528856 A7 B7 五、發明説明（1 ) 【技術領域】 (請先閱讀背面之注意事項再填寫本頁) 本發明係關於磁氣式編碼器，尤其適合於小形化之磁 氣式編碼器。 【習知技術】 以往，對於檢出迴轉體之轉數或迴轉位置所用之編碼 器，若從檢測原理分類時，具有光學式（光電式），磁氣 式，靜電式等，主要爲使用光學式與磁氣式。 經濟部智慧时4笱員工消費合作社印製 作爲磁氣式除了向周向多極磁化之磁氣筒或磁氣感測 器所成之磁氣筒形（例如日本專利特開昭5 4 -1 1 8 2 5 9號），或具有齒輪或開縫之碟形與磁氣感測 器及永久磁鐵所成之磁阻（reluctance )形之外，如日本專 利特開2 0 0 0 - 6 5 5 9 6號公報所示，具有對於迴轉 軸向垂直單方向被磁化之圓板狀永久磁鐵所成之發磁體， 對此發磁體具向軸向對向之磁場檢測元件之磁氣式編碼器 ，或如日本專利特開平1 1 一 2 3 7 2 5 7號所記載，與 上述同樣，裝設具有圍住單方向磁場之發磁體外周之固定 框，在此固定框內周，對於發磁體對向於徑向，將以機械 角偏移9 0度相位之1對磁場檢測元件，裝設2對使用在 互相偏移1 8 0度偏移之位置。 第1 5圖係表示其1例之斜視圖，2 0係迴轉體例如 馬達，2 1係迴轉體，2 2係由安裝在迴轉體2 1之圓板 狀之永久磁鐵所成之發磁體，對於迴轉體2 1形成垂直向 磁化之磁場B (箭頭）。2 3係未圖示之安裝裝置而是安 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4- 528856 A7 B7 五、發明説明（2 ) 裝於迴轉體2 0之器架等之固定框，在其內周以互相9 0 度之位置安裝磁場檢測元件2 4 a，2 4 b，2 4 c， (請先閱讀背面之注意事項再填寫本頁) 2 4 d。然而’ fe热同形之編碼器，若高分解能化時磁化 方法或裝配精度就變成麻煩，因作爲磁氣感測器需要微細 圖案化之磁阻兀件，昂貴而不適合於小形化。 又’使其對向於向單方向被磁化之永久磁鐵圓板之軸 向，或在周圍經由空隙向徑向安裝磁場檢測元件者，發磁 體與fe場檢測兀件之位置偏移而磁場檢測兀件設置於磁場 所彎曲部分時，容易發生輸出訊號之波形紊亂，例如，第 1 6圖所示，若發磁體2 2與固定框2 3位置偏心時，因 各磁場檢測元件與磁場之偏移致使檢測訊號會發生紊亂。 因此必須正確地保持磁場檢測元件與發磁體之關係位置， 製作極爲麻煩。 又，若磁場檢測元件對於迴轉軸不平行地安裝時，亦 即，未與磁場成垂直時，具有波形發生變形，微小角度之 檢測精度不良之問題。 本發明係提供一種消除上.述缺點，可將磁場檢測元件 經常設置於磁場之平行範圍，使對於發磁體之磁場檢測元 件之安裝成爲容易，可小形化之磁氣式編碼器。 【發明之揭示】 因此，將發磁體形成爲筒狀，在其空隙內，產生對於 中心軸向垂直方向均勻之單方向磁場，在此發磁體之上述 空隙內以既定角度配置複數個之磁場檢測裝置，使上述發 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 528856 A7 ______B7 五、發明説明（3 ) 磁體與磁場檢測裝置相對性地迴轉。 (請先閱讀背面之注意事項再填寫本頁) 上述發磁體係可由筒狀永久磁鐵形成，使其磁化產生 全體爲單方向之磁場。又，爲了提升產生於發磁體空隙內 之磁場強度，在發磁體外周將構成磁路之筒狀軟磁性體， 接著於發磁體，或可經由小間隙配置。 按，也可以徐緩地變化發磁體之周向位置之磁化方向 ，在中央之空隙內形成單方向之磁場。 爲了徐緩地變化周向位置之磁化方向，將磁化方向相 異之複數個數永久磁鐵塊依序偏移磁化方向向周方向組合 成爲筒狀，或，使用橡膠磁鐵分開向單方向磁化之筒狀體 之1處，加以反轉藉使外周面變成外側恢復筒狀，就可形 成磁化方向徐緩地變化之發磁體。 又，上述磁場檢測裝置，係由對於磁場方向檢測感度 變成最大具有導向性之至少3個磁場檢測元件所構成，將 此中至少2個，導向性方向爲對於上述中心軸，向垂直方 向，將至少1個配置成與上述中心軸成爲平行方向。 又，也可以將上述磁場檢測元件成爲霍爾（hall )元件 或磁阻效果元件，也可以將這些形成於半導體基板內。 像這樣本發明，係將發磁體形成爲筒狀，在其中心軸 產生向垂直方向均勻之單方向磁場，因在上述發磁體內側 之空隙內以既定相位差配置有複數個磁場檢測元件’所以 ’不需要將磁場檢測元件在空隙內中央正確地配置’不需 要高裝配精度製作變成容易，磁場檢測元件被收容於發磁 體之內側，可構成爲小形，可得到迴轉部分之慣性變小等 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6 - 528856 A7 ___B7 五、發明説明（4 ) 之效果。 (請先閲讀背面之注意事項再填寫本頁) 按，具有圍住發磁體外周之軟磁性體藉形成磁氣迴路 ，增大在發磁體空隙內之磁場強度，可提升檢測精度。 又，將發磁體之磁化方向在周向慢慢地使其變化，藉 使用爲在中央空隙形成磁場之筒狀體，就可加強空隙內之 磁場保持良好之方向性。 又，藉反轉向單方向磁化之筒狀橡膠磁鐵，具有可簡 易地得到慢慢地變化之發磁體之效果。 又，具有至少3個磁場檢測元件，因將其檢測感度變 成最大之方向，對於迴轉軸向垂直方向配置2個，對於迴 轉軸平行方向配置1個，所以可容易補正磁場檢測元件之 輸出變動。所以，具有可得到檢測精度高小型之磁氣式編 碼器之效果。 【實施發明之最佳形態】 經濟部智慧財4笱資工消費合作社印製 茲將本發明之第1實施例表示於第1圖及第2圖。於 圖，1係迴轉軸，2係筒狀發磁體，磁化成使其對於中心 軸向垂直方向產生均勻單方向磁場B之永久磁鐵（箭頭係 表示磁化方向），3係安裝此發磁體2之支持板’而固定 於迴轉軸1。4係發磁體2之筒狀內側之空隙，5 a ’ 5 b，5 c ，5 d係磁場檢測元件，而在空隙4內配置成 互相成爲9 0度之相位差。6係磁場檢測元件之安裝座’ 7係安裝座6之支持板7。按，省略了對於磁場檢測元件 之供應電路式輸出訊號之配線及訊號處理電路。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 528856 A7 ___B7_ 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁} 發磁體2係形成爲外徑4 0 m m，內徑2 0 m m，_ 向長度1 〇mm之簡狀N d - F e — B系黏合磁鐵（B r =7·3kG， （BH)max=llMG〇e)所成之 永久磁鐵，對於中心軸向垂直方向（徑向）進行2極之磁 化。測定空隙4內之磁場B時，確認了 〇 · 2 Ο T之均句 磁場強度。 如第2圖所示，在此空隙4內配置磁場檢測元件5 a ’ 5 b，5 c ，5 d (霍爾元件），將發磁體2連同磁性 體1 0迴轉，檢測依迴轉角之磁場變化之結果，如第9圖 所示，得到了極爲良質之正弦波訊號。 因此，即使磁場檢測元件5 a ，5 b，5 c ，5 d從 空隙4內中心脫離而偏心在1迴轉對於各磁場檢測元件得 到了 1周期完全相等波形之良質正弦波輸出訊號，不必正 確地保持與發磁體2之關係位置，因不需要高裝配精度所 以製作變成容易。 經濟部智慧財4笱員工消費合作社印製 按，構成發磁體2之永久磁鐵係可使用稀土系燒結磁 鐵，鐵氧體（ferrite )系燒結磁鐵，稀土系黏合磁鐵，鐵氧 體系黏合磁鐵，鋁鎳鈷合金（Alnico)磁鐵，鐵氧體橡膠磁 鐵等。 (第2實施例） 茲將本發明之第2實施例表示於第3圖及第4圖。於 圖，1 0係磁性體，其他符號係與第1圖及第2圖相同。 發磁體2之材質，形狀及磁化係與第1實施例完全相 -8 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 528856 A7 B7 五、發明説明（6 ) 同。磁性體1 0係將外徑6 0 m m，內徑4 0 m m衝孔爲 環狀之矽鋼板因應發磁體2之軸向長度以形成所疊層之筒 狀磁氣迴路。測定空隙4內之磁場時確認了具0 · 2 5 T 之磁場強度。 如第4圖所示，在此空隙4內配置磁場檢測元件5 a ’ 5 b，5 c ，5 d (霍爾元件），將發磁體2連同磁性 體1 0迴轉，檢測依迴轉角之磁場變化之結果，與第1實 施例同樣，如第9圖所示，得到了極爲良質之正弦波訊號 0 於第1實施例，因磁通4通過發磁體2之外側空間致 使磁阻變大，雖然空隙4內之磁場強度變小，但是於本實 施例在發磁體2外周設磁性體1 〇以形成磁氣迴路，使磁 通0之磁阻變小，增強空隙4內之磁場強度。 按，磁性體1 0係可將矽鋼板向發磁體2之周向捲繞 ，也可以以純鐵或軟鋼或非晶質合金等形成爲筒狀。 (第3實施例） 本實施例，係改變發磁體2之永久磁鐵之材質將空隙 4內之磁場強度更加增大者，其他構成係與第2實施例完 全相同。528856 A7 B7 V. Description of the invention (1) [Technical Field] (Please read the precautions on the back before filling out this page) The present invention relates to magnetic encoders, especially suitable for miniaturized magnetic encoders. [Knowledge technology] In the past, encoders used to detect the number of revolutions or the position of a rotating body have optical (optical), magnetic, and electrostatic types when classified from the detection principle. They are mainly used optically. Style and magnetic style. The Ministry of Economic Affairs 4 笱 Employee Consumer Cooperative Co., Ltd. prints a magnetic cylinder in addition to a magnetic cylinder or a