525030 A7 B7 7 194pif.doc/0〇8 五、發明說明（(） 發明領域 本發明是關於一種在液晶顯示元件製程中，於形成有 電極的透明基板上形成配向膜的方法。 技術背量· 近年來，具有薄型輕量、低消費電力等優點的液晶顯 示元件，廣泛的應用在文字處理機、個人電腦、行動電話、 電子數位助理、電視、攝影機、測量儀器等的顯示器上。 一般而言，液晶顯示元件係在由兩枚透明基板形成的電極 之間封入液晶組成物，由兩枚透明基板所組成的電極’對 液晶組合物外加電壓以進行顯示’爲了在外加電壓時得到 均一的顯示特性，而必須預先給予液晶分子一個預傾角（液 晶分子的分子軸與配向膜表面的夾角）。其中配向膜形成 在電極的表面，在給予液晶分子預傾角上扮演相當重要的 角色。 習知在透明基板上形成配向膜的方法，一般係使用苯 胺(Flexo)印刷裝置以進行苯胺印刷法。苯胺印刷裝置主要 係由下列構件所構成：稱爲網目輥(Anilox Roll)，表面全 體具有細微凹形的金屬滾筒、稱爲油墨輥的樹脂滾筒（亦 有使用稱釋油墨刮刀的聚脂或SUS製的刮刀狀物的場 合。）、樹脂凸版、固定上述構件的板體以及運送透明基 板用的印刷臺。 其操作的話，首先將聚亞醯胺等有機高分子化合物所 形成的配向膜材料，由供給噴嘴滴至網目輥的表面後並使 3 本紙張尺度適用中國國家標準（CNS)A4規格（2〗〇 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 經齊卽智慧財4局員X消費合作杜印製 525030 7 194pif.doc/008 A7 B7 經齊部智慧財產¾員工消費合作fi印製 五、發明說明（v) 網目輥回轉。此時以接近網目輥的油墨輥使配向膜材料變 薄延伸’而於網目輥表面形成配向膜材料的薄膜。用以在 其上塗佈配向膜材料的透明基板，以真空壓固定在印刷臺 後，進行印刷位置的較正。其後，在印刷臺前進的同時使 網目輥以及板體回轉。此時形成在網目輥表面的配向膜材 料薄膜轉印在板體的凸版上，再轉印在透明基板上而形成 配向膜。然後將形成配向膜的透明基板移至乾燥裝置，此 後以重複上述的步驟，而能夠連續的進行配向膜的連續處 理。 習知的苯胺印刷法，在容易形成配向膜的圖案且生產 性高的反面，具有如下所述的許多問題點。 首先，第1個問題點，因洗淨不足而在透明基板上附 有微粒’或是由裝置內部產生的微粒附在凸版表面，使得 在透明基板上不能塗佈配向膜材料，而產生必須重作的問 題。避免發生此重作問題的對策，一般是在形成配向膜後 進行顯像處理’並設置檢查裝置加以檢查，但是在不能完 全檢測出的現在’此爲液晶顯示元件的材料成品宠低落的 要因。但是，近年來亦嘗試將不良品的透明基板I的配向 膜剝除，以進行再利用。 第2個問題點，則爲配向膜材料的使用裊大爲了形 成均一的薄膜，必須同時在網目輥以及油墨輥的表面 佈配向膜材料’爲了防止此些表面的配向膜林奴〜n 二 過一定時間必須供給配向膜材料，因此配向g莫木 率不佳。 料的使用 4 (請先閱讀背面之注意事項再填寫本頁) •-Λ衣 訂---------線 0 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 525030 A7 B7 7194pif.doc/008 五、發明說明（3) (請先閱讀背面之注意事項再填寫本頁) 第3個問題點，在連續印刷中發生問題時，必須要相 當的時間使裝置從停止，並且必須對網目輥、凸板等加以 洗淨，因此到機械恢復運轉必須耗費很多的時間，使得機 械的使用率下降。 第4個問題點，對於凹凸過大的基板或具有曲面的基 板爲不可能塗佈的。 第5個問題點，在對透明基板上的配向膜材料形成新 規格的塗佈圖案時，亦必須製作新規格的凸板，而且在變 更種類的場合，亦必須變更凸板，在製造設備費用以及作 業的方面是不利的。 發明槪述 本發明的目的，在解決上述習知技術的問題，提供一 種以比較簡單的設備，而能夠形成效率佳、成本低以及均 一膜厚的配向膜的方法。 本發明的另一個目的，在提供一種系統，能夠簡單的 進行配向膜圖案的新規格形成、變更。 爲了達到上述的目的，本發明提供一種形成配向膜的 方法，在形成有電極的透明基板上，以噴墨噴嘴對透明基 板噴射配向膜材料以形成塗佈膜，再將之乾燥固化，而在 $ 透明基板上以預定的圖案形成配向膜。依此方法的話，會g 夠解決上述苯胺印刷法所造成的問題，以比較簡單的設 備，而能夠形成效率佳、成本低以及均一膜厚的配向膜。 在上述的構成中，在形成於透明基板上的配向膜材料 5 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 525030 7 194pif.doc/008 ' --------^__ 五、發明說明（★) 的塗佈膜達到乾燥固化爲止的期間，對塗佈膜給予物理的 振動而能夠提高膜厚的均一性。以此的話，能夠提高最後 所形成的配向膜的膜厚均一性。給予振動的方法，能夠使 用例如以振動產生裝置使透明基板振動的方法、以氣流產 生裝置所產生的氣流脈動給予塗佈膜振動的方法、以喇叭 等聲音產生裝置所產生的聲音波動給予塗佈膜振動的方法 等。 而且，配向膜材料中所含的γ _肤喃垸酮以及甲基_ 2-口比咯烷酮以及鹼液之中，使用一種溶液、或是使用兩種 又或是三種溶液的混合液，能夠對噴墨噴嘴的內部每經過 預定的時間進行沖流洗淨。依此的話，噴墨噴嘴不會產生 配向膜的噴射不良的情形，而能夠維持安定的噴射狀態。 而且，本發明爲了達成上述的目的，提供一種配向膜 形成圖案的作成系統，此系統具備有輸入透明基板的尺 寸、此透明基板上配向膜的形成區域數、此透明基板上配 向膜的形成位置、配向膜的目標膜厚等數値的輸入資料的 輸入部，基於前述輸入資料，將前述透明基板上的配向膜 的形成圖案，形成畫像影像資料的畫像影像資料作成部， 將前述畫像影像資料輸出至噴墨噴嘴的控制裝置的畫像影 像資料輸出部。使用此系統的話，僅需對輸入部輸入所須 的輸入資料，能夠容易的進行透明基板上的配向膜形成圖 案的新規格作成、以及種類變更時所導致的配向膜形成圖 案的變更、配向膜的形成位置或膜厚的微調整等。 6 (請先閱讀背面之注意事項再填寫本頁) ·丨丨丨丨丨丨丨訂-丨丨丨丨丨丨丨· »· 經濟邹智慧財產局員工消費合作杜印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 525030 7194pif.d〇c/〇〇8 A7 ---^------B7__ 五、發明說明（f ) _ ^ 111所示爲使用噴墨噴嘴，在透明基板上形成配向 膜材料_佈膜的製成斜視圖； Λγν· ^ ^ _至第4圖所示爲由噴墨噴嘴噴射透明基板上的 配向S吴材料的點的重疊狀態的平面示意圖； 胃5圖所示爲複數的噴墨噴嘴的配置狀態的剖面示意 圖， 胃6 11所示爲對配向膜材料的塗佈膜給予音波振動以 進行平坦化處理的側面示意圖； m 7 _所示爲未進行平坦化處理時配向膜的剖面示意 圖； 第8圖所示爲未進行平坦化處理時配向膜的剖面示意 圖； 第9圖爲對透明基板給予振動以進行平坦化處理的側 面示意圖； 第10圖至第11圖爲透明基板上形成配向膜圖案的平 面示意圖；以及 第12圖爲使用配向膜形成圖案的作成系統以形成配 向膜的流程圖。 圖示之標示說明： 11 :噴墨噴嘴 11a :噴射部 12 :複數個噴射噴嘴 7 本紙張尺^適用中國國家標準（CNS)A4規格（210 X 297公釐） " " (請先閱讀背面之注意事項再填寫本頁)525030 A7 B7 7 194pif.doc / 0〇5. Description of the Invention (() Field of the Invention The present invention relates to a method for forming an alignment film on a transparent substrate on which electrodes are formed in a liquid crystal display device manufacturing process. In recent years, liquid crystal display elements having advantages such as thinness, light weight, and low power consumption have been widely used in displays of word processors, personal computers, mobile phones, electronic digital assistants, televisions, cameras, and measuring instruments. The liquid crystal display element seals a liquid crystal composition between electrodes formed by two transparent substrates, and the electrode composed of two transparent substrates 'applies voltage to the liquid crystal composition for display' in order to obtain a uniform display when a voltage is applied Characteristics, the liquid crystal molecules must be given a pretilt angle (the angle between the molecular axis of the liquid crystal molecules and the surface of the alignment film). The alignment film is formed on the surface of the electrode and plays a very important role in giving the liquid crystal molecules a pretilt angle. A method for forming an alignment film on a transparent substrate is generally developed using a flexo printing device. Aniline printing method. Aniline printing device is mainly composed of the following components: called anilox roll, the surface of which has a fine concave metal roller, a resin roller called an ink roller (also known as an ink release blade In the case