TW504879B - Laser processing device - Google Patents

Abstract

Laser oscillator 6 is provided with a Q-switch unit the operation of which is controlled by a Q-switch control pulse and includes optical resonator 7 in which oscillation is checked when the Q-switch unit is turned ON under the control of the Q-switch control pulse but oscillation proceeds normally when the Q-switch unit is OFF. Optical switch unit 9 is arranged on the optical path between a laser oscillator and an object to be processed by laser pulses emitted from the laser oscillator and either transmits or blocks laser light under the control of an optical switch pulse. Computer 1 supplies I/O data that designate the frequency of repetition that the Q-switch unit is caused to operate periodically and further designates the interval that the Q-switch unit is ON as the pumping interval. Control unit 2 generates a Q-switch frequency pulse having a frequency of repetition designated by the I/O date; generates a Q-switch control pulse synchronized with the Q-switch frequency pulse. The Q-switch control pulse has a width corresponding to the period designated as pumping intervals by the I/O data. Moreover, control unit 2 generates an optical switch pulse synchronized with the Q-switch control pulse that has a pulse width corresponding to an interval predetermined as the interval of laser light transmission.

Description

V. Description of the invention (1) [Background of the invention] The present invention is about the giant pulse (g Pul se) technology of a laser processing system, 4 „UI. Crying is not about Q-Switched The control of the pulse of the laser oscillating mouth. The iUI technology tgj uses the solid state laser light generated under the Q switch to handle the laser trimming device and laser marking device. It accounts for most of such devices The semiconductor and electronic components of the J object, 6 because data terminal equipment such as 2 (MD, mini-disk), digital video camera (]) VC, digital video camera) and portable phones become thin and short, with It has become smaller and lighter. At the same time, such processing objects have also decreased due to the current price competition. Therefore, the demand for high-speed processing to increase the yield of the radiation processing system. However, even if the oscillation wavelength is the same To obtain the Q-switching frequency of the laser light with a peak value for processing. It will also follow the excitation method of the laser oscillator (for example, a lamp excitation method or a laser diode excitation method) or a common method. X-Vibrator Structure In particular, in the Q-switched laser oscillation, there is a problem that the peak value of the first pulse after the first pulse is suspended is too large. This problem is caused by the following reasons: That is, when the "excitation period" is continuously extended because of "processing aborted" (for example), the optical density stored in the laser medium will reach a saturation 504879

. When a short period of Q-switched laser oscillation is affected in this state, the energy reaching this saturation value will be released at the first pulse. However, each laser pulse emitted after this first pulse releases the energy stored in each excitation period of the short period, and this energy is equal to the saturation value of f. Therefore, the peak value of the first pulse released after the energy density reaches the saturation value will be higher than the peak value of the laser pulse released before the energy density reaches the saturation value. FIG. 1 is a block diagram of the main components of a typical Q-switched oscillator in the conventional technology. Computer 1 provides timing information for control unit 2: Q switch 〇n / 〇ff

Data 'as input / output (j / 〇) data (Note • indicates the time data used to illuminate the object to be processed with two-shot pulses), that is, a processing cycle (Note to know that the shot is processed with a series of laser pulses Target time) _, Q switching frequency and the pulse width of the Q switching frequency pulse. The control unit 2 will generate a Q-switch control pulse signal corresponding to this 丨 / 〇 data, and provide a signal to the off-driver 4. Set the optical resonance of the laser oscillator 6 to within 7. The Q switch unit 8 will be turned on and off (OFF) according to the received pulse signal. 〇 In the inner valley, the opening of the Q switch early element 8 will quickly reduce the Q value of the optical resonator, and thus suppress the w / Off μ μ # & π field emission oscillation. Conversely, when the Q-switch unit is turned off, the optical resonator value will return to normal and normal laser oscillation will occur. Qin-Γ starts to turn on and off Λ yuan switches from the on state to the off state 'The light energy stored in the laser medium comes out when the q switch is turned on early, so a laser pulse with a high spike is emitted .

Page 7 V. Description of the invention (3) Giant pulse "(see the peak pulse laser pulse described below is referred to as Figure 3). Fig. 2 is a block diagram showing the internal structure of the control unit 2 in the display diagram. This laser control unit is equipped with two = radio control 12. The frequency control circuit 13 and the reference pulse cover 15 are two. The decoder 12 will bring the σ㈡ 'circuit 16 provided by the computer 2. The pulse signal is generated and a reference clock frequency pulse (period T3) is generated by solving 1 ^ 5. Timing frequency-Q switch pulse, and provide a pulse guard * two, to receive this Q switch frequency pulse isolator 14. 8 See the example of the Q switch control pulse to Q switch points. Take 3 as the display timing diagram of the lightning = ::: shooting time. In this figure it is accumulated until it reaches a saturation state. In the field of media, Tianshi! w fj This oscillation is oscillating, and during this long period of excitation, s is like a giant pulse: the product i is full; the light energy of the state is suddenly released: formation-called "":; The first giant vein sent out ^ ί; M ^ f, J m The light energy stored in the laser medium has not reached saturation II

