TW491987B - Liquid crystal display device - Google Patents

Abstract

In an active-matrix-driven LCD device, a driver circuit and a display section are formed on one substrate and in which each of thin-film transistors included in the driver circuit and display section has an active layer made of a polysilicon that has been formed by enhancing its crystal growth. The driver circuit operates to write data of a same polarity to all pixels of an entire one-frame screen but write data of different polarities to different frames adjoining each other on a time base at a frame frequency of about 100 Hz or more.

Description

491987 A7 V. Description of the invention (1) Background of the invention The present invention relates to a so-called active-array-driven liquid crystal display device, which is driven by a TFT (thin film transistor), and particularly relates to a small liquid crystal display device used in a projection system. An example of the driving system structure of a small active-array-driven liquid crystal display 7F (LCD) device with a 3D 7F display used in a projection system. Figure i 7 shows an example of this driving method. Traditionally, because of the small active-array-drive LCD devices used in projection systems, the connection pitch between driver LSIs (large-scale integrated circuits) is extremely small, so-called drivers are commonly used. LCD device, which uses a polycrystalline silicon thin film transistor to house a driver. In terms of driving operation, as shown in Figure 13, the video data signal to be displayed is entered in the form of an analog ##, and then by A / D converter 丨 converted into a digital signal. The signal is processed by the processor 2, such as the factory display of the data voltage to adjust the electro-optical response of the liquid crystal (that is, the ν_τ curve), the conversion of the labor format, and the calibration =. The signal is inversely converted back to the analog signal by the D / A converter 3, and then further converted into a multi-phase parallel signal by a plurality of sample-and-hold circuits 4], then when the frequency is reduced to "w (number of passes) ,, At this time, the signal is provided to a data driver of the LCD panel of the liquid crystal display via a linear amplifier (not shown). In the data driver, these and other data signals are held in the capacitance of the source bus line according to the on / off of an analog switch (not shown) controlled by the output of the horizontal scanning circuit. After that, the data signals held by the source bus line are transmitted to the one connected to the source bus line through a thin film transistor -4-(0. F ϋ I 请 n ϋ ϋ · ϋ ϋ (Please read first Note on the back? Matters should be filled out on this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs — It --------- ^ — 0 --------------- -------- A7 B7, invention description (= Γ ,: the number T horizontal scanning period ends. After the end-Changping scan J-month <, the data signal of the child is kept in the capacitance of the pixel. Electric 1: :: 'In the driving operation of the liquid crystal, in order to prevent the orientation film and the liquid crystal from being damaged by a C, and to prevent the image from being retained or stagnant, it is necessary to use a voltage line to apply the voltage applied to the liquid crystal. Therefore, as shown in Figure 17B The polarities of the video data signals shown are alternated every -w frames for AC driving. The result is that the signal voltage of each frame is alternately switched to the "pixel electrode." The determined potential, a counter electrode, and its potential are set at the intermediate potential between the potentials of the pixel electrode. The liquid crystal responds to the rms voltage. Therefore If the alternating positive and negative voltages have a symmetrical pattern of the king, the formation of the optical response occurs at the frequency of the frame (that is, the frame frequency). However, when the waveform is asymmetric, even the slightest 'It still generates a sub-harmonic part whose frequency is / 2 of the frame frequency. In addition, because the thin film transistor has the characteristics of not being completely symmetrical under positive and negative conditions, the DC potential is also biased due to the switched feed. Therefore, the package system of the opposite electrode is sufficient for these effects to counterbalance. However, even if the wave shape in a data voltage is adjusted to make the polarity completely symmetrical, it is still very difficult to achieve a completely symmetrical wave in all data voltages. Due to the non-linear and / or polar asymmetry of the capacitors of the liquid crystal and thin film transistors and the gain shift of the linear amplifier circuit. Moreover, even if the wave pattern can be made completely symmetrical, the wave pattern may still shift with time. However, the frequency of the frame is usually 60 Hz-8 5 Hz, and the second harmonic frequency part of the frame has a frequency of 30 Hz-4 3 Hz. this Paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

-------- Order --------- line J Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 491987 A7-"-B7 V. Description of the invention (3) The display quality is greatly reduced. In order to avoid this situation, the so-called line switching drive is traditionally used to manually double the frequency of the liquid crystal flare, as shown in the figure, making the flicker unrecognizable. However, a small active-array-drive LCD device 7F LCD device used in a conventional projection system has the following problems. That is, in a driving method (scanning line conversion driving, shown in FIG. 17A) used in a liquid crystal display LCD device, a voltage having an opposite polarity is applied to an adjacent pixel electrode to avoid flicker. Therefore, the uniform electric field (hereinafter referred to as " longitudinal electrical ^) between the pixel electrode and the opposite electrode is destroyed on the edge of the electrode sandwiched by the voltage of the opposite polarity of the pixel electrode, resulting in the lateral component of the electric field (hereinafter referred to as For " transverse electric field ,,). Therefore, for example, in the TN (twisted nematic) mode, a reverse tilt region is generated corresponding to the lateral electric field, and it depends on the pre-elevation angle. As a result, in the normal white mode, the polarizing plate is set at the cross Nicol (cr0 ~ Nic01), on and near the edge of the pixel electrode between pixels with different polar data, the pre-tilted area and The reverse tilt region is obviously related to the surface unevenness, the pre-elevation angle, and the direction-detecting electric field. It is generated in the area where light is leaked in the black display state, and the electro-optical response (v_τ curve) of the liquid crystal to the display data voltage is skewed toward the higher pressure side Move the area. On the other hand, in the normal black mode in which the polarizer is set to parallel Nicols, the transmittance of the white level is reduced due to the aforementioned effect caused by the electric field, and because it cannot be seen inside the deaf perimeter. The same polarization axis is rotated or the optical rotation is dispersed, and it is difficult to obtain natural black. As a result, the actual display of the TN mode is limited to the normal white mode in which the polarizer is set to the cross-Nicol. In order to obtain sufficient display quality in the normal white mode, light leakage occurs. The paper size applies the CNS A4 specification ⑵G χ 297 public love. 1 · — ϋ ^ (Please read the precautions on the back before filling in this page ) Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs — — — — — — — — — — — — — — — — — — — — — Outside 1987 V. Description of Inventions Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (4) I area and the area where the WT curve is biased to the higher voltage side need to be shielded to generate light leakage. I area and the area where the ν-T curve is biased to the higher voltage side: The end of any pixel has approximately gj fixed ^ ψ 展 展 Α 舁 J % 1¾ 疋 is at a distance of I, so it has a significant effect especially on the type pixel. In the conventional projection system, a small active-array driving liquid crystal display (LCD) device and other devices were originally driven by source-handle conversion because there were fewer problems in driving. However, as the pixel size becomes smaller, the area where light is expected to be blocked is relatively large, resulting in a significantly smaller lens aperture ratio. In the display area, as shown in FIG. 12, although the source bus bar 5 is provided only in the vertical orientation, the gate bus bar 6 and the common line 7 used for the storage capacitor are still provided laterally. Therefore, the opaque lateral extensions are still initially larger than the opaque vertical L extensions. Therefore, although the scan line conversion drive has some problems in driving, it can still be used as a light-shielding area. The original opaque lateral extension area. The light-shielding area 8 is located along the orientation of the source bus line 5 and is located. The pixels 9 and 9 adjacent to each other prevent the reduction of the lens aperture ratio. However, in the conventional small active-array drive liquid crystal display (LCD) device used in projection systems, if the pixel size becomes smaller, further shading is required in the area where the contrast of the pixel electrode near the top and the end drops sharply. It makes it extremely difficult to further improve the mirror-to-hole ratio. The answer to the problems involved in the conversion drive is a driver that eliminates the line conversion drive and other methods (hereinafter, this drive method is called " frame conversion drive "), as shown in Figure 17B. Show. However, in this frame conversion drive, the optical response is performed at the frequency at which the frame is turned (that is, the frame frequency). In this regard, unfortunately, if the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) l · --------- 丨 袅 (Please read the precautions on the back before (Fill in this page) I ^ — — — — — — — — — I I ------ 491987 A7 B7 V. Description of the invention (5) The waveform is slightly asymmetric, and the frequency is the frequency of the frame 丨/ 2 of the second harmonic frequency. As mentioned above, the polarities of the characteristics of the thin film transistor are not completely symmetrical, making it extremely difficult to obtain a completely symmetrical waveform for all data voltages. Moreover, the waveform may be shifted due to changes in time, resulting in asymmetric waveforms. The frame frequency is usually 60 Hz d-8 5 Hz, and the second harmonic frequency is 30 Hz-4 3 Hz. The second sub-harmonic frequency portion appears to be flickering, resulting in a significant loss of the display quality. To avoid this, Japanese Patent Publication HEI 9-204159 discloses a method for preventing flicker by increasing the frame frequency to about twice. However, a small active-array-driven LCD device used in a conventional projection system has adopted a driver integrated molding structure using a polycrystalline silicon thin film transistor to avoid drastically reducing the pitch of the contacts of the driver LSI, as described above. The characteristics of polycrystalline silicon thin film transistors are far inferior to those of monocrystalline silicon transistors' and therefore have limitations in high-speed operation. Therefore, in the conventional small active-array driving liquid crystal display LCD device used in a projection system, the signal is converted into a multi-phase parallel signal by an analog sampling-and-holding circuit 4, as shown in FIG. 13, the operating frequency is reduced, and The signal is sent to a data driver on the LCD panel of the liquid crystal display. For example, when performing XGA (Extended Graphic Array) display, the video signal is divided into up to 12 phases per LCD device. The operating speed of the source data signal of the extended graphic array is located on the LCD panel of the LCD. The data driver on the side drops to W1 2. Therefore, in this case, in order to prevent flicker by increasing the frame frequency to twice, the video signal needs to be divided into 2 4 (= 12 X 2) phases, so that the paper size is applicable to China Standard (CNS) A4 specification (210 X 297 public love ^ 7 (Please read the precautions on the back before filling out this page) 訇 Printed clothes by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 0, · ϋ n I ϋ nn I ϋ k— ϋ n I n ϋ n ϋ i_i n 1 A7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 491987 V. Invention description (6) to "Slave video transmission rate. As a result, not only the size of the external circuit is increased, but the number of input connectors of the LCD panel of the liquid crystal display is also increased. The scan driver becomes complicated, resulting in a decrease in yield. In addition, if the frame switching drive is performed, because the parasitic capacitance exists between the source bus bar and the display pixel, the area of the storage capacitor is reduced to increase the mirror hole. The ratio leads to an increase in the ratio of parasitic capacitance, which inevitably occurs. This causes significant damage to the image quality. In another aspect, 'in terms of the breakdown or voltage of the transistor and the energy consumption of the data driver, The% pressure of the display data (video signal) provided by the data driver is limited. Therefore, when driving horizontally, a higher driving voltage is required due to the voltage loss caused by the capacitance between adjacent pixels in the vertical orientation. That is, applying The driving voltage of the liquid crystal is insufficient, resulting in the problem of obtaining high contrast ratio, especially normal white In addition, the horizontal line conversion driver has the following problems. If the data driver structure makes the video signal through the analog connector ... controlled by the horizontal scanning circuit and the core output ... it is kept in the source bus line in order. In the capacitor, the driving method is implemented by dividing the video signal into polyphase signals and then providing them in parallel at a lower frequency. That is, the distributed polyphase video signal is generally sampled simultaneously through an analog connector. However, when When there is a capacitive coupling between the pixels on the right and left, the holding potentials of adjacent pixels in the simultaneously sampled pixel section and the subsequent sampled pixel section change, and this change is unfavorably represented by a vertical line. Therefore, the purpose of the present invention is to propose a liquid crystal display (LCD) LCD device. -9-This paper size is suitable for the liver ® National Standard (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before filling this page)

V 491987 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (It can achieve high contrast ratio and high mirror-to-hole ratio at the same time, and can obtain high-quality display. In order to achieve the aforementioned purpose, according to the first aspect of the present invention An active matrix driving liquid crystal display LCD device is proposed, in which a driver circuit and a display area are formed on a substrate, and each thin film transistor included in the driver circuit and the display area has an active device made of polycrystalline silicon. Layer, which is formed by promoting its crystal growth, wherein the driver circuit operation is based on time, and writes data with the same polarity to the whole single frame screen at a frame frequency of about 100 Hz or higher. In all pixels, data with different polarities are nested in different frames next to each other. With this configuration, each thin film transistor used has polycrystalline silicon formed by promoting its crystal growth as Active layer. Therefore, the thin film transistor has about Double the electron mobility, so frame conversion can be driven at twice the normal frame frequency of about 60 Hz. As a result, adjacent pixels will not generate a lateral electric field along the source busbar , To prevent the contrast ratio from being reduced due to light leakage in the black display state in the normal white mode. In addition, even if the wave shape of the data signal is due to the asymmetry of the data voltage, the asymmetry of the characteristics of the thin film transistor, the change of the data voltage over time, or other The factor is asymmetric, and the second-order sub-harmonic frequency component finally occurs. The sub-harmonic frequency component does not flicker because it is driven by the frame at double speed. Actually, the frame is about 100 Hz or higher. The frame conversion drive at frequency can produce the same efficiency as the frame conversion drive driver at the aforementioned double speed. In this case, because the double speed frame conversion drive speeds up the drive by -10- ( (Please read the notes on the back before filling this page) I AW -------- ^ --------- I ----------------- ------ Printed A7 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Note (8) The operation is performed by a circuit (operation, so the active array can be realized without flickering, amplifying the specifications of the external circuit, increasing the number of input connectors, not complicating the peripheral driver circuit, or increasing cost. LCD device. H for τ =, according to the present invention, the shading pattern can be omitted to prevent light leakage, so a high mirror hole ratio is obtained. Therefore, a high mirror hole ratio can be provided without reducing the contrast ratio.

Low and flicker-free display LCD device with superior display quality. In the liquid crystal display LCD device, the driver circuit may include a data driver. The liquid crystal display LCD device may further include an electrical shielding device located between the -source busbar and the pixel electrode. The source busbar will come from the data driver. Data is provided to each pixel electrode of the display area. Make: With this structure, the capacitance effect between the source bus line and the pixel electrode is reduced by the electrical shielding device 'located between the source bus line and the pixel electrode to prevent vertical cross talk. Therefore, the image quality is prevented from slipping significantly. In a liquid crystal display (LCD) device, the driver circuit may include a data driver that performs dot-sequential driving, thereby sampling a plurality of parallel data at the same time. In this configuration, the frame circuit driving by the driver circuit can suppress the potential change of the pixel electrode in the current simultaneous sampling section, and the pixel electrode is in contact with the pixel section for subsequent sampling. Therefore, streaks on the screen can be prevented. In a liquid crystal display (LCD) device, an array pitch of pixels in a display section is about 25 μm × 25 μm or less. With this structure, the array pitch of the pixels is about 25 microns x 25 microns 11-^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love)

491987 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ---------- ____B7___ V. Description of Invention (9) or smaller High-definition liquid crystal display LCD device, the pixel aperture ratio of pixels increases, so the display is not Blinking high contrast ratio high quality image. Therefore, the present invention provides a high-quality small-sized active-array driving liquid crystal display (LCd) device that can be used in a projection system and the driver is integrally formed. In a specific example, the data is parallelized to obtain twelve merged data. That is, the parallelization is performed in such a manner that the dot clock of the original data signal to be displayed by the data driver can be set to 2 million Hz or more per data. In this configuration, the dot clock of the normal-speed data signal becomes about twice that of the normal one (6.25 megahertz). In the extended graphic array display, double-speed driving with 12-phase development is performed. According to the second aspect of the present invention, an active array driving liquid crystal display LCD device having a driver circuit and a display area is proposed, wherein the operation of the driver circuit is based on the time to nest data with the same polarity into all of the overall single-frame screen. Pixels, and data having different polarities are nested to different frames adjacent to each other, and a capacitor is provided between adjacent pixel electrodes along a source bus line in the display area, and the capacitor includes a space between adjacent pixels. The inter-electrode capacitance between the pixel electrodes and / or the < capacitance generated by the overlapping of the conductive light-shielding layer with the adjacent pixel electrode, the conductive light-shielding layer is connected to the drain of the thin film transistor and is disposed below the adjacent pixel electrode. An insulating film is interposed therebetween. In this structure, when the frame conversion driving is performed, the voltage of the capacitor corresponding to the pixel electrodes adjacent to each other and oriented along the extension of the source bus line is added to the data voltage provided by the driver circuit. Produced: -12- This paper size is suitable for financial standards (CNS) A4 (210 X 297 Kg £ 3-- (Please read the precautions on the back before filling this page)

'One bite, I n .1 · ϋ ϋ · ϋ ί I a— l ϋ I n I— I nm IIII · ϋ ϋ n ϋ · ϋ I A7 B7 V. The voltage of the invention (1〇) is applied to the The electrodes of a liquid crystal display (LCD) device are used in the display area. Therefore, under the same worry data as the LCD device of the display, the liquid crystal and the conventional liquid crystal can be obtained without sacrificing each image; the driving voltage application difference ratio. ^ In the case of the hole-to-hole ratio, a high-reflection result is obtained. According to the present invention, the thin film transistor crystal is displayed in the white mode, where the thickness of the thick film varies with the voltage and energy The viewpoint level is set to a limit so that the driving voltage m of the driving voltage m applied to the liquid crystal is compensated to obtain a high reflectance, which is insufficient. The length of the source sink between the pixel electrodes is approximately 15 Percentage or more: Add a sufficient heart to the voltage applied to the pixel electrode with a linear orientation: 'Yiyi; by adjusting the interval between the pixel electrodes; the method is due to: in: each pixel In the case of the mirror-to-hole ratio, a high contrast ratio is obtained. In the example of "source 1", the capacitance between the pixel electrodes connected to each other-in the direction of the extension of the electrode line-is not less than that of the pixel electrode: including parasitic capacitance-0.5% But not more than ι〇 percentage < range. Because the pixel electrodes that are connected to each other are connected to the source bus (the capacitance in the orientation is not less than 0.05% of the storage capacitor), the capacitor can sufficiently provide the electricity to be added to the pixel electrode. = The electricity willing. In addition, because the capacitance between the pixel electrical contacts is not higher than 1G percentage of the storage capacitor, the changes in the capacitance between the pixel electrical contacts are not as large as this paper. The Chinese standard (CNS) A4 specifications are applicable to this paper. (21〇χ 297 mm 13- ^ 1987 A7 B7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

The voltage added to the shirt. Therefore, a sufficient voltage is added to the voltage applied to the pixel electrode, and a high contrast ratio is obtained without sacrificing the mirror-to-hole ratio of each pixel. Other objects, features and advantages of the present invention will be apparent from the following description. Brief description of the drawings The present invention can be more fully understood by the following detailed description and the accompanying drawings, which are for illustration only and therefore do not limit the present invention. Among them: FIG. 1 is a film used for pixels in a liquid crystal display LCD device of the present invention. A cross-sectional view of the main part of the transistor; Figure 2 is a block diagram of the driver_integrated panel formed using the thin-film transistor shown in Fig. I; Figure 3A is used for the driver integrated panel shown in Fig. 2 The L3BUC of the video signal waveform is a diagram of the video signal waveform used by the driver integrated panel for the f driver; FIG. 4 is a diagram showing the configuration of the display pixel portion in the LCD device of the LCD of the present invention; Because the capacitance between the pixel electrode and the source bus line causes vertical crosstalk; FIG. 6 is a diagram showing a configuration of a display pixel portion different from that of FIG. 4; FIG. 7 is a diagram showing a configuration other than FIG. 4 FIG. 8 is a diagram showing the configuration of the display pixel portion other than 6; FIG. 8 is an explanatory diagram in which a voltage obtained by adding a specific voltage to the view and signal = voltage is applied to the pixel electrode of the display image shown in FIG. 7; IV & Figure 9 is a conceptual diagram showing the storage capacitor and its parasitic capacitance; -------------- Iron -------- Order ------ C Please read the back first Note before filling out this page}

1 n I line 丨 # · This paper is suitable for financial use__Home Standard (_CNS) A4 Specification -14- 491987 Description of the Invention (12) Figure 1 〇 is for displaying the Zheng pixel electrode, it is for displaying the display pixel shown in Figure 7 The two-capacity diagram; the coupling capacitance between the prime electrodes; the knife ^ 'is located between adjacent images. Figure 12 is a graph showing the average c of the display pixel portion, and the four of the ancient mouth 4 &, A, 4, 6 and 7 The conventional pixel structure; the dimensions are shown in Fig. 1. 3 is a diagram showing an example of the structure of a driving system of an active-array flat-magic driving liquid crystal display; Fig. 14 is a diagram showing sampling-and-holding electricity and m; Figure 15 shows the LCD device printed in Figure 13. Intellectual Property Bureau of the Ministry of Economic Affairs and the Intellectual Property Bureau employee consumer cooperatives. Figures 15A, 15B, and 15C are explanatory diagrams of the sampling operation using the inverse-color sampling path of Figure 14; Fig. 17A and 17B are conceptual diagrams showing the path components of a data driver. Fig. 17A and 17B are conceptual diagrams showing the spatial distribution of the pixel potential with respect to time changes in a line conversion drive and a frame conversion drive. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to specific examples illustrated in the accompanying drawings. (First specific example) As mentioned above, the characteristics of polycrystalline silicon thin film transistors are far inferior to those of single crystal silicon transistors' and therefore have limitations in face-speed operation. Therefore, in this specific example, thin film transistors are formed, each of which has an active layer of polycrystalline silicon, and at least one of Ni, Pt5 Sn, and Pd is added to the amorphous silicon (a_Si) film to promote its crystal growth. After that, using these thin-film transistors to manufacture the driver _ integrated panel, you can get a driver that is twice or faster than the conventional polycrystalline silicon thin-film driver. The integrated panel can increase the frame frequency by about two and- Keep electricity and -15- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) I ϋ «ϋ nn ϋ ϋ I m mm— kn n I ϋ ϋ I n ϋ III n ϋ ϋ I ϋ ϋ ϋ n H · ϋ I ϋ ϋ ι ϋ ϋ ((Please read the note on the back? Matters before filling out this page) 491987 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (13) times, To prevent flicker. FIG. 1 is a cross-sectional view of a main part of a thin film transistor used in a display pixel portion of this specific example. This thin film transistor system was prepared by the following method. First, the 'a-Si film 12 is deposited on the entire surface of the insulating substrate 11. Thereafter, in order to make the Si surface hydrophilic and control the surface properties, an oxide thin film is formed on the surface, and a nickel acetate aqueous solution is spin-coated on the upper surface. Next, the solid-state crystal system is performed at 600 C for about 12 hours to crystallize the a-Si thin film 1 2 into polycrystalline Si. The SiO2 film is deposited on the polycrystalline Si layer, and oxides and the SiO2 film are removed, except for the portion where the active area of the device is to be formed. Next, using the remaining Si02 thin film as a mask, a high concentration of p + ions (at 15 仟 electron volts, 5 × 1015 cm · 2) was implanted, followed by 600. A 12-hour heat treatment was carried out. After that, using the SiO2 film as a mask, the p + ion implantation region of the polycrystalline Si film is removed, and then the SiO2 film is removed. After that, the SiO2 film u is deposited on the entire polycrystalline Si film. In addition, an oxidation process was performed in an oxidation atmosphere containing hydrochloric acid for about 1 hour, whereby the polycrystalline Si thin film 12 was used to remove residual metal atoms. Secondly, the SiO2 film and a portion of the polycrystalline Si on the polycrystalline Si film 12 are removed to retain a portion of the active region of the polycrystalline Si device to be manufactured, and at the same time the polycrystalline y film I2 is removed. The necessary part. After that, the gate oxide 13, gate 14 and the common line i 5 for the storage capacitor are formed by using the same method as that of the conventionally known polycrystalline silicon thin film transistor manufacturing method, and then p + ions and B + ions are implanted into the polycrystal. Si film 12. In addition, a SiO2 film and a BpsG (^ _ phosphosilicate glass) planarizing film 16, a contact hole 17, a metal (Aisi) wire 18, and an interlayer insulator are formed in this order. 〇 Through holes (Please read the precautions on the back before filling this page)-· 1111111 · 11111111 0 ^^--II-II-I---— — — — — — — — — — — -16-

491987 A7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (14) 2 1. Light-shielding or opaque film 2 2. Interlayer insulator 2 3. Pixel contact hole 2 4. and transparent pixel electrode 25. Thus, the driver and the thin film transistor in the display area of the liquid crystal display LCD device to be used in this specific example are completed. Compared with a conventional high-temperature polycrystalline silicon thin film transistor with a mobility of about 100 cm2 / V · sec, the thin film transistor obtained in this way has a mobility that is about 2_2 · 5 times higher. In addition, as shown in Fig. 2, the driver-integrated panel 29 is obtained by using a thin-film transistor system made of the drivers 26, 27 and the LCD region 28. In this case, in the non-strip scanning performed at a frame rate of 120 Hz as shown in FIG. 3A, when the video signal is converted into a 12-phase parallel signal and the driver integrates the panel 29 to the frequency of the original video signal The driver-integrated panel 29 has stable operation when operating at 1/6 times for extended graphic array display, and at the same time, a bright and uniform display without any flicker. ~ For a driver_integrated panel made using a conventional two-temperature polycrystalline silicon thin film transistor, a non-strip scan at 60 Hz frame rate shown in Figure 3B ^, when the video signal is converted into a 12-phase parallel signal And when the driver-integrated panel is operated at the frequency of the original video signal, the stable operation is obtained. However, as shown in FIG. 3A, in the non-strip scanning performed at a frame rate of 120 Hz, the driver-integrated panel is not operated or the driver circuit operates even when the driver-integrated panel is operated. Unstable, resulting in sampling timing errors, so it cannot be displayed correctly. As mentioned above, in this specific example, Ni is added to the a_Si thin film 12 to promote crystal growth, so that the crystal "crystallizes into a polycrystal ^" to form a king moving layer. As a result, the electron mobility can be obtained approximately Conventional high-temperature polycrystalline film ------------- Lu ----- --- Order --------- Line 丨 ----------- ------------ (Please read the notes on the back before filling this page) -17-

491987

V. Description of the invention (15) Thin film transistor with a mobility of 2.2.5 times higher than that of transistor printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, by manufacturing a driver-integrated panel 29 using a thin film transistor, an operating frequency that is twice or higher than that of a conventional driver using a high-temperature polycrystalline thin-film transistor_integrated panel can be obtained. As a result, using the driver_integrated panel 29 of this specific example, in the frame conversion driving mode, the frame frequency is increased by about two times to prevent flicker, so that the pieces are displayed to Nanbei. In this case, the multiplication of the frame frequency is achieved by increasing the speed of the data driver 26. Therefore, the frequency multiplication in the figure neither causes the scale of any external circuit to be enlarged, nor complicates the horizontal driver circuit, so the yield is not reduced, and the cost is not increased. In this specific example, Ni is added to the Si thin film 12 to promote crystal growth of the polycrystalline silicon thin film. However, the present invention is not limited to this. Adding at least one of Ni, pt, Sn, and Pd can promote the crystal growth of the polycrystalline silicon thin film. In this specific example, after the a-Si thin film 12 is crystallized into polycrystalline Si, a high concentration of p + ions is implanted and heat treatment is performed to remove the added Ni atoms. Or, the concentration of the Ni atom can be reduced by, for example, oxidation using hydrochloric acid. (Second Specific Example) In this example, the thin film transistors are each formed using an active layer made of polycrystalline stone, which is formed by promoting the crystal growth by an oxidation process at 950 ° C or higher. After that, the thin film transistor is used to manufacture the driver_integrated panel, and the operating speed is two or more times faster than the conventional driver_integrated panel using a polycrystalline silicon thin film transistor. Therefore, the frame frequency is increased by about two times. Prevent flicker. In this example, the paper size in the display pixel portion of the LCD device is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love). 0 ------- — Order ----- ---- ^ IAW .------------------- (Please read the notes on the back before filling this page) -18- 491987 A7 B7 Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative V. Description of the invention (sacrifice) The main part of each thin film transistor used has a cross section as shown in Figure j. This thin film transistor system was manufactured using the following method. Note that the following description uses the same reference numbers as in Figure 1. First, an a-Si thin film 12 is deposited on the entire surface of the insulating substrate η, and then heat-treated at 600 C for about 12 hours to form a polycrystalline Si thin film by solid-phase epitaxy. After that, by 950. The oxidation process was performed in an oxidizing atmosphere of 0 ° C or higher temperature for about 30 minutes to promote the crystal growth of the polycrystalline Si film. Secondly, the portion of the polycrystalline Si film 12 that remains to be the active area of the device is retained, and the unnecessary portion of the film 12 is removed. After that, the gate oxide i 3, the gate 14, and the common line 15 for the storage capacitor are formed using the same method as that of the conventionally known polycrystalline silicon thin film transistor manufacturing method, and then p + ions and B + ions are implanted into the poly Crystalline Si thin film 12. In addition, a 0 2 thin film and a BPSG planarized thin film 10, a contact hole 17, a metal (eight lines), an intermediate layer insulator "including SiNx thin film I9 and Si 0 2 thin film 20, through hole magic, light shielding or The opaque film 22, the interlayer insulator 23, the pixel contact hole 24, and the transparent pixel electrode 25. In this way, the driver and the thin film transistor in the display area of the liquid crystal display LCD device to be used in this specific example are completed. Compared with the conventional high-temperature polycrystalline silicon thin film transistor with a mobility of about 100 cm2 / V · see, the thin film transistor obtained in this way has a mobility of about 2-2 · 5 times. In addition, as shown in Figure 2, The driver-integrated panel 29 is made using thin-film transistors for the drivers 26, 27 and the LCD area 28 of the LCD. In this case, FIG. 3A is performed at a frame rate of 120 Hz. In stripe scanning, when the video signal is converted into a 2-phase parallel signal and the driver / integrator panel 2 9 operates at 1/6 of the frequency of the original video signal -19- (Please read the precautions on the back first (Fill in this page) -------- Order ---- άφ ----------------------- 491987 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (17) to expand the pattern array Gu Zilu From time to time, the driver-integrated panel 29 has lame (operation, and at the same time, it is not too old ^ --j does not have any flickering bright, uniform display. It is necessary to use the conventional high temperature polycrystalline The driver-integrated panel made of Shi Jiji's thin-film pen crystals was used in the non-strip scanning at the 60 Hz digging, square, ', ▲ ,,,, and trace frame rates shown in Figure 3B. '© The video signal is converted into 1 2 _ such as * av, upwind 12-phase parallel signals, and the driver-integrated panel operates at 1/1 2 of the hands that hide the frequency of the original video signal, and obtains stable operation. However, as shown in Fig. 3A +, in the direction of orientation, the driver-integrated panel is not operated or the driver-integrated panel is operated during the non-strip scanning performed at a frame rate of 120 Hz. The operation of the driver circuit is still unstable, causing sampling timing errors, so it cannot be displayed correctly. As mentioned again, in this specific example, by adding Sichuan to the a_si thin film 12 to promote crystal growth, so that & seven crystallized into polycrystalline si, forming an active layer, junction | 'can get electrons A thin film transistor with a mobility about 2-2.5 times higher than that of a conventional high temperature polycrystalline thin film transistor I. Therefore, by manufacturing a driver using the thin film transistor_integrated panel 29, a higher temperature polycrystalline film can be obtained The conventional driver of the transistor-integrated panel has twice or higher operating frequency. As a result, using the driver_integrated panel 29 of this specific example, the frame frequency is increased by about two times in the frame-conversion driving mode. To prevent flicker, high-quality display can be obtained. In this case, the multiplication of the frame frequency is achieved by increasing the speed of the data driver 26. Therefore, the doubling of the frame frequency I has neither resulted in the enlargement of the scale of any external circuit nor complicated the horizontal driver circuit, so the yield has not been reduced, nor has the cost been increased. As mentioned above, in this specific example, the polycrystalline si film is based on 95 (rc * -20) This paper is sized for China National Standard (CNS) A4 (210 X 297)

V. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 491987 A7 ------ B7 ---------- ^ Description of the invention (18) The oxidation process is performed at a higher temperature for about 30 minutes to form Active layer. As a result, a thin film transistor having a mobility that is about 2.5 to 2.5 times higher than that of a conventional high-temperature polycrystalline silicon thin film transistor is obtained. Therefore, when the driver-integrated panel 29 is manufactured using the thin-film transistor, an operating frequency twice or higher than that of a conventional driver-integrated panel using a high-temperature polycrystalline silicon thin-film transistor can be obtained. As a result, when the driver-integrated panel 29 of this specific example is used, in the frame switching driving mode, the frame frequency is increased by about two times to prevent flicker, so that a high-quality display can be obtained. In this case, the doubling of the frame frequency is performed by increasing the speed of the data driver 26. Therefore, the doubling of the frame frequency of the figure does not lead to the enlargement of the scale of any external circuit, nor does it complicate the horizontal driver circuit, so it does not increase the cost. In this specific example, the polycrystalline Si film is subjected to an oxidation process at 950 ° C or higher to promote the crystal growth of the polycrystalline Si film. However, the present invention is not limited thereto, and the temperature during the oxidation may be about 900 ° C or higher. (Third Specific Example) In this specific example, each of the thin film transistors is formed using an active layer made of polycrystalline silicon, which is formed by a high-pressure oxidation process in an atmosphere of 5 atmospheres or higher containing anhydrous 02 or water vapor. To promote its crystal growth and formation. After that, the thin film transistor was used to manufacture a driver-integrated panel, and the operating speed was twice or ^ times faster than that of a conventional driver-integrated panel using a polycrystalline silicon thin film transistor. Therefore, the frame frequency was increased by about two times. Times to prevent flicker. The main part of each thin film transistor used in the display pixel portion of the liquid crystal display LCD device of this specific example has a cross section as shown in FIG. This thin film transistor system was manufactured using the following method. Note that the description below is similar to the figure i. -21-This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back? Matters before filling out this page)

-AJβ ϋ n ϋ n · ϋ I I · ϋ ϋ ϋ ϋ ϋ n I ϋ ϋ ϋ · ϋ 1 ϋ ϋ ϋ ϋ ϋ i ϋ ϋ i ^ i I A7 B7 V. Description of the invention (19) Same reference number. First, the a-Si thin film 12 is deposited on the entire surface of the insulating substrate 丨, and then heat-treated at 600 C for about 12 hours to form a polycrystalline Si thin film by solid-phase bursting. Thereafter, by performing a high-pressure oxidation process at 60 ° C. in a high-pressure atmosphere containing anhydrous 02 or water vapor at 1 × 5 Pascal or higher pressure for about 30 minutes, the crystal growth of the polycrystalline Si film is promoted. Secondly, the poly Si Si film 12 is reserved to be a part of the active area of the device, and the unnecessary part of the thin film 12 is removed. After that, the gate oxide is formed using the same method as that of the conventionally known poly silicon thin film transistor manufacturing method. 1 3. Gate 14 and common line 15 for storage capacitor, and then p + ions and b + ions are implanted into the polycrystalline Si film 12. In addition, a Si02 film and a BpSG planarization film 16 are sequentially formed. , Contact hole 17, metal (AlSi) wire 18, intermediate layer insulator-including SiNx film 19 and SiO2 film 20, through hole 2;!, Light-shielding or opaque film 22, intermediate layer insulator 23, pixel contact hole 24 And transparent pixel electrode 25. In this way, the driver and thin film transistor in the liquid crystal display lcd device to be used in this specific example are completed. The conventional high-temperature polycrystalline silicon thin film transistor with a mobility of about 100 cm2 / V · sec crystal In comparison, the thin-film transistor obtained in this way has a mobility that is about 2_2 · 5 times higher. In addition, as shown in FIG. 2, the driver-integrated panel 29 uses the driver 26, 27, and the liquid crystal display LCD. It is made by the thin film transistor produced in area 28. In this case, as shown in Fig. 3A, at the frame rate of 120 Hz, the non-strip scanning is performed. When the video signal is converted into a 2-phase parallel signal When the driver-integrated panel 29 is operated at 1Z 6 of the frequency of the original video signal for extended graphic array display, the driver-integrated panel 29 has stable -22- (please read the note on the back first) ? Please fill in this page again) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 0 -------- Order --------- Line ------------- ---------- 491987 A7 ^ '--------- Fifth, the description of the invention (20) --- At the same time, the bright, uniform display without any flashes. For a driver-man-made panel made using a conventional high-temperature polycrystalline chip transistor, in a non-strip scan at 60 Hz frame rate shown in FIG. 3B, when the video signal is converted to 12 _Phase parallel signal and the driver_integrated panel gets stable operation when operating at 1/12 of the frequency of the original video signal. However, 'as shown in H3A, it is performed at a frame rate of 12 () Hz In non-strip scanning, the driver / integrated panel is not operated or even if the driver-integrated panel is operated, the operation of the driver circuit is still unstable, causing sampling timing errors, so it cannot be displayed correctly. As described, in this specific example, the polycrystalline thin film is subjected to a compressive oxidation process in a high-pressure atmosphere containing anhydrous 02 or water vapor at a pressure of 1-2 kcal or higher to form an active layer. As a result, a thin film transistor having an electron mobility of about 2 to 25 times higher than that of a conventional high-temperature polycrystalline thin film transistor can be obtained. Therefore, by manufacturing a driver-integrated circuit using the thin-film transistor = board 29, the operating frequency can be doubled or higher than that of a conventional driver-integrated panel using a high-temperature polycrystalline thin-film transistor. Therefore, using the driver-integrated panel 29 of this specific example, in the frame conversion, the frame frequency is increased approximately twice to prevent flicker in the moving mode, so a high-quality display can be obtained. In this case, the multiplication of the frame frequency is achieved by increasing the speed of the data driver 26. Therefore, the figure ^ frequency ^ (multiplication does not cause the scale of any external circuit to be enlarged, nor does it complicate the horizontal driver circuit, so the yield is not reduced, and the cost is not increased. U In this specific example, the polycrystalline Si The film is oxidized in a high pressure atmosphere containing 1 x 105 Pascal or higher &lt; containing anhydrous 02 or water vapor. -23- This paper size applies Chinese National Standard (CNS) A4 specification (21〇 χ 297 mm) ------------- # (Please read the notes on the back before filling out this page) Order ---- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs • Line Φ ----------------------- A7 B7 V. Description of the invention (Crystal growth of crystalline M film. However, the present invention is not limited to completion in this pressure atmosphere. 02 Or 5 atmospheres or more of water vapor (fourth specific example), ^, ~ This is an example of a liquid crystal display LCD device with a limb display pixel: 2. In this specific example, the thin film transistor system used for the pixel% 叩Group Example 7 ^, which uses polycrystalline silicon as the first to third examples to promote the union and development of jade, ρ ^ two thin film% crystals Speed. In Figure 4, the light-shielding pattern can be used to form a space that is not formed within the interval between the use of the storage capacitor for the pixel, the capacitor, the spring, and the gate bus. Light can pass through this interval. In Fig. 4, 'reference number 33 represents a contact hole, 35 represents a metal pattern used for polar soil (write), 36 represents a pixel contact hole, and π represents a pixel electrode. / 、 有The pixel pitch in the display pixel portion of the above structure is 8 micrometers by 8 micrometers, and the mirror hole ratio is about 55 percent. On the other hand, the mirror of a conventional LCD device with a pixel structure of the same size as that of FIG. 12 The hole ratio is about 4 2%. The liquid crystal display LCD device of this specific example is driven by the following driving method. That is, in the liquid crystal display of this specific example] LCD device, the frame conversion drive is twice the normal frame frequency. Or higher operating frequency. For example, in the extended graphic array display, when the video signal is divided into 12 phases and provided in parallel, the dot clock frequency of each data segment of the video signal is V »and t 12 · 5 megahertz 4, which is 6 at a normal frame rate of 70 Hz. 2 5 24 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------ mN -------- Order --------- line (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 A7 Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative. V. Invention Description (22) Double megahertz (= 75 megahertz / 丨 2). In this case, it is known that the frequency of 75 megahertz is an extended pattern array. In the display, the frame rate is 70 Hz, and the video transmission rate is 0. Therefore, by driving the frame conversion, a voltage with the same polarity = is applied to adjacent pixels to prevent the reversed electric field and prevent In the white mode, light leakage occurs in the black display state, resulting in a decrease in contrast ratio. Therefore, 'a factor for lowering the contrast ratio and a uniform display satisfying a high contrast ratio are avoided. In this case, the frame frequency is 14 Hz, which is twice the normal frame frequency of 70 Hz. Therefore, even if the asymmetry of the data voltage, the asymmetry of the characteristics of the thin film transistor, the time variation of the data voltage, or other factors make the waveform of the data signal asymmetry, resulting in the second subharmonic frequency (1/2 frequency) Point I, but the frequency of this sub-harmonic frequency component is still about 70 Hz. Therefore, the flicker of the sub-harmonic frequency components does not form. In this regard, operating at a frame frequency of 14 Hz, of course, no flicker was found. In addition, no problems occurred at low frequencies of 100 Hz. However, when the frame frequency was reduced to 80 Hz, a slight flicker occurred. In this case, the display quality is damaged to a certain extent, but it has not reached a level where it cannot be practically used. It is known from the foregoing factors that the lower limit of the frame frequency for practical applications is limited to about 100 Hz in this specific example. The frame frequency of 100 Hz is a frequency that cannot be achieved with conventional high-temperature polycrystalline silicon thin film transistors, and serves as a standard to prevent the negative π W negative damage. However, a frame frequency slightly lower than the 100 Hz is also included in the present invention. Therefore, the expression method of "about 100 Hz" is used. This situation is not only established in specific examples, but also in the foregoing first to third specific 25. (Please read the notes on the back before filling this page) -------- ^ -------------------------- ------- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 491987 A7 -------- B7__ V. Description of Invention (23) 'Examples and the fifth and sixth specific examples described below are also established. On the other hand, when the conventional horizontal line conversion drive is performed, it is issued on or near the edge of the display electrode, and the function region of reverse tilt, in which the liquid crystal molecules want to rise or rise in the opposite orientation. The strong reversal of the electric field of the source bus line results in a region where the liquid crystal molecules are not completely high. Therefore, in the normal white mode, the functional region boundary and the regions where the liquid crystal molecules are not completely raised raise light leakage in the black display state. , Resulting in a significant reduction in contrast ratio. Using conventional high temperature polycrystalline silicon thin film electricity Crystal-made driver _ In the case of the integrated panel I, if the horizontal line conversion drive for stable operation is performed, in the black display state of the normal white mode, the boundary of the liquid crystal functional area and the area where the liquid crystal molecules are not completely high, because they are adjacent to each other The reversed electric field near the pixel electrode along the vertical orientation of the pattern causes light leakage to occur in a wide range. In order to avoid the reduction of the ratio of the aperture to the mirror, the common line and gate bus line used by the storage capacitor are generally provided in the light leakage area Above all. However, if no shading is provided in a wide area near these lines, the contrast ratio will still be reduced. Especially, because there is a large light leakage area between the common line used by the storage capacitor and the gate bus line, When the light-shielding film is not formed, the contrast ratio will be greatly reduced. The driver-integrated panel of this specific example uses a thin-film transistor, each of which has a polycrystalline stone formed by promoting its crystal growth. Therefore, a general picture frame can be performed Frame conversion drive at twice the speed of about 70 Hz. The frame conversion drive does not cause A lateral electric field is generated between the adjacent pixels along the source bus line to prevent it from being transmitted in a black display state in a normal white mode. -26- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------- Order --------- line (please read the notes on the back before filling this page) A7 B7 V. Description of the invention (24) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Generate contrast contrast perceptual loss. Therefore, a high mirror aperture ratio can be obtained by omitting the shading pattern. In addition, it can be prevented from flickering by driving at twice the frame frequency. In the description of this article, the clock frequency of each data point It is set at 12.5 megahertz 'to double the speed of the expanded pattern array display at 70 horizontal frame rates. However, the present invention is not limited to the aforementioned frequencies. In addition, 12 phases can be changed and adjusted in the extended graphic array XGA. The prerequisites are cost and performance allowance. (Fifth specific example) In the foregoing specific example, the frame switching drive at twice the speed is performed to prevent flicker. As a result, some of the problems described below do not occur particularly in the conventional horizontal line conversion drive. That is, in the frame conversion driving, there is a parasitic capacitance between the source bus line and the pixel electrode. Especially the small active-array-driven liquid crystal display LCD device, such as those used in projection systems, because the pixel size is υ micrometers X 25 micrometers or smaller, so if you want to determine the ratio of the mirror hole, the area of the storage valley Codes are increased, as is the spacing provided between the pixel electrode and the source busbar. As a result, the capacitance 値 between the pixel electrode and the source bus bar becomes larger relative to the storage capacitor. Then, as shown in FIG. 5, at the clock point of the n-th column of the pixel electrode and the time thereafter, because of the capacitance between the n-th column of the pixel electrode and the third source bus, Column (n, Row) pixels are changed under the influence of the potential of the (n + ι) th and k-th rows of data. Therefore, if it is a frame conversion drive, the occurrence of _ words and display quality degradation = problem = in other words, if it is a horizontal conversion drive, because the potential of the nth column in the k-th row of data and ------- -Order --------- Line-φτ (Please read the notes on the back before filling out this page) -27- 491987 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (25) The polarity of the (n + 1) th column potential is opposite, and its influence is balanced to a negligible degree. Fig. 6 illustrates a liquid crystal display LCD device of this specific example, and the display pixel portion is <arranged. In this specific example, 'two times the speed of a conventional thin-film chip with conventional polycrystalline silicon is used.-A thin-film transistor formed by using polycrystalline silicon that promotes crystal growth as an active layer is used as a thin-film transistor for a pixel (formed in At the intersection of the gate bus line 44 and the source bus line 42), as in the first to third specific examples. The light-shielding pattern layer 41 (equivalent to the light-shielding film 22 in the figure) made of metal or other conductors and having an electrostatic shielding function is provided on the upper layer of the source bus bar 42 and the edge of the pixel electrode, which is divided into four layers. An intermediate layer insulator is interposed therebetween (equivalent to the intermediate layer insulator 23 in Fig. I). Reference number 43 denotes an industrial electrode for a storage capacitor, 45 denotes a contact hole, 46 denotes a through hole, and 0 denotes a metal pattern. And 4 8 represents a pixel contact hole. The pixel pitch in the display portion with the aforementioned structure is 18 micrometers x 18 T meters, and the mirror hole ratio is about 53%, which corresponds to the interrogation bus line. It is used for storage capacitors. The amount of the pattern layer 0 between the common electrodes 43 is smaller than that of the fourth embodiment. On the other hand, the mirror hole ratio of the conventional LCD device with the same size structure as that shown in FIG. 4 is about 42%. The source busbar 42 and the | electrode 49

The potential is reduced or relieved in combination with a specific potential =: words are virtually unrecognizable. T The liquid crystal display LCD device of this specific example is the same as in the fourth example of the extended pattern array brain display, and the frame is driven at 14 Hz, which is two J goods of the normal frame frequency of 70 Hz. Falconry frame

The size of this paper is CNS A4 ^ G⑵G ----------------- line (Please read the precautions on the back before filling this page) -28 · 491987 Ministry of Economic Affairs Printed by the Intellectual Property Bureau employee consumer cooperative A7 V. Description of the invention (26) Conversion drive, applying a voltage of the same polarity to adjacent pixels to prevent the occurrence of reverse electricity%, in the normal white mode, and in the black display state Light leakage-leading to a decrease in contrast ratio-occurs. Therefore, the factor of lowering the contrast ratio is avoided, and a uniform display with a high contrast ratio is maintained while maintaining a high mirror ratio. In this case, the frame frequency is 14 Hz, which is twice the normal frame frequency of 70 Hz. Therefore, even if the waveform of the data signal becomes asymmetric due to the asymmetry of the data voltage, the characteristics of the thin-film transistor, the time variation of the data voltage, or other factors, resulting in the second harmonic frequency (1/2 frequency) component, However, the frequency of the sub-harmonic frequency component is still about 70 Hz. Therefore, the sub-harmonic frequency component has no flicker. In addition, by the function of the light-shielding pattern layer 41, the capacitance effect between the source bus line 42 and the pixel electrode 49 is reduced, and voltage crosstalk is prevented. On the other hand, when the conventional horizontal line switching drive is performed, a reverse tilt function region occurs near or near the edge of the display electrode, where the liquid crystal molecules are raised or raised in the opposite direction. Moreover, since there is a strong reversing electric field along the source bus line between pixels adjacent to each other, a region in which the liquid crystal molecules are not fully enchanted is generated. Therefore, in the normal white mode, the display in black:: Under the boundary of the functional area and the area where the liquid crystal molecules are not completely raised, light leakage occurs, resulting in a significant reduction in contrast ratio. If it is a driver_integrated panel using a conventional high-temperature polycrystalline silicon thin film transistor, in the black display state of the normal white mode, the horizontal line with stable operation is driven at the boundary of the liquid crystal functional area and the area where the liquid crystal molecules are not + fully raised Caused by light leakage 'even if it has static ;: shielding work: --------------------- order --------- line (read first Note on the back, please fill out this page) -29 491987

The shading pattern layer of the printed clothing printed by the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is also the pixel structure provided on the source bus line. As a result, the contrast ratio is greatly reduced. If the light in the light leakage area is shielded to prevent light leakage, the mirror-to-hole ratio is greatly reduced. The driver_integrated panel of this specific example uses a thin film transistor, each of which has polycrystalline silicon formed by promoting its crystal growth as an active layer. Therefore, in the extended pattern array XGA display, the frame conversion drive can be performed at 140 Hz recording, which is twice the normal frame frequency of 70 Hz. Therefore, in addition to preventing the leakage of light caused by the reversal of the electric field between adjacent pixels by performing frame conversion driving, the requirement of preventing flicker is also met by driving or operating at a frame frequency of 140 Hz. In addition, in this specific example, a light-shielding pattern layer 41 having an electrostatic shielding function is provided between the source bus line 42 and each pixel electrode 49. Therefore, combining the potential of the light-shielding pattern layer 41 with a specific potential can alleviate the effect of the capacitance between the source bus line 42 and the pixel electrode 49 to prevent vertical crosstalk. 5 &lt; The configuration of this specific example eliminates almost all the effects of the capacitance between the source bus line 42 and the pixel electrode 49. Therefore, even if the pixel size is 25 micrometers X 25 micrometers or less, the mirror aperture ratio can still be determined without increasing the pixel electrode 49-source bus line 42 capacitance relative to the storage capacitor. . That is, a small active-array-driven LCD device capable of displaying high-quality, high-definition images can be easily obtained. The pixel pitch is about 18 micrometers by 18 micrometers, and it is the best choice for projection systems. '(Brother π specific example) As mentioned above, the voltage and energy of the transistor breakdown of the data driving circuit -30- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) (Please read the back first Please note this page before filling in this page) -------- Order --------- line · 491987 Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (28) Consumption From a viewpoint point of view, the voltage of the display data (video signal) provided by the data driver is limited. Therefore, when horizontal line conversion driving is performed in an active matrix driving liquid crystal display LCD device, it is disadvantageous to apply an insufficient driving voltage to the liquid crystal, making it particularly difficult to achieve a high contrast ratio in a normal white mode display. In this specific example, the answer to this question is to provide a capacitance between the pixels adjacent to each other along the source bus line within a range of 0.5 to 10 percent of the storage capacitance. Therefore, the frame conversion drive of the double speed is performed. Fig. 7 is a diagram showing the configuration of the display pixel portion of the LCD device of this specific example. In this specific example, as in the first to third specific examples described above, a thin film transistor having a polycrystalline crystal formed by promoting crystal growth as an active layer and having a twice the speed of a polycrystalline silicon film transistor The system is applied to pixels, as in the first to third specific examples. After that, the pixel electrodes 5 1, 5 2 adjacent to each other via the gate bus line 54 are shaped and arrayed so that their opposite sides are kept at a specific distance d from each other. The specific distance d is a length of 15 percent or less of an inch of the pixel electrode 51 extending along the source bus line 59. In this way, the capacitance between the adjacent pixel electrodes 5 丨, 52 can be set to fully obtain the additional voltage Δν which will be described in detail below. The reference number 5 3 indicates a storage capacitor, 5 5 indicates a contact hole, 5 6 indicates a through hole, 5 7 indicates a metal pattern, and 58 indicates a pixel contact hole. The pixel pitch in the display portion having the foregoing structure is 8 micrometers x 8 micrometers' and the mirror hole ratio is about 53 percent. On the other hand, the mirror hole ratio of a conventional liquid crystal display LCD device having a pixel structure of the same size as π in FIG. 12 is about 42%. (Please read the notes on the back before filling this page) Order --------- line- -31-

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs as shown in the fourth and fifth specific examples. The liquid crystal display LCD device of this specific example is in the extended graphic array XGA display, and is driven by frame conversion at 14 Hz. It is twice as fast as the normal frame frequency of 70 Hz: By performing frame conversion driving, light leakage in the display state in normal white mode is prevented ... resulting in a decrease in contrast ratio. In addition, flicker is prevented by setting the picture frequency to 140 Hz. In the case of horizontal conversion driving, the effective voltage to be applied to the pixel electrode 5 becomes 2 relative to the display data voltage provided from the data driver (not shown), so the contrast ratio is reduced. On the contrary, when the frame conversion driving is performed, as described above, a capacitance having a proper size is provided between the pixel electrodes 51 and 52 relative to the capacitance of the storage capacitor 53 (including the parasitic capacitance generated by the liquid crystal and the pixel electrode 51). A voltage is provided to the pixel electrode 5 in the n-th column by adding the specific voltage ΔV shown in formula (1) to the voltage V data of the display data (video k number) provided by the data driver. Formation, as shown in Figure 8: △ V-V data (Pp) xCpp (Y) / (Cs + Clc + Csd + Cpp (Y) + Cgd) .... (1) Specifically, V data (P_P) Is the potential change of the pixel electrode in the (n + 1) th column. Only in FIG. 8, V data (PP) is the voltage between the maximum and maximum spikes of the display data voltage provided by the data driver. However, because the display data of the child is converted in the frame at the fixed level in FIG. 8, 7D is completely down. V data (PP) is regarded as the difference between the maximum peak and the minimum peak of the display data voltage. Voltage 値. In addition, as shown in FIG. 9, Cpp (?) Is a capacitance between the adjacent pixel electrodes 51, 52. It is the capacitance of storage capacitor 53, Clc is the capacitance of liquid crystal, and Csd is the source bus bar -32- This paper size is applicable to China National Standard (CNS) A4 (21〇x 297 mm) '- --------- Order --------- line (please read the precautions on the back before filling this page) Printed clothing for the staff consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 491987 V. Invention Description (30) The parasitic capacitance between the pixel electrode 51 and the pixel electrode 51 is a parasitic capacitance between the gate bus bar 54 and the pixel electrode 51. That is, the denominator of the formula (cs + Clc + Csd + Cpp (Y) + Cgd) is the sum of the storage capacitor 53 and its parasitic = capacity. As can be understood from the formula (1), when Cpp (Y) has a 适当 appropriately 适当 of (Cs + Clc + Csd + Cgd), a large Δv 値 can be obtained. For more specific explanation, Δν is added using the pixel electrode in the nth column. For example, if a voltage with a positive polarity is applied to the _th pixel, a voltage with a self-polarity is maintained on the (η + 1) th pixel electrode until a voltage with a positive polarity is applied to the (η +1) column of pixel electrodes. Therefore, the potential of the third pixel electrode is added to the positive polarity side via the Cpp (Y). Moreover, when a voltage having a negative polarity is applied to the -th pixel electrode, the potential of the n-th column pixel electrode is moved in the same manner but toward the negative potential side end. As shown in FIG. 1G, this specific property is a capacitor Cpp (Y) (= Cpp (Y) i + Cpp (Y) 2) between the adjacent pixel electrodes η, 52, and a phase storage capacitor 53 (capacitance. Has The relatively large coupling capacitance is because the distance between the adjacent pixel electrodes 51, 52 is small. In detail, Cpp (Y) is about ^, and (CS + ClC + CSd + CPP (Y) + Cgd) is about As a result of 20fFe, an additional voltage Δν of about 250 millivolts was obtained for V data (PP) = 5 volts. Result: If the liquid crystal display LCD device of this specific example uses the same liquid crystal as the conventional liquid crystal display 7F device LCD device Materials and the same component parameters (such as orientation film, orientation orientation, component thickness, etc.), the liquid crystal display LCD device of this specific example can provide a display with a contrast ratio and voltage lower than the conventional liquid crystal display 7F device LCD device by about 250 millivolts. The data shown is the same. Meal -------- tr --------- f Explanation ----------------------- (Please (Please read the notes on the back before filling out this page) -33-

This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Gongai 491987) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _____________B7__ V. Description of the invention (31) ^^ ^ As mentioned above, The driving integrated panel uses thin-film transistors each having a polycrystalline material as an active layer formed by promoting its crystal growth. Therefore, the XGA display array is filled with a picture frame and driven by frame conversion; It is twice the normal frame frequency of 70 Hz. Therefore, 'except to prevent the leakage of light caused by the reversal of the electrical field between adjacent pixels due to the frame conversion drive', it is driven at a frame frequency of 14 Hz. Or, to prevent flicker. In addition, in this specific example, the pixel electrodes 51, 52 adjacent to each other along the gate bus line 59 via the gate bus line 54 are arranged in an array at a specific interval d. The interval d is the length of the pixel electrode. The ratio is 100 or less. Therefore, when the pixel pitch is 18 micrometers X 18 micrometers as described above, about 1 fF can be obtained between adjacent pixels. The capacitor Cpp (Y) is obtained by applying a voltage to the pixel electrode 51, which is obtained by adding a voltage of about 25 millivolts I to a maximum voltage of 5 volts of display data. As a result, according to this In a specific example, a sufficient driving voltage is applied to the liquid crystal to obtain a high contrast ratio in a normal white mode display without sacrificing the pixel aperture ratio of the pixel. In particular, the larger the pixel size, the greater the effect. Yu Zhengwei In the micro-operation, the pixel interval is set at about 2 micrometers to 3 micrometers at a pixel size of 20 micrometers to 30 micrometers or less. Under this condition, the source bus line is extended in the orientation. The pixel interval is reduced to 5% _5% to get the appropriate additional potential and get the mirror hole ratio improved by this driving method. Of course, using pixels larger than the aforementioned range can also produce this effect ', and this specific example can be achieved In addition, according to this specific example, a low driving voltage and a high contrast ratio can be obtained at the same time. It is usually extremely difficult to improve -34- This paper size applies the Chinese National Standard (CNS) A4 specification (210 χ 2 97mm) -------- Order --------- line-win (please read the notes on the back before filling this page) _ ^ 1 ϋ · ϋ ϋ ϋ I ϋ n ϋ a— I · 1 ϋ ϋ n ϋ I ϋ 49 491987 Printed by A7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs -----______ V. Outline of Invention (32) ^ 'Liquid crystal material reduces driving voltage. Especially, because The reliability of the driving voltage reduction liquid crystal has an exchange relationship, so the driving voltage reduction effect produced by this pixel structure is extremely great, because the reliability of the liquid crystal can be avoided. In this specific example, by adjoining the pixel electrode 51, The distance between 52 is set to 15% or less of the length of the pixel electrode 51. The adjacency image = the capacitance between the electrodes 5 1, 5 2 with respect to the capacitance c &amp; of the storage capacitor 5 3 is obtained appropriately. However, when the size of the pixel is large, so that pixel-to-pixel storage = large interval, or when the capacitance Cs of the storage capacitor 53 is high, the conductive light-shielding layer of the metal layer connected to the drain line 61 of the thin film transistor 60 . It is overlapped with the pixel = pole 51 and its adjacent pixel electrode 52 at the same time, with an insulating thin layer (not shown) interposed therebetween, as shown in FIGS. 7 and Η. By using the overlap of the light shielding layer 62 and each adjacent pixel electrode 51, 52, a large capacitance Cpp (Y) can be obtained between the adjacent pixel electrodes 52, 52. In this specific example, between the adjacent pixel electrodes 51, The capacitance Cpp (Y) between 2 is within the range of not less than 0.5% of the storage capacitor 53 but not higher than 10% as needed. This: Cpp (Y) is lower than The percentage of the capacitance Csw05 of the storage capacitor 53 = the helmet method to obtain a sufficient additional voltage Δν for the voltage v data of the display data. And =, use a capacitance CPP (Y greater than 10% of the capacitance of the storage capacitor 53 (^ ), The change in the electrical gCpp (Y) between the pixel electrode 51 and μ results in: a change in the voltage AV, and finally shows fluctuations in the transmittance of the liquid crystal. Next, a case is described by the embodiment, in which an active-array-driven liquid crystal display The structure of the data driver of the LCD device is based on the horizontal scanning circuit &lt; output control, and the analog signal is used to keep the video signal in the source sink in order. The paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm). — Order --------- line (please read first (Please read the notes on the back and fill in this page again) -35- 491987 A7 Printed on the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (33) Among the capacitors of the stream line, the drive system is performed by a method, where The f-frequency signal is divided into multi-phase signals after the transmission frequency is reduced, and then provided in parallel, that is, the multi-point instant sampling driving method of point-sequence driving. The sum of FIG. 13 is 1 (where n is the number of instant sampling). An example of a display drive system has two sample-and-hold circuits 72, 73 for each of the colors &amp; (red), G (green), and b (blue), only representatively shown for R color data driver 74. Two color analog video signals from R, G &amp; B output from D / A converter 71, the R analog video signal is input to the sampling_and_holding circuit 72:73 After the heart, as shown in Figure 15A · 15 (:, this analog signal is sampled by 6 points using two sampling-and-hold circuits 72, 73, for a total of 12 points, and held for a period of 12 points. After that, the The signals are derived from the sampling and holding circuits 72, 73 in 1 2 parallel The data is outputted in the form of data and provided to the R color data driver 7. The 12 parallel data in the R color data driver 74 are simultaneously transferred by the twelve analog switches 76 to the twelve source bus bars 77. This open relationship Turning on and off in synchronization with the scanning signal pulse derived from the horizontal scanning circuit 75 is performed by the shift register, as shown in Figure 16. After that, the foregoing operation is repeated. The operation of the data driver is performed in this way. As described above As mentioned above, in the multi-point simultaneous sampling driving method, the sampling operation is performed on a section, that is, a plurality of lines are taken as a section. As in the aforementioned multi-point simultaneous sampling driving method, multiple lines (ie, multiple pixels) are used as a section. When sampling is performed based on the section, if horizontal line conversion driving is used, the problem of capacitive coupling occurs, that is, adjacent to each other. Between the pixels, there is a coupling capacitor C 〃, 寸, and mesh size along the gate bus line. -36- This paper size applies to China National Standard (Cns) A4 (210 X 297 mm) -11 H ϋ (Please read the notes on the back before filling this page) -I- n βί Thread A7

In the sampled pixel segment and the subsequent simultaneous sampled segments, the holding position fluctuations of adjacent pixels are formed, and the fluctuations form a vertical stripe form. The reason is that in this horizontal line conversion drive, only the pixel potential of the pixel electrode at the end of the sampled pixel segment is affected by the potential of the source bus line of the pixel and subsequent sampled pixel segments. Capacitive coupling or capacitive coupling with the combined source busbars changes significantly to the opposite sign. However, in the foregoing specific example, frame conversion driving is performed. Therefore, even if a data driver and a driving method having the same structure are used, the potential variation of the source bus line and the pixel electrode in contact with the simultaneously sampled section and the subsequent sampled pixel section is suppressed to prevent streaks. Therefore, the display quality can be greatly improved. Thus, the present invention is described, and obviously, it can be changed in many ways. The 'crossing' is not considered to deviate from the spirit and scope of the present invention, and all such modifications known to those skilled in the art are included in the scope of the following patent applications. Reference number list 11: insulating substrate 12: a-Si film (polycrystalline Si film) 1 3: gate oxide 14: question electrode 15, 31, 43, 53: storage capacitor 1 ό: planarization film 1 7, 3 3, 4 5, 5 5: Contact hole 18 '35' 47, 57 ·· Metal pattern (write) -37- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)- ------------ Φ f, please read the precautions on the back before filling this page) Order --------- line IAW ---- Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative Printed clothing 491987 A7 _B7_ V. Description of the invention (35) 21, 34, 46, 56: through hole 2 2: light shielding film 2 3: intermediate layer insulator 24, 36, 48, 58: pixel contact hole 25, 37, 49 51, 52: Pixel electrode 26: Data driver 2 7: Gate driver 28: Liquid crystal display LCD area 29: Driver-integrated panel 3 2, 4 4, 5 4: Gate bus bar 4 1: Light-shielding pattern Layer 4 2, 5 9: Source busbar 6 0: Thin-film transistor 62: Light-shielding layer -------- Order --------- ^ (Please read the precautions on the back first (Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -38-Paper Scale applicable Chinese National Standard (CNS) A4 size (210 X 297 mm)

Claims (1)

2 Printed clothing by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs = moving array-driven liquid crystal display circuits and display areas are difficult to recognize ^ /, A drive is in the circuit and display area ^ each board 'included in the driver by borrowing Promote the junction: Health: = film "body has-active layer, made by a king of polycrystalline silicon, where the jtr actuator circuit 'at a frequency of about Hertz or higher: ten thousand. The liquid crystal display LCD device with the same characteristics is intact but will have the inconsistent item 1 of the patent scope, in which the common line of the 汇 pole busbar and the auxiliary capacitor are arranged in parallel and spaced from each other, and J1 is at the gate The pole bus line and the auxiliary capacitor share the same pixel interval to form a liquid crystal display LCD device that can be used to display a light-transmitting portion π, which is similar to the page of the patent application. The driver circuit includes a data driver, and The liquid crystal display: The CD device further includes an electrical shielding device located between a source bus line and the pixel electrode, and the source bus line will come from the data driver. It is provided to each pixel electrode of the display area. For example, the liquid crystal display [CD device of the first patent application range, wherein the driver circuit includes a data driver, which performs dot-sequential driving 'to sample multiple parallel data at the same time. For example, the liquid crystal display LCD device of the first patent application range, wherein the pixel array pitch in the M display area is about 25 micrometers X 25 micrometers or less. -39 · This paper has been oversized by the Chinese National Standard (CNS) A4 specifications (21G X 297) -------- ^ ---------%! (Please read the notes on the back before filling this page) I -------, H ϋ I ϋ ί ϋ ϋ ϋ ϋ ϋ H ϋ n _, applied for patent scope 6. 7 A8 B8 C8 D8 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 9. For example, for the liquid crystal display LCD device of the fourth scope of the patent application, the data I is not in accordance with The point clock to be bluffed by the original data displayed by the data driver is changed to 2 megahertz or higher per data. A king motion array driven liquid crystal display LCD device has a driver circuit and a display area, wherein the driver circuit is operated to write data with the same polarity to all pixels of a whole single frame screen based on time, but will have different The polarity data is written to different frames adjacent to each other, and a capacitor is provided between adjacent pixel electrodes along the source bus line in the display area, and the capacitor includes an electrode interposed between the adjacent pixel electrodes Capacitors and / or capacitors generated by the conductive light-shielding layer and the adjacent pixel private electrode, the conductive light-shielding layer is connected to the thin-film private egg foot drain, and is disposed below the adjacent pixel electrode with a sandwich between them. With an insulating film. For example, the liquid crystal display LCD device of the seventh patent application range, where A is between the pixel electrodes adjacent to each other and the source bus line is extended and oriented ^ is the length along the source bus line of the pixel electrode About 15% or less to obtain the inter-electrode capacitance between adjacent pixel electrodes. For example, the liquid crystal display LCD device of the seventh scope of the patent application, in which the 3 display 7F area has a storage capacitor for each pixel, and is located between adjacent pixel electrodes and extending in the source bus line. Capacitance is between no less than the storage produced by the pixel electrode -40 · -------------------- Order --------- Line—AWI (Please read the notes on the back before filling out this page) The private paper scale applies the Zhongguanjia standard (^^ _ 4 (2; X 297 mm) 491987 Patent printed by A8, B8, C8, and D8 of the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs The range capacitance includes 0.5% of the parasitic capacitance, but not higher than 10%. • — I ---- I ------ I ------ order · -------- I. (Please read the precautions on the back before filling this page) ----------------------- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)