TW466327B - Slow pull dryer capable of preventing liquid surface from generating turbulence - Google Patents

Abstract

The present invention provides a kind of slow pull dryer that is capable of preventing liquid surface from generating turbulence and contains a quasi-square hot-water tank and a quasi-square wave-suppressing plate. The hot-water tank contains four vertical sidewalls and one bottom plate. A water-inlet is installed at the bottom side of the hot-water tank for inputting hot water. Hot water contained inside the hot-water tank at least will overflow from the top end of one predetermined vertical sidewall. A square groove with an opening facing downward is installed at the bottom side of the wave-suppressing plate. The wave-suppressing plate is installed at the bottom side inside hot-water tank and the water-inlet is located below the groove opening. A line-shaped opening is installed at the upper side of wave-suppressing plate such that the line-shaped direction is parallel to the predetermined vertical sidewall of hot-water tank. Hot water input by the water-inlet will first flow into the groove to moderate the flowing speed and then flow upward into the hot-water tank through the line-shaped opening. The line-shaped opening will make hot water, which flows upward into the hot-water tank, form a hot-water stream with a quasi-linear cross section that flows upward to the liquid surface of hot-water tank and forms a stable water stream flowing to the predetermined vertical sidewall. The water stream will lead micro particles, which float over the liquid surface, to the predetermined vertical sidewall and lead them out of hot-water tank through the top end of predetermined vertical sidewall.

Description

r 6 63 2 7 V. Description of the invention (1) The present invention provides a slow-drawing dryer (S 1 〇w Ρυ 1 1 Dr ye r) > especially a slow-drawing type which can prevent turbulent flow on the liquid surface Dryer 0 The conventional slow-drawing dryer is widely used in the cleaning process of removing fine particles. For example, a magnetic disk used in a hard disk drive often has particles attached to a substrate used to manufacture the magnetic disk during the manufacturing process. These particles must be removed from the material to ensure product quality. Therefore, in the process of making magnetic disks, a slow-pump dryer is often used to clean the substrate with high-temperature deionized water to remove the particles. Please refer to the figure and the second figure. The schematic diagram of the pumping dryer 1 0 is shown in the figure 2-the combined components of the slow pumping dryer 10 shown in the figure 0. The conventional slow pumping dryer 1 0 includes a hot water tank 12 to And a damping plate 14 0 hot water tank i2 includes four vertical side walls 16 and a bottom plate 18 Q hot water tank 12 is provided with a water inlet α 20 on the bottom side for hot water input and the hot water contained in the hot water tank 12 is provided by four vertical side walls 16 top overflow 0 The bottom side of the wave plate 14 is provided with a square groove 22 which is open and downward, and the four side walls of the wave plate 14 are each -hr. There is a semi-circular water outlet D 24 0 wave plate 14 Installed on the bottom side of the inside of the hot water tank 12 and the incoming water σ 20 is located under the groove 22 and the opening σ is above the wave-suppressing plate 1 4 which is inclined toward-the predetermined end 2 6 > and the wave-suppressing plate 1 4 also contains- — The exhaust pipe 28 is set on the upper side of the predetermined end 2 6 0 The hot water input by the water inlet σ 20 will first flow into the groove 22 on the bottom side of the wave damping plate 14 to relax the flow rate 5 and then pass through the four waves of the wave damping plate 14 a 24 flows upward into hot water tank 12, and water

