TW513550B - Heating method and heating device - Google Patents

Abstract

The object of the present invention is to provide a heating method and a heating device, which uses a heating device comprising a plurality of panel-like heater (3) spaced side by side to heat objects to be heated (4) arranged oppositely to heating surfaces (3a) of the heaters (3) between adjacent heaters (3). Air with temperature lower than the set temperature of the heats (3) is introduced into air flowing space (20) arranged inside each heater (3), to make the air introduced into the air flowing sapce (20) flow from the center of the heating surfaces (3a) to the circumference thereof.

Description

1 V. Description of the Invention (Field of the Invention) The present invention relates to a heating method and a heating device. The heating object is heated by a plurality of parallel panel-shaped heaters spaced apart from each other. For example, month b can be used in a flat panel display. The description of the related art has been carried out previously by using a heating device having a plurality of panel-shaped heaters (3) spaced apart from each other in parallel, and between the adjacent heaters (3), The object to be heated (4) disposed with respect to the heating surface (3a) of the heater (3) is heated. In the heating area between the adjacent panel-shaped heaters as described above, near the center of the heating surface of the heater It has less heat dissipation than the surrounding area. Therefore, there is a problem in the consistency of the temperature distribution of each heating surface. Therefore, it is considered that the output of the heater near the center of the heating surface is lower than that of the surrounding area. It takes time to adjust. For example, when the heating temperature is lower than 250 ° C, it is difficult to accurately adjust the heater output. Maintain the uniformity of the temperature distribution. The object of the present invention is to provide a heating method and a heating device that can solve the above problems. SUMMARY OF THE INVENTION The method of the present invention is characterized by having a plurality of panel-shaped heaters spaced apart from each other and arranged in parallel. The heating device introduces a lower temperature than the set temperature of the heater in the gas flow space provided inside each heater when heating a heating object arranged relative to the heater heating surface between adjacent heaters. "Gas" makes the gas introduced into the gas flow space from -4- Paper size National Standard (CNS) Tlii ^^ 297 mm) 513550 A7 B7 5. Description of the invention (2) The center of the above heating surface Flow around. According to the method of the present invention, in the gas flow space provided inside the heater, a gas having a temperature lower than the set temperature of the heater flows from the center of the heating surface to the surroundings, so that it can be promoted in the area where the object is heated. Heat is radiated near the center of the heating surface of the heater. Thereby, the temperature distribution of the heating surface can be uniformized in a short time and with high accuracy, and the object to be heated can be evenly heated. The device according to the present invention is a heating device characterized in that a plurality of panel-shaped heaters are arranged in parallel and spaced apart, and between the heaters adjacent to each other, a heating object with respect to a heating surface of the heater is arranged in each of the heaters. A gas flow space is provided inside the heater, and in order to introduce gas into the gas flow space, the gas introduced into the gas flow space (20) flows from the center of the heating surface of the heater to the surroundings, and is Introduced near the center of the heated surface. If the device according to the invention is used, the method of the invention can be carried out. Furthermore, since a gas flow space is provided in each heater, it can be made lighter than a solid heater. In the above-mentioned gas introduction means of the apparatus of the present invention, it is desirable that the gas flow space has a blow-out port for blowing gas from near the center of the heating surface, and that each heater introduces a gas discharge port into the gas-flow space. It is located near the periphery of the heating surface. Therefore, the method of the present invention can be carried out without requiring a complicated structure at low cost. Each heater in the device of the present invention is desirably provided with a partition wall. The paper size is compliant with China National Standard (CNS) A4 (210 X 297 mm).