of polyester or SUS-made doctor blades.), Resin letterpress, a board that fixes the above components, and a printing table for transporting transparent substrates. To operate it, first, an organic polymer compound such as polyimide is formed. The material of the alignment film is dropped from the supply nozzle to the surface of the mesh roll and the 3 paper sizes are applied to the Chinese National Standard (CNS) A4 specification (2〗 〇297 × 297 mm) (Please read the precautions on the back before filling in this Page) Member of the 4th Bureau of Wisdom Smart Finance X Consumption Cooperation Du printed 525030 7 194pif.doc / 008 A7 B7 Printed by the Ministry of Intellectual Property ¾ Printed by employee consumption cooperation fi 5. Description of the invention (v) The mesh roll is turned. The ink roller close to the mesh roller thinns and extends the alignment film material, and forms a thin film of the alignment film material on the surface of the mesh roller. A transparent substrate for coating the alignment film material thereon is pressed under vacuum. After being fixed at the printing table, the printing position is corrected. After that, the screen roller and the plate body are rotated while the printing table advances. At this time, the alignment film material film formed on the surface of the screen roller is transferred to the relief of the plate body. It is then transferred onto a transparent substrate to form an alignment film. Then the transparent substrate forming the alignment film is moved to a drying device, and then the above steps can be repeated to continuously perform continuous processing of the alignment film. The conventional aniline printing method, On the reverse side where the pattern of the alignment film is easily formed and the productivity is high, there are many problems as described below. First, the first problem is that particles are attached to the transparent substrate due to insufficient cleaning, or are generated inside the device. The fine particles are attached to the surface of the relief, making it impossible to coat the alignment film material on the transparent substrate, which causes a problem that must be repeated. The countermeasures for avoiding this rework problem are generally developed after the formation of the alignment film, and an inspection device is installed for inspection, but now that it cannot be completely detected, this is the main reason for the low quality of the finished material of the liquid crystal display element. However, in recent years, attempts have been made to peel off the alignment film of the transparent substrate I of defective products for reuse. The second problem is the use of alignment film materials. In order to form a uniform film, it is necessary to distribute the alignment film material on the surface of the screen roller and the ink roller at the same time. The alignment film material must be supplied for a certain period of time, so the alignment ratio is not good. Use of materials 4 (Please read the precautions on the back before filling in this page) • -Λ Clothes Binding --------- Line 0 This paper size is applicable to China National Standard (CNS) A4 (210 X 297) 525030 A7 B7 7194pif.doc / 008 5. Description of the invention (3) (Please read the precautions on the back before filling this page) The third problem point, when a problem occurs in continuous printing, it must take a considerable time to make The device has to be stopped, and the mesh rollers, convex plates, etc. must be cleaned. Therefore, it takes a lot of time until the machine resumes operation, which reduces the use of the machine. The fourth problem is that it is impossible to coat substrates with excessive unevenness or substrates with curved surfaces. The fifth problem is that when a new specification coating pattern is formed on the alignment film material on the transparent substrate, a new specification convex plate must also be produced, and when the type is changed, the convex plate must also be changed. And the aspect of the operation is disadvantageous. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for forming an alignment film with high efficiency, low cost, and uniform film thickness by using relatively simple equipment while solving the problems of the conventional techniques. Another object of the present invention is to provide a system capable of easily forming and changing new specifications of an alignment film pattern. In order to achieve the above object, the present invention provides a method for forming an alignment film. On a transparent substrate on which an electrode is formed, an alignment film material is sprayed on the transparent substrate with an inkjet nozzle to form a coating film, which is then dried and cured. $ An alignment film is formed on the transparent substrate in a predetermined pattern. According to this method, the problems caused by the aniline printing method described above can be solved, and a relatively simple device can be used to form an alignment film with high efficiency, low cost, and uniform film thickness. In the above configuration, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applied to the 5 ^ paper size of the alignment film material formed on the transparent substrate 525030 7 194pif.doc / 008 '------ -^ __ 5. Description of the invention (★) While the coating film is dried and solidified, physical vibration is applied to the coating film to improve the uniformity of the film thickness. With this, the uniformity of the film thickness of the alignment film formed at the end can be improved. The method of applying vibration can be, for example, a method of vibrating a transparent substrate with a vibration generating device, a method of vibrating a coating film with an air current pulsation generated by an air flow generating device, or applying a wave of sound generated by a sound generating device such as a horn. The method of membrane vibration and so on. In addition, among the γ-furanone and methyl-2- 2-pyrrolidone and the lye contained in the alignment film material, one kind of solution or a mixed solution of two or three kinds of solutions is used. The interior of the inkjet nozzle can be washed and flushed every predetermined time. In this way, the inkjet nozzle can maintain a stable ejection state without causing ejection failure of the alignment film. In order to achieve the above-mentioned object, the present invention provides a system for forming an alignment film pattern. The system includes a size of an input transparent substrate, a number of formation regions of the alignment film on the transparent substrate, and a position of formation of the alignment film on the transparent substrate. The input unit of the input data such as the target film thickness of the alignment film and the like, based on the input data, forms an image of the alignment film on the transparent substrate to form an image image data creation unit of the image data, and the image data The image data output unit output to the control device of the inkjet nozzle. Using this system, it is only necessary to input the required input data to the input section, and it is easy to create new specifications of the alignment film formation pattern on the transparent substrate, and change the alignment film formation pattern and alignment film caused when the type is changed. Formation position or fine adjustment of film thickness. 6 (Please read the precautions on the back before filling this page) · 丨 丨 丨 丨 丨 丨 Order- 丨 丨 丨 丨 丨 丨 丨 ··· Economy Zou Intellectual Property Bureau employee consumption cooperation Du printed paper size applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 525030 7194pif.doc / 〇〇8 A7 --- ^ ------ B7__ 5. Description of the invention (f) _ ^ 111 shows the use Inkjet nozzle, forming an oblique view of the alignment film material _ cloth film on a transparent substrate; Λγν · ^ ^ _ to Figure 4 show the overlap of dots on the transparent substrate sprayed with the alignment material on the transparent substrate by the inkjet nozzle A schematic plan view of the state; FIG. 5 is a schematic cross-sectional view showing the arrangement state of a plurality of inkjet nozzles, and FIG. 6 11 is a schematic side view showing the application of sonic vibration to the coating film of the alignment film material for flattening treatment; m 7 _ shows a schematic cross-sectional view of the alignment film without a flattening treatment; FIG. 8 shows a cross-sectional schematic view of the alignment film without a flattening treatment; FIG. 9 shows vibrations applied to a transparent substrate for flattening. Side view; Figures 10 to 11 are transparent substrates Forming an alignment pattern is a schematic view of the film plane; and a second graph 12 used with a pattern generation system to form a film to form a flow chart of an alignment film. Explanation of the symbols in the figure: 11: Inkjet nozzle 11a: Jetting section 12: Multiple jetting nozzles 7 Paper ruler ^ Applicable to China National Standard (CNS) A4 (210 X 297 mm) " " (Please read first (Notes on the back then fill out this page)
