TW447088B - Rolling attachment method for thin film of ball grid array substrate and heat sink - Google Patents

Rolling attachment method for thin film of ball grid array substrate and heat sink Download PDF

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Publication number
TW447088B
TW447088B TW89108975A TW89108975A TW447088B TW 447088 B TW447088 B TW 447088B TW 89108975 A TW89108975 A TW 89108975A TW 89108975 A TW89108975 A TW 89108975A TW 447088 B TW447088 B TW 447088B
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Taiwan
Prior art keywords
ball grid
grid array
substrate
heat sink
film
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TW89108975A
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Chinese (zh)
Inventor
Cheng-Lung Kuo
Edward Huang
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Chipmos Technologies Inc
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Abstract

This invention is about a kind of rolling attachment method for thin film of ball grid array substrate and heat sink. This method includes the following steps: making thin film of ball grid array substrate corresponding to the heat sink of heat sink material panel; placing the thin film of ball grid array substrate on the heat sink; using the roller tool to perform the rolling process onto the heat sink material panel; performing the pre-curing and the post-curing processes onto heat sink material panel in order to raise the attachment reliability.

Description

447088 五、發明說明α) _ 【發明領域】447088 V. Description of invention α) _ [Field of invention]

本發明係關於—播& A ...甘4士 、種球格陣列基板薄膜及散熱片之輥壓黏 別有關於利用輥輪組〔roller tool〕將球 格列板薄膜輥壓在散熱片上進行黏貼製程 〔attachment pr〇cess〕,以擠壓消除殘存在球格陣列基 板薄膜及散熱片之間的間隙〔gap〕及氣泡〔air bubble 〕 ° 【先前技術】 習用球格陣列半導體元件,於丨9 9 8年6月〗6曰頒予歐森 〔Olson〕之美國專利第5,766,74〇號及於1998年8月25日 頒予歐森t Olson〕之美國專利第5, 7« 8, 171號揭示一半導 體元件構造,如第一圖所示。該半導體元件〗〇〇包含一基 板〔active circuit〕110、一 絕緣層〔insulating layer〕120 及一散熱片〔heat sink〕130。該絕緣層 係由一未充填的熱塑性的塑膠片〔un f i 11 ed thermoplastic sheet〕及位於該塑膠片兩面的二黏膠層 〔adhesive layer〕組成。該基板110、絕緣層120及散熱 片130相互堆疊,使得該絕緣層120隔離基板11〇及散熱片 130之間,並在構造上利用黏膠層〔adhesive layer〕相 互黏貼形成半導體元件100。然而,在進行黏貼製程上 時,往往在基板11 〇及散熱片1 30之間存在間隙及空氣,而 利用壓合的方式將該基板11 0及散熱片1 3 0黏貼時,存在於 該間隙形成密閉空間而導致殘存於該空間的氣體形成氣 泡。該氣泡群使得基板110表面形成凹凸不平的表面,進The present invention relates to the rolling and bonding of a seeding grid, a ball grid array substrate film, and a heat sink. The invention relates to the use of a roller tool to roll the ball grid plate film to heat dissipation. An attachment process is performed on the chip to eliminate the gap [gap] and air bubbles remaining between the film of the ball grid array substrate and the heat sink by squeezing. [Previous technology] The conventional ball grid array semiconductor device, [June 9, 1998] US Patent No. 5,766,74 issued to Olson on June 6, and US Patent No. 5, 7 issued to Olson on August 25, 1998 « No. 8, 171 discloses a semiconductor device structure, as shown in the first figure. The semiconductor device includes an active circuit 110, an insulating layer 120, and a heat sink 130. The insulating layer is composed of an unfilled thermoplastic plastic sheet [un f i 11 ed thermoplastic sheet] and two adhesive layers (adhesive layers) located on both sides of the plastic sheet. The substrate 110, the insulating layer 120, and the heat sink 130 are stacked on each other, so that the insulating layer 120 isolates the substrate 110 and the heat sink 130, and a semiconductor layer 100 is formed by using an adhesive layer to adhere to each other in structure. However, when performing the bonding process, there is often a gap and air between the substrate 110 and the heat sink 130, and when the substrate 110 and the heat sink 130 are bonded by means of compression, there is a gap. The formation of a closed space causes gas remaining in the space to form bubbles. The bubble group causes the surface of the substrate 110 to form an uneven surface.

