TW468033B - Microscope inspection system - Google Patents

Microscope inspection system Download PDF

Info

Publication number
TW468033B
TW468033B TW089110322A TW89110322A TW468033B TW 468033 B TW468033 B TW 468033B TW 089110322 A TW089110322 A TW 089110322A TW 89110322 A TW89110322 A TW 89110322A TW 468033 B TW468033 B TW 468033B
Authority
TW
Taiwan
Prior art keywords
circuit
inspection system
lens
patent application
interest
Prior art date
Application number
TW089110322A
Other languages
English (en)
Chinese (zh)
Inventor
Yigal Katzir
Demitry Gorlik
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Application granted granted Critical
Publication of TW468033B publication Critical patent/TW468033B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
TW089110322A 2000-05-15 2000-05-29 Microscope inspection system TW468033B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57097200A 2000-05-15 2000-05-15

Publications (1)

Publication Number Publication Date
TW468033B true TW468033B (en) 2001-12-11

Family

ID=24281811

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089110322A TW468033B (en) 2000-05-15 2000-05-29 Microscope inspection system

Country Status (6)

Country Link
EP (1) EP1290484A2 (ja)
JP (1) JP2003533731A (ja)
AU (1) AU2001256624A1 (ja)
IL (1) IL152640A0 (ja)
TW (1) TW468033B (ja)
WO (1) WO2001088592A2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781687B2 (en) 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
US7203355B2 (en) 2002-12-24 2007-04-10 Orbotech Ltd. Automatic optical inspection system and method
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
DE102009012707A1 (de) 2009-03-11 2010-09-16 Carl Zeiss Microlmaging Gmbh Mikroskop mit mehreren optischen Systemen im Abbildungsstrahlengang

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845558A (en) * 1987-12-03 1989-07-04 Kla Instruments Corporation Method and apparatus for detecting defects in repeated microminiature patterns
JPH05196568A (ja) * 1992-01-17 1993-08-06 Japan Ii M Kk 鍍金検査装置
US5741171A (en) * 1996-08-19 1998-04-21 Sagitta Engineering Solutions, Ltd. Precision polishing system
US5966677A (en) * 1997-02-28 1999-10-12 Fiekowsky; Peter J. High accuracy particle dimension measurement system
US5912735A (en) * 1997-07-29 1999-06-15 Kla-Tencor Corporation Laser/white light viewing laser imaging system
US6292306B1 (en) * 1999-05-19 2001-09-18 Optical Gaging Products, Inc. Telecentric zoom lens system for video based inspection system

Also Published As

Publication number Publication date
WO2001088592A2 (en) 2001-11-22
JP2003533731A (ja) 2003-11-11
EP1290484A2 (en) 2003-03-12
WO2001088592A3 (en) 2002-08-15
AU2001256624A1 (en) 2001-11-26
IL152640A0 (en) 2004-02-19

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MM4A Annulment or lapse of patent due to non-payment of fees