506237 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（1) 【產業上之利用領域】 本發明是關於將連續所供給之複數個工件，一個個地 分離而個別搬運之工件搬運裝置。 【先行技術】 例如，作爲搬運晶片零件等工件之工件搬運裝置者， 從以往就周知有具備供給工件之工件進料裝置、及於外周 設有容納工件之工件容納溝之轉盤、及設在工件進料裝置 與轉盤之間之分離機構。 對於如此之工件搬運裝置，由工件進料裝置所連續供 給的複數個工件，係在分離機構被一個個分離之後，被容 納在轉盤的工件容納溝內後再被搬運。 【發明所欲解決之課題】 如上述般地，由工件進料裝置所連續供給之工件，是 在分離機構被一個個地分離，但因近年來工件的微細化， 若要將工件一個個確實地分離，然後以機械性進行容納至 轉盤工件容納溝內之作業時，對於微細機構之組入及其動 作上是難以進行。 尤其是分離機構之工件卡止方法，原本，由於是利用 開設在工件通路之開孔來使擋止銷進行出入，所以機構複 雜，而隨著工件的微細化，便到達其所能適用範圍之極限 〇 本發明是考量於此點而發明，目的是在提供一種可在 (請先閲讀背面之注意事項再填寫本頁) •裝· 訂 d 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4- 506237 A7 B7 五、發明説明（2 ) (請先閲讀背面之注意事項再填寫本頁) 分離機構中，將工件進料裝置所供給的複數個工件，一個 個確實地分離，然後可以迅速地搬運至轉盤的工件容納溝 內之工件搬運裝置。 【用以解決課題之手段】 經濟部智慧財產局員工消費合作社印製 本發明，係具備有供給複數個工件之工件進料裝置、 及在外周設有容納工件之複數個工件容納溝並可旋轉自如 之轉盤、及延伸於工件進料裝置與轉盤之間之分離機構， 轉盤旋轉，使工件容納溝配置在對準朝向連通路之接受位 置之同時，在靠近轉盤處設有連通位於接收位置之工件容 納溝之吸引口，在位於接收位置之工件容納溝近旁部分設 有工件檢測部，在工件檢測部之工件搬運方向下流側及上 .流側，設有第1工件停止部及第2工件停止部，依據來自 工件檢測部之信號由控制裝置控制第1工件停止部及第2 工件停止部，爲其特徵之工件搬運裝置。再者，去除掉擋 止銷而僅以孔穴，由於設計以由其孔穴來吸附工件之方式 ，因此構造簡單，對於細微工件亦可適用，並且將吸附孔 穴設在工件之上，由於不會吸引下方所堆積之塵屑，即使 是細孔亦不會阻塞。 依據本發明，由工件進料裝置所供給的複數個工件， 係連續被輸送於分離機構之連通路內。當前端之工件通過 工件檢測部時，藉由第1工件停止部的吸引使前端之工件 停止並被保持，藉由第2工件停止部的吸引使第2個工件 停止，並被保持。其次，在受到第2工件停止部使第2個 本紙張尺度適用中國國家標準（CNS ) A4規格（2i〇X297公釐) -5- 506237 A7 B7 五、發明説明（3) (請先閲讀背面之注意事項再填寫本頁) 工件處於被保持之狀態下，當一停止第1工件停止部之吸 引，使先頭之工件所受之吸持被解除，先頭之工件便受到 來自工件容納溝內吸引口之吸引，而被容納在轉盤位於接 收位置之工件容納溝內。 【發明實施形態】 以下，請參照圖面說明本發明之實施形態。 第1圖至第3圖爲依本發明之工件搬運裝置之一實施 形態的圖式。在第1圖及第2圖中，工件搬運裝置，乃具 備有例如連繪性供給晶片零件等複數個工件W 1、W 2… 之工件進料裝置2 3、及在外周設有容納工件W 1、W 2 …之複數個工件容納溝1 1 a並可旋轉自如之轉盤1 1、 .及設在工件進料裝置2 3與轉盤1 1之間之分離機構2 4 0 經濟部智慧財產局員工消費合作社印製 其中該工件進料裝置2 3，例如是藉由震動以連續性 且直線狀地供給工件W i、W 2…，工件進料裝置2 3是 受支持台2 3 a而被支持，同時由蓋體2 3 b所覆蓋。又 ，分離機構2 4，具有延伸於工件進料裝置2 3與轉盤 1 1之間之連通路2 4 a。 再者，分離機構2 4與轉盤1 1，係受底座2 〇支持 之同時，亦受蓋體2 1所覆蓋。 轉盤1 1旋轉後，將工件容納溝1 1 a以對準連通路 2 4 a之方式地配置在接受位置。被容納在處於接收位置 之工件容納溝1 1 a內之工件W i、W 2…，係隨著轉盤 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6 - 506237 A7 ___ B7 _ 五、發明説明（4) 1 1的旋轉被搬運於圓周方向，並藉由設在轉盤1 1外周 之沒有圖示出之檢查機構，對工件W 1、W 2…進行外形 、損傷、電氣特性等之必要性之檢查。 又，底座2 0，設有與位於接收位置之工件容納溝 1 1 a相連通之吸引口 1 2，並藉由該吸引口 1 2，而被 吸引於位在接收位置之工件容納溝1 1 a內。 再者，分離機構2 4之連通路2 4 a與位於接收位置 之工件容納溝1 1 a之間，設有由受光器1 5 a及投光器 1 5 b所構成之工件檢測部。工件檢測部之受光器1 5 a 是設在蓋體2 1側，而投光器1 5 b是設在底座2 0側。 又，在工件檢測部1 5 a、1 5 b之朝工件W i、 W 2…之搬運方向的下流側，設有第1工件停止部1 4， .並在上流側設有第2工件停止部1 6。其中該第1工件停 止部1 4，是由連接於沒有圖示出之真空手段之具有細孔 之吸附裝置所構成，同時被設在連通路2 4 a上方之蓋體 2 1中可對應於位於接收位置之工件容納溝1 1 a之部分 。又，第2工件停止部1 6是由連接於沒有圖示出之真空 手段之具有細孔之吸附裝置所構成，同時被設在對應於蓋 體2 1中之連通路2 4 a之部分。 亦即，吸附之意爲真空吸附，當工件擋止件動作時是 使工件擋止件之細孔呈真空，工件便被吸附藉由摩擦而保 持。 又，來自工件檢測部1 5 a、1 5 b之信號便被輸入 於控制裝置3 0，藉由該控制裝置3 0驅動控制第1工件 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） I 0 (請先閲讀背面之注意事項再填寫本頁) .裝· d 經濟部智慧財產局員工消費合作社印製 506237 經濟部智慧財產局員工消費合作社印製 A7 ___ B7五、發明説明（5) 停止部1 4、第2工件停止部1 6及轉盤1 1。 其次對於由如此所構成之本實施形態之作用，藉由第 1圖、第2圖及第3圖（a)〜（d)加以說明。 首先工件W i、W 2…是藉由工件進料裝置2 3連續 性地被供給，並被輸送至分離機構2 4之連通路2 4 a內 。當工件W i、W 2…被送進分離機構2 4之連通路 2 4 a內時，先頭之工件W :通過工件檢測部1 5 a、 1 5 . b。當工件檢測部1 5 a、1 5 b —偵測到先頭之工 件W i之通過時，便藉由控制裝置3 0使第2工件停止部 1 6動作，藉由第2工件停止部1 6使第2個工件W 2被 吸附而被保持住（第3圖（a ))。 然後先頭之工件W i，受到吸引口 1 2之吸引而被容 .納在位於接收位置之工件容納溝1 1 a內。此時，由於第 1工件停止部1 4是呈大氣壓狀態，所以不會吸附工件 W I 〇 如此地，使先頭之工件W i確實地與第2個工件W 2 分離，而被容納在工件容納溝1 1 a內。其次藉由控制裝 置3 0，使轉盤1 1只旋轉1個間距量。 其次如第3圖（b )所示，使第2工件停止部1 6之 動作停止，第2工件停止部1 6便呈大氣壓狀態而釋放工 件W 2成爲先頭之工件。