JP2010210870A - Functional thin film, liquid crystal display device, and functional thin film forming method - Google Patents

Functional thin film, liquid crystal display device, and functional thin film forming method Download PDF

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JP2010210870A
JP2010210870A JP2009056191A JP2009056191A JP2010210870A JP 2010210870 A JP2010210870 A JP 2010210870A JP 2009056191 A JP2009056191 A JP 2009056191A JP 2009056191 A JP2009056191 A JP 2009056191A JP 2010210870 A JP2010210870 A JP 2010210870A
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thin film
rectangle
functional thin
liquid crystal
region
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Kazuhisa Iwasaki
和久 岩崎
Yasuo Toko
康夫 都甲
Hidekazu Kirita
英和 桐田
Hiroshi Kisaka
浩 木坂
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Stanley Electric Co Ltd
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Stanley Electric Co Ltd
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<P>PROBLEM TO BE SOLVED: To improve the accuracy of contour shapes in corner parts of an alignment layer or the like having a rectangular shape, in an ink jet printing system. <P>SOLUTION: In the ink jet printing system, coating liquid such as the alignment layer is applied to a coating pattern region of the alignment layer or the like where a right-angle triangular pattern is extended in an arrangement for extending opposite sides of the rectangular shape in each corner part, of a rectangular basic coating pattern. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、機能性薄膜、液晶表示装置、および機能性薄膜成膜方法に関する。   The present invention relates to a functional thin film, a liquid crystal display device, and a functional thin film forming method.

液晶表示装置において、液晶分子の配向を制御する配向膜が用いられる。配向膜は、液晶分子を水平配向させたり、垂直配向させる機能を有する薄膜である。配向膜の様に、特定の機能を果たす薄膜を機能性薄膜と呼ぶ。液晶表示装置は、対向基板間に液相層を挟持する構成を有する。通常、液相層に電圧を印加するための電極が、両基板上に形成され、必要に応じて電極を絶縁膜で覆い、その上に配向膜が形成される。   In a liquid crystal display device, an alignment film that controls the alignment of liquid crystal molecules is used. The alignment film is a thin film having a function of horizontally aligning or vertically aligning liquid crystal molecules. A thin film that performs a specific function like an alignment film is called a functional thin film. The liquid crystal display device has a configuration in which a liquid phase layer is sandwiched between opposing substrates. Usually, an electrode for applying a voltage to the liquid phase layer is formed on both substrates, and the electrode is covered with an insulating film as necessary, and an alignment film is formed thereon.

両基板間には、閉じた形状のメインシールが形成され、メインシール内側の空間に液晶を収容する。メインシールは、配向膜の上に形成すると密着性が不足し、歩留まりを低下させる可能性がある。通常、メインシールは配向膜の形成された領域の外側に形成する。配向膜の形成されていない領域は液晶分子を配向できないので、表示領域としては利用できない。配向膜とメインシールとの間の額縁状領域は無駄な領域ともいえる。特に小型の液晶表示装置においては、表示領域以外のデッドスペースを極力小さくすることが要求されている。   A closed main seal is formed between the two substrates, and the liquid crystal is accommodated in a space inside the main seal. When the main seal is formed on the alignment film, the adhesion is insufficient and the yield may be reduced. Usually, the main seal is formed outside the region where the alignment film is formed. Since the region where the alignment film is not formed cannot align liquid crystal molecules, it cannot be used as a display region. It can be said that the frame-shaped region between the alignment film and the main seal is a useless region. In particular, in a small liquid crystal display device, it is required to make the dead space other than the display area as small as possible.

配向膜や絶縁膜はフレキソ印刷によって成膜されていた。フレキソ印刷を行なうためにはフレキソ版が必要である。多品種、少量生産の場合、品種毎のフレキソ版が必要であり、フレキソ版の交換には人手による作業が必要である。また、フレキソ版の洗浄には多量の有機溶媒が必要であり、保管には温度、湿度が安定した保管場所が必要であり、消費する材料の利用効率は低く、フレキソ版と基板との接触は異物付着の可能性を生じる。   The alignment film and the insulating film were formed by flexographic printing. In order to perform flexographic printing, a flexographic plate is required. In the case of multi-product and small-volume production, a flexo plate for each product type is required, and manual operation is required to replace the flexo plate. In addition, a large amount of organic solvent is required to clean the flexographic plate, and a storage place where the temperature and humidity are stable is required for storage, and the use efficiency of the consumed material is low. Contact between the flexographic plate and the substrate is There is a possibility of foreign matter adhesion.

インクジェット印刷がフレキソ印刷に変わる成膜法として注目されている。フレキソ印刷に用いられる材料の粘度は25mPa・s以上であるが、インクジェット印刷に用いられる材料の粘度は2mPa・s〜15mPa・s程度である。低粘度の材料は、乾燥後に固相となる固形成分の濃度が低く、液相の塗布膜が周囲に拡がり易い。そのため、インクジェット印刷で形成した薄膜は、その周辺において寸法制御および形状制御が困難であることが指摘されている。   Attention has been focused on a film forming method in which inkjet printing is replaced with flexographic printing. The viscosity of the material used for flexographic printing is 25 mPa · s or more, but the viscosity of the material used for inkjet printing is about 2 mPa · s to 15 mPa · s. The low-viscosity material has a low concentration of solid components that become a solid phase after drying, and the liquid-phase coating film tends to spread around. For this reason, it has been pointed out that a thin film formed by ink jet printing is difficult to control in size and shape around the thin film.

特開2003−126760号は、まず塗布領域の輪郭部に塗布液を吐出して土手部を形成し、その後土手部で囲まれた主領域に土手部と略同一成分の塗布液を塗布することを提案する。土手部が塗布液の堰として機能するので、塗布膜の形状制御の精度が向上する。   Japanese Patent Application Laid-Open No. 2003-126760 first forms a bank by discharging a coating liquid to the contour of the coating area, and then applies a coating liquid having substantially the same components as the bank to the main area surrounded by the bank. Propose. Since the bank functions as a weir for the coating solution, the accuracy of the shape control of the coating film is improved.

特開2004−361623号は、配向膜塗布領域の周辺部を空隙部を含む微細パターンに塗布することを提案する。空隙部を形成することで、周辺部の塗布液の乾燥を促進し、固形成分の濃度を向上し、濡れ拡がりを抑制する。   Japanese Patent Application Laid-Open No. 2004-361623 proposes applying the peripheral part of the alignment film application region to a fine pattern including a gap. By forming the void portion, drying of the coating solution in the peripheral portion is promoted, the concentration of the solid component is improved, and wetting and spreading are suppressed.