5th Ιί

6 63 2 T V. Description of the invention (2) The flow will bring the fine particles suspended in the liquid surface of the hot water tank 12 to the top end of the vertical side wall 16 and take it out of the hot water tank 12. In addition, the gas in the groove 22 will accumulate toward the predetermined end 26, and the accumulated gas will be discharged from the hot water tank I2 through the exhaust pipe 28. Please refer to Figure 3 'Circle 3 is a schematic diagram of the water flow of the hot water tank 12 shown in Figure 1' In the figure, the arrow is the direction of the water flow, and the spiral line is the turbulent flow. When the conventional slow-pump dryer 10 is applied to the magnetic disk of the hard disk drive, In the cleaning process, since the four water outlets 24 are located on the four side walls of the wave absorbing plate i 4 respectively, most of the hot water 'in the groove 22 input from the water inlet 20 is directly connected to the four vertical side walls 16 through the four water outlets 24. Overflow (Over f low) 'and a turbulent flow is formed in the hot water tank 12; the flow of the water is shown in Figure 3. This phenomenon makes it difficult for the slow-drying dryer 10 to remove the particles on the surface of the substrate, and the particles suspended on the liquid surface do not easily flow out of the hot water tank 12 and accumulate in the hot water tank 12, thus affecting the cleaning process of the magnetic disks. quality. Because the slow-drying dryer 1 〇 uses high-temperature deionized water to clean the substrate, air bubbles are often accompanied by high-temperature hot water. Therefore, the slow-drying dryer i 〇 is equipped with an exhaust pipe 2 8 for the wave absorbing plate. The accumulated bubbles at the predetermined end 2 of 1 4 are discharged. However, the discontinuous exhaust phenomenon of the exhaust pipe 28 will cause vibrations to cause water waves in the hot water tank 12, so a watermark will be caused on the substrate, thereby reducing the yield of the magnetic disk, and the exhaust pipe 28 Discontinuous venting can also cause noise. Therefore, the main object of the present invention is to provide a slow-drawing dryer,

46 63 2 7 V. Description of Invention (3) To solve the above problems. Brief description of the drawings Figure 1 is a schematic diagram of a conventional slow-drawing dryer Figure 2 is a component of the slow-drawing dryer shown in Figure 1 Figure 3 is a schematic view of the water flow in the hot water tank shown in Figure 1 Figure 4 is Schematic diagram of the slow-drawing dryer of the present invention. Figure 5 is the components of the slow-drawing dryer shown in Figure 4. Figure 6 is a schematic diagram of the water flow in the hot water tank shown in Figure 4. Figure 7 is another embodiment of the invention. Figure 8 shows the schematic diagram of the water flow in the hot water tank shown in Figure 7. Symbols of 30, 60 slow-pull dryer 32, 62 hot water tank 34 wave plate 36 bottom plate 35, 37 39 41, 64, 66, 68 > 70 vertical side wall 40 into the water π 42 groove 44 linear opening 46 exhaust pipe 48 inclined groove 50 ring flange 52 predetermined end 54 base material please refer to Figure 4 and Figure 5, Figure 4 is Schematic diagram of the slow-drawing dryer 30 of the present invention ♦ FIG. 5 is a view of the slow-drawing dryer 30 shown in FIG. 4. Component diagram 〇 The slow-pump dryer 30 of the present invention contains-an approximately square rail sink 32 and

笫 7 V. Description of the invention (4) An approximately square wave absorbing plate 3 4. The hot water tank 32 includes four vertical side walls 35, 37, 39, 41 and a bottom plate 36. The hot water tank 32 is provided with a water inlet 40 at the bottom side for inputting hot water, and the hot water contained in the hot water tank 32 overflows from the tops of the four vertical side walls 35, 37, 39, and 41. The wave absorbing plate 34 is installed on the bottom side inside the hot water tank 32. The bottom side of the wave absorbing plate 34 is provided with a square groove 4 2 which opens downward, and the water inlet 4 on the bottom side of the hot water tank 3 2 is located in the groove 4 2 Under the opening. A linear opening 4 4 is provided on the upper side of the wave absorbing plate 3 4. The linear direction of the linear opening 4 4 is parallel to the vertical side walls 3 5 and 39 of the hot water tank 32. The hot water input from the water inlet 40 of the hot water tank 32 will first flow into the groove 42 on the bottom side of the wave absorbing plate 34 to ease the flow velocity, and then flow upward through the linear opening 4 4 of the wave absorbing plate 34 into the hot water tank 3 2 . The linear opening 4 4 will cause the hot water flowing upward into the hot water tank 32 to form an approximately linear hot water flow across the surface and upward to the liquid surface of the hot water tank 32 and form four vertical side walls 35, 37, 39 at the liquid surface. The stable water flow of 41, wherein the water flow direction of the liquid surface is perpendicular to the four vertical side walls 35, 37, 39, 41. The water flow will bring the particles suspended on the liquid surface to the four vertical side walls 3 5, 3, 7, 9, 4 1 and take them out of the hot water tank 32 from the top of the four vertical side walls 3 5, 37, 39, 41. . The wave absorbing plate 34 further includes an exhaust pipe 46, an inclined groove 48 opening downward, and an annular flange 50 protruding downward. The upper side of the wave absorbing plate 34 is inclined toward the predetermined end 5 2 so that the gas in the groove 4 2 on the lower side of the wave absorbing plate 3 4 accumulates toward the predetermined end 52, and the exhaust pipe 46 is provided above the predetermined end 52. Is used to discharge the gas accumulated under the predetermined end 52 out of the hot water tank 32. Inclined groove 48

