TW493204B - AC-type plasma display panel having improved protective layer and its manufacturing method - Google Patents

Abstract

In an AC-type plasma display panel including a substrate (11), a plurality of display electrodes (12a, 12b) formed on the substrate, a dielectric layer (13) formed on the display electrodes and a protective layer (14) made of magnesium oxide formed on the dielectric layer, the protective layer has at least one intermediate energy level within a forbidden energy band of magnesium oxide.

Description

493204 V. Description of the invention (1) [Field of the invention] This invention is about-_ AC plasma display panel and its manufacturing method, especially the reverse modification and good quality of the protective layer made of magnesium oxide (Mg0) γ :. [Description of related technology] The plasma display panel of the conventional technology is constructed by a discharge area sandwiched by a fish on the front side. The front part is made up of the following components: a glass substrate; a transparent display electrode is formed on the glass display—formed on the transparent display electrode; and-the protective layer shape; = electricity: the electrical layer, and the rear part is made of the following components Construction: one glass-based and two ^. The electrodes are formed on the glass substrate and are perpendicular to the display electrode side: they are electrically formed on the address electrodes; the dielectric layer forms a partition for dividing the discharge = "spaces" along each address electrode; and Phosphorus is present in every two compartments to convert ultraviolet light into visible light. 丨 1 The side part is glued to the back part, which can make the discharge area have a certain interval. Another space is about the dielectric layer of the front part. The protective layer made of magnesium oxide (Mg〇) has excellent sputtering characteristics (see Japanese Patent Publication Nos. 9-92 1 33 and 9-1 675 66). Plasma display panel, the protective layer in the panel is made of 2Mg, however, it is used to generate the direct current of the plasma to ignite the flame; the value is still very high, so the driving circuit needs a high breakdown voltage transistor. \ Power consumption and manufacturing cost of AC plasma display panel. 3 '

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Ί 六 V. Description of the invention (2) [Summary of the invention] It is not unreasonable to reduce the intersection of DC driving voltage. ^ ^ Flow plasma display panel and manufacturing method thereof. The plurality of display electrodes of the alternating current plasma according to the present invention are formed on the substrate, and two substrates are formed on the substrate; between the protective layer and the protective layer, the protective layer is formed of oxygen on the display electrode, and the protective layer of the magnesium oxide is Furnace belt: It is made and formed in the dielectric layer hole, and it is made by pre-magnesium in the manufacturing method of the parent-flow plasma display panel with at least one intermediate energy. The protective layer is based on the base of dt, and the deposition is caused by at least one defect in the oxidized energy band. The intermediate level (or defect level) of the oxygen ball protective layer helps reduce the DC drive voltage. [Detailed description of the preferred embodiment] FIG. 1 illustrates that a plasma display panel of an AC plasma display panel according to the present invention is constructed by a front portion i and a rear portion 2 and a discharge region 3 sandwiched therebetween. The front part 1 will be described later with reference to FIGS. 2 and 1. As shown in FIGS. 1 and 2, the front part 1 is constructed of the following components:-a glass substrate 11, transparent display electrodes 12 a and 12 b made of indium tin oxide (I TO), and a backing metal formed on the glass substrate η; a thickness of about 50 // 111; an electrical layer 13 'is formed on the transparent display electrodes 12a and 12b; and a protective layer with a degree of about 1 # m is formed on the dielectric layer 3 . It should be noted that a pair of transparent display electrodes 12a and 12b are provided as each display line. 493204

The rear portion 2 will be described later with reference to FIGS. 3 and 1.