本発明者の一部、都甲と岩崎は、機能性薄膜をインクジェット印刷で作製する際、ドット密度を、周辺部において中央部より少なくすることで周辺部からの塗膜の濡れ拡がりを抑制できたことを報告している(特開2008−129191号)。ここで、作製した機能性薄膜は、配向膜、および絶縁膜である。   Part of the present inventors, Toko and Iwasaki, can suppress the spread of the coating film from the peripheral part by making the dot density smaller than the central part in the peripheral part when producing the functional thin film by ink jet printing. (Japanese Patent Laid-Open No. 2008-129191). Here, the produced functional thin film is an alignment film and an insulating film.

特開2003−126760号公報JP 2003-126760 A 特開2004−361623号公報JP 2004-361623 A 特開2008−129191号公報JP 2008-129191 A

インクジェット印刷を用いて形成でき、輪郭形状が高精度の薄膜を提供する。また、この薄膜の製膜方法を提供する。   Provided is a thin film that can be formed using inkjet printing and has a highly accurate contour shape. Further, a method for forming this thin film is provided.

本発明の1観点によれば、
矩形を基本形状とし、各コーナ部で丸め込みと前記矩形から外側に膨らむ膨張領域を有する機能性薄膜
が提供される。
According to one aspect of the present invention,
There is provided a functional thin film having a rectangular shape as a basic shape and having an expansion region which is rounded at each corner portion and expands outward from the rectangle.

本発明の他の観点によれば、
下地平面上に矩形の塗布領域と前記矩形の各コーナ部において前記矩形外に張り出す付加領域とを併せた全塗布領域にインクジェット印刷により機能性薄膜液を塗布する工程と、
前記塗布した機能性薄膜液が外側に拡がるのを許容しつつ、乾燥させ、機能性薄膜とする工程と、
を含む機能性薄膜成膜方法
が提供される。
According to another aspect of the invention,
Applying a functional thin film by ink jet printing to the entire application area including the rectangular application area on the ground plane and the additional area extending out of the rectangle at each corner of the rectangle;
The applied functional thin film liquid is allowed to spread outward while being dried to form a functional thin film;
A functional thin film forming method is provided.

コーナの丸め込みが抑制される。   Corner rounding is suppressed.

図1A,1Bは液晶表示装置の構成を示す断面図である。1A and 1B are cross-sectional views illustrating the configuration of a liquid crystal display device. 図2A、2Bはインクジェット印刷装置のヘッドのノズル配置を概略的に示す平面図、および走査方法を概略的に示す平面図、図2C、2Dは従来技術によって作製した配向膜の形状を概略的に示す平面図、および作成した膜の一部拡大写真のスケッチである。2A and 2B are a plan view schematically showing a nozzle arrangement of a head of an ink jet printing apparatus, and a plan view schematically showing a scanning method. FIGS. 2C and 2D are views schematically showing the shape of an alignment film produced by a conventional technique. It is the top view to show, and the sketch of the partially expanded photograph of the produced film | membrane. 図3A,3Bは、第1の実施例による配向膜成膜方法を概略的に示す平面図、図3C,3Dは作製したサンプルの配向膜の写真、およびそれに基づくダイアグラムである。3A and 3B are plan views schematically showing a method of forming an alignment film according to the first embodiment, and FIGS. 3C and 3D are photographs of the alignment film of the manufactured sample and diagrams based thereon. 図4A,4Bは、第2の実施例による配向膜成膜方法を概略的に示す平面図、図4Cはコーナ部の拡大平面図である。4A and 4B are plan views schematically showing a method of forming an alignment film according to the second embodiment, and FIG. 4C is an enlarged plan view of a corner portion. 図5A,5Bは、第3の実施例による配向膜成膜方法を概略的に示す平面図、図5Cは、付加領域の変形例を概略的に示す平面図である。5A and 5B are plan views schematically showing a method for forming an alignment film according to the third embodiment, and FIG. 5C is a plan view schematically showing a modification of the additional region. 図6A,6Bは、参考例による配向膜成膜方法を概略的に示す平面図である。6A and 6B are plan views schematically showing an alignment film forming method according to a reference example.

まず、実験を行なった液晶表示装置の構成を説明する。   First, the configuration of the liquid crystal display device in which the experiment was performed will be described.

図1Aに示すように、例えば厚さ0.6mm〜0.7mmのガラス基板11,21の上にインジウム錫酸化物(ITO)等の透明電極12,22を所望のパターンに形成する。試作したサンプルは車載オーディオ装置用液晶表示装置である。   As shown in FIG. 1A, transparent electrodes 12 and 22 such as indium tin oxide (ITO) are formed in a desired pattern on glass substrates 11 and 21 having a thickness of 0.6 mm to 0.7 mm, for example. The prototyped sample is a liquid crystal display device for in-vehicle audio equipment.

透明電極12,22を覆って、電極引き出し領域を除く、ほぼ基板全面にシリカ系の絶縁膜13,23をフレキソ印刷によって形成し、絶縁膜13,23上の表示領域にポリイミド等の配向膜15,25をインクジェット印刷によって形成する。インクジェット印刷により形成する配向膜の位置精度を向上することが課題である。   Silica-based insulating films 13 and 23 are formed by flexographic printing on the entire surface of the substrate except the electrode lead-out region so as to cover the transparent electrodes 12 and 22, and an alignment film 15 such as polyimide is formed on the display region on the insulating films 13 and 23. 25 are formed by ink jet printing. It is a problem to improve the positional accuracy of the alignment film formed by inkjet printing.

一方の基板上に樹脂材料にギャップコントロール材を混合したメインシール材をディスペンサ等を用いて塗布する。上下基板間の電極接続用に樹脂材料に導電性ボールを混合した材料を用いて導通材32も塗布する。他方の基板上にギャップコントロール材を散布し、両基板を重ね合わせ、加圧、加熱処理により樹脂材料を硬化させ、メインシール31、導通材32を形成する。   A main seal material in which a gap control material is mixed with a resin material is applied on one substrate using a dispenser or the like. The conductive material 32 is also applied using a material obtained by mixing a conductive ball with a resin material for electrode connection between the upper and lower substrates. A gap control material is dispersed on the other substrate, the two substrates are overlapped, and the resin material is cured by pressurization and heat treatment to form the main seal 31 and the conductive material 32.

