TW478087B - Automatic control test system - Google Patents

Abstract

A kind of automatic control test system is disclosed in the present invention. The test system contains a test machine stage, a memory, and a procedure controller. The test machine stage is used to test a semiconductor wafer having plural chips. A test termination standard of the semiconductor wafer is stored in the memory. When the test machine stage sequentially tests these chips and gradually expands the test results, the procedure controller examines the test results. When the test result fulfills the test termination standard, the procedure controller makes the test machine stage stop the test, and outputs a corresponding status signal on a display. Once the test termination standard is appropriately set to represent the condition that there is a problem in the test result, as the test result generated by the test machine stage fulfills test termination standard, the procedure controller forces the test machine stage to stop the test action. Therefore, the production of even huge test results possibly having problem can be avoided. Furthermore, the possible problem of test machine stage itself can be solved early so as to increase the work efficiency of the test machine stage.

Description

478087 V. Description of the invention (1) --------- = Ming is related to-a kind of test system for semiconductor wafers, especially an automated control test system. With the evolution of management control, f 10 W) control has mostly been the same, the job of a program controller. The corresponding process flow of the central server. Through the current status of a batch of wafer cassettes in time, the results of each process step are more advanced, and the central server can correspond to the program to a wafer cassette. However, to test the semiconductor wafer test flow (testi ng f 1 〇w) But control methods. The corresponding test program name of a chip box is recorded on the run card. After the on-line display is completed at the designated test machine, the operator will test the station according to the instructions on the record card. Test card-based test flow 1 · Record cards are just similar and are often easily lost. Once lost, the work of the former test station wasted 2 · The test results are just records

Semiconductor wafer process flow (process P central server (server) for each batch of wafer box (lot) built-in central server, the operator knows every process step that should be continued. The same can also be stored in In the central server. To make a process machine automatically perform a phase of the steps that should be performed. The wafers produced on the circle are still mainly at the test station, test machine, and the paper record-based experience. A Ji operator affixed to the chip box performs the test according to the test program of the finger on the record card. The test results are recorded on the record card, and then the chip box is sent to the next test.

The control method of the process has the following disadvantages: · The paper is generally stuck on the wafer box, but the next test station does not know why, because the test results are missing; and on the record card, the engineer needs to analyze

V. Description of the invention (2) When testing the result of formula 5, it is often necessary to find thousands of boxes of ^ pieces, and then they can be posted on their own: finding what is in the box is very "complicated and difficult. Recording cards, getting Pass: There are many difficulties encountered in the process and test process. For example, it depends on whether the test stream has a mark of 1 ^ \ ge). It is a good probe on the record card. If F asked Jing, he would continue to test H of the H species at the test station. If there is no record, the continued worm said that the suspension of H species, visual inspection, and has not been resolved. The operation did not appear in the process flow, of course. -Set: Ϊ is issued for the characteristics of the test process, providing Seoul, Yuan to solve the above problems. Contains ί ::? Automatic control test system. The test system package is used to make a good book I, 圯Memory and a process controller. The test machine Erfeng has a semiconductor wafer with a plurality of wafers. The memory stores one test stop standard. When the test machine sequentially tests == π 'and gradually expand a test result, the process controller checks Two system cry I ί :. Second, if the test result meets the test stop standard, the process ^ π σ ^ 'then the test machine stops the test and outputs a corresponding status letter on a display. The test result Stored in the memory for easy retrieval by engineers, or displayed on a monitor display. The test system also includes a monitor display, which is controlled by the process. Page 5059-6074TW; 89115; Edward.ptd 478087 5 3. Description of the invention (3) The device has another test machine status stored in the memory, which can be displayed on the monitoring display. U The memory process, the semiconductor is tested. When the semiconductor wafer system is stored in the test According to the corresponding one of the test circles, the test flow process in the plurality of test machines is inconvenient due to an operator's specific way of memorizing the main power flow controller of the recording card of the present invention within the semiconductor wafer. The invention may indicate that the test result of the test is consistent with the larger test body of the test machine. The possible problem is to make a comparison between the following: The record card has been able to record the test process and the memory to complete. There is an advantage, as long as the result is problematic, the test stops the standard test action, and the test result is on the one side. In the best embodiment, and in conjunction with the suspension, the process controller uses a wafer number in the memory to become an unnecessary item. Both the test results and the test results have been taken. Therefore, there will be no appropriate due to the record card. Set the test stop standard condition. Once the test machine is generated, the process controller will forcibly stop the surface to avoid manufacturing. There may be problems that can solve the working efficiency of the test machine as soon as possible. 1 The characteristics and advantages can be more obvious and easy to understand. As a simple explanation, the detailed description is as follows: Figure 1 is a schematic diagram of the test system of the present invention;