The peak value of Ϊ ^ Γ will be smaller than the peak value of the first pulse. Since this 13 switch control ^] 糸 is input to the Q switch unit after a fixed time interval of time t 〇, = ^ ^ the excitation period of the same duration, so the giant pulse with the same peak value as the 0 switch control pulse is the first Emitted in the form of two giant pulses. The pulse height difference between subsequent giant pulses usually results in unwanted irregularities. Japanese Patent Laid-Open Publication No. 354876/9 9 (hereinafter referred to as the reference sound) discloses a laser processing system and method for reducing the occurrence of an excessively large 222 ^ 1 pulse, thereby removing the obstacle to the optimum Where the conditions are changed / To suppress this first pulse, the device of reference 1 is provided with a first pulse suppression control circuit and a light energy release pulse generating circuit. The first pulse = suppression control circuit will gradually change a Q-switch control pulse, so that the light energy stored during processing or processing suspension is released. & Light energy release pulse & A lifetime circuit controls this Q switch, so that the light energy retained at the tail end of the release phase can be completely released. This device can suppress the first pulse from emitting light energy stored in the laser medium (for example, the preparation time of a pulse that cannot be processed at the maximum speed). . However, since it requires preparation time for filming, it is problematic (because this one is used to reduce Japanese Patent Laid-Open Publication No. 31 31 45/9 8 (hereinafter referred to as a reference :) to disclose a laser processing The system is structured in the following way. The laser medium and the polarized beam splitter are set as basic parts; a laser resonator is relative to each beam separated by the polarized beam splitter.

504879 V. Description of the invention (5) Setting; and Q switching elements, which are arranged on the roll-plus axis, and each + color of the two laser resonators of the Q switching element is that the hunting is independent The ground control has one :: radiation common… turn off element, in order to turn off the frequency separately, the first connection of the turn off pulse train, # ra tl · ^ /, the vibration state can oscillate after a pulse of Q switch pulse train. Therefore, using only the output of the second laser resonator, a giant pulse train can be obtained after the first pulse is removed. "Everything is out of the soil: there are disadvantages of complicated structure and high cost. The laser treatment for the pulse control method is disclosed in Japanese Patent Gazette No. 2000-1 74492. This patent # is proposed by the inventor of this case. This patent is the basis of the previous case, so The following Jiang Pan t method is described in detail in the list of inventions referred to as the reference text patent. This patent is the next big one: the difference is that during the continuous two-supply-continuous vibration surplus period, the Q switch unit will be turned off and the light energy will be stored—Duan Jiandougu ... Moxibustion Q switch will be turned on early Beginning: In addition, phase A will open until the next Q switch is closed-the optical switch is used to turn on and off the laser pulse on the optical path of the optical path outside the laser resonator; Between the laser resonator and the object to be processed.面 ’Without reference to the structure of the laser output device disclosed in reference 3

Page 10 504879 V. Description of the invention (6) Block diagram The laser output device 30 is provided with a computer 38, a measurement unit 35, a laser oscillator 31, and an optical switch unit 32. The computer 38 provides 1/0 data to the quantity field = unit 35. The I / O data includes not only the timing data (ie, the pulse frequency and the pulse width used to control one pulse of the Q switch) for turning on or off the 9 switch units, but also for turning the optical switch on or off. The timing of the unit 32 is lean (ie, used to control the pulse frequency and pulse width of the optical switch). The measuring unit 35 will generate —Q switch control pulse and —optical switch control pulse based on this 1/0 data. Q switch driver 33 will control the pulse with Q switch

The impact of the Q switch unit llai ON / OFF control is affected. This 9 switch unit Ua is provided in the optical resonator 11b of the laser oscillator 31. Optical switch drive 2 4 will perform optical switch ⑽ / OFF control according to this optical switch control pulse. First ▲ Fig. 5 is a block diagram showing the structure of the measurement unit 35; and Fig. 6 is a timing chart showing the operation process signals of the device that does not refer to document 3. The measurement unit 35 is provided with a measurement comparison / determination unit 7 and a laser control unit 26. Measurement comparison / determination unit 丨 7 is used to measure the processing quantity of the object to be processed, compare these measurement values with the target value, and decide whether to

In Japan, the predetermined processing target has been reached, and when the predetermined processing target has not been reached: i.e. 'when additional laser pulse irradiation is required), a pulse signal (Logic 1) showing this fact is provided as a judgment result and transmitted to Laser control unit 26. The laser control unit 26 is provided with a decoder 2 0, a program-controlled frequency dividing circuit 2 丄, a clock pulse oscillator 22, a logic circuit 23, a timing circuit 24, and a program-controlled meter.

