TW464578B - Control of median crack depth in laser scoring - Google Patents

Abstract

A glass sheet is separated by propagating a crack in the glass sheet. By moving a laser beam across the surface of the glass sheet along a desired line of separation and then streaming coolant at the glass sheet at a predetermined distance behind the laser beam. By altering the profile of a laser beam used to score glass, and by changing the distance between the spot where the laser beam impinges on the glass and the spot struck by the stream of coolant, the penetration depth of the resultant median crack can be controlled.

Description

Central Standards Bureau of the Ministry of Economic Affairs®; Industrial and Consumer Cooperative Coupling 46457 8 V. Description of the Invention (z) · The carbon dioxide laser and the moving speed are about 500 ram / second, and most of the heat is kept in the area below the glass surface of less than 500 microns. Inside. This laser scribing 'property allows cracks to form which only partially extend through the glass. The shape of the electromagnetic field in the laser cavity depends on the curvature of the mirror, the distance between the discharge tube, the diameter of the opening, and the energy wavelength. The shape of the beam formed by the laser is usually classified according to the number of zeros, which appears in both directions through the beam section. For most applications, beams with a Gaussian energy distribution without zero are preferred. However, for the glass splitting process, a non-Gaussian mode with one or more zero values can be used to transmit the laser moon dagger more evenly to the glass surface, and its production vehicle has a higher efficiency laser scribe speed. Lasers for D-mode operation have been described in US Patent No. 5,776,220, which is incorporated herein by reference. Fig. 2 shows a cross section of the energy distribution of a laser beam of the D mode according to the present invention. The non-Gaussian beam has at least a pair of intensity peaks located in the central region of the lower energy distribution. The present invention preferentially uses the beam. As shown by Kondratenko (PCT WO 93/20015), the shape of the laser beam projected on the glass sheet is expanded. round. The major and minor axes of the flip shape generally satisfy the following relationships: a = 0. 2 to 2. Oh and 0 to 10. 0 h where a is the length of the short axis and b is the length of the long axis; and h is the length of the laser secant Glass sheet thickness. According to tadratenk. The patent, needle big button at this time, will affect the accuracy of the cutting process. Therefore the thickness of the glass substrate ((please read 1¾), read the precautions on the back, and then fill in this page) λ'4, 1Τ 46457 8 Λ7 B7 V. Description of the invention-Λ: ί 局 局 " vr 印 -7. '! LCD display money-the same thickness), Koi * at enk. It is revealed that the length of di green does not exceed 7mni. In order to increase v into a 憜 -shaped circular beam, the eastern distribution of laser light generated by |) mode is usually transformed by using two oval lenses to form an oval-shaped beam. The _-shaped beam is used to directly illuminate the glass surface. Using this technique, the depth of the crack in the middle of a beam of 280 watts is usually in the range of 115 to 118 microns, and it is 120 to 125 microns with a 330 watt beam. These laser scribing technologies produce good-quality divided edges by forming intermediate cracks that do not contain particles. The reproducibility of the process and the quality of the formed laser scribing technology can make LCD and other flat display substrates. Edge split quality is highly needed. In addition, almost any application that requires shaping glass sheets, such as manufacturing automotive windows, cosmetic mirrors, or community windows, can beneficially use laser scribing. However, in some applications, glass parts need to be processed after scribing but before the singulation process. Scribing glass processing can cause the part to split prematurely. One way to prevent this problem is to form shallow intermediate cracks that are less likely to cause accidental splits. However, the previously disclosed scribing method does not allow: the intermediate crack is finely controlled, nor does it produce a uniform scribing depth without being affected by changes in the laser beam energy or the location of the cooling water flow. Therefore, there is a need for a method to control the depth of the intermediate crack, which is formed by a scribing technique. The invention is important: Therefore, the object of the present invention is to provide a method and a device for controlling the penetration depth of the intermediate crack. The wire method is formed on a glass sheet. It is said that the Zhang scale is applicable to the standard of the Chinese family (匚 \ 5) / \ 4 specifications (2 丨 0; < 297 and 4), (please read the "" and note " " before filling out this page)

464578 A7

B7 According to the method of the present invention, the glass-breaking sheet is heated by a laser beam spot, which moves along the frit surface to form a quiet crack. The laser is transmitted through one or more lenses to form an elliptical beam. Opaque correction is used to close the elliptical beam at the surface of the beam-the ellipses are turned into intercepted elliptical beams, which move along the glass sheet to heat the glass surface. The coolant fluid is thrown by the cooling nozzle to the heating point. The cooling distance of the circular light phase is taken at the cooling point and the moving area to control. The cooling distance can be changed by using the cooling distance to control the penetration depth of the crack between the towels. Solve the needs of laser scribing and glass splitting system control in this form. It will be clear that these and other aspects will be changed from the following detailed description to the simple description of the drawings: The first figure (Figure 1) shows the surface treatment of the present invention Process ^ Figure = (Figure 2) shows the energy distribution of the standard D-mode laser beam .. The third A, B and Guan a, b and 0 show the light east energy of the fourth figure of the f-beam of the present invention. The figure 5 shows the sphericity of the crack. (Figure 4) shows that the present invention is distributed in _, and the round shape (Figure 5) shows that the intermediate drawing elements that work in glassy matter are described by the numerical symbol of the glass: glass piece; glass Table φ il; crack initiation point 12 1_edge 18; crack 20; spray beam 22; coolant 24, beam 32; lens 34; beam 36; shape 38; shade Qin 40. The preferred embodiment is explained in detail: • Pan-square ruler and general Chinese garden garden standard Chinese CNS) Λ4 ^ grid (2; qx 297 male film 7 4578 Λ7 B7 4

The embodiments of the drawings will be described in detail. The following examples of material properties and the structure does not produce restrictions c klt- Ben Gongming is about the use of laser method to split the glass chip along the required split line. #_ 示 本 发财 年 料 '制, the top side of the glass has the main watch. Bo Zecai first made a score or scribe along the edge of the glass to form a crack initiation point 12 on the edge of the glass. The crack initiation point 12 is further corrected by the pin f to pass the light through the glass sheet 1G to form a crack 2Q. The laser beam spot 16 uses a laser, such as a CO2 laser, to form a first beam 32. Operating the C02 laser in a Moh mode will generate a light beam, and its energy distribution is shown in Figure 2. The first light beam 32 can be transformed by one or more lenses 34, such as a pair of cylindrical lenses, to form a second light beam 36, which has an oval shape 38. The second light beam is worn by one or more opaque masks 40 to form a third light beam 16. Any material capable of absorbing and dissipating the energy of the snow beam can be used to form the opaque mask 40. The carbon mask exhibits high thermal conductivity and is effective in this respect, although its lower oxidation temperature will limit the life of the carbon mask in the manufacturing environment. Another variation to form the opaque mask 40 includes any high temperature ceramic material. The opaque mask 40 should actually be sufficiently large to dissipate the heat generated without affecting other devices. Typical masks are 4 inches square and a quarter inch thick. The third light beam 37 has a truncated elliptical shape and heats a local area of the glass sheet along a desired split line. The heating point glass has a predetermined temperature gradient and distribution. It is determined that, ___________— " " T " In order to curb the house mark China (CNS > M «L Grid (210X29 "? 公 & 7464578 Λ7) Central standard> 1 V »Printed description of the invention (set)-Determined by the beam shape, energy and irradiation time ° Second, the glass is quenched by the fluid coolant 24 via the spray beam 22, which preferentially uses water. When operating in Within the correct thermal equilibrium range (considering the distribution of light east, beam energy, processing speed, water volume, and the distance between the water flow nozzle and the beam, as shown in the figure as c), the tensile stress caused by rapid cooling of the glass surface is sufficient to start from the formation Defect 12 generates intermediate cracks and causes cracks to propagate through the glass surface at a processing speed. As shown in FIG. 3a, the second beam produces an elliptical shape with a short axis of 3 and a long axis of b. According to the present invention, FIG. 3a is oval The light beam is intercepted at a distance from one end of the long axis as shown in FIG. 3b or at both ends as shown in FIG. 3C. The elliptical beam 36 is effectively longer than 20 faces, and more preferably greater than 30 before interception. _, And the highest priority is 4 (M2 (km or more.) The mask 40 can be preferentially installed to cover 20 to 40 when measuring along the long axis. The second beam 36 ^ laser beam point 16 intercepts the central axis pair The direction of travel of the split line required to pass through the glass sheet 10 is m. For thin glass sheets (1.1 or less), we find that the optimal length of the long axis of the laser beam point is related to the required running speed, of which the long The axis is preferentially at least 10% of the required laser marking speed per second. Therefore, for a laser scribe rate of 500mm for a 0.7mm thickness breaking glass, the long axis of the laser is preferentially at least 50mm long. The middle crack 20 only partially extends below the surface 10 of the glass sheet 10 with a depth d so that the middle crack 20 is formed as a score line. The depth, shape and direction of the crack are determined by the thermoelastic stress distribution, which in turn is mainly determined by the following numbers Xiang Yinjing: the energy density, size, and shape of the beam spot; the relative displacement rate of the beam spot through the substrate material; the thermophysical properties, the coolant supplied to the heating area (please read the note on the back first and then fill out this page) ) L. Ding, 15 »1 A7 .464578 Explanation of the invention (supply) ... the supply conditions and quality; and the thermophysical and mechanical properties of the split material, its thickness, and surface state. In order to control the depth of the intermediate crack, the present invention uses intercepted elliptical light east 16 pairs of glass i 〇Heating. Therefore, it has the specific quality of this special shape light beam. The depth of the intermediate crack d changes as the projection point of the cold bell fluid moves relative to the laser beam. Figure 1 depicts the trailing edge of the laser light beam point 16 and the fluid coolant 24 Only X fires to the cooling distance c between the glass point 10. The cooling distance is changed by cooling the glass at a point closer to the laser. The intermediate cracks produced are shallower than the intermediate cracks formed using a larger cooling distance c. For example, an elliptical light beam formed by a laser 30 and a cylindrical lens 34. The short axis of the beam is 1-5 legs and the long axis is 90mm. The opaque mask 40 of the present invention is placed between the lens 34 and the glass 10 so that the region of the long axis edge 18 is closed as if projected on the glass to take the elliptical laser beam spot 16. Since-part of the laser beam energy is intercepted by the opaque mask as shown in Figure 4, the cutting energy generated on the glass surface 10 is equivalent to the unshielded beam energy, which requires the laser 30 to be operated at a higher set power. As shown in the graph of FIG. 5, when the glass is heated by using a shielded beam, the depth of the intermediate cracks significantly changes with the cooling distance ^ For example, when the pout is located 5_ Using a shielded beam of 32 watts will produce an intermediate crack depth of about 100 microns. By adjusting the mouth to produce a cooling distance of 12 coffees, the depth of the middle crack was increased to about 11 micron 0. Finally, the glass sheet 10 was split into smaller glass sheets, and then by applying a bending force (CNS), 4¾¾ (2 ! 0Χ ^ ΪΤ Φ 464578 Fifth, the description of the invention (γ) The moment is achieved under the crack. The bending can be broken by using the traditional bending device (not shown) using some of the more traditional mechanical surface scribing methods. Achieved by the processing process. The laser beam 30 used as the glass splitting operation should be able to heat the surface of the cut glass. Therefore, the laser light is preferentially shorter than the absorption wavelength of the glass. In order to achieve this, the light is irradiated 6-3. Preferably in the infrared range, its wavelength is greater than 2 microns, such as the use of a CO2 laser with a wavelength in the range of 9-11 microns; or a CO laser with a wavelength of 5-6 microns, or a wavelength of 2. 6-3. 0 micron HF laser, or YAG laser with a wavelength of about 2-9 micron. When the current test mainly uses a C02 laser with a power in the range of 150-300 watts, we believe that it can successfully use a higher power laser. Although the invention has been The purpose is to explain in detail, people understand that the detailed description is only for that purpose, and those skilled in the art can make many changes from it, but it will not depart from the spirit and scope of the invention defined by the scope of the following patent applications. People understand the invention The above-mentioned preferred embodiments can be easily used, changed and changed, but they are all included in the scope of the following patent applications. In addition, although some related elements have been mentioned, they can substitute for the preferred embodiments. The description and enumeration of the elements does not exhaustively point out all possible related situations, nor does it limit the scope of the patent application to define the invention as a specific related situation or a combination thereof. Those skilled in the art understand that there will be other items known The related components that are or will be released can be used within the scope of the present invention. 厶 Guild scale is applicable to the Chinese solid standard SCNCN (CNS) Λ4 specification 2iO'X 297 male) (! '

Claims (1)

I ίΠ *% Human IT as Α8 Β CS DS 46457 Β Patent application scope l. A method of scoring a glass by passing a laser beam on the glass surface, the method includes the following steps: '内What is the operation of the laser to form a first beam; using one or more lenses to transform the first beam into a second beam which has long and short axis stretched oval beam spots on the projection glass. At least one end of the light beam is physically closed-part of the second light beam to reduce the long axis of the second light beam point and form a third light beam; move the third light beam through the surface to become heated, and move the second light beam there, It has a leading edge and a trailing edge; ρ sends out the coolant on the heated glass and moves the trailing edge of the third beam to a predetermined distance to form a crack in the glass. The method according to item 1 of the scope of patent application includes the following steps: Change the predetermined distance to effectively control the crack depth. 3. According to the method of the first scope of the patent application, its f laser 2 is laser. 4. According to the method in the patent scope, the laser is operated in gland. 5. The method according to item 丨 of the scope of patent application, wherein the moving speed of the glass is 0 to · seconds. M The method according to item 1 of the patent application, wherein two cylindrical lenses are used to transform the first light beam into a second light beam. 7. According to the application for enveloping magic items, the second light beam of the towel is physically closed at the area opposite to the second light beam point, one end portion. ^ The method according to item 丨 of the patent application, wherein the second light beam is physically closed at the two end portions opposite to the first light beam point. 9_ According to the method of the patent claim of the towel, the long axis of the second beam of the towel is sealed. 4M578 Φ 谙 Λ8 B8 CS DS Analysis of the Central Standards Bureau of the Ministry of Economic Affairs of the Patent-poor Patent Fanyuan · Closed: After the two beams are reduced, the percentage is reduced by 20 to 40% :, The long axis of the beam spot is to 12. The legs were reduced to 50% of the burned car & 80% sun after being closed. The method of 1 'guillotine slicing a glass sheet includes: (a) moving a laser beam through a glass beam f to be classified; the laser beam f is projected on the glass beam having a MM beam; And the short axis and align the long axis with the split line; (b) Ramie n passes through the glass sheet along the f to be split line and a predetermined distance after the laser beam to propagate some deep cracks; and (〇 The glass is split along this crack. 12, According to the towel fabric method, the area of the beam-shaped beam spot is formed by closing a part of the laser beam that is opposite to the oval beam spot, which is The long axis of the beam spot will be reduced. 13, The method according to item 丨 2 of the scope of the patent application, in which part of the laser beam at each end of the relatively elliptical beam spot is closed. 14, according to the scope of the patent application scope 丨 丨Method, which further includes changing the predetermined distance to effectively control the crack depth. 15, The method according to item 丨 丨 in the scope of the patent application, in which the laser beam is generated by a co2 laser. 16. According to the scope of patent application No. 11 Method, in which the laser beam is in the D mode Π · According to the method in the scope of application for patent application, π, wherein the moving speed of the laser beam relative to the glass sheet is from 200 to 700 rpm / second. Please fill in this page again.] ---- Come-ί— '! _-. Zou 464578 Λ 8 Β8 C8 08, 2 Application • Chong 丨 18 · According to the method of the 11th patent application park, in the closed section After copying the first beam, the long axis of the second beam is reduced by 20% to 40%.;:;, Please read " 'and note this before filling out this page) Binding 丨,