The front side part 1 is glued to the rear side part 2 so that the discharge area 3 can have a shape as shown in Fig. 1 and Fig. 3. The rear side part 2 is made of a plate 2 1 constructed by the following components; Space, the introduction of Penning gas formed by neon gas containing a small amount of xenon. The operation of the parent plasma display panel shown in Fig. 1 is as follows: for each pixel, the display electrodes 12a and 12b and the address electrode 22 are selected, that is, a south DC driving voltage is applied to the display electrodes 2a and 12b. One of them and an address electricity, 22, generates a plasma to ignite the flame in the discharge area 3; an AC voltage is applied between the display electrodes 2a and 12b to maintain the plasma flame. Therefore, the ultraviolet light of the plasma flame is converted into visible light by a phosphor layer 25, and the visible light is emitted to the outside of the panel through the front side portion 1. According to the present invention, the protective layer made of magnesium oxide 丨 4 has a < 丨 丨 丨〉 direction and has a forbidden energy band such as the intermediate energy levels of Ei and E2 shown in FIG. Energy level, and Ev represents the marginal energy level of the valence band 'magnesium oxide's forbidden band gap Ec is about 7 ~ 8eV. As shown in FIG. 5, the cathode luminescence characteristics of the protective layer 14 have two peaks corresponding to the intermediate energy levels E! And £ 2, respectively, at wavelengths of about 500 nm and 700 nm; another 493204 V. Description of the invention (4), If the protective layer 14 does not have an intermediate energy level, as described in the conventional technology, its cathode luminescence characteristic does not have a peak, as shown in FIG. 6. Therefore, compared with the conventional AC plasma display panel, the DC driving voltage according to the present invention can be reduced by about 10%. The vapor deposition equipment used to deposit the protective layer 14 in FIG. 4 is described later with reference to FIG. 7. In FIG. 7, reference numeral 71 denotes a vacuum chamber in which a support portion 72 is provided to fix the front side portion 1 before the deposition step of the protective layer 14; a pedestal 73 is provided in the vacuum chamber 71, which has A depletion 74 'for accommodating magnesium oxide and a filament 75 for emitting thermoelectrons; a heater 76 is provided in the vacuum chamber 71 to heat the front side portion 1; further, an oxygen ion gun 7 7' is provided To implant oxygen ions into the front part 1. The operation of the vapor deposition apparatus of FIG. 7 is described later. First, "a front side portion 1 having a glass substrate 11 is fixed on a support portion 72", wherein the glass substrate 丨 is formed in advance including display electrodes 12a, 12b and a dielectric layer 13 thereon. Secondly, the vacuum environment of the vacuum chamber 71 is drawn out through a vacuum pump (not shown), so that the vacuum degree of the vacuum chamber 71 can be less than 6.6E-5 Pa (5E-7 Torr). Next, 'the heater 76 is operated to heat the front side portion 1 to about 250 ° C to obtain magnesium oxide in the direction of < 100>. One of them-people: Operate the filament 75 to emit thermoelectrons, and generate a single element by magnetic flux (not shown) focus the thermoelectrons onto the crucible 74, as shown by the dot arrows ',' in FIG. Therefore, magnesium oxide evaporates and deposits on the front part 1, about 1 #

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A thin layer made of ID thick magnesium oxide, and a protective layer 14 is deposited on the dielectric layer 13. ’As the oxygen ion grabs 77, 俾 can make the gas ion +, and translate ζ 2

The implantation energy reads that the eV is implanted in the protective layer 14 to make the inner milk ion inertia 5W 14. Lin ff] 1. The oxygen deficiency M produced in 1 4 can make the above-mentioned intermediate energy level in the band of the magnesium oxide protective layer &, heart. In the example of evil and ethics, the intermediate energy levels El, & are closer to the conduction of magnesium oxide: the edge energy level Ec is greater than the edge energy level of the valence band of magnesium oxide ^, that is, due to The cathode luminescence peak of the step £! Is larger than the peak of the intermediate energy step ^, so the intermediate energy step corresponding to a wavelength of 400 nm helps reduce the DC driving voltage. However, in this case, an intermediate energy level corresponding to a wavelength range of 300 to 5000 nm also contributes to reducing the DC driving voltage. According to the above description of the present invention, the reduction of the DC driving voltage value can reduce the power consumption and manufacturing cost of the AC plasma display panel.