C:\Logo-5\Five Coininents\PK7244.ptd 第4頁 447088 五、發明說明(2) 而使該基板110表面的焊塾〔bondi ng pad〕及球塾〔bal 1 pad〕位置產生偏移〔shift〕,因此該半導體元件100往 -往具有在進行打線製程〔wire bonding process〕時發生 打線失誤’或在基板11 〇及散熱片1 3 0之間產生分層 〔delaminate〕的缺點,使得半導體元件1〇〇無法通過可 賴度測試〔rel iabi 1 i ty test〕。雖然該美國專利第 5, 766, 740號及第5, 798, 171號利用基板110設有平面 〔flat surface〕與散熱片130黏合以改善間隙阻礙熱傳 導的問題,但其構造上改良能改善間隙問題的程度仍有 限。 有鑑於此’本發明改良上述之缺點,利用輥輪組將球格 p 陣列基板爾〕膜輥壓在散熱片上進行黏貼製程,以擠壓消除 殘存在球格陣列基板薄膜及散熱片之間的間隙及氣泡, 而本發明提升半導體元件產品〔pr〇ducts〕之可齡度。 【發明概要】 ' 本發明主要目的係提供一種 之輥壓黏貼方法’其利用輥輪 在散熱片上進行黏貼製程,以 板薄膜及散熱片之間的間隙及 導體元件產品可賴度之功效。 根據本發明之球格陣列基板 法,該方法包含下列步驟:將 熱片基材條片之散熱片;將球 上;將該散熱片基材條片利用 球格陣列基板缚膜及散熱片 組將球格陣列基板薄膜輥壓 擠壓消除殘存在球格陣列基 氣泡’使本發明具有提升半 薄膜及散熱片之輥壓黏貼方 球格陣列基板薄臈對應於散 格陣列基板薄臈置於散熱片 輥輪組進行輥壓;將該散熱C: \ Logo-5 \ Five Coininents \ PK7244.ptd Page 4 447088 5. Description of the invention (2) The position of the bonding pad [bondi ng pad] and ball (bal 1 pad) on the surface of the substrate 110 is offset. [Shift], therefore, the semiconductor device 100 has a disadvantage that a wiring error occurs during a wire bonding process or a delaminate is generated between the substrate 11 and the heat sink 130. The semiconductor device 100 failed the rel iabi 1 i ty test. Although U.S. Patent Nos. 5,766,740 and 5,798,171 use substrate 110 to provide a flat surface and adhere to a heat sink 130 to improve the problem that the gap hinders heat conduction, the structural improvement can improve the gap. The extent of the problem remains limited. In view of this, the present invention improves the above-mentioned disadvantages, and uses a roller set to roll the ball grid array substrate and the film on the heat sink to perform the sticking process, so as to squeeze and eliminate the remaining between the ball grid array substrate film and the heat sink. Gaps and bubbles, and the present invention improves the ageability of semiconductor device products. [Summary of the invention] 'The main purpose of the present invention is to provide a method of rolling and pasting', which uses a roller to perform a pasting process on a heat sink, with the effect of the gap between the plate film and the heat sink and the reliability of the conductive component product. According to the ball grid array substrate method of the present invention, the method includes the following steps: placing a heat sink substrate on a heat sink sheet; mounting the ball; using the ball grid array substrate binding film and a heat sink group on the heat sink substrate strip. Rolling and extruding the ball grid array substrate film to eliminate the remaining bubbles in the ball grid array base makes the roll-adhesion of the ball grid array substrate with a semi-thin film and heat sink of the present invention thin, corresponding to the thin grid array substrate. The heat sink rollers are rolled;

44708 8 五、發明說明(3) 片基材條片進行先行及後續固化處理以提升黏貼 【發明說明】 »报仪 為了讓本發明之上述和其他目的、特徵、和優點能更明 確被了解’下文將特舉本發明較佳實施例,並配合 式,作詳細說明如下。 本發明之球格陣列基板薄膜及散熱片之輥壓黏貼方法, f主要利用輥輪组將球格陣列基板薄膜輥壓在散熱片上進 行黏贴製程,以擠壓消除殘存在球格陣列基板薄膜及 片之間的間隙及氣泡。該輥壓黏貼方法使得半導體元 其他製程並不需要更改。 ' 本發明之第二及三圖揭示散熱片基材條片在進行黏貼 程以形成球格陣列半導體元件之立體示意圖。44708 8 V. Description of the invention (3) Pre- and post-curing treatment of substrate strips to improve adhesion [Explanation of the invention] »In order to make the above and other objects, features, and advantages of the present invention more clearly understood ' Hereinafter, the preferred embodiments of the present invention will be specifically described, and the formulas will be described in detail as follows. The ball grid array substrate film and the radiating fin rolling method of the present invention, f mainly uses a roller set to roll the ball grid array substrate film on the heat radiating fin to perform the sticking process, so as to squeeze out the remaining ball grid array substrate film And the gaps and bubbles between the sheets. This roll-to-stick method eliminates the need for changes in other semiconductor cell processes. '' The second and third figures of the present invention disclose three-dimensional schematic diagrams of heat sink substrate strips undergoing a bonding process to form a ball grid array semiconductor device.