magnetic sensor which is multi-polarized in the circumferential direction (for example, Japanese Patent Laid-Open No. Sho 5 4 -1 1 8 No. 2 5 9), or the reluctance shape formed by gears or slits with magnetic sensors and permanent magnets, such as Japanese Patent Laid-Open No. 2 0 0 0-6 5 5 9 A magnetic encoder having a disc-shaped permanent magnet that is magnetized in one direction perpendicular to the rotation axis, and a magnetic encoder having a magnetic field detection element facing the axis in the axial direction, or As described in Japanese Patent Laid-Open No. 1 1 2 3 7 2 5 7, the same as above, a fixing frame having an outer periphery of a magnetizing magnet in a unidirectional magnetic field is installed, and the inner periphery of the fixing frame is opposite to the magnetizing magnet. In the radial direction, one pair of magnetic field detection elements with a phase shift of 90 degrees at a mechanical angle will be installed, and two pairs will be installed at positions shifted by 180 degrees from each other. Fig. 15 is a perspective view showing an example thereof. 20 is a slewing body such as a motor, 21 is a slewing body, and 22 is a magnet made of a disc-shaped permanent magnet mounted on the slewing body 21. A magnetic field B (arrow) that is vertically magnetized is formed for the rotating body 21. 2 3 is not shown in the installation device, but the size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -4- 528856 A7 B7 V. Description of the invention (2) Device mounted on the rotary body 20 Install the magnetic field detection elements 2 4 a, 2 4 b, 2 4 c on the inner periphery of the fixed frame of the rack at 90 degrees to each other (Please read the precautions on the back before filling this page) 2 4 d. However, the encoder with the same shape as the thermal sensor becomes troublesome if the magnetization method or assembly accuracy is high when high resolution energy is used. As a magnetic sensor requires a finely patterned magnetoresistive element, it is expensive and not suitable for miniaturization. Also, if it faces the axial direction of a permanent magnet disc that is magnetized in a single direction, or if a magnetic field detection element is installed in the radial direction through a gap, the position of the magnet and the fe field detection element is shifted and the magnetic field is detected. When the element is placed on the curved part of the magnetic field, the waveform of the output signal is prone to disorder. For example, as shown in Figure 16, if the positions of the magnet 22 and the fixed frame 23 are eccentric, the magnetic field detection element and the magnetic field are deviated. Disturbances can cause detection signals to be disturbed. Therefore, the position of the relationship between the magnetic field detection element and the magnet must be accurately maintained, which is extremely troublesome to manufacture. In addition, when the magnetic field detection element is mounted non-parallel to the rotation axis, that is, when the magnetic field detection element is not perpendicular to the magnetic field, the waveform is deformed and the detection accuracy of a small angle is poor. The present invention provides a magnetic encoder that eliminates the above-mentioned shortcomings and can often set the magnetic field detection element in a parallel range of the magnetic field, making it easy to install the magnetic field detection element that generates a magnet and can be reduced in size. [Disclosure of the invention] Therefore, the magnet is formed in a cylindrical shape, and a unidirectional magnetic field uniform in the vertical direction of the central axis is generated in the gap. A plurality of magnetic field detections are arranged in the gap of the magnet at a predetermined angle. Device to make the above paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -5- 528856 A7 ______B7 V. Description of the invention (3) The magnet and the magnetic field detection device rotate relatively. (Please read the precautions on the back before filling out this page.) The above magnetic generating system can be formed by a cylindrical permanent magnet, so that its magnetization generates a unidirectional magnetic field. In order to increase the strength of the magnetic field generated in the gap of the magnet, a cylindrical soft magnetic body forming a magnetic circuit will be formed on the outer periphery