504879 V. Description of the invention (?) Time circuit 25. The resolver 20 will receive the computer 38 and represent the learning story Mw. . τ _ ^ The eight switches of the W-switch W11a and the optical path 10 are decoded, and the decoded I / O data is provided to the spear frequency control circuit 21 and the program-controlled timing circuit 25. The reference frequency circuit 21 receives the drought clock pulse signal generated by the reference clock pulse oscillator 22, divides the frequency according to the 1 / () data king's line, and generates a 9 switching frequency pulse; the clock pulse signal is more suitable. Value. In this case, the frequency division ratio can be changed. The 23 series self-programming frequency division circuit 21 receives the pulse rate. The test comparison / determination unit 17 receives the determination result, and then generates the round-in signal sum (AND) signal timing circuit 24. And the program-controlled timing circuit 25 provides ^ times · number to the extra + Μ < If the object to be processed needs field shot pulse irradiation, this AND works together # 炎 也 η Pulse synchronization-pulse signal m Switching frequency ^ The output from the logic circuit 23 is not required. According to the logic circuit 23 and the timing circuit = the wheel of the separator 34 屮 γ and the ancient M as the input to the optical switch

^ ^ fc output "No." has one of a set of pulse widths T 4 # is synchronized with μ and ^ Bi Bi Q switching frequency pulses (Figure 6 (ε)). The sub-opening I is based on the decoder 20 and the reference clock. One e% impulse oscillation is adjusted by 22 and logic circuit 23, and the program-controlled timing circuit 25 is combined with the sun ^ ^ to the Q switch drive ^ ^ 柃 柃 ——Q switch pulse output signal is the same as the off pulse It has a clock pulse with the logic circuit 23; two = 0 / the pulse width T1 specified by the material, and based on its timing signal (Figure 6 (B)).

Page 12 504879

The logic μ period of the switching pulse T1 is the phase of the phase switching: the heart is equal to the vibration period when the laser oscillator is stopped " period period (or vibration period, Puling interval), the same as: sudden accumulation here In the laser media. When the Tongguan pulse falls, the large pulse generates excited radiation and releases the accumulated energy. After the iron, a giant pulse is emitted (Figure 6 (c) is ^ θ ',,, silly. Spikes will therefore: Second, the pulse width of the pulse with a longer T1 firing period T1 will become available; second, make this threshold off the height of the giant pulse of the logic V of the pulse.

eccl i (D)) 4 V ,, ^ ^ ^ ^ ^ ^ r: L and: r depends on the know-how of the technology-the pulse: the second desire i: =: break the laser light, so the off pulse drops At the same time, all are placed in sync. = The switching element is turned off until the next one is used to block; during the pulse period T4 is turned on and off. Even the Q switching cycles of Lian,, and Bei Zhensheng are closed.

The time circuit 24 and the program-controlled timing circuit 25 are completely independent of each other in the above-mentioned device of the reference 3 "; after the output of the circuit 23, the switching pulses are synchronized, and each other:" The circuits are To describe this procedure, in the figure ", 2 = ground: step. To synchronize the rising edge of the pulse more specifically, the heart is closed: two] the relationship between the edge and the Q open delete

Five [Explanation of the invention (9) Off pulse: :: 5 -The starting time of the giant pulse) will be synchronized with -Optical M, and the edge (starting time of turning on the optical switch) will be synchronized: The on-off synchronization will make: the rising of 3 switching pulses With a Q-switching pulse method, == from the point of view, this device is connected to the question of synchronization. This point will hereinafter be referred to as the indirect synchronization method of the 3rd device of the reference-technology, above; 3; Switching pulses. ^ Zhao Yueyi 9 The rising edge of the switching frequency pulse to- segment time rate pulse and the second stage T off pulse must be before the -Q switching frequency and the second Q switching frequency = before (up H6 = at the intersection with the Q switching pulse). Pseudo / graph (β)). Therefore, the reason for the first giant pulse is that the first Q-switching frequency pulse is synchronized with the second one. In other words, the first emission of the two-pulse and two-chirp pulses at one place will not be performed in the same way as the first Q switch, and three v, but will delay the Q-switch cycle by three times. get on. This point will be hereinafter referred to as the second question of the reference 3 technology. One of the purposes of the present invention is to provide a laser processing system that can remove the aforementioned reference 3, point. This system uses a simple structure and stability. The micro system solves the problem of the first pulse. In addition, this system can arbitrarily change the peak value of the laser pulse output by the parent. To solve the above problems, the laser processing system of the present invention is provided with:

Page 14 5. Description of the invention (10). The field emission oscillator has a Q switch unit and an it oscillator. The W unit is controlled by a Q switch control pulse. The laser vibration is stopped and turned on by vibration (control): "When the yuan is off, It is often p.g), and the switch is single or blocked: ί :: OFF; L is used to transmit under the control of the optical switch pulse-two =; is configured in the relay and surplus device = Laser pulse; perform the laser oscillating treatment: 1 start = mention:; 1/0 data, this 1/0 data is marked: laser unit week :: = after the start time of the reason, then Mark the -C rate; and the Monday control unit with the q switch turned on, use il ·. Debit, check η, day by day, and have the tongue period marked by the I / 〇 poor material:; =; Ξ ;; Α Α in each of the Q switching frequency pulse cycle off control pulse in the I / O data off control pulse, the Q on the-logic level, and /: ㈣ has a period of vibration period, has- The Q switch control pulse has a second logic level during the first and second period. The t and the level will make the Q switch unit turn off; the switch control pulse is synchronized; mine The moment of the light transmission cycle: < Nine-learning switching pulse; a Q switch driver, use the Q switch control pulse to control receiving ^ _ control pulse, and drive according to the -optical switch :, =, yuan; To receive the optical switching pulse and root