請參照第二圖所示,一散熱片基材條片A内包含數個 熱片a供進行黏貼製程。本發明較佳實施例之輥壓黏貼万 法,將球格陣列基板薄膜B對應於散熱片基材條片A之散熱 片a—’該球格陣列基板薄膜B包含一黏膠層。將球格陣列^ 板薄膜B利用沖壓機〔punching tool〕置於相對應的散& 片上定位〔position〕,使得散熱片基材條片八之^熱片: 上形成利用黏膠層堆疊之球袼陣列基板薄膜B ^此時,在 球,唪列基板薄膜B及散熱片a之間形成間隙及該間隙内 存著氣體形成氣泡。因此,在該球格陣列基板薄膜B及散 熱片a之間的間隙及氣泡必須設法消除以提升產品可靠 度。 為了消除間隙及氣泡,將散熱片基材條片A及球格陣列Please refer to the second figure, a heat sink base strip A includes a plurality of heat sinks a for the sticking process. According to the roll-adhesive method of the preferred embodiment of the present invention, the ball grid array substrate film B corresponds to the heat sink a- 'of the heat sink base material strip A—' The ball grid array substrate film B includes an adhesive layer. Place the ball grid array ^ plate film B with a punching tool [punching tool] and place it on the corresponding position & position [position], so that the heat sink substrate strips of the eighth ^ hot sheet: formed on the adhesive layer At this time, a ball array substrate film B is formed. A gap is formed between the ball, the array substrate film B and the heat sink a, and gas is formed in the gap to form air bubbles. Therefore, the gaps and air bubbles between the ball grid array substrate film B and the heat sink sheet a must be eliminated to improve product reliability. In order to eliminate gaps and bubbles, the heat sink base material strip A and the ball grid array

C:\Logo-5\Fivc Continents\PK7244.ptd 第6頁 447088 五、發明說明(4) 進/報屋黏貼處理。請再參照第三圖所: =㈣散熱片基材條片Αϊ入㈣組200内 紅,該輥輪組2 0 0包含數個輸送輪2〇1、— 下輥輪203。輸送輪201供散熱片基材條輕二2 ^ 輥輪202及下輥輪203之間進行埶輥壓,里的 片A之散熱片a與球格陣列基板薄膜B黏貼,且該上輥輪2〇2 =輥輪203之表面具有彈性,使得球格陣列基板薄^不 易被上輥輪202及下輥輪20 3之表面刮傷。當散熱片基材 條片A通過上輥輪202及下輥輪2〇3時,該上黯給2〇2月下 輥輪203由散熱片基材條片a—端輥麗至另一端,該上輥輪 20 2及下輥輪203逐漸擠壓消除殘存在球袼陣列基板薄膜^ 及散熱片a之間的間隙及氣泡。因此,利用本發明輥壓黏 貼方法之球格陣列半導體元件100包含一基板、一黏膠 及一散熱片。該基板、黏膠層及散熱片相互堆疊,使得^… 黏膠層位於基板及散熱片之間,並利用黏膠層相互黏貼形 成半導體元件100。 將散熱片基材條片A及球格陣列基板薄膜B之間進行輥壓 黏貼處理後’為了提升散熱片a及球格陣列基板薄膜b之間 的黏貼可賴度’將該散熱片基材條片A及球格陣列基板薄 膜B進行第一次的固化處理,其為先行固化處理,將該散 熱片基材條片A置於重壓板〔press head〕下進行先行固 、」 化處理。為了避免重壓板壓傷球格陣列基板薄膜B,在該 _ 重壓板上設有彈性塊以避免直接接觸該球格陣列基板薄膜 B °C: \ Logo-5 \ Fivc Continents \ PK7244.ptd Page 6 447088 V. Description of the invention (4) Adhesive processing in / into the house. Please refer to the third figure again: = ㈣The heat sink substrate strip Aϊ into the 红 group 200 is red, and the roller group 2 0 0 includes a plurality of conveying wheels 201,-the lower roller 203. Conveying wheel 201 is used for heat sink fin substrate strip 2 ^ roller 202 and lower roller 203 for roll pressing, the heat sink a of the sheet A is adhered to the ball grid array substrate film B, and the upper roller 202 = The surface of the roller 203 has elasticity, so that the ball grid array substrate is thin and is not easily scratched by the surfaces of the upper roller 202 and the lower roller 203. When the fin substrate strip A passes through the upper roller 202 and the lower roller 203, the upper roll is passed to the bottom roller 203 in February from the fin substrate strip a to the other end. The upper roller 202 and the lower roller 203 are gradually pressed to eliminate the gaps and air bubbles remaining between the ball array substrate film ^ and the heat sink a. Therefore, the ball grid array semiconductor device 100 using the roller bonding method of the present invention includes a substrate, an adhesive, and a heat sink. The substrate, the adhesive layer and the heat sink are stacked on each other, so that the ^ ... adhesive layer is located between the substrate and the heat sink, and the semiconductor element 100 is formed by using the adhesive layer to adhere to each other. After the roll-adhesive treatment is performed between the heat sink substrate strip A and the ball grid array substrate film B, 'in order to improve the adhesion between the heat sink a and the ball grid array substrate film b', the heat sink substrate The strip A and the ball grid array substrate film B are subjected to the first curing treatment, which is a pre-curing treatment. The heat sink base material strip A is placed under a press head to perform pre-curing treatment. In order to prevent the ball grid array substrate film B from being crushed by the heavy plate, an elastic block is provided on the plate to avoid direct contact with the ball grid array substrate film B °