Page 8 493204 Brief description of the drawings The present invention will be more clearly understood from the description provided below with reference to the accompanying drawings. FIG. 1 is a cross-sectional view of an embodiment of an AC plasma display panel according to the present invention. FIG. 2 is a perspective view of a front portion of FIG. 1. FIG. FIG. 3 is a perspective view of a rear portion of FIG. 1. FIG. 4 is an energy band diagram of the protective layer of FIG. 1. FIG. 5 is a cathode luminescence characteristic diagram of the AC plasma display panel of FIG. 1. FIG. 6 is a cathode luminescence characteristic diagram of a conventional AC plasma display panel. FIG. 7 is a schematic diagram of the evaporation equipment used to deposit a protective layer in FIG. 1. [Symbol description] 1 ~ front panel part 2 ~ rear panel part 3 ~ discharge area 11, 2 1 ~ glass substrate 12a, 12b ~ transparent display electrode 13, 23 ~ dielectric layer 1 4 ~ protective layer 2 2 ~ address Electrode 24 ~ Dielectric layer 2 2 ~ Filling agent layer 71 ~ Vacuum chamber 72 ~ Support

Page 9 493204 Brief description of the drawings 7 3 ~ Pedestal 74 ~ Crucible 7 5 ~ Filament 76 ~ Heater 77 ~ Oxygen ion gun Page 10

Claims (1)

4V32U4 6. Scope of patent application I. An AC plasma display panel, including a front part, including a flute / formed on the first substrate; a plate; a plurality of display electrodes, a pole and a protective layer In between, the dielectric layer is formed on the dielectric layer of the display, and only a layer made of magnesium oxide is formed on the first back side portion, and includes a layer formed on the second substrate. Pole-the second substrate; a plurality of address electrodes, 々 八-+ + 狂-the second dielectric layer, formed at the address of the electric # 八 隔 FΜ β j 义, | The agent layer is formed between the knife regions and the distal side parts are paired with each other; 丨 The restriction of the magnesium oxide protective layer between the knife and the rear side through a discharge region has a ^ j π speed belt with At least one intermediate energy level. The conduction band of the AC item 2 · For example, in the first patent application, the intermediate energy level is closer to the valence band edge energy level EV of magnesium oxide. In the plasma display panel, the edge energy level EC is higher than that of magnesium oxide. 3 As in the first patent application, the intermediate energy level is generated by the father's flow-type electroluminescence display panel of magnesium oxide shell, in which the defect is generated. 5. The AC plasma display panel as described in item 1 of the patent application, wherein the middle stage corresponds to a wavelength of about 400 nm. Page 11 493204 6. Scope of patent application 6 • For the AC plasma display panel of the first scope of patent application, the intermediate energy level corresponds to a wavelength range of about 300nm to 500nm. 7. The AC plasma display panel according to item 1 of the patent application scope, wherein the magnesium oxide protective layer has a < 111> direction. 8. A method for manufacturing an AC plasma display panel, comprising the following steps: preparing a substrate having a display electrode and a dielectric layer formed thereon in advance; depositing a protective layer made of magnesium oxide on the dielectric layer Above; and at least one defect energy level is generated in the forbidden energy band of the magnesium oxide protective layer. 9. The method for manufacturing an AC plasma display panel according to item 8 of the patent application, wherein the step of depositing the protective layer and the step of generating the defect energy level are performed in a vacuum chamber. 10. The method for manufacturing an AC plasma display panel according to item 8 of the patent application, further includes a step of heating the substrate and a step of depositing the protective layer. 11. The method for manufacturing an AC plasma display panel according to item 8 of the patent application, wherein the step of depositing the protective layer uses an evaporation method. Page 12 493204 6. Scope of patent application 12. For the manufacturing method of the AC plasma display panel according to item 8 of the patent application scope, the protective layer is deposited using an electron gun evaporation method. 13. The method of manufacturing an AC plasma display panel according to item 8 of the patent application, wherein the step of generating the defect energy level uses an ion implantation method. 14. The method for manufacturing an AC plasma display panel according to item 8 of the patent application, wherein the step of generating the defect energy level uses an oxygen ion implantation method. Page 13