of the magnet, and then the magnet may be disposed through a small gap. You can also slowly change the magnetization direction of the circumferential position of the magnet, and form a unidirectional magnetic field in the center gap. In order to slowly change the magnetization direction of the circumferential position, a plurality of permanent magnet blocks with different magnetization directions are sequentially shifted from the magnetization direction to the circumferential direction to form a cylindrical shape, or a rubber magnet is used to separate the cylindrical shapes that are magnetized in one direction. At one point of the body, if the outer peripheral surface is turned into an outer tube shape, a magnet that gradually changes its magnetization direction can be formed. In addition, the magnetic field detection device is composed of at least three magnetic field detection elements that have a maximum sensitivity for detecting the direction of the magnetic field. At least two of these elements have a guiding direction that is perpendicular to the central axis. At least one of them is arranged parallel to the central axis. The magnetic field detection element may be a hall element or a magnetoresistance effect element, or these may be formed in a semiconductor substrate. According to the present invention, the magnetizer is formed in a cylindrical shape, and a unidirectional magnetic field uniform in the vertical direction is generated on the central axis thereof. Because a plurality of magnetic field detection elements are arranged with a predetermined phase difference in the gap inside the magnetizer. Therefore, 'the magnetic field detection element does not need to be correctly arranged in the center of the gap' and it is not necessary to make it with high assembly accuracy. The magnetic field detection element is housed inside the magnet and can be formed in a small shape. The inertia of the rotating part can be reduced. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -6-528856 A7 ___B7 5. The effect of the invention description (4). (Please read the precautions on the back before filling in this page.) Press, the soft magnetic body surrounding the hair magnet can form a magnetic circuit to increase the magnetic field strength in the gap of the hair magnet, which can improve the detection accuracy. The magnetization direction of the magnet is gradually changed in the circumferential direction. By using a cylindrical body that forms a magnetic field in the central gap, the magnetic field in the gap can be strengthened to maintain good directivity. In addition, a cylindrical rubber magnet that is magnetized in one direction by reversing has the effect of easily obtaining a magnet that changes slowly. In addition, since it has at least three magnetic field detection elements, the detection sensitivity is maximized, and two are arranged perpendicular to the rotation axis and one is arranged parallel to the rotation axis. Therefore, it is possible to easily correct the output fluctuation of the magnetic field detection element. Therefore, there is an effect that a small magnetic encoder having high detection accuracy can be obtained. [Best Mode for Implementing Invention] Printed by the Ministry of Economic Affairs, Intellectual Property and Consumer Cooperatives. The first embodiment of the present invention is shown in FIG. 1 and FIG. 2. In the figure, 1 series of rotary shafts and 2 series of cylindrical magnets are magnetized to produce a uniform unidirectional magnetic field B in the vertical direction of the central axis (the arrow indicates the magnetization direction). Supporting plate 'is fixed to the rotating shaft 1. The gap on the inside of the cylindrical shape of the 4 series magnet 2 is 5 a' 5 b, 5 c, 5 d is a magnetic field detection element, and the gap 4 is arranged to be 90 degrees to each other. The phase difference. 