504418 A7 _ — _B7_ 五、發明說明（丨） [技術領域] 本發明，係關於對印刷基板等之工件進行加工之加工 裝置’特別是關於修正由於周圍溫度所產生的加工位置位 置偏差之技術。 [習知技術] 通常，爲安裝電子元件所使用的印刷基板，在製作的 過程，會實施以下的鑽孔作業，例如打入導針(guide pin) 用的導孔，以曝光機進行曝光作業時的校準(Alignment)用 孑L，接腳層合(pin lamination)用孔，內層材用的孔等。這 些鑽孔作業，都講求極高的精密度。 上述鑽孔作業，係使用各種加工裝置進行。圖6，係 以示意方式顯示上述加工裝置中，爲鑽出打入導針用導孔 之導孔鑽孔裝置之構造的俯視圖，圖7係其前視圖。如該 圖所示，此導孔鑽孔裝置101，具備有裝載鑽孔加工對象 的印刷基板110的載台102，以及二個移動單元l〇3a，103b ο 移動單元103a，103b，具備X光攝影裝置l〇4a，104b( 有時爲CCD攝影機），與配置在該X光攝影裝置l〇4a， l〇4b側面具有鑽頭l〇5a，105b的鑽孔裝置l〇6a，106b。X 光攝影裝置104a，104b，係由配置在載台102下方之X光 管107a，107b，及配置在載台102上方與X光管l〇7a， l〇7b對向位置之X光攝影裝置108a，108b所構成。載台 102上，於各鑽孔裝置106a，106b之鑽孔部位的位置上形 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） , -------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 504418 A7 _ _____B7______ 五、發明說明（X ) 成有長尺狀的槽部113a，113b。 此外，各移動單元103a，103b，係被沿該導孔裝置 101之橫方向配置的線性標尺1〇9軸支’能藉伺服馬達 111a，111b沿線性標尺109進行單方向（一維方向)移動。又 ，亦藉該線性標尺1〇9偵測各移動單元l〇3a，103b之一維 方向位置。 伺服馬達ll〇a，ll〇b、線性標尺109、以及X光攝影 裝置108a，l〇8b，係分別連接於控制機構121。 使用以上述方式構成之導孔鑽孔裝置1〇1，在印刷基 板110上進行導孔之鑽孔作業時，首先，在載台102上之 希望位置裝載並固定印刷基板110，以X光攝影裝置l〇4a， 104b拍攝印刷基板110上預先形成之導孔標記ll〇a(通常 ，係於印刷基板11〇之短邊側大致中央部各形成一標記， 合計形成於二處）。 然後，對使用X光攝影裝置l〇4a，104b所拍攝的影像 進行影像處理，求出印刷基板110上形成的二個導孔標記 110a的中心點(標記爲圓形時，即指圓的中心點），沿線性 標尺109移動該移動單元103a，103b，以使該中心點位於 使用X光攝影裝置l〇8a，108b所拍攝之圖像的基準位置。 於此狀態下，以線性標尺109測定之二個移動單元 103a，103b間的距離，與事先設定的二個導孔標記間之距 離Μ(例如M=20cm，25cm等)一致時，即將鑽頭l〇5a，105b 之位置移動至導孔標記ll〇a之位置，於該位置處使鑽頭邊 旋轉邊下降，即可在印刷基板110之導孔標記110a之位置 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） . ----------------—訂--------· (請先閱讀背面之注意事項再填寫本頁) 504418 A7 ______B7__ 五、發明說明（々） 鑽出導孔。 又，二個導孔標記間之距離，若與設定之距離Μ不一 致時’必需進行自中心等分等之處理，使移動單元103a， l〇3b間之距離爲Μ，將各移動單元l〇3a，103b加以固定， 於此位置，與上述同樣地使鑽頭105a，105b下降以在印刷 基板ll〇a上期望之位置鑽出導孔。以此方式，即能在印刷 基板110上鑽出打入導針用的導孔。 然而，鑽孔裝置l〇3a，103b上，裝載有各種機器、元 件等，此等機器、元件類，會因溫度的變化而產生些微的 位置誤差。因此，即使在與線性標尺109的連接部分所測 定之二個移動單元103a，103b間的距離是正確的，卻不代 表在X光攝影機l〇8a，108b之安裝位置測得之移動單元 103a，103b間之距離是正確的。 亦即，藉伺服馬達111a，111b進行滑動之移動單元 103a，103b的位置，係在線性標尺109上以良好之精度加 以對準者，而實際上以二個X光攝影機l〇8a，108b拍攝之 影像的基準位置間距離，會因周圍溫度高低之變化而產生 些微的誤差。由此可知，有在導孔之鑽孔位置產生誤差的 缺點。 [發明欲解決之課題] 如上述，現有的導孔鑽孔裝置101的構造，係根據線 性標尺109測量之結果，來設定二個鑽頭105a，105b間之 距離，因此會因溫度變化造成裝載於移動單元l〇3a，l〇3b 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I Aw ---I I I I I ^ 0 I I---I I I (請先閱讀背面之注意事項再填寫本頁) 504418 A7 ___ B7_____ 五、發明說明（Y ) 上的鑽頭l〇5a，l〇5b間之距離精度降低’而在導孔之鑽孔 位置上產生誤差等問題。 本發明，爲解決上述現有之課題，其目的在提供一種 不受周圍溫度影響、能隨時以高精度對印刷基板進行加工 的加工裝置。 [用以解決課題之手段] 爲達成上述目的，本案申請專利範圍第1項之發明’ 係一工件之加工裝置，其具備裝載攝影裝置及加工具的移 動單元，使該移動單元滑動於一維方向的驅動機構，以及 用以偵測藉驅動機構移動後之前述移動單元之一維方向位 置的位置偵測機構；在將前述移動單元上搭載之加工具移 動至工件上之期望位置後，使該加工具動作以對前述工件 之期望位置進行加工，其特徵在於： 沿前述一維方向配置至少在二處形成有基準位置標記 的輔助板，藉前述移動單元所裝載之攝影裝置，拍攝前述 輔助板上形成之二個基準位置標記，以測定二個基準位置 標記間之距離，根據所測定之距離、與預先設定之二個基 準位置標記間之距離的誤差，來修正前述加工具之加工位 置。 又，本案申請專利範圍第2項之發明，係一工件之加 工裝置，其具備裝載攝影裝置及加工具的二個移動單元， 使各該移動單元滑動於一維方向的驅動機構，以及用以偵 測藉驅動機構移動之前述各移動單元之一維方向位置的位 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ^--------^—-----^ (請先閲讀背面之注意事項再填寫本頁) 504418 ______B7______ 五、發明說明（4 ) 置偵測機構；在將前述各移動單元上搭載之加工具移動至 工件上之期望位置後，使該加工具動作以對前述工件之期 望位置進行加工，其特徵在於： 沿前述一維方向配置至少在二處形成有基準位置標記 的輔助板，藉前述二個移動單元所裝載之攝影裝置，拍攝 前述輔助板上形成之二個基準位置標記，以測定二個基準 位置標記間之距離，根據所測定之距離、與預先設定之二 個基準位置標記間之距離的誤差，來修正前述加工具之加 工位置。 本案申請專利範圍第3項之發明，係一工件之加工裝 置，其具備裝載攝影裝置及加工具的二個移動單元，使該 二個移動單元滑動於一維方向的驅動機構，以及用以偵測 藉驅動機構移動之前述各移動單元之一維方向位置的位置 偵測機構；在將前述各移動單元上搭載之加工具移動至工 件上之期望位置後，使該加工具動作以對前述工件之期望 位置進行加工，其特徵在於，具備： 輔助板，係沿前述一維方向配置於裝載前述工件之載 台的適當位置，至少在二處形成有基準位置標記； 誤差運算機構，係用以對藉前述各移動單元所裝載之 攝影裝置攝得之二個基準位置標記間之距離、與預先設定 之二個基準位置標記間之距離的誤差進行運算；以及 加工位置設定機構，係根據前述誤差運算機構求出之 誤差，修正工件上的加工位置。 本案申請專利範圍第4項之發明，係前述輔助板，爲 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） . -------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 504418 A7 _B7_____ 五、發明說明（V ) 使用對溫度變化之膨脹率極小的材質構成。本案申請專利 範圍第5項之發明，係前述輔助板’爲使用與前述工件具 大致相同溫度膨脹係數的材質構成。 本案申請專利範圍第6項之發明，係前述加工具，爲 鑽頭、衝壓、切斷、硏磨、雷射等中之一種工具。本案申 請專利範圍第7項之發明，係前述工件爲印刷基板。 根據上述構成之本發明，使裝載攝影裝置之移動單元 朝一維方向滑動，使用該攝影裝置’拍攝輔助板上形成之 基準標記位置，對攝得之影像施以影像處理以求出基準位 置標記的中心位置。然後，計算二個基準位置標記間之距 離。另一方面，由於輔助板上形成的二個基準位置標記間 之距離，係預先設定，因此係對此距離、與計算所得之距 離進行比較。 然後，當上述二運算結果不一致而產生誤差時，視該 誤差之大小，施以移動單元之移動位置的修正處理。據此 ，在以加工裝置對印刷基板進行鑽孔、衝壓、切斷、硏磨 等加工時，可提高加工位置之精確度。 [圖式之簡單說明] 圖1，係顯示本發明之一實施形態之導孔鑽孔裝置之 構成的俯視圖。 圖2,係顯示本發明之一實施形態之導孔鑽孔裝置之 構成的前視圖。 圖3，係顯示控制裝置之詳細構成的方塊圖。 9 -------------------^---------^0 C請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 504418 A7 _B7_ 五、發明說明（1 ) 圖4，係顯示輔助板之構成的外觀圖。 圖5，係顯示輔助板之變形例之構成的外觀圖。 圖6，係顯示習知之導孔鑽孔裝置之構成的俯視圖。 圖7，係顯示習知之導孔鑽孔裝置之構成的前視圖。 [符號說明] -------------------^---------^ (請先閱讀背面之注意事項再填寫本頁) 1 導孔鑽孔裝置 2 載台 3a，3b 移動單元 4a，4b X光攝影裝置 5a, 5b 鑽頭 6a，6b 鑽孔裝置 7a，7b X光管 8a，8b X光攝影裝置 9 線性標尺 10 印刷基板 10a 導孔標記 11a，lib 伺服馬達 13a, 13b 槽部 14, 14， 輔助板 15a，15b 基準位置標記 16a，16b 臂部 17 長孔 21 控制裝置 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 504418 A7 B7 五、發明說明（^ ) 22 影像處理部 23 顯示部 24 馬達驅動部 25 鑽頭驅動部 26 驅動控制部 27 誤差運算部 28 鑽孔位置設定部 [發明之實施形態] 以下，參照圖式說明本發明之實施形態。圖1 ’係以 式意方式顯示適用本發明之導孔鑽孔裝置之構成之實施形 態的俯視圖。圖2，係該圖之前視圖。又’本實施形態， 作爲工件之加工裝置，係以印刷基板之導孔鑽孔裝置爲例 加以說明，然而，本發明並不限於此’亦能適用於具備以 攝影裝置進行對工件之定位功能的各種加工裝置。 如圖1、圖2所示，該導孔鑽孔裝置1，具有裝載印刷 基板10之載台2，以及二個移動單元3a，3b，將該移動單 元3a，3b移動至印刷基板10上期望之位置後，驅動移動單 元3a，3b裝載之鑽頭5a，5b使其一邊旋轉一邊下降，以在 印刷基板1〇上形成之二個導孔標記l〇a之位置鑽出導孔。 