IIH Page 15 V. Description of the invention (η) According to the optical switch pulse to control the opening of the optical switch unit, the switch control pulse synchronization can ensure the optical switch pulse. This laser processing system is used to generate one of the Q optical switch pulse control units. Structure, direct synchronization between the pulse and the Q-switch control pulse. The direct synchronization of the pulse can be related to the rise of the optical switch pulse. The optical switch pulse and the Q switch control can not be achieved by synchronizing the fall and edge of the Q switch control pulse. Therefore, the first problem of Reference 3 will be solved. 〇〇 In addition, the second problem of reference 3 can also use the early control function of the present invention to generate Q switch control pulses. This Q switch control pulse is within the period of each Q switching frequency pulse. The pulse was resolved. In other words, the q-switching control pulse is synchronized with the Q-switching frequency pulse during the period of each switching frequency pulse (including the 1st-off-frequency 1-rate pulse after the laser processing start time). Therefore, the initial Q-switching control pulse is generated in synchronization with the initial Q-switching frequency pulse after the start of laser processing. For this reason, the first pulse of the Emperor ^: after the start time or after the laser processing suspension period is discontinued is generated synchronously with a Q switching frequency pulse. The function of this control unit can be realized by the following example structure: "The rising edge of the Q-off control pulse is synchronized with the falling edge of the Q-switching frequency pulse, and the falling edge of the Q-switching control pulse It is synchronized with the rising edge of the optical switch pulse. " In other words, the Q-switchable control pulse can be controlled. When the frequency pulse is at the falling end, it rises synchronously. Therefore, it is possible to reduce the frequency of π i_ μ ^ of the switching frequency pulse, π i_ μ ^, from the time of η Shiri to after every '= just 504879 V. Description of the invention In the meantime, a laser pulse is generated. .: It will clarify the method of the present invention to solve the problem of the first pulse.

The Q switch control pulse generated by the control unit of the data Γ has a logic level in the I / O—the second one, and the vibration marked in other periods is accurate. Here The other periods represent periods outside of the // 0 data Yinzhu Langjian. Obviously include two "$, the period before the start time, or the period before the processing is suspended, the period before the start time" so the Q switch control pulse is in the processing Therefore, when the Q switch I Λ4 is stopped, it will become the second logic level. Therefore, the laser oscillating cry may continue to be in a closed state during these periods, because a continuous state of exhaustion is maintained at the beginning of the process. In this way, the peak of light energy will be avoided during the period when the laser volume is burned in the laser medium or the field radiation process is suspended. The rush can avoid having a higher giant pulse than its follower. Since the degree of the first Shishikou is programmable, the light energy in the pulse wide body of the Q switch control pulse generated by $ Zhai is also == During a vibration period, the peak value of the laser medium accumulated is also programmable: programmable. Of course: the sharp pulse generated by the huge pulse-laser processing Ϊ J3 device features and the laser processing system of the present invention are added in the amount of reference 3 Second hunting in the laser processing system of the present invention, Comparison / determination unit 'and 504879 of the present invention V. Invention description (13)-Laser processing system, adding the logic of reference 3 In this embodiment, the radar of the present invention is implemented. The comparison / determination unit, this measurement comparison / determination > includes a predetermined item of the measurement object 'comparing the measurement value with the objective for measuring the desired processing, and requires additional laser processing. 7 and determining whether, in addition, the laser processing system of the present invention, a laser circuit, a logic circuit, the logic circuit is provided in the determination of the measurement comparison / determination unit ^ fruit use ^ connected ^ Q switching frequency pulse and comparison / Determining circuit judges that additional laser 2 is required! The measurement impulse is transmitted to the first-timer circuit, and when the measurement comparison / ^ electricity 1 \ rate pulse requires additional laser processing, the circuit is not judged by the timing circuit. . To prevent the pass-through frequency pulse from being transmitted to the first stage—by the above-mentioned structure, the present invention has the following advantages: The resonator can be set to a continuous vibration state during the period before the start of the process or when the process is stopped: Peak :: Follow-up The pulses are controlled at the same level. The peak value of the muscle balance is provided with a circuit so that the laser pulse during the vibration period can be programmed and set to be programmable. Mode, which can synchronize the rising edge of the Q switch control pulse with the frequency pulse, and synchronize the rising edge of the falling edge of the balance of the Q switch control pulse, and can sleep together. π — ^ Achieve the stability and reliability of synchronizing the giant pulse's radiation time disk with „:::! start time; this: ΐ is generated as every Q switching frequency pulse, and has — Spike peak 4879 V. A single laser pulse train of the invention description (14). Provide a circuit to divide the reference clock pulse signal, and make the Q switching frequency, which is the reference timing of the operation of this laser processing system, programmable. Change. Therefore, the Q switching cycle of 3 will be arbitrarily selected from T3> T1 + T4 to be suitable for the processing of semiconductor or electronic components. The above and other related objects, features and advantages of the present invention are referred to the following The drawings used to illustrate the examples of the preferred embodiment will become clearer after the following description. Description of the Drum Best Embodiments The embodiments of the present invention will be described below with reference to the drawings. Figure 7 shows this The structure of the first embodiment of the laser processing system-a laser processing system with a yoke example is configured with: computer 1, control sheet :: clever: on 3, driver 4, optical switch driver 5, laser oscillation 6 and early element 9. The laser oscillator 6 includes an optical resonator 7 in which light is applied; learning: the vibrator, ^ is controlled by the material element. Bu Q switch unit 8 is provided with a switch sheet f8; operation mode, and optics Control unit 3. Laser control single open 5 The 5 control unit 2 contains the laser control data for the time specified by the laser control data, and here ... Pulse control, and used to control the optical Qin Kai J early yuan 8-Q Switch control pulse. The laser control unit 3 will generate Q-switched control pulses and optical switches of 1-n-optical switching pulses.