6-series magnetic field detecting element mounting base '7 is a support plate 7 of the mounting base 6. Press to omit the wiring and signal processing circuit for the output signal of the magnetic field detection element supply circuit. This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 528856 A7 ___B7_ V. Description of the invention (5) (Please read the precautions on the back before filling this page} The magnet 2 is formed as an outer diameter 4 0 mm, inner diameter 20 mm, _ direction length 10 mm, a simple N d-F e — B series of bonded magnets (B r = 7.3 kg, (BH) max = llMG〇e) Two-pole magnetization is performed on the central axis in the vertical direction (radial direction). When the magnetic field B in the gap 4 is measured, the uniform magnetic field strength of 0.2 T is confirmed. As shown in FIG. 2, the gap 4 Equipped with magnetic field detection elements 5 a '5 b, 5 c, 5 d (Hall elements), the magnet 2 and the magnetic body 10 are rotated to detect the change in the magnetic field according to the rotation angle, as shown in Figure 9, A very good sine wave signal was obtained. Therefore, even if the magnetic field detection elements 5 a, 5 b, 5 c, and 5 d deviate from the center of the gap 4 and eccentrically rotate at 1 for each magnetic field detection element, a period of exactly equal waveforms is obtained. Good quality sine wave output signal, it is not necessary to maintain the position of the relationship with the magnet 2 correctly. It requires high assembly accuracy, so it is easy to make. Printed by the Ministry of Economic Affairs ’Smart Assets 4 and employee consumer cooperatives. The permanent magnets that make up the magnet 2 can use rare earth sintered magnets, ferrite sintered magnets, and rare earth bonded. Magnets, ferrite-based bonded magnets, Alnico magnets, ferrite rubber magnets, etc. (Second Embodiment) The second embodiment of the present invention is shown in Figs. 3 and 4. Figure, 10 series magnetic body, other symbols are the same as Figure 1 and Figure 2. The material, shape, and magnetization of the magnet 2 are completely the same as those of the first embodiment. ) A4 specification (210X297 mm) 528856 A7 B7 V. Description of the invention (6) Same. The magnetic body 10 is a silicon steel plate with a ring diameter of 60 mm and an inner diameter of 40 mm. The length is formed to form a stacked cylindrical magnetic circuit. When measuring the magnetic field in the gap 4, a magnetic field strength of 0 · 2 5 T was confirmed. As shown in FIG. 4, a magnetic field detection element 5 a is arranged in the gap 4. '5 b, 5 c, 5 d (Hall element), will be magnetic As a result of detecting the change of the magnetic field according to the rotation angle with the magnetic body 10 rotating, 2 as in the first embodiment, as shown in FIG. 9, a very good sine wave signal is obtained. In the first embodiment, due to the magnetic flux 4 The magnetic resistance is increased by the space outside the magnetic generator 2. Although the magnetic field strength in the gap 4 is small, in this embodiment, a magnetic body 10 is provided on the outer periphery of the magnetic generator 2 to form a magnetic circuit, and the magnetic flux is 0 The magnetic resistance becomes smaller, and the magnetic field strength in the gap 4 is enhanced. According to the magnetic body 10, a silicon steel plate can be wound in the circumferential direction of the magnet 2 or can be formed into a cylindrical shape using pure iron, mild steel, or an amorphous alloy. (Third embodiment) In this embodiment, the material of the permanent magnet of the magnet 2 is changed to further increase the magnetic field strength in the gap 4. The other components are the same as those in the second embodiment.
發磁體2係使用了外徑4 0 m m，內徑2 0 m m，軸 向長度1 0 m m之N d — F e — B系燒結磁鐵（b r = 11.9kG， (BH)max=35MGOe)。與實 施例1问樣貫1¾之結果’空隙內之磁場強度係Q · 4 4 T 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 裝-- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財4笱8工消費合作社印製 -9- 528856 A7 _B7_ 五、發明説明（7 ) ，磁場之變化也同樣得到了極爲良質之正弦波訊號。 (請先閲讀背面之注意事項再填寫本頁) (第4實施例） 本實施例，形狀雖然與第2實施例相同，但是改變永 久磁鐵及磁性體。 發磁體2係外徑1 2 m m，內徑1 〇 m m，軸向長度 l〇mm成筒狀之鐵氧體橡膠（Br=1.5kG，（ BH) ma X二〇 _ 5MG〇 e )向徑向進行2極磁化所 形成。磁性體係使用外徑1 3 m m，內徑1 2 m m之環狀 純鐵，而將此配置於發磁體2外周。 測定空隙內之磁場時，得到了 〇 . 〇 2 0 T之磁場強 度。又，在空隙4內配置磁阻元件（M R元件）檢測磁場 變化之結果，得到了良好之正弦波訊號。 (第5實施例） 茲將本發明之第5實施例表示於第5圖。本實施例係 將磁性體1 0經由些許空隙安裝配置於支持板7。 經濟部智慧財產笱§(工消費合作钍印製 發磁體2係與第4實施例相同。支持板7係使用了將 非磁性之鋁板。磁性體1 0係在與發磁體2對向之支持板 7配置了外徑1 3 m m，內徑1 2 m m之環狀純鐵。 測定了空隙內之磁場時，得到了 〇 · 〇 2 〇 T之磁場 強度。又’在空隙4內配置磁阻兀件（M R元件）檢測磁 場變化之結果，得到了良好之正磁波訊號。 -10- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 528856 A7 B7 五、發明説明（8 ) (第6實施例） (請先閲讀背面之注意事項再填寫本頁) 茲將本發明之第6實施例表示於第6圖。本實施例也 表示發磁體2之不同例者’將筒狀磁性體之左右兩側之磁 化變化，對稱性地分別在周向位置依序（於圖係分別表示 8處所之磁化變化）使其慢慢地變化。 藉此構成，可在中央之空隙4內容易形成單方向之磁 場B。 (第7實施例） 茲將本發明之第7實施例表示於第7圖。本實施例係 將發磁體藉由梯形之永久磁鐵塊之組合所構成。 發磁體2係具有分別磁化方向不同之8個梯形永久磁 鐵塊8，從對於平行邊磁化方向成爲垂直之塊件，在兩側 依序將磁化方向偏移9 0度之塊件如相鄰向周向組合接合 ，在中央之空隙4內形成單方向之磁場B。 