此外，本實施形態，雖係就導孔標記l〇a爲二個之情形加 以說明，但並不限定於此，三個以上亦可。 各移動單元3a，3b，分別具備X光攝影裝置(攝影裝置 )4a，4b，該X光攝影裝置4a，4b之側部設有鑽孔裝置6a， 11 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） . 裝--------訂—I------線 (請先閱讀背面之注意事項再填寫本頁) 504418 A7 __B7____ 五、發明說明（（j ) 6b。又，本實施形態，雖係就使用X光攝影裝置4a，4b來 作爲攝影裝置之例加以說明，但使用CCD等其他攝影裝置 亦可。 X光攝影裝置4a，4b，具有配置在載台2下方、射出 X光之X光管7a，7b，以及配置在載台2上方、X光管7a， 7b之對向位置的X光攝影機8a，8b，以X光透視拍攝印刷 基板1〇上預先形成之導孔標記10a。 鑽孔裝置6a，6b上，裝載有鑽頭5a，5b，使此鑽頭5a， 5b —邊旋轉一邊下降，據以在載台2上裝載之印刷基板10 之標有導孔標記10a的位置鑽出導孔。 此外，沿載台2之橫方向設有線性標尺9，各移動單 元3a，3b係透過臂部16a，16b軸支於線性標尺9，可藉伺 服馬達11a，lib的驅動力沿線性標尺9進行一維方向之移 動。線性標尺9，係用以偵測移動單元3a，3b之的一維方 向位置(座標）。 載台2上、對應移動單元3a，3b之移動位置的部位， 形成有槽部13a，13b(用以使鑽孔裝置6a，6b裝載之鑽頭 5a，5b貫穿印刷基板1〇)，進一步的，沿載台2內部之槽部 13a，13b的位置，埋有輔助板14。 圖4，係輔助板14之外觀圖，該輔助板14，呈長尺 平板形狀，以對周圍溫度變化之膨脹率極小的材質構成。 此外，在輔助板14之二處，形成有可以X光透視之基準 位置標記15a，15b(使用CCD攝影機作爲攝影裝置時，能 以CCD攝影機拍攝之基準位置標記）。又，基準位置標5己 12 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） . -------1 —.—II 丨—訂---------*5^ (請先閱讀背面之注意事項再填寫本頁) 504418 A7 _______B7___ 五、發明說明（V0 ) 不限於二處。 二個基準位置標記15a，15b間之距離，係準確的設定 於既定値。又，符號Π，係對應圖1所示槽部13a，13b之 長孔。 再者，圖1所示之伺服馬達Ha，11b、線性標尺9、 以及圖2所示之X光攝影機8a，8b、鑽孔裝置6a，6b，係 分別連接於作爲該導孔鑽孔裝置1之控制中樞的控制裝置 2卜 圖3，係顯示控制裝置21之內部構成的方塊圖，該控 制裝置21，具備：影像處理部22(對使用X光攝影機8a， 8b拍攝之影像進行影像處理），顯示部23(將該影像處理部 22所處理的影像顯示於畫面），馬達驅動部24(用來操作伺 服馬達11a，lib之驅動）’鑽頭驅動部25(驅動鑽孔裝置6a， 6b以利用鑽頭5a，5b進行鑽孔），以及驅動控制部26(將驅 動控制信號輸出至馬達驅動部24與鑽頭驅動部25)。 此外，亦具備誤差運算部27(係用以求出輔助規14上 形成之二個基準位置標記15a，15b間之距離，與將X光影 像之基準位置對準該基準位置標記15a，15b時、自線性標 尺9之偵測結果所得之移動單元3a，3b間之距離的誤差）， 以及鑽孔位置設定部28(根據誤差運算部27所得之誤差數 據，來進行使用鑽頭5a，5b之鑽孔位置的修正處理）。 又，載台2上，爲防止該載台2上裝載之印刷基板1〇 產生位置偏離，亦裝載有機械夾具、或真空夾具等固定機 構。 13 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） . (請先閱讀背面之注意事項再填寫本頁) 裝---- 訂---------線- 504418 A7 _____B7 _____ 五、發明說明（\l ) 接著，說明上述本實施形態之導孔鑽孔裝置1的動作 。首先，將作爲導孔鑽孔對象之印刷基板10裝置於載台2 上之期望部位，使用機械夾具或真空夾具等固定機構’將 該印刷基板10牢牢的固定在載台2上。 其次，啓動X光攝影裝置4a，4b，自X光管7a，7b照 射X光後，X光攝影機8a，8b即拍攝到透視印刷基板1G 之影像，該影像數據，如圖3所示的被送至影像處理部22 進行影像處理，顯示於顯示部23。又，使用CCD攝影機 作爲攝影裝置時，以該CCD攝影機拍攝之影像即顯示於顯 示部23。 又，當操作者扭開操作開關（圖示省略），操作信號輸 入圖3所示之控制裝置21後，驅動控制部26，即將驅動 信號輸出至馬達驅動部24，據此，伺服馬達11a，lib即進 行旋轉驅動，使二個移動單元3a，3b沿線性標尺9進行一 維方向移動。然後，進行設定，以使輔助板14上形成之基 準位置標記15a，15b之中心點到達以X光攝影裝置4a，4b 拍攝之影像上的基準位置。於此狀態下，根據線性標尺9 偵測出之移動單元3a，3b的位置數據，求出移動單元3a， 3b間之距離(設此距離爲L2)。 另一方面，如上述般，由於輔助板14上形成的二個基 準位置標記15a，15b間之距離係預先設定(設此距離爲L1) ，因此，誤差運算部27，即運算該二個數據Ll，L2間之誤 差△ L。 亦即，根據以下之式（1)，求出誤差AL。 14 -------------------訂—-------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 504418 A7 _ B7 五、發明說明（β) △ L = L2 - L1 …⑴ 又，如上述般，由於輔助板14係由對周圍溫度變化之 膨脹率極小的材質構成，因此不受周圍溫度變化之影響， L1之値是非常可靠的。因此，以式（1)求得之誤差AL，其 產生誤差的原因，應係圖1所示之臂部16a，16b等構成移 動單元3a，3b之各種構件，因溫度變化造成之伸縮、及攝 影機之拍攝方式等所引起。 以下之處理，係藉由在修正該誤差之位置鑽出導孔， 來提昇導孔鑽孔位置的精確度。 亦即，利用X光拍攝輔助板14上之基準位置標記 15a，15b，求出誤差△!：後，接著，馬達驅動部24，驅動 伺服馬達11a，lib，將使用X光攝影裝置4a，4b拍攝之影 像上的基準位置，設定於印刷基板10上預先形成之導孔標 記的中心點。 又，由於二個導孔標記間之距離(設此距離爲M)係預 先設定(例如，M=20cm，25cm等），因此圖3所示之鑽孔 位置設定部28，即藉由對該距離Μ，施加以下之(2)式的處 理後，求出修正的距離Μ’。 M，= MX {1-(AL/L2)} …(2) 又，馬達驅動部24，根據線性標尺9之偵測結果’控 制並驅動伺服馬達11a，lib，使各移動單元3a，3b間之距 離成爲Μ’。之後，鑽頭驅動部25，由於係對鑽孔裝置 6a，6b輸出驅動信號，根據該驅動信號，驅動鑽頭5a，5b使 其移動至X光影像之基準位置，並一邊下降一邊旋轉，在 15 本紙張尺度適用中國國家標準（CNS〉A4規格（210 X 297公釐） ， -----------^-----------------^ (請先閱讀背面之注意事項再填寫本頁) 504418 A7 ____B7 ___ 五、發明說明（、7!) 印刷基板10上期希之導孔位置鑽出導孔。以此方式’使用 以公式（1)求得之誤差數據AL，來修正預先設定之二個導 孔間之距離Μ，據此，即使圖1所示之臂部16a，16b等構 成移動單元3a，3b之各種構件，因周圍溫度變化而產生伸 縮等現象時，亦能修正因該伸縮造成之導孔鑽孔位置的位 置偏差。其結果，可顯著的提升導孔鑽孔位置的精度。 如前所述，由於本實施形態之導孔鑽孔裝置1 ’即使 因周圍溫度的變化，使自X光攝影裝置之拍攝結果所得之 導孔鑽孔位置的間隔’與自線性標尺9之偵測結果所得之 二個移動單元3a，3b間之距離產生偏差時，亦能修正該偏 差，因此能不受周圍溫度變化的影響’隨時進行高精度之 導孔的鑽孔作業。 此外，上述實施形態，雖係就使用形成有如圖4所示 之二個長孔il的輔助板14之例作了說明，但亦可如圖5 所示，使用比較短的輔助板14’，將此設於如圖1所示之 二個凹槽部13a，13b間之載台2內部。 又，雖就輔助板I4上於形成有二處基準位置標記的例 作了說明，但將該基準位置標記形成於一處或三處以上之 構成亦可。 又，上述實施形態中，雖係就使用對溫度變化之膨脹 率極小的材質者來作爲輔助板14之例作了說明’但作爲輔 助板14之材質，若使用與印刷基板10相同之材質、或使 用具有相同溫度膨脹率之材質的話，不僅可修正印刷基板 10本身因周圍溫度造成之伸縮現象所產生的誤差’更可進 16 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 . (請先閱讀背面之注意事項再填寫本頁) ----- 1 I I 訂----— 111· - 504418 A7 _ ___B7_____-·*·^一 五、發明說明（\〇() 一步提升導孔鑽孔位置之精度。 亦即，當周圍溫度變化時，由於印刷基板10本身亦會 因溫度變化而伸縮，因此藉使用與印刷基板10相同之材質 、或使用具有相同溫度膨脹率之材質來形成輔助板14’ @ 可修正由於溫度變化造成之印刷基板10的伸縮。據此’ $ 進行更筒精度之導孔的鑽孔作業。 再者，上述實施形態，雖係就使用線性標尺9來偵測 移動單元3a，3b之位置的例作了說明，但亦可使用旋轉式 編碼器來取代線性標尺9以偵測移動單元3a，3b的位ί ’ 此外，亦可倂用旋轉式編碼器及線性標尺9。 又，上述實施形態，作爲加工裝置，雖係以導孔鑽孔 裝置爲例作了說明，但本發明並不限於此，凡具有對移動 單元進行定位功能之各種加工裝置(衝壓、切斷、硏磨，雷 射等)皆可適用。 又’上述實施形態，雖係以具有二個移動單元3a，3b 者爲例作了說明，但本發明不限於此，亦可適用於具備一 個移動單元之加工裝置。 [發明效果] 如上述之說明，根據本發明之印刷基板的加工裝置， 其構成係以攝影裝置拍攝輔助規板上形成之二個基準位置 標記，當以位置偵測機構偵測該二個基準位置標記間之距 離所得之距離，與預先設定之準位置標記間之距離，產生 誤差時，視該誤差之大小修正加工具的工件加工位置。因 17 (請先閲讀背面之注意事頊存填寫本貢) ^--------^---------^ 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 504418 A7 _B7_ 五、發明說明（3) 此，即使因周圍溫度變化而產生伸縮等現象時，亦能加以 修正，是以能顯著提升加工精度。 (請先閱讀背面之注意事項再填寫本頁) 此外，若使用與工件相同之材質、或具有相同熱膨脹 率之材質來作爲構成輔助板之材質的話，由於溫度變化造 成之工件本身的伸縮，亦能加以修正，因此，能更進一步 的提昇工件之加工精度。 