經濟部智慧財產局員工消費合作社印製 525030 A7 7 1 94pif.doc/008 gy 五、發明說明（ 13 :供給口 14 :透明基板 21 :喇叭 22 :承載平臺 A :點 P:噴嘴配列節距 S :點節距 T、t :塗佈膜 較佳窨施例之詳細說服 第1圖所示爲本發明實施例所用的噴墨噴嘴。噴射噴 嘴11配置在透明基板14的配向膜形成側的上方（同圖式 的上面），在與透明基板I4對象的表面上具備有多數個噴 射噴嘴12。在此實施例中，噴射噴嘴11例如是壓電式噴 墨噴嘴，一個噴頭上以預定間隔設置有500個噴射噴頭(一 個噴頭相當的有效幅度爲70mm左右）。爲了確保配向膜 材料的安定噴射狀態，亦可以設置噴頭表面具備自動淸洗 功能，以專用洗淨液進行自動沖洗功能等自動機構。此噴 墨噴嘴11，由墨水儲槽(未圖示）的供給口 13供給由聚亞 醯胺等有機高分子所形成的配向膜材料。而且，透明基板 14以玻璃等材料所形成，在其一側的平面上（同圖式的上 面）以預定的圖案形成透明電極。配向膜形成於透明電極 的上層。 使用此噴墨噴嘴11如下所述的形成配向膜，亦即是 8 本紙張尺度適@_ϊ國家標準（CNS)A4規格⑵〇 X 297公爱了 (請先閱讀背面之注意事項再填寫本頁) 訂---------線 525030 瘦齊邹皆i犲產局員I-消費合阼fi印製 7 1 94pif.doc/008 五、發明說明（^)) 如第1圖所示’將噴墨噴嘴η配置在透明基板14上預定 咼度的位置’噴墨噴嘴u對透明基板14做相對移動的同 時（噴墨噴嘴11可動、透明基板14固定，噴墨噴嘴11固 疋、透明基板14可動，或是噴墨噴嘴u以及透明基板14 兩者皆可動的其中任一皆可使用），在透明基板14的電極 上由噴射噴嘴12噴射配向膜材料以形成塗佈膜。其後， 將塗佈膜乾燥固化，在透明基板上以預定的膜厚形成配向 膜。尙且，噴墨噴嘴u的位置、配向膜材料的噴射量、 噴射時機、點的大小、外加給噴墨噴嘴丨丨的電壓等，以 未圖示的控制裝置加以控制。 此實施形態中，調整配向膜材料的黏度爲10〜20 cp、 表面張力爲30〜40 dyn，以使其物理性質爲適合由噴墨噹 嘴η噴射。配向膜材料的黏度調整在10〜20cp的範圍內了 噴墨噴嘴11的噴射噴嘴12表面的配向膜材料不會下垂， 而且噴射時會匕夠以安定的液體切面（噴頭部的界面狀態安 定的意思，一般而言係指液表面(meniscus)安定之意）良好 的進行配向膜材料的噴射。對噴墨噴嘴u而言，此安定 的液表面（meniscus)爲進行良好的配向膜材料噹射的重要 因素。而且，調整配向膜材料的表面材料在3〇〜4〇 dp的 箪(2圍內，熊夠以噴墨噴嘴U的噴射安定性，在膜成形後 得到良好的平坦性。 而且，在噴墨噴嘴11初期供給配向膜材料的場合， 因爲氣泡而使噴墨噴嘴n產生噴射不良的場合，能夠如 下述的將噴墨噴嘴11內部的氣泡去除。亦即是在配向膜 (請先閱讀背面之注意事項再填寫本頁) 1. •線 525030 7 194pif.doc/008 A7 B7 經齋邹fe»曰慧材4¾員X-消費釜阼眛卬製 五、發明說明（¾ ) 材料中溶入具脫氣性的溶劑，例如將具甲基的醯胺類或是 r -肤喃烷酮（皆爲進行脫氣處理的物品）等脫氣溶劑通入噴 墨噴嘴π的內部，以去除其內部的氣泡，在完全除去其 內部的氣泡後，供給配向膜材料至噴墨噴嘴11的內部以 置換其中的脫氣溶劑。然後，在確認噴墨噴嘴11的噴射 狀態後開始形成配向膜。以去除噴墨噴嘴u內部的氣泡， 而能夠以安定的狀態進行連續的噴射。而且，以使用溶解 於配向膜材料中且具脫氣性的液體以去除噴墨噴嘴11中 的氣泡，在置換配向膜材料時噴墨噴嘴u內的聚亞醯胺 等的高分子材料不會析出，不須顧慮因凝固所導致的配向 膜材料的噴射不良。而且，所使用的配向膜材料本身具有 脫氣性的§舌’亦爲除去噴墨噴嘴1 1內的氣泡以進行安定 的噴射的有效方法。 尙且，必須大幅度調整塗佈膜的膜厚時，以及配向膜 材料的固形成份濃度的調整，必須進行微調整時，能夠以 調整由噴墨噴嘴所噴射得配向膜材料的點的重疊量的調整 來進f了。弟2圖以及第3圖爲由噴墨噴嘴11噴射至透明 基板14上的配向膜材料的點a的重疊狀態的示意圖。 在第2圖中所示，噴墨噴嘴1]t與γ軸平行設置(噴射 噴頭12的配列方向於Υ軸成平行而設置），在χ軸方向往 復移動並往Υ軸的方向送出移動，以在透明基板14上的 預定區域形成配向膜材料的塗佈膜。噴墨噴嘴丨丨沿著χ 軸方向往路方向移動後，僅向Y軸向前移動噴射噴嘴U 的配列節距P的1/2節距，再沿著χ軸方向往復路移動。 10 本紙張尺度適ϋ國國家標準（cns)A4規格（21〇χ 297公髮) -- (請先閱讀背面之注意事項再填寫本頁) 訂·. 丨線· A7 525030 7 1 94pif.doc/008 ------ 五、發明說明（1 ) 而且，噴墨噴si 11白勺往路以及復路之間酉己向膜材料的 射位置（點位置)以點節距s的1/2節距而僅在χ軸方向移 動時噴射。依此配向膜材料的點以麵狀重疊而能夠 均一膜厚的配向膜。 Λ 尙且，欲將噴墨噴嘴11以及噴射位置的移動量變更 爲噴射噴嘴12的配列節距ρ以及點節距3的1/2以外的 數値時，以任意變更噴射噴嘴12的配列節距ρ以及點節 距S而用以對配向膜材料的點的重疊量進行任意的調整亦 無妨。因此，噴墨噴頭的χ軸方向移動亦有往復一次以上 的情形。依此對配向膜材料的點的重疊量進行任意的調 整，而能夠任思的調整配向膜的膜厚。 第3圖中所示’噴墨噴嘴u相對於γ軸做斜向配置， 以朝X軸的分量方向移動，以在透明基板14上的預定區 域形成配向膜材料的塗佈膜。由於噴墨噴嘴丨丨爲斜向配 置使得噴射噴嘴12對γ軸方向配列節距縮小，而能夠任 意的調整配向膜材料的點的重疊量。依此能夠任意的調整 配向膜的膜厚。 尙且’配向膜材料的點的重疊狀態並不限定於第2圖 以及第3圖所示的狀態，亦可以如第*圖所示的狀態重疊。 第5 _爲使用複數個噴射噴嘴^以提升處理速度時， 噴墨噴嘴11的配置狀態示意圖。複數個噴墨噴嘴11與鄰 接噴墨噴嘴11的噴射部Ua，以左側端部及右側端部一致 而成鋸齒狀配置。由於一次的移動能夠進行廣範圍的配向 膜噴射，處理的效率良好。 (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 525030 A7 7 1 94pif.doc / 008 gy V. Description of the invention (13: Supply port 14: Transparent substrate 21: Horn 22: Bearing platform A: Point P: Nozzle array pitch S : Dot pitch T, t: Detailed explanation of the preferred embodiment of the coating film Figure 1 shows the inkjet nozzle used in the embodiment of the present invention. The spray nozzle 11 is arranged above the alignment film forming side of the transparent substrate 14 (Same as the upper surface of the figure), a plurality of ejection nozzles 12 are provided on the surface of the object corresponding to the transparent substrate I4. In this embodiment, the ejection nozzles 11 are, for example, piezoelectric inkjet nozzles, and one nozzle is arranged at a predetermined interval. There are 500 spray nozzles (one nozzle has an effective width of about 70mm). In order to ensure the stable spray state of the alignment film material, the nozzle surface can also be equipped with an automatic cleaning function and an automatic cleaning function such as a dedicated cleaning solution for automatic flushing. The inkjet nozzle 11 is supplied with an alignment film material made of an organic polymer such as polyimide through a supply port 13 of an ink tank (not shown). The transparent substrate 14 is made of glass or the like. The transparent electrode is formed in a predetermined pattern on a plane on one side (the same as the upper surface of the figure). An alignment film is formed on the upper layer of the transparent electrode. An alignment film is formed using the inkjet nozzle 11 as described below, and That is, 8 paper sizes are suitable for @ _ϊNational Standards (CNS) A4 specifications⑵〇X 297 public love (please read the precautions on the back before filling this page) Order --------- line 525030 thin Zou Jiei, member of the Bureau of Industry and Industry I-consumption fi print 7 1 94pif.doc / 008 V. Description of the invention (^)) As shown in Figure 1, 'the inkjet nozzle η is arranged on the transparent substrate 14 at a predetermined angle Position 'while the inkjet nozzle u moves relative to the transparent substrate 14 (the inkjet nozzle 11 is movable, the transparent substrate 14 is fixed, the inkjet nozzle 11 is fixed, the transparent substrate 14 is movable, or the inkjet nozzle u and the transparent substrate 14 are moved Either can be used (any one can be used), and the alignment film material is