504879

The actuator 4 and the optical switch driver 5 4 are turned on. This switch-off control pulse ′ affects the 17 switching system of the Q switching unit. In the 0N state, the Tongguan unit is used to reduce the optical resonance B'Λ in the 0F: state, and the function of the Q switch unit is to make the optical resonance state 7 in this state have a normal (3 value. The 0N state system Equivalent to Laser Oscillation Cry 6 ^ ρ 疋

At the mountain, the Putian Tianpai sent the state b to suppress the oscillation state, and its OFF state is equivalent to the normal oscillation state of the laser oscillator 6.

The optical switch driver is controlled according to the optical switch pulse, which affects the 0N / 0FF control of the optical switch. The optical switch unit 9 has a shielding function and responds to the optical switch pulse to transmit or block. In the embodiment, the optical switch unit is provided in the laser oscillator but it can also be provided in the laser oscillator. Next, I will explain the structure of the laser control unit 3. Refer to Fig. 8 ', which shows a block diagram of the structure of the laser control unit 3 of the present embodiment. " The laser control unit 3 is configured with a Q switch and an optical switch to control the pulse decoding state 12, a program-controlled frequency division circuit 13, a program-controlled timing circuit η, a reference clock pulse oscillator 15 and a timing circuit 16. The decoded state 12 is used to decode the received I / 〇 data and transmit the I / O data of the solution to the program-controlled frequency division circuit 13 and the program-controlled timing circuit η. The program-controlled frequency dividing circuit 13 also receives the reference clock pulse signal from the reference clock pulse oscillator 15 and generates a pulse having a frequency specified by the decoded 1/0 data ^ = a Q switching frequency pulse. The program-controlled frequency division circuit 1 3 will transmit this q-switching frequency pulse to the program-controlled timing circuit 4. The period of this Q switching frequency pulse is defined

Page 504 504879

枉 粍 Leaf B guard circuit 14 performs the following actions: receives the reference clock pulse signal from the reference clock pulse, and receives the reference clock pulse signal from the program-controlled frequency division circuit. 3 receives the Q switching frequency pulse, and receives the decoded signal from the decoder 12. 1 / 〇 data; using the reference clock pulse signal as a timing signal (that is, using the reference clock pulse signal as a timing standard) to generate a Q switch control pulse with 1 / () data ^ ::, and this ㈣ Close control of the "pulse edge system" Q The falling edge of the switching frequency pulse is synchronized; and: the pulse is provided to the 9 switch driver 4. It is a variable relative to the peak value of the giant pulse. Q: # ^ ^ ^ ^ ^% ^ ^., .. Weigh, use this reference clock pulse signal as the timing to convey jealousy, ^ ㈡ 22 wide gates:--optical switching pulses ^ and, will be generated, as shown in Figure 7 and Figure 5. Actuator 5. The radiation Q-switching frequency data is combined— ^ 5, which is used to perform the laser-off unit and the optical switching unit. Then, the controller 12 is connected to the controller 12 in order to control the Kai-sheng to have a solution and solution. The frequency signal of the funded pulse signal is divided and generated. This frequency pulse The frequency of switching on and off is ^; ^ 3 pre-prediction rate) ° Q switch unit 8 and optical gate ^ is ^ See Figure 9 (A) below for the period of operation. Θ 关 早 709 will be in this Q The switching frequency pulse is due to the rising edge of the Q switching control pulse and the Q switching frequency pulse. Page 21 504879

P Niu Yuan synchronization (see Figure 9 (B) below) refers to %% + η ^, so after issuing a processing ▽, the first Q switch control pulse will be available ^ ^ ^ ^ ^ ^ ^ ^ , * 丄 丨, 乂 are generated in inverse form of the Q switching frequency pulse. This is exactly the same as the device i of the aforementioned reference 3. The first switch control pulse is the same as the second q switching frequency pulse.