Ο 63 2 τ V. Description of the invention (5) It is located between the predetermined end 52 and the exhaust pipe 46, so that the gas flowing to the predetermined end 52 can continue to flow upward into the exhaust pipe 4 6 to avoid the gas accumulation in the predetermined End 5 2. The annular flange 50 is provided below the linear opening 44 of the wave absorbing plate 34 and is located around the linear opening 4 4 to prevent the gas accumulated in the groove 4 2 under the wave absorbing plate 34 from passing through the linear opening. 44。 And upward into the hot water tank 32. Please refer to FIG. 6 'FIG. 6 is a schematic diagram of the water flow of the hot water tank 32 shown in FIG. 4' The arrow is the direction of the water flow> The slow-pump dryer 30 of the present invention can be applied to the manufacture of substrates for magnetic disks or wafers ( Hereinafter, the cleaning process of the substrate). When the plurality of substrates 54 are cleaned, the plurality of substrates 54 are disposed in parallel in a carrier (not shown). When cleaning a plurality of substrates 54, the substrate 54 in the carrier and clothing will be immersed in the hot water in the hot water tank 32, and then slowly extracted from the hot water in the hot water tank 32, using the surface of the hot water The tension removes fine particles adhering to the surface of the substrate 54. When the carrier and its substrate 54 are lifted from the hot liquid surface of the hot water tank 32, the surface of the substrate 54 is in line with the linear openings 4 4 on the upper side of the vertical side walls 35, 39, and the wave absorbing plate 34. It is vertical, so the hot water flow that causes the linear opening 44 to flow upward into the hot water tank 32 will flow through the gaps between the plurality of substrates 54 in parallel, as shown in Figure 6, and bring the particles suspended on the liquid surface to the vertical side walls. 35, 37, 39 '41 and flows out of the hot water tank 32. In addition, the slow-drawing dryer 30 of the present invention can also be applied to a cleaning process for cleaning a plurality of magnetic disks (not shown). In the slow-pump dryer 30, the linear direction of the linear opening "is parallel to the vertical side walls 35, 39, and the hot water input from the water inlet 4

Page 4) 4 6 63 2 7 V. Description of the invention (6) The $ -shaped opening 44 is guided into the hot water tank 32, so that the hot water forms a substantially linear cross-sectional surface of the hot water flow upward to the liquid surface of the hot water tank 32. The substrate 54 or the gaps between the disks flow in approximately parallel. Therefore, the present invention can prevent the IL from generating an IL flow, and can bring the particles suspended in the liquid surface to the vertical side wall.% 5, 3 7 , 3 9, 9 and 4 1 out of the hot water tank 32. In addition, the slow-pump dryer 30 is provided with an inclined groove 48 on the wave absorbing plate 34 so that the gas accumulated in the predetermined end 52 of the groove 42 can continuously flow upward into the exhaust pipe 46. This continuous exhaust The design can solve the problem of leaving water marks on the substrate 54 or the magnetic disk due to the vibration caused by the discontinuous exhaust, and solve the problem of noise. Therefore, the slow drawing dryer 30 of the present invention can improve the quality of the substrate 54 or magnetic disk cleaning process. Please refer to Fig. 7 '. Fig. 7 is a schematic diagram of a slow-extracting dryer 60 according to another embodiment of the present invention. [The slow-extracting dryer 60 of this embodiment and the slow-extracting dryer 30 are mainly different in the structure of the vertical side wall. The vertical side wall of the slow-draw dryer 60 will be described below. The hot water tank 62 of the slow grapefruit dryer includes four vertical side walls 64, 66, 68, 70 ', wherein the vertical side walls 64, 68 are higher than the vertical side walls 66, 70, and the two vertical side walls 66, 70 are both The linear openings 4 4 and the wave-cutting plates 34 are parallel to each other. Please refer to FIG. 8 'FIG. 8 is a schematic diagram of the water flow of the hot water tank 62 shown in FIG. When the hot water input from the water inlet 40 flows upward into the hot water tank 62 through the linear opening 4 4 of the wave absorbing plate 34, the linear opening 4 4 forms a cross-section of the hot water flowing upward into the hot water tank 62. near