両基板間に形成された空隙に、液晶材料を注入し、注入口を封止材でシールする。ガラス基板11,21外面に偏光板P1,P2を貼り付ける。このようにして液晶表示装置が製作される。   A liquid crystal material is injected into the gap formed between the two substrates, and the injection port is sealed with a sealing material. Polarizers P1 and P2 are attached to the outer surfaces of the glass substrates 11 and 21, respectively. In this way, a liquid crystal display device is manufactured.

なお、本願にとって、電極形状は特に限定されない。単純マトリクス型であれば、平行ストライプ状のセグメント電極とコモン電極を形成し、交差部で画素を構成する。特定用途用には、任意形状のセグメント電極とセグメント電極を内包する形状のコモン電極の組み合わせを用いるセグメント型が多く用いられる。配向膜は、液晶分子の配向を制御する膜であり、主に水平配向膜と垂直配向膜がある。樹脂材料の硬化に紫外線を用いることもできる。配向膜形成後、電圧印加時に液晶分子が立ち上がる、または倒れ込む方向を制御するためにラビング等の配向処理を行なう。液晶の注入は、真空注入、表面張力注入等により行なえる。ディスペンサなどを用いた液滴注入法(one drop filling, ODF)によって液晶材料を注入することもできる。   For the present application, the electrode shape is not particularly limited. In the case of a simple matrix type, parallel striped segment electrodes and common electrodes are formed, and pixels are formed at intersections. For specific applications, a segment type using a combination of a segment electrode having an arbitrary shape and a common electrode having a shape including the segment electrode is often used. The alignment film is a film for controlling the alignment of liquid crystal molecules, and mainly includes a horizontal alignment film and a vertical alignment film. Ultraviolet rays can also be used for curing the resin material. After forming the alignment film, an alignment treatment such as rubbing is performed to control the direction in which the liquid crystal molecules rise or fall when a voltage is applied. The liquid crystal can be injected by vacuum injection, surface tension injection, or the like. The liquid crystal material can also be injected by one drop filling (ODF) using a dispenser or the like.

偏光板は、クロスニコル配置、またはパラレルニコル配置で貼り付ける。例えば、90度ツイスト配向の水平配向膜を用い、偏光板を配向方向と平行なクロスニコル配置とするとノーマリホワイト表示となり、一方の偏光板を配向方向と直交させたパラレルニコル配置とするとノーマリブラック表示となる。配向膜が垂直配向膜である場合、偏光板をクロスニコル配置とすると、ノーマリブラックの表示となり、パラレルニコル配置とするとノーマリホワイト表示となる。   The polarizing plate is attached in a crossed Nicols arrangement or a parallel Nicols arrangement. For example, if a 90 ° twist alignment horizontal alignment film is used and the polarizing plate is arranged in a crossed Nicols arrangement parallel to the alignment direction, normally white display is obtained, and if one polarizing plate is arranged in a parallel Nicol arrangement orthogonal to the alignment direction, it is normally displayed. Black display. When the alignment film is a vertical alignment film, a normally black display is obtained when the polarizing plate is arranged in a crossed Nicol arrangement, and a normally white display is obtained when the polarizing film is arranged in a parallel Nicol arrangement.

図1Aの構成における絶縁膜13,23は、電極間の絶縁を保証するが、必須の構成要件ではない。図1Bに示すように、絶縁膜13,23を省略した構成としてもよい。   The insulating films 13 and 23 in the configuration of FIG. 1A ensure insulation between the electrodes, but are not essential constituent requirements. As shown in FIG. 1B, the insulating films 13 and 23 may be omitted.

図2Aは、インクジェット印刷装置のヘッドのノズル配置を概略的に示す平面図である。ノズル40が右、左に交互に配置され縦方向に並んでいる。ヘッドに対し対象物を水平方向に走査する。複数のストライプ状領域を同時に印刷できる。ノズルをオンオフ制御することにより所望のパターンを印刷できる。予備実験において作製したサンプルにおいては矩形形状の配向膜を印刷した。ノズルのピッチdは約0.7mmのものを用いた。1ショットの吐出量は100ナノリットル程度である。ノズルのピッチが0.071mm程度のヘッドもあるが、1ショットの吐出量が40ピコリットル程度と極端に小さく、ある程度以上の膜厚を形成するには適さない。ピッチ0.7mmは分解能として大きすぎるので、ピッチ間をさらに走査する。   FIG. 2A is a plan view schematically showing the nozzle arrangement of the head of the inkjet printing apparatus. The nozzles 40 are alternately arranged on the right and left, and are arranged in the vertical direction. The object is scanned horizontally with respect to the head. Multiple stripe regions can be printed simultaneously. A desired pattern can be printed by controlling the nozzles on and off. In the sample prepared in the preliminary experiment, a rectangular alignment film was printed. The nozzle pitch d was about 0.7 mm. The discharge amount per shot is about 100 nanoliters. Although there is a head having a nozzle pitch of about 0.071 mm, the discharge amount per shot is extremely small, about 40 picoliters, and it is not suitable for forming a film thickness of a certain degree or more. Since the pitch of 0.7 mm is too large as a resolution, the pitch is further scanned.

図2Bに示すように、1ピッチの領域を縦方向位置を徐々にずらして複数回走査する。4回走査すると、縦方向分解能は、0.7/4=0.175mm程度となる。横(走査)方向分解能は、基板送り速度と吐出周期によって定まる。基板送り速度500mm/sec、吐出周期10kHz(0.1msec)の時、横方向分解能は0.05mmとなる。   As shown in FIG. 2B, the region of 1 pitch is scanned a plurality of times while gradually shifting the vertical position. When scanned four times, the vertical resolution is about 0.7 / 4 = 0.175 mm. The lateral (scanning) direction resolution is determined by the substrate feed speed and the discharge cycle. When the substrate feed rate is 500 mm / sec and the discharge cycle is 10 kHz (0.1 msec), the lateral resolution is 0.05 mm.