In the 11 embodiment, the logic 1 of the q-switch control pulse will make the q-switch single state, and then stop the oscillation of the optical resonator 7 and "" so that this amount can be accumulated in the laser medium. Therefore, in this embodiment, the period # T1 of the pulse width of the Q-switch control pulse is the vibration center or the excitation period (see the description of FIG. 9 (B) below). After that, as the control pulse decreases, the Q-switching unit 8 will enter a state of 0FF, and the oscillation of the optical resonator 7 will be stopped and stopped, and all the accumulated energy will be excited and radiated at once, that is, generated. A giant pulse. When the Q-switch 8 receives the next Q-switch control pulse, the laser medium starts the next light energy. Μ

The Q switching pulse acting on the optical switching unit 9 by the optical switch driver 5 has its rising edge synchronized with the falling edge of the Q switching pulse (see FIG. 9 (E)). Therefore, the optical switch unit 9 is turned on synchronously with the rise of a giant pulse. Because the pulse width of the optical switching pulse is T4, the optical switching unit 9 is only on during this period T4, and is in the OFF state after this period ', so the laser light (even if it is illuminated) will be blocked. The Q switch control pulse is in a period other than the period T 4, that is, T 3-· # T1 (see FIG. 9 (B)) ′ is a logic 0, so the Q switch unit will be maintained at

Page 22 V. Description of the invention (18) Ming Fen, staying in the laser media today 'moving spines due to vibration (pump i ng) # = i ^ The number of atoms in the transition state is inverse to leaving the distribution due to excited radiation ίί = number of f's Both will be in a state of equilibrium, and the limit of maintaining-fixing = vibration = t state, but this continuous oscillation state will be blocked by the optical switching unit because it is in the OFF state. During this period of time T3 — # T1, the :: oV two gases stored in the laser medium are locally low. Hu Jin uses a giant pulse of light energy to essentially wait for the pulse width # T1 period of the control pulse, which is accumulated in the laser medium. Two = this, if the pulse width # 71 is a constant, a giant pulse ίϋΐ constant. In addition, the programmed change of the pulse width # T1 allows the corresponding peak of the giant pulse to have a programmed change. The Q switch control pulse is in a period during which the processing instruction is issued to be suspended (that is, before the first J gate ^ frequency division circuit 13 is issued), which is equal to the frequency of the programmable laser oscillator Θ at During this period of time, the state of sorrow was sad. Therefore, the -Li *, the present invention can solve the ί :: value :, density. According to the "first pulse problem" of this giant pulse. 1 The large peak will be higher than its follow-up. In this embodiment, the falling edge of the control pulse of the program-controlled timing mine and the pulse of the optical switch; the edge-gate timing circuit 16. The opening edge is conveyed to this method step by step and in the reference of the aforementioned reference 3, the use of a Q switch is used: inversely, synchronize the aforementioned pulse, and pulse an optical switch. —Q switching frequency pulse The off pulse is synchronized with this Q switching frequency pulse

504879

Fight! The falling edge of the ground fine-off control pulse is synchronized with the upper opening edge of the optical switching pulse W < The method of this embodiment can achieve the same more directly than reference 3, so it can be controlled more stably. The number of Γ / graph is used. In order to control each position of the laser processing system of the present invention, the laser processing system has a logic level in the ready state of laser processing (this logic level sets the optical switch unit in a blocked state. In the example, it is logic 0) of the optical M-off pulse, from the I-radiation control unit 3 = to the optical switch driver 5. Next, the Q switch control pulse (logic 0) is used to set the Q switch unit to 0FF ', = state, from the laser control unit 3 to the Q switch driver 4, so the laser oscillator 6 will Set to a continuous state of prosperity. The optical switch unit 9 blocks this faint laser and has no output to the outside. Next, when the laser processing is started, the program-controlled frequency division circuit 13 turns on and off the pulse train. This pulse train is used as the Q switching frequency pulse. In the present invention, the switching pulse is a reference signal for laser radiation and pulse sequence. The control timing circuit 14 generates a switching control pulse in synchronization with this Q switching frequency pulse. This synchronization is achieved by synchronizing the falling edge of the Q-switching frequency pulse ^ (the falling edge in this embodiment) with the rising edge of the Q-switching control pulse ^ (the rising edge in the embodiment). The visibility of this Q-switch control pulse (during a logic 1) is equivalent to decoding the 1/0 data—504504, invention description (20), # 1 (see Figure 9 (B)). In this K & example, the logic 1 of the Q switch control pulse will set the Q switch unit to the ON state. Therefore, the oscillation of the laser oscillator 6 will stop, and the accumulation of light energy in the laser medium will start at the same time when the switch control pulse rises, so the energy density in the laser medium will accumulate. This energy holding performance is increased 'until the falling edge of the Q-switch control pulse (the falling end in the present embodiment' Fig. 9 (C)). The Q switch unit will switch to the OFF state at the falling end of the Q switch control pulse, so all of the laser medium accumulated here will be emitted at once to form a giant pulse (Figure, (D)). The period τ3 of the Q-switch control pulse and the pulse visibility # Τ1 of the Q-switch control pulse can be arbitrarily set from the computer}. "Pianri Shouxian Road 16 will synchronously make the light and the switching pulse rise when the q-switch control pulse is falling. In this embodiment, the logic of the optical switching pulse is used as one of the opening signals of the optical switching unit 9. Therefore, the timing circuit will synchronously generate an optical switching pulse with a rising end at the falling end of the Q switching control pulse. This optical switching pulse has a set of pulse widths (Figure 9 (E)). Therefore, this optical The switching unit 9 can only be turned on during this group T4 in synchronization with the emission of a giant pulse (Figures 9 (D) and (E)). = Spike of the pulse (more precisely, it is the density curve of a giant pulse Time interval) is essentially proportional to the energy density of the laser medium at a Q-switched control pulse; the energy density stored by the sun guard 'is proportional to the energy density of the laser medium before it reaches the saturation value. Is proportional to the Q switch control pulse I ^ pulse width. Therefore, all the giant pulses through the optical switch unit including the first pulse can be obtained by setting # T1 to a constant