Line 513550 V. Description of the invention (Describes the above-mentioned gas flow space and the compartment near the center of the heating surface 'and the compartment near this center closer to the surrounding compartments; the partition wall is provided with a gas flow connecting adjacent compartments A hole is introduced into the compartment near the center of the heating surface by the above-mentioned gas introduction means. By this, the gas can be reliably flowed from the center of the heating surface to the surroundings.-In the device of the present invention, the gas In the exhaust port, the gas exhausted from the exhaust port does not directly blow the heating target, but is provided at a position farther away from the center of the heating surface than the arrangement area of the heating target. This can prevent heating by the gas. The temperature change of the object. As for the device of the present invention, it is desirable that the heater is disposed inside the furnace body having the inlet and outlet of the hot object, and the gas discharged from the outlet is guided to the inlet and outlet of the furnace body. By this means, the exhaust gas from the exhaust port is used to prevent outside air from entering the furnace body through the inlet and outlet of the furnace body. In order to reduce the temperature drop in the furnace, it is possible to prevent the temperature in the furnace from becoming uneven, and also to save energy. According to the present invention, it is possible to heat a plurality of panels arranged side by side in the heating area between The temperature distribution is low-priced, simple, and can be heated in a short period of time. It can evenly heat the object to be heated with high accuracy, and it also provides energy saving while reducing the weight of each heater. Heating method and heating device. Brief description of the drawing -6- This paper size is suitable for household materials (CNS) ^ X X 297 mm) B7 B7 V. Description of the invention (4) Figure 1 shows the heating of the embodiment of the present invention Side view of the appliance. Fig. 2 is a plan view of a heating device according to an embodiment of the present invention. Fig. 3 is a perspective view showing a juxtaposed state of panel heaters of the heating device according to the embodiment of the present invention. Fig. 4 is a side sectional view of a main part of a heating apparatus according to an embodiment of the present invention. Fig. 5 is a plan sectional view of a main part of the heating device according to the embodiment of the present invention. Fig. 6 is a graph showing a substrate temperature heated by the heating apparatus of the present invention and a time variation of a temperature deviation. Detailed description of a suitable implementation example The heating device shown in Figs. 1 and 2 includes a furnace body 2 and a plurality of panel-shaped heaters 3 arranged inside the furnace body 2. The heater 3 can efficiently use the space. As shown in FIG. 3, the thickness direction is used as the up-down direction, and they are spaced apart from each other and aligned side by side. The plate-shaped heating object 4 has a thickness direction as an up-down direction, and is disposed between adjacent heaters 3 with respect to a heating surface formed by the upper surface of the heater 3. The heating surface and the upper surface of the heating object 4 are arranged horizontally. In this embodiment, the heating target 4 is accessed from the opened / closed door through the opening / closing doors 2a, 2b on both sides of the furnace body 2. As shown in FIG. 4, each heater 3 is supported by a furnace body 2 via a bracket 5. Each of the heaters 3 includes a heater body 10 and a heater cover 11 that covers the underside of the heater body 10. The heater body is constituted by a heating element 10a that is heated by passing an electric current, and is clamped by aluminum plates i0b, ioc, and the upper surface is used as a heating surface 3a. Supported by a support 6 protruding from its heating surface 3a, this paper size applies Chinese National Standard (CNS) A4 specifications (210X 297 mm) 513550 A7 B7 V. Description of the invention (5) Hot object 4. The heater cover is made of stainless steel plate, and is composed of a bottom plate 1 la and a peripheral wall extending from the outer edge of the bottom plate ia to the upper side. The bottom surface of the bottom plate 11a is made of a metallic glossy refracting surface Ua ', which refracts the heat rays emitted from the heating surface 3a. Thereby, the heating object 4 is directly radiantly heated by the heater 3 from the lower side, and is also indirectly heated by the radiation from the upper side. Inside each of the heaters 3, a gas flow space 20 surrounded by a heater body 10 and a heater covering 11 is provided. As shown in FIG. 5, the gas flow space 20 ′ of the compartment 20 a near the center of the heated surface 3 a and the compartments 20 b closer to the surroundings than the compartment 20 a near the center are divided by the partition wall 21. . The partition wall 21 is provided with a gas circulation hole 21a that communicates with the adjacent partition. The gas flow space 20 of each heater 3 is provided with a gas introduction pipe 22 as an introduction means for introducing gas. One end 'of the gas introduction pipe 22 is connected to a gas supply source (not shown) outside the furnace body 2. The other end of the gas introduction pipe 22 is inserted and divided by each heater 3, and each gas flow space 20 is arranged in a compartment 20a near the center of the heating surface 3a. Thereby, the other end of the gas introduction pipe 22 serves as a blow-out port 22a for blowing out gas from the vicinity of the center of the heating surface 3a in the gas flow space 20. The gas blown from its blowing outlet 22a is drawn into the compartment 20a near the center of the heating surface 3a, and then flows through the above-mentioned gas circulation hole 21a 'as shown by the arrow in FIG. 5 to the compartment close to the periphery of the heating surface 3a. 20b. That is, the gas introduced into its gas dynamic space 20 flows from the center of the heating surface 3a to the surroundings. Furthermore, in order to preheat the gas introduced into the gas flow space 20, as shown in FIG. 2, a gas-8 flowing through the gas introduction pipe 22 of the furnace body 2 is installed. ) A4 size (210 X 297 mm)