Page] 0 46 632 7 V. Description of the invention (7) The linear hot water flows upward to the liquid surface of the hot water tank 62, and forms two stable flows on the liquid surface to the two vertical side walls 6 6, 70. The water stream and the second stream will bring the particles suspended on the liquid surface to the two vertical sides' walls 6 and 70, respectively, and take them out of the hot water tank 6 2 from the top of the two vertical side walls 66 and 70. Compared with the conventional slow-extracting dryer 10, the wave-absorbing plates 34 of the slow-extracting dryers 30 and 60 of the present invention have linear openings 44 to guide the hot water input to the hot water tanks 32 and 62. Since the linear direction of the linear opening 44 is parallel to the vertical side walls 3 5 and 39 of the hot water tank 32 or the vertical side walls 6 6 and 70 of the hot water tank 62, the hot water will be on the liquid surface of the hot water tanks 3 2, 62. A stable water flow is formed and flows through the gaps between the plurality of substrates 54 or the disks in approximately parallel, and the fine particles suspended on the liquid surface are brought to the top of the vertical side wall and flow out of the hot water tank 32. In addition, the wave-absorbing plates 34 of the slow-draw dryers 30 and 60 of the present invention are provided with inclined grooves 48 so that the gas accumulated in the predetermined end 52 of the groove 42 can continuously flow upward into the exhaust pipe 46. The design of the exhaust can solve the problem of leaving water marks on the substrate 54 or the magnetic disk due to the vibration caused by the discontinuous exhaust, and solve the problem of noise. Therefore, the slow drawing dryer of the present invention can improve the quality of the cleaning process when it is used in the cleaning process of the substrate 54 or the magnetic disk. The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in the patentable scope of the present invention shall fall within the scope of the patent of the present invention.

Page U

Claims (1)