18 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）504418 A7 _ — _B7_ V. Description of the Invention (丨) [Technical Field] The present invention relates to a processing device for processing a printed circuit board and other workpieces, and particularly to a technology for correcting a positional deviation of a processing position due to ambient temperature. [Known Technology] Generally, in the manufacturing process of printed circuit boards used for mounting electronic components, the following drilling operations are performed, for example, driving holes for guide pins are driven, and exposure operations are performed by an exposure machine.孑 L for alignment is used for alignment, holes for pin lamination, holes for inner layer materials, and the like. These drilling operations require extremely high precision. The above drilling operations are performed using various processing equipment. Fig. 6 is a plan view schematically showing the structure of the above-mentioned processing device, a guide hole drilling device for drilling a guide hole for a guide pin, and Fig. 7 is a front view thereof. As shown in the figure, the pilot hole drilling device 101 includes a stage 102 on which a printed substrate 110 for drilling processing is mounted, and two moving units 103a and 103b. The moving units 103a and 103b are provided with X-rays. The photographing apparatuses 104a and 104b (sometimes CCD cameras) and the drilling apparatuses 106a and 106b provided with drills 105a and 105b on the side of the X-ray photographing apparatuses 104a and 104b. The X-ray photographing devices 104a and 104b are X-ray photographing devices 107a and 107b arranged below the stage 102 and X-ray photographing devices arranged above the stage 102 and facing the X-ray tubes 107a and 107b. 108a, 108b. The stage 102 is formed on the positions of the drilling positions of each of the drilling devices 106a and 106b. The paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm), -------- ----------- Order --------- line (please read the precautions on the back before filling this page) 504418 A7 _ _____B7______ V. Description of the invention (X) has a long ruler Shaped groove portions 113a, 113b. In addition, each of the moving units 103a and 103b is supported by a linear scale 109 arranged along the lateral direction of the guide hole device 101, and can be moved in a single direction (one-dimensional direction) along the linear scale 109 by the servo motors 111a and 111b. . Furthermore, the one-dimensional position of each mobile unit 103a, 103b is also detected by the linear scale 109. The servo motors 110a and 110b, the linear scale 109, and the X-ray imaging devices 108a and 108b are connected to the control mechanism 121, respectively. When the pilot hole drilling device 101 configured as described above is used to drill a pilot hole on the printed circuit board 110, first, the printed circuit board 110 is mounted and fixed at a desired position on the stage 102, and X-ray photography is performed. The apparatuses 104a and 104b capture pre-formed via hole marks 110a on the printed circuit board 110 (generally, one mark is formed on each of the short sides of the printed circuit board 110 and approximately the center portion, and is formed in two places in total). Then, image processing is performed on the images captured by the X-ray photography devices 104a and 104b, and the center points of the two via hole marks 110a formed on the printed substrate 110 are obtained (when the marks are circular, the center of the circle is referred to as the center) Point), move the moving units 103a, 103b along the linear ruler 109 so that the center point is located at the reference position of the image captured by the X-ray photography devices 108a, 108b. In this state, when the distance between the two mobile units 103a and 103b measured by the linear scale 109 is consistent with the distance M (for example, M = 20cm, 25cm, etc.) between the two guide hole marks set in advance, the drill bit l 〇5a, 105b are moved to the position of the guide hole mark 110a, where the drill bit is rotated and lowered at this position, and then the position of the guide hole mark 110a of the printed substrate 110 can be used. CNS) A4 specification (210 X 297 mm). ----------------- Order -------- · (Please read the precautions on the back before filling in this (Page) 504418 A7 ______B7__ 5. Description of the invention (々) Drill a pilot hole. In addition, if the distance between the two guide hole marks is inconsistent with the set distance M, it is necessary to perform an equalization process from the center so that the distance between the mobile units 103a and 103b is M, and each mobile unit l0. 