Line 513550 Patent Application No. 091100768 Patent Application Manual (September 91) A7 B7

Fifth invention description (six-body preheating heater 26. In order to exhaust the gas introduced into the gas flow space 20, a plurality of discharge ports 23 are provided on the bottom plate 11a of the heater cover 11 of each heater 3. Each The discharge port 23 is close to the periphery of the heating surface 3a. The gas discharged from each discharge port 23 does not directly blow the above-mentioned heating target, but each discharge port 23 is arranged more from the heating surface from 3a than the arrangement area of the heating target 4. The position at which the center is separated. The number or arrangement of the discharge ports 23 is not particularly limited as long as the gas introduced into the gas flow space 20 can flow from the center of the heating surface 3a to the surroundings. The exhaust gas 23 is discharged to the outside of the furnace body 2, and on both sides of each heater 3, an exhaust pipe 27 is formed on the periphery to form a large number of gas inflow holes 27a. One end of each exhaust pipe 27 is closed, and the other One ends are connected to each other and open to the outside of the furnace body 2. Further, the gas inflow holes 27a of the exhaust pipes 27 are formed at positions relative to the inlet and outlet of the furnace body 2, thereby discharging from the discharge port 23 The gas is guided toward the entrance and exit of the furnace body 2. Therefore, when the entrance and exit of the furnace body 2 closed by its opening and closing doors 2a and 2b is opened, the outside air is suppressed by the gas to enter the furnace body 2 from its entrance and exit. The inside can reduce the temperature drop inside the furnace body 2. The type of gas is not particularly limited as long as it does not affect the heating object 4, for example, nitrogen or dry air can be used. The gas flow rate can be determined by the heating device 1 The scale or the set temperature of the heater 3 can be appropriately determined. For example, the size of each heater 3 is 950 mm X 1140 mm X 38 mm, and the parallel pitch is 7 5 mm to 90 mm. At that time, the gas flow rate is 20 to 100 liters per minute for each heater. The gas size is -9- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm)

Hold

513550 A7 B7 V. Description of the invention (7) Temperature, for example, if the set temperature of heater 3 is 100 ° C ~ 180 ° C, lower it by about 20 ° C, if the set temperature of heater 3 is 180 ° C ~ 250 It is desirable to lower the temperature by about 30 ° C, but it is not necessarily limited to this, and it is not necessary to preheat the gas. According to the above-mentioned embodiment, when the heating object 4 disposed with respect to the heating surface 3a is radiated between adjacent heaters 3, a gas having a lower temperature than the heater set temperature 4 is introduced into the flow space 20, so that The gas introduced into the gas flow space 20 flows from the center of the heating surface 3a to the surroundings. Thereby, it is possible to promote heat radiation near the center of the heating surface 3a of the heater in the arrangement area of the heating object 4. Therefore, the temperature distribution of the heating surface 3a can be uniformized in a short time and with high accuracy, and the heating target 4 can be evenly heated. Since the gas flow space 20 is provided in each heater 3, it can be made lighter than a solid heater. In addition, since it is sufficient to provide a gas outlet near the center of the heating surface 3a and a gas outlet 23 near the periphery of the heating surface 3a, the method of the present invention can be carried out without requiring a complicated structure at low cost. In the gas flow space 20, the gas flows from the compartment 20a near the center of the heating surface 3a through the through-holes of the surrounding compartments 20b; therefore, the gas can be reliably flowed from the center of the heating surface 3a to the surroundings. Furthermore, since the gas discharged from the discharge port 23 does not directly blow the heating target, it is possible to prevent the temperature of the heating target 4 from being fluctuated due to the gas. Example Fig. 6 shows the temperature change of a heated glass substrate for a flat panel display according to the heating device 1 according to the above embodiment and the time variation of the temperature deviation. -10- This paper size applies to China National Standard (CNS) A4 (210X 297mm)