図2Cに示すように、矩形の塗布領域50に配向膜液をインクジェット印刷で塗布した。塗布後の塗布液の拡がりは、塗布液の粘度や塗布液の表面張力に依存する。使用した配向膜液の粘度は14mPa・sec±1mPa・secであった。塗布量は18.4ナノリットル/mmとした。塗布後、塗布液は拡がり、乾燥して配向膜55となった。コーナ部を除き、上下平行辺から外側への拡がり幅w1、w2は共に1.3mmであった。コーナ部を除き、左右平行辺から外側への拡がり幅w3、w4は共に1.3mmであった。基板面内での塗布液の拡がりは、方向によらず一様であると考えられる。配向膜55のコーナ部においては丸め込み56が生じた。 As shown in FIG. 2C, the alignment film liquid was applied to the rectangular application region 50 by inkjet printing. The spread of the coating solution after coating depends on the viscosity of the coating solution and the surface tension of the coating solution. The alignment film solution used had a viscosity of 14 mPa · sec ± 1 mPa · sec. The coating amount was 18.4 nanoliters / mm 2 . After coating, the coating solution spreads and dries to form the alignment film 55. Except for the corner portion, the spreading widths w1 and w2 from the top and bottom parallel sides to the outside were both 1.3 mm. Except for the corner portion, the spreading widths w3 and w4 from the left and right parallel sides to the outside were both 1.3 mm. The spread of the coating solution within the substrate surface is considered to be uniform regardless of the direction. Rounding 56 occurred in the corner portion of the alignment film 55.

図2Dの拡大図に示すように、配向膜55コーナ部の丸め込み56の曲率半径Rは2mmであった。線57を内縁とするメインシール形成領域への入り込みが無視できない量となった。配向膜55とメインシール形成領域57が重ならないように再配置することを考える。1辺2mmの正方形に半径2mmの円弧が内接する。正方形の対角線の長さは、(2+21/2=2.82mmとなる。配向膜55とメインシール形成領域57が接する配置で、最大幅0.82mmの配向膜のない領域が生じる。光り抜けを防止するためには、額縁領域の幅縮小が制限される。額縁領域の幅縮小を促進するためには、コーナ部の丸め込み形状の曲率半径を小さくすることが望まれる。インクジェット印刷を前提とすると、塗布液の粘度は15mPa・sec以下とすることが望まれる。 As shown in the enlarged view of FIG. 2D, the radius of curvature R of the rounding 56 at the corner of the alignment film 55 was 2 mm. The amount of entry into the main seal formation region having the line 57 as the inner edge was an amount that cannot be ignored. Consider rearrangement so that the alignment film 55 and the main seal formation region 57 do not overlap. A circular arc with a radius of 2 mm is inscribed in a square with a side of 2 mm. The length of the diagonal of the square is (2 2 +2 2 ) 1/2 = 2.82 mm. In the arrangement in which the alignment film 55 and the main seal formation region 57 are in contact with each other, a region without the alignment film having a maximum width of 0.82 mm is generated. In order to prevent light leakage, the width reduction of the frame region is limited. In order to promote the width reduction of the frame region, it is desired to reduce the radius of curvature of the rounded shape of the corner portion. Assuming ink jet printing, the viscosity of the coating solution is desirably 15 mPa · sec or less.

塗布液を代えず、コーナ部の曲率半径を制御する方法として、塗布膜の形状を変更することを考察した。まず、予備実験として、インクジェット印刷により、角部に鋭角状の切り欠きを形成した配向膜を塗布した。   As a method for controlling the radius of curvature of the corner without changing the coating solution, it was considered to change the shape of the coating film. First, as a preliminary experiment, an alignment film having sharp corner notches formed at the corners was applied by inkjet printing.

図6A,6Bは、参考例による配向膜成膜方法を概略的に示す平面図である。   6A and 6B are plan views schematically showing an alignment film forming method according to a reference example.

図6Aに示すように、矩形形状の塗布領域50のコーナ部において、三角形状と呼べる切り欠きを形成する。矩形形状の頂点Pから一定距離の水平辺、垂直辺上の点Tを起点とし、頂点Pから水平方向、垂直方向に一定距離の点Sを終点とした切り欠き領域を形成する。   As shown in FIG. 6A, a cutout that can be called a triangular shape is formed in the corner portion of the rectangular application region 50. A notch region is formed starting from a point T on a horizontal side and a vertical side at a certain distance from the vertex P of the rectangular shape, and ending at a point S at a certain distance in the horizontal and vertical directions from the vertex P.

図6Bは、塗布領域50と乾燥後の配向膜55の平面形状を概略的に示す。矩形領域のコーナ部に鋭角の頂角を有する切り欠きが形成されている。   FIG. 6B schematically shows the planar shape of the coating region 50 and the alignment film 55 after drying. A notch having an acute apex angle is formed in a corner portion of the rectangular region.

矩形の頂点Pから点Tまでの距離を0.35mm±0.05mm、頂点Pと点Sとの間の水平方向距離、垂直方向距離を0.8mm±0.1mmとしたサンプルを形成し、配向膜形状の変化を観察した。   Forming a sample with a distance from the vertex P of the rectangle to the point T of 0.35 mm ± 0.05 mm, a horizontal distance between the vertex P and the point S, and a vertical distance of 0.8 mm ± 0.1 mm; Changes in the alignment film shape were observed.

サンプルの仕上がりは、角を丸めた矩形形状であり、丸め込みの曲率半径は、図2Cに示す矩形塗布領域の場合より大きくなった。コーナ部に切り欠きを形成すると、塗布領域コーナ部の塗布液量が減少する。矩形のコーナ部以外で塗布液量は変わらず、拡がり幅は変わらないと、考えられる。コーナ部では切り欠き領域分拡がり幅が減少し、丸め込みの曲率半径が増加すると考えられよう。そこで、塗布領域コーナ部の塗布液量を増加して、丸め込み部の曲率半径を小さくすることを試みた。     The finish of the sample was a rectangular shape with rounded corners, and the radius of curvature of rounding was larger than that of the rectangular coating region shown in FIG. 2C. When the notch is formed in the corner portion, the amount of the coating liquid in the coating area corner portion is reduced. It is considered that the amount of the coating liquid does not change and the spread width does not change except for the rectangular corner portion. At the corner, the width of the notch area will decrease and the radius of curvature of rounding will increase. Therefore, an attempt was made to reduce the radius of curvature of the rounded portion by increasing the amount of the coating solution at the corner of the coating region.

