TW469681B - Apparatus for generating linearly-orthogonally polarized light beams - Google Patents
Apparatus for generating linearly-orthogonally polarized light beams Download PDFInfo
- Publication number
- TW469681B TW469681B TW089108950A TW89108950A TW469681B TW 469681 B TW469681 B TW 469681B TW 089108950 A TW089108950 A TW 089108950A TW 89108950 A TW89108950 A TW 89108950A TW 469681 B TW469681 B TW 469681B
- Authority
- TW
- Taiwan
- Prior art keywords
- beams
- acousto
- patent application
- scope
- frequency
- Prior art date
Links
- 239000013078 crystal Substances 0.000 claims abstract description 85
- 230000003287 optical effect Effects 0.000 claims abstract description 79
- 230000004907 flux Effects 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000013598 vector Substances 0.000 claims description 27
- 230000003993 interaction Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 20
- 230000010287 polarization Effects 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 19
- 230000002079 cooperative effect Effects 0.000 claims description 16
- 230000001276 controlling effect Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052778 Plutonium Inorganic materials 0.000 claims 2
- OYEHPCDNVJXUIW-UHFFFAOYSA-N plutonium atom Chemical compound [Pu] OYEHPCDNVJXUIW-UHFFFAOYSA-N 0.000 claims 2
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 1
- 241000269799 Perca fluviatilis Species 0.000 claims 1
- 239000011358 absorbing material Substances 0.000 claims 1
- 239000008186 active pharmaceutical agent Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical compound Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- -1 mercury halide Chemical class 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 14
- 229910003069 TeO2 Inorganic materials 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract description 2
- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003466 anti-cipated effect Effects 0.000 abstract 1
- 230000002452 interceptive effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 46
- 230000000694 effects Effects 0.000 description 27
- 238000013461 design Methods 0.000 description 14
- 230000000875 corresponding effect Effects 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 10
- 230000002277 temperature effect Effects 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000009977 dual effect Effects 0.000 description 6
- 239000006096 absorbing agent Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000007493 shaping process Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910021532 Calcite Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 240000005561 Musa balbisiana Species 0.000 description 1
- 235000018290 Musa x paradisiaca Nutrition 0.000 description 1
- 239000006098 acoustic absorber Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/60—Temperature independent
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13768599P | 1999-06-04 | 1999-06-04 | |
| US09/507,529 US6157660A (en) | 1999-06-04 | 2000-02-18 | Apparatus for generating linearly-orthogonally polarized light beams |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW469681B true TW469681B (en) | 2001-12-21 |
Family
ID=26835495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW089108950A TW469681B (en) | 1999-06-04 | 2000-05-10 | Apparatus for generating linearly-orthogonally polarized light beams |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6157660A (enExample) |
| EP (1) | EP1192688B1 (enExample) |
| JP (1) | JP4149704B2 (enExample) |
| TW (1) | TW469681B (enExample) |
| WO (1) | WO2000076036A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2821680B1 (fr) * | 2001-03-02 | 2003-05-30 | Thomson Csf | Dispositif de controle de la dispersion de polarisation dans les reseaux a fibres optiques |
| US6778280B2 (en) * | 2001-07-06 | 2004-08-17 | Zygo Corporation | Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components |
| DE10137155B4 (de) * | 2001-07-30 | 2006-11-30 | Leica Microsystems Cms Gmbh | Optische Anordnung und Scanmikroskop |
| US6847455B1 (en) | 2002-01-25 | 2005-01-25 | The United States Of America As Represented By The Department Of Energy | Heterodyne interferometer with angstrom-level periodic nonlinearity |
| JP4279679B2 (ja) * | 2002-02-12 | 2009-06-17 | ザイゴ コーポレーション | 干渉法システムにおける非サイクリック・エラーの特性評価および補償 |
| US7075619B2 (en) * | 2002-12-12 | 2006-07-11 | Zygo Corporation | In-process correction of stage mirror deformations during a photolithography exposure cycle |
| US6930819B2 (en) * | 2003-05-03 | 2005-08-16 | Acceeze, Inc. | Miniaturized external cavity laser (ECL) implemented with acoustic optical tunable filter |
| US6961129B2 (en) * | 2003-05-15 | 2005-11-01 | Agilent Technologies, Inc. | Active control of two orthogonal polarizations for heterodyne interferometry |
| DE102004022654A1 (de) * | 2003-05-15 | 2004-12-23 | Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto | Heterodynstrahl-Bereitstellung mit Aktivsteuerung zweier orthogonaler Polarisierungen |
| US7327465B2 (en) * | 2003-06-19 | 2008-02-05 | Zygo Corporation | Compensation for effects of beam misalignments in interferometer metrology systems |
| US7286240B2 (en) * | 2003-06-19 | 2007-10-23 | Zygo Corporation | Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems |
| WO2005067815A1 (en) * | 2004-01-05 | 2005-07-28 | Zygo Corporation | Stage alignment in lithography tools |
| US7283248B2 (en) * | 2004-01-06 | 2007-10-16 | Zygo Corporation | Multi-axis interferometers and methods and systems using multi-axis interferometers |
| US7375823B2 (en) * | 2004-04-22 | 2008-05-20 | Zygo Corporation | Interferometry systems and methods of using interferometry systems |
| JP2007534941A (ja) * | 2004-04-22 | 2007-11-29 | ザイゴ コーポレーション | 光学干渉計システムおよび光学干渉計システムを用いる方法 |
| US7489407B2 (en) * | 2004-10-06 | 2009-02-10 | Zygo Corporation | Error correction in interferometry systems |
| US7433049B2 (en) * | 2005-03-18 | 2008-10-07 | Zygo Corporation | Multi-axis interferometer with procedure and data processing for mirror mapping |
| US7372576B2 (en) * | 2005-11-01 | 2008-05-13 | Agilent Technologies, Inc. | System and method for generating beams of light using an anisotropic acousto-optic modulator |
| US7375819B2 (en) * | 2005-11-01 | 2008-05-20 | Agilent Technologies, Inc. | System and method for generating beams of light using an anisotropic acousto-optic modulator |
| US7564568B2 (en) * | 2006-03-02 | 2009-07-21 | Zygo Corporation | Phase shifting interferometry with multiple accumulation |
| US7697195B2 (en) | 2006-05-25 | 2010-04-13 | Zygo Corporation | Apparatus for reducing wavefront errors in output beams of acousto-optic devices |
| WO2008152781A1 (ja) * | 2007-06-12 | 2008-12-18 | Panasonic Corporation | 投写型画像表示装置 |
| US7764415B2 (en) * | 2008-04-18 | 2010-07-27 | Buican Tudor N | High retardation-amplitude photoelastic modulator |
| JP5525919B2 (ja) * | 2010-05-28 | 2014-06-18 | 株式会社東芝 | 欠陥検査方法および欠陥検査装置 |
| US10615562B2 (en) | 2014-03-03 | 2020-04-07 | Pranalytica, Inc. | Acousto-optic tuning of lasers |
| US10230210B2 (en) * | 2014-03-03 | 2019-03-12 | Pranalytica, Inc. | Acousto-optic tuning of lasers |
| CN109739028B (zh) * | 2019-03-11 | 2021-08-10 | 中国电子科技集团公司第二十六研究所 | 大孔径双色声光可调滤光器 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3458259A (en) * | 1966-11-07 | 1969-07-29 | Hewlett Packard Co | Interferometric system |
| US3656853A (en) * | 1966-11-07 | 1972-04-18 | Hewlett Packard Co | Interferometric system |
| US3662279A (en) * | 1969-10-31 | 1972-05-09 | Sandstroem & Others | Device for controlling the frequency of a laser beam |
| US3889207A (en) * | 1970-02-24 | 1975-06-10 | Hewlett Packard Co | Frequency stabilized gas laser |
| GB1468911A (en) * | 1973-07-03 | 1977-03-30 | Matsushita Electric Industrial Co Ltd | Acousto-optic filter |
| US4332441A (en) * | 1980-05-15 | 1982-06-01 | Nasa | Coherently pulsed laser source |
| DE3340809A1 (de) * | 1983-11-11 | 1985-05-23 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Akustooptische lichtmodulations- und/oder lichtablenkeinrichtung |
| US4687958A (en) * | 1985-03-12 | 1987-08-18 | Zygo Corporation | Apparatus to transform a single frequency, linearly polarized laser beam into a high efficiency beam with two, orthogonally polarized frequencies |
| US4684828A (en) * | 1985-03-12 | 1987-08-04 | Zygo Corporation | Apparatus to transform a single frequency, linearly polarized laser beam into a beam with two, orthogonally polarized frequencies |
| US5095491A (en) * | 1991-04-12 | 1992-03-10 | International Business Machines Corporation | Laser system and method |
| US5195104A (en) * | 1991-10-15 | 1993-03-16 | Lasen, Inc. | Internally stimulated optical parametric oscillator/laser |
| US5463493A (en) * | 1993-01-19 | 1995-10-31 | Mvm Electronics | Acousto-optic polychromatic light modulator |
| US5321718A (en) * | 1993-01-28 | 1994-06-14 | Sdl, Inc. | Frequency converted laser diode and lens system therefor |
| US5379310A (en) * | 1993-05-06 | 1995-01-03 | Board Of Trustees Of The University Of Illinois | External cavity, multiple wavelength laser transmitter |
| US5361268A (en) * | 1993-05-18 | 1994-11-01 | Electro Scientific Industries, Inc. | Switchable two-wavelength frequency-converting laser system and power control therefor |
| US5394414A (en) * | 1993-05-28 | 1995-02-28 | International Business Machines Corporation | Laser system and method having a nonlinear crystal resonator |
| BE1007876A4 (nl) * | 1993-12-17 | 1995-11-07 | Philips Electronics Nv | Stralingsbron-eenheid voor het opwekken van een bundel met twee polarisatierichtingen en twee frequenties. |
| JP3421184B2 (ja) * | 1995-12-19 | 2003-06-30 | 理化学研究所 | 波長可変レーザーにおける波長選択方法および波長可変レーザーにおける波長選択可能なレーザー発振装置 |
| US5708672A (en) * | 1996-01-29 | 1998-01-13 | Laser Power Corporation | Dual wavelength solid state laser |
| US5640405A (en) * | 1996-02-01 | 1997-06-17 | Lighthouse Electronics Corporation | Multi quasi phase matched interactions in a non-linear crystal |
| US5661737A (en) * | 1996-02-09 | 1997-08-26 | Coherent, Inc. | Multi-wavelength laser beam detector with refractive element |
| US5862164A (en) * | 1996-07-26 | 1999-01-19 | Zygo Corporation | Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized |
| US5970077A (en) * | 1997-04-25 | 1999-10-19 | Zygo Corporation | Apparatus for efficiently transforming a single frequency, linearly polarized laser beam into principally two orthogonally polarized beams having different frequencies |
| US5917844A (en) * | 1997-04-25 | 1999-06-29 | Zygo Corporation | Apparatus for generating orthogonally polarized beams having different frequencies |
-
2000
- 2000-02-18 US US09/507,529 patent/US6157660A/en not_active Expired - Lifetime
- 2000-05-02 JP JP2001502205A patent/JP4149704B2/ja not_active Expired - Lifetime
- 2000-05-02 WO PCT/US2000/011858 patent/WO2000076036A1/en not_active Ceased
- 2000-05-02 EP EP00930293.6A patent/EP1192688B1/en not_active Expired - Lifetime
- 2000-05-10 TW TW089108950A patent/TW469681B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2000076036A1 (en) | 2000-12-14 |
| EP1192688A1 (en) | 2002-04-03 |
| EP1192688A4 (en) | 2007-09-12 |
| JP4149704B2 (ja) | 2008-09-17 |
| EP1192688B1 (en) | 2016-04-13 |
| US6157660A (en) | 2000-12-05 |
| JP2003501702A (ja) | 2003-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4149704B2 (ja) | 直交に直線偏光した光ビームを発生させるための装置 | |
| US6452682B2 (en) | Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam | |
| US5862164A (en) | Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized | |
| US7697195B2 (en) | Apparatus for reducing wavefront errors in output beams of acousto-optic devices | |
| TW394855B (en) | Dual beam generator | |
| US5917844A (en) | Apparatus for generating orthogonally polarized beams having different frequencies | |
| JP2008519961A (ja) | 干渉法用の光接続 | |
| US20070097376A1 (en) | System and method for generating beams of light using an anisotropic acousto-optic modulator | |
| US4687958A (en) | Apparatus to transform a single frequency, linearly polarized laser beam into a high efficiency beam with two, orthogonally polarized frequencies | |
| CN110927984A (zh) | 一种可调的横向错位激光分束/合束器 | |
| CN111130637A (zh) | 光子自旋-轨道角动量联合模式的测量方法及测量系统 | |
| US20040227943A1 (en) | Heterodyne beam delivery with active control of two orthogonal polarizations | |
| US7372576B2 (en) | System and method for generating beams of light using an anisotropic acousto-optic modulator | |
| Lin et al. | Micro-movement measured by laser heterodyne interferometer based on acousto-optic effect | |
| TWI921938B (zh) | 由布拉格繞射架構之雙聲光晶體調變器串接構成之外差光源 | |
| CN211669852U (zh) | 双折射干涉仪及基于双折射干涉仪的量子光学实验装置 | |
| TWI915792B (zh) | 新型外差光源 | |
| TW202613672A (zh) | 由布拉格繞射架構之雙聲光晶體調變器串接構成之外差光源 | |
| CN114460774B (zh) | 反射式几何相位液晶空间光调制方法、系统及存储介质 | |
| Kotov | Dual-Band Acousto-Optical Rotator of the Polarization Plane of Optical Radiation | |
| JPH03100530A (ja) | ２波長光源素子 | |
| CN121806300A (zh) | 一种抑制杂散光的共焦光路系统及方法 | |
| JPS61169820A (ja) | 直交偏波型光周波数シフタ | |
| JPH11325817A5 (enExample) | ||
| Schmitz | Precision Measurement |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MK4A | Expiration of patent term of an invention patent |