作爲永久磁鐵使用N d - F e - B系燒結合磁鐵（The magnet 2 series uses an N d — F e — B series sintered magnet with an outer diameter of 40 mm, an inner diameter of 20 mm, and an axial length of 10 mm (b r = 11.9kG, (BH) max = 35MGOe). The result is the same as in Example 1 and the result is 1¾. The magnetic field strength in the gap is Q · 4 4 T The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) installed-(Please read the note on the back first Please fill in this page again for the order) Printed by the Ministry of Economic Affairs, Smart Assets 4 工 8 Industrial Consumer Cooperative, -9- 528856 A7 _B7_ V. Description of the invention (7), the change of the magnetic field also obtained a very good quality sine wave signal. (Please read the precautions on the back before filling in this page.) (Fourth embodiment) Although the shape of this embodiment is the same as that of the second embodiment, the permanent magnet and the magnetic body are changed. Ferrite 2 is a ferrite rubber with an outer diameter of 12 mm, an inner diameter of 10 mm, and an axial length of 10 mm (Br = 1.5kG, (BH) ma X20-5MG〇e). Formed by two-pole magnetization. The magnetic system uses a ring-shaped pure iron with an outer diameter of 13 mm and an inner diameter of 12 mm, and this is arranged on the outer periphery of the magnet 2. When the magnetic field in the gap was measured, a magnetic field strength of 0.020 T was obtained. In addition, a magnetoresistive element (MR element) was arranged in the gap 4 to detect a change in the magnetic field, and a good sine wave signal was obtained. (Fifth Embodiment) A fifth embodiment of the present invention is shown in Fig. 5. In this embodiment, the magnetic body 10 is mounted and arranged on the support plate 7 through a slight gap. Intellectual property of the Ministry of Economic Affairs (industrial and consumer cooperation) is the same as in the fourth embodiment. The support plate 7 is a non-magnetic aluminum plate. The magnetic body 10 is used to support the hair generator 2 Plate 7 is provided with ring-shaped pure iron with an outer diameter of 13 mm and an inner diameter of 12 mm. When the magnetic field in the gap was measured, a magnetic field strength of 0 · 〇 2 〇T was obtained. A magnetic resistance was also arranged in the gap 4 As a result of detecting the change of the magnetic field by the element (MR element), a good positive magnetic wave signal was obtained. -10- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 528856 A7 B7 V. Description of the invention (8) (Sixth Embodiment) (Please read the precautions on the back before filling out this page.) The sixth embodiment of the present invention is shown in Fig. 6. This embodiment also shows a different example of the hair magnet 2. The magnetization changes on the left and right sides of the magnetic body are sequentially symmetrically arranged in the circumferential direction (the magnetization changes of 8 places are shown in the diagram) to make it slowly change. With this structure, the content in the center gap 4 can be changed. It is easy to form a unidirectional magnetic field B. (Seventh embodiment) The seventh embodiment of the present invention is shown in Fig. 7. This embodiment is composed of a combination of trapezoidal permanent magnet blocks. The magnetizer 2 has eight trapezoidal permanent magnet blocks 8 with different magnetization directions. From the pieces whose magnetization directions are perpendicular to the parallel sides, the pieces whose magnetization directions are shifted by 90 degrees in order on both sides are combined in adjacent circumferential directions to form a unidirectional magnetic field B in the gap 4 in the center. Use N d-F e-B fired bonded magnets as permanent magnets (
Br = 11.7kG，iHC = 22k〇e， 經濟部皙慧財—笱吕：工消費合汴Ti印製 (BH)max二32MG〇e)所成之8個塊件，成爲 外徑7 2mm，內徑2 4mm，長度7 2mm之筒狀。 調查此筒狀發磁體之空隙內之磁場時，曉得了發生 1 · 1 T強度之磁場，在直徑1 5 m m內形成有偏差爲 0 · 1 %以下之均勻磁場。又，在空隙4內配置高斯計之 檢測探頭（霍爾元件），迴轉發磁體2檢測由迴轉角之磁 場變化之結果，得到了極爲良質之正弦波訊號。 -11 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 528856 A7 B7 五、發明説明（9 ) .按，永久磁鐵塊之數目並非限於8個，也可以使用好 幾個永久磁鐵塊。 (請先閲讀背面之注意事項再填寫本頁) (第8實施例） 茲將本發明之第8實施例表示於第8圖。本實施例係 再表示另外發磁體2與其製作工程。 永久磁鐵係使用寬度1 0 m m，厚度1 m m，長度 35mm之鐵氧體橡膠磁鐵（Br二1 · 5kG，iHC 二 2.4k〇e， （BH)max = 0.5MG〇e)， 形成爲外徑1 2 m m，內徑1 〇 m m之筒狀。 發磁體2之製作係依下列工程進行。（1 )首先，如 第8 ( a )所示，將整個形成爲所需筒狀之橡膠磁鐵向徑 向磁化2極以形成發磁體2。從此橡膠磁鐵所成之發磁體 2，係直接可作爲與第2圖同樣地使用。（2 )將任意1 處在切斷部9向半徑方向切開，從此切斷部9如第8 ( b )圖切開時，因內側被拉伸外側而被壓縮，所以，對於切 斷部9之磁化方向之關係將依序變化。