第1の実施例においては、矩形の塗布領域の左右平行辺の上部、下部に外側に張り出す直角三角形を付加した。上下平行辺を延長し、左右平行辺の上部下部を外側に折り曲げた形状となる。   In the first embodiment, right-angled triangles projecting outward are added to the upper and lower portions of the left and right parallel sides of the rectangular coating region. The upper and lower parallel sides are extended and the upper and lower parts of the left and right parallel sides are bent outward.

図3Aに示すように、矩形形状58が配向膜の所望形状である。予め測定した配向膜液の拡がり幅をwとする。矩形形状58の各辺から内側にwずらした辺で形成する矩形形状を塗布領域50とする。塗布液を塗布領域50に塗布すれば、図2C,2Dを参照して説明したように、コーナ部に配向膜が形成されない領域が生じる。そこで塗布領域50の上下辺を矩形形状58内で延長し、側辺上所定距離の点と接続し、直角三角形の付加領域51を形成する。矩形形状の塗布領域50と直角三角形の付加領域51を併せた領域を全塗布領域61とする。   As shown in FIG. 3A, a rectangular shape 58 is a desired shape of the alignment film. The spread width of the alignment film liquid measured in advance is defined as w. The rectangular shape formed by the sides shifted from the respective sides of the rectangular shape 58 by w is defined as the application region 50. When the coating liquid is applied to the application region 50, as described with reference to FIGS. 2C and 2D, a region where no alignment film is formed at the corner portion is generated. Therefore, the upper and lower sides of the application region 50 are extended within the rectangular shape 58 and connected to a point at a predetermined distance on the side to form an additional region 51 of a right triangle. A region obtained by combining the rectangular application region 50 and the additional region 51 having a right triangle is defined as an entire application region 61.

図3Bに示すように、配向膜液を塗布する全塗布領域61は、矩形形状の塗布領域50の左右側辺の上下端部に外側に張り出す直角三角形の付加領域51を付加した形状である。全塗布領域61の上下辺は直線で平行であり、左右の辺は中央部は直線で平行であり、上下端部はある角度で外側に折れ曲がり、上下辺と鋭角を形成して交わる。全塗布領域61に配向膜液を塗布し、乾燥させた後の配向膜62は、コーナ部での曲率半径が小さくなった。   As shown in FIG. 3B, the entire application region 61 for applying the alignment film liquid has a shape in which right-angled additional regions 51 projecting outward are added to the upper and lower ends of the left and right sides of the rectangular application region 50. . The upper and lower sides of all the application regions 61 are straight and parallel, the left and right sides are straight and parallel at the center, and the upper and lower ends are bent outward at an angle and intersect with the upper and lower sides to form an acute angle. The alignment film 62 after the alignment film liquid is applied to all the application regions 61 and dried has a smaller radius of curvature at the corner.

コーナ部以外の領域では塗布液の拡がりは予備実験と同じで、一定の拡がり幅wと考えられる。配向膜62のコーナ部以外の上下辺は、全塗布領域61の上下辺から拡がり幅w上下外側に位置していると考えられる。付加領域51により、上下辺が左右に延長されているので、配向膜62の上下辺において丸め込みが始まる位置は左右外側に移動すると考えられる。左右側辺は、直線部分の上下で外側に折れ曲がる。丸め込みが生じる傾向を折れ曲がり部分が相殺すれば、丸め込みの始まる位置が上下外側に移動すると考えられる。付加領域51の形状の影響で配向膜62が左右外側に膨らむことも考えられる。直線部分と直角三角形の斜辺との交点近傍においては、直線部分からの塗布液の拡がりと斜辺からの塗布液の拡がりとが重なり合い、拡がり幅が拡大することも考えられる。直角三角形は先端に向かって幅が狭くなるので、先端部ほど拡がりを生じさせる原料が少なく、拡がり幅も小さくなるであろう。結果として得られるコーナ部の曲率半径は小さくなることが考えられる。   In the region other than the corner portion, the spread of the coating liquid is the same as that in the preliminary experiment, and is considered to be a constant spread width w. It is considered that the upper and lower sides of the alignment film 62 other than the corner portion extend from the upper and lower sides of the entire application region 61 and are located on the upper and lower outer sides of the width w. Since the upper and lower sides are extended to the left and right by the additional region 51, it is considered that the position where rounding starts on the upper and lower sides of the alignment film 62 moves to the left and right outer sides. The left and right sides bend outward at the top and bottom of the straight line. If the bent portion cancels the tendency for rounding, the position where the rounding starts is considered to move upward and downward. It is also conceivable that the alignment film 62 swells left and right due to the shape of the additional region 51. In the vicinity of the intersection of the straight line portion and the hypotenuse of the right triangle, the spread of the coating liquid from the straight portion and the spread of the coating liquid from the hypotenuse overlap, and the spread width may be increased. Since the right triangle becomes narrower toward the tip, there will be less material that causes the tip to expand, and the extension width will also be smaller. It is conceivable that the radius of curvature of the corner portion obtained as a result becomes small.

図3Cは、作製したサンプルの写真のスケッチである。乾燥後の配向膜62コーナ部の丸め込み56の曲率半径は小さくなった。側方においては、コーナ部の丸め込み56が、僅か矩形の側辺外に膨らみ、メインシール形成領域内縁57に入り込む形状を示した。図3Aにおいて、付加する直角三角形の水平辺長を0.7mm±0.1mmとし、垂直辺長を0.8mm±0.1mmとした時、コーナ部の丸め込み56の曲率半径は0.7mmであった。コーナ部の曲率半径を1mm以下にできることが判明した。   FIG. 3C is a sketch of a photograph of the produced sample. The radius of curvature of the rounding 56 in the corner portion of the alignment film 62 after drying was reduced. On the side, the rounded portion 56 of the corner portion swells slightly outside the side of the rectangle, and shows a shape that enters the inner edge 57 of the main seal formation region. In FIG. 3A, when the horizontal side length of the right triangle to be added is 0.7 mm ± 0.1 mm and the vertical side length is 0.8 mm ± 0.1 mm, the radius of curvature of the rounding 56 of the corner portion is 0.7 mm. there were. It has been found that the radius of curvature of the corner can be reduced to 1 mm or less.