Line 513550 A7 B7 V. Description of the invention (8) The size of the glass substrate is 730 mm X 9200 mm X 0.7 mm, the set temperature of the heater 3 is 230 ° C, and the gas flow rate is 30 liters per minute. The horizontal axis of the figure is the heating time, the vertical axis on the left is the surface temperature of the glass substrate, and the vertical axis on the right indicates the deviation of the surface temperature of the glass substrate. As for the solid line A in the figure, the time variation of the temperature at the highest surface temperature position of the glass substrate is shown, the solid line B is the time variation of the temperature at the lowest surface temperature position of the glass substrate, and the dashed line C is from the highest surface temperature position of the glass substrate. The time variation of the set temperature deviation, the dotted line D is the time change of the set temperature deviation from the lowest surface temperature position of the glass substrate, and the dashed line E is the temperature deviation of the temperature of the highest surface temperature position and the lowest surface temperature position of the glass substrate. Change of time. Therefore, according to the heating device 1 of the above embodiment, it can be confirmed that the deviation between the maximum surface temperature and the minimum surface temperature can be less than 51 in about 6 minutes. On the other hand, when the gas is not supplied, the deviation does not become smaller than about 10 ° C even after a period of time, and the deviation to reach the target may take a long time. That is, it was confirmed that if the temperature distribution in the heating field can be uniformized in a short time and with high accuracy according to the present invention, the object to be heated can be evenly heated. -11- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Binding

513550 Repair JC;

Revised page of Chinese Specification for Patent Application No. 091100768 (September 91) A7 B7 ”.II .. Meaning :: month a. V. Description of Invention (8a) Element Symbol Description: 1 Heating device 26 Preheating heater 2 Furnace 27 Exhaust piping 2 a, 2 b Opening and closing door 27a Gas inflow hole 3 Heater 3a Heating surface 4 Object to be heated 5 Bracket 6 Support 10 Heater body 10a Heater 10b, 10c Aluminum plate 11 Heater cover 1 la Base plate 1 laf Reflective surface perimeter wall 20 Gas flow space 20a, 20b Compartment 2 1 Partition wall 21a Gas flow hole 22 Gas introduction pipe 22a Blowout port 23 Discharge port -113- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm)

Claims (1)

513550 A8 B8 C8 D8 々, patent application scope 1. A heating method, characterized by a heating device provided with a plurality of panel-shaped heaters spaced apart from each other in parallel, When heating the heating object arranged on the heating surface of the heater, a gas having a lower temperature than the set temperature of the heater is introduced into a gas flow space provided inside each heater, so that a gas introduced into the gas flow space is introduced. , Flows from the center of the heating surface to the surroundings. 2. A heating device comprising a plurality of side-by-side panel heaters spaced apart from each other, and between adjacent heaters, a heating target is disposed with respect to a heating surface of the heater, and is disposed inside each heater A gas flow space is provided. The gas flow space is provided with introduction means for introducing the gas. The gas introduced into the gas flow space flows from the center of the heating surface to the surroundings, and the gas is introduced to the heating surface. Near the center. 3 _ The heating device according to item 2 of the scope of the patent application, characterized in that the gas introduction means has a blow-out port for blowing gas from the vicinity of the center of the heating surface in the gas flow space, and introduces gas into each heater. The gas discharge port of the flow space is provided near the periphery of the heating surface. 4. The heating device according to item 3 of the scope of patent application, characterized in that a partition wall is provided at each heater to divide the above-mentioned gas flow space and the compartment near the center of the heating surface, and the compartment near this center Closer to four weeks -12- This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) A8 B8 C8 --- ~ -------- £ 8_ _ 6. Compartment for patent application The partition wall is provided with a gas circulation hole adjoining the adjacent compartment, and the compartment near the center of the heating surface thereof is introduced with the gas by the above-mentioned gas introduction means. 5 · The heating device according to item 3 of the scope of the patent application, characterized in that the gas discharge port 'the gas discharged from its discharge port does not directly blow the heating object, but is provided in an area where the heating object is arranged. Further away from the center of the heating surface. 6. The heating device according to item 4 of the scope of patent application, characterized in that the above-mentioned gas discharge port, and the gas discharged from its discharge port does not directly blow the above-mentioned heating object, but is provided in a field of arrangement that is more than the above-mentioned heating object. Further away from the center of the heating surface. 7. The heating device according to any one of claims 3 to 6, wherein the heater is disposed inside a furnace body having an inlet and an outlet for heating, and the gas discharged from the outlet is directed to the furnace body. Means of entrance guidance. -13- This paper size applies to China National Standard (CNS) A4 (210X297 mm)