（3 )並且，將兩 端向箭頭9 a方向如第8 ( c )圖所示開啓，接著向箭頭 經濟部智慧时產笱員工消費合作社印製 9 b方向，使內周面成爲外周加以反轉變化。（4 )經過 第8 ( d )圖之狀態再向箭頭9 c方向彎曲，接合兩端之 切斷部9。（ 5 )如第8 ( e )圖所示，當恢復筒狀時周 向位置之磁化方向就徐緩地變化在中央之空隙4形成齊備 單方向磁場B之發磁體2。按，切斷部9爲並非半徑方向 ，也可以斜向切斷。 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） -12- 528856 A7 B7 五、發明説明（10 ) .測定發生於此發磁體2之空隙4內之磁場B時，得到 了 0 . 0 2 4 T値，均勻性係與第7實施例時之情形相同 (請先閲讀背面之注意事項再填寫本頁) 〇 由配置於此發磁體2與空隙4內之霍爾元件來構成磁 氣式編碼器。迴轉此編碼器，將測定依迴轉角度之檢測訊 號之結果表示於第1 0圖。從此特性圖就可淸楚，即使磁 場檢測元件偏心也得到極良質之正弦波訊號，即使更加偏 心時正弦波訊號之振幅強度或波形等幾乎都沒有變化，曉 得了不需要高裝配精度。 按，爲了比較，如第1 1圖所示，將同樣材質之鐵氧 體橡膠磁鐵成爲環狀在外周面施加多極磁化之磁氣筒2 5 ，與製作了裝設對向於其外周面之磁氣感測器2 6之編碼 器。使用此編碼器進行測試之結果，迴轉角度與檢測訊號 之特性圖，係如第1 2圖所示由於磁場檢測元件之些許偏 心就發生檢測訊號之搖晃。 本實施例，係作爲磁場檢測元件雖然使用霍爾元件， 但是也可以替代此元件使用磁阻效果元件，也同樣變成小 形，得到了良好之特性。 (第9實施例） 第1 3圖係表示將磁場檢測元件集聚於1處所構成， 在發磁體2之空隙4內之中央部分與軸平行配置之剖面圖 。將磁場檢測元件安裝於安裝座6之放大圖表示於第1 4 圖。屬於fei場檢測兀件之3個霍爾兀件5 a ，5 c ，5 e 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 528856 A7 ___ B7 五、發明説明（11 ) ’在四角柱之安裝座6之三方之面，設置成檢測訊號分別 成爲最大之方向爲能夠變成垂直。箭頭係表示導向性爲最 大之向量方向。 (請先閲讀背面之注意事項再填寫本頁) 迴轉軸1只迴轉0時，磁場檢測元件5 a之導向性爲 最大向量方向’與由永久磁鐵所生成之磁場之向量方向係 只偏移0。又，假如從磁場檢測元件5 a ，5 c之檢測磁 場變成最大之方向分別向軸向，具有0 a ，0 c之角度時 ，各磁場檢測元件5 a ，5 c補正後之輸出V a ，V c係 分別以（1 )式與（2 )式表示。Br = 11.7kG, iHC = 22k〇e, Xihuicai of the Ministry of Economic Affairs-笱 Lu: Industrial and consumer combination of Ti printing (BH) max 2 32MG〇e), 8 pieces, with an outer diameter of 7 2mm, A cylindrical shape with an inner diameter of 24 mm and a length of 72 mm. When investigating the magnetic field in the gap of this cylindrical magnet, it was found that a magnetic field with a strength of 1 · 1 T was generated, and a uniform magnetic field with a deviation of 0 · 1% or less was formed within a diameter of 15 mm. In addition, a detection probe (Hall element) of a Gauss meter is arranged in the gap 4, and the return magnet 2 detects the change in the magnetic field caused by the rotation angle, and obtains a very good sine wave signal. -11-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 528856 A7 B7 V. Description of the invention (9). According to the number of permanent magnet blocks is not limited to 8, you can also use several permanent magnets Piece. (Please read the precautions on the back before filling out this page) (Eighth Embodiment) The eighth embodiment of the present invention is shown in FIG. This embodiment shows the additional magnetism 2 and its manufacturing process. The permanent magnet system uses a ferrite rubber magnet with a width of 10 mm, a thickness of 1 mm, and a length of 35 mm (Br II 1.5 kG, iHC II 2.4 k〇e, (BH) max = 0.5MG〇e), and is formed into an outer diameter. A cylindrical shape with a diameter of 12 mm and an inner diameter of 10 mm. The production of the magnet 2 is performed according to the following processes. (1) First, as shown in Section 8 (a), the entire rubber magnet formed into a desired cylindrical shape is magnetized with 2 poles in the radial direction to form the magnet 2. The hair magnet 2 formed from the rubber magnet can be directly used in the same manner as in Fig. 2. (2) Cut any part of the cutting part 9 in a radial direction. When the cutting part 9 is cut as shown in FIG. 8 (b) from this point, the inside is stretched and compressed by the outside. The relationship of the magnetization directions will change sequentially. (3) Open both ends in the direction of arrow 9a as shown in Figure 8 (c), and then print 9b in the direction of the arrow of the Ministry of Economic Affairs and the Consumers ’Cooperative for Consumers, so that the inner surface becomes the outer periphery and is reversed. Turn change. (4) After passing through the state shown in Fig. 8 (d), bend it in the direction of arrow 9c, and join the cutouts 9 at both ends. (5) As shown in FIG. 8 (e), when the cylindrical shape is restored, the magnetization direction of the circumferential position is gradually changed, and the magnet 2 in the central gap 4 is formed to form a complete unidirectional magnetic field B. Pressing, the cutting portion 9 is not in a radial direction, and may be cut diagonally. This paper size applies the Chinese National Standard (CNS) A4 specification (210x 297 mm) -12- 528856 A7 B7 V. Description of the invention (10). When measuring the magnetic field B that occurred in the gap 4 of the magnet 2, the obtained 0. 