図3Dに誇張して示すように、配向膜62は、側方に膨張する膨張領域54を含む丸め込み56を有する。膨張領域54が垂直方向の直線部から突出する突出距離PJは、約0.12mmであった。矩形から外側に膨らむ膨張領域の距離を0.15mm以下にできることが判明した。垂直方向の直線部はメインシール領域境界57より内側に配置された。メインシール領域と配向膜の重なるオーバラップ距離OLは、0.1mm以下であった。膨張領域の突出距離を抑制するためには、側辺の直線部の延長と直角三角形の斜辺のなす角度を45度以下にすることが望ましいであろう。   As exaggeratedly shown in FIG. 3D, the alignment film 62 has a rounding 56 including an expansion region 54 that expands laterally. The protrusion distance PJ from which the expansion region 54 protrudes from the straight line portion in the vertical direction was about 0.12 mm. It has been found that the distance of the expansion region that expands outward from the rectangle can be 0.15 mm or less. The straight line portion in the vertical direction is disposed inside the main seal region boundary 57. The overlap distance OL where the main seal region and the alignment film overlap was 0.1 mm or less. In order to suppress the protruding distance of the expansion region, it is desirable that the angle formed by the extension of the straight line portion on the side and the hypotenuse of the right triangle be 45 degrees or less.

配向膜がメインシール下方に僅か入り込むが、オーバラップ距離が0.1mm程度以下であるので、メインシールの密着性に問題は生じない程度といえる。メインシールで囲まれる矩形のコーナ部には、配向膜のない領域が生じる。仮に側方に膨張し、メインシール下方に入り込む部分を無視して、1辺0.7mmの正方形を考えると、配向膜のない領域の幅は最大(0.7+0.71/2−0.7=0.3(mm)程度となる。付加領域を形成しなかったときの最大幅0.8mmと比べると大幅な改良といえる。実際は膨張領域の取り込みなどにより、最大幅はより小さくできるであろう。 Although the alignment film slightly enters below the main seal, since the overlap distance is about 0.1 mm or less, it can be said that there is no problem in the adhesion of the main seal. In the rectangular corner portion surrounded by the main seal, a region without an alignment film is generated. Considering a square with a side of 0.7 mm, ignoring the part that expands laterally and enters the lower part of the main seal, the width of the region without the alignment film is the maximum (0.7 2 +0.7 2 ) 1 / It is about 2−0.7 = 0.3 (mm). This is a significant improvement compared to the maximum width of 0.8 mm when no additional region is formed. In practice, the maximum width could be made smaller, such as by taking in the expansion region.

第1の実施例においては矩形形状の垂直平行辺の上部、下部に直角三角形を付加した。サンプルにおいて、水平方向に高さ0.7mmの三角形の付加領域51を塗布したが、乾燥後の配向膜62の水平方向周辺部に形成される膨張領域の突出距離は、約0.12mmと僅かなものであった。上下の辺には膨張領域は形成されず、両端部においては、拡がり幅が減少する丸め込みが生じた。なお、第1の実施例において、水平方向と垂直方向を交換した変形例が可能なことは自明であろう。   In the first embodiment, right-angled triangles are added to the upper and lower parts of a rectangular vertical parallel side. In the sample, a triangular additional region 51 having a height of 0.7 mm was applied in the horizontal direction, but the protruding distance of the expansion region formed in the peripheral portion in the horizontal direction of the alignment film 62 after drying was about 0.12 mm. It was something. Inflated regions were not formed on the upper and lower sides, and rounding in which the spreading width was reduced occurred at both ends. In the first embodiment, it is obvious that a modification in which the horizontal direction and the vertical direction are exchanged is possible.

図4A,4Bは、第2の実施例による配向膜成膜方法を概略的に示す平面図である。   4A and 4B are plan views schematically showing the alignment film forming method according to the second embodiment.

図4Aに示すように、矩形の塗布領域50を、所望の配向膜形状である矩形形状58から塗布液の拡がり幅w内側に配置する。塗布領域50のコーナ部において、垂直辺の上部、下部に水平方向に張り出す直角三角形の付加領域52hを形成する。ここまでは第1の実施例同様である。さらに、水平辺の左右端部にも上下方向に張り出す直角三角形の付加領域52vを形成する。   As shown in FIG. 4A, a rectangular application region 50 is arranged inside the coating liquid spreading width w from a rectangular shape 58 which is a desired alignment film shape. In the corner portion of the application region 50, an additional region 52h having a right triangle projecting in the horizontal direction is formed above and below the vertical side. The process up to this point is the same as in the first embodiment. Furthermore, right-angled triangular additional regions 52v projecting in the vertical direction are also formed at the left and right ends of the horizontal side.

図4Bは、全塗布領域61と乾燥後の配向膜62の平面形状を概略的に示す。水平方向周辺部は、第1の実施例同様の現象が生じるであろう。垂直方向周辺部は、新たに塗布した付加領域54vの影響を受ける。但し、塗布液の拡がりは方向に寄らず、面内均一と考えられ、生じる現象は水平方向周辺部と同様であろう。コーナ部においては、水平方向の膨張部と垂直方向の膨張部が合体するであろう。   FIG. 4B schematically shows the planar shape of the entire coating region 61 and the alignment film 62 after drying. A phenomenon similar to that in the first embodiment will occur in the peripheral portion in the horizontal direction. The peripheral portion in the vertical direction is affected by the newly applied additional region 54v. However, the spreading of the coating liquid is not oriented in the direction and is considered to be uniform within the surface, and the phenomenon that occurs will be the same as that in the peripheral portion in the horizontal direction. In the corner portion, the horizontal expansion portion and the vertical expansion portion will be combined.

図4Cは、コーナ部の形状を誇張して示す平面図である。突出距離PJhの水平方向膨張領域54hと突出距離PJvの垂直方向膨張領域54vが合体している。   FIG. 4C is a plan view exaggerating the shape of the corner portion. The horizontal expansion region 54h having a protrusion distance PJh and the vertical expansion region 54v having a protrusion distance PJv are combined.

実際に矩形に接する辺の長さを0.8mm±0.1mm、高さを0.7mm±0.1mmとした付加領域を各コーナに2つづつ形成したサンプルを作製し、配向膜形状改良を確認した。   Produced a sample in which two additional areas were formed in each corner with the length of the side in contact with the rectangle being 0.8 mm ± 0.1 mm and the height being 0.7 mm ± 0.1 mm, and the shape of the alignment film was improved. It was confirmed.