sprayed from the spray nozzle 12 on the electrode of the transparent substrate 14 to form a coating film. Thereafter, the coating film was dried and cured, and an alignment film was formed on the transparent substrate to a predetermined film thickness. In addition, the position of the inkjet nozzle u, the ejection amount of the alignment film material, the ejection timing, the dot size, and the voltage applied to the inkjet nozzle are controlled by a control device (not shown). In this embodiment, the viscosity of the alignment film material is adjusted to 10 to 20 cp, and the surface tension is adjusted to 30 to 40 dyn, so that its physical properties are suitable for ejection from the ink jet nozzle η. The viscosity of the alignment film material is adjusted within the range of 10 to 20 cp. The alignment film material on the surface of the spray nozzle 12 of the inkjet nozzle 11 will not sag, and it will be able to cut with a stable liquid section (the interface state of the spray head is stable when spraying). Meaning, in general, it means that the liquid surface (meniscus is stable) is good for spraying the alignment film material. For the inkjet nozzle u, this stable liquid surface (meniscus) is an important factor for a good alignment film material. In addition, the surface material of the alignment film material was adjusted to be within a range of 30 to 40 dp (within 2 circles, and the ejection stability of the inkjet nozzle U was sufficient to obtain good flatness after the film was formed. In addition, in the inkjet When the nozzle 11 is initially supplied with the alignment film material, when the inkjet nozzle n has a poor ejection due to air bubbles, the air bubbles in the inkjet nozzle 11 can be removed as described below. That is, the alignment film (please read the back Note for this page, please fill in this page again) 1. • Line 525030 7 194pif.doc / 008 A7 B7 Jingzhai Zou fe »Yuehui Cai 4¾ member X-consumer kettle production 5. Description of the invention (¾) A degassing solvent, for example, a deaeration solvent such as methylamine or r-spananone (both of which are degassed) is passed into the inkjet nozzle π to remove the inside After completely removing the air bubbles inside, the alignment film material is supplied to the inside of the inkjet nozzle 11 to replace the degassed solvent therein. Then, the alignment film is formed after the ejection state of the inkjet nozzle 11 is confirmed. Air bubbles inside the inkjet nozzle u Continuous ejection is performed in a stable state. Moreover, a degassing liquid dissolved in the alignment film material is used to remove air bubbles in the inkjet nozzle 11 and the polyarylene in the inkjet nozzle u is replaced when the alignment film material is replaced. Polymer materials such as amines do not precipitate, and there is no need to worry about poor ejection of the alignment film material caused by solidification. In addition, the alignment film material itself has a degassing property. § The tongue is also used to remove the inkjet nozzle 1 1 It is an effective method for stable ejection of air bubbles inside. 尙 In addition, when the film thickness of the coating film must be adjusted significantly, and the solid content concentration of the alignment film material must be adjusted, and fine adjustment must be made, the ink jet can be adjusted by inkjet adjustment. The adjustment of the overlap amount of the dots of the alignment film material sprayed by the nozzle is advanced. Figures 2 and 3 are schematic diagrams of the overlap state of the dots a of the alignment film material sprayed from the inkjet nozzle 11 on the transparent substrate 14. As shown in the second figure, the inkjet nozzle 1] t is arranged parallel to the γ axis (the arrangement direction of the jetting heads 12 is arranged parallel to the y-axis), reciprocating in the χ-axis direction, and sent out in the direction of the y-axis. A coating film of an alignment film material is formed in a predetermined area on the transparent substrate 14. After the inkjet nozzle moves in the direction of the χ-axis direction, the alignment pitch P of the injection nozzle U is moved forward only in the Y-axis direction. 1/2 pitch, and then move back and forth along the χ-axis direction. 10 This paper is in accordance with the national standard (cns) A4 size (21〇χ 297 issued)-(Please read the precautions on the back before filling (This page) Order ·. 