JP2001137791A - Low speed pull drier for smoothly removing particle floating on surface of hot water tank - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a low speed pull drier which removes particles floating on the surface of a hot water tank. SOLUTION: An apparatus has four side walls, a bottom plate having a water hole for packing hot water in a water tank, a rectangular downward- recessed part in the lower part, with the water hole arranged under the recessed part, and a wave removing device installed in the bottom of the water tank having linear opening parallel to a prescribed side wall of the water tank in the upper part. The hot water is introduced from the water hole into the recessed part of the wave removing device, its flow velocity is reduced in the recessed part, in the linear opening, the hot water in the recessed part is introduced into the upper part of the water tank, the formation of a panel-shaped vertical water flow is allowed, when the vertical water flow reaches the surface of the hot water in the water tank, the hot water forms a horizontal water flow moving toward the upper part of a prescribed side wall.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low-speed pull dryer, and more particularly, to a low-speed pull dryer for smoothly removing particles floating on the surface of a hot water tank.

[0002]

BACKGROUND OF THE INVENTION Low speed pull dryers are commonly used in cleaning processes to remove particles. For example, during formation of a disc, the substrate of the disc has particles deposited thereon, which must be removed to ensure product quality. Thus, in the manufacture of discs, a low speed pull dryer is used with hot deionized water to wash particles from the substrate of the disc.

Referring to FIGS. 1 and 2, FIG. 1 schematically shows a conventional low-speed pull dryer 10, and FIG. 2 shows a unit combination of the low-speed pull dryer 10 shown in FIG.
The low-speed pull dryer 10 of the prior art comprises a hot water tank 12,
It comprises a wave remover 14. The hot water (water) tank 12 includes four vertical side walls 16 and a bottom plate 18 having a water hole for filling the hot water tank with hot water. The hot water filled in the hot water tank 12 spills out of the hot water tank 12 from above the four side walls 16. The lower part of the wave remover 14 has a rectangular recess 22 facing downward. Each of the four side walls of the wave remover 14 has a semicircular opening 24 to allow water to flow from above to the top of the hot water tank 12. This wave remover 14
Is provided at the bottom of the hot water tank 12, and the water hole 20 is
Placed under

The upper portion of the wave removing plate 14 has a slope, and further includes a discharge pipe 28 provided at the upper end 26 of the slope. The hot water from the water hole 20 is supplied to the concave portion 22 of the wave remover 14.
And its flow velocity is slowed down in the recess 22. Wave remover 1
The four openings 4 allow the warm water in the recess 2 to flow to the upper part of the warm water tank 12. As the water moves toward the top of the vertical side wall 16, particles and debris floating on the hot water pass through the top of the vertical side wall 16 and are transported out of the hot water tank 12. In addition, the air in the recess 22 accumulates below the upper end 26 of the slope, and the accumulated air is sent out of the hot water tank 12 through the discharge pipe 28.

Referring to FIG. 3, this shows a schematic of the water flow in the water tank 12. In FIG. 3, arrows and spirals indicate the direction of flow and the turbulence of water, respectively. Low speed pull dryer 1
0 indicates that the hot water from the water hole to the concave portion 22 has four openings 2 when used in the process of cleaning the hard disk.
4 to the water tank 12 and almost directly overflows the four vertical side walls of the water tank 12. This is because each position of the four openings 24 is
On each of the four side walls of the water tank 12 and is very close to each of the four vertical side walls 16 of the water tank 12. The hot water forms a turbulent flow in the water tank 12 (see FIG. 3). As a result, it is very difficult to remove the particles from the substrate with the low speed pull dryer 10 and the particles floating on the surface of the hot water are collected in the water tank instead of flowing out of the water tank 12, which is used for cleaning the disk. Affects processing quality.

Deionized hot water is used in a low speed pull dryer to wash the substrate, and since the hot water always contains a lot of foam, the low speed pull dryer is integrated at the upper end 26 of the wave remover 14 outside the water tank 12. An exhaust pipe 28 is provided to allow the air collected from the foam to escape. However, the discontinuous exhaust from the discharge pipe 28 causes the vibration of the discharge pipe 28 causing a wave of water inside the water tank 12, so that the substrate has a watermark thereon, and thus the yield of the disc. Decreases. In addition, discontinuous exhaust from the discharge pipe 28 generates noise.