先頭之工件W i與第2個工件W 2 緊密連接並在連通路2 4 a內前進，當先頭之工件，1通 過工件檢測部1 5 a、1 5 b，藉由控制裝置3 0使第1 工件停止部1 4動作，將先頭之工件W i吸附保持住。在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 一 — -8 - I Jm (請先閱讀背面之注意事項再填寫本頁) -裝- 訂 d 506237 A7 B7 五、發明説明（6) 此情形時，先頭之工件W i尙不會被容納於工件容納溝 1 1 a內而停止在進入工件容納溝1 1 a之前。 (請先閲讀背面之注意事項再填寫本頁) 其後，如第3圖（c )所示，藉由控制裝置3 0使第 2工件停止部1 6動作，將第2個工件W 2吸附並保持住 〇 其次，如第3圖（d )所示，藉由控制裝置3 0使第 2工件停止部1 6爲動作狀態下，僅停止第1工件停止部 1 4之動作，使第1工件停止部1 4呈大氣壓狀態釋放先 頭之工件W i。 藉此，使先頭之工件W i受吸引口 1 2所吸引，被容 納在轉盤1 1處於接收位置之工件容納溝113內。 如此地依據本實施形態，在分離機構2 4之連通路 2 4 a內，能夠將相互緊密相接所輸送來的工件w i、 W 2…確實地分離，並將被分離後的一個個工件W i、W 2 …確實地容納在轉盤1 1之工件容納溝1 1 a內。 經濟部智慧財產局員工消費合作社印製 又，先頭之工件W :，由於是受到對應於工件容納溝 1 1 a之位置所設之第1工件停止部1 4所吸附，在即將 進入工件容納溝Γ 1 a之前先一時停止之後，才被容納於 工件容納溝1 1 a，使工件W i在被容納在工件容納溝 1 1 a內時，工件W i不會強力地碰觸於工件容納溝 1 1 a之壁面.，而能夠將W i之損傷防止於未然。 【發明之效果】 如以上所述般地，依據本發明，確實地在分離機構內 本紙張尺度適用中國國家標準（CNS ) A4規i ( 210X297公釐） ' -9 - 506237 A7 __ B7 __ 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 將連續所供給的複數個工件一個個分離，其後可以迅速地 容納在轉盤的工件容納溝內，同時機構簡單，亦能夠對應 更加微細的工件。 【圖面之簡單說明】 第1圖是依本發明之工件搬運裝置之一實施形態的平 面圖。 第2圖是依本發明之工件搬運裝置之一實施形態的側 視斷面圖。 第3圖是依本發明之工件搬運裝置之一實施形態的作 用圖。 ‘ 【符號說明】 1 1 :轉盤 1 1 a :工件容納溝 1 2 :吸引口 經濟部智慧財產局員工消費合作社印製 1 4 :第1工件停止部 1 5 :工件檢測部 1 5 a :受光器 1 5 b :投光器 1 6 :第2工件停止部 2 0 :底座 2 1 :蓋體 2 3 :工件進料裝置 $紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）'"- -10- 506237 A7 B7 五、發明説明（8) 2 3 a ·支持台 2 3 b :蓋體 2 4 :分離機構 2 4 a :連通路 3 0 :控制裝置 I 1Τ (請先閲讀背面之注意事項再填寫本頁) 裝. 、1Τ 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（2ί〇Χ297公釐） •11 -506237 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) [Industrial Use Field] The present invention relates to the transfer of workpieces that are continuously supplied and separated one by one and individually moved Device. [Preceding technology] For example, as a workpiece conveying device for conveying workpieces such as wafer parts, a workpiece feeding device for supplying a workpiece, a turntable provided with a workpiece receiving groove for accommodating the workpiece on the outer periphery, and a workpiece are known. The separating mechanism between the feeding device and the turntable. For such a workpiece conveying device, a plurality of workpieces continuously supplied by the workpiece feeding device are separated one by one by the separating mechanism, and then are accommodated in the workpiece receiving groove of the turntable before being transferred. [Problems to be Solved by the Invention] As described above, the workpieces continuously supplied by the workpiece feeding device are separated one by one by the separating mechanism. However, due to the miniaturization of the workpieces in recent years, it is necessary to make the workpieces one by one. When separating the ground and then mechanically accommodating it into the workpiece receiving groove of the turntable, it is difficult to carry out the assembly of the fine mechanism and its operation. In particular, the workpiece locking method of the separation mechanism originally uses a hole provided in the workpiece path to make the stop pin come in and out, so the mechanism is complicated. With the miniaturization of the workpiece, it can reach its applicable range. Limit 0 The present invention was invented in consideration of this