丨 Line · A7 525030 7 1 94pif.doc / 008 ------ V. Description of the invention (1) Moreover, the inkjet spray Si 11 is facing the film between the road and the road. The shot position (point position) is sprayed at a pitch of 1/2 of the point pitch s while moving only in the x-axis direction. In this way, the dots of the alignment film material are superimposed in a plane shape, and an alignment film having a uniform film thickness can be obtained. Λ 尙 When changing the moving amounts of the inkjet nozzles 11 and the ejection positions to numbers other than 1/2 of the arrangement pitch ρ of the ejection nozzles 12 and the point pitch 3, the arrangement of the ejection nozzles 12 can be changed arbitrarily The pitch ρ and the point pitch S may be used to arbitrarily adjust the overlap amount of the dots of the alignment film material. Therefore, the movement in the x-axis direction of the inkjet head may be repeated one or more times. According to this, the dot overlap amount of the alignment film material can be arbitrarily adjusted, and the film thickness of the alignment film can be freely adjusted. The 'inkjet nozzle u shown in FIG. 3 is arranged obliquely with respect to the γ axis to move toward the component direction of the X axis to form a coating film of an alignment film material in a predetermined area on the transparent substrate 14. Because the inkjet nozzles are arranged obliquely, the arrangement pitch of the jetting nozzles 12 in the γ-axis direction is reduced, and the amount of dot overlap of the alignment film material can be adjusted arbitrarily. According to this, the film thickness of the alignment film can be arbitrarily adjusted. Moreover, the overlapping state of the dots of the alignment film material is not limited to the states shown in FIG. 2 and FIG. 3, and may be overlapped as shown in FIG. The fifth figure is a schematic diagram of the arrangement state of the inkjet nozzles 11 when a plurality of jet nozzles are used to increase the processing speed. The plurality of inkjet nozzles 11 and the ejection portion Ua adjacent to the inkjet nozzle 11 are arranged in a zigzag manner so that the left end portion and the right end portion coincide with each other. Since a wide range of alignment film ejection can be performed in one movement, the processing efficiency is good. (Please read the notes on the back before filling this page)
本紙張尺度適用中國國家標準（CNS)A4規格（21〇 297公釐） 525030 A7 B7 7 1 94pif.doc/008 五、發明說明（（D ) (請先閱讀背面之注意事項再填寫本頁) 具備有500個噴射噴嘴12的壓電式噴墨噴嘴11如第 5圖所示的配置，將黏度以及表面張力調整到上述範圍的 聚胺酸型式的配向膜材料，由噴射噴嘴12如第4圖所示 的噴射，在l〇〇*l〇〇mm的透明基板14上以配向膜材料的 塗佈膜t形成預定的圖案。尙且，透明基板14配置於如 第6圖所示的承載平臺22上。 然後，在配向膜材料的塗佈膜t到乾燥固化爲止的期 間，對塗佈膜t施予物理的振動以進行膜厚的均一化處理 (平坦化處理）。在此實施形態中，平坦化處理的進行如下 所述。亦即是如第6圖所示，使用播放頻率30Hz〜5KHz， 出力100W的重低音用喇叭21，以周波數（30〜200Hz)、 出力（40〜80W)、塗佈膜t與喇叭21間的距離（30〜 100mm)、處理時間（1〇〜60 sec)、由喇叭21所發射的音波 V的波形（正弦波、鋸波）的五個參數，在上述括弧內的範 圍做種種的設定，由喇叭21發射音波V至透明基板14上 的塗佈膜t，以音波V的波動給於塗佈膜t振動。 進行上述平坦化處理後，使透明基板14上的塗佈膜t 乾燥固化以形成配向膜。然後對下述的目標値進行評價。 經齊邹智慧犲查¾員X.消費合泎fi印製 而且，以與上述相同的條件，在透明基板14上形成 配向膜材料的塗佈膜後，未進行平坦化處理而乾燥固化形 成配向膜，而與經過平坦化的場合進行比較評價。 [目標値] 絕對膜厚：500〜1000埃 膜厚的均一性：面內凌亂± 15%以內 12 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） " "" 525030 A7 B7 7 1 94pif.doc/008 五、發明說明（（i) 配向膜形成區域的位置精度：相對於基準位置± 0.3mm 以內 配向膜形成區域的周圍部的膜厚凌亂度：〇.8mm內 此結果除了膜厚的均一性之外，與有無進行平坦化無 關，確認能夠達到上述目標値。 對於膜厚的均一性，在未進行均一化處理的場合，如 第7圖所示，配向膜T的表面成比較大的波狀（由配向膜 材料的點的中心位置突起，由點之間的重疊部份凹陷）， 面內凌亂度大於± 20%以上而變大。相對於此，進行平坦 化處理的場合，如第8圖所示，配向膜T的表面變得平滑 化，面內凌亂度在± 10%〜15%之內而平坦性提升。特別 是音波V的周波數在50Hz以下，使用正弦波且塗佈膜t 與喇叭21的間隙在50mm以下時，能得到良好的結果。 而且，喇叭21的出力加大，且處理時間長時亦能得到良 好的結果。但是，喇叭21的出力過大的話，配向膜T的 周圍部會發生滴流現象，因此出力控制在80W以下較佳。 尙且，平坦化處理除了上述的狀態之外，例如第9圖 所示的亦可以對載置透明基板14的承載平臺22給予振動 以進行平坦化處理。 但是，在噴墨噴嘴11的內部中，配向膜材料中的固 形成份的析出物的附著堆積，而造成噴射不良的原因。在 此實施形態中，在配向膜材料中所含的r -眹喃烷酮中， 混用無機鹼或胺基等所構成的鹼液，並使用此鹼液以20% 〜50%的範圍混合的混合液，對噴墨噴嘴11的內部每經過 13 (請先閱讀背面之注意事項再填寫本頁) 訂： --線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 525030 7 1 94pif.doc/008 ^ 五、發明說明Uv) 預定的時間而自動進行沖流洗淨。 (請先閱讀背面之注意事項再填寫本頁) 使用開始時間3小時、6小時、12小時、18小時、24 小時後各別進行沖流洗淨，確認具有洗淨的效果。尙且， 沖流洗淨在噴墨噴嘴11的壓電動作狀態下，上述混合液 加壓注入內部以噴射噴嘴12進行噴射。此結果在12小時 以內（3小時、6小時、12小時後)進行沖流洗淨的場合， 內部不會附著固形成份析出物，維持安定的噴射狀態，超 過18小時後（18小時後、24小時後)進行沖流洗淨的場合， 內部確認附著固形成份析出物，發生噴射不良的情形。 尙且，配向膜材料內所含的肤喃烷酮以及n-甲基-2-毗咯烷酮之內，使用其中認一種溶液、或是使用兩種溶 液的混合液，以比較短的間隔淸洗的話，亦能夠得到預期 的洗淨效果。而且，噴墨噴嘴11本身爲耐鹼性佳的材質 的話，單獨使用鹼液，或是以7 -眹喃烷酮或是N_甲基-2-口 比咯烷酮加入鹼液，形成稀釋濃度比上述範圍（20〜50%)高 的混合液用以洗淨，能得到更高的洗淨效果。 其次，對配向膜的作成系統做如下說明。 經濟部智慧財產局員工消費合作社印製 依透明基板的尺寸、基板上所形成配向膜的大小，在 一塊透明基板上有形成一面或是複數面的場合。第1〇圖 爲透明基板14上的6個區域形成配向膜T的形成例（得到 6面）、第11圖爲透明基板14上的2個區域形成配向膜τ 的形成例（得到2面）的示意圖。第1〇圖所示的話，取決於 透明基板14的尺寸以及a〜q的規格，而決定基板上配向 膜T的形成圖案（6面），如第11圖所示的話，取決於透明 14 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公髮) ""' "" 525030 A7 B7 7 1 94pif.doc/008 五、發明說明（（h) 基板14的尺寸以及a〜q的規格，而決定基板上配向膜T 的形成圖案（2面）。 (請先閱讀背面之注意事項再填寫本頁) 在電腦的輔助記憶裝置上，置入進行配向膜形成圖案 的作成系統所專用的軟體，而能夠如第12圖所示的流程 圖進行，在基板上形成配向膜。 首先，上述專用軟體由電腦的記憶體中呼叫出輸入配 向膜的形成區域數的數値。依此，對應配向膜的形成區域 數，例如第10圖或是第11圖所示，切換到位置資料的輸 入畫面。在此畫面上輸入透明基板的尺寸，上述a〜q所 要的數値，以確定配向膜的形成位置。其後切換畫面，輸 入配向膜的目標膜厚、噴射點的重疊量、對噴墨噴頭的外 加電壓等資料。 --線 如上所述，對輸入部所輸入的資料送至畫像影像資料 作成部，以在畫像影像作成部中，形成基底上配向膜形成 圖案的畫像影像資料。此畫像影像資料以預定的檔案名稱 儲存在電腦的輔助記憶裝置(硬碟、軟碟片、光碟片）上。 