3a and 103b are fixed. At this position, the drills 105a and 105b are lowered in the same manner as described above to drill a pilot hole at a desired position on the printed circuit board 110a. In this manner, a guide hole for driving a guide pin can be drilled on the printed substrate 110. However, the drilling devices 103a and 103b are loaded with various machines and components. These machines and components may cause slight position errors due to temperature changes. Therefore, even if the distance between the two mobile units 103a, 103b measured at the connection portion with the linear scale 109 is correct, it does not represent the mobile unit 103a measured at the installation position of the X-ray cameras 108a, 108b, The distance between 103b is correct. That is, the positions of the moving units 103a, 103b that are slid by the servo motors 111a, 111b are aligned on the linear scale 109 with good accuracy, and actually are taken with two X-ray cameras 108a, 108b The distance between the reference positions of the image will cause slight errors due to changes in the surrounding temperature. From this, it is known that there is a disadvantage that an error occurs in the drilling position of the guide hole. [Problems to be Solved by the Invention] As mentioned above, the structure of the existing pilot hole drilling device 101 is based on the measurement result of the linear scale 109 to set the distance between the two drill bits 105a and 105b. Mobile unit 103a, 103b 6 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) I Aw --- IIIII ^ 0 I I --- III (Please read the note on the back first Please fill in this page again for details) 504418 A7 ___ B7_____ 5. The accuracy of the distance between the drill bits 105a and 105b on the description of the invention (Y) is lowered ', which causes errors in the drilling position of the pilot hole. In order to solve the above-mentioned conventional problems, an object of the present invention is to provide a processing device capable of processing a printed circuit board with high accuracy at any time without being affected by ambient temperature. [Means to solve the problem] In order to achieve the above-mentioned object, the invention of the first patent application scope of the present application is a processing device for a workpiece, which includes a moving unit for loading a photographing device and a tool, so that the moving unit slides in one dimension. The driving mechanism in the direction, and the position detecting mechanism for detecting the one-dimensional position of the moving unit after moving by the driving mechanism; after moving the plus tool mounted on the moving unit to a desired position on the workpiece, The tooling action is performed to process the desired position of the workpiece, which is characterized in that: an auxiliary board with a reference position mark formed at least at two places is arranged along the one-dimensional direction, and the auxiliary device is photographed by a photographing device mounted on the mobile unit. The two reference position marks formed on the board are used to determine the distance between the two reference position marks. Based on the error between the measured distance and the two reference position marks set in advance, the processing position of the aforementioned tooling is corrected. . In addition, the invention in the second patent scope of the present application is a processing device for a workpiece, which includes two moving units for loading a photographing device and a tool, a driving mechanism for sliding each of the moving units in a one-dimensional direction, and Bit 7 for detecting one-dimensional position of each of the aforementioned mobile units moved by the driving mechanism 7 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ^ -------- ^- ---- ^ (Please read the precautions on the back before filling in this page) 504418 ______B7______ V. Description of the invention (4) Set the detection mechanism; move the plus tool mounted on each mobile unit to the desired position on the workpiece Then, the tool is moved to process the desired position of the workpiece, which is characterized in that: at least two auxiliary plates formed with reference position marks are arranged along the one-dimensional direction, and the photography carried by the two mobile units is used. The device photographs two reference position marks formed on the auxiliary board to measure the distance between the two reference position marks, and according to the measured distances, the two reference positions set in advance The distance between the marks is used to correct the machining position of the aforementioned tool. The invention of claim 3 in the scope of patent application of this case is a processing device for a workpiece, which is provided with two moving units loaded with a photographing device and a tool, a driving mechanism for sliding the two moving units in a one-dimensional direction, and a detection mechanism for detecting Position detection mechanism for measuring one-dimensional position of each of the aforementioned mobile units moved by the driving mechanism; after moving the adding tool mounted on each of the aforementioned mobile units to a desired position on the workpiece, the tool is moved to act on the