C:\Logo-5\Five Continents\PK7244.ptd 第7頁 447088 五、發明說明(5) 將散熱片基材條片A及球格陣列基板薄膜B之間進行先行 固化處理後,為了進一步提升散熱片a及球格陣列基板薄 膜B之間>的黏貼可賴度,再將該散熱片基材條片A及球格陣 列基板薄膜B進行第二次的固化處理.,其為後續固化處 理,將該散熱片基材條片人置於固化處理烤箱〔curing oven〕内進行後續固化處理。 本發明之黏貼方法相較於習用之黏貼方法,本發明利用 親壓方法消除在球格峥列基板薄膜B及散熱片^之間的間隙 及氣泡。C: \ Logo-5 \ Five Continents \ PK7244.ptd Page 7 447088 V. Description of the invention (5) After the heat treatment substrate strip A and the ball grid array substrate film B are cured in advance, in order to further improve The adhesion reliability between the heat sink a and the ball grid array substrate film B is>, and then the heat sink substrate strip A and the ball grid array substrate film B are subjected to a second curing process, which is a subsequent curing. For processing, the heat sink base sheet is placed in a curing oven for subsequent curing treatment. Compared with the conventional sticking method, the sticking method of the present invention eliminates the gaps and air bubbles between the ball grid array substrate film B and the heat sink ^ by means of an affinity method.

(J 雖然本發明已以前述較佳實施例揭示,然其並非用以限 疋本發明任何熟習此技藝者’在不脫離本發明之精神和 範圍内’當可作各種之更動與修改,因此本發明之保護寧 圍當視後附之申請專利範圍所界定者為準(J Although the present invention has been disclosed in the aforementioned preferred embodiments, it is not intended to limit any person skilled in the art with this art 'without departing from the spirit and scope of the present invention' as various changes and modifications can be made, therefore The protection of this invention shall be determined by the scope of the attached patent application.

C:\Logo-5\Five Continents\PK7244.ptd 第8頁 & 447088 圖式簡單說明 【圖式說明】C: \ Logo-5 \ Five Continents \ PK7244.ptd Page 8 & 447088 Schematic description [Schematic description]

C:\Logo-5\Fi ve Con t i nen t s\PK7244.p td 第9頁 第1圖:習用美國專利第5, 766, 740號及第5,798, 171號 之球格陣列半導體元件之局部上視圖; 第2圖:本發明較佳實施例球格陣列半導體元件在黏貼 製程前之立體分解示意圖;及 ’ 第3圖:本發明較佳實施似姑 製程時之示意圖。 車列半導體元件在黏貼C: \ Logo-5 \ Five Continen ts \ PK7244.p td Page 9 Figure 1: Part of the conventional ball grid array semiconductor element of US Patent Nos. 5,766,740 and 5,798,171 View; Figure 2: Schematic three-dimensional exploded view of a ball grid array semiconductor device before the bonding process according to a preferred embodiment of the present invention; and 'Figure 3: Schematic view of the preferred embodiment of the present invention when a similar manufacturing process is performed. Automotive semiconductor components are pasting

Claims (1)