在形成配向膜時，由電腦的記憶體中將以作成的畫像 影像料讀出，執行實際作業的指令。依此，此畫像影像資 料由畫像影像資料作成部，輸出至噴射噴嘴的控制裝置。 然後，噴墨噴嘴依照畫像影像資料進行配向膜材料的噴 射，在基板上依所希望的圖案形成配向膜材料的塗佈膜。 而且，當登記資料修正的場合，對輸入部輸入必要的 資料以進行修正。 15 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）This paper size applies to China National Standard (CNS) A4 specification (21,297 mm) 525030 A7 B7 7 1 94pif.doc / 008 V. Description of the invention ((D) (Please read the precautions on the back before filling this page) The piezoelectric inkjet nozzle 11 having 500 jet nozzles 12 is arranged as shown in FIG. 5. A polyurethane-type alignment film material whose viscosity and surface tension are adjusted to the above ranges is set by the jet nozzle 12 as in the fourth figure. In the spray shown in the figure, a predetermined pattern is formed with a coating film t of an alignment film material on a transparent substrate 14 of 100 * 100 mm. In addition, the transparent substrate 14 is arranged on a carrier as shown in FIG. 6. On the stage 22. Then, the coating film t is subjected to physical vibration during the period from the coating film t of the alignment film material to drying and curing to perform a film thickness uniformization treatment (planarization treatment). In this embodiment The flattening process is performed as follows. That is, as shown in FIG. 6, a subwoofer 21 with a playback frequency of 30 Hz to 5 KHz and a power of 100 W is used. 80W), the distance between the coating film t and the horn 21 (30 ~ 100mm), The processing time (10 ~ 60 sec), the five parameters of the waveform (sine wave, saw wave) of the sound wave V emitted by the horn 21 are set in the above brackets, and the sound wave V is transmitted by the horn 21 to The coating film t on the transparent substrate 14 is vibrated to the coating film t with the fluctuation of the sonic wave V. After the flattening treatment is performed, the coating film t on the transparent substrate 14 is dried and cured to form an alignment film. It was evaluated by the target described above. It was printed by Qi Zou, a member of X. Consumers, and printed by fi. Moreover, under the same conditions as above, after the coating film of the alignment film material was formed on the transparent substrate 14, it was not flat. Alignment film is dried and cured to form an alignment film, and compared with the case where it is flattened. [Target 値] Absolute film thickness: 500 ~ 1000 angstrom Uniformity of film thickness: In-plane disorder ± 15% or less 12 ^ Paper size applies China National Standard (CNS) A4 (210 X 297 mm) 525030 A7 B7 7 1 94pif.doc / 008 V. Description of the invention ((i) Position accuracy of the alignment film formation area: relative to the reference Orientation film shape within position ± 0.3mm The thickness of the surrounding area of the formation area is disordered. In addition to the uniformity of the film thickness within 0.8 mm, this result was confirmed to achieve the above target regardless of the presence or absence of flattening. The uniformity of the film thickness was not measured. In the case of homogenization, as shown in FIG. 7, the surface of the alignment film T has a relatively large wave shape (protruded from the center position of the points of the alignment film material and recessed from the overlap between the points), and the surface is messy. When the degree is greater than ± 20% or more, when the flattening treatment is performed, as shown in FIG. 8, the surface of the alignment film T becomes smooth, and the degree of in-plane clutter is within ± 10% to 15%. Internal and flatness improved. In particular, good results can be obtained when the frequency of the sonic wave V is 50 Hz or less, a sine wave is used, and the gap between the coating film t and the horn 21 is 50 mm or less. Moreover, the output of the horn 21 is increased, and good results can be obtained even when the processing time is long. However, if the output of the horn 21 is excessively large, a dripping phenomenon may occur in the peripheral portion of the alignment film T. Therefore, it is better to control the output to 80 W or less. In addition, in addition to the above-mentioned planarization process, for example, as shown in FIG. 9, the load-bearing platform 22 on which the transparent substrate 14 is placed may be subjected to vibration to perform the planarization process. However, in the interior of the inkjet nozzle 11, deposits of solid matters in the alignment film material are deposited and accumulated, which causes ejection failure. In this embodiment, an alkali liquid composed of an inorganic base or an amine group is mixed with the r-galanone contained in the alignment film material, and the alkali liquid mixed with the alkali liquid in a range of 20% to 