workpiece The processing is performed at a desired position, and is characterized in that: an auxiliary plate is arranged at an appropriate position on the stage for loading the workpiece along the one-dimensional direction, and reference position marks are formed at least at two places; an error calculation mechanism is used for Calculate the error between the distance between the two reference position marks and the distance between the two reference position marks set in advance by the photographing device mounted on each of the mobile units; and the processing position setting mechanism based on the foregoing error The error calculated by the calculation mechanism corrects the machining position on the workpiece. The invention in item 4 of the scope of patent application in this case is the aforementioned auxiliary board, which is 8 paper sizes applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). ------------- ------ Order --------- Thread (please read the precautions on the back before filling this page) 504418 A7 _B7_____ V. Description of the invention (V) Use a material that has a very small expansion rate against temperature changes Make up. The invention of claim 5 in the scope of patent application of the present application is that the auxiliary plate 'is made of a material having a temperature expansion coefficient substantially the same as that of the workpiece. The invention in the sixth scope of the patent application in this case is the aforementioned tool, which is one of the tools of drill, punching, cutting, honing, and laser. The invention claimed in item 7 of the patent scope is that the aforementioned workpiece is a printed circuit board. According to the present invention configured as described above, the mobile unit with the photographing device is slid in a one-dimensional direction, and the reference mark position formed on the auxiliary board is photographed using the photographing device, and the captured image is subjected to image processing to obtain the reference position mark. Central location. Then, the distance between the two reference position marks is calculated. On the other hand, since the distance between the two reference position marks formed on the auxiliary plate is set in advance, this distance is compared with the calculated distance. Then, when the above two calculation results are inconsistent and an error occurs, a correction process is performed on the moving position of the mobile unit depending on the magnitude of the error. According to this, when the printed circuit board is processed by drilling, punching, cutting, honing, etc., the accuracy of the processing position can be improved. [Brief description of the drawings] Fig. 1 is a plan view showing the structure of a pilot hole drilling device according to an embodiment of the present invention. Fig. 2 is a front view showing the structure of a pilot hole drilling device according to an embodiment of the present invention. FIG. 3 is a block diagram showing a detailed configuration of the control device. 9 ------------------- ^ --------- ^ 0 C Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 504418 A7 _B7_ V. Description of the invention (1) Figure 4 is an external view showing the structure of the auxiliary board. FIG. 5 is an external view showing the configuration of a modification of the auxiliary plate. Fig. 6 is a plan view showing the structure of a conventional pilot hole drilling device. Fig. 7 is a front view showing the structure of a conventional pilot hole drilling device. [Symbol description] ------------------- ^ --------- ^ (Please read the precautions on the back before filling this page) 1 Guide hole Drilling device 2 Stage 3a, 3b Mobile unit 4a, 4b X-ray photography device 5a, 5b Drill bit 6a, 6b Drilling device 7a, 7b X-ray tube 8a, 8b X-ray photography device 9 Linear scale 10 Printed substrate 10a Guide hole Mark 11a, lib servo motors 13a, 13b Slots 14, 14, Auxiliary plate 15a, 15b Reference position marks 16a, 16b Arm 17 Long hole 21 Control device 10 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 504418 A7 B7 V. Description of the invention (^) 22 Image processing section 23 Display section 24 Motor drive section 25 Drill drive section 26 Drive control section 27 Error calculation section 28 Drilling position setting section [Implementation mode of the invention] The following An embodiment of the present invention will be described with reference to the drawings. Fig. 1 'is a plan view showing an embodiment of the structure of a pilot hole drilling device to which the present invention is applied in a formal manner. Figure 2 is a front view of the figure. Also, 'this embodiment, as a processing device of a workpiece, a guide hole drilling device of a printed circuit board is taken as an example for description. However, the present invention is not limited to this.' It can also be