サンプルの仕上がりを観察したところ、予想通り丸め込み56の部分において、水平方向と垂直方向の両方向に膨張領域54h、54vが生じ、合成した形状として形成されていることを確認した。   When the finish of the sample was observed, it was confirmed that the expanded regions 54h and 54v were generated in both the horizontal direction and the vertical direction in the rounded portion 56 as expected and formed as a combined shape.

第2の実施例では、矩形形状の塗布領域の各コーナ部に2つの直角三角形を付加した。1つのコーナに2つの三角形を付加する代わりに矩形の直交辺から所定角度で突出する1つの付加領域を形成することもできる。   In the second embodiment, two right triangles are added to each corner portion of the rectangular application region. Instead of adding two triangles to one corner, it is also possible to form one additional region that protrudes from a rectangular orthogonal side at a predetermined angle.

図5A,5Bは、第3の実施例による配向膜成膜方法を概略的に示す平面図である。   5A and 5B are plan views schematically showing an alignment film forming method according to the third embodiment.

図5Aに示すように、矩形の塗布領域50のコーナ部において、水平辺端部、垂直辺端部を外側に折り曲げ、矩形塗布領域50の垂直方向、水平方向外部に頂点を形成する付加領域53を形成する。形成される付加領域53は2つの斜辺で規定される。水平平行辺、垂直平行辺それぞれが、両端部で外側に折り曲げられ、拡がり幅の減少(丸め込み)を抑制し、コーナ部の曲率半径を小さくすると考えられる。膨張部を形成することも考えられる。付加領域54dは斜め45度方向に突出し、幅は狭いので、膨張部の曲率半径は小さくなることが期待される。   As shown in FIG. 5A, in the corner portion of the rectangular application region 50, the horizontal side edge portion and the vertical side edge portion are bent outward to form apexes on the vertical direction and the horizontal direction outside of the rectangular application region 50. Form. The additional region 53 to be formed is defined by two oblique sides. Each of the horizontal parallel side and the vertical parallel side is considered to be bent outward at both ends to suppress the reduction (rounding) of the spread width and to reduce the radius of curvature of the corner portion. It is also conceivable to form an inflating part. Since the additional region 54d protrudes in the direction of 45 degrees obliquely and has a narrow width, it is expected that the radius of curvature of the inflated portion becomes small.

図5Bは、全塗布領域61、乾燥後の配向膜62の形状を概略的に示す。コーナ部での丸め込みが抑制され、配向膜がない領域を狭くすると共に、メインシールとのオーバラップを抑制することが可能であろう。   FIG. 5B schematically shows the shape of the entire coating region 61 and the alignment film 62 after drying. It will be possible to suppress rounding at the corners, narrow the area without the alignment film, and suppress overlap with the main seal.

付加領域53の斜辺の高さを0.7mm±0.1mm、水平方向、垂直方向に射影した幅を0.8mm±0.1mmと、前述の実施例同様の寸法にしたサンプルを作製し、配向膜形状の改良効果を確認した。   A sample having a height similar to that of the above-described embodiment was prepared with the height of the hypotenuse of the additional region 53 being 0.7 mm ± 0.1 mm, the width projected in the horizontal direction and the vertical direction being 0.8 mm ± 0.1 mm, The effect of improving the alignment film shape was confirmed.

サンプルの仕上がりを観察したところ、予想通り、丸め込み部56において、図4C同様膨張部54h、54vが、水平方向と垂直方向の両方向に生じ、合成した形状として形成されていることを確認した。但し、第3の実施例においては、第2の実施例に比べ、丸め込み部56の張り出し寸法は同等であるが、Rが小さく仕上がっていた。これは第2の実施例に比べ、付加領域の面積が小さかったためと考えられる。   When the finish of the sample was observed, it was confirmed that, as expected, in the rounded portion 56, the expanded portions 54h and 54v were generated in both the horizontal direction and the vertical direction as in FIG. However, in the third embodiment, the overhang dimension of the rounded portion 56 is equal to that of the second embodiment, but R is finished small. This is presumably because the area of the additional region was smaller than in the second embodiment.

第2、第3の実施例からは、付加領域の配置、形状が丸め込み部56の張り出し寸法に影響を及ぼし、付加領域の面積が丸め込み部の大きさ、ひいては丸め込み部の半径に影響を及ぼすものであると考えられる。   From the second and third embodiments, the arrangement and shape of the additional region affect the overhanging dimension of the rounded portion 56, and the area of the additional region affects the size of the rounded portion, and consequently the radius of the rounded portion. It is thought that.

以上、実施例に沿って本発明を説明したが、本発明はこれらに限られるものではない。例えば、実施例においては設計を簡単化するため、付加領域を直線で画定される形状としたが、図5Cに示すように、付加領域54を直線部から次第に外側に曲がる曲線で画定される形状としても良い。直角三角形付加領域の斜辺のみをこのような曲線としてもよい。膨張領域の形状制御に有効な可能性がある。液晶表示装置は、アクティブマトリックス型でもよい。配向膜を矩形状に形成する場合を説明したが、矩形以外の所定形状でもよい。所定領域内に、高精度に、配向機能以外の機能を有する機能性薄膜を形成してもよい。その他、種々の変更、置換、改良、組み合わせ等が可能なことは、当業者に自明であろう。   As mentioned above, although this invention was demonstrated along the Example, this invention is not limited to these. For example, in the embodiment, to simplify the design, the additional region is defined by a straight line. However, as illustrated in FIG. 5C, the additional region 54 is defined by a curve that gradually curves outward from the straight part. It is also good. Only the hypotenuse of the right triangle addition region may be such a curve. This may be effective for shape control of the expansion region. The liquid crystal display device may be an active matrix type. Although the case where the alignment film is formed in a rectangular shape has been described, a predetermined shape other than a rectangular shape may be used. A functional thin film having a function other than the alignment function may be formed in the predetermined region with high accuracy. It will be apparent to those skilled in the art that various modifications, substitutions, improvements, combinations, and the like can be made.

P1、P2 偏光板、
w 拡がり幅、
d (ノズルの)ピッチ、
PJ 突出距離、
OL オーバラップ距離、
11,21 ガラス基板、
12,22 透明電極、
13,23 絶縁膜、
15,25 配向膜、
31 メインシール、
32 導通材、
40 ノズル、
50 塗布領域、
51 付加領域(直角三角形)、
52 付加領域(2つ)、
53 付加領域、
54 膨張領域、
55 配向膜、
56 丸め込み、
57 メインシール形成領域、
58 (配向膜の)矩形形状、
61 全塗布領域、
62 配向膜。
P1, P2 polarizing plate,
w Spreading width,
d (nozzle) pitch,
PJ protrusion distance,
OL overlap distance,
11, 21 glass substrate,
12, 22 Transparent electrode,
13, 23 insulating film,
15, 25 alignment film,
31 Main seal,
32 conductive material,
40 nozzles,
50 application area,
51 Additional region (right triangle),
52 Additional areas (2),
53 Additional areas,
54 expansion region,
55 alignment film,
56 Rounding,
57 Main seal formation area,
58 rectangular shape (of alignment film),
61 Total application area,
62 Alignment film.

Claims (15)

矩形を基本形状とし、各コーナ部で丸め込みと前記矩形から外側に膨らむ膨張領域を有する機能性薄膜。   A functional thin film having a rectangular shape as a basic shape and rounded at each corner portion and having an expansion region expanding outward from the rectangle. 前記機能性薄膜が、液晶表示装置の配向膜である請求項1記載の機能性薄膜。   The functional thin film according to claim 1, wherein the functional thin film is an alignment film of a liquid crystal display device. 前記膨張領域が、前記矩形の1対の対向辺から外側に膨らんでいる請求項1または2記載の機能性薄膜。   The functional thin film according to claim 1, wherein the expansion region bulges outward from a pair of opposing sides of the rectangle. 前記膨張領域が、前記矩形の2対の対向辺から外側に膨らんでいる請求項1または2記載の機能性薄膜。     The functional thin film according to claim 1, wherein the expansion region bulges outward from two pairs of opposite sides of the rectangle. 前記丸め込みの曲率半径が1mm以下であり、前記膨張領域が前記矩形から外側に膨らむ距離が0.15mm以下である請求項1〜4のいずれか1項記載の機能性薄膜。   The functional thin film according to any one of claims 1 to 4, wherein a radius of curvature of the rounding is 1 mm or less, and a distance that the expansion region bulges outward from the rectangle is 0.15 mm or less. 対向する1対のガラス基板と、前記1対のガラス基板内面上方に形成された対向透明電極と、前記対向透明電極上方に形成された対向配向膜と、前記対向配向膜に挟持された液晶層と、前記1対のガラス基板外面上方に配置された1対の偏光板とを有する液晶表示装置であって、
前記配向膜が矩形を基本形状とし、各コーナ部で丸め込みと前記矩形から外側に膨らむ膨張領域を有する液晶表示装置。
A pair of opposing glass substrates, an opposing transparent electrode formed above the inner surface of the pair of glass substrates, an opposing alignment film formed above the opposing transparent electrode, and a liquid crystal layer sandwiched between the opposing alignment films And a pair of polarizing plates disposed above the outer surface of the pair of glass substrates,
A liquid crystal display device, wherein the alignment film has a rectangular shape as a basic shape, and has an expansion region that is rounded at each corner portion and expands outward from the rectangle.
前記液晶層を取り囲むメインシールをさらに有し、前記配向膜が前記メインシール下方に0.1mm以下入り込んでいる請求項6記載の液晶表示装置。   The liquid crystal display device according to claim 6, further comprising a main seal surrounding the liquid crystal layer, wherein the alignment film enters 0.1 mm or less below the main seal. 前記膨張領域が、前記矩形の1対の対向辺から外側に膨らんでいる請求項6または7記載の液晶表示装置。   The liquid crystal display device according to claim 6, wherein the expansion region is expanded outward from a pair of opposing sides of the rectangle. 前記膨張領域が、前記矩形の2対の対向辺から外側に膨らんでいる請求項6または7記載の液晶表示装置。   The liquid crystal display device according to claim 6, wherein the expansion area is expanded outward from two opposing sides of the rectangle. 前記丸め込みの曲率半径が1mm以下であり、前記膨張領域が前記矩形から外側に膨らむ距離が0.15mm以下である請求項6〜9のいずれか1項記載の液晶表示装置。   10. The liquid crystal display device according to claim 6, wherein a radius of curvature of the rounding is 1 mm or less, and a distance that the expansion region bulges outward from the rectangle is 0.15 mm or less. 下地平面上に矩形の塗布領域と前記矩形の各コーナ部において前記矩形外に張り出す付加領域とを併せた全塗布領域にインクジェット印刷により機能性薄膜液を塗布する工程と、
前記塗布した機能性薄膜液が外側に拡がるのを許容しつつ、乾燥させ、機能性薄膜とする工程と、
を含む機能性薄膜成膜方法。
Applying a functional thin film by ink jet printing to the entire application area including the rectangular application area on the ground plane and the additional area extending out of the rectangle at each corner of the rectangle;
The applied functional thin film liquid is allowed to spread outward while being dried to form a functional thin film;
A functional thin film forming method comprising:
前記付加領域が、前記矩形の1対の対向辺の端部に接続され、前記矩形の他の対の対向辺を延長する配置となる直角三角形の4つの領域である請求項11記載の機能性薄膜成膜方法。   12. The functionality according to claim 11, wherein the additional region is four regions of a right triangle connected to ends of a pair of opposing sides of the rectangle and arranged to extend another pair of opposing sides of the rectangle. Thin film deposition method. 前記付加領域が、前記矩形の各対の対向辺の端部に接続され、前記矩形の他の対の対向辺を延長する配置となる直角三角形の8つの領域である請求項11記載の機能性薄膜成膜方法。   The functionality according to claim 11, wherein the additional region is eight regions of a right triangle connected to ends of opposite sides of each pair of the rectangles and arranged to extend the opposite sides of the other pairs of the rectangles. Thin film deposition method. 前記付加領域が、前記矩形の各コーナから前記矩形の各対向辺より外側の1点に向かう4つの領域である請求項11記載の機能性薄膜成膜方法。   The functional thin film forming method according to claim 11, wherein the additional regions are four regions from each corner of the rectangle toward one point outside each opposite side of the rectangle. 前記付加領域が、前記矩形の各コーナにおいて直線部から次第に外側に曲がる曲線で画定された4つの領域である請求項11記載の機能性薄膜成膜方法。   The functional thin film forming method according to claim 11, wherein the additional regions are four regions defined by curves that gradually bend outward from a straight line portion at each corner of the rectangle.
JP2009056191A 2009-03-10 2009-03-10 Functional thin film, liquid crystal display device, and functional thin film forming method Pending JP2010210870A (en)

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