504879 V. Description of the invention (21) Pay even value. In addition, by changing the peak value of the giant pulse by the process (picture vibration time 蚧 1, it can also be programmed as described above. The laser medium is in the giant pulse, and the phase sinks under the Q switch control pulse to emit ^ when the vibration time is 1. After the giant pulse is radiated, the release laser oscillation at the mid-end of the laser V body will stop, but due to the holding of 2 the 1 will immediately drop, and the energy in the optical resonator 7 (j: plng) will continue. The oscillation threshold of the laser light emitted by the ground is combined to obtain a relatively weak continuous vibration I according to the weight (Figure 9 (c)). Optics ": After the rising of the pulse J compared to the system, after the period has elapsed, it will be closed: This will prevent the slave-treated object from being irradiated by the laser light with continuous oscillation. ^ The continuous vibration only lasts until The next Q-switch control signal rises by two P so that its energy density will not reach or exceed its vibration D value within this period T2 (Figure 9 (B)). Therefore, the output giant pulse will have a time interval relative to J%. # 1 ^ A uniform spike, and the first pulse after the laser process is started or after the process is suspended, can avoid the occurrence of 'too high spikes compared with subsequent pulses. Figure 10 shows the present invention. The block diagram of the structure of the first embodiment of the radio processing system.

In this embodiment, the control unit 2 further includes a measurement comparison / decision unit (MCDU 'measurement comparison / decision unit), and the laser control unit 3 is between the program-controlled frequency division circuit 13 and the program-controlled timing circuit 14 'More configured with logic circuits 丨 8. Measurement comparison / determination unit 丨 7 performs the measurement work of the predetermined item of the object to be processed, compares the measurement value with the target

Page 26 ju4879 V. Description of the invention (22) value and judging whether it is thunder * Q Switching frequency pulse and measurement comparison section U series circuit 18 receiving measurement comparison / determination unit彳 The result, and the off-frequency pulse is transmitted to the program-controlled meter and the 'field,: ,,' will determine that the Q-open unit 17 does not need an additional: circuit 14. Although I test comparison / decision, the Q switching frequency pulse is transmitted to the program-controlled timing circuit η. Circuit 18_Blocking process: Based on the two positioning methods, it is determined that additional lasers are required ^ f: r „w;;-::: r 〇τ, τ formula will generate huge pulses for processing. The measurement and comparison / determination unit 17 of Rieger determines that no additional laser is needed. Yes, the Q switching frequency pulse will not be transmitted to the program-controlled timing circuit. 4. The Q switch to which the Q switching frequency pulse that has not been transmitted belongs. During this period, there will be no two Q switch control pulses. Therefore, no light wind or sweat off pulse will be generated during this period. Therefore, the measurement ratio in this period. Comparison / determination unit 丨 7 judgment: no additional The laser processing period becomes the laser processing suspension period. Although the characteristics and advantages of the present invention have been exemplified as before, the foregoing are only for the purpose of implying the present invention. It should be understood here that in the = Within the spirit and scope of the scope of this patent application, the present invention can still be modified and changed. 俅 879504 The diagram is a brief illustration. Figure 1 is a block diagram of the main components of a typical Q-switched laser oscillation gas of conventional technology. Figure; Figure 2 shows the interior of the control unit 2 of Figure 1 Block diagram of the structure of the laser control unit 3; Figure 3 is a timing diagram illustrating the radiation time of the laser pulse in the device of Figure 1; Figure 4 is a block diagram illustrating the structure of the laser processing system described in reference 3 Figure 5 is a block diagram showing the structure of the measurement unit 35 in the device of Figure 4; Figure 6 is a signal timing diagram illustrating the operation of the device of Reference 3; Figure 7 is the first diagram showing the laser processing system of the present invention The block diagram of the structure of the embodiment, FIG. 8 is a block diagram showing the structure of the laser control unit 3 of the first embodiment; FIG. 9 is a signal timing sequence for controlling each part of the laser processing system of the first embodiment Figure 10 is a block diagram showing the structure of the second embodiment of the laser processing system of the present invention. Symbol description I Computer II a Q Switch unit lib Optical resonator 12 Decoder 13 Program-controlled frequency division circuit 14 Program-controlled timing circuit