applied to having a positioning function of a workpiece by a photographing device Various processing devices. As shown in FIGS. 1 and 2, the pilot hole drilling device 1 includes a stage 2 on which the printed circuit board 10 is mounted, and two moving units 3 a and 3 b. It is desired to move the moving units 3 a and 3 b onto the printed circuit board 10. After the position, the drills 5a and 5b loaded on the moving units 3a and 3b are driven to descend while rotating to drill the guide holes at the positions of the two guide hole marks 10a formed on the printed substrate 10. In this embodiment, the case where the number of guide hole marks 10a is two is described, but it is not limited to this, and three or more may be used. Each mobile unit 3a, 3b is provided with an X-ray photographing device (photographing device) 4a, 4b. The X-ray photographing device 4a, 4b is provided with a drilling device 6a on the side. ) A4 specifications (210 X 297 mm). -------- Order-I ------ line (please read the precautions on the back before filling this page) 504418 A7 __B7____ 5. Description of the invention ((J) 6b. In this embodiment, the X-ray imaging devices 4a and 4b are used as examples of the imaging device, but other imaging devices such as a CCD may be used. X-ray imaging devices 4a, 4b, X-ray cameras 7a and 7b arranged below the stage 2 and emitting X-rays, and X-ray cameras 8a and 8b arranged above the stage 2 and facing the X-ray pipes 7a and 7b, are photographed in X-ray perspective Pre-formed guide hole marks 10a on the printed circuit board 10. Drilling devices 6a, 6b are equipped with drill bits 5a, 5b, and the drill bits 5a, 5b are lowered while rotating, and the prints loaded on the stage 2 are thereby printed. A guide hole is drilled at the position marked with the guide hole mark 10a on the substrate 10. In addition, a linear scale 9 is provided along the lateral direction of the stage 2 and each moves The elements 3a and 3b are supported on the linear scale 9 through the arms 16a and 16b. The driving force of the servo motor 11a and lib can be used to move along the linear scale 9. The linear scale 9 is used to detect the moving unit. Positions (coordinates) in the one-dimensional direction of 3a, 3b. Grooves 13a, 13b (bits for loading the drilling devices 6a, 6b) on the stage 2 corresponding to the moving positions of the moving units 3a, 3b are formed. 5a, 5b penetrate the printed substrate 10), and further, the auxiliary plate 14 is buried along the positions of the groove portions 13a, 13b inside the stage 2. Fig. 4 is an external view of the auxiliary plate 14, and the auxiliary plate 14 is The long flat plate shape is made of a material that has a very small expansion rate against changes in ambient temperature. In addition, reference position marks 15a and 15b are formed on the auxiliary plate 14bis to allow X-ray see-through (when using a CCD camera as a photographing device, The reference position mark can be taken with a CCD camera.) Also, the reference position mark is 5-12. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). ------- 1 --.-- II 丨 —Order --------- * 5 ^ (Please read the precautions on the back first (Write this page) 504418 A7 _______B7___ 5. The description of the invention (V0) is not limited to two. The distance between the two reference position marks 15a and 15b is accurately set at the predetermined 値. Moreover, the symbol Π corresponds to that shown in Figure 1. The long holes in the grooves 13a and 13b. In addition, the servo motors Ha, 11b, linear scale 9, and X-ray cameras 8a, 8b, and drilling devices 6a, 6b shown in FIG. 1 are connected respectively. The control device 2 as a control center of the pilot hole drilling device 1 and FIG. 3 are block diagrams showing the internal structure of the control device 21. The control device 21 includes: an image processing unit 22 (for the use of an X-ray camera 8a) , 8b for image processing), display section 23 (display the image processed by the image processing section 22 on the screen), motor drive section 24 (for operating the servo motor 11a, lib drive) 'bit drive section 25 (Driving the drilling devices 6a, 6b to perform drilling using the drill bits 5a, 5b), and a drive control section 26 (outputting a drive control signal to the motor drive section 24 and the drill drive section 25). In addition, it also includes an error calculation unit 27 (for determining the distance between the two reference position marks 15a and 15b formed on the auxiliary gauge 14 and aligning the reference position of the X-ray image with the reference position marks 15a and 15b. , The error of the distance between the mobile units 3a and 3b obtained from the detection result of the linear scale 9), and the drilling position setting section 28 (according to the error data obtained by the error calculation section 27) to perform the drilling using the drill bits 5a and 5b Correction of hole position). The stage 2 is also equipped with a fixing mechanism such as a mechanical jig or a vacuum jig in order to prevent the printed substrate 10 mounted on the stage 2 from being out of position. 