50% is used. For the mixed liquid, the inkjet nozzle 11 passes every 13 times (please read the precautions on the back before filling this page). Order: --line · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ) 525030 7 1 94pif.doc / 008 ^ V. Description of the invention Uv) Automatic flushing at a predetermined time. (Please read the precautions on the back before filling in this page.) After using for 3 hours, 6 hours, 12 hours, 18 hours, and 24 hours, wash and rinse separately, and confirm the cleaning effect. In addition, in the rinsing and washing, in the piezoelectric operation state of the inkjet nozzle 11, the above-mentioned mixed liquid is injected under pressure and sprayed by the spray nozzle 12. When the result is flushed within 12 hours (3 hours, 6 hours, and 12 hours later), no solid precipitates will adhere to the inside, and a stable spray state will be maintained. After 18 hours (after 18 hours, 24 hours) Hours later) When flush washing was performed, it was confirmed internally that solid-form deposits adhered, and spray failure occurred. In addition, among the furanone and n-methyl-2-pyrrolidone contained in the alignment film material, one kind of solution or a mixture of two kinds of solutions is used at relatively short intervals. The washing effect can also be expected. In addition, if the inkjet nozzle 11 itself is a material with good alkali resistance, the lye is used alone, or the lye is added with 7-pyranone or N-methyl-2-orpyrrolidone to form a dilution. A mixed liquid having a concentration higher than the above range (20 to 50%) is used for washing, and a higher washing effect can be obtained. Next, the preparation system of the alignment film will be described as follows. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Depending on the size of the transparent substrate and the size of the alignment film formed on the substrate, there may be occasions when one or more surfaces are formed on a transparent substrate. FIG. 10 is an example of forming an alignment film T in 6 regions on the transparent substrate 14 (to obtain 6 sides), and FIG. 11 is an example of forming an alignment film τ in two regions on the transparent substrate 14 to obtain 2 sides Schematic. As shown in FIG. 10, the formation pattern (six faces) of the alignment film T on the substrate is determined depending on the size of the transparent substrate 14 and the specifications of a to q. As shown in FIG. 11, it depends on the transparent 14 substrates. Paper size applies to China National Standard (CNS) A4 specification (210 X 297 issued) " " '" " 525030 A7 B7 7 1 94pif.doc / 008 5. Description of the invention ((h) the size of the substrate 14 and a ~ q specifications, and determine the formation pattern of the alignment film T on the substrate (2 sides). (Please read the precautions on the back before filling this page.) On the computer's auxiliary memory device, insert the alignment film formation pattern. The software dedicated to the system can be created, and the alignment film can be formed on the substrate as shown in the flowchart shown in Fig. 12. First, the above-mentioned dedicated software calls out the number of input alignment film formation areas from the memory of the computer. .According to this, corresponding to the number of formation areas of the alignment film, for example, as shown in Fig. 10 or Fig. 11, switch to the position data input screen. Enter the size of the transparent substrate on this screen. To determine the alignment film Form the position. Then switch the screen and input the target film thickness of the alignment film, the overlap amount of the ejection points, the applied voltage to the inkjet head, etc. --- As described above, the data input to the input section is sent to the portrait image The data creation unit is used to form the portrait image data of the alignment film formation pattern on the substrate in the portrait image creation unit. This portrait image data is stored in the computer's auxiliary memory device (hard disk, floppy disk, optical disk) with a predetermined file name. ). When forming the alignment film, the created image image data is read out from the memory of the computer to execute the actual operation instructions. Based on this, the image image data is produced by the image image data creation unit and output to the spray nozzle. Control device. Then, the inkjet nozzle ejects the alignment film material in accordance with the image data, and forms a coating film of the alignment film material on the substrate in a desired pattern. Furthermore, when the registration data is revised, it is necessary to input the input part 15 This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297 mm)