[0007]

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a low-speed pull dryer which solves the above problems.

[0008]

SUMMARY OF THE INVENTION The above object has four side walls and a bottom plate having a water hole for filling a water tank with hot water. A rectangular water tank spilling out of the tank; having a downwardly directed rectangular recess at the bottom, the water hole at the bottom of the water tank is located below the recess, and at the top is parallel to a predetermined side wall of the water tank. A wave remover provided at the bottom of the water tank having a linear opening, the warm water from the water hole flows into the concave portion of the wave remover, the flow velocity is reduced by the concave portion, and the upper part of the wave remover The linear openings allow the hot water in the recess to flow into the top of the water tank and form a vertical water flow in the form of a panel, and when the vertical water flow reaches the hot water surface of the water tank, it Form a horizontal stream of water moving towards the top, thereby creating a hot water surface Particles and dust floating is achieved by low speed pull-dryer is transported out of the horizontal water flow.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 4 and 5, FIG. 4 schematically shows a low-speed pull dryer 30 according to the present invention.
Indicates a combination of units of the low-speed pull dryer 30 shown in FIG. The low speed pull dryer 30 of the present invention comprises a recirculating water tank 32 and a rectangular wave remover 34. The water tank 32 has four vertical side walls 35, 37, 39,
41 and a bottom plate 36 having a water hole 40. Water hole 40
Is provided below the water tank 32 and is used to fill the water tank 32 with hot water. The hot water filled in the water tank 32 spills out of the water tank 32 from the upper portions of the four vertical side walls 35, 37, 39, 41. The wave remover 34 is provided at the bottom of the water tank 32. The lower portion of the wave remover 34 has a rectangular recess 42 facing downward, and the water hole 40 at the bottom of the water tank 32 is located below the recess 42. Wave remover 34
Has a linear opening 44, which is parallel to the side walls 35, 39 of the water tank 32.

[0010] The warm water from the water hole 40 flows into the concave portion 42 of the wave remover 34, and its flow velocity is reduced by the concave portion 42. The linear opening 44 on the upper part of the wave remover 34 allows the warm water in the concave part 42 to flow into the upper part of the water tank 32 to form a panel-shaped vertical water flow. When the vertical stream reaches the warm water surface of the water tank 32, it forms a stable horizontal stream. The direction of flow of the horizontal water flow is four side walls 35, 37, 3
9, perpendicular to 41. The horizontal water flow has four side walls 35, 3
The particles and debris floating on the surface of the hot water flow out of the water tank 32 through the top of the four side walls 35, 37, 39, 41 by means of a horizontal stream of water.

The wave remover 34 further comprises a discharge pipe 46,
It has an inclined groove 48 and a flange 50 projecting downward. The upper portion of the wave remover 34 includes a ramp that carries bubbles accumulated in the recess 42 to the upper end 52 of the wave remover 34. The discharge pipe 46 of the wave remover 34 is connected to the upper end for sending the air collected from the foam accumulated at the upper end 52 to the outside of the recess 42. The inclined groove 48 is at the upper end 52 and the discharge pipe 46
Is connected to the upper end of the inclined groove 48 so that the upper end 5
The foam accumulated in 2 continuously flows into the pipe 46 through the inclined groove 48 to prevent the foam from accumulating on the upper end 52. The flange 50 protruding downward is provided around the lower portion of the linear opening 44 to prevent bubbles accumulated in the concave portion 42 from flowing into the water tank 32 through the linear opening 44.

Referring to FIG. 6, this shows a schematic of the water flow in the water tank 32. The arrow in FIG. 6 indicates the direction of the water flow. The low speed pull dryer 30 of the present invention is applied to a process for cleaning a disk or a semiconductor wafer. When cleaning a plurality of substrates 54, the substrates 54 are loaded vertically to be parallel to a carrier (not shown). When cleaning the substrate 54, the carrier is completely immersed in the warm water of the warm water tank 32 and then slowly lifted out of the warm water.
The particles on the substrate 54 are removed by the surface tension of the hot water.
As the carrier moves away from the hot water, the surface of the substrate 54 is aligned with the horizontal flow, so that the horizontal flow is
Flows smoothly through the surface of the vertical side walls 35, 3
It flows out of the water tank 32 through the upper part of 7, 39, 41. Furthermore, the low speed pull dryer 30 of the present invention is applied to a process for cleaning a plurality of disks or semiconductor wafers.

In the low-speed pull dryer 30, the linear openings 44 of the wave remover 34 are parallel to the vertical side walls 35 and 37. The hot water from the water hole 40 flows upward through the linear opening 44 and enters the upper part of the water tank 32 to form a vertical water flow in a panel shape. When the vertical stream reaches the surface of the warm water in the water tank 32, it splits to form a horizontal stream that lines up with the surface of the substrate 54 and flows smoothly over the surface of the substrate 54. Therefore, no turbulence is formed in the water flow, and particles and dust floating on the surface of the hot water are removed by the horizontal water flow.
It is carried out of 2. On top of that, an inclined groove 48 is arranged at the upper end of the wave remover 34, whereby the wave remover 34
The foam accumulated at the upper end of the pipe continuously flows into the discharge pipe 46. This continuous drain design prevents the discharge pipe 46 from vibrating and the hot water undulating, thus avoiding the water mark and noise problems of the substrate 54. Thus, the low speed pull dryer 30 of the present invention enhances the quality of the substrate or disk cleaning process.

Referring to FIG. 7, this is an alternative embodiment of the low speed pull dryer according to the present invention. The difference between the low speed pull dryer 60 and the low speed pull dryer 30 in this embodiment is the structure of the vertical side walls. The following description focuses on the vertical sidewalls of the low speed pull dryer 60. The water tank 62 of the pull dryer 60 has four side walls 64, 66｀68, 7
0, where the vertical sidewalls 64, 68 are vertical sidewalls 6
6, 70, the vertical sidewalls 66, 70 are parallel to the linear openings 44 of the wave remover 34.

Referring to FIG. 8, this shows a schematic of the water flow in the water tank 62 shown in FIG. The arrows in FIG. 8 indicate the direction of flow. When hot water from the water hole 40 flows into the water tank 62 through the linear opening 44, the linear opening 44 allows the hot water to flow into the upper part of the water tank 62 and form a panel-shaped vertical water flow. Allow. When the vertical stream reaches the surface of the warm water, it splits and the two vertical sidewalls 66,
Form two horizontal streams of water flowing toward the top of 70 so that particles and debris floating on the surface of the warm water are transported out of tank 62 through the top of side walls 66, 70 by the two horizontal streams. It is.

In contrast to the prior art pull dryer 10, the wave remover 34 of the slop pull dryers 30, 60 according to the present invention has a linear opening 44 for guiding hot water into the water tanks 32,62. Because the linear openings 44 are parallel to the vertical side walls 35, 39 of the water tank 30 or the vertical side walls 66, 70 of the water tank 60, the hot water forms a stable horizontal water flow on the surface of the hot water in the water tanks 3, 62. , Form a smooth flow through the surface of the substrate 54 or disk.
The horizontal water stream moves toward the vertical side walls and carries particles and debris floating on the surface of the hot water out of the water tank 32. On top of that, the wave remover 3 of the low speed pull dryer 30, 60 of the present invention
4 has an inclined groove 48 in which bubbles accumulated at the upper end of the wave remover 34 continuously flow into the discharge pipe 46 through the inclined groove 48. This continuous discharge design has a discharge pipe 6
4 is prevented from vibrating, thus avoiding the watermark and noise problems of the substrate 54 or the disc. Hence, the low speed pull dryer of the present invention improves the quality of the process of cleaning the substrate 54 or disk.

[Brief description of the drawings]

FIG. 1 shows a schematic of a prior art low speed pull dryer.

FIG. 2 shows a combination of units of the low-speed pull dryer of FIG.

FIG. 3 shows a schematic of a water flow in a prior art water tank.

FIG. 4 shows an outline of a low-speed pull dryer of the present invention.

FIG. 5 shows a combination of units of the low speed pull dryer of FIG.

FIG. 6 shows an outline of a water flow in a water tank of the present invention.

FIG. 7 shows a schematic of an alternative of a low speed pull dryer according to the invention.

FIG. 8 shows a schematic of the water flow in the water tank shown in FIG.

[Explanation of symbols]

10, 30, 60 Low speed pull dryer 12, 32 Hot water tank 14, 34 Wave eliminator 16, 35, 37, 39, 41, 64, 66｀68, 7
0 Vertical side wall 18, 36 Bottom plate 22, 42 Recess 24, 44 Opening 20, 40 Water hole 26, 52 Upper end 28, 46 Discharge pipe 48 Groove 50 Flange 54 Substrate

Continuing on the front page (72) Inventor Huyen-Sien Taiwan Singh City Quang Kwang Street Lane 97 No. 11 (72) Inventor Soo Jui-Shen Taiwan Khao-Siung City Qian-Cheng Ward Kang-shan S-Street Number 339 (72) Inventor Cheng Chong Taiwan Miao-li City Khao-Miao Ward Community 7 Tien-Yung Street No. 30 (72) Inventor Cheng Yan Taiwan Tao- Yuan-Sien-Part-Sian Wen-Chang Street Lane 84 No.9 F-term (Reference) 3B201 AA03 AB01 AB44 BB04 BB82 BB87 BB92 CB01

Claims (8)

[Claims] 1. A rectangle having four vertical side walls and a bottom plate having a water hole for filling a water tank with hot water, wherein the hot water filled in the water tank spills out of the water tank from one predetermined side wall. A water tank with a downwardly facing rectangular recess at the bottom, a water hole at the bottom of the water tank is located below the recess, and a linear opening at the top parallel to a predetermined side wall of the water tank. The wave remover provided at the bottom of the water tank, the warm water from the water hole flows into the concave portion of the wave remover, the flow velocity is reduced by the concave portion, and the linear opening at the top of the wave remover is the concave portion. Hot water flows into the top of the water tank and forms a vertical water flow in the form of a panel, and when the vertical water flow reaches the hot water surface of the water tank, it moves towards the top of the given side wall. Particles and debris that form a stream of water and thereby float on the surface of the warm water Is a low-speed pull dryer that is transported out of a horizontal stream. 2. The low-speed pull dryer according to claim 1, wherein the direction of the horizontal water flow is perpendicular to the predetermined side wall. 3. The wave remover further includes a downwardly projecting flange provided around a lower portion of the linear opening to prevent bubbles accumulated in the concave portion from flowing into the water tank through the linear opening. A low speed pull dryer according to claim 1 including: 4. The hot water in the water tank also splits when a vertical stream of water from the linear opening reaches the surface of the hot water.
Forming two horizontal water streams moving towards the top of the two side walls, and also spilling from the top of the opposite side wall parallel to the given side wall, so that particles and debris floating on the surface of the warm water are separated by the two horizontal water streams. The low-speed pull dryer according to claim 1, which is conveyed out of the tank. 5. The wave remover includes a slope for conveying foam accumulated in the wave remover to an upper end of the wave remover, wherein the wave remover further includes a foam accumulated at an upper end outside the water tank. 2. A low speed pull dryer as claimed in claim 1, including a discharge pipe connected to the upper end for sending air collected from the dryer. 6. The wave remover further includes a sloped groove at an upper end of the remover, and the discharge pipe is connected to an upper end of the sloped groove, so that foam accumulated at the upper end is connected to the discharge pipe through the sloped groove. 6. The low-speed pull dryer according to claim 5, wherein the low-speed pull dryer flows in a flow. 7. A low-speed pull dryer is used for cleaning a plurality of substrates for disks or wafers, wherein the substrates are loaded vertically in parallel carriers for cleaning, and the carriers are washed when the substrates are cleaned. Completely immersed in warm water in a warm water tank, then slowly lifted out of the warm water,
When the carrier leaves the hot water, the surface of the substrate is aligned with the horizontal flow of water, whereby the horizontal flow of water flows smoothly through the surface of the substrate and then out of the water tank through the top of the given sidewall. Item 7. A low-speed pull dryer according to Item 1. 8. A low speed pull dryer is used to wash a plurality of discs, wherein the discs are loaded vertically in parallel carriers for washing, and when the discs are washed, the carrier is heated in a hot water tank. Completely immersed in the water, and then slowly lifted out of the hot water, when the carrier leaves the hot water, the surface of the disk is aligned with the horizontal water flow, so that the horizontal water flow flows smoothly through the surface of the disk, and then 2. The low speed pull dryer of claim 1 wherein the low speed pull dryer flows out of the water tank through an upper portion of the predetermined sidewall.