point, and the purpose is to provide a method that can be used (please read the notes on the back before filling out this page) • Binding and ordering d This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -4- 506237 A7 B7 V. Description of the invention (2) (Please read the precautions on the back before filling out this page) In the separation mechanism, the workpieces supplied by the workpiece feeding device are provided one by one. It can be separated and then quickly transferred to the workpiece handling device in the workpiece receiving groove of the turntable. [Means to Solve the Problem] The present invention, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, is provided with a workpiece feeding device for supplying a plurality of workpieces, and a plurality of workpiece accommodating grooves for accommodating workpieces are provided on the periphery and can rotate The free turntable and the separation mechanism extending between the workpiece feeding device and the turntable. The turntable rotates so that the workpiece receiving groove is aligned with the receiving position facing the communication path, and a communication position is located near the turntable. The suction opening of the workpiece receiving groove is provided with a workpiece detection portion near the workpiece receiving groove located at the receiving position, and a first workpiece stop portion and a second workpiece are provided on the downstream side and the upstream side of the workpiece conveyance direction of the workpiece detection portion. The stopper is a workpiece conveying device characterized by a control device that controls the first work stopper and the second work stopper according to a signal from the work detector. In addition, only the holes are removed without the stop pin. Since the design is to adsorb the workpiece by its holes, the structure is simple, and it is also applicable to fine workpieces. The adsorption holes are set on the workpiece, because it will not attract The dust particles accumulated below will not block even the pores. According to the present invention, the plurality of workpieces supplied by the workpiece feeding device are continuously conveyed in the communication path of the separating mechanism. When the front-end workpiece passes the workpiece detection unit, the front-end workpiece is stopped and held by the suction of the first workpiece stop, and the second workpiece is stopped and held by the suction of the second workpiece stop. Secondly, after receiving the second workpiece stopper, the second paper size is applied to the Chinese National Standard (CNS) A4 specification (2i × 297mm) -5- 506237 A7 B7 V. Description of the invention (3) (Please read the back first (Please note this page before filling in this page) When the workpiece is held, once the suction of the first workpiece stop is stopped, the holding of the leading workpiece is released, and the leading workpiece is attracted from the workpiece receiving groove. The mouth is attracted and is accommodated in the workpiece receiving groove of the turntable at the receiving position. [Inventive Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Figures 1 to 3 are diagrams showing an embodiment of a workpiece handling apparatus according to the present invention. In FIGS. 1 and 2, the workpiece conveying device is provided with a workpiece feeding device 23 including a plurality of workpieces W 1, W 2. 1. W 2… a plurality of workpiece accommodating grooves 1 1 a and a rotatable turntable 11 1.. And a separation mechanism 2 3 between the workpiece feeding device 2 3 and the turntable 1 1 2 Intellectual Property Bureau of the Ministry of Economic Affairs The employee consumer cooperative prints the workpiece feeding device 23, for example, by continuously and linearly supplying the workpieces W i, W 2... By the vibration, and the workpiece feeding device 2 3 is a support table 2 3 a. Support, while covered by the cover 2 3 b. In addition, the separation mechanism 24 has a communication path 24a extending between the workpiece feeding device 23 and the turntable 11. Furthermore, the separation mechanism 24 and the turntable 11 are both supported by the base 20 and covered by the cover 21. After the turntable 11 is rotated, the workpiece receiving groove 11a is arranged at the receiving position so as to be aligned with the communication path 2a. The workpieces Wi, W2, ... accommodated in the workpiece receiving groove 1 1 a in the receiving position are in accordance with the standard of the paper of the turntable. The national standard (CNS) A4 specification (210X297 mm) -6-506237 A7 ___ B7 _ V. Description of the invention (4) The rotation of 1 1 is carried in the circumferential direction, and the workpieces W 1, W 2 ... are shaped, damaged, etc. by an inspection mechanism provided on the outer periphery of the turntable 11 1. Check the necessity of electrical characteristics, etc. In addition, the base 20 is provided with a suction port 12 communicating with the workpiece receiving groove 1 1 a located at the receiving position, and the workpiece receiving groove 1 1 located at the receiving position is attracted by the suction port 12. within a. In addition, a workpiece detection section composed of a light receiver 15 a and a light projector 15 b is provided between the communication path 2 4 a of the separation mechanism 24 and the workpiece receiving groove 1 1 a located at the receiving position. The light receiver 15 a of the workpiece detection section is provided on the cover 21 side, and the light projector 15 b is provided on the base 20 side. Further, on the downstream side of the workpiece detection sections 1 5 a, 1 5 b toward the conveyance direction of the workpieces Wi, W 2 ..., a first workpiece stopper 14 is provided, and a second workpiece stop is provided on the upstream side. Department 1 6. The first workpiece stopping portion 14 is composed of an adsorption device having fine holes connected to a vacuum means (not shown), and the cover body 21 provided above the communication path 2 4 a may correspond to The part of the workpiece receiving groove 1 1 a located at the receiving position. The second workpiece stopper 16 is composed of a suction device having fine holes connected to a vacuum means (not shown), and is provided at a portion corresponding to the communication path 2 4 a in the cover body 21. That is, the adsorption means vacuum adsorption. When the workpiece stopper moves, the pores of the workpiece stopper are vacuumed, and the workpiece is held by the suction by friction. In addition, the signals from the workpiece detection sections 15 a and 15 b are input to the control device 30, and the first device is driven and controlled by the control device 30. The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I 0 (Please read the notes on the back before filling out this page). Equipment · d Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 506237 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___ B7 DESCRIPTION OF THE INVENTION (5) Stopper 14, second work stopper 16 and turntable 11. Next, the effect of this embodiment constituted in this way will be described with reference to Figs. 1, 2, and 3 (a) to (d). First, the workpieces Wi, W2, ... are continuously supplied by the workpiece feeding device 23, and are conveyed into the communication path 2a of the separation mechanism 24. When the workpieces W i, W 2 ... are fed into the communication path 2 4 a of the separating mechanism 2 4, the leading workpiece W: passes through the workpiece detection sections 1 5 a, 1 5. B. When the workpiece detection section 1 5 a, 1 5 b — detects the passage of the leading workpiece Wi, the second workpiece stop section 16 is operated by the control device 30, and the second workpiece stop section 16 is operated by the control device 30. The second workpiece W 2 is sucked and held (FIG. 3 (a)). The leading workpiece Wi is then attracted by the suction port 12 and contained in the workpiece receiving groove 11a located at the receiving position. At this time, since the first workpiece stopping portion 14 is in an atmospheric pressure state, the workpiece WI is not adsorbed. In this way, the leading workpiece Wi is surely separated from the second workpiece W 2 and is stored in the workpiece receiving groove. Within 1 1 a. Secondly, by the control device 30, the turntable 11 is rotated by only one pitch amount. Next, as shown in Fig. 3 (b), the operation of the second workpiece stop portion 16 is stopped, and the second workpiece stop portion 16 is brought into an atmospheric pressure state, and the work W2 is released to become the leading work. The leading workpiece Wi is closely connected to the second workpiece W 2 and advances in the communication path 2 4 a. When the leading workpiece 1 passes through the workpiece detection unit 1 5 a and 1 5 b, the control device 30 makes the first workpiece 1 The work stop portion 1 4 operates to suck and hold the leading work Wi. Chinese paper standard (CNS) A4 (210X297 mm) applies to this paper size. I — -8-I Jm (please read the precautions on the back before filling this page)-Binding-Order d 506237 A7 B7 V. Description of the invention (6) In this case, the leading workpiece W i 尙 will not be accommodated in the workpiece receiving groove 1 1 a and will stop before entering the workpiece receiving groove 1 1 a. (Please read the precautions on the back before filling in this page.) Then, as shown in Figure 3 (c), the second workpiece stop portion 16 is operated by the control device 30, and the second workpiece W 2 is attracted. Then, as shown in FIG. 3 (d), the second workpiece stop portion 16 is operated by the control device 30, and only the operation of the first workpiece stop portion 14 is stopped to make the first The workpiece stopper 14 releases the leading workpiece Wi under atmospheric pressure. Thereby, the leading workpiece Wi is attracted by the suction port 12 and is accommodated in the workpiece accommodating groove 113 where the turntable 11 is in the receiving position. In this way, according to the present embodiment, in the communication path 2 4 a of the separation mechanism 24, the workpieces wi, W 2,... That are conveyed in close contact with each other can be reliably separated, and the separated workpieces W can be separated. i, W 2… are surely accommodated in the workpiece accommodating groove 1 1 a of the turntable 11. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the leading workpiece W: is adsorbed by the first workpiece stopping portion 14 provided at a position corresponding to the workpiece receiving groove 1 1 a, and is about to enter the workpiece receiving groove. Γ 1 a is temporarily stopped before being accommodated in the workpiece receiving groove 1 1 a, so that when the workpiece Wi is accommodated in the workpiece receiving groove 1 1 a, the workpiece Wi does not strongly touch the workpiece receiving groove 1 1 a wall surface, and can prevent the damage of Wi i in advance. [Effects of the invention] As described above, according to the present invention, the Chinese paper standard (CNS) A4 (i.e. 210X297 mm) is applied to the paper size in the separation mechanism. -9-506237 A7 __ B7 __ 5 、 Explanation of invention (7) (Please read the precautions on the back before filling in this page) Separate the multiple workpieces supplied in succession one by one, and then they can be quickly accommodated in the workpiece receiving groove of the turntable. Supports even finer workpieces. [Brief description of the drawing] Fig. 1 is a plan view of an embodiment of a workpiece conveying device according to the present invention. Fig. 2 is a side cross-sectional view of an embodiment of a workpiece handling apparatus according to the present invention. Fig. 3 is an operation diagram of an embodiment of a workpiece conveying device according to the present invention. '[Description of symbols] 1 1: Turntable 1 1 a: Workpiece receiving groove 1 2: Attracted by the Intellectual Property Bureau of the Ministry of Economic Affairs, and printed by the Consumer Cooperatives 1 4: The first workpiece stopper 1 5: Workpiece detection 1 5 a: Light receiving 1 5 b: Emitter 16: 2nd workpiece stop 2 0: Base 2 1: Cover 2 3: Workpiece feeding device $ Paper size applies to China National Standard (CNS) A4 (210X297 mm) '" --10- 506237 A7 B7 V. Description of the invention (8) 2 3 a · Support 2 3 b: Cover 2 4: Separation mechanism 2 4 a: Communication path 3 0: Control device I 1T (Please read the back Note: Please fill in this page again.) Packing, 1T The printed paper size of the Intellectual Property Bureau's Consumer Cooperatives of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) A4 specification (2ί〇 × 297 mm) • 11-