0 2 4 T 値, the uniformity is the same as that in the seventh embodiment (please read the precautions on the back before filling in this page) 〇 The Hall element arranged in the magnet 2 and the gap 4 Construct a magnetic encoder. The encoder is rotated, and the result of measuring the detection signal according to the rotation angle is shown in Fig. 10. From this characteristic diagram, you can see that even if the magnetic field detection element is eccentric, a very good sine wave signal is obtained. Even when the eccentricity of the sine wave signal is more eccentric, there is almost no change in the amplitude intensity or waveform of the sine wave signal. It is known that high assembly accuracy is not required. For comparison, as shown in Fig. 11, a ferrite rubber magnet of the same material is formed into a ring-shaped magnetic cylinder 2 5 with multi-pole magnetization on the outer peripheral surface, and the installation is made to oppose its outer peripheral surface. Encoder of magnetic sensor 26. As a result of testing with this encoder, the characteristic diagrams of the rotation angle and the detection signal are shown in Figure 12 due to a slight eccentricity of the magnetic field detection element, which causes the detection signal to shake. In this embodiment, although a Hall element is used as the magnetic field detection element, a magnetoresistive effect element can be used instead of this element, and it is also reduced in size, and good characteristics are obtained. (Ninth Embodiment) FIG. 13 is a cross-sectional view showing a configuration in which a magnetic field detection element is gathered in one place, and a central portion in the gap 4 of the magnet 2 is arranged parallel to the axis. An enlarged view of the magnetic field detection element mounted on the mounting base 6 is shown in FIG. 14. The three Hall elements 5 a, 5 c, 5 e belonging to the fei field detection element are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 528856 A7 ___ B7 V. Description of the invention (11) 'On the three sides of the mounting base 6 of the quadrangular pillar, set the directions in which the detection signals become the largest, respectively, so that they can become vertical. The arrow indicates the direction of the vector with the greatest guidance. (Please read the precautions on the back before filling in this page.) When one rotation axis is turned 0, the direction of the magnetic field detection element 5 a is the maximum vector direction 'and the vector direction of the magnetic field generated by the permanent magnet is only shifted by 0. . In addition, if the directions from which the detection magnetic fields of the magnetic field detection elements 5 a and 5 c become the largest are directed in the axial direction and have an angle of 0 a and 0 c, respectively, the corrected output V a of the magnetic field detection elements 5 a and 5 c, V c is expressed by formulas (1) and (2), respectively.
Va = Bcos0/cos 0 a (1)Va = Bcos0 / cos 0 a (1)
Vc = Bcos(0+7Γ /2)/cos 0 c (2) 並且，使用各補正後之輸出，迴轉軸1之角度之絕對 位置Θ，係可由（3 )式求得。 Θ =arctan(Va/Vc)......(3) 從以上，若已知0 a ，0 c時，就可補正由於磁場方 向變動之輸出振幅。於此，於磁場檢測元件5 a ，5 c分 別變成最大之位置，0 a與0 c係逐次被更新而使用於含 在訊號處理電路之記憶領域所記憶之各磁場檢測元件之補 正。具體上爲磁場檢測元件5 a之輸出變成最大時’若將 磁場檢測元件5 e之輸出視爲V ^^〃時，將預先所計測之 磁場檢測元件5 e之最大値視爲V 時，就可由（4 )式 求得。 0 a = sin_’l(V 5 e 5 a m a X /Vfe.ax) (5) 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -14 - 528856 A7 ___B7 五、發明説明（12 ) (請先閱讀背面之注意事項再填寫本頁) 因此’將（4 )式，（5 )式所得到之値代入於（1 )式（2 )式，就可從（3 )式求得θ。 使用外徑4 Omm，內徑2 Omm，軸向長度 1 0 m m之筒狀鐵氧體磁鐵，與第1實施例進行同樣實驗 之結果’得到良好訊號之檢測精度。 按，於本實施例係作爲磁場發生元件5 ，分別獨立配 置3個霍爾元件，但是並非限於此，也可以將3個霍爾元 件互相磁場最大檢出爲成直交形成於半導體基板上。又， 作爲磁場檢測元件雖然使用了霍爾元件，但是也可以使用 磁阻效果元件。又，永久磁鐵雖然使用了塊狀鐵氧體（ ferdte)磁鐵，但是並非限於此，也可以將稀土磁鐵等使用 噴濺法，使其附著於軟磁性體之端面。 【產業上之利用可能性】 本發明係磁氣式編碼器，尤其利用於適合小形化之磁 氣式編碼器。 經濟部智慧財產苟員工消費合泎钍印製 圖式之簡單說明 第1圖係表示本發明之第1實施例要部之側剖面圖。 第2圖係沿著第1圖之A - A線之剖面圖。 第3圖係表示本發明之第2實施例要部之側剖面圖。 第4圖係第3圖之中央剖面面圖。 第5圖係表示本發明之第5實施例要部之側剖面圖。 -15- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 528856 A7 ____B7_ 五、發明説明（13 ) .第6圖係表示本發明之第6實施例之發磁體之正面圖 〇 (請先閲讀背面之注意事項再填寫本頁) 第7圖係表示本發明之第7實施例之發磁體之正面圖 〇 第8圖係表示本發明之第8實施例之發磁體與其製作 過程之說明圖。 第9圖係本發明之編碼器之輸出訊號之特性曲線圖。 第1 0圖係表示本發明之第8實施例之輸出訊號之特 性曲線圖。 第1 1圖係將磁氣筒形之編碼器之例簡略地表示之斜 視圖。 第1 2圖係於第1 1圖之例之偏心時之輸出訊號之特 性曲線圖。 第1 3圖係表示本發明之第9實施例要部之側剖面圖 〇 第1 4圖係第1 3圖之檢測元件安裝部之斜視圖。 第1 5圖係表示習知編碼器之例之斜視圖。 第1 6圖係表示於習知編碼器成偏心狀態之說明圖。 經濟部皙法时4P-7B(工消費合泎汪印製 【符號之說明】 1 迴轉軸，2 發磁體，3 支持板，4 空隙，5 a ，5 b，5 c，5 d 5 e 磁場檢測元件，6 安裝座 ，8 永久磁鐵塊，9 切斷部，1 0 磁性體。 -16- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐）Vc = Bcos (0 + 7Γ / 2) / cos 0 c (2) Moreover, using the output after each correction, the absolute position Θ of the angle of the rotary axis 1 can be obtained by the formula (3). Θ = arctan (Va / Vc) ...... (3) From the above, if 0 a and 0 c are known, the output amplitude due to the magnetic field direction change can be corrected. Here, at the positions where the magnetic field detection elements 5 a and 5 c become the largest, respectively, 0 a and 0 c are successively updated and used for the correction of each magnetic field detection element stored in the memory field of the signal processing circuit. Specifically, when the output of the magnetic field detection element 5 a becomes maximum, 'if the output of the magnetic field detection element 5 e is regarded as V ^^ 〃, when the maximum 値 of the magnetic field detection element 5 e measured in advance is regarded as V, then Can be obtained by (4). 0 a = sin_'l (V 5 e 5 ama X /Vfe.ax) (5) This paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) -14-528856 A7 ___B7 V. Description of the invention (12) (Please read the notes on the back before filling out this page) Therefore 'Substitute the formula (4) and (5) for (1) into (1) and (2), you can use (3) Find θ. A cylindrical ferrite magnet having an outer diameter of 4 mm, an inner diameter of 2 mm, and an axial length of 10 mm was used. The results of the same experiment as in the first embodiment were used to obtain a good signal detection accuracy. According to the present embodiment, three Hall elements are independently arranged as the magnetic field generating element 5, but the present invention is not limited to this. The three Hall elements may be detected at a maximum perpendicular to each other and formed on a semiconductor substrate. Although a Hall element is used as the magnetic field detection element, a magnetoresistive effect element may be used. Further, although a permanent ferrite magnet is used as the permanent magnet, it is not limited to this, and a rare earth magnet or the like may be attached to the end face of the soft magnetic body by a sputtering method. [Industrial application possibility] The present invention is a magnetic encoder, and is particularly suitable for a magnetic encoder suitable for miniaturization. Brief Description of Drawings for Intellectual Property and Consumer Consumption of Employees in the Ministry of Economic Affairs Figure 1 is a side cross-sectional view showing the essential parts of the first embodiment of the present invention. Figure 2 is a sectional view taken along line A-A of Figure 1. Fig. 3 is a side sectional view showing a main part of a second embodiment of the present invention. Fig. 4 is a central sectional view of Fig. 3; Fig. 5 is a side sectional view showing a main part of a fifth embodiment of the present invention. -15- This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 528856 A7 ____B7_ V. Description of the invention (13). Figure 6 is a front view showing the sixth embodiment of the hair magnet of the present invention 〇 (Please read the precautions on the back before filling this page) Figure 7 shows the front view of the hair generator of the seventh embodiment of the present invention. Figure 8 shows the hair generator of the eighth embodiment of the present invention and its production. An illustration of the process. FIG. 9 is a characteristic curve diagram of an output signal of the encoder of the present invention. Fig. 10 is a graph showing the characteristic of the output signal of the eighth embodiment of the present invention. Fig. 11 is a perspective view schematically showing an example of a magnetic cylindrical encoder. Fig. 12 is a characteristic curve diagram of the output signal when the eccentricity of the example in Fig. 11 is shown. Fig. 13 is a side sectional view showing a main part of a ninth embodiment of the present invention. Fig. 14 is a perspective view of a detection element mounting part of Fig. 13. Fig. 15 is a perspective view showing an example of a conventional encoder. Fig. 16 is an explanatory diagram showing the eccentric state of the conventional encoder. Ministry of Economic Affairs 4P-7B (printed by industry and consumer [Way of symbol] 1 Rotary shaft, 2 magnets, 3 support plate, 4 gap, 5 a, 5 b, 5 c, 5 d 5 e magnetic field Detection element, 6 mounting base, 8 permanent magnet block, 9 cutting part, 10 magnetic body. -16- This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm)