JP4149704B2 - 直交に直線偏光した光ビームを発生させるための装置 - Google Patents

直交に直線偏光した光ビームを発生させるための装置 Download PDF

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JP4149704B2
JP4149704B2 JP2001502205A JP2001502205A JP4149704B2 JP 4149704 B2 JP4149704 B2 JP 4149704B2 JP 2001502205 A JP2001502205 A JP 2001502205A JP 2001502205 A JP2001502205 A JP 2001502205A JP 4149704 B2 JP4149704 B2 JP 4149704B2
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beams
acoustic
optically active
frequency
active crystal
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JP2003501702A (ja
JP2003501702A5 (enExample
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ヘンリー アレン ヒル，
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ザイゴ コーポレイション
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/60—Temperature independent

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2001502205A 1999-06-04 2000-05-02 直交に直線偏光した光ビームを発生させるための装置 Expired - Lifetime JP4149704B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US13768599P 1999-06-04 1999-06-04
US60/137,685 1999-06-04
US09/507,529 2000-02-18
US09/507,529 US6157660A (en) 1999-06-04 2000-02-18 Apparatus for generating linearly-orthogonally polarized light beams
PCT/US2000/011858 WO2000076036A1 (en) 1999-06-04 2000-05-02 Apparatus for generating linearly-orthogonally polarized light beams

Publications (3)

Publication Number Publication Date
JP2003501702A JP2003501702A (ja) 2003-01-14
JP2003501702A5 JP2003501702A5 (enExample) 2006-10-26
JP4149704B2 true JP4149704B2 (ja) 2008-09-17

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JP2001502205A Expired - Lifetime JP4149704B2 (ja) 1999-06-04 2000-05-02 直交に直線偏光した光ビームを発生させるための装置

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Country Link
US (1) US6157660A (enExample)
EP (1) EP1192688B1 (enExample)
JP (1) JP4149704B2 (enExample)
TW (1) TW469681B (enExample)
WO (1) WO2000076036A1 (enExample)

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US6847455B1 (en) 2002-01-25 2005-01-25 The United States Of America As Represented By The Department Of Energy Heterodyne interferometer with angstrom-level periodic nonlinearity
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US6930819B2 (en) * 2003-05-03 2005-08-16 Acceeze, Inc. Miniaturized external cavity laser (ECL) implemented with acoustic optical tunable filter
US6961129B2 (en) * 2003-05-15 2005-11-01 Agilent Technologies, Inc. Active control of two orthogonal polarizations for heterodyne interferometry
DE102004022654A1 (de) * 2003-05-15 2004-12-23 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Heterodynstrahl-Bereitstellung mit Aktivsteuerung zweier orthogonaler Polarisierungen
US7327465B2 (en) * 2003-06-19 2008-02-05 Zygo Corporation Compensation for effects of beam misalignments in interferometer metrology systems
US7286240B2 (en) * 2003-06-19 2007-10-23 Zygo Corporation Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems
WO2005067815A1 (en) * 2004-01-05 2005-07-28 Zygo Corporation Stage alignment in lithography tools
US7283248B2 (en) * 2004-01-06 2007-10-16 Zygo Corporation Multi-axis interferometers and methods and systems using multi-axis interferometers
US7375823B2 (en) * 2004-04-22 2008-05-20 Zygo Corporation Interferometry systems and methods of using interferometry systems
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US7489407B2 (en) * 2004-10-06 2009-02-10 Zygo Corporation Error correction in interferometry systems
US7433049B2 (en) * 2005-03-18 2008-10-07 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
US7372576B2 (en) * 2005-11-01 2008-05-13 Agilent Technologies, Inc. System and method for generating beams of light using an anisotropic acousto-optic modulator
US7375819B2 (en) * 2005-11-01 2008-05-20 Agilent Technologies, Inc. System and method for generating beams of light using an anisotropic acousto-optic modulator
US7564568B2 (en) * 2006-03-02 2009-07-21 Zygo Corporation Phase shifting interferometry with multiple accumulation
US7697195B2 (en) 2006-05-25 2010-04-13 Zygo Corporation Apparatus for reducing wavefront errors in output beams of acousto-optic devices
WO2008152781A1 (ja) * 2007-06-12 2008-12-18 Panasonic Corporation 投写型画像表示装置
US7764415B2 (en) * 2008-04-18 2010-07-27 Buican Tudor N High retardation-amplitude photoelastic modulator
JP5525919B2 (ja) * 2010-05-28 2014-06-18 株式会社東芝 欠陥検査方法および欠陥検査装置
US10615562B2 (en) 2014-03-03 2020-04-07 Pranalytica, Inc. Acousto-optic tuning of lasers
US10230210B2 (en) * 2014-03-03 2019-03-12 Pranalytica, Inc. Acousto-optic tuning of lasers
CN109739028B (zh) * 2019-03-11 2021-08-10 中国电子科技集团公司第二十六研究所 大孔径双色声光可调滤光器

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Also Published As

Publication number Publication date
WO2000076036A1 (en) 2000-12-14
EP1192688A1 (en) 2002-04-03
EP1192688A4 (en) 2007-09-12
EP1192688B1 (en) 2016-04-13
TW469681B (en) 2001-12-21
US6157660A (en) 2000-12-05
JP2003501702A (ja) 2003-01-14

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