503506 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（， 發明領域： 本發明係有關於測試製程所使用的方法，特別是有關 於自動下載測試程式的方法。 發明背景： 在半導體製程上’主要可分成積體電路（Integrated503506 Printed A7 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (, Field of Invention: The present invention relates to the method used in the test process, especially to the method of automatically downloading the test program. Background of the Invention: In the semiconductor process上 'can be divided into integrated circuits (Integrated
CirCUU ’簡稱 IC)設計、晶圓製程（Wafer Fabrication)、晶 圓測減（Wafer pr〇be)、及晶圓封裝。其中，晶 圓K係對B日片上的每個晶粒（叫）進行針測，在檢測頭裝 上以金線製成細如毛髮之探針(Pr〇be)，與晶粒上的接點 (Pad)接觸’測試其電氣特性，不合格的晶粒會被標上記 號，而後當晶片依晶粒為單位切割成獨立的晶粒時，標有 記號的不合袼晶粒會被淘汰，不再進行下一個製程，以免 徒增^成本。晶圓測試的完成，主要是仰賴一組可偵測 1C功此疋否正常的程式，輪入機台後讀取相關訊號，來判 定功能是否正常的過程。 在晶圓測試製程的測試主機伺服器中，係包含了相當 多種測試機台所適用的測試程式，例如，不同的晶圓產： 需利用不同的測試程式來測試，或者相同的晶圓產品在y 同版本下，也有可能用到不同的測試程式，甚至，晶圓完 私紙張尺度顧中關家標準(在―祕（21〇 X if 公釐） I------—— 1·&--------訂.------------S (請先閱讀背面之注意事項再填寫本頁) A7 五、發明說明（） $不同步驟後測試所使用的測試程式都有可能不一樣。另 ’位於測試機台底下用來移動晶圓的探測器，也需要利 用另一測试程式來控制’由於晶圓之晶粒尺寸的不同，而 需要輸入不同的程式才能移動至正確的位置以進行測試。 而一㈣試機台與探测器中，並不具有測試程式，必須利 人藉由輪入才曰彳，以從測試機台飼服器中下載所需的 晶圓測試程式。 ^ 、，日日圓批人係由操作人員由晶圓批號與流程控管系 、:來判定下一步所要進行的製程。晶圓批次在送到測試機 I後：係由操作人員依據所要進行的測試製程，在測試機 台中輸入程式名稱。因此，測試機台與探測器會由測試機 台伺服器中下載所鍵入的程式名冑。在測試機台與探測器 下载私式的期間，操作人員會先去處理其他晶圓批次，經 過:段時間後，再回到測試機台去觀察測試程式是否已下 ^疋成#著’操作人員再按下啟動鍵，測試機台與探測 器才開始進行晶圓批次的測試步驟。 由於測試程式數量繁多與名稱接近，因此，利用人^ 的方式來下達指令，即有可能發生下载錯誤程式，而導至 必須重新進行測試的情況，更嚴重的會.造成較脆弱的產占 無：經二次測試而損毀。另外，由於各個測試程式的大乂 不一，下载的時間也不相同，因此如果操作人員估錯時間， ^紙張尺度適i中遍⑽Χ 297公髮τ (請先閱讀背面之注意事項再填寫本頁)CirCUU ’is referred to as IC) design, wafer fabrication, wafer profiling, and wafer packaging. Among them, the wafer K is a needle test for each die (called) on the B-day slice, and the detection head is equipped with a gold wire made of a hair-like probe (PrObe), which is connected to the die. Point (Pad) contact to test its electrical characteristics, unqualified grains will be marked, and then when the wafer is cut into independent grains in units of grains, unmarked grains will be eliminated, The next process will not be carried out, so as not to increase costs. The completion of the wafer test mainly relies on a set of programs that can detect whether the 1C function is normal or not. After turning into the machine, the relevant signals are read to determine whether the function is normal. The test host server of the wafer test process contains a variety of test programs applicable to the test machine, for example, different wafer production: different test programs need to be used to test, or the same wafer product is used in y Under the same version, it is also possible to use different test programs, and even, the wafer standard paper standard Guzhongguanjia standard (in the "secret (21〇X if mm) I ---------- 1 · & -------- Order .------------ S (Please read the notes on the back before filling out this page) A7 V. Description of the invention () $ Test institute after different steps The test programs used may be different. In addition, the detector that is used to move the wafer under the test machine also needs to use another test program to control the 'input needs to be changed due to the different wafer size. Different programs can be moved to the correct position for testing. However, there is no test program in the test machine and the detector, and it must be turned in by the people to get out of the test machine feeder. Download the required wafer test program. ^, Japanese and Japanese yen approved by the operator Wafer batch number and process control system: to determine the next process to be performed. After the wafer batch is sent to test machine I: The operator enters the program name in the test machine according to the test process to be performed. Therefore, the tester and the detector will download the program name entered in the server of the tester. During the private downloading of the tester and the detector, the operator will first process other wafer batches. : After some time, return to the test machine to see if the test program has been executed. The operator then presses the start key, and the test machine and detector begin the test step of the wafer batch. The number of test programs is close to the name. Therefore, using the human ^ method to give instructions may download the wrong program, which leads to the situation that the test must be re-tested, which will be more serious. It will cause more vulnerable production to occupy: It was damaged after two tests. In addition, due to the differences in the test programs, the download time is also different, so if the operator estimates the time incorrectly, the paper size is moderate. ⑽Χ 297 male hair τ (Please read the notes and then fill in the back of this page)
裝--------訂--------- 州506 、 發明說明（） 或者因其他事情而耽擱遺忘 與資源。 “會浪費許多測試時間 發明目的及概述： 鑒於上述之發明背景+ 令，除了有可能發生下載錯誤#:用人工的方式來下達指 測試的情況’另外，也有可能心;;：：致必領重新進行 而造成時間與資源的浪費。 耘式的時間誤判，可一—、—有 因此，本發明的目的之—係提供一 式的方法’讓測試機台與探測器可以自載測试程 確測試程式。 载要使用的正 經濟部智慧財產局員工消費合作社印製 根據以上所述之目的，本發明 ,^ _ .. , ^ 圾供自動下載測試程 式之方法，包括·進行一條碼讀取步驟 _ , 1系利用一條碼讀 取機刷取一晶圓批次之一條碼，藉 便传一執行管理系統 (Run Manager)可得知晶圓批次之批號；机，進仃一第一資料下 載步驟，藉由執行管理系統由一 %程控管系統 (Manufacturing Execution System ; MES、~r 也 7 r戰晶圓批次之數 個製程資料，並使得一設備主機伺 · 〜u 版器（Equipment Server ; EQS)可得知晶圓批次之製程資料；進行一資料傳 羲 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐） 503506 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（） 送步驟，藉由設備主機伺服器所獲得之製程資料，將晶圓 批次所適用之一測試設備之至少一測試程式之一名稱，傳 送到測試設備中；進行一第二資料下载步驟，藉由測試設 備’以從一測5式機台伺服器（Test Server)中下載具相同名稱 之測試程式；以及，進行晶圓批次之測試。 本發明自動下載測試程式之方法中，上述之晶圓抵欠 係位在一晶圓閘（Cassette)中，而條碼係位在晶圓閘外。上 述之測試設備係可由測試機台（Tester)與探測器（Pr〇b0)所 組成，而上述之執行管理系統係用來做為該流程控管系系 與該設備主機伺服器之間的連線。另外，本發明自動、' 測試程式之方法，更包括在上述進行資料傳送步驟之後载 進行一查核步驟，係由設備主機伺服器對測試設備之， 與製程資料進行比對，藉以查核測試設借θ X 2 種類 、又谓疋否可用來 晶圓批次之測試。並且，更可在上述進行 乂布一貝料下截 步驟之後，進行一第一訊息傳送步驟，卷糾μ ^ 田測武程式下翁& 畢後，使測試設備通知設備主機伺服器。 ^ ^ 70 ° 。再接著進行一笙 二訊息傳送步驟，由設備主機伺服下、去& 第 W Γ建執行測試之於 令。 9 利用本發明自動下载測試程式之方、本 >云，可由設備 伺服器來掌控測試程式的下載與執行。如此一 a 王機 人工輸入的錯誤，並可節省許多測試資源與時^^避免 任積體 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------I-------------訂-------- (請先閱讀背面之注意事項再填寫本頁) 503506 A?Install -------- order --------- State 506, invention description () or delay forgetting and resources because of other things. "A lot of test time will be wasted. The purpose and summary of the invention: In view of the above-mentioned invention background + order, in addition to download errors may occur #: Manually issued instructions for the situation of the test 'in addition, it is also possible ;; :: It is a waste of time and resources to re-run. The hard time misjudgment can be-one, the other. Therefore, the purpose of the present invention is to provide a method to allow the test machine and the detector to self-test the test process. The test program is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. According to the above-mentioned purposes, the present invention provides a method for automatically downloading a test program, including reading a code. Step _, 1 is to use a code reader to brush one barcode of a wafer batch, and then pass an Run Management System (Run Manager) to know the batch number of the wafer batch; In the data downloading step, a manufacturing process management system (Manufacturing Execution System; MES, ~ r, 7r, and 7r) and several wafer batches are processed by an execution management system. u version server (Equipment Server; EQS) can know the process data of wafer batches; carry out a data transfer, this paper is again applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 503506 Intellectual Property of the Ministry of Economic Affairs A7 B7 printed by the Bureau ’s Consumer Cooperatives V. Invention Description () Sending steps, using the process data obtained by the equipment host server, transmits the name of at least one test program of one of the test equipment applicable to the wafer batch To the test equipment; perform a second data downloading step to download a test program of the same name from a test server of a type 5 test server by the test equipment; and perform wafer batch test In the method for automatically downloading a test program according to the present invention, the above-mentioned wafer debt is located in a wafer gate, and the barcode is located outside the wafer gate. The above-mentioned test equipment can be tested by a tester (Tester). ) And the detector (Pr0b0), and the above-mentioned execution management system is used as the connection between the process control system and the device host server. In addition, the present invention automatically, ' The method for testing the program further includes a check step after the above-mentioned data transmission step. The device host server compares the test equipment with the process data to check the test settings by θ X 2 type, also known as疋 Whether it can be used for wafer batch testing. Moreover, after the above-mentioned step of cutting the cloth and shell material, a first message transmission step can be performed to correct the μ ^ Field Test Wu Chengxia Weng & After Make the test equipment notify the equipment host server. ^ ^ 70 °. Then proceed to a message transmission step, the equipment host servo, go to & 9 Using the present invention to automatically download the test program, the > cloud, the download and execution of the test program can be controlled by the device server. Such a manual error of Wangji can save a lot of testing resources and time ^^ Avoid any accumulation of this paper and apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------ I ------------- Order -------- (Please read the precautions on the back before filling this page) 503506 A?
圖式簡單說明： 本發明的較佳實施例將於往後之說明 m ^ ^ Ah M . -fcf » 予中 圖形做更詳細的闡述，其中： 辅以 下列 第1圖所繪示為本發明自動T載測試程 立向 χ之方法的架 構示意圖。 圖號對照說明： 10 測試機台伺服器 12 測試機台 14 探測器 16 執行管理系統 18 設備主機伺服器 20 電腦 22 條碼讀取機 經濟部智慧財產局員工消費合作社印製 發明詳細說明： 鑒於習知測試製程係利用人工的方式來下達指令，有 可能發生下載錯誤程式，而導致必須重新進行測試的情 況。或者，由於重複測試而造成較脆弱的產品損毁，而浪 費許多測試時間與資源。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） * < 1 --------^--------- (請先閱讀背面之注意事項再填寫本頁) A7 五、 B7 發明說明（ 因此本發明係提供一種自動下載測試程式之方法，以 決習知製程所造成的缺點。首先，係、先針對在本發明自 =下載測試程式之方法所需使用的設備與系統，逐一說 =^日圓批次-般係、存放在庫房（Bank)中，其需移動至何 ，以及何種製程的線上作業流程’都是由流程控管 :來控制掌管，並用來儲存製造或測試晶圓所需要操作 总：程式代碼、適合機台等資料，操作人員可藉由流程 :糸統所輸出的報表來瞭解上述之機台在對晶圓批次進 製程的資料，如時間、批號與製程種類。而設備主機飼 器係用來掌控製程中所有機台的動作，執行管理系統係 來連接流程控管系統與設備主機伺服器。另外，係利用 試機台係、與位於下方的探測器配合，利用探測器移動晶 到所需測量的晶粒位置上，再由測試機台執行程式以對 圓進仃測ϊ。其中’測試機台所需要的製程程式與所測 的結果係紀錄在測試機台伺服器，再由測試機台饲服器 結果存放在資料庫中。 系 參 控 行 用 測 圓 晶 得 第1圖所繪示為本發日月自動τ載測試程式之方法的架 構示意圖。請參照第i目’在本發明自動化下載測試程式 的系統中，一組測試設備通常由一台測試機台12與一台探 測器14所組成，也有一台測試機台12與兩台探測器組Z， 而形成雙頭（Two Head)的測試設備。一般係利用執行管理 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公f )一 ------------•裝 (請先閱讀背面之注意事項再填寫本頁) n n ϋ I* — It--------- 5U35U6 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（） 系統1 6與設備主機伺服哭 J服裔1 8來控制測試設備中，測試機 台12與探測器14的動#盍、在i 町動作與流程。其中，上述之執行管理 系統1 6與設備主機伺服考 %丨』服恭18通常共存於一台電腦2〇之 中 〇 一批次的晶圓數營幺〇 里逋韦為25片，並通常裝置在一晶圓 閘中。在晶圓閘外，都古你| 、占有代表晶圓批次號的條碼，以利 用條碼讀取機2 2來讀敗。錄讽狄^ 〜項取&過條碼讀取機22刷取條碼後， 執行f理系、统1 6與設備主機伺服器i 8即可得知要進行測 試的晶圓批號，再利用執行管理系統16至流程控管系統（未 繪出）抓取屬於此晶圓批次的製程資料，例如測試機台種 類、測試程式名稱、與操作參數等，即可告知設備主機饲 服器1 8此晶圓批次可到何種種類的測試機台進行測試。因 此’當作人員將晶圓批次送到測試機台12要進行測試時， 由於測試機台與電腦20的連線，設備主機伺服器1 8可得 知此測試機台12的種類。再與執行管理系統16所得到的 測試機台種類的資料進行比對，即可判斷此測試機台12是 否為此晶圓批次可執行測試的機台。如果此測試機台丨2係 ， 為上述晶圓批次可利用的機台，則設備主機伺服器1 8會將 由執行管理系統1 6所得到的測試程式的名稱傳送到測試 機台12與探測器14中。接著，測試機台12與探剛器14 再到測試機台伺服器1 0中，去抓取與上述由設備主機词服 器1 8傳送名稱相同的測試程式。隨後，當測試機台丨2與 本紙張尺度適用中國國家標準（cns)A4規格（210 X 297公釐 -----------•裝---I---—訂--------- (請先閲讀背面之注意事項再填寫本頁) A7 B7 五 經濟部智慧財產局員工消費合作社印製 、發明說明（ 探測器1 4下戴完測試程式後，會傳送訊息給設備主機伺服 器1 8而设備主機伺服器1 8便會告知測試機台1 2可開始 進行測試。 本發明的特點係透過執行管理系統1 ό與流程控管的連 、使執行g理系統1 6下載晶圓批次的資料並告知設備主 機伺服器18，再藉由設備主機伺服器18與測試機台12、 探測器1 4間的資料溝通，即可達到本發明自動下載測試程 式的目的。 在測試製程中利用本發明自動下載測試程式之方法， 晶圓批次即可在利用條碼讀取機22刷完條碼，並將晶圓批 次移動到測試機台U後，下载測試程式及執行測試程式都 可由設備主機伺服器18來掌控。因此，不需要操作人員進 行二次的手動輪入。如此一來，1節省許多測試資源與時 間，也可避免輸入錯誤測試程式名稱的困擾，在積體電路 製程上的生產與管理，也更為方便。 如熟悉此技術之人員所瞭解的，以上所述僅為本發明 之較佳實施例而已，並非用以阳6 〇 巧从限疋本發明之申請專利範 圍；凡其它未脫離本發明所揭示之精神下所完成之等效改 變或修飾’均應包含在下述之申請專利範圍内。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 2^^" ----------—--------^--------- (請先閱讀背面之注意事項再填寫本頁}Brief description of the drawings: The preferred embodiment of the present invention will be described in the following m ^ ^ Ah M. -Fcf »The figure in the middle will be explained in more detail, in which: The following figure 1 is shown as the present invention Schematic diagram of the method of the automatic T load test process in the vertical direction χ. Comparative description of drawing numbers: 10 test machine server 12 test machine 14 detector 16 execution management system 18 equipment host server 20 computer 22 bar code reader printed by the Intellectual Property Bureau employee consumer cooperative of the Ministry of Economics Detailed description of the invention: It is known that the testing process uses manual methods to give instructions, and downloading of wrong programs may occur, which may lead to retests. Or, the fragile product may be damaged due to repeated testing, which wastes a lot of testing time and resources. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) * < 1 -------- ^ --------- (Please read the precautions on the back before Fill in this page) A7 V. B7 Invention description (therefore, the present invention provides a method for automatically downloading test programs to determine the shortcomings caused by the known process. First, the method for downloading test programs in the invention The required equipment and systems are said one by one = ^ yen batches-generally, stored in the bank, where they need to be moved, and what process of online operation processes are all controlled by the process: come Control and management, and is used to store the total operations required for manufacturing or testing wafers: program code, suitable equipment, and other data. Operators can use the report output by the process: system to understand the above-mentioned equipment is in batches of wafers. The data of the base program, such as time, batch number, and process type. The equipment host feeder is used to control the actions of all machines in the process, and the execution management system is used to connect the process control system with the equipment host server. In addition, it uses the Test machine system, and With the cooperation of the square detector, the detector is used to move the crystal to the position of the crystal to be measured, and then the test machine executes the program to measure the circle. Among them, the process program required by the test machine and the measured results It is recorded in the server of the test machine, and then the results of the tester feeder are stored in the database. Schematic diagram of the method. Please refer to item i. In the system for automatically downloading test programs of the present invention, a set of test equipment is usually composed of a test machine 12 and a detector 14, and there is also a test machine 12 With two detector groups Z, forming a two-head (Two Head) test equipment. Generally, the paper size is applied to manage the Chinese national standard (CNS) A4 specification (210 X 297 male f) ----- ------- • Equipment (please read the precautions on the back before filling this page) nn ϋ I * — It --------- 5U35U6 Printed by A7, Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Description of the invention () System 1 6 and equipment host servo crying In order to control the test equipment, the test machine 12 and the movement of the detector 14 #, the actions and processes in i-machi. Among them, the above-mentioned execution management system 16 and the equipment host servo test% 丨 service 18 usually coexist in The number of wafers in a batch of 200 in a computer is 25, and it is usually installed in a wafer gate. Outside the gate, Du Gu you | The bar code of the batch number can be read by using the bar code reader 2 2. After recording the bar code, the barcode reader 22 executes the system, system 16 and the equipment host server. i 8 can know the lot number of the wafer to be tested, and then use the execution management system 16 to the process control system (not shown) to capture the process data belonging to this wafer lot, such as the type of test machine and test program. Name, operating parameters, etc., can tell the equipment host feeder 8 what kind of test machine this wafer batch can go to test. Therefore, when a person sends wafer batches to the testing machine 12 for testing, the equipment host server 18 can know the type of the testing machine 12 due to the connection between the testing machine and the computer 20. By comparing with the test machine type data obtained by the execution management system 16, it can be judged whether the test machine 12 can execute the test machine for this wafer batch. If this test machine 2 is a machine available for the above-mentioned wafer batch, the equipment host server 18 will transmit the name of the test program obtained by the execution management system 16 to the test machine 12 and the detection器 14。 In the device 14. Next, the test machine 12 and the rigid probe 14 go to the test machine server 10 to capture the test program with the same name as the device host server 18 described above. Subsequently, when the test machine 丨 2 and this paper size are in accordance with the Chinese National Standard (cns) A4 specification (210 X 297 mm ----------- • installed --- I ---- order- -------- (Please read the notes on the back before filling out this page) A7 B7 Printed and Invention Description of Employee Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Send a message to the equipment host server 18 and the equipment host server 18 will inform the testing machine 12 that the test can be started. The characteristics of the present invention are through the execution management system 1 The physics system 16 downloads the wafer batch data and informs the equipment host server 18, and then communicates with the data between the equipment host server 18, the test machine 12, and the detector 14 to achieve automatic downloading of the present invention. Purpose of the test program. In the test process, by using the method of automatically downloading the test program of the present invention, the wafer batch can be scanned with the barcode reader 22 and the wafer batch can be moved to the test machine U. Downloading and running test programs can be controlled by the device host server 18 . Therefore, the operator does not need to perform a second manual rotation. In this way, 1 saves a lot of test resources and time, can also avoid the trouble of entering the wrong test program name, production and management on the integrated circuit manufacturing process, also It is more convenient. As will be understood by those familiar with this technology, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of patent application of the present invention; All equivalent changes or modifications made under the spirit disclosed by the invention should be included in the scope of the patent application described below. This paper size applies to China National Standard (CNS) A4 specification (210 X 2 ^^ " ---- ---------------- ^ --------- (Please read the notes on the back before filling this page}