller 7 ... Side wall 8. Through-hole 9. Machine room 13. Sealing device 14. Support ring I5 ... Cut-off part 17. .. drive gear 18... Drive gear 19... Drive shaft 21... Drive pulley 22... Drive motor 23... Drive pulley 24... Belt 25... Lubrication groove 28.. L 29 ... housing 3 1 ... sealing ring 32..protrusion 33 .. 锷 member 34 ... section 36, 37 ... flange 36a '37a " Xibu Zhougou 36b, 37b ... pass 38 ~ 40 ... sealing member 4 2 ... gas supply flow path 43 ... liquid supply flow path 44 ... gas supply pipe 45 ... collection chamber 46, 54 ... supply hole 47 ... generator adjustment Device 51 ... first space portion 52 ... liquid supply pipe 53 ... liquid supply tank 55 ... main water supply pipe 56 ... overflow pipe 61 ... second space portion 62 ... flow rate adjusting member 6 5 ... row Overflow path 66 .. I. Field L. 67 ... Nozzle members 71, 72 ... Aqueduct (please read the precautions on the back before filling out this page) Installation — ▼ 线 | This paper size applies to Chinese national standards (CNS) A4 size (210X297 mm) 19

Claims (1)

The "sealing device" is used to seal the vehicle body protruding from the through hole formed in the wall. It is characterized in that the sealing device includes: a casing, an end surface of which is in sealing engagement with the outer surface of the wall body, and forms There is an insertion hole ', and the shaft body penetrating the through hole is inserted into the insertion hole; >' ..., the outer peripheral surface of the shaft body and the insertion hole are described in one end face 1 of the button muscle bottle The space part between the inner peripheral surface of the inner surface; the mountain liquid supply mechanism is used to supply liquid to the outer peripheral surface of the shaft body and the inner peripheral surface of the insertion hole; The body and sealing mechanism is provided in a space portion between the inner peripheral surface of the insertion hole and the outer periphery of the shaft body, and seals the inside of the space portion of the shaft body with the liquid supplied by the liquid supply mechanism. In some cases, the gas supplied by the gas supply mechanism is directed toward the outer-end face side of the outer surface. • Machine only 1j, the sealing device of the scope of application for patent item i, where the aforementioned gas supply mechanism is arranged relative to the aforementioned evening shell, forming a drainage flow path for discharging the liquid supplied by the poetry: liquid supply mechanism The liquid discharge flow: a nozzle member provided with a pore that discharges the liquid by capillary phenomenon in the liquid discharge flow path due to the viscosity of the aforementioned liquid, such as the sealing device in the first scope of the patent application, wherein the aforementioned seal 4 is formed by the ring-shaped first to third sealing members, and the third sealing member described in the first one can separate the space between the inner peripheral surface of the aforementioned insertion hole and the outer peripheral surface of the aforementioned gas and patent applications. The first space part of the separator, and the person who supplies the gas space part from the former gas supply mechanism. Nocturnal body supply mechanism No. 2 4. If the item 3 in the scope of the patent application is located in the first casing of the aforementioned housing, the first sealing structure is located on the front side, and the third sealing member is located in the The second sealing member is located between the first sealing member and the third sealing member, and the second sealing member is located between the second sealing member and the third sealing member, and the second sealing member is between the second sealing member and the outer peripheral surface of the shaft body. A person having a narrow gap where the liquid supplied to the second space portion flows into the first interval portion is shown. 5. The sealing device according to item 4 in the patent scope, wherein a portion corresponding to the first space portion of the housing described above is formed with a drainage flow path for discharging liquid flowing from the second space portion into the first space portion, In addition, there is a nozzle member for forming a pore to limit the discharge of the liquid in the liquid path δL. 6. · A processing device for transporting substrates to a predetermined direction and processing them, characterized in that the processing device includes: a processing tank having a carrying inlet at one end in the carrying direction of the substrate, and a carrying outlet at the other end And a through-hole corresponding to a predetermined interval is formed on a pair of wall bodies intersecting the aforementioned conveying direction; the shaft body is arranged in the processing tank at a predetermined interval along the conveying direction of the substrate, and Both ends are protruded outward by through-holes formed in the aforementioned pair of wall bodies; 21 This paper size applies the Chinese National Standard (CNS) M specification (21〇) < 297 Gongchu) 6. Scope of patent application, Shaft.Bearing body 'supports the two ends of the shaft body protruding from the through holes of the treatment tank and can be rotated separately. The sealing device is provided on the outer surface of the wall body and is used to seal the shaft body. The end protruding from the through hole is either. In addition, the aforementioned bribe device "specially constitutes the seventh W. The processing device according to item 6 of the scope of patent application, wherein one end of said shaft body is provided with a transmission gear, and said transmission gear is rotationally driven by a driving source. The driving gear is engaged with each other. The liquid supply mechanism includes: a liquid supply tank; and a liquid supply officer for supplying liquid from the liquid supply tank to the insertion hole of the housing and the outer peripheral surface of the shaft body. The overflow part is used to keep the liquid level of the aforementioned liquid supply tank constant; and the lubrication tank is set to face the engaging portion of the transmission gear and the drive gear 'and is stored by the aforementioned overflow pipe The discharged liquid is used to lubricate the meshing parts of the aforementioned gears. 8 · ^ Application. The processing device of Zhuanzhuanwei Item 7, wherein the aforementioned liquid supply department is provided with a spiral groove formed on the outer peripheral surface, and the aforementioned liquid supply can be reduced. The liquid pressure of the tank is to adjust the flow rate of the liquid to the aforementioned space. The U / guari control device is installed in the pipe body where the liquid flows, and is controlled by the flow adjustment member. The flow adjustment member has a spiral groove formed on the outer peripheral surface, and the outer peripheral surface contacts and is pressed into the inner peripheral surface of the pipe body, and the liquid flowing in the pipe body flows along the spiral groove.