46 63 2 7 VI. Application for Patent Scope 1. —Slow Pu 11 Dryer (Slow Pu 11 Dryer) y-It contains: — Approximately square hot water tank j It includes four vertical side walls and a bottom plate. The bottom side of the rail water tank is rf-n. Ϋ́ and-, the water inlet σ is used to input hot water j and the rails contained in the water tank * > *, water will overflow at least from the top of the predetermined vertical side wall; and an approximate The square wave-cutting plate 1 is installed on the bottom side of the inside of the hot water tank. The bottom side ax of the wave-cutting plate has a square groove with an opening downward, and the upper side of the wave-cutting plate is provided with a linear opening σ and a linear opening. The linear direction is parallel to the predetermined vertical side wall of the hot water t-rti tank. 3 The water inlet on the bottom side of the hot water tank is located under the opening of the groove, and the hot water input by the water inlet of the hot water tank. It will first flow into the groove on the bottom of the wave plate to ease the flow rate, and then flow upward through the linear opening on the wave plate to the hot water tank. The linear opening will form a cross section of the hot water flowing upward into the hot water tank. The approximately linear hot water flow flows upward toward the liquid surface of the hot water tank and forms a stable water flow to the predetermined vertical side wall at the liquid surface. The water flow will bring the particles suspended on the liquid surface to the predetermined vertical side wall and be moved by the predetermined The top of the vertical side wall takes it out of the hot water tank. 0. The slow-pull dryer of item 1 of the patent scope, where the water flow direction of the liquid surface is perpendicular to the predetermined vertical side wall. 9 3. The patent is requested. The slow-drawing dryer of the first item in the range, where the wave absorbing plate ___ IS perimeter ___ 1 page 12 4 6 63 2 T VI. The line of the patent application scope. There is another protruding downward under the shape opening. Ring flange The line surrounding the opening, for preventing the hot water tank and flows upwardly accumulated within the groove side of the clipping plate opening through which gases linear. 4. For example, the slow-pumping drier of the scope of patent application, in which the hot water contained in the hot water tank overflows from the top of two predetermined vertical side walls, the linear shape of the two predetermined vertical side walls and the wave-cutting plate. The openings are parallel to each other. When the hot water input from the water inlet of the hot water tank flows upward into the hot water tank through the linear opening on the upper side of the wave plate, the linear opening will make the hot water flowing upward into the hot water tank into a A cross-section approximately linear hot water flow flows upward to the liquid surface of the hot water tank, and forms two stable water flows respectively flowing to the two predetermined vertical side walls at the liquid surface. The two water flows will respectively bring the fine particles suspended on the liquid surface into bands. The two predetermined vertical side walls are taken out of the hot water tank from the top of the two predetermined vertical side walls. 5. For example, the slow-pull dryer of item 1 of the patent application scope, wherein the upper side of the wave absorbing plate is inclined toward a predetermined end so that the gas in the groove on the lower side of the wave absorbing plate accumulates toward the predetermined end, and the wave The wave plate further includes an exhaust pipe provided on the upper side of the predetermined end to discharge the gas accumulated on the lower side of the predetermined end from the hot water tank. -6. For example, the slow-pull dryer of item 5 of the scope of patent application, wherein the wave-absorbing plate further comprises an inclined ω groove with an opening facing downward, which is provided at the predetermined end and the row. 页 Page 13 6. Scope of patent application Between the air pipes 'is used to allow the gas flowing to the predetermined end to continue to flow upward into the exhaust pipe' to avoid the accumulation of gas on the predetermined end. For example, if a dryer is applied (in the Subst rack, the hot water tank of the substrate will be perpendicular to the heat system and will be parallel to the vertical side of the patent system for rate) where the hot water tank that is immersed in the first will be suspended so that the ground flows through The top of the wall 7. The slow-drawing type dryer surrounding item 1, wherein the slow-drawing type cleans a plurality of substrates for manufacturing magnetic disks or wafers ^ ', and the plurality of substrates are arranged in parallel on the bearing When cleaning a plurality of substrates, the carrier and the hot water in the hot water tank are slowly drawn out of the water, and when the carrier and the plurality of bases are raised, the The straight side walls of the plurality of substrates and the linear openings on the upper side of the wave-removing plate, the hot water flowing upward from the linear openings into the hot water tank flows through the gaps between the multiple substrates, and then flows out of the hot water tank from the predetermined end. In the disc, the surface-shaped number of disc magnetic tanks on the liquid discharge side line are re-magnetized, and the water is pumped straight until the number of heat sinks. The internal heat and straightness are the first, the central chamber is the vertical plate, the water is from the surface phase of the disc, the hot plate of the disc, the water magnetic inner magnet, and the open heat of the disc is contained by the magnetic disk. A number of dish troughs are used to restore the slow magnetic water. 1 The first wash and the slow side heat are cleared on the rack, and the number is used to mount the rear rack complex board. Use the load to carry the wave. Specially, it should be done in the middle, please take advantage of it. At this time, the water should be sent to Shen Nao when it is usually hot and the mouth is like a dry film. Start the dry and dry pumping item to slow down the 1ΦΙ its First Γ I- Λ--s. M 〇 03 2 τ 6. Scope of patent application The space between the magnetic disks then flows out of the hot water tank from the top of the predetermined vertical side wall. (111