13 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page) -504418 A7 _____B7 _____ 5. Description of the Invention (\ l) Next, the operation of the pilot hole drilling device 1 of this embodiment described above will be described. First, the printed circuit board 10 to be drilled as a guide hole is installed at a desired position on the stage 2 and the printed circuit board 10 is firmly fixed to the stage 2 using a fixing mechanism such as a mechanical jig or a vacuum jig. Next, start the X-ray photography devices 4a and 4b, and irradiate the X-rays from the X-ray tubes 7a and 7b. Then, the X-ray cameras 8a and 8b capture the image of the perspective printed substrate 1G. The image data is shown in FIG. It is sent to the image processing unit 22 for image processing and displayed on the display unit 23. When a CCD camera is used as the imaging device, an image captured by the CCD camera is displayed on the display unit 23. In addition, when the operator turns on the operation switch (not shown), and the operation signal is input to the control device 21 shown in FIG. 3, the drive control unit 26 outputs the drive signal to the motor drive unit 24. Accordingly, the servo motor 11a, The lib is rotated and driven, so that the two moving units 3a and 3b move along the linear scale 9 in a one-dimensional direction. Then, it is set so that the center points of the reference position marks 15a and 15b formed on the auxiliary plate 14 reach the reference position on the image captured by the X-ray imaging devices 4a and 4b. In this state, based on the position data of the mobile units 3a, 3b detected by the linear scale 9, the distance between the mobile units 3a, 3b is determined (this distance is set to L2). On the other hand, as described above, since the distance between the two reference position marks 15a and 15b formed on the auxiliary plate 14 is set in advance (this distance is set to L1), the error calculation unit 27 calculates the two data The error between Ll and L2 is ΔL. That is, the error AL is obtained from the following formula (1). 14 ------------------- Order --------- Line (Please read the precautions on the back before filling in this page) This paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) 504418 A7 _ B7 V. Description of the invention (β) △ L = L2-L1… ⑴ As mentioned above, since the auxiliary plate 14 is subject to the expansion rate due to changes in ambient temperature Very small material construction, so it is not affected by ambient temperature changes. L1 is very reliable. Therefore, the error AL obtained by the formula (1), and the cause of the error should be the various components of the mobile units 3a, 3b such as the arm portions 16a, 16b shown in FIG. 1, the expansion and contraction caused by temperature changes, and Caused by the way the camera is filmed. The following processing is to improve the accuracy of the drilling position of the guide hole by drilling the guide hole at the position where the error is corrected. That is, the reference position marks 15a and 15b on the X-ray photographing auxiliary board 14 are used to determine the error Δ !: Then, the motor driving unit 24 drives the servo motors 11a and lib, and the X-ray imaging devices 4a and 4b will be used. The reference position on the captured image is set at the center point of the via hole mark formed in advance on the printed circuit board 10. In addition, since the distance between the two guide hole marks (let this distance be M) is set in advance (for example, M = 20cm, 25cm, etc.), the drilling position setting section 28 shown in FIG. The distance M is obtained by applying the following formula (2), and then the corrected distance M ′ is obtained. M, = MX {1- (AL / L2)}… (2) In addition, the motor driving unit 24 controls and drives the servo motors 11a and lib based on the detection result of the linear scale 9 so that each of the moving units 3a and 3b The distance becomes M '. After that, the drill driving unit 25 outputs a drive signal to the drilling devices 6a and 6b. Based on the drive signal, the drills 5a and 5b are driven to move to the reference position of the X-ray image, and rotate while lowering, and rotate at 15 positions. Paper size applies to Chinese national standard (CNS> A4 size (210 X 297 mm)), ----------- ^ ----------------- ^ ( Please read the precautions on the back before filling in this page) 504418 A7 ____B7 ___ V. Description of the invention (, 7!) Drill holes will be drilled in the pilot hole position on the printed substrate 10 in the first period. In this way, use the formula (1) to find The obtained error data AL is used to correct the distance M between the two guide holes set in advance. According to this, even if the arms 16a, 16b and other components constituting the mobile unit 3a, 3b shown in FIG. 1 change due to ambient temperature changes, When a phenomenon such as expansion or contraction occurs, the position deviation of the pilot hole drilling position caused by the expansion or contraction can also be corrected. As a result, the accuracy of the pilot hole drilling position can be significantly improved. As mentioned earlier, due to the pilot hole of this embodiment, Drilling device 1 'Even if the ambient temperature changes, the results obtained from the X-ray photography device The distance between the pilot hole drilling positions 'and the distance between the two mobile units 3a and 3b obtained from the detection result of the linear scale 9 can also correct the deviation, so it is not affected by the ambient temperature change' Drilling of high-precision guide holes can be performed at any time. In addition, although the above embodiment has been described using the auxiliary plate 14 formed with two long holes il as shown in FIG. As shown, a relatively short auxiliary plate 14 'is used to place this inside the stage 2 between the two recessed portions 13a and 13b as shown in Fig. 1. Although the auxiliary plate I4 is formed at two places, An example of the reference position mark has been described, but a configuration in which the reference position mark is formed at one or three or more places may be used. In the above embodiment, a material having a very small expansion coefficient with respect to temperature change is used. As an example of the auxiliary board 14, 'However, if the material of the auxiliary board 14 is the same as that of the printed board 10 or a material having the same temperature expansion coefficient, not only the printed board 10 itself due to ambient temperature can be corrected. Nobuyuki The error caused by the phenomenon can be further increased. 16 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page) ----- 1 II Order ----— 111 ·-504418 A7 _ ___ B7 _____- · * ^^ 15. Description of the Invention (\ 〇 () One step to improve the accuracy of the drilling position of the pilot hole. That is, when the ambient temperature changes, due to the printed substrate 10 itself also expands and contracts due to temperature changes, so by using the same material as the printed substrate 10 or using a material with the same temperature expansion rate to form the auxiliary plate 14 '@ can correct the expansion and contraction of the printed substrate 10 due to temperature changes. Based on this, the drilling of the pilot hole with a more accurate barrel is performed. Furthermore, although the above embodiment has described the example of using the linear scale 9 to detect the position of the mobile unit 3a, 3b, a rotary encoder may be used instead of the linear scale 9 to detect the mobile unit 3a. Bit 3b 'In addition, a rotary encoder and linear scale 9 can also be used. Moreover, in the above-mentioned embodiment, although the guide hole drilling device is described as an example of the processing device, the present invention is not limited to this. Various processing devices (punching, cutting, Honing, laser, etc.) are applicable. Also, although the above-mentioned embodiment has been described with an example having two mobile units 3a, 3b, the present invention is not limited to this, and can be applied to a processing apparatus having one mobile unit. [Effects of the Invention] As described above, the processing device for a printed circuit board according to the present invention has a structure in which two reference position marks formed on the auxiliary gauge plate are photographed by a photographing device, and the two reference positions are detected by a position detection mechanism. When the distance between the position marks and the distance between the pre-set quasi-position marks is incorrect, the workpiece machining position with the tool is corrected according to the size of the error. Because of 17 (Please read the notes on the back first and fill in this tribute) ^ -------- ^ --------- ^ This paper size applies to China National Standard (CNS) A4 specifications ( 210 X 297 mm) 504418 A7 _B7_ V. Description of the invention (3) Therefore, even when expansion and contraction occur due to changes in ambient temperature, it can be corrected to significantly improve processing accuracy. (Please read the precautions on the back before filling this page.) In addition, if the same material as the workpiece or the material with the same thermal expansion rate is used as the material of the auxiliary plate, the workpiece itself will expand and contract due to temperature changes. Can be corrected, therefore, the machining accuracy of the workpiece can be further improved. 18 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)