447088 六、申請專利範圍 1、一種球袼陣列基杨M #卞n,寻膜及散熱片之輥壓 壓黏貼方法包含:將球格陣列基板薄膜對應於散熱片基材條 貼方法,輕 片之散熱片 將球格陣 將該散熱 當該散熱 進行輥壓 板薄膜之 2、 依申請專 之輥壓黏 片基材條 將該散熱 固化處理 3、 依申請專 之輥壓黏 板下進行 固化處理 4、 依申請專 之輥壓黏 該重壓板 陣列基板 5、 依申請專 之輥壓黏 列基板薄膜 片基材條片 片基材條片 黏貼時,在 間的間隙及 利範圍第1 貼方法,其 片及球格陣 片基材條片 置於散熱片上;及 利用輥輪組進行輥壓 及球格陣列基板薄膜 該散熱片基材條片及 氣泡被擠麼消除。 項之球格陣列基板薄 中在進行輥壓黏貼後 列基板薄膜之間的黏 及球格陣列基板薄膜 利範圍 貼方法 先行固 烤箱内 利範圍 貼方法 直接接 薄膜。 利範圍 貼方法 第2項之球格陣列基板薄 ’其中將該散熱>ί基材條 化處理;再將該散熱片基 進行後續固化處理。 第3項之球格陣列 ’其中該重壓板包含一彈 觸該球格陣列基板薄膜而 進入輥輪組 球袼陣列基 膜及散熱片 ’為了散熱 貼可賴度, 進行兩次的 膜及散熱片 片置於重壓 材條片置於 ϋ447088 6. Application Patent Scope 1. A ball-and-roller array substrate Yang M # 卞 n, a method of rolling and pasting film-seeking and heat-radiating fins includes: a method of applying a ball-grid array substrate film to a heat-radiating fin substrate strip, light sheet The heat radiation sheet will use the ball grid array to release the heat when the heat is applied to the rolling plate film. 2. The heat radiation curing treatment is carried out according to the application of the roll adhesive sheet substrate strip. 3. The heat treatment is performed under the roll adhesive board according to the application. 4. Roll-bond the heavy plate array substrate according to the application. 5. Roll-bond the substrate according to the application. The film, substrate, strip, substrate, and substrate. The sheet and the ball grid array substrate strips are placed on the heat sink; and the roller set is used for rolling and the ball grid array substrate film. The heat sink substrate strips and bubbles are eliminated by being squeezed. The ball grid array substrate is thin and the adhesion between the rows of substrate films after the roll-adhesion and the ball grid array substrate film is beneficial. The sticking method is first fixed in the oven. The sticking method is directly connected to the film. Advantageous range of pasting method The ball grid array substrate of item 2 is thin ′ wherein the heat dissipation substrate is treated in a stripe manner; the heat sink substrate is subsequently cured. The ball grid array of item 3, wherein the heavy plate includes a film of the ball grid array substrate that enters the roller base ball array array film and heat sink. The film and heat dissipation are performed twice for the reliability of the heat sink. Sheets are placed on the heavy-duty sheet 基板薄膜及散熱片 性片以避免 壓傷該球格 第1項之球格陣列 ’其中該輥輪組包含一上輥輪及一下 基板薄膜及散熱片Substrate film and heat radiating sheet to avoid crushing the ball grid The ball grid array of item 1 ′ wherein the roller set includes an upper roller and a lower substrate film and heat radiating sheet 447 088 六、申請專利範圍 輥輪,在該上報輪及下輥輪之間供散熱片基材條片通 過以進行輥壓黏貼。 6、依申請專利範圍第1項之球格陣列基板薄臈及散熱月447 088 6. Scope of patent application Roller, between the report wheel and the lower roller, the strip of heat sink base material is passed for roll bonding. 6. According to the first patent application scope of the ball grid array substrate thin and cooling month 之輥壓黏貼方法’丨中該輥輪組為高溫的輥輪組。 依申請專利範圍第1.項之抹 之輥壓黏貼方法,其中該'袼陣列基板薄膜及散熱片 輪組刮傷球格陣列基板薄膜輪”且具有彈性以避免該親In the roll-adhesive method ', the roller set is a high-temperature roller set. The method of rolling and pasting according to item 1. of the patent application scope, wherein the "袼 array substrate film and heat sink wheel group scratches the ball grid array substrate film wheel" and has elasticity to avoid the pro
TW89108975A 2000-05-10 2000-05-10 Rolling attachment method for thin film of ball grid array substrate and heat sink TW447088B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI714407B (en) * 2019-12-27 2020-12-21 旭暉應用材料股份有限公司 Sheet film structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI714407B (en) * 2019-12-27 2020-12-21 旭暉應用材料股份有限公司 Sheet film structure

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