0593-60741 ^; 89115; Edward.ptd

$ 7 pages

478087 V. Description of the invention (4) Figures 2A to 2C are schematic diagrams of the cassette information in Figure 1; Figure 3 is a schematic diagram of the test result Resu 11 1 in Figure 2C; Figure 4 is FIG. 1 is a schematic diagram of the content of the test machine message; and FIG. 5 is a flow chart of a wafer cassette testing on a test machine according to the present invention. Explanation of symbols: 1 0 ~ process controller; 1 2 ~ test system; 1 4 a, 1 4 b, 2 4 ~ terminal computer; 16 ~ test machine; 1 8 ~ memory; 20 ~ chip box message; 22 ~ Test machine message embodiment: Figure 1 is a schematic diagram of the test system of the present invention. The test system 12 of the present invention includes a process controller 10, which can be constituted by a server ', and is mainly responsible for controlling and controlling the test process of all wafer cassettes and accessing test result data. The test machines 16a, 16b, etc. are responsible for testing the semiconductor wafer 'and pass the test results to the process controller. The terminal computers 丨 4a, 1 4b ′ are used to input instructions to the process controller 丨 〇 or to display messages transmitted by the process controller 10 on the display of the terminal computer. Generally speaking, a terminal computer is placed near each test machine to facilitate the interaction between the operator and the process controller 10, such as terminal computers 丨 4a and 丨 4b. There are also terminal computers placed outside the test room. For example, terminal computers 2 and 4 may be placed.

478087 V. Description of the invention (5) It is placed in the office of the test engineer, so that the engineer can check the status of the chip box or the test machine through the process controller 10. The memory 18 is coupled to the process controller 10, and mainly stores the chip box information (101 informat ion) 20 and the tester information (tester inf or mation) 22. Figures 2A to 2C are the first Schematic diagram of the cassette message in Figure 1. The cassette message should contain information about the present, past and future of a cassette. Figure 2A shows the current information of a chip box AA. For example, the product name of the chip box AA is Product X, which is currently located at the test station TestOpl and is being tested on the test machine T e s t e r 1. The test status is stopped (h ο 1 d). Figure 2B is the test process that the chip box AA should go through, which means the test process diagram of Product X. This test path is stored in the memory 18, similar to the conventional record card, and describes that the chip box AA should enter the test station TestOp 1 and TestOp 2 in sequence. The test station of the test station TestOp 1 is Tester 1, test program It is Recipe 1. The test stop criterion is Crit ter ia 1. The test stop criterion is the basis for judging that the test results may be problematic when testing the wafer cassette, which will be explained in detail later with examples. Figure 2C shows the wafer cassette history of wafer cassette AA. The cassette message 22 should contain the history of the past cassette and the related results, as shown in Figure 2C. The chip box AA passed the test stations TestOp 1 and Test Op 2 successively. At the test station TestOp 1, the chip box AA is in Tester 1, and the test program Recipe 1 is used for testing, and the test result Resuit 1 is obtained. And so on. Figure 3 shows the content of the test result R e s u 11 1 in Figure 2 C.

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The main purpose of the wafer box test is to know the yield of each wafer. As shown in Figure 3, γ and Y2 represent the wafer yields of the semiconductor wafers W1 and W2, respectively. After the test is complete, you can know whether each chip is functional or non-functional. Moreover, if it is unavailable, we also want to know why it is unavailable, which may provide a reference for process improvement. And different results often have different codes, not 'this is called Bin number, for example, 00 means a good chip, and 〇1 means a chip with short-circuited I / O ports. As shown in FIG. 3, after the semiconductor wafer W1 has been tested, the codes of the chips Chi p 1 and Chi p 2 are b i η 11 and B 1 η 2 2 respectively. Figure 3 also shows that the probe test card used to test the semiconductor wafer w 丨 is Card i, while the semiconductor wafer W2 is used

Card 2. In order to avoid the failure of the test caused by the failed test, the process of the relative position of the semiconductor crystal can be used to place the wooden needle test card. Therefore, it is often required to stop and use the microscope to visualize the pressure of the probe. Whether the position of the mark is correct. The present invention places this pause in the operator controller 10. As shown in Figure 3, circle W1 was paused. Automatically and clearly recorded in ^ Test 1 is bad, resulting in some personnel to confirm the probe on several and a half test cards. After confirming that there is no error, the semi-stop action of the test is recorded in the semi-stop index stop. Therefore, the operator should remember the 18th. Figure 4 is the first machine message 22 when the cassette should be broken. When the broken test conductor wafer continues to be bonded to the wafer, the conductor wafer indicates the test. The test machine message in the inspection chart includes all tests. Schematic diagram of the content of the machine. Little,, the current status of the test bench i i

The table in Figure 4 shows that the test machine test program is 1 ~ bait mouth lester 1 is taken close to the state of the test is π e e wafer box tested is 88, the current machine △

Rec ;: Test bench " Test program recently executed: 2, The tested wafer box is βB, the current state of the machine Θ's 5 # is based on the present invention, a wafer box is tested on a test machine If fg is not washed, when a wafer box is to be tested on the tester Tester ^, the operator first goes to the terminal computer 14a to inform the process

The $ system is 1, and the tester Tester i will start to test the movement of a certain wafer box, which is 1 mVe 1 n (symbol 30). The flow controller 1 0 can know from the chip box message 20 in Y = 20 which 'shell > / 1 private type should be selected for the chip box and display the test program on the screen of the terminal computer 1 4a (Tiger 3 2). By this, the operator knew the test program, and then went to the tester Tester i (16a) to select the test program (symbol 34), and sent the wafer box to the tester Tester 1 (16a) for testing. Tester 1/1 6a) starts a test from one of the semiconductor wafers in the cassette (Symbol, 36) 'and establishes a test result (Symbol 37). The test results can be displayed on the screen of the terminal computer 14a. The process controller 丨 〇 will constantly monitor = test results. When the test result does not meet the test stop of the test station $ on time (No path of symbol 40), continue to test more wafers or more f semiconductor wafers (sign 42). As more wafers are measured, the results of this test are continuously expanded (symbol 38). When the test result meets the test and the stop test of the station (symbol 40 iYes path), the flow controller will terminate the test execution of the test machine (symbol 44) and output a relative

478087

V. Explanation of the invention (8) The prompt should be displayed on the screen of the terminal computer 14a (the symbol can perform the next due action according to the prompt #, the operator will be at the station and call the test engineer; move;; = Stop the wafer cassette test (symbol 48). The test of the wafer cassette has a feature of the present invention: the judgment is not completed until the test is completed, and the invention can be based on the current action. Need to wait for the entire wafer (Wafer) to work. When the test results of the test of several wafers (Ch ip), judge the follow-up should be Table 1 for several test stopping standards provided by the present invention and their corresponding actions. ^ Tibuli Stopped Samples — Due Action Y The average yield of the wafer cassette is less than 60% Stop the wafer cassette Η The yield of the first 3 semiconducting wafers is less than 70% Stop the wafer cassette D probe If the test card has a bad contact, stop the test and notify the test engineer. If the semiconductor wafer yield is less than 30%, stop the semiconductor wafer. The test result is uncertain. Notify the engineer and retest the wafer box. Different test station, the test stops the same standards may not be in accordance with the characteristics of the product and test the machine to be changed and more. Data in memory 18 the stored can be changed in accordance with the requirements,

478087 V. Description of the invention (9) is not limited to the description in Figures 2A to 4. The invention has the following advantages: 1. The current status of each wafer cassette and each test machine is immediately recorded in the memory 18, which can be appropriately displayed on the screen of the terminal computer through the process controller 10. Very convenient for engineers or operators to query. Almost all the functions of the recording card can be eliminated. In the previous technology, the programmer can work in a batch of wafers in the wafer box. It is very unusual to test the wafer box of the test machine. In addition, the test staff is testing the semiconductor rate by the outside world. The box is the semiconductor test result of the convenient test result into the test station'—and the shutdown efficiency result is the end result of the empirical test. The engineer will automatically provide the test, and it is not necessary to start the display when the wafer is not finished. At the same time, the process is not enough and the process device 10 and the memory card are easily lost, or the computer (such as the first (24) in the picture, it is not necessary to enter the test factory, and the engineer prompts the test results. After the test is completed, it will act. Use the chip to determine the event and measure the action. Uncertainty and waiting 3. Workers know each batch of processing engineers 4. Each memory 1 8 software, right 5. The device 1 0 is broken as a whole batch. Therefore, the display is appropriate for the test injury. It is to avoid operating the test station. Even chemical analysis. Immediate, intermittent monitoring, complete testing, complete abnormal tests, and avoidance of false pauses caused by the controller. All records are recorded in the process control results can be written, and judgements can be made immediately, so unnecessary judgments are provided. , Can happen. Clear and

4/8087 V. Description of the invention (10) Automatically recorded in. When the operator, it can be avoided 7 · Reduce the number of paper cards on the card. Therefore, the operation of the test machine is not limited to the present invention, but in any scope, it can be viewed in the memory attached to the video. A moment of negligence prevents the engineer from fully performing the work of the staff or monitoring, etc. To better implement the technology and do a little more, apply for a patent model. So, fabrication of the test results, the amount of work by the process will be more In order to expose the artist again, the boundary between the movement and the run can prevent the net from detecting the misjudgement of movement and fruit. The controller 10 is greater than the reduction of the above things, but it does not leave the decoration. Therefore, the method of recording card shall prevail. Record. Same situation. The test results are recorded in the record and taken from the 5th memory 18 and can be focused on the measurement 〇 It is not intended to limit the spirit of the invention and the scope of protection of the invention

Claims (1)

6. Scope of patent application1. A test machine, memory, and process control are gradually expanded and a test is stopped. The test result is stopped if the application is stored in the result. 3. If the application body has a test number of 4. The system also moved the console to "storage the controller, test results are combined with the test" and enter the patent model memory patent model type 5 flow table into the 5 · system separate storage another 6. If you apply for a test machine to be operated s Ji Yi the semiconductor 7. If the application contains a crystal result package 8. Lift the test machine if the patent application includes a monitor If the patent application includes a test for one half of the patent for the tester and the patent for the wafer fan Fan Yuanliang The test system for conducting semiconductor wafers includes: testing a semiconductor wafer with a plurality of wafers, the test stop standard for the semiconductor wafer; and when the test machine sequentially tests the wafers, The test result is checked, in which, when the test is stopped, the process controller causes the test to display a corresponding indicator on a display. The test system surrounding item 1 is in the test. The test system according to item 1, wherein the memory ′ and the semiconductor wafer are tested in accordance with the test process. The test system according to item 1, wherein the test display is used to display the test result. The test system surrounding item 1, wherein the test display, and the state of the memory table can be displayed on the monitoring display by the flow controller. The test system surrounding item 1, wherein when the test is suspended, the process controller uses a specific method—the wafer number in the memory. The test system around item 1, wherein the test 0 control method includes: 15 ′ includes a plurality of chips; Page 15 11 478087 VI. Patent application scope Provide a test machine; provide a process controller; provide a memory containing a standard of 4 semiconductor wafers; and sequentially test the wafers with the test machine With a test result and the process controller to check the test result, when the test result meets the test stop standard, the process controller stops and outputs a corresponding indication on a display 9 · If the scope of patent application The flow control method of the eighth item: The semiconductor wafer is tested by several test machines, and a number of results are generated, which are stored in the memory. 10 · If the process control method of item 8 of the patent application scope, the method further includes a step: providing a test process corresponding to one of the semiconductor wafers, in a record. … "Please refer to the method of flow control of item 8 of the patent scope: when two gamma stations are suspended by their operators for a test, the stream records a pause action based on the test results. The test stops gradually expanding, and the test is performed on the device. I In the test, the test result is stored in the memory. When the controller records 0593-6074T1V; 89115: Edward.ptd page 16