504879 Brief description of the diagram 15 Pulse oscillator 16 Timing circuit 17 Measurement comparison / determination unit 18 Logic circuit 2 Control unit 20 Decoder 21 Program-controlled frequency division circuit 22 Reference clock pulse oscillator 23 Logic circuit i 24 Timing circuit 25 Program-controlled timing circuit 26 Laser control unit 3 Laser control unit 30 Laser output device 31 Laser oscillator 32 Optical switching unit 32 Optical switching element 33 Q switch driver 34 Optical switch driver _ 35 Measuring unit 38 Computer 4Q switch driver 5 Optical switch driver 6 Laser oscillator

Page 29 504879 Brief description of drawings 7 Optical resonator 8 Q switch unit 9 Optical switch unit

II

Claims (1)

504879 — VI. Scope of Patent Application A laser processing system includes a laser oscillator, which includes-one: the Q switch unit is composed of one. Switch control: Early morning: The optical resonance unit is controlled by the Q switch control pulse ^ 1 in the Q switch unit. When the laser is stopped and the vibration is turned on through the second control, it will stop. When closed, normal oscillation is performed; in the moon dagger, and in the Q switch single optical switch unit, which is used to emit light, the optical switch passes the optical path between the optical switch and an object, and is placed in 4 laser oscillations The laser pulse emitted by the oscillator is executed ::: The starting time of the laser processing; in Xi + Fan; / 4 This Γ / 〇 The material is marked · · The laser unit is operated periodically After the start time of the reshuffle, the Q start period is marked to mark the J complex frequency of a vibration cycle and the Monday control unit on which the Q switch is turned on for the Q switch frequency of the seat and complex frequency to be eliminated. In the heavy period marked by the 1/0 data, the closing frequency is: punching the door, the = frequency pulse ... The second, Luoli, Q-switch control pulse has the first logic level, and and have, Such as the pulse width-the second series and the second quasi-off unit are closed; the switch protects W # I F1 + Du Gui for the laser light transmission cycle The Q of the control pulse by optical switch off the synchronization pulse; the door Q ^: Τι: ί is' 13 for receiving the switch control pulse, and a Q-switch in accordance with te control pulses for controlling the switching unit Q; and page 31, The non-learning switch driver is used to receive the optical switch pulse .... Port π from the invading team edge 71 □ A According to the optical switch pulse to control the opening of the optical switch unit 2 unit, such as the spoon. The control system includes a laser control unit, and the laser control unit includes a codec for decoding the I / O data provided by the computer; To generate a reference clock pulse signal; the frequency, to J ί: Ϊ circuit 'is used to divide the reference clock pulse signal into a' Q switching frequency pulse with a repetition frequency marked by the decoded 丨 / 〇 data; The Q quasi μ circuit of the multi-frequency hand is used to receive the 9 switching frequency pulse, the base clock pulse ^ tiger, and the decoded 1/0 # data, and use the pulse signal as a timing signal to generate public One of the Q switch control pulses is engraved ^ ^; and the noon pulse gate step) a second timing circuit for receiving the Q switch control pulse and the reference clock pulse signal provided by the first timing circuit, and using Ximei === sequence signal to generate and The ° switch is controlled. . For example, the laser processing system of the second patent application range, wherein the rising edge of the OFF control pulse is the falling edge / same step of the Q switching frequency pulse, and the falling edge of the Q switching control pulse is related to the optical Of switching pulse >, 'A Jing Xun Xun's scope 4 ten laser application system as claimed in Λ patent scope 2 in the above, in which the tenth controlled. The pulse width of the Q-switch control pulses generated by the inch circuit is programmable. 5 · For example, the laser processing of the first scope of the patent application-the off control pulse is turned on two logic levels before the processing start time.止 处理 牯 'has a 6. The laser processing unit such as item 2 of the scope of patent application further includes a measurement comparison / determination setting ,,, and charging, wherein the predetermined item of the control object compares the measured value with The target value is used to measure the additional laser processing of the object to be processed; and T, and to determine whether the laser control unit is required to further include a logic placed in the program-controlled frequency division circuit and the first two circuits. This logic The circuit is equipped with the Q switching frequency pulse and the measurement comparison / second set! Between 'I is used to receive the measurement comparison / determination unit's decision. Two, Ji Zaofan's judgment result; when the circuit will transmit the Q switching frequency = laser processing, the logic compares the measurement comparison / timing circuit. Wei 2 = to the first timing circuit, and the logic circuit will prevent the Q open phase ^ when additional